Three-axis MEMS gyroscope structure

Abstract

The invention provides a three-axis MEMS (Micro Electro Mechanical System) gyroscope structure. The structure comprises two detection Y-axis modules, two detection X-axis modules, two detection Z-axis modules, two driving mechanisms and a coupling module, the two Y-axis detection modules are symmetrically arranged on the two sides of the X axis of the coupling module and are elastically connected with the coupling module; each detection Y-axis module is also elastically connected with a driving mechanism, and the driving mechanism drives the detection Y-axis module to move along the X axis; the two detection X-axis modules are symmetrically arranged on the two sides of the Y axis of the coupling module and elastically connected with the coupling module and the adjacent detection Y-axis modules, and the detection X-axis modules move along the Y axis under the acting force of the coupling module and the adjacent detection Y-axis modules; each detection X-axis module is provided with a window, the detection Z-axis module is embedded in the window and elastically connected with the detection X-axis module, and the detection Z-axis module moves in the window along the X axis. According to the invention, the volume of the triaxial MEMS gyroscope can be reduced, and the detection precision is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of MEMS gyroscopes, and in particular to a three-axis MEMS gyroscope structure. Background Art

[0002] Micro-Electro-Mechanical System (MEMS) gyroscopes are small, light, low-cost, and highly reliable, and have been widely used in aerospace, consumer electronics, and automotive electronics. For MEMS gyroscopes, size, weight, power consumption, cost, and accuracy are important factors that restrict their development. Therefore, how to reduce the size of MEMS gyroscopes and improve their detection accuracy is an urgent problem to be solved. Summary of the invention

[0003] The embodiment of the present invention provides a three-axis MEMS gyroscope structure to reduce the volume of the three-axis MEMS gyroscope and improve the detection accuracy of the three-axis MEMS gyroscope.

[0004] In a first aspect, an embodiment of the present invention provides a three-axis MEMS gyroscope structure, including: two Y-axis detection modules, two X-axis detection modules, two Z-axis detection modules, two driving mechanisms and a coupling module;

[0005] Two detection Y-axis modules are symmetrically arranged on both sides of the coupling module in the X-axis direction and are elastically connected to the coupling module; each detection Y-axis module is also elastically connected to a driving mechanism, and the driving mechanism is used to drive the detection Y-axis module to move along the X-axis direction;

[0006] Two detection X-axis modules are symmetrically arranged on both sides of the coupling module in the Y-axis direction, and are elastically connected to the coupling module and the adjacent detection Y-axis module. The detection X-axis module moves along the Y-axis direction under the force of the coupling module and the adjacent detection Y-axis module;

[0007] A window is arranged on each detection X-axis module, the detection Z-axis module is embedded in the window and elastically connected with the detection X-axis module, and the detection Z-axis module is restricted to move along the X-axis direction in the window.

[0008] In a possible implementation, it further includes: a substrate; the detection Z-axis module includes: a plurality of groups of detection comb teeth arranged in parallel; each group of detection comb teeth includes: detection plates located on both sides and a structural plate located in the middle;

[0009] The detection electrode plate is anchored on the substrate via a fixed anchor point;

[0010] When there is an angular velocity on the Z axis, the structural plate moves along the X axis;

[0011] The Z-axis angular velocity is determined by detecting the displacement change between the detection plate and the structural plate in each group of detection comb teeth.

[0012] In a possible implementation manner, the window is disposed at an edge of the X-axis detection module and is away from the coupling module.

[0013] In a possible implementation, the Z-axis detection module is elastically connected to the X-axis detection module via a Z-axis detection support frame;

[0014] The stiffness of the Z-axis detection support frame in the X-axis direction is less than a first preset threshold, the stiffness of the Z-axis detection support frame in the Y-axis direction is greater than a second preset threshold, and the first preset threshold is less than the second preset threshold.

