Gyro surface mounted micromechanical structure, surface mounted gyro components and angular velocity sensors

Abstract

The present invention provides a gyro surface mounted micromechanical structure, a surface mounted gyro element and an angular velocity sensor. The gyro surface mounted micromechanical structure comprises: a body; a boss, the body is provided with a boss; and a spring beam, the spring beam is formed by providing a hollowing out on the body around the boss starting from the boss, and a hollowing out is formed between adjacent spring beams. The gyro surface mounted micromechanical structure has a simple structure, can effectively reduce the mechanical changes of the gyro sensitive structure caused by temperature changes, can reduce the influence of external shocks on the sensitive elements in the gyro, and can further reduce the mechanical noise in the surface mounted gyro element.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a gyroscope surface mounted micromechanical structure, a surface mounted gyroscope element and an angular velocity sensor. Background Art

[0002] It is known that the main noise of surface-mounted gyroscopes can be divided into two types: mechanical noise and circuit noise. Among them, mechanical noise is caused by mechanical structure changes caused by temperature changes, external shock vibrations, and structural aging. In the prior art, mechanical noise can be reduced by improving the processing technology, but even if the processing technology is improved, the perfect symmetry of the mechanical structure cannot be achieved. Summary of the invention

[0003] 1. Technical issues to be resolved The present invention provides a gyro surface mounted micro-mechanical structure, a surface mounted gyro element and an angular velocity sensor, which are used to solve the problem that the mechanical noise of the surface mounted gyro in the prior art is difficult to reduce.

[0004] (II) Technical solution In a first aspect, the present invention provides a gyroscope surface mounted micromechanical structure, comprising: ontology; a boss, wherein the boss is disposed on the body; and A spring beam is formed by arranging hollows on the body around the boss starting from the boss, and the hollows are formed between adjacent spring beams.

[0005] In some embodiments, the shape of the boss is axisymmetric.

[0006] In some embodiments, the hollow portion formed by the multiple hollow portions is symmetrical left-right and top-bottom as a whole.

[0007] In some embodiments, the gyro surface mounted micromechanical structure is made of conductive metal.

[0008] In some embodiments, the gyro surface mounted micromechanical structure is formed by plating a conductive metal layer on the surface of any medium.

[0009] In some embodiments, the gyro surface-mount micromechanical structure is integrally formed.

[0010] In some embodiments, it also includes steps (4), which are arranged on both sides of the body.

[0011] In some embodiments, the depth of the body relative to the step meets structural strength requirements.

[0012] In a second aspect, the present invention further provides a surface-mounted gyroscope component, comprising: A gyro surface mounted micromechanical structure as described in any of the preceding items; A central island, wherein the central island is disposed on the boss of the gyro surface mounted micromechanical structure; an outer frame, the outer frame extending outward from the central island to surround the central island; and The interdigitated fingers extend outward from the outer frame and are arranged within the range of the main body.

[0013] In a third aspect, the present invention further provides an angular velocity sensor, comprising: the surface-mounted gyroscope element as described above.

[0014] (III) Beneficial effects According to the present invention, a gyroscope surface-mounted micromechanical structure is provided. As a component of a surface-mounted gyroscope, the structure is simple, and the mechanical changes of the gyroscope's sensitive structure caused by temperature changes can be effectively reduced, and the influence of external shocks on the sensitive elements in the gyroscope can be reduced, thereby reducing the mechanical noise in the surface-mounted gyroscope elements. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 is a schematic structural diagram of a gyro surface mounted micromechanical structure according to an embodiment of the present invention; Figure 2 is a schematic structural diagram of a sensitive structure in a surface-mounted gyroscope element according to an embodiment of the present invention; Figure 3 is a schematic structural diagram of a surface-mounted gyroscope element according to an embodiment of the present invention; Figure 4 is a schematic structural diagram of a gyro surface mounted micromechanical structure of another embodiment of the present invention; Figure 5 is a structural schematic diagram of a gyro surface mounted micromechanical structure according to another embodiment of the present invention; Figure 6 is a schematic diagram of the shear stress to which the sensitive element installed in the gyro surface mounted micromechanical structure of the present invention is subjected; Figure 7 is a schematic diagram of the shear stress to which the sensitive element of the gyro surface mounted micromechanical structure not installed in the present invention is subjected; Figure 8is a schematic diagram of thermal stress on a sensitive element of a gyro surface mounted micromechanical structure not mounted on the present invention; Fig. 9 It is a schematic diagram of the thermal stress to which the sensitive element installed in the gyro surface mounted micromechanical structure of the present invention is subjected.

