Dry type adsorption tail gas treatment device and method

Abstract

The invention relates to the technical field of dry type tail gas treatment, and discloses a dry type adsorption tail gas treatment device and method.The dry type adsorption tail gas treatment device comprises a dilution module used for adsorbing solid components in tail gas and diluting the tail gas, and a main adsorption barrel used for receiving the tail gas output by the dilution module and treating the tail gas by adsorbing the tail gas; the auxiliary adsorption barrel is used for switching when the main adsorption barrel breaks down and carrying out redundancy switching treatment on the tail gas; the monitoring module is used for detecting the tail gas output by the dilution module, detecting the concentration of the tail gas output by the main adsorption barrel and detecting the concentration of the tail gas output by the gas outlet module; and the gas outlet module is used for outputting the treated tail gas output by the main adsorption barrel and outputting the treated tail gas output by the auxiliary adsorption barrel, so that intelligent monitoring on tail gas treatment is realized, the tail gas treatment quality is improved, and the labor cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of dry tail gas treatment and discloses a dry adsorption tail gas treatment device and method. Background Art

[0002] Since "high-purity gas" is in direct contact with the product during the production process, it is the most critical factory system in the semiconductor industry such as integrated circuits, flat panel displays, light-emitting diodes, photovoltaics, etc. Various high-purity gases are required in etching, diffusion, ion implantation, thin film deposition and yellow light processes. Such gases involved in process reactions are usually called process gases. Waste gas is generated during the reaction. In the industrial production process, a large amount of tail gas containing harmful substances is generated, such as phosphine ( ), etc. If these exhaust gases are directly discharged without effective treatment, they will cause serious harm to the environment and human health. The current common exhaust gas treatment technologies have many shortcomings and are difficult to meet the increasingly stringent environmental protection requirements and the needs of efficient treatment.

[0003] Traditional exhaust gas treatment equipment often has a single function and is unable to effectively treat solid particles and toxic gases in the exhaust gas at the same time. Moreover, when the concentration of harmful components in the exhaust gas is high, the treatment effect is poor, which can easily lead to rapid saturation of the adsorbent, reduce treatment efficiency and equipment life, and increase the risk of exhaust gas leakage and environmental pollution. Summary of the invention

[0004] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0005] In order to solve the above technical problems, the main purpose of the present invention is to provide a dry adsorption tail gas treatment device and method, wherein a dry adsorption tail gas treatment device comprises: The dilution module is used to absorb the solid components in the exhaust gas and dilute the exhaust gas; The main adsorption tank is used to receive the exhaust gas output by the dilution module and treat the exhaust gas by adsorbing the exhaust gas; The auxiliary adsorption tank is used to switch when the main adsorption tank fails, and perform redundant switching processing on the exhaust gas; The monitoring module is used to detect the exhaust gas output from the dilution module, the exhaust gas concentration output from the main adsorption barrel, and the exhaust gas concentration output from the gas outlet module; The gas outlet module is used to output the treated exhaust gas from the main adsorption barrel and the treated exhaust gas from the auxiliary adsorption barrel.

[0006] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The dilution module includes a solid dilution unit, a gas dilution unit and a gas delivery unit. The gas delivery unit is configured as a spiral gas delivery channel, and a porous plate is arranged on the wall of the spiral gas delivery pipe to uniformly disperse the solid diluent in the tail gas. The solid dilution unit is used to adsorb particulate solids in the tail gas, and filter the adsorbed solid particles by setting a solid particle filter, and the solid particle filter is provided with an inverted funnel-shaped porous channel to filter the adsorbed solid particles through the funnel-shaped porous channel and output them to the solid collection bin of the dilution module; The gas dilution unit is used to dilute the toxic gas in the tail gas. The toxic gas is stirred and diluted through the spiral gas delivery pipe, and the diluted gas is input into the main adsorption barrel.

[0007] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The main adsorption barrel is of cylindrical structure and filled with tail gas adsorbent. A color changing indicator is also arranged in the main adsorption barrel. When the adsorbent is close to saturation, the color of the indicator changes, and the tail gas adsorbent needs to be replaced. The color-changing indicator responds in color according to the saturation of the adsorbent and is arranged in the visualization unit. The color change of the color-changing indicator is mapped by the change of the saturation of the adsorbent, and visual feedback is performed through the visualization unit.

[0008] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The auxiliary adsorption barrel is arranged on one side of the main adsorption barrel. If the adsorbent in the main adsorption barrel is saturated, the pneumatic three-way valve is switched, and the pneumatic three-way valve is automatically switched to the auxiliary adsorption barrel for tail gas adsorption; When the main adsorption barrel adsorbs exhaust gas, the valve core of the pneumatic three-way valve is in the closed position. After the exhaust gas flows out of the dilution module, it enters the main adsorption barrel through the outlet connected to the main adsorption barrel for adsorption treatment. The piston in the pneumatic three-way valve keeps the valve core stable. The auxiliary adsorption barrel is in standby status and does not participate in the exhaust gas treatment process.

[0009] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: When the adsorbent is close to saturation, the color indicator will show the color corresponding to saturation. After the color sensor on the main adsorption barrel detects the color change corresponding to saturation, it transmits the signal to the valve controller. After the valve controller receives the signal that the adsorbent in the main adsorption barrel is saturated, it outputs the pneumatic three-way valve control instruction. The control instruction is used to control the compressed air to enter the cylinder of the pneumatic actuator to push the piston to move. Pushed by compressed air, the piston drives the valve core to move within the valve body. The movement of the valve core changes the gas flow channel, so that the exhaust gas flows in from the air inlet and enters the auxiliary adsorption barrel through the air outlet connected to the auxiliary adsorption barrel for adsorption treatment. The main adsorption barrel is disconnected from the exhaust gas input pipeline and enters the adsorbent replacement stage.

[0010] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The monitoring module includes a color monitoring unit, an exhaust gas monitoring unit and a dilution monitoring unit; The color monitoring unit is used to monitor the color of the color changing indicator; The exhaust gas monitoring unit includes a first exhaust gas monitoring unit and a second exhaust gas monitoring unit. The first exhaust gas monitoring unit is arranged at the output end of the exhaust gas treatment device, and the second exhaust gas monitoring unit is arranged at the tail end of the pneumatic three-way valve to monitor whether there is a main adsorption barrel in a saturated state at the input end of the exhaust gas exceeding the standard when the main adsorption barrel switches the auxiliary adsorption barrel. If there is a main adsorption barrel in a saturated state at the input end of the exhaust gas exceeding the standard, the filled gas is returned to the auxiliary adsorption barrel through the feedback pipeline for re-adsorption.

