Laser and electrolytic composite processing device and method

Abstract

The present invention discloses a device and method for improving the efficiency and stability of laser and electrolysis composite processing. The method for improving the efficiency and stability of laser and electrolysis composite processing includes: providing a laser light source, a power supply and the device for improving the efficiency and stability of laser and electrolysis composite processing, placing the workpiece to be processed at the outlet end of the composite tool electrode, and electrically connecting the power supply to the composite tool electrode and the workpiece to be processed respectively; making the laser beam provided by the laser light source and the electrolyte provided by the electrolyte module cooperate to pass through the constraint capillary and the composite tool electrode in sequence to the processing area of ​​the workpiece to be processed, and performing laser and electrolysis composite processing after turning on the power supply. In an embodiment of the present invention, a laser and electrolysis composite processing device is provided, in which the introduction of a tapered constraint capillary reduces the influence of coupling error on laser coupling efficiency, expands the coupling range required for efficient laser conduction, and improves the stability of laser coupling.

Description

Technical Field

[0001] The present invention particularly relates to a device and method for improving the efficiency and stability of laser and electrolysis composite processing, belonging to the technical field of special processing. Background Art

[0002] Laser beam machining (LBM) involves focusing a high-energy-density laser beam through a focusing lens and applying it to the surface of a material. The material in the illuminated area absorbs the laser energy, rapidly heating to its melting or boiling point, thereby efficiently removing the material being processed. As a non-contact processing method, laser machining boasts high processing speed, high precision, and excellent material adaptability, making it widely used in manufacturing industries such as aviation and aerospace. However, laser machining has limited deep processing capabilities. While it boasts extremely high processing efficiency at the surface, this efficiency decreases with increasing processing depth. Discharging processing products and plasma becomes difficult, leading to decreased laser efficiency, tapering, and heat accumulation. Furthermore, laser machining can also produce other defects, such as heat-affected zones (HAZs), recast layers, and microcracks. These defects can severely impact part quality, reliability, and stability during use, and thus hinder the development and application of laser machining technology. While ultrafast pulsed lasers can achieve machining without recast layers or thermal effects, they suffer from low material removal rates and are expensive.

[0003] Composite machining technology combines the characteristics and coupling effects of different machining processes to achieve the machining of workpiece materials, leveraging the advantages of each process while avoiding the problems of a single process. With the widespread use of difficult-to-machine materials, the requirements for machined surface quality and accuracy are gradually increasing. Due to its superior characteristics, composite machining technology has gradually become an irreplaceable machining process method in important fields such as extreme precision manufacturing and specialized machining.

[0004] In order to solve the problems of recast layer, thermal effects, microcracks and so on in micro-hole processing, the team previously proposed a laser and tube electrode electrochemical composite processing technology (Laser-STEM, Laser and Shaped Tube Electrochemical Machining) based on total reflection in the laser beam. After focusing, the laser beam enters the interior of the liquid-core fiber tube electrode and is transmitted to the processing area by total reflection. Taking advantage of the characteristic that the tube electrode can process deep into the material, the laser beam can intervene in the processing area synchronously with the feed of the composite tube electrode, realizing efficient and controllable coupling of the laser and electrochemical energy field in the processing area, thereby realizing deep laser intervention processing. The Laser-STEM process realizes the synchronous intervention of laser and electrochemical energy in the deep and small hole processing area, which can achieve efficient and precise removal of materials, without thermal effects and recast layer defects on the processing surface.

[0005] However, the Laser-STEM process requires precise focusing of the laser onto the entrance center of the liquid-core fiber tube electrode, which presents challenges such as difficult laser centering and coupling, a narrow coupling range, and significant influence of coupling errors on laser coupling efficiency. Therefore, exploring a highly efficient laser coupling method with lower requirements for laser coupling accuracy to improve the stability and ease of operation of the Laser-STEM process remains a pressing technical challenge in the industry. Summary of the Invention

[0006] The main purpose of the present invention is to provide a device and method for improving the efficiency and stability of laser and electrolytic composite processing, thereby overcoming the shortcomings of the prior art.

