Performance evaluation method for resonant gyroscope assembling and manufacturing link

Abstract

The invention relates to the technical field of resonant gyroscope manufacturing, in particular to a performance evaluation method for a resonant gyroscope assembling and manufacturing link, which comprises the following steps: S1, assembling and parameter setting: electrically connecting a to-be-tested resonant gyroscope semi-finished product with a measurement and control device, setting a direct current bias voltage change range, a frequency cracking change rate threshold value Kf * and a main shaft azimuth angle change rate threshold value Ktheta * based on the structure parameters of the resonant gyroscope semi-finished product to be tested; s2, basic measurement: setting the direct-current bias voltage of the semi-finished resonant gyroscope to be measured as initial direct-current bias voltage U0, and measuring the frequency splitting decomposition f0 and the main shaft azimuth angle theta omega 0 of the semi-finished resonant gyroscope to be measured; s3, auxiliary measurement; s4, calculating a change rate; s5, calculating the average change rate Kf of frequency cracking and the average change rate K theta of the azimuth angle of the main shaft; and S6, performance evaluation: when Kf is less than or equal to Kf * and Ktheta is less than or equal to Ktheta *, the performance evaluation is qualified. The method has the advantages of simplicity and rapidness in operation, no loss in the detection process and capability of making up defects of an existing evaluation system.

Description

Technical Field

[0001] The invention relates to the technical field of resonant gyroscope manufacturing, and in particular to a performance evaluation method for a resonant gyroscope assembly and manufacturing link. Background Art

[0002] The resonant gyroscope is an inertial-grade solid-state wave gyroscope. Its working principle is to be sensitive to the external angle or angular velocity based on the precession effect of the standing wave of the resonator's vibration. It has the unique advantages of high precision, small size, strong impact resistance, long life and high reliability. It has broad application prospects in military and civilian fields such as precision guidance, aviation, aerospace, navigation, consumer electronics, etc., and is recognized by the inertial technology community at home and abroad as a disruptive inertial device in the 21st century.

[0003] At present, Northrop Grumman of the United States and Safran of France have mastered most of the core technologies of resonant gyroscopes and have achieved mass production applications. Among them, the assembly difficulty and production cost of the resonant gyroscope with a two-piece planar electrode structure developed by Safran of France have been greatly reduced, and the annual output can reach 25,000 units, with an accuracy ranging from 0.1° / h to 0.0001° / h, which has very strong market competitiveness. However, due to technical limitations, although experimental prototypes have been developed in the research of resonant gyroscopes in China, there is still a long way to go before engineering prototypes and model applications. In addition, the accuracy of resonant gyroscopes publicly reported in China is still 2-3 orders of magnitude away from the highest international level. Among them, the precision assembly of resonant gyroscopes and the evaluation of assembly performance in their assembly process are one of the key issues that need to be solved urgently.

[0004] The development of resonant gyroscopes involves multiple process steps, including the processing of resonators, chemical etching, coating, leveling and precision assembly, the processing and etching of flat electrodes, circuit design, manufacturing and testing, and vacuum packaging of meter heads. At present, the industry needs to wait until all the above process steps are completed to determine the final performance and accuracy of the gyroscope. Only after the gyroscope meter head prototype is obtained can it be calibrated and tested, and only then can the final performance accuracy indicators such as zero bias stability and zero bias repeatability of the gyroscope be obtained, and then the assembly performance of the gyroscope can be evaluated.

[0005] However, waiting until the gyro has completed all the manufacturing processes and developed a prototype head before conducting a performance evaluation of the gyro head is not conducive to timely screening out "problematic" heads during the assembly and manufacturing process, and it is difficult to improve the assembly efficiency and assembly stability of the gyro. The lack of a relatively comprehensive and accurate performance evaluation method during the assembly process makes it difficult to screen out gyro heads with poor performance during the assembly and manufacturing process and select them out to avoid entering the subsequent processes, resulting in unnecessary waste of resources. Summary of the invention

[0006] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a performance evaluation method for the assembly and manufacturing of a resonant gyroscope, which has high evaluation accuracy, simple and quick operation, no loss in the detection process, high output efficiency of evaluation results, and can effectively supplement the existing evaluation index system.

