Light beam scanning device and system

Abstract

The invention provides a light beam scanning device and system. The light beam scanning device comprises a first prism group and a second prism group. Wherein the first prism group and the second prism group are arranged along a first direction and rotate by taking the first direction as an axis. The first direction comprises the axis direction of the first prism group. The second prism group comprises a first prism and a second prism, and the main section of the first prism is perpendicular to the main section of the second prism. The first prism deflects around the second direction, the second prism deflects around the third direction, and the third direction comprises the normal direction of the main section of the second prism. Any two of the first direction, the second direction and the third direction are perpendicular to each other. And at least one prism in the first prism group and the second prism group is a wedge-shaped prism. The scanning precision of the light beam scanning device provided by the invention can reach a submicro radian level, the light beam scanning or light beam pointing precision is improved by one order of magnitude, and the pointing precision of the laser beam is greatly improved.

Description

Technical Field

[0001] The present application relates to the field of optical communications, and more specifically, to a light beam scanning device and system. Background Art

[0002] Free space laser communication (FSO) is a key component of the next generation of communication technology. Two communication terminals transmit information through a precisely aligned laser beam as a medium. Usually, the carrier carrying the communication terminal is often moving, such as on a vehicle, airborne, satellite, or ship. In addition, the communication terminal will also be affected by the vibration generated by other loads, thus affecting the pointing accuracy of the laser beam.

[0003] At present, a rotating double prism structure is often added to the communication terminal to improve the pointing accuracy of the light beam. The rotating double prism structure rotates two wedge-shaped prisms around their axes so that the light beam passing through the prism can be deflected to any direction within its scanning range, thereby adjusting the pointing accuracy of the light beam. The rotating double prism structure can generally adjust the pointing accuracy of the micro-radian level, but with the development of FSO technology, there are increasingly higher requirements for the pointing accuracy of the light beam. How to improve the pointing accuracy of the rotating double prism mechanism has been a hot research direction in recent years. Summary of the invention

[0004] The present application provides a beam scanning device and system, which can adjust the relative positions of prisms in a first prism group and a second prism group to provide pointing accuracy adjustment in two dimensions, thereby improving the pointing accuracy of a laser beam.

[0005] In the first aspect, a light beam scanning device is provided. The light beam scanning device includes a first prism group and a second prism group, wherein the first prism group and the second prism group are arranged along a first direction and rotated with the first direction as an axis, and are used to adjust the exit direction of the incident light beam so that the light beam is incident on a first plane. The first direction includes the axis direction of the first prism group. The second prism group includes a first prism and a second prism, and the main section of the first prism is perpendicular to the main section of the second prism. The first prism swings around the second direction to adjust the light spot of the light beam on the first plane to translate along a fourth direction, and the second direction includes the normal direction of the main section of the first prism. The second prism swings around the third direction to adjust the light spot of the light beam on the first plane to translate along a fifth direction, and the third direction includes the normal direction of the main section of the second prism. Any two directions of the first direction, the second direction, and the third direction are perpendicular to each other. The fourth direction and the fifth direction are perpendicular to each other in the first plane. At least one prism in the first prism group and the second prism group is a wedge prism.

[0006] Based on the above technical solution, by adjusting the first prism group and the second prism group to rotate around the first direction, the direction of the outgoing light beam can be adjusted so that the outgoing light beam is incident on the first plane. By adjusting the first prism and the second prism to deflect along the normal direction of their respective main cross-sections, the spot position of the outgoing light beam on the first plane can be adjusted. The main cross-sections of the first prism and the second prism are perpendicular to each other, so that the light beam scanning device has two-dimensional adjustment accuracy in the first plane, and no crosstalk is formed during the adjustment process in the two dimensions. The scanning accuracy of the light beam scanning device provided in the present application can reach the sub-microradian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0007] It should be understood that the first prism group may include one prism or multiple prisms, and this application does not specifically limit this.

[0008] It should be understood that the second prism group may include one prism or multiple prisms, and this application does not make any special limitation on this.

[0009] In combination with the first aspect, in some implementations of the first aspect, the first prism and the second prism rotate synchronously around the first direction.

[0010] Based on the above technical solution, during the rotation of the second prism group, the first prism and the second prism rotate synchronously, and the main cross-sections of the first prism and the second prism are always perpendicular to each other, so that the light beam scanning device has two-dimensional adjustment accuracy in the first plane, and no crosstalk is formed during the adjustment process of the two dimensions. The scanning accuracy of the light beam scanning device provided by the present application can reach the sub-microradian level, which improves the light beam scanning or light beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0011] In combination with the first aspect, in some implementations of the first aspect, the first prism group and the second prism group are coaxially arranged in sequence along the first direction.

[0012] Based on the above technical solution, along the first direction, the first prism group and the second prism group are coaxially arranged in sequence, so that the outgoing light of the light beam scanning device passes through the second prism group and the first prism group in sequence before being emitted. Such an arrangement can reduce the moment of inertia between the lens groups. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0013] In combination with the first aspect, in some implementations of the first aspect, the first prism, the first prism group, and the second prism are coaxially arranged in sequence along the first direction.

[0014] Based on the above technical solution, along the first direction, the first prism, the first prism group, and the second prism are coaxially arranged in sequence, so that the outgoing light of the light beam scanning device passes through the second prism, the first prism group, and the first prism in sequence before being emitted. Such an arrangement can change the scanning range of the light beam. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the accuracy of light beam scanning or light beam pointing by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0015] In combination with the first aspect, in some implementations of the first aspect, the first prism group includes a third prism, and the first prism, the second prism, and the third prism are all wedge prisms.

[0016] Based on the above technical solution, the propagation direction of the light in the beam scanning device is changed by a wedge-shaped prism to improve the pointing accuracy of the beam scanning device. The scanning accuracy of the beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude and greatly improves the pointing accuracy of the laser beam.

[0017] In combination with the first aspect, in certain implementations of the first aspect, the first prism and the second prism have the same deflection angle for the incident light beam, which is smaller than the deflection angle of the first prism group for the incident light beam.

[0018] Based on the above technical solution, the first prism and the second prism have the same deflection angle for the light beam, which is smaller than the deflection angle of the first prism group, so the scanning range of the light beam scanning device can be reduced. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0019] In combination with the first aspect, in some implementations of the first aspect, the prisms satisfy

[0020]

[0021] Among them, α1 is the equivalent wedge angle of the first prism group, α2 is the wedge angle of the first prism, α3 is the wedge angle of the second prism, n1 is the equivalent refractive index of the first prism group, n2 is the refractive index of the first prism, and n3 is the refractive index of the second prism.

[0022] Based on the above technical solution, there is a certain quantitative relationship between the wedge angle between the prism groups in the light beam scanning device and the refractive index of the prism. When the wedge angle and the refractive index of the prism satisfy the above relationship, the scanning blind area within the scanning range can be further reduced, and the inverse solution can be reduced. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-microradian level, which improves the accuracy of light beam scanning or light beam pointing by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0023] In a second aspect, a beam scanning system is provided. The scanning system includes a processing device, a controller and a beam scanning device. The processing device sends a first instruction to the controller, and the controller adjusts the optical path in the beam scanning device according to the first instruction so that the outgoing beam of the beam scanning device is incident on the first position. The beam scanning device includes a first prism group and a second prism group. The first prism group and the second prism group are arranged along a first direction. The first controller and the second controller respectively control the first prism group and the second prism group to rotate around the first direction as an axis so that the outgoing beam is incident on the first plane. The first plane includes the plane where the first position is located, and the first direction includes the axis direction of the first prism group. The second prism group includes a first prism and a second prism. The main section of the first prism is perpendicular to the main section of the second prism. The third controller is used to drive the first prism to swing around the second direction so that the light spot of the outgoing light beam on the first plane is translated toward the first position along a fourth direction. The second direction includes the normal direction of the main section of the first prism. The fourth controller is used to drive the second prism to swing around the third direction so that the light spot of the outgoing light beam on the first plane is translated toward the first position along a fifth direction. The third direction includes the normal direction of the main cross section of the second prism. Any two of the first direction, the second direction, and the third direction are perpendicular to each other. The fourth direction and the fifth direction are perpendicular to each other in the first plane. At least one prism in the first prism group and the second prism group is a wedge prism.

