Substrate transfer robot system

Abstract

The substrate transfer robot system (100) includes a substrate holding robot (23) that holds each of a plurality of substrates, a robot arm (21), and a control unit (30). The control unit (30) acquires, on the basis of the detection result of the detection unit (60), the amount of displacement of each of the plurality of substrates with respect to the arrangement of a predetermined reference position, and controls, on the basis of each of the acquired amounts of displacement, the conveyance operation of the robot arm (21) that conveys the plurality of substrates. The plurality of substrates can be independently carried into the carrying part and / or independently carried out from the carrying part.

Description

Technical Field

[0001] The present disclosure relates to a substrate transport robot system, and more particularly to a substrate transport robot system including a substrate holding robot arm for holding a plurality of substrates. Background Art

[0002] In the past, a substrate transport robot system for holding a plurality of substrates was known. For example, Japanese Patent No. 6833685 discloses a substrate processing device having a transfer robot for transporting substrates. An end effector for holding a substrate is arranged on the arm of the transfer robot. The substrate processing device of Japanese Patent No. 6833685 has a reference surface arranged in a predetermined positional relationship relative to a substrate holding position as a transport destination of the substrate. The substrate processing device makes the substrate held by the end effector contact the reference surface, thereby moving the substrate on the end effector to change the eccentricity between the end effector and the substrate. Then, by measuring the change in the eccentricity between the end effector and the substrate, the transfer robot is taught the substrate holding position based on the measured change in the eccentricity and the positional relationship between the substrate holding position and the reference surface. In addition, in the substrate processing device of Japanese Patent No. 6833685, an example is disclosed in which the substrate on the end effector is staggered and arranged at a predetermined position relative to the end effector by making the substrate contact with a predetermined contact surface or pin. Furthermore, Japanese Patent No. 6833685 discloses an example in which an end effector for holding two substrates arranged adjacent to each other is arranged on one arm of a transfer robot, thereby collectively conveying two substrates.

[0003] Patent Document 1: Japanese Patent No. 6833685

[0004] Here, although it is not clearly described in the above-mentioned Japanese Patent No. 6833685, when a substrate is transported as in the transfer robot of the substrate processing device described in the above-mentioned Japanese Patent No. 6833685, the position of the substrate held by the robot as the end effector may be offset on the robot. For example, when holding a substrate to transport it, the substrate may be held in a state where it is offset from a predetermined position relative to the robot. In particular, in the case of collectively transporting a plurality of substrates, the offset amount of the position offset on the robot may be different from each other for each of the plurality of substrates. In this case, when the substrate is brought into contact with a member other than the substrate such as a predetermined contact surface or pin as in the above-mentioned Japanese Patent No. 6833685, and the plurality of substrates on the robot are moved separately, it is considered that an abnormality such as cracking or deformation occurs in the substrate due to the contact, or an abnormality occurs in the processing of the substrate due to foreign matter generated by the contact. In addition, in the case of suppressing the contact between the member other than the substrate and the substrate, the substrate is transported in a state where the arrangement of the substrate is offset on the robot, so it is difficult to transport the plurality of substrates to the loading portion of the transport destination with high accuracy. Therefore, there is a problem that it is difficult to convey a plurality of substrates with high accuracy while suppressing contact with members other than the substrates. Summary of the invention

[0005] The present disclosure has been made to solve the above-mentioned problems, and one object of the present disclosure is to provide a substrate transport robot system capable of transporting a plurality of substrates with high accuracy while suppressing contact with components other than the substrates.

[0006] A substrate transport robot system involved in one aspect of the present disclosure comprises: a substrate holding robot having multiple holding parts for holding each of a plurality of substrates; a robot arm on which the substrate holding robot is mounted; and a control part, which obtains the offset of the configuration of each of the plurality of substrates relative to a prescribed reference position based on the detection results of a detection part that detects each of the plurality of substrates held by the substrate holding robot, and controls the transport action of the robot arm that transports the plurality of substrates based on the respective obtained offsets, so as to perform at least one of independently moving the plurality of substrates into a loading part and moving them out from the loading part.

[0007] The substrate transport robot system involved in one aspect of the present disclosure includes a control unit as described above, which obtains the offset of the configuration of each of the plurality of substrates relative to a prescribed reference position based on the detection results of the detection unit that detects the plurality of substrates held by the substrate holding robot, and controls the transport action of the robot arm that transports the plurality of substrates based on the offsets obtained, so as to carry out at least one of independently carrying the plurality of substrates into the loading section and independently carrying them out from the loading section. Thus, even when the substrates are arranged in a state of being offset from the prescribed reference position, the control unit controls the transport action of the robot arm based on the offset, so that the plurality of substrates can be transported separately in a manner that corrects the offset of the configuration without changing the relative configuration of each of the plurality of substrates relative to the substrate holding robot. As a result, the plurality of substrates can be transported with high precision while suppressing contact with components other than the substrates.

[0008] According to the present disclosure, a plurality of substrates can be conveyed with high accuracy while suppressing contact with components other than the substrates. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 1 is a schematic diagram showing the overall configuration of a substrate processing system including a substrate transport robot system according to an embodiment.

[0010] Figure 2 This is a block diagram showing the structure of a substrate processing system including a substrate transport robot system.

[0011] Figure 3 It is a perspective view schematically showing a substrate transport robot system.

[0012] Figure 4 It is a diagram for explaining the structure of the placement portion in the load lock portion.

[0013] Figure 5 This is a diagram for explaining the structure of a placement unit in each of a plurality of process module units.

[0014] Figure 6 This is a diagram for explaining detection of a substrate in a detection unit.

[0015] Figure 7 This is a diagram for explaining the conveying operation of a substrate with respect to a placing portion of each of a plurality of process module units.

[0016] Figure 8 It is a diagram for explaining the conveying operation of the substrate with respect to the placing portion of the load lock portion.

[0017] Fig. 9This is a flowchart for explaining control processing of a substrate transport method performed by a substrate transport robot system.

[0018] Fig.10 It is a schematic diagram for explaining a processing module unit according to a modified example of one embodiment of the present disclosure. DETAILED DESCRIPTION

[0019] Hereinafter, embodiments of the present disclosure which embody the present disclosure will be described based on the drawings.

[0020] Reference Figures 1 to 8 , a structure of a substrate transport robot system 100 according to an embodiment will be described.

[0021] (Structure of substrate processing system)

[0022] like Figure 1 As shown, the substrate transport robot system 100 according to the present embodiment transports a substrate 10 in a substrate processing system 101. The substrate processing system 101 includes the substrate transport robot system 100, a load lock unit 102, and a plurality of processing module units 103. Figure 1 In the example of , the substrate processing system 101 includes four processing module units 103. In addition, the substrate processing system 101 includes a transfer chamber 104 and a loading and unloading chamber 105. The substrate processing system 101 processes a substrate 10 such as a semiconductor wafer or a printed circuit board. The substrate 10 is, for example, a glass substrate or a silicon substrate having a substantially disk shape.

[0023] Each of the plurality of processing module units 103 performs a process such as coating or etching of a resist on the substrate 10. The plurality of processing module units 103 are arranged along the periphery of the transport chamber 104. The inside of the transport chamber 104 is maintained at a predetermined vacuum degree. That is, the substrate processing system 101 is a multi-chamber type vacuum processing device. In addition, a loading lock unit 102 is provided on the periphery of the transport chamber 104. A loading and unloading chamber 105 is provided on the side of the loading and unloading chamber 102 opposite to the transport chamber 104. Three ports for respectively installing carriers 106 capable of accommodating the substrate 10 are provided on the side of the loading and unloading chamber 105 opposite to the loading and unloading chamber 102.

