Super-efficient optical waveguide coupler based on nano grating structure

Abstract

The invention relates to the technical field of optical information transmission, in particular to an ultra-efficient optical waveguide coupler based on a nano grating structure, which comprises an ultra-efficient optical waveguide coupler main body, one end of the ultra-efficient optical waveguide coupler main body is provided with an output end, and the other end of the ultra-efficient optical waveguide coupler main body is provided with an input end. Two sides of the top surface of the ultra-efficient optical waveguide coupler main body are fixedly connected with hollow clamping plates; the nano grating structural plate is additionally arranged at the ultra-efficient optical waveguide coupler main body, so that the problem that the ultra-efficient optical waveguide coupler main body lacks the effective regulation and control capability on the light polarization state in a traditional direct coupling mode in a polarization-sensitive optical communication system can be reduced; in the prior art, light in different polarization states is difficult to be accurately matched with the mode of the optical waveguide in the coupling process, the polarization-dependent loss is greatly increased, the loss easily leads to obvious reduction of the coupling efficiency, and the coupled optical signal intensity is easily unstable.

Description

Technical Field

[0001] The present invention relates to the field of optical information transmission technology, and more specifically, to an ultra-high-efficiency optical waveguide coupler based on a nano-grating structure. Background Art

[0002] An ultra-high-efficiency optical waveguide coupler is a key device that can efficiently couple optical signals from an external light source (such as an optical fiber) into an optical waveguide or achieve efficient energy transmission between different optical waveguides, and plays a crucial role in the fields of optical communication, optical sensing, optical computing, etc.

[0003] However, in a polarization-sensitive optical communication system, when an ultra-high-efficiency optical waveguide coupler couples an optical fiber to an optical waveguide, since the light transmitted in the optical fiber usually has a random polarization state, while the optical waveguide often has better transmission characteristics for light of a specific polarization state, the traditional direct coupling mode lacks the ability to effectively control the polarization state of light, making it difficult for light of different polarization states to achieve precise matching with the mode of the optical waveguide during the coupling process, and the polarization-related loss increases significantly.

[0004] The above patents still have deficiencies in actual use.

[0005] Based on this, the present invention discloses an ultra-high-efficiency optical waveguide coupler based on a nano-grating structure. Summary of the Invention

[0006] To solve the problem proposed in the background art, that is, in a polarization-sensitive optical communication system, when an ultra-high-efficiency optical waveguide coupler couples an optical fiber to an optical waveguide, since the light transmitted in the optical fiber usually has a random polarization state, while the optical waveguide often has better transmission characteristics for light of a specific polarization state, the traditional direct coupling mode lacks the ability to effectively control the polarization state of light, making it difficult for light of different polarization states to achieve precise matching with the mode of the optical waveguide during the coupling process, and the polarization-related loss increases significantly. The present invention provides an ultra-high-efficiency optical waveguide coupler based on a nano-grating structure, which includes an ultra-high-efficiency optical waveguide coupler main body. One end of the ultra-high-efficiency optical waveguide coupler main body is provided with an output end, the other end of the ultra-high-efficiency optical waveguide coupler main body is provided with an input end. Both sides of the top surface of the ultra-high-efficiency optical waveguide coupler main body are fixedly connected with hollow clamping plates. A nano-grating structure plate is installed in the middle of the hollow clamping plates. A clamping component is arranged in the middle of the hollow clamping plates, and a glue application component is arranged in the middle of the hollow clamping plates; Preferably, the nano-gratings etched on the top surface of the nano-grating structure plate are arranged in a two-dimensional periodic manner, and the arrangement mode is that the ratio of the grating depth h to the gap g is: h / g≈0.5 - 1.5.

[0007] Preferably, the nano-grating structure plate is made of silicon nitride material with a moderate refractive index and low transmission loss.

