A motion transmission valve device for a display etching equipment

Abstract

The present invention provides a motion transmission valve device for a display etching device, belonging to the technical field of transmission valves. It includes a transmission valve body, on which symmetrically distributed first valve ports and second valve ports are provided. It is characterized in that first driving devices are symmetrically installed outside the transmission valve body, and a first valve plate is sleeved in the transmission valve body, and a second valve plate is sleeved on one side surface of the first valve plate. By setting the first driving device and the first valve plate as well as the second driving device and the second valve plate, a split valve plate structure is formed by the first valve plate and the second valve plate in the transmission valve body. During the process of sealing the second valve port, the second valve plate moves in an L-shaped trajectory and will not generate friction with the inner side wall of the transmission valve body, thereby effectively controlling the impact during the movement of the second valve plate and avoiding the debris generated by the friction with the inner wall of the transmission valve body, thus preventing the pollution of the etching solution.

Description

Technical Field

[0001] The present invention relates to the technical field of transfer valves, and particularly to a motion transfer valve device for a display etching apparatus. Background Art

[0002] In the process of manufacturing a display, the etching process is a crucial step, which directly affects the accuracy and yield of the display. In the etching process of the display, it is necessary to transfer a substrate or a wafer into a process chamber for etching. The stability of the vacuum environment in the process chamber has an important influence on the etching accuracy and product quality. As a key sealing component of the process chamber, a motion transfer valve is usually assembled at the entrance and exit of the process chamber to isolate the external environment during the etching process and ensure that the process chamber maintains a stable vacuum state.

[0003] However, the following technical problems still exist in the existing transfer valves during long-term use. Traditional transfer valves mostly adopt a rigid drive structure. During the high-speed opening and closing process of the valve plate, a large impact force is generated due to inertia, which not only exacerbates the mechanical wear between the valve plate and the valve seat, but also generates particulate residues due to friction. These residues may contaminate the internal environment of the process chamber, resulting in an impact on the vacuum degree in the process chamber. Secondly, the sealing elements of the existing transfer valves are exposed to highly corrosive gases generated by the etching process for a long time, and are prone to hardening. At the same time, the impact load of the valve plate movement further accelerates the fatigue failure of the sealing structure, resulting in a significant reduction in the sealing life, frequent shutdowns for replacement, reduced equipment working efficiency, and increased maintenance costs. Therefore, the present application provides a motion transfer valve device for a display etching apparatus to meet the requirements. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a motion transfer valve device for a display etching apparatus to solve the problems of large impact during the movement of the valve plate of the existing transfer valve, easy generation of wear and residues, affecting the process vacuum degree, and fast aging speed and high replacement frequency of the sealing structure.

[0005] To solve the above technical problems, the present invention provides the following technical solutions:

[0006] A motion transmission valve device for a display etching device, comprising a transmission valve body, on which a first valve port and a second valve port are symmetrically distributed. A first driving device is symmetrically installed outside the transmission valve body, and a first valve plate is sleeved in the transmission valve body. A second valve plate is sleeved on one side of the first valve plate, and a second driving device is symmetrically installed on the other side of the first valve plate. The first valve plate is fixedly connected to the driving rod of the first driving device; a sealing assembly for sealing between the second valve plate and the second valve port, and the sealing assembly is respectively connected to the second valve plate and the transmission valve body; a strengthening assembly for improving the structural strength of the sealing assembly, and the strengthening assembly is connected to the sealing assembly; an installation assembly for fixing the relative positions between the second valve plate and the sealing assembly, and the installation assembly is respectively connected to the second valve plate and the strengthening assembly.

[0007] Optionally, an electromagnetic valve located between the first driving devices is fixedly installed outside the transmission valve body, and the electromagnetic valve is connected to both the first driving device and the second driving device through pipelines.

[0008] Optionally, a cavity for accommodating the second driving device, the first valve plate and the second valve plate is provided in the transmission valve body. The first valve port and the second valve port are both connected to the cavity, and a guiding end adapted to the size of the second valve port is provided outside the second valve plate.

