A filtering and circulating device for excimer laser gas

Abstract

The present invention discloses a filtering circulation device for excimer laser gas, which belongs to the technical field of excimer laser, and comprises: a rectangular cavity; a filter, which comprises a hollow cylindrical outer shell, an air intake pipeline and a gas delivery pipeline are respectively installed on the upper end of the outer shell, and a purification box is installed inside the outer shell; a turbine pump is rotatably arranged outside the rectangular cavity; a cross-flow fan is rotatably arranged in the rectangular cavity; a dual-axis output motor, whose output end is respectively connected to the turbine pump and the cross-flow fan. The present invention increases the working gas flow rate of the reflux discharge cavity, and at the same time, the working gas flow rate increases, and the filter efficiency of the filter on the discharge dust particles is also enhanced. At the same time, the filter screen rotates all the time and can be self-cleaned. The effective filtering area of ​​the filter screen can be changed with the working gas speed, which ensures the filtering efficiency and the filtering effect.

Description

Technical Field

[0001] The invention mainly relates to the technical field of excimer lasers, and in particular to a filtering circulation device for excimer laser gas. Background Art

[0002] Excimer laser is a type of gas laser device that uses mixed gas as the working substance. During the operation of the excimer laser, the gas inside the discharge chamber of the laser will have the following problems: first, the gas is corrosive; second, there is a high repetition frequency of high-voltage discharge and high temperature environment, resulting in a large amount of discharge dust in the gas inside the discharge chamber. However, the discharge dust will cause the laser intensity to attenuate and will also contaminate the lens, resulting in problems such as thermal stress concentration and reduced optical performance of the lens.

[0003] The existing filtering method generally uses an electrostatic precipitator to purify the gas in the excimer laser cavity, and then returns the clean gas to the discharge cavity. There are two general filtering methods: one is to filter out impurities through a microparticle filter; the other is to use an electrostatic precipitator. The electrostatic precipitator in the prior art adopts a wire-tube structure. By applying negative high voltage to the filaments in the pipeline, the dust in the gas carries an electric charge and drifts on the tube wall to remove the dust in the gas. However, the ionized wire in the wire-tube electrostatic precipitator is easily corroded and broken. After corrosion and breaking, its dust removal efficiency will be greatly reduced, and reliability is difficult to guarantee. And because the electrostatic precipitator works in a sealed environment, this will cause a large amount of dust to accumulate in the dust removal pipe of the electrostatic precipitator, thereby reducing the dust collection capacity of the electrostatic precipitator and reducing the dust removal efficiency of the electrostatic precipitator. Because the dust in the excimer laser includes metal fluoride and pure metal particles, the metal particles have good conductivity, and there is a problem of low dust particle removal efficiency, which in turn affects the normal operation of the excimer laser. However, when using a micro-particle filter to filter out impurities, the filter may become clogged after long-term use, resulting in low dust removal efficiency.

[0004] Therefore, how to change the low efficiency and poor effect of using excimer laser to remove gas dust in the prior art is a problem that needs to be solved. Summary of the invention

[0005] The technical solution of the present invention aims at the technical problem that the existing technical solution is too single, and provides a solution that is significantly different from the existing technology. Specifically, the present invention mainly provides a filtering and circulating device for excimer laser gas to solve the technical problems raised in the above background technology.

[0006] The technical solution adopted by the present invention to solve the above technical problems is:

[0007] A filtering and circulating device for excimer laser gas, comprising:

[0008] A rectangular cavity, with cavity covers installed on both sides of the rectangular cavity, each cavity cover being installed with a cavity mirror, two air outlet slots being provided in the rectangular cavity, and air cover plates being installed on the air outlet slots;

[0009] The filter comprises a hollow cylindrical outer shell, an air inlet pipeline and an air outlet pipeline are respectively installed at the upper end of the outer shell, and a purification box is installed inside the outer shell;

[0010] Wherein, two vertical upright plates, a plurality of rotatably mounted guide rollers and a filter screen are arranged inside the purification box, the filter screen bypasses the guide roller and forms a ring, a gas flow channel is formed between the two upright plates and the inner wall of the purification box, the air intake pipeline extends into the gas flow channel and is located above the filter screen, a shelf is arranged on one side of one of the upright plates, a dual-axis stepper motor is installed at the lower end of the shelf, an output end of the dual-axis stepper motor is connected to an output shaft through a reducer, a worm gear is installed on the output shaft, and a drive roller is connected to the axis of the two ends of the worm, and the drive roller is transmission-connected to the filter screen;

[0011] A turbine pump is rotatably arranged outside the rectangular cavity;

[0012] A cross-flow fan is rotatably arranged in the rectangular cavity;

[0013] The output ends of the dual-axis output motor are respectively connected to the turbo pump and the cross-flow fan.

