Cutting fluid and preparation method thereof

Abstract

The invention provides a cutting fluid and a preparation method thereof. The cutting fluid comprises the following components in parts by mass: 1-2 parts of a thickening agent, 0.5-2 parts of a bacteriostatic agent, 10-25 parts of a surfactant, 5-10 parts of a wetting agent, 1-2 parts of a defoaming agent, 1-3 parts of a dispersing agent and 56-81.5 parts of water. The cutting fluid provided by the invention can keep excellent cutting performance in a long-term circulation process, and the surface of a cut product is uniform.

Description

Technical Field

[0001] The invention relates to a cutting fluid and a preparation method thereof, belonging to the field of semiconductors. Background Art

[0002] In modern industrial manufacturing, especially in the cutting process of single crystal silicon wafers, the selection and use of cutting fluid has an important impact on cutting efficiency and finished product quality. Cutting fluid can not only provide necessary cooling and lubrication, but also play a role in cleaning the debris and impurities generated during the cutting process. However, with the increasing awareness of environmental protection and the continuous increase in production costs, how to effectively use cutting fluid and reduce waste has become an urgent problem to be solved.

[0003] An effective solution is to filter and recycle the mortar liquid generated during the cutting process. The mortar liquid is formed during the cutting process due to the friction between the diamond wire and the silicon rod and the mixing of the debris generated by cutting with the cutting liquid. This mortar liquid contains not only a large amount of cutting chips, but also the components of the cutting liquid. Therefore, by filtering and recycling the mortar liquid, the amount of cutting liquid used can be reduced. This can reduce production costs to a certain extent and improve economic benefits.

[0004] However, the existing cutting fluid is prone to cause problems such as uneven surface of the cut product during recycling. Summary of the invention

[0005] The invention provides a cutting fluid which can maintain excellent cutting performance during long-term circulation and can make the surface of the cut product uniform.

[0006] The present invention also provides a method for preparing a cutting fluid. The method is simple to operate and can prepare a cutting fluid with excellent circulation performance.

[0007] On one hand, the present invention provides a cutting fluid, which comprises, by weight, 1-2 parts of a thickener, 0.5-2 parts of an antibacterial agent, 10-25 parts of a surfactant, 5-10 parts of a wetting agent, 1-2 parts of a defoaming agent, 1-3 parts of a dispersant, and 56-81.5 parts of water.

[0008] The cutting fluid as described above, wherein the thickener comprises at least one of polyvinyl alcohol, polyvinyl alcohol ether, polymethyl methacrylate, and polyethylene oxide;

[0009] and / or, the antibacterial agent comprises at least one of benzalkonium chloride, propylene glycol, sorbic acid, and parabens;

[0010] And / or, the surfactant includes at least one of isomeric decanol polyoxyethylene ether, A-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene), polyoxyethylene (21) stearyl alcohol ether, stearyl alcohol polyoxyethylene ether, polysorbate-80, castor oil polyoxyethylene ether, and trans-polyether;

[0011] And / or, the wetting agent includes at least one of methyl polysiloxane, silicone twin structure surfactant, and polyether modified dimethyl polysiloxane;

[0012] And / or, the defoaming agent includes polydimethylsiloxane compounds;

[0013] And / or, the dispersant includes at least one of polyacrylic acid, polyoxyethylene, and polyoxyethylene ether phosphate.

[0014] In the cutting fluid as described above, the mass average molecular weight of the thickener is 20,000-40,000.

[0015] The cutting fluid as described above, wherein the static surface tension of the surfactant is 26-29 mN / m;

[0016] The cutting fluid is used to generate a mixed liquid after cutting, and the static surface tension of the mixed liquid is 26-30 mN / m.

[0017] In the cutting fluid as described above, the mass average molecular weight of the surfactant is 1000-3000.

[0018] In the cutting fluid as described above, the mass average molecular weight of the dispersant is 2000-5000.

[0019] The cutting fluid as described above comprises, by weight, 1 part of thickener, 1 part of antibacterial agent, 20-25 parts of surfactant, 8-10 parts of wetting agent, 1 part of defoaming agent, 1-2 parts of dispersant, and 60-68 parts of water.

