A dry adsorption tail gas treatment device and method

Abstract

The present invention relates to the technical field of dry exhaust gas treatment, and discloses a dry adsorption exhaust gas treatment device and method, including a dilution module for adsorbing solid components in exhaust gas and diluting exhaust gas, a main adsorption barrel for receiving exhaust gas output by the dilution module and treating the exhaust gas by adsorbing the exhaust gas, a secondary adsorption barrel for switching when the main adsorption barrel fails and performing redundant switching treatment on the exhaust gas, a monitoring module for detecting the exhaust gas output by the dilution module, detecting the exhaust gas concentration output by the main adsorption barrel and detecting the exhaust gas concentration output by the exhaust module, and an exhaust outlet module for outputting the processed exhaust gas output by the main adsorption barrel and the processed exhaust gas output by the secondary adsorption barrel, thereby realizing intelligent monitoring of exhaust gas treatment, improving the quality of exhaust gas treatment and reducing labor costs.

Description

Technical Field

[0001] The invention relates to the technical field of dry tail gas treatment and discloses a dry adsorption tail gas treatment device and method. Background Art

[0002] Since "high-purity gas" is in direct contact with the product during the production process, it is the most critical factory system in the semiconductor industry such as integrated circuits, flat panel displays, light-emitting diodes, photovoltaics, etc. Various high-purity gases are required in etching, diffusion, ion implantation, thin film deposition and yellow light processes. Such gases involved in process reactions are usually called process gases. Waste gas is generated during the reaction. In the industrial production process, a large amount of tail gas containing harmful substances is generated, such as phosphine ( ), etc. If these exhaust gases are directly discharged without effective treatment, they will cause serious harm to the environment and human health. The current common exhaust gas treatment technologies have many shortcomings and are difficult to meet the increasingly stringent environmental protection requirements and the needs of efficient treatment.

[0003] Traditional exhaust gas treatment equipment often has a single function and is unable to effectively treat solid particles and toxic gases in the exhaust gas at the same time. Moreover, when the concentration of harmful components in the exhaust gas is high, the treatment effect is poor, which can easily lead to rapid saturation of the adsorbent, reduce treatment efficiency and equipment life, and increase the risk of exhaust gas leakage and environmental pollution. Summary of the invention

[0004] The purpose of this section is to summarize some aspects of embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and the invention title of this application to avoid blurring the purpose of this section, the specification abstract and the invention title, and such simplifications or omissions cannot be used to limit the scope of the present invention.

[0005] In order to solve the above technical problems, the main purpose of the present invention is to provide a dry adsorption tail gas treatment device and method, wherein a dry adsorption tail gas treatment device comprises:

[0006] The dilution module is used to absorb the solid components in the exhaust gas and dilute the exhaust gas;

[0007] The main adsorption tank is used to receive the exhaust gas output by the dilution module and treat the exhaust gas by adsorbing the exhaust gas;

[0008] The auxiliary adsorption tank is used to switch when the main adsorption tank fails, and perform redundant switching processing on the exhaust gas;

[0009] The monitoring module is used to detect the exhaust gas output from the dilution module, the exhaust gas concentration output from the main adsorption barrel, and the exhaust gas concentration output from the gas outlet module;

[0010] The gas outlet module is used to output the treated exhaust gas from the main adsorption barrel and the treated exhaust gas from the auxiliary adsorption barrel.

[0011] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0012] The dilution module includes a solid dilution unit, a gas dilution unit and a gas delivery unit. The gas delivery unit is configured as a spiral gas delivery channel, and a porous plate is arranged on the wall of the spiral gas delivery pipe to uniformly disperse the solid diluent in the tail gas.

[0013] The solid dilution unit is used to adsorb particulate solids in the tail gas, and filter the adsorbed solid particles by setting a solid particle filter, and the solid particle filter is provided with an inverted funnel-shaped porous channel to filter the adsorbed solid particles and output them to the dilution module solid collection bin through the funnel-shaped porous channel;

[0014] The gas dilution unit is used to dilute the toxic gas in the tail gas. The toxic gas is stirred and diluted through the spiral gas delivery pipe, and the diluted gas is input into the main adsorption barrel.

[0015] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0016] The main adsorption barrel is of cylindrical structure and filled with tail gas adsorbent. A color changing indicator is also arranged in the main adsorption barrel. When the adsorbent is close to saturation, the color of the indicator changes, and the tail gas adsorbent needs to be replaced.

[0017] The color-changing indicator reacts in color according to the saturation of the adsorbent and is arranged in the visualization unit. The color change of the color-changing indicator is mapped by the change of the saturation of the adsorbent, and visual feedback is performed through the visualization unit.

[0018] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0019] The auxiliary adsorption barrel is arranged on one side of the main adsorption barrel. If the adsorbent in the main adsorption barrel is saturated, the pneumatic three-way valve is switched, and the pneumatic three-way valve is automatically switched to the auxiliary adsorption barrel for tail gas adsorption;

[0020] When the main adsorption barrel adsorbs exhaust gas, the valve core of the pneumatic three-way valve is in the closed position. After the exhaust gas flows out of the dilution module, it enters the main adsorption barrel through the outlet connected to the main adsorption barrel for adsorption treatment. The piston in the pneumatic three-way valve keeps the valve core stable. The auxiliary adsorption barrel is in standby status and does not participate in the exhaust gas treatment process.

[0021] As a preferred embodiment of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0022] When the adsorbent is approaching saturation, the color-changing indicator will show the color corresponding to saturation. After the color sensor on the main adsorption barrel detects the color change corresponding to saturation, it transmits a signal to the valve controller. After receiving the signal that the adsorbent in the main adsorption barrel is saturated, the valve controller outputs a pneumatic three-way valve control instruction, and the control instruction is used to control the compressed air to enter the cylinder of the pneumatic actuator to push the piston to move.

[0023] Driven by the compressed air, the piston drives the valve core to move in the valve body. The movement of the valve core changes the gas flow channel, so that after the tail gas flows in from the air inlet, it enters the auxiliary adsorption barrel through the air outlet connected to the auxiliary adsorption barrel for adsorption treatment, and the main adsorption barrel is disconnected from the tail gas input pipeline, and enters the adsorbent replacement stage.

[0024] As a preferred solution of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0025] The monitoring module includes a color monitoring unit, a tail gas monitoring unit and a dilution monitoring unit;

[0026] The color monitoring unit is used to monitor the color of the color-changing indicator;

[0027] The tail gas monitoring unit includes a first tail gas monitoring unit and a second tail gas monitoring unit. The first tail gas monitoring unit is arranged at the output end of the tail gas treatment device, and the second tail gas monitoring unit is arranged at the end of the pneumatic three-way valve to monitor whether there is excessive tail gas input into the saturated main adsorption barrel when the main adsorption barrel is switched to the auxiliary adsorption barrel. If there is excessive tail gas input into the saturated main adsorption barrel, the charged gas is returned to the auxiliary adsorption barrel through the feedback pipeline for re-adsorption.