[0014] Preferably, the rectangular cavity, filter and turbine pump are connected in sequence through a gas pipeline, the gas pipeline between the turbine pump and the rectangular cavity is connected to the cavity cover, an air flow channel for gas flow is provided inside the cavity cover, and the air flow channel is connected to the inside of the rectangular cavity, and the cavity mirror is located inside the air flow channel.

[0015] Preferably, the gas cover plate is provided with an overall bell-shaped flow guide structure inside, the gas pipeline connected to the filter is arranged on the small mouth side of the bell mouth, and the rectangular cavity air outlet slot is arranged on the large mouth side of the bell mouth.

[0016] Preferably, a filter adjustment mechanism is provided inside the purification box, and the filter adjustment mechanism includes a lifting pneumatic rod arranged at the upper end of the rack, a truncated table and a pneumatic box arranged inside the rack, and a pushing-down pneumatic rod installed on the side wall of the air intake pipe. A push rod is installed at the upper end of the lifting pneumatic rod, and the push rod is in sliding contact with the filter. One of the guide rollers located between the two vertical plates does not rotate and slides up and down inside the purification box. The pushing-down pneumatic rod is located at the upper end of the guide roller and is connected to the guide roller. The truncated table is rotatably installed inside the rack, and the upper output end of the dual-axis stepper motor is connected to the axis of the truncated table.

[0017] Preferably, a linear slide groove is provided on the side wall of the cone, a vertical sliding rod slides on the linear slide groove, a piston plate slides inside the air pressure box, the piston plate and the sliding rod are in sliding contact, and air supply pipelines are connected between the output end of the air pressure box and the lifting air pressure rod, and between the lifting air pressure rod and the pushing-down air pressure rod.

[0018] Preferably, a filter cleaning mechanism is provided inside the purification box, and the filter cleaning mechanism includes a pneumatic box installed at the lower end of the storage rack, a placement box penetrated by the output shaft, and a swing rod penetrating the placement box; a meshing follower gear and a half-tooth gear are provided inside the placement box, and the half-tooth gear and the output shaft are connected by two meshing bevel gears, the follower gear and the swing rod are connected to the axis of the swing rod, and knocking pneumatic rods are respectively installed at both ends of the swing rod, a piston block is sliding inside the pneumatic box, and a pull rod is connected between the piston block and the piston plate, and the air supply port at the upper end of the side wall of the pneumatic box and the knocking pneumatic rod are connected by an air hose.

[0019] Preferably, a collection groove is provided inside the purification box, one end of the collection groove is opened toward the knocking pneumatic rod, the front and rear sides of the purification box are not in contact with the inner wall of the outer shell, and air outlets are provided on the front and rear sides of the purification box, an air guide plate is provided inside the purification box, and the air guide plate is located in the gas flow channel.

[0020] Preferably, a motor seat is connected between the rectangular cavity and the turbine pump, and the dual-axis output motor is located inside the motor seat.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] (1) The present invention achieves a pressurizing effect by adding a dual-axis output motor and a turbine pump and utilizing the high-speed rotation of the turbine pump, thereby increasing the flow rate of the working gas returning to the discharge chamber. At the same time, the flow velocity of the working gas is increased, and the filtering efficiency of the filter on the discharge dust particles is also enhanced. While the airflow is increased by pressurization, the ability of the purified working gas to blow and remove dust from the lens is greatly improved. At the same time, the clean working gas after pressurization forms an airflow protection layer for the cavity mirror, which can prevent the working gas with discharge dust inside the rectangular cavity from directly contacting the cavity mirror.

[0023] (2) In the present invention, when filtering gas, if the filtering area of ​​the filter is kept constant, when the gas flow rate increases, although the air volume increases and the filtering efficiency is improved, the gas pressure will increase as the gas flow rate increases, so the charged dust is not easily intercepted by the filter, which reduces the filtering effect; if the gas flow rate is kept constant and the filtering area of ​​the filter is too large, the internal air flow resistance will increase, and the final air volume will be low, affecting the filtering efficiency. Therefore, the gas flow rate and the effective filtering area of ​​the filter are not the larger the better. The device adopts a filter adjustment mechanism. When the speed of the dual-axis output motor increases, the working gas flow rate becomes faster, and the corresponding dual-axis stepper motor speed also increases, so that the extension length of the push-down pneumatic rod becomes larger, increasing the effective filtering area of ​​the filter in the gas flow channel, while ensuring the filtering efficiency, taking into account the filtering effect.

