Vector adjustment ultrasonic molecular beam injection system and injection method

Abstract

The invention discloses a vector adjustment ultrasonic molecular beam injection system and method, and the system comprises a control module which is used for electrically connecting and controlling all parts; the displacement driving module is used for driving the nozzle to linearly move; the angle driving module is used for adjusting the angle of the nozzle; the nozzle fixing module is connected with the nozzle, the displacement driving module and the angle driving module and used for fixing the nozzle; the gas distribution module is used for adjusting the pressure of a gas source; and the time sequence module is used for adjusting the injection time, the injection pulse width and the injection frequency. The injection method adjusts an ultrasonic molecular beam injection system based on the vector. According to the vector adjustment ultrasonic molecular beam injection system and method, the front-back displacement and angle pitching of the nozzle are adjusted according to requirements, ultrasonic molecular beam injection at different distances and different angles is achieved, and different supersonic speed particle injection application scenes are met.

Description

Technical Field

[0001] The invention relates to the technical field of ultrasonic molecular beam particle injection, and in particular to a vector-regulated ultrasonic molecular beam injection system and an injection method. Background Art

[0002] In controlled nuclear fusion research, edge turbulence transport has a significant impact on plasma confinement performance, and boundary particle injection has been shown to be able to regulate edge turbulence and improve confinement performance. Ultrasonic molecular beam injection is an efficient technical means to achieve supersonic particle injection. It is widely used in many controlled nuclear fusion devices in the world because of its higher feeding efficiency, deeper injection depth and better regional orientation capability.

[0003] However, the existing ultrasonic molecular beam particle injection method can only change the particle injection parameters by controlling the particle injection time and injection amount. However, theoretical studies have shown that the position and parameter distribution of particle injection have an important influence on the boundary. Therefore, an ultrasonic molecular beam particle injection method with vector regulation function is of great significance for plasma edge turbulence control and plasma physics research. Summary of the invention

[0004] The technical problem to be solved by the present invention is that there is a lack of ultrasonic molecular beam particle injection equipment with vector regulation function in the prior art. The purpose is to provide a vector regulation ultrasonic molecular beam injection system and injection method to solve the above problem.

[0005] The present invention is achieved through the following technical solutions:

[0006] In a first aspect, the present invention provides a vector-regulated ultrasonic molecular beam injection system, comprising:

[0007] A control module, used for electrically connecting and controlling various components;

[0008] A displacement drive module, used to drive the nozzle to move linearly;

[0009] Angle drive module, used to adjust the angle of the nozzle;

[0010] The nozzle fixing module is respectively connected to the nozzle, the displacement driving module and the angle driving module, and is used to fix the nozzle;

[0011] Gas distribution module, used to adjust the gas source pressure;

[0012] Timing module, used to adjust the injection time, injection pulse width and injection frequency;

[0013] Among them, a nozzle for injecting supersonic particles is provided at the nozzle fixing module. The nozzle is a Laval nozzle with a control valve. The control valve is used to control the opening and closing and the opening and closing frequency of the Laval nozzle. The Laval nozzle is connected to an injection pipe.

[0014] In one possible design, the displacement drive module includes a first servo motor, a lead screw, a bellows, and a positioning member;

[0015] The first servo motor is electrically connected to the control module, and the output end of the first servo motor is connected to the lead screw to drive the lead screw to rotate;

[0016] A screw rod and a positioning member are respectively provided on the outer side of the bellows. The screw rod and the bellows are spaced apart and parallel to each other, and the screw rod is connected to the bellows through a slide. Accordingly, the rotation of the screw rod is transmitted to the bellows through the slide, so that the bellows is reciprocated and deformed to drive the nozzle to move linearly. Two positioning members are provided and spaced apart to limit the movement range of the bellows.

[0017] The bellows has two opposite ends, one end of which is connected to the nozzle and the other end is provided with an air path inlet, to which an external pipeline is detachably connected. Accordingly, the injection pipe is passed through the bellows and connected to the nozzle and the air path inlet.

[0018] In one possible design, the slide is disposed on the screw and adjacent to the nozzle fixing module, and a fixing plate adjacent to the first servo motor is also disposed on the screw; accordingly, when the screw rotates, the slide slides along the screw and drives the bellows to extend or compress, so that the nozzle moves in a straight line.

