Data collection device, data collection system, database creation method, and recording medium

Abstract

A data collection device (10) in a semiconductor manufacturing system is connected with a plurality of controlled instruments that act in accordance with control instructions via an industrial network (for example, CC-Link IE TSN (Mitsubishi Electric trademark), a TSN network). The data collection device (10) has a main communication unit (13) that receives operation data indicating an operation state of each controlled instrument in each communication cycle, a creation section (120) that creates a multidimensional database having a first axis corresponding to a list of tags attached to each controlled instrument for managing the plurality of controlled instruments and a second axis corresponding to a list of communication cycles, and an addition section (130) that adds the operation data received by the main communication unit (13) to the database (40) in each communication cycle along the second axis in correspondence with the tag of the controlled instrument whose operation state is indicated by the operation data.

Description

TECHNICAL FIELD

[0001] The present application relates to a data collection device, a data collection system, a database creation method, and a recording medium. BACKGROUND

[0002] In a field where a FA (Factory Automation) system that controls various instruments is used, the importance of the use of data increases in order to perform quality management. For example, in a semiconductor manufacturing factory, a device instrument typified by a servo motor is controlled via an industrial network to transport a semiconductor wafer. By collecting and analyzing data from such a device instrument, abnormalities of the device instrument and abnormalities of the semiconductor wafer are detected.

[0003] A system like a semiconductor manufacturing factory is large in scale, and the data collected also increases, so the data is managed in a database. In order to use such a database, work for constructing the database, such as associating data with the transmission source or the management responsible person, is generated. Such work needs to be performed while confirming the structure of the actual system, so it becomes complicated, and the burden on system design and development business is large. Therefore, it is conceivable to use a technique that constructs a database automatically to some extent (for example, refer to Patent Literature 1).

[0004] In Patent Literature 1, a technique is described in which, every constant period, communication devices perform cyclic communication with each other, and a data collection management device manages communication data transmitted in the cyclic communication. The communication data includes a station number indicating the communication device as the transmission source and a period number that determines the communication period. The data collection management device manages the collected communication data by arranging row data including the station number, the period number, and the actual data of the communication data.

[0005] Patent Literature 1: International Publication No. 2021 / 130912 SUMMARY

[0006] The technique of Patent Literature 1 manages the timing at which communication data from which communication device has an error in the case where an error occurs in the communication data. Therefore, even in the case where row data indicating the communication data is arranged in one direction to be managed, as long as the row data includes the period number and the station number, the occurrence of an error can be managed.

[0007] However, in the case where a user uses the history of the periodic communication later, the information in which the row data described above is simply arranged lacks easy readability, so it cannot be said to be easy to use. Thus, there is room for making it easy to use the history of the periodic communication in the field of the FA.

[0008] The present application has been made in the above-described circumstances, and aims to make it easy to utilize a history of periodic communication at a site of an FA.

[0009] To achieve the above object, a data collection device according to the present application is connected to a plurality of controlled instruments that act in accordance with control instructions via a network, wherein the data collection device has: a communication unit that receives operation data indicating an operation state of each of the controlled instruments in each communication period defined by a shared time that is shared by the plurality of controlled instruments; a creation unit that creates a multidimensional database having a first axis corresponding to a list of tags attached to each of the controlled instruments for managing the plurality of controlled instruments, and a second axis corresponding to a list of the communication periods; and an addition unit that adds the operation data received by the communication unit to the multidimensional database along the second axis in each communication period in correspondence with the tag of the controlled instrument whose operation state is indicated by the operation data.

[0010] Effects of the Invention

[0011] According to the present application, the addition unit adds the operation data to the multidimensional database along the second axis in each communication period in correspondence with the tag of the controlled instrument. Thereby, a multidimensional database with high readability is generated as a reception history of the operation data. Thus, it becomes easy to utilize a history of periodic communication at a site of an FA. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is a diagram showing a structure of a data collection system according to Embodiment 1.

[0013] Figure 2 is a diagram showing one example of wafer processing within a manufacturing device in a semiconductor manufacturing process according to Embodiment 1.

[0014] Figure 3 is a diagram showing an input example for a user interface according to Embodiment 1.

[0015] Figure 4 is a diagram showing a hardware structure of an FA device according to Embodiment 1.

[0016] Figure 5 is a diagram showing a functional structure of a data collection device according to Embodiment 1.

[0017] Figure 6 is a diagram showing a database of a stage created by a creation unit according to Embodiment 1.

[0018] Figure 7 is a first diagram for explaining periodic communication according to Embodiment 1.

[0019] Figure 8 This is Figure 2, used to explain the periodic communication involved in Implementation 1.

[0020] Figure 9 This is a diagram showing the database to which operational data has been added by the additional unit in Implementation Method 1.

[0021] Figure 10 This is a flowchart illustrating the database table creation process involved in Implementation Method 1.

[0022] Figure 11 This is a diagram showing a summary of the system structure information involved in Implementation 1.

[0023] Figure 12 This is a diagram illustrating the functional structure of the data collection device involved in Embodiment 2.

[0024] Figure 13 This is a diagram illustrating an example of the database involved in Implementation Method 2.

