A distributed broadband multi-frequency filter

The distributed broadband filter design addresses high-frequency challenges with dynamic impedance adaptation, controlled transmission zeros, and thermal stability, improving signal integrity and reliability for 5G/6G communications and satellite internet.

CN120073261BActive Publication Date: 2025-07-15HEFEI IC VALLEY MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202510547775.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-04-28
Publication Date
2025-07-15
Estimated Expiration
2045-04-28

AI Technical Summary

Technical Problem

Traditional broadband multi-frequency filters have problems such as high surface wave loss, impedance mismatch, deterioration of in-band ripple, insufficient isolation between frequency bands, limited transmission zero point generation, low out-of-band suppression slope, and mismatch of thermal expansion of metal packages in high-frequency bands, affecting the channel capacity and reliability of high-frequency communication equipment.

Method used

The coordinated design of gradient dielectric substrate module, multi-frequency matching module, cross-coupling module and conformal packaging module is adopted, including the application of gradient dielectric layer, exponential gradient microstrip line structure, L-shaped branch units and aluminum nitride ceramic shell, to achieve dynamic adaptation of dielectric constant, controllable transmission zero points and high power thermal stability.

Benefits of technology

Significantly reduce signal transmission losses, improve multi-frequency isolation performance, enhance out-of-band suppression capabilities, ensure high-frequency signal integrity and thermal stability, and adapt to the high-frequency system needs of 5G/6G communications and satellite Internet.

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Abstract

The present invention provides a distributed broadband multi-frequency filter, which relates to the technical field of broadband multi-frequency filters. Through the collaborative design of a gradient dielectric substrate and asymmetric coupling, the present invention realizes dynamic adaptation of the dielectric constant within a wide frequency band, significantly reduces signal transmission loss and improves multi-frequency isolation performance; the cross-coupling module generates controllable transmission zeros on both sides of the passband, breaking through the out-of-band rejection ability boundary of traditional filters; the defected ground array precisely suppresses parasitic resonance to ensure high-frequency signal integrity; the conformal packaging structure achieves thermal stability and mechanical robustness under high power through thermo-mechanical coupling optimization. The collaborative optimization problems such as wide-band impedance matching, multi-frequency interference suppression, and high-power reliability are optimized, which is more in line with the development trend of high-frequency systems such as 5G / 6G communication and satellite Internet.
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Description

Technical Field

[0001] The present invention relates to the technical field of broadband multi - frequency filters, and specifically to a distributed broadband multi - frequency filter. Background Art

[0002] Current broadband multi - frequency filters face multiple technical bottlenecks in 5G communication, satellite payloads, and radar systems: Due to the single dielectric constant of traditional uniform dielectric substrates, the surface wave loss in the high - frequency band is significant (> 1.5 dB / cm), and when multi - frequency signals are transmitted in a coordinated manner, the in - band ripple deterioration (more than ± 1.2 dB) is likely to be caused by impedance mismatch; The stepped matching network is limited by the fixed unit size, and it is difficult to achieve continuous impedance transformation within a wide frequency band of 1 - 6 GHz. The insufficient isolation degree between frequency bands (< 30 dB) causes channel crosstalk; The symmetric coupling structure can only generate a limited number of transmission zeros on one side of the passband, and the out - of - band rejection slope is low (< 60 dB / GHz), which cannot meet the requirements for suppressing adjacent - frequency interference in the millimeter - wave band; In addition, due to the thermal expansion mismatch of traditional metal packaging, thermal stress deformation is likely to occur in power scenarios above 30 W, resulting in an excessive temperature drift of the filter (> 50 ppm / ℃). These defects severely restrict the channel capacity and reliability of high - frequency communication devices in scenarios such as Massive MIMO base stations and low - earth - orbit satellite phased arrays.

[0003] The above information disclosed in the background art section is only used to enhance the understanding of the background of the present disclosure, and thus it may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0004] The purpose of the present invention is to provide a distributed broadband multi - frequency filter to solve the problems raised in the above - mentioned background art.

