Air sensitive sample protection device

Abstract

The invention discloses an air sensitive sample protection device which comprises a base, a seat cover, a sample seat, a sealing assembly and a locking mechanism, the sample seat is arranged on the base and is used for fixing a sample to be detected; the seat cover is arranged on the base in an openable manner and covers the sample seat when the seat cover is closed on the base; the sealing assembly is used for sealing between the seat cover and the base when the seat cover is closed on the base; and the locking mechanism is used for locking the seat cover and the base when the seat cover is closed on the base. A to-be-tested sample can be fixed through the sample seat on the base, then the seat cover is closed on the base, the to-be-tested sample on the sample seat is sealed, the to-be-tested sample is isolated from external air, the air tightness of the seat cover when the seat cover is closed on the base can be ensured through the sealing assembly, and then the seat cover and the base are locked through the locking mechanism. In the process of transferring the to-be-detected sample, the to-be-detected sample can be prevented from being damaged to different degrees due to long-term exposure in the air.

Description

Technical Field

[0001] The invention relates to the technical field of scanning electron microscopes, and in particular to an air-sensitive sample protection device. Background Art

[0002] Scanning electron microscope is an instrument for observing and analyzing the morphology, structure and composition of sample micro-areas. It is widely used in disciplines such as materials science, physics, chemistry, biology and geology. The test of scanning electron microscope mainly includes three steps: sample preparation, sample transfer and electron microscope analysis. Among them, sample transfer is the process of transferring the sample to be tested to the sample chamber in the scanning electron microscope. Generally, this process will expose the sample to the air environment for a long time. For air-sensitive samples, such as materials that are easily oxidized and samples that are easily deliquesced, they will inevitably be damaged to varying degrees during the transfer process, and even cannot obtain real and effective test results. Summary of the invention

[0003] In view of this, the present invention provides an air-sensitive sample protection device, which can protect the sample to be tested in the device. During the process of transferring the sample to be tested, the sample to be tested can be prevented from being exposed to the air for a long time, and the sample to be tested can be prevented from being damaged to varying degrees, thereby ensuring that the test result obtained for the sample to be tested is real and effective.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] An air-sensitive sample protection device comprises: a base, a base cover, a sample holder, a sealing assembly and a locking mechanism;

[0006] The sample holder is arranged on the base and is used to fix the sample to be tested;

[0007] The seat cover is openably disposed on the base, and covers the sample seat when closed on the base;

[0008] The sealing assembly is used to seal between the seat cover and the base when the seat cover is closed on the base;

[0009] The locking mechanism is used to lock the seat cover and the base when the seat cover is closed on the base.

[0010] Preferably, the seat cover can be flipped and arranged at the top end of the first side wall of the base, and covers the sample seat when closed on the top of the base;

[0011] The locking mechanism includes a locking mechanism;

[0012] The locking mechanism is used to lock the second side wall of the seat cover and the second side wall of the base when the seat cover is closed on the top of the base; wherein the second side wall of the base is opposite to the first side wall and on the same side as the second side wall of the seat cover.

[0013] Preferably, the locking mechanism comprises: a first locking buckle, a second locking buckle and a first elastic member;

[0014] The middle part of the first lock buckle is rotatably disposed on the second side wall of the base, and has a first lock hook on its upper part;

[0015] The second lock buckle is arranged at the bottom end of the second side wall of the seat cover, and has a second lock hook at the lower part thereof, and can hook the first lock hook when the seat cover is closed on the top of the base;

[0016] One end of the first elastic member is arranged on the second side wall of the base, and the other end is connected to the lower part of the first lock buckle and is used to provide elastic tension to the lower part of the first lock buckle so that the first lock hook is hooked to the second lock hook.

[0017] Preferably, it also includes an unlocking mechanism;

[0018] The unlocking mechanism is disposed on the second side wall of the base, and is used for causing the first lock buckle to rotate when the second lock hook hooks the first lock hook, so that the first lock hook is separated from the second lock hook.

[0019] Preferably, a baffle is provided on the upper portion of the first lock buckle;

[0020] The unlocking mechanism comprises: a first fixed block and a first sliding rod;

[0021] The first fixing block is disposed on the second side wall of the base and is located on one side of the baffle of the first lock;

[0022] The first sliding rod can slide through the first fixing block and is used to push the baffle to make the first locking buckle rotate away from the second locking hook.

[0023] Preferably, it also includes a cover opening mechanism;

[0024] The cover opening mechanism is at least arranged on the third side wall of the base and is used for automatically opening the seat cover; wherein the third side wall of the base is distributed between the first side wall and the second side wall.