[0015] In a possible implementation, the coupling module includes: a central anchoring structure, two first folding beams, and two second folding beams;

[0016] The central anchoring mechanism is anchored at the center of the substrate;

[0017] The two first folding beams are symmetrically arranged on both sides of the central anchoring mechanism in the Y-axis direction, and are respectively connected to the central anchoring mechanism and the corresponding detection Y-axis module;

[0018] The two second folding beams are symmetrically arranged on both sides of the central anchoring mechanism in the X-axis direction, and are respectively connected to the central anchoring mechanism and the corresponding detection X-axis module;

[0019] The stiffness of the first folding beam in the X-axis direction is less than a third preset threshold, and the stiffness of the first folding beam in the Y-axis direction is greater than a fourth preset threshold; the third preset threshold is less than the fourth preset threshold;

[0020] The stiffness of the second folding beam in the Y-axis direction is less than a third preset threshold, and the stiffness of the second folding beam in the X-axis direction is greater than a fourth preset threshold.

[0021] In a possible implementation, the driving mechanism includes: two driving structures and a detection structure;

[0022] The two driving structures are connected to the detection structure along the Y-axis direction, and the two driving structures are respectively located on both sides of the detection structure;

[0023] The driving structure is used to receive a driving signal and move horizontally along the X-axis direction based on the driving signal;

[0024] The detection structure is used to detect the motion displacement of the driving structure to achieve closed-loop control of the three-axis MEMS gyroscope structure.

[0025] In a possible implementation, the driving mechanism is elastically fixed on the substrate via a driving support frame;

[0026] The stiffness of the driving support frame in the X-axis direction is less than a fifth preset threshold, and the stiffness of the driving support frame in the Y-axis direction is greater than a sixth preset threshold; the fifth preset threshold is less than the sixth preset threshold.

[0027] In a possible implementation, the X-axis detection module is elastically fixed on the substrate via an X-axis detection support frame;

[0028] The stiffness of the X-axis detection support frame in the Y-axis direction is less than the seventh preset threshold, and the stiffness of the X-axis detection support frame in the X-axis direction is greater than the eighth preset threshold; the seventh preset threshold is less than the eighth preset threshold.

[0029] In a possible implementation, the detection Y-axis modules are respectively connected to corresponding driving mechanisms via driving connecting beams;

[0030] The stiffness of the driving connecting beam in the X-axis direction is greater than a ninth preset threshold value, so that the detection Y-axis modules respectively follow the corresponding driving mechanisms to move in the X-axis direction.

[0031] In a possible implementation, the detection Y-axis modules are connected to adjacent detection X-axis modules via drive coupling beams.

[0032] Compared with the prior art, after receiving the driving signal, the driving mechanism in the embodiment of the present invention moves along the X-axis direction, and drives the detection Y-axis module to move along the X-axis direction, and then drives the detection X-axis module to move along the Y-axis direction, thereby realizing gyro driving. By embedding the detection Z-axis module in the detection X-axis module and limiting the movement of the detection Z-axis module in the X-axis direction, it can be effectively guaranteed that when performing Z-axis angular velocity detection, the detection Z-axis module moves horizontally along the X-axis direction and does not rotate. Compared with traditional rotation detection, the control accuracy of horizontal movement is higher and the error source is smaller, which can effectively reduce the orthogonal error of the three-axis MEMS gyroscope and improve the detection accuracy of the three-axis MEMS gyroscope. In addition, by embedding the detection Z-axis module in the detection X-axis module, the volume of the three-axis MEMS gyroscope can be effectively reduced, the process processing requirements can be reduced, and the processing error can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 is a structural schematic diagram of a three-axis MEMS gyroscope structure provided by an embodiment of the present invention;

[0035] Figure 2 is a motion schematic diagram of a three-axis MEMS gyroscope structure provided by an embodiment of the present invention when performing expansion motion;

[0036] Figure 3 is a motion schematic diagram of a three-axis MEMS gyroscope structure provided by an embodiment of the present invention when performing a contraction motion;