[0028] As a preferred solution of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0029] The first tail gas monitoring unit is used to perform real-time monitoring by detecting the tail gas concentration output at the output end of the tail gas treatment device, and predict the tail gas concentration at the next moment through the real-time monitored tail gas concentration;

[0030] The method for predicting the tail gas concentration at the next moment through the real-time monitored tail gas concentration includes;

[0031] Continuously collect tail gas concentration data from the output end of the tail gas treatment device, and at the same time record the corresponding timestamps and working condition parameters. Clean the collected data to remove outliers and missing values. Use the data of every n consecutive time points as a sample, and each sample includes the tail gas concentration sequence and working condition parameters at the current timestamp;

[0032] Input the tail gas concentration sequence into the input layer, set a convolutional layer to extract the features and time series of the tail gas concentration data, and input the features and time series of the tail gas concentration data extracted by the convolutional layer into the pooling layer to reduce the dimension of the tail gas concentration data;

[0033] Expand the feature vector of the tail gas concentration after convolution and pooling through the fully connected layer, input the expanded feature vector of the tail gas concentration into the neurons of the output layer, and predict the tail gas concentration at time t+1 by iterating the tail gas concentration from time t to time n. Then, perform error analysis on the tail gas concentration at time t+1 output through the error function. If the error value of the tail gas at time t+1 is large, set the training set to retrain the first tail gas monitoring unit. If the error value of the tail gas at time t+1 is small, input the real-time tail gas concentration data and predict the tail gas at time t+1 through the first tail gas monitoring unit;

[0034] If the first tail gas monitoring unit predicts that the tail gas concentration data at time t+1 is greater than the maximum tail gas concentration processing threshold, re-filter the tail gas through the feedback pipeline. If the tail gas concentration data is less than the maximum tail gas concentration processing threshold, complete the tail gas treatment.

[0035] As a preferred solution of a dry adsorption tail gas treatment device and method of the present invention, wherein:

[0036] The second tail gas monitoring unit starts to record the first timestamp when the pneumatic three-way valve is started, takes the tail gas data at the first timestamp as the first group of data, and records the complete opening of the pneumatic three-way valve within the continuous timestamp. The tail gas concentration passing through the pneumatic three-way valve is the last group of data. By obtaining the tail gas data within the continuous timestamp, it is determined whether the tail gas entering the main adsorption barrel exceeds the standard;

[0037] If the tail gas entering the main adsorption barrel exceeds the standard, the tail gas in the main adsorption barrel is re-adsorbed through the main adsorption barrel feedback pipeline and the auxiliary adsorption barrel. If the tail gas entering the main adsorption barrel does not exceed the standard, the gas in the main adsorption barrel is discharged, and the first tail gas monitoring unit monitors and predicts the tail gas treatment result.

[0038] As a preferred solution of a dry adsorption tail gas treatment method of the present invention, wherein:

[0039] The tail gas enters the dry tail gas adsorption device through the intake module and is diluted by the dilution module;

[0040] The diluted tail gas enters the main adsorption barrel through the pipeline, and the main adsorption barrel adsorbs and treats the tail gas. If the color indicator of the main adsorption barrel shows that the adsorbent in the main adsorption barrel is saturated, the tail gas is transferred to the auxiliary adsorption barrel through the pneumatic three-way valve;

[0041] The second exhaust gas monitoring unit is used to detect the exhaust gas of the gas flowing into the main adsorption barrel during the switching process of the pneumatic three-way valve. If the exhaust gas concentration exceeds the standard, the exhaust gas is re-introduced into the secondary adsorption barrel through the main adsorption barrel feedback pipeline. If the exhaust gas concentration does not exceed the standard, the first exhaust gas monitoring unit is used to monitor and predict the exhaust gas treatment result in real time;

[0042] After the exhaust gas flows into the secondary adsorption barrel, the secondary adsorption barrel is used to treat the exhaust gas. The treated exhaust gas flows into the first exhaust gas monitoring unit. If the concentration of the treated exhaust gas is qualified, the exhaust gas treatment is completed. If the exhaust gas treatment is unqualified, the exhaust gas is re-adsorbed through the feedback pipeline.

[0043] As a preferred solution of a dry adsorption exhaust gas treatment device and method of the present invention, wherein:

[0044] The first exhaust gas monitoring unit is used to monitor and predict whether the comprehensive concentration of the dry adsorption exhaust gas concentration and the qualified exhaust gas flowing into the main adsorption barrel meets the exhaust gas treatment qualified concentration standard. If it meets the standard, the treated gas is output. If it does not meet the standard, the exhaust gas is re-adsorbed through the feedback pipeline;

[0045] The second exhaust gas monitoring unit is used to monitor whether there is exhaust gas leakage when the main adsorption barrel switches to the secondary adsorption barrel. If there is exhaust gas leakage, and the exhaust gas concentration in the gas in the main adsorption barrel is unqualified, the gas in the main adsorption barrel is re-adsorbed. If the exhaust gas concentration in the gas in the main adsorption barrel is qualified, the gas is output to the first exhaust gas monitoring unit.

[0046] The beneficial effects of the present invention: The dilution module integrates solid dilution, gas dilution and gas transportation, and can simultaneously treat the solid components and toxic gases in the exhaust gas, improving the treatment efficiency and versatility of the device. The solid dilution unit adsorbs and filters the particulate solids in the exhaust gas, which can not only effectively remove solid impurities, but also prevent these impurities from affecting the adsorption effect of the subsequent adsorption barrels. The design of the inverted funnel-shaped porous channel helps the smooth output and collection of solid particles, facilitating cleaning and maintenance. The monitoring module monitors the adsorbent state, exhaust gas concentration and dilution process, realizing the comprehensive monitoring and prediction of the device operation state, being able to timely discover potential problems and take measures, improving the accuracy and reliability of the prediction, helping to optimize the device operation parameters, improving the treatment efficiency, and at the same time avoiding environmental pollution and safety hazards caused by exhaust gas leakage during the switching process. By returning the excessive exhaust gas to the secondary adsorption barrel through the feedback pipeline for re-adsorption, the quality of exhaust gas treatment is further improved, and the intelligence and automation of the system are increased. Description of the Drawings

[0047] To more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. Among them:

[0048] Figure 1 It is a composition diagram of a dry adsorption tail gas treatment device of the present invention;

[0049] Figure 2 It is a flowchart of the implementation method of the first tail gas monitoring unit of a dry adsorption tail gas treatment device of the present invention;

[0050] Figure 3 It is a schematic diagram of the dilution module of a dry adsorption tail gas treatment device of the present invention;

[0051] Figure 4 It is a topological composition diagram of a dry adsorption tail gas treatment device of the present invention;

[0052] Figure 5 It is a flowchart of a dry adsorption tail gas treatment method of the present invention;

[0053] Reference numerals: 1. First tail gas input end; 2. Inverted funnel-shaped porous channel; 3. Polyester needle punched felt; 4. Spiral gas transmission pipeline; 5. Tail gas output end; 6. Tail gas output; 7. Tail gas output control valve; 8. Color indicator; 9. Main adsorption barrel; 10. Tail gas control valve; 11. Pneumatic three-way valve; 12. PSG; 13. Auxiliary adsorption barrel; 14. Exhaust indication; 15. Second tail gas input end; 16. Unqualified tail gas input end. Detailed implementation manners

[0054] To make the above objects, features, and advantages of the present invention more obvious and understandable, the following will make a detailed description of the specific implementation manners of the present invention in conjunction with the drawings of the specification.

[0055] In the following description, many specific details are set forth to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0056] Secondly, the so-called "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that can be included in at least one implementation manner of the present invention. The "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that mutually excludes other embodiments.

[0057] Embodiment 1

[0058] like Figure 1 As shown, a dry adsorption tail gas treatment device comprises:

[0059] The air intake module includes an air intake pipe and a flow control valve. The air intake pipe is made of corrosion-resistant materials to ensure that the exhaust gas does not react with the pipe during transportation. The flow control valve can adjust the flow of exhaust gas entering the device according to actual production conditions to ensure the stability of the treatment effect.

[0060] The dilution module is used to adsorb solid components in the exhaust gas and dilute the exhaust gas.

[0061] The dilution module includes a solid dilution unit, a gas dilution unit and a gas delivery unit. The gas delivery unit is configured as a spiral gas delivery channel, and a porous plate is arranged on the wall of the spiral gas delivery pipe to evenly disperse the solid diluent in the tail gas.

[0062] The solid dilution unit is used to adsorb particulate solids in the tail gas, and filter the adsorbed solid particles by setting a solid particle filter, and the solid particle filter is provided with an inverted funnel-shaped porous channel to filter the adsorbed solid particles through the funnel-shaped porous channel and output them to the solid collection bin of the dilution module;

[0063] A specific implementation method of the dilution module includes:

[0064] The main components of tail gas include phosphine ( ) and other toxic gases and a certain amount of solid particles (such as metal dust, etc.). The exhaust gas flow rate is 5000m³ / h, the initial concentration of phosphine is 50ppm, and the solid particle concentration is 100mg / m³. Environmental protection requirements require that the phosphine concentration in the exhaust gas after treatment is less than 1ppm and the solid particle concentration is less than 10mg / m³.

[0065] The pipe diameter is determined according to the exhaust gas flow rate and flow rate. The exhaust gas flow rate in the pipeline is 18m / s, and the cross-sectional area of ​​the pipeline is 0.0772㎡, so the pipe diameter is 0.314m. A spiral gas delivery pipe with a diameter of 325mm is selected, and the pitch is designed to be 200mm. The spiral gas delivery pipe is made of 30 stainless steel to ensure its service life. The porous plate is selected with an aperture of 5mm and an opening rate of 30%. The porous plate is also made of 304 stainless steel, which is consistent with the material of the spiral gas delivery pipe, and is easy to weld and install.

[0066] The solid dilution unit has a filtration rate of 0.8m / min, an actual filtration area of ​​104.17㎡, and a designed filtration area of ​​110m². Polyester needle felt is used, which has high filtration efficiency and good air permeability and can effectively intercept solid particles.

[0067] like Figure 3As shown, the upper diameter of the inverted funnel-shaped porous tunnel 2 matches the bottom size of the solid particle filter, which is designed to be 1000mm, and the lower diameter is 300mm. The inclination angle is 60° to ensure that the solid particles can fall naturally by gravity. Activated carbon is selected as a solid diluent. It has a large specific surface area and good adsorption performance, and can effectively adsorb solid particles and some toxic gases in the exhaust gas. The amount of activated carbon is determined according to the concentration of solid particles in the exhaust gas and the adsorption capacity of activated carbon. The adsorption capacity of activated carbon for solid particles is 0.2g / g. The amount of activated carbon required per hour is 2.5kg.

[0068] The gas dilution unit selects nitrogen as the dilution gas and determines the dilution ratio according to the initial concentration of phosphine in the tail gas and the standard concentration required by environmental protection. Assuming the volume after dilution is v, the initial volume is 5000m³ / h, the initial concentration is 50ppm, and the standard concentration is 1ppm, according to the dilution formula, v=250000m³ / h, then the amount of nitrogen to be injected is 245000m³ / h.

[0069] Connect the exhaust source, dilution module and subsequent detection equipment, turn on the exhaust gas conveying equipment, introduce the exhaust gas into the dilution module at a flow rate of 5000m³ / h, and at the same time, add activated carbon solid diluent according to the designed amount, and inject nitrogen at a flow rate of 245000m³ / h for gas dilution. Install gas concentration sensors and dust concentration sensors at the outlet of the dilution module to monitor the concentrations of phosphine and solid particles in the treated exhaust gas in real time. After a period of operation, the test results show that the phosphine concentration in the treated exhaust gas is less than 1ppm, and the solid particle concentration is less than 10mg / m³, which meets environmental protection requirements.

[0070] The gas dilution unit is used to dilute the toxic gas in the tail gas. The toxic gas is stirred and diluted through the spiral gas delivery pipe, and the diluted gas is input into the main adsorption barrel.

[0071] The toxic gases (such as and ) for stirring and diluting, which can fully mix the dilution gas with the toxic gas to ensure the uniformity of the dilution effect. This design can effectively reduce the concentration of toxic gases, reduce the processing burden of the main adsorption barrel, increase the service life of the adsorbent in the main adsorption barrel, avoid frequent replacement of the adsorbent due to rapid saturation, and thus reduce operating costs.

[0072] The upper diameter of the inverted funnel-shaped porous passage 2 is designed to match the bottom size of the solid particle filter, ensuring that the solid particles can naturally fall to the collection bin by gravity. The size and inclination angle are designed according to actual production needs, avoiding the accumulation and blockage of solid particles in the passage, ensuring the smooth discharge of solid particles, enabling the solid dilution unit to work continuously and effectively, reducing the frequency and difficulty of manual cleaning, improving the pretreatment ability of the tail gas treatment device for solid particles and some toxic gases, ensuring the stable operation of the equipment, reducing the operation and maintenance costs, and having good practicability and economic benefits.

