Attachment / detachment tool and method for attaching / detaching vapor deposition source

Abstract

The invention provides a loading and unloading tool and an evaporation source loading and unloading method, the loading and unloading tool comprises a driving seat, a lifting device, an angle adjusting device, a sliding table and a bracket, and the lifting device is connected between the driving seat and the angle adjusting device and can drive the angle adjusting device to do lifting motion relative to the driving seat; the angle adjusting device can adjust the relative angle between the sliding table and the lifting device so as to change the orientation of the sliding table. The sliding table is connected between the angle adjusting device and the bracket and can drive the bracket to move in the direction of the sliding table. The bracket is provided with a supporting face used for bearing an evaporation source. The sliding table can lift the evaporation source or lower the evaporation source in the current direction, the angle adjusting device can flexibly adjust the direction of the sliding table, the direction of the sliding table can be adjusted to be consistent with the direction of the mounting opening through the angle adjusting device, friction and collision between the evaporation source and the inner wall of the mounting opening are reduced, and the evaporation efficiency is improved. The installation operation of the evaporation source is simplified, manpower is saved, and the installation efficiency and the installation precision of the evaporation source are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of evaporation coating equipment, and in particular, to a loading and unloading tool and a method for loading and unloading an evaporation source implemented by the loading and unloading tool. Background Art

[0002] In the field of evaporation coating technology, an evaporation source is a core component of an evaporation coating equipment. When the evaporation raw material in the evaporation source is nearly exhausted, the evaporation source needs to be disassembled and maintained, and then reinstalled after the maintenance is completed.

[0003] However, currently, for the evaporation source located at the bottom of the evaporation coating equipment, the installation and disassembly processes are mainly manual operations. Although there are some auxiliary tooling for assembling and disassembling the evaporation source, which can use sleeves and lifting parts to replace manual lifting, it is still difficult to flexibly meet the on-site installation requirements. Not only is the disassembly and assembly time-consuming and laborious, but it is also difficult to ensure the accurate positioning of the evaporation source, resulting in poor assembly efficiency and assembly accuracy of the evaporation source.

[0004] Therefore, how to improve the assembly efficiency and assembly accuracy of the evaporation source has become a technical problem to be solved urgently in this field. Summary of the Invention

[0005] The present invention aims to solve one of the technical problems in the related technologies to a certain extent. For this purpose, the present invention provides a loading and unloading tool and a method for loading and unloading an evaporation source including the loading and unloading tool. The loading and unloading tool can assist in loading and unloading the evaporation source, and improve the assembly efficiency and assembly accuracy of the evaporation source.

[0006] To achieve the above object, as one aspect of the present invention, there is provided a loading and unloading tool for loading and unloading an evaporation source. The loading and unloading tool includes a traveling seat, a lifting device, an angle adjusting device, a sliding table, and a bracket. Among them, The lifting device is connected between the traveling seat and the angle adjusting device, and can drive the angle adjusting device to move up and down relative to the traveling seat; The angle adjusting device can adjust the relative angle between the sliding table and the lifting device to change the orientation of the sliding table; The sliding table is connected between the angle adjusting device and the bracket, and can drive the bracket to move along the orientation of the sliding table; The bracket has a support surface for carrying the evaporation source.

[0007] Optionally, the traveling seat includes a bottom support seat and a plurality of traveling wheels. The plurality of traveling wheels are supported at the bottom of the bottom support seat, and the lifting device is fixedly arranged on the bottom support seat.

[0008] Optionally, the traveling wheels are universal wheels.

[0009] Optionally, the angle adjustment device is located on one side of the lifting device along the first horizontal direction. The bottom support base includes a connecting frame, a plurality of support frames, and a plurality of steering frames. The connecting frame is connected to the bottom of the lifting device. The support frames and the steering frames both extend along the first horizontal direction, and one end of each of the support frames and the steering frames is fixedly connected to the connecting frame. The support frames are located below the angle adjustment device, and the steering frames are located on the side of the connecting frame away from the support frames. Travel wheels are provided at the ends of the support frames and the steering frames away from the connecting frame; the plurality of support frames and the plurality of steering frames are both arranged at intervals along the second horizontal direction, and the second horizontal direction intersects with the first horizontal direction.

[0010] Optionally, the second horizontal direction is perpendicular to the first horizontal direction.