[0037] Figure 4 It is a schematic diagram of detecting the movement of the Z-axis module when there is an angular velocity on the Z-axis provided by an embodiment of the present invention;

[0038] Figure 5 It is a schematic diagram of the structure of the Z-axis detection module provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0039] In order to enable people in the technical field to better understand the present solution, the technical solution in the embodiment of the present solution will be clearly described below in conjunction with the drawings in the embodiment of the present solution. Obviously, the described embodiment is an embodiment of a part of the present solution, not all of the embodiments. Based on the embodiments in the present solution, all other embodiments obtained by ordinary technicians in the field without creative work should fall within the scope of protection of the present solution.

[0040] The term "including" and any other variations in the specification and claims of this solution and the above drawings mean "including but not limited to", and is intended to cover non-exclusive inclusions and is not limited to the examples listed in the text. In addition, the terms "first" and "second" are used to distinguish different objects, not to describe a specific order.

[0041] In order to improve the detection accuracy of the three-axis MEMS gyroscope and reduce the volume of the gyroscope, an embodiment of the present invention proposes a new three-axis MEMS gyroscope structure, wherein, after receiving the driving signal, the driving mechanism moves along the X-axis direction, and drives the detection Y-axis module to move along the X-axis direction, and then drives the detection X-axis module to move along the Y-axis direction, thereby realizing gyro driving. By embedding the detection Z-axis module in the detection X-axis module and limiting the movement of the detection Z-axis module in the X-axis direction, it can be effectively guaranteed that when performing Z-axis angular velocity detection, the detection Z-axis module moves horizontally along the X-axis direction and does not rotate. Compared with traditional rotation detection, the control accuracy of horizontal movement is higher and the error source is smaller, which can effectively reduce the orthogonal error of the three-axis MEMS gyroscope and improve the detection accuracy of the three-axis MEMS gyroscope. In addition, by embedding the detection Z-axis module in the detection X-axis module, the volume of the three-axis MEMS gyroscope can be effectively reduced, the process processing requirements can be reduced, and the processing error can be reduced.

[0042] The following is a detailed description of the implementation of the present invention in conjunction with the specific drawings:

[0043] Figure 1 A schematic diagram of a three-axis MEMS gyroscope structure provided by an embodiment of the present invention. Figure 1 The three-axis MEMS gyroscope structure includes: two Y-axis detection modules 11, two X-axis detection modules 12, two Z-axis detection modules 13, two driving mechanisms 14 and a coupling module 15;

[0044] The two detection Y-axis modules 11 are symmetrically arranged on both sides of the coupling module 15 in the X-axis direction and are elastically connected to the coupling module 15; each detection Y-axis module 11 is also elastically connected to a driving mechanism 14, and the driving mechanism 14 is used to drive the detection Y-axis module 11 to move along the X-axis direction;

[0045] The two detection X-axis modules 12 are symmetrically arranged on both sides of the coupling module 15 in the Y-axis direction, and are elastically connected to the coupling module 15 and the adjacent detection Y-axis module 11. The detection X-axis module 12 moves along the Y-axis direction under the force of the coupling module 15 and the adjacent detection Y-axis module 11;

[0046] A window is provided on each detection X-axis module 12, and the detection Z-axis module 13 is embedded in the window and elastically connected to the detection X-axis module 12. The detection Z-axis module 13 is restricted to move along the X-axis direction in the window.

[0047] See also Figure 1 , the embodiment of the present invention will Figure 1 The horizontal direction in is set as the X-axis direction. Figure 1 The vertical direction in the image is set as the Y-axis direction, and the direction perpendicular to the XY plane is set as the Z-axis direction.

[0048] The driving signal can be a periodic signal, see Figure 2 and Figure 3 In the first half cycle, when the driving signal is a positive signal, the two driving mechanisms move in opposite directions along the X-axis, and correspondingly, the two detection Y-axis modules move in opposite directions along the X-axis. In the second half cycle, when the driving signal is a negative signal, the two driving mechanisms move toward each other along the X-axis, and correspondingly, the two detection Y-axis modules move toward each other along the X-axis.