[0025] Figure 14 This is a diagram illustrating an example of the database involved in Implementation Method 3. Detailed Implementation

[0026] Hereinafter, the data collection system according to embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0027] Implementation Method 1

[0028] The data collection system 100 involved in this embodiment is constructed as part of a control system that controls instruments in a factory via a network. This control system is, for example, a factory automation (FA) system used to implement production lines, processing lines, inspection lines, and other processing procedures. Furthermore, the data collection system 100 collects information from the instruments indicating the operating status of the instruments being controlled, and uses this collected information as the object of analysis. This analysis can be, for example, real-time detection of anomalies or anomaly precursors, analysis performed by the user for quality management, or analysis to automatically or manually improve the parameters used to control the instruments.

[0029] like Figure 1 As shown, the data collection system 100 includes: a data collection device 10 that controls and collects data from controlled instruments 31, 32, and 33; a terminal 20 that functions as a user interface for making various settings on the data collection device 10; and controlled instruments 31 to 33 that are controlled by the data collection device 10 via an industrial network 300.

[0030] The data collection device 10 is a control device, typically a PLC (Programmable Logic Controller), which controls the controlled instruments 31-33 connected via the industrial network 300 by executing the control program provided from the terminal 20. The control program can be written in ladder logic or in other languages.

[0031] The data collection device 10 includes: a CPU (Central Processing Unit) unit 11, which executes a control program to control the structural elements of the data collection device; an analysis unit 12, which analyzes operational data representing the operating status of the controlled instruments 31-33; a main communication unit 13, which communicates via an industrial network 300; and a DB (Database) unit 14, which stores operational data. The CPU unit 11, analysis unit 12, main communication unit 13, and DB unit 14 are connected and communicate with each other via a PLC bus 19. The PLC, i.e., the data collection device 10, is a function block type control device constructed by mounting the CPU unit 11, analysis unit 12, main communication unit 13, and DB unit 14 on a base unit having a PLC bus 19. The DB unit 14 has a database 40, which stores data collected from the controlled instruments 31-33. Hereinafter, the database 40 will be referred to as DB 40.

[0032] Each controlled instrument 31-33 corresponds to an instrument in a factory used to perform processing steps. Controlled instrument 31 includes: a slave communication unit 311 for communicating with the main communication unit 13 of the data collection device 10; and a servo instrument 312 comprising a servo amplifier and a servo motor. Controlled instrument 32 includes: a slave communication unit 321 for communicating with the main communication unit 13; and a servo instrument 322. Controlled instrument 33 includes: a slave communication unit 331 for communicating with the main communication unit 13; and a sensor 332. Hereinafter, each controlled instrument 31-33 will sometimes be referred to as controlled instrument 30 without further distinction. Each controlled instrument 30 operates according to control commands provided from an external source.

[0033] For example, the controlled instruments 31-33 implement as follows: Figure 2 The cleaning process of the semiconductor manufacturing apparatus shown is illustrated. In multiple processing tanks where wafers (materials) are sequentially cleaned, materials are transported using ball screws 35 driven by servo motors. Figure 2The case where the controlled instrument 31 has a servo motor of one axis is indicated by one ball screw 35 belonging to the process tank 1 together with the controlled instrument 31, and the case where the controlled instrument 32 has servo motors of two axes is indicated by two ball screws 35 belonging to the process tank 2 together with the controlled instrument 32. These servo motors act in accordance with control instructions from the control device, i.e., the data collection device 10.

[0034] In addition, Figure 2 The controlled instrument 33 shown has, in addition to Figure 1 the sensor 332, servo motors of two axes belonging to the process tank 3 together with the controlled instrument 33. Each controlled instrument 30 has only an action portion, which can be a servo instrument or a sensor, or a portion that performs an action different from that of a servo instrument and a sensor, and the action portion acts with respect to a process step or in correspondence with a process step in accordance with control instructions from the data collection device 10. Further, the action performed by the action portion can or can not be accompanied by movement of an object. For example, a sensor as the action portion can perform an action of outputting a signal indicating a sensing result of a sensing object, such as temperature, pressure, and flow rate, in a process step. Further, Figure 2 The semiconductor manufacturing process shown is realized by actions of a large number of controlled instruments including instruments other than the controlled instruments 31 to 33. As Figure 2 As shown,

[0035] As shown, Figure 2 The plurality of instruments including the controlled instruments 31 to 33 transmit operation data indicating an operation state of the instrument to the data collection device 10. The operation data received by the data collection device 10 is accumulated in the DB 40 and displayed to a user through the terminal 20 as necessary for analysis by the user. The operation data transmitted from the controlled instruments 31 and 32 having servo instruments 312 and 322 is, for example, data indicating a latest value of a motor speed, a torque, or a bus voltage of the servo instruments 312 and 322, and the operation data transmitted from the controlled instrument 33 having the sensor 332 is data indicating a latest sensing result obtained by the sensor 332. The operation data is periodically transmitted as described later.

[0036] Returning to Figure 1The terminal 20 can be an industrial PC (Personal Computer), a tablet terminal or a general PC, and can also be an information processing device functioning as another user interface. The terminal 20 is connected to the data collection device 10 via a communication line such as a USB (Universal Serial Bus) cable or a LAN (Local Area Network) cable. The terminal 20 functions to create and edit a control program for the data collection device 10 functioning as a control device by executing a software application program called an engineering tool, and writes the completed control program to the data collection device 10.

[0037] In addition, the terminal 20 is used to set parameters used by the data collection device 10 to communicate via the industrial network 300 and parameters used to execute the control program. These settings include settings related to the structure of the network system 101 including the data collection device 10 functioning as a control device and the controlled instruments 31 to 33. In detail, the user sets the structure of the network system 101 in which elements of the network system 101 are given names that the user himself or herself can easily understand or manage using the engineering tool. The names thus given are used as tags of the DB 40 described later. In other words, system structure information 21 representing the structure of the network system 101 is provided or created in the terminal 20 by the user. The system structure information 21 includes tag information 22 representing tags attached to the controlled instruments 31 to 33 as names used by the user to manage the controlled instruments 31 to 33.

