A membraneless water filtration separator of semiconductor-grade micro- and nano-particles

Abstract

The application discloses a membrane-free water filtering separator for semiconductor-grade micro-nanoparticles. The separator comprises a gas pump assembly and a flotation column. A wastewater outlet and a water-to-be-treated inlet are arranged at an upper side and a lower side of the flotation column respectively. A purified water outlet is arranged at the other side of the flotation column. The wastewater outlet is communicated with a wastewater collecting area. The water-to-be-treated inlet is communicated with a water-to-be-treated tank. The purified water outlet is communicated with a purified water collecting area. An air inlet is arranged at the bottom of the flotation column. The air outlet of the gas pump assembly is communicated with the air inlet of the flotation column. The gas pump assembly generates gas which is blown into the flotation column. The inner tube of the flotation column is a filter core made of corundum sinter. The gas passes through the micro-nano-sized air holes to generate micro-nano-sized bubbles. The bubbles diffuse along the tube diameter while adsorbing the micro-nano-sized impurity particles and rising to carry out the impurities. Finally, a bubble and impurity collecting device is installed to realize the ultra-clean of the semiconductor. Compared with the prior art, the application can improve the economic benefits of the semiconductor-grade micro-nanoparticle separation.

Description

Technical Field

[0001] This invention relates to a filter separator in the field of ultra-clean control for the manufacture of flow control components, and more particularly to a membrane-free water filter separator using semiconductor-grade micro-nano particles. Background Technology

[0002] Achieving ultra-clean control in semiconductor manufacturing is a major challenge. If dust particles are present inside the chip, it will cause wafer exposure defects, which can easily damage circuit functions, cause short circuits or open circuits, and lead to integrated circuit failure, reducing the yield and production rate of chip manufacturing.

[0003] Currently, the mainstream method for achieving ultra-cleanliness in semiconductor fluid transport during production is membrane filtration. Fluid passes through a microporous membrane, where tiny particles and other impurities are removed through physical isolation. While this cleaning method is relatively simple in principle, it has drawbacks. Firstly, existing membranes are mostly in the micrometer range, making them less effective at removing nanometer-sized impurities. Secondly, membrane filtration requires frequent membrane replacements, resulting in high consumable costs; otherwise, membrane clogging can easily occur, leading to a decline in filtration quality. Therefore, there is potential for optimization and improvement in the filtration efficiency and economics of existing membrane methods.

[0004] Therefore, it is necessary to propose a filtration efficiency and cost-effectiveness solution. Summary of the Invention

[0005] To address the problems and needs existing in the background technology, this invention proposes a novel ultra-clean method for semiconductor manufacturing—a membrane-free water filtration device for semiconductor-grade micro / nano particles. This invention uses a membrane-free water filtration method to control the particles in the fluid transport liquid during semiconductor manufacturing, capable of adsorbing impurities with sizes in the micro / nano range.

[0006] The technical solution of the present invention is as follows:

[0007] I. A membrane-free water filtration separator using semiconductor-grade micro / nano particles

[0008] The semiconductor-grade micro / nano particle membrane-free water filtration separator includes an air pump assembly and a flotation column. One side of the flotation column has a wastewater outlet and a water inlet arranged at intervals. The other side of the flotation column has a clean water outlet. The wastewater outlet is connected to the wastewater collection area, the water inlet is connected to the water tank to be treated, and the clean water outlet is connected to the clean water collection area. An air inlet is provided at the bottom of the flotation column, and the air outlet of the air pump assembly is connected to the air inlet of the flotation column.

[0009] The height of the clean water outlet is the same as the height of the wastewater outlet.

[0010] The air pump assembly includes a filter and an air pump, with the filter installed at the drive air pressure port of the air pump.

[0011] The flotation column includes an inner tube, a baffle plate, and an outer tube. The inner tube is fixedly installed inside the outer tube. One side wall of the outer tube has a wastewater outlet and a water inlet arranged at intervals. The other side wall of the outer tube has a clean water outlet. The baffle plate is installed inside the outer tube on the side of the inner tube closest to the clean water outlet. There is a gap between the bottom of the baffle plate and the bottom of the outer tube. The bottom of the inner tube has an air inlet that is connected to the air outlet of the air pump assembly.

[0012] The inlet for the water to be treated is located near the top of the inner pipe.

[0013] The inner tube is a corundum sintered filter element, and the filter element is provided with a number of micro-nano-scale air pores.

[0014] The inner tube is a cylindrical structure that is thinner at the top and thicker at the bottom.

[0015] The outer tube and the inner tube are connected by threads.

[0016] The top of the inner tube is provided with a pressure balancing valve interface, which is connected to the outside through a one-way valve.

[0017] II. A filtration device

[0018] The filtration device includes the aforementioned membrane-free water filtration separator with semiconductor-grade micro / nano particles.