[0007] In order to solve the above technical problems, the present invention adopts the following technical solutions: A performance evaluation method for the assembly and manufacturing process of a resonant gyroscope comprises the following steps: S1: Assembling and parameter setting, electrically connecting the semi-finished resonant gyro to be tested to the measurement and control device, adjusting the measurement and control device so that it can measure the frequency cracking and main axis azimuth of the semi-finished resonant gyro under different DC bias voltages; setting the DC bias voltage variation range and the frequency cracking variation rate threshold based on the structural parameters of the semi-finished resonant gyro K f* and the spindle azimuth change rate threshold K θ* ; S2: Basic measurement, using the measurement and control device to set the DC bias voltage of the semi-finished resonant gyroscope to be tested to the initial DC bias voltage U 0, and the frequency decomposition of the semi-finished resonant gyroscope to be tested is measured f 0 and the main axis azimuth i ω0 ; S3: Auxiliary measurement, based on the DC bias voltage variation range, select at least n DC bias voltages different from the initial DC bias voltage in order from small to large U 0 DC bias voltage value { U 1, U 2, … , U n} as the auxiliary measurement voltage, n is a positive integer and is not less than 2, based on the measurement and control device, the DC bias voltage of the semi-finished resonant gyroscope to be measured is set to the auxiliary measurement voltage, and different auxiliary measurement voltages { U 1, U 2, … , U n The auxiliary frequency cracking corresponding to the semi-finished resonant gyroscope under test is f 1,△ f 2,…,△ f n} and auxiliary spindle azimuth { i ω1 , i ω2 , … , i ωn}; S4: Calculate the change rate, according to the multiple auxiliary frequency cracking {△ f 1,△ f 2,…,△ f n}, based on formula (1), calculate the multiple frequency cracking change rates of the semi-finished resonant gyroscope to be tested K fi , according to the multiple auxiliary spindle azimuths { i ω1 , i ω2 , … , i ωn}, based on formula (2), calculate the azimuth change rate of multiple main axes of the semi-finished resonant gyroscope to be tested K θi ; S5: Calculate the average change rate. According to the calculation result of step S4, the average change rate of frequency cracking is calculated based on formula (3): K f , based on formula (4), the average change rate of the main axis azimuth is calculated K θ ; S6: Performance evaluation, the frequency cracking average change rate K f Threshold value for rate of change of frequency cracking K f* By comparison, the average change rate of the main axis azimuth K θ Threshold value of change rate of main axis azimuth K θ* For comparison, K f ≤ K f* ,and K θ ≤ K θ* When the performance of the evaluation index is evaluated as qualified, otherwise, the performance of the evaluation index is evaluated as unqualified.

[0008] When performing step S3, a floating voltage value Δ is selected within the DC bias voltage variation range. U , set the first auxiliary measurement voltage to U 1= U 0-△ U, set the second auxiliary measurement voltage to U 2= U 0+△ U , and the first auxiliary frequency splitting under the first auxiliary measurement voltage is measured to be △ f 1. The azimuth angle of the first auxiliary spindle is i ω1 , the second auxiliary frequency splitting under the second auxiliary measurement voltage is △ f 2. The azimuth angle of the second auxiliary spindle is i ω2 .

[0009] When performing step S4, the frequency cracking change rate is calculated based on formula (1): K f1 and K f2 , based on formula (2), the change rate of the main axis azimuth angle is calculated K θ1 and K θ2 , When performing step S5, the average change rate of frequency cracking is calculated based on formula (3): K f , based on formula (4), the average change rate of the main axis azimuth is calculated K θ ; In step S3, U The value range of is: U =a* U 0, a=0.01~1.

[0010] The frequency cracking change rate threshold K f* The spindle azimuth angle change rate threshold is: 0.1~0.001mHz / V K θ* is: 1~0.01° / V.