[0038] In Figure 3 A user interface 201 of the terminal 20 is exemplified in FIG. 10. In the user interface 201, a window 202 for managing instruments connected to the industrial network 300 is displayed, and the user inputs tags attached to the respective controlled instruments 31 to 33 in the window 202. In detail, a tag name "Process Tank 1" which is a name easily understood by the user is input to an input field 511 of an icon 51 corresponding to the controlled instrument 31, a tag name "Process Tank 2" is input to an input field 512 of an icon 52 corresponding to the controlled instrument 32, and a tag name "Process Tank 3" is input to an input field 513 of an icon 53 corresponding to the controlled instrument 33. The tag names are not limited to Figure 3 Examples of the tag names can be arbitrary input names. The tag information 22 representing the tag names is provided from the terminal 20 to the data collection device 10, and is used when the DB 40 described later is created.

[0039] The CPU unit 11, the analysis unit 12, and the main communication unit 13 of the data collection apparatus 10 and the terminal 20 are each configured by a hardware element for functioning as a computer. In detail, as shown in Figure 4 The FA device 60 corresponding to each of the CPU unit 11, the analysis unit 12, the main communication unit 13, and the terminal 20 has a processor 61, a main storage section 62, an auxiliary storage section 63, an input section 64, an output section 65, and a communication section 66. The main storage section 62, the auxiliary storage section 63, the input section 64, the output section 65, and the communication section 66 are each connected to the processor 61 via an internal bus 67.

[0040] The processor 61 includes a CPU (Central Processing Unit) or an MPU (Micro Processing Unit) as a processing circuit. The processor 61 realizes various functions by executing a program PI stored in the auxiliary storage section 63, and performs the processes described later. The program PI of the terminal 20 corresponds to the engineering design tool described above. In addition, the processor 61 of the CPU unit 11 executes a control program in addition to the program PI.

[0041] The main storage section 62 includes a RAM. The program PI is loaded from the auxiliary storage section 63 to the main storage section 62. Also, the main storage section 62 is used as a work area of the processor 61.

[0042] The auxiliary storage section 63 includes a nonvolatile memory typified by an EEPROM and an HDD (Hard Disk Drive). The auxiliary storage section 63 stores various data used for the processing of the processor 61 in addition to the program PI. The auxiliary storage section 63 supplies data used by the processor 61 to the processor 61 in accordance with an instruction of the processor 61. In addition, the auxiliary storage section 63 stores data supplied from the processor 61.

[0043] The input section 64 includes an input device typified by a hardware switch, an input key, a keyboard, and a pointing device. The input section 64 acquires information input by a user of the FA device 60, and notifies the processor 61 of the acquired information.

[0044] The output section 65 includes an output device typified by an LED (Light Emitting Diode), an LCD (Liquid Crystal Display), and a speaker. The output section 65 prompts various information to the user in accordance with an instruction of the processor 61.

[0045] The communication section 66 includes a communication interface circuit for communicating with devices outside. The communication section 66 receives a signal from outside, and outputs data indicated by the signal to the processor 61. In addition, the communication section 66 transmits a signal indicating data output from the processor 61 to devices outside. Furthermore, in the present embodiment, one communication section 66 is shown representatively, but the FA device 60 can have a plurality of communication sections 66. For example, the main communication unit 13, that is, the FA device 60 can independently have a communication section 66 for communicating via the PLC bus 19 and a communication section 66 for communicating via the industrial network 300. Figure 4

[0046] The data collection device 10 functions variously by the cooperative action of the above-described hardware structure. Specifically, as shown in Figure 5 Fig. 1, the data collection device 10 has, as its functions, a reception section 110 that receives system structure information 21 provided from the terminal 20, a creation section 120 that creates a DB 40 having axes corresponding to a list of tags of the controlled instruments 30 indicated by the system structure information 21 and initializes, an addition section 130 that adds operation data received by the main communication unit 13 to the DB 40, and a control section 140 that transmits a control instruction to the controlled instruments 30 via the main communication unit 13.

[0047] The reception section 110 is mainly realized by the cooperative action of the processor 61 of the CPU unit 11 and the communication section 66. The reception section 110 acquires the system structure information 21 from the terminal 20, and recognizes the structure of the network system 101 based on the acquired system structure information 21. Specifically, the reception section 110 recognizes which instruments are connected to the industrial network 300. In Figure 1 Fig. 1, one industrial network 300 is shown, but in a case where the network system 101 is constituted by a plurality of industrial networks 300 via relay devices such as a hub and a gateway, the reception section 110 recognizes which instruments are connected to which industrial network based on the system structure information 21. The recognition of the instruments by the reception section 110 is recognition of information necessary for communication with the instruments, which includes, for example, a protocol with which the instrument can be communicated, a protocol with which the instrument should be communicated, and a station number or a network address of the instrument. Further, the reception section 110 can recognize a model or a type of the instrument, or information about other instruments.