[0024] Based on the above technical solution, the processing device sends a first instruction to the controller, and the controller adjusts the light beam of the light beam scanning device according to the first instruction so that the outgoing light of the light beam scanning device is incident on the first position. The first controller drives the first prism group to rotate around the first direction as an axis, and the second controller drives the second prism group to rotate around the first direction as an axis to adjust the direction of the outgoing light beam so that the outgoing light beam is incident on the first plane. The third controller drives the first prism to deflect around the normal direction of its main cross section so that the light spot of the outgoing light beam on the first plane is translated toward the first position along the fourth direction. The fourth controller drives the second prism to deflect around the normal direction of its main cross section so that the light spot of the outgoing light beam on the first plane is translated toward the first position along the fifth direction. The main cross sections of the first prism and the second prism are perpendicular to each other, so that the light beam scanning device has two-dimensional adjustment accuracy in the first plane, and no crosstalk is formed during the adjustment process of the two dimensions. The scanning accuracy of the light beam scanning device provided in the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0025] In combination with the second aspect, in some implementations of the second aspect, the second controller drives the first prism and the second prism to rotate synchronously around the first direction.

[0026] Based on the above technical solution, the second controller drives the first prism and the second prism to rotate synchronously. During the rotation of the second prism group, the main cross-sections of the first prism and the second prism are always perpendicular to each other, so that the light beam scanning device has two-dimensional adjustment accuracy in the first plane, and no crosstalk is formed during the adjustment process of the two dimensions. The scanning accuracy of the light beam scanning device provided in the present application can reach the sub-micro-radian level, which improves the light beam scanning or light beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0027] In combination with the second aspect, in some implementations of the second aspect, the first prism group and the second prism group are coaxially arranged in sequence along the first direction.

[0028] Based on the above technical solution, along the first direction, the first prism group and the second prism group are coaxially arranged in sequence, so that the outgoing light of the light beam scanning device passes through the second prism group and the first prism group in sequence before being emitted. Such an arrangement can reduce the moment of inertia between the lens groups. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0029] In combination with the second aspect, in some implementations of the second aspect, the first prism, the first prism group, and the second prism are coaxially arranged in sequence along the first direction.

[0030] Based on the above technical solution, along the first direction, the first prism, the first prism group, and the second prism are coaxially arranged in sequence, so that the outgoing light of the light beam scanning device passes through the second prism, the first prism group, and the first prism in sequence before being emitted. Such an arrangement can change the scanning range of the light beam. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the accuracy of light beam scanning or light beam pointing by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0031] In combination with the second aspect, in some implementations of the second aspect, the first prism group includes a third prism, and the first prism, the second prism, and the third prism are all wedge prisms.

[0032] Based on the above technical solution, the propagation direction of the light in the beam scanning device is changed by a wedge-shaped prism to improve the pointing accuracy of the beam scanning device. The scanning accuracy of the beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude and greatly improves the pointing accuracy of the laser beam.

[0033] In combination with the second aspect, in some implementations of the second aspect, the first prism and the second prism have the same deflection angle for the incident light beam, which is smaller than the deflection angle of the first prism group for the incident light beam.

[0034] Based on the above technical solution, the first prism and the second prism have the same deflection angle for the light beam, which is smaller than the deflection angle of the first prism group, so the scanning range of the light beam scanning device can be reduced. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-micro-radian level, which improves the beam scanning or beam pointing accuracy by an order of magnitude, and greatly improves the pointing accuracy of the laser beam.

[0035] In conjunction with the second aspect, in some implementations of the second aspect, the prisms satisfy

[0036]

[0037] Among them, α1 is the equivalent wedge angle of the first prism group, α2 is the wedge angle of the first prism, α3 is the wedge angle of the second prism, n1 is the equivalent refractive index of the first prism group, n2 is the refractive index of the first prism, and n3 is the refractive index of the second prism.

[0038] Based on the above technical solution, there is a certain quantitative relationship between the wedge angle between the prism groups in the light beam scanning device and the refractive index of the prism. When the wedge angle and the refractive index of the prism satisfy the above relationship, the scanning blind area within the scanning range can be further reduced, and the inverse solution can be reduced. In addition, the scanning accuracy of the light beam scanning device provided by the present application can reach the sub-microradian level, which improves the accuracy of light beam scanning or light beam pointing by an order of magnitude, and greatly improves the pointing accuracy of the laser beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a schematic diagram of the rotating biprism structure with FSM provided in this application.

[0040] Figure 2 This is a schematic diagram of a structure in which a pointing mechanism and a communication optical path are separated provided by the present application.

[0041] Figure 3 It is a schematic diagram of the principle of a deflection prism provided in this application.

[0042] Figure 4 It is a schematic diagram of a light beam scanning structure provided in this application.

[0043] Figure 5 It is a structural schematic diagram of a light beam scanning device provided in an embodiment of the present application.

[0044] Figure 6 It is a structural schematic diagram of a prism light beam scanning device provided in an embodiment of the present application.

[0045] Figure 7 It is a schematic diagram of a structure in which a prism and a lens barrel are fixed together according to an embodiment of the present application.

[0046] Figure 8 It is a structural schematic diagram of a yaw fixing device provided in an embodiment of the present application.

[0047] Fig. 9 It is a structural schematic diagram of a yaw execution device provided in an embodiment of the present application.

[0048] Fig.10 It is a schematic diagram of the fixed structure of a yaw actuator provided in an embodiment of the present application.

[0049] Fig.11 It is a schematic diagram of the fixed structure of a rotating mirror group and a tilting mirror group provided in an embodiment of the present application.

[0050] Fig.12 It is a schematic diagram of the structure of another light beam scanning device provided in an embodiment of the present application.

[0051] Fig.13 It is a structural schematic diagram of a light beam scanning system provided in an embodiment of the present application.

[0052] Fig.14 It is a schematic diagram of a space laser communication scenario provided in an embodiment of the present application.

[0053] Fig.15 It is a schematic diagram of a laser radar ranging scenario provided in an embodiment of the present application. DETAILED DESCRIPTION

[0054] The technical solution in this application will be described below in conjunction with the accompanying drawings.

[0055] It should be noted that, in the description of the embodiments of the present application, unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present application, "multiple" means two or more than two, and "at least one" and "one or more" mean one, two or more. The singular expressions "a", "an", "said", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear indication to the contrary in the context.

[0056] References to "one embodiment" or "some embodiments" etc. described in this specification mean that a particular feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present application. Thus, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. that appear at different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0057] In the description of the embodiments of the present application, the directions or positional relationships indicated by terms such as "up", "down", "left", "right", "vertical" and "horizontal" are defined relative to the directions or positions of the components schematically placed in the drawings. It should be understood that these directional terms are relative concepts. They are used for relative description and clarification, rather than indicating or implying that the device or component referred to must have a specific direction, or be constructed and operated in a specific direction. They may change accordingly according to changes in the directions of the components placed in the drawings, and therefore cannot be understood as limitations on the present application.

[0058] In the embodiments of the present application, the same reference numerals are used to represent the same components or the same components. In addition, the components in the drawings are not drawn to scale, and the sizes and dimensions of the components shown in the drawings are only exemplary and should not be understood as limiting the present application.