[0007] To achieve the aforementioned object of the invention, the technical solutions adopted by the present invention include:

[0008] A first aspect of an embodiment of the present invention provides an apparatus for improving the efficiency and stability of laser and electrolytic composite processing, comprising: a composite laser processing head, the composite laser processing head comprising a laser coupling module, a composite tool electrode, and a constraining capillary, the constraining capillary being spaced apart between the laser coupling module and the composite tool electrode, the composite tool electrode having a through flow channel therein;

[0009] The constraining capillary has a tapered lumen and a first port and a second port facing each other axially. The lumen is in communication with the first port and the second port. The first port faces the laser coupling module, and the second port faces the composite tool electrode. The laser coupling module is configured to couple a laser beam provided by a laser source to an orthographic projection of the first port. The inner wall of the lumen of the constraining capillary is configured to cause total reflection of the laser beam incident from the first port into the lumen and contacting the inner wall. The area of ​​the first port is greater than the radial cross-sectional area of ​​the flow channel within the composite tool electrode, greater than the area of ​​the second port, and greater than the radial cross-sectional area of ​​the laser beam coupled by the laser coupling module. The area of ​​the second port is less than the radial cross-sectional area of ​​the flow channel within the composite tool electrode.

[0010] The constraining capillary can pressurize the electrolyte entering its own lumen to form a high-speed water jet, and the water jet can cooperate with the laser beam entering the lumen of the constraining capillary itself to be transmitted into the composite tool electrode;

[0011] The composite tool electrode is used to transmit the laser beam and the electrolyte to the workpiece to be processed. The composite tool electrode can form an electrolytic system with the workpiece to be processed, the power supply, and the electrolyte.

[0012] A second aspect of an embodiment of the present invention provides a method for improving the efficiency and stability of laser and electrolytic composite processing, comprising:

[0013] Provide a laser light source, a power supply, and the device for improving the efficiency and stability of laser and electrolytic composite processing, place the workpiece to be processed at the outlet end of the composite tool electrode, and electrically connect the power supply to the composite tool electrode and the workpiece to be processed respectively;

[0014] The laser beam provided by the laser light source and the electrolyte provided by the electrolyte module are cooperatively transported to the processing area of ​​the workpiece to be processed through the constrained capillary and the composite tool electrode in sequence, and laser and electrolytic composite processing is performed after power is turned on.

[0015] Compared with the prior art, the advantages of the present invention include:

[0016] An embodiment of the present invention provides a laser and electrolytic composite processing device. By synchronously coupling a laser and a water jet into a tapered constrained capillary, the first port of the tapered constrained capillary, whose size is several times the diameter of the laser focus, is used as the coupling entrance of the laser beam. This can reduce the difficulty of laser alignment and improve the reliability and stability of laser and electrolytic composite processing.

[0017] In a laser and electrolysis composite processing device provided by an embodiment of the present invention, the outlet size of the tapered constrained capillary is much smaller than the inlet size, which can form a high-speed capillary water jet. The laser power density inside the water jet is high. At the same time, the laser is transmitted from the large-end inlet to the small-end outlet through the total reflection effect on the inner wall of the constrained capillary, and is coordinated with the water jet to be transmitted to the interior of the composite tool electrode and further to the processing area. In the laminar section, the laser is still transmitted by total reflection at the water-gas interface. The laser energy loss is small and the transmission efficiency is high, which can meet the processing requirements of high-efficiency, high-precision and high-surface integrity removal of workpiece materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of a laser and electrolytic composite processing device provided in a typical embodiment of the present invention;

[0019] Figure 2 This is a schematic structural diagram of a laser and electrolytic composite processing device provided in a typical embodiment of the present invention;

[0020] Figure 3a 、 Figure 3b 、 Figure 3c They are respectively schematic diagrams of the constrained capillary coupling transmission of a laser beam incident on a laser and electrolytic composite processing device in different ways in a typical embodiment of the present invention;

[0021] Figure 4a 、 Figure 4b They are respectively optical simulation schematic diagrams of the outlet of a constraining capillary of a laser and electrolysis composite processing device in a typical embodiment of the present invention. DETAILED DESCRIPTION

[0022] In view of the shortcomings of the prior art, the inventors of this case, after long-term research and extensive practice, have proposed the technical solution of the present invention. The following will further explain this technical solution, its implementation process and principles.

