Tunable frequency source chip

Abstract

The invention provides a tunable frequency source chip, and relates to the technical field of wireless communication. The tunable frequency source chip comprises a wavelength division multiplexer which is used for combining a plurality of input optical carriers with different wavelengths and then outputting a first light beam; a plurality of cascaded micro-ring resonators, each of the at least two micro-ring resonators selectively receives the optical carrier wave of the corresponding wavelength based on the respective resonant wavelength by regulating and controlling the resonant wavelengths corresponding to the at least two micro-ring resonators in the plurality of cascaded micro-ring resonators, and outputs the at least two optical carrier waves selectively received; wherein the number of the at least two micro-ring resonators is an even number; the at least two micro-ring resonators respectively correspond to different resonant wavelengths; and the processing module is used for carrying out beam combination and beat frequency processing on every two optical carriers in the at least two optical carriers and outputting at least one terahertz signal.

Description

Technical Field

[0001] The present disclosure relates to the technical field of wireless communications, and more particularly, to a tunable frequency source chip. Background Art

[0002] With the rapid development of the Internet of Things and artificial intelligence, global communication needs are growing at an exponential rate, driving wireless communication technology towards higher transmission rates. In order to meet this rising demand, the operating frequency of electromagnetic waves has also increased accordingly. Terahertz (THz) communication has become a key development direction for future communication technology with its significant advantages, such as huge bandwidth, low transmission loss, and seamless integration with optical fiber networks. The THz band not only provides low photon energy characteristics, but also has excellent penetration and high resolution. These characteristics make the development of high-quality THz sources a research hotspot. Especially in the fields of high-speed data transmission and precision detection, THz technology has great application potential.

[0003] At present, an important method for generating high-quality terahertz signals is to use microwave photonic technology to convert laser signals into terahertz signals. This method has shown broad application prospects due to its advantages such as low transmission loss, strong anti-electromagnetic interference ability and large working bandwidth. However, existing terahertz signal generation schemes mostly rely on components such as filters, polarization controllers and polarizers to obtain specific optical signals and perform beat frequency processing with external input signals to finally output terahertz signals. This system has a complex structure, large size and high power consumption, which poses a significant obstacle to the further development of terahertz imaging or communication systems. Summary of the invention

[0004] In view of this, the present disclosure provides a tunable frequency source chip including: a wavelength division multiplexer, used to combine multiple input optical carriers of different wavelengths and output a first light beam; multiple cascaded microring resonators, by adjusting the resonant wavelengths corresponding to each of at least two microring resonators in the multiple cascaded microring resonators, so that each of the at least two microring resonators selects to receive an optical carrier of a corresponding wavelength based on its own resonant wavelength, and outputs the at least two optical carriers selected to be received; wherein the number of the at least two microring resonators is an even number; the resonant wavelengths corresponding to each of the at least two microring resonators are different; a processing module, used to combine and beat frequency process each two optical carriers in the at least two optical carriers, and output at least one terahertz signal.

[0005] According to an embodiment of the present disclosure, each of the at least two microring resonators is adjacent to one of the at least two microring resonators.

[0006] According to an embodiment of the present disclosure, a processing module includes a beam combiner array and a detector array; a beam combiner in the beam combiner array is connected to two adjacent microring resonators in a plurality of cascaded microring resonators, and at least one beam combiner is used to beam combine two adjacent optical carriers in at least two corresponding input optical carriers to output at least one corresponding second light beam; a detector in the detector array is connected to a beam combiner in the beam combiner array, and at least one detector is used to perform beat frequency processing on at least one second light beam in the corresponding input to output at least one terahertz signal.

[0007] According to an embodiment of the present disclosure, regulating the resonant wavelength corresponding to each of at least two microring resonators in a plurality of cascaded microring resonators includes: determining at least two optical carriers from a plurality of optical carriers with different wavelengths as at least two target optical carriers; determining the resonant wavelength corresponding to each of the at least two microring resonators according to the wavelength corresponding to each of the at least two target optical carriers; and regulating the resonant wavelength corresponding to each of the at least two microring resonators by regulating the refractive index corresponding to each of the at least two microring resonators.