[0024] (3) During gas filtering, the present invention knocks the pneumatic rod back and knocks on the filter, so that the charged dust on the filter falls off, the filter is cleaned, and the long-term use of the filter is ensured; and when the speed of the dual-axis output motor increases, the flow rate of the working gas becomes faster, the charged dust is stuck deeper on the filter, and the charged dust is difficult to shake off from the filter. Correspondingly, as the speed of the dual-axis stepper motor increases, as the moving speed of the filter becomes faster, the knocking frequency of the knocking pneumatic rod becomes faster, ensuring the cleaning effect. At the same time, the movement of the piston plate drives the movement of the piston block inside the pneumatic box through the pull rod, so that the gas inside the pneumatic box is squeezed into the inside of the knocking pneumatic rod, so that the knocking pneumatic rod is extended. As the knocking pneumatic rod is extended, the movement amplitude of the knocking head at its end is larger, so that the knocking force of the knocking pneumatic rod on the filter is also increased, ensuring the cleaning effect of the filter.

[0025] (4) The present invention can keep the filter in a slow rotation process to ensure effective filtering of the working gas; and as the speed of the dual-axis output motor increases, the air flow speed also increases. For the filter, the amount of working gas processed per unit time also increases, and the filter permeability decrease rate also increases. Since the speed of the dual-axis stepper motor also increases accordingly, the filter movement speed increases, which can not only avoid the filter from being used after being blocked, but also ensure that the filter is always in the best permeability state.

[0026] The present invention will be explained in detail below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the structure of the filtering circulation device of the present invention (forward);

[0028] Figure 2 This is a schematic diagram of the structure of the filtering circulation device of the present invention (backward facing);

[0029] Figure 3 It is a schematic diagram of the top view of the filtering circulation device of the present invention;

[0030] Figure 4 This is a schematic diagram of the structure of the gas cover plate of the present invention;

[0031] Figure 5 This is a connection diagram of a dual-axis output motor of the present invention;

[0032] Figure 6 For the present invention Figure 1 Enlarged view of point A in the middle;

[0033] Figure 7 It is a schematic diagram of the cross-sectional structure of the outer shell of the present invention;

[0034] Figure 8 This is a schematic diagram of the cross-sectional structure of the purification box of the present invention;

[0035] Fig. 9 This is a schematic diagram of the internal structure of the purification box of the present invention;

[0036] Fig.10 This is a schematic diagram of the structure of the purification box of the present invention without the filter screen;

[0037] Fig.11 It is a schematic diagram of the local structure of the purification box of the present invention;

[0038] Fig.12 This is a schematic diagram of the structure of the storage rack of the present invention;

[0039] Fig.13 It is a schematic diagram of the internal structure of the placement box of the present invention.

[0040] In the figure:

[0041] 1. rectangular cavity; 101. cavity cover; 102. air cover plate;

[0042] 2. Filter; 201. Outer shell; 202. Inlet pipe; 203. Outlet pipe; 204. Purification box; 205. Filter; 206. Vertical plate; 207. Guide roller; 208. Gas flow channel; 209. Storage rack; 210. Dual-axis stepper motor; 211. Output shaft; 212. Worm gear; 213. Driving roller; 214. Lifting air pressure rod; 215. Round table ; 216, air pressure box; 217, push-down air pressure rod; 218, linear slide; 219, sliding rod; 220, piston plate; 221, air pipeline; 222, push rod; 223, pneumatic box; 224, swing rod; 225, follower gear; 226, half-tooth gear; 227, knock pneumatic rod; 228, pull rod; 229, collecting tank; 230, air outlet; 231, air guide plate;

[0043] 3. Turbine pump;

[0044] 4. Laparoscope;

[0045] 5. Cross flow fan;

[0046] 6. Double-axis output motor; 601. Motor seat. DETAILED DESCRIPTION

[0047] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings, but the present invention can be implemented in different forms and is not limited to the embodiments described in the text. On the contrary, these embodiments are provided to make the content disclosed in the present invention more thorough and comprehensive.

[0048] It should be noted that when an element is referred to as being "fixed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this article are for illustrative purposes only.

[0049] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly connected by technicians in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used in this article includes any and all combinations of one or more related listed items.