[0019] The technical solution provided by this invention has the following effects:

[0020] 1. The separator proposed in this invention uses an air pump and a corundum sintered filter element to prepare a bubble cluster with a diameter of 10 μm. The bubbles remove no less than 80% of the micron-sized impurities from the flotation column at a flow rate of 40 mL under circulating conditions, and the removal rate is no less than 50%, achieving ultra-cleanliness.

[0021] 2. The separator proposed in this invention does not require manual operation after it starts running. The air pump continuously generates bubbles and enters the flotation column, where the impurities are floated, thus improving the efficiency of ultra-clean impurity removal in semiconductors. Attached Figure Description

[0022] To illustrate the embodiments of the present invention in more detail, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely embodiments of the present invention, and those skilled in the art can obtain other drawings based on the provided drawings without any creative effort.

[0023] Figure 1A front view of a flotation column for a membrane-free water filtration separator using semiconductor-grade micro / nano particles, provided in an embodiment of the present invention;

[0024] Figure 2 A side view of a flotation column of a membrane-free water filtration separator for semiconductor-grade micro / nano particles provided in an embodiment of the present invention;

[0025] Figure 3 A cross-sectional view of a flotation column for a membrane-free water filtration separator using semiconductor-grade micro / nano particles, provided in an embodiment of the present invention;

[0026] Figure 4 A front view of the inner tube portion of the flotation column of a membrane-free water filtration separator for semiconductor-grade micro / nano particles provided in an embodiment of the present invention;

[0027] Figure 5 A cross-sectional view of the inner tube portion of the flotation column of a membrane-free water filtration separator for semiconductor-grade micro / nano particles provided in an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the structure of a membrane-free water filtration separator using semiconductor-grade micro / nano particles provided in an embodiment of the present invention.

[0029] In the diagram: 1. Drive air pressure port; 2. Filter; 3. Ball valve; 4. Air pump; 5. First hose; 6. Second hose; 7. Flotation column; 8. Clean water collection area; 9. Water tank to be treated; 10. Wastewater; 11. Wastewater outlet; 12. Water inlet to be treated; 13. Inner pipe; 14. Clean water outlet; 15. Outer pipe thread; 16. Baffle plate; 17. Outer pipe; 18. Air pressure balance valve interface; 19. Inner pipe thread. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0031] like Figure 1 , Figure 2 , Figure 3 and Figure 6As shown, the membrane-free water filtration separator for semiconductor-grade micro / nano particles proposed in this invention includes an air pump assembly and a flotation column 7. One side of the flotation column 7 has a wastewater outlet 11 and a water inlet 12 arranged vertically at intervals. The other side of the flotation column 7 has a purified water outlet 14, the height of which is the same as the height of the wastewater outlet 11. Wastewater 10 flows out of the wastewater outlet 11 and is connected to a wastewater collection area via a second hose 6. The water inlet 12 is connected to a water tank 9 via a first hose 5. The purified water outlet 14 is connected to a purified water collection area 8 via the second hose 6. An air inlet is located at the bottom of the flotation column 7, and the air outlet of the air pump assembly is connected to the air inlet of the flotation column 7 via the first hose 5. An air pump supplies air into the flotation column. The air passes through a corundum-sintered filter core, generating micro- and nano-sized bubbles. These bubbles diffuse radially within the contact area separated by the partitions in the flotation column, simultaneously adhering to and carrying away hydrophobic impurities. Finally, the liquid with the highest impurity content is discharged from the top of the flotation column. The turbid liquid flows through a hose into a bubble-generating liquid circulation tank, while clean water flows out from the clean water outlets separated by the partitions and is collected into a clean water collection device, thus achieving ultra-cleanliness in semiconductors. This micro- and nano-particle membrane-free water filtration device effectively removes nano-impurities generated during the manufacturing process of flow control components, thereby maintaining ultra-clean control over the manufacturing process. Compared to traditional membrane filtration technology, the membrane-free water filtration separator proposed in this invention reduces the problems of frequent membrane replacement and high consumable costs.

[0032] The air pump assembly includes a filter 2, a ball valve 3, and an air pump 4. The filter 2 is installed at the drive air pressure port 1 of the air pump 4, and the ball valve 3 is also installed in the air pump 4, serving as an intake switch valve. The air pump is a piston-type air pump, which is a mechanical device that uses the reciprocating motion of a piston within a cylinder to compress and transport air. Its working process can be divided into four main stages: intake, compression, exhaust, and expansion (return). During the intake process, the piston moves downward, the volume inside the cylinder increases, the air pressure decreases, and air enters the cylinder through a one-way valve. During the compression process, the piston moves upward, the volume inside the cylinder decreases, the air is compressed, and the pressure increases. During the exhaust process, when the pressure inside the cylinder exceeds the set value of the exhaust valve, the compressed air is discharged from the cylinder through the exhaust valve. This gas discharged from the cylinder is blown into the flotation column, whose inner tube is a corundum sintered filter element. The gas passes through micro-nano-scale permeable pores, generating micro-nano-scale bubbles. These micro- and nanobubbles have a large specific surface area and high dissolution efficiency. Due to their small size, they have a long residence time and high stability, are not easy to merge and dissipate, and can remain in the liquid for a long time.

