Method for predicting total organic carbon content of ultrapure water and related device

Abstract

The embodiment of the invention provides a method for predicting the total organic carbon content of ultrapure water and a related device. The method for predicting the total organic carbon content of the ultrapure water comprises the following steps: detecting the total organic carbon reference content in sample water; wherein the sample water is obtained by filtering raw water through a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin and a multi-stage total organic carbon ultraviolet digestion device; and predicting the total organic carbon predicted content of ultrapure water obtained by filtering the raw water according to the total organic carbon reference content. The method for predicting the total organic carbon content of the ultrapure water and the related device can be used for predicting the total organic carbon content of the ultrapure water.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of ultrapure water detection technology, and in particular to a method for predicting the total organic carbon content of ultrapure water and related devices. Background Art

[0002] Ultrapure water preparation systems are used to prepare ultrapure water. Ultrapure water refers to high-purity water that has removed almost all impurities such as ions, organic matter, particulate matter, dissolved gases and microorganisms. Ultrapure water is usually used in semiconductor manufacturing, pharmaceuticals, biotechnology, power plants, precision manufacturing and scientific research.

[0003] The total organic carbon (TOC) content in ultrapure water is used to evaluate the degree of water pollution, purity, and whether it meets the requirements of specific uses. Related technologies clarify water quality fluctuations by detecting the TOC content of raw water or the TOC content of water in any treatment unit in the ultrapure water system.

[0004] However, the TOC content of water at the ultrapure water output cannot be predicted in the above manner. Summary of the invention

[0005] In view of this, multiple embodiments of the present application are directed to providing a method and related apparatus for predicting the total organic carbon content of ultrapure water, which can achieve the prediction of the total organic carbon content of ultrapure water.

[0006] One embodiment of the present application provides a method for predicting the total organic carbon content of ultrapure water, comprising: detecting a reference content of total organic carbon in sample water; wherein the sample water is obtained by filtering raw water through a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device; and predicting an estimated total organic carbon content in ultrapure water obtained by filtering the raw water based on the reference content of total organic carbon.

[0007] Optionally, the filter includes at least one of a melt-blown filter element filter and an activated carbon filter; the multi-stage reverse osmosis membrane includes at least a primary reverse osmosis membrane and a secondary reverse osmosis membrane; the multi-stage ion exchange resin includes at least a primary ion exchange resin and a secondary ion exchange resin; the multi-stage total organic carbon ultraviolet decomposition device includes at least a primary multi-stage total organic carbon ultraviolet decomposition device and a secondary multi-stage total organic carbon ultraviolet decomposition device.

[0008] Optionally, the filter, the multi-stage reverse osmosis membrane, the multi-stage ion exchange resin, and the multi-stage total organic carbon ultraviolet decomposition device are arranged in the following order: the spray-melt filter element filter, the activated carbon filter, the primary reverse osmosis membrane, the secondary reverse osmosis membrane, the primary total organic carbon ultraviolet decomposition device, the primary ion exchange resin, the secondary multi-stage total organic carbon ultraviolet decomposition device, and the secondary ion exchange resin.

[0009] Optionally, the step of detecting a reference content of total organic carbon in the sample water includes: detecting a reference content of total organic carbon in the sample water by using a total organic carbon online analyzer.

[0010] Optionally, the step of predicting the expected total organic carbon content of ultrapure water obtained by filtering the raw water according to the total organic carbon reference content includes: determining the change of the total organic carbon reference content according to the total organic carbon reference content and the historical total organic carbon reference content; predicting the expected total organic carbon content of the ultrapure water obtained by filtering the raw water based on the change of the total organic carbon reference content and correlation characterization information; wherein the correlation characterization information is used to represent the correlation between the historical total organic carbon reference content and the historical total organic carbon content.

[0011] Optionally, the method further includes: predicting a change trend of total organic carbon in ultrapure water obtained by filtering the raw water based on the change in the total organic carbon reference content and the correlation characterization information.

[0012] Optionally, the method further includes: obtaining an actual total organic carbon content of ultrapure water obtained by filtering the raw water; and updating the correlation characterization information according to a difference between the actual total organic carbon content and the expected total organic carbon content.