[0050] Example 1, please refer to the attached drawings Figure 1 and Figure 2 As shown,

[0051] A filtering circulation device for excimer laser gas comprises a rectangular cavity 1, a filter 2, a turbo pump 3, a cross-flow fan 5 and a double-shaft output motor 6.

[0052] Please refer to the attached pictures Figure 1 - Figure 5As shown, a chamber cover 101 is installed on both sides of the rectangular chamber 1, and a chamber mirror 4 is installed on each chamber cover 101; the rectangular chamber 1, the filter 2 and the turbo pump 3 are connected in sequence through a gas pipeline, and the gas pipeline between the turbo pump 3 and the rectangular chamber 1 is connected to the chamber cover 101. An air flow channel for gas flow is provided inside the chamber cover 101, and the air flow channel is connected to the inside of the rectangular chamber 1, and the chamber mirror 4 is located inside the air flow channel. The working gas with discharge dust in the rectangular chamber 1 enters the filter 2 through the gas pipeline, and the filter 2 filters the working gas with discharge dust. The filtered working gas enters the turbo pump 3, and the turbo pump 3 accelerates the flow of the working gas. Finally, the working gas returns to the inside of the rectangular chamber 1 through the air flow channel inside the chamber cover 101. Since the chamber mirror 4 is located in the air flow channel inside the chamber cover 101, the pressurized clean working gas cleans the chamber mirror 4, so that the dust removal capacity is greatly improved. At the same time, the pressurized clean working gas forms an air flow protection layer for the chamber mirror 4, which can prevent the working gas with discharge dust in the rectangular chamber 1 from directly contacting the chamber mirror 4.

[0053] Please refer to the attached pictures Figure 1 - Figure 5 As shown, two air outlet slots are provided in the rectangular cavity 1, and an air cover plate 102 is installed on the air outlet slots; an overall bell-shaped flow guiding structure is provided inside the air cover plate 102, and the gas pipeline connected to the filter 2 is provided on the small side of the bell mouth, and the air outlet slot of the rectangular cavity 1 is provided on the large side of the bell mouth. The special design of the air cover plate 102 can enhance its flow guiding effect, and is used to guide the working gas to gather and pressurize and enter the filter 2 from the air outlet slot.

[0054] Please refer to the attached pictures Figure 6 - Figure 8As shown, the filter 2 includes a hollow cylindrical outer shell 201, an air inlet pipeline 202 and an air outlet pipeline 203 are respectively installed at the upper end of the outer shell 201, and a purification box 204 is installed inside the outer shell 201; wherein, two vertical upright plates 206, a plurality of rotatably installed guide rollers 207 and a filter screen 205 are arranged inside the purification box 204, and the filter screen 205 bypasses the guide rollers 207 and forms a ring shape, and a gas flow channel 208 is formed between the two upright plates 206 and the inner wall of the purification box 204, and the air inlet pipeline 202 extends to the gas flow channel 208. The filter 205 is located inside the channel 208 and above the filter 205. A shelf 209 is provided on one side of one of the vertical plates 206. A dual-axis stepper motor 210 is installed at the lower end of the shelf 209. The output end of the dual-axis stepper motor 210 is connected to an output shaft 211 through a reducer. A worm gear 212 is installed on the output shaft 211. The two ends of the worm gear are connected to a driving roller 213. The driving roller 213 is connected to the filter 205 in a transmission manner. In actual use, belt strips can be installed on both sides of the filter 205 to ensure the effective rotation of the filter 205. The dual-axis stepper motor 210 drives the output shaft 211 to rotate. The output shaft 211 drives the driving roller 213 to rotate through the worm gear 212, so that the driving roller 213 drives the filter 205 to rotate. Since the filter 205 is always in a slow rotation process, the filter 205 is prevented from being blocked after long-term use.

[0055] Please refer to the attached pictures Figure 1 - Figure 5 As shown, the turbine pump 3 is rotatably arranged outside the rectangular cavity 1; the cross-flow fan 5 is rotatably arranged inside the rectangular cavity 1; the output end of the dual-axis output motor 6 is connected to the turbine pump 3 and the cross-flow fan 5 respectively; a motor seat 601 is connected between the rectangular cavity 1 and the turbine pump 3, and the dual-axis output motor 6 is located inside the motor seat 601. By adding the dual-axis output motor 6 and the turbine pump 3, the high-speed rotation of the turbine pump 3 is used to achieve the effect of supercharging, thereby increasing the flow rate of the working gas flowing back into the discharge cavity, and at the same time, the flow rate of the working gas is increased, and the filtering efficiency of the filter 2 for the discharge dust particles is also enhanced; at the same time, while the airflow is increased by supercharging, the ability of the purified working gas to blow and remove dust from the lens is greatly improved, that is, the dust removal effect is also improved accordingly.