[0024] The substrate transport robot system 100 carries out the substrate 10 from the processing module part 103 that processes the substrate 10, and carries the substrate 10 into the processing module part 103. In the substrate processing system 101, the substrate 10 is carried into the load lock part 102 from the carrier 106 by the transport robot (not shown) arranged in the loading and unloading chamber 105. And, by the substrate transport robot system 100 of this embodiment, the substrate 10 is carried from the load lock part 102 to each of the plurality of processing module parts 103. By the substrate transport robot system 100, the substrates 10 processed in the plurality of processing module parts 103 are respectively carried from the plurality of processing module parts 103 to the load lock part 102. And, by the transport robot (not shown) arranged in the loading and unloading chamber 105, the processed substrates 10 are carried out from the load lock part 102 to the carrier 106. The carrier 106 stores a plurality of substrates 10.

[0025] (Structure of substrate transport robot system)

[0026] like Figure 2 As shown, the substrate transport robot system 100 includes a transport robot 20 and a control unit 30. The transport robot 20 has a robot arm 21 and a robot arm 22. In addition, a substrate holding robot 23 and a substrate holding robot 24 are respectively installed on the robot arm 21 and the robot arm 22. The transport robot 20 is arranged in the approximate center of the transport chamber 104. In addition, the robot arm 21 and the robot arm 22 are examples of a first robot arm and a second robot arm, respectively.

[0027] The control unit 30 is, for example, a computer having a CPU (Central Processing Unit), a RAM (Random Access Memory), and a ROM (Read Only Memory). In addition, the control unit 30 has a storage device including a flash memory such as an SSD (Solid State Drive). The control unit 30 can be configured at a position separate from the transport robot 20, or can be configured integrally with the transport robot 20. The control unit 30 controls the actions of each part of the substrate transport robot system 100 based on the program and parameters pre-stored in the storage device. In the present embodiment, the control unit 30 controls the respective transport actions of the robot arm 21 and the robot arm 22 that transport multiple substrates 10. The control unit 30 controls the transport action of the substrate 10 based on a control signal from a higher-level control device (not shown) that controls the entire substrate processing system 101. The details of the control of the transport action by the control unit 30 will be described later.

[0028] like Figure 3As shown, the handling robot 20 is a horizontal multi-joint wafer handling robot that carries in and out the substrate 10 between the loading lock part 102 and the processing module part 103. The robot arm 21 and the robot arm 22 are respectively rotated and extended by driving a plurality of joints. In addition, the robot arm 21 and the robot arm 22 are respectively independently operated by the control processing performed by the control unit 30. Specifically, the robot arm 21 and the robot arm 22 each have two arms connected to each other. The robot arm 21 and the robot arm 22 each have a servo motor as a driving source. In addition, the robot arm 21 and the robot arm 22 each have an encoder for obtaining the rotation speed of the servo motor. The control unit 30 controls the respective actions of the robot arm 21 and the robot arm 22 through feedback control based on the output from the encoder. In addition, each of the robot arm 21 and the robot arm 22 is respectively installed with a substrate holding robot 23 and a substrate holding robot 24 on one end side of the two arms connected to each other, and is connected to a common base part 25 on the other end side. The robot arms 21 and 22 rotate and extend independently relative to the base 25. The base 25 has a direct-acting mechanism that independently moves the robot arms 21 and 22 in the vertical direction. The direct-acting mechanism has, for example, a servo motor as a driving source.

[0029] The substrate holding robot 23 and the substrate holding robot 24 hold a pair of substrates 10, respectively. Specifically, the substrate holding robot 23 has a pair of holding parts 23a and a holding part 23b. In addition, the substrate holding robot 24 also has a pair of holding parts 24a and a holding part 24b. The holding part 23a and the holding part 23b each hold one of the pair of substrates 10. That is, the holding part 23a and the holding part 23b each hold one substrate 10. The holding part 24a and the holding part 24b also hold one substrate 10, respectively. The holding part 23a, the holding part 23b, the holding part 24a, and the holding part 24b are thin plate-shaped support plates that support the substrates 10, respectively. In addition, the holding part 23a, the holding part 23b, the holding part 24a, and the holding part 24b each have a U-shaped front end that is divided into two branches, and support the back side of the outer peripheral portion of the approximately disc-shaped substrate 10 from the lower side in the vertical direction. In addition, each of the substrate holding robots 23 and 24 does not have an actuator that drives the substrates 10 held by the holding portion 23a, the holding portion 23b, the holding portion 24a, and the holding portion 24b, respectively, and is a passive end effector that supports the substrate 10 from below in the vertical direction without fixing it.

[0030] In each of the substrate holding robot 23 and the substrate holding robot 24, a pair of substrates 10 are held in a state of being arranged left and right along a horizontal plane. The holding portion 23a and the holding portion 23b are formed integrally with each other, and the holding portion 24a and the holding portion 24b are formed integrally with each other. That is, in each of the substrate holding robot 23 and the substrate holding robot 24, a pair of substrates 10 are held in a state where the relative positional relationship is fixed. The substrate transport robot system 100 transports the pair of substrates 10 held by the substrate holding robot 23 in an integral manner by operating the robot arm 21. Similarly, the substrate transport robot system 100 transports the pair of substrates 10 held by the substrate holding robot 24 in an integral manner by operating the robot arm 22. In addition, the structure of the substrate holding robot 23 and the structure of the substrate holding robot 24 are common to each other. That is, the distance D1 between the centers of the positions of each holding portion 23a and the holding portion 23b of the substrate holding robot 23 and the distance D2 between the centers of the positions of each holding portion 24a and the holding portion 24b of the substrate holding robot 24 are approximately equal to each other, so that the spacing between a pair of substrates 10 held by the substrate holding robot 23 and the spacing between a pair of substrates 10 held by the substrate holding robot 24 are approximately equal to each other.

[0031] like Figure 4 As shown, in the loading lock part 102, the substrate 10 is placed on the placement part 40. The placement part 40 has a pair of placement parts 41 and 42, which are substantially equal in height to each other as the placement positions in the vertical direction. The substrate holding robot 23 and the substrate holding robot 24 collectively hold the substrates 10 arranged on each of the placement parts 41 and the placement parts 42, respectively. In the loading lock part 102, the distance D3 between the centers of the positions where the placement parts 41 and the placement parts 42 hold the substrates 10 is substantially equal to the distance D1 between the holding parts 23a and 23b, and the distance D2 between the holding parts 24a and 24b, respectively.

[0032] In addition, if Figure 5As shown, the plurality of processing module parts 103 each have a loading part 50 for loading the substrate 10. For example, the plurality of processing module parts 103 are respectively configured to collectively process every two substrates 10. That is, in each of the plurality of processing module parts 103, two substrates 10 are loaded on the loading part 50. Specifically, the plurality of processing module parts 103 each have a pair of loading parts 51 and a loading part 52 as the loading parts 50, whose loading positions have different heights from each other. The heights of the positions in the vertical direction as the loading positions of the pair of loading parts 51 and the loading part 52 are different from each other. Specifically, the height of the loading position of the loading part 52 is lower than that of the loading part 51. In addition, the positional relationship in the horizontal direction is the same as that of the loading parts 41 and the loading parts 42. That is, in the top view, the placement parts 51 and 52 are arranged in a state where the centers of the positions holding the substrate 10 are separated from each other by a distance D4, which is substantially equal to the distance D1 between the holding parts 23a and 23b and the distance D2 between the holding parts 24a and 24b. Therefore, the distance D4 in each of the plurality of processing module parts 103 is substantially equal to the distance D3 of the load lock part 102.