[0059] Free space laser communication (FSO) is a key component of the next generation of communication technology. Two communication terminals transmit information through a precisely aligned laser beam as a medium. Usually, the carrier carrying the communication terminal is often in motion, such as on a vehicle, on an airborne vehicle, on a satellite, on a ship, etc. In addition, the communication terminal will also be affected by the vibration generated by the work of other loads, so that the laser beam will be affected and will shake violently and cannot be aimed at the target communication terminal. In order to suppress these vibration interferences, a high-precision beam pointing control system needs to be added to the communication terminal.

[0060] At present, a rotating dual prism structure is often added to the communication terminal to improve the beam pointing accuracy. As an important branch of high-precision beam pointing control technology, the rotating dual prism structure has been widely used in laser communication, laser radar, three-dimensional imaging, security cameras, image motion compensation and other fields.

[0061] The rotating double prism structure rotates the two wedge-shaped prisms around their axes so that the light beam passing through the prisms can be deflected to any direction within its scanning range, thereby adjusting the beam pointing accuracy. The rotating double prism structure can also include a motor structure, which drives the two wedge-shaped prisms to rotate around their axes through two independent motors to achieve micro-radian-level pointing accuracy. However, for application scenarios with higher pointing accuracy, the rotating double prism structure needs to be used in conjunction with a fast steering mirror (FSM), such as Figure 1 shown.

[0062] Figure 1 This is a schematic diagram of a rotating bi-prism structure with FSM provided by the present application. As shown in the figure, the rotating bi-prism in the figure serves as a coarse pointing mechanism. After the light beam is emitted from the coarse pointing mechanism, it passes through the primary mirror and the secondary mirror and uses the FSM as a fine pointing mechanism to achieve high-precision pointing accuracy. Among them, there are three commonly used structures for the primary mirror and the secondary mirror, namely, the transmission structure (structure one), the coaxial reflection structure (structure two) and the off-axis reflection structure (structure three). These three optical-mechanical structures require precise adjustment of the relative position of the primary mirror and the secondary mirror, the optical path adjustment time is long, the adjustment is difficult, and there is a lack of automated mass production capabilities. In order to reduce the difficulty of production, in actual production applications, when designing a high-precision light beam pointing control system, the light beam pointing mechanism and the communication optical path portion are generally designed separately, so that there is no structure that needs to be adjusted in the communication optical path portion, and the received light beam is directly coupled into the receiver through the lens group, such as Figure 2 shown.

[0063] Figure 2 This is a schematic diagram of a structure in which a pointing mechanism is separated from a communication optical path provided by the present application. A light beam is emitted from a transmitting end, and the light beam after being reflected by an obstacle can be approximately regarded as a parallel light beam. The reflected light beam enters a coarse pointing mechanism composed of two wedge-shaped rotating biprisms, and then reaches the receiving end via a converging lens group and a center-hole reflector. The overall coarse pointing mechanism is separated from the communication optical path, and the light beam emitted from the coarse pointing mechanism is directly converged through the lens group and coupled into the receiver. The rotating biprism structure can generally achieve micro-radian-level pointing accuracy adjustment, but with the development of FSO technology, there are increasingly higher requirements for the pointing accuracy of the light beam. How to improve the pointing accuracy of the rotating biprism mechanism has been a hot research direction in recent years.

[0064] Usually, the pointing accuracy can be improved by introducing a tilt prism. Figure 3 and Figure 4 The structure in which the deflection prism is introduced is described.

[0065] Figure 3This is a schematic diagram of the principle of a deflection prism provided by the present application. The light beam will be deflected after passing through the wedge prism. If the wedge prism deflects around its main cross section, the outgoing light beam will also deflect accordingly. When the deflection angle of the wedge prism is φ, the deflection angle of the outgoing light beam will also deflect accordingly, which is recorded as The two deflection angles meet And φ and The proportional relationship is related to the wedge angle of the prism.

[0066] Figure 4 : is a schematic diagram of a beam scanning structure provided by the present application. As shown in the figure, the beam scanning structure includes two independent wedge-shaped prisms, namely prism A and prism B. Here, for the convenience of description, the direction parallel to the optical axis of prism A is the X direction, the direction parallel to the normal of the main cross section of prism A is the Y direction, the Z direction is determined according to the X direction and the Y direction, and any two directions of the X, Y, and Z directions are perpendicular to each other, so as to establish a rectangular coordinate system.

[0067] It should be understood that the establishment of the rectangular coordinate system is only for a clearer description of the technical solution of the present application, and does not constitute any limitation on the protection scope of the present application.

[0068] It should be understood that prism A and prism B are merely names, and prism A and prism B may be the same wedge-shaped prisms or different wedge-shaped prisms, and the present application does not impose any special limitation on this.

[0069] like Figure 4 As shown, when the two prisms are in the initial state, that is, the two prisms are in state 1, prism B is coaxially arranged with prism A, and the normal of the main section of prism B is parallel to the normal of the main section of prism A. At this time, both prisms have the freedom to rotate around their axis system, that is, both prisms have the freedom to rotate around the X-axis. Both prisms have the freedom to deflect around the normal of their main section, that is, both prisms have the freedom to deflect around the Y-axis. The prism has the freedom of rotation to realize the coarse pointing adjustment function, and the prism has the freedom of deflection to realize the fine pointing adjustment function. When the two prisms are in the initial state, the normal directions of the main sections of the two prisms are parallel, and the deflection directions of the two prisms around the normal of their main sections are the same. In other words, when the two prisms are in the state as shown Figure 4 In the state 1, the two prisms have the same deflection direction, which is around the Y axis. Therefore, when the two prisms are in the state 1, there is only one deflection direction, that is, there is only one-dimensional precise pointing adjustment function.

[0070] Prism B has the freedom to rotate around the X-axis, so the two prisms have a coarse pointing adjustment function. When the normals of the main sections of the two prisms are perpendicular to each other, the two prisms have a two-dimensional fine pointing adjustment function. In other words, when the two prisms are in state 2, prism A has the freedom to yaw around the Y-axis, and prism B has the freedom to yaw around the Z-axis. The two prisms have a two-dimensional fine pointing adjustment function. When prism B rotates around the X-axis, but the main sections of the two prisms are not parallel, the two prisms yaw around the normals of their main sections, respectively, which will cause two-dimensional yaw components, which will crosstalk with each other in two dimensions, increasing the difficulty of fine pointing adjustment.

[0071] In summary, it can be seen that it is difficult to have both the coarse pointing adjustment function and the two-dimensional fine pointing adjustment function during the mutual rotation and deflection of the two prisms. Moreover, in the two-dimensional fine pointing adjustment process, it is easy to cause crosstalk between the two-dimensional adjustments, which increases the difficulty of adjustment and reduces the accuracy of adjustment.

[0072] The present application provides a light beam scanning device, which provides sub-micro-radian-level pointing accuracy adjustment in two dimensions by adjusting the relative positions of a first prism group and a second prism group, thereby improving the pointing accuracy of a laser beam.

[0073] In a light beam scanning device, the rotation of a prism around its axis and the deflection of a prism around the normal of its main section have different functions. Therefore, a light beam scanning device provided by the present application includes a first prism group and a second prism group. The prisms in the first prism group are used to rotate around their axis to have a coarse pointing precision adjustment capability, which can also be called a rotating mirror group; the prisms in the second prism group are used to deflect around the normal of their main section to have a fine pointing precision adjustment capability, which can also be called a deflection mirror group.

[0074] The rotation of the prisms in the first prism group around their axis is mainly used to achieve wide-range scanning and speed control of the light beam. By rotating the prisms in the first prism group, the transmission path of the light inside the prism can be changed, thereby achieving light beam scanning. The deflection of the prisms in the second prism group around the normal of their main cross-section is mainly used to achieve the pointing control and precise orientation of the light beam. By adjusting the deflection angle of the prisms in the second prism group, the transmission direction of the light beam can be controlled so that it points to a specific target position. By controlling the rotation and deflection of the prisms in the light beam scanning device, the scanning and precise orientation of the light beam in different directions and positions can be achieved.