[0019] In one possible design, the angle drive module includes a second servo motor, a linear introducer, an angle adjustment mechanism, and a bearing;

[0020] The second servo motor is electrically connected to the control module, and the second servo motor is located outside the bellows and is arranged on the same side as the gas path inlet, and the output end of the second servo motor is connected to the linear introducer;

[0021] The linear guide is arranged on the corrugated tube, and the two ends of the linear guide respectively pass through the corrugated tube, and correspondingly, the two ends of the linear guide are respectively connected to the second servo motor and the angle adjustment mechanism;

[0022] The angle adjustment mechanism is arranged on the nozzle fixing module, and the working end of the angle adjustment mechanism is connected to the nozzle and is used to adjust the angle of the nozzle;

[0023] The bearing is passed through the nozzle fixing module and is used to connect the angle adjustment mechanism and the nozzle fixing module.

[0024] In one possible design, the nozzle fixing module includes a base and a magnetic shielding layer. The base is connected to the bellows, and is provided with a mounting groove adapted for the nozzle and a mounting hole adapted for the injection pipe. The magnetic shielding layer is covered on the base and is used to shield the nozzle.

[0025] In a possible design, the magnetic shielding layer is provided with an injection opening located directly in front of the nozzle and an input opening adapted to the injection pipe.

[0026] In one possible design, the gas distribution module includes a pipeline, a gas cylinder, a pressure reducing valve and a pressure controller; one end of the pipeline is connected to the gas cylinder, and the other end of the pipeline is connected to the gas circuit inlet or connected to the gas circuit inlet through an external pipeline; the gas cylinder is used to store the injected gas, the pressure reducing valve is used to coarsely adjust the gas source pressure, and the pressure controller is used to finely adjust the gas source pressure.

[0027] In a possible design, the timing module includes a timing controller and a solenoid valve, and the solenoid valve is arranged on the timing controller and is electrically connected to the control module.

[0028] In one possible design, the control module includes a PLC, a display, and input devices;

[0029] The PLC is electrically connected to the displacement drive module, the angle drive module, the nozzle fixing module, the gas distribution module, the timing module, the display and the input device respectively;

[0030] The display is used to display working parameters, and the input device is used to input working instructions.

[0031] In a second aspect, the present invention provides an injection method based on the vector-regulated ultrasonic molecular beam injection system, comprising the following steps:

[0032] S100: judging the current position based on the positioning member, starting at least one of the first servo motor and the second servo motor to reset the nozzle;

[0033] S200: According to the working parameters input by the input device, at least one of the first servo motor and the second servo motor is started to move the nozzle to the designed position;

[0034] S300: The gas distribution module starts and adjusts the gas source pressure to a specified value;

[0035] S400: The timing module starts and controls the solenoid valve action according to the working parameters;

[0036] Among them, in S200, if the displacement or angle exceeds the designed range, the system stops and gives an error reminder.

[0037] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0038] The front and rear displacement and angular pitch of the nozzle can be adjusted according to needs to achieve ultrasonic molecular beam injection at different distances and angles to meet different supersonic particle injection application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, other relevant drawings can be obtained based on these drawings without creative work. In the drawings:

[0040] Figure 1 This is a schematic diagram of the structure of a vector-regulated ultrasonic molecular beam injection system.

[0041] Figure 2 This is a schematic diagram of the coordination between the displacement driving module and the angle driving module in the first viewing angle.

[0042] Figure 3 Schematic diagram of the coordination between the displacement driving module and the angle driving module under the second viewing angle.

[0043] Figure 4 for Figure 3 Schematic diagram of the local enlarged structure.

[0044] Marks and corresponding parts names in the attached drawings:

[0045] 100, control module; 200, displacement drive module; 210, first servo motor; 220, lead screw; 230, bellows; 240, positioning member; 300, angle drive module; 310, second servo motor; 320, linear introducer; 330, angle adjustment mechanism; 340, bearing; 301, slide; 302, fixing plate; 400, nozzle fixing module; 410, base; 420, magnetic shielding layer; 401, nozzle; 402, injection pipe; 403, gas path inlet; 500, gas distribution module; 600, timing module; 700, plasma. DETAILED DESCRIPTION

[0046] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.

[0047] In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present invention. However, it is apparent to one of ordinary skill in the art that these specific details are not necessarily employed to practice the present invention. In other embodiments, in order to avoid obscuring the present invention, well-known structures, circuits, materials, or methods are not specifically described.