[0056] Please refer to the attached pictures Figure 1 - Figure 6As shown, the regulation of the dual-axis output motor 6 and the dual-axis stepper motor 210 are all controlled by the excimer laser master control. The rotation speeds of the dual-axis output motor 6 and the dual-axis stepper motor 210 are in a certain ratio, that is, when the rotation speed of the dual-axis output motor 6 increases, the rotation speed of the dual-axis stepper motor 210 also increases accordingly. In this way, as the rotation speed of the dual-axis output motor 6 increases, the airflow velocity also increases. For the filter 205, the amount of working gas processed per unit time also increases accordingly, and the rate of decrease in the permeability of the filter 205 also increases accordingly. Since the rotation speed of the dual-axis stepper motor 210 also increases accordingly, the moving speed of the filter 205 increases, which can not only avoid the filter 205 from being used after being blocked, but also try to ensure that the filter 205 is always in the best permeability state.

[0057] Embodiment 2, based on Embodiment 1, please refer to the accompanying drawings.

[0058] Please refer to the attached pictures Figure 6 - Fig.13 As shown, a filter adjustment mechanism is provided inside the purification box 204, and the filter adjustment mechanism includes a lifting gas pressure rod 214 provided at the upper end of the rack 209, a round table 215 and a gas pressure box 216 provided inside the rack 209, and a downward push gas pressure rod 217 installed on the side wall of the air intake pipe 202, a push rod 222 is installed at the upper end of the lifting gas pressure rod 214, and the push rod 222 and the filter 205 are in sliding contact, one of the guide rollers 207 located between the two vertical plates 206 does not rotate and slides up and down inside the purification box 204, the downward push gas pressure rod 217 is located at the upper end of the guide roller 207 and is connected to the guide roller 207, the round table 215 is rotatably installed inside the rack 209, and the upper output end of the dual-axis stepping motor 210 is connected to the axis of the round table 215. Among them, the downward push gas pressure rod 217 has a built-in spring, so that it is in a contracted state when the filter 2 is not working.

[0059] A linear slide groove 218 is arranged on the side wall of the truncated table 215, and a vertical sliding rod 219 slides on the linear slide groove 218. A piston plate 220 slides inside the air pressure box 216, and the piston plate 220 and the sliding rod 219 are in sliding contact. An air supply pipeline 221 is connected between the output end of the air pressure box 216 and the lifting air pressure rod 214, and between the lifting air pressure rod 214 and the downward pushing air pressure rod 217.

[0060] As the dual-axis stepper motor 210 starts following the start of the dual-axis output motor 6, the dual-axis stepper motor 210 drives the round table 215 to rotate. The round table 215 rotates, and the centrifugal force increases, causing the sliding rod 219 sliding on the linear slide 218 to start sliding. The sliding of the sliding rod 219 will push the piston plate 220 inside the air pressure box 216 to move, so that the gas inside the air pressure box 216 is squeezed into the lifting gas pressure rod 214, causing the lifting gas pressure rod 214 to shrink. At the same time, the contraction of the lifting gas pressure rod 214 will squeeze the gas inside the lifting gas pressure rod 214 into the push-down gas pressure rod 2 17, the push-down pneumatic rod 217 is extended, and the lifting pneumatic rod 214 is contracted to drive the push rod 222 to move downward, so that the filter 205 is relaxed, and the extension of the push-down pneumatic rod 217 pushes the guide roller 207 to move downward, so that the filter 205 is tightened. The two cooperate with each other to ensure that the filter 205 is always in a tightened state. At the same time, due to the change in the position of the guide roller 207 in the gas flow channel 208, the surface area of ​​the filter 205 between the two guide rollers 207 in the gas flow channel 208 becomes larger, that is, the effective filtering area of ​​the filter 205 used for working gas filtering is changed.

[0061] During gas filtration, if the filtration area of ​​the filter 205 remains constant, when the gas flow rate increases, although the air volume increases and the filtration efficiency is improved, the gas flow rate will increase while the air pressure will increase, so the charged dust is not easily intercepted by the filter 205, which reduces the filtration effect; if the gas flow rate remains constant, and the filtration area of ​​the filter 205 is too large, it will cause the internal air flow resistance to increase, and the final air volume is low, affecting the filtration efficiency. Therefore, the gas flow rate and the effective filtration area of ​​the filter 205 are not the larger the better. This device adopts a filter adjustment mechanism. When the speed of the dual-axis output motor 6 increases, the working gas flow rate becomes faster, and the corresponding dual-axis stepper motor 210 speed also increases, so that the extension length of the push-down air pressure rod 217 becomes larger, increasing the effective filtration area of ​​the filter 205 in the gas flow channel 208, while ensuring the filtration efficiency, taking into account the filtration effect.