[0033] The substrate transport robot system 100 collectively transports the substrates 10 in pairs between the load lock 102 and each of the plurality of process module units 103 by independently operating the two robot arms 21 and 22. That is, in the substrate transport robot system 100, the substrates 10 are collectively transported in pairs between the two loading units 41 and 42 of the load lock 102 and the two loading units 51 and 52 of each of the process module units 103.

[0034] (Detection Department)

[0035] like Figure 2 As shown, the substrate processing system 101 includes a detection unit 60. The detection unit 60 detects each of a pair of substrates 10 held by the substrate holding robot 23 and the substrate holding robot 24 of the transfer robot 20. The detection unit 60 detects a pair of substrates 10 for each of the robot arms 21 and 22.

[0036] like Figure 6As shown, specifically, the detection unit 60 includes a plurality of transmission-type laser sensors. The detection unit 60 as a transmission-type laser sensor includes a light-emitting unit having a light source such as an LED (Light-Emitting Diode) for irradiating laser light, and a light-receiving unit having a light-receiving element such as a CCD (Charge Coupled Device) image sensor. For example, the detection unit 60 is arranged on the side of the loading lock unit 102 and on each side of the plurality of processing module units 103 in the conveying chamber 104 of the substrate processing system 101. The detection unit 60 is arranged relative to the loading unit 40 or the loading unit 50 in such a manner that the position where the substrate 10 passes during the conveying action is used as the detection object area. That is, the detection unit 60 is arranged to detect the position where the substrate 10 passes at a position closer to the loading unit 40 and the loading unit 50 when the substrate 10 held by the substrate holding robot 23 and the substrate holding robot 24, respectively, is conveyed toward the loading unit 40 or the loading unit 50.

[0037] Four detection units 60 are arranged for each of the loading units 40 and the loading units 50 on which a pair of substrates 10 are loaded. That is, a pair of detection units 60, which are transmission-type laser sensors including a set of a light projecting unit and a light receiving unit, are arranged for each of the loading units 41 and the loading units 42 of the loading unit 40 on which one substrate 10 is loaded, or for each of the loading units 51 and the loading units 52 of the loading unit 50. In the substrate processing system 101, one substrate 10 is detected by a pair of detection units 60. For example, in Figure 1 In the example, a pair of substrates 10 are transported to four processing module units 103 and one load lock unit 102, respectively. Therefore, in the substrate processing system 101, four detection units 60 are configured for each of the four processing module units 103 and one load lock unit 102, and a total of 20 detection units 60 are configured. Moreover, the plurality of detection units 60 respectively output detection results indicating that the substrates 10 have been detected to the control unit 30. In addition, in Figure 6 , an example is shown in which the substrate 10 is transported to the mounting portion 50 of the process module portion 103 by the substrate holding robot 23 , but the same is true for the case where the substrate 10 is transported by the substrate holding robot 24 and the case where the substrate 10 is transported to the mounting portion 40 .

[0038] (Details of the control of the transport operation by the control unit)

[0039] like Figure 7 and Figure 8As shown, in the present embodiment, the control unit 30 controls the transporting motion of the robot arm 21 and the robot arm 22 based on the detection result of the detection unit 60 so as to independently transport the pair of substrates 10 to the loading portion 41 and the loading portion 42 of the loading portion 40, and the loading portion 51 and the loading portion 52 of the loading portion 50. In addition, the control of the transporting motion of the robot arm 21 and the control of the transporting motion of the robot arm 22 are the same as each other, so in the following description, only the control of the transporting motion of the robot arm 21 is described, and the description of the control of the transporting motion of the robot arm 22 is omitted.

[0040] In the present embodiment, after the pair of substrates 10 are held by the substrate holding robot 23, the control unit 30 obtains the offset of each of the pair of substrates 10 held by the substrate holding robot 23 relative to a predetermined reference position based on the detection result of the detection unit 60. For example, the control unit 30 obtains the offset of each of the pair of substrates 10 relative to the configuration of the substrate holding robot 23 based on the detection result of the detection unit 60. Here, the obtained "offset" includes the size and direction of the positional offset relative to the substrate holding robot 23 along the horizontal plane.

[0041] Specifically, in order to obtain the offset of one substrate 10 relative to the substrate holding robot 23, the control unit 30 calculates the positions of four points of the peripheral part of one substrate 10 based on the detection results from the two detection units 60. For each of the detection units 60, which are transmission-type laser sensors, two points are detected: a point at which the laser light switches from the transmission state to the light shielding state due to the passage of the substrate 10, and a point at which the laser light switches from the light shielding state to the transmission state. The control unit 30 stores the position of the detection object of the detection unit 60 in advance. The control unit 30 obtains the positions of the four points of the peripheral part of the substrate 10 by obtaining the position of the detection object of the detection unit 60 and the speed at which the substrate holding robot 23 is moved. Then, the control unit 30 calculates a circle passing through three of the four points obtained as the substrate 10. There are four ways to select three points from the four points, so the control unit 30 calculates four circles based on the positions of the four points obtained. The control unit 30 obtains the average position of the center points of the four circles as the center position of the substrate 10 held by the substrate holding robot 23. Furthermore, when any of the four points of the peripheral portion of the substrate 10 is detected at a position beyond the prescribed range, the notch portion or the oriented flat edge portion serving as the position reference may be excluded, and the center of the circle passing through the remaining three points may be used as the center position of the substrate 10. In addition, the control unit 30 may determine whether an abnormality has occurred in the conveyance of the substrate 10 by determining whether the substrate 10 is arranged at a position beyond the prescribed range in the substrate holding robot 23.

[0042] As described above, the control unit 30 calculates the center position of each of the pair of substrates 10 held by the substrate holding robot 23. Furthermore, the control unit 30 stores in advance the detection result of the detection unit 60 when the substrate 10 is not positionally shifted in the substrate holding robot 23 as a reference configuration position. When the pair of substrates 10 are transported, the control unit 30 calculates the amount of displacement of the substrate 10 relative to the configuration of the substrate holding robot 23 by comparing the detection result of the detection unit 60 with the pre-stored reference configuration position.

[0043] Moreover, in this embodiment, the control unit 30 controls the conveying action of the robot arm 21 based on the respective offset amounts of a pair of substrates 10 obtained after being held by the substrate holding robot 23, so that each of a pair of substrates 10 respectively held by a pair of holding parts 23a and a holding part 23b in the substrate holding robot 23 is independently loaded onto the loading part 40 or the loading part 50.

[0044] <When mounted on the mounting portion of the processing module portion>

[0045] like Figure 7 As shown, in the conveying operation of the robot arm 21, when a pair of substrates 10 are independently carried to a pair of loading sections 51 and 52 at different heights at the loading position, the control section 30 sequentially loads the pair of substrates 10 on each of the pair of loading sections 51 and 52 based on the offset amounts obtained for each of the pair of substrates 10. For example, one of the pair of substrates 10 held by the substrate holding robot 23, which is held by the holding section 23a and loaded on the loading section 51 at a relatively high height at the loading position, is set as the substrate 10a. And, the other substrate 10 held by the holding section 23b and loaded on the loading section 52 at a relatively low height at the loading position is set as the substrate 10b. The substrate 10a and the substrate 10b are examples of the first substrate and the second substrate, respectively.

[0046] The control unit 30 obtains the respective offset amounts of the substrate 10a and the substrate 10b based on the detection result of the detection unit 60. When the substrate 10a and the substrate 10b as a pair of substrates 10 are independently carried to each of the loading unit 51 and the loading unit 52, the control unit 30 controls the conveying operation of the robot arm 21 based on the offset amount of the substrate 10a so that the substrate 10a is loaded on the loading unit 51. After that, after the substrate 10a is loaded on the loading unit 51, the control unit 30 controls the conveying operation of the robot arm 21 based on the offset amount of the substrate 10b so that the substrate 10b is loaded on the loading unit 52.

