Robot

Abstract

The invention provides a robot which is effective for space saving and maintainability. A robot (10) is provided with: a hand (12) that supports a substrate (W); a base part (11); a multi-joint arm (20) that connects the hand part (12) and the base part (11); one or more motors (40) that drive the articulated arm (20) and change the position of the hand (12) with respect to the base (11); a drive circuit (50) that supplies drive power to the one or more motors (40); and a circuit case (200) that accommodates the drive circuit (50) and is detachably attached to the base (11).

Description

Technical Field

[0001] The present disclosure relates to a robot. Background Art

[0002] In Patent Document 1, a transfer robot is disclosed, which includes a housing, a first arm mounted on the housing, a second arm mounted on the first arm, a third arm mounted on the second arm, and a fourth arm mounted on the third arm. A control device for outputting a drive power source and a control signal to a motor for driving the transfer robot is provided inside the housing.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2007-038360 Summary of the Invention

[0006] The present disclosure provides a robot that is effective in achieving both space saving and maintainability.

[0007] A robot according to one aspect of the present disclosure includes: a hand that supports a substrate; a base; a multi-joint arm that connects the hand and the base; one or more motors that drive the multi-joint arm to change the position of the hand relative to the base; a drive circuit that supplies drive power to the one or more motors; and a circuit housing that houses the drive circuit and is detachably mounted on the base.

[0008] According to the present disclosure, a robot that is effective in achieving both space saving and maintainability can be provided. Brief Description of the Drawings

[0009] Figure 1 It is a cross-sectional view illustrating the structure of the robot.

[0010] Figure 2 It is a front view of the base and the circuit housing after removing the cover.

[0011] Figure 3 It is a rear view of the base and the circuit housing after removing the cover.

[0012] Figure 4 It is a side view of the base and the circuit housing with the cover installed.

[0013] Figure 5 It is a side view illustrating the mounting portion of the second frame with respect to the first frame.

[0014] Figure 6 It is a rear view of the base, the circuit housing, and the power supply housing.

[0015] Figure 7 It is a front view of the base, the circuit housing, and the power supply housing.

[0016] Figure 8 It is a front view showing the state where a cover is installed on the power supply housing.

[0017] Reference numeral description

[0018] 1 Substrate transfer device, W substrate, 90 Chamber, 10 Robot, 12 Hand, 11 Base, 20 Multi-joint arm, 40 Motor, 94 Chamber opening, 14 Flange, 60 Sealing member, 50 Drive circuit, 200 Circuit housing, 110 First frame, 210 Second frame, 214, 215 Wiring opening, 121 First hook, 221 Second hook, 112 First vent, 232 Second vent, 300 Ventilator, 310 Fan, 320 Second fan, 70 Power supply circuit, 400 Power supply housing, C31 Communication connector, CA31 Communication cable. Detailed implementation mode

[0019] Hereinafter, the embodiments will be described in detail with reference to the drawings. In the description, the same reference numerals are assigned to the same elements or elements having the same function, and repeated descriptions are omitted.

[0020] Figure 1 The shown substrate transfer device 1 is a device for transferring a substrate W in a substrate processing device that processes the substrate W. Examples of the substrate W include a semiconductor substrate, a glass substrate, a mask substrate, or an FPD (Flat Panel Display) substrate. As Figure 1 shown, the substrate transfer device 1 includes a chamber 90 and a robot 10. The chamber 90 houses the substrate W being transferred. For example, the chamber 90 has a horizontally extending top plate 91 and a horizontally extending bottom plate 92 below the top plate 91, and the substrate W is housed in the internal space 93 formed between the top plate 91 and the bottom plate 92. The chamber 90 can be a closed type or a pressure-resistant type capable of making the internal space 93 a vacuum.

[0021] The robot 10 transfers the substrate W in the internal space 93. For example, the robot 10 transfers the substrate W between a plurality of stations arranged around the chamber 90. The plurality of stations may also include a load lock chamber that temporarily houses the substrate W to be transferred and a processing chamber that processes the substrate W. For example, the robot 10 transfers the substrate W horizontally in the internal space 93.

[0022] For example, the robot 10 includes a hand 12, a base 11, a multi-joint arm 20, one or more motors 40, and a drive circuit 50. The hand 12 supports the substrate W along the horizontal plane from below. Along the horizontal plane also includes a state slightly inclined with respect to the horizontal plane at an error level. The same applies hereinafter. The hand 12 may also be configured to hold the supported substrate W by adsorption or the like. The base 11 is fixed to the chamber 90.

[0023] The multi-joint arm 20 connects the hand 12 to the base 11. For example, the multi-joint arm 20 is a horizontal multi-joint arm, and has an arm 21 and an arm 22 that are sequentially connected to the hand 12 between the base 11 and the hand 12. The arm 21 is mounted on the base 11 so as to be rotatable about an axis Ax1 along the vertical direction, and extends in a direction away from the axis Ax1. Along the vertical direction also includes a state slightly inclined with respect to the direction perpendicular to the horizontal plane at an error level. The same applies hereinafter.

[0024] The arm 22 is mounted on the end of the arm 21 so as to be rotatable about an axis Ax2 along the vertical direction, and extends in a direction away from the axis Ax2. The hand 12 is mounted on the end of the arm 22 so as to be rotatable about an axis Ax3 along the vertical direction, and extends in a direction away from the axis Ax3. In this way, the multi-joint arm 20 has a joint 23 about the axis Ax1, a joint 24 about the axis Ax2, and a joint 25 about the axis Ax3.

[0025] In order to be able to carry multiple substrates W simultaneously, the robot 10 may also have multiple hands and multiple multi-joint arms corresponding to the multiple hands respectively. For example, in addition to the hand 12 and the multi-joint arm 20, the multi-joint arm 20 also has a hand 13 and a multi-joint arm 30. Similar to the hand 12, the hand 13 supports the substrate W along the horizontal plane from below. The hand 13 may also be configured to hold the supported substrate W by adsorption or the like.