[0049] In some embodiments, see Figure 1 The detection Y-axis modules 11 are connected to the adjacent detection X-axis modules 12 via the driving coupling beams 16 .

[0050] When the two detection Y-axis modules 11 move in opposite directions along the X-axis, the driving coupling beam 16 is expanded, and the two detection X-axis modules 12 move in opposite directions along the Y-axis, thereby realizing expansion movement; when the two detection Y-axis modules 11 move toward each other along the X-axis module, the driving coupling beam 16 is contracted, and the two detection X-axis modules 12 move toward each other along the Y-axis, thereby realizing contraction movement.

[0051] The three-axis MEMS gyroscope periodically performs expansion motion and contraction motion, thereby realizing three-axis MEMS gyroscope driving.

[0052] After the three-axis MEMS gyroscope is driven, if there is angular velocity on the Y-axis, under the action of the Coriolis force, the Y-axis detection module 11 moves along the X-axis direction while also moving along the Z-axis direction, thereby generating a torsional pendulum motion. By detecting the torsional pendulum displacement of the torsional pendulum motion, the Y-axis angular velocity detection is achieved.

[0053] Similarly, if there is an angular velocity on the X-axis, under the action of the Coriolis force, the X-axis detection module 12 moves along the Y-axis direction while also moving along the Z-axis direction, thereby generating a torsional pendulum motion. By detecting the torsional pendulum displacement of the torsional pendulum motion, the X-axis angular velocity detection is achieved.

[0054] If there is an angular velocity on the Z axis, the Z axis detection module 13 is restricted to move along the X axis within the window, see Figure 4 The two detection Z-axis modules 13 move in opposite directions along the X-axis in the window, respectively, so that the Z-axis angular velocity detection can be realized by detecting the parallel motion displacement of the Z-axis module 13 in the X-axis direction.

[0055] When a traditional three-axis MEMS gyroscope detects angular velocity, it usually drives the gyroscope so that the gyroscope generates a Coriolis force under the action of the angular velocity, thereby generating a rotational motion, and then detects the rotational motion to obtain the angular velocity.

[0056] Compared to the prior art, in the embodiment of the present invention, by embedding the detection Z-axis module in the detection X-axis module and limiting the movement of the detection Z-axis module in the X-axis direction, it can be effectively ensured that when performing Z-axis angular velocity detection, the detection Z-axis module moves horizontally in the X-axis direction and does not rotate. Compared to traditional rotation detection, the control accuracy of horizontal movement is higher and the error source is smaller, which can effectively reduce the orthogonal error of the three-axis MEMS gyroscope and improve the detection accuracy of the three-axis MEMS gyroscope. In addition, by embedding the detection Z-axis module in the detection X-axis module, the volume of the three-axis MEMS gyroscope can be effectively reduced, the process requirements can be reduced, and the processing error can be reduced.

[0057] In some embodiments, the detection Z-axis module 13 is elastically connected to the detection X-axis module 12 via the Z-axis detection support frame 17;

[0058] The stiffness of the Z-axis detection support frame 17 in the X-axis direction is less than the first preset threshold, the stiffness of the Z-axis detection support frame 17 in the Y-axis direction is greater than the second preset threshold, and the first preset threshold is less than the second preset threshold.

[0059] The embodiment of the present invention is used to limit the movement direction of the Z-axis detection module by limiting the stiffness of the Z-axis detection support frame in the X-axis and Y-axis directions, so that the Z-axis detection module moves along the X-axis direction.

[0060] The embodiment of the present invention embeds the Z-axis detection module in the X-axis detection module and uses the Z-axis detection support frame to limit the parallel movement of the Z-axis detection module in the X-axis direction when the Z-axis generates angular velocity, thereby improving the angular velocity detection accuracy.