[0009] Optionally, the positions of the second driving devices correspond one by one to the positions of the first driving devices, and the driving rods of the second driving devices are perpendicular to the driving rods of the first driving devices.

[0010] Optionally, a receiving groove adapted to the size of the second valve plate is provided outside the first valve plate, and the end of the driving rod of the second driving device extends into the receiving groove and is fixedly connected to the second valve plate through a special pressing rod.

[0011] Optionally, the sealing assembly includes a first sealing strip sleeved outside the second valve plate and a sealing groove provided on the inner side wall of the transmission valve body. The shape of the sealing groove is adapted to the shape of the first sealing strip, and a second sealing strip is fixedly connected to the outside of the sealing groove.

[0012] Optionally, symmetrically distributed second locking edges are provided at one end of the first sealing strip close to the second valve plate, and an installation groove corresponding to the position of the first sealing strip is provided outside the second valve plate. The shape of the installation groove near the opening is adapted to the shape of the second locking edge.

[0013] Optionally, a first locking edge with symmetric distribution is provided at one end of the first sealing strip away from the second valve plate. A first deformation area is formed in the middle of the first locking edge, and an avoidance groove adapted to the shape of the first locking edge is formed outside the first sealing strip.

[0014] Optionally, the reinforcing component includes an elastic skeleton sleeved in the first sealing strip. An elastic end in an umbrella shape is fixedly connected to the end of the elastic skeleton. The position of the elastic end corresponds to the position of the first locking edge. A disconnection slit is formed at the corner of the first sealing strip for the elastic skeleton and the elastic end.

[0015] Optionally, the installation component includes a first limiting piece fixedly connected in the installation groove and a second limiting piece fixedly connected to the outside of the elastic skeleton. The end of the second limiting piece is bent in a C shape to form a connecting end, and a second deformation area is formed on the second limiting piece. The shape of the end of the first limiting piece is adapted to the shape of the connecting end, and a third deformation area is formed on the first limiting piece.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects:

[0017] In the above solution, by providing the first driving device and the first valve plate, as well as the second driving device and the second valve plate, a split valve plate structure is formed by the first valve plate and the second valve plate in the transmission valve body. During the process of sealing the second valve port, the second valve plate moves in an L-shaped trajectory and does not generate friction with the inner wall of the transmission valve body, thereby effectively controlling the impact during the movement of the second valve plate, avoiding debris generated by friction with the inner wall of the transmission valve body, and preventing the influence on the vacuum degree of the process chamber.

[0018] By providing the sealing component, during the process of the second valve plate closing the second valve port, the first sealing strip in the sealing component can contact and cooperate with the second sealing strip, effectively closing the gap between the second valve plate and the inner wall of the transmission valve body. When the process chamber is in a vacuum environment, a pressure difference can be formed under the action of the external air pressure, thereby forming the self-locking of the second valve plate. Secondly, the sealing component will not be excessively squeezed by the second valve plate, ensuring the service life of the sealing component, and thus ensuring the sealing effect of the transmission valve device in the closed state.

[0019] By setting up a strengthening component, the overall structure of the first sealing strip is further strengthened. The shape of the first sealing strip is supported by the strengthening component, and the elasticity of the first locking edge is enhanced through the elastic end in the strengthening component. Even after the first sealing strip ages, the elasticity of the elastic end can ensure the deformation and the reset ability after deformation of the first locking edge, guarantee the sealing effect of the sealing component, reduce the maintenance and replacement frequency of the sealing component, reduce the workload of the staff, and control the usage cost of the transmission valve.

[0020] By setting up a strengthening component and a mounting component, different from the sealing structure of the traditional transmission valve, which only relies on the connection method between the sealing structure body and the valve plate, a mounting component that can cooperate is arranged on the strengthening component and inside the mounting groove, further strengthening the stability after the connection between the sealing component and the second valve plate, and the operation is simple and convenient. The structures of the sealing component, the strengthening component, and the mounting component are interrelated and complementary in function, improving the technical solution of the entire transmission valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings incorporated herein and constituting a part of the specification illustrate embodiments of the present invention and, together with the specification, are further used to explain the principles of the present invention and enable those skilled in the relevant art to implement and use the present invention.