[0011] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The first exhaust gas monitoring unit is used to monitor the exhaust gas concentration outputted from the output end of the exhaust gas treatment device in real time, and predict the exhaust gas concentration at the next moment by the exhaust gas concentration monitored in real time; The method for predicting the exhaust gas concentration at the next moment by monitoring the exhaust gas concentration in real time includes: Continuously collect exhaust gas concentration data from the output end of the exhaust gas treatment device, and record the corresponding timestamps and operating parameters at the same time. Clean the collected data to remove abnormal values ​​and missing values. Take the data of every n consecutive time points as a sample, and each sample contains the exhaust gas concentration sequence and operating parameters of the current timestamp; The exhaust gas concentration sequence is input into the input layer, a convolution layer is set to extract the features and time series of the exhaust gas concentration data, and the features and time series of the exhaust gas concentration data extracted by the convolution layer are input into the pooling layer, and the dimension of the exhaust gas concentration data is reduced by the pooling layer; Expand the feature vector of the exhaust gas concentration after convolution and pooling through the fully connected layer, input the expanded exhaust gas concentration feature vector into the neurons of the output layer, and predict the exhaust gas concentration at time t+1 by iterating the exhaust gas concentration from time t to time n, and perform error analysis on the output exhaust gas concentration at time t+1 through the error function. If the error value of the exhaust gas at time t+1 is large, set the training set to retrain the first exhaust gas monitoring unit. If the error value of the exhaust gas at time t+1 is small, input the real-time exhaust gas concentration data, and predict the exhaust gas at time t+1 through the first exhaust gas monitoring unit. If the first exhaust gas monitoring unit predicts that the exhaust gas concentration data at time t+1 is greater than the maximum exhaust gas concentration processing threshold, the exhaust gas is re-filtered through the feedback pipeline; if the exhaust gas concentration data is less than the maximum exhaust gas concentration processing threshold, the exhaust gas processing is completed.

[0012] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The second exhaust gas monitoring unit records the first timestamp when the pneumatic three-way valve is started, and the exhaust gas data of the first timestamp is used as the first group of data, and the exhaust gas concentration passing through the pneumatic three-way valve is recorded as the last group of data by recording the complete opening of the pneumatic three-way valve in continuous timestamps, and obtains the exhaust gas data in continuous timestamps to determine whether the exhaust gas entering the main adsorption barrel exceeds the standard; If the exhaust gas entering the main adsorption barrel exceeds the standard, the exhaust gas in the main adsorption barrel will be passed through the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel to re-adsorb the exhaust gas. If the exhaust gas entering the main adsorption barrel does not exceed the standard, the gas in the main adsorption barrel will be discharged, and the exhaust gas treatment result will be monitored and predicted by the first exhaust gas monitoring unit.

[0013] As a preferred embodiment of the dry adsorption tail gas treatment method of the present invention, wherein: The exhaust gas enters the dry exhaust gas adsorption device through the air intake module, and is diluted by the dilution module; The diluted tail gas enters the main adsorption barrel through the pipeline, and the main adsorption barrel adsorbs and treats the tail gas. If the color change indicator of the main adsorption barrel shows that the adsorbent of the main adsorption barrel is saturated, the tail gas is transferred to the auxiliary adsorption barrel through the pneumatic three-way valve; The second exhaust gas monitoring unit detects the exhaust gas flowing into the main adsorption barrel during the switching process of the pneumatic three-way valve. If the exhaust gas concentration exceeds the standard, the exhaust gas is re-introduced into the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel. If the exhaust gas concentration does not exceed the standard, the first exhaust gas monitoring unit monitors and predicts the exhaust gas treatment results in real time; After the exhaust gas flows into the auxiliary adsorption barrel, the exhaust gas is treated by the auxiliary adsorption barrel, and the treated exhaust gas flows into the first exhaust gas monitoring unit. If the concentration of the treated exhaust gas is qualified, the exhaust gas treatment is completed. If the exhaust gas treatment is unqualified, the exhaust gas is re-adsorbed through the feedback pipeline.

[0014] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein: The first tail gas monitoring unit is used to monitor and predict whether the dry adsorption tail gas concentration and the concentration of qualified tail gas flowing into the main adsorption barrel meet the qualified concentration standard of tail gas treatment. If so, the treated gas is output; if not, the tail gas is re-adsorbed through the feedback pipeline; The second exhaust gas monitoring unit is used to monitor whether exhaust gas leakage occurs when the main adsorption barrel switches to the auxiliary adsorption barrel. If exhaust gas leakage occurs and the exhaust gas concentration in the gas in the main adsorption barrel is unqualified, the gas in the main adsorption barrel is re-adsorbed. If the exhaust gas concentration in the gas in the main adsorption barrel is qualified, the gas is output to the first exhaust gas monitoring unit.

[0015] The beneficial effects of the present invention are as follows: the dilution module integrates solid dilution, gas dilution and gas transportation, and can simultaneously process solid components and toxic gases in exhaust gas, thereby improving the processing efficiency and versatility of the device; the solid dilution unit can not only effectively remove solid impurities by adsorbing and filtering particulate solids in exhaust gas, but also prevent these impurities from affecting the adsorption effect of subsequent adsorption barrels; the design of the inverted funnel-shaped porous channel facilitates the smooth output and collection of solid particles, and is convenient for cleaning and maintenance; the monitoring module monitors the adsorbent state, exhaust gas concentration and dilution process, thereby realizing comprehensive monitoring and prediction of the operating state of the device, being able to timely discover potential problems and take measures, thereby improving the accuracy and reliability of the prediction, and helping to optimize the operating parameters of the device, improving the processing efficiency, while avoiding environmental pollution and safety hazards caused by exhaust gas leakage during the switching process; the excess exhaust gas is returned to the auxiliary adsorption barrel through a feedback pipeline for re-adsorption, thereby further improving the quality of exhaust gas treatment and increasing the intelligence and automation of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them: Figure 1 This is a composition diagram of a dry adsorption tail gas treatment device of the present invention; Figure 2 This is a flow chart of an implementation method of a first tail gas monitoring unit of a dry adsorption tail gas treatment device of the present invention; Figure 3 This is a schematic diagram of a dilution module of a dry adsorption tail gas treatment device of the present invention; Figure 4 A topological composition diagram of a dry adsorption tail gas treatment device of the present invention; Figure 5 This is a flow chart of a dry adsorption tail gas treatment method of the present invention; Figure numerals: 1. first exhaust gas input terminal; 2. inverted funnel-shaped porous corridor; 3. polyester needle felt; 4. spiral gas delivery pipeline; 5. exhaust gas output terminal; 6. exhaust gas output; 7. exhaust gas output control valve; 8. color indicator; 9. main adsorption barrel; 10. exhaust gas control valve; 11. pneumatic three-way valve; 12. PSG; 13. auxiliary adsorption barrel; 14. exhaust indication; 15. second exhaust gas input terminal; 16. unqualified exhaust gas input terminal. DETAILED DESCRIPTION

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0018] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0020] Embodiment 1 like Figure 1 As shown, a dry adsorption tail gas treatment device comprises: The air intake module includes an air intake pipe and a flow control valve. The air intake pipe is made of corrosion-resistant materials to ensure that the exhaust gas does not react with the pipe during transportation. The flow control valve can adjust the flow of exhaust gas entering the device according to actual production conditions to ensure the stability of the treatment effect.