[0061] In some embodiments, the three-axis MEMS gyroscope structure further includes: a substrate 18 .

[0062] Two Y-axis detection modules 11 , two X-axis detection modules 12 , two Z-axis detection modules 13 , two driving mechanisms 14 and a coupling module 15 are all disposed on a substrate 18 .

[0063] See also Figure 5 , the detection Z-axis module comprises: a plurality of groups of detection comb teeth 51 arranged in parallel; each group of detection comb teeth 51 comprises: detection plates 511 located on both sides and a structural plate 512 located in the middle;

[0064] The detection plate 511 is anchored on the substrate via a fixed anchor point 513;

[0065] When there is an angular velocity on the Z axis, the structural plate 512 moves along the X axis;

[0066] The Z-axis angular velocity is determined by detecting the displacement change between the detection electrode plate 511 and the structural electrode plate 512 in each group of detection comb teeth.

[0067] If there is an angular velocity on the Z axis, under the action of the Coriolis force, the detection plate 511 moves horizontally along the X axis following the Z axis detection support frame, and the structural plate 512 is anchored on the substrate. The displacement change between the detection plate 511 and the structural plate 512 can reflect the capacitance change between the two, thereby detecting the angular velocity of the Z axis.

[0068] In some embodiments, see Figure 1 , the coupling module 15 comprises: a central anchoring structure 151, two first folding beams 152 and two second folding beams 153;

[0069] The central anchoring mechanism 151 is anchored at the center of the substrate 17;

[0070] The two first folding beams 152 are symmetrically arranged on both sides of the central anchoring mechanism 151 in the Y-axis direction, and respectively connect the central anchoring mechanism 151 and the corresponding detection Y-axis module 11;

[0071] The two second folding beams 153 are symmetrically arranged on both sides of the central anchoring mechanism 151 in the X-axis direction, and are respectively connected to the central anchoring mechanism 151 and the corresponding detection X-axis module 11;

[0072] The stiffness of the first folding beam 152 in the X-axis direction is less than the third preset threshold, and the stiffness of the first folding beam 153 in the Y-axis direction is greater than the fourth preset threshold; the third preset threshold is less than the fourth preset threshold;

[0073] The stiffness of the second folding beam 152 in the Y-axis direction is less than the third preset threshold, and the stiffness of the second folding beam 153 in the X-axis direction is greater than the fourth preset threshold.

[0074] Here, the intermediate anchoring mechanism 151 is anchored on the substrate, and is used to restrain and adjust the movement direction and movement frequency of each detection Y-axis module 11 and detection X-axis module 12 through the first folding beam 152 and the second folding beam 153. The coupling module can make the detection Y-axis module and the detection X-axis module perform periodic movement along the X-axis direction and the Y-axis direction respectively with the center of the substrate as the central fixed point, thereby realizing the driving of the three-axis MEMS gyroscope.

[0075] In some embodiments, the window is disposed at an edge of the X-axis detection module and is away from the coupling module.

[0076] It should be noted that the closer the position on the detection X-axis module is to the coupling module, the stronger its movement amplitude is. Correspondingly, the farther the position on the detection X-axis module is from the coupling module, the weaker its movement amplitude is. In order to avoid the inter-axis coupling between the detection X-axis module and the detection Z-axis module, the embodiment of the present invention sets the window at the edge of the detection Z-axis module to stay away from the coupling module, thereby further improving the detection accuracy and reducing the adverse effects of inter-axis coupling.

[0077] In some embodiments, see Figure 1 , the driving mechanism 14 is elastically fixed on the base plate 18 through the driving support frame 19;

[0078] The rigidity of the driving support frame 14 in the X-axis direction is less than the fifth preset threshold, and the rigidity of the driving support frame 14 in the Y-axis direction is greater than the sixth preset threshold; the fifth preset threshold is less than the sixth preset threshold.