[0048] Throughout the specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "one embodiment," "an embodiment," "an example," or "an example" appearing in various places throughout the specification do not necessarily all refer to the same embodiment or example. In addition, particular features, structures, or characteristics may be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. In addition, it will be appreciated by those of ordinary skill in the art that the figures provided herein are for illustrative purposes and that the figures are not necessarily drawn to scale. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0049] In the description of the present invention, the directions or positional relationships indicated by terms such as “front”, “rear”, “left”, “right”, “up”, “down”, “vertical”, “horizontal”, “high”, “low”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the scope of protection of the present invention.

[0050] Embodiment 1:

[0051] like Figure 1-Figure 4 As shown, a vector-regulated ultrasonic molecular beam injection system comprises:

[0052] A control module 100, used to electrically connect and control various components;

[0053] The displacement driving module 200 is used to drive the nozzle 401 to move linearly;

[0054] Angle driving module 300, used to adjust the angle of the nozzle 401;

[0055] The nozzle fixing module 400 is respectively connected to the nozzle 401, the displacement driving module 200 and the angle driving module 300, and is used to fix the nozzle 401;

[0056] Gas distribution module 500, used to adjust the gas source pressure;

[0057] A timing module 600 is used to input supersonic particles and adjust the injection time, injection pulse width and injection frequency;

[0058] The nozzle fixing module 400 is provided with a nozzle 401 for injecting supersonic particles. The nozzle 401 is a Laval nozzle provided with a control valve. The control valve is used to control the opening and closing and the opening and closing frequency of the Laval nozzle. The Laval nozzle is connected with an injection pipe 402.

[0059] In the vector-regulated ultrasonic molecular beam injection system, any suitable control program is preset in the control module 100, and the displacement drive module 200 and the angle drive module 300 are controlled according to different requirements to control the position and angle of the nozzle 401. The displacement drive module 200 is used to drive the nozzle 401 to move back and forth in a straight line to adjust the position of the nozzle 401, and correspondingly, the angle drive module 300 is used to drive the nozzle 401 to rotate, thereby adjusting the angle of the nozzle 401. It is easy to understand that the displacement drive module 200 and the angle drive module 300 cooperate with each other to make the position of the nozzle 401 more flexible to meet the corresponding injection requirements.

[0060] The nozzle fixing module 400 is used to fix the position of the nozzle 401, so that the nozzle 401 has better stability during linear movement and / or angle adjustment, avoids accidental disturbance of the nozzle 401, and ensures the accuracy of adjustment. At the same time, the nozzle fixing module 400 also realizes the connection between the nozzle 401 and the injection pipe 402.

[0061] The gas distribution module 500 provides the necessary gas source for the injection of the ultrasonic molecular beam. The gas with a specific pressure realizes the ultrasonic molecular beam flow through the Laval nozzle, injects the supersonic particles into the plasma 700, and realizes the injection operation.

[0062] The timing module 600 is used to input supersonic particles and also controls parameters such as injection time, injection pulse width and injection frequency so that the injection operation meets the design requirements.

[0063] During operation, the staff selects a preset injection mode through the control module 100, or inputs the injection parameters of a single injection operation, and then starts the vector-regulated ultrasonic molecular beam injection system to perform the injection operation. After the injection operation begins, at least one of the displacement drive module 200 and the angle drive module 300 starts and adjusts the position of the nozzle 401 until the nozzle 401 is at the desired injection position. The gas distribution module 500 starts and inputs gas until the gas source pressure reaches the specified value. The timing module 600 is finally started and the gas is fed in, and the gas enters the nozzle 401 to form an ultrasonic molecular beam and is injected into the specified position.

[0064] Based on this, the vector-regulated ultrasonic molecular beam injection system can adjust the front-rear displacement and angular pitch of the nozzle 401 according to demand, realize ultrasonic molecular beam injection at different distances and angles, and meet different supersonic particle injection application scenarios.

[0065] In the vector-regulated ultrasonic molecular beam injection system, a certain high-pressure gas flows through the Laval nozzle and is injected into the vacuum background to form a supersonic beam. Compared with the prior art, no external acceleration equipment is required, which not only reduces the number of components, but also greatly reduces the energy consumption of the injection operation.