[0022] Figure 1 It is a three-dimensional structural schematic diagram of a motion transmission valve device for a display etching equipment;

[0023] Figure 2 It is a three-dimensional structural schematic diagram inside the transmission valve body;

[0024] Figure 3 It is a schematic diagram of the mating structure of the first valve plate, the second valve plate, and the second valve port;

[0025] Figure 4 It is Figure 3 The enlarged structural schematic diagram at A in

[0026] Figure 5 It is a partial sectional structural schematic diagram of the transmission valve body;

[0027] Figure 6 It is Figure 5 The enlarged structural schematic diagram at B in

[0028] Figure 7 It is a three-dimensional structural schematic diagram of the second valve plate;

[0029] Figure 8 It is an exploded structural schematic diagram of the first valve plate, the second valve plate, the elastic skeleton, and the first sealing strip;

[0030] Figure 9 It is Figure 8Schematic diagram of the enlarged structure at position C in [device name];

[0031] Figure 10 is Figure 8 Schematic diagram of the enlarged structure at position D in [device name];

[0032] Figure 11 Schematic diagram of the mating structure of the first sealing strip and the elastic skeleton;

[0033] Figure 12 Schematic diagram of the mating structure of the first sealing strip, the elastic skeleton and the installation groove;

[0034] Figure 13 is Figure 12 Schematic diagram of the enlarged structure at position E in [device name].

[0035] Reference numerals:

[0036] 1. Transmission valve body; 2. First driving device; 3. Second driving device; 4. Solenoid valve; 5. First valve plate; 6. First valve port; 7. Second valve port; 8. Second valve plate; 9. Guide end; 10. Special pressure rod; 11. First sealing strip; 12. Sealing groove; 13. Second sealing strip; 14. Elastic skeleton; 15. Installation groove; 16. First limiting piece; 17. Elastic end; 18. Disconnection seam; 19. First locking edge; 20. First deformation zone; 21. Second locking edge; 22. Avoidance groove; 23. Second limiting piece; 24. Connection end; 25. Second deformation zone; 26. Third deformation zone; 27. Storage groove.

[0037] As shown in the figure, in order to clearly show the structure of the embodiments of the present invention, specific structures and devices are marked in the figure. However, this is only for illustrative purposes and is not intended to limit the present invention to this specific structure, device and environment. Those of ordinary skill in the art can adjust or modify these devices and environments according to specific needs. Detailed implementation manners

[0038] The following describes in detail a motion transmission valve device for a display etching device provided by the present invention with reference to the accompanying drawings and specific embodiments. At the same time, it should be noted here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments. For some well-known technologies, those skilled in the art can also adopt other alternative methods for implementation; moreover, the accompanying drawings are only for more specific description of the embodiments and are not intended to specifically limit the present invention.

[0039] It should be noted that in the specification, references to "one embodiment", "an embodiment", "exemplary embodiments", "some embodiments", etc. indicate that the described embodiments may include a particular feature, structure, or characteristic, but not necessarily every embodiment includes that particular feature, structure, or characteristic. Additionally, when a particular feature, structure, or characteristic is described in connection with an embodiment, implementing such feature, structure, or characteristic in connection with other embodiments (whether or not explicitly described) should be within the knowledge of those skilled in the relevant art.

[0040] Generally, terms can be understood, at least in part, from their use in context. For example, depending at least in part on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in a singular sense, or can be used to describe a combination of features, structures, or characteristics in a plural sense. Additionally, the term "based on" can be understood to not necessarily be intended to convey a set of exclusive factors, but rather, depending at least in part on the context, can alternatively allow for the existence of other factors that are not necessarily explicitly described.