[0008] According to an embodiment of the present disclosure, the wavelength division multiplexer includes: multiple first input ports, each input port is used to input an optical carrier of a corresponding wavelength; wherein the frequency difference between the optical carriers corresponding to the inputs of two adjacent first input ports is 200 GHz; and a first output port is used to output a first light beam.

[0009] According to an embodiment of the present disclosure, a plurality of cascaded microring resonators include: a second input end, connected to the first output end, for inputting a first light beam; a plurality of second output ends, each adjacent two second output ends of the plurality of second output ends are correspondingly connected to a beam combiner, and the second output end is used to output a corresponding target optical carrier.

[0010] According to an embodiment of the present disclosure, each microring resonator in a plurality of cascaded microring resonators includes: a heating electrode for adjusting the refractive index of the microring resonator.

[0011] According to an embodiment of the present disclosure, each microring resonator is an upload-download type microring resonator.

[0012] According to an embodiment of the present disclosure, when the number of optical carriers of multiple different wavelengths, the number of multiple cascaded microring resonators is 2N, the number of combiner arrays and the number of detector arrays are N, the number of output terahertz signals is 1~N, where N≥1.

[0013] According to an embodiment of the present disclosure, it also includes: a stacked silicon substrate, a silicon dioxide lower cladding, a silicon core layer and a silicon dioxide upper cladding; a wavelength division multiplexer, a plurality of cascaded microring resonators, a combiner array and a detector array are arranged on the silicon core layer.

[0014] The tunable frequency source chip provided according to the embodiments of the present disclosure has at least the following beneficial effects:

[0015] By setting up multiple cascaded microring resonators to tune the resonant wavelength of each microring resonator, the tuning of the optical carrier of a preset frequency can be achieved, thereby making the terahertz signal tunable in frequency; at the same time, the tunable frequency source chip of this embodiment has a simple structure, small volume and low power consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and other objects, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0017] Figure 1 The schematic diagram of the structure of the tunable frequency source chip of the embodiment of the present disclosure is shown;

[0018] Figure 2 The schematic diagram of the structure of the microring resonator according to the embodiment of the present disclosure is shown;

[0019] Figure 3 The structural diagram of a tunable terahertz frequency source chip according to another embodiment of the present disclosure is schematically shown. DETAILED DESCRIPTION

[0020] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known systems and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0021] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise", "include", etc. used herein indicate the existence of features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0022] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0023] When using expressions such as "at least one of A, B, and C, etc.", they should generally be interpreted according to the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0024] Figure 1 The structural diagram of the tunable frequency source chip of the embodiment of the present disclosure is schematically shown.

[0025] like Figure 1 As shown, the present disclosure provides a tunable frequency source chip including: a wavelength division multiplexer 301, a plurality of cascaded micro-ring resonators 302 and a processing module.

[0026] The wavelength division multiplexer 301 is used to combine multiple input optical carriers with different wavelengths and output a first light beam.

[0027] The multiple cascaded microring resonators 302 can adjust the resonant wavelengths corresponding to at least two microring resonators in the multiple cascaded microring resonators 302, so that each of the at least two microring resonators can select to receive an optical carrier of a corresponding wavelength based on its own resonant wavelength, and output the at least two optical carriers selected to be received.

[0028] The number of at least two microring resonators is an even number; and the resonance wavelengths corresponding to the at least two microring resonators are different.

[0029] The processing module is used to combine and beat frequency process every two optical carriers of at least two optical carriers, and output at least one terahertz signal.

[0030] In the embodiments of the present disclosure, a design combining a wavelength division multiplexer and a plurality of cascaded microring resonators is adopted, which reduces the number of complex components required in a traditional system and makes the structure of the entire system simpler.

[0031] The input optical carriers of different wavelengths have frequencies corresponding to their respective wavelengths. By setting a plurality of cascaded microring resonators and adjusting the resonant wavelengths of at least two microring resonators, each microring resonator can selectively receive an optical carrier that matches its resonant wavelength and output the selected received optical carrier. Among them, the plurality of cascaded microring resonators can work simultaneously, and each microring resonator is independent of each other and can be tuned independently, which ensures the independence and stability between each channel and improves the overall performance of the system.