[0025] Preferably, the cover opening mechanism comprises: a second fixed block, a second sliding rod, a sliding rod base and a second elastic member;

[0026] The second fixing block is arranged on the third side wall of the seat cover; wherein the third side wall of the seat cover is distributed between the first side wall and the second side wall;

[0027] The first part of the slide bar base is rotatably disposed on the third side wall of the base;

[0028] The second sliding bar can slide through the second fixing block and be fixed to the first part of the sliding bar base;

[0029] One end of the second elastic member is arranged on the third side wall of the base, and the other end is connected to the second part of the slide rod base, which is used to provide elastic tension for the second part of the slide rod base so that the second slide rod can slide relative to the second fixed block and open the seat cover.

[0030] Preferably, a sealing ring installation groove is provided on the top of the base and is distributed around the sample holder;

[0031] The sealing assembly comprises a sealing ring;

[0032] The sealing ring is installed in the sealing ring installation groove and protrudes from the top of the base, and is used for abutting and matching with the bottom of the seat cover when the seat cover is closed on the top of the base.

[0033] Preferably, a receiving groove is provided on the top of the base;

[0034] The sample holder is arranged in the receiving groove of the base;

[0035] The seat cover covers the receiving groove when closed on the top of the base.

[0036] Preferably, it also includes a fixing seat;

[0037] The fixing seat is arranged at the bottom of the base and is provided with an assembly fixing structure for cooperating with the sample base of the scanning electron microscope sample chamber.

[0038] It can be seen from the above technical scheme that the air-sensitive sample protection device provided by the present invention can first fix the sample to be tested by the sample seat on the base, and then close the seat cover on the base to seal the sample to be tested on the sample seat, so that the sample to be tested on the sample seat is isolated from the outside air, and the airtightness of the seat cover when closed to the base can be ensured by the sealing component, so that the sample to be tested on the sample seat is better isolated from the outside air, and then the seat cover and the base are locked by the locking mechanism, so that the seat cover is closed and locked, so that the sample to be tested is protected in the device, and in the process of transferring the sample to be tested, the sample to be tested can be prevented from being exposed to the air for a long time, and the sample to be tested can be prevented from being damaged to varying degrees, thereby ensuring that the test effect obtained by the sample to be tested is real and effective. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0040] Figure 1 A schematic diagram of the structure of an air-sensitive sample protection device provided in an embodiment of the present invention;

[0041] Figure 2 Another schematic diagram of the structure of the air-sensitive sample protection device provided in an embodiment of the present invention;

[0042] Figure 3 A structural front view of an air-sensitive sample protection device provided by an embodiment of the present invention;

[0043] Figure 4 A structural side view of an air-sensitive sample protection device provided by an embodiment of the present invention;

[0044] Figure 5 Another structural side view of the air-sensitive sample protection device provided by an embodiment of the present invention;

[0045] Figure 6 Another structural side view of the air-sensitive sample protection device provided by an embodiment of the present invention;

[0046] Figure 7 An exploded view of the structure of the air-sensitive sample protection device provided in an embodiment of the present invention;

[0047] Figure 8 A schematic diagram of opening the air-sensitive sample protection device provided in an embodiment of the present invention;

[0048] Fig. 9 Another schematic diagram of opening the air-sensitive sample protection device provided by an embodiment of the present invention;

[0049] Fig.10 An open side view of an air-sensitive sample protection device provided by an embodiment of the present invention;

[0050] Fig.11 An open front view of the air-sensitive sample protection device provided in an embodiment of the present invention.

[0051] Among them, 1 is a base, 1-1 is a sealing ring installation groove, 1-2 is a receiving groove, 1-3 is a screw hole, 2 is a base cover, 3 is a sample seat, 3-1 is a sample table slot, 4 is a first lock buckle, 4-1 is a first lock hook, 4-2 is a baffle, 5 is a second lock buckle, 5-1 is a second lock hook, 6 is a first fixed block, 7 is a first slide bar, 8 is a second fixed block, 9 is a second slide bar, 10 is a slide bar base, 10-1 is a spring connecting hole, 11 is a sealing ring, 12 is a fixed seat, 12-1 is a dovetail groove, 12-2 is a threaded hole, 13 is a hinge, 14 is an air valve, 15 is a first spring, 16 is a second spring, 17 is a first fixing bolt column, 18 is a first slide bar limiter, 19 is a hook, and 20 is a second fixing bolt column. DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] The air sensitive sample protection device provided by the embodiment of the present invention is as follows: Figure 1 As shown, it includes: a base 1, a base cover 2, a sample holder 3, a sealing assembly and a locking mechanism;

[0054] The sample holder 3 is disposed on the base 1 and is used to fix the sample to be tested;

[0055] The seat cover 2 is openably disposed on the base 1 and covers the sample seat 3 when closed on the base 1;

[0056] The sealing assembly is used to seal between the seat cover 2 and the base 1 when the seat cover 2 is closed on the base 1;

[0057] The locking mechanism is used to lock the seat cover 2 and the base 1 when the seat cover 2 is closed on the base 1 .