[0005] To achieve the above - mentioned purpose, the present invention provides the following technical solutions:

[0006] A distributed broadband multi - frequency filter specifically includes:

[0007] A high - dielectric - constant substrate module, which includes a gradient dielectric layer and a silver - plated carrier board, and is used to achieve the electromagnetic field constraint and heat conduction of the overall multi - frequency filter;

[0008] A multi - frequency matching module, which is arranged on the surface of the high - dielectric - constant substrate module and includes four groups of independent matching network units for processing signals of different frequencies;

[0009] A cross - coupling module, which is arranged between the four groups of matching network units and is used to generate transmission zeros;

[0010] The DGS suppression module is etched on the back of the silver-plated carrier of the high-dielectric substrate module and is used to suppress parasitic resonance;

[0011] The conformal packaging module covers the surface of the high-dielectric substrate module and is used to improve the overall power capacity of the multi-band filter.

[0012] Preferably, the gradient dielectric layer in the high-dielectric substrate module is composed of three layers of composite dielectrics, and the distribution of its dielectric constant along the thickness direction satisfies:

[0013] ;

[0014] In the formula represents the dielectric constant at the vertical coordinate of , represents the vertical coordinate, , where represents the total thickness of the dielectric, , with the unit of mm, represents the top-layer dielectric constant, , represents the change in dielectric constant, , represents the attenuation coefficient, .

[0015] Preferably, all four groups of the matching network units adopt the exponentially tapered microstrip line structure, and the characteristic impedance change satisfies:

[0016] ;

[0017] where represents the characteristic impedance corresponding to the microstrip line length of , represents the preset initial impedance, represents the taper coefficient, , represents the microstrip line length;

[0018] The unit spacing between adjacent two groups of matching network units needs to be greater than the minimum spacing, and the calculation method of the minimum spacing is:

[0019] ;

[0020] In the formula represents the minimum spacing, represents the preset center frequency, represents the speed of light, represents the center frequency difference between adjacent two groups of matching network units, 、 Both represent the scaling factors, and the value ranges of both are between 0.2 and 0.3, where Satisfy: , represents the effective dielectric constant of the high-dielectric substrate module.

[0021] Preferably, the calculation method of the effective dielectric constant is:

[0022] ;

[0023] In the formula represents the electric field distribution function in the direction perpendicular to the substrate of the high-dielectric substrate module, expressed as:

[0024] ;

[0025] In the formula , represent the boundary electric fields, satisfying:

[0026] ;

[0027] In the formula represents the operating voltage of the entire multi-frequency filter, represents the microstrip line width.

[0028] Preferably, the cross-coupling module includes several groups of L-shaped stub units, and the calculation methods of the stub length and coupling distance are respectively:

[0029] ;

[0030] ;

[0031] In the formula , respectively represent the stub length and coupling distance of the L-shaped stub unit, , respectively represent the length adjustment coefficient and the distance adjustment coefficient, , , represents the voltage standing wave ratio, represents the quality factor, and .

[0032] Preferably, a cross-slot array is provided in the DGS suppression module, and the calculation methods of the slot length and slot width of each group of cross-slots are respectively:

[0033] ;

[0034] ;

[0035] In the formula , respectively represent the slot length and slot width of the cross slot, and , , represents the parasitic resonance frequency, , , respectively represent the frequency adjustment factor and the width-to-length ratio coefficient, , .

[0036] Preferably, the conformal encapsulation module uses an aluminum nitride ceramic housing with a wall thickness of 0.2 - 0.5 mm and a surface roughness less than 0.1 μm. The calculation method of its thermal expansion coefficient matching degree is:

[0037] ;

[0038] In the formula represents the thermal expansion matching degree, , respectively represent the thermal expansion coefficients of the conformal encapsulation module and the high-dielectric substrate module, and the thermal expansion coefficient matching degree of the conformal encapsulation module satisfies .