[0023] A first aspect of an embodiment of the present invention provides an apparatus for improving the efficiency and stability of laser and electrolytic composite processing, comprising: a composite laser processing head, the composite laser processing head comprising a laser coupling module, a composite tool electrode, and a constraining capillary, the constraining capillary being spaced apart between the laser coupling module and the composite tool electrode, the composite tool electrode having a through flow channel therein;

[0024] The constraining capillary has a tapered lumen and a first port and a second port facing each other axially. The lumen is in communication with the first port and the second port. The first port faces the laser coupling module, and the second port faces the composite tool electrode. The laser coupling module is configured to couple a laser beam provided by a laser source to an orthographic projection of the first port. The inner wall of the lumen of the constraining capillary is configured to cause total reflection of the laser beam incident from the first port into the lumen and contacting the inner wall. The area of ​​the first port is greater than the radial cross-sectional area of ​​the flow channel within the composite tool electrode, greater than the area of ​​the second port, and greater than the radial cross-sectional area of ​​the laser beam coupled by the laser coupling module. The area of ​​the second port is less than the radial cross-sectional area of ​​the flow channel within the composite tool electrode.

[0025] The constraining capillary can pressurize the electrolyte entering its own lumen to form a high-speed water jet, and the water jet can cooperate with the laser beam entering the lumen of the constraining capillary itself to be transmitted into the composite tool electrode;

[0026] The composite tool electrode is used to transmit the laser beam and the electrolyte to the workpiece to be processed. The composite tool electrode can form an electrolytic system with the workpiece to be processed, the power supply, and the electrolyte.

[0027] Furthermore, the constrained capillary can not only form a high-speed water jet, but also cause the laser beam to be totally reflected inside it, coupling the laser beam with the water jet. At the same time, the tapered lumen inside the constrained capillary can gradually constrain the internal laser beam to a smaller size range, thereby guiding the laser beam.

[0028] Furthermore, the diameter of the first port is more than 1.5 times the diameter of the second port.

[0029] Furthermore, the light-emitting surface of the laser coupling module is located above the first port of the lumen inside the constraining capillary.

[0030] Furthermore, the distance between the second port of the constraining capillary and the inlet end of the composite tool electrode is configured so that the laser and electrolyte jet output by the constraining capillary all enter the flow channel of the composite tool electrode from the inlet end of the composite tool electrode.

[0031] Furthermore, the second end of the constraining capillary is coplanar with the inlet end of the composite tool electrode, or the second end of the constraining capillary extends into the flow channel inside the composite tool electrode.

[0032] Furthermore, the inner wall curve of the tube lumen satisfies the requirement that the angle between the normal at each point of contact with the laser beam incident from the first port and the laser beam in contact conforms to the total internal reflection theorem. Specifically, the curve parameters of the inner wall of the tube lumen are obtained through optical simulation-assisted design and can be adjusted accordingly for different laser incident angles. The standard is the complementary angle of the incident laser divergence angle, and the normal at the point of contact with the inner wall of the tube lumen satisfies Snell's theorem.

[0033] Furthermore, the inner wall surface of the lumen is continuous and smooth.

[0034] Furthermore, the constraining capillary is coaxially arranged with the composite tool electrode, specifically, the lumen inside the constraining capillary is coaxially arranged with the flow channel inside the composite tool electrode.

[0035] It should be noted that the present invention uses a constraining capillary with a tapered lumen, the refractive index of the material of the inner wall of the lumen is lower than the refractive index of the commonly used electrolyte solution, the laser beam is transmitted inside the lumen and in the electrolyte environment by total reflection effect, and the large-diameter first port of the tapered lumen is used to align and focus the laser beam, thereby reducing the coupling difficulty of the laser beam entering the constraining capillary. At the same time, the second port with a smaller lumen diameter outputs the laser beam, thereby ensuring the requirement of concentrated output of the laser beam energy.

[0036] In a more specific embodiment, the composite laser processing head also includes: a sealed first electrolyte chamber and a sealed second electrolyte chamber, the first port of the constraining capillary is arranged in the first electrolyte chamber, the second port is arranged in the second electrolyte chamber, and the inlet end of the composite tool electrode is arranged in the second electrolyte chamber. A part of the electrolyte provided by the electrolyte module enters the constraining capillary through the first electrolyte chamber, and then enters the second electrolyte chamber and the composite tool electrode through the constraining capillary, and another part of the electrolyte enters the composite tool electrode through the second electrolyte chamber, and the electrolyte is sprayed to the processing area of ​​the workpiece to be processed through the composite tool electrode.