[0008] Preferably, the engaging assembly includes two sets of rectangular limiting blocks, two sets of connecting columns, a rectangular limiting groove, and two sets of limiting sliding columns. The two rectangular limiting blocks are fixedly connected to the inner walls of the two sets of hollow clamping plates on the sides away from each other. The two connecting columns are fixedly connected to both sides of the bottom of the nano-grating structure plate. The two rectangular limiting blocks and the two sets of connecting columns are in a vertical state. The rectangular limiting groove is opened in the middle of each set of connecting columns. The two limiting sliding columns are slidably connected to the sides of the two sets of hollow clamping plates away from each other. The sides of the two connecting columns away from the rectangular limiting groove are respectively attached to the inner walls of the two sets of hollow clamping plates close to each other.

[0009] Preferably, the engaging assembly further includes a triangular notch, a limiting pad, a triangular clamping plate, and a first spring. The triangular notch is opened at the bottom of each set of connecting columns. The limiting pad is fixedly connected to one end of each set of limiting sliding columns. The triangular clamping plate is fixedly connected to the end of each set of limiting sliding columns away from the limiting pad. One end of the first spring is connected to the side of the triangular clamping plate close to the limiting sliding column, and the other end of the first spring is connected to the inner wall of the hollow clamping plate.

[0010] Preferably, the engaging assembly further includes two sets of rectangular notches, a rotating shaft, and a supporting pulley. The two rectangular notches are opened at the bottom of each set of triangular clamping plates. Both ends of the rotating shaft are rotatably connected to both sides of each set of rectangular notches. The supporting pulley is fixedly connected to the middle of the rectangular notch, and the bottom of the supporting pulley contacts the bottom of the hollow clamping plate.

[0011] Preferably, the glue application assembly includes a glue storage box, a hollow rectangular plate, and a hollow telescopic column. The glue storage box is fixedly connected to both sides of the bottom of the nano-grating structure plate, and glue is injected into the glue storage box. The hollow rectangular plate is fixedly connected to the bottom of the hollow clamping plate. The hollow telescopic column is fixedly connected to the middle of the hollow clamping plate, and the hollow telescopic column is located in the middle of the hollow rectangular plate.

[0012] Preferably, the glue application assembly further includes a glue outlet, a sealing film, and a thimble. The glue outlet is opened in the middle of the bottom surface of the glue storage box. The sealing film is arranged in the middle of the bottom surface of the glue storage box. The thimble is fixedly connected to the telescopic end of the hollow telescopic column.

[0013] Preferably, the glue application assembly further includes a second spring and a wax layer. The bottom end of the second spring is fixedly connected to the bottom of the hollow telescopic column, and the top end of the second spring is fixedly connected to the top of the hollow telescopic column. The wax layer is arranged on the outer periphery of the hollow telescopic column.

[0014] Preferably, the glue injected into the glue storage box is an optical epoxy resin glue that can reduce the interface reflection between the waveguide and the glue layer.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. In the ultra-high efficiency optical waveguide coupler based on nano grating structure, by adding a nano grating structure plate to the ultra-high efficiency optical waveguide coupler body, and by means of the special arrangement and material of the nano grating structure plate, the ultra-high efficiency optical waveguide coupler body can be reduced in the polarization-sensitive optical communication system. The traditional direct coupling mode lacks the ability to effectively control the polarization state of light, making it difficult for light of different polarization states to achieve accurate matching with the mode of the optical waveguide during the coupling process, and the polarization-related loss is greatly increased. Such loss is not only likely to lead to a significant reduction in coupling efficiency and a large amount of light energy is wasted at the coupling interface, but also to make the intensity of the coupled optical signal unstable, thereby causing a mismatch problem between the optical signal and the optical waveguide, resulting in a sharp decline in coupling stability, and seriously affecting the performance and reliability of the entire optical communication system.

[0016] 2. In the ultra-high efficiency optical waveguide coupler based on the nano-grating structure, the nano-grating structure plate can be easily installed on the ultra-high efficiency optical waveguide coupler body through the setting of the snap-fit assembly, thereby replacing the traditional complex bonding installation process, thereby shortening the installation time. At the same time, when the performance of the nano-grating structure plate decreases due to aging or damage, it can be easily replaced, reducing overall scrapping and reducing maintenance costs.