[0039] Preferably, the aluminum nitride ceramic housing is processed using the laser-activated metallization process, where the bonding strength of the metallization layer is greater than 45 MPa, specifically including:

[0040] A titanium-tungsten bonding layer with a thickness of 0.5 μm ± 0.05 μm;

[0041] A nickel-vanadium barrier layer with a thickness of 1 μm ± 0.1 μm;

[0042] A gold bonding layer with a thickness of 0.5 μm ± 0.15 μm.

[0043] Compared with the prior art, the beneficial effects of the present invention are:

[0044] Through the collaborative design of the gradient dielectric substrate and asymmetric coupling, the present invention realizes the dynamic adaptation of the dielectric constant within a wide frequency band, significantly reduces signal transmission loss, and improves multi-frequency isolation performance; the cross-coupling module generates controllable transmission zeros on both sides of the passband, breaking through the out-of-band rejection ability boundary of traditional filters; the defected ground array precisely suppresses parasitic resonance to ensure the integrity of high-frequency signals; the conformal encapsulation structure achieves thermal stability and mechanical robustness under high power through thermo-mechanical coupling optimization. It optimizes the collaborative optimization problems such as wide-frequency impedance matching, multi-frequency interference suppression, and high-power reliability, and is more in line with the development trend of high-frequency systems such as 5G / 6G communication and satellite Internet. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1Schematic diagram of the overall structure of the present invention;

[0046] Figure 2 Schematic diagram of the simulation structure of the present invention;

[0047] Figure 3 Simulation waveform of the present invention;

[0048] Figure 4 Measured waveform of the present invention. Detailed implementation manners

[0049] To make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in conjunction with specific embodiments.

[0050] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should have the ordinary meanings understood by those with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. The terms such as "comprising" or "including" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. The terms such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0051] Embodiment:

[0052] Please refer to Figures 1 to 4 , the present invention provides a technical solution:

[0053] A distributed broadband multi-frequency filter, specifically including: a high-dielectric substrate module, a multi-frequency matching module, a cross-coupling module, a DGS suppression module, and a conformal packaging module.

[0054] The high-dielectric substrate module includes a gradient dielectric layer and a silver-plated carrier board, and is used to realize the electromagnetic field constraint and heat conduction of the overall multi-frequency filter.

[0055] The gradient dielectric layer in the high-dielectric substrate module is composed of three layers of composite dielectrics, and the distribution of its dielectric constant along the thickness direction satisfies:

[0056] ;

[0057] wherein represents the dielectric constant at the vertical coordinate of , represents the vertical coordinate, , where represents the total thickness of the medium, , with the unit of mm, represents the top-layer dielectric constant, , represents the change in dielectric constant, , where the top-layer dielectric constant and the change in dielectric constant can be determined through the composite medium optimization theory in materials science and verified by high-frequency electromagnetic simulation, so as to ensure a smooth transition of the dielectric gradient, represents the attenuation coefficient, , which can be optimized through the simulation of the electromagnetic field energy distribution to balance the requirements of surface wave suppression and electric field constraint.

[0058] In this step, the dielectric constant of the high-dielectric substrate module is described by the Gaussian attenuation mode, which can significantly reduce the reflection at the dielectric layer interface, enhance the electromagnetic field constraint ability, and achieve low-loss transmission within a wide frequency band. Compared with the traditional uniform dielectric structure, this solution improves the stability of multi-frequency signal cooperative operation, provides an ideal electromagnetic environment basis for the multi-frequency matching network, and can also establish the mapping relationship between the dielectric gradient and the field distribution, laying the foundation for multi-frequency cooperation.

[0059] The multi-frequency matching module is arranged on the surface of the high-dielectric substrate module and includes four groups of independent matching network units for processing signals of different frequencies;

[0060] All four groups of matching network units adopt the exponential tapered microstrip line structure, and the characteristic impedance change satisfies:

[0061] ;

[0062] where represents the characteristic impedance corresponding to the microstrip line length of , represents the preset initial impedance, represents the tapering coefficient, which can be determined by combining the impedance matching theory and the standing wave ratio simulation results and using the multi-objective optimization algorithm. Specifically, its value range is generally within , represents the microstrip line length;

[0063] The unit spacing between adjacent two groups of matching network units needs to be greater than the minimum spacing, and the calculation method of the minimum spacing is:

[0064] ;

[0065] In the formula represents the minimum spacing, represents the preset center frequency, represents the speed of light, Represents the difference in the intermediate and Western frequencies between two adjacent groups of matching network units. and both represent the scaling factors, and their specific magnitudes can be determined based on the electromagnetic coupling strength analysis and optimized through the parameter scanning method. Moreover, the value ranges of both are between 0.2 and 0.3, where satisfies: , represents the effective dielectric constant of the high-dielectric substrate module.