[0037] In a more specific embodiment, the device for improving the efficiency and stability of laser and electrolysis composite processing also includes: an electrolyte module, which is connected to the lumen of the constraining capillary and is at least used to provide electrolyte into the constraining capillary, and the refractive index of the inner wall of the lumen of the constraining capillary is lower than the refractive index of the electrolyte.

[0038] Furthermore, the electrolyte module is also connected to the flow channel of the composite tool electrode, and the electrolyte module is also used to provide electrolyte into the composite tool electrode.

[0039] Furthermore, the electrolyte module is communicated with the first electrolyte chamber and the second electrolyte chamber respectively.

[0040] Furthermore, the electrolyte module may include a pump and an infusion pipeline, etc., and the electrolyte is connected to the first electrolyte chamber and the second electrolyte chamber respectively through the pump and the infusion pipeline.

[0041] Furthermore, the laser coupling module may include optical elements such as a focusing lens.

[0042] In a more specific embodiment, the device for improving the efficiency and stability of laser and electrolysis composite processing also includes: a motion module, which is in transmission cooperation with the composite laser processing head and / or the workpiece to be processed, and is used to drive relative movement between the composite laser processing head and the workpiece to be processed.

[0043] A second aspect of an embodiment of the present invention provides a method for improving the efficiency and stability of laser and electrolytic composite processing, comprising:

[0044] Provide a laser light source, a power supply, and the device for improving the efficiency and stability of laser and electrolytic composite processing, place the workpiece to be processed at the outlet end of the composite tool electrode, and electrically connect the power supply to the composite tool electrode and the workpiece to be processed respectively;

[0045] The laser beam provided by the laser light source and the electrolyte provided by the electrolyte module are cooperatively transported to the processing area of ​​the workpiece to be processed through the constrained capillary and the composite tool electrode in sequence, and laser and electrolytic composite processing is performed after power is turned on.

[0046] In a more specific embodiment, the method for improving the efficiency and stability of laser and electrolytic composite processing further includes: using a motion module to drive relative motion between the composite laser processing head and the workpiece to be processed.

[0047] The technical solution, its implementation process and principles will be further explained below in conjunction with the accompanying drawings and specific implementation cases. Unless otherwise specified, the laser source, focusing lens, composite tool electrode, pump, power supply, etc. used in the embodiments of the present invention are all known to those skilled in the art and can be purchased commercially.

[0048] In a more specific embodiment, see Figure 1 and Figure 2 A laser and electrolysis composite processing device includes a laser / electrolysis composite processing head, a laser source, an electrolyte module, a power supply 7 and a motion module. The laser / electrolysis composite processing head is arranged between the laser source and the workpiece 8. The laser source is used to provide a laser beam 1 for processing the workpiece 8. The electrolyte module is connected to the laser / electrolysis composite processing head and is used to provide the electrolyte required for electrolytic processing of the workpiece 8. The laser / electrolysis composite processing head is used to couple the laser beam 1 and the electrolyte to the processing area of ​​the workpiece 8. The power supply 7 is electrically connected to the laser / electrolysis composite processing head and the workpiece 8 respectively, and cooperates with the electrolyte to form an electrolytic system for electrolytic processing of the workpiece 8. The motion module is coordinated with the composite laser processing head and / or the workpiece 8, and is used to drive relative motion between the composite laser processing head and the workpiece 8.

[0049] Specifically, the laser / electrolysis composite processing head includes a laser coupling module, a constrained capillary 3, a composite tool electrode 13 and an electrolyte container. The interior of the electrolyte container has a sealed first electrolyte chamber 9 and a second electrolyte chamber 11. The first electrolyte chamber 9 is arranged above the second electrolyte chamber 11 along the axial direction of the laser / electrolysis composite processing head. The laser coupling module is fixedly arranged on the top of the electrolyte container along the axial direction of the laser / electrolysis composite processing head. The composite tool electrode 13 is fixedly arranged on the bottom of the electrolyte container along the axial direction of the laser / electrolysis composite processing head. The constrained capillary 3 is fixedly arranged on the bottom of the electrolyte container. Internally, the constraining capillary 3 has a conical first lumen and a first port and a second port facing each other along its own axial direction. The first lumen is connected to the first port and the second port. The first port of the constraining capillary 3 is located in the first electrolyte chamber 9, and the second port is located in the second electrolyte chamber 11. The composite tool electrode 13 has a cylindrical second lumen and an inlet end and an outlet end communicating with the second lumen. The inlet end of the composite tool electrode 13 is located in the second electrolyte chamber 11. The first port of the constraining capillary 3 faces the laser coupling module, and the second port faces the inlet end of the composite tool electrode 13.