[0017] 3. In the ultra-high efficiency optical waveguide coupler based on the nano-grating structure, a rigid connection is formed after the optical epoxy resin glue is cured by setting the glue coating component, which reduces the loosening of the mechanical clamping after long-term use and improves the reliability in thermal cycle and vibration environment. At the same time, it can also cooperate with the clamping component to achieve double fixation, reduce the vibration of the ultra-high efficiency optical waveguide coupler body and the nano-grating structure plate during operation, which is beneficial to maintain the stability of the coupling efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic cross-sectional structural diagram of the ultra-high efficiency optical waveguide coupler body and the nano-grating structure plate of the present invention; Figure 3 It is a schematic diagram of the side cross-sectional structure of the hollow splint of the present invention; Figure 4 is a schematic diagram of the bottom structure of the nano-grating structure plate of the present invention; Figure 5 It is a structural schematic diagram of the connecting column and the glue storage box of the present invention; Figure 6 It is a schematic cross-sectional structural diagram of the glue storage box of the present invention; Figure 7 It is a schematic cross-sectional structural diagram of a hollow splint and a hollow rectangular plate of the present invention; Figure 8 It is a partial structural schematic diagram of the clamping assembly of the present invention; Figure 9 Schematic diagram of the bottom structure of the triangular clamping plate of the present invention; Figure 10 Schematic sectional view of the wax layer and the hollow telescopic column of the present invention; Figure 11 Schematic sectional view of the nano-grating structure plate and the hollow clamping plate of the present invention; Figure 12 Schematic diagram of the clamping structure of the nano-grating structure plate and the hollow clamping plate of the present invention.

[0019] The meanings of each label in the figure are as follows: 1. Ultra-high-efficiency optical waveguide coupler main body; 11. Output end; 12. Input end; 13. Hollow clamping plate; 14. Nano-grating structure plate; 2. Rectangular limit block; 21. Connecting column; 22. Rectangular limit groove; 23. Limit sliding column; 3. Triangular notch; 31. Limit pad; 32. Triangular clamping plate; 33. First spring; 4. Rectangular notch; 41. Rotating shaft; 42. Support pulley; 5. Glue storage box; 51. Hollow rectangular plate; 52. Hollow telescopic column; 6. Glue outlet; 61. Sealing film; 62. Thimble; 7. Second spring; 71. Wax layer. Detailed implementation manners

[0020] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0021] However, in a polarization-sensitive optical communication system, when an ultra-high-efficiency optical waveguide coupler couples an optical fiber and an optical waveguide, since the light transmitted in the optical fiber usually has a random polarization state, while the optical waveguide often has better transmission characteristics for light of a specific polarization state, the traditional direct coupling mode lacks the effective ability to control the polarization state of light, making it difficult for light of different polarization states to achieve precise matching with the mode of the optical waveguide during the coupling process, and the polarization-related loss increases significantly.

[0022] Therefore, the present invention provides an ultra-high-efficiency optical waveguide coupler based on a nano-grating structure. Refer to Figure 1 as shown, which includes an ultra-high-efficiency optical waveguide coupler main body 1. An output end 11 is provided at one end of the ultra-high-efficiency optical waveguide coupler main body 1, an input end 12 is provided at the other end of the ultra-high-efficiency optical waveguide coupler main body 1. Both sides of the top surface of the ultra-high-efficiency optical waveguide coupler main body 1 are fixedly connected with hollow clamping plates 13. A nano-grating structure plate 14 is installed in the middle of the hollow clamping plate 13. A clamping assembly is provided in the middle of the hollow clamping plate 13, and a glue application assembly is provided in the middle of the hollow clamping plate 13.

[0023] Specifically, refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 8 , Figure 11 and Figure 12 As shown, the nano-gratings etched on the top surface of the nano-grating structure plate 14 are arranged in a two-dimensional periodic pattern, and the arrangement pattern is such that the ratio of the grating depth h to the gap (g) is: h / g ≈ 0.5 - 1.5.

