Display screen, preparation method thereof and head-mounted display equipment

By forming a pixel definition layer and a light emitting layer on the substrate side of the display screen, the problems of high cost of using fine metal mask plates and low brightness caused by the filters in the prior art are solved, and high brightness and low cost display screen preparation is achieved.

CN120224959APending Publication Date: 2025-06-27QINGDAO GOERPIXELS TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202311818895.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-12-26
Publication Date
2025-06-27

AI Technical Summary

Technical Problem

When achieving high resolution, existing micro-OLED technology requires the use of a fine metal mask plate, which is costly. At the same time, using filters to achieve color display will lose light energy, resulting in lower brightness.

Method used

By forming a pixel definition layer on one side of the substrate, a pixel region is defined, and a light emitting layer and a cathode are formed in this region, a fine metal mask plate is avoided, and a light emitting layer is produced through a patterning process to achieve color display without relying on a filter.

Benefits of technology

The display screen preparation without using a fine metal mask plate is realized, which improves the brightness of the display screen and reduces production costs.

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Abstract

The invention discloses a display screen and a preparation method thereof, and a head-mounted display device. The display screen comprises a substrate; the pixel definition layer is formed on one side of the substrate and defines a pixel region; the anode is formed in the pixel region; the light-emitting layer is formed in the pixel area and formed on the side, away from the substrate, of the anode; the first cathode is formed in the pixel region and is formed on one side, far away from the substrate, of the light-emitting layer; the second cathode is formed on the side, away from the substrate, of the first cathode, and the first cathode is connected with the second cathode. The pixel definition layer is formed on one side of the substrate, the pixel definition layer defines the pixel area, the light-emitting layer can be manufactured through a graphical process according to the pixel area defined by the pixel definition layer, and a fine metal mask plate can not be used. A light-emitting layer for emitting primary light can be formed in the pixel area defined by the pixel defining layer, so that the display screen realizes color display, a color display scheme adopting an optical filter can be avoided, and the brightness of the display screen can be improved.
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Description

Technical Field

[0001] The present invention relates to the field of display technologies, and in particular, to a display screen and a preparation method thereof. The present invention also relates to a head-mounted display device. Background Art

[0002] Organic Light Emitting Diode (OLED) display technology has been widely used in mobile phones, televisions, vehicles, and other fields due to its advantages such as self-luminescence, wide color gamut, and flexible display.

[0003] Due to the special application scenarios of Virtual Reality (VR) and Augmented Reality (AR) technologies, the display screen is required to have higher resolution and smaller size. In order to achieve high resolution, the existing micro-OLED technology uses white organic light emitting diodes with color filters to achieve color display. This technology can avoid using a Fine Metal Mask (FMM) when depositing the organic light emitting layer, and the cost of preparing the display screen using the FMM is relatively high. However, using color filters will result in a large loss of light energy, leading to a low brightness of the display screen. Summary of the Invention

[0004] The purpose of the present invention is to provide a display screen and a preparation method thereof, which can avoid using a fine metal mask and improve the brightness of the display screen. The present invention also provides a head-mounted display device.

[0005] To achieve the above purpose, the present invention provides the following technical solutions:

[0006] A display screen, comprising:

[0007] A substrate;

[0008] A pixel definition layer, formed on one side of the substrate, which defines a pixel region;

[0009] An anode, formed in the pixel region;

[0010] A light emitting layer, formed in the pixel region and on the side of the anode away from the substrate;

[0011] A first cathode, formed in the pixel region and on the side of the light emitting layer away from the substrate;

[0012] A second cathode, formed on the side of the first cathode away from the substrate, and the first cathode is connected to the second cathode.

[0013] Optionally, it further comprises:

[0014] A first encapsulation layer is formed between the first cathode and the second cathode. A conductive connection post is disposed within the first encapsulation layer, and the first cathode is connected to the second cathode through the connection post.

[0015] Optionally, the pixel defining layer includes a first pixel defining layer and a second pixel defining layer that are sequentially stacked along a direction away from the substrate. At least a part of the side corresponding to the side of the pixel region of the second pixel defining layer is retracted relative to the side corresponding to the side of the pixel region of the first pixel defining layer, so that a step is formed on the side corresponding to the side of the pixel region of the first pixel defining layer, and the projection of the connection post corresponds to the step.

[0016] Optionally, steps are respectively formed on the sides of the first pixel defining layer on both sides of the pixel region, and connection posts are respectively disposed at the positions of the steps corresponding to both sides of the pixel region within the first encapsulation layer.

[0017] Optionally, the thickness of the first pixel defining layer satisfies: h1 + h2 - first deviation value ≤ H1 ≤ h1 + h2 + first deviation value, where H1 represents the thickness of the first pixel defining layer, h1 represents the thickness of the anode, and h2 represents the thickness of the light emitting layer;

[0018] And / or, the thickness of the second pixel defining layer is greater than the thickness of the first cathode.

[0019] Optionally, between the pixel defining layers on both sides of the pixel region, the width of the first cathode is greater than the width of the light emitting layer, and the width of the first cathode is greater than the width of the anode.

[0020] Optionally, the pixel defining layer defines a first pixel region, a second pixel region, and a third pixel region;

[0021] The light emitting layer includes:

[0022] A first primary color light emitting layer formed in the first pixel region;

[0023] A second primary color light emitting layer formed in the second pixel region;

[0024] A third primary color light emitting layer formed in the third pixel region.