[0079] See also Figure 1 A driving support frame 19 is provided at both ends of the driving mechanism 14 along the Y-axis direction, for elastically fixing the driving mechanism 14 on the substrate 18. The driving support frame 19 is used to limit the movement of the driving mechanism 14 along the X-axis direction.

[0080] In some embodiments, see Figure 1 , the driving mechanism 14 includes: two driving structures 141 and a detection structure 142;

[0081] The two driving structures 141 are connected to the detection structure 142 along the Y-axis direction, and the two driving structures 141 are respectively located on both sides of the detection structure 142;

[0082] The driving structure 141 is used to receive a driving signal and move horizontally along the X-axis direction based on the driving signal;

[0083] The detection structure 142 is used to detect the motion displacement of the driving structure to achieve closed-loop control of the three-axis MEMS gyroscope structure.

[0084] After receiving the driving signal, the driving structure 141 drives the detection structure 142 to move horizontally along the X-axis direction, so that the entire driving mechanism 14 moves horizontally along the X-axis direction. When the detection mechanism 142 moves horizontally along the X-axis direction, it detects its own motion displacement to monitor the driving displacement generated by the driving signal in real time, so as to adjust the driving signal in real time according to the monitoring result, thereby realizing the closed-loop control of the three-axis MEMS gyroscope.

[0085] In some embodiments, the detection Y-axis modules 11 are connected to the corresponding driving mechanisms 14 via the driving connection beams 20 ;

[0086] The rigidity of the driving connecting beam 20 in the X-axis direction is greater than a ninth preset threshold value, so that the detection Y-axis modules 11 respectively follow the corresponding driving mechanisms 14 to move in the X-axis direction.

[0087] Under the constraint of the driving connecting beam, the driving mechanism 14 can drive the detection Y-axis module 11 to move along the X-axis direction after receiving the driving signal.

[0088] In some embodiments, the detection X-axis module 12 is elastically fixed on the substrate 18 via an X-axis detection support frame 21;

[0089] The stiffness of the X-axis detection support frame 21 in the Y-axis direction is less than the seventh preset threshold, and the stiffness of the X-axis detection support frame 20 in the X-axis direction is greater than the eighth preset threshold; the seventh preset threshold is less than the eighth preset threshold.

[0090] See also Figure 1 The X-axis detection support frame 21 is arranged at both ends of the detection X-axis module 12, and is used to limit the vertical movement of the detection X-axis module along the Y-axis.

[0091] The preset thresholds in the embodiment of the present invention are mainly used to limit the movement directions of the detection X-axis module, the detection Y-axis module and the detection Z-axis module. The specific values ​​can be determined according to actual conditions, and the embodiment of the present invention does not make specific limitations on this.

[0092] The first preset threshold, the third preset threshold, the fifth preset threshold and the seventh preset threshold may have the same value. The second preset threshold, the fourth preset threshold, the sixth preset threshold, the eighth preset threshold and the ninth preset threshold may have the same value.

[0093] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A three-axis MEMS gyroscope structure, characterized in that: include: Two Y-axis detection modules, two X-axis detection modules, two Z-axis detection modules, two drive mechanisms and a coupling module; Two detection Y-axis modules are symmetrically arranged on both sides of the coupling module in the X-axis direction and are elastically connected to the coupling module; each detection Y-axis module is also elastically connected to a driving mechanism, and the driving mechanism is used to drive the detection Y-axis module to move along the X-axis direction; Two detection X-axis modules are symmetrically arranged on both sides of the coupling module in the Y-axis direction, and are elastically connected to the coupling module and the adjacent detection Y-axis module. The detection X-axis module moves along the Y-axis direction under the force of the coupling module and the adjacent detection Y-axis module; A window is arranged on each detection X-axis module, the detection Z-axis module is embedded in the window and elastically connected with the detection X-axis module, and the detection Z-axis module is restricted to move along the X-axis direction in the window.