[0075] Figure 5It is a light beam scanning device provided by an embodiment of the present application. The first prism group and the second prism group are arranged along a first direction and rotated with the first direction as an axis, so as to adjust the exit direction of the incident light beam so that the light beam is incident on the first plane. The first direction includes the axial direction of the first prism group. The second prism group includes a first prism 520 and a second prism 530, and the main cross-section of the first prism 520 is perpendicular to the main cross-section of the second prism 530; wherein the normal direction of the main cross-section of the first prism 520 is the second direction, and the normal direction of the main cross-section of the second prism 630 is the third direction. Any two directions among the first direction, the second direction, and the third direction are perpendicular to each other. At least one prism in the first prism group and the second prism group is a wedge prism.

[0076] In an optional implementation, the X direction is the first direction, the Y direction is the second direction, and the Z direction is the third direction. That is, the axis direction of the first prism group includes the X direction, and the first prism group and the second prism group are arranged along the X direction and rotate around the X axis.

[0077] It should be understood that the X direction as the first direction, the Y direction as the second direction, and the Z direction as the third direction are only an optional implementation of the present application and do not constitute any limitation on the protection scope of the present application.

[0078] The first prism 520 is deflected around the second direction Y to adjust the light spot of the light beam on the first plane to translate along the fourth direction. The second prism 530 is deflected around the third direction Z to adjust the light spot of the light beam on the first plane to translate along the fifth direction. The fourth direction and the fifth direction are perpendicular to each other in the first plane.

[0079] It should be understood that the first plane includes a target plane that needs to be scanned by the light beam scanning device, and the present application does not impose any special limitation on this.

[0080] In an optional implementation, the first prism group includes a third prism 510 , and the third prism 510 rotates around the X-axis under the driving action of the rotation actuator 511 .

[0081] In an optional implementation, the first prism 520 and the second prism 530 are fixed in the yaw fixing device 513, and the main cross-sections of the first prism 520 and the second prism 530 are always perpendicular to each other. The first prism 520 yaws around the second direction Y axis under the driving action of the yaw driving device 514; the second prism 530 yaws around the third direction Z axis under the driving action of the yaw driving device 515.

[0082] In an optional implementation, the first prism 520 and the second prism 530 are driven by the rotation actuator 512 to rotate synchronously around the X-axis, and the main cross-sections of the first prism 520 and the second prism 530 are always perpendicular to each other.

[0083] In an optional implementation, the first prism group, the first prism 520 , and the second prism 530 are coaxially arranged in sequence along the X direction.

[0084] In another optional implementation, the first prism 520, the first prism group, and the second prism 530 are coaxially arranged in sequence along the X direction.

[0085] In another optional implementation, the first prism 520, the second prism 530, and the first prism group are coaxially arranged in sequence along the X direction.

[0086] In an optional implementation, the first prism group includes a third prism 510; the first prism 520, the second prism 530, and the third prism 510 are all wedge prisms.

[0087] In an optional implementation, the first prism group includes a third prism 510 , and the third prism 510 , the first prism 520 , and the second prism 530 are coaxially arranged in sequence along the X direction.

[0088] In another optional implementation, the first prism group includes the third prism 510, and the first prism 520, the third prism 510, and the second prism 530 are coaxially arranged in sequence along the X direction.

[0089] In another optional implementation, the first prism group includes a third prism 510, and the first prism 520, the second prism 530, and the third prism 510 are coaxially arranged in sequence along the X direction.

[0090] In an optional implementation, the first prism 520 and the second prism 530 have the same deflection angle for the incident light beam, which is smaller than the deflection angle of the first prism group for the incident light beam.

[0091] In an optional implementation, the first prism 520 and the second prism 530 have the same deflection angle for light, which is smaller than the deflection angle of the first prism group for light. The wedge angle and refractive index of the prisms approximately satisfy:

[0092]

[0093] Among them, α1 is the equivalent wedge angle of the first prism group, α2 is the wedge angle of the first prism 520, and α3 is the wedge angle of the second prism 530; n1 is the equivalent refractive index of the first prism group, n2 is the refractive index of the first prism 520, and n3 is the refractive index of the second prism 530.

[0094] In an optional implementation, the first prism 520, the second prism 530, and the prisms in the first prism group are made of the same material, the wedge angles of the first prism 520 and the second prism 530 are the same and are both smaller than the equivalent wedge angle of the first prism group, and approximately satisfy:

[0095]

[0096] Wherein, α1 is the equivalent wedge angle of the first prism group, α2 is the wedge angle of the first prism 520 , and α3 is the wedge angle of the second prism 530 .

[0097] It should be understood that when the first prism group includes only the third prism 510 , α1 is the wedge angle of the third prism 510 , and n1 is the refractive index of the third prism 510 .

[0098] It should be understood that when the first prism group includes a plurality of prisms, the first prism group is regarded as a whole for parameter measurement, α1 is the equivalent wedge angle of the first prism group, and n1 is the equivalent refractive index of the first prism group.

[0099] When the wedge angle and refractive index of the prism approximately satisfy the above relationship, the scanning range of the light beam scanning device can be further made to have no blind spots, resulting in fewer inverse solutions.

[0100] In a preferred implementation, the first prism group includes a third prism 510, and the third prism 510, the first prism 520, and the second prism 530 are coaxially arranged in sequence along the X direction, and the apertures of the first prism 520 and the second prism 530 are slightly smaller than the aperture of the third prism 510. This can reduce the size and moment of inertia of the overall prism group, thereby further reducing the size of the light beam scanning device.

[0101] It should be understood that each prism includes a first surface and a second surface, and the planar arrangement of the prisms in the entire light beam scanning device includes two A A is the number of prisms. The technical solution disclosed in this application can cover all plane arrangements.

[0102] Taking the first prism 520, the second prism 530, and the third prism 510 in the entire light beam scanning device as an example, the entire light beam scanning device includes 8 arrangements, including:

[0103] Method 1: first side-second side-first side-second side-first side-second side;

[0104] Method 2: first side - second side - first side - second side - second side - first side;

[0105] Method 3: first side-second side-second side-first side-first side-second side;

[0106] Method 4: first side - second side - second side - first side - second side - first side;

[0107] Method 5: second side-first side-first side-second side-first side-second side;

[0108] Method 6: second side-first side-first side-second side-second side-first side;

[0109] Method 7: second side-first side-second side-first side-first side-second side;

[0110] Method 8: second side-first side-second side-first side-second side-first side.

[0111] It should be understood that the arrangement order of multiple prisms along the X-axis combined with the arrangement of the first surface and the second surface of each prism can be combined into different prism arrangements. Professional and technical personnel in this field can rotate, tilt, etc., the prisms in each specific combination to achieve the described functions, but such arrangement and combination and the process of adjustment should not be considered to be beyond the scope of this application.

[0112] It should be understood that the first surface includes a surface of the prism, specifically a plane or a wedge surface; the second surface includes a surface opposite to the first surface of the prism, specifically a plane or a wedge surface.

[0113] Next, we will combine Figures 6 to 11 A prism light beam scanning device provided in the present application is described in detail.

[0114] Figure 6 It is a structural schematic diagram of a prism light beam scanning device provided in an embodiment of the present application.

[0115] Here, in order to facilitate the description of the embodiments of the present application, a rectangular coordinate system is established with reference to the prism 610. The direction parallel to the optical axis of the prism 610 is the X direction, the direction parallel to the normal of the main cross section of the prism 610 is the Y direction, the Z direction is determined according to the X direction and the Y direction, and any two directions of the X, Y, and Z directions are perpendicular to each other, so as to establish a rectangular coordinate system.

[0116] It should be understood that the establishment of the rectangular coordinate system is only for a clearer description of the technical solution of the present application, and does not constitute any limitation on the protection scope of the present application.