[0025] A method for manufacturing a display screen includes:

[0026] Forming an anode and a pixel defining layer on one side of a substrate, and the pixel defining layer defines a pixel region;

[0027] Forming a light emitting layer and a first cathode in the pixel region of the pixel defining layer;

[0028] A second cathode is formed on one side of the substrate where the pixel definition layer, the anode, the light-emitting layer, and the first cathode are formed, and the first cathode is connected to the second cathode.

[0029] Optionally, forming the light-emitting layer and the first cathode in the pixel region of the pixel definition layer includes: forming the light-emitting layer and the first cathode in the pixel region of the pixel definition layer, and forming a first encapsulation layer on a side of the first cathode away from the substrate;

[0030] Before forming the second cathode on one side of the substrate where the pixel definition layer, the anode, the light-emitting layer, and the first cathode are formed, it further includes:

[0031] Forming a hole in the first encapsulation layer, the hole communicating with the first cathode, and disposing a conductor in the hole to form a connection post.

[0032] Optionally, the pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region;

[0033] Forming the light-emitting layer and the first cathode in the pixel region of the pixel definition layer includes:

[0034] Forming a first primary color light-emitting layer, a first cathode layer, and a first encapsulation layer in sequence on one side of the substrate where the anode and the pixel definition layer are formed, and removing the first primary color light-emitting layer, the first cathode layer, and the first encapsulation layer in the second pixel region and the third pixel region;

[0035] Forming a second primary color light-emitting layer, the first cathode layer, and the first encapsulation layer in sequence on one side of the substrate where the anode and the pixel definition layer are formed, and removing the second primary color light-emitting layer, the first cathode layer, and the first encapsulation layer in the first pixel region and the third pixel region;

[0036] Forming a third primary color light-emitting layer, the first cathode layer, and the first encapsulation layer in sequence on one side of the substrate where the anode and the pixel definition layer are formed, and removing the third primary color light-emitting layer, the first cathode layer, and the first encapsulation layer in the first pixel region and the second pixel region.

[0037] Optionally, the pixel definition layer includes a first pixel definition layer and a second pixel definition layer;

[0038] Forming the pixel definition layer on one side of the substrate includes:

[0039] Forming a first film layer on one side of the substrate and patterning the first film layer to form the first pixel definition layer;

[0040] A second film layer is formed on a side of the first pixel defining layer away from the substrate, and the second film layer is patterned to form the second pixel defining layer.

[0041] A head-mounted display device includes an optical element and the display screen according to any one of the above, wherein the optical element is disposed on an outgoing light path of the display screen.

[0042] As can be seen from the above technical solutions, for a display screen and a manufacturing method thereof provided by the present invention, the display screen includes: a substrate; a pixel defining layer formed on one side of the substrate, which defines a pixel region; an anode formed in the pixel region; a light-emitting layer formed in the pixel region and on a side of the anode away from the substrate; a first cathode formed in the pixel region and on a side of the light-emitting layer away from the substrate; a second cathode formed on a side of the first cathode away from the substrate, and the first cathode is connected to the second cathode. In the display screen and the manufacturing method thereof of the present invention, a pixel defining layer is formed on one side of the substrate, and the pixel defining layer defines the pixel region. The light-emitting layer can be fabricated by a patterning process according to the pixel region defined by the pixel defining layer, and a fine metal mask can be not used. A light-emitting layer for emitting a primary color light can be formed in the pixel region defined by the pixel defining layer, so that the display screen can achieve color display, a color display solution using a color filter can be avoided, and the brightness of the display screen can be improved.

[0043] A head-mounted display device provided by the present invention can achieve the above beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0045] Figure 1 A longitudinal cross-sectional view of a display screen provided by an embodiment of the present invention;

[0046] Figure 2 A longitudinal cross-sectional view of an anode, a light-emitting layer, and a first cathode formed in a first pixel region of a display screen provided by an embodiment of the present invention;

[0047] Figure 3 A longitudinal cross-sectional view of a pixel defining layer between adjacent pixel regions of a display screen provided by an embodiment of the present invention;

[0048] Figure 4 A longitudinal cross-sectional view of a connecting post disposed on a first encapsulation layer of a display screen provided by an embodiment of the present invention;

[0049] Figure 5 A top view schematic diagram of a display screen provided by an embodiment of the present invention;

[0050] Figure 6 A longitudinal sectional view of forming an anode on a substrate in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0051] Figure 7 A longitudinal sectional view of forming a pixel definition layer on a substrate in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0052] Figure 8 A flowchart of a method for manufacturing a display screen provided by an embodiment of the present invention;

[0053] Figure 9 A longitudinal sectional view of forming a first primary color light-emitting layer and a first cathode layer on a substrate in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0054] Figure 10 A longitudinal sectional view of forming a first encapsulation layer in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0055] Figure 11 A longitudinal sectional view of forming a first primary color light-emitting layer, a first cathode, and a first encapsulation layer in a first pixel region on a substrate in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0056] Figure 12 A schematic diagram of forming corresponding primary color light-emitting units in each pixel region in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0057] Figure 13 A longitudinal sectional view of forming a connection post on a first encapsulation layer in a method for manufacturing a display screen provided by an embodiment of the present invention;

[0058] Figure 14 A longitudinal sectional view of forming a second cathode on one side of a first encapsulation layer in a method for manufacturing a display screen provided by an embodiment of the present invention.