[0048] The creation section 120 is mainly realized by the processor 61 of the CPU unit 11. The creation section 120 acquires, from the reception section 110, a tag attached to each of the controlled instruments 30 recognized by the reception section 110 as an element of the structure of the network system 101, and creates the DB 40 having axes corresponding to a list of the tags of the controlled instruments 30. Specifically, as shown in Figure 6 ​As shown, the creation unit 120 creates a 2-dimensional database defined by the 1st axis specified in the list of tags 410 and a 2nd axis different from the 1st axis. However, the database 40 in the stage created by the creation unit 120 does not contain actual data in the direction of the 2nd axis. Further, the tags of the respective controlled instruments 30 are associated with instrument IDs for identifying the respective controlled instruments 30 in the network system 101. The instrument IDs are IDs for identifying instruments used by the data collection apparatus 10 and the controlled instruments 30, and can be station numbers or network addresses, or other identifiers. The list of tags is mainly referred to by the user when using the DB 40, and the list of instrument IDs is mainly referred to by the data collection apparatus 10 when using the DB 40. In addition, the creation unit 120 notifies the list of instrument IDs of the created DB 40 to the addition unit 130. The creation unit 120 corresponds to one example of a creation unit that creates a multi-dimensional database.

[0049] The tag is different from the instrument ID. Specifically, the tag is arbitrarily decided by the user for the purpose of managing a plurality of controlled instruments 30, whereas the instrument ID is generally decided by the PLC, i.e., the data collection apparatus or other apparatus. In addition, the rule for deciding the tag is different from the rule for deciding the instrument ID. For example, in terms of the rule for deciding the tag, a longer number of characters is allowed in order to enable the user to use an arbitrary name, whereas the instrument ID is preferably uniform in length to a certain extent within the range of identifying the controlled instruments 30. That is, the number of characters is also arbitrary for the tag, whereas the length of the instrument ID is commonly shorter than the maximum number of characters of the tag for all controlled instruments 30. In addition, if decided and input by the user, the same name is allowed to be attached as a tag to different controlled instruments 30, whereas the instrument ID does not allow duplication.

[0050] Returning to Figure 5 , the master communication unit 13 and the slave communication units 311, 321, 331 of the controlled instruments 30 communicate with each other in accordance with the IEEE 802.1 TSN (Time Sensitive Networking) standard. Hereinafter, the IEEE 802.1 TSN standard is referred to as the TSN standard. In addition, hereinafter, the slave communication units 311, 321, 331 of the controlled instruments 30 are sometimes not distinguished and are referred to as the communication units.

[0051] Here, an outline of communication following the TSN standard by the master communication unit 13 and the slave communication units 311, 321, 331 is described. These communication units perform synchronization of time via the industrial network 300. In detail, the communication units share time with each other by a time synchronization protocol. The time synchronization protocol is a protocol for synchronizing the time of instruments on a network with high precision. For example, in the case of applying IEEE802.1AS as the time synchronization protocol, a grand master corresponding to one node on the network periodically issues a high-precision reference clock via the network. In addition, by making data go back and forth between the grand master and the other nodes, the other nodes obtain a reference clock corrected for the transmission delay. Thus, the time corrected for the transmission delay is shared.

[0052] Further, the sharing of time and the synchronization of time by the plurality of instruments means synchronizing the clocks each of the plurality of instruments has. By timing the same time by the clocks each of the plurality of instruments has, the plurality of instruments perform synchronization of time if the same time is shared among the plurality of instruments. Hereinafter, the time shared among the instruments is referred to as shared time.

[0053] The plurality of communication units transmits and receives data based on a schedule predetermined in accordance with the shared time. In detail, as shown in Figure 7 , each of the communication units performs communication in a time division multiplex manner in a communication period 41, 42 of a length predetermined in accordance with the shared time, respectively.

[0054] The communication periods 41, 42 are adjacent to each other. That is, the communication period 42 is provided immediately after the communication period 41, and the end time of the communication period 41 is equal to the start time of the communication period 42. In Figure 7 , two communication periods 41, 42 are shown, but the same communication periods as the communication periods 41, 42 are periodically provided before the communication period 41 and after the communication period 42. The length of the communication periods 41, 42 is, for example, 1 microsecond or 1 millisecond.

[0055] The communication periods 41, 42 each have time slots TS1, TS2 adjacent to each other. As shown in Figure 7 , in the case where the time slots TS1, TS2 are sequentially arranged in the communication period 41, the start time of the time slot TS1 is equal to the start time of the communication period 41, the end time of the time slot TS1 is equal to the start time of the time slot TS2, and the end time of the time slot TS2 is equal to the end time of the communication period 41. The time slot TS1 of the communication period 42 is arranged immediately after the time slot TS2 of the communication period 41.

[0056] The time slots TS1, TS2 are time periods for transmitting data of different categories as prescribed. In detail, the time slots TS1, TS2 are provided for communication of a prescribed form, channel or protocol, respectively. In detail, in the time slot TS1, control commands for the controlled instrument 30 are transmitted from the master communication unit 13 corresponding to the master to the slave communication units 311, 321, 331 in accordance with a protocol for real-time communication as shown by the dotted arrows in Figure 7 In the time slot TS2, operation data from the controlled instrument 30 are transmitted from the slave communication units 311, 321, 331 to the master communication unit 13 in accordance with a non-real-time protocol such as IP communication as shown by the bold arrows in Figure 7 The time slot TS1 corresponds to an example of a first time period for transmitting control commands, and the time slot TS2 corresponds to an example of a second time period for transmitting operation data.