[0026] The multi-joint arm 30 connects the hand 13 to the base 11. For example, the multi-joint arm 30 has an arm 31 and an arm 32 similar to the multi-joint arm 20. The arm 31 is mounted on the base 11 so as to be rotatable about the axis Ax1, and extends in a direction away from the axis Ax1. The arm 32 is mounted on the end of the arm 31 so as to be rotatable about an axis Ax4 along the vertical direction, and extends in a direction away from the axis Ax4. The hand 13 is mounted on the end of the arm 32 so as to be rotatable about an axis Ax5 along the vertical direction, and extends in a direction away from the axis Ax5. In this way, the multi-joint arm 30 has a joint 33 about the axis Ax1, a joint 34 about the axis Ax4, and a joint 35 about the axis Ax5.

[0027] The multi-joint arms 20 and 30 can also be configured such that at least any one or more of the joints 23, 24, 25 and the joints 33, 34, 35 are interlocked with each other. For example, the arm 21 and the arm 31 can also be fixed to each other in a state of extending in different directions. Thus, the joint 23 and the joint 33 are interlocked, and the arm 21 and the arm 31 rotate integrally about the axis Ax1.

[0028] The multi-joint arm 20 can also be configured such that the joint 24 and the joint 25 are interlocked. For example, the multi-joint arm 20 can also further include a transmission mechanism 26 (such as a pulley and a belt), and the transmission mechanism 26 interlocks the joint 24 and the joint 25 in such a manner that the rotation of the arm 22 relative to the arm 21 and the rotation of the hand 12 relative to the arm 22 are interlocked in the opposite direction. According to the transmission mechanism 26, by rotating the arm 22 relative to the arm 21, the hand 12 can be displaced while maintaining the posture of the hand 12 relative to the arm 21 constant.

[0029] Similarly, the multi-joint arm 30 can be configured such that the joint 34 and the joint 35 are interlocked. For example, the multi-joint arm 30 can also further include a transmission mechanism 36 (such as a pulley and a belt), and the transmission mechanism 36 interlocks the joint 34 and the joint 35 in such a manner that the rotation of the arm 32 relative to the arm 31 and the rotation of the hand 13 relative to the arm 32 are interlocked in the opposite direction.

[0030] As described above, according to the structure in which the joint 23 and the joint 33 are interlocked, the joint 24 and the joint 25 are interlocked, and the joint 34 and the joint 35 are interlocked, the hands 12 and 13 can be moved forward and backward in any direction around the axis Ax1 by three motors. The robot 10 can also be configured to lift the substrate W in addition to transporting the substrate W along the horizontal direction.

[0031] One or more motors 40 drive the multi-joint arm 20 to change the position of the hand 12 relative to the base 11. One or more motors 40 can further drive the multi-joint arm 30 to change the position of the hand 13 relative to the base 11. And one or more motors 40 can lift the multi-joint arm 20 and the multi-joint arm 30.

[0032] One or more motors 40 can also be built into the base 11. For example, the base 11 has a base housing 100, and one or more motors 40 are housed in the base housing 100.

[0033] For example, one or more motors 40 include a motor 41, a motor 42, a motor 43, and a motor 44. The motors 41, 42, 43, and 44 are housed in the base housing 100.

[0034] The motor 41 is, for example, an electric servo motor and has an output shaft 45 along the axis Ax1. The output shaft 45 projects upward from within the base housing 100 and is connected to the arm 21 and the arm 31. The motor 41 rotates the output shaft 45 about the axis Ax1, thereby rotating the arm 21 and the arm 31 about the axis Ax1.

[0035] The motor 42 is, for example, an electric servo motor and drives the joint 24 via a transmission mechanism 27 (such as a pulley and a belt) within the output shaft 45 and within the arm 21. For example, the motor 42 rotates the arm 22 relative to the arm 21 about the axis Ax2.

[0036] The motor 43 is, for example, an electric servo motor and drives the joint 34 via a transmission mechanism 37 (such as a pulley and a belt) within the output shaft 45 and within the arm 31. For example, the motor 43 rotates the arm 32 relative to the arm 31 about the axis Ax3. The motors 41, 42, and 43 are arranged in order from above to below and are fixed to each other. The motor 44 is, for example, an electric servo motor and raises and lowers the motor 43 via a transmission mechanism 46 (such as a pulley, a belt, and a ball screw). Thereby, the multi-joint arm 20 and the multi-joint arm 30 connected to the output shaft 45 are raised and lowered.

[0037] The motors 41, 42, 43, and 44 respectively have rotation angle sensors 71, 72, 73, and 74. The rotation angle sensor 71 detects the rotation angle of the motor 41 (the rotation angle of the output shaft 45), the rotation angle sensor 72 detects the rotation angle of the motor 42, the rotation angle sensor 73 detects the rotation angle of the motor 43, and the rotation angle sensor 74 detects the rotation angle of the motor 44. The rotation angle sensors 71, 72, 73, and 74 are, for example, rotary encoders of an optical type or a magnetic type or the like.

[0038] In order to carry the substrate W in the internal space 93, at least the hand parts 12, 13 and the multi-joint arms 20, 30 are housed in the internal space 93. The base 11 may also be disposed outside the chamber 90. In this case, the chamber 90 may also have a chamber opening 94 for disposing the base 11 outside the chamber 90.

[0039] For example, the chamber opening 94 is formed in the bottom plate 92 and opens downward. The base 11 projects downward from the bottom plate 92 through the chamber opening 94. In this case, the robot 10 may also have a flange 14. The flange 14 extends horizontally over the entire circumference around the axis Ax1 so as to separate between the multi-joint arms 20, 30 and the base 11. The flange 14 is mounted on the bottom plate 92 so as to block the chamber opening 94.

[0040] The flange 14 can be mounted on the bottom plate 92 from below or from above. When the flange 14 is mounted on the bottom plate 92 from above, a loading opening 95 for loading the robot 10 is formed in the top plate 91. The robot 10 is loaded into the internal space 93 from above through the loading opening 95, and the base 11 passes through the chamber opening 94 from above. The chamber 90 may also have a cover 96 for closing the loading opening 95.