[0041] It can be understood that the meanings of "on", "above", and "over" in the present invention should be construed in the broadest manner such that "on" not only means "directly on" something, but also includes the meaning of being "on" something with intervening features or layers therebetween, and "above" or "over" not only means "above" or "over" something, but also can include the meaning of being "above" or "over" something with no intervening features or layers therebetween.

[0042] Furthermore, spatial relative terms such as "under", "below", "lower", "above", "upper", etc. are used herein for convenience of description to describe the relationship of one element or feature to another or other elements or features, as shown in the figures. The spatial relative terms are intended to cover different orientations in the use or operation of the device in addition to the orientation depicted in the figures. The device may be otherwise oriented, and the spatial relative descriptors used herein may be interpreted accordingly.

[0043] As Figures 1 to 13As shown, an embodiment of the present invention provides a motion transmission valve device for a display etching equipment, which includes a transmission valve body 1. Symmetrically distributed first valve port 6 and second valve port 7 are provided on the transmission valve body 1. First driving devices 2 are symmetrically installed outside the transmission valve body 1. A first valve plate 5 is sleeved in the transmission valve body 1. A second valve plate 8 is sleeved on one side surface of the first valve plate 5. Second driving devices 3 are symmetrically installed on the other side surface of the first valve plate 5. The first valve plate 5 is fixedly connected to the driving rod of the first driving device 2. An electromagnetic valve 4 located between the first driving devices 2 is fixedly installed outside the transmission valve body 1. The electromagnetic valve 4 is connected to the first driving devices 2 and the second driving devices 3 through pipelines. A cavity for accommodating the second driving devices 3, the first valve plate 5 and the second valve plate 8 is provided in the transmission valve body 1. The first valve port 6 and the second valve port 7 are both connected to the cavity. A guiding end 9 adapted to the size of the second valve port 7 is provided outside the second valve plate 8. The setting of the guiding end 9 can provide a certain limiting and guiding effect for the second valve plate 8 during the process of the second valve plate 8 approaching the second valve port 7. An inclined surface is provided on the surface of the guiding end 9 close to the second valve port 7, so that the area value of the surface of the guiding end 9 close to the second valve port 7 is smaller than the opening size of the second valve port 7, enabling the guiding end 9 to more easily enter the second valve port 7, facilitating the second valve plate 8 to approach the second valve port 7 to close the second valve port 7. The first valve port 6 and the second valve port 7 provided on the transmission valve body 1 and the cavity provided in the transmission valve body 1. When the second valve port 7 on the transmission valve body 1 is in an open state, the internal cavity can be connected to the first valve port 6 and the second valve port 7, forming a channel for the substrate or wafer to be etched to pass through. Then, by controlling the opening and closing of the second valve port 7 on the transmission valve body 1, the etching process is controlled to ensure that the relevant staff can control the etching process.