[0020] Another aspect of the present invention provides a method for preparing the cutting fluid as described above, comprising the following steps:

[0021] A mixed liquid including water, a thickener, an antibacterial agent, a surfactant, a wetting agent, a defoaming agent and a dispersant is subjected to a first stirring treatment to obtain a cutting liquid.

[0022] According to the preparation method described above, the mixed solution is prepared by a process comprising the following steps:

[0023] The thickener, the antibacterial agent, the surfactant, the wetting agent, the defoaming agent, and the dispersant are added to 10 parts of water, and a second stirring treatment is performed, and then the remaining water is added to obtain a mixed solution.

[0024] In the preparation method as described above, the first stirring treatment is performed at a speed of 100-300 rpm for a time of not less than 8 hours;

[0025] And / or, the second stirring treatment has a rotation speed of 100-300 rpm and a duration of 30-50 min.

[0026] The cutting fluid provided by the present invention is composed of a thickener, an antibacterial agent, a surfactant, a wetting agent, a defoaming agent dispersant and water in specific mass portions. The synergistic effect between the various components inhibits the production of bacterial colonies, so that the cutting fluid can be effective under poor water quality conditions. The loss of components during cutting and circulation is relatively small, and an excellent cutting effect is maintained. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in combination with the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] On one hand, the present invention provides a cutting fluid, which comprises, by weight, 1-2 parts of a thickener, 0.5-2 parts of an antibacterial agent, 10-25 parts of a surfactant, 5-10 parts of a wetting agent, 1-2 parts of a defoaming agent, 1-3 parts of a dispersant, and 56-81.5 parts of water.

[0029] The cutting fluid provided by the present invention is composed of a specific mass fraction of a thickener, an antibacterial agent, a surfactant, a wetting agent, a defoaming agent, a dispersant and water, and can maintain good performance and a cutting effect during the cyclic use. The inventor analyzed this and believed that the reason may be that under the synergistic effect of various components, the loss of key components during the use of the cutting fluid can be reduced, the probability of bacterial colony generation can be reduced, and the possibility of decomposition or deterioration of the cutting fluid can be reduced.

[0030] Further, in a specific embodiment of the present invention, the thickener includes at least one of polyvinyl alcohol, polyvinyl alcohol ether, polymethyl methacrylate, and polyethylene oxide;

[0031] and / or, the antibacterial agent comprises at least one of benzalkonium chloride, propylene glycol, sorbic acid, and parabens;

[0032] and / or, the surfactant includes at least one of isomeric decanol polyoxyethylene ether, A-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene), polyoxyethylene (21) stearyl alcohol ether, stearyl alcohol polyoxyethylene ether, polysorbate-80, castor oil polyoxyethylene ether, and trans-polyether;

[0033] and / or, the wetting agent comprises at least one of methyl polysiloxane, silicone twin structure surfactant, and polyether modified dimethyl polysiloxane;

[0034] and / or, the defoaming agent comprises a polydimethylsiloxane compound;

[0035] And / or, the dispersant includes at least one of polyacrylic acid, polyoxyethylene, and polyoxyethylene ether phosphate.

[0036] The defoaming agent includes polydimethylsiloxane compounds, and the common polydimethylsiloxane compounds in the art can be selected, such as CAS: 58130-04-4, CAS: 106214-84-0, CAS: 67762-92-9, CAS: 70131-67-8.

[0037] In the extreme environment of cutting, the above-mentioned thickener can reduce the friction between the various components of the cutting fluid and the solid, thereby reducing the probability of decomposition or deterioration of other components. The above-mentioned antibacterial agent is not easily consumed in the case of multiple cycles, and can better reduce the probability of colony formation in the long-term circulation process; the above-mentioned surfactant can still maintain a stable structure in the extreme environment of high temperature and high pressure of cutting, and is less likely to decompose or deteriorate, and can continue to play a role in the cutting process; the above-mentioned wetting agent helps to more effectively remove the metal chips and other impurities generated in the cutting process, prevent them from depositing or causing blockage in the cutting fluid, thereby maintaining the fluidity and cleanliness of the cutting fluid and extending its circulation time; the above-mentioned defoaming agent can eliminate foam and prevent the surfactant from enriching on the foam surface, so that the cutting fluid can play an effective role and improve its recycling effect; the dispersant can form a protective film on the surface of the particles to prevent contact and aggregation between particles. This protective film can be physically adsorbed or chemically combined, which enhances the stability of the particles. Preventing them from depositing or causing blockage in the cutting fluid, thereby maintaining the fluidity and cleanliness of the cutting fluid, extending its circulation time, and helping to maintain a dispersed state for a long time.