[0021] The dilution module is used to adsorb solid components in the exhaust gas and dilute the exhaust gas.

[0022] The dilution module includes a solid dilution unit, a gas dilution unit and a gas delivery unit. The gas delivery unit is configured as a spiral gas delivery channel, and a porous plate is arranged on the wall of the spiral gas delivery pipe to evenly disperse the solid diluent in the tail gas. The solid dilution unit is used to adsorb particulate solids in the tail gas, and filter the adsorbed solid particles by setting a solid particle filter, and the solid particle filter is provided with an inverted funnel-shaped porous channel to filter the adsorbed solid particles through the funnel-shaped porous channel and output them to the solid collection bin of the dilution module; A specific implementation method of the dilution module includes: The main components of tail gas include phosphine ( ) and other toxic gases and a certain amount of solid particles (such as metal dust, etc.). The exhaust gas flow rate is 5000m³ / h, the initial concentration of phosphine is 50ppm, and the solid particle concentration is 100mg / m³. Environmental protection requirements require that the phosphine concentration in the exhaust gas after treatment is less than 1ppm and the solid particle concentration is less than 10mg / m³.

[0023] The pipe diameter is determined according to the exhaust gas flow rate and flow rate. The exhaust gas flow rate in the pipeline is 18m / s, and the cross-sectional area of ​​the pipeline is 0.0772㎡, so the pipe diameter is 0.314m. A spiral gas delivery pipe with a diameter of 325mm is selected, and the pitch is designed to be 200mm. The spiral gas delivery pipe is made of 30 stainless steel to ensure its service life. The porous plate is selected with an aperture of 5mm and an opening rate of 30%. The porous plate is also made of 304 stainless steel, which is consistent with the material of the spiral gas delivery pipe, and is easy to weld and install.

[0024] The solid dilution unit has a filtration rate of 0.8m / min, an actual filtration area of ​​104.17㎡, and a designed filtration area of ​​110m². Polyester needle felt is used, which has high filtration efficiency and good air permeability and can effectively intercept solid particles.

[0025] like Figure 3 As shown, the upper diameter of the inverted funnel-shaped porous tunnel 2 matches the bottom size of the solid particle filter, which is designed to be 1000mm, and the lower diameter is 300mm. The inclination angle is 60° to ensure that the solid particles can fall naturally by gravity. Activated carbon is selected as a solid diluent. It has a large specific surface area and good adsorption performance, and can effectively adsorb solid particles and some toxic gases in the exhaust gas. The amount of activated carbon is determined according to the concentration of solid particles in the exhaust gas and the adsorption capacity of activated carbon. The adsorption capacity of activated carbon for solid particles is 0.2g / g. The amount of activated carbon required per hour is 2.5kg.

[0026] The gas dilution unit selects nitrogen as the dilution gas and determines the dilution ratio according to the initial concentration of phosphine in the tail gas and the standard concentration required by environmental protection. Assuming the volume after dilution is v, the initial volume is 5000m³ / h, the initial concentration is 50ppm, and the standard concentration is 1ppm, according to the dilution formula, v=250000m³ / h, then the amount of nitrogen to be injected is 245000m³ / h.

[0027] Connect the exhaust source, dilution module and subsequent detection equipment, turn on the exhaust gas conveying equipment, introduce the exhaust gas into the dilution module at a flow rate of 5000m³ / h, and at the same time, add activated carbon solid diluent according to the designed amount, and inject nitrogen at a flow rate of 245000m³ / h for gas dilution. Install gas concentration sensors and dust concentration sensors at the outlet of the dilution module to monitor the concentrations of phosphine and solid particles in the treated exhaust gas in real time. After a period of operation, the test results show that the phosphine concentration in the treated exhaust gas is less than 1ppm, and the solid particle concentration is less than 10mg / m³, which meets environmental protection requirements.

[0028] The gas dilution unit is used to dilute the toxic gas in the tail gas. The toxic gas is stirred and diluted through the spiral gas delivery pipe, and the diluted gas is input into the main adsorption barrel.

[0029] The toxic gases (such as and ) for stirring and diluting, which can fully mix the dilution gas with the toxic gas to ensure the uniformity of the dilution effect. This design can effectively reduce the concentration of toxic gases, reduce the processing burden of the main adsorption barrel, increase the service life of the adsorbent in the main adsorption barrel, avoid frequent replacement of the adsorbent due to rapid saturation, and thus reduce operating costs.

[0030] The upper diameter of the inverted funnel-shaped porous channel 2 is designed to match the bottom size of the solid particle filter, ensuring that the solid particles can naturally fall to the collection bin by gravity. The size and inclination angle are designed according to actual production needs to avoid the accumulation and blockage of solid particles in the channel, ensuring the smooth discharge of solid particles, allowing the solid dilution unit to work continuously and effectively, reducing the frequency and difficulty of manual cleaning, and improving the pre-treatment capacity of the exhaust gas treatment device for solid particles and some toxic gases, ensuring the stable operation of the equipment, reducing the operation and maintenance costs, and having good practicality and economic benefits.

[0031] The main adsorption barrel is used to receive the exhaust gas output by the dilution module and process the exhaust gas by adsorbing the exhaust gas. The spiral gas delivery pipeline 4 is used to transport the exhaust gas.

[0032] The main adsorption barrel is of cylindrical structure and filled with tail gas adsorbent. A color changing indicator is also arranged in the main adsorption barrel. When the adsorbent is close to saturation, the color of the indicator changes, and the tail gas adsorbent needs to be replaced. The color-changing indicator responds in color according to the saturation of the adsorbent and is arranged in the visualization unit. The color change of the color-changing indicator is mapped by the change of the saturation of the adsorbent, and visual feedback is performed through the visualization unit.