[0044] The positions of the second driving device 3 correspond one-to-one with the positions of the first driving device 2, and the driving rods of the second driving device 3 are perpendicular to each other. An accommodation groove 27 adapted to the size of the second valve plate 8 is provided on the outside of the first valve plate 5. The accommodation groove 27 on the first valve plate 5 is used to accommodate the second valve plate 8 and the guiding end 9. When the second valve port 7 is in the open state, the second valve plate 8 and the guiding end 9 are completely accommodated in the accommodation groove 27. In this state, the second driving device 3 is fully retracted, the end face of the guiding end 9 is flush with the end face of the first valve plate 5, and the end of the driving rod of the second driving device 3 extends into the accommodation groove 27 and is fixedly connected to the second valve plate 8 through a special pressing rod 10. The setting of the special pressing rod 10 can balance the pressure exerted by the second driving device 3 on the second valve plate 8, keep the forces on each part of the second valve plate 8 uniform, avoid a large gap between a certain part of the second valve plate 8 and the transmission valve body 1 after closing, and ensure the sealing effect when the second valve plate 8 is in the closed state. When the first driving device 2 works, it can drive the first valve plate 5 to move inside the transmission valve body 1 through its driving rod. When the first driving device 2 works, it can drive the first valve plate 5 to expand and contract inside the cavity on the inner side of the transmission valve body 1 through its driving rod. During the displacement of the first valve plate 5, the second driving device 3 is not in the working state, and the second valve plate 8 and the guiding end 9 are accommodated in the accommodation groove 27 on the first valve plate 5, while a gap is reserved between the first valve plate 5 and the inner side wall of the cavity in the transmission valve body 1. Thus, during the process of the first driving device 2 driving the first valve plate 5 to displace, the first valve plate 5 and its external structural parts will not rub against the inner side wall of the transmission valve body 1. When the first valve plate 5 drives the second valve plate 8 to move to a position corresponding to the second valve port 7, the second driving device 3 then works and drives the second valve plate 8 to move in a direction perpendicular to the movement direction of the first valve plate 5 through its driving rod, so that the second valve plate 8 and the guiding end 9 approach the second valve port 7 until the second valve plate 8 and the guiding end 9 close the second valve port 7. During the whole process, the driving rods of the first driving device 2 and the second driving device 3 are perpendicular to each other. Therefore, the movement directions of the first valve plate 5 and the second valve plate 8 are also perpendicular to each other, finally forming an L-shaped movement trajectory of the second valve plate 8, ensuring the closing action of the second valve port 7 while avoiding debris generated by friction between the structural parts in contact with each other in the transmission valve body 1, and effectively preventing the vacuum degree in the process chamber from being affected and then affecting the etching effect.

[0045] A sealing assembly is used for sealing between the second valve plate 8 and the second valve port 7. The sealing assembly is respectively connected between the second valve plate 8 and the transfer valve body 1. The setting of the sealing assembly can ensure the sealed state after the second valve port 7 is closed by the second valve plate 8, effectively forming a sealing effect on the process chamber, and the sealing assembly will not be overly squeezed during the sealing process, making the service life of the sealing assembly longer; A strengthening assembly is used to improve the structural strength of the sealing assembly. The strengthening assembly is connected to the sealing assembly. The setting of the strengthening assembly can strengthen the overall structure of the sealing assembly, and when the sealing assembly ages, the strengthening assembly can still ensure its deformation ability and the sealing effect, so as to meet the working requirements of the transfer valve device and reduce the maintenance frequency of the transfer valve device; A mounting assembly is used to fix the relative position between the second valve plate 8 and the sealing assembly. The mounting assembly is respectively connected to the second valve plate 8 and the strengthening assembly. The setting of the mounting assembly makes the disassembly and assembly operation between the sealing assembly and the second valve plate 8 simple and convenient, fast during maintenance and replacement, and stable and reliable after installation, without overly affecting the working efficiency of the transfer valve device. The structures of the sealing assembly, the strengthening assembly, and the mounting assembly are interrelated and cooperate functionally, complementing each other to jointly improve the use effect of the entire transfer valve.