[0057] The lengths of the communication periods 41, 42 are equal, and thus the communication at each time slot is performed periodically. However, the communication at the time slot TS1 follows a protocol that guarantees real-time, and thus a smaller amount of data is transmitted in each communication period as shown by the band 401 in Figure 8 On the other hand, the communication at the time slot TS2 follows a protocol that does not necessarily guarantee real-time, and thus the amount of data transmitted is not constant as shown by the band 402 in Figure 8 In the case where the size of data that should be transmitted exceeds the transmission capacity, the data can be transmitted in the next and subsequent time slots TS2. Therefore, the operation data transmitted from the slave communication units 311, 321, 331 in the time slot TS2 are given period information indicating the communication period in which the operation data were first transmitted. The data collection apparatus 10 having the master communication unit 13 determines the communication period in which the operation data are supposed to be received by referring to the period information given to the operation data. The period information can be information that distinguishes the communication period from other communication periods by an integer that is incremented from the start of the communication, can be information indicating the date and time or system time indicating the timing at which each communication period starts, or can be other information.

[0058] Returning to Figure 5 , the master communication unit 13 outputs the operation data and the period information received from the slave communication units 311, 321, 331 of the controlled instrument 30 to the appending unit 130. The master communication unit 13 corresponds to an example of a communication unit that receives operation data indicating the operation state of each controlled instrument in each communication period defined by a shared time shared by a plurality of controlled instruments.

[0059] The addition section 130 is mainly realized by the processor 61 of the CPU unit 11. The addition section 130 adds the operation data received by the main communication unit 13 along the second axis of the DB 40 in association with the instrument ID of the transmission source, i.e., the controlled instrument 30. In detail, for the operation data, the transmission source IP address included in the packet header of the data packet including the operation data or the data packet of the operation data is assigned as the transmission source information indicating the transmission source. The addition section 130 determines the instrument ID corresponding to the transmission source IP address from the list of instrument IDs notified from the creation section 120, and adds the value indicating the operation state of the controlled instrument 30 indicated by the operation data to the DB 40 in correspondence with the determined instrument ID and in correspondence with the communication cycle indicated by the cycle information assigned to the operation data in the second axis corresponding to the list of communication cycles. The addition section 130 corresponds to one example of an addition unit that adds the operation data received by the communication unit to the multidimensional database along the second axis in correspondence with the tag of the controlled instrument indicating the operation state by the operation data for each communication cycle.

[0060] For example, in Figure 9 , if the operation data belonging to the communication cycle (n+2) is received by the main communication unit 13 from the controlled instruments 31 to 33, the addition section 130 adds the operation data from the controlled instrument 31 to the row of the communication cycle (n+2) following the communication cycles (n) and (n+1) in the column 411 corresponding to the controlled instrument 31. Similarly, the addition section 130 adds the operation data from the controlled instrument 32 to the row of the communication cycle (n+2) in the column 412 corresponding to the controlled instrument 32, and adds the operation data from the controlled instrument 33 to the row of the communication cycle (n+2) in the column 413 corresponding to the controlled instrument 33. The second axis of the DB 40 corresponds to the time, and corresponds to the list of communication cycles.

[0061] As shown in Figure 9 , the DB 40 has the first axis corresponding to the list of tags of the controlled instruments 30, and is thus constituted using the structure of the industrial network 300. In addition, the DB 40 manages the operation data in a matrix along the first axis corresponding to the list of tags of the controlled instruments 30 and the second axis corresponding to the list of communication cycles. A large amount of operation data is managed in a matrix, and the communication cycles are specified by the precise shared time, so if the DB 40 is used, the operation data group generated in the network system 101 can be easily grasped.

[0062] Returning to Figure 5The analysis unit 12 utilizes the ease of overview provided by the DB 40 to analyze operational data. Specifically, the analysis unit 12, for example, determines parameters that should be set for the controlled instrument 30 to improve its performance, and then notifies the control unit 140 of these determined parameters. For instance, the analysis unit 12 determines the motor speed and torque that cause bus voltage instability, and identifies parameters that could be substitutes for such motor speed and torque. The analysis unit 12 can analyze operational data column-by-column or communication cycle-by-cycle. Furthermore, the analysis unit 12 can determine the cause of a fault through analysis of the operational data, and can also mitigate fault tendencies and improve the situation. The analysis unit 12 is an example of an analysis unit that performs analyses related to the controlled instrument based on operational data stored in a multidimensional database.

[0063] The control unit 140 is primarily implemented via the processor 61 of the CPU unit 11. The control unit 140 controls the controlled instrument 30 by generating control commands for setting parameters determined by the analysis unit 12 to the controlled instrument 30, and then sending these generated control commands to the controlled instrument 30 via the main communication unit 13. The control unit 140 is essentially an example of a control unit that controls the controlled instrument by sending control commands generated based on the analysis results obtained by the analysis unit.

[0064] Next, use Figure 10 , 11 The database table creation process performed by the data collection device 10 will be described.

[0065] like Figure 10 As shown, in the database table creation process, the receiving unit 110 receives system structure information 21 from the terminal 20 (step S1), the creation unit 120 extracts tag information 22 from the system structure information 21 (step S2), and creates a list of tags by arranging the tags represented by the tag information according to a predefined rule (step S3).

[0066] Here, system structure information 21 includes the network structure and information related to the instruments connected to each network. For example, such as... Figure 11 As shown, the system structure information 21 includes, as information related to each instrument, user-assigned tags, instrument IDs used for instrument identification by devices within the network system 101, and dynamically set network addresses. Furthermore, the instrument ID and network address can be the same information. The rules for creating the list of tags are as follows... Figure 11The rule of the instrument is determined in order from near to far from the data collection device 10 based on the data collection device 10, as shown by the arrow and the dotted circle surrounding the numbers. According to the rule, a list of labels given to the instruments is created in an order in which reception of the operation data is assumed to be fast to slow.