[0062] Please refer to the attached pictures Figure 6 - Fig.13As shown, a filter cleaning mechanism is provided inside the purification box 204, and the filter cleaning mechanism includes a pneumatic box 223 installed at the lower end of the rack 209, a placement box penetrated by the output shaft 211, and a swing rod 224 penetrating the placement box. A meshing follower gear 225 and a half-toothed gear 226 are provided inside the placement box. The half-toothed gear 226 and the output shaft 211 are connected by two meshing bevel gears. The follower gear 225 and the swing rod 224 are connected to each other. The two ends of the swing rod 224 are respectively installed with a knocking pneumatic rod 227. A piston block slides inside the pneumatic box 223, and a pull rod 228 is connected between the piston block and the piston plate 220. The air delivery port at the upper end of the side wall of the pneumatic box 223 and the knocking pneumatic rod 227 are connected by an air hose. Among them, the swing rod 224 has a built-in spring, so that it is in a contracted state when the filter 2 is not working.

[0063] A collection groove 229 is provided inside the purification box 204, and one end of the collection groove 229 is opened toward the knocking pneumatic rod 227. The front and rear sides of the purification box 204 are not in contact with the inner wall of the outer shell 201, and air outlets 230 are provided on the front and rear sides of the purification box 204. An air guide plate 231 is provided inside the purification box 204, and the air guide plate 231 is located in the gas flow channel 208.

[0064] As the dual-axis stepper motor 210 starts following the start of the dual-axis output motor 6, the dual-axis stepper motor 210 drives the output shaft 211 to rotate, and the output shaft 211 drives the half-tooth gear 226 to rotate through two mutually meshing bevel gears. When the half-tooth gear 226 rotates one circle, the half-tooth gear 226 first drives the follower gear 225 to rotate, and the follower gear 225 drives the swing rod 224 to rotate, so that the knocking pneumatic rod 227 also rotates accordingly. Afterwards, due to the particularity of the half-tooth gear 226, the half-tooth gear 226 no longer drives the follower gear 225 to rotate, and the knocking pneumatic rod 227 falls back and knocks on the filter screen 205, so that the charged dust on the filter screen 205 is shaken off and enters the inside of the collection tank 229. When the speed of the dual-axis output motor 6 increases, the working As the gas flow rate becomes faster, the charged dust becomes more stuck on the filter 205, and the charged dust is difficult to shake off the filter 205. Correspondingly, as the rotation speed of the dual-axis stepper motor 210 also increases, as the moving speed of the filter 205 becomes faster, the knocking frequency of the knocking pneumatic rod 227 becomes faster to ensure the cleaning effect. At the same time, the movement of the piston plate 220 will drive the movement of the piston block inside the pneumatic box 223 through the pull rod 228, so that the internal gas of the pneumatic box 223 is squeezed into the inside of the knocking pneumatic rod 227, so that the knocking pneumatic rod 227 is extended. As the knocking pneumatic rod 227 is extended, the movement amplitude of the knocking head at its end is also greater, so that the final knocking force of the knocking pneumatic rod 227 on the filter 205 is also increased, thereby ensuring the cleaning effect of the filter 205.

[0065] The specific operations are as follows:

[0066] The working gas with discharge dust inside the rectangular cavity 1 enters the filter 2 through the gas pipeline, and the working gas enters the gas flow channel 208 inside the purification box 204 along the air inlet pipe 202, and then the working gas passes through the filter 205 and leaves the purification box 204 from the air outlet 230, and then gathers and leaves the filter 2 from the air outlet pipe 203, and the filtered working gas enters the turbo pump 3, and the dual-axis output motor 6 drives the turbo pump 3 to move, and the turbo pump 3 accelerates the flow of the working gas, and finally the working gas returns to the inside of the rectangular cavity 1 through the air flow channel inside the cavity cover 101. Since the cavity mirror 4 is located in the air flow channel inside the cavity cover 101, the pressurized clean working gas cleans the cavity mirror 4;