[0032] At the same time, the number of at least two micro-ring resonators is an even number, and the at least two optical carriers selected for reception can be combined and processed in pairs, so that at least one terahertz signal outputted is tunable in frequency. Through the above arrangement, the tunable frequency source chip of this embodiment has a simple structure, small volume and low power consumption.

[0033] Based on the above embodiment, each of the at least two microring resonators is adjacent to one of the at least two microring resonators.

[0034] In the embodiments of the present disclosure, by arranging each of at least two microring resonators adjacent to one of at least two microring resonators, optical carriers of specific wavelengths output by two adjacent microring resonators are combined and beat-frequency processed to generate terahertz signals of specific frequencies, thereby simplifying the optical connection of the chip and reducing complexity.

[0035] On the basis of the above embodiment, the processing module includes a beam combiner array 303 and a detector array 304 .

[0036] A beam combiner in the beam combiner array 303 is connected to two adjacent microring resonators in the plurality of cascaded microring resonators, and at least one beam combiner is used to beam combine two adjacent optical carriers in the corresponding at least two input optical carriers, and output the corresponding at least one second light beam;

[0037] A detector in the detector array 304 is connected to a beam combiner in the beam combiner array, and at least one detector is used to perform beat frequency processing on at least one second light beam inputted correspondingly, and output at least one terahertz signal.

[0038] For example, each channel of the wavelength division multiplexer 301 corresponds to input λ1, λ2, λ3, ... 2N The corresponding frequencies of the optical carriers are f1, f2, f3, ... f 2N .

[0039] It can be selected that the optical carrier f of the pth and qth channels of the input wavelength division multiplexer 301 p 、f q The mth detector in the detector array 304 outputs a terahertz signal. The beam combiner connected to the mth detector is determined, and then the two microring resonators connected to the beam combiner are determined. The resonant wavelengths of the two microring resonators are tuned to have resonant frequencies of f p 、f q , at this time, the optical carrier f of the pth and qth channels p 、f qThe outputs of the two microring resonators enter the two input ends of the correspondingly connected combiner, and the combiner combines the beams into the mth detector, which receives the received optical carrier f p 、f q The beat frequency, the frequency of the obtained terahertz signal is 200(pq)GHz, where 2N≥p>q≥1, m can be any positive integer from 1 to N, and N is the number of array detectors.

[0040] It is also possible to simultaneously select the optical carriers f of the pth and qth channels of the input wavelength division multiplexer 301. p 、f q The mth detector in the detector array 304 outputs a terahertz signal. The optical carrier wave f of the i-th and j-th channels of the wavelength division multiplexer 301 is input. i 、f j The nth detector in the detector array 304 beats and outputs a terahertz signal.

[0041] Determine the beam combiner connected to the mth detector, and then determine the two microring resonators connected to the beam combiner. Tune the resonant wavelengths of the two microring resonators to make their resonant frequencies f p 、f q , at this time, the optical carrier f of the pth and qth channels p 、f q The outputs of the two microring resonators are fed into the two input ends of the corresponding beam combiner. The beam combiner combines the light into the mth detector, which receives the received optical carrier f p 、f q The beat frequency of the terahertz signal obtained is 200 (pq) GHz.

[0042] And determine the beam combiner connected to the nth detector, and then determine the two microring resonators connected to the beam combiner. By tuning the resonant wavelengths of the two microring resonators, their resonant frequencies are respectively f i 、f j , at this time, the optical carrier f of the i-th and j-th channels i 、f j The outputs of the two microring resonators are fed into the two input ends of the corresponding beam combiner. The beam combiner combines the beams into the nth detector, which receives the received optical carrier f i 、f j The beat frequency, the frequency of the obtained terahertz signal is 200(ij)GHz. Wherein, 2N≥p>q≥1, 2N≥i>j≥1, m can be any positive integer from 1 to N, N is the number of array detectors, p≠q≠i≠j, m≠n.