[0041] The robot 10 may also have a sealing member 60. The sealing member 60 is provided on the flange 14 so as to hermetically separate the internal space of the base 11 from the external space of the base 11. For example, the sealing member 60 has an inner seal 61, an outer seal 62, and a telescopic portion 63. The inner seal 61 surrounds the output shaft 45 and is fixed to the motor 41. The inner seal 61 is, for example, a mechanical seal that allows the rotation of the output shaft 45 and is in close contact with the output shaft 45 over the entire circumference. The outer seal 62 surrounds the output shaft 45, is in close contact with the flange 14 over the entire circumference, and is fixed to the flange 14. The telescopic portion 63 is a corrugated hose that surrounds the output shaft 45 between the inner seal 61 and the outer seal 62 and expands and contracts as the motor 44 moves the motor 41 up and down.

[0042] The drive circuit 50 supplies drive power to one or more motors 40. Supplying drive power includes converting the power supplied from the power source into drive power and supplying it to one or more motors 40. Drive power refers to, for example, power that generates a driving magnetic field for a movable part such as a rotor.

[0043] For example, the drive circuit 50 has a servo circuit 51, a servo circuit 52, a servo circuit 53, a servo circuit 54, an arithmetic circuit 55, and a communication circuit 56. The servo circuit 51 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 41. The servo circuit 52 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 42. The servo circuit 53 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 43. The servo circuit 54 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 44. The arithmetic circuit 55 calculates control commands for the motors 41, 42, 43, 44 to cause the multi-joint arm 20 and the multi-joint arm 30 to perform a specified action, and outputs the calculation results to the servo circuits 51, 52, 53, 54, respectively. The communication circuit 56 performs communication with external devices of the robot 10 according to a request from the arithmetic circuit 55. Examples of external devices include a host controller and a calibration device for the position of the substrate W. The communication circuit 56 has one or more communication connectors C11 connected to external devices of the robot 10.

[0044] From the perspective of maintainability and the like, the drive circuit 50 is housed in a housing different from the base housing 100 that houses the motors 41, 42, 43, and 44. Cables that electrically connect the drive circuit 50 to the motors 41, 42, 43, and 44 are routed between the housing that houses the drive circuit 50 and the base housing 100. The cables include, for example, power cables that supply drive power from the drive circuit 50 to the motors 41, 42, 43, and 44, and feedback cables that transmit feedback signals from the rotational angle sensors 71, 72, 73, and 74 to the drive circuit 50. Therefore, in order to install the robot 10, in addition to the installation space for the housing that houses the drive circuit 50, it is also necessary to ensure a wiring space for a plurality of cables around the chamber 90. It is not necessarily easy to ensure these spaces in the substrate processing apparatus. Therefore, the robot 10 also includes a circuit housing 200. The circuit housing 200 houses the drive circuit 50 and is installed on the base 11 in a detachable state. For example, the circuit housing 200 is installed on the base housing 100.

[0045] Since the circuit housing 200 is installed on the base 11, the wiring space from the drive circuit 50 to the base 11 can be significantly reduced. It is not necessary to separately provide the installation space for the circuit housing 200 and the installation space for the robot 10. In addition, when maintenance of the drive circuit 50 is required, the circuit housing 200 can be detached with the base 11 installed to perform maintenance of the drive circuit 50. Therefore, it is effective for both space saving and maintainability.

[0046] The state in which the circuit housing 200 can be detached from the base housing 100 means that the circuit housing 200 can be detached from the base housing 100 without damaging the base housing 100 and the circuit housing 200. For example, the circuit housing 200 is installed on the base housing 100 by mounting members such as bolts that can be repeatedly installed and detached.

[0047] The circuit housing 200 can also be installed on the base 11 such that the base 11 is located between the circuit housing 200 and the flange 14. Heat transfer from the space where the hand portions 12, 13 and the multi-joint arms 20, 30 are arranged (for example, the internal space 93 of the chamber 90) to the circuit housing 200 can be suppressed by the base 11, and the high temperature of the drive circuit 50 can be suppressed. As described above, when the robot 10 includes the sealing member 60, heat transfer from the internal space 93 of the chamber 90 to the internal space of the circuit housing 200 can be further suppressed, and the high temperature of the drive circuit 50 can be further suppressed.

[0048] For example, in a state where the flange 14 is mounted on the base plate 92, the base portion 11 is located below the flange 14, and the circuit housing 200 is located below the base portion 11. The flange 14 can also hold the base portion 11 in a state where the circuit housing 200 is separated from the ground FS. By maintaining the state where the circuit housing 200 is lifted from the ground FS, further space saving can be achieved.

[0049] Alternatively, the base housing 100 may have a first frame 110, and the circuit housing 200 may have a second frame 210. The first frame 110 imparts a load-bearing capacity exceeding the total weight of the hands 12, 13, multi-joint arms 20, 30, flange 14, and motors 41, 42, 43, 44 to the base portion 11. The first frame 110 imparting a load-bearing capacity to the base portion 11 means that if the first frame 110 is removed from the base portion 11, the load-bearing capacity of the base portion 11 cannot be obtained, and if the first frame 110 is not removed from the base portion 11, the load-bearing capacity of the base portion 11 can be obtained. The first frame 110 may bear more than half of the load-bearing capacity of the base portion 11, may bear more than 70%, or may bear more than 90%.

[0050] The second frame 210 imparts a load-bearing capacity exceeding the total weight of the hands 12, 13, multi-joint arms 20, 30, flange 14, motors 41, 42, 43, 44, and base portion 11 to the circuit housing 200. The second frame 210 imparting a load-bearing capacity to the circuit housing 200 means that if the second frame 210 is removed from the circuit housing 200, the load-bearing capacity of the circuit housing 200 cannot be obtained, and if the second frame 210 is not removed from the circuit housing 200, the load-bearing capacity of the circuit housing 200 can be obtained. The second frame 210 may bear more than half of the load-bearing capacity of the circuit housing 200, may bear more than 70%, or may bear more than 90%.

[0051] The second frame 210 may also be mounted on the first frame 110. When the entire robot 10 is removed from the chamber 90 for maintenance, the hands 12, 13, multi-joint arms 20, 30, flange 14, and motors 41, 42, 43, 44 can be supported by the circuit housing 200 and the base portion 11, so the maintainability is further improved.