[0067] Next, the creation section 120 associates the instrument ID of each controlled instrument 30 as shown with the label (step S4), and creates a DB 40 having a first axis corresponding to the list of labels in the DB unit 14 (step S5). Then, the creation section 120 notifies the information of the created DB 40 to the addition section 130 (step S6). Figure 6

[0068] Next, the addition section 130 determines whether or not the main communication unit 13 receives the operation data from the controlled instrument 30 in the new communication cycle (step S7). In a case where it is determined that the operation data is not received (step S7; No), the addition section 130 repeatedly performs the determination of step S7 until the operation data is received. On the other hand, in a case where it is determined that the operation data is received (step S7; Yes), the addition section 130 adds the operation data to the DB 40 along the second axis (step S8). Then, the process by the data collection device 10 returns to step S7.

[0069] As described above, the reception section 110 receives the label input to the user interface 201 for managing the controlled instrument connected to the industrial network 300, and the addition section 130 adds the operation data to the DB 40 along the second axis in each communication cycle in correspondence with the label of the controlled instrument 30. Thereby, the DB 40 having high readability is generated as a reception history of the operation data. In addition, in this DB 40, the label input to the user interface 201 is used as the label of the controlled instrument 30 showing the operation state by the operation data, and thus the user using the DB 40 does not need to perform a post-confirmation work. That is, if the user constructs the network system 101 using the industrial network 300, the DB 40 having high readability can be generated without performing a preparation work for constituting a database outside of the construction. Thus, it is possible to easily use the history of the periodic communication in the field of the FA.

[0070] In addition, the control command is transmitted in the time slot TS1 for performing real-time communication, and in contrast to this, the operation data is transmitted in the time slot TS2 for performing non-real-time communication. Thereby, it is possible to perform the communication mixed with the real-time communication and the non-real-time communication without impairing the real-time property of the control command.

[0071] ​In addition, by using the DB 40 as described above, it is possible to efficiently perform the analysis of the operation data by the analysis unit 12. Further, the control instruction generated based on the analysis by the analysis unit 12 is transmitted to the controlled instrument 30, and thus it is expected that the operation of the controlled instrument 30 is efficiently improved.

[0072] In addition, in the past, a database has sometimes been created using the identification information of the controlled instrument 30 such as the instrument ID. However, regarding such identification information, generally, as information indicating a structural element of the system, it is not easy for the user to understand, and the user must confirm which device the site number is assigned to at the time of referring to the database. In contrast to this, in the present embodiment, as a label of the controlled instrument that shows the operation state by the operation data, the label received by the reception unit 110 from the input to the user interface by which the controlled instrument 30 is managed is used in the DB 40. Therefore, the user who uses the DB 40 does not need to perform a post-confirmation work.

[0073] Embodiment 2

[0074] Next, the embodiment 2 will be described focusing on the difference from the above-described embodiment 1. In addition, the same or equivalent reference numerals are used for the structures that are the same or equivalent to those of the above-described embodiment 1. In the above-described embodiment 1, the DB 40 contains the operation data, and if the DB 40 also contains the control data, it can be used for the post-analysis. Hereinafter, an example in which the DB 40 accumulates the history of the control data as well as the operation data will be described.

[0075] As Figure 12 shown, the data collection device 10 related to the present embodiment has a retrieval unit 150 that retrieves the control instruction output from the control unit 140. The retrieval unit 150 is mainly realized by the processor 61 of the CPU unit 11. The retrieval unit 150 outputs the retrieved control instruction to the addition unit 130. The retrieval unit 150 corresponds to one example of the retrieval unit that retrieves the control instruction for each controlled instrument in each communication cycle.

[0076] In addition, the control unit 140 outputs the control instruction that should be transmitted to the controlled instrument 30 regardless of the analysis by the analysis unit 12.

[0077] The addition unit 130 adds the control instruction supplied from the retrieval unit 150 to the DB 40 in addition to the operation data retrieved by the main communication unit 13. However, as Figure 13As shown, the appending unit 130 has a first axis corresponding to the tag list 420, which includes a first list of tags that serve as the source of operation data and a second list of tags that serve as the target of control commands. For the first list created by the creation unit 120, the appending unit 130 appends operation data along the second axis in the same manner as in Embodiment 1 described above. Furthermore, for the second list, the appending unit 130 appends control commands provided by the acquisition unit 150 along the second axis. That is, the appending unit 130 appends the control commands acquired by the acquisition unit 150 to DB 40 along the second axis in each communication cycle, corresponding to the tags in the second list of the controlled instruments 30 controlled by the control commands. Thus, control commands for each of the controlled instruments 31 to 33 are appended to columns 414, 415, and 416 in each communication cycle.

[0078] The analysis unit 12 analyzes the operational data and control commands contained in the DB 40, and the control unit 140 outputs control commands based on the analysis. Alternatively, information accumulated in the DB 40 can be set as the object of analysis by the user via the terminal 20.

[0079] As explained above, the same effect as in Embodiment 1 is achieved by adding control commands to DB 40. Furthermore, since DB 40 contains control commands in addition to operational data, it is expected to be used for more advanced analysis.