[0043] In the embodiment of the present disclosure, two preset optical carriers outputted by two adjacent microring resonators are combined by a beam combiner to output a second light beam. The received second light beam is then processed by a correspondingly connected detector to generate a terahertz signal of a specific frequency, and this terahertz signal is tunable and can generate multiple terahertz signals at the same time.

[0044] At the same time, in this embodiment, in terms of device manufacturing, the wavelength division multiplexer, cascaded microring resonator, combiner, and detector involved in the chip can all be integrated on the SOI (Silicon-on-Insulator) platform, which is fully compatible with the existing mature CMOS (Complementary Metal-Oxide-Semiconductor) process, and has the advantages of low manufacturing cost, high integration, and easy integration with electrical components, which facilitates the subsequent electrical processing of the output terahertz signal.

[0045] According to an embodiment of the present disclosure, each combiner in the combiner array includes a 1×2 MMI, a Y branch, and a directional coupler.

[0046] According to an embodiment of the present disclosure, each detector in the detector array may be a silicon germanium detector.

[0047] According to an embodiment of the present disclosure, regulating the resonant wavelengths corresponding to at least two microring resonators in a plurality of cascaded microring resonators includes: determining at least two optical carriers from a plurality of optical carriers with different wavelengths as at least two target optical carriers. Determining the resonant wavelengths corresponding to the at least two microring resonators according to the wavelengths corresponding to the at least two target optical carriers. Regulating the resonant wavelengths corresponding to the at least two microring resonators by regulating the refractive indexes corresponding to the at least two microring resonators.

[0048] In the embodiment of the present disclosure, at least two preset optical carriers can be selected as needed, and the number of the at least two optical carriers is an even number, and according to the detector with the preset output, a beam combiner connected to the detector is determined, and two micro-ring resonators connected to the beam combiner are determined. The resonant wavelengths corresponding to the two micro-ring resonators are adjusted to match the preset optical carriers.

[0049] According to an embodiment of the present disclosure, the wavelength division multiplexer 301 includes:

[0050] A plurality of first input ports, each input port is used to input an optical carrier of a corresponding wavelength; wherein the difference in frequency between the optical carriers inputted by two adjacent first input ports is 200 GHz.

[0051] The first output end is used to output a first light beam.

[0052] In the embodiment of the present disclosure, the wavelength division multiplexer is of 2N×1 type, that is, 2N input ports and 1 output port, and each input port corresponds to λ1, λ2, λ3, etc. 2N The 2N input ports input optical carriers of corresponding wavelengths, and then output the first light beam after beam combining.

[0053] According to an embodiment of the present disclosure, a plurality of cascaded microring resonators include:

[0054] The second input end is connected to the first output end and is used for inputting the first light beam.

[0055] A plurality of second output ends, each two adjacent second output ends among the plurality of second output ends are correspondingly connected to a beam combiner, and the second output ends are used to output corresponding target optical carriers.

[0056] A plurality of cascaded microring resonators share a second input terminal, and each microring resonator can be tuned to a specific resonance wavelength to selectively receive an optical carrier matching its resonance wavelength.

[0057] For example, if the resonant wavelength of the microring resonator is λ1, it will selectively receive the optical carrier with the wavelength λ1 and output the optical carrier with the wavelength λ1 through its corresponding second output port.

[0058] On the basis of the above embodiment, each microring resonator in the plurality of cascaded microring resonators includes: a heating electrode for adjusting the refractive index of the microring resonator to achieve adjustment of the corresponding resonant wavelength.

[0059] In some possible embodiments, the resonant wavelength may be adjusted by electrical tuning or thermal tuning.

[0060] Figure 2 The schematic diagram shows the structure of a microring resonator according to an embodiment of the present disclosure.

[0061] like Figure 2 As shown, according to an embodiment of the present disclosure, each microring resonator is an upload-download type microring resonator.