[0011] Compared with the prior art, the advantages of the present invention are: The performance evaluation method for the assembly and manufacturing link of the resonant gyroscope of the present invention can be used for all resonant gyroscopes of different sizes based on the electrostatic detection drive principle (such as cylindrical resonant gyroscopes, micro-hemispherical resonant gyroscopes, etc.), and the performance of the semi-finished products is evaluated during the assembly process. The present invention evaluates the performance of the semi-finished products during the assembly process based on two series of parameters, namely frequency decomposition and spindle azimuth, which are closely related to the processing accuracy and assembly accuracy of the resonant gyroscope. The evaluation results are strongly correlated with the assembly process performance of the semi-finished products, so the accuracy of the evaluation results is very high; and the two series of parameters, namely frequency decomposition and spindle azimuth, can be connected to the semi-finished products by the measurement and control device, and accurate results can be obtained by conventional detection methods. The operation is simple and fast, the detection process is lossless, and the output efficiency of the evaluation results is also very high; by means of variable DC bias voltage, the multiple groups of auxiliary frequency decomposition and auxiliary spindle azimuth are measured, and the change rate and average change rate are further calculated. The average change rate is compared with the preset change rate threshold value to evaluate the performance of the semi-finished products, which can not only obtain the qualitative evaluation results of whether the semi-finished products are qualified, but also can obtain the qualitative evaluation results of whether the semi-finished products are qualified. The results can also assist in the quality grading of qualified semi-finished products; the two evaluation indicators of average frequency cracking change rate and average spindle azimuth change rate proposed for the first time in the present invention are an effective supplement to the existing evaluation indicator system of resonant gyroscope quality factor, quality factor non-uniformity, frequency cracking, etc. The two indicators of average frequency cracking change rate and spindle azimuth change rate are affected by many factors such as the non-uniformity of assembly gap, rigid shaft, angle between damping shaft and driving shaft, etc., and thus the indicators can be combined to more comprehensively evaluate the quality of the resonant gyroscope and its assembled semi-finished products, especially when used for evaluating the semi-finished products in the assembly and manufacturing link of the resonant gyroscope, which is conducive to timely screening out the "problem" headers in the assembly and manufacturing process, and can avoid the "problem" headers from entering the subsequent processes and causing unnecessary waste of resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0013] Figure 1 It is a flow chart of the method for evaluating the assembly performance of a resonant gyroscope of the present invention. DETAILED DESCRIPTION

[0014] The embodiments of the present invention are described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways as defined and covered by the claims.

[0015] like Figure 1 As shown, a performance evaluation method for the assembly and manufacturing process of a resonant gyroscope comprises the following steps: S1: Assembling and parameter setting, electrically connecting the semi-finished resonant gyro to be tested to the measurement and control device, adjusting the measurement and control device so that it can measure the frequency cracking and main axis azimuth of the semi-finished resonant gyro under different DC bias voltages; setting the DC bias voltage variation range and the frequency cracking variation rate threshold based on the structural parameters of the semi-finished resonant gyro K f* and the main axis azimuth change rate threshold K θ* In this embodiment, the frequency cracking change rate threshold K f* The spindle azimuth angle change rate threshold is: 0.1~0.001mHz / V K θ* is: 1~0.01° / V. In other embodiments, the frequency cracking change rate threshold K f* and the main axis azimuth change rate threshold K θ* The presets can be adjusted according to factors such as the type of resonant gyroscope, manufacturing difficulty, and production and processing capabilities.

[0016] S2: Basic measurement, using the measurement and control device to set the DC bias voltage of the semi-finished resonant gyroscope to be tested to the initial DC bias voltage U 0, and the frequency decomposition of the semi-finished resonant gyroscope to be tested is measured f 0 and the main axis azimuth i ω0 ; S3: Auxiliary measurement: based on the DC bias voltage variation range, select at least n DC bias voltages different from the initial DC bias voltage in descending order. U 0 DC bias voltage value { U 1, U 2, … , U n} as the auxiliary measurement voltage, n is a positive integer and not less than 2, based on the measurement and control device, the DC bias voltage of the semi-finished resonant gyroscope to be measured is set as the auxiliary measurement voltage, and different auxiliary measurement voltages { U 1, U 2, … , U n The auxiliary frequency cracking corresponding to the semi-finished resonant gyroscope under test is f 1,△ f 2,…,△ f n} and auxiliary spindle azimuth { i ω1 , i ω2 , … , i ωn}; S4: Calculate the change rate, according to the multiple auxiliary frequency cracking {△ f 1,△ f 2,…,△ f n}, based on formula (1), calculate the multiple frequency cracking change rates of the semi-finished resonant gyroscope to be tested K fi , according to the multiple auxiliary spindle azimuths { i ω1 , i ω2 , … , i ωn}, based on formula (2), calculate the azimuth change rate of multiple main axes of the semi-finished resonant gyroscope to be tested K θi ; S5: Calculate the average change rate. According to the calculation result of step S4, the average change rate of frequency cracking is calculated based on formula (3): K f , based on formula (4), the average change rate of the main axis azimuth is calculated K θ ; S6: Performance evaluation, average change rate of frequency splitting K f Threshold value for rate of change of frequency cracking K f* For comparison, the average change rate of the main axis azimuth K θ Threshold value of change rate of main axis azimuth K θ* For comparison, K f ≤ K f* ,and K θ ≤ K θ* When the performance is evaluated as qualified, otherwise, the performance is evaluated as unqualified.