[0059] Reference numerals in the accompanying drawings of the specification include:

[0060] 101 - Substrate, 201 - Anode of the first pixel region, 202 - Anode of the second pixel region, 203 - Anode of the third pixel region, 301 - First primary color light - emitting layer, 302 - Second primary color light - emitting layer, 303 - Third primary color light - emitting layer, 401 - First cathode of the first pixel region, 402 - First cathode of the second pixel region, 403 - First cathode of the third pixel region, 404 - Second cathode, 501 - First pixel - defining layer, 601 - Second pixel - defining layer, 504 - Cathode ring, 701 - First encapsulation layer, 801 - Connecting post, 901 - Second encapsulation layer. Detailed implementation

[0061] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0062] This embodiment provides a display screen, including:

[0063] Substrate 101;

[0064] A pixel - defining layer, formed on one side of the substrate 101, which defines pixel regions;

[0065] An anode, formed in the pixel regions;

[0066] A light - emitting layer, formed in the pixel regions and on the side of the anode away from the substrate 101;

[0067] A first cathode, formed in the pixel regions and on the side of the light - emitting layer away from the substrate 101;

[0068] A second cathode, formed on the side of the first cathode away from the substrate 101, and the first cathode is connected to the second cathode 404.

[0069] The pixel regions correspond to the primary - color light - emitting pixels of the display screen. The connection between the first cathode and the second cathode 404 enables the first cathodes of each pixel region to be connected to the cathode ring 504 of the display screen through the second cathode 404.

[0070] In the display screen of this embodiment, a pixel definition layer is formed on one side of the substrate. The pixel definition layer defines a pixel region. The light-emitting layer can be fabricated through a patterning process according to the pixel region defined by the pixel definition layer, and a fine metal mask plate may not be used. A light-emitting layer for emitting primary color light can be formed in the pixel region defined by the pixel definition layer, enabling the display screen to achieve color display, avoiding the color display solution using a color filter, and improving the brightness of the display screen.

[0071] The anode, light-emitting layer, and first cathode formed in the pixel region form a light-emitting unit. The first cathode serves as the independent cathode of the light-emitting unit, and the first cathodes of any two adjacent light-emitting units are not connected. The first cathode serves as the functional cathode of the light-emitting unit to provide electron injection, and the first cathode is a pixel-level cathode. The first cathode and the second cathode 404 are connected to conduct electricity, and the cathodes of all light-emitting units are connected in series through the second cathode 404 to meet the requirement of a common cathode. The second cathode 404 can be connected to the cathode ring 504.

[0072] In some embodiments, the display screen may further include: a first encapsulation layer 701 formed on the side of the first cathode away from the substrate 101. When fabricating the light-emitting layer and the first cathode in each pixel region, the first encapsulation layer 701 can protect the first cathode and the light-emitting layer formed in the pixel region from being damaged during subsequent etching processes, such as being affected by photoresist, developer, and the atmosphere. In some embodiments, the first encapsulation layer 701 is formed between the first cathode and the second cathode 404. A conductive connection post 801 is disposed in the first encapsulation layer 701, and the first cathode is connected to the second cathode 404 through the connection post 801. In some embodiments, the connection post 801 is disposed at the edge of the first encapsulation layer 701 corresponding to the pixel region, that is, in a top view, the projection of the connection post 801 is at the edge of the pixel region, so as to minimize the influence of the connection post 801 on the light emission of the light-emitting unit formed in the pixel region toward the light-emitting side.

[0073] In some embodiments, the pixel definition layer includes a first pixel definition layer 501 and a second pixel definition layer 601 that are stacked in sequence along the direction away from the substrate 101. At least a part of the second pixel definition layer 601 corresponding to the side of the pixel region is retracted relative to the side of the pixel region corresponding to the first pixel definition layer 501, so that a step is formed on the side of the first pixel definition layer 501 corresponding to the pixel region. The projection of the connection post 801 corresponds to the step. In this way, the connection post 801 used to connect the first cathode and the second cathode 404 corresponds to the step, so that the connection post 801 does not affect the light emission of the light-emitting unit formed in the pixel region toward the light-emitting side. Exemplarily, reference can be made to Figure 1 , Figure 1A longitudinal cross-sectional schematic diagram of a display screen provided for an embodiment is shown in the figure. The display screen includes a substrate 101 and a first pixel definition layer 501 and a second pixel definition layer 601 that are sequentially stacked on one side of the substrate 101. The pixel definition layer defines a pixel region. In the same pixel region, the side edge of the second pixel definition layer 601 on one side is retracted relative to the side edge of the first pixel definition layer 501, so that the side edge of the first pixel definition layer 501 forms a step, and the connection column 801 corresponds to the step.

[0074] In some embodiments, the side edges of the first pixel definition layer 501 on both sides of the pixel region respectively form steps, and connection columns 801 are respectively arranged at the steps corresponding to both sides of the pixel region in the first encapsulation layer 701. Each connection column 801 connects the first cathode and the second cathode 404. By providing multiple connection columns 801 corresponding to the same pixel region, the reliability of connecting the first cathode and the second cathode 404 can be improved. For reference, Figure 1 As shown, the pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region. A first primary color light-emitting layer 301 is formed in the first pixel region, a second primary color light-emitting layer 302 is formed in the second pixel region, and a third primary color light-emitting layer 303 is formed in the third pixel region. In the first encapsulation layer 701, connection columns 801 are respectively arranged at the steps corresponding to both sides of the first pixel region, connection columns 801 are respectively arranged at the steps corresponding to both sides of the second pixel region, and connection columns 801 are respectively arranged at the steps corresponding to both sides of the third pixel region.

