Micromechanical gyroscope error compensation circuit based on signal disturbance

Abstract

The invention discloses a micromechanical gyroscope error compensation circuit based on signal disturbance, which relates to the technical field of micro electro mechanical systems, and comprises two disturbance signal output ends, one disturbance signal output end is connected with an orthogonal loop, and the other disturbance signal output end is sequentially connected with a multiplication demodulator and a PID (Proportion Integration Differentiation) controller; the first disturbance signal output end controls an orthogonal signal to be a disturbance signal, the multiplication demodulator carries out multiplication demodulation on the disturbance signal and an in-phase signal to obtain an error control signal, the PID controller controls the error control signal to be 0 to obtain a phase compensation phase shift, and the phase compensation phase shift is input into an orthogonal loop to achieve real-time compensation of a phase error. According to the invention, the disturbance signal is applied to the orthogonal loop, the signal containing the phase error information is demodulated as the controlled variable, and the signal is controlled in real time through the PID controller, so that the real-time accurate compensation of the phase error is realized, and the comprehensive performance and the working stability of the gyroscope are improved.

Description

Technical Field

[0001] The invention relates to a micromechanical gyroscope error compensation circuit based on signal disturbance, belonging to the technical field of micro-electromechanical systems. Background Art

[0002] The gyroscope is an important inertial sensor that measures the angular velocity or angle of a moving object relative to inertial space. It is widely used in civilian fields such as smartphones, drones, and smart robots, as well as military fields such as aerospace, aviation, and weapons.

[0003] Based on different working principles, gyroscopes are currently divided into the following types: One is the mechanical rotor gyroscope, which typically includes three-float gyroscopes, flexible gyroscopes, and electrostatic gyroscopes, which are essentially based on the fixed axis and precession of high-speed rotating rigid bodies to achieve the angle measurement of the carrier. This type of gyroscope was studied the earliest, developed the most maturely, and has the highest accuracy at present, but they also have disadvantages such as long startup time and high processing cost.

[0004] The second type is the optical gyroscope based on the Sagnac effect, which typically includes laser gyroscopes and fiber optic gyroscopes. This type of gyroscope has a high overall accuracy and has been used in the fields of navigation and aerospace. However, their high processing requirements also make their production costs relatively expensive.

[0005] The third type is the vibration gyroscope based on the principle of Coriolis force, which typically includes: tuning fork gyroscope, cup gyroscope, ring gyroscope, hemispherical gyroscope, etc. This type of gyroscope has a long service life and is easy to process. In particular, the micromechanical gyroscope developed in combination with micromachining technology has the advantages of small size, low power consumption, low cost, and mass production. It is suitable for the consumer electronics industry that requires miniaturization, large quantities, and low costs, as well as new military fields such as miniaturized military equipment. In recent years, it has received great attention from domestic and foreign research institutions.

[0006] After years of rapid development, micromechanical gyroscopes have played an important role in some civilian and military fields. The civilian field requires a large number of low- and medium-precision gyroscopes to achieve functions such as attitude measurement and control of stable systems. In addition, with the development and progress of micromechanical gyroscopes in structural design, signal detection and control, and processing technology, a number of mature products of low- and medium-precision micromechanical gyroscopes have been launched and widely used in smart homes, the Internet of Things and other fields.

[0007] The military field has an increasing demand for such small-sized, low-power, high-precision micromechanical gyroscopes. At present, important military fields such as individual navigation, micro-unmanned combat platforms, and micro-guided munitions, as well as emerging military development directions such as weapon stabilization platforms, micro-military intelligent robots, and micro-nano satellites, have put forward higher requirements for the comprehensive performance of micromechanical gyroscopes.

[0008] The micromechanical gyroscope is mainly composed of two parts: the gyroscope mechanical structure part and the signal detection part. The mechanical structure of the gyroscope mainly vibrates in the driving mode. When the angular velocity is input, it will produce displacement in the detection direction; and the function of the signal detection circuit is to detect the displacement signal in the detection direction, so as to obtain the angular velocity information. Therefore, the signal detection circuit is crucial to improve the comprehensive performance of the gyroscope.