[0013] One embodiment of the present application provides a device for predicting the total organic carbon content of ultrapure water, comprising: a total organic carbon content detection module, used to detect a total organic carbon reference content in sample water; wherein the sample water is obtained by filtering raw water through a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device; and a total organic carbon content prediction module, used to predict the expected total organic carbon content of ultrapure water obtained by filtering the raw water according to the total organic carbon reference content.

[0014] One embodiment of the present application provides a total organic carbon content prediction system for ultrapure water, the total organic carbon content prediction system for ultrapure water includes a filtration unit, a total organic carbon online analyzer, and a prediction unit; the filtration unit includes a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device, wherein: the filtration unit is used to filter raw water to obtain sample water; the total organic carbon online analyzer is used to detect a reference content of total organic carbon in the sample water; the prediction unit is used to predict the expected total organic carbon content of ultrapure water obtained by filtering the raw water according to the total organic carbon reference content.

[0015] One embodiment of the present application provides a computer device, which includes a memory and a processor, wherein the memory stores at least one computer program, and the at least one computer program is loaded and executed by the processor to implement the total organic carbon content prediction method of ultrapure water as described above.

[0016] One embodiment of the present application provides a computer-readable storage medium, wherein the computer-readable storage medium stores at least one computer program, and when the at least one computer program is executed by a processor, the total organic carbon content prediction method of ultrapure water as described above can be implemented.

[0017] One embodiment of the present application provides a computer program product, which is used to implement the above-mentioned method for predicting the total organic carbon content of ultrapure water.

[0018] In the multiple embodiments provided in the present application, there is a correlation between the total organic carbon reference content in the sample water obtained after filtering the raw water using filters, multi-stage reverse osmosis membranes, multi-stage ion exchange resins, and multi-stage total organic carbon ultraviolet digestion devices, and the total organic carbon content in ultrapure water. Based on this, the total organic carbon reference content in the sample water can be detected, and the estimated total organic carbon content in the ultrapure water obtained by filtering the raw water can be predicted based on the total organic carbon reference content, thereby realizing the prediction of the total organic carbon content in ultrapure water. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the structure of a system for predicting the total organic carbon content of ultrapure water provided in accordance with one embodiment of the present application.

[0020] Figure 2 A schematic diagram of the prediction effect of the total organic carbon content of ultrapure water provided for one embodiment of the present application.

[0021] Figure 3 A flow chart of a method for predicting the total organic carbon content of ultrapure water provided in accordance with one embodiment of the present application.

[0022] Figure 4 A schematic diagram of a module of a device for predicting the total organic carbon content of ultrapure water provided in accordance with one embodiment of the present application.

[0023] Figure 5 A schematic diagram of a computer device provided for one embodiment of the present application. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0025] In the description of the embodiments of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0026] Ultrapure water preparation system is used to process raw water into ultrapure water. Ultrapure water is water with a purity close to pure water containing only H2O. Ultrapure water can be used to clean wafers in the semiconductor industry, for pharmaceuticals, and in precision experiments. Raw water is untreated water used to prepare ultrapure water, such as natural water, industrial wastewater, etc. Raw water may contain a variety of organic and inorganic substances that need to be removed.

[0027] As an example, the ultrapure water preparation system is provided with the following components in sequence: a multi-media filter for removing suspended matter, silt, colloid, rust and other large particle impurities in raw water, a filter water pool for temporarily storing water effluent from the multi-media filter, a heat exchanger for adjusting the water temperature to an appropriate range required by the process, an activated carbon filter for removing organic matter, residual chlorine and odor in water, a cation bed for removing cations in water, a decarbonization tower for reducing the alkalinity of water, an anion bed for removing anions in water, a DI water pool for temporarily storing deionized water, a reverse osmosis membrane for removing ions, bacteria, particles and soluble organic matter in water, and a RO water tank for storing reverse osmosis water, primary TOC-UV for photolysis of organic matter in water, mixed bed for further removing residual ion impurities using cation and anion exchange resins, primary degassing membrane for removing dissolved gases in water through membrane separation technology, pure water tank for storing pure water after mixed bed or degassing membrane, secondary TOC-UV for further photolysis of organic matter in water, polishing mixed bed for further removing trace impurities through ion exchange, secondary degassing membrane for further removing dissolved gases in water through membrane separation technology, terminal ultrafiltration for removing bacteria, particles and pyrogens in water through ultrafiltration membrane.