[0075] In the pixel region, the anode and the light-emitting layer can be formed between the first pixel definition layers 501 on both sides of the pixel region, and the thickness of the first pixel definition layer 501 can be set according to the thicknesses of the anode and the light-emitting layer. Exemplarily, for reference, Figure 2 and Figure 3 , Figure 2 A longitudinal cross-sectional schematic diagram of an anode, a light-emitting layer, and a first cathode formed in the first pixel region of a display screen provided for an embodiment. Figure 3 A longitudinal cross-sectional schematic diagram of the pixel definition layer between adjacent pixel regions of a display screen provided for an embodiment. In some embodiments, the thickness of the first pixel definition layer 501 can satisfy: h1 + h2 - the first deviation value ≤ H1 ≤ h1 + h2 + the first deviation value, where H1 represents the thickness of the first pixel definition layer 501, h1 represents the thickness of the anode, and h2 represents the thickness of the light-emitting layer. The first deviation value can be greater than zero.

[0076] In the pixel region, the first cathode may be formed between the second pixel defining layers 601 on both sides of the pixel region. In some embodiments, the thickness of the second pixel defining layer 601 is greater than the thickness of the first cathode, so that the positions of the light-emitting layer and the first cathode can be better restricted by the first pixel defining layer 501 and the second pixel defining layer 601 during the fabrication of the light-emitting layer and the first cathode. Reference can be made to Figures 1 to 3 As shown, the thickness of the second pixel defining layer 601 may satisfy: h3 - second deviation value ≤ H2 ≤ h3 + third deviation value, where H2 represents the thickness of the second pixel defining layer 601, and h3 represents the thickness of the first cathode. Both the second deviation value and the third deviation value are greater than zero.

[0077] Reference can be made in combination with Figures 1 to 3 As shown, the width c of the first pixel defining layer 501 between adjacent pixel regions can be set according to the resolution and pixel size of the display screen product. In an embodiment where a step is formed on the side of the first pixel defining layer 501 corresponding to the pixel region, the width d of the second pixel defining layer 601 between adjacent pixel regions can be determined according to the width c of the first pixel defining layer 501, d is less than c, and the width of the step, i.e., c - d, can be set according to the size of the connecting post 801.

[0078] Reference can be made in combination with Figure 1 and Figure 2 As shown, between the pixel defining layers on both sides of the pixel region, the widths of the anode and the light-emitting layer can be set according to the resolution of the product. The width a of the first cathode can be greater than the width of the light-emitting layer, and the width a of the first cathode can be greater than the width of the anode, which helps the first cathode in the pixel region to comprehensively cover the light-emitting layer and ensure the light-emitting efficiency of the light-emitting layer. The widths of the anode and the light-emitting layer can be the same and both be b. Exemplarily, it can satisfy b + fourth deviation value ≤ a ≤ b + fifth deviation value, and both the fourth deviation value and the fifth deviation value are greater than zero. Reference can be made to Figure 4 As shown, Figure 4 FIG. is a longitudinal cross-sectional view of a connecting post provided in an embodiment of a display screen disposed on a first encapsulation layer. The height H0 of the connecting post 801 can be set according to the thickness of the first encapsulation layer 701, and the diameter of the connecting post 801 is D.

[0079] In some embodiments, the pixel defining layer forms pixel regions arranged in an array form. Exemplarily, reference can be made to Figure 5 , Figure 5 FIG. is a top view of a display screen provided in an embodiment. As shown, the pixel defining layer forms pixel regions arranged in an array form, including a first pixel region, a second pixel region, and a third pixel region. The first cathodes of each pixel region are connected to the second cathode 404 through the connecting posts 801, and the second cathode 404 can be connected to the cathode ring 504. The cathode ring 504 is used to connect the second cathode 404 to the cathode trace for electrical signal transmission.

[0080] In some embodiments, the pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region; the light-emitting layer includes: a first primary-color light-emitting layer 301 formed in the first pixel region; a second primary-color light-emitting layer 302 formed in the second pixel region; and a third primary-color light-emitting layer 303 formed in the third pixel region. For reference, Figure 1 As shown, the anode 201 of the first pixel region, the first primary-color light-emitting layer 301, and the first cathode 401 of the first pixel region form a first primary-color light-emitting unit, the anode 202 of the second pixel region, the second primary-color light-emitting layer 302, and the first cathode 402 of the second pixel region form a second primary-color light-emitting unit, and the anode 203 of the third pixel region, the third primary-color light-emitting layer 303, and the first cathode 403 of the third pixel region form a third primary-color light-emitting unit.

[0081] In some embodiments, the display screen may further include: a second encapsulation layer 901 formed on a side of the second cathode 404 away from the substrate 101. The overall structure is encapsulated again through the second encapsulation layer 901 to improve the reliability of the display screen.

[0082] The substrate 101 may be a substrate provided with a driving circuit. Exemplarily, it may be a patterned semiconductor substrate, such as a silicon-based substrate with a complementary metal oxide semiconductor (CMOS) circuit.