[0066] In a possible implementation, the displacement driving module 200 includes a first servo motor 210, a screw rod 220, a bellows 230 and a positioning member 240;

[0067] The first servo motor 210 is electrically connected to the control module 100 , and the output end of the first servo motor 210 is connected to the screw rod 220 to drive the screw rod 220 to rotate;

[0068] The outer side of the bellows 230 is provided with a screw rod 220 and a positioning member 240, respectively. The screw rod 220 and the bellows 230 are spaced apart and parallel to each other, and the screw rod 220 is connected to the bellows 230 through a slide 301. Accordingly, the rotation of the screw rod 220 is transmitted to the bellows 230 through the slide 301, so that the bellows 230 is reciprocated and deformed, so as to drive the nozzle 401 to move linearly; two positioning members 240 are provided and spaced apart to limit the moving range of the bellows 230;

[0069] The bellows 230 has two opposite ends, one end of which is connected to the nozzle 401 and the other end is provided with an air inlet 403 , to which an external pipeline is detachably connected. Accordingly, the injection pipe 402 is passed through the bellows 230 and connects the nozzle 401 and the air inlet 403 .

[0070] Based on the above design, the control module 100 is used to control the first servo motor 210. When the first servo motor 210 is started, the screw rod 220 rotates and drives the bellows 230 to expand and contract through the slide 301. The bellows 230 has a certain degree of elasticity and is connected to the nozzle fixing module 400. When the bellows 230 expands and contracts, the nozzle fixing module 400 and the nozzle 401 move with the bellows 230. Further, as the screw rod 220 rotates forward or reversely, the nozzle 401 also reciprocates along the axial direction of the screw rod 220, realizing the reciprocating linear motion of the nozzle 401, and adjusting the linear position of the nozzle 401.

[0071] At the same time, two positioning members 240 are provided outside the bellows 230. When the bellows 230 moves and abuts against one of the positioning members 240, the bellows 230 cannot continue to expand and contract due to the obstruction of the positioning members 240, that is, the range of linear movement of the nozzle 401 is determined by the two positioning members 240. In other words, the positions of the two positioning members 240 are the zero position and the limit position, respectively. Accordingly, when the bellows 230 moves to the positioning members 240, the first servo motor 210 stops rotating to prevent the bellows 230 from expanding and contracting beyond the design range, thereby ensuring the safety of the displacement driving module 200.

[0072] It is easy to understand that the positioning member 240 can be selected from any suitable existing equipment, or constructed in any suitable shape.

[0073] In one possible implementation, the slide 301 is disposed on the screw rod 220 and is adjacent to the nozzle fixing module 400, and a fixing plate 302 adjacent to the first servo motor 210 is also provided on the screw rod 220; accordingly, when the screw rod 220 rotates, the slide 301 slides along the screw rod 220 and drives the bellows 230 to extend or compress, so that the nozzle 401 moves in a straight line.

[0074] Based on the above design, the fixing plate 302 is used to fix the connecting screw rod 220 and the bellows 230, and as shown in FIG. Figure 2 As shown, the fixing plate 302 is located at one end of the bellows 230 away from the nozzle fixing module 400, and the slide 301 is located at one end of the bellows 230 close to the nozzle fixing module 400, thereby making the slide 301, the bellows 230 and the nozzle fixing module 400 move synchronously to achieve the reciprocating linear motion of the nozzle 401. The fixing plate 302 plays a connecting and fixing role to ensure that the end of the bellows 230 away from the nozzle fixing module 400 remains stable.

[0075] In a possible implementation, the angle driving module 300 includes a second servo motor 310, a linear introducer 320, an angle adjustment mechanism 330 and a bearing 340;

[0076] The second servo motor 310 is electrically connected to the control module 100 , and the second servo motor 310 is located outside the bellows 230 and is arranged on the same side as the gas path inlet 403 , and the output end of the second servo motor 310 is connected to the linear introducer 320 ;

[0077] The linear guide 320 is disposed on the bellows 230, and both ends of the linear guide 320 pass through the bellows 230 respectively. Accordingly, both ends of the linear guide 320 are connected to the second servo motor 310 and the angle adjustment mechanism 330 respectively.

[0078] The angle adjustment mechanism 330 is disposed on the nozzle fixing module 400, and the working end of the angle adjustment mechanism 330 is connected to the nozzle 401 and is used to adjust the angle of the nozzle 401;

[0079] The bearing 340 is passed through the nozzle fixing module 400 and is used to connect the angle adjustment mechanism 330 and the nozzle fixing module 400 .