[0066] The calculation method of the effective dielectric constant is:

[0067] ;

[0068] The exponential gradient structure can achieve continuous impedance transformation within a wide frequency band, breaking through the bandwidth limitation of the traditional stepped impedance transformer. Dynamically adjusting the unit spacing effectively suppresses crosstalk between frequency bands, provides physical isolation guarantee for independent processing of multi-frequency signals, and significantly improves the purity of the passband signal.

[0069] In the formula represents the electric field distribution function of the high-dielectric substrate module perpendicular to the substrate direction, which is expressed as:

[0070] ;

[0071] In the formula and represent the boundary electric fields, which satisfy:

[0072] ;

[0073] In the formula represents the operating voltage of the overall multi-frequency filter, represents the microstrip line width.

[0074] In this step, the exponential gradient structure realizes continuous impedance transformation within a wide frequency band, breaking through the bandwidth limitation of the traditional stepped impedance transformer. Dynamically adjusting the unit spacing effectively suppresses crosstalk between frequency bands, provides physical isolation guarantee for independent processing of multi-frequency signals, significantly improves the purity of the passband signal, and can be optimized through genetic algorithm for multi-objectives and verified by time domain reflectometer measurement to achieve the Pareto optimality of the impedance matching bandwidth and isolation.

[0075] The cross-coupling module is arranged between four groups of matching network units and is used to generate transmission zeros.

[0076] The cross-coupling module includes several groups of L-shaped stub units, and the calculation methods of their stub lengths and coupling spacings are respectively:

[0077] ;

[0078] ;

[0079] wherein and respectively represent the stub length and coupling spacing of the L-shaped stub unit, and respectively represent the length adjustment coefficient and spacing adjustment coefficient, which can be jointly calibrated through the coupling coefficient analysis model and full-wave electromagnetic simulation, and are used to optimize the position of the transmission zero point. Specifically, their value ranges are generally in , , represents the voltage standing wave ratio, represents the quality factor, and , the value constraint is derived based on the resonant cavity energy loss theory to ensure the out-of-band rejection performance.

[0080] In this step, the asymmetric coupling design introduces controllable transmission zeros on both sides of the passband, which can break through the frequency selectivity bottleneck of the traditional symmetric coupling structure. By dynamically adjusting the geometric parameters of the stubs, the out-of-band rejection ability can be adaptively improved, significantly enhancing the frequency roll-off characteristic of the filter. Moreover, after analyzing through the coupled-mode theory and scanning the parameters of HFSS full-wave simulation, the position of the transmission zero point can also be accurately controlled, breaking through the theoretical limit of out-of-band rejection.

[0081] The DGS suppression module is etched on the back of the silver-plated carrier of the high-dielectric substrate module to suppress parasitic resonance.

[0082] The DGS suppression module is provided with a cross-slot array. The calculation methods of the slot length and slot width of each group of cross-slots are as follows:

[0083] ;

[0084] ;

[0085] wherein and respectively represent the slot length and slot width of the cross-slot, and , , represents the parasitic resonance frequency, , , respectively represent the frequency adjustment factor and the width-to-length ratio coefficient. Specifically, the magnitudes of their values can be determined through parasitic resonance mode analysis and experimental calibration method, and are dynamically adapted in combination with the dielectric characteristics of the substrate. , .

[0086] In this step, the cross-slot array can precisely suppress parasitic resonance in specific frequency bands, breaking through the limitation of single-frequency point suppression of traditional DGS structures. The periodic defected ground design reconstructs the current distribution, significantly improving the steepness of the passband edge and ensuring the signal integrity in high-frequency bands.