[0080] Implementation Method 3

[0081] Next, regarding Embodiment 3, the focus will be on its differences from Embodiment 1 described above. Furthermore, equivalent reference numerals will be used for structures that are the same as or equivalent to those in Embodiment 1. For example... Figure 14 As shown, in this embodiment, DB40 is generated as a 3D database having a third axis in addition to the first and second axes. This third axis corresponds to lists of first and second operating data sent from each of the controlled instruments 31-33. Here, the first and second operating data are multiple types of operating data that can be sent from a single controlled instrument 30 within a specific period. Figure 14 In the example, the controlled instrument 31, which is labeled "processing slot 1", sends first operating data with a value of "75" in the cycle (n) and second operating data with a value of "60", which are stored along the third axis of DB 40. Based on such DB 40, the retrieval and operation of the information contained in DB 40 become easy.

[0082] The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments.

[0083] For example, the case where the DB 40 is a 2-dimensional database or a 3-dimensional database is described, but a DB 40 of 4 dimensions or more can be further added.

[0084] In addition, the case where the data collection device 10 is a control device such as a PLC is described, but is not limited thereto. The data collection device 10 can be connected to the industrial network 300 as a device independent of the PLC. In the case where the data collection device 10 is different from the control device, the acquisition unit 150 can acquire the control instruction from the external control device via the communication unit of the data collection device 10.

[0085] In addition, the case where the data collection device 10 stores the DB 40 in the internal memory is described, but is not limited thereto. The data collection device 10 can also write the DB 40 to an external memory.

[0086] In addition, the case where the data collection device 10 refers to the transmission source information indicating the transmission source of the data packet as the operation data and the cycle information given to the operation data, thereby determining the row and the column of the DB 40 in which the operation data should be stored, is described, but is not limited thereto. For example, in the case where the order of the controlled instruments 30 that transmit the operation data is predetermined, and the transmission of the operation data in accordance with the order is periodically performed, the data collection device 10 can determine the column in which the operation data should be stored by determining whether the operation data is the operation data received in the k-th communication cycle. In addition, the row in which the operation data should be stored can be determined by the data collection device 10 in accordance with the communication cycle managed on the data collection device 10 side, without giving the cycle information to the operation data. In the case where the communication cycle in which the operation data is actually received becomes later than the communication cycle in which the operation data should be transmitted in accordance with a non-real-time protocol, it is considered that an error occurs in the row of the DB 40 in which the operation data is stored, but the error is small to some extent. In addition, the operation data can be transmitted in accordance with a real-time protocol.

[0087] The functions of the data collection device 10 described in the above embodiments can be realized by a dedicated hardware or by a general computer system.

[0088] For example, the program PI can be distributed by being stored in a recording medium readable by a computer, such as a floppy disk, a CD-ROM (Compact Disk Read-Only Memory), a DVD (Digital Versatile Disk), and a MO (Magneto-Optical disk), and the program PI can be installed in a computer, thereby constituting a device that performs the above processing.

[0089] Also, the program P1 can be stored in advance in a disk device of a server device on a communication network typified by the Internet, for example, superimposed on a carrier wave and downloaded to a computer.

[0090] Also, the above processing can be realized by starting execution of the program P1 while transmitting the program P1 via a network typified by the Internet.

[0091] Also, the above processing can be realized by executing all or a part of the program P1 on a server device and executing the program P1 while transmitting information related to the processing via a communication network by a computer.

[0092] Further, in a case where the above function is realized by an OS (Operating System) or in a case where the above function is realized by cooperative action between the OS and an application program, only a part other than the OS can be stored in a medium and distributed, and also, can be downloaded to a computer.

[0093] Also, the manner in which the terminal 20 utilizes the engineering design tool is not limited to the above-described embodiment, as with the program P1 utilized by the data collection device 10. For example, the terminal 20 can create the above-described system structure information 21 using an engineering design tool stored on a cloud server.

[0094] Also, the method of realizing the function of the data collection device 10 is not limited to software, and a part or all thereof can be realized by a dedicated hardware or circuit.

[0095] The present application can realize various embodiments and modifications without departing from the broad spirit and scope of the present application. Also, the above-described embodiments are for describing the present application, and are not intended to limit the scope of the present application. That is, the scope of the present application is indicated by the claims rather than the embodiments. Also, various modifications implemented within the scope of the claims and the meaning equivalent thereto are to be regarded as being within the scope of the present application.

[0096] Industrial Applicability

[0097] The present application is applicable to management of data on a site of FA.

[0098] Explanation of Reference Numerals

[0099] 10 data collection device, 11 CPU unit, 12 analysis unit, 13 main communication unit, 14 DB unit, 19 PLC bus, 20 terminal, 21 system configuration information, 22 tag information, 30-33 controlled instruments, 35 ball screw, 40 DB, 41, 42 communication period, 51-53 icon, 60 FA device, 61 processor, 62 main storage section, 63 auxiliary storage section, 64 input section, 65 output section, 66 communication section, 67 internal bus, 100 data collection system, 101 network system, 110 receiving section, 120 creating section, 130 adding section, 140 control section, 150 obtaining section, 201 user interface, 202 window, 300 industrial network, 311, 321, 331 slave communication unit, 312, 322 servo instrument, 332 sensor, 401, 402 frequency band, 411-416 column, 410, 420 list, 511-513 input field, P1 program, TS1, TS2 time slot.