[0080] Based on the above design, the control module 100 is used to control the second servo motor 310. When the second servo motor 310 is started, the linear introducer 320 will reciprocate, and the specific movement direction is associated with the rotation direction of the second servo motor 310. The reciprocating movement of the linear introducer 320 is transmitted to the angle adjustment mechanism 330, so that the angle adjustment mechanism 330 reciprocates around the bearing 340. Since the angle adjustment mechanism 330 is connected to the nozzle 401, the angle adjustment mechanism 330 swings while the nozzle 401 swings, thereby adjusting the angle of the nozzle 401.

[0081] It is easy to understand that the linear introducer 320, the angle adjustment mechanism 330 and the bearing 340 are respectively selected from any suitable existing equipment.

[0082] Further, if Figure 2 and Figure 3 As shown, for the vector-regulated ultrasonic molecular beam injection system, with the displacement driving module 200 as a reference, the moving range of the nozzle 401 is located on the axis of the bellows 230, and combined with the angle driving module 300, the direction of the nozzle 401 on the axis is adjusted.

[0083] In one possible implementation, the nozzle fixing module 400 includes a base 410 and a magnetic shielding layer 420. The base 410 is connected to the bellows 230. The base 410 is provided with a mounting groove adapted to the nozzle 401 and a mounting hole adapted to the injection pipe 402. The magnetic shielding layer 420 is covered on the base 410 and is used to shield the nozzle 401.

[0084] Based on the above design, the base 410 can be constructed in any suitable shape to adapt to different use environments and have better adaptability. At the same time, a magnetic shielding layer 420 is provided to reduce the influence of the magnetic field on surrounding components, ensuring that the vector-regulated ultrasonic molecular beam injection system can work normally in a magnetic field environment.

[0085] It is easy to understand that the magnetic shielding layer 420 can be made of any suitable magnetic shielding material.

[0086] In a possible implementation, the magnetic shielding layer 420 is provided with an injection opening located in front of the nozzle 401 and an input opening adapted to the injection pipe 402. Based on the above design, under the premise of ensuring the normal injection operation, the shielding range of the magnetic shielding layer 420 is expanded as much as possible to ensure that the vector-regulated ultrasonic molecular beam injection system can work normally in a magnetic field environment.

[0087] In one possible implementation, the gas distribution module 500 includes a pipeline, a gas cylinder, a pressure reducing valve and a pressure controller; one end of the pipeline is connected to the gas cylinder, and the other end of the pipeline is connected to the gas circuit inlet or connected to the gas circuit inlet through an external pipeline; the gas cylinder is used to store the injected gas, the pressure reducing valve is used to coarsely adjust the gas source pressure, and the pressure controller is used to finely adjust the gas source pressure.

[0088] Based on the above design, when the pipeline is directly connected to the gas circuit inlet, the pipeline is used as an external pipeline; or, the pipeline and the external pipeline are two independent pipelines, and the pipeline is connected to the gas circuit inlet through the external pipeline. The pressure reducing valve and the pressure controller can be set at any suitable position of the pipeline and the external pipeline, and the two cooperate with each other to achieve precise adjustment of the gas source pressure to ensure that the gas source pressure meets the requirements of the injection operation. Preferably, the pressure reducing valve uses the pressure regulating valve on the gas cylinder.

[0089] In a possible implementation, the timing module 600 includes a timing controller and a solenoid valve, and the solenoid valve is disposed on the timing controller and electrically connected to the control module.

[0090] Based on the above design scheme, the control module 100 sends instructions to the timing controller, and controls the opening and closing time, opening time, etc. of the solenoid valve through the timing controller, so as to realize the control of parameters such as injection time, injection pulse width, injection frequency, etc., and accurately control the injection of supersonic particles, thereby completing the corresponding experimental requirements.

[0091] In a possible implementation, the control module 100 includes a PLC (Programmable Logic Controller), a display, and an input device;

[0092] The PLC is electrically connected to the displacement driving module 200, the angle driving module 300, the nozzle fixing module 400, the gas distribution module 500, the timing module 600, the display and the input device respectively;

[0093] The display is used to display working parameters, and the input device is used to input working instructions.

[0094] Based on the above design, the PLC can be constructed as any suitable existing model to adapt to different usage requirements and have better adaptability. The display is used to display the working parameters so that the staff can grasp the real-time situation of the injection operation. The input device is used to input the working instructions so that the staff can manually control the vector-regulated ultrasonic molecular beam injection system.