[0073] The main adsorption barrel is used to receive the tail gas output by the dilution module and treat the tail gas by adsorbing it. The spiral gas transmission pipeline 4 is used to transport the tail gas.

[0074] The main adsorption barrel has a cylindrical structure and is filled with a tail gas adsorbent. A color-changing indicator is also set inside the main adsorption barrel. When the adsorbent is close to saturation, the color of the indicator changes, and then the tail gas adsorbent needs to be replaced.

[0075] The color-changing indicator makes a color reaction according to the saturation of the adsorbent and is set in the visualization unit. The color change of the color-changing indicator is mapped through the change of the adsorbent saturation and visualized through the visualization unit.

[0076] A specific implementation method of the main adsorption barrel includes:

[0077] Determine the superficial gas velocity of the tail gas in the adsorption barrel. The superficial gas velocity is taken as 0.4 m / s. According to the flow formula, the cross-sectional area is 5.56 ㎡, so the diameter is 2.67 m, and the diameter is taken as 2.8 m. The height of the adsorbent layer is taken as 2 m. Considering the space at the top and bottom for gas distribution and support structure, the total height of the main adsorption barrel is designed as 3 m. The main adsorption barrel is made of stainless steel 316L with a thickness of 6 mm to ensure its strength and corrosion resistance.

[0078] For and adsorption, activated carbon loaded with copper oxide is a suitable adsorbent. Activated carbon has a large specific surface area, which can provide more adsorption sites, while copper oxide can react chemically with and to enhance the adsorption effect. Granular activated carbon loaded with copper oxide is selected, with a particle size of 3 - 5 mm and a bulk density of 600 kg / m³. The filling volume of activated carbon in the main adsorption barrel is 12.232 m³, so the filling mass of activated carbon is 7339 kg.

[0079] Select an acid-base indicator containing a specific metal salt as the color-changing indicator sensitive to and The acid-base indicator of the specific metal salt changes color when contacting and After that, as the adsorption amounts of the two gases by the adsorbent increase, color changes will occur. The color-changing indicator is evenly dispersed in the adsorbent, and a visual observation point is set every 0.6 m. The visual observation point uses a window made of a transparent material to facilitate the operator to observe the color change of the indicator. The visual window uses high-strength transparent organic glass with a thickness of 12 mm and is installed on the side of the main adsorption barrel. The size of each window is 250 mm × 250 mm. The corresponding relationship between the color and the adsorbent saturation is marked next to each visual window. Blue indicates that the adsorbent saturation is less than 20%, purple indicates that the saturation is between 20% - 80%, and red indicates that the saturation is higher than 80%.

[0080] and At the first tail gas input end 1 of the main adsorption barrel of and Open the tail gas conveying equipment and introduce the simulated tail gas containing and into the main adsorption barrel at a flow rate of 6000 m³ / h. At the same time, continuously monitor the and concentrations at the inlet and outlet of the main adsorption barrel during operation, observe the color change of the color-changing indicator in the visual window and record it. After running for a period of time, analyze the and concentration data at the inlet and outlet. When the concentration at the outlet is close to 1 mg / m³ and the concentration is close to 0.5 mg / m³, it is observed that the color of the indicator in the visual window changes to red, indicating that the adsorbent is approaching saturation. At this time, stop the operation, replace the adsorbent and conduct the test again. After treatment, the concentration in the tail gas can be reduced to below 1 mg / m³ again, and the concentration is reduced to below 0.5 mg / m³.

[0081] The main adsorption barrel adopts a cylindrical structure and is filled with tail gas adsorbent inside, providing a large adsorption area to enable the tail gas to fully contact with the adsorbent, so as to efficiently remove harmful substances in the tail gas. For tail gas containing multiple pollutants, multiple adsorbents are added for targeted adsorption to improve the treatment effect. Further, the cylindrical structure has the ability to withstand pressure and impact force, ensuring the structural stability of the main adsorption barrel during long-term operation. At the same time, this structure is also convenient for manufacturing and installation, reducing the manufacturing cost and installation difficulty of the equipment. When the adsorbent is approaching saturation, the adsorbent can be found and replaced in time through the color indication system, ensuring that the main adsorption barrel is always in good working condition. The process of replacing the adsorbent is relatively simple and will not cause long-term shutdown of the entire tail gas treatment system.

[0082] The secondary adsorption tank is used for switching when the primary adsorption tank fails, and redundant switching processing is performed on the tail gas;

[0083] The secondary adsorption tank serves as a backup device for the primary adsorption tank. When the adsorbent is saturated or the equipment is damaged, it can be put into use in a timely manner to ensure the continuity of the tail gas treatment process. The redundant switching processing design avoids the direct emission of untreated tail gas due to the failure of the primary adsorption tank, protecting the environmental safety. Under normal circumstances, the secondary adsorption tank is in a standby state and will only be started when the primary adsorption tank needs to be repaired or the adsorbent needs to be replaced, enabling the primary adsorption tank and the secondary adsorption tank to be used alternately, extending the service life of the entire tail gas treatment system, reducing the replacement frequency and cost of the equipment. The presence of the secondary adsorption tank increases the flexibility of the tail gas treatment system. When the tail gas emission suddenly increases or the tail gas composition changes, the primary adsorption tank and the secondary adsorption tank can be started simultaneously to improve the treatment capacity of the system to meet different working conditions.

[0084] The secondary adsorption tank is arranged on one side of the primary adsorption tank. If the adsorbent in the primary adsorption tank is saturated, the pneumatic three-way valve switches, and the pneumatic three-way valve automatically switches to the secondary adsorption tank for tail gas adsorption;

[0085] When the primary adsorption tank adsorbs the tail gas, the valve core of the pneumatic three-way valve is in the closed position. After the tail gas flows out of the dilution module, it enters the primary adsorption tank through the air outlet connected to the primary adsorption tank for adsorption treatment. The piston in the pneumatic three-way valve keeps the valve core stable, and the secondary adsorption tank is in a standby state and does not participate in the tail gas treatment process.