[0028] The ultrapure water prepared by the ultrapure water preparation system through the above-mentioned multiple processes still contains a small amount of organic matter. The total organic carbon (TOC) content can indicate the content of organic pollutants in the water. When a higher TOC is detected in ultrapure water, it means that the ultrapure water contains more organic pollutants. The ions formed after the decomposition of organic matter will affect the conductivity of the water, and the organic matter will also cover some components in the ultrapure water preparation system, thereby affecting the service life of these components. In addition, the use of ultrapure water with a high TOC content will also lead to problems of organic contamination of products, devices or experimental results.

[0029] The purity of ultrapure water can be determined by detecting the TOC content of ultrapure water. Related technologies usually detect the TOC content at the ultrapure water outlet, or detect the TOC content of the raw water or the effluent of any filtration link and then predict the possible TOC content of ultrapure water through experience. These methods cannot achieve the true prediction of the TOC content of ultrapure water, and the prediction of the TOC content of ultrapure water is of great significance to the ultrapure water preparation system. If the prediction of the TOC content of ultrapure water can be achieved, the raw water source can be adjusted in advance or the ultrapure water preparation system can be improved, thereby improving the ultrapure water preparation effect.

[0030] Based on the above problems, it is necessary to provide a method for predicting the total organic carbon content of ultrapure water, so that the total organic carbon reference content in the sample water obtained after filtering the raw water through the filter, multi-stage reverse osmosis membrane, multi-stage ion exchange resin, and multi-stage total organic carbon ultraviolet digestion device is correlated with the total organic carbon content of ultrapure water. Based on this, the total organic carbon reference content in the sample water can be detected, and the estimated total organic carbon content of the ultrapure water obtained by filtering the raw water can be predicted based on the total organic carbon reference content, thereby realizing the prediction of the total organic carbon content of ultrapure water.

[0031] In multiple embodiments provided in the present application, the method for predicting the total organic carbon content of ultrapure water can be applied to a total organic carbon content prediction system for ultrapure water, wherein the total organic carbon content prediction system for ultrapure water includes a filtration unit, a total organic carbon online analyzer, and a prediction unit; the filtration unit includes a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device, wherein: the filtration unit is used to filter raw water to obtain sample water; the total organic carbon online analyzer is used to detect a reference content of total organic carbon in the sample water; and the prediction unit is used to predict the expected total organic carbon content of the ultrapure water obtained by filtering the raw water based on the total organic carbon reference content.

[0032] In some embodiments, the filter includes at least one of a melt-blown filter cartridge filter and an activated carbon filter; the multi-stage reverse osmosis membrane includes at least a primary reverse osmosis membrane and a secondary reverse osmosis membrane; the multi-stage ion exchange resin includes at least a primary ion exchange resin and a secondary ion exchange resin; the multi-stage total organic carbon ultraviolet digestion device includes at least a primary multi-stage total organic carbon ultraviolet digestion device and a secondary multi-stage total organic carbon ultraviolet digestion device. The arrangement order may be: the melt-blown filter cartridge filter, the activated carbon filter, the primary reverse osmosis membrane, the secondary reverse osmosis membrane, the primary total organic carbon ultraviolet digestion device, the primary ion exchange resin, the secondary multi-stage total organic carbon ultraviolet digestion device, the secondary ion exchange resin.

[0033] See also Figure 1 , Figure 1The figure shows an optional structure of the total organic carbon content prediction system for ultrapure water. Specifically, a sampling valve can be set on the water inlet pipeline from the raw water pool of the ultrapure water system to the ultrapure water preparation system, and the test water with a flow rate of 15 to 20 L / h and a water inlet pressure of 0.15 MPa is drawn from the sampling valve, for example, so that it passes through the spray-melt filter element filter, activated carbon filter, primary reverse osmosis membrane, secondary reverse osmosis membrane, primary total organic carbon ultraviolet digestion device (also can be expressed as primary TOC-UV), primary ion exchange resin, secondary multi-stage total organic carbon ultraviolet digestion device (also can be expressed as secondary TOC-UV), and secondary ion exchange resin of the filtration unit in the ultrapure water total organic carbon content prediction system, thereby filtering to obtain sample water.