[0095] This embodiment introduces an injection method based on the vector-regulated ultrasonic molecular beam injection system, and the injection method includes the following steps:

[0096] S100: Based on the current position determined by the positioning member 240, at least one of the first servo motor 210 and the second servo motor 310 is started to reset the nozzle 401;

[0097] S200: According to the working parameters input by the input device, at least one of the first servo motor 210 and the second servo motor 310 is started to move the nozzle 401 to the designed position;

[0098] S300: The gas distribution module 500 starts and adjusts the gas source pressure to a specified value;

[0099] S400: The timing module 600 starts and controls the solenoid valve to operate according to the working parameters;

[0100] Among them, in S200, if the displacement or angle exceeds the designed range, the system stops and gives an error reminder.

[0101] Embodiment 2:

[0102] Based on Example 1, this embodiment provides a working example of the vector-regulated ultrasonic molecular beam injection system, specifically:

[0103] Example 1: Injection beam close to plasma 700 edge 50cm injection

[0104] The control module 100 receives the instruction, determines the current position through the positioning member 240, and the PLC controls at least one of the first servo motor 210 and the second servo motor 310 to start, so as to reset the nozzle 401. The PLC controls the first servo motor 210 to rotate, the screw rod 220 rotates and pushes the bellows 230 forward through the slide 301, the nozzle fixing module 400 moves forward 50cm, and the system stops moving. It is worth noting that if the moving distance exceeds the limit position, the system remains stationary and reports an error reminder.

[0105] The control module 100 sends a command to the gas distribution module 500, and the gas distribution module 500 adjusts the gas source pressure until it reaches a specified value. The control module 100 sends a command to the timing module 600, and the timing module 600 drives the electromagnetic valve switch to inject supersonic particles into the plasma 700 according to the injection parameters.

[0106] Example 2: Injection beam close to plasma 700 poloidal / annular 10° injection

[0107] The control module 100 receives the instruction, determines the current position through the positioning member 240, and the PLC controls at least one of the first servo motor 210 and the second servo motor 310 to start, so as to reset the nozzle 401. The PLC controls the second servo motor 310 to rotate, the linear guide 320 to move and drive the angle adjustment mechanism 330 to rotate until the nozzle fixing module 400 swings 10°. It is worth noting that if the input angle exceeds the set angle adjustment range, the system remains stationary and reports an error reminder.

[0108] The control module 100 sends a command to the gas distribution module 500, and the gas distribution module 500 adjusts the gas source pressure until it reaches a specified value. The control module 100 sends a command to the timing module 600, and the timing module 600 drives the electromagnetic valve switch to inject supersonic particles into the plasma 700 according to the injection parameters.

[0109] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A vector-regulated ultrasonic molecular beam injection system, characterized in that: include: A control module (100), used for electrically connecting and controlling various components; A displacement driving module (200), used for driving the nozzle (401) to move linearly; An angle driving module (300) for adjusting the angle of the nozzle (401); A nozzle fixing module (400) is respectively connected to the nozzle (401), the displacement driving module (200) and the angle driving module (300) and is used to fix the nozzle (401); A gas distribution module (500) is used to adjust the pressure of the gas source; A timing module (600) is used to adjust the injection time, injection pulse width and injection frequency; A nozzle (401) for injecting supersonic particles is provided at the nozzle fixing module (400), and the nozzle (401) is a Laval nozzle provided with a control valve, the control valve is used to control the opening and closing and the opening and closing frequency of the Laval nozzle, and the Laval nozzle is connected to an injection pipe (402).

2. The vector-regulated ultrasonic molecular beam injection system according to claim 1, characterized in that: The displacement driving module (200) comprises a first servo motor (210), a screw rod (220), a bellows (230) and a positioning member (240); The first servo motor (210) is electrically connected to the control module (100), and the output end of the first servo motor (210) is connected to the screw rod (220) to drive the screw rod (220) to rotate; A screw rod (220) and a positioning member (240) are respectively provided on the outer side of the bellows (230); the screw rod (220) and the bellows (230) are spaced apart and parallel to each other, and the screw rod (220) is connected to the bellows (230) via a slide table (301); accordingly, the rotation of the screw rod (220) is transmitted to the bellows (230) via the slide table (301), so that the bellows (230) is reciprocatedly deformed, so as to drive the nozzle (401) to move linearly; two positioning members (240) are provided and spaced apart, so as to limit the moving range of the bellows (230); The bellows (230) has two opposite ends, one end of which is connected to the nozzle (401) and the other end of which is provided with an air path inlet (403). The air path inlet (403) is detachably connected to an external pipeline. Accordingly, the injection pipe (402) is inserted into the bellows (230) and connects the nozzle (401) and the air path inlet (403).