[0083] In this embodiment, the materials of the first pixel definition layer 501 and the second pixel definition layer 601 are not limited respectively, and inorganic materials can be used, including but not limited to silicon dioxide SiO2 or SiN x . The structure of the anode is not limited. The anode may include a plurality of film layers stacked in sequence. Exemplarily, the film layer structure of the anode may be an aluminum film layer, a titanium film layer, and an indium tin oxide film layer stacked in sequence along the direction away from the substrate 101, that is, the film layer structure is Al / Ti / ITO, and the thickness ranges of each film layer may be 80 nm - 100 nm, 5 - 10 nm, and 10 - 20 nm respectively.

[0084] The first cathode includes but is not limited to indium tin oxide (ITO) or indium zinc oxide (IZO), and its thickness range may be 10 nm - 50 nm. The material selected for the second cathode 404 may be a metal oxide with high optical transmittance and good conductivity, including but not limited to indium tin oxide (ITO) or indium zinc oxide (IZO), and the thickness range of the second cathode 404 may be 50 nm - 100 nm. The connection post 801 may be made of metal or metal oxide, including but not limited to aluminum Al, indium tin oxide ITO.

[0085] In a specific example, the range of c is 2 um - 10 um, h1 + h2 - 10 nm ≤ H1 ≤ h1 + h2 + 10 nm, the range of d is 1 um - 8 um, the unilateral step width reaches at least 1 um, h3 + 10 nm ≤ H2 ≤ h3 + 50 nm, the range of b is 2 um - 10 um, b + 1 um ≤ a ≤ b + 6 um. The diameter D of the connecting column 801 ranges from 0.3 um ≤ D ≤ 0.6 um. The first encapsulation layer 701 adopts a two-layer inorganic layer structure (Al2O3 / SiN x ), and the total thickness ranges from 300 nm to 500 nm; the second encapsulation layer 901 adopts a three-layer inorganic layer structure (Al2O3 / SiN x / Al2O3), and the total thickness ranges from 500 nm to 1000 nm.

[0086] This embodiment also provides a method for manufacturing a display screen, including the following steps:

[0087] S1: Form an anode and a pixel definition layer on one side of the substrate 101, and the pixel definition layer defines a pixel region;

[0088] S2: Form a light-emitting layer and a first cathode in the pixel region of the pixel definition layer;

[0089] S3: Form a second cathode 404 on one side of the substrate 101 where the pixel definition layer, the anode, the light-emitting layer, and the first cathode are formed, and connect the first cathode to the second cathode 404.

[0090] The pixel region corresponds to the primary color light-emitting pixels of the display screen. The first cathode is connected to the second cathode 404, so that the first cathode of each pixel region can be connected to the cathode ring 504 of the display screen through the second cathode 404.

[0091] In the method for manufacturing a display screen of this embodiment, a pixel definition layer is formed on one side of the substrate. The pixel definition layer defines a pixel region. The light-emitting layer can be fabricated through a patterning process according to the pixel region defined by the pixel definition layer, and a fine metal mask can be not used. A light-emitting layer for emitting primary color light can be formed in the pixel region defined by the pixel definition layer, enabling the display screen to achieve color display, avoiding the color display scheme using color filters, and improving the brightness of the display screen.

[0092] In some embodiments, forming an anode and a pixel definition layer on one side of the substrate 101 can be achieved through the following process, including the following steps:

[0093] S111: Form an anode on one side of the substrate 101;

[0094] S112: Form a pixel definition layer on one side of the substrate 101 where the anode is formed.

[0095] In some embodiments, forming an anode on one side of the substrate 101 may include the following process: forming an anode layer on one side of the substrate 101, patterning the anode layer, and forming the anode. Exemplarily, reference can be made to Figure 6 , Figure 6 FIG. Figure 6 is a schematic longitudinal sectional view of a method for manufacturing a display screen according to an embodiment, in which an anode 201 in a first pixel region, an anode 202 in a second pixel region, and an anode 203 in a third pixel region are formed by patterning the anode layer. The anode layer can be formed on one side of the substrate 101 by a deposition method, and physical vapor deposition (PVD) method can be used but not limited to. The anode layer can be patterned by an etching method, and lithography and etching process can be used but not limited to.

[0096] In some embodiments, the pixel defining layer includes a first pixel defining layer 501 and a second pixel defining layer 601. Correspondingly, forming the pixel defining layer on one side of the substrate 101 can be carried out through the following process, including the following steps:

[0097] S1121: forming a first film layer on one side of the substrate 101 and patterning the first film layer to form the first pixel defining layer 501;

[0098] S1122: forming a second film layer on a side of the first pixel defining layer 501 away from the substrate 101 and patterning the second film layer to form the second pixel defining layer 601.

[0099] In some embodiments, at least a part of the side of the second pixel defining layer 601 corresponding to the side of the pixel region is retracted relative to the side of the first pixel defining layer 501 corresponding to the side of the pixel region, so that a step is formed on the side of the first pixel defining layer 501 corresponding to the pixel region. It can also be fabricated through the process of the above steps S1121 to S1122, which can make a step formed on the side of the first pixel defining layer 501 corresponding to the pixel region. Exemplarily, reference can be made to Figure 7 , Figure 7 FIG. Figure 7 is a schematic longitudinal sectional view of a method for manufacturing a display screen according to an embodiment, in which the first film layer can be formed on one side of the substrate 101 by a deposition method. The deposition method can be selected according to the material used for the first film layer, and chemical vapor deposition (CVD) method can be used but not limited to. The first film layer can be patterned by an etching method, and lithography and etching process can be used but not limited to. The second film layer can be formed by a deposition method. The deposition method can be selected according to the material used for the second film layer, and chemical vapor deposition method can be used but not limited to. The second film layer can be patterned by an etching method, and lithography and etching process can be used but not limited to. By adjusting the etching process, a step can be formed on the side of the first pixel defining layer 501 corresponding to the pixel region.