[0047] For example, when a substrate 10a and a substrate 10b as a pair of substrates 10 are transported to the process module unit 103, the control unit 30 controls the transporting operation of the robot arm 21 so that the substrate holding robot 23 holding the substrates 10a and 10b moves toward the placement unit 51 and the placement unit 52 of the placement unit 50 of the process module unit 103. During the movement, the detection unit 60 disposed on the process module unit 103 side detects the substrates 10a and 10b, respectively, and the control unit 30 obtains the offset amounts of the substrates 10a and 10b based on the detection results of the detection unit 60. The control unit 30 corrects the transporting operation of the robot arm 21 based on the obtained offset amount of the substrate 10a relative to the preset position of the placement unit 51, and operates the robot arm 21 so that the substrate 10a held by one holding unit 23a of the substrate holding robot 23 is disposed at a position directly above the position placed on the placement unit 51 in the vertical direction. Then, the control unit 30 lowers the robot arm 21 in the vertically downward direction so as to place the substrate 10 a on the placement unit 51 .

[0048] After the substrate 10a is placed on the placement portion 51, the control unit 30 operates the robot arm 21 based on the obtained offset amount of the substrate 10b so as to arrange the substrate 10b held by the holding portion 23b of the substrate holding robot 23 at a position directly above the position placed on the placement portion 52 in the vertical direction. At this time, the control unit 30 moves the substrate holding robot 23 along the horizontal plane in a state where the substrate 10b is held at a height between the placement portion 51 and the placement portion 52 in the vertical direction so as to adjust the position of the substrate 10b in the horizontal plane. Then, the control unit 30 lowers the robot arm 21 downward in the vertical direction so as to place the substrate 10b on the placement portion 52. After the substrate 10b is placed on the placement portion 52, the control unit 30 operates the robot arm 21 so as to move the substrate holding robot 23 away from the process module unit 103.

[0049] <When the device is placed on the loading portion of the loading lock portion>

[0050] like Figure 8 As shown, in the present embodiment, in the conveying operation of the robot arm 21, when the pair of substrates 10 are independently conveyed to each of the pair of placing portions 41 and the placing portions 42 having substantially equal heights to each other at the placing positions, the control unit 30 places the pair of substrates 10 substantially simultaneously on each of the pair of placing portions 41 and the placing portions 42 based on the respective offset amounts of the pair of substrates 10. Specifically, the control unit 30 controls the conveying operation of the robot arm 21 based on the average value of the respective offset amounts of the pair of substrates 10 so that the pair of substrates 10 are placed substantially simultaneously on each of the pair of placing portions 41 and the placing portions 42.

[0051] When the pair of substrates 10 are transported to the load lock part 102, the control unit 30 controls the transport operation of the robot arm 21 so that the substrate holding robot 23 holding the pair of substrates 10 moves toward the loading part 41 and the loading part 42 of the loading part 40 of the load lock part 102. As in the case of transporting to the processing module part 103, during the movement, the detection unit 60 detects the pair of substrates 10 respectively, and the control unit 30 obtains the offset of each of the pair of substrates 10 based on the detection result of the detection unit 60. In addition, the control unit 30 calculates the average value of the offset of each of the pair of substrates 10, and corrects the transport operation of the robot arm 21 based on the calculated average value of the offset. That is, the control unit 30 operates the robot arm 21 so that the positions of both the pair of substrates 10 held by the substrate holding robot 23 are corrected in the same direction above the loading part 41 and the loading part 42 in the vertical direction by an amount corresponding to the magnitude of the average value of the offset. Furthermore, the control unit 30 lowers the robot arm 21 in the vertical direction downward so that the pair of substrates 10 are substantially simultaneously placed on the placement portion 41 and the placement portion 42. After the pair of substrates 10 are placed on the placement portion 41 and the placement portion 42, the control unit 30 operates the robot arm 21 so that the substrate holding robot 23 is separated from the loading lock portion 102.

[0052] The same applies to the control of the transporting motion of the robot arm 22 when transporting a pair of substrates 10 held by the substrate holding robot 24. The control unit 30 obtains the offset amounts of the pair of substrates 10 for the robot arm 21 and the robot arm 22, respectively, based on the detection result of the detection unit 60. In addition, the control unit 30 controls the transporting motion of the robot arm 21 and the robot arm 22, respectively, based on the offset amounts of the pair of substrates 10 obtained for each of the robot arm 21 and the robot arm 22, so that the pair of substrates 10 are independently placed on each of the placing portions 41 and 42 of the placing portion 40, or each of the placing portions 51 and 52 of the placing portion 50. The control unit 30 performs control in such a manner that the transporting motion of the robot arm 21 and the transporting motion of the robot arm 22 are alternately performed.

[0053] (Substrate conveying method control process)

[0054] Next, refer to Fig. 9 Next, a control process of a substrate transport method performed by the substrate transport robot system 100 will be described. The control process of the substrate transport method is performed by the control unit 30.

[0055] First, in step S1 , the substrates 10 placed one each on the placement section 41 and the placement section 42 of the load lock section 102 are held by the holding section 23 a and the holding section 23 b of the substrate holding robot 23 .

[0056] Next, in step S2 , the operation of the robot arm 21 is controlled so that the substrate holding robot 23 moves toward one of the plurality of process module units 103 .

[0057] Next, in step S3 , the detection unit 60 disposed on the process module unit 103 side detects the pair of substrates 10 held by the holding unit 23 a and the holding unit 23 b of the substrate holding robot 23 , respectively, and the detection result is acquired from the detection unit 60 .

[0058] Next, in step S4 , based on the detection result obtained from the detection unit 60 , the displacement amount of each of the pair of substrates 10 with respect to the arrangement of the substrate holding robot 23 is obtained.

[0059] Next, in step S5, based on the obtained offset, the conveying operation of the robot arm 21 is controlled so that the substrate 10 is sequentially placed on each of the placement sections 51 and the placement sections 52 of the placement sections 50 of the plurality of processing module sections 103. Specifically, based on the offset of the substrate 10a, which is the substrate 10 held by the holding section 23a of the substrate holding robot 23, the substrate 10a is placed on the placement section 51 at a relatively high placement position. Thereafter, based on the offset of the substrate 10b, which is the substrate 10 held by the holding section 23b of the substrate holding robot 23, the substrate 10b is placed on the placement section 52 at a relatively low placement position.

[0060] Next, in step S6 , the substrate holding robot 23 is moved so as to be retracted from the mounting portion 50 of the process module unit 103 .

[0061] Next, in step S7, after the processing of the substrate 10 is completed in the processing module part 103, the substrates 10 respectively loaded on the loading part 51 and the loading part 52 of the loading part 50 which is the processing module part 103 are held in the holding part 23a and the holding part 23b of the substrate holding robot 23 respectively.

[0062] Next, in step S8 , the operation of the robot arm 21 is controlled so that the substrate holding robot 23 moves toward the load lock portion 102 .

[0063] Next, in step S9 , the detection unit 60 disposed on the load lock unit 102 side detects the pair of substrates 10 held by the holding unit 23 a and the holding unit 23 b of the substrate holding robot 23 , respectively, and the detection result is acquired from the detection unit 60 .

[0064] Next, in step S10 , similarly to step S4 , the amount of displacement of each of the pair of substrates 10 relative to the substrate holding robot 23 is acquired based on the detection result acquired from the detection unit 60 .

[0065] Next, in step S11, based on the obtained offset amount, the conveying operation of the robot arm 21 is controlled so that the substrates 10 are substantially simultaneously placed on the placement portion 41 and the placement portion 42 of the placement portions 40 of the load lock portion 102. Specifically, based on the average value of the respective offset amounts of the pair of substrates 10 held by the substrate holding robot 23, the pair of substrates 10 are substantially simultaneously placed on the placement portion 41 and the placement portion 42.