[0087] The conformal packaging module covers the surface of the high-dielectric substrate module to improve the overall power capacity of the multi-band filter.

[0088] The conformal packaging module uses an aluminum nitride ceramic shell with a wall thickness of 0.2 - 0.5 mm and a surface roughness less than 0.1 μm. The calculation method of its thermal expansion coefficient matching degree is as follows:

[0089] ;

[0090] In the formula represents the thermal expansion matching degree, , respectively represent the thermal expansion coefficients of the conformal packaging module and the high-dielectric substrate module, which can be optimized based on the material thermodynamics property database and then verified by finite element thermal stress simulation for the matching degree. And the thermal expansion coefficient matching degree of the conformal packaging module satisfies .

[0091] The aluminum nitride ceramic shell is processed using the laser-activated metallization process, where the bonding strength of the metallization layer is greater than 45 MPa. Specifically, the thickness of the metallization layer is determined through the electronic packaging reliability model and process tolerance analysis, including specifically:

[0092] Titanium-tungsten bonding layer with a thickness of 0.5 μm ± 0.05 μm;

[0093] Nickel-vanadium barrier layer with a thickness of 1 μm ± 0.1 μm;

[0094] Gold bonding layer with a thickness of 0.5 μm ± 0.15 μm.

[0095] In this step, the co-design of thermal expansion of heterogeneous materials can significantly reduce the temperature cycle stress and overcome the problem of deteriorated high-temperature performance of traditional packaging structures. The optimization of the multi-layer metallization interface can not only improve the heat dissipation efficiency and mechanical stability, but also through the matching of the material thermal expansion coefficient database and COMSOL thermal stress simulation, it can also achieve the thermodynamic stability design of the heterogeneous material interface, providing reliable guarantee for high-power application scenarios.

[0096] Specifically, a common I / O port (COM) and four groups of independent RF I / O ports (RF1~RF4) are provided on the high-dielectric substrate module. Four mutually independent matching network units (F1~F4) are respectively arranged between the common I / O port and the RF I / O ports. The L-shaped stub units (P1~P6) of the cross-coupling module are used to connect the four mutually independent matching network units. Figure 3 This is the measured waveform of the present invention in the simulation state. Figure 4 This is the measured waveform after the actual production of the present invention. By referring to its simulation waveform and measured waveform, it can be seen that the difference between the two is not large, and it can well achieve the functional indicators required by the design, realizing the optimization goals of multi-band, ultra-wideband, and low loss.

[0097] In summary, through the collaborative design of gradient dielectric substrates and asymmetric coupling, the present invention realizes the dynamic adaptation of the dielectric constant within a wide frequency band, significantly reduces signal transmission loss and improves multi-frequency isolation performance; the cross-coupling module generates controllable transmission zeros on both sides of the passband, breaking through the out-of-band rejection ability boundary of traditional filters; the defected ground array precisely suppresses parasitic resonance to ensure the integrity of high-frequency signals; the conformal packaging structure achieves thermal stability and mechanical robustness under high power through thermo-mechanical coupling optimization. It optimizes the collaborative optimization problems such as wideband impedance matching, multi-frequency interference suppression, and high-power reliability, and is more in line with the development trend of high-frequency systems such as 5G / 6G communication and satellite Internet.

[0098] The above formulas are all dimensionless and take their numerical values for calculation. The formula is a formula obtained by collecting a large amount of data for software simulation to approximate the real situation. The preset parameters in the formula are set by those skilled in the art according to the actual situation.

[0099] The above embodiments can be implemented in whole or in part by software, hardware, firmware, or any other combination. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. Those skilled in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are executed by hardware or software methods depends on the specific application and design constraints of the technical solution.

[0100] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units. They can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0101] As described above, it is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application.