[0050] The laser coupling module is located on the optical path of the laser beam 1 emitted by the laser light source, and is used to focus the laser beam 1 provided by the laser light source to the orthographic projection area of ​​the first port of the constraining capillary 3 along its own axial direction. The laser beam 1 focused by the laser coupling module enters the constraining capillary 3 and the composite tool electrode 13 in sequence, and is reflected to the processing area of ​​the workpiece 8. The electrolyte module is respectively connected to the first injection port 10 of the first electrolyte chamber 9 and the second injection port 12 of the second electrolyte chamber 11. The electrolyte module respectively supplies electrolyte to the first electrolyte chamber 9 and the second electrolyte chamber 11. An electrolyte with a certain pressure is simultaneously injected into the electrolyte chamber 11. The electrolyte in the first electrolyte chamber 9 is constrained in the capillary 3, and then enters the second electrolyte chamber 11 and the composite tool electrode 13 through the constrained capillary 3. The electrolyte in the second electrolyte chamber 11 enters the composite tool electrode 13, and finally the electrolyte is sprayed to the processing area of ​​the workpiece 8 through the composite tool electrode 13. By setting the upper and lower electrolyte chambers, the voltage stabilizing effect of the constrained capillary 3 and the composite tool electrode 13 can be achieved, thereby improving the stability of the electrolyte jet.

[0051] It can be understood that the first lumen inside the constraining capillary 3 and the second lumen inside the composite tool electrode 13 are both through structures.

[0052] Specifically, the laser coupling module, the constraining capillary 3, the composite tool electrode 13 and the electrolyte container are all sealed together. For example, a sealing ring can be set between the laser coupling module, the constraining capillary 3, the composite tool electrode 13 and the electrolyte container to prevent leakage of the electrolyte and ensure the stability of the electrolyte jet.

[0053] Specifically, the first lumen within the constraining capillary 3 is a cone-shaped structure, while the second lumen within the composite tool electrode 13 is a cylinder. The axes of the constraining capillary 3, composite tool electrode 13, and focusing lens 2 are parallel, and the constraining capillary 3 and composite tool electrode 13 are preferably coaxial. The inner wall curve of the first lumen within the constraining capillary 3 satisfies the requirement of total internal reflection that the angle between its normal at each point of contact with the laser beam and the laser beam in contact conforms to the law of total internal reflection. This means that a laser beam incident from the first port of the constraining capillary 3 undergoes total internal reflection within the capillary 3 and ultimately exits from the second port.

[0054] Specifically, the inner diameter d of the first port of the constrained capillary 3 is ii >Inner diameter D of the second lumen inside the composite tool electrode 13 i >Inner diameter of the second port d oi >The diameter of the radial cross section of the laser beam focused by the focusing lens 2, specifically, the inner diameter d of the first port of the constraining capillary 3 ii is the inner diameter d of the second port oi 1.5 times or more of the inner diameter d of the first port of the constraining capillary 3 ii The inner diameter D of the second lumen inside the composite tool electrode 13 i More than 1.5 times the outer diameter d of the second port of the constraining capillary 3 oo Smaller than the inner diameter D of the second lumen inside the composite tool electrode 13 i , the outer diameter d of the first port of the constrained capillary 3 io The focal length f of the focusing lens 2, the axial length L of the constraining capillary 3, and the vertical distance Δ between the second end of the constraining capillary 3 and the inlet end of the composite tool electrode 13 are configured to achieve the following: the laser beam exits the light exiting surface of the focusing lens 2, passes through the constraining capillary 3, and enters the interior of the composite tool electrode 13 in conjunction with the electrolyte jet. The inner diameter D of the second lumen inside the composite tool electrode 13 is i The size is between the outer diameter of the second port and the inner diameter of the first port of the constraining capillary 3. The ratio of the inner diameter of the second lumen inside the composite tool electrode 13 to the inner diameter of the first lumen inside the constraining capillary 3 determines its improvement in the focusing beam coupling performance. That is, the larger the ratio, the lower the coupling difficulty, the lower the sensitivity to the fluctuation of the spatial position of the laser beam caused by other factors, and the higher the reliability of the system.