[0066] Next, in step S12 , the substrate holding robot 23 is moved so as to be retracted from the placement portion 40 of the load lock portion 102 .

[0067] In addition, the example of the case where the robot arm 21 equipped with the substrate holding robot 23 is operated in steps S1 to S12 is described, but the same is true for the case where the robot arm 22 equipped with the substrate holding robot 24 is operated. In addition, after the steps of carrying a pair of substrates 10 to the processing module part 103 of steps S1 to S6 are performed a number of times corresponding to the number of the plurality of processing module parts 103 for each processing module part 103, the steps of carrying a pair of substrates 10 to the load lock part 102 of steps S7 to S12 may be repeatedly performed a number of times corresponding to the number of the processing module parts 103. In this case, the robot arm 21 equipped with the substrate holding robot 23 and the robot arm 22 equipped with the substrate holding robot 24 may be operated alternately.

[0068] [Effects of Embodiment]

[0069] In this embodiment, the following effects can be obtained.

[0070] The present invention includes a control unit 30, which obtains the displacement of each of the plurality of substrates 10 relative to a predetermined reference position based on the detection results of the detection unit 60 that detects each of the plurality of substrates 10 held by the substrate holding robots 23 and 24, and controls the conveying operation of the robot arms 21 and 22 that convey the plurality of substrates 10 based on the respective displacements obtained so that the plurality of substrates 10 are independently conveyed to the loading unit 40 or the loading unit 50. Thus, even when the substrates 10 are arranged in a state of displacement relative to the predetermined reference position, the control unit 30 controls the conveying operation of the robot arms 21 and 22 based on the displacement, so that the plurality of substrates 10 can be conveyed in a manner that corrects the displacement of the arrangement without changing the relative arrangement of each of the plurality of substrates 10 relative to the substrate holding robots 23 and 24. As a result, the plurality of substrates 10 can be conveyed with high accuracy while suppressing contact with components other than the substrates 10.

[0071] A plurality of substrates 10 are held by a substrate holding robot 23 integrally formed with a plurality of holding portions 23a and 23b, and a substrate holding robot 24 integrally formed with a plurality of holding portions 24a and 24b, respectively, in a state where they are arranged left and right along a horizontal plane. The control unit 30 controls the conveying movements of the robot arms 21 and 22 based on the respective offset amounts obtained, so that the plurality of substrates 10 held by the plurality of holding portions 23a and 23b integrally formed in the substrate holding robot 23 are independently moved into the loading portion 40 or the loading portion 50, and the plurality of substrates 10 held by the plurality of holding portions 24a and 24b integrally formed in the substrate holding robot 24 are independently moved into the loading portion 40 or the loading portion 50. Thus, whether the substrate 10 is held by the plurality of holding portions 23a and 23b integrally formed in the substrate holding robot 23 or the substrate 10 is held by the plurality of holding portions 24a and 24b integrally formed in the substrate holding robot 24, the conveying operation of the robot arms 21 and 22 can be controlled based on the offset of each substrate 10. Therefore, even when the plurality of substrates 10 are held by the integral holding portions 23a and 23b and the integral holding portions 24a and 24b in such a manner that the relative positional relationship does not change, the plurality of substrates 10 can be placed on the placement portions 40 and 50 with high accuracy without changing the respective arrangements of the plurality of substrates 10 relative to the substrate holding robots 23 and 24. As a result, even when, in each of the substrate holding robot 23 and the substrate holding robot 24 that collectively transport multiple substrates 10, the holding parts 23a and 23b are integrally formed and the holding parts 24a and 24b are integrally formed so that the multiple substrates 10 held do not move relative to each other, the multiple substrates 10 can be transported with high precision while suppressing contact with parts other than the substrates 10.

[0072] When the plurality of substrates 10 are independently carried to each of the plurality of placing parts 51 and 52 at different heights at the placing positions during the transport operation of the robot arms 21 and 22, the control unit 30 sequentially places the plurality of substrates 10 on each of the plurality of placing parts 51 and 52 based on the respective offset amounts of the plurality of substrates 10. Thus, by sequentially placing the substrates 10 on each of the plurality of placing parts 51 and 52 at different heights at the placing positions, the substrates 10 can be placed one by one while sequentially aligning the substrates 10 with respect to the plurality of placing parts 51 and 52 based on the offset amounts obtained. Therefore, even when the offset amounts of the plurality of substrates 10 are different from each other, the substrates 10 can be sequentially placed on the placing parts 51 and 52 in a manner corresponding to the offset amounts of the plurality of substrates 10, so that when the plurality of substrates 10 are transported, it is possible to transport with higher accuracy while suppressing contact with components other than the substrates 10.

[0073] The substrate holding robot 23 has a pair of holding parts 23a and 23b for holding a pair of substrates 10 respectively, the substrate holding robot 24 has a pair of holding parts 24a and 24b for holding a pair of substrates 10 respectively, the loading part 50 includes: a loading part 51 for loading the substrate 10a as one of the pair of substrates 10; and a loading part 52 for loading the substrate 10b as the other of the pair of substrates 10 separately from the loading part 51, and the height of the loading position is lower than the loading part 51, the control part 30 obtains the respective offsets of the substrates 10a and the substrate 10b based on the detection result of the detection part 60, and when a plurality of substrates 10 are independently moved into each of the loading part 51 and the loading part 52, the robot arms 21 and 22 are controlled to carry out the conveying action so that the substrate 10a is loaded on the loading part 51 based on the offset of the substrate 10a, and after the substrate 10a is loaded on the loading part 51, the substrate 10b is loaded on the loading part 52 based on the offset of the substrate 10b. Thus, after placing the substrate 10a on the placing portion 51 with a higher placing position among the placing portions 51 and the placing portions 52 with different heights, the robot arms 21 and 22 are operated to carry the substrate 10 on the placing portion 52 with a lower placing position, thereby enabling the substrates 10a and 10b to be carried in order from the side with a higher placing position. Therefore, in a series of operations in which the substrate holding robots 23 and 24 are moved from the upper side to the lower side in the vertical direction, the robot arms 21 and 22 are operated to carry the substrates 10a and 10b in order on the placing portion 51 and the placing portion 52, respectively. As a result, when the substrates 10a and 10b are placed on the placing portions 51 and the placing portions 52 with different heights, respectively, the carrying operations of the robot arms 21 and 22 can be suppressed from being complicated, and thus a plurality of substrates 10a and 10b can be carried easily and with high accuracy while suppressing contact with components other than the substrate 10.

[0074] When the plurality of substrates 10 are independently carried to each of the plurality of placing parts 41 and 42 whose heights are substantially equal to each other at the placing positions during the transport operation of the robot arms 21 and 22, the control unit 30 places the plurality of substrates 10 substantially simultaneously on each of the plurality of placing parts 41 and 42 based on the respective offset amounts of the plurality of substrates 10. Thus, when the substrates 10 are carried to each of the plurality of placing parts 41 and 42 whose heights are substantially equal to each other at the placing positions, the plurality of substrates 10 can be placed on the plurality of placing parts 41 and 42 simultaneously while adjusting the positions based on the offset amounts. Therefore, when the placing positions of the plurality of placing parts 41 and 42 are substantially equal in height, the substrates 10 can be placed on the placing parts 41 and 42 without performing repeated operations a plurality of times, compared with the case where the substrates 10 are sequentially arranged one by one. As a result, the transport operation of the substrate holding robots 23 and 24 can be suppressed from being complicated, so that the plurality of substrates 10 can be easily and accurately transported while suppressing contact with components other than the substrates 10.