[0058] It should be noted that the sample holder 3 can be arranged on the top of the base 1, such as Figure 8 As shown, the top of the sample holder 3 may be provided with a plurality of sample table slots 3-1, which are respectively used to insert the sample tables with the samples to be tested, so that the samples to be tested can be fixed on the sample holder 3; wherein the samples to be tested are the air-sensitive samples to be tested; of course, the sample tables can be designed into various types such as cross-sectional type, surface type and mixed type according to the test requirements;

[0059] The seat cover 2 can be opened and closed on the base 1, that is, the seat cover 2 is arranged on the base 1, and can be opened and closed relative to the base 1; wherein, by opening the seat cover 2, it is convenient to fix the sample to be tested on the sample holder 3 in the manner as described above, and by closing the seat cover 2 to cover the sample holder 3, the sample to be tested fixed on the sample holder 3 is isolated from the external air, so as to avoid the sample to be tested being exposed to the air and affected during the transfer; wherein, the device can be first placed in a device filled with inert gas, such as a glove box, and then the sample stage with the sample to be tested is inserted into the sample stage slot 3-1 of the sample holder 3, and then the upper seat cover 2 is closed and the seat cover 2 and the base 1 are locked by the locking mechanism, so that the sample to be tested in the device is also in an inert gas environment, and then the device carrying the sample to be tested is transferred to the sample chamber of the scanning electron microscope, so that the sample to be tested can be avoided from being exposed to the air during the transfer process; in addition, if Figure 3 As shown, the device may further include an air valve 14, which is disposed through a side wall (such as the right side wall) of the seat cover 2 and is used to adjust the internal and external air pressure of the seat cover 2 when the seat cover 2 is closed on the base 1;

[0060] The sealing component can be arranged on the base 1, and when the seat cover 2 is closed on the base 1, it abuts and cooperates with the seat cover 2, thereby forming a seal between the seat cover 2 and the base 1, so that when the seat cover 2 is closed on the base 1, good airtightness can be achieved, thereby ensuring the airtightness of the seat cover 2 covering the sample holder 3, and ensuring that the sample to be tested is not affected by the ambient air during the transfer process; of course, when the locking mechanism locks the seat cover 2 and the base 1, it will also compact the sealing effect between the seat cover 2 and the base 1.

[0061] The air-sensitive sample protection device provided by the present solution can first fix the sample to be tested through the sample holder 3 on the base 1, and then close the seat cover 2 on the base 1 to seal the sample to be tested on the sample holder 3, so that the sample to be tested on the sample holder 3 is isolated from the outside air, and the airtightness of the seat cover 2 when closed on the base 1 can be ensured by the sealing component, so that the sample to be tested on the sample holder 3 is better isolated from the outside air, and then the seat cover 2 and the base 1 are locked by the locking mechanism, so that the seat cover 2 is closed and locked, so that the sample to be tested is protected in the present device, and in the process of transferring the sample to be tested, the sample to be tested can be prevented from being exposed to the air for a long time, and the sample to be tested can be prevented from being damaged to varying degrees, so as to ensure that the test effect obtained by the sample to be tested is real and effective.

[0062] That is to say, the present solution provides a device for protecting air-sensitive samples, which can effectively protect air-sensitive samples from interference from ambient air and can be used as a sampling device for a scanning electron microscope; wherein, the present device can be first placed in a glove box or other equipment that can achieve an inert atmosphere environment, and then the sample table containing the sample to be tested can be fixed on the sample seat of the present device, and then the seat cover can be closed to the base, and the seat cover and the base can be sealed and locked so that the area around the sample to be tested is filled with inert gas, and then the present device carrying the sample to be tested can be transferred to the sample chamber of the scanning electron microscope, so that the sample to be tested can be protected from the influence of ambient air during the process of transferring the sample to be tested.

[0063] In this scheme, if Figure 8 As shown, the seat cover 2 can be flipped and arranged on the top of the first side wall of the base 1, and covers the sample holder 3 when closed on the top of the base 1;

[0064] The locking mechanism includes a locking mechanism;

[0065] The locking mechanism is used to lock the second side wall of the seat cover 2 and the second side wall of the base 1 when the seat cover 2 is closed on the top of the base 1; wherein the second side wall of the base 1 is distributed opposite to the first side wall and is on the same side as the second side wall of the seat cover 2.