[0062] In the embodiments of the present disclosure, each microring resonator is an upload-download type microring resonator, including an optical input end, namely the second input end, a drop end, namely the second output end, and a through end, wherein the through end is used to output an optical carrier that is not coupled by the microring resonator.

[0063] Figure 3 The structural diagram of a tunable terahertz frequency source chip according to another embodiment of the present disclosure is schematically shown.

[0064] like Figure 3 As shown, according to an embodiment of the present disclosure, when the number of optical carriers with multiple different wavelengths, the number of multiple cascaded microring resonators is 2N, the number of combiner arrays and the number of detector arrays are N, the number of output terahertz signals is 1~N, where N≥1.

[0065] For example, a tunable terahertz frequency source chip is provided, which includes an 8×1 wavelength division multiplexer 301 with a channel spacing of 200 GHz, 8 cascaded upload and download type microring resonators 302, 4 1×2 MMI type combiners 303, and 4 silicon germanium detectors 304.

[0066] Among them, the number of optical carriers input into the tunable terahertz frequency source chip is 8, and the 8 optical carriers are connected to the 8 channels of the wavelength division multiplexer 301 in sequence, and the wavelength of the optical carrier input into each channel is equal to the central wavelength of the channel of the wavelength division multiplexer 301, and the wavelengths of the optical carriers input into the first channel 301-1, the second channel 301-2, the third channel 301-3, the fourth channel 301-4, the fifth channel 301-5, the sixth channel 301-6, the seventh channel 301-7, and the eighth channel 301-8 are λ1, λ2, λ3, λ4, λ5, λ6, λ7, and λ8 respectively, and the corresponding frequencies are f1, f2, f3, f4, f5, f6, f7, and f8 respectively.

[0067] The output end of the wavelength division multiplexer 301 is connected to the optical input end of multiple cascaded microring resonators 302, and the drop ends of the first microring resonator 302-1 and the second microring resonator 302-2 are respectively connected to the two input ends of the first MMI 303-1. The drop ends of the third microring resonator 302-3 and the fourth microring resonator 302-4 are respectively connected to the two input ends of the second MMI 303-2. The drop ends of the fifth microring resonator 302-5 and the sixth microring resonator 302-6 are respectively connected to the two input ends of the third MMI 303-3. The drop ends of the seventh microring resonator 302-7 and the eighth microring resonator 302-8 are respectively connected to the two input ends of the fourth MMI 303-4. Subsequently, the output ends of the first MMI 303-1, the second MMI 303-2, the third MMI 303-3 and the fourth MMI 303-4 are connected to the first SiGe detector 304-1, the second SiGe detector 304-2, the third SiGe detector 304-3 and the fourth SiGe detector 304-4 respectively, and four terahertz frequency sources can be generated simultaneously.

[0068] The optical carriers f3 and f5 of the third channel 301 - 3 and the fifth channel 301 - 5 of the wavelength division multiplexer 301 may be set to beat the first silicon germanium detector in the silicon germanium detector array 304 to output terahertz signals.

[0069] The first microring resonator 302-1 and the second microring resonator 302-2 in the multiple cascaded microring resonators 302 can be tuned to have resonance frequencies of f3 and f5, respectively. At this time, the optical carriers f3 and f5 of the third channel 301-3 and the fifth channel 301-5 will be output from the drop ends of the first microring resonator 302-1 and the second microring resonator 302-2, enter the two input ends of the first MMI 303-1, and enter the first detector 304-1 by the MMI beam combination. The detector will beat the received optical carriers f3 and f5, and the frequency of the obtained terahertz signal is 400 GHz.

[0070] In the embodiment of the present disclosure, each microring resonator has electrodes and can work independently and simultaneously. At this time, each corresponding detector can obtain a beat frequency signal, so that the output N terahertz signals have frequency tunability.

[0071] like Figure 1 As shown, according to an embodiment of the present disclosure, it also includes: a stacked silicon substrate 1, a silicon dioxide lower cladding 2, a silicon core layer 3 and a silicon dioxide upper cladding 4; a wavelength division multiplexer 301, a plurality of cascaded microring resonators 302, a combiner array 303 and a detector array 304 are arranged on the silicon core layer 3.