[0075] The control unit 30 controls the conveying motion of the robot arms 21 and 22 based on the average value of the respective offset amounts of the plurality of substrates 10 so that the plurality of substrates 10 are respectively placed on each of the plurality of placement portions 41 and 42 substantially at the same time. Thus, when placing the substrate 10 on each of the plurality of placement portions 41 and 42 whose placement positions have substantially equal heights, the conveying motion of the robot arms 21 and 22 is controlled based on the average value of the offset amounts, thereby making it possible to convey the plurality of substrates 10 in a manner that averagely corrects the respective offset amounts of the plurality of substrates 10. Therefore, the plurality of substrates 10 can be respectively conveyed to each of the plurality of placement portions 41 and 42 with higher accuracy while suppressing contact with components other than the substrates 10.

[0076] When the plurality of substrates 10 are independently carried to the loading sections 40 and 50, the control section 30 obtains the respective displacement amounts of the plurality of substrates 10 based on the detection results of the detection section 60 after the plurality of substrates 10 are held by the substrate holding robots 23 and 24, and controls the conveying operations of the robot arms 21 and 22 based on the respective displacement amounts of the plurality of substrates 10 obtained after the plurality of substrates 10 are held by the substrate holding robots 23 and 24 so that the plurality of substrates 10 are independently loaded onto the loading sections 40 and 50. Thus, even when the substrates 10 are displaced when being held by the substrate holding robots 23 and 24, the conveying operations of the robot arms 21 and 22 can be controlled so as to compensate for the displacement amounts generated when being held by the substrate holding robots 23 and 24 by obtaining the respective displacement amounts of the plurality of substrates 10 based on the detection results of the detection section 60 after the plurality of substrates 10 are held by the substrate holding robots 23 and 24. As a result, even if the substrate 10 is displaced while being held by the substrate holding robots 23 and 24 , the substrate 10 can be accurately conveyed to the placement units 40 and 50 while preventing contact with members other than the substrate 10 .

[0077] When the plurality of substrates 10 are independently carried to the placement sections 40 and 50, the control section 30 obtains the offset of each of the plurality of substrates 10 relative to the arrangement of the substrate holding robots 23 and 24 based on the detection result of the detection section 60. Thus, the conveying operation of the robot arms 21 and 22 to which the substrate holding robots 23 and 24 are mounted can be controlled based on the offset of the substrate 10 relative to the substrate holding robots 23 and 24. Therefore, by controlling the conveying operation of the robot arms 21 and 22, the positions of the substrate holding robots 23 and 24 can be corrected while conveying the substrate 10 so that the substrate 10 held by the substrate holding robots 23 and 24 can be placed on the placement sections 40 and 50. As a result, the plurality of substrates 10 can be conveyed to the placement sections 40 and 50 with higher accuracy while suppressing contact with components other than the substrate 10.

[0078] The substrate transport robot system 100 includes a robot arm 21 and a robot arm 22, each of which is equipped with a substrate holding manipulator 23 and 24 and moves independently. The detection unit 60 detects multiple substrates 10 for each of the robot arms 21 and the robot arm 22 respectively. The control unit 30 obtains the respective offset amounts of the multiple substrates 10 for each of the robot arms 21 and the robot arm 22 based on the detection results of the detection unit 60, and controls the transporting actions of the robot arms 21 and 22 based on the respective offset amounts of the multiple substrates 10 obtained for each of the robot arms 21 and the robot arm 22, so that the multiple substrates 10 can be independently moved into the loading unit 40 or the loading unit 50 respectively. Thus, for each of the robot arms 21 and 22, the transporting motion of the robot arms 21 and 22 is controlled based on the offset, and thus, for each of the robot arms 21 and 22, a plurality of substrates 10 held by the substrate holding robots 23 and 24 mounted on each of the robot arms 21 and 22 can be transported with high accuracy while suppressing contact with components other than the substrate 10. As a result, compared with the case where the substrate 10 is transported using one robot arm, the number of substrates 10 transported per unit time can be increased by using two robot arms 21 and 22, so that when transporting a plurality of substrates 10, it is possible to transport with high accuracy while suppressing contact with components other than the substrate 10, and the number of substrates 10 transported per unit time can be increased.

[0079] [Modifications]

[0080] In addition, all points of the embodiments disclosed this time should be considered as illustrative and not limiting the present invention. The scope of the present disclosure is not limited by the description of the above-mentioned embodiments, but is indicated by the claims, and includes the meaning equivalent to the claims and all changes (modifications) within the scope thereof.

[0081] For example, in the above embodiment, when a plurality of substrates 10 are independently carried into the loading sections 40 and 50, the control section 30 obtains the offsets of the plurality of substrates 10, and controls the conveying motion of the robot arms 21 and 22 based on the offsets obtained, but the present disclosure is not limited thereto. In the present disclosure, when a plurality of substrates are independently carried out from the loading section, the control section may obtain the offsets for each robot arm, as in the case of carrying in as in the above embodiment, and control the conveying motion of the robot arm based on the offsets obtained. Thus, as in the case of carrying in, a plurality of substrates can be conveyed with high precision while suppressing contact with components other than the substrates. In this case, the position of the substrate placed on the loading section may be detected by a detection section such as a camera section, thereby obtaining the offsets of the plurality of substrates placed on the loading section with the position of the loading section as a predetermined reference position.

[0082] In addition, in the case where each of the plurality of substrates is independently carried out from a plurality of loading sections having different heights of the loading positions, as in the case of carrying in, each of the plurality of substrates may be sequentially held from the plurality of loading sections based on the respective offsets of the plurality of substrates. For example, in the case where each of a pair of first and second substrates is independently carried out from the first loading section and the second loading section, the second substrate may be held from the second loading section based on the offset of the second substrate, and after the second substrate is held from the second loading section, the first substrate may be held from the first loading section based on the offset of the first substrate. That is, each of the plurality of substrates may be sequentially held starting from the side with the lower height position of the plurality of loading sections based on the offset. Thus, as in the case of carrying in, the complexity of the handling action of the robot arm can be suppressed, so that the plurality of substrates can be easily and accurately carried while suppressing contact with parts other than the substrates.

[0083] In addition, when a plurality of substrates are independently carried out from a plurality of loading parts having substantially equal heights, the plurality of substrates can be held substantially simultaneously based on the average value of the offsets, as in the case of carrying in. Thus, as in the case of carrying in, the plurality of substrates can be carried to each of the plurality of loading parts with higher accuracy while suppressing contact with components other than the substrates. In addition, the offset can be obtained during both the carrying in and the carrying of the substrate, and the carrying action of the robot arm can be controlled based on the obtained offset.

[0084] In addition, in the above-mentioned embodiment, an example is shown in which the substrate holding robots 23 and 24 are arranged in the left-right direction in a manner along the horizontal plane, but the present disclosure is not limited to this. In the present disclosure, the substrate holding robot may not arrange the substrates along the horizontal plane, but may arrange the substrates in the left-right direction in a state of being staggered in the vertical direction. In addition, the substrate holding robot may not arrange the substrates in the left-right direction, but may arrange the substrates in the vertical direction to hold them.

[0085] In addition, in the above-mentioned embodiment, an example is shown in which the substrate holding robots 23 and 24 respectively hold a pair of substrates 10, but the present disclosure is not limited to this. In the present disclosure, the substrate holding robot may also hold more than three substrates. In addition, the shape of the holding portion of the substrate holding robot may not have a U-shape with a front end divided into two parts. In addition, the substrate holding robot may not be a passive end effector.