[0017] Description of reference numerals: 1: Boss; 2: Hollow; 3: Spring beam; 4: Step; 5: Main body; 6: Fork finger; 7: Center island; 8: Outer frame. DETAILED DESCRIPTION

[0018] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0019] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] It should be noted that some embodiments of the present invention are described below with reference to the accompanying drawings. However, the dimensions, materials, shapes, and relative configurations of the components described in the embodiments or shown in the accompanying drawings do not limit the scope of the present invention to these, but are merely illustrative examples.

[0021] Figure 1 FIG. 1 is a schematic diagram of a gyro surface mounted micromechanical structure according to an embodiment of the present invention. Figure 1 As shown, the gyro surface-mounted micromechanical structure includes: a body 5; a boss 1, on which the boss 1 is arranged; and a spring beam 3, which is formed by arranging hollows on the body 5 around the boss 1 starting from the boss 1, and hollows are formed between adjacent spring beams 3.

[0022] Figure 2 It is a schematic structural diagram of a sensitive structure in a surface-mounted gyroscope element according to an embodiment of the present invention. Figure 3 It is a schematic structural diagram of a surface-mounted gyroscope element according to an embodiment of the present invention. Figure 3 The surface mount gyroscope component in Figure 1 Gyro surface mounted micromechanical structure and Figure 2 The surface-mounted gyroscope components obtained by combining the sensitive structures in the above examples include: Figure 1The gyroscope surface mounted micromechanical structure shown in the figure; the central island 7, which is arranged on the boss 1 of the gyroscope surface mounted micromechanical structure; the outer frame 8, which extends outward from the central island 7 to surround the central island 7; and the fork finger 6, which extends outward from the outer frame 8 and is arranged within the range of the body 5. Among them, the fork finger 6 is a sensitive element, also known as a tuning fork, which can convert the angular velocity into the displacement of a specific sensing structure through the Coriolis force, so as to measure the angular velocity.

[0023] By fixing the sensitive structure of the surface-mounted gyroscope element on the gyroscope surface-mounted micromechanical structure provided by the present invention, specifically, fixing the central island in the sensitive structure on the boss in the gyroscope surface-mounted micromechanical structure, the influence of thermal stress and external impact can be reduced.

[0024] Optionally, the shape of the boss is axisymmetric. For example, the shape of the boss can be circular, rectangular, polygonal, etc. Figure 4 FIG. 1 is a schematic diagram of a gyro surface mounted micromechanical structure according to another embodiment of the present invention. Figure 4 As shown, the boss can be circular.

[0025] Optionally, the hollow portion formed by a plurality of hollow portions is symmetrical left-right and top-bottom as a whole. Figure 5 FIG. 1 is a schematic diagram of a gyro surface mounted micromechanical structure according to another embodiment of the present invention. For example, the hollowed-out shape may be a rectangle, a polygon, a sector, etc. Figure 1 and 5 As shown, the hollow portion may be a shape formed by combining a plurality of rectangles, such as Figure 4 As shown, the hollow portion may also be a shape formed by combining a plurality of circular rings or irregular shapes, as long as the hollow portion formed by the combination is symmetrical on the left and right and symmetrical on the top and bottom as a whole.

[0026] Since the spring beam 3 is formed by providing the hollow 2 on the body 5, the shape of the spring beam can also be various shapes corresponding to the shape of the hollow. Figure 1 , 4 As shown in Figure 5, the spring beam as a whole is also symmetrical in both left and right directions and in both top and bottom directions, and the shape and number of the hollow and spring beams can be specifically set as needed. In addition, since there is no need to set an additional spring beam, it helps to simplify the structure, and since the spring beam is integrated with the body, the support is more stable.

[0027] By setting the positional relationship and shape of each component in the gyro surface-mounted micromechanical structure as described above, it is possible to help balance the mass of the entire surface-mounted gyro device and improve the detection sensitivity.

[0028] In the prior art, the noise in the surface-mounted gyroscope also includes circuit noise, which includes thermal noise generated by resistors, shot vibration generated by irregular fluctuations of emitter current or collector current, and vibration noise generated by transistors. Currently, the commonly used methods for reducing circuit noise include median filtering technology, analog feedback technology, and digital feedback technology. However, the above methods not only increase the complexity of the peripheral circuit system, but also may generate new circuit noise.

[0029] In any of the above-mentioned gyro surface-mounted micromechanical structures, the gyro surface-mounted micromechanical structure may be made of conductive metal, or may be made of a conductive metal layer plated on the surface of any medium. Optionally, the gyro surface-mounted micromechanical structure may be integrally formed.

[0030] Since the material of the gyroscope surface-mounted micromechanical structure is a conductive metal or the surface is plated with a conductive medium, based on the Faraday cage principle, through the aforementioned specific conductive structure, the tuning fork installed on the structure can avoid being interfered by the electric field and electromagnetic waves of the peripheral circuit system, thereby improving the stability and sensitivity of the gyroscope.