[0052] For example, as Figure 2 and Figure 3 shown, the base housing 100 has a first frame 110 and a cover 120. The first frame 110 is fixed below the flange 14 and surrounds at least one of the motors 41, 42, 43, 44 (for example, motors 41, 42, 43) around an axis intersecting the flange 14. For example, the first frame 110 is formed of a metal material such as steel, stainless steel, or aluminum alloy, and has a plurality of openings 111 for weight reduction and the like.

[0053] The cover 120 surrounds the first frame 110 about an axis intersecting the flange 14, covering at least any one (e.g., all) of the plurality of openings 111.

[0054] Alternatively, the cover 120 may be divided into a cover 130 and a cover 140 so as to be detachable from the first frame 110 along a radial direction centered on the axis intersecting the flange 14. The cover 130 and the cover 140 cover the first frame 110 in opposite directions to each other in the above-mentioned radial direction. The cover 130 and the cover 140 are respectively detachably mounted to the first frame 110 by mounting members such as bolts. Hereinafter, for the sake of convenience of explanation, the side where the cover 130 is located with respect to the first frame 110 is set as "front", and the side where the cover 140 is located with respect to the first frame 110 is set as "rear".

[0055] The circuit housing 200 has a second frame 210 and a cover 240. The second frame 210 is formed of a metal material such as steel, stainless steel, or aluminum alloy, and has a base plate 211 and a pair of support beams 220A, 220B. The base plate 211 extends so as to cover the drive circuit 50 from below and supports the drive circuit 50. The pair of support beams 220A, 220B respectively project upward from the left end portion and the right end portion of the drive circuit 50 to connect the base plate 211 to the first frame 110. The end portions (upper end portions) of the pair of support beams 220A, 220B are respectively mounted to the first frame 110. Thus, the second frame 210 can support the hands 12, 13, the multi-joint arms 20, 30, the flange 14, the base 11, and the motors 41, 42, 43, 44.

[0056] Through the support beams 220A, 220B, an opening 214 facing forward and an opening 215 facing rearward are formed in the second frame 210. The openings 214, 215 are used as wiring openings for exposing one or more connectors electrically connected to the motors 41, 42, 43, 44 (e.g., connected to the cables).

[0057] For example, the drive circuit 50 has power connectors C21, C22 and feedback connectors C23, C24, C25, C26. The power connector C21 connects the power cables CA21, CA22, CA23 from the motors 41, 42, 43 to the servo circuits 51, 52, 53 respectively. The power connector C22 connects the power cable CA24 from the motor 44 to the servo circuit 54. Thus, the power cables CA21, CA22, CA23, CA24 can supply the drive power from the servo circuits 51, 52, 53, 54 to the motors 41, 42, 43, 44 respectively.

[0058] The feedback connector C23 connects the feedback cable CA25 from the rotational angle sensor 71 to the servo circuit 51. The feedback connector C24 connects the feedback cable CA26 from the rotational angle sensor 72 to the servo circuit 52. The feedback connector C25 connects the feedback cable CA27 from the rotational angle sensor 73 to the servo circuit 53. The feedback connector C26 connects the feedback cable CA28 from the rotational angle sensor 74 to the servo circuit 54. Thus, the feedback cables CA25, CA26, CA27, and CA28 can transmit the feedback signals from the rotational angle sensors 71, 72, 73, and 74 to the servo circuits 51, 52, 53, and 54, respectively.

[0059] As Figure 2 shown, in a state where the circuit housing 200 is mounted on the base 11, the opening 214 exposes the power connector C21 and the feedback connectors C23, C24, C25, and C26. As Figure 3 shown, in a state where the circuit housing 200 is mounted on the base 11, the opening 215 exposes the power connector C22. The state where the base 11 is mounted on the circuit housing 200 means a state where at least the second frame 210 is mounted on the base 11. The same applies hereinafter. The opening 214 exposing the power connector C21 and the feedback connectors C23, C24, C25, and C26 means that an operator can access the power connector C21 and the feedback connectors C23, C24, C25, and C26 via the opening 214. Similarly, the opening 215 exposing the power connector C22 means that an operator can access the power connector C22 via the opening 215.

[0060] Through the openings 214 and 215, the motors 41, 42, 43, and 44 can be connected to the drive circuit 50 after the circuit housing 200 is mounted on the base 11, and the circuit housing 200 can be removed from the base 11 after the motors 41, 42, 43, and 44 are separated from the drive circuit 50. Therefore, the workability of mounting and removing the circuit housing 200 with respect to the base 11 can be further improved.

[0061] The second frame 210 may also have a sub-frame 230 protruding from the base plate 211 so as to cover the communication circuit 56 from the rear. The sub-frame 230 may have an opening 231 for exposing the communication connector C11.

[0062] As Figure 4 shown, the cover 240 surrounds the second frame 210 about an axis intersecting the flange 14 and covers the openings 214 and 215.

[0063] Alternatively, the cover 240 may be divided into a cover 250 and a cover 260 in such a manner that the cover 240 can be removed from the second frame 210 radially about an axis intersecting the flange 14. The cover 250 and the cover 260 cover the second frame 210 in opposite directions in the above-described radial direction. For example, the cover 250 covers the opening 214 from the front, and the cover 260 covers the opening 215 from the rear. The cover 250 and the cover 260 are respectively detachably mounted to the support beams 220A and 220B by mounting members such as bolts. The cover 260 may also have an opening 261 corresponding to the opening 231. The opening 261 exposes the communication connector C11 (see Figure 6 ).

[0064] In this way, in a state where the base 11 is mounted to the circuit housing 200, the cover 250 can be mounted to and removed from the second frame 210. Therefore, the cover 250 can open and close the opening 214 in a state where the circuit housing 200 is mounted to the base 11. Similarly, in a state where the base 11 is mounted to the circuit housing 200, the cover 260 can be mounted to and removed from the second frame 210. Therefore, the cover 260 can open and close the opening 215 in a state where the circuit housing 200 is mounted to the base 11. The workability of mounting and removing the circuit housing 200 with respect to the base 11 can be further improved, and the interior of the circuit housing 200 can be protected.

