Vacuum system sample loading and unloading inspection device and sample loading and unloading method

Abstract

The invention discloses a vacuum system upper and lower sample inspection device and a sample loading and unloading method, and the vacuum system upper and lower sample inspection device comprises a vacuum chamber, and a transfer unit, an appearance inspection unit, a film thickness inspection unit, a pick-and-place unit, a cover closing unit and a vacuum unit which are located in the vacuum chamber, a clamp product is taken from the transfer unit to the clamp disc in the sample outlet chamber through the taking and placing unit, an upper cover is placed on the clamp disc in the sample inlet through the cover closing unit and is connected with the clamp disc, and the sample loading operation is completed; the taking and placing unit takes out clamp products from a clamp disc in the sample outlet chamber to the transfer unit, the transfer unit sequentially conveys the clamp products to the appearance inspection unit and the film thickness inspection unit for inspection, and then the clamp products are conveyed to the sample outlet through the transfer unit to complete sample discharging operation. Sample loading and sample unloading are completed in a full-automatic mode, the loss that the end face of a product is touched due to human errors or particle smudginess is introduced due to human operation is avoided, operators cannot be scalded, and safety is good.

Description

Technical Field

[0001] This application belongs to the technical field of testing equipment, and particularly relates to a device for inspecting loading and unloading of a vacuum system, and a method for loading and unloading samples. Background Art

[0002] In the process of semiconductor chip manufacturing, high-vacuum deposition equipment needs to use a supporting fixture to assist in production for coating the front and back ends of the chip. The specific operation is as follows: Figure 1 As shown, the cuboid chips are stacked up and down to form a fixture product 100 in a single fixture, and then the fixture product 100 is loaded into a fixture tray 200. After covering the upper cover 300, the coating process is carried out with 4 / 6 / 9 fixture products 100 as a tray.

[0003] In the prior art, during the loading and unloading operation, manual picking and placing operations are generally used, which are prone to losses such as touching the product end face due to human error or introducing particulate contamination due to human operation; moreover, when the fixture product is unloaded after the coating process, the surface temperature is relatively high, which may scald the operator. Summary of the Invention

[0004] To solve the technical problems in the prior art that during the loading and unloading operation, manual picking and placing operations are generally used, which are prone to losses such as touching the product end face due to human error or introducing particulate contamination due to human operation, and may scald the operator, this application provides a device for inspecting loading and unloading of a vacuum system, and a method for loading and unloading samples.

[0005] In the first aspect of this application, a device for inspecting loading and unloading of a vacuum system is provided, including a vacuum chamber, and a transfer unit, an appearance inspection unit, a film thickness inspection unit, a picking and placing unit, a lid closing unit, and a vacuum unit located in the vacuum chamber, where:

[0006] The vacuum chamber is provided with a sample loading chamber and a sample unloading chamber. The sample loading chamber is provided with a sample loading port, and the sample unloading chamber is provided with a sample unloading port;

[0007] The transfer unit is used to transport the fixture product from the sample unloading chamber to the appearance inspection unit for inspection, and transport it below the picking and placing unit; it is also used to sequentially transport the fixture product from below the picking and placing unit to the appearance inspection unit and the film thickness inspection unit for inspection, and transport it to the sample unloading chamber to unload the sample from the sample unloading port;

[0008] The picking and placing unit is used to pick the fixture product from the transfer unit onto the fixture tray in the sample unloading chamber; it is also used to take out the fixture product from the fixture tray containing the fixture product in the sample unloading chamber to the transfer unit;

[0009] Both the appearance inspection unit and the film thickness inspection unit are located on the opposite side of the sample loading chamber;

[0010] The lid closing unit is disposed on the side of the transfer unit, and is configured to close the upper lid of the fixture tray onto the fixture tray and connect the upper lid and the fixture tray; it is also configured to remove the upper lid of the fixture tray entering the sample introduction chamber from the fixture tray through the sample introduction port.

[0011] The vacuum unit is in communication with the vacuum chamber and is configured to evacuate the vacuum chamber.

[0012] In some alternative embodiments, the vacuum chamber further includes a vacuum pumping port, and the vacuum unit is connected to the vacuum pumping port.

[0013] In some alternative embodiments, the vacuum unit includes a molecular pump, a vacuum tube, and a mechanical pump. The molecular pump is connected to the vacuum pumping port, and the vacuum tube is respectively connected to the molecular pump and the mechanical pump.