[0046] In this embodiment, as Figures 3 to 11As shown in the figure, the sealing assembly includes a first sealing strip 11 sleeved outside the second valve plate 8 and a sealing groove 12 opened on the inner side wall of the transmission valve body 1. The shape of the sealing groove 12 is adapted to the shape of the first sealing strip 11, and a second sealing strip 13 is fixedly connected to the outside of the sealing groove 12. A symmetrically distributed first locking edge 19 is provided at one end of the first sealing strip 11 away from the second valve plate 8. A first deformation area 20 is opened in the middle of the first locking edge 19. An avoidance groove 22 adapted to the shape of the first locking edge 19 is opened outside the first sealing strip 11. The opening of the first deformation area 20 makes the thickness value of the first locking edge 19 thinner and the strength weaker at the first deformation area 20. Consequently, during the process of the first sealing strip 11 being inserted into the sealing groove 12 as a whole, the outside of the first locking edge 19 will be subjected to the extrusion pressure from the inner side wall of the transmission valve body 1. Then, the first locking edge 19 bends and deforms at the first deformation area 20, reducing the area value of one end of the first sealing strip 11 close to the sealing groove 12, facilitating the insertion of the first sealing strip 11 into the sealing groove 12. During this process, the avoidance groove 22 on the first sealing strip 11 also causes a certain depression on the outside of the first sealing strip 11. During the process of the first locking edge 19 being extruded and deformed, the first locking edge 19 can bend towards the avoidance groove 22 outside the first sealing strip 11 and fit at the avoidance groove 22. Through the opening of the avoidance groove 22, sufficient space is provided for the deformation of the first locking edge 19, facilitating the operation of inserting the first sealing strip 11 into the sealing groove 12. When the first sealing strip 11 is completely inserted into the sealing groove 12, the second valve plate 8 also fits with the inner side wall of the transmission valve body 1 and exerts extrusion on the second sealing strip 13 outside the sealing groove 12. The second sealing strip 13 is a hollow tubular structure. After being extruded by the second valve plate 8, it will undergo corresponding deformation and squeeze towards the position where the first sealing strip 11 is located. At this time, the first sealing strip 11 has completely entered the sealing groove 12, and the first locking edge 19 also restores its deformation in the sealing groove 12. The depression formed by the avoidance groove 22 outside the first sealing strip 11 can also cooperate with the second sealing strip 13 and fit with the deformed second sealing strip 13. Under the extrusion action between the second valve plate 8 and the inner side wall of the transmission valve body 1, the first sealing strip 11, the sealing groove 12, and the second sealing strip 13 cooperate to seal the gap between the second valve plate 8 and the inner side wall of the transmission valve body 1. The sealing effect is stable and reliable, and the sealing structure will not be overly squeezed to accelerate the damage of the sealing structure, thus ensuring the sealing effect after the second valve plate 8 closes the second valve port 7. When the process chamber is in a vacuum environment, a pressure difference can be formed between the inside and outside of the process chamber under the action of the external air pressure, thereby cooperating with the deformation of the first sealing strip 11 and the second sealing strip 13 to form the self-locking of the second valve plate 8, further ensuring the sealing effect of the process chamber.

[0047] One end of the first sealing strip 11 close to the second valve plate 8 is provided with symmetrically distributed second locking edges 21. An installation groove 15 corresponding to the position of the first sealing strip 11 is opened outside the second valve plate 8. The shape of the installation groove 15 near the opening is adapted to the shape of the second locking edge 21. The first sealing strip 11 is sleeved in the installation groove 15 on the second valve plate 8. The first sealing strip 11 and the installation groove 15 are connected through the second locking edge 21. The first sealing strip 11 is made of rubber material and has a certain deformation ability. When the second locking edge 21 on the first sealing strip 11 is extruded, the second locking edge 21 can be deformed, and then the first sealing strip 11 can enter the installation groove 15. After the first sealing strip 11 enters the installation groove 15, the second locking edge 21 relies on its own elasticity to restore the deformation, so as to form a preliminary connection relationship between the second valve plate 8 and the first sealing strip 11.