[0033] A specific implementation method of a main adsorption barrel includes: Determine the empty tower gas velocity of the tail gas in the adsorption barrel, the empty tower gas velocity is 0.4m / s, according to the flow formula, the cross-sectional area is 5.56㎡, the diameter is 2.67m, the diameter is 2.8m, and the height of the adsorbent layer is 2m. Considering that the space at the top and bottom is used for gas distribution and support structure, the total height of the main adsorption barrel is designed to be 3m. The main adsorption barrel is made of stainless steel 316L with a thickness of 6mm to ensure its strength and corrosion resistance.

[0034] for and Activated carbon loaded with copper oxide is a suitable adsorbent. Activated carbon has a large specific surface area and can provide more adsorption sites, while copper oxide can and A chemical reaction occurs to enhance the adsorption effect. Granular copper oxide-loaded activated carbon is selected with a particle size of 3-5 mm and a bulk density of 600 kg / m³. The filling volume of activated carbon in the main adsorption barrel is 12.232 m³, and the filling mass of activated carbon is 7339 kg.

[0035] Select an acid-base indicator pair containing a specific metal salt and Sensitive color-changing indicators, acid-base indicators of specific metal salts, and After that, the color will change as the adsorbent's adsorption of the two gases increases. The color-changing indicator is evenly dispersed in the adsorbent, and a visual observation point is set every 0.6m. The visual observation point uses a transparent window to facilitate the operator to observe the color change of the indicator. The visualization window uses high-strength transparent organic glass with a thickness of 12mm. It is installed on the side of the main adsorption barrel. The size of each window is 250mm×250mm, corresponding to the observation point of the color-changing indicator. The correspondence between the color and the adsorbent saturation is marked next to each visualization window. Blue indicates that the adsorbent saturation is less than 20%, purple indicates that the saturation is between 20%-80%, and red indicates that the saturation is higher than 80%.

[0036] and The first exhaust gas input end 1 main adsorption barrel, turn on the exhaust gas delivery equipment, and send the simulated and The tail gas is introduced into the main adsorption tank at a flow rate of 6000m³ / h. At the same time, the inlet and outlet of the main adsorption tank are continuously monitored during operation. and concentration, observe the color change of the color indicator in the visualization window and record it. After running for a period of time, analyze the import and export and Concentration data, when exported The concentration is close to 1mg / m³, When the concentration is close to 0.5mg / m³, the indicator in the visualization window turns red, indicating that the adsorbent is close to saturation. At this time, stop the operation, replace the adsorbent and test again. The concentration can be reduced to below 1 mg / m³. The concentration dropped to below 0.5 mg / m³.

[0037] The main adsorption barrel adopts a cylindrical structure, filled with tail gas adsorbent inside, providing a large adsorption area, so that the tail gas and the adsorbent are fully in contact, thereby efficiently removing harmful substances in the tail gas. For tail gas containing multiple pollutants, multiple adsorbents are added for targeted adsorption to improve the treatment effect. Furthermore, the cylindrical structure has the ability to withstand pressure and impact force, ensuring the structural stability of the main adsorption barrel during long-term operation. At the same time, this structure is also easy to manufacture and install, reducing the manufacturing cost and installation difficulty of the equipment. When the adsorbent is close to saturation, the color indication system can be used to detect and replace the adsorbent in time to ensure that the main adsorption barrel is always in good working condition. The process of replacing the adsorbent is relatively simple and will not cause a long-term shutdown of the entire tail gas treatment system.

[0038] The auxiliary adsorption tank is used to switch when the main adsorption tank fails, and perform redundant switching processing on the exhaust gas; As a backup equipment for the main adsorption barrel, the auxiliary adsorption barrel can be put into use in time when the adsorbent is saturated or the equipment is damaged, ensuring the continuity of the exhaust gas treatment process. The redundant switching processing design avoids the direct discharge of untreated exhaust gas due to failure of the main adsorption barrel, thereby ensuring environmental safety. Under normal circumstances, the auxiliary adsorption barrel is in a standby state and will only be started when the main adsorption barrel needs maintenance or replacement of the adsorbent, so that the main adsorption barrel and the auxiliary adsorption barrel can be used alternately, extending the service life of the entire exhaust gas treatment system and reducing the frequency and cost of equipment replacement. The existence of the auxiliary adsorption barrel increases the flexibility of the exhaust gas treatment system. When the exhaust emission suddenly increases or the exhaust composition changes, the main adsorption barrel and the auxiliary adsorption barrel can be started at the same time to improve the system's processing capacity to adapt to different working conditions.

[0039] The auxiliary adsorption barrel is arranged on one side of the main adsorption barrel. If the adsorbent in the main adsorption barrel is saturated, the pneumatic three-way valve is switched, and the pneumatic three-way valve is automatically switched to the auxiliary adsorption barrel for tail gas adsorption; When the main adsorption barrel adsorbs exhaust gas, the valve core of the pneumatic three-way valve is in the closed position. After the exhaust gas flows out of the dilution module, it enters the main adsorption barrel through the outlet connected to the main adsorption barrel for adsorption treatment. The piston in the pneumatic three-way valve keeps the valve core stable. The auxiliary adsorption barrel is in standby status and does not participate in the exhaust gas treatment process.

[0040] When the adsorbent is close to saturation, the color-changing indicator will show the color corresponding to saturation. After the color sensor on the main adsorption barrel detects the color change corresponding to saturation, it transmits the signal to the valve controller. After the valve controller receives the signal that the adsorbent in the main adsorption barrel is saturated, it outputs the pneumatic three-way valve control instruction. The control instruction is used to control the compressed air to enter the cylinder of the pneumatic actuator to push the piston to move. The piston, pushed by the compressed air, drives the valve core to move in the valve body. The movement of the valve core changes the gas flow channel, so that after the exhaust gas flows in from the air inlet, it enters the auxiliary adsorption barrel through the air outlet connected to the auxiliary adsorption barrel for adsorption treatment. The main adsorption barrel is disconnected from the exhaust gas input pipeline, and the adsorbent replacement stage begins.