[0086] When the adsorbent is close to saturation, the color indicator will show the color corresponding to saturation. After the color sensor on the primary adsorption tank detects the color change corresponding to saturation, it transmits the signal to the valve controller. After receiving the signal that the adsorbent in the primary adsorption tank is saturated, the valve controller outputs a control instruction for the pneumatic three-way valve. The control instruction is used to control the compressed air to enter the cylinder of the pneumatic actuator, pushing the piston to move. Driven by the compressed air, the piston drives the valve core to move in the valve body. The movement of the valve core changes the gas flow channel, enabling the tail gas to flow in through the air inlet and enter the secondary adsorption tank through the air outlet connected to the secondary adsorption tank for adsorption treatment. The primary adsorption tank is disconnected from the tail gas input pipeline and enters the adsorbent replacement stage.

[0087] The pneumatic three-way valve automatically switches the flow direction of the tail gas according to the instructions of the valve controller, achieving seamless switching between the main adsorption barrel and the secondary adsorption barrel. The automated switching process is fast and accurate, reducing manual intervention, improving the system's response speed and processing efficiency. Furthermore, the design of the valve core and valve body of the pneumatic three-way valve can ensure good sealing performance, preventing tail gas leakage. During the switching process, the valve core can closely fit the valve body, ensuring that the tail gas can only flow through the predetermined channels, avoiding environmental pollution caused by tail gas during the switching process. The pneumatic three-way valve uses compressed air as the power source, has strong adaptability, and can operate normally under different working conditions such as temperature, pressure, and humidity. At the same time, its structure is relatively simple, easy to maintain, reducing the equipment's maintenance cost and downtime.

[0088] A specific implementation method of a pneumatic three-way valve includes:

[0089] According to the tail gas flow rate and pressure in the above implementation method, select a pneumatic three-way valve with DN250, whose nominal pressure is 1.6 MPa, and the valve body material is selected as stainless steel, which matches the overall material of the system to prevent corrosion. The cylinder diameter is 200 mm and the stroke is 100 mm to ensure that the valve core can be reliably pushed to move. The air source pressure is set to 0.5 - 0.7 MPa, which can provide sufficient power for the cylinder. The control unit of the pneumatic three-way valve has signal receiving, processing, and output functions, converts the signal of the color sensor into the control instruction of the pneumatic three-way valve, and performs color programming settings through a programmable logic controller (PLC).

[0090] The monitoring module is used to detect the tail gas output by the dilution module, detect the concentration of the tail gas output by the main adsorption barrel, and detect the concentration of the tail gas output by the gas outlet module;

[0091] The monitoring module includes a color monitoring unit, a tail gas monitoring unit, and a dilution monitoring unit;

[0092] The color monitoring unit is used to monitor the color of the color-changing indicator;

[0093] The tail gas monitoring unit includes a first tail gas monitoring unit and a second tail gas monitoring unit. The first tail gas monitoring unit is set at the output end of the tail gas treatment device, and the second tail gas monitoring unit is set at the end of the pneumatic three-way valve to monitor whether there is excessive tail gas entering the main adsorption barrel in a saturated state when switching from the main adsorption barrel to the secondary adsorption barrel. If there is excessive tail gas entering the main adsorption barrel in a saturated state, the charging gas is returned to the secondary adsorption barrel through the feedback pipeline for re-adsorption.

[0094] The first tail gas monitoring unit is used to perform real-time monitoring by detecting the concentration of the tail gas output at the output end of the tail gas treatment device, and predict the tail gas concentration at the next moment through the real-time monitored tail gas concentration;

[0095] The method for predicting the tail gas concentration at the next moment through real-time monitoring of the tail gas concentration includes:

[0096] Continuously collect tail gas concentration data from the output end of the tail gas treatment device, and at the same time record the corresponding timestamps and operating conditions parameters. Clean the collected data to remove outliers and missing values. Take the data of every n consecutive time points as a sample, and each sample includes the tail gas concentration sequence at the current timestamp and the operating conditions parameters.

[0097] Input the tail gas concentration sequence into the input layer, set up a convolutional layer to extract the features and time series of the tail gas concentration data, and input the features and time series of the tail gas concentration data extracted by the convolutional layer into the pooling layer to reduce the dimension of the tail gas concentration data through the pooling layer.

[0098] Expand the feature vector of the tail gas concentration after convolution and pooling processing through the fully connected layer, input the expanded feature vector of the tail gas concentration into the neurons of the output layer, and predict the tail gas concentration at the t + 1 moment by iterating the tail gas concentration from the t-th to the n-th moment. Analyze the error of the tail gas concentration at the t + 1 moment output through the error function. If the error value of the tail gas at the t + 1 moment is large, set the training set to retrain the first tail gas monitoring unit. If the error value of the tail gas at the t + 1 moment is small, input the real-time tail gas concentration data, and predict the tail gas at the t + 1 moment through the first tail gas monitoring unit.

[0099] Using the convolutional layer to extract the features and time series information of the tail gas concentration data can discover the potential laws in the data. The convolutional layer can capture the features of the data at different scales through convolutional kernels of different sizes, such as local concentration fluctuations and global change trends. This feature extraction method can better adapt to the complexity and dynamics of the tail gas concentration data than traditional methods, thereby improving the prediction accuracy. By predicting the tail gas concentration at the next moment, it is possible to detect in advance the situation where the tail gas concentration may exceed the standard, providing an early warning for the tail gas treatment system. In this way, measures can be taken in a timely manner, such as adjusting the use of adsorbents and increasing the operating power of the treatment equipment, to avoid the direct discharge of excessive tail gas into the environment, improving the safety and reliability of the tail gas treatment. According to the prediction results, the tail gas treatment process can be optimized. For example, if it is predicted that the tail gas concentration is about to increase, spare adsorbents can be prepared in advance or the flow rate of the dilution gas can be adjusted to make the tail gas treatment system operate more efficiently and reduce the treatment cost.

[0100] As Figure 2 shown, the specific implementation method of the monitoring unit includes:

[0101] Select a sensor based on RGB color recognition technology to accurately identify the color change of the color-changing indicator, and install the color sensor near the visualization window of the main adsorption barrel to ensure that the color of the indicator can be clearly captured.

[0102] The exhaust gas monitoring unit selects precise detection and an electrochemical sensor for concentration, which is installed at the output end of the exhaust gas treatment device to ensure that the concentration data of the treated exhaust gas can be obtained in real time.

[0103] The second exhaust gas monitoring unit uses the same type of gas sensor as the first exhaust gas monitoring unit, which is installed at the end of the pneumatic three-way valve and is used to monitor the exhaust gas situation when the main and auxiliary adsorption barrels are switched.

[0104] The dilution monitoring unit installs a flow sensor and a concentration sensor, which are used to monitor the flow rate of the dilution gas and the concentration of the diluted exhaust gas respectively. The flow sensor uses a vortex street flow sensor, and the concentration sensor is of the same type as the sensor of the exhaust gas monitoring unit. Through an industrial-grade data acquisition card, the analog signal output by the sensor is converted into a digital signal and transmitted to the monitoring computer through RS-485 Ethernet.