[0117] It should be understood that the X direction is Figure 5 This is a specific manifestation of the first direction in the embodiment, and the present application does not make any special limitation on this.

[0118] It should be understood that the Y direction is Figure 5 This is a specific manifestation of the second direction in the embodiment, and the present application does not make any special limitation on this.

[0119] It should be understood that the Z direction is Figure 5 This is a specific form of expression of the third direction in the embodiment, and this application does not make any special limitation on this.

[0120] The prism 610 , the prism 620 , and the prism 630 are coaxially arranged in sequence along the X direction. In the light beam scanning device, the prism 610 , the prism 620 , and the prism 630 are arranged in sequence from the outside to the inside.

[0121] It should be understood that the prism 610 is Figure 5 The third prism 510 in the embodiment described above is a specific form, and the present application does not make any special limitation on this.

[0122] It should be understood that the prism 620 is Figure 5 The first prism 520 in the embodiment described above is a specific form, and the present application does not make any special limitation on this.

[0123] It should be understood that the prism 630 is Figure 5 The second prism 530 in the embodiment described above is a specific form, and the present application does not make any special limitation on this.

[0124] It should be understood that prism 610, prism 620, and prism 630 are merely names, and prism 610, prism 620, and prism 630 may be the same wedge-shaped prisms or different wedge-shaped prisms, which is specifically determined by the structure and parameters of the light beam scanning device, and the present application does not make any special limitation on this.

[0125] In a possible implementation, the rotating mirror group includes a prism 610, and the tilting mirror group includes a prism 620 and a prism 630. The rotating mirror group and the tilting mirror group have a relative rotational freedom, and the coarse direction of the light beam scanning device is adjusted by rotating the rotating mirror group and the tilting mirror group around the axis. The rotating mirror group and the tilting mirror group have a relative tilting freedom, and the fine direction of the light beam scanning device is adjusted by adjusting the prism in the tilting mirror group.

[0126] It should be understood that the rotating mirror assembly is Figure 5 The first prism group in the embodiment is a specific form of expression, and the present application does not make any special limitation on this.

[0127] It should be understood that the tilt mirror group is Figure 5 The second prism group in the embodiment is a specific form of expression, and the present application does not make any special limitation on this.

[0128] The prism 620 and the prism 630 are fixed by a fixing member, so that the main cross-sections of the prism 620 and the prism 630 are always kept perpendicular to each other, and both prisms have the degree of freedom of deflection around the normal of their main cross-sections. The prism 620 and the prism 630 are fixed by the same rotating motor, so that the prism 620 and the prism 630 rotate synchronously around their axes. The prism 610 is fixed by another motor, so that the prism 610 has the degree of freedom of rotation around its axis. Since the main cross-sections of the prism 620 and the prism 630 in the deflection mirror group are always kept perpendicular to each other, in the process of adjusting the relative rotation of the rotating mirror group and the deflection mirror group, and in the process of adjusting the deflection direction of the prism in the deflection mirror group, the deflection adjustment of the prism 620 and the prism 630 in two dimensions will not produce mutual crosstalk, which reduces the difficulty of adjustment and improves the adjustment accuracy.

[0129] The following, combined Figures 7 to 10 , the fixing method and the deflection between the prism 620 and the prism 630 are described. It should be understood that the embodiment of the present application only describes a possible fixing method between the prism 620 and the prism 630, so that the prism 620 and the prism 630 can realize the functions in the embodiment described in the present application, and does not constitute any limitation on the protection scope of the present application. The specific protection scope shall be subject to the claims.

[0130] Figure 7 6 is a schematic diagram of a structure in which a prism and a lens barrel are fixed to each other in an embodiment of the present application. The prism 620 is fixed in the lens barrel 621 , and the prism 630 is fixed in the lens barrel 631 .

[0131] In a possible implementation, the prism 620 and the prism 630 are respectively fixed in the lens barrel 621 and the lens barrel 631 by adhesive. It should be understood that other fixing methods can be used between the prism and the lens barrel, and this application does not make any special limitation on this.

[0132] Figure 8 : is a structural schematic diagram of a deflection fixing device provided in an embodiment of the present application. In a possible implementation of the present application, the deflection fixing device 640 includes three rings, and the three rings are fixed by flexible hinges so that relative displacement can occur between the three rings. The ring 642 in the middle of the deflection fixing device 640 is a fixed end, which is used to fix the deflection fixing device 640 in the deflection lens group housing of the light beam scanning device. The rings on both sides are used to fix the lens barrels of the prism 630 and the prism 620 respectively. The ring 641 is used to fix the lens barrel 631, and the ring 643 is used to fix the lens barrel 621. There are mutually orthogonal flexible hinges between the three rings, thereby providing two-dimensional deflection freedom for the prism 620 and the prism 630. In an implementation provided in the present application, the prism 620 has the degree of freedom to deflect around the Y axis, and the prism 630 has the degree of freedom to deflect around the Z axis.

[0133] In a possible implementation, the lens barrel 621 and the lens barrel 631 are respectively fixed to the ring of the yaw fixing device 640 by screws. It should be understood that other fixing methods can be used between the lens barrel and the yaw fixing device, and this application does not make any special limitation on this.

[0134] In a possible implementation, the yaw fixing device 640 includes a flexible shaft structure. It should be understood that the yaw fixing device may also adopt other structures, which are not particularly limited in the present application.

[0135] It should be understood that the yaw fixing device 640 is Figure 5 The yaw fixing device 513 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0136] Fig. 9 It is a structural schematic diagram of a yaw actuator provided in an embodiment of the present application. The yaw actuator includes a yaw drive device 622 and a yaw drive device 632. The yaw drive device 622 is used to drive the prism 620 to yaw around the normal direction of its main cross section, and the yaw drive device 632 is used to drive the prism 630 to yaw around the normal direction of its main cross section. In a possible coordinate system calibrated in an embodiment of the present application, the yaw drive device 622 is used to drive the prism 620 to yaw around the Y axis, and the yaw drive device 632 is used to drive the prism 630 to yaw around the Z axis.

[0137] For the convenience of description, the following description is given by taking the yaw drive device 632 driving the prism 630 as an example. In a possible coordinate system of the embodiment of the present application, the yaw drive device 632 drives the prism 630 to yaw around the Z axis, and the yaw drive device 632 is fixed along the Y axis.

[0138] It should be understood that the number of the yaw drive devices 632 drawn in the figure is only for illustration and does not constitute any limitation on the protection scope of the present application.

[0139] In a possible implementation, a deflection driving device 632 is installed along the Y-axis direction to drive the prism 630 to deflect around the Z-axis.

[0140] In another possible implementation, a deflection drive device 632 is installed on the outer edges of both sides of the prism 630 along the Y-axis direction. The two deflection drive devices 632 drive the prism 630 to deflect around the Z-axis in opposite directions, which can improve the degree of freedom of the deflection, thereby further improving the adjustment accuracy of the light beam scanning device.

[0141] It should be understood that in the technical solution disclosed in the present application, the deflection driving device is used to drive the normal phase deflection of the prism around its main cross-section, and the present application does not specifically limit the number of the deflection driving devices.

[0142] It should be understood that the principle of the deflection driving device 622 driving the prism 620 to deflect is similar to the principle of the deflection driving device 632 driving the prism 630 to deflect, and the present application will not elaborate on it here.

[0143] It should be understood that in this application Fig. 9 In a possible preferred embodiment shown, two yaw drive devices 632 and two yaw drive devices 622 are used respectively, wherein some devices are not drawn due to viewing angle, and do not constitute any limitation to the protection scope of the present application.

[0144] It should be understood that the technical solution disclosed in this application can also be applied to other coordinate systems. Fig. 9 The coordinate system shown is only a possible coordinate system established for the convenience of describing the embodiment and does not constitute any limitation on the protection scope of the present application.