[0066] It should be noted that if Figure 2 As shown, one side of the seat cover 2 can be flipped and set at the top of the first side wall (such as the rear side wall) of the base 1 through a hinge 13, that is, the seat cover 2 can be flipped and set at the top of the first side wall of the base 1 on one side, so that the seat cover 2 is easier to open and close relative to the base 1; wherein, the upper part of the hinge 13 can be set at the bottom end of the first side wall of the seat cover 2, and the lower part can be set at the top end of the first side wall of the base 1, and in order to ensure the stability of the flipping of the seat cover 2, as shown in FIG. Figure 2 As shown, a flip axis can be provided between the bottom end of the first side wall of the seat cover 2 and the top end of the first side wall of the base 1; of course, the seat cover 2 can also adopt other opening and closing methods, for example, the seat cover 2 includes two seat cover monomers, and the two seat cover monomers can be flipped one by one and arranged at the top ends of two opposite side walls of the base 1, so that the two seat cover monomers can be opened and closed in pairs; among them, Figure 8 As shown, the seat cover 2 can adopt a box cover structure, which is convenient for sealing the sample seat 3 and the sample to be tested;

[0067] The locking mechanism adopts a locking mechanism, which is used to lock the second side wall (such as the front side wall) of the seat cover 2 and the second side wall (such as the front side wall) of the base 1 when the seat cover 2 is closed on the top of the base 1. It not only facilitates the rapid locking of the seat cover 2 and the base 1, but also enables the seat cover 2 and the base 1 to obtain a better locking effect.

[0068] Specifically, Figure 3As shown, the locking mechanism includes: a first locking buckle 4, a second locking buckle 5 and a first elastic member; wherein the structures of the above components can refer to Figure 7 As shown;

[0069] The middle part of the first lock buckle 4 is rotatably disposed on the second side wall of the base 1, and the upper part thereof has a first lock hook 4-1, which is flush with the top end of the second side wall of the base 1;

[0070] The second lock buckle 5 is arranged at the bottom end of the second side wall of the seat cover 2, and has a second lock hook 5-1 at the lower part thereof, and can hook the first lock hook 4-1 when the seat cover 2 is closed on the top of the base 1;

[0071] One end of the first elastic member is arranged on the second side wall of the base 1, and the other end is connected to the lower part of the first lock buckle 4, and is used to provide elastic tension to the lower part of the first lock buckle 4 so that the first lock hook 4-1 hooks the second lock hook 5-1.

[0072] It should be noted that the middle part of the first lock buckle 4 can be rotated around the first direction and is arranged on the second side wall of the base 1; wherein the first direction is perpendicular to the second side wall of the base 1, so that the first lock buckle 4 can rotate clockwise and counterclockwise on the second side wall of the base 1, such as Fig.11 As shown, the first lock hook 4-1 of the first lock buckle 4 may be an inverted J-shaped structure, and the hook portion of the first lock hook 4-1 may be distributed obliquely downward and may be flush with the top end of the second side wall of the base 1; Figure 3 As shown, the second lock buckle 5 can be arranged at the bottom end of the second side wall of the seat cover 2; wherein, a threaded hole is opened at the lower part of the second side wall of the seat cover 2 for installing the second lock buckle 5, such as Fig. 9 As shown, the second lock hook 5-1 of the second lock buckle 5 can be a J-shaped structure, and the hook portion of the second lock hook 5-1 can be distributed obliquely upward, and can hook the first lock hook 4-1 when the seat cover 2 is closed on the top of the base 1, so as to achieve locking of the base 1 and the seat cover 2; Figure 3 As shown, one end of the first elastic member can be fixed to the second side wall of the base 1 by the first fixing bolt column 17, and the other end can be hung on the lower part of the first lock buckle 4; wherein, the lower part of the first lock buckle 4 is provided with a through hole for hanging one end of the first elastic member, and the other end of the first elastic member is hung on the first fixing bolt column 17, thereby providing elastic tension for the lower part of the first lock buckle 4. Of course, at this time, the first elastic member is in a stretched state, which makes the first lock hook 4-1 and the second lock hook 5-1 hook tighter, and the locking effect of the base 1 and the seat cover 2 is tighter, so that the device can be airtight; wherein, as Figure 3 As shown, the first elastic member can be a first spring 15, and an elastic strip can also be selected.

[0073] In addition, if Figure 3As shown, when the seat cover 2 is close to closing, the first lock buckle 4 can be manually urged to rotate counterclockwise to allow the second lock hook 5-1 of the second lock buckle 5 to come down, and then when the seat cover 2 is closed, the first lock buckle 4 is elastically reset to rotate clockwise to allow the first lock hook 4-1 of the first lock buckle 4 to hook the second lock hook 5-1 of the second lock buckle 5; of course, unlocking can also be achieved by manually urging the first lock buckle 4 to rotate counterclockwise. In addition, the second side wall of the base 1 is provided with two threaded holes, which are used to install the first fixing bolt column 17 and the first lock buckle 4 respectively.

[0074] That is to say, the first lock buckle 4 serves as a rotatable movable lock hook, and the second lock buckle 5 serves as a fixed lock hook. When the seat cover 2 is closed on the base 1, the seat cover 2 and the base 1 can be conveniently locked by hooking the fixed lock hook of the seat cover 2 with the movable lock hook of the base 1. Moreover, based on the setting of the first elastic member, the locking of the seat cover 2 and the base 1 can also be made tighter, and this locking method is easy to implement and has strong operability.