[0038] Furthermore, in a specific embodiment of the present invention, the mass average molecular weight of the thickener is 20,000-40,000.

[0039] Specifically, the mass average molecular weight of the thickener includes, but is not limited to, 20,000, 25,000, 30,000, 35,000, 40,000 or a range between any two of these.

[0040] When the mass average molecular weight of the thickener is within the above range, it can better exert a synergistic effect with other components to improve the circulation performance of the cutting fluid.

[0041] Further, in one embodiment of the present invention, the static surface tension of the surfactant is 26-29 mN / m;

[0042] The cutting fluid is used to generate a mixed liquid after cutting, and the static surface tension of the mixed liquid is 26-30mN / m.

[0043] A surface tension tester commonly used in the art can be used to test the surface tension before and after cutting. Specifically, the static surface tension of the surfactant includes but is not limited to 26mN / m, 27mN / m, 28mN / m, 29mN / m or a range between any two thereof.

[0044] A cutting fluid including a surfactant is used for cutting to generate a mixed liquid, and the static surface tension of the mixed liquid includes but is not limited to 26mN / m, 27mN / m, 28mN / m, 29mN / m, 30mN / m or a range composed of any two thereof.

[0045] The present invention does not limit the specific parameters of the initial cutting liquid used in the cutting process, and the initial cutting liquid can be used to cut the silicon wafer in a common manner in the art to obtain a mixed liquid.

[0046] When the surface tension of the mixed liquid after cutting differs from that of the original liquid by ±1mN / m, it indicates that the surfactant has strong shear resistance and can further reduce the loss of the cutting fluid, reduce the possibility of decomposition or deterioration during the circulation process, and improve the circulation performance of the cutting fluid.

[0047] Furthermore, in a specific embodiment of the present invention, the mass average molecular weight of the surfactant is 1000-3000.

[0048] In detail, the mass average molecular weight of the surfactant includes but is not limited to 1000, 1200, 1400, 1600, 1800, 2000, 2200, 2400, 2600, 2800, 3000 or a range between any two of them.

[0049] Furthermore, in a specific embodiment of the present invention, the mass average molecular weight of the dispersant is 2000-5000.

[0050] Specifically, the mass average molecular weight of the dispersant includes, but is not limited to, 2000, 2500, 3000, 3500, 4000, 4500, 5000 or a range between any two of them.

[0051] When the mass average molecular weight of the dispersant is within the above range, when the pH of the mixed solution produced after cutting is acidic or alkaline, the viscosity of the dispersant increases and the solubility decreases. When they are adsorbed onto the surface of solid particles, an electric double layer is formed around the particles. The electric double layer can generate electrostatic repulsion, preventing the particles from approaching each other, thereby reducing aggregation.

[0052] Furthermore, the dispersant having the above-mentioned mass-average molecular weight can perform a small-range negative feedback regulation on pH changes, so that the pH of the mixed liquid can be maintained in a range close to neutral for a long time, which helps to maintain the dispersed state for a long time. Under the synergistic effect with other components, the cutting fluid can undergo multiple cycles and can still function under poor water quality conditions.

[0053] Furthermore, in a specific embodiment of the present invention, the composition includes, by mass, 1 part thickener, 1 part antibacterial agent, 20-25 parts surfactant, 8-10 parts wetting agent, 1 part defoamer, 1-2 parts dispersant, and 60-68 parts water.

[0054] The various components in the above mass parts have more excellent cycle performance under the synergistic effect.

[0055] Another aspect of the present invention provides a method for preparing the cutting fluid as described above, comprising the following steps:

[0056] A mixed liquid including water, a thickener, an antibacterial agent, a surfactant, a wetting agent, a defoaming agent and a dispersant is subjected to a first stirring treatment to obtain a cutting liquid.