[0041] The pneumatic three-way valve automatically switches the flow direction of the exhaust gas according to the instructions of the valve controller, realizing seamless switching between the main adsorption barrel and the auxiliary adsorption barrel. The automated switching process is fast and accurate, reducing manual intervention and improving the response speed and processing efficiency of the system. The valve core and valve body design of the pneumatic three-way valve can ensure good sealing and prevent exhaust gas leakage. During the switching process, the valve core can fit the valve body tightly to ensure that the exhaust gas can only flow according to the predetermined channel, avoiding exhaust gas pollution to the environment during the switching process. The pneumatic three-way valve uses compressed air as the power source, has strong adaptability, and can work normally under different working conditions such as temperature, pressure and humidity. At the same time, its structure is relatively simple and easy to maintain, reducing the maintenance cost and downtime of the equipment.

[0042] A specific implementation method of a pneumatic three-way valve includes: According to the exhaust gas flow and pressure in the above implementation method, a DN250 pneumatic three-way valve is selected with a nominal pressure of 1.6MPa. The valve body material is made of stainless steel to match the overall material of the system to prevent corrosion. The cylinder diameter is 200mm and the stroke is 100mm to ensure that the valve core can be reliably pushed to move. The air source pressure is set to 0.5-0.7MPa, which can provide sufficient power for the cylinder. The pneumatic three-way valve control unit has signal receiving, processing and output functions, converts the signal of the color sensor into a control command of the pneumatic three-way valve, and performs color programming through a programmable logic controller (PLC).

[0043] The monitoring module is used to detect the exhaust gas output from the dilution module, the exhaust gas concentration output from the main adsorption barrel, and the exhaust gas concentration output from the gas outlet module; The monitoring module includes a color monitoring unit, an exhaust gas monitoring unit and a dilution monitoring unit; The color monitoring unit is used to monitor the color of the color changing indicator; The exhaust gas monitoring unit includes a first exhaust gas monitoring unit and a second exhaust gas monitoring unit. The first exhaust gas monitoring unit is arranged at the output end of the exhaust gas treatment device, and the second exhaust gas monitoring unit is arranged at the tail end of the pneumatic three-way valve to monitor whether there is excessive exhaust gas entering the main adsorption barrel in a saturated state when the main adsorption barrel switches the auxiliary adsorption barrel. If excessive exhaust gas enters the main adsorption barrel in a saturated state, the charged gas is returned to the auxiliary adsorption barrel through the feedback pipeline for re-adsorption.

[0044] The first exhaust gas monitoring unit is used to monitor the exhaust gas concentration outputted from the output end of the exhaust gas treatment device in real time, and predict the exhaust gas concentration at the next moment by the exhaust gas concentration monitored in real time; The method for predicting the exhaust concentration at the next moment by monitoring the exhaust concentration in real time includes: The exhaust gas concentration data is continuously collected from the output end of the exhaust gas treatment device, and the corresponding timestamps and operating parameters are recorded at the same time. The collected data is cleaned to remove outliers and missing values. The data of every n consecutive time points is taken as a sample. Each sample contains the exhaust gas concentration sequence and operating parameters of the current timestamp.

[0045] The exhaust gas concentration sequence is input into the input layer, and a convolution layer is set to extract the features and time series of the exhaust gas concentration data. The features and time series of the exhaust gas concentration data extracted by the convolution layer are input into the pooling layer, and the dimension of the exhaust gas concentration data is reduced by the pooling layer.

[0046] The feature vector of the exhaust gas concentration after convolution and pooling processing is expanded through the fully connected layer, and the expanded exhaust gas concentration feature vector is input into the neurons of the output layer. The exhaust gas concentration at time t+1 is predicted by iterating the exhaust gas concentration from time t to time n, and the error analysis of the output exhaust gas concentration at time t+1 is performed through the error function. If the error value of the exhaust gas at time t+1 is large, the training set is set to retrain the first exhaust gas monitoring unit. If the error value of the exhaust gas at time t+1 is small, the real-time exhaust gas concentration data is input, and the exhaust gas at time t+1 is predicted through the first exhaust gas monitoring unit.

[0047] The convolution layer is used to extract the characteristics and time series information of exhaust gas concentration data, which can mine the potential rules in the data. The convolution layer can capture the characteristics of data at different scales through convolution kernels of different sizes, such as local concentration fluctuations and global change trends. This feature extraction method is more adaptable to the complexity and dynamics of exhaust gas concentration data than traditional methods, thereby improving the accuracy of prediction. By predicting the exhaust gas concentration at the next moment, it is possible to detect in advance that the exhaust gas concentration may exceed the standard, and provide an early warning for the exhaust gas treatment system. In this way, timely measures can be taken, such as adjusting the use of adsorbents, increasing the operating power of treatment equipment, etc., to avoid the direct discharge of excessive exhaust gas into the environment, improve the safety and reliability of exhaust gas treatment, and optimize the exhaust gas treatment process according to the prediction results. For example, if it is predicted that the exhaust gas concentration is about to increase, spare adsorbents can be prepared in advance or the flow rate of dilution gas can be adjusted, so that the exhaust gas treatment system can operate more efficiently and reduce the treatment cost.

[0048] like Figure 2 As shown, the specific implementation method of the monitoring unit includes: Select a sensor based on RGB color recognition technology to accurately identify the color change of the color-changing indicator, and install the color sensor near the visualization window of the main adsorption barrel to ensure that the indicator color can be clearly captured.

[0049] Exhaust gas monitoring unit uses precise detection and The electrochemical sensor for measuring the concentration is installed at the output end of the exhaust treatment device to ensure that the concentration data of the treated exhaust gas can be obtained in real time.

[0050] The second exhaust gas monitoring unit uses the same type of gas sensor as the first exhaust gas monitoring unit and is installed at the tail end of the pneumatic three-way valve to monitor the exhaust gas conditions when the main and auxiliary adsorption barrels are switched.

[0051] The dilution monitoring unit is equipped with a flow sensor and a concentration sensor, which are used to monitor the flow rate of the diluted gas and the concentration of the diluted exhaust gas respectively. The flow sensor adopts a vortex flow sensor, and the concentration sensor is consistent with the sensor type of the exhaust gas monitoring unit. The analog signal output by the sensor is converted into a digital signal through an industrial-grade data acquisition card and transmitted to the monitoring computer through RS-485 Ethernet.

[0052] The first exhaust gas monitoring unit uses the python software TensorFlow to build a convolutional neural network (CNN) model to predict the exhaust gas concentration at the next moment. The model includes an input layer, a convolution layer, a pooling layer, a fully connected layer, and an output layer. After the model is built, historical exhaust gas concentration data is used for preliminary training to determine the initial model parameters.