[0075] Furthermore, the air-sensitive sample protection device provided in the embodiment of the present invention further includes an unlocking mechanism;

[0076] The unlocking mechanism is disposed on the second side wall of the base 1, and is used to cause the first lock buckle 4 to rotate when the second lock hook 5-1 hooks the first lock hook 4-1, so that the first lock hook 4-1 is disengaged from the second lock hook 5-1, that is, the first lock hook 4-1 is no longer hooked on the second lock hook 5-1, thereby unlocking the base cover 2 and the base 1, and thus facilitating the opening of the base cover 2. In other words, in the air-sensitive sample protection device provided by the present solution, the base 1 and the base cover 2 have a locking mechanism and an unlocking mechanism, so that the locking and unlocking designs of the base 1 and the base cover 2 are clearly distinguished.

[0077] Furthermore, if Figure 7 As shown, a baffle 4-2 is provided on the upper part of the first lock buckle 4;

[0078] like Figure 3 As shown, the unlocking mechanism includes: a first fixed block 6 and a first sliding rod 7;

[0079] The first fixing block 6 is disposed on the second side wall of the base 1 and is located on one side of the baffle 4 - 2 of the first lock buckle 4 ;

[0080] The first sliding rod 7 can slide through the first fixing block 6 and is used to push the baffle 4 - 2 to make the first lock buckle 4 rotate away from the second lock hook 5 - 1 .

[0081] It should be noted that if Figure 7 As shown, the upper part of the first lock buckle 4 has a first lock hook 4-1 and a baffle 4-2; Figure 3As shown, the first fixed block 6 can be flush with the top end of the second side wall of the base 1, and can be located on the right side of the baffle 4-2 of the first lock buckle 4, and is provided with a first through hole for the first slide bar 7 to slide through, and the first through hole can pass through the left and right side walls of the first fixed block 6; the first slide bar 7 passes through the first through hole of the first fixed block 6, and can also slide along the first through hole of the first fixed block 6, and is used to push (such as pushing to the left) the baffle 4-2 to make the first lock buckle 4 elastically rotate counterclockwise, so that the first lock hook 4-1 of the first lock buckle 4 is disengaged from the second lock hook 5-1 of the second lock buckle 5; that is, when it is necessary to open the seat cover 2 of the device, the first slide bar 7 can be pushed to the left, so that the first slide bar 7 drives the first lock buckle 4 to rotate elastically counterclockwise (away from the rotation of the second lock hook 5-1), so that the first lock hook 4-1 is disengaged from the second lock hook 5-1, that is, the first lock hook 4-1 is unhooked, and the seat cover 2 and the base 1 are unlocked; of course, the through hole of the first fixed block 6 can play a role of sliding guide for the first slide bar 7;

[0082] In addition, if Figure 7 As shown, the first slide bar 7 is provided with a first slide bar limiter 18, which can prevent the first slide bar 7 from falling off to the right after the first slide bar 7 passes through the first fixed block 6, and the first slide bar 7 can be a variable diameter slide bar, for example, the first slide bar 7 is thin on the left and thick on the right, so that after the first slide bar 7 passes through the first fixed block 6, the first slide bar 7 can be prevented from falling off to the left; wherein, the first slide bar limiter 18 can adopt a limiting ring, and is sleeved on the first slide bar 7, and can be close to the left end of the first slide bar 7.

[0083] That is to say, the unlocking mechanism adopts a sliding rod to push the unlocking method to push the upper part of the first lock buckle 4 to rotate away from the second lock hook 5-1, so that the first lock hook 4-1 is disengaged from the second lock hook 5-1. This can make the disengagement of the first lock hook 4-1 and the second lock hook 5-1 more convenient, and this unlocking method is easy to implement and has strong operability.

[0084] In this solution, the air-sensitive sample protection device provided in the embodiment of the present invention further includes a cover opening mechanism;

[0085] The cover opening mechanism is at least arranged on the third side wall of the base 1 and is used to automatically open the seat cover 2; wherein the third side wall of the base 1 is distributed between the first side wall and the second side wall. Figure 1 As shown, a part of the cover opening mechanism can be arranged on the third side wall of the base 1 (which can be the left side wall), and another part can be arranged on the third side wall of the seat cover 2 (which can be the left side wall), and is used to automatically open the seat cover 2 so that the seat cover 2 reaches the position shown in FIG. Fig.10In the open state shown, the top of the base 1 is completely open, which is convenient for testing the sample to be tested. After the device is transferred to the sample compartment of the scanning electron microscope, the cover 2 can be completely opened through the cover opening mechanism. Of course, the cover opening mechanism can automatically open the cover 2 only when the base 1 and the cover 2 are in the unlocked state.