2. The three-axis MEMS gyroscope structure as claimed in claim 1, characterized in that: Also includes: Base plate; the detection Z-axis module comprises: a plurality of groups of detection comb teeth arranged in parallel; each group of detection comb teeth comprises: detection plates located on both sides and a structural plate located in the middle; The detection electrode plate is anchored on the substrate via a fixed anchor point; When there is an angular velocity on the Z axis, the structural plate moves along the X axis; The Z-axis angular velocity is determined by detecting the displacement change between the detection plate and the structural plate in each group of detection comb teeth.

3. The three-axis MEMS gyroscope structure according to claim 1 or 2, characterized in that: The window is arranged at the edge of the X-axis detection module and is far away from the coupling module.

4. The three-axis MEMS gyroscope structure according to claim 1 or 2, characterized in that: The detection Z-axis module is elastically connected to the detection X-axis module via a Z-axis detection support frame; The stiffness of the Z-axis detection support frame in the X-axis direction is less than a first preset threshold, the stiffness of the Z-axis detection support frame in the Y-axis direction is greater than a second preset threshold, and the first preset threshold is less than the second preset threshold.

5. The three-axis MEMS gyroscope structure as claimed in claim 2, characterized in that: The coupling module comprises: a central anchoring structure, two first folding beams and two second folding beams; The central anchoring mechanism is anchored at the center of the substrate; The two first folding beams are symmetrically arranged on both sides of the central anchoring mechanism in the Y-axis direction, and are respectively connected to the central anchoring mechanism and the corresponding detection Y-axis module; The two second folding beams are symmetrically arranged on both sides of the central anchoring mechanism in the X-axis direction, and are respectively connected to the central anchoring mechanism and the corresponding detection X-axis module; The stiffness of the first folding beam in the X-axis direction is less than a third preset threshold, and the stiffness of the first folding beam in the Y-axis direction is greater than a fourth preset threshold; the third preset threshold is less than the fourth preset threshold; The stiffness of the second folding beam in the Y-axis direction is less than a third preset threshold, and the stiffness of the second folding beam in the X-axis direction is greater than a fourth preset threshold.

6. The three-axis MEMS gyroscope structure according to claim 1 or 2, characterized in that: The driving mechanism comprises: two driving structures and a detection structure; The two driving structures are connected to the detection structure along the Y-axis direction, and the two driving structures are respectively located on both sides of the detection structure; The driving structure is used to receive a driving signal and move horizontally along the X-axis direction based on the driving signal; The detection structure is used to detect the motion displacement of the driving structure to achieve closed-loop control of the three-axis MEMS gyroscope structure.

7. The three-axis MEMS gyroscope structure as claimed in claim 2, characterized in that: The driving mechanism is elastically fixed on the base plate via a driving support frame; The rigidity of the driving support frame in the X-axis direction is less than a fifth preset threshold, and the rigidity of the driving support frame in the Y-axis direction is greater than a sixth preset threshold; The fifth preset threshold is smaller than the sixth preset threshold.

8. The three-axis MEMS gyroscope structure as claimed in claim 2, characterized in that: The detection X-axis module is elastically fixed on the substrate via an X-axis detection support frame; The stiffness of the X-axis detection support frame in the Y-axis direction is less than a seventh preset threshold, and the stiffness of the X-axis detection support frame in the X-axis direction is greater than an eighth preset threshold; The seventh preset threshold is smaller than the eighth preset threshold.

9. The three-axis MEMS gyroscope structure according to claim 1 or 2, characterized in that: The detection Y-axis modules are respectively connected to the corresponding driving mechanisms via driving connecting beams; The stiffness of the driving connecting beam in the X-axis direction is greater than a ninth preset threshold value, so that the detection Y-axis modules respectively follow the corresponding driving mechanisms to move in the X-axis direction.

10. The three-axis MEMS gyroscope structure according to claim 1 or 2, characterized in that: The detection Y-axis modules are connected to adjacent detection X-axis modules via driving coupling beams.

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