[0014] In some alternative embodiments, the pick-and-place unit includes a base and a pick-and-place arm. The base is mounted on the vacuum chamber, and the pick-and-place arm is connected to the base and is configured to pick up fixture products.

[0015] In some alternative embodiments, the lid closing unit includes a fixture tray arm and a connecting device. The fixture tray arm is mounted on the side wall of the vacuum chamber and is configured to push the upper lid onto the fixture tray or pull the upper lid out of the fixture tray; the connecting device is disposed above the transfer unit and is configured to tighten or remove the screws connecting the upper lid and the fixture tray pair.

[0016] In some alternative embodiments, the connecting device includes a connecting seat, a displacement device, and a screwdriver. The connecting seat is connected to the vacuum chamber, and the displacement device is respectively connected to the first displacement device and the screwdriver and is configured to drive the screwdriver to move linearly in the vertical direction and rotate in the circumferential direction.

[0017] In some alternative embodiments, the transfer unit employs a conveyor belt.

[0018] In some alternative embodiments, the vacuum chamber includes a first chamber and a second chamber that are in communication with each other; the sample introduction chamber, the pick-and-place unit, and the lid closing unit are located in the first chamber; the sample output chamber, the appearance detection unit, and the film thickness detection unit are located in the second chamber; one end of the transfer unit is located in the first chamber and the other end is located in the second chamber.

[0019] In a second aspect of the present application, there is provided a method for loading a vacuum system, which uses the vacuum system loading and unloading inspection device described in the first aspect, and includes:

[0020] Place the fixture product on the transfer unit through the sample outlet;

[0021] Vacuum the vacuum chamber through the vacuum unit, and the transfer unit conveys the fixture product to the appearance inspection unit for surface inspection;

[0022] The fixture product after surface inspection is conveyed to below the pick-and-place unit through the transfer unit, and the pick-and-place unit picks up the fixture product and places it into the fixture tray in the sample injection chamber;

[0023] Repeat the above actions. Until the fixture tray is full of fixture products, place the upper cover on the fixture tray located in the sample injection port through the cover closing unit, and connect the upper cover to the fixture tray to complete the sample loading operation of the fixture product onto the fixture tray.

[0024] In the third aspect of the present application, a sample unloading method under a vacuum system is provided, using the vacuum system sample loading and unloading inspection device described in the first aspect, including:

[0025] Place the fixture tray with fixture products on the transfer unit through the sample injection port;

[0026] Remove the upper cover from the fixture tray through the cover closing unit;

[0027] Pick up the fixture product from the fixture tray to the transfer unit through the pick-and-place unit;

[0028] Convey it to the appearance inspection unit through the transfer unit for surface inspection;

[0029] The fixture product after surface inspection is conveyed to the film thickness inspection unit through the transfer unit for film thickness inspection;

[0030] The fixture product after film thickness inspection is conveyed to the sample outlet through the transfer unit, and the air in the vacuum chamber is returned to complete the sample unloading operation.

[0031] A vacuum system sample loading and unloading inspection device provided according to one or more embodiments of the present application has the following beneficial effects compared with the prior art:

[0032] After the fixture product is inspected on the surface, it is conveyed to the lower part of the picking and placing unit by the transfer unit. The picking and placing unit picks the fixture product from the transfer unit onto the fixture tray in the sample-taking chamber. The upper cover is placed on the fixture tray located in the sample inlet by the cover closing unit, and the upper cover is connected to the fixture tray to complete the sample loading operation of the fixture product onto the fixture tray. The fixture product is taken out from the fixture tray containing the fixture product in the sample-taking chamber to the transfer unit by the picking and placing unit, and is sequentially conveyed to the appearance inspection unit and the film thickness inspection unit by the transfer unit for inspection. The fixture product after film thickness inspection is conveyed to the sample outlet by the transfer unit to complete the sample unloading operation. The above entire sample loading and unloading operations are fully automated, avoiding losses such as touching the product end face due to human error or introducing particulate contamination due to human operation, and will not cause burns to the operators, with good safety performance. Description of the Drawings

[0033] Figure 1 Fig. shows a schematic structural diagram of a fixture tray mounting a fixture product in the background art of the present application;

[0034] Figure 2 Fig. shows a front view of the sample loading and unloading inspection device of the vacuum system in one or more embodiments of the present application;

[0035] Figure 3 Fig. shows a top view of the sample loading and unloading inspection device of the vacuum system in one or more embodiments of the present application.