[0086] Specifically, Figure 4 As shown, the cover opening mechanism includes: a second fixed block 8, a second slide bar 9, a slide bar base 10 and a second elastic member; wherein the structure of the above components can refer to Figure 7 As shown;

[0087] The second fixing block 8 is disposed on the third side wall of the seat cover 2; wherein the third side wall of the seat cover 2 is distributed between the first side wall and the second side wall;

[0088] The first part of the slide bar base 10 is rotatably disposed on the third side wall of the base 1;

[0089] The second slide bar 9 can slide through the second fixing block 8 and be fixed to the first part of the slide bar base 10;

[0090] One end of the second elastic member is arranged on the third side wall of the base 1, and the other end is connected to the second part of the slide rod base 10, which is used to provide elastic tension for the second part of the slide rod base 10 so that the second slide rod 9 can slide relative to the second fixed block 8 and open the seat cover 2.

[0091] It should be noted that if Figure 2 As shown, the second fixing block 8 can be fixed to the third side wall of the seat cover 2 by screws. As described above, the third side wall of the seat cover 2 can be distributed between the first side wall and the second side wall, and the seat cover 2 can be a square box cover structure, and the second fixing block 8 is provided with a second through hole for the second slide bar 9 to slide through. Figure 4 As shown, the second fixing block 8 can be arranged on the third side wall of the seat cover 2 tilted upward, and the second through hole can penetrate the upper wall and the lower wall of the second fixing block 8; the second sliding rod 9 can slide along the second through hole of the second fixing block 8;

[0092] The first part (such as the upper part) of the slide bar base 10 can be rotatably arranged on the third side wall of the base 1 around the second direction; wherein the second direction is perpendicular to the third side wall of the base 1, and the first part of the slide bar base 10 can be rotatably arranged on the third side wall of the base 1 by means of bolts, such as Figure 7 As shown, the slide bar base 10 may be an L-shaped base, the long portion (i.e., the second portion) of the L-shaped base is parallel to the second slide bar 9, and a through hole is provided at the end of the long portion of the L-shaped base for hanging one end of the second elastic member;

[0093] like Figure 4As shown, one end of the second elastic member can be set on the third side wall of the base 1 through the second bolt column 20, and the other end is connected to the second part (such as the lower part) of the slide bar base 10, which is used to provide elastic tension for the second part of the slide bar base 10. Of course, the second elastic member is in a stretched state at this time, so that the second slide bar 9 can slide relative to the second fixed block 8 and open the seat cover 2, that is, the lower end of the second slide bar 9 will slide relative to the second fixed block 8 based on the elastic tension, so that the second slide bar 9 can move clockwise around the first part of the slide bar base 10. The second locking member 4-1 is rotated to prop up the seat cover 2 in the process of sliding relative to the second fixing block 8. In this way, as long as the base 1 and the seat cover 2 are unlocked, the second sliding rod 9 will automatically prop up the seat cover 2, so that the base 1 and the seat cover 2 can be automatically opened when they are unlocked; that is, when the hooked first locking hook 4-1 and the second locking hook 5-1 are disengaged, the pulling force of the second elastic member obliquely pulls the lower end of the sliding rod base 10, so that the second sliding rod 9 slides in the second through hole (sliding hole) of the second fixing block 8, so that the seat cover 2 is fully opened; in addition, Figure 2 As shown, the second elastic member can be a second spring 16 or an elastic strip.

[0094] That is to say, the cover opening mechanism adopts an elastic support rod structure, so that the cover opening mechanism has a tendency to automatically open the seat cover 2. As long as the base 1 and the seat cover 2 are unlocked, the cover opening mechanism will automatically open the seat cover 2 to a certain opening, which makes it more convenient to open the seat cover 2. Moreover, this cover opening method is easy to implement and has strong operability. Of course, the number of the cover opening mechanisms can also be two, and they are respectively distributed on the third side wall and the fourth side wall of the device.

[0095] Furthermore, if Figure 8 As shown, a sealing ring installation groove 1-1 is provided on the top of the base 1 and is distributed around the sample holder 3;

[0096] like Figure 7 As shown, the sealing assembly includes a sealing ring 11;

[0097] The sealing ring 11 is installed in the sealing ring installation groove 1-1 and protrudes from the top of the base 1, and is used to abut and cooperate with the bottom of the seat cover 2 when the seat cover 2 is closed on the top of the base 1. That is, when the seat cover 2 is closed on the top of the base 1, the sealing ring 11 is abutted and installed between the bottom of the seat cover 2 and the top of the base 1, so that when the seat cover 2 is closed on the base 1, a good sealing performance can be achieved, ensuring that the sample to be tested is not affected by the ambient air during the transfer process, and the setting of the sealing ring installation groove 1-1 can also facilitate the positioning and rapid installation of the sealing ring 11; in addition, as mentioned above, when the locking mechanism locks the seat cover 2 and the base 1, it will also compress the sealing ring 11 between the seat cover 2 and the base 1, so that the sealing between the seat cover 2 and the base 1 can be tighter; of course, the sealing component can also use a sealing strip.