[0100] In this embodiment, the anode is formed on the substrate 101 first and then the pixel definition layer is formed. This is because if the pixel definition layer is formed first and then the anode is formed, the patterning etching process of the anode may have an adverse effect on the pixel definition layer. In other embodiments, if the manufacturing process permits, the pixel definition layer can be formed on the substrate 101 first and then the anode can be formed, which is also within the scope of the present invention.

[0101] In some embodiments, forming the light-emitting layer and the first cathode in the pixel region of the pixel definition layer includes: forming the light-emitting layer and the first cathode in the pixel region of the pixel definition layer, and forming a first encapsulation layer 701 on the side of the first cathode away from the substrate 101. The first encapsulation layer 701 can protect the first cathode and the light-emitting layer formed in the pixel region from being damaged during subsequent etching processes, such as being affected by photoresist, developer, and the atmosphere.

[0102] In some embodiments, the pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region. Accordingly, reference can be made to Figure 8 , Figure 8 For a flowchart of a method for manufacturing a display screen provided in an embodiment, as shown in the figure, the method for manufacturing the display screen of the present invention includes the following steps:

[0103] S11: Form an anode and a pixel definition layer on one side of the substrate 101, and the pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region;

[0104] S12: Sequentially form a first primary color light-emitting layer 301, a first cathode layer, and a first encapsulation layer 701 on the side of the substrate 101 where the anode and the pixel definition layer are formed, and remove the first primary color light-emitting layer 301, the first cathode layer, and the first encapsulation layer 701 in the second pixel region and the third pixel region;

[0105] S13: Sequentially form a second primary color light-emitting layer 302, the first cathode layer, and the first encapsulation layer 701 on the side of the substrate 101 where the anode and the pixel definition layer are formed, and remove the second primary color light-emitting layer 302, the first cathode layer, and the first encapsulation layer 701 in the first pixel region and the third pixel region;

[0106] S14: Sequentially form a third primary color light-emitting layer 303, the first cathode layer, and the first encapsulation layer 701 on the side of the substrate 101 where the anode and the pixel definition layer are formed, and remove the third primary color light-emitting layer 303, the first cathode layer, and the first encapsulation layer 701 in the first pixel region and the second pixel region.

[0107] The first cathode layer formed in the first pixel region is the first cathode of the first pixel region, the first cathode layer formed in the second pixel region is the first cathode of the second pixel region, and the first cathode layer formed in the third pixel region is the first cathode of the third pixel region.

[0108] The following will describe in detail the manufacturing process of forming the first primary color light-emitting unit in the first pixel region, the second primary color light-emitting unit in the second pixel region, and the third primary color light-emitting unit in the third pixel region with reference to the accompanying drawings. Specifically, step S12 may include the following steps:

[0109] S121: Form a first primary color light-emitting layer 301 on the side of the anode and the pixel definition layer away from the substrate 101.

[0110] S122: Form a first cathode layer on the side of the first primary color light-emitting layer 301 away from the substrate 101.

[0111] S123: Form a first encapsulation layer 701 on the side of the first cathode layer away from the substrate 101.

[0112] S124: Remove the first primary color light-emitting layer 301, the first cathode layer, and the first encapsulation layer 701 in the second pixel region and the third pixel region.

[0113] The first primary color light-emitting layer 301 can be formed by evaporation. In some embodiments, the first primary color light-emitting layer 301 may include a hole injection layer (HIL), a hole transport layer (HTL), a light-emitting layer (EML), an electron transport layer (ETL), and an electron injection layer (EIL), and the hole injection layer (HIL), the hole transport layer (HTL), the light-emitting layer (EML), the electron transport layer (ETL), and the electron injection layer (EIL) can be evaporated sequentially.

[0114] The first cathode layer can be formed on the side of the first primary color light-emitting layer 301 away from the substrate 101 by a coating method, and a low-damage sputtering coating process can be used but is not limited to. Exemplarily, reference can be made to Figure 9 , Figure 9 A longitudinal cross-sectional schematic diagram of a method for preparing a display screen provided in an embodiment for forming a first primary color light-emitting layer and a first cathode layer on a substrate.

[0115] The first encapsulation layer 701 can be formed by a deposition method, and an atomic layer deposition (ALD) method or a chemical vapor deposition method can be used but is not limited to. In this embodiment, the layer structure of the first encapsulation layer 701 is not limited. The first encapsulation layer 701 may include multiple film layers stacked in sequence. Exemplarily, the first encapsulation layer 701 may adopt a double-layer film structure, such as Al2O3 / SiN x Double-layer film structure. Exemplarily, reference can be made toFigure 10 , Figure 10 A longitudinal cross-sectional view of a method for preparing a display screen according to an embodiment, showing the formation of a first encapsulation layer. In this embodiment, after forming the first primary color emitting layer 301 and the first cathode layer, the first encapsulation layer 701 is fabricated. The first encapsulation layer 701 can protect the first primary color emitting layer 301 from being damaged during subsequent etching processes, such as being affected by photoresist, developer, and the atmosphere.