[0053] The color data of the color change indicator is collected every 1 minute, and converted into RGB values ​​and transmitted to the data acquisition system, and the data at the output end of the exhaust gas treatment device is continuously collected. and Concentration data, while recording the corresponding timestamp and temperature, pressure, and flow rate.

[0054] During the switching of the main and auxiliary adsorption barrels, the exhaust gas concentration data at the tail end of the pneumatic three-way valve is collected in real time to determine whether there is excessive exhaust gas entering the main adsorption barrel in a saturated state, and to collect the flow rate of the diluted gas and the concentration data of the relevant components in the diluted exhaust gas.

[0055] Clean the collected exhaust concentration data. When the concentration exceeds the normal range and is greater than 1000 mg / m³, it is considered an outlier and removed. Missing values ​​are processed by linear interpolation or mean filling. The data of every n consecutive time points is taken as a sample. Each sample contains the exhaust concentration sequence and operating parameters of the current timestamp. For example, if n=10, each sample contains the data of the last 10 time points. and Concentration data and corresponding operating parameters such as temperature, pressure, flow, etc.

[0056] The constructed data samples are input into the input layer of the CNN model, and the features and time series information of the exhaust concentration data are extracted through the convolution layer. The convolution layer can use multiple convolution kernels of different sizes to capture features of different scales. For example, 3×1 and 5×1 convolution kernels are used for convolution operations to extract local and global feature information.

[0057] The features and time series information extracted by the convolution layer are input into the pooling layer. The pooling operation is used to reduce the dimension of the exhaust concentration data and the amount of calculation while retaining important feature information.

[0058] The feature vector of exhaust gas concentration after convolution and pooling is expanded through the fully connected layer, and the expanded feature vector is input into the neurons of the output layer. By iterating the exhaust gas concentration from time t to time n, the exhaust gas concentration at time t+1 is predicted.

[0059] The error function (such as mean square error MSE) is used to perform error analysis on the output exhaust concentration at time t+1. If the error value is large, a part of the historical data is selected as the training set, the CNN model is retrained, and the model parameters are adjusted; if the error value is small, the real-time exhaust concentration data is continued to be input, and the exhaust at time t+1 is predicted through the first exhaust monitoring unit.

[0060] The second exhaust gas monitoring unit monitors the exhaust gas concentration at the tail end of the pneumatic three-way valve in real time. When the main adsorption tank switches to the auxiliary adsorption tank, it determines whether there is excessive exhaust gas entering the main adsorption tank in a saturated state. If excessive exhaust gas is detected, the feedback mechanism is immediately triggered.

[0061] When the main adsorption barrel switches to the auxiliary adsorption barrel, the second exhaust gas monitoring unit can monitor in real time whether there is excessive exhaust gas entering the main adsorption barrel in a saturated state. Once excessive exhaust gas is detected, the filled gas is immediately returned to the auxiliary adsorption barrel through the feedback pipeline for re-adsorption, avoiding the excessive exhaust gas being discharged directly into the environment without treatment, ensuring the compliance rate of exhaust gas treatment. During the switching process between the main and auxiliary adsorption barrels, the exhaust gas flow state may change, which may easily lead to excessive local exhaust gas concentration. The setting of the second exhaust gas monitoring unit can detect these abnormal situations in time and take corresponding measures to deal with them, ensuring the stability of the adsorption barrel switching process and reducing the impact on the normal operation of the exhaust gas treatment system.

[0062] When it is detected that the exhaust gas exceeding the standard enters the main adsorption tank in a saturated state, the charged gas is returned to the auxiliary adsorption tank through the feedback pipeline for re-adsorption. At the same time, relevant information of the exceeding standard event such as time, exceeding standard component, exceeding standard concentration, etc. is recorded.

[0063] If the first exhaust gas monitoring unit predicts that the exhaust gas concentration data at time t+1 is greater than the maximum exhaust gas concentration processing threshold, the exhaust gas is re-filtered through the feedback pipeline; if the exhaust gas concentration data is less than the maximum exhaust gas concentration processing threshold, the exhaust gas processing is completed.

[0064] The second exhaust gas monitoring unit records the first timestamp when the pneumatic three-way valve is started, and the exhaust gas data of the first timestamp is used as the first group of data, and the exhaust gas concentration passing through the pneumatic three-way valve is recorded as the last group of data by recording the complete opening of the pneumatic three-way valve in continuous timestamps, and obtains the exhaust gas data in continuous timestamps to determine whether the exhaust gas entering the main adsorption barrel exceeds the standard; If the exhaust gas entering the main adsorption barrel exceeds the standard, the exhaust gas in the main adsorption barrel will be passed through the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel to re-adsorb the exhaust gas. If the exhaust gas entering the main adsorption barrel does not exceed the standard, the gas in the main adsorption barrel will be discharged, and the exhaust gas treatment result will be monitored and predicted by the first exhaust gas monitoring unit.

[0065] The gas outlet module is used to output the treated exhaust gas from the main adsorption barrel and the treated exhaust gas from the auxiliary adsorption barrel.

[0066] Embodiment 2 A dry adsorption tail gas treatment device, the specific implementation method also includes: like Figure 3As shown, the dilution module includes a dilution module solid collection bin for collecting and diluting solid particles of exhaust gas. The exhaust gas enters through the input port, and a polyester needle-punched felt 3 is set in the spiral pipeline for diluting solid particles in the exhaust gas. The adsorbed solid particles fall into the corridor through a 60° inverted funnel and enter the solid collection bin through the corridor. Other adsorbents, including activated carbon, are added to the spiral gas delivery pipeline according to the actual situation of the exhaust gas. After the exhaust gas dilution is completed, a 60° inverted funnel is set at the exhaust gas output end 5 to further adsorb solid particles in the exhaust gas. The spiral gas delivery pipeline is used to increase the turnover of the exhaust gas flow in the pipeline, thereby increasing the contact area between the exhaust gas and the inverted funnel and improving the dilution degree.

[0067] like Figure 4 Shown is a topological diagram of exhaust gas treatment, in which the feedback pipeline is not depicted in the figure, wherein PSG is a pulse signal generator, and the PSG outputs a pulse signal to activate the sleep state of the exhaust gas treatment device, wake up the exhaust gas treatment device, and the diluted exhaust gas is input into the pipeline to treat the exhaust gas. The unqualified exhaust gas predicted by the first exhaust gas monitoring unit is also passed into the exhaust gas treatment device through the feedback pipeline to re-process the exhaust gas. In order to prevent two types of exhaust gas treatment failures, two control valves are set at the unqualified exhaust gas input end to control the unqualified exhaust gas input. Part of the unqualified exhaust gas flows into the exhaust gas treatment device, and part is stored in the unqualified exhaust gas redundant device to prevent excessive gas.