[0009] The driving signal and detection signal of the micromechanical gyroscope are distinguished by high-frequency carrier modulation of different frequencies, and are input to the weak signal detection circuit through the common end for C / V conversion, filtering, demodulation and other signal processing, so as to separate the driving signal and the detection signal. Among them, the detection signal is the key to affecting the gyroscope output and comprehensive performance.

[0010] After the detection signal is converted into digital form, it is also orthogonally demodulated to obtain in-phase and quadrature signals. The in-phase signal is filtered out by a low-pass filter to remove the high-frequency carrier and high-frequency disturbance signal, and becomes the output signal of the gyroscope, which determines the performance of the gyroscope. The quadrature signal is an error signal, which can be removed by such demodulation in an ideal situation without affecting the final output of the gyroscope. However, phase shift is inevitable because the signal passes through the filter in the measurement and control circuit. In addition, the parasitic capacitance introduced between the electrodes and the substrate of the gyroscope, and between the electrode leads, will also be coupled into the effective capacitance of the gyroscope, causing phase shift.

[0011] Therefore, in the actual gyro measurement and control circuit, the phase of each signal will have a certain deviation, which is called phase error. When there is a phase error between the in-phase signal and the quadrature signal, it will cause the quadrature error signal to couple with the in-phase signal, so that the zero bias output of the gyro contains the component of the quadrature error signal, thus affecting the performance of the gyro. Excessive coupling error will cause the gyro system to work unstably. Summary of the invention

[0012] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a micromechanical gyroscope error compensation circuit based on signal disturbance, which applies a disturbance signal in an orthogonal loop and demodulates a signal containing phase error information as a controlled quantity, and then controls the signal in real time through a PID controller to achieve real-time and accurate compensation of the phase error, thereby improving the comprehensive performance and working stability of the gyroscope.

[0013] To achieve the above object, the present invention is implemented by adopting the following technical solutions: The present invention provides a micromechanical gyroscope error compensation circuit based on signal disturbance. The micromechanical gyroscope comprises a driving electrode, a detection electrode, an axis-adjusting electrode and a common end. The common end is connected to the input ends of two demodulation units via a charge amplifier. The output end of one demodulation unit is connected to the input end of a driving loop via a first analog-to-digital converter, and the output end of the other demodulation unit is connected to the input ends of an in-phase loop and an orthogonal loop via a second analog-to-digital converter. The output ends of the driving loop, the in-phase loop and the orthogonal loop are connected to the driving electrode, the detection electrode and the axis-adjusting electrode respectively in sequence. It also includes an error compensation loop, which includes two disturbance signal output terminals, wherein the first disturbance signal output terminal is connected to the orthogonal loop, and the second disturbance signal output terminal is connected to the multiplication demodulator and the PID controller in sequence, the output terminal of the PID controller is connected to the orthogonal loop, and the input terminal of the multiplication demodulator is also connected to the in-phase loop, the multiplication demodulator is used to multiply and demodulate the disturbance signal and the in-phase signal to obtain an error control signal, the PID controller is used to control the error control signal to be 0 to obtain a phase compensation phase shift, and the phase compensation phase shift is input into the orthogonal loop to achieve real-time compensation of the phase error.

[0014] Furthermore, the disturbance signal is preset, and the setting condition is that the orthogonal loop still maintains signal stability after the disturbance signal is input.

[0015] Furthermore, the demodulation units each include a high-pass filter, a multiplication demodulator, and a low-pass filter connected in sequence; the multiplication demodulator in the demodulation unit connected to the first analog-to-digital converter is used to multiply and demodulate the electrical signal with the driving high-frequency carrier signal to obtain a driving signal; and the multiplication demodulator in the demodulation unit connected to the second analog-to-digital converter is used to multiply and demodulate the electrical signal with the detection high-frequency carrier signal to obtain a detection signal.