[0105] The first exhaust gas monitoring unit constructs a convolutional neural network (CNN) model through TensorFlow of python software to predict the exhaust gas concentration at the next moment. The model includes an input layer, a convolutional layer, a pooling layer, a fully connected layer and an output layer. After the model is constructed, historical exhaust gas concentration data is used for preliminary training to determine the initial model parameters.

[0106] Collect the color data of the color-changing indicator every 1 minute and convert it into RGB values and transmit them to the data acquisition system, and continuously collect the and concentration data at the output end of the exhaust gas treatment device, and record the corresponding timestamps, temperatures, pressures and flow rates at the same time.

[0107] During the switching of the main and auxiliary adsorption barrels, collect the exhaust gas concentration data at the end of the pneumatic three-way valve in real time to judge whether there is excessive exhaust gas entering the saturated main adsorption barrel, and collect the flow rate of the dilution gas and the concentration data of the relevant components in the diluted exhaust gas.

[0108] Clean the collected exhaust gas concentration data. When the detected concentration exceeds the normal range by more than 1000 mg / m³, it is regarded as an abnormal value and excluded. The missing values are processed by the methods of linear interpolation or mean filling. Take the data of every n consecutive time points as a sample, and each sample contains the exhaust gas concentration sequence and working condition parameters at the current timestamp. For example, if n = 10, then each sample contains the and concentration data of the most recent 10 time points and the corresponding working condition parameters such as temperature, pressure and flow rate.

[0109] Input the constructed data samples into the input layer of the CNN model, and extract the characteristics of the tail gas concentration data and time series information through the convolutional layer. Multiple convolutional kernels of different sizes can be used in the convolutional layer to capture features at different scales. For example, use convolutional kernels of 3×1 and 5×1 for convolution operations to extract local and global feature information.

[0110] Input the features and time series information extracted by the convolutional layer into the pooling layer. Through the pooling operation, reduce the dimension of the tail gas concentration data, reduce the amount of calculation, and at the same time retain important feature information.

[0111] Expand the feature vector of the tail gas concentration after convolution and pooling through the fully connected layer, input the expanded feature vector into the neurons of the output layer, and predict the tail gas concentration at time t+1 by iterating the tail gas concentration from time t to time n.

[0112] Use an error function (such as the mean square error MSE) to perform error analysis on the tail gas concentration at time t+1 of the output. If the error value is large, select a part of the data from the historical data as the training set, retrain the CNN model, and adjust the model parameters; if the error value is small, continue to input real-time tail gas concentration data, and predict the tail gas at time t+1 through the first tail gas monitoring unit.

[0113] The second tail gas monitoring unit monitors the tail gas concentration at the end of the pneumatic three-way valve in real time. When the main adsorption barrel is switched to the secondary adsorption barrel, it judges whether there is excessive tail gas entering the saturated main adsorption barrel. If excessive tail gas is detected, the feedback mechanism is immediately triggered.

[0114] When the main adsorption barrel is switched to the secondary adsorption barrel, the second tail gas monitoring unit can monitor in real time whether there is excessive tail gas entering the saturated main adsorption barrel. Once excessive tail gas is detected, the charging gas is immediately returned to the secondary adsorption barrel through the feedback pipeline for re-adsorption, avoiding the direct discharge of excessive tail gas into the environment without treatment, ensuring the compliance rate of tail gas treatment. During the switching process of the main and secondary adsorption barrels, the flow state of the tail gas may change, which is likely to cause local tail gas concentration to exceed the standard. The setting of the second tail gas monitoring unit can timely detect these abnormal situations and take corresponding measures for treatment, ensuring the stability of the adsorption barrel switching process and reducing the impact on the normal operation of the tail gas treatment system.

[0115] When it is detected that there is excessive tail gas entering the saturated main adsorption barrel, the charging gas is returned to the secondary adsorption barrel through the feedback pipeline for re-adsorption treatment. At the same time, record the relevant information of the excessive emission event, such as time, excessive components, excessive concentration, etc.

[0116] If the predicted tail gas concentration data at time t+1 by the first tail gas monitoring unit is greater than the maximum tail gas concentration treatment threshold, the tail gas is re-filtered through the feedback pipeline. If the tail gas concentration data is less than the maximum tail gas concentration treatment threshold, the tail gas treatment is completed.

[0117] The second tail gas monitoring unit starts to record the first timestamp when the pneumatic three-way valve is activated, takes the tail gas data at the first timestamp as the first group of data, and records the complete opening of the pneumatic three-way valve within consecutive timestamps. The tail gas concentration passing through the pneumatic three-way valve is the last group of data. By obtaining the tail gas data within consecutive timestamps, it is determined whether the tail gas entering the main adsorption tank exceeds the standard.

[0118] If the tail gas entering the main adsorption tank exceeds the standard, the tail gas in the main adsorption tank is re-adsorbed through the main adsorption tank feedback pipeline and the auxiliary adsorption tank. If the tail gas entering the main adsorption tank does not exceed the standard, the gas in the main adsorption tank is discharged, and the first tail gas monitoring unit monitors and predicts the tail gas treatment result.

[0119] The gas outlet module is used to output the treated tail gas from the main adsorption tank and the treated tail gas from the auxiliary adsorption tank.

[0120] Embodiment 2

[0121] A dry adsorption tail gas treatment device, and the specific implementation method further includes:

[0122] As Figure 3 shown, the dilution module includes a dilution module solid collection bin for collecting solid particles of diluted tail gas. The tail gas enters through the input port. A polyester needle felt 3 is provided in the spiral pipeline to remove solid particles in the diluted tail gas. The adsorbed solid particles fall into the passage through a 60° inverted funnel and enter the solid collection bin through the passage. Other adsorbents, including activated carbon, are added to the spiral gas transmission pipeline according to the actual situation of the tail gas. After the tail gas dilution is completed, a 60° inverted funnel is provided at the tail gas output end 5 to further adsorb solid particles in the tail gas. The spiral gas transmission pipeline is used to increase the turnover of the tail gas flow in the pipeline, thereby increasing the contact area between the tail gas and the inverted funnel and improving the dilution degree.

[0123] As Figure 4The topology diagram of the tail gas treatment is shown, in which the feedback pipeline is not depicted in the figure. Among them, PSG is a pulse signal generator, which outputs a pulse signal to activate the sleep of the tail gas treatment device and wake up the tail gas treatment device. The diluted tail gas input pipeline processes the tail gas. The unqualified tail gas predicted by the first tail gas monitoring unit also passes through the feedback pipeline into the tail gas treatment device for reprocessing of the tail gas. In order to prevent two types of tail gas treatment failures, two control valves are set at the unqualified tail gas input end to control the input of unqualified tail gas. Part of the unqualified tail gas flows into the tail gas treatment device, and part is stored in the unqualified tail gas redundancy device to prevent excessive gas.