[0065] As Figure 5 shown, the ends of the support beams 220A and 220B are detachably mounted to the first frame 110. For example, the robot 10 includes one or more first hooks 121 and one or more second hooks 221. One or more first hooks 121 are provided on the base 11. One or more second hooks 221 are provided so as to be respectively hooked on one or more first hooks 121 to temporarily fix the circuit housing 200 to the base 11. The circuit housing 200 is mounted to the base 11 in a state where one or more second hooks 221 are respectively hooked on one or more first hooks 121.

[0066] Before mounting the circuit housing 200 to the base 11, the circuit housing 200 is temporarily fixed to the base 11 by one or more first hooks 121 and one or more second hooks 221. Therefore, an operator can mount the circuit housing 200 to the base 11 without supporting the circuit housing 200 by himself / herself. Therefore, the workability of mounting the circuit housing 200 with respect to the base 11 can be improved.

[0067] The robot 10 includes a plurality (for example, three) of first hooks 121 and a plurality of second hooks 221 respectively corresponding to the plurality of first hooks 121 at the ends of the support beams 220A and 220B. Hereinafter, the end of the support beam 220A will be described. Regarding the end of the support beam 220B, the description overlapping with the description of the end of the support beam 220A will be omitted.

[0068] For example, the plurality of first hooks 121 are pins provided on the outer circumferential surface of the lower end portion of the first frame 110. The plurality of first hooks 121 are arranged along the circumferential direction of the first frame 110 and protrude outward from the outer circumferential surface of the first frame 110 respectively. The plurality of second hooks 221 are hook-shaped portions provided at the upper end portion of the support beam 220A in such a manner as to respectively hook onto the plurality of first hooks 121. For example, a plurality of notches 222 are formed at the upper end portion of the support beam 220A, which are arranged along the circumferential direction of the first frame 110 and respectively receive the plurality of first hooks 121.

[0069] The plurality of notches 222 are respectively open above the support beam 220A and are bent in a manner along the circumferential direction of the first frame 110 at positions away from the upper end of the support beam 220A. Above the circumferential portion of the notch 222 along the circumferential direction of the first frame 110, a hook-shaped portion, i.e., the second hook 221, which hooks onto the first hook 121, is formed. The support beam 220A is mounted on the first frame 110 at a plurality of portions adjacent to the plurality of notches 222 respectively in the circumferential direction of the first frame 110 through a plurality of mounting members 223. The plurality of mounting members 223 are a plurality of bolts.

[0070] The bending direction of the plurality of notches 222 in the support beam 220B may also be the same as the bending direction of the plurality of notches 222 in the support beam 220A. In this case, in a state where the plurality of first hooks 121 respectively enter the plurality of notches 222 of the support beam 220A from above and the plurality of first hooks 121 respectively enter the plurality of notches 222 of the support beam 220B from above, by rotating the circuit housing 200 about an axis intersecting the flange 14, the plurality of second hooks 221 can be respectively hooked onto the plurality of first hooks 121.

[0071] The bending direction of the plurality of notches 222 in the support beam 220B may also be opposite to the bending direction of the plurality of notches 222 in the support beam 220A. In this case, in a state where the plurality of first hooks 121 respectively enter the plurality of notches 222 of the support beam 220A from above and the plurality of first hooks 121 respectively enter the plurality of notches 222 of the support beam 220B from above, by sliding the circuit housing 200 in the horizontal direction, the plurality of second hooks 221 can be respectively hooked onto the plurality of first hooks 121.

[0072] The plurality of mounting members 223 may be mounted on the first frame 110 in a state where they can be at least removed and maintained in a state where the support beam 220A is mounted on the first frame 110, and are not necessarily limited to a plurality of bolts. For example, the plurality of mounting members 223 may be a plurality of rivets. In addition, the plurality of first hooks 121 may also serve as the plurality of mounting members 223, and the plurality of second hooks 221 may also serve as the plurality of mounting members 223. For example, the plurality of first hooks 121 may be a plurality of bolts, which function as the plurality of first hooks 121 when loosely mounted on the first frame 110, and which function as the plurality of mounting members 223 when the plurality of notches 222 are hooked on the plurality of first hooks 121 and are tightened respectively.

[0073] like Figure 3 and Figure 6 As shown, the robot 10 may also include a first vent 112, a second vent 232, and a ventilator 300. The first vent 112 is formed between the first frame 110 and the cover 120 (see FIG. 1 ) so as to connect the internal space of the base 11 (e.g., the space surrounded by the first frame 110) with the external space of the base 11. Figure 6 The second vent 232 is formed in the second frame 210 and the cover 240 so as to communicate the internal space of the circuit housing 200 with the external space of the circuit housing 200 (see Figure 6 The ventilator 300 generates airflow between the first vent 112 and the second vent 232 via the internal space of the base 11 and the internal space of the circuit housing 200. The airflow generated by the ventilator 300 in the internal space of the base 11 and the internal space of the circuit housing 200 can further suppress the temperature increase of the drive circuit 50.

[0074] The ventilator 300 may also generate an airflow from the second vent 232 to the first vent 112 via the internal space of the base 11 and the internal space of the circuit housing 200. By setting the internal space of the circuit housing 200 as the upstream of the ventilation, the high temperature of the drive circuit 50 can be further suppressed. As described above, in the structure where the motor 41, the motor 42, the motor 43, and the motor 44 are all built into the base 11, the internal space of the base 11 may further heat up. In contrast, by setting the internal space of the circuit housing 200 as the upstream of the ventilation, the high temperature of the drive circuit 50 can be further suppressed.

[0075] For example, the first vent 112 is formed in the first frame 110 and the cover 140 in a manner of opening to the rear. The second vent 232 is formed in the sub-frame 230 and the cover 260 in a manner of opening to the rear. These are one example and can be changed. For example, the first vent 112 can also be formed in the first frame 110 and the cover 130 in a manner of opening to the front. The second vent 232 can also be formed in the base plate 211 in a manner of opening downward.

[0076] The ventilator 300 may also have a fan 310. The fan 310 is disposed at the first vent 112 in such a manner as to deliver gas from the inner space of the base 11 to the outer space of the base 11. For example, the fan 310 has rotating blades that generate an air flow from the inner space of the base 11 to the outer space of the base 11 by rotation, and is mounted on the first frame 110 in such a manner that at least a part of the first vent 112 is covered by the rotating blades. By disposing the fan 310 at the most downstream in the inner space of the base 11 and the inner space of the circuit housing 200, it is possible to suppress the retention of gas in the inner space of the base 11 and further suppress the heat transfer from the inner space of the base 11 to the inner space of the circuit housing 200.