[0116] For the substrate 101 on which the first primary color emitting layer 301, the first cathode layer, and the first encapsulation layer 701 are formed, through patterning, the first primary color emitting layer 301, the first cathode layer, and the first encapsulation layer 701 in the second pixel region and the third pixel region are removed, and the first primary color emitting layer 301, the first cathode layer, and the first encapsulation layer 701 in the first pixel region are retained. Patterning can be performed by etching methods, including but not limited to the exposure, development, and etching process. Exemplarily, reference can be made to Figure 11 , Figure 11 A longitudinal cross-sectional view of a method for preparing a display screen according to an embodiment, showing the formation of a first primary color emitting layer, a first cathode, and a first encapsulation layer in the first pixel region on a substrate.

[0117] After the first primary color emitting layer 301, the first cathode layer, and the first encapsulation layer 701 are fabricated in the first pixel region on the substrate 101, according to the method of fabricating the first primary color emitting layer 301, the first cathode layer, and the first encapsulation layer 701 in the first pixel region as described above, the second primary color emitting layer 302, the first cathode layer, and the first encapsulation layer 701 are fabricated in the second pixel region on the substrate 101, and then the third primary color emitting layer 303, the first cathode layer, and the first encapsulation layer 701 are fabricated in the third pixel region on the substrate 101. Exemplarily, reference can be made to Figure 12 , Figure 12 A schematic diagram of a method for preparing a display screen according to an embodiment, showing the formation of corresponding primary color emitting units in each pixel region. As shown in the figure, the anode 201, the first primary color emitting layer 301, and the first cathode 401 in the first pixel region form the first primary color emitting unit, the anode 202, the second primary color emitting layer 302, and the first cathode 402 in the second pixel region form the second primary color emitting unit, and the anode 203, the third primary color emitting layer 303, and the first cathode 403 in the third pixel region form the third primary color emitting unit.

[0118] In some embodiments, before forming the second cathode 404 on one side of the substrate 101 where the pixel defining layer, the anode, the emitting layer, and the first cathode are formed, it further includes step S15: forming a hole in the first encapsulation layer 701, the hole communicating with the first cathode, and disposing a conductor in the hole to form a connection post 801.

[0119] Holes can be formed in the first encapsulation layer 701 by an etching method, and deep hole etching technology can be adopted. The exposure, development and etching process can be used but is not limited to. A photoresist with a high selectivity ratio is selected, and deep hole etching technology is used to form holes. A conductor can be formed in the holes by a deposition method, and physical vapor deposition method can be used but is not limited to. Further, the excess conductor is removed so that connection posts 801 are formed in the first encapsulation layer 701. Among them, chemical mechanical planarization (CMP) method can be used but is not limited to remove the excess conductor. Exemplarily, reference can be made to Figure 13 , Figure 13 FIG. is a longitudinal sectional view showing the formation of connection posts in the first encapsulation layer in a display screen manufacturing method provided for an embodiment. As shown in the figure, the position of the connection posts 801 corresponds to the steps formed by the first pixel defining layer 501, and one end of the connection posts 801 is connected to the first cathode layer in the pixel region.

[0120] The display screen manufacturing method of the present invention further includes the following step S16: A second cathode 404 is formed on one side of the substrate 101 where the pixel defining layer, the anode, the light emitting layer and the first cathode are formed, and the first cathode is connected to the second cathode 404. The second cathode layer can be formed by a coating method to form the second cathode 404, and low-damage sputtering coating process can be used but is not limited to. The second cathode layer is deposited on the entire surface of the side of the first encapsulation layer 701 away from the substrate 101. Reference can be made to Figure 14 , Figure 14 FIG. is a longitudinal sectional view showing the formation of the second cathode on one side of the first encapsulation layer in a display screen manufacturing method provided for an embodiment. One end of the connection posts 801 is connected to the first cathode in the pixel region, and the other end is connected to the second cathode 404.

[0121] In some embodiments, the display screen manufacturing method of the present invention may further include the following step S17: A second encapsulation layer 901 is formed on the side of the second cathode 404 away from the substrate 101. Exemplarily, reference can be made to Figure 1 , and the whole is encapsulated again through the second encapsulation layer 901 to improve the reliability of the display screen. The second encapsulation layer 901 can be formed by a deposition method, and atomic layer deposition method or chemical vapor deposition method can be used but is not limited to form the second encapsulation layer 901. In this embodiment, the layer structure of the second encapsulation layer 901 is not limited. The second encapsulation layer 901 may include multiple film layers stacked in sequence. Exemplarily, the second encapsulation layer 901 may adopt a three-layer film structure, such as an Al2O3 / SiNx / Al2O3 three-layer film structure.

[0122] This embodiment also provides a head-mounted display device, including an optical element and the display screen according to any one of the above embodiments, wherein the optical element is disposed on the light-emitting path of the display screen.

[0123] The head-mounted display device of this embodiment uses a display screen that forms a pixel definition layer on one side of the substrate. The pixel definition layer defines pixel regions. The light-emitting layer can be fabricated through a patterning process according to the pixel regions defined by the pixel definition layer. Without using a fine metal mask, a light-emitting layer for emitting primary color light can be formed in the pixel regions defined by the pixel definition layer, enabling the display screen to achieve color display, avoiding the color display scheme using color filters, improving the brightness of the display screen, and enabling the head-mounted display device to increase the brightness.