[0036] Description of the reference numerals: 100 - fixture product, 200 - fixture tray, 300 - upper cover; 1 - vacuum chamber, 11 - first chamber, 111 - sample inlet chamber, 12 - second chamber, 121 - sample outlet chamber, 122 - vacuum pumping port; 2 - transfer unit; 3 - appearance inspection unit; 4 - film thickness inspection unit; 5 - picking and placing unit, 51 - base, 52 - picking and placing arm; 6 - cover closing unit, 61 - fixture tray arm, 62 - connecting device, 621 - connecting seat, 622 - displacement device, 623 - screwdriver; 7 - vacuum unit, 71 - molecular pump, 72 - vacuum tube, 73 - mechanical pump. Detailed Embodiments

[0037] In order to enable those skilled in the art in the technical field to which the present application belongs to understand the present application more clearly, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0038] Please refer to Figure 2 and Figure 3, in the embodiment of the first aspect of the present application, a device for inspecting upper and lower samples of a vacuum system is provided, including a vacuum chamber 1, and a transfer unit 2, an appearance inspection unit 3, a film thickness inspection unit 4, a pick-and-place unit 5, a lid closing unit 6, and a vacuum unit 7 located in the vacuum chamber 1, where:

[0039] The vacuum chamber 1 is provided with a sample inlet chamber 111 and a sample outlet chamber 121. The sample inlet chamber 111 is provided with a sample inlet, and the sample outlet chamber 121 is provided with a sample outlet;

[0040] The transfer unit 2 is used to convey the fixture product 100 from the fixture in the sample outlet chamber 121 to the appearance inspection unit 3 for inspection, and convey it below the pick-and-place unit 5; it is also used to sequentially convey the fixture product 100 from below the pick-and-place unit 5 to the appearance inspection unit 3 and the film thickness inspection unit 4 for inspection, and convey it to the sample outlet chamber 121 for sampling from the sample outlet;

[0041] The pick-and-place unit 5 is used to pick the fixture product 100 from the transfer unit 2 and place it on the fixture tray 200 in the sample outlet chamber 121; it is also used to take the fixture product 100 out of the fixture tray 200 containing the fixture product 100 in the sample outlet chamber 121 and place it on the transfer unit 2;

[0042] Both the appearance inspection unit 3 and the film thickness inspection unit 4 are located on the opposite side of the sample inlet chamber 111; the appearance inspection unit 3 can use a camera to take pictures of the appearance of an object and inspect its surface;

[0043] The lid closing unit 6 is arranged on the side of the transfer unit 2 and is used to cover the upper lid 300 of the fixture tray 200 on the fixture tray 200 and connect the upper lid 300 and the fixture tray 200; it is also used to remove the upper lid 300 of the fixture tray 200 entering the sample inlet chamber 111 from the sample inlet from the fixture tray 200;

[0044] The vacuum unit 7 is communicated with the vacuum chamber 1 and is used to evacuate the vacuum chamber 1.

[0045] The up-sampling and down-sampling inspection device for the vacuum system provided by the embodiment of the present application uses the transfer unit 2 to transfer the fixture product 100 after surface inspection to below the picking and placing unit 5. The picking and placing unit 5 picks the fixture product 100 from the transfer unit 2 and places it on the fixture tray 200 in the sample-out chamber 121. The lid closing unit 6 places the upper lid 300 on the fixture tray 200 located in the sample-in port and connects the upper lid 300 to the fixture tray 200 to complete the up-sampling operation of the fixture product 100 to the fixture tray 200. The picking and placing unit 5 takes out the fixture product 100 from the fixture tray 200 containing the fixture product 100 in the sample-out chamber 121 and places it on the transfer unit 2. The transfer unit 2 sequentially transfers it to the appearance inspection unit 3 and the film thickness inspection unit 4 for inspection. The fixture product 100 after film thickness inspection is transferred to the sample-out port by the transfer unit 2 to complete the down-sampling operation. The up-sampling and down-sampling operations are carried out in a high-vacuum environment to avoid an increase in surface states caused by the laser chip cavity surface contacting the atmosphere. By improving the reliability of the device, the product yield and reliability are improved, thus generating economic benefits. The above entire up-sampling and down-sampling operations are completed automatically, avoiding losses such as touching the product end face due to human error or introducing particle contamination due to human operation, and will not cause burns to the operators, with good safety performance.