[0048] In this embodiment, as Figures 8 to 12 shown, the strengthening component includes an elastic skeleton 14 sleeved in the first sealing strip 11. The end of the elastic skeleton 14 is fixedly connected with an umbrella-shaped elastic end 17. The position of the elastic end 17 corresponds to the position of the first locking edge 19. When the first locking edge 19 undergoes a bending deformation, it will drive the elastic end 17 to deform, and accumulate elastic potential energy by relying on the deformation of the elastic end 17. After the external force is removed, the elastic end 17 and the first locking edge 19 rely on their own elastic forces to recover, ensuring the sealing effect formed by the cooperation of the first sealing strip 11, the sealing groove 12 and the second sealing strip 13. Disconnection slits 18 are opened at the bending corners of the first sealing strip 11 for the elastic skeleton 14 and the elastic end 17. The disconnection slits 18 opened on the elastic skeleton 14 and the elastic end 17 disconnect the elastic skeleton 14 and the elastic end 17 in the first sealing strip 11, making the end of the elastic end 17 in an open structure, avoiding the elastic end 17 being unable to follow the deformation of the first locking edge 19 due to its own structure. The structure shape formed by the elastic skeleton 14 and the elastic end 17 is similar to the overall shape of the first sealing strip 11. The elastic skeleton 14 and the elastic end 17 are wrapped inside the first sealing strip 11, jointly providing support for the first sealing strip 11 and maintaining the structural shape of the first sealing strip 11. At the same time, the elastic skeleton 14 and the elastic end 17 are made of plastic with higher strength than the rubber material of the first sealing strip 11, having stronger support ability and recovery ability after deformation. Even if the first sealing strip 11 shows a certain degree of aging after being used for a period of time due to its own material problems, the elastic skeleton 14 and the elastic end 17 inside the first sealing strip 11 can still maintain the shape of the first sealing strip 11. Secondly, the elastic end 17 can also rely on its good elasticity to maintain the deformation and recovery ability of the first locking edge 19 on the first sealing strip 11.

[0049] In this embodiment, as Figures 8 to 13As shown, the installation component includes a first limiting piece 16 fixedly connected in the installation groove 15 and a second limiting piece 23 fixedly connected to the outside of the elastic skeleton 14. The end of the second limiting piece 23 is bent in a C shape to form a connecting end 24, and a second deformation area 25 is provided on the second limiting piece 23. The shape of the end of the first limiting piece 16 is adapted to the shape of the connecting end 24, and a third deformation area 26 is provided on the first limiting piece 16. The second limiting pieces 23 are distributed in an inverted V shape outside the elastic skeleton 14, and the first limiting pieces 16 are also distributed in an inverted V shape inside the installation groove 15. Moreover, the distance between the second limiting pieces 23 is adapted to the distance between the first limiting pieces 16. When the first sealing strip 11 is in a connection and fixation state with the second valve plate 8, the connecting end 24 is located between the first limiting pieces 16 and is in a hooked state with the first limiting pieces 16. The provision of the second deformation area 25 and the third deformation area 26 makes the structures of the second limiting piece 23 and the first limiting piece 16 at the second deformation area 25 and the third deformation area 26 respectively become thinner and weaker in strength, and can deform more easily under the action of an external force. Then, the deformation of the second limiting piece 23 and the first limiting piece 16 is guided through the provision of the second deformation area 25 and the third deformation area 26. The setting of the installation component further strengthens the connection relationship between the first sealing strip 11 and the installation groove 15 through the elastic skeleton 14 and the second limiting piece 23. While the first sealing strip 11 forms a preliminary connection relationship with the installation groove 15 by relying on the second locking edge 21, the second limiting piece 23 on the elastic skeleton 14 also follows the first sealing strip 11 into the installation groove 15. During the process of entering the installation groove 15, the outside of the connecting end 24 on the second limiting piece 23 contacts the outside of the first limiting piece 16, and the two squeeze each other, causing the second limiting piece 23 and the first limiting piece 16 to bend and deform at the second deformation area 25 and the third deformation area 26 respectively until the second locking edge 21 on the first sealing strip 11 is fixedly connected to the installation groove 15. At the same time, the connecting end 24 on the second limiting piece 23 is also hooked with the first limiting piece 16. Cooperating with the preliminary connection state between the second locking edge 21 and the installation groove 15, the second limiting piece 23, the connecting end 24, and the first limiting piece 16 are all made of elastic plastic material. Compared with the rubber material of the first sealing strip 11, they have stronger stability after connection and fixation. Therefore, they can strengthen the connection relationship between the second valve plate 8 and the first sealing strip 11. When the first sealing strip 11 needs to be disassembled, pulling the first sealing strip 11 in the direction away from the second valve plate 8 can drive the second limiting piece 23 and the first limiting piece 16 to deform again until the connecting end 24 is separated from the first limiting piece 16 and the second locking edge 21 is separated from the installation groove 15, so that the disassembly and assembly operations of the entire first sealing strip 11 are very convenient and easy for the staff to maintain and replace.