[0034] Among them, the optional filter element of the spray-melt filter element is made of polypropylene fiber with a filtration accuracy of 5μm; the activated carbon filter is provided with granular activated carbon with an iodine adsorption value of 900mg / g; the first-level reverse osmosis membrane and the second-level reverse osmosis membrane are of 1812 specifications, with an accuracy of 0.1um, a membrane inlet pressure of 0.7Mpa, a first-level reverse osmosis membrane water production rate of 20%, and a second-level reverse osmosis membrane water production rate of 30%, wherein the 1812 specification refers to the outer diameter of the membrane element of 1.8 inches and a length of 12 inches; the power of the first-level total organic carbon ultraviolet digestion device is The power of the secondary total organic carbon UV digestion device is 87W, and the secondary total organic carbon UV digestion device is set to a single low-pressure mercury lamp for simultaneously emitting ultraviolet rays of 185nm and 254nm; the resin volume of the primary ion exchange resin is 5L, and the resin volume of the secondary ion exchange resin is 0.5L. The data types of the primary ion exchange resin and the secondary ion exchange resin can be the same or different.

[0035] Furthermore, the TOC online analyzer in the total organic carbon content prediction system for ultrapure water can detect the total organic carbon reference content in the sample water. Optionally, the total organic carbon content prediction system for ultrapure water can also include an electric control box equipped with a programmable logic controller, and the TOC online analyzer can transmit the total organic carbon reference content to the electric control box equipped with the programmable logic controller as a current signal of 4 to 20 mA, and the electric control box converts the received current signal into the corresponding total organic carbon reference content, and triggers the upper computer in the total organic carbon content prediction system for ultrapure water to predict the total organic carbon estimated content of the ultrapure water obtained by filtering the raw water according to the total organic carbon reference content.

[0036] Among them, the TOC online analyzer is a device used to measure the total carbon content of organic matter in water in real time. The electric control box equipped with a programmable logic controller (PLC) is a device that includes a PLC host, input and output modules, power modules, etc., and is used to process the output signal of the TOC online analyzer. It can usually receive data from the TOC online analyzer and convert it into the data type required by the industry, and then process the converted data based on a predetermined logic or upload the data to a host computer.

[0037] The host computer can be an electronic device with certain computing power and network access capabilities. The electronic device can be a desktop computer, a laptop computer, a tablet computer, or a server. The electronic device includes a processor, a memory, a display module, and a network access module for network communication. The processor is used to predict the estimated total organic carbon content of ultrapure water obtained by filtering raw water according to the total organic carbon reference content; the memory is used to store the estimated total organic carbon content, the reference total organic carbon content, and the total organic carbon content of ultrapure water; the display module is used to display the estimated total organic carbon content, the reference total organic carbon content, and the total organic carbon content of ultrapure water; the network access module for network communication is used to transmit at least one of the estimated total organic carbon content, the reference total organic carbon content, and the total organic carbon content of ultrapure water corresponding to the data acquisition request to the corresponding device when receiving the data acquisition request.

[0038] Due to the correlation between the reference content of total organic carbon in the sample water obtained after filtering the raw water and the total organic carbon content of ultrapure water, the estimated content of total organic carbon can characterize the total organic carbon content of ultrapure water to a certain extent. For details, please refer to Figure 2 , Figure 2 The figure shows the correlation between the predicted total organic carbon content change trend output by the ultrapure water total organic carbon content prediction system and the total organic carbon content change trend of ultrapure water. Figure 2 The horizontal axis represents time, and the vertical axis represents TOC content (μg / L). Figure 2 It can be seen that there is a correlation between the estimated total organic carbon content and the total organic carbon content of ultrapure water, and the estimated total organic carbon content can be used to predict changes in the total organic carbon content.

[0039] See also Figure 3 . An embodiment of the present application provides a method for predicting the total organic carbon content of ultrapure water. The method for predicting the total organic carbon content of ultrapure water can be applied to a device for predicting the total organic carbon content of ultrapure water. The device for predicting the total organic carbon content of ultrapure water can be an electronic device with certain computing power and network access capabilities. Of course, the device for predicting the total organic carbon content of ultrapure water can also refer to a software program running in an electronic device. In this embodiment, the method for predicting the total organic carbon content of ultrapure water can include the following steps.

[0040] Step S110: Detecting a reference content of total organic carbon in sample water; wherein the sample water is obtained by filtering raw water through a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device.

[0041] Step S120: predicting the estimated total organic carbon content of ultrapure water obtained by filtering the raw water according to the total organic carbon reference content.