[0046] In some alternative embodiments, the vacuum chamber 1 further includes a vacuum pumping port 122, and the vacuum unit 7 is connected to the vacuum pumping port 122. The vacuum unit 7 is connected to the vacuum pumping port 122, and the vacuum unit 7 seals the vacuum pumping port 122 and quickly pumps the vacuum chamber 1 to achieve a high-vacuum state, improving the vacuum pumping efficiency, thereby improving the production efficiency of the device.

[0047] In some alternative embodiments, the vacuum unit 7 includes a molecular pump 71, a vacuum tube 72, and a mechanical pump 73. The molecular pump 71 is connected to the vacuum pumping port 122, and the vacuum tube 72 is respectively connected to the molecular pump 71 and the mechanical pump 73. The molecular pump 71 is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, enabling them to obtain a directional velocity, thereby being compressed and driven towards the exhaust port and then pumped away by the fore pump. The molecular pump 71 has a large pumping speed and a high compression ratio within a wide pressure range (10-61 Pa), greatly increasing the outlet pressure of the pump and enabling rapid vacuum pumping. The gas in the molecular pump 71 is in a molecular flow state, so a fore pump needs to be equipped, and generally a mechanical pump 73 is used as the fore pump.

[0048] In some alternative embodiments, the pick-and-place unit 5 includes a base 51 and a pick-and-place arm 52. The base 51 is mounted on the vacuum chamber 1, and the pick-and-place arm 52 is connected to the base 51 and is used for picking up the fixture product 100. By picking up the fixture product 100 with the pick-and-place arm 52, the fixture product 100 can be picked from the transfer unit 2 and placed on the fixture tray 200 in the sample-taking chamber 121, and the fixture product 100 can also be taken out from the fixture tray 200 containing the fixture product 100 in the sample-taking chamber 121 and placed on the transfer unit 2.

[0049] In some alternative embodiments, the lid-closing unit 6 includes a fixture-tray 200 arm and a connecting device 62. The fixture-tray 200 arm is mounted on the side wall of the vacuum chamber 1 and is used for pushing the upper lid 300 onto the fixture tray 200 or pulling the upper lid 300 out from the fixture tray 200. The connecting device 62 is disposed above the transfer unit and is used for tightening or removing the screw connecting the upper lid 300 and the fixture tray 200 pair. The fixture-tray 200 arm can extend and retract in the horizontal direction, so as to push the upper lid 300 onto the fixture tray 200 by extending, and tighten the screw connecting the upper lid 300 and the fixture tray 200 pair by the connecting device 62; or remove the screw connecting the upper lid 300 and the fixture tray 200 pair by the connecting device 62, and pull the upper lid 300 out from the fixture tray 200 by retracting.

[0050] In some alternative embodiments, the connecting device 62 includes a connecting seat 621, a displacement device 622 and a screwdriver 623. The connecting seat 621 is connected to the vacuum chamber 1, and the displacement device 622 is respectively connected to the first displacement device 622 and the screwdriver 623 and is used for driving the screwdriver 623 to move linearly in the vertical direction and rotate in the circumferential direction. By connecting the displacement device 622 to the first displacement device 622 and the screwdriver 623 respectively, the displacement device 622 can drive the screwdriver 623 to move linearly in the vertical direction and rotate in the circumferential direction. During the process that the screwdriver 623 moves downward and rotates clockwise, the screw is screwed into the upper lid 300 and the fixture tray 200; during the process that the screwdriver 623 rotates counterclockwise and moves upward, the screw is screwed out from the upper lid 300 and the fixture tray 200.

[0051] In some alternative embodiments, the transfer unit 2 uses a conveyor belt. The transfer unit 2 can use a belt conveyor or a roller conveyor. By controlling the movement of the conveyor belt, the fixture product 100 is conveyed to a specified position; by controlling the forward and reverse rotation of the motor driving the conveyor belt, the change of the movement direction of the conveyor belt is realized.