[0017] The performance evaluation method for the assembly and manufacturing link of the resonant gyroscope of the present invention can be used for all resonant gyroscopes of different sizes based on the electrostatic detection drive principle (such as cylindrical resonant gyroscopes, micro-hemispherical resonant gyroscopes, etc.), and the performance of the semi-finished products is evaluated during the assembly process. The present invention evaluates the performance of the semi-finished products during the assembly process based on two series of parameters, namely frequency decomposition and spindle azimuth, which are closely related to the processing accuracy and assembly accuracy of the resonant gyroscope. The evaluation results are strongly correlated with the assembly process performance of the semi-finished products, so the accuracy of the evaluation results is very high; and the two series of parameters, namely frequency decomposition and spindle azimuth, can be connected to the semi-finished products by the measurement and control device, and accurate results can be obtained by conventional detection methods. The operation is simple and fast, the detection process is lossless, and the output efficiency of the evaluation results is also very high; by means of variable DC bias voltage, the multiple groups of auxiliary frequency decomposition and auxiliary spindle azimuth are measured, and the change rate and average change rate are further calculated. The average change rate is compared with the preset change rate threshold value to evaluate the performance of the semi-finished products, which can not only obtain the qualitative evaluation results of whether the semi-finished products are qualified, but also can obtain the qualitative evaluation results of whether the semi-finished products are qualified. The results can also assist in the quality grading of qualified semi-finished products; the two evaluation indicators of average frequency cracking change rate and average spindle azimuth change rate proposed for the first time in the present invention are an effective supplement to the existing evaluation indicator system of resonant gyroscope quality factor, quality factor non-uniformity, frequency cracking, etc. The two indicators of average frequency cracking change rate and spindle azimuth change rate are affected by many factors such as the non-uniformity of assembly gap, rigid shaft, angle between damping shaft and driving shaft, etc., and thus the indicators can be combined to more comprehensively evaluate the quality of the resonant gyroscope and its assembled semi-finished products, especially when used for evaluating the semi-finished products in the assembly and manufacturing link of the resonant gyroscope, which is conducive to timely screening out the "problem" headers in the assembly and manufacturing process, and can avoid the "problem" headers from entering the subsequent processes and causing unnecessary waste of resources.

[0018] In this embodiment, when performing step S2, the initial DC bias voltage is set to U 0=212V, and the frequency cracking under the initial DC bias voltage is measured. f 0 and the main axis azimuth i ω0 When performing step S3, a floating voltage value △ is selected within the DC bias voltage variation range U ,△ U The value range of is: U =a* U 0, a=0.01~1, in this embodiment a=0.5, and based on the DC bias voltage variation range, two DC bias voltages different from the initial DC bias voltage are selected in order from small to large. U 0 DC bias voltage value { U 1, U 2} as the auxiliary measurement voltage, wherein the first auxiliary measurement voltage is set toU 1=112V, set the second auxiliary measurement voltage to U 2=257V, and the first auxiliary frequency splitting under the first auxiliary measurement voltage is measured to be △ f 1. The azimuth angle of the first auxiliary spindle is i ω1 , the second auxiliary frequency splitting under the second auxiliary measurement voltage is △ f 2. The azimuth angle of the second auxiliary spindle is i ω2 .

[0019] Furthermore, when performing step S4, the frequency cracking change rate is calculated based on formula (1): K f1 and K f2 , based on formula (2), the change rate of the main axis azimuth angle is calculated K θ1 and K θ2 , Furthermore, when performing step S5, the average change rate of frequency cracking is calculated based on formula (3): K f , based on formula (4), the average change rate of the main axis azimuth is calculated K θ ; In this embodiment, the preset parameters, measurement parameters, calculation results and evaluation results are specifically shown in Table 1: Table 1: Preset parameters, measurement parameters, calculation results and evaluation results Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.