[0124] Further, the diluted second tail gas input end 15 and the unqualified tail gas input end 16 are used to input the tail gas to be processed; PSG12 is a pulse signal generator, and the pneumatic three-way valve 11 is used to control the branched input of the tail gas;

[0125] If the main adsorption barrel 9 shows saturation or failure problems, the tail gas to be processed flows into the auxiliary adsorption barrel 13. At this time, the tail gas control valve 10 is closed, the tail gas output control valve 7 is closed, and the tail gas output 6 outputs the tail gas processed by the auxiliary adsorption barrel 13. The color indicator 8 of the main adsorption barrel 9 is used to display the progress of the tail gas treatment, and the exhaust indicator 14 is used to display the work of adsorbing the tail gas.

[0126] Embodiment III

[0127] As Figure 5 shown, a dry adsorption tail gas treatment method includes:

[0128] The tail gas enters the dry tail gas adsorption device through the intake module, and the tail gas is diluted through the dilution module;

[0129] The diluted tail gas enters the main adsorption barrel through the pipeline, and the main adsorption barrel adsorbs and processes the tail gas. If the color indicator of the main adsorption barrel shows that the adsorbent in the main adsorption barrel is saturated, the tail gas is transferred to the auxiliary adsorption barrel through the pneumatic three-way valve;

[0130] The second tail gas monitoring unit detects the tail gas of the gas flowing into the main adsorption barrel during the switching process of the pneumatic three-way valve. If the tail gas concentration exceeds the standard, the tail gas is re-passed into the auxiliary adsorption barrel through the main adsorption barrel feedback pipeline. If the tail gas concentration does not exceed the standard, the first tail gas monitoring unit monitors and predicts the tail gas treatment result in real time;

[0131] After the tail gas flows into the auxiliary adsorption barrel, the auxiliary adsorption barrel processes the tail gas. The processed tail gas flows into the first set of tail gas monitoring units. If the concentration of the processed tail gas is qualified, the tail gas treatment is completed. If the tail gas treatment is unqualified, the tail gas is re-adsorbed through the feedback pipeline.

[0132] Importantly, it should be noted that the construction and arrangement of the present application shown in multiple different exemplary embodiments are merely illustrative. Although only two embodiments are described in detail in this disclosure, those who refer to this disclosure should easily understand that many modifications are possible without substantially departing from the novel teachings and advantages of the subject matter described in this application. For example, changes in the dimensions, scales, structures, shapes and proportions of various elements, as well as parameter values (such as temperature, pressure, etc.), installation arrangements, use of materials, colors, orientations, etc. For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature, number or position of discrete elements may be altered or changed. Accordingly, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. Any "means-plus-function" clause is intended to cover the structures that perform the functions described herein, and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments without departing from the scope of the present invention. Accordingly, the present invention is not limited to specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0133] In addition, in order to provide a concise description of the exemplary embodiments, not all features of the actual embodiments may be described (i.e., those features that are not relevant to the currently contemplated best mode of carrying out the present invention, or those features that are not relevant to the implementation of the present invention).

[0134] It should be understood that in the development of any actual implementation, as in any engineering or design project, a large number of specific implementation decisions may be made. Such development efforts may be complex and time-consuming, but for those of ordinary skill in the art who benefit from this disclosure, without undue experimentation, the development efforts will be a routine task of design, manufacture and production.

[0135] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention may be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A dry adsorption tail gas treatment device, characterized in that: include: The dilution module is used to absorb the solid components in the exhaust gas and dilute the exhaust gas; The dilution module includes a solid dilution unit, a gas dilution unit and a gas delivery unit. The gas delivery unit is configured as a spiral gas delivery channel, and a porous plate is arranged on the wall of the spiral gas delivery pipe to uniformly disperse the solid diluent in the tail gas. The solid dilution unit adsorbs particulate solids in the tail gas, and filters the adsorbed solid particles by setting a solid particle filter, and the solid particle filter is provided with an inverted funnel-shaped porous channel, and the adsorbed solid particles are filtered and output to the dilution module solid collection bin through the funnel-shaped porous channel; The gas dilution unit dilutes the toxic gas in the tail gas, the toxic gas is stirred and diluted through the spiral gas delivery pipe, and the diluted gas is input into the main adsorption barrel; The gas delivery unit delivers gas; The main adsorption tank is used to receive the exhaust gas output by the dilution module and treat the exhaust gas by adsorbing the exhaust gas; The auxiliary adsorption tank is used to switch when the main adsorption tank fails, and perform redundant switching processing on the exhaust gas; The monitoring module is used to detect the exhaust gas output from the dilution module, the exhaust gas concentration output from the main adsorption barrel, and the exhaust gas concentration output from the gas outlet module; The gas outlet module is used to output the treated exhaust gas from the main adsorption barrel and the treated exhaust gas from the auxiliary adsorption barrel.

2. A dry adsorption tail gas treatment device according to claim 1, characterized in that: The main adsorption barrel is of cylindrical structure and filled with tail gas adsorbent. A color changing indicator is also arranged in the main adsorption barrel. When the adsorbent is close to saturation, the color of the indicator changes, and the tail gas adsorbent needs to be replaced. The color-changing indicator responds in color according to the saturation of the adsorbent and is arranged in the visualization unit. The color change of the color-changing indicator is mapped by the change of the saturation of the adsorbent, and visual feedback is performed through the visualization unit.

3. A dry adsorption tail gas treatment device according to claim 2, characterized in that: The auxiliary adsorption barrel is arranged on one side of the main adsorption barrel. If the adsorbent in the main adsorption barrel is saturated, the pneumatic three-way valve is switched, and the pneumatic three-way valve is automatically switched to the auxiliary adsorption barrel for tail gas adsorption; When the main adsorption barrel adsorbs exhaust gas, the valve core of the pneumatic three-way valve is in the closed position. After the exhaust gas flows out of the dilution module, it enters the main adsorption barrel through the outlet connected to the main adsorption barrel for adsorption treatment. The piston in the pneumatic three-way valve keeps the valve core stable. The auxiliary adsorption barrel is in standby status and does not participate in the exhaust gas treatment process.