[0057] Specifically, 1-2 parts of thickener, 1 part of antibacterial agent, 10-25 parts of surfactant, 5-10 parts of wetting agent, 1 part of defoaming agent, and 2 parts of dispersant are weighed by mass, mixed with 59-80 parts of water to obtain a mixed solution, and the mixed solution is subjected to a first stirring treatment to obtain a cutting fluid.

[0058] The preparation method provided by the invention is simple to operate and the conditions are controllable.

[0059] Further, in one embodiment of the present invention, the mixed solution is prepared by a process comprising the following steps:

[0060] A thickener, an antibacterial agent, a surfactant, a wetting agent, a defoaming agent, and a dispersant are added to 10 parts of water, and a second stirring treatment is performed, and then the remaining water is added to obtain a mixed solution.

[0061] Specifically, each component is added to 10 parts of water, and a second stirring treatment is performed to pre-separate the components. The remaining water is then added to obtain a mixed solution, and the mixed solution is further subjected to a first stirring treatment to obtain a uniformly mixed cutting fluid.

[0062] The sum of the remaining water, the thickener, the antibacterial agent, the surfactant, the wetting agent, the defoamer and the dispersant is 90 parts.

[0063] The cutting fluid obtained by the first stirring process and the second stirring process has more excellent uniformity, which can ensure the use performance of the cutting fluid and avoid problems such as uneven surface of the cutting product caused by uneven distribution of cutting fluid components.

[0064] Further, in a specific embodiment of the present invention, the speed of the first stirring treatment is 100-300 rpm, and the time is not less than 8 hours;

[0065] And / or, the second stirring treatment has a rotation speed of 100-300 rpm and a duration of 30-50 min.

[0066] In detail, the rotation speed of the first stirring process includes but is not limited to 100 rpm, 150 rpm, 200 rpm, 250 rpm, 300 rpm or a range between any two of them.

[0067] The rotation speed of the second stirring process includes but is not limited to 100 rpm, 150 rpm, 200 rpm, 250 rpm, 300 rpm or a range between any two thereof.

[0068] When the rotation speed and time of the first stirring treatment and the second stirring treatment are within the above range, it can ensure that the components in the cutting fluid are fully mixed, avoid precipitation or stratification, and ensure the uniformity and stability of the cutting fluid; at the same time, it can reduce the generation of bubbles and improve the use effect of the cutting fluid; it can also improve the preparation efficiency of the cutting fluid, make the mixing process faster, and shorten the production time.

[0069] The cutting fluid provided by the present invention is described in detail below through specific examples.

[0070] Unless otherwise specified, the reagents, materials and instruments used in the following examples are conventional reagents, conventional materials and conventional instruments in the art and can be obtained commercially. The reagents involved can also be synthesized by conventional methods in the art.

[0071] Example 1

[0072] The method for preparing the cutting fluid provided in this embodiment comprises the following steps:

[0073] Add 10 parts of pure water to the bottom of the stirring barrel, and then add 1 part of polyvinyl alcohol (mass average molecular weight of 20,000), 1 part of benzalkonium chloride, 1 part of polyethylene oxide POE (mass average molecular weight of 1000), 15 parts of Α-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene) (mass average molecular weight of 1500), 10 parts of methyl polysiloxane (mass average molecular weight of 1500), 1 part of polydimethylsiloxane (mass average molecular weight of 1500), and 2 parts of polyacrylic acid (mass average molecular weight of 2000) in sequence, perform a second stirring treatment at 200 rpm for 30 minutes, then add 50 parts of pure water (total amount of pure water is 60 parts), perform a first stirring treatment at 200 rpm and circulate for 12 hours to obtain a cutting fluid.

[0074] Example 2

[0075] The method for preparing the cutting fluid provided in this embodiment comprises the following steps:

[0076] Add 10 parts of pure water to the bottom of the container, and then add 1 part of polyvinyl alcohol (mass average molecular weight of 40,000), 1 part of benzalkonium chloride, 10 parts of Α-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene) (mass average molecular weight of 1500), 7 parts of methyl polysiloxane (mass average molecular weight of 2000), 1 part of polydimethylsiloxane (mass average molecular weight of 1000), and 2 parts of polyacrylic acid (mass average molecular weight of 3000) in sequence, perform a second stirring treatment at 300 rpm for 30 minutes, then add 57 parts of pure water (total amount of pure water is 67 parts), perform a second stirring treatment at 300 rpm and circulate for 9 hours to obtain a cutting fluid.