Claims

1. A data collection apparatus which is connected via a network with a plurality of controlled instruments which act in accordance with control instructions, wherein the data collection apparatus having: a communication unit which receives operation data indicating an operation state of each of the controlled instruments in each communication period defined by a shared time point shared with the plurality of controlled instruments; a creation unit which creates a multidimensional database having a first axis corresponding to a list of tags attached to each of the controlled instruments for the purpose of managing the plurality of controlled instruments and a second axis corresponding to a list of the communication periods; an addition unit which adds the operation data received by the communication unit to the multidimensional database in each of the communication periods along the second axis in correspondence with the tag of the controlled instrument of which the operation state is indicated by the operation data; and a retrieval unit which retrieves the control instruction for each of the controlled instruments in each of the communication periods, the communication period having a first time zone and a second time zone configured within the communication period, in the first time zone, the control instruction for each of the plurality of controlled instruments is transmitted in the network, in the second time zone, the operation data of each of the plurality of controlled instruments is received by the communication unit, the first axis corresponds to a list including a first list which is a list of the tags of the controlled instruments which are a transmission source of the operation data and a second list which is a list of the tags of the controlled instruments which are a target of the control instruction, the addition unit adds the operation data to the multidimensional database in each of the communication periods along the second axis in correspondence with the tag of the first list, the addition unit adds the control instruction retrieved by the retrieval unit to the multidimensional database in each of the communication periods along the second axis in correspondence with the tag of the second list of the controlled instrument controlled by the control instruction, in the second axis, the communication periods are arranged in a non-repeating manner, in the first list, the tags are arranged in a non-repeating manner, and in the second list, the tags are arranged in a non-repeating manner.

2. The data collection apparatus according to claim 1, wherein further having a reception unit which receives the tag of the controlled instrument which is given by a user as a name of the controlled instrument, the tag given to different controlled instruments is allowed to be the same name.

3. The data collection apparatus according to claim 1, wherein further having an analysis unit which performs analysis relating to the controlled instrument based on the operation data stored in the multidimensional database.

4. The data collection apparatus according to claim 3, wherein further having a control unit which controls the controlled instrument by transmitting the control instruction generated based on a result of the analysis performed by the analysis unit.

5. The data collection apparatus according to any one of claims 1 to 4, wherein The communication unit receives the operation data to which transmission source information indicating a transmission source and period information indicating the communication period are assigned, The operation data is added to the multidimensional database based on the transmission source information and the period information.

6. A data collection system having: the data collection device according to any one of claims 1 to 4; and a plurality of the controlled instruments.

7. A database creation method executed by a data collection device connected to a plurality of controlled instruments that act in accordance with control instructions via a network, wherein The database creation method includes the following processes: A communication unit receives operation data indicating an operation state of each of the controlled instruments in each communication period defined by a shared time shared by the plurality of controlled instruments, A creation unit creates a multidimensional database having a first axis corresponding to a list of tags attached to each of the controlled instruments and a second axis corresponding to a list of the communication periods, An addition unit adds the operation data received by the communication unit to the multidimensional database along the second axis in each of the communication periods in correspondence with the tag of the controlled instrument whose operation state is indicated by the operation data, A retrieval unit retrieves the control instruction for each of the controlled instruments in each of the communication periods, The communication period has a first time period and a second time period arranged within the communication period, In the first time period, the control instruction for each of the plurality of controlled instruments is transmitted in the network, In the second time period, the operation data of each of the plurality of controlled instruments is received by the communication unit, The first axis corresponds to a list including a first list which is a list of the tags of the controlled instruments that are the transmission source of the operation data and a second list which is a list of the tags of the controlled instruments that are the target of the control instruction, The addition unit adds the operation data to the multidimensional database along the second axis in each of the communication periods in correspondence with the tag of the first list, The addition unit adds the control instruction retrieved by the retrieval unit to the multidimensional database along the second axis in each of the communication periods in correspondence with the tag of the second list of the controlled instrument controlled by the control instruction, In the second axis, the communication periods are arranged in a non-repeating manner, in the first list, the tags are arranged in a non-repeating manner, and in the second list, the tags are arranged in a non-repeating manner.

8. A computer-readable recording medium storing a program for causing a data collection device connected to a plurality of controlled instruments that act in accordance with control instructions via a network to function as the following units: A communication unit receives operation data indicating an operation state of each of the controlled instruments in each communication period defined by a shared time shared by the plurality of controlled instruments, a creating unit that creates a multidimensional database having a first axis corresponding to a list of tags attached to each of the controlled instruments and a second axis corresponding to a list of the communication periods; an adding unit that adds the operation data received by the communication unit to the multidimensional database in correspondence with the tags of the controlled instruments showing operation states by the operation data along the second axis in each of the communication periods; and a retrieving unit that retrieves the control instructions for each of the controlled instruments in each of the communication periods, the communication periods have a first time period and a second time period configured within the communication periods, in the first time period, the control instructions for each of the plurality of controlled instruments are transmitted in the network, in the second time period, the operation data of each of the plurality of controlled instruments is received by the communication unit, the first axis corresponds to a list including a first list which is a list of the tags of the controlled instruments as transmission sources of the operation data and a second list which is a list of the tags of the controlled instruments as targets of the control instructions, the adding unit adds the operation data to the multidimensional database in correspondence with the tags of the first list along the second axis in each of the communication periods, the adding unit adds the control instructions retrieved by the retrieving unit to the multidimensional database in correspondence with the tags of the second list of the controlled instruments controlled by the control instructions along the second axis in each of the communication periods, in the second axis, the communication periods are arranged in a non-repeating manner, in the first list, the tags are arranged in a non-repeating manner, and in the second list, the tags are arranged in a non-repeating manner.

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