[0052] In some alternative embodiments, the vacuum chamber 1 includes a first chamber 11 and a second chamber 12 that are in communication with each other; the sample loading chamber 111, the pick-and-place unit 5, and the lid closing unit 6 are located in the first chamber 11; the sample unloading chamber 121, the appearance inspection unit, and the film thickness inspection unit are located in the second chamber 12; one end of the transfer unit 2 is located in the first chamber 11 and the other end is located in the second chamber 12.

[0053] In a second aspect embodiment of the present application, there is provided a method for loading samples onto a vacuum system, using the vacuum system loading and unloading inspection device described in the first aspect embodiment, including:

[0054] Step S11: Place the fixture product 100 on the transfer unit 2 through the sample unloading port.

[0055] Step S12: Evacuate the vacuum chamber 1 through the vacuum unit 7, and the transfer unit 2 conveys the fixture product 100 to the appearance inspection unit 3 for surface inspection.

[0056] Step S13: After the surface inspection is completed, the fixture product 100 is conveyed by the transfer unit 2 to below the pick-and-place unit 5, and the pick-and-place unit 5 picks up the fixture product 100 and places it into the fixture tray 200 in the sample loading chamber 111.

[0057] Step S14: Repeat the above actions until the fixture tray 200 is full of the fixture products 100. Then, the lid closing unit 6 places the upper lid 300 on the fixture tray 200 located in the sample loading port and connects the upper lid 300 to the fixture tray 200 to complete the sample loading operation of the fixture product 100 onto the fixture tray 200.

[0058] The method for loading samples onto a vacuum system provided by the embodiments of the present application is carried out under a high vacuum state, which simplifies and reduces the frequency of manual intervention, helps to improve product consistency, solves the pain points such as dirt introduced by manual operation and difficult operation due to the high temperature of the fixture tray 200 during sample loading, so that the overall operation is more coherent, the product quality is guaranteed, and thus economic benefits are generated.

[0059] In a third aspect embodiment of the present application, there is provided a method for unloading samples from a vacuum system, using the vacuum system loading and unloading inspection device described in the first aspect embodiment, including:

[0060] Step S21: Place the fixture tray 200 with the fixture product 100 on the transfer unit 2 through the sample loading port.

[0061] Step S22: Remove the upper lid 300 from the fixture tray 200 through the lid closing unit 6.

[0062] Step S23: Pick up the fixture product 100 from the fixture tray 200 to the transfer unit 2 through the pick-and-place unit 5.

[0063] Step S24: It is transported to the appearance inspection unit 3 by the transfer unit 2 for surface inspection.

[0064] Step S25: The fixture product 100 after surface inspection is transported to the film thickness inspection unit 4 by the transfer unit 2 for film thickness inspection.

[0065] Step S26: The fixture product 100 after film thickness inspection is transported to the sample outlet through the transfer unit 2, and the air in the vacuum chamber 1 is returned to complete the sample removal operation.

[0066] The sample removal method of the vacuum system provided by the embodiment of the present application is carried out under a high vacuum state, which simplifies and reduces the frequency of manual intervention, helps to improve product consistency, solves the pain points such as dirt introduced by manual operation and difficult operation due to the high temperature of the fixture plate 200 during sample removal, so that the overall operation is more coherent, the product quality is guaranteed, and thus economic benefits are generated.

[0067] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may include direct contact between the first and second features, or may include the first and second features not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0068] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0069] In the present application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0070] In addition, in this application, descriptions such as "first" and "second" are for descriptive purposes only, and should not be construed as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of this application, "a plurality of" means two or more, unless otherwise specifically defined.

[0071] Although the embodiments of this application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of this application. The scope of this application is defined by the claims and their equivalents.