[0055] Specifically, the laser beam 1 is focused and coupled to the first port of the constraining capillary 3 through the focusing lens 2. The laser beam 1 undergoes a total reflection effect in the first tube cavity of the constraining capillary 3, and is synchronously coupled into the second tube cavity of the composite tool electrode 13 with the electrolyte, and is further transmitted to the processing area of ​​the workpiece 8 by the total reflection effect.

[0056] Specifically, the laser light source can be a laser, etc., and the laser beam 1 emitted by the laser light source can be a laser with a wavelength having a large absorption length in a liquid environment, preferably a green laser beam 1 with a wavelength of 532 nm. Specifically, the laser coupling module can include a collimating lens and a focusing lens 2 arranged in sequence, with the collimated laser beam 1 irradiated on the axis position of the focusing lens 2. It should be noted that both the collimating lens and the focusing lens 2 can be commercially available, and the specific configuration between the two can be set according to specific needs and is not limited here.

[0057] Specifically, the composite tool electrode 13 includes a low-refractive-index fluoropolymer constraining layer 4, a metal composite tool electrode 13 coaxially sleeved on the outside of the low-refractive-index fluoropolymer constraining layer 4, and an insulating coating 6 coated on the outer wall of the metal composite tool electrode 13. The metal composite tool electrode 13 is electrically connected to the negative pole of the power supply 7 through the electrode block 14.

[0058] Specifically, the electrolyte module may include a pump and an infusion pipeline, etc., through which the electrolyte is connected to the first electrolyte chamber 9 and the second electrolyte chamber 11, respectively. Specifically, the electrolyte can be an acidic, alkaline, or neutral chemical solution, such as a NaNO3 solution, a NaCl solution, or an H2SO4 solution. After being pressurized by the booster system, the electrolyte enters the first electrolyte chamber 9 and the second electrolyte chamber 11 through the pump and infusion pipeline, and then flows through the constraining capillary 3 and the composite tool electrode 13 to the processing area of ​​the workpiece 8.

[0059] Specifically, the power supply 7 is one of a DC power supply, a DC pulse power supply and a bipolar pulse power supply; the motion module can be a three-axis motion platform, a four-axis motion platform or a five-axis motion platform. For example, the three-axis motion platform can include X-axis, Y-axis and Z-axis motion structures, and the workpiece 8 can be installed on the Y-axis motion structure. Figure 2 The mark 15 in the figure is the movement feed direction of the laser / electrolysis composite processing head.

[0060] Specifically, the inner diameter d of the first port of the constraining capillary 3 in the present invention is ii >Inner diameter of the second port d oi >The diameter of the focus of the laser beam 1 (i.e., the diameter of the radial cross section of the laser beam 1), such as Figure 3a 、 Figure 3b 、 Figure 3c As shown, Figure 3a This is a schematic diagram of the laser beam axial offset incident coupling transmission. Figure 3b This is a schematic diagram of laser beam angle offset incident coupling transmission. Figure 3c This is a schematic diagram of the laser beam focus offset incident coupling transmission. It can be seen that the laser beam 1 is offset by different axial amounts Δ X , offset angle Δθ , defocus amount Δ f , the incident coupling enters the constraining capillary 3. Due to the structural characteristics of the constraining capillary 3 that gradually decreases from the first port to the second port, the inner diameter d of the first port of the constraining capillary 3 ii The first port is several times larger than the diameter of the focus of the laser beam 1. As the coupling entrance of the laser beam 1, the difficulty of laser alignment is reduced and the range of laser coupling transmission is expanded. The size of the inlet end of the constrained capillary is several times larger than the diameter of the laser focus, which reduces the laser coupling error and improves the stability and reliability of the laser coupling.