[0098] Furthermore, if Figure 7 As shown, a receiving groove 1-2 is provided on the top of the base 1;

[0099] like Figure 8 As shown, the sample holder 3 is disposed in the receiving groove 1-2 of the base 1;

[0100] The base cover 2 can cover the receiving groove 1-2 when it is closed on the top of the base 1. The receiving groove 1-2 is actually equivalent to the sample holder receiving groove, which is used to locate and install the sample holder 3. Figure 7 As shown, the sample holder 3 can be a disc-shaped structure, the receiving groove 1-2 can be a box-shaped receiving groove, and the top of the base 1 is provided with the receiving groove 1-2, and the seat cover 2 is also convenient for better covering the sample holder 3 when closed, that is, convenient for better covering the sample to be tested on the sample holder 3. In addition, as Figure 8 As shown, the sealing ring installation groove 1-1 is distributed around the groove opening of the accommodating groove 1-2.

[0101] In this scheme, if Figure 1 As shown, the air-sensitive sample protection device provided in the embodiment of the present invention further includes a fixing seat 12;

[0102] The fixing seat 12 is arranged at the bottom of the base 1 and is provided with an assembly fixing structure for cooperating with the sample base of the scanning electron microscope sample chamber. Figure 3 As shown, the assembly fixing structure of the fixing seat 12 can be a dovetail groove 12-1 opened at the bottom of the fixing seat 12. In this way, it is convenient for the fixing seat 12 of the present device to be clamped on the sample base of the sample chamber, making it more convenient for the present device to be fixed on the sample base of the scanning electron microscope sample chamber; of course, the sample base also has a structure for clamping and matching with the dovetail groove 12-1 of the fixing seat 12, such as a dovetail block structure.

[0103] In addition, if Figure 5 or Figure 6 As shown, screw holes 1-3 or hooks 19 can be provided on the fourth side wall (such as the right side wall) of the base 1 of the device for screwing or clamping with injection rods of different models of scanning electron microscopes, thereby facilitating the device to pass through the exchange chamber and enter the sample compartment of the scanning electron microscope.

[0104] In addition, the device containing the sample to be tested is sent into the sample chamber of the scanning electron microscope through the large hatch or exchange chamber of the scanning electron microscope. After the sample chamber is evacuated, the sample base in the sample chamber of the scanning electron microscope is moved by operating the scanning electron microscope software, so that the first sliding bar located on the second side wall of the device is pressed against the chamber wall of the sample chamber, and then the first sliding bar pushes the baffle to cause the first lock to rotate counterclockwise, thereby unlocking the base and the seat cover, thereby facilitating the opening mechanism to fully open the seat cover.

[0105] In summary, the present solution provides a device for protecting air-sensitive samples, which can be used as a sampling device for a scanning electron microscope; wherein, the present device can be first placed in a glove box or other equipment that can achieve an inert atmosphere environment, and then the sample stage containing the sample to be tested is fixed on the sample holder in the present device, and then the base and the seat cover of the present device are closed and locked, so that the interior of the present device is filled with inert gas, and then the present device carrying the sample is transferred to the sample chamber of the scanning electron microscope, so that the sample to be tested is protected from the influence of ambient air during the transfer process.

[0106] In addition, the raw materials of this device are mainly conventional materials such as aluminum and copper, which have low costs; it does not require particularly high-precision processing equipment and is easy to manufacture; it does not require hardware and software upgrades to the scanning electron microscope, and the use process is simple and convenient; it has a wide range of applications and is highly compatible with scanning electron microscopes of different manufacturers / models.

[0107] Among them, the seat cover, base, sample seat, slide rod, fixed seat and other components of the device can be made of metal aluminum or copper. The length and width of the device can be 20-80mm or larger, the height can be 20-80mm or larger, and the number of sample seat jacks can be 1-9.

[0108] The fixing seat is fixed to the bottom of the base and the sample seat is fixed to the inner bottom surface of the base by screws, the seat cover is hinged to the base (including the sealing ring) by hinges, the J-shaped lock (i.e., the first lock), the first bolt column, and the first fixing block are fixed to the positive side of the device by screws, and the sliding rod base and the second fixing block are fixed to the adjacent outer side of the device by screws. Subsequently, the sample is pasted on the sample stage under the protective atmosphere of the glove box, and the sample stage is inserted into the jack of the sample seat, the seat cover is covered on the base, and the first sliding rod on the positive side of the base is pushed so that the two J-shaped locks (i.e., the dividing rods) on the positive side of the device are locked. The J-shaped lock hooks (respectively the first lock buckle and the second lock buckle) are hooked together; at this time, the device has been assembled, and the sample is in a protective atmosphere environment in the device. Then the assembled device with the sample is taken out of the glove box, sent into the sample chamber of the scanning electron microscope, the sample chamber door is closed, and the vacuum operation is started. The sample base in the scanning electron microscope sample chamber is moved by operating the scanning electron microscope software so that the first sliding bar located on the front side of the device is against the chamber wall of the electron microscope sample chamber to unlock and fully open the seat cover. At this point, the sampling protection process of air-sensitive samples has been completed.