[0077] Example 3

[0078] The method for preparing the cutting fluid provided in this embodiment comprises the following steps:

[0079] Add 10 parts of pure water to the bottom of the stirring barrel, and then add 1 part of polyvinyl alcohol ether (mass average molecular weight of 50,000), 1 part of paraben, 10 parts of octadecyl polyoxyethylene ether (mass average molecular weight of 2000), 15 parts of trans polyether (mass average molecular weight of 1720), 10 parts of polyether modified dimethyl polysiloxane (mass average molecular weight of 2500), 1 part of polydimethylsiloxane (mass average molecular weight of 1000), 2 parts of polyoxyethylene ether phosphate (mass average molecular weight of 1500), perform the second stirring treatment at 200 rpm for 30 minutes, then add 50 parts of pure water (total amount of pure water is 60 parts), perform the first stirring treatment at 200 rpm and circulate for 12 hours to obtain the cutting fluid.

[0080] Example 4

[0081] The preparation method of the cutting fluid provided in this embodiment is basically the same as that in embodiment 1, except that:

[0082] The mass average molecular weight of polyvinyl alcohol is 4,000.

[0083] Example 5

[0084] The preparation method of the cutting fluid provided in this embodiment is basically the same as that in embodiment 1, except that:

[0085] The surfactant selected is block polyether (CAS: 9003-11-6) with a mass average molecular weight of 800.

[0086] Example 6

[0087] The preparation method of the cutting fluid provided in this embodiment is basically the same as that in embodiment 1, except that:

[0088] The mass average molecular weight of polyacrylic acid is 500.

[0089] Example 7

[0090] The method for preparing the cutting fluid provided in this embodiment comprises the following steps:

[0091] Add 1 part of polyvinyl alcohol (mass average molecular weight of 30,000), 1 part of benzalkonium chloride, 1 part of polyethylene oxide POE (mass average molecular weight of 1000), 15 parts of Α-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene) (mass average molecular weight of 1500), 10 parts of methyl polysiloxane (mass average molecular weight of 1500), 1 part of polydimethylsiloxane (mass average molecular weight of 1500), 2 parts of polyacrylic acid (mass average molecular weight of 2000), and 60 parts of pure water to the bottom of the stirring barrel container, perform the first stirring treatment at 200 rpm and circulate for 18 hours to obtain a cutting fluid.

[0092] Comparative Example 1

[0093] The cutting fluid provided in this comparative example is purchased from outside, the manufacturer is Shanghai Jiansheng Lubricating Oil Co., Ltd., and the model is wire cutting fluid JS-5.

[0094] Comparative Example 2

[0095] The preparation method of the cutting fluid provided in this comparative example comprises the following steps:

[0096] Add 10 parts of pure water to the bottom of the stirring barrel, and then add 1 part of polyvinyl alcohol (mass average molecular weight of 30,000), 2 parts of benzalkonium chloride, 20 parts of polyethylene oxide POE (mass average molecular weight of 1000), 2 parts of Α-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene) (mass average molecular weight of 1500), 2 parts of methyl polysiloxane (mass average molecular weight of 10), 2 parts of polydimethylsiloxane (mass average molecular weight of 1500), 1 part of polyacrylic acid (mass average molecular weight of 2000), stir at 200rpm for 30min, then add 60 parts of pure water (total amount of pure water is 70 parts), stir at 200rpm and circulate for 12h to obtain a cutting fluid.

[0097] Comparative Example 3

[0098] The preparation method of the cutting fluid provided in this comparative example is basically the same as that in Example 1, except that:

[0099] Does not include polyvinyl alcohol.

[0100] Comparative Example 4

[0101] The preparation method of the cutting fluid provided in this comparative example is basically the same as that in Example 1, except that:

[0102] Does not include wetting agent.

[0103] Comparative Example 5

[0104] The preparation method of the cutting fluid provided in this comparative example is basically the same as that in Example 1, except that:

[0105] Does not include polyacrylic acid.