[0016] Further, the driving loop includes two branches, the input ends of the two branches are connected to the output end of the first analog-to-digital converter, and the two branches are provided with a first orthogonal demodulator, the first orthogonal demodulator of one branch is used to perform orthogonal demodulation on the driving signal to obtain a driving amplitude signal, and the first orthogonal demodulator of the other branch is used to perform orthogonal demodulation on the driving signal to obtain a driving phase signal; The driving phase signal is passed through a digitally controlled oscillator to generate a sinusoidal signal, the sinusoidal signal is multiplied by the driving amplitude signal to obtain a driving output signal, and the driving output signal is input to the driving electrode together with the input driving high-frequency carrier signal and the input driving AC voltage signal after passing through a digital-to-analog converter to achieve resonance and constant amplitude control of the gyroscope driving mode.

[0017] Furthermore, the in-phase loop includes a second orthogonal demodulator, a low-pass filter and a first PID controller connected in sequence, the second orthogonal demodulator is used to perform orthogonal demodulation on the detection signal to obtain an in-phase signal, the in-phase signal is filtered out by a low-pass filter to remove the high-frequency carrier signal and the high-frequency disturbance signal, and then the detection AC signal is controlled by the first PID controller to offset the detection signal to obtain a gyroscope output signal, the gyroscope output signal is multiplied by the sinusoidal signal to obtain a detection AC signal, the controlled detection AC signal becomes a detection AC voltage signal after passing through a digital-to-analog converter, and is input to the detection electrode together with the input detection DC voltage signal, so as to realize real-time suppression of vibration of the gyroscope detection method.

[0018] Furthermore, the orthogonal loop includes a third orthogonal demodulator, a low-pass filter and a second PID controller connected in sequence. The third orthogonal demodulator is used to perform orthogonal demodulation on the detection signal to obtain an orthogonal signal. The orthogonal signal is filtered out by the low-pass filter to remove the high-frequency carrier signal and the high-frequency disturbance signal, and then passed through the second PID controller as a controlled variable. The PID controller controls the shaft adjustment voltage signal so that the orthogonal signal is controlled in real time. The shaft adjustment voltage signal is output to the shaft adjustment electrode via a digital-to-analog converter to suppress the orthogonal error.

[0019] Furthermore, the first disturbance signal output end is connected to the input end of the second PID controller, the input end of the multiplication demodulator is also connected to the output end of the first PID controller, and the output end of the PID controller is connected to the input end of the second orthogonal demodulator and the input end of the third orthogonal demodulator.

[0020] Furthermore, the error compensation loop also includes a low-pass filter connected to the output end of the first PID controller, and the low-pass filter is used to filter out the high-frequency carrier signal and the high-frequency disturbance signal in the in-phase signal to obtain the gyroscope output signal.

[0021] Furthermore, the PID controller is used to control the error control signal to 0 to obtain a phase compensation phase shift, and the derivation process of the phase compensation phase shift that can achieve real-time compensation of the phase error includes: When the micromechanical gyroscope works stably, the in-phase signal and the orthogonal signal of the detection signal are obtained according to the gyroscope system comprehensive error, the phase error and the phase error compensation phase shift calculation; Apply a disturbance signal, control the orthogonal signal to the disturbance signal, control the in-phase signal to 0, and solve the orthogonal loop equation and the in-phase loop equation to obtain the feedback force signal: Demodulating the feedback force signal using the disturbance signal to obtain an error control signal; The real-time control error control signal is 0, which means that the phase error is compensated in real time.

[0022] Furthermore, the expressions for the in-phase signal and the orthogonal signal of the detection signal calculated according to the gyro system comprehensive error, the phase error and the phase error compensation phase shift are: ; in, represents the in-phase signal, represents the orthogonal signal, It represents the signal output of the micromechanical gyroscope due to the stiffness coupling error. represents the signal output of the micromechanical gyroscope due to the damping coupling error, represents the phase error, represents the phase compensation phase shift, represents the feedback force of the micromechanical gyroscope signal output; The expression of the feedback force signal obtained by solving the orthogonal loop equation and the in-phase loop equation is: ; Solving the equation together: ; in, represents the feedback force signal, represents the disturbance signal, represents the disturbance signal amplitude, represents the frequency of the disturbance signal, represents the disturbance signal application time, Represents the system gain, which is a fixed value; The expression of the error control signal obtained by demodulating the feedback force signal using the disturbance signal is: ; in, Represents the error control signal.