[0024] The nano-grating structure plate 14 is made of silicon nitride material with a moderate refractive index and low transmission loss.

[0025] During operation, first, a nano-grating structure is etched on the nano-grating structure plate 14 using optical lithography technology. It should be noted that during the etching process, the etching rate ratio of the photoresist to the substrate needs to be greater than 5:1 to maintain the morphological accuracy of the grating.

[0026] Subsequently, the etched nano-grating structure plate 14 is installed on the top surface of the ultra-high-efficiency optical waveguide coupler body 1 through a clamping component. When the ultra-high-efficiency optical waveguide coupler body 1 is operating, the nano-grating structure plate 14 can accurately match the free-space light and the waveguide mode.

[0027] Specifically, the nano-grating structure plate 14 generates an evanescent field that matches the waveguide mode by periodically modulating the refractive index and surface morphology, thereby satisfying the momentum matching under the Bragg condition and achieving the amplitude and phase matching of the field distribution. This effectively reduces the field distribution difference between the free-space light and the waveguide guided mode. In a polarization-sensitive optical communication system, directly coupling the free-space light and the waveguide easily causes a large amount of energy loss due to reflection or radiation, while the application of the nano-grating structure plate 14 significantly improves this problem.

[0028] By etching nano-gratings with a ratio of the depth h to the gap g of h / g ≈ 0.5 - 1.5 in a two-dimensional periodic arrangement on the top surface of the nano-grating structure plate 14, the refractive index and surface morphology of the nano-grating structure plate 14 can be modulated to generate an evanescent field that matches the waveguide mode. When h / g ≈ 0.5 - 1.5, the periodic structure of the grating can more accurately compensate for the momentum difference between the free-space light and the waveguide mode, reducing the reflection loss. At the same time, the evanescent field distribution of the grating can more closely match the field distribution of the waveguide guided mode, reducing the radiation loss caused by the field distribution difference. This parameter range solves the mismatch problem between the free-space light and the waveguide mode by optimizing the optical field distribution and momentum matching.

[0029] The role of the nano-grating structure plate 14 being made of silicon nitride is that it can effectively limit the light field at a sub-wavelength scale, while avoiding the high nonlinear effect caused by strong light field limitation in silicon-based materials.

[0030] This step can reduce the ultra-high efficiency optical waveguide coupler body 1 in the polarization-sensitive optical communication system by adding a nano-grating structure plate 14 to the ultra-high efficiency optical waveguide coupler body 1, and by virtue of the special arrangement and material of the nano-grating structure plate 14, the ultra-high efficiency optical waveguide coupler body 1 lacks the ability to effectively regulate the polarization state of light in the traditional direct coupling mode, making it difficult for light of different polarization states to achieve precise matching with the mode of the optical waveguide during the coupling process, and the polarization-related loss is greatly increased. This loss is not only likely to lead to a significant reduction in coupling efficiency and a large amount of light energy is wasted at the coupling interface, but also to make the intensity of the coupled optical signal unstable, thereby causing a mismatch problem between the optical signal and the optical waveguide, resulting in a sharp drop in coupling stability, and seriously affecting the performance and reliability of the entire optical communication system.

[0031] For further information, see Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 8 , Figure 9 , Figure 11 and Figure 12 As shown, the locking assembly includes two groups of rectangular limit blocks 2, two groups of connecting columns 21, rectangular limit grooves 22 and two groups of limit sliding columns 23. The two rectangular limit blocks 2 are fixedly connected to the inner walls of the two groups of hollow splints 13 on the side away from each other. The two connecting columns 21 are fixedly connected to the two sides of the bottom of the nano-grating structure plate 14. The two rectangular limit blocks 2 and the two groups of connecting columns 21 are in a vertical state. The rectangular limit grooves 22 are opened in the middle of each group of connecting columns 21. The two limit sliding columns 23 are slidably connected to the side of the two groups of hollow splints 13 away from each other. The side of the two connecting columns 21 away from the rectangular limit grooves 22 is respectively fitted with the inner walls of the side of the two groups of hollow splints 13 close to each other.