[0145] It should be understood that the yaw drive device 622 is Figure 5 The yaw drive device 514 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0146] It should be understood that the yaw drive device 632 is Figure 5 The yaw drive device 515 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0147] In a possible implementation, the deflection driving device 632 includes a piezoelectric ceramic 6322. The piezoelectric ceramic 6322 generates displacement by driving the ring 641 to drive the prism 630 to deflect.

[0148] In another possible implementation, in addition to the piezoelectric ceramic 6322, the yaw drive device 632 further includes a displacement amplification structure 6321. The displacement amplification structure 6321 is used to amplify the displacement generated by the piezoelectric ceramic 6322, so that the yaw drive device 632 can drive the prism 630 to have a greater yaw degree of freedom, thereby improving the adjustment accuracy of the light beam scanning device.

[0149] It should be understood that, in addition to piezoelectric ceramics, the yaw drive device 632 may also include a voice coil motor, a linear motor, and other drive devices, and the yaw drive device 632 may also use a cam drive, a rack drive, and other transmission methods to drive the prism to yaw. Piezoelectric ceramics are a possible preferred implementation method provided in the embodiment of the present application, and the present application does not specifically limit this.

[0150] It should be understood that the deflection drive device 622 and the deflection drive device 632 are both used to drive the prism to deflect around the normal direction of its main cross-section. The two deflection drive devices can have the same drive structure or different drive structures, and the present application does not make any special limitation on this.

[0151] It should be understood that the fixed position of the deflection drive device 632 is related to the deflection direction of the prism, and this application does not specifically limit this. In a possible preferred implementation, the fixing direction of the drive device is parallel to the main cross-sectional direction of the prism and is fixed along the radial direction of the prism to drive the prism to deflect around the normal direction of its main cross-sectional direction.

[0152] Fig.10 The yaw fixing device 640 is installed into the yaw mirror assembly housing 650 through threads, and then the stop structure 651 and the stop structure 652 are fixed by set screws.

[0153] In a possible implementation, the bottom of the yaw drive device 632 is fixed on the stop structure 651 of the yaw mirror assembly housing 650, and the top of the yaw drive device 632 pushes the ring 641 to drive the prism 630 to yaw. The bottom of the yaw drive device 622 (not shown in the figure due to viewing angle) is fixed on the stop structure 652 of the yaw mirror assembly housing 650, and the top of the yaw drive device 622 pushes the ring 643 to drive the prism 620 to yaw.

[0154] Fig.11 6 is a schematic diagram of a fixed structure of a rotating mirror group and a tilting mirror group provided in an embodiment of the present application. The prism 610 in the rotating mirror group is fixed in a rotating mirror group housing 660. The rotating mirror group and the tilting mirror group are arranged in sequence along the X-axis direction and assembled and fixed. Figure 6 The rotary actuators of the rotating mirror group and the tilting mirror group are described.

[0155] The tilt mirror group and the rotation mirror group can rotate independently, and are driven to rotate around the X-axis by two sets of rotation actuators respectively.

[0156] In a possible implementation, the rotation actuator includes a motor and a bearing. The motor 672 and the bearing 674 are fixed in the housing 650 of the tilt mirror group to drive the tilt mirror group to rotate. Under the action of the motor 672 and the bearing 674, the prism 620 and the prism 630 keep rotating synchronously around the X-axis. The motor 671 and the bearing 673 are fixed in the housing 660 of the rotating mirror group to drive the rotating mirror group to rotate. Under the action of the motor 671 and the bearing 673, the prism 610 rotates around the X-axis.

[0157] It should be understood that the motor 671 and the bearing 673 are Figure 5 The rotation execution device 511 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0158] It should be understood that the motor 672 and the bearing 674 are Figure 5The rotation execution device 512 in the embodiment described is a specific form, and the present application does not make any special limitation on this.

[0159] It should be understood that, in addition to the structure of the motor and the bearing, the rotation actuator 511 may also include other forms of expression. In some optional implementations, the rotation actuator 511 may include a torque motor, an ultrasonic motor, etc. to directly drive the prism to rotate; the rotation actuator 511 may also use a gear drive, a synchronous belt drive, a worm gear drive, etc. to drive the prism to rotate. This application does not make any special restrictions on this.

[0160] In summary, combined Figures 6 to 10 , the structure of a prism beam scanning device is described. Figures 6 to 10 In the disclosed embodiment, the light beam emitted by the light source of the light beam scanning device passes through the prism 630, the prism 620, and the prism 610 in sequence and enters the target plane.

[0161] Figure 6 As an optional implementation, prism 630, prism 620, and prism 610 are all wedge-shaped prisms, and each prism includes a wedge surface and a plane surface. Along the positive direction of the X-axis, prism 610, prism 620, and prism 630 are arranged in sequence, and the three prisms are arranged in the order of wedge surface-plane-wedge surface-plane-plane-wedge surface.

[0162] It should be understood that in some optional implementations, the wedge surface is used as Figure 5 A specific form of the first surface in the embodiment is a plane as Figure 5 This is a specific form of the second surface in the embodiment, and the present application does not make any special limitation on this.

[0163] It should be understood that in some other optional implementations, the plane is used as Figure 5 A specific form of the first surface in the embodiment is as follows: the wedge surface is Figure 5 This is a specific form of the second surface in the embodiment, and the present application does not make any special limitation on this.

[0164] by Figure 6 Taking the arrangement of the middle prism 610, the prism 620, and the prism 630 in sequence along the X direction as an example, there are 8 arrangements of the wedge surfaces and the planes between the prisms. Including:

[0165] Method 1: wedge surface-plane-wedge surface-plane-wedge surface-plane;

[0166] Method 2: wedge surface-plane-wedge surface-plane-plane-wedge surface;

[0167] Method 3: wedge surface-plane-plane-wedge surface-wedge surface-plane;

[0168] Method 4: wedge surface-plane-plane-wedge surface-plane-wedge surface;

[0169] Method 5: plane-wedge-wedge-plane-wedge-plane;

[0170] Method 6: plane-wedge-wedge-plane-plane-wedge;

[0171] Method 7: plane-wedge-plane-wedge-wedge-plane;

[0172] Method 8: plane-wedge surface-plane-wedge surface-plane-wedge surface.

[0173] It should be understood that the above 8 arrangements are Figure 5 2 of the embodiments described A This is a specific form of arrangement, and this application does not make any special limitation on this.

[0174] It should be understood that in some other optional implementations, the arrangement order of the prism 610, the prism 620, and the prism 630 along the X-axis may also be changed, such as Fig.12 Another arrangement order is shown.

[0175] Fig.12 It is a schematic diagram of the structure of another light beam scanning device provided in an embodiment of the present application.

[0176] Here, in order to facilitate the description of the embodiments of the present application, a rectangular coordinate system is established with reference to the prism 710. The direction parallel to the optical axis of the prism 710 is the X direction, the direction parallel to the normal of the main cross section of the prism 710 is the Y direction, the Z direction is determined according to the X direction and the Y direction, and any two directions of the X, Y, and Z directions are perpendicular to each other, so as to establish a rectangular coordinate system.

[0177] It should be understood that the establishment of the rectangular coordinate system is only for a clearer description of the technical solution of the present application, and does not constitute any limitation on the protection scope of the present application.

[0178] It should be understood that the X direction is Figure 5 This is a specific manifestation of the first direction in the embodiment, and the present application does not make any special limitation on this.

[0179] It should be understood that the Y direction is Figure 5 This is a specific manifestation of the second direction in the embodiment, and the present application does not make any special limitation on this.

[0180] It should be understood that the Z direction is Figure 5 This is a specific form of expression of the third direction in the embodiment, and this application does not make any special limitation on this.

[0181] The prism 720, the prism 710, and the prism 730 are coaxially arranged in sequence along the X direction. In the light beam scanning device, the prism 620, the prism 610, and the prism 630 are arranged in sequence from the outside to the inside.