4. A dry adsorption tail gas treatment device according to claim 3, characterized in that: When the adsorbent is close to saturation, the color indicator will show the color corresponding to saturation. After the color sensor on the main adsorption barrel detects the color change corresponding to saturation, it transmits the signal to the valve controller. After the valve controller receives the signal that the adsorbent in the main adsorption barrel is saturated, it outputs the pneumatic three-way valve control instruction. The control instruction is used to control the compressed air to enter the cylinder of the pneumatic actuator to push the piston to move. Pushed by compressed air, the piston drives the valve core to move within the valve body. The movement of the valve core changes the gas flow channel, so that the exhaust gas flows in from the air inlet and enters the auxiliary adsorption barrel through the air outlet connected to the auxiliary adsorption barrel for adsorption treatment. The main adsorption barrel is disconnected from the exhaust gas input pipeline and enters the adsorbent replacement stage.

5. A dry adsorption tail gas treatment device according to claim 4, characterized in that: The monitoring module includes a color monitoring unit, an exhaust gas monitoring unit and a dilution monitoring unit; The color monitoring unit is used to monitor the color of the color changing indicator; The exhaust gas monitoring unit includes a first exhaust gas monitoring unit and a second exhaust gas monitoring unit. The first exhaust gas monitoring unit is arranged at the output end of the exhaust gas treatment device, and the second exhaust gas monitoring unit is arranged at the tail end of the pneumatic three-way valve to monitor whether there is excessive exhaust gas entering the main adsorption barrel in a saturated state when the main adsorption barrel switches the auxiliary adsorption barrel. If excessive exhaust gas enters the main adsorption barrel in a saturated state, the charged gas is returned to the auxiliary adsorption barrel through the feedback pipeline for re-adsorption.

6. A dry adsorption tail gas treatment device according to claim 5, characterized in that: The first exhaust gas monitoring unit is used to monitor the exhaust gas concentration outputted from the output end of the exhaust gas treatment device in real time, and predict the exhaust gas concentration at the next moment by the exhaust gas concentration monitored in real time; The method for predicting the exhaust concentration at the next moment by monitoring the exhaust concentration in real time includes: Continuously collect exhaust gas concentration data from the output end of the exhaust gas treatment device, and record the corresponding timestamps and operating parameters at the same time. Clean the collected data to remove abnormal values ​​and missing values. Take the data of every n consecutive time points as a sample, and each sample contains the exhaust gas concentration sequence and operating parameters of the current timestamp; The exhaust gas concentration sequence is input into the input layer, a convolution layer is set to extract the features and time series of the exhaust gas concentration data, and the features and time series of the exhaust gas concentration data extracted by the convolution layer are input into the pooling layer, and the dimension of the exhaust gas concentration data is reduced by the pooling layer; Expand the feature vector of the exhaust gas concentration after convolution and pooling through the fully connected layer, input the expanded exhaust gas concentration feature vector into the neurons of the output layer, and predict the exhaust gas concentration at time t+1 by iterating the exhaust gas concentration from time t to time n, and perform error analysis on the output exhaust gas concentration at time t+1 through the error function. If the error value of the exhaust gas at time t+1 is large, set the training set to retrain the first exhaust gas monitoring unit. If the error value of the exhaust gas at time t+1 is small, input the real-time exhaust gas concentration data, and predict the exhaust gas at time t+1 through the first exhaust gas monitoring unit. If the first exhaust gas monitoring unit predicts that the exhaust gas concentration data at time t+1 is greater than the maximum exhaust gas concentration processing threshold, the exhaust gas is re-filtered through the feedback pipeline; if the exhaust gas concentration data is less than the maximum exhaust gas concentration processing threshold, the exhaust gas processing is completed.

7. A dry adsorption tail gas treatment device according to claim 6, characterized in that: The second exhaust gas monitoring unit records the first timestamp when the pneumatic three-way valve is started, and the exhaust gas data of the first timestamp is used as the first group of data, and the exhaust gas concentration passing through the pneumatic three-way valve is recorded as the last group of data by recording the complete opening of the pneumatic three-way valve in continuous timestamps, and obtains the exhaust gas data in continuous timestamps to determine whether the exhaust gas entering the main adsorption barrel exceeds the standard; If the exhaust gas entering the main adsorption barrel exceeds the standard, the exhaust gas in the main adsorption barrel will be passed through the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel to re-adsorb the exhaust gas. If the exhaust gas entering the main adsorption barrel does not exceed the standard, the gas in the main adsorption barrel will be discharged, and the exhaust gas treatment result will be monitored and predicted by the first exhaust gas monitoring unit.

8. A dry adsorption tail gas treatment method, implemented based on a dry adsorption tail gas treatment device according to any one of claims 1 to 7, characterized in that: include: The exhaust gas enters the dry exhaust gas adsorption device through the air intake module, and is diluted by the dilution module; The diluted tail gas enters the main adsorption barrel through the pipeline, and the main adsorption barrel adsorbs and treats the tail gas. If the color change indicator of the main adsorption barrel shows that the adsorbent of the main adsorption barrel is saturated, the tail gas is transferred to the auxiliary adsorption barrel through the pneumatic three-way valve; The second exhaust gas monitoring unit detects the exhaust gas flowing into the main adsorption barrel during the switching process of the pneumatic three-way valve. If the exhaust gas concentration exceeds the standard, the exhaust gas is re-introduced into the auxiliary adsorption barrel through the feedback pipe of the main adsorption barrel. If the exhaust gas concentration does not exceed the standard, the first exhaust gas monitoring unit monitors and predicts the exhaust gas treatment results in real time; After the exhaust gas flows into the auxiliary adsorption barrel, the exhaust gas is treated by the auxiliary adsorption barrel, and the treated exhaust gas flows into the first exhaust gas monitoring unit. If the concentration of the treated exhaust gas is qualified, the exhaust gas treatment is completed. If the exhaust gas treatment is unqualified, the exhaust gas is re-adsorbed through the feedback pipeline.

9. A dry adsorption tail gas treatment method according to claim 8, characterized in that: The first tail gas monitoring unit is used to monitor and predict whether the dry adsorption tail gas concentration and the concentration of qualified tail gas flowing into the main adsorption barrel meet the qualified concentration standard of tail gas treatment. If so, the treated gas is output; if not, the tail gas is re-adsorbed through the feedback pipeline; The second exhaust gas monitoring unit is used to monitor whether exhaust gas leakage occurs when the main adsorption barrel switches to the auxiliary adsorption barrel. If exhaust gas leakage occurs and the exhaust gas concentration in the gas in the main adsorption barrel is unqualified, the gas in the main adsorption barrel is re-adsorbed. If the exhaust gas concentration in the gas in the main adsorption barrel is qualified, the gas is output to the first exhaust gas monitoring unit.

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