[0061] Specifically, the inner diameter d of the second port of the constrained capillary 3 is oi Much smaller than the inner diameter d of the first port ii Moreover, with the internal conical first lumen, the electrolyte entering the lumen can be pressurized to form a high-speed water jet. The laser power density inside the water jet is higher, thereby improving the efficiency of laser processing. At the same time, Figure 4a 、 Figure 4b As shown, Figure 4a 、 Figure 4b is the optical simulation result at the second port of the constrained capillary, Figure 4a is the distribution diagram at the second port (i.e., the outlet end) of the laser beam confinement capillary, Figure 4b is the radiation intensity of the laser beam at the second port (i.e., the outlet end) of the laser beam confinement capillary. It can be seen that the radiation intensity of the laser at the second port of the confinement capillary is large, and the laser energy density is large, thus achieving efficient transmission of the laser.

[0062] The present invention can be used to improve the performance of laser and electrolytic composite processing systems. The laser light source can use a quasi-continuous or pulsed laser. After being focused by a focusing lens, it is transmitted to the second port of the constrained capillary through a low-refractive-index conical confining capillary with a diameter gradually decreasing from the first port to the second port by total internal reflection. All laser energy can be focused on an area with a minimum diameter of 10 microns, and in conjunction with the electrolyte jet, enter the internal flow channel of the composite tool electrode through the second port of the confining capillary and be transmitted to the workpiece processing area through the composite tool electrode. The average laser power can reach 200W, and the wavelength can be between 350nm and 1064nm, preferably a laser with a wavelength of 532nm, which is used to reduce transmission process losses. The metal composite tool electrode is connected to the negative pole of the power supply, and the workpiece is connected to the positive pole of the power supply to achieve an electrolytic processing reaction. The synchronous action of the laser in the processing area has the effect of improving the efficiency of the electrolytic processing reaction and improving the processing accuracy.

[0063] An embodiment of the present invention provides a laser and electrolysis composite processing device, which introduces a low-refractive-index conical confining capillary whose diameter gradually decreases from a first port to a second port. The size of the first port is several times the diameter of the laser beam focus. As the coupling entrance of the laser beam, it can reduce the difficulty of laser alignment and improve the overall reliability and stability of the device.

[0064] In a laser and electrolysis composite processing device provided by an embodiment of the present invention, the size of the second port of the conical constraint capillary serving as the inlet is much smaller than the size of the first port serving as the outlet, which can form a high-speed capillary water jet (i.e., an electrolyte water jet). The laser power density inside the water jet is high, which can meet the micro-processing requirements of different types of materials. In addition, the laser is transmitted from the large-end inlet to the small-end outlet through the total reflection effect on the inner wall of the constraint capillary, and is coordinated with the water jet to be transmitted to the inside of the composite tool electrode and further to the processing area. In the laminar section (the capillary constraint tube and the composite tool electrode are laminar water jets), the laser is still transmitted by total reflection at the water-gas interface, resulting in low laser energy loss and higher transmission efficiency.

[0065] An embodiment of the present invention provides a laser and electrolysis composite processing device, in which the introduction of a tapered constraining capillary reduces the influence of coupling error on laser coupling efficiency, expands the coupling range required for efficient laser conduction, and improves the stability of laser coupling.

[0066] It should be understood that the above embodiments are merely illustrative of the technical concepts and features of the present invention. Their purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent variations or modifications made in accordance with the spirit and substance of the present invention are intended to be encompassed within the scope of protection of the present invention.

Claims

1. A laser and electrolytic composite processing device, characterized in that: include: A composite laser processing head, comprising a laser coupling module, a composite tool electrode, and a constraining capillary, wherein the constraining capillary is spaced between the laser coupling module and the composite tool electrode, and the composite tool electrode has a through flow channel therein; The constraining capillary has a tapered lumen and a first port and a second port facing each other axially. The lumen is in communication with the first port and the second port. The first port faces the laser coupling module, and the second port faces the composite tool electrode. The laser coupling module is configured to couple a laser beam provided by a laser source to an orthographic projection of the first port. The inner wall of the lumen of the constraining capillary is configured to cause total reflection of the laser beam incident from the first port into the lumen and contacting the inner wall. The area of ​​the first port is greater than the radial cross-sectional area of ​​the flow channel within the composite tool electrode, greater than the area of ​​the second port, and greater than the radial cross-sectional area of ​​the laser beam coupled by the laser coupling module. The area of ​​the second port is less than the radial cross-sectional area of ​​the flow channel within the composite tool electrode. The constraining capillary can pressurize the electrolyte entering its own lumen to form a high-speed water jet, and the water jet can cooperate with the laser beam entering the lumen of the constraining capillary itself to be transmitted into the composite tool electrode; The composite tool electrode is used to transmit the laser beam and the electrolyte to the workpiece to be processed. The composite tool electrode can form an electrolytic system with the workpiece to be processed, the power supply, and the electrolyte.