[0032] The locking assembly also includes a triangular notch 3, a limiting pad 31, a triangular clamping plate 32 and a first spring 33. The triangular notch 3 is opened at the bottom of each group of connecting columns 21. The limiting pad 31 is fixedly connected to one end of each group of limiting sliding columns 23. The triangular clamping plate 32 is fixedly connected to one end of each group of limiting sliding columns 23 away from the limiting pad 31. One end of the first spring 33 is connected to a side of the triangular clamping plate 32 close to the limiting sliding column 23, and the other end of the first spring 33 is connected to the inner wall of the hollow splint 13.

[0033] The clamping assembly further includes two groups of rectangular notches 4, a rotating shaft 41 and a supporting pulley 42. Two rectangular notches 4 are formed at the bottom of each triangular clamping plate 32. Both ends of the rotating shaft 41 are rotatably connected to both sides of each group of rectangular notches 4. The supporting pulley 42 is fixedly connected to the middle of the rectangular notch 4, and the bottom of the supporting pulley 42 contacts the bottom of the hollow clamping plate 13.

[0034] During operation, when installing the nano-grating structure plate 14, the connecting column 21 can be placed in the hollow interlayer in the middle of the hollow clamping plate 13, and the rectangular limiting groove 22 is aligned with the rectangular limiting block 2 and pressed down. During the pressing process, the rectangular limiting groove 22 will slide into the middle of the rectangular limiting block 2. At the same time, the triangular notch 3 will exert extrusion on the triangular clamping plate 32. At this time, when the triangular clamping plate 32 is squeezed, it will drive the limiting sliding column 23 and the limiting pad 31 to slide outward to the hollow clamping plate 13. When the triangular clamping plate 32 slides, it will exert extrusion on the first spring 33. The first spring 33 will be compressed and store energy under the restraint of the extrusion force. When the bottom end of the triangular notch 3 is pressed down to contact the bottom of the hollow clamping plate 13, the first spring 33 will release the stored energy due to the lack of extrusion force oppression and rebound. During the rebound process of the first spring 33, it will push the triangular clamping plate 32 to move towards the triangular notch 3, so that the triangular notch 3 is clamped with the triangular clamping plate 32, producing a fixing effect on the connecting column 21.

[0035] When the triangular clamping plate 32 moves, it will drive the supporting pulley 42 to move. Since the bottom of the supporting pulley 42 contacts the bottom of the hollow clamping plate 13, the supporting pulley 42 will generate friction with the hollow clamping plate 13 during the movement, thus forming a frictional force. Under the action of the frictional force, the supporting pulley 42 can drive the supporting pulley 42 to rotate in the middle of the rectangular notch 4, so as to reduce the frictional force between the triangular clamping plate 32 and the hollow clamping plate 13 during movement.

[0036] Through the setting of the clamping assembly in this step, it is convenient to install the nano-grating structure plate 14 on the ultra-high efficiency optical waveguide coupler body 1, thus replacing the traditional complex bonding installation process, shortening the installation time. At the same time, when the performance of the nano-grating structure plate 14 decreases due to aging or damage, it is convenient to replace it, reducing overall scrapping and lowering the maintenance cost.

[0037] Among them, refer to Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 10 、 Figure 11 and Figure 12As shown in the figure, the glue - applying assembly includes a glue storage box 5, a hollow rectangular plate 51, and a hollow telescopic column 52. The glue storage box 5 is fixedly connected to both sides of the bottom of the nano - grating structure plate 14, and glue is injected into the interior of the glue storage box 5. The hollow rectangular plate 51 is fixedly connected to the bottom of the hollow clamping plate 13, and the hollow telescopic column 52 is fixedly connected to the middle of the hollow clamping plate 13 and is located within the hollow rectangular plate 51.