[0050] The present invention covers any alternatives, modifications, equivalent methods, and solutions made within the spirit and scope of the present invention. To enable the public to have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention. However, those skilled in the art can fully understand the present invention even without the description of these details. In addition, well-known methods, processes, procedures, components, and circuits are not described in detail to avoid unnecessary confusion to the essence of the present invention.

[0051] The above description is only a preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A motion transmission valve device for a display etching equipment, comprising a transmission valve body, wherein a first valve port and a second valve port which are symmetrically distributed are arranged on the transmission valve body, and it is characterized in that A first driving device is symmetrically installed on the outside of the transmission valve body, and a first valve plate is sleeved in the transmission valve body. A second valve plate is sleeved on one side of the first valve plate, and a second driving device is symmetrically installed on the other side of the first valve plate. The first valve plate is fixedly connected to the driving rod of the first driving device; A sealing assembly for sealing between the second valve plate and the second valve port, and the sealing assembly is respectively connected between the second valve plate and the transmission valve body; A strengthening assembly for improving the structural strength of the sealing assembly, and the strengthening assembly is connected to the sealing assembly; An installation assembly for fixing the relative position between the second valve plate and the sealing assembly, and the installation assembly is respectively connected between the second valve plate and the strengthening assembly; The sealing assembly includes a first sealing strip sleeved outside the second valve plate and a sealing groove opened on the inner side wall of the transmission valve body. The shape of the sealing groove is adapted to the shape of the first sealing strip, and a second sealing strip is fixedly connected to the outside of the sealing groove; One end of the first sealing strip close to the second valve plate is provided with symmetrically distributed second locking edges. An installation groove corresponding to the position of the first sealing strip is opened on the outside of the second valve plate. The shape of the installation groove near the opening is adapted to the shape of the second locking edges; One end of the first sealing strip away from the second valve plate is provided with symmetrically distributed first locking edges. A first deformation area is opened in the middle of the first locking edges, and an avoidance groove adapted to the shape of the first locking edges is opened on the outside of the first sealing strip; The strengthening assembly includes an elastic skeleton sleeved in the first sealing strip. The end of the elastic skeleton is fixedly connected with an umbrella-shaped elastic end. The position of the elastic end corresponds to the position of the first locking edges. The elastic skeleton and the elastic end are provided with a disconnection seam at the corner of the first sealing strip; The installation assembly includes a first limiting piece fixedly connected in the installation groove and a second limiting piece fixedly connected to the outside of the elastic skeleton. The end of the second limiting piece is bent in a C shape to form a connecting end, and a second deformation area is opened on the second limiting piece. The shape of the end of the first limiting piece is adapted to the shape of the connecting end, and a third deformation area is opened on the first limiting piece; 2. The motion transmission valve device for a display etching apparatus according to claim 1, wherein An electromagnetic valve is fixedly installed on the outside of the transmission valve body between the first driving devices. The electromagnetic valve is communicated with the first driving device and the second driving device through pipelines; 3. The motion transmission valve device for a display etching apparatus according to claim 2, wherein, A cavity for accommodating the second driving device, the first valve plate and the second valve plate is opened in the transmission valve body. The first valve port and the second valve port are both communicated with the cavity. A guiding end adapted to the size of the second valve port is arranged on the outside of the second valve plate; 4. The motion transmission valve device for a display etching apparatus according to claim 3, characterized in that, The positions of the second driving devices correspond to the positions of the first driving devices one by one, and the driving rods of the second driving devices are perpendicular to each other; 5. The movement transmission valve device for a display etching apparatus according to claim 1, wherein, A receiving groove adapted to the size of the second valve plate is formed on the outside of the first valve plate, and the end of the driving rod of the second driving device extends into the receiving groove and is fixedly connected to the second valve plate through a special pressing rod.

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