[0067] When the working gas is filtered, the dual-axis stepper motor 210 is started along with the dual-axis output motor 6, and the dual-axis stepper motor 210 drives the output shaft 211 to rotate, and the output shaft 211 drives the driving roller 213 to rotate through the worm gear 212, so that the driving roller 213 drives the filter screen 205 to rotate. Since the filter screen 205 is always in a slow rotation process, the effective filtering of the working gas is guaranteed;

[0068] At the same time, the dual-axis stepper motor 210 drives the round table 215 to rotate. The round table 215 rotates, and the centrifugal force increases, so that the sliding rod 219 sliding on the linear slide 218 starts to slide. The sliding of the sliding rod 219 pushes the piston plate 220 inside the air pressure box 216 to move, so that the gas inside the air pressure box 216 is squeezed into the lifting gas pressure rod 214, so that the lifting gas pressure rod 214 shrinks. At the same time, the contraction of the lifting gas pressure rod 214 squeezes the gas inside the lifting gas pressure rod 214 into the downward pushing gas pressure rod 217, so that the downward pushing gas pressure rod 217 The extension of the push-up gas pressure rod 214 will drive the push rod 222 to move downward, so that the filter 205 is relaxed. The extension of the push-down gas pressure rod 217 will push the guide roller 207 to move downward, so that the filter 205 is tightened. The two cooperate with each other to ensure that the filter 205 is always in a tightened state. At the same time, due to the change in the position of the guide roller 207 in the gas flow channel 208, the surface area of ​​the filter 205 between the two guide rollers 207 in the gas flow channel 208 becomes larger, that is, the effective filtering area of ​​the filter 205 used for working gas filtering is changed;

[0069] At the same time, the dual-axis stepper motor 210 drives the output shaft 211 to rotate, and the output shaft 211 drives the half-tooth gear 226 to rotate through two mutually meshing bevel gears. When the half-tooth gear 226 rotates one circle, the half-tooth gear 226 first drives the follower gear 225 to rotate, and the follower gear 225 drives the swing rod 224 to rotate, so that the knocking pneumatic rod 227 also rotates accordingly. Afterwards, due to the particularity of the half-tooth gear 226, the half-tooth gear 226 no longer drives the follower gear 225 to rotate, and the knocking pneumatic rod 227 falls back and knocks on the filter screen 205, so that the charged dust on the filter screen 205 is shaken off and enters the inside of the collection tank 229. When the speed of the dual-axis output motor 6 increases, the flow rate of the working gas becomes faster, and the charged dust is stuck. The deeper the degree of charged dust on the filter 205, the more difficult it is to shake off the charged dust from the filter 205. Correspondingly, as the rotation speed of the dual-axis stepper motor 210 increases, as the moving speed of the filter 205 becomes faster, the knocking frequency of the knocking pneumatic rod 227 becomes faster, ensuring the cleaning effect. At the same time, the movement of the piston plate 220 will drive the movement of the piston block inside the pneumatic box 223 through the pull rod 228, so that the internal gas of the pneumatic box 223 is squeezed into the inside of the knocking pneumatic rod 227, so that the knocking pneumatic rod 227 is extended. As the knocking pneumatic rod 227 is extended, the movement amplitude of the knocking head at its end is also greater, so that the final knocking force of the knocking pneumatic rod 227 on the filter 205 is also increased, thereby ensuring the cleaning effect of the filter 205.