Claims

1. A performance evaluation method for the assembly and manufacturing process of a resonant gyroscope, characterized in that: including the following steps, S1: Assembling and parameter setting, electrically connecting the semi-finished resonant gyro to be tested to the measurement and control device, adjusting the measurement and control device so that it can measure the frequency cracking and main axis azimuth of the semi-finished resonant gyro under different DC bias voltages; setting the DC bias voltage variation range and the frequency cracking variation rate threshold based on the structural parameters of the semi-finished resonant gyro K f* and the spindle azimuth change rate threshold K θ* ; S2: Basic measurement, using the measurement and control device to set the DC bias voltage of the semi-finished resonant gyroscope to be tested to the initial DC bias voltage U 0, and the frequency decomposition of the semi-finished resonant gyroscope to be tested is measured f 0 and the main axis azimuth i ω0 ; S3: Auxiliary measurement, based on the DC bias voltage variation range, select at least n DC bias voltages different from the initial DC bias voltage in order from small to large U 0 DC bias voltage value { U 1, U 2, … , U n } as the auxiliary measurement voltage, n is a positive integer and is not less than 2, and the DC bias voltage of the semi-finished resonant gyroscope to be measured is set to the auxiliary measurement voltage based on the measurement and control device, and different auxiliary measurement voltages { U 1, U 2, … , U n The auxiliary frequency cracking corresponding to the semi-finished resonant gyroscope under test is f 1,△ f 2,…,△ f n } and auxiliary spindle azimuth { i ω1 , i ω2 , … , i ωn }; S4: Calculate the change rate, according to the multiple auxiliary frequency cracking {△ f 1,△ f 2,…,△ f n }, based on formula (1), calculate the multiple frequency cracking change rates of the semi-finished resonant gyroscope to be tested K fi , according to the multiple auxiliary spindle azimuths { i ω1 , i ω2 , … , i ωn }, based on formula (2), calculate the azimuth change rate of multiple main axes of the semi-finished resonant gyroscope to be tested K θi ; S5: Calculate the average change rate. According to the calculation result of step S4, the average change rate of frequency cracking is calculated based on formula (3): K f , based on formula (4), the average change rate of the main axis azimuth is calculated K θ ; S6: Performance evaluation, the frequency cracking average change rate K f Threshold value for rate of change of frequency cracking K f* By comparison, the average change rate of the main axis azimuth K θ Threshold value of change rate of main axis azimuth K θ* For comparison, K f ≤ K f* ,and K θ ≤ K θ* When the performance of the evaluation index is evaluated as qualified, otherwise, the performance of the evaluation index is evaluated as unqualified.

2. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 1, characterized in that: When performing step S3, a floating voltage value Δ is selected within the DC bias voltage variation range. U , set the first auxiliary measurement voltage to U 1= U 0-△ U , set the second auxiliary measurement voltage to U 2= U 0+△ U , and the first auxiliary frequency splitting under the first auxiliary measurement voltage is measured to be △ f 1. The azimuth angle of the first auxiliary spindle is i ω1 , the second auxiliary frequency splitting under the second auxiliary measurement voltage is △ f 2. The azimuth angle of the second auxiliary spindle is i ω2 .

3. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 2 is characterized in that: When performing step S4, the frequency cracking change rate is calculated based on formula (1): K f1 and K f2 , based on formula (2), the change rate of the main axis azimuth angle is calculated K θ1 and K θ2 , 4. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 3 is characterized in that: When performing step S5, the average change rate of frequency cracking is calculated based on formula (3): K f , based on formula (4), the average change rate of the main axis azimuth is calculated K θ ; 5. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to claim 2, 3 or 4, characterized in that: In step S3, U The value range of is: U =a* U 0, a=0.01~1.

6. The performance evaluation method for the assembly and manufacturing process of a resonant gyroscope according to any one of claims 1 to 5, characterized in that: The frequency cracking change rate threshold K f* The spindle azimuth angle change rate threshold is: 0.1~0.001mHz / V K θ* is: 1~0.01° / V.

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