[0033] The flotation column 7 includes an inner tube 13, a baffle plate 16, and an outer tube 17. The inner tube 13 is fixedly installed inside the outer tube 17. The bottom of the inner tube 13 is connected to the bottom of the outer tube 17 via an inner tube thread 19 and an outer tube thread 15. Wastewater outlets 11 and untreated water inlets 12 are spaced apart on one side wall of the outer tube 17, and a clean water outlet 14 is located on the other side wall of the outer tube 17. The untreated water inlet 12 is positioned near the top of the inner tube 13. The baffle plate 16 is installed inside the outer tube 17 on the side of the inner tube 13 closest to the clean water outlet 14. The baffle plate 16 isolates the contact flotation zone and the clean water outlet zone within the flotation column. A gap is provided between the bottom of the baffle plate 16 and the bottom of the outer tube 17. An air inlet is located at the bottom of the inner tube 13 and is connected to the air outlet of the air pump assembly via a first flexible hose 5.

[0034] like Figure 4 and Figure 5 As shown, the inner tube 13 is a corundum sintered filter element. The filter element is provided with a number of micro-nano-scale air pores. Gas passes through the micro-nano-scale air pores of the inner tube to generate micro-nano-scale bubbles.

[0035] The inner tube 13 has a cylindrical structure that is thinner at the top and thicker at the bottom. Its purpose is to increase the contact area and increase the contact time between bubbles and impurities.

[0036] The top of the inner tube 13 is provided with a pressure balancing valve interface 18, which is connected to the outside through a one-way valve to balance the air pressure in the flotation column.

[0037] The separator operates as follows:

[0038] In the field of semiconductor ultra-cleanliness, the ultra-clean process involves various wastewater solutions flowing into the flotation column 7 after passing through the treatment tank 9. Gas flows from the driving gas pressure port 1 through the filter 2 and then through the piston-type air pump 4 to generate high-pressure gas. The gas flows through the inner tube 13 and becomes micro-nano bubbles, which are then blown into the flotation column. During this process, the bubbles diffuse radially while rising, adsorbing particles in the treatment water. Hydrophobic impurities adhere to the bubbles, and the rising bubbles carry away the impurities. Due to the position of the partition 16, the flotation column is divided into a left contact flotation zone and a right clean water zone. The filtered clean water is collected through the clean water outlet 14, thus completing the ultra-clean process.

[0039] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A membrane-free water filtration separator using semiconductor-grade micro / nano particles, characterized in that, The membrane-free water filter separator is used to adsorb micro-nano level impurities in the fluid transport control liquid; it includes an air pump assembly and a flotation column (7). On one side of the flotation column (7), there is a wastewater outlet (11) and a water inlet (12) arranged at intervals. On the other side of the flotation column (7), there is a clean water outlet (14). The wastewater outlet (11) is connected to the wastewater collection area, the water inlet (12) is connected to the water tank (9) to be treated, and the clean water outlet (14) is connected to the clean water collection area (8). An air inlet is opened at the bottom of the flotation column (7), and the air outlet of the air pump assembly is connected to the air inlet of the flotation column (7). The height of the clean water outlet (14) is the same as the height of the wastewater outlet (11); The water inlet (12) is located near the top of the inner pipe (13); The flotation column (7) includes an inner tube (13), a partition (16) and an outer tube (17). The inner tube (13) is fixedly installed inside the outer tube (17). A wastewater outlet (11) and a water inlet (12) arranged at intervals are provided on one side wall of the outer tube (17). A clean water outlet (14) is provided on the other side wall of the outer tube (17). The partition (16) is installed inside the outer tube (17) on the side of the inner tube (13) near the clean water outlet (14). A gap is provided between the bottom of the partition (16) and the bottom of the outer tube (17). An air inlet is provided at the bottom of the inner tube (13) and is connected to the air outlet of the air pump assembly. The inner tube (13) is a corundum sintered filter core, and the filter core is provided with a number of micro-nano-level air pores.

2. The membrane-free water filtration separator using semiconductor-grade micro / nano particles according to claim 1, characterized in that, The air pump assembly includes a filter (2) and an air pump (4), with the filter (2) installed at the drive air pressure port (1) of the air pump (4).

3. The membrane-free water filtration separator using semiconductor-grade micro / nano particles according to claim 1, characterized in that, The inner tube (13) is a cylindrical structure that is thinner at the top and thicker at the bottom.

4. The membrane-free water filtration separator using semiconductor-grade micro / nano particles according to claim 1, characterized in that, The outer tube (17) and the inner tube (13) are connected by threads.

5. A membrane-free water filtration separator using semiconductor-grade micro / nano particles according to claim 1, characterized in that, The top of the inner tube (13) is provided with a pressure balance valve interface (18), which is connected to the outside through a one-way valve.

6. A filtration device, characterized in that, A membrane-free water filtration separator comprising semiconductor-grade micro / nano particles as described in claim 1.

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