Claims

1. A distributed broadband multi - frequency filter, characterized in that, Specifically include: A high-dielectric substrate module, which includes a gradient dielectric layer and a silver-plated carrier board, and is used to realize the electromagnetic field constraint and heat conduction of the overall multi-frequency filter; A multi-frequency matching module, which is arranged on the surface of the high-dielectric substrate module and includes four groups of independent matching network units, and is used to process signals of different frequencies; A cross-coupling module, which is arranged between the four groups of matching network units and is used to generate transmission zeros; A DGS suppression module, which is etched on the back of the silver-plated carrier board of the high-dielectric substrate module and is used to suppress parasitic resonance; A conformal packaging module, which covers the surface of the high-dielectric substrate module and is used to improve the overall power capacity of the multi-frequency filter.

2. The distributed broadband multi-frequency filter according to claim 1, wherein: The gradient dielectric layer in the high-dielectric substrate module is composed of three layers of composite dielectrics, and the distribution of its dielectric constant along the thickness direction satisfies: ; where denotes the dielectric constant at the vertical coordinate , represents the vertical coordinate , where denotes the total thickness of the dielectric , in mm denotes the top-layer dielectric constant , represents the change in dielectric constant , denotes the attenuation coefficient .

3. The distributed broadband multi-frequency filter according to claim 2, wherein: All four groups of the matching network units adopt an exponentially tapered microstrip line structure, and the change of characteristic impedance satisfies: ; wherein represents the characteristic impedance corresponding to the microstrip line length of ; represents the preset initial impedance, represents the tapering coefficient, , represents the microstrip line length; The unit spacing between adjacent two groups of matching network units needs to be greater than the minimum spacing, and the calculation method of the minimum spacing is: ; wherein represents the minimum spacing represents the preset center frequency represents the speed of light represents the center frequency difference between adjacent two sets of matching network units and both represent scale factors, and the value ranges of both are between 0.2 and 0.3, where satisfies and represents the effective dielectric constant of the high dielectric substrate module 4. A distributed broadband multi-frequency filter according to claim 3, characterized in that: The calculation method of the effective dielectric constant is: ; where represents the electric field distribution function of the high-dielectric substrate module in the direction perpendicular to the substrate, expressed as: ; where , represent the boundary electric field, and satisfy: ; where represents the operating voltage of the entire multi - frequency filter, represents the width of the microstrip line.

5. A distributed broadband multi-frequency filter according to claim 3, characterized in that: The cross-coupling module includes several groups of L-shaped stub units, and the calculation methods of the stub length and coupling spacing are respectively: ; ; wherein and respectively represent the stub length and coupling spacing of the L-shaped stub unit, and respectively represent the length adjustment coefficient and the spacing adjustment coefficient, , , represents the voltage standing wave ratio, represents the quality factor, and .

6. A distributed broadband multi-frequency filter according to claim 3, characterized in that: The DGS suppression module is provided with a cross-slot array, and the calculation methods of the slot length and slot width of each group of cross-slots are respectively: ; In the formula and represent the slot length and slot width of the cross slot respectively, and , , represents the parasitic resonance frequency, , and represent the frequency adjustment factor and the width-to-length ratio coefficient respectively, , .

7. A distributed broadband multi-frequency filter according to claim 1, characterized in that: The conformal packaging module uses an aluminum nitride ceramic shell with a wall thickness of 0.2 - 0.5 mm and a surface roughness less than 0.1 μm, and the calculation method of its thermal expansion coefficient matching degree is: ; In the formula represents the thermal expansion matching degree, , respectively represent the thermal expansion coefficients of the conformal encapsulation module and the high-dielectric substrate module, and the thermal expansion coefficient matching degree of the conformal encapsulation module satisfies .

8. A distributed broadband multi-frequency filter according to claim 7, characterized in that: The aluminum nitride ceramic shell is processed by a laser-activated metallization process, and the bonding strength of the metallization layer is greater than 45 MPa. Specifically include: A titanium-tungsten bonding layer with a thickness of 0.5 μm ± 0.05 μm; A nickel-vanadium barrier layer with a thickness of 1 μm ± 0.1 μm; A gold bonding layer with a thickness of 0.5 μm ± 0.15 μm.

Citation Information

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