[0109] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0110] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An air-sensitive sample protection device, characterized in that: include: A base (1), a base cover (2), a sample holder (3), a sealing assembly and a locking mechanism; The sample holder (3) is arranged on the base (1) and is used to fix the sample to be tested; The seat cover (2) is openably disposed on the base (1), and covers the sample holder (3) when closed on the base (1); The sealing assembly is used to seal between the seat cover (2) and the base (1) when the seat cover (2) is closed on the base (1); The locking mechanism is used to lock the seat cover (2) and the base (1) when the seat cover (2) is closed on the base (1).

2. The air-sensitive sample protection device according to claim 1, characterized in that: The seat cover (2) can be flipped and arranged on the top of the first side wall of the base (1), and covers the sample holder (3) when closed on the top of the base (1); The locking mechanism includes a locking mechanism; The locking mechanism is used to lock the second side wall of the seat cover (2) and the second side wall of the base (1) when the seat cover (2) is closed on the top of the base (1); wherein the second side wall of the base (1) is opposite to the first side wall and is on the same side as the second side wall of the seat cover (2).

3. The air-sensitive sample protection device according to claim 2, characterized in that: The locking mechanism comprises: a first locking buckle (4), a second locking buckle (5) and a first elastic member; The middle part of the first lock buckle (4) is rotatably arranged on the second side wall of the base (1), and the upper part thereof is provided with a first lock hook (4-1); The second lock buckle (5) is arranged at the bottom end of the second side wall of the seat cover (2), and has a second lock hook (5-1) at its lower part, and can hook the first lock hook (4-1) when the seat cover (2) is closed on the top of the base (1); One end of the first elastic member is arranged on the second side wall of the base (1), and the other end is connected to the lower part of the first lock buckle (4), and is used to provide elastic tension to the lower part of the first lock buckle (4) so ​​that the first lock hook (4-1) is hooked tightly to the second lock hook (5-1).

4. The air-sensitive sample protection device according to claim 3, characterized in that: It also includes an unlocking mechanism; The unlocking mechanism is arranged on the second side wall of the base (1) and is used to cause the first lock buckle (4) to rotate when the second lock hook (5-1) hooks the first lock hook (4-1), so as to make the first lock hook (4-1) disengage from the second lock hook (5-1).

5. The air-sensitive sample protection device according to claim 4, characterized in that: A baffle (4-2) is provided on the upper part of the first lock buckle (4); The unlocking mechanism comprises: a first fixed block (6) and a first sliding rod (7); The first fixing block (6) is arranged on the second side wall of the base (1) and is located on one side of the baffle (4-2) of the first locking buckle (4); The first sliding rod (7) can slide through the first fixing block (6) and is used to push the baffle (4-2) to cause the first locking buckle (4) to rotate away from the second locking hook (5-1).

6. The air-sensitive sample protection device according to claim 4, characterized in that: Also includes a cover opening mechanism; The cover opening mechanism is at least arranged on the third side wall of the base (1) and is used to automatically open the seat cover (2); wherein the third side wall of the base (1) is distributed between the first side wall and the second side wall.

7. The air-sensitive sample protection device according to claim 6, characterized in that: The cover opening mechanism comprises: a second fixed block (8), a second sliding rod (9), a sliding rod base (10) and a second elastic member; The second fixing block (8) is arranged on the third side wall of the seat cover (2); wherein the third side wall of the seat cover (2) is distributed between the first side wall and the second side wall; The first part of the slide rod base (10) is rotatably arranged on the third side wall of the base (1); The second sliding rod (9) can slide through the second fixing block (8) and is fixed to the first part of the sliding rod base (10); One end of the second elastic member is arranged on the third side wall of the base (1), and the other end is connected to the second part of the slide rod base (10), so as to provide elastic tension to the second part of the slide rod base (10), so that the second slide rod (9) can slide relative to the second fixed block (8) and open the seat cover (2).

8. The air-sensitive sample protection device according to claim 2, characterized in that: A sealing ring installation groove (1-1) is provided on the top of the base (1) and is distributed around the sample holder (3); The sealing assembly comprises a sealing ring (11); The sealing ring (11) is installed in the sealing ring installation groove (1-1) and protrudes from the top of the base (1), and is used to abut and cooperate with the bottom of the seat cover (2) when the seat cover (2) is closed on the top of the base (1).

9. The air-sensitive sample protection device according to claim 2, characterized in that: The top of the base (1) is provided with a receiving groove (1-2); The sample holder (3) is arranged in the receiving groove (1-2) of the base (1); The seat cover (2) covers the receiving groove (1-2) when closed on the top of the base (1).

10. The air-sensitive sample protection device according to claim 1, characterized in that: Also includes a fixing seat (12); The fixing seat (12) is arranged at the bottom of the base (1) and is provided with an assembly fixing structure for cooperating with a sample base of a scanning electron microscope sample chamber.

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