[0182] It should be understood that the prism 710 is Figure 5 The third prism 510 in the embodiment described above is a specific form, and the present application does not make any special limitation on this.

[0183] It should be understood that the prism 720 is Figure 5 The first prism 520 in the embodiment described above is a specific form, and the present application does not make any special limitation on this.

[0184] It should be understood that the prism 730 is Figure 5 The second prism 530 in the embodiment described above is a specific form, and the present application does not make any special limitation on this.

[0185] It should be understood that prism 710, prism 720, and prism 730 are merely names, and prism 710, prism 720, and prism 730 may be the same wedge-shaped prisms or different wedge-shaped prisms, which is specifically determined by the structure and parameters of the light beam scanning device, and the present application does not make any special limitation on this.

[0186] In a possible implementation, the rotating mirror group includes a prism 710, and the tilting mirror group includes a prism 720 and a prism 730. The rotating mirror group and the tilting mirror group have a relative rotational freedom, and the coarse direction of the light beam scanning device is adjusted by rotating the rotating mirror group and the tilting mirror group around the axis. The rotating mirror group and the tilting mirror group have a relative tilting freedom, and the fine direction of the light beam scanning device is adjusted by adjusting the prism in the tilting mirror group.

[0187] It should be understood that the rotating mirror assembly is Figure 5 The first prism group in the embodiment is a specific form of expression, and the present application does not make any special limitation on this.

[0188] It should be understood that the tilt mirror group is Figure 5 The second prism group in the embodiment is a specific form of expression, and the present application does not make any special limitation on this.

[0189] The prism 720 and the prism 730 are fixed by a fixing member, so that the main cross-sections of the prism 720 and the prism 730 are always perpendicular to each other, and both prisms have the degree of freedom to deflect around the normal of their main cross-sections. The prism 720 and the prism 730 are fixed by the same rotating motor, so that the prism 720 and the prism 730 rotate synchronously around their axes. The prism 710 is fixed by another motor, so that the prism 710 has the degree of freedom to rotate around its axis. Since the main cross-sections of the prism 720 and the prism 730 in the deflection mirror group are always perpendicular to each other, in the process of adjusting the relative rotation of the rotating mirror group and the deflection mirror group, and in the process of adjusting the deflection direction of the prism in the deflection mirror group, the deflection adjustment of the prism 720 and the prism 730 in two dimensions will not produce mutual crosstalk, which reduces the difficulty of adjustment and improves the adjustment accuracy.

[0190] The fixing between the prism 720 and the lens barrel 721, and the fixing between the prism 730 and the lens barrel 731 can refer to Figure 7 The embodiments described above will not be described in detail in this application.

[0191] The deflection fixing device between prism 720 and prism 730 includes a transmission turbine 741 and a worm 742. The two transmission turbines 741 are respectively installed on the lens barrel 721 and the lens barrel 731. Two turbines 741 are respectively installed at both ends of the worm 742, so that the normal lines of the main cross sections of prism 620 and prism 630 always remain relatively vertical during the rotation or deflection process.

[0192] The yaw actuators of the prism 720 and the prism 730 include a yaw drive 722 and a yaw drive 732. The yaw drive 722 is used to drive the prism 720 to yaw around the normal direction of its main cross section, and the yaw drive 732 is used to drive the prism 730 to yaw around the normal direction of its main cross section. In a possible coordinate system calibrated in the embodiment of the present application, the yaw drive 722 is used to drive the prism 720 to yaw around the Y axis, and the yaw drive 732 is used to drive the prism 730 to yaw around the Z axis.

[0193] It should be understood that the method and steps for the deflection driving device to drive the prism to deflect can be referred to Fig. 9 The embodiments described above will not be described in detail in this application.

[0194] It should be understood that the yaw drive device 722 is Figure 5 The yaw drive device 514 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0195] It should be understood that the yaw drive device 732 is Figure 5 The yaw drive device 515 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0196] It should be understood that the fixing of the deflection actuator between the prism 720 and the prism 730 can be referred to Fig.10 In the described embodiment, a corresponding deflection mirror assembly housing is designed according to the structure between the prisms for fixing, and the present application will not elaborate on it here.

[0197] The tilt mirror group and the rotation mirror group can rotate independently. The rotation actuator 712 is used to drive the tilt mirror group to rotate synchronously around the X axis, and the rotation actuator 711 is used to drive the rotation mirror group to rotate around the X axis.

[0198] It should be understood that the method and steps for the rotation actuator to drive the prism to rotate can be referred to Figure 6 The embodiments described above will not be described in detail in this application.

[0199] It should be understood that the rotation actuator 711 is Figure 5 The rotation execution device 511 in the embodiment is a specific form, and the present application does not make any special limitation on this.

[0200] It should be understood that the rotation actuator 712 is Figure 5 The rotation execution device 512 in the embodiment described is a specific form, and the present application does not make any special limitation on this.

[0201] It should be understood that Fig.12 Based on the above embodiment, each prism includes a wedge surface and a plane surface. There are 8 arrangements between the three prisms, for details, please refer to Figure 6 The embodiments described above will not be described in detail in this application.

[0202] It should be understood that Fig.12 Based on the embodiment described above, the eight arrangements of the three prisms are: Figure 5 2 of the embodiments described A This is a specific form of arrangement, and this application does not make any special limitation on this.

[0203] It should be understood that in addition to the arrangement order between prisms described in the above embodiment, professionals in this field can combine different arrangement orders between prisms with the arrangement of the first surface and the second surface between different prisms to form different prism structures of the light beam scanning device. Professionals in this field can rotate, deflect, etc. the prisms in each specific combination to achieve the described functions, but such arrangement and combination methods and the process of adjustment implementation should not be considered to be beyond the scope of this application.

[0204] It should be understood that in actual applications of the light beam scanning device, the order of the prisms can be adjusted according to actual conditions and needs. The arrangement order of the first surface and the second surface will affect the maximum scanning range and beam quality of the light beam scanning device, etc. This application does not make any special limitations on this.

[0205] In summary, some possible implementations of the light beam scanning device provided by the present application are described. In practical applications, the light beam scanning device is also equipped with a corresponding control system to control the adjustment between the prisms.

[0206] The present application provides a beam scanning system, which adjusts the relative positions of a first prism group and a second prism group through a control system, and provides sub-micro-radian-level pointing accuracy adjustment in two dimensions, thereby improving the pointing accuracy of a laser beam.

[0207] Fig.13 It is a structural schematic diagram of a light beam scanning system provided in an embodiment of the present application.

[0208] In the light beam scanning system, a processing device and a controller are included. The processing device sends a first instruction to the controller, and the controller adjusts the optical path in the light beam scanning device according to the first instruction so that the outgoing light beam of the light beam scanning device is incident on the first position. Wherein, the light beam scanning device includes a first prism group and a second prism group. The first prism group and the second prism group are arranged along a first direction and rotate with the first direction as an axis, and are used to adjust the outgoing direction of the incident light beam so that the light beam is incident on the first plane. Wherein, the first direction includes the axial direction of the first prism group. The second prism group includes a first prism 520 and a second prism 530, and the main section of the first prism 520 is perpendicular to the main section of the second prism 530; wherein the normal direction of the main section of the first prism 520 is the second direction, and the normal direction of the main section of the second prism 630 is the third direction. Any two directions among the first direction, the second direction, and the third direction are perpendicular to each other.

[0209] In an optional implementation, the X direction is the first direction, the Y direction is the second direction, and the Z direction is the third direction. That is, the axis direction of the first prism group includes the X direction, and the first prism group and the second prism group are arranged along the X direction and rotate around the X axis.

[0210] It should be understood that the X direction as the first direction, the Y direction as the second direction, and the Z direction as the third direction are only an optional implementation of the present application and do not constitute any limitation on the protection scope of the present application.