[0077] The ventilator 300 may also have a second fan 320 instead of the fan 310. The second fan 320 is disposed at the second vent 232 in such a manner as to deliver gas from the outer space of the circuit housing 200 to the inner space of the circuit housing 200. For example, the second fan 320 has rotating blades that generate an air flow from the outer space of the circuit housing 200 to the inner space of the circuit housing 200 by rotation, and is mounted on the sub-frame 230 in such a manner that at least a part of the second vent 232 is covered by the rotating blades. By disposing the fan 310 at the most upstream in the inner space of the base 11 and the inner space of the circuit housing 200, it is possible to suppress the retention of gas in the inner space of the circuit housing 200 and further suppress the heat transfer from the inner space of the base 11 to the inner space of the circuit housing 200.

[0078] The ventilator 300 may also have both the fan 310 and the second fan 320. It is possible to suppress the retention of gas in both the inner space of the base 11 and the inner space of the circuit housing 200, and further suppress the heat transfer from the inner space of the base 11 to the inner space of the circuit housing 200.

[0079] Thus, in a structure where the inner space of the circuit housing 200 is upstream of the ventilator, a part of the drive circuit 50 (for example, the arithmetic circuit 55) may also protrude from the circuit housing 200 toward the flange 14 and be housed in the base 11 (see Figure 1 ). Any one of the motors 41, 42, 43, 44, and the transmission mechanism 46 may also protrude from the first frame 110 in a direction away from the flange 14 (for example, downward) and be housed in the circuit housing 200.

[0080] The remaining space within the base 11 can be utilized for housing the drive circuit 50, thereby miniaturizing the circuit housing 200 and achieving further space savings. Additionally, the remaining space within the circuit housing 200 can be used for housing the transmission mechanism 46, etc., to miniaturize the base 11 and achieve further space savings. Since the internal space of the circuit housing 200 serves as the upstream for ventilation, in either the case of housing a part of the drive circuit 50 in the base or housing the transmission mechanism 46, etc., in the circuit housing 200, the high-temperature rise of the drive circuit 50 can be suppressed.

[0081] As Figure 6 shown, the robot 10 may further include a power supply circuit 70 and a power supply housing 400. The power supply circuit 70 supplies power to the drive circuit 50. For example, the power supply circuit 70 generates multiple power supplies with different voltages and supplies them to the drive circuit 50. The power supply housing 400 houses the power supply circuit 70 and is detachably mounted on the circuit housing 200.

[0082] Since the power supply housing 400 is mounted on the circuit housing 200, the wiring space from the power supply circuit 70 to the drive circuit 50 can be significantly reduced. There is no need to separately provide the installation space for the power supply housing 400 and the installation space for the robot 10. Additionally, when maintenance of the power supply circuit 70 is required, the power supply housing 400 can be removed for maintenance of the power supply circuit 70 while the hand 12, 13, multi-joint arms 20, 30, base 11, and circuit housing 200 are installed. Therefore, it is more effective in achieving both space savings and maintainability.

[0083] The power supply housing 400 may also be mounted on the circuit housing 200 in a manner that it is arranged with the circuit housing 200 in a direction (e.g., left - right direction) intersecting the direction (e.g., up - down direction) in which the base 11 and the circuit housing 200 are arranged. The peripheral space of the circuit housing 200 can be utilized for the configuration of the power supply housing 400. In the illustrated example, the power supply housing 400 is mounted on the support beam 220B through detachable mounting members such as bolts.

[0084] The power supply housing 400 may also be mounted on the support beam 220B via a bracket 410. For example, the power supply housing 400 may be fixed to a plate - shaped bracket 410 interposed between the power supply housing 400 and the support beam 220B, and the bracket 410 is mounted on the support beam 220B through the above - mentioned mounting members. As Figure 7 shown, the robot 10 further has an opening 251 that enables wiring from the power supply circuit 70 to the drive circuit 50 even when the cover 240 is mounted on the second frame 210 and the cover 120 is mounted on the first frame 110. In Figure 7 the example, the opening 251 is formed at the right lower end of the cover 130 and the right upper end of the cover 250.

[0085] For example, the drive circuit 50 also has more than one power connector C41. More than one power connector C41 connects more than one power supply cable CA41 from the power supply housing 400 to the servo circuits 51, 52, 53, 54, the arithmetic circuit 55, and the communication circuit 56 respectively. Thus, more than one power supply cable CA41 can supply multiple power supplies generated by the power supply housing 400 to the servo circuits 51, 52, 53, 54, the arithmetic circuit 55, and the communication circuit 56 respectively.

[0086] The opening 251 exposes more than one power connector C41 in a state where the cover 130 is mounted on the first frame 110 and the cover 250 is mounted on the second frame 210. That the opening 251 exposes more than one power connector C41 means that an operator can access more than one power connector C41 via the opening 251. For example, more than one power supply cable CA41 is led out from the surface of the power supply housing 400 facing the circuit housing 200 and is connected to more than one power connector C41 via the opening 251.

[0087] As Figure 8 shown, the robot 10 may also include a cover 420 that covers the opening 251. For example, the cover 420 is mounted on the power supply housing 400 by mounting members such as bolts in a detachable state.

[0088] Return Figure 6 , the robot 10 may also include a communication connector C31 provided on the power supply housing 400 and a communication cable CA31 that electrically connects the communication connector C31 to the drive circuit 50. The drive circuit 50 may be configured to communicate with an external device via the communication connector C31 and the communication cable CA31. Providing on the power supply housing 400 includes providing inside the power supply housing 400. The remaining space in the power supply housing 400 can be effectively utilized as a configuration space for the communication connector C31, achieving further space saving.

[0089] For example, the communication circuit 56 may be configured to communicate with an external device via the communication connector C31 and the communication cable CA31. As described above, examples of the external device include a host controller and a calibration device. The communication circuit 56 may be configured to communicate with the host controller via the communication connector C11 and communicate with the calibration device via the communication connector C31. By making the connection destinations of the communication connector C11 and the communication connector C31 different, the workability of wiring can be further improved.