[0042] In this embodiment, in order to improve the correlation between the sample water used to predict the total organic carbon content of ultrapure water and the total organic carbon content of ultrapure water, the present application uses a structure composed of a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device to filter the raw water used to prepare ultrapure water. Since the structure composed of the filter, the multi-stage reverse osmosis membrane, the multi-stage ion exchange resin, and the multi-stage total organic carbon ultraviolet digestion device filters the large particle impurities, small molecules, tiny dissolved substances, organic matter, soluble inorganic salts, and ions of the raw water, the TOC in the filtered sample water can be used as the basis for the prediction of ultrapure water TOC; wherein, the total organic carbon content can also be understood as the predicted ultrapure water TOC concentration. In addition, the above structure is simple compared to the ultrapure water preparation system, so it can also improve the efficiency of obtaining sample water, which is conducive to improving the efficiency of ultrapure water TOC prediction, achieving the effect of taking into account both prediction accuracy and prediction efficiency.

[0043] Furthermore, the device for predicting the total organic carbon content of ultrapure water can perform TOC detection on the sample water, and then obtain the total organic carbon reference content. The specific implementation method is: a TOC online analyzer or similar equipment is provided in the device for predicting the total organic carbon content of ultrapure water. By triggering the TOC online analyzer or similar equipment to analyze the sample water, the corresponding total organic carbon reference content, that is, the TOC content of the sample water, can be obtained. Wherein, the sample water is a water sample of the filtration terminal pipeline, and the filtration terminal pipeline can be the output pipeline of any of the above-mentioned filters, multi-stage reverse osmosis membranes, multi-stage ion exchange resins, and multi-stage total organic carbon ultraviolet digestion devices. In one example, the filtration terminal pipeline is the output pipeline of the ion exchange resin. Wherein, the setting order of the filter, the multi-stage reverse osmosis membrane, the multi-stage ion exchange resin, and the multi-stage total organic carbon ultraviolet digestion device depends on the structure of the ultrapure water preparation system to which it is adapted, and the embodiments of the present application do not limit this.

[0044] Furthermore, the total organic carbon content prediction device for ultrapure water can predict the expected total organic carbon content of ultrapure water obtained by filtering raw water according to the total organic carbon reference content. The specific implementation method is: the TOC change trend correlation between sample water and ultrapure water predicts the expected total organic carbon content of ultrapure water corresponding to the total organic carbon reference content, so that the expected total organic carbon content of ultrapure water can be clearly determined before the total organic carbon content of ultrapure water is detected; wherein, the difference between the expected total organic carbon content of ultrapure water and the total organic carbon content of ultrapure water is less than a preset threshold value, and the preset threshold value is a pre-set value or a value generated based on the above correlation.

[0045] In the method for predicting the total organic carbon content of ultrapure water provided in the embodiment of the present application, the filter, multi-stage reverse osmosis membrane, multi-stage ion exchange resin, and multi-stage total organic carbon ultraviolet digestion device, there is a correlation between the total organic carbon reference content in the sample water obtained after filtering the raw water and the total organic carbon content of the ultrapure water. Based on this, the total organic carbon reference content in the sample water can be detected, and the estimated total organic carbon content of the ultrapure water obtained by filtering the raw water can be predicted based on the total organic carbon reference content, thereby realizing the prediction of the total organic carbon content of ultrapure water.

[0046] In some embodiments, the filter includes at least one of a melt-blown filter element filter and an activated carbon filter; the multi-stage reverse osmosis membrane includes at least a primary reverse osmosis membrane and a secondary reverse osmosis membrane; the multi-stage ion exchange resin includes at least a primary ion exchange resin and a secondary ion exchange resin; the multi-stage total organic carbon ultraviolet decomposition device includes at least a primary multi-stage total organic carbon ultraviolet decomposition device and a secondary multi-stage total organic carbon ultraviolet decomposition device.

[0047] In this embodiment, in order to improve the correlation between the TOC content in the filtered sample water and the TOC content in ultrapure water, further, a melt-blown filter element filter, an activated carbon filter, a primary reverse osmosis membrane, a secondary reverse osmosis membrane, a primary ion exchange resin, a secondary ion exchange resin, a primary multi-stage total organic carbon ultraviolet digestion device and a secondary multi-stage total organic carbon ultraviolet digestion device are provided in the prediction of the total organic carbon content of ultrapure water.