[0023] Compared with the prior art, the present invention has the following beneficial effects: The present invention inputs a low-frequency sinusoidal disturbance signal into an orthogonal loop. When there is a phase error, the signal will be coupled to the output signal of the gyroscope. By multiplying and demodulating it, the phase error can be identified online in real time with high identification accuracy. In order to compensate for the phase error in real time, the present invention designs a PID controller to perform real-time closed-loop control on the signal containing the phase error obtained by identification to be 0, thereby achieving real-time compensation regardless of how the phase error changes, thereby improving the comprehensive performance and working stability of the gyroscope; In order to eliminate the influence of the input disturbance signal on the performance of the micromechanical gyroscope, the present invention designs a low-pass filter before the gyroscope signal is output to filter out the disturbance signal to ensure that the disturbance signal does not interfere with the output signal of the gyroscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of the structure of a micromechanical gyroscope error compensation circuit based on signal disturbance in one embodiment of the present invention; Figure 2 The figure is a schematic diagram of a closed-loop control process test for compensating phase and error control signals in an embodiment of the present invention. DETAILED DESCRIPTION

[0025] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention. Example 1

[0026] like Figure 1 As shown, an embodiment of the present invention provides a micromechanical gyroscope error compensation circuit based on signal disturbance. The micromechanical gyroscope includes a driving electrode, a detection electrode, an axis adjustment electrode and a common terminal, which is the internal structure of the micromechanical gyroscope and will not be described in detail here.

[0027] The error compensation circuit of the micromechanical gyroscope based on signal disturbance specifically includes: The common end is connected to the input ends of the two demodulation units via a charge amplifier, and the common end outputs a capacitance variation signal, which is converted into an electrical signal via the charge amplifier.

[0028] The output end of the charge amplifier is connected to the input end of the two demodulation units. The demodulation units each include a high-pass filter, a multiplication demodulator and a low-pass filter connected in sequence. The high-pass filter is used to filter out some low-frequency disturbance signals in the electrical signal, and the low-pass filter is used to filter out high-frequency signals in the electrical signal. The multiplication demodulator in one demodulation unit is used to multiply and demodulate the electrical signal with the driving high-frequency carrier signal to obtain a driving signal. The driving signal is converted into a digital signal by a first analog-to-digital converter and then input into the driving loop. The multiplication demodulator in the other demodulation unit is used to multiply and demodulate the electrical signal with the detection high-frequency carrier signal to obtain a detection signal. The detection signal is converted into a digital signal by a second analog-to-digital converter and then input into the in-phase loop and the orthogonal loop.

[0029] The output end of the driving loop is connected to the driving electrode, the output end of the in-phase loop is connected to the detection electrode, and the output end of the orthogonal loop is connected to the axis adjustment electrode.

[0030] It also includes an error compensation loop, which includes two disturbance signal output terminals, namely a first disturbance signal output terminal and a second disturbance signal output terminal. The disturbance signal is pre-set, and any disturbance signal that satisfies the condition that the orthogonal loop can still maintain signal stability after the disturbance signal is input should be acceptable.

[0031] The first disturbance signal output end is connected to the input end of the second PID controller in the orthogonal loop, the second disturbance signal output end is connected to the multiplication demodulator and the PID controller in sequence, the input end of the multiplication demodulator is also connected to the output end of the first PID controller, and the output end of the PID controller is connected to the input end of the second orthogonal demodulator in the in-phase loop and the input end of the third orthogonal demodulator in the orthogonal loop.

[0032] The multiplication demodulator is used to obtain an error control signal by multiplication demodulation of the disturbance signal and the in-phase signal. The error control signal is input into the PID controller as a controlled variable. The error control signal is controlled to be 0 to obtain a phase compensation phase shift, and the phase compensation phase shift is input into the third orthogonal demodulator to realize real-time compensation of the phase error.

[0033] The specific structures of the driving loop, in-phase loop and orthogonal loop are as follows: The driving loop includes two branches, the input ends of the two branches are connected to the output end of the first analog-to-digital converter, and the two branches are provided with a first orthogonal demodulator, wherein the driving signal is orthogonally demodulated by the first orthogonal demodulator on one branch to obtain a driving amplitude signal, and the driving signal is orthogonally demodulated by the first orthogonal demodulator on the other branch to obtain a driving phase signal.