[0090] 〔Summary〕

[0091] The above-exemplified embodiments include the following structures.

[0092] (1) A robot 10, comprising: a hand 12 that supports a substrate W; a base 11; a multi-joint arm 20 that connects the hand 12 and the base 11; one or more motors 40 that drive the multi-joint arm 20 to change the position of the hand 12 relative to the base 11; a drive circuit 50 that supplies drive power to the one or more motors 40; and a circuit housing 200 that houses the drive circuit 50 and is detachably mounted on the base 11.

[0093] Since the circuit housing 200 is mounted on the base 11, the wiring space can be significantly reduced. There is no need to separately provide the installation space for the circuit housing 200 and the installation space for the robot 10. In addition, when maintenance of the drive circuit 50 is required, the circuit housing 200 can be detached with the multi-joint arm 20 installed to perform maintenance on the drive circuit 50. Therefore, it is effective for both space saving and maintainability.

[0094] (2) The robot 10 according to (1), wherein the robot 10 further includes a flange 14 that extends to separate the arm and the base 11, and the circuit housing 200 is mounted on the base 11 with the base 11 located between the circuit housing 200 and the flange 14.

[0095] By suppressing heat transfer from the space where the hand 12 and the arm are arranged to the circuit housing 200 by the base 11, the high temperature of the drive circuit 50 can be suppressed.

[0096] (3) The robot 10 according to (2), wherein the robot 10 further includes: a first vent 112 that connects the internal space of the base 11 and the external space of the base 11; a second vent 232 that connects the internal space of the circuit housing 200 and the external space of the circuit housing 200; and a ventilator 300 that generates an air flow between the first vent 112 and the second vent 232 via the internal space of the base 11 and the internal space of the circuit housing 200.

[0097] The high temperature of the drive circuit 50 can be further suppressed.

[0098] (4) The robot 10 according to (3), wherein the ventilator 300 generates an air flow that flows from the second vent 232 to the first vent 112 via the internal space of the base 11 and the internal space of the circuit housing 200.

[0099] By setting the internal space of the circuit housing 200 as the upstream of ventilation, the high temperature of the drive circuit 50 can be further suppressed.

[0100] (5) The robot 10 according to (4), wherein the ventilator 300 has a fan 310, and the fan 310 is disposed at the first vent 112 in such a manner as to convey gas from the internal space of the base 11 to the external space of the base 11.

[0101] Heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200 can be further suppressed.

[0102] (6) The robot 10 according to (5), wherein the ventilator 300 further has a second fan 320, and the second fan 320 is disposed at the second vent 232 in such a manner as to convey gas from the external space of the circuit housing 200 to the internal space of the circuit housing 200.

[0103] Heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200 can be further suppressed.

[0104] (7) The robot 10 according to any one of (4) to (6), wherein one or more motors 40 are built in the base 11.

[0105] The inside of the base 11 may be further heated, but since the internal space of the circuit housing 200 becomes the upstream of ventilation, the overheating of the drive circuit 50 can be further suppressed.

[0106] (8) The robot 10 according to any one of (4) to (7), wherein a part of the drive circuit 50 protrudes from the circuit housing 200 toward the flange 14 and is housed in the base 11.

[0107] The remaining space in the base 11 can be used for housing the drive circuit 50 to miniaturize the circuit housing 200 and achieve further space saving. Since the internal space of the circuit housing 200 becomes the upstream of ventilation, even if a part of the drive circuit 50 is housed in the base 11, the overheating of the drive circuit 50 can be suppressed.

[0108] (9) The robot 10 according to any one of (2) to (8), wherein the robot 10 further includes a sealing member 60, and the sealing member 60 is disposed at the flange 14 in such a manner as to hermetically separate the internal space of the base 11 from the external space of the base 11.

[0109] Heat transfer from the space where the hand 12 and the arm are disposed to the internal space of the circuit housing 200 can be further suppressed, and the overheating of the drive circuit 50 can be further suppressed.

[0110] (10) The robot 10 according to any one of (2) to (9), wherein the base 11 and the circuit housing 200 are located below the flange 14, and the flange 14 holds the base 11 in a state where the circuit housing 200 is separated from the ground.

[0111] By keeping the circuit housing 200 lifted from the ground, further space saving can be achieved.

[0112] (11) The robot 10 according to (10), wherein the base 11 has a first frame 110 that bears a weight exceeding the combined weight of the hand 12, the multi-joint arm 20, the flange 14, and one or more motors 40, and the circuit housing 200 has a second frame 210 that bears a weight exceeding the combined weight of the hand 12, the multi-joint arm 20, the flange 14, one or more motors 40, and the base 11, and the second frame 210 is mounted on the first frame 110.

[0113] During maintenance, the hand 12, the multi-joint arm 20, the flange 14, and one or more motors 40 can be supported by the circuit housing 200 and the base 11, so the maintainability is further improved.

[0114] (12) The robot 10 according to (10) or (11), wherein the robot 10 further includes: a first hook 121 provided on the base 11; and a second hook 221 provided on the circuit housing 200 in such a manner that the circuit housing 200 is temporarily fixed to the base 11 by hooking onto the first hook 121, and the circuit housing 200 is mounted on the base 11 in a state where the second hook 221 is hooked onto the first hook 121.

[0115] The workability of mounting the circuit housing 200 to the base 11 can be improved.

[0116] (13) The robot 10 according to any one of (1) to (12), wherein the drive circuit 50 has a connector electrically connected to one or more motors 40, and the circuit housing 200 has wiring openings 214, 215 that expose the connector in a state where the circuit housing 200 is mounted on the base 11.

[0117] After the circuit housing 200 is mounted on the base 11, one or more motors 40 can be connected to the drive circuit 50, and after one or more motors 40 are separated from the drive circuit 50, the circuit housing 200 can be removed from the base 11. Therefore, the workability of mounting and removing the circuit housing 200 with respect to the base 11 can be further improved.

[0118] (14) The robot 10 according to (13), wherein the robot 10 further includes a cover that can open and close the wiring openings 214, 215 in a state where the circuit housing 200 is mounted on the base 11.