[0106] Test Case

[0107] The cutting fluids provided in all the embodiments and comparative examples were tested, comprising the following steps:

[0108] Configure a certain amount of cutting liquid, add 40L cutting liquid and 400L water to the experimental machine for cutting, collect the liquid after cutting, filter it and continue to cut in a cycle, and add 5-6L water. Each experimental machine cuts 50-60 times in a cycle to observe the sorting data after cutting. In the actual cutting process, the number of broken wire knives and the number of additional cutting knives account for the broken wire rate and the additional cutting rate in the total number of cutting knives respectively; the line mark sheet and the thick and thin sheet are one of the types of downgraded sheets, and the proportion of the total number of cutting sheets is the line mark percentage and the thickness percentage respectively. The lower the line break rate, additional cutting rate, line mark percentage, and thickness percentage, the better the cutting performance. Among them, the relatively more important parameters are the line break rate and line mark percentage. The specific test results are shown in Table 1.

[0109] At the same time, the original cutting solution was diluted 100 times, and the mixed solution produced after cutting was sampled to measure the static surface tension of the surfactant and the static surface tension of the mixed solution after cutting. The results are shown in Table 1.

[0110] Table 1

[0111]

[0112] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cutting fluid, characterized in that: The composition comprises, by weight, 1-2 parts of a thickener, 0.5-2 parts of an antibacterial agent, 10-25 parts of a surfactant, 5-10 parts of a wetting agent, 1-2 parts of a defoaming agent, 1-3 parts of a dispersant, and 56-81.5 parts of water.

2. The cutting fluid according to claim 1, characterized in that: The thickener comprises at least one of polyvinyl alcohol, polyvinyl alcohol ether, polymethyl methacrylate and polyethylene oxide; and / or, the antibacterial agent comprises at least one of benzalkonium chloride, propylene glycol, sorbic acid, and parabens; And / or, the surfactant includes at least one of isomeric decanol polyoxyethylene ether, A-isodecyl-Ω-hydroxy-poly(oxy-1,2-ethylene), polyoxyethylene (21) stearyl alcohol ether, stearyl alcohol polyoxyethylene ether, polysorbate-80, castor oil polyoxyethylene ether, and trans-polyether; And / or, the wetting agent includes at least one of methyl polysiloxane, silicone twin structure surfactant, and polyether modified dimethyl polysiloxane; And / or, the defoaming agent includes a polydimethylsiloxane compound; And / or, the dispersant includes at least one of polyacrylic acid, polyoxyethylene, and polyoxyethylene ether phosphate.

3. The cutting fluid according to claim 2, characterized in that: The mass average molecular weight of the thickener is 20,000-40,000.

4. The cutting fluid according to any one of claims 1 to 3, characterized in that: The static surface tension of the surfactant is 26-29 mN / m; The cutting fluid is used for a mixed liquid generated after cutting, and the static surface tension of the mixed liquid is 26-30 mN / m.

5. The cutting fluid according to claim 4, characterized in that: The mass average molecular weight of the surfactant is 1000-3000.

6. The cutting fluid according to any one of claims 2 to 5, characterized in that: The mass average molecular weight of the dispersant is 2000-5000.

7. The cutting fluid according to any one of claims 1 to 6, characterized in that: The composition comprises, by weight, 1 part of thickener, 1 part of antibacterial agent, 20-25 parts of surfactant, 8-10 parts of wetting agent, 1 part of defoaming agent, 1-2 parts of dispersant and 60-68 parts of water.

8. A method for preparing the cutting fluid according to any one of claims 1 to 7, characterized in that: The following steps are involved: A mixed liquid including water, a thickener, an antibacterial agent, a surfactant, a wetting agent, a defoaming agent and a dispersant is subjected to a first stirring treatment to obtain a cutting liquid.

9. The preparation method according to claim 8, characterized in that: The mixed solution is prepared by a process comprising the following steps: The thickener, the antibacterial agent, the surfactant, the wetting agent, the defoaming agent, and the dispersant are added to 10 parts of water, and a second stirring treatment is performed, and then the remaining water is added to obtain the mixed solution.

10. The preparation method according to claim 8 or 9, characterized in that: The first stirring treatment has a rotation speed of 100-300 rpm and a time of not less than 8 hours; And / or, the second stirring treatment has a rotation speed of 100-300 rpm and a duration of 30-50 min.

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