[0070] The above is an exemplary description of the present invention in combination with the accompanying drawings. It is obvious that the specific implementation of the present invention is not limited to the above-mentioned method. As long as such non-substantial improvements are made by adopting the method concept and technical solution of the present invention, or the concept and technical solution of the present invention are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A filtering and circulating device for excimer laser gas, characterized in that: include: A rectangular cavity (1), wherein cavity covers (101) are installed on both sides of the rectangular cavity (1), a cavity mirror (4) is installed on each cavity cover (101), and two air outlet slots are provided in the rectangular cavity (1), and air cover plates (102) are installed on the air outlet slots; A filter (2) comprising a hollow cylindrical outer shell (201), an air inlet pipeline (202) and an air outlet pipeline (203) being respectively installed at the upper end of the outer shell (201), and a purification box (204) being installed inside the outer shell (201); The purification box (204) is provided with two vertical upright plates (206), a plurality of rotatably mounted guide rollers (207) and a filter screen (205), the filter screen (205) passing around the guide rollers (207) and forming a ring shape, a gas flow channel (208) is formed between the two upright plates (206) and the inner wall of the purification box (204), the air intake pipeline (202) extends into the gas flow channel (208) and is located at the filter screen ( 205), one side of one of the vertical plates (206) is provided with a storage rack (209), a dual-axis stepping motor (210) is installed at the lower end of the storage rack (209), an output end of the lower end of the dual-axis stepping motor (210) is connected to an output shaft (211) via a reducer, a worm gear (212) is installed on the output shaft (211), and the two ends of the worm gear are connected to the axis of a driving roller (213), and the driving roller (213) and the filter screen (205) are connected to each other. The purification box (204) is connected to the air intake pipe (202) by transmission, and a filter adjustment mechanism is arranged inside the purification box (204), and the filter adjustment mechanism includes a lifting air pressure rod (214) arranged at the upper end of the storage rack (209), a round table (215) and an air pressure box (216) arranged inside the storage rack (209), and a downward pushing air pressure rod (217) installed on the side wall of the air intake pipe (202), and a push rod (222) is installed on the upper end of the lifting air pressure rod (214), and the push rod (222) and The filter screen (205) is in sliding contact, one of the guide rollers (207) located between the two vertical plates (206) does not rotate but slides up and down inside the purification box (204), the push-down air pressure rod (217) is located at the upper end of the guide roller (207) and is connected to the guide roller (207), the round table (215) is rotatably installed inside the storage rack (209), and the upper output end of the dual-axis stepping motor (210) is connected to the axis of the round table (215); A turbine pump (3) rotatably disposed outside the rectangular cavity (1); A cross-flow fan (5) is rotatably disposed in the rectangular cavity (1); The output ends of the dual-shaft output motor (6) are respectively connected to the turbine pump (3) and the cross-flow fan (5).

2. A filtering and circulating device for excimer laser gas according to claim 1, characterized in that: The rectangular cavity (1), the filter (2) and the turbine pump (3) are connected in sequence via a gas pipeline; the gas pipeline between the turbine pump (3) and the rectangular cavity (1) is connected to a cavity cover (101); an air flow channel for gas flow is provided inside the cavity cover (101); the air flow channel is communicated with the interior of the rectangular cavity (1); and the cavity mirror (4) is located inside the air flow channel.

3. The filtering and circulating device for excimer laser gas according to claim 1, characterized in that: An overall bell-shaped flow guide structure is arranged inside the gas cover plate (102); a gas pipeline connected to the filter (2) is arranged on the small side of the bell mouth; and the gas outlet slot of the rectangular cavity (1) is arranged on the large side of the bell mouth.

4. The filtering and circulating device for excimer laser gas according to claim 3, characterized in that: A linear slide groove (218) is provided on the side wall of the truncated table (215), a vertical sliding rod (219) slides on the linear slide groove (218), a piston plate (220) slides inside the air pressure box (216), the piston plate (220) and the sliding rod (219) are in sliding contact, and a gas pipeline (221) is connected between the output end of the air pressure box (216) and the lifting air pressure rod (214), and between the lifting air pressure rod (214) and the downward pushing air pressure rod (217).

5. The filtering and circulating device for excimer laser gas according to claim 4, characterized in that: A filter cleaning mechanism is arranged inside the purification box (204), and the filter cleaning mechanism comprises a pneumatic box (223) mounted at the lower end of the storage rack (209), a placement box penetrated by the output shaft (211), and a swing rod (224) penetrating the placement box. A meshing follower gear (225) and a half-tooth gear (226) are arranged inside the placement box. The half-tooth gear (226) and the output shaft (211) are connected by two meshing bevel gears. The follower gear (225) and the swing rod (224) are axially connected. A knocking pneumatic rod (227) is respectively installed at both ends of the swing rod (224). A piston block slides inside the pneumatic box (223), and a pull rod (228) is connected between the piston block and the piston plate (220). The air supply port at the upper end of the side wall of the pneumatic box (223) and the knocking pneumatic rod (227) are connected by an air hose.

6. The filtering and circulating device for excimer laser gas according to claim 5, characterized in that: A collecting groove (229) is provided inside the purification box (204), and one end of the collecting groove (229) is opened toward the knocking pneumatic rod (227). The front and rear sides of the purification box (204) are not in contact with the inner wall of the outer shell (201), and air outlets (230) are provided on the front and rear sides of the purification box (204). An air guide plate (231) is provided inside the purification box (204), and the air guide plate (231) is located in the gas flow channel (208).

7. The filtering and circulating device for excimer laser gas according to claim 1, characterized in that: A motor base (601) is connected between the rectangular cavity (1) and the turbine pump (3), and the dual-shaft output motor (6) is located inside the motor base (601).

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