[0038] The glue - applying assembly further includes a glue outlet 6, a sealing film 61, and a thimble 62. The glue outlet 6 is opened in the middle of the bottom surface of the glue storage box 5, the sealing film 61 is arranged in the middle of the bottom surface of the glue storage box 5, and the thimble 62 is fixedly connected to the telescopic end of the hollow telescopic column 52.

[0039] The glue - applying assembly further includes a second spring 7 and a wax layer 71. The bottom end of the second spring 7 is fixedly connected to the bottom of the hollow telescopic column 52, the top end of the second spring 7 is fixedly connected to the top of the hollow telescopic column 52, and the wax layer 71 is arranged around the outer periphery of the hollow telescopic column 52.

[0040] The glue injected into the interior of the glue storage box 5 is an optical epoxy resin glue that can reduce the interfacial reflection between the waveguide and the glue layer.

[0041] During operation, when the nano - grating structure plate 14 is installed at the hollow clamping plate 13, the glue storage box 5 will slide to the hollow rectangular plate 51. With the long - term operation of the nano - grating structure plate 14 and the ultra - high - efficiency optical waveguide coupler body 1 and the change of the surrounding environment, the heat around it will increase day by day, which will affect the temperature inside the hollow clamping plate 13. When the temperature inside the hollow clamping plate 13 reaches a certain threshold, the wax layer 71 will gradually melt, thus weakening its sealing effect on the hollow telescopic column 52. At this time, the second spring 7 will stretch after the wax layer 71 melts, and then drive the telescopic end of the hollow telescopic column 52 to move towards the glue storage box 5. When the hollow telescopic column 52 moves, it will drive the thimble 62 to move synchronously. Under the movement of the thimble 62, the sealing film 61 can be pierced, so that the glue outlet 6 is exposed. At this time, the optical epoxy resin glue inside the glue storage box 5 will flow into the interior of the hollow rectangular plate 51 through the glue outlet 6, and the optical epoxy resin glue will gradually solidify after flowing out, so as to connect the glue storage box 5 and the hollow rectangular plate 51, thereby strengthening the tightness of the connection between the nano - grating structure plate 14 and the ultra - high - efficiency optical waveguide coupler body 1.

[0042] Through the setting of the glue - applying assembly in this step, a rigid connection is formed after the optical epoxy resin glue cures, reducing the looseness that is likely to occur in mechanical clamping during long - term use, improving the reliability under thermal cycling and vibration environments. At the same time, it can also cooperate with the clamping assembly to achieve double fixation, reducing the vibration of the ultra - high - efficiency optical waveguide coupler body 1 and the nano - grating structure plate 14 during operation, which is beneficial to maintaining the stability of the coupling efficiency.

[0043] In summary, it effectively solves the problem that in a polarization-sensitive optical communication system, when an ultra-high-efficiency optical waveguide coupler couples an optical fiber with an optical waveguide, since the light transmitted in the optical fiber usually has a random polarization state, while the optical waveguide often has better transmission characteristics for light of a specific polarization state, the traditional direct coupling mode lacks the ability to effectively control the polarization state of light, making it difficult for light of different polarization states to achieve precise matching with the mode of the optical waveguide during the coupling process, resulting in a significant increase in polarization-dependent loss.

[0044] It should be noted that in this document, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not expressly listed, or elements inherent to such process, method, article or device.

[0045] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A super-efficient optical waveguide coupler based on a nano-grating structure, which comprises a super-efficient optical waveguide coupler body (1), and is characterized in that: One end of the ultra-high efficiency optical waveguide coupler body (1) is provided with an output end (11), the other end of the ultra-high efficiency optical waveguide coupler body (1) is provided with an input end (12), both sides of the top surface of the ultra-high efficiency optical waveguide coupler body (1) are fixedly connected with hollow clamping plates (13), a nano-grating structure plate (14) is installed in the middle of the hollow clamping plates (13), a clamping component is arranged in the middle of the hollow clamping plates (13), and a glue coating component is arranged in the middle of the hollow clamping plates (13).