[0048] Among them, the spray-melt filter element filter (Pre-Filter) is used to preliminarily remove large particle impurities in the water; the activated carbon filter is used to remove chlorine, odor, organic matter and some trace pollutants in the water by adsorption; the first-level reverse osmosis membrane (RO) is used to remove dissolved ions, microorganisms and other small molecules in the water by using a semi-permeable membrane; the second-level reverse osmosis (RO) is used to filter the water twice using the same principle as the first-level reverse osmosis membrane; the first-level total organic carbon ultraviolet digestion device (first-level TOC-UV) is used to detect the TOC content in the water by UV ultraviolet irradiation and photolyze the organic matter in the water; the second-level total organic carbon ultraviolet digestion device (secondary TOC-UV) is used to further detect the TOC content in the water and photolyze the organic matter in the water using the same principle as the first-level TOC-UV; the first-level ion exchange resin is used to remove soluble inorganic salts in the water; the second-level ion exchange resin is used to further remove soluble inorganic salts in the water. Through the above settings, the filtration fineness of the raw water can be improved while simplifying the filtration structure, so as to improve the correlation between the TOC content in the sample water and the TOC content in the ultrapure water.

[0049] In some embodiments, the filter, the multi-stage reverse osmosis membrane, the multi-stage ion exchange resin, and the multi-stage total organic carbon ultraviolet decomposition device are arranged in the following order: the spray-melt filter element filter, the activated carbon filter, the primary reverse osmosis membrane, the secondary reverse osmosis membrane, the primary total organic carbon ultraviolet decomposition device, the primary ion exchange resin, the secondary multi-stage total organic carbon ultraviolet decomposition device, and the secondary ion exchange resin.

[0050] In this embodiment, in order to improve the filtering effect, the device for predicting the total organic carbon content of ultrapure water can set a sequence. By filtering the raw water based on the above-set sequence, the TOC content of the filtered sample water can be close to the TOC content in the ultrapure water.

[0051] In some embodiments, the step of detecting the reference content of total organic carbon in the sample water by the device for predicting the content of total organic carbon in ultrapure water comprises: detecting the reference content of total organic carbon in the sample water by a total organic carbon online analyzer.

[0052] In this embodiment, in order to improve the analysis accuracy and efficiency of TOC, the total organic carbon content prediction device for ultrapure water includes a total organic carbon online analyzer (i.e., TOC online analyzer). The total organic carbon online analyzer can efficiently and accurately detect the total organic carbon reference content in the sample water.

[0053] In some embodiments, the step of predicting the total organic carbon content of ultrapure water by a device for predicting the expected total organic carbon content of ultrapure water obtained by filtering the raw water based on the total organic carbon reference content includes: determining the change of the total organic carbon reference content based on the total organic carbon reference content and the historical total organic carbon reference content; predicting the expected total organic carbon content of the ultrapure water obtained by filtering the raw water based on the change of the total organic carbon reference content and correlation characterization information; wherein the correlation characterization information is used to represent the correlation between the historical total organic carbon reference content and the historical total organic carbon content.

[0054] In this embodiment, in order to improve the accuracy of generating the predicted total organic carbon content, the prediction device for the total organic carbon content of ultrapure water can determine the change of the total organic carbon reference content according to the total organic carbon reference content and the historical total organic carbon reference content, and predict the predicted total organic carbon content of the ultrapure water obtained by filtering the raw water based on the change of the total organic carbon reference content and the correlation characterization information, wherein the historical total organic carbon reference content is the data that the prediction device for the total organic carbon content of ultrapure water has detected, and the number of historical total organic carbon reference contents depends on the time step of historical data collection (such as the previous week), and the change of the total organic carbon reference content can be determined based on multiple continuous historical total organic carbon reference contents, and the change of the total organic carbon reference content indicates a data change trend. The predicted total organic carbon content of ultrapure water can be predicted based on the change of the total organic carbon reference content and the correlation characterization information; wherein the correlation characterization information can be represented as text information, expressions, program codes, etc.

[0055] In some embodiments, the device for predicting the total organic carbon content of ultrapure water can predict the total organic carbon change trend of the ultrapure water obtained by filtering the raw water based on the change in the total organic carbon reference content and the correlation characterization information.