[0068] Furthermore, the diluted second tail gas input terminal 15 and the unqualified tail gas input terminal 16 are used to input the tail gas to be treated; PSG 12 is a pulse signal generator, which controls the tail gas branch input through the pneumatic three-way valve 11; If the main adsorption barrel 9 is saturated or fails, the exhaust gas to be treated flows into the auxiliary adsorption barrel 13. At this time, the exhaust control valve 10 is closed, the exhaust output control valve 7 is closed, and the exhaust output 6 outputs the exhaust gas treated by the auxiliary adsorption barrel 13. The color indicator 8 of the main adsorption barrel 9 is used to display the progress of the exhaust gas treatment, and the exhaust indicator 14 is used to display the exhaust gas adsorption work.

[0069] Embodiment 3 like Figure 5 As shown, a dry adsorption tail gas treatment method comprises: The exhaust gas enters the dry exhaust gas adsorption device through the air intake module, and is diluted by the dilution module; The diluted tail gas enters the main adsorption barrel through the pipeline, and the main adsorption barrel adsorbs and treats the tail gas. If the color change indicator of the main adsorption barrel shows that the adsorbent of the main adsorption barrel is saturated, the tail gas is transferred to the auxiliary adsorption barrel through the pneumatic three-way valve; The second exhaust gas monitoring unit detects the exhaust gas flowing into the main adsorption barrel during the switching process of the pneumatic three-way valve. If the exhaust gas concentration exceeds the standard, the exhaust gas is re-introduced into the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel. If the exhaust gas concentration does not exceed the standard, the first exhaust gas monitoring unit monitors and predicts the exhaust gas treatment results in real time; After the exhaust gas flows into the auxiliary adsorption barrel, the exhaust gas is treated by the auxiliary adsorption barrel, and the treated exhaust gas flows into the first exhaust gas monitoring unit. If the concentration of the treated exhaust gas is qualified, the exhaust gas treatment is completed. If the exhaust gas treatment is unqualified, the exhaust gas is re-adsorbed through the feedback pipeline.

[0070] Importantly, it should be noted that the construction and arrangement of the present application shown in a plurality of different exemplary embodiments are only exemplary. Although only two embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible, for example, the size, scale, structure, shape and ratio of various elements, and parameter values ​​(e.g., temperature, pressure, etc.), installation arrangement, use of materials, color, directional changes, etc., without substantially departing from the novel teachings and advantages of the subject matter described in the application. For example, the element shown as integrally formed can be composed of multiple parts or elements, the position of the element can be inverted or otherwise changed, and the nature or number or position of the discrete element can be changed or changed. Therefore, all such modifications are intended to be included in the scope of the present invention. The order or sequence of any process or method steps can be changed or reordered according to alternative embodiments. Any "device plus function" clause is intended to cover the structure of the execution function described in this article, and is not only structurally equivalent but also equivalent structure. Without departing from the scope of the present invention, other replacements, modifications, changes and omissions can be made in the design, operating conditions and arrangement of the exemplary embodiment. Therefore, the invention is not limited to a specific embodiment, but extends to numerous modifications still falling within the scope of the appended claims.

[0071] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment may not be described (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those features that are not relevant to implementing the invention).

[0072] It should be understood that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but for those of ordinary skill having the benefit of this disclosure, the development effort will be a routine task of design, fabrication, and production without undue experimentation.

[0073] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A dry adsorption tail gas treatment device, characterized in that: include: The dilution module is used to absorb the solid components in the exhaust gas and dilute the exhaust gas; The main adsorption tank is used to receive the exhaust gas output by the dilution module and treat the exhaust gas by adsorbing the exhaust gas; The auxiliary adsorption tank is used to switch when the main adsorption tank fails, and perform redundant switching processing on the exhaust gas; The monitoring module is used to detect the exhaust gas output from the dilution module, the exhaust gas concentration output from the main adsorption barrel, and the exhaust gas concentration output from the gas outlet module; The gas outlet module is used to output the treated exhaust gas from the main adsorption barrel and the treated exhaust gas from the auxiliary adsorption barrel.

2. A dry adsorption tail gas treatment device according to claim 1, characterized in that: The dilution module includes a solid dilution unit, a gas dilution unit and a gas delivery unit. The gas delivery unit is configured as a spiral gas delivery channel, and a porous plate is arranged on the wall of the spiral gas delivery pipe to uniformly disperse the solid diluent in the tail gas. The solid dilution unit is used to adsorb particulate solids in the tail gas, and filter the adsorbed solid particles by setting a solid particle filter, and the solid particle filter is provided with an inverted funnel-shaped porous channel to filter the adsorbed solid particles through the funnel-shaped porous channel and output them to the solid collection bin of the dilution module; The gas dilution unit is used to dilute the toxic gas in the tail gas. The toxic gas is stirred and diluted through the spiral gas delivery pipe, and the diluted gas is input into the main adsorption barrel; The gas delivery unit is used for delivering gas.

3. A dry adsorption tail gas treatment device according to claim 2, characterized in that: The main adsorption barrel is of cylindrical structure and filled with tail gas adsorbent. A color changing indicator is also arranged in the main adsorption barrel. When the adsorbent is close to saturation, the color of the indicator changes, and the tail gas adsorbent needs to be replaced. The color-changing indicator responds in color according to the saturation of the adsorbent and is arranged in the visualization unit. The color change of the color-changing indicator is mapped by the change of the saturation of the adsorbent, and visual feedback is performed through the visualization unit.

4. A dry adsorption tail gas treatment device according to claim 3, characterized in that: The auxiliary adsorption barrel is arranged on one side of the main adsorption barrel. If the adsorbent in the main adsorption barrel is saturated, the pneumatic three-way valve is switched, and the pneumatic three-way valve is automatically switched to the auxiliary adsorption barrel for tail gas adsorption; When the main adsorption barrel adsorbs exhaust gas, the valve core of the pneumatic three-way valve is in the closed position. After the exhaust gas flows out of the dilution module, it enters the main adsorption barrel through the outlet connected to the main adsorption barrel for adsorption treatment. The piston in the pneumatic three-way valve keeps the valve core stable. The auxiliary adsorption barrel is in standby status and does not participate in the exhaust gas treatment process.