2. The ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 1, characterized in that: The nano-gratings etched on the top surface of the nano-grating structure plate (14) are arranged in a two-dimensional periodic manner, and the arrangement mode is that the ratio of the grating depth h to the gap g is as follows: h / g ≈ 0.5 - 1.

5.

3. An ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 1, characterized in that: The nano-grating structure plate (14) is made of silicon nitride material with a moderate refractive index and low transmission loss.

4. An ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 1, characterized in that: The clamping component includes two groups of rectangular limit blocks (2), two groups of connecting columns (21), a rectangular limit groove (22) and two groups of limit sliding columns (23). The two rectangular limit blocks (2) are fixedly connected to the inner walls of the two groups of hollow clamping plates (13) on the sides far away from each other. The two connecting columns (21) are fixedly connected to both sides of the bottom of the nano-grating structure plate (14). The two rectangular limit blocks (2) and the two groups of connecting columns (21) are in a vertical state. The rectangular limit groove (22) is opened in the middle of each group of connecting columns (21). The two limit sliding columns (23) are slidably connected to the sides of the two groups of hollow clamping plates (13) far away from each other. The sides of the two connecting columns (21) away from the rectangular limit groove (22) are respectively attached to the inner walls of the two groups of hollow clamping plates (13) on the sides close to each other.

5. An ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 4, characterized in that: The clamping component further includes a triangular notch (3), a limit pad (31), a triangular clamping plate (32) and a first spring (33). The triangular notch (3) is opened at the bottom of each group of connecting columns (21). The limit pad (31) is fixedly connected to one end of each group of limit sliding columns (23). The triangular clamping plate (32) is fixedly connected to the end of each group of limit sliding columns (23) away from the limit pad (31). One end of the first spring (33) is connected to the side of the triangular clamping plate (32) close to the limit sliding column (23), and the other end of the first spring (33) is connected to the inner side wall of the hollow clamping plate (13).

6. The ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 5, wherein: The clamping component further includes two groups of rectangular notches (4), a rotating shaft (41) and a supporting pulley (42). The two rectangular notches (4) are opened at the bottom of each group of triangular clamping plates (32). The two ends of the rotating shaft (41) are rotatably connected to both sides of each group of rectangular notches (4). The supporting pulley (42) is fixedly connected to the middle of the rectangular notch (4), and the bottom of the supporting pulley (42) is in contact with the bottom of the hollow clamping plate (13).

7. An ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 1, characterized in that: The glue application assembly includes a glue storage box (5), a hollow rectangular plate (51), and a hollow telescopic column (52). The glue storage box (5) is fixedly connected to both sides of the bottom of the nano-grating structure plate (14), and glue is injected into the glue storage box (5). The hollow rectangular plate (51) is fixedly connected to the bottom of the hollow clamping plate (13). The hollow telescopic column (52) is fixedly connected to the middle of the hollow clamping plate (13), and the hollow telescopic column (52) is located in the middle of the hollow rectangular plate (51).

8. An ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 7, characterized in that: The glue application assembly further includes a glue outlet (6), a sealing film (61), and a thimble (62). The glue outlet (6) is opened in the middle of the bottom surface of the glue storage box (5). The sealing film (61) is arranged in the middle of the bottom surface of the glue storage box (5). The thimble (62) is fixedly connected to the telescopic end of the hollow telescopic column (52).

9. The ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 8, wherein: The glue application assembly further includes a second spring (7) and a wax layer (71). The bottom end of the second spring (7) is fixedly connected to the bottom of the hollow telescopic column (52), and the top end of the second spring (7) is fixedly connected to the top of the hollow telescopic column (52). The wax layer (71) is arranged on the outer periphery of the hollow telescopic column (52).

10. An ultra-high efficiency optical waveguide coupler based on a nano-grating structure according to claim 7, characterized in that: The glue injected into the glue storage box (5) is an optical epoxy resin glue that can reduce the interface reflection between the waveguide and the glue layer.

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