[0034] In order to make the driving vibration of the gyroscope always in a resonant state, the driving phase signal is converted into a sinusoidal signal through a digitally controlled oscillator. The sinusoidal signal and the driving amplitude signal are multiplied to obtain a driving output signal. The driving output signal is input to the driving electrode together with the input driving high-frequency carrier signal and the input driving AC voltage signal after passing through a digital-to-analog converter, thereby finally realizing the resonance and constant amplitude control of the gyroscope driving mode.

[0035] The in-phase loop includes a second orthogonal demodulator, a low-pass filter and a first PID controller connected in sequence. The second orthogonal demodulator performs orthogonal demodulation on the detection signal to obtain an in-phase signal, which is then filtered out by a low-pass filter to remove the high-frequency carrier and the high-frequency disturbance signal and then input into the first PID controller. The first PID controller is used to control the AC signal and the detection signal to offset each other to obtain a gyroscope output signal.

[0036] In order to prevent the disturbance signal from interfering with the gyro output signal, in this embodiment, after the first PID controller outputs the gyro output signal, the gyro output signal needs to pass through a low-pass filter to filter out the disturbance signal.

[0037] The gyro output signal output by the first PID controller is multiplied by the sinusoidal signal to obtain a detection AC signal. The controlled detection AC voltage signal becomes a detection AC voltage signal after passing through a digital-to-analog converter and is input to the detection electrode together with the input detection DC voltage signal to achieve real-time suppression of vibration of the gyro detection method.

[0038] In order to provide stability and working bandwidth for the detection output of the micromechanical gyroscope, this embodiment adopts a force balance control scheme in the in-phase loop. The principle of the force balance control scheme is to generate a detection feedback force for real-time suppression of vibration in the gyroscope detection direction by inputting a fixed detection DC voltage and a controlled detection AC voltage into the gyroscope detection electrode, and then extracting the controlled detection AC voltage as the gyroscope output signal.

[0039] The orthogonal loop includes a third orthogonal demodulator, a low-pass filter and a second PID controller connected in sequence. The third orthogonal demodulator performs orthogonal demodulation on the detection signal to obtain an orthogonal signal. The orthogonal signal is usually caused by the gyro processing error and is also called the orthogonal error. In order to suppress the orthogonal error, the present embodiment adopts an electrostatic force axis adjustment scheme, that is, the orthogonal signal is filtered by a low-pass filter to remove the high-frequency carrier and the high-frequency disturbance signal and then enters the second PID controller as the controlled quantity. The second PID controller controls the axis adjustment voltage signal in real time to offset the orthogonal signal. The axis adjustment voltage signal is output to the axis adjustment electrode through the digital-to-analog converter to suppress the orthogonal error. Example 2

[0040] On the basis of Example 1, this embodiment provides a PID controller to control the error control signal to 0 to obtain a phase compensation phase shift, and input the phase compensation phase shift into the orthogonal loop to achieve real-time compensation of the phase error. The derivation process includes: When the micromechanical gyroscope works stably, the in-phase signal and the orthogonal signal of the detection signal are calculated based on the gyro system comprehensive error, phase error and phase error compensation phase shift. The expression is: ; in, represents the in-phase signal, represents the orthogonal signal, It represents the signal output of the micromechanical gyroscope due to the stiffness coupling error. represents the signal output of the micromechanical gyroscope due to the damping coupling error, represents the phase error, represents the phase compensation phase shift, Represents the feedback force of the micromechanical gyroscope signal output.

[0041] Apply a disturbance signal, control the orthogonal signal to the disturbance signal, control the in-phase signal to 0, and solve the orthogonal loop equation and the in-phase loop equation to obtain the feedback force signal, the expression is: ; Solving the equation together: ; in, represents the feedback force signal, represents the disturbance signal, represents the disturbance signal amplitude, represents the frequency of the disturbance signal, represents the disturbance signal application time, Represents the system gain, which is a fixed value.