Claims

1. A device for inspecting samples up and down in a vacuum system, characterized in that, it includes a vacuum chamber, and a transfer unit, an appearance inspection unit, a film thickness inspection unit, a picking and placing unit, a lid closing unit and a vacuum unit located in the vacuum chamber, where: The vacuum chamber is provided with a sample inlet chamber and a sample outlet chamber. The sample inlet chamber is provided with a sample inlet, and the sample outlet chamber is provided with a sample outlet; The transfer unit is used to convey the fixture products from the fixture in the sample outlet chamber to the appearance inspection unit for inspection, and convey them below the picking and placing unit; it is also used to sequentially convey the fixture products from below the picking and placing unit to the appearance inspection unit and the film thickness inspection unit for inspection, and convey them to the sample outlet chamber to sample from the sample outlet; The picking and placing unit is used to pick the fixture products from the transfer unit onto the fixture tray in the sample outlet chamber; it is also used to take the fixture products out of the fixture tray with fixture products in the sample outlet chamber onto the transfer unit; Both the appearance inspection unit and the film thickness inspection unit are located on the opposite side of the sample inlet chamber; The lid closing unit is arranged on the side of the transfer unit, and is used to cover the upper lid of the fixture tray on the fixture tray and connect the upper lid and the fixture tray; it is also used to take off the upper lid of the fixture tray entering the sample inlet chamber from the fixture tray from the inlet; The vacuum unit is communicated with the vacuum chamber and is used to evacuate the vacuum chamber.

2. The device for inspecting samples up and down in a vacuum system according to claim 1, characterized in that, The vacuum chamber further includes a vacuum pumping port, and the vacuum unit is connected to the vacuum pumping port.

3. The device for inspecting samples up and down in a vacuum system according to claim 2, characterized in that, The vacuum unit includes a molecular pump, a vacuum tube and a mechanical pump. The molecular pump is connected to the vacuum pumping port, and the vacuum tube is respectively connected to the molecular pump and the mechanical pump.

4. The device for inspecting samples up and down in a vacuum system according to claim 1, characterized in that, The picking and placing unit includes a base and a picking and placing arm. The base is installed on the vacuum chamber, and the picking and placing arm is connected to the base and is used to pick up fixture products.

5. The device for inspecting samples up and down in a vacuum system according to claim 1, characterized in that, The lid closing unit includes a fixture tray arm and a connecting device. The fixture tray arm is installed on the side wall of the vacuum chamber and is used to push the upper lid onto the fixture tray or pull the upper lid out of the fixture tray; the connecting device is arranged above the transfer unit and is used to tighten or remove the screws connecting the upper lid and the fixture tray.

6. The device for inspecting samples up and down in a vacuum system according to claim 5, characterized in that, The connecting device includes a connecting seat, a displacement device and a screwdriver. The connecting seat is connected to the vacuum chamber, and the displacement device is respectively connected to the first displacement device and the screwdriver and is used to drive the screwdriver to move linearly in the vertical direction and rotate in the circumferential direction.

7. The device for inspecting samples up and down in a vacuum system according to claim 1, characterized in that, The transfer unit uses a conveyor belt.

8. The device for inspecting samples up and down in a vacuum system according to claim 1, It is characterized in that the vacuum chamber includes a first chamber and a second chamber that are interconnected; the sample loading chamber, the picking and placing unit, and the lid closing unit are located in the first chamber; the sample unloading chamber, the appearance inspection unit, and the film thickness inspection unit are located in the second chamber; one end of the transfer unit is located in the first chamber and the other end is located in the second chamber.

9. A method for loading samples on a vacuum system, using the vacuum system loading and unloading inspection device according to any one of claims 1-8 It is characterized in that it includes: Placing the fixture product on the transfer unit through the sample unloading port; Evacuating the vacuum chamber through the vacuum unit, and the transfer unit conveys the fixture product to the appearance inspection unit for surface inspection; The fixture product after surface inspection is conveyed by the transfer unit to below the picking and placing unit, and the picking and placing unit picks up the fixture product and places it in the fixture tray in the sample loading chamber; Repeat the above operations until the fixture tray is full of fixture products, then the lid closing unit places the upper lid on the fixture tray located in the sample loading port and connects the upper lid to the fixture tray to complete the sample loading operation of the fixture product onto the fixture tray.

10. A method for unloading samples from a vacuum system, using the vacuum system loading and unloading inspection device according to any one of claims 1-8 It is characterized in that it includes: Placing the fixture tray with the fixture product on the transfer unit through the sample loading port; Removing the upper lid from the fixture tray through the lid closing unit; Picking up the fixture product from the fixture tray to the transfer unit through the picking and placing unit; Conveying it to the appearance inspection unit through the transfer unit for surface inspection; The fixture product after surface inspection is conveyed to the film thickness inspection unit through the transfer unit for film thickness inspection; The fixture product after film thickness inspection is conveyed to the sample unloading port through the transfer unit, and the vacuum chamber is refilled with gas to complete the sample unloading operation.

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