[0211] The first controller and the second controller respectively control the first prism group and the second prism group to rotate around the first direction X as an axis, so that the outgoing light beam of the light beam scanning device is incident on the first plane. The first plane includes the plane where the first position is located.

[0212] The third controller is used to drive the first prism 520 to deflect around the second direction Y, so that the light spot of the outgoing light beam on the first plane is translated toward the first position along the fourth direction. The fourth controller is used to drive the second prism 530 to deflect around the third direction Z, so that the light spot of the outgoing light beam on the first plane is translated toward the first position along the fifth direction. The fourth direction and the fifth direction are perpendicular to each other in the first plane.

[0213] It should be understood that the first position includes the target position of the light beam emitted by the light beam scanning device, and the first plane includes the target plane that needs to be scanned by the light beam scanning device. The present application does not make any special limitation on this.

[0214] It should be understood that the first prism 520, the second prism 530, and the third prism 510 include Figure 5 The same prisms in the above-described embodiments, the arrangement order of the prisms, etc. are not described in detail in this application.

[0215] In an optional implementation, the second controller drives the first prism 520 and the second prism 530 to rotate synchronously around the first direction X.

[0216] In an optional implementation, the processing device is further used to receive instructions from a host computer, and decompose the light beam pointing angle information contained in the instructions into rotation and yaw angles between the various prisms.

[0217] In an optional implementation, the light beam scanning system also includes an interactive interface for interacting with other devices.

[0218] In practical applications, the light beam scanning device provided in the present application can also be applied to optical terminals and used as communication terminals in the field of free space laser communications.

[0219] Fig.14 It is a schematic diagram of a space laser communication scenario provided in an embodiment of the present application.

[0220] The light beam scanning device provided in this application can be applied to the field of free laser communication. Two communication terminals are fixed on two signal towers respectively, and the laser beams are aligned with each other to establish a communication link. The light beam scanning device is integrated in the optical terminal to continuously adjust the direction of the light beam, which can resist the interference of the signal tower shaking or other high frequencies on the signal, thereby maintaining the stability of the communication link.

[0221] It should be understood that the beam scanning device provided in the present application can also be applied to space laser communication scenarios on moving platforms such as satellites, airborne, vehicles, and ships, and the present application does not make any special limitations on this.

[0222] In practical applications, the light beam scanning device provided in this application can also be applied to the field of laser radar ranging.

[0223] Fig.15 It is a schematic diagram of a laser radar ranging scenario provided in an embodiment of the present application.

[0224] The laser beam emitted from the transmitting end passes through the center hole reflector and the convergence lens, and the direction of the beam is controlled by the beam scanning device. The emitted beam is directed to the target object, and the beam reflected by the target object is converged by the convergence lens, and coupled into the receiving end after being reflected by the center hole reflector. The distance of the target object can be calculated by calculating the time difference between the emission and reception times, and the direction of the target object can be calculated by the beam scanning device. The laser radar ranging scenario provided in the embodiment of the present application can more accurately calculate the position of each point in the target point cloud, and can perform more detailed scanning in the area where the target object needs to be focused, so as to realize adaptive region of interest (ROI) adjustment.

[0225] It should be understood that the laser beam emitted by the transmitting end includes continuous laser or pulsed laser, and this application does not make any special limitation on this.

[0226] It should be understood that in practical applications, the light beam scanning device provided in the present application can also be applied to the field of security monitoring cameras. The light beam scanning device can be used to make the monitoring camera have stronger anti-interference ability and improve the clarity of monitoring.

[0227] Those of ordinary skill in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this application.

[0228] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0229] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0230] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0231] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0232] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium and includes several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0233] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A light beam scanning device, characterized in that: include: The first prism group and the second prism group are arranged along a first direction and rotated with the first direction as an axis, so as to adjust the emission direction of the incident light beam so that the light beam is incident on the first plane, and the first direction includes the axis direction of the first prism group; The second prism group includes a first prism and a second prism, and a main cross-section of the first prism and a main cross-section of the second prism are perpendicular to each other; The first prism is tilted about a second direction to adjust the light spot of the light beam on the first plane to translate along a fourth direction, and the second direction includes a normal direction of a main cross section of the first prism; The second prism is tilted about a third direction to adjust the light spot of the light beam on the first plane to translate along a fifth direction, and the third direction includes the normal direction of the main cross section of the second prism; Any two of the first direction, the second direction, and the third direction are perpendicular to each other; The fourth direction and the fifth direction are perpendicular to each other in the first plane; At least one prism in the first prism group and the second prism group is a wedge prism.

2. The device according to claim 1, characterized in that The first prism and the second prism rotate synchronously around the first direction.

3. The device according to claim 1 or 2, characterized in that: The first prism group and the second prism group are coaxially arranged in sequence along the first direction.

4. The device according to claim 1 or 2, characterized in that: The first prism, the first prism group, and the second prism are coaxially arranged in sequence along the first direction.

5. The device according to any one of claims 1 to 4, characterized in that The first prism group includes a third prism, and the first prism, the second prism, and the third prism are all wedge-shaped prisms.

6. The device according to any one of claims 1 to 5, characterized in that The first prism and the second prism have the same deflection angle for the incident light beam, which is smaller than the deflection angle of the first prism group for the incident light beam.

7. The device according to any one of claims 1 to 6, characterized in that Among them, α1 is the equivalent wedge angle of the first prism group, α2 is the wedge angle of the first prism, α3 is the wedge angle of the second prism, n1 is the equivalent refractive index of the first prism group, n2 is the refractive index of the first prism, and n3 is the refractive index of the second prism.

8. A beam scanning system, characterized in that: include: The processing device sends a first instruction to the controller, and the controller adjusts the optical path in the light beam scanning device according to the first instruction so that the outgoing light beam of the light beam scanning device is incident on the first position; Wherein, the light beam scanning device comprises a first prism group and a second prism group; The first prism group and the second prism group are arranged along a first direction, and the first controller and the second controller respectively control the first prism group and the second prism group to rotate around the first direction as an axis, so that the outgoing light beam is incident on a first plane, the first plane includes the plane where the first position is located, and the first direction includes the axis direction of the first prism group; The second prism group includes a first prism and a second prism, and a main cross-section of the first prism and a main cross-section of the second prism are perpendicular to each other; A third controller is used to drive the first prism to deflect around a second direction so that the light spot of the outgoing light beam on the first plane moves toward the first position along a fourth direction, and the second direction includes a normal direction of a main cross section of the first prism; The fourth controller is used to drive the second prism to deflect around a third direction so that the light spot of the outgoing light beam on the first plane moves toward the first position along a fifth direction, and the third direction includes a normal direction of a main cross section of the second prism; Any two of the first direction, the second direction, and the third direction are perpendicular to each other; The fourth direction and the fifth direction are perpendicular to each other in the first plane; At least one prism in the first prism group and the second prism group is a wedge prism.

9. The system according to claim 8, characterized in that The second controller drives the first prism and the second prism to rotate synchronously around the first direction.

10. The system according to claim 8 or 9, characterized in that The first prism group and the second prism group are coaxially arranged in sequence along the first direction.

11. The system according to claim 8 or 9, characterized in that: The first prism, the first prism group, and the second prism are coaxially arranged in sequence along the first direction.

12. The system according to any one of claims 8 to 11, characterized in that The first prism group includes a third prism, and the first prism, the second prism, and the third prism are all wedge-shaped prisms.

13. The system according to any one of claims 8 to 12, characterized in that The first prism and the second prism have the same deflection angle for the incident light beam, which is smaller than the deflection angle of the first prism group for the incident light beam.

14. The system according to any one of claims 8 to 13, characterized in that Among them, α1 is the equivalent wedge angle of the first prism group, α2 is the wedge angle of the first prism, α3 is the wedge angle of the second prism, n1 is the equivalent refractive index of the first prism group, n2 is the refractive index of the first prism, and n3 is the refractive index of the second prism.

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