[0031] Optionally, a step 4 may be further included, and the step 4 is arranged on both sides of the body 5. The height of the step 4 may be the same as the height of the body, or may be greater than the height of the boss. Optionally, the depth of the body 5 relative to the step 4 meets the structural strength requirements.

[0032] As described above, the gyroscope surface-mounted micromechanical structure provided according to the present invention can reduce the influence of thermal stress and external impact, that is, reduce mechanical noise. In addition, it can avoid interference from electric fields and electromagnetic waves from peripheral circuit systems, that is, reduce circuit noise, thereby reducing the noise of the surface-mounted gyroscope element and improving the stability and sensitivity of the surface-mounted gyroscope element. Moreover, the construction and installation of the micromechanical structure are relatively simple, and will not further increase the complexity of the circuit or introduce new noise.

[0033] On the other hand, the present invention also provides a surface-mounted gyroscope element, comprising: the gyroscope surface-mounted micromechanical structure as described above; a central island 7, which is arranged on the boss 1 of the gyroscope surface-mounted micromechanical structure; an outer frame 8, which extends outward from the central island 7 to surround the central island 7; and forked fingers 6, which extend outward from the outer frame 8 and are arranged within the range of the main body 5.

[0034] By installing the sensitive element in the surface-mounted gyroscope element on the gyroscope surface-mounted micromechanical structure, the noise of the surface-mounted gyroscope element can be reduced and the stability and sensitivity of the surface-mounted gyroscope element can be improved. In addition, the construction and installation of the micromechanical structure are relatively simple, and will not further increase the complexity of the circuit or introduce new noise.

[0035] The technical effect of the gyro surface mounted micromechanical structure of the present invention is verified by simulation below.

[0036] 1) Reduce the impact of external shocks Figure 6 It is a schematic diagram of the shear stress to which the sensitive element installed in the gyro surface mounted micromechanical structure of the present invention is subjected. Figure 7 Schematic diagram of the shear stress on the sensitive element of the gyro surface mounted micromechanical structure not installed in the present invention. Figure 6 and 7 As shown in the figure, under the same experimental conditions, when subjected to the same external load impact, the shear stress (value is 1.72×10 8 N / m 2 ) is approximately the shear stress (value of 1.7×10 6 N / m 2 ) times.

[0037] 2) Reduce the impact of thermal stress Figure 8 It is a schematic diagram of the thermal stress to which the sensitive element of the gyro surface mounted micromechanical structure not mounted on the present invention is subjected. Fig. 9 FIG. 1 is a schematic diagram of the thermal stress to which the sensitive element of the gyro surface mounted micromechanical structure of the present invention is subjected. Figure 8 and 9 As shown in the figure, under the same experimental conditions, at 150°C, the thermal stress (value is 2.79×10 5 N / m 2 ) is greater than the thermal stress (value of 5.83×10 6 N / m 2 ) is about 20 times lower.

[0038] On the other hand, the present invention further provides an angular velocity sensor, comprising: the surface-mounted gyroscope element as described above.

[0039] By including the surface-mounted gyro element as described above, the sensitivity and accuracy of the angular velocity sensor can be improved.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gyroscope surface mounted micromechanical structure, characterized in that: include: ontology; a boss, wherein the boss is disposed on the body; and A spring beam is formed by arranging hollows on the body around the boss starting from the boss, and the hollows are formed between adjacent spring beams.

2. The gyro surface mounted micromechanical structure according to claim 1, characterized in that: The shape of the boss is axisymmetric.

3. The gyro surface mounted micromechanical structure according to claim 2, characterized in that: The hollow portion formed by the plurality of hollows is symmetrical left-right and top-bottom as a whole.

4. The gyro surface mounted micromechanical structure according to claim 1, characterized in that: The gyro surface mounted micromechanical structure is made of conductive metal.

5. The gyro surface mounted micromechanical structure according to claim 1, characterized in that: The gyro surface mounted micromechanical structure is formed by plating a conductive metal layer on the surface of any medium.

6. The gyro surface mounted micromechanical structure according to any one of claims 1 to 5, characterized in that: The gyro surface mounted micromechanical structure is integrally formed.

7. The gyro surface mounted micromechanical structure according to claim 6, characterized in that: It also includes steps, which are arranged on both sides of the body.

8. The gyro surface mounted micromechanical structure according to claim 7, characterized in that: The depth of the body relative to the step meets the structural strength requirement.

9. A surface-mounted gyroscope component, characterized in that: include: The gyro surface mounted micromechanical structure according to any one of claims 1 to 8; A central island, wherein the central island is disposed on the boss of the gyro surface mounted micromechanical structure; an outer frame, the outer frame extending outward from the central island to surround the central island; and The interdigitated fingers extend outward from the outer frame and are arranged within the range of the main body.

10. An angular velocity sensor, characterized in that: include: The surface mounted gyro component as claimed in claim 9.

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