[0072] It will be appreciated by those skilled in the art that the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways, even if such combinations and / or combinations are not explicitly described in the present disclosure. In particular, the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways without departing from the spirit and teachings of the present disclosure. All of these combinations and / or combinations fall within the scope of the present disclosure.

[0073] The embodiments of the present disclosure are described above. However, these embodiments are only for illustrative purposes and are not intended to limit the scope of the present disclosure. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present disclosure is defined by the attached claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A tunable frequency source chip, characterized in that: include: A wavelength division multiplexer, used for combining a plurality of input optical carriers of different wavelengths and outputting a first light beam; A plurality of cascaded microring resonators, by regulating the resonant wavelengths corresponding to at least two microring resonators in the plurality of cascaded microring resonators, each of the at least two microring resonators selects to receive an optical carrier of a corresponding wavelength based on its own resonant wavelength, and outputs the at least two optical carriers selected to be received; wherein the number of the at least two microring resonators is an even number; and the resonant wavelengths corresponding to the at least two microring resonators are different; The processing module is used to perform beam combining and beat frequency processing on every two optical carriers of the at least two optical carriers, and output at least one terahertz signal.

2. The tunable frequency source chip according to claim 1, characterized in that: Each of the at least two microring resonators is adjacent to one of the at least two microring resonators.

3. The tunable frequency source chip according to claim 2, characterized in that: The processing module includes a beam combiner array and a detector array; A beam combiner in the beam combiner array is connected to two adjacent microring resonators in the plurality of cascaded microring resonators, and at least one beam combiner is used to beam combine two adjacent optical carriers in the corresponding at least two optical carriers input, and output at least one corresponding second light beam; A detector in the detector array is connected to a beam combiner in the beam combiner array, and at least one detector is used to perform beat frequency processing on at least one second light beam corresponding to the input, and output at least one terahertz signal.

4. The tunable frequency source chip according to claim 1, characterized in that: The adjusting and controlling the resonant wavelengths corresponding to at least two microring resonators in the plurality of cascaded microring resonators comprises: Determine at least two optical carriers from the plurality of optical carriers with different wavelengths as at least two target optical carriers; Determining the resonant wavelengths corresponding to the at least two microring resonators, respectively, according to the wavelengths corresponding to the at least two target optical carriers, respectively; The resonant wavelengths corresponding to the at least two microring resonators are regulated by regulating the refractive indices corresponding to the at least two microring resonators.

5. The tunable frequency source chip according to claim 1, characterized in that: The wavelength division multiplexer comprises: A plurality of first input ports, each input port being used to input an optical carrier of a corresponding wavelength; wherein the difference in frequency between the optical carriers inputted by two adjacent first input ports is 200 GHz; The first output end is used to output the first light beam.

6. The tunable frequency source chip according to claim 5, characterized in that: The plurality of cascaded microring resonators include: A second input end, connected to the first output end, for inputting the first light beam; A plurality of second output ends, each two adjacent second output ends of the plurality of second output ends are correspondingly connected to a beam combiner, and the second output ends are used to output corresponding target optical carriers.

7. The tunable frequency source chip according to claim 6, characterized in that: Each of the plurality of cascaded microring resonators comprises: The heating electrode is used to adjust the refractive index of the microring resonator.

8. The tunable frequency source chip according to claim 7, characterized in that: Each of the micro-ring resonators is an upload-download type micro-ring resonator.

9. The tunable frequency source chip according to claim 3, characterized in that: When the number of the multiple optical carriers with different wavelengths and the number of the multiple cascaded microring resonators are 2N, and the number of the combiner arrays and the number of the detector arrays are N, the number of output terahertz signals is 1~N, where N≥1.

10. The tunable frequency source chip according to claim 3, characterized in that: Also includes: A silicon substrate, a silicon dioxide lower cladding, a silicon core layer and a silicon dioxide upper cladding are stacked; the wavelength division multiplexer, the multiple cascaded microring resonators, the beam combiner array and the detector array are arranged on the silicon core layer.

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