3. The vector-regulated ultrasonic molecular beam injection system according to claim 2, characterized in that: The slide (301) is arranged on the screw rod (220) and is adjacent to the nozzle fixing module (400). The screw rod (220) is also provided with a fixing plate (302) adjacent to the first servo motor (210); accordingly, when the screw rod (220) rotates, the slide (301) slides along the screw rod (220) and drives the bellows (230) to extend or compress, so that the nozzle (401) moves in a straight line.

4. The vector-regulated ultrasonic molecular beam injection system according to any one of claims 1 to 3, characterized in that: The angle driving module (300) comprises a second servo motor (310), a linear introducer (320), an angle adjustment mechanism (330) and a bearing (340); The second servo motor (310) is electrically connected to the control module (100), and the second servo motor (310) is located outside the bellows (230) and is arranged on the same side as the gas path inlet (403), and the output end of the second servo motor (310) is connected to the linear introducer (320); The linear introducer (320) is inserted into the corrugated tube (230), and the two ends of the linear introducer (320) respectively pass through the corrugated tube (230). Accordingly, the two ends of the linear introducer (320) are respectively connected to the second servo motor (310) and the angle adjustment mechanism (330); The angle adjustment mechanism (330) is arranged on the nozzle fixing module (400), and the working end of the angle adjustment mechanism (330) is connected to the nozzle (401) and is used to adjust the angle of the nozzle (401); The bearing (340) is disposed on the nozzle fixing module (400) and is used to connect the angle adjustment mechanism (330) and the nozzle fixing module (400).

5. The vector-regulated ultrasonic molecular beam injection system according to claim 4, characterized in that: The nozzle fixing module (400) comprises a base (410) and a magnetic shielding layer (420); the base (410) is connected to the bellows (230); a mounting groove adapted to the nozzle (401) and a mounting hole adapted to the injection pipe (402) are provided on the base (410); and the magnetic shielding layer (420) is covered on the base (410) and used to shield the nozzle (401).

6. The vector-regulated ultrasonic molecular beam injection system according to claim 5, characterized in that: The magnetic shielding layer (420) is provided with an injection opening located directly in front of the nozzle (401) and an input opening adapted to the injection pipe (402).

7. The vector-regulated ultrasonic molecular beam injection system according to claim 5 or 6, characterized in that: The gas distribution module (500) comprises a pipeline, a gas cylinder, a pressure reducing valve and a pressure controller; one end of the pipeline is connected to the gas cylinder, and the other end of the pipeline is connected to the gas circuit inlet or connected to the gas circuit inlet through an external pipeline; the gas cylinder is used to store the injected gas, the pressure reducing valve is used to roughly adjust the gas source pressure, and the pressure controller is used to finely adjust the gas source pressure.

8. The vector-regulated ultrasonic molecular beam injection system according to claim 7, characterized in that: The timing module (600) comprises a timing controller and a solenoid valve, wherein the solenoid valve is arranged on the timing controller and is electrically connected to the control module (100).

9. The vector-regulated ultrasonic molecular beam injection system according to claim 8, characterized in that: The control module (100) includes a PLC, a display and an input device; The PLC is electrically connected to the displacement driving module (200), the angle driving module (300), the nozzle fixing module (400), the gas distribution module (500), the timing module (600), the display and the input device respectively; The display is used to display working parameters, and the input device is used to input working instructions.

10. An injection method based on the vector-regulated ultrasonic molecular beam injection system according to any one of claims 1 to 9, characterized in that: The following steps are involved: S100: Based on the current position determined by the positioning member (240), at least one of the first servo motor (210) and the second servo motor (310) is started to reset the nozzle (401); S200: According to the working parameters inputted by the input device, at least one of the first servo motor (210) and the second servo motor (310) is started to move the nozzle (401) to a designed position; S300: The gas distribution module (500) starts and adjusts the gas source pressure to a specified value; S400: The timing module (600) starts and controls the action of the solenoid valve according to the working parameters; Among them, in S200, if the displacement or angle exceeds the designed range, the system stops and gives an error reminder.

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