[0056] In this embodiment, in order to further predict the total organic carbon change trend of ultrapure water, the total organic carbon content prediction device of ultrapure water can predict the total organic carbon contents of multiple ultrapure waters based on the total organic carbon reference content change and correlation characterization information, and the total organic carbon change trend of ultrapure water can be determined based on the total organic carbon contents of multiple ultrapure waters; wherein, the total organic carbon contents of multiple ultrapure waters can be continuous total organic carbon contents corresponding to ultrapure waters with different outflow times.

[0057] In some embodiments, the device for predicting the total organic carbon content of ultrapure water can obtain the actual total organic carbon content of the ultrapure water obtained by filtering the raw water; and update the correlation characterization information based on the difference between the actual total organic carbon content and the expected total organic carbon content.

[0058] In this embodiment, in order to improve the prediction accuracy, the total organic carbon content prediction device of ultrapure water can update the correlation characterization information based on the difference between the actual total organic carbon content of the ultrapure water and the expected total organic carbon content, so as to improve the accuracy of the correlation between the total organic carbon reference content represented by the correlation characterization information and the total organic carbon content. The updated correlation characterization information is applied to the process of generating the expected total organic carbon content of the next cycle, which can reduce the difference between the expected total organic carbon content and the actual total organic carbon content of the next cycle.

[0059] See also Figure 4 . One embodiment of the present application also provides a device for predicting the total organic carbon content of ultrapure water. The device for predicting the total organic carbon content of ultrapure water may include: a total organic carbon content detection module, used to detect the total organic carbon reference content in the sample water; wherein the sample water is obtained by filtering raw water through a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device; a total organic carbon content prediction module, used to predict the expected total organic carbon content of the ultrapure water obtained by filtering the raw water according to the total organic carbon reference content.

[0060] In this embodiment, the specific functions and effects achieved by the device for predicting the total organic carbon content of ultrapure water can be explained with reference to other embodiments of the present application and will not be repeated here.

[0061] The embodiment of the present application further provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the processor implements the method for predicting the total organic carbon content of ultrapure water as described above.

[0062] The embodiment of the present application also provides a computer program product comprising instructions, and when the computer program product is executed by a processor, the total organic carbon content prediction method of ultrapure water as described above is implemented.

[0063] See also Figure 5 The present embodiment can provide a computer device, which includes: a memory, and one or more processors communicatively connected to the memory; the memory stores instructions executable by the one or more processors, and the instructions are executed by the one or more processors to enable the one or more processors to implement the above-mentioned method for predicting the total organic carbon content of ultrapure water.

[0064] In some embodiments, the computer device may include a processor, a non-volatile storage medium, an internal memory, a communication interface, a display device, and an input device connected by a system bus. The non-volatile storage medium may store an operating system and related computer programs.

[0065] The user information or user account information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, stored data, etc.) involved in multiple implementation methods of the present application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of relevant data must comply with the relevant laws and standards of relevant countries and regions, and provide corresponding operation entrances for users to choose to authorize or refuse.

[0066] It should be understood that the specific examples in this article are only intended to help those skilled in the art to better understand the embodiments of the present application, rather than to limit the scope of the present invention.

[0067] It can be understood that in the various implementations of the present application, the size of the serial number of each process does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the implementation methods of the present application.

[0068] It can be understood that the various embodiments described in this application can be implemented individually or in combination, and the embodiments of this application are not limited to this.

[0069] Unless otherwise stated, all technical and scientific terms used in the embodiments of the present application have the same meaning as those generally understood by those skilled in the art of the technical field of the present application. The terms used in the present application are only for the purpose of describing specific embodiments and are not intended to limit the scope of the present application. The term "and / or" used in the present application includes any and all combinations of one or more related listed items. The singular forms of "a kind of", "above" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0070] It can be understood that the processor of the embodiment of the present application can be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method implementation can be completed by the hardware integrated logic circuit or software instructions in the processor. The above processor can be a general processor, a digital signal processor (DigitalSignal Processor, DSP), an application-specific integrated circuit (Application Specific Integrated Circuit, ASIC), a field programmable gate array (Field Programmable Gate Array, FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiment of the present application can be implemented or executed. The general processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in the embodiment of the present application can be directly embodied as a hardware decoding processor to perform, or the hardware and software modules in the decoding processor are combined and executed. The software module can be located in a mature storage medium in the field such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory, and the processor reads the information in the memory and completes the steps of the above method in combination with its hardware.