2. The laser and electrolytic composite processing device according to claim 1, characterized in that: The diameter of the first port is greater than or equal to 1.5 times the diameter of the second port.

3. The laser and electrolytic composite processing device according to claim 1 or 2, characterized in that: The light-emitting surface of the laser coupling module is located above the first port of the lumen inside the constraining capillary.

4. The laser and electrolytic composite processing device according to claim 1, characterized in that: The distance between the second port of the constraining capillary and the inlet end of the composite tool electrode is configured such that the laser and electrolyte jet outputted by the constraining capillary all enter the flow channel of the composite tool electrode from the inlet end of the composite tool electrode.

5. The laser and electrolytic composite processing device according to claim 4, characterized in that: The second end of the constraining capillary is coplanar with the inlet end of the composite tool electrode, or the second end of the constraining capillary extends into the flow channel inside the composite tool electrode.

6. The laser and electrolytic composite processing device according to claim 1, characterized in that: The inner wall curve of the tube cavity satisfies the requirement of the total reflection theorem that the angle between the normal line at each point of contact with the laser beam incident from the first port and the laser beam in contact therewith meets the requirement of the laser beam in contact therewith.

7. The laser and electrolytic composite processing device according to claim 6, characterized in that: The inner wall surface of the lumen is continuous and smooth.

8. The laser and electrolytic composite processing device according to claim 1, characterized in that: The composite laser processing head further comprises: A sealed first electrolyte chamber and a sealed second electrolyte chamber, the first port of the constraining capillary is arranged in the first electrolyte chamber, the second port is arranged in the second electrolyte chamber, and the inlet end of the composite tool electrode is arranged in the second electrolyte chamber. A part of the electrolyte provided by the electrolyte module enters the constraining capillary through the first electrolyte chamber, and then enters the composite tool electrode through the constraining capillary. Another part of the electrolyte provided by the electrolyte module enters the composite tool electrode through the second electrolyte chamber, and the electrolyte is sprayed to the processing area of ​​the workpiece to be processed through the composite tool electrode.

9. The laser and electrolytic composite processing device according to claim 8, characterized in that: Also includes: An electrolyte module is communicated with the lumen of the constraining capillary and is at least used to provide electrolyte into the constraining capillary. The refractive index of the inner wall of the lumen of the constraining capillary is lower than the refractive index of the electrolyte.

10. The laser and electrolytic composite processing device according to claim 9, characterized in that: The electrolyte module is also connected to the flow channel of the composite tool electrode, and the electrolyte module is also used to provide electrolyte into the composite tool electrode.

11. The laser and electrolytic composite processing device according to claim 10, characterized in that: The electrolyte module is communicated with the first electrolyte chamber and the second electrolyte chamber respectively.

12. The laser and electrolytic composite processing device according to claim 8, characterized in that: Also includes: A motion module is in transmission cooperation with the composite laser processing head and / or the workpiece to be processed, and is used to drive the composite laser processing head and the workpiece to be processed to generate relative motion.

13. A method for improving the efficiency and stability of laser and electrolytic composite processing, characterized in that: include: Provide a laser light source, a power supply, and a laser and electrolytic composite processing device according to any one of claims 1 to 12, place a workpiece to be processed at the outlet end of the composite tool electrode, and electrically connect the power supply to the composite tool electrode and the workpiece to be processed respectively; The laser beam provided by the laser light source and the electrolyte provided by the electrolyte module are cooperatively transported to the processing area of ​​the workpiece to be processed through the constrained capillary and the composite tool electrode in sequence, and laser and electrolytic composite processing is performed after power is turned on.

14. The method for improving the efficiency and stability of laser and electrolytic composite processing according to claim 13, characterized in that: Also includes: The motion module is used to drive the composite laser processing head and the workpiece to be processed to generate relative motion.

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