[0086] In addition, in the above embodiment, an example is shown in which the displacement of the substrate 10 relative to the configuration of the substrate holding robot 23 is obtained as the displacement of the substrate 10 relative to the predetermined reference position based on the detection result of the detection unit 60, but the present disclosure is not limited to this. In the present disclosure, the displacement from the preset coordinate position can be obtained, and the displacement from the loading portion as the transfer destination can also be obtained as the displacement of the substrate 10 relative to the predetermined reference position.

[0087] In addition, in the above-mentioned embodiment, an example of two robot arms 21 and 22 that move independently of each other is shown, but the present disclosure is not limited to this. In the present disclosure, only one robot arm may be provided, or three or more robot arms may be provided. In addition, the two robot arms may share a part of the arm. That is, the two robot arms may be connected to a common component that rotates relative to the base portion.

[0088] In addition, in the above-mentioned embodiment, an example is shown in which the detection unit 60 for detecting the substrate 10 is a transmission-type laser sensor, but the present disclosure is not limited to this. In the present disclosure, the detection unit can be a reflection-type laser sensor, or a shooting unit such as a camera that obtains an appearance image. That is, the offset of the substrate can also be obtained based on the captured appearance image. In addition, the detection unit can also be configured in the handling robot of the substrate handling robot system. For example, the detection unit can also be configured in the base portion connected to the robot arm. In addition, the detection unit can also be configured in the robot arm or the substrate holding manipulator.

[0089] In addition, in the above-mentioned embodiment, when the substrates 10 are sequentially placed on the placing parts 51 and 52 at different heights at the placing positions, the detection part 60 detects the pair of substrates 10 respectively during the process of moving toward the placing parts 51 and 52, thereby obtaining the example of the offset of the pair of substrates 10 held by the substrate holding robots 23 and 24, but the present disclosure is not limited to this. In the present disclosure, after placing the substrate on the placing part at the higher placing position and before placing the substrate on the placing part at the lower placing position, the substrate may be detected, thereby obtaining the offset of the substrate placed on the placing part at the lower placing position.

[0090] In addition, in the above-mentioned embodiment, an example is shown in which a plurality of processing module parts 103 are respectively provided with two loading parts 50, namely a loading part 51 and a loading part 52, whose loading position heights are different from each other, but the present disclosure is not limited to this. In the present disclosure, several or all of the plurality of processing module parts may also be provided with a plurality of loading parts whose loading position heights are approximately equal to each other. In addition, a plurality of loading parts may also be provided with a driving mechanism for changing the height of the loading position. In this case, in the case of each of the plurality of substrates being loaded, the height of the loading part is changed in a state where the position of the substrate holding robot is adjusted based on the offset, thereby loading the plurality of substrates respectively on the loading part. Specifically, the conveying action of the robot arm may also be controlled so that the substrate held by the substrate holding robot is arranged at a position directly above the loading part, and the loading part is moved laterally upward, thereby carrying in the substrate.

[0091] In the above embodiment, the substrate transport robot system 100 transports the substrate 10 in the transport chamber 104 maintained at a predetermined vacuum level, but the present disclosure is not limited thereto. In the present disclosure, the substrate may be transported under normal pressure.

[0092] In addition, if Fig.10 As in the substrate processing system involved in the modified example shown in the figure, the processing module parts 203 that process one substrate 10 may also be arranged adjacent to each other in pairs. In this case, the heights of the loading positions of the respective loading parts 251 and the loading parts 252 of the adjacent pair of processing module parts 203 may also be different from each other. That is, the loading position of one loading part 251 of the adjacent pair of processing module parts 203 may also be a position higher than the loading position of the other loading part 252. In this case, the conveying action may also be controlled in the same manner as in the above-mentioned embodiment, so that after the substrate 10 is loaded on the loading part 251 based on the offset amount of one substrate 10, the substrate 10 is loaded on the loading part 252 based on the offset amount of the other substrate 10. Here, the loading part 251 and the loading part 252 are examples of the first loading part and the second loading part, respectively.

[0093] The functions of the elements disclosed in this specification can be performed using circuits or processing circuits, which include general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof that are configured or programmed to perform the disclosed functions. The processor includes transistors and other circuits and is therefore considered to be a processing circuit or circuit. In the present disclosure, a circuit, unit, or mechanism is hardware that performs the listed functions, or is hardware that is programmed to perform the listed functions. The hardware may be the hardware disclosed in this specification, or it may be other known hardware that is programmed or configured to perform the listed functions. In the case where the hardware is a processor that is considered to be a type of circuit, the circuit, mechanism, or unit is a combination of hardware and software, and the software is used for the structure of the hardware and / or processor.

[0094] [Way]

[0095] It should be understood by those skilled in the art that the above-described exemplary embodiments are specific examples of the following aspects.

[0096] (Item 1)

[0097] A substrate handling robot system, characterized in that:

[0098] The above-mentioned substrate handling robot system has:

[0099] A substrate holding robot having a plurality of holding portions for holding each of a plurality of substrates;

[0100] a robot arm having the substrate holding robot arm mounted thereon; and

[0101] The control unit obtains respective offsets of the configurations of the plurality of substrates relative to a predetermined reference position based on detection results of a detection unit that detects the plurality of substrates held by the substrate holding robot, and controls the conveying action of the robot arm that conveys the plurality of substrates based on the respective offsets obtained, so as to perform at least one of independently conveying the plurality of substrates into a loading unit and independently conveying them out from the loading unit.

[0102] (Item 2)

[0103] The substrate transport robot system according to item 1 is characterized in that:

[0104] The plurality of substrates are held by the substrate holding robot having the plurality of holding portions integrally formed therewith in a state where the plurality of substrates are arranged left and right along a horizontal plane.

[0105] The control unit controls the transporting action of the robot arm based on the offset amounts obtained respectively, so as to at least independently transport the multiple substrates held by the multiple holding units integrally formed in the substrate holding robot into the loading unit or independently transport them out from the loading unit.

[0106] (Item 3)

[0107] The substrate transport robot system according to item 1 or 2 is characterized in that:

[0108] The control unit performs at least one of the following actions during the transporting action of the robot arm: when the plurality of substrates are independently transported to each of the plurality of loading portions having different heights at the loading positions, the plurality of substrates are sequentially mounted on each of the plurality of loading portions based on the respective offset amounts of the plurality of substrates; and when the plurality of substrates are independently transported out from each of the plurality of loading portions, each of the plurality of substrates is sequentially held from the plurality of loading portions based on the respective offset amounts of the plurality of substrates.

[0109] (Item 4)

[0110] The substrate transport robot system according to item 3 is characterized in that:

[0111] The substrate holding robot comprises a pair of holding parts for holding each of the pair of substrates.

[0112] The plurality of mounting portions include: a first mounting portion for mounting a first substrate as one of the pair of substrates; and a second mounting portion for mounting a second substrate as the other of the pair of substrates independently of the first mounting portion and at a height lower than that of the first mounting portion.

[0113] The control unit is composed of:

[0114] Based on the detection result of the detection unit, the displacement of each of the first substrate and the second substrate is obtained, and

[0115] When the plurality of substrates are independently carried into each of the first loading portion and the second loading portion, the carrying action of the robot arm is controlled so that the first substrate is placed on the first loading portion based on the offset amount of the first substrate, and after the first substrate is placed on the first loading portion, the second substrate is placed on the second loading portion based on the offset amount of the second substrate,

[0116] When the plurality of substrates are independently carried out from each of the first loading section and the second loading section, the transporting action of the robot arm is controlled so as to hold the second substrate from the second loading section based on the offset amount of the second substrate, and after holding the second substrate from the second loading section, hold the first substrate from the first loading section based on the offset amount of the first substrate.