[0071] It is understood that the memory in the embodiments of the present application may be a volatile memory or a non-volatile memory, or may include both volatile and non-volatile memory. Among them, the non-volatile memory may be a read-only memory (ROM), a programmable read-only memory (programmable ROM, PROM), an erasable programmable read-only memory (erasable PROM, EPROM), an electrically erasable programmable read-only memory (EEPROM) or a flash memory. The volatile memory may be a random access memory (RAM). It should be noted that the memory of the systems and methods described herein is intended to include, but is not limited to, these and any other suitable types of memory.

[0072] Those of ordinary skill in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this application.

[0073] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method implementation methods and will not be repeated here.

[0074] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device implementation described above is only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0075] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present embodiment.

[0076] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0077] If the function is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application can be essentially or partly embodied in the form of a software product that contributes to the prior art, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0078] The above is only a specific implementation of the present application, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A method for predicting the total organic carbon content of ultrapure water, characterized in that: include: Detecting the reference content of total organic carbon in sample water; wherein the sample water is obtained by filtering raw water through a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device; The estimated total organic carbon content of the ultrapure water obtained by filtering the raw water is predicted based on the total organic carbon reference content.

2. The method according to claim 1, characterized in that The filter comprises at least one of a melt-blown filter element filter and an activated carbon filter; the multi-stage reverse osmosis membrane comprises at least a primary reverse osmosis membrane and a secondary reverse osmosis membrane; the multi-stage ion exchange resin comprises at least a primary ion exchange resin and a secondary ion exchange resin; The multi-stage total organic carbon ultraviolet decomposition device at least comprises a first-stage multi-stage total organic carbon ultraviolet decomposition device and a second-stage multi-stage total organic carbon ultraviolet decomposition device.

3. The method according to claim 2, characterized in that The filter, the multi-stage reverse osmosis membrane, the multi-stage ion exchange resin, and the multi-stage total organic carbon ultraviolet decomposition device are arranged in the following order: the spray-melt filter element filter, the activated carbon filter, the primary reverse osmosis membrane, the secondary reverse osmosis membrane, the primary total organic carbon ultraviolet decomposition device, the primary ion exchange resin, the secondary multi-stage total organic carbon ultraviolet decomposition device, and the secondary ion exchange resin.

4. The method according to claim 1, characterized in that: The step of detecting the reference content of total organic carbon in the sample water comprises: The total organic carbon reference content in the sample water is detected by a total organic carbon online analyzer.

5. The method according to claim 1, characterized in that: The step of predicting the estimated total organic carbon content of ultrapure water obtained by filtering the raw water according to the total organic carbon reference content comprises: determining a total organic carbon reference content change based on the total organic carbon reference content and the historical total organic carbon reference content; The estimated total organic carbon content of the ultrapure water obtained by filtering the raw water is predicted based on the change in the total organic carbon reference content and the correlation characterization information; wherein the correlation characterization information is used to represent the correlation between the historical total organic carbon reference content and the historical total organic carbon content.

6. The method according to claim 5, characterized in that The method further comprises: Based on the total organic carbon reference content change and the correlation characterization information, the total organic carbon change trend of the ultrapure water obtained by filtering the raw water is predicted.

7. The method according to claim 5, characterized in that The method further comprises: Obtaining the actual total organic carbon content of ultrapure water obtained by filtering the raw water; The correlation characterization information is updated according to the difference between the actual total organic carbon content and the expected total organic carbon content.

8. A system for predicting the total organic carbon content of ultrapure water, characterized in that: The total organic carbon content prediction system of ultrapure water comprises a filtration unit, a total organic carbon online analyzer, and a prediction unit; the filtration unit comprises a filter, a multi-stage reverse osmosis membrane, a multi-stage ion exchange resin, and a multi-stage total organic carbon ultraviolet digestion device, wherein: The filtering unit is used to filter the raw water to obtain sample water; The total organic carbon online analyzer is used to detect the reference content of total organic carbon in the sample water; The prediction unit is used to predict the estimated total organic carbon content of the ultrapure water obtained by filtering the raw water according to the total organic carbon reference content.

9. A computer device, characterized in that: The computer device includes a memory and a processor, wherein the memory stores at least one computer program, and the at least one computer program is loaded and executed by the processor to implement the method for predicting the total organic carbon content of ultrapure water according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores at least one computer program, and when the at least one computer program is executed by a processor, the method for predicting the total organic carbon content of ultrapure water according to any one of claims 1 to 7 can be implemented.

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