5. A dry adsorption tail gas treatment device according to claim 4, characterized in that: When the adsorbent is close to saturation, the color indicator will show the color corresponding to saturation. After the color sensor on the main adsorption barrel detects the color change corresponding to saturation, it transmits the signal to the valve controller. After the valve controller receives the signal that the adsorbent in the main adsorption barrel is saturated, it outputs the pneumatic three-way valve control instruction. The control instruction is used to control the compressed air to enter the cylinder of the pneumatic actuator to push the piston to move. Pushed by compressed air, the piston drives the valve core to move within the valve body. The movement of the valve core changes the gas flow channel, so that the exhaust gas flows in from the air inlet and enters the auxiliary adsorption barrel through the air outlet connected to the auxiliary adsorption barrel for adsorption treatment. The main adsorption barrel is disconnected from the exhaust gas input pipeline and enters the adsorbent replacement stage.

6. A dry adsorption tail gas treatment device according to claim 5, characterized in that: The monitoring module includes a color monitoring unit, an exhaust gas monitoring unit and a dilution monitoring unit; The color monitoring unit is used to monitor the color of the color changing indicator; The exhaust gas monitoring unit includes a first exhaust gas monitoring unit and a second exhaust gas monitoring unit. The first exhaust gas monitoring unit is arranged at the output end of the exhaust gas treatment device, and the second exhaust gas monitoring unit is arranged at the tail end of the pneumatic three-way valve to monitor whether there is excessive exhaust gas entering the main adsorption barrel in a saturated state when the main adsorption barrel switches the auxiliary adsorption barrel. If excessive exhaust gas enters the main adsorption barrel in a saturated state, the charged gas is returned to the auxiliary adsorption barrel through the feedback pipeline for re-adsorption.

7. A dry adsorption tail gas treatment device according to claim 6, characterized in that: The first exhaust gas monitoring unit is used to monitor the exhaust gas concentration outputted from the output end of the exhaust gas treatment device in real time, and predict the exhaust gas concentration at the next moment by the exhaust gas concentration monitored in real time; The method for predicting the exhaust concentration at the next moment by monitoring the exhaust concentration in real time includes: Continuously collect exhaust gas concentration data from the output end of the exhaust gas treatment device, and record the corresponding timestamps and operating parameters at the same time. Clean the collected data to remove abnormal values ​​and missing values. Take the data of every n consecutive time points as a sample, and each sample contains the exhaust gas concentration sequence and operating parameters of the current timestamp; The exhaust gas concentration sequence is input into the input layer, a convolution layer is set to extract the features and time series of the exhaust gas concentration data, and the features and time series of the exhaust gas concentration data extracted by the convolution layer are input into the pooling layer, and the dimension of the exhaust gas concentration data is reduced by the pooling layer; Expand the feature vector of the exhaust gas concentration after convolution and pooling through the fully connected layer, input the expanded exhaust gas concentration feature vector into the neurons of the output layer, and predict the exhaust gas concentration at time t+1 by iterating the exhaust gas concentration from time t to time n, and perform error analysis on the output exhaust gas concentration at time t+1 through the error function. If the error value of the exhaust gas at time t+1 is large, set the training set to retrain the first exhaust gas monitoring unit. If the error value of the exhaust gas at time t+1 is small, input the real-time exhaust gas concentration data, and predict the exhaust gas at time t+1 through the first exhaust gas monitoring unit. If the first exhaust gas monitoring unit predicts that the exhaust gas concentration data at time t+1 is greater than the maximum exhaust gas concentration processing threshold, the exhaust gas is re-filtered through the feedback pipeline; if the exhaust gas concentration data is less than the maximum exhaust gas concentration processing threshold, the exhaust gas processing is completed.

8. A dry adsorption tail gas treatment device according to claim 7, characterized in that: The second exhaust gas monitoring unit records the first timestamp when the pneumatic three-way valve is started, and the exhaust gas data of the first timestamp is used as the first group of data, and the exhaust gas concentration passing through the pneumatic three-way valve is recorded as the last group of data by recording the complete opening of the pneumatic three-way valve in continuous timestamps, and obtains the exhaust gas data in continuous timestamps to determine whether the exhaust gas entering the main adsorption barrel exceeds the standard; If the exhaust gas entering the main adsorption barrel exceeds the standard, the exhaust gas in the main adsorption barrel will be passed through the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel to re-adsorb the exhaust gas. If the exhaust gas entering the main adsorption barrel does not exceed the standard, the gas in the main adsorption barrel will be discharged, and the exhaust gas treatment result will be monitored and predicted by the first exhaust gas monitoring unit.

9. A dry adsorption tail gas treatment method, implemented based on a dry adsorption tail gas treatment device according to any one of claims 1 to 8, characterized in that: include: The exhaust gas enters the dry exhaust gas adsorption device through the air intake module, and is diluted by the dilution module; The diluted tail gas enters the main adsorption barrel through the pipeline, and the main adsorption barrel adsorbs and treats the tail gas. If the color change indicator of the main adsorption barrel shows that the adsorbent of the main adsorption barrel is saturated, the tail gas is transferred to the auxiliary adsorption barrel through the pneumatic three-way valve; The second exhaust gas monitoring unit detects the exhaust gas flowing into the main adsorption barrel during the switching process of the pneumatic three-way valve. If the exhaust gas concentration exceeds the standard, the exhaust gas is re-introduced into the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel. If the exhaust gas concentration does not exceed the standard, the first exhaust gas monitoring unit monitors and predicts the exhaust gas treatment results in real time; After the exhaust gas flows into the auxiliary adsorption barrel, the exhaust gas is treated by the auxiliary adsorption barrel, and the treated exhaust gas flows into the first exhaust gas monitoring unit. If the concentration of the treated exhaust gas is qualified, the exhaust gas treatment is completed. If the exhaust gas treatment is unqualified, the exhaust gas is re-adsorbed through the feedback pipeline.

10. A dry adsorption tail gas treatment method according to claim 9, characterized in that: The first tail gas monitoring unit is used to monitor and predict whether the dry adsorption tail gas concentration and the concentration of qualified tail gas flowing into the main adsorption barrel meet the qualified concentration standard of tail gas treatment. If so, the treated gas is output; if not, the tail gas is re-adsorbed through the feedback pipeline; The second exhaust gas monitoring unit is used to monitor whether exhaust gas leakage occurs when the main adsorption barrel switches to the auxiliary adsorption barrel. If exhaust gas leakage occurs and the exhaust gas concentration in the gas in the main adsorption barrel is unqualified, the gas in the main adsorption barrel is re-adsorbed. If the exhaust gas concentration in the gas in the main adsorption barrel is qualified, the gas is output to the first exhaust gas monitoring unit.

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