[0042] The feedback force signal is demodulated using the disturbance signal to obtain the error control signal, which is expressed as: ; in, Represents the error control signal.

[0043] The real-time control error control signal is 0, which means that the phase error is compensated in real time. Example 3

[0044] This embodiment provides a closed-loop test of the phase error of the gyro output signal of a micromechanical gyroscope. After achieving stable phase closed-loop compensation, phase errors of ±3°, ±6°, and ±9° are input respectively to test whether the phase can be controlled back to an accurate value, while observing the changes in the controlled quantity containing the phase error information during the process.

[0045] like Figure 2 As shown in the figure, the red curve reflects the change process of phase with error, and the blue curve reflects the change of error control signal at the corresponding moment. It can be seen from the figure that when the phase error is input, the originally stable controlled phase suddenly changes to the phase value containing the corresponding error. At this time, the corresponding error control signal also suddenly changes from the initial 0. The phase error compensation phase shift is continuously adjusted in the direction of controlling the error control signal to 0 under the action of the PID controller until the error control signal is adjusted to near 0 again. At this time, the phase is also adjusted back to the accurate phase. For a phase error of ±3°, the entire control process only takes about 8s. The closed-loop control speed is sufficient to meet the needs of the gyroscope for real-time compensation of phase error changes during temperature changes.

[0046] The phase error of a micromechanical gyroscope is an important factor affecting the performance and working stability of the gyroscope. However, the commonly used micromechanical gyroscope signal detection circuit can only provide a fixed error compensation value, and the phase error is identified through some offline test methods. However, these identification methods are not accurate, and because the factors that cause the phase error are complex, it will also change with changes in the environment such as temperature, so the traditional methods are not effective.

[0047] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A micromechanical gyroscope error compensation circuit based on signal disturbance, wherein the micromechanical gyroscope comprises a driving electrode, a detection electrode, an axis adjustment electrode and a common terminal, characterized in that: The common end is connected to the input ends of the two demodulation units via a charge amplifier, the output end of one demodulation unit is connected to the input end of the driving loop via a first analog-to-digital converter, the output end of the other demodulation unit is connected to the input ends of the in-phase loop and the orthogonal loop via a second analog-to-digital converter, and the output ends of the driving loop, the in-phase loop, and the orthogonal loop are connected to the driving electrode, the detection electrode, and the axis adjustment electrode respectively in sequence; It also includes an error compensation loop, which includes two disturbance signal output terminals, wherein the first disturbance signal output terminal is connected to the orthogonal loop, and the second disturbance signal output terminal is connected to the multiplication demodulator and the PID controller in sequence, the output terminal of the PID controller is connected to the orthogonal loop, and the input terminal of the multiplication demodulator is also connected to the in-phase loop, the multiplication demodulator is used to multiply and demodulate the disturbance signal and the in-phase signal to obtain an error control signal, the PID controller is used to control the error control signal to be 0 to obtain a phase compensation phase shift, and the phase compensation phase shift is input into the orthogonal loop and the in-phase loop to realize real-time compensation of the phase error.

2. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The disturbance signal is preset, and the setting condition is that the orthogonal loop still maintains signal stability after the disturbance signal is input.

3. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The demodulation units all include a high-pass filter, a multiplication demodulator and a low-pass filter connected in sequence. The high-pass filter is used to filter out some low-frequency disturbance signals in the electrical signal. The multiplication demodulator in the demodulation unit connected to the first analog-to-digital converter is used to multiply and demodulate the electrical signal with a driving high-frequency carrier signal to obtain a driving signal. The multiplication demodulator in the demodulation unit connected to the second analog-to-digital converter is used to multiply and demodulate the electrical signal with a detection high-frequency carrier signal to obtain a detection signal.

4. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The driving loop includes two branches, the input ends of the two branches are connected to the output end of the first analog-to-digital converter, and the two branches are each provided with a first orthogonal demodulator, the first orthogonal demodulator of one branch is used to perform orthogonal demodulation on the driving signal to obtain a driving amplitude signal, and the first orthogonal demodulator of the other branch is used to perform orthogonal demodulation on the driving signal to obtain a driving phase signal; The driving phase signal is passed through a digitally controlled oscillator to generate a sinusoidal signal, the sinusoidal signal is multiplied by the driving amplitude signal to obtain a driving output signal, and the driving output signal is input to the driving electrode together with the input driving high-frequency carrier signal and the input driving AC voltage signal after passing through a digital-to-analog converter to achieve resonance and constant amplitude control of the gyroscope driving mode.

5. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 4, characterized in that: The in-phase loop includes a second orthogonal demodulator, a low-pass filter and a first PID controller connected in sequence. The second orthogonal demodulator is used to perform orthogonal demodulation on the detection signal to obtain an in-phase signal. After the in-phase signal is filtered out by the low-pass filter to remove the high-frequency carrier signal and the high-frequency disturbance signal, the detection AC signal is controlled by the first PID controller to offset the detection signal to obtain a gyroscope output signal. The gyroscope output signal is multiplied by the sinusoidal signal to obtain a detection AC signal. The detection AC signal is converted into a detection AC voltage signal after passing through a digital-to-analog converter and is input to the detection electrode together with the input detection DC voltage signal to achieve real-time suppression of vibration of the gyroscope detection method.

6. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 5, characterized in that: The orthogonal loop includes a third orthogonal demodulator, a low-pass filter and a second PID controller connected in sequence. The third orthogonal demodulator is used to perform orthogonal demodulation on the detection signal to obtain an orthogonal signal. The orthogonal signal is filtered out by a low-pass filter to remove the high-frequency carrier signal and the high-frequency disturbance signal, and then passed through the second PID controller as a controlled variable. The second PID controller controls the shaft adjustment voltage signal so that the orthogonal signal is controlled in real time. The shaft adjustment voltage signal is output to the shaft adjustment electrode via a digital-to-analog converter to suppress the orthogonal error.

7. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 6, characterized in that: The first disturbance signal output end is connected to the input end of the second PID controller, the input end of the multiplication demodulator is also connected to the output end of the first PID controller, and the output end of the PID controller is connected to the input end of the second orthogonal demodulator and the input end of the third orthogonal demodulator.

8. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The error compensation loop also includes a low-pass filter connected to the output end of the first PID controller, and the low-pass filter is used to filter out the high-frequency carrier signal and the high-frequency disturbance signal in the in-phase signal to obtain the gyroscope output signal.

9. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 1, characterized in that: The PID controller is used to control the error control signal to 0 to obtain a phase compensation phase shift, and the derivation process of the phase compensation phase shift that can achieve real-time compensation of the phase error includes: When the micromechanical gyroscope works stably, the in-phase signal and the orthogonal signal of the detection signal are obtained according to the gyroscope system comprehensive error, the phase error and the phase error compensation phase shift calculation; Apply a disturbance signal, control the orthogonal signal to the disturbance signal, control the in-phase signal to 0, and solve the orthogonal loop equation and the in-phase loop equation to obtain the feedback force signal: Demodulating the feedback force signal using the disturbance signal to obtain an error control signal; The real-time control error control signal is 0, which means that the phase error is compensated in real time.

10. The signal disturbance-based micromechanical gyroscope error compensation circuit according to claim 9, characterized in that: The expressions of the in-phase signal and the orthogonal signal of the detection signal calculated according to the gyro system comprehensive error, phase error and the phase error compensation phase shift are: ； in, represents the in-phase signal, represents the orthogonal signal, It represents the signal output of the micromechanical gyroscope due to the stiffness coupling error. represents the signal output of the micromechanical gyroscope due to the damping coupling error, represents the phase error, represents the phase compensation phase shift, represents the feedback force of the micromechanical gyroscope signal output; The expression of the feedback force signal obtained by solving the orthogonal loop equation and the in-phase loop equation is: ； Solving the equation together: ； in, represents the feedback force signal, represents the disturbance signal, represents the disturbance signal amplitude, represents the frequency of the disturbance signal, represents the disturbance signal application time, Represents the system gain, which is a fixed value; The expression of the error control signal obtained by demodulating the feedback force signal using the disturbance signal is: ； in, Represents the error control signal.

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