[0124] The head-mounted display device of this embodiment can be a virtual reality head-mounted display device or an augmented reality head-mounted display device.

[0125] The above has introduced in detail the display screen, its preparation method, and the head-mounted display device provided by the present invention. Specific examples are used herein to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only for helping to understand the method and its core idea of the present invention. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of the present invention, several improvements and modifications can still be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

Claims

1. A display screen, characterized in that, Comprising: Substrate; Pixel definition layer, formed on one side of the substrate, which defines a pixel region; Anode, formed in the pixel region; Light-emitting layer, formed in the pixel region and on the side of the anode away from the substrate; First cathode, formed in the pixel region and on the side of the light-emitting layer away from the substrate; Second cathode, formed on the side of the first cathode away from the substrate, and the first cathode is connected to the second cathode.

2. The display screen according to claim 1, wherein Further comprising: First encapsulation layer, formed between the first cathode and the second cathode, and a conductive connection post is provided in the first encapsulation layer, and the first cathode is connected to the second cathode through the connection post.

3. The display screen according to claim 2, wherein The pixel definition layer includes a first pixel definition layer and a second pixel definition layer stacked in sequence along a direction away from the substrate. At least a part of the side of the second pixel definition layer corresponding to the side of the pixel region is retracted relative to the side of the first pixel definition layer corresponding to the side of the pixel region, so that a step is formed on the side of the first pixel definition layer corresponding to the side of the pixel region, and the projection of the connection post corresponds to the step.

4. The display screen according to claim 3, wherein Steps are respectively formed on the sides of the first pixel definition layer on both sides of the pixel region, and the connection posts are respectively provided at the positions of the steps corresponding to both sides of the pixel region in the first encapsulation layer.

5. The display screen according to claim 3, characterized in that, The thickness of the first pixel definition layer satisfies: h1 + h2 - first deviation value ≤ H1 ≤ h1 + h2 + first deviation value, where H1 represents the thickness of the first pixel definition layer, h1 represents the thickness of the anode, and h2 represents the thickness of the light-emitting layer; And / or, the thickness of the second pixel definition layer is greater than the thickness of the first cathode.

6. The display screen according to claim 1, characterized in that, Between the pixel definition layers on both sides of the pixel region, the width of the first cathode is greater than the width of the light-emitting layer, and the width of the first cathode is greater than the width of the anode.

7. The display screen according to any one of claims 1 to 6, characterized in that, The pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region; The light-emitting layer includes: First primary color light-emitting layer formed in the first pixel region; Second primary color light-emitting layer formed in the second pixel region; Third primary color light-emitting layer formed in the third pixel region.

8. A method for preparing a display screen, characterized in that, Comprising: Forming an anode and a pixel definition layer on one side of the substrate, and the pixel definition layer defines a pixel region; Forming a light-emitting layer and a first cathode in the pixel region of the pixel definition layer; Forming a second cathode on the side of the substrate where the pixel definition layer, the anode, the light-emitting layer, and the first cathode are formed, and the first cathode is connected to the second cathode.

9. The method for preparing a display screen according to claim 8, wherein Forming a light-emitting layer and a first cathode in the pixel region of the pixel definition layer includes: forming the light-emitting layer and the first cathode in the pixel region of the pixel definition layer, and forming a first encapsulation layer on the side of the first cathode away from the substrate; Before forming the second cathode on the side of the substrate where the pixel definition layer, the anode, the light-emitting layer, and the first cathode are formed, further comprising: Forming a hole in the first encapsulation layer, the hole communicating with the first cathode, and providing a conductor in the hole to form a connection post.

10. The method for preparing a display screen according to claim 8, wherein The pixel definition layer defines a first pixel region, a second pixel region, and a third pixel region; Forming a light-emitting layer and a first cathode in the pixel regions of the pixel definition layer includes: Forming a first primary-color light-emitting layer, a first cathode layer, and a first encapsulation layer in sequence on one side of the substrate where the anode and the pixel definition layer are formed, and removing the first primary-color light-emitting layer, the first cathode layer, and the first encapsulation layer in the second pixel region and the third pixel region; Forming a second primary-color light-emitting layer, the first cathode layer, and the first encapsulation layer in sequence on one side of the substrate where the anode and the pixel definition layer are formed, and removing the second primary-color light-emitting layer, the first cathode layer, and the first encapsulation layer in the first pixel region and the third pixel region; Forming a third primary-color light-emitting layer, the first cathode layer, and the first encapsulation layer in sequence on one side of the substrate where the anode and the pixel definition layer are formed, and removing the third primary-color light-emitting layer, the first cathode layer, and the first encapsulation layer in the first pixel region and the second pixel region.

11. The method for manufacturing a display screen according to claim 8, wherein The pixel definition layer includes a first pixel definition layer and a second pixel definition layer; Forming the pixel definition layer on one side of the substrate includes: Forming a first film layer on one side of the substrate and patterning the first film layer to form the first pixel definition layer; Forming a second film layer on a side of the first pixel definition layer away from the substrate and patterning the second film layer to form the second pixel definition layer.

12. A head-mounted display device, characterized in that, An optical element and the display screen according to any one of claims 1 to 7, wherein the optical element is disposed on the light-emitting path of the display screen.