[0119] It is possible to further improve the workability of mounting and removing the circuit housing 200 with respect to the base 11 and protect the interior of the circuit housing 200.

[0120] (15) The robot 10 according to any one of (1) to (14), wherein the robot 10 further includes: a power supply circuit 70 that supplies power to the drive circuit 50; and a power supply housing 400 that houses the power supply circuit 70 and is detachably mounted on the circuit housing 200.

[0121] Since the power supply housing 400 is mounted on the circuit housing 200, it is possible to significantly reduce the wiring space from the power supply circuit 70 to the drive circuit 50. It is not necessary to separately provide the installation space for the power supply housing 400 and the installation space for the robot 10. In addition, when maintenance of the power supply circuit 70 is required, the power supply housing 400 can be removed in a state where the multi-joint arm 20 and the circuit housing 200 are provided to perform maintenance of the power supply circuit 70. Therefore, it is more effective in achieving space saving and maintainability.

[0122] (16) The robot 10 according to (15), wherein the power supply housing 400 is mounted on the circuit housing 200 in a manner that it is arranged with the circuit housing 200 in a direction crossing the direction in which the base 11 and the circuit housing 200 are arranged.

[0123] It is possible to utilize the peripheral space of the circuit housing 200 for the arrangement of the power supply housing 400.

[0124] (17) The robot 10 according to (15), wherein the robot 10 further includes: a communication connector C31 provided on the power supply housing 400; and a communication cable CA31 that electrically connects the communication connector C31 to the drive circuit 50, and the drive circuit 50 communicates with an external device via the communication cable CA31 and the communication connector C31.

[0125] It is possible to utilize the remaining space in the power supply housing 400 as the arrangement space for the communication connector C31 to achieve further space saving.

[0126] (18) A substrate transfer device 1, comprising: the robot 10 according to any one of (2) to (6); and a chamber 90 that houses the hand 12 and the multi-joint arm 20, the chamber 90 having a chamber opening 94 for arranging the base 11 and the circuit housing 200 outside the chamber 90, and a flange 14 is mounted on the chamber 90 so as to block the chamber opening 94.

[0127] (19) The substrate transfer device 1 according to (18), wherein the chamber opening 94 opens downward, and the flange 14 holds the base 11 in a state where the circuit housing 200 is separated from the ground.

Claims

1. A robot comprising: a hand that supports the base plate; base; a multi-jointed arm connecting the hand to the base; one or more motors that drive the multi-jointed arm to change the position of the hand relative to the base; a drive circuit that supplies drive power to the one or more motors; and The circuit case accommodates the driving circuit and is detachably mounted on the base.

2. The robot according to claim 1, wherein: The robot further comprises a flange extending in a manner to separate the multi-jointed arm from the base. The circuit housing is mounted on the base in such a manner that the base is located between the circuit housing and the flange.

3. The robot according to claim 2, wherein: The robot also has: a first vent that allows the interior space of the base to communicate with the exterior space of the base; a second vent that allows the interior space of the circuit housing to communicate with the exterior space of the circuit housing; as well as A ventilator generates an airflow between the first vent and the second vent via the inner space of the base and the inner space of the circuit case.

4. The robot according to claim 3, wherein: The ventilator generates an airflow from the second ventilating opening to the first ventilating opening via an internal space of the base and an internal space of the circuit case.

5. The robot according to claim 4, wherein: The ventilator includes a fan provided at the first ventilating opening so as to transport air from an internal space of the base to an external space of the base.

6. The robot according to claim 5, wherein: The ventilator further includes a second fan provided at the second ventilating opening so as to convey air from an external space of the circuit housing to an internal space of the circuit housing.

7. The robot according to any one of claims 4 to 6, wherein: The one or more motors are built into the base.

8. The robot according to any one of claims 4 to 6, wherein: A portion of the drive circuit protrudes from the circuit case toward the flange and is accommodated in the base.

9. The robot according to any one of claims 2 to 6, wherein: The robot further includes a sealing member provided on the flange so as to airtightly separate an internal space of the base from an external space of the base.

10. The robot according to any one of claims 2 to 6, wherein: The base and the circuit housing are located below the flange. The flange holds the base in a state where the circuit case is off the ground.

11. The robot according to claim 10, wherein: The base has a first frame, the first frame imparting a load to the base that exceeds the combined weight of the hand, the multi-jointed arm, the flange, and the one or more motors, The circuit housing has a second frame, which provides the circuit housing with a load-bearing capacity exceeding the total weight of the hand, the multi-jointed arm, the flange, the one or more motors, and the base. The second frame is mounted on the first frame.

12. The robot according to claim 10, wherein: The robot also has: a first hook disposed on the base; and a second hook provided on the circuit housing so as to be hooked on the first hook to temporarily fix the circuit housing to the base; The circuit case is attached to the base in a state where the second hook is hooked on the first hook.

13. The robot according to any one of claims 1 to 6, wherein: The drive circuit has a connector electrically connected to the one or more motors, The circuit housing has a wiring opening that exposes the connector when the circuit housing is attached to the base.

14. The robot according to claim 13, wherein: The robot further includes a cover capable of opening and closing the wiring opening in a state in which the circuit case is attached to the base.

15. The robot according to any one of claims 1 to 6, wherein: The robot also has: a power supply circuit that supplies power to the drive circuit; and A power supply case accommodates the power supply circuit and is detachably mounted on the circuit case.

16. The robot according to claim 15, wherein: The power source casing is attached to the circuit casing so as to be aligned with the circuit casing in a direction intersecting a direction in which the base and the circuit casing are aligned.

17. The robot according to claim 15, wherein: The robot also has: a communication connector, which is disposed on the power supply housing; and a communication cable electrically connecting the communication connector to the drive circuit, The drive circuit communicates with an external device via the communication cable and the communication connector.

18. A substrate transport device comprising: The robot according to any one of claims 2 to 6; and a chamber that receives the hand and the multi-jointed arm, The chamber has a chamber opening for arranging the base and the circuit housing outside the chamber, The flange is mounted on the chamber in a manner of closing the opening of the chamber.

19. The substrate transporting device according to claim 18, wherein: The chamber opening is open downwards, The flange holds the base in a state where the circuit case is off the ground.

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