[0117] (Item 5)

[0118] The substrate transport robot system according to any one of items 1 to 4 is characterized in that:

[0119] The control unit performs at least one of the following actions during the transporting action of the robot arm: when the plurality of substrates are independently transported to each of the plurality of loading sections having substantially equal heights at loading positions, the plurality of substrates are respectively and substantially simultaneously loaded on each of the plurality of loading sections based on the respective offset amounts of the plurality of substrates; and when the plurality of substrates are independently transported out of each of the plurality of loading sections, each of the plurality of substrates is respectively and substantially simultaneously held from the plurality of loading sections based on the respective offset amounts of the plurality of substrates.

[0120] (Item 6)

[0121] The substrate transport robot system according to item 5 is characterized in that:

[0122] The control unit controls the conveying action of the robot arm based on the average value of the respective offset amounts of the plurality of substrates so as to perform at least one of placing the plurality of substrates substantially simultaneously on each of the plurality of loading units and holding each of the plurality of substrates substantially simultaneously from the plurality of loading units.

[0123] (Item 7)

[0124] The substrate transport robot system according to any one of items 1 to 6 is characterized in that:

[0125] The control unit is composed of:

[0126] When the plurality of substrates are independently carried to the placement unit, after the plurality of substrates are held by the substrate holding robot, the respective displacement amounts of the plurality of substrates are obtained based on the detection result of the detection unit, and

[0127] Based on the respective deviation amounts of the plurality of substrates acquired after being held by the substrate holding robot, the conveying operation of the robot arm is controlled so that the plurality of substrates are independently placed on the placement portion.

[0128] (Item 8)

[0129] The substrate transport robot system according to any one of items 1 to 7 is characterized in that:

[0130] The control unit is composed of:

[0131] When the plurality of substrates are independently carried into the placement unit, the offset amounts of the respective plurality of substrates relative to the configuration of the substrate holding robot are obtained based on the detection result of the detection unit.

[0132] When the plurality of substrates are independently carried out from the placement section, the amount of displacement of each of the plurality of substrates relative to the placement section is acquired based on the detection result of the detection section.

[0133] (Item 9)

[0134] The substrate transport robot system according to any one of items 1 to 8 is characterized in that:

[0135] The robot arm includes a first robot arm and a second robot arm, each of which is equipped with the substrate holding robot and moves independently.

[0136] The detection unit detects the plurality of substrates respectively for each of the first robot arm and the second robot arm.

[0137] The control unit is composed of:

[0138] Based on the detection result of the detection unit, the offset amount of each of the plurality of substrates is obtained for each of the first robot arm and the second robot arm, and

[0139] For each of the first robot arm and the second robot arm, the conveying action of the robot arm is controlled based on the offset amounts obtained for each of the plurality of substrates so as to perform at least one of independently conveying the plurality of substrates into the loading portion and independently conveying them out from the loading portion.

Claims

1. A substrate handling robot system, characterized in that: The substrate transport robot system comprises: A substrate holding robot having a plurality of holding portions for holding each of a plurality of substrates; a robot arm having the substrate holding robot mounted thereon; and A control unit obtains respective offset amounts of the configurations of the plurality of substrates relative to a prescribed reference position based on detection results of a detection unit that detects the plurality of substrates held by the substrate holding robot, and controls a conveying action of the robot arm that conveys the plurality of substrates based on the respective offset amounts obtained, so as to perform at least one of independently conveying the plurality of substrates into a loading unit and independently conveying them out of the loading unit.

2. The substrate handling robot system according to claim 1, characterized in that: The plurality of substrates are held by the substrate holding robot having the plurality of holding portions integrally formed therewith in a state where the plurality of substrates are arranged left and right along a horizontal plane. The control unit controls the transporting action of the robot arm based on the respective offset amounts obtained so as to at least independently carry the plurality of substrates held by the plurality of holding units integrally formed in the substrate holding robot into the loading unit or independently carry them out from the loading unit.

3. The substrate handling robot system according to claim 1, characterized in that: The control unit performs at least one of the following operations in the transport operation of the robot arm: when the plurality of substrates are independently transported to each of the plurality of loading sections whose loading positions have different heights, the control unit sequentially loads the plurality of substrates on each of the plurality of loading sections based on the respective offset amounts of the plurality of substrates; When the plurality of substrates are independently carried out from each of the plurality of placement sections, each of the plurality of substrates is sequentially held from the plurality of placement sections based on the respective offset amounts of the plurality of substrates.

4. The substrate handling robot system according to claim 3, characterized in that: The substrate holding robot includes a pair of holding portions for holding each of a pair of substrates. The plurality of loading portions include: a first loading portion for loading a first substrate as one of the pair of substrates; and a second loading portion for loading a second substrate as the other of the pair of substrates independently of the first loading portion and at a loading position lower in height than the first loading portion, The control unit is composed of: Based on the detection result of the detection unit, the displacement amount of each of the first substrate and the second substrate is obtained, and When the plurality of substrates are independently carried into each of the first loading section and the second loading section, the carrying action of the robot arm is controlled so that the first substrate is placed on the first loading section based on the offset amount of the first substrate, and after the first substrate is placed on the first loading section, the second substrate is placed on the second loading section based on the offset amount of the second substrate, When the plurality of substrates are independently moved out from each of the first loading section and the second loading section, the transporting action of the robot arm is controlled so as to hold the second substrate from the second loading section based on the offset amount of the second substrate, and after holding the second substrate from the second loading section, hold the first substrate from the first loading section based on the offset amount of the first substrate.

5. The substrate handling robot system according to claim 1, characterized in that: The control unit performs at least one of the following operations in the transporting operation of the robot arm: when the plurality of substrates are independently carried to each of the plurality of loading sections having loading positions at heights substantially equal to each other, the plurality of substrates are respectively and substantially simultaneously loaded on each of the plurality of loading sections based on the respective offset amounts of the plurality of substrates; When the plurality of substrates are independently carried out from each of the plurality of mounting portions, each of the plurality of substrates is held substantially simultaneously from the plurality of mounting portions based on the respective offset amounts of the plurality of substrates.

6. The substrate handling robot system according to claim 5, characterized in that: The control unit controls the conveying action of the robot arm based on the average value of the respective offset amounts of the plurality of substrates so as to perform at least one of placing the plurality of substrates substantially simultaneously on each of the plurality of loading portions and holding each of the plurality of substrates substantially simultaneously from the plurality of loading portions.

7. The substrate handling robot system according to claim 1, characterized in that: The control unit is composed of: When the plurality of substrates are independently carried into the loading section, after the plurality of substrates are held by the substrate holding robot, the respective displacement amounts of the plurality of substrates are obtained based on the detection result of the detection section, and Based on the respective deviation amounts of the plurality of substrates acquired after being held by the substrate holding robot, the transfer operation of the robot arm is controlled so that the plurality of substrates are individually placed on the placement section.

8. The substrate handling robot system according to claim 1, characterized in that: The control unit is composed of: When the plurality of substrates are independently carried into the placement unit, the offset amount of each of the plurality of substrates relative to the arrangement of the substrate holding robot is obtained based on the detection result of the detection unit. When the plurality of substrates are independently carried out from the placement section, the amount of displacement of each of the plurality of substrates relative to the placement section is acquired based on the detection result of the detection section.

9. The substrate handling robot system according to claim 1, characterized in that: The robot arm includes a first robot arm and a second robot arm, each of which is equipped with the substrate holding robot and operates independently. The detection unit detects the plurality of substrates respectively for each of the first robot arm and the second robot arm. The control unit is composed of: Based on the detection result of the detection unit, the offset amount of each of the plurality of substrates is obtained for each of the first robot arm and the second robot arm, and For each of the first robot arm and the second robot arm, the conveying action of the robot arm is controlled based on the offset amounts obtained for each of the plurality of substrates so as to perform at least one of independently conveying the plurality of substrates into the loading portion and independently conveying them out from the loading portion.

Images