[0011] Optionally, the bottom support base further includes at least one braking assembly, and the braking assembly is arranged on the travel wheels and can selectively lock the travel wheels.

[0012] Optionally, the lifting device includes a lifting seat, a vertical guide rail, a lifting support frame, and a lifting drive structure. The lifting seat is fixedly arranged on the traveling seat. The vertical guide rail and the lifting drive structure are both arranged on the lifting seat. The vertical guide rail extends in the vertical direction. The lifting support frame is movably arranged on the vertical guide rail. The lifting drive structure can drive the lifting support frame to move along the vertical guide rail. The angle adjustment device is fixedly connected to the lifting support frame.

[0013] Optionally, the lifting support frame includes a mounting plate, a lifting connection block, and a plurality of support rods. The lifting connection block is movably arranged on the vertical guide rail. One end of each of the plurality of support rods is fixedly connected to the lifting connection block. The other ends of the plurality of support rods all extend along the first horizontal direction. The mounting plate is fixedly arranged on the tops of the plurality of support rods. The angle adjustment device is fixedly connected to the mounting plate.

[0014] Optionally, the lifting drive structure includes a drum and a flexible belt. The drum is movably arranged on the lifting seat and can rotate around its own axis. One end of the flexible belt is wound around the drum, and the other end of the flexible belt is connected to the lifting support frame.

[0015] Optionally, the flexible belt is a flexible member such as a steel wire rope or a chain.

[0016] Optionally, the steel wire rope is a high-temperature resistant stainless steel wire rope.

[0017] Optionally, the lifting drive structure further includes a hand crank, and the hand crank is fixedly connected to one end of the drum and can drive the drum to rotate.

[0018] Optionally, the lifting drive structure further includes a fixed pulley disposed on the lifting seat and at a position higher than the reel, and the flexible belt bypasses the fixed pulley and is connected to the lifting support frame.

[0019] Optionally, the lifting seat includes a lifting housing and a plurality of strengthening connectors. The reel and the fixed pulley are both disposed in the lifting housing. The hand crank passes through the lifting housing and is connected to the reel. The tops of the plurality of strengthening connectors are fixedly connected to the top of the lifting housing, and the bottoms of the plurality of strengthening connectors are respectively fixedly connected to one ends of the plurality of bogies away from the connecting frame.

[0020] Optionally, the angle adjustment device includes a base, a hinge seat and a mounting seat. The base is connected to the lifting device. The mounting seat has a movable connection end and a hinge end. The hinge end of the mounting seat is hingedly connected to the first end of the hinge seat. The second end of the hinge seat is hingedly connected to the base. The movable connection end of the mounting seat is movably disposed on the base, and the distance between the movable connection end of the mounting seat and the second end of the hinge seat is adjustable. The slide table is fixedly connected to the mounting seat.

[0021] Optionally, the base includes a plurality of first cross bars and a plurality of second cross bars. The first cross bars extend along the first horizontal direction and are arranged in pairs at intervals along the second horizontal direction. The second cross bars extend along the second horizontal direction and are arranged in pairs at intervals along the first horizontal direction. The plurality of first cross bars and the plurality of second cross bars are connected end to end.

[0022] Optionally, the base is fixedly connected to the mounting plate through fasteners.

[0023] Optionally, the angle adjustment device further includes at least one horizontal slider, at least one horizontal guide rail and at least one angle adjustment mechanism. The horizontal guide rail is disposed on the base and extends along the first horizontal direction. The horizontal slider is movably disposed on the horizontal guide rail. The hinge end of the mounting seat is hingedly connected to the horizontal slider. The angle adjustment mechanism is disposed on the horizontal guide rail and can drive the horizontal slider to move along the horizontal guide rail.

[0024] Optionally, the first cross bar forms the horizontal guide rail.

[0025] Optionally, the hinge seat includes vertical rods arranged in pairs at intervals along the second horizontal direction, and the hinge seat includes diagonal rods arranged in pairs at intervals along the second horizontal direction. The bottom ends of the plurality of vertical rods are respectively hinged to one end of the plurality of first cross bars away from the lifting device, the top ends of the plurality of vertical rods are respectively hinged to the plurality of diagonal rods, and the bottom ends of the plurality of diagonal rods are respectively hinged to the plurality of horizontal sliders.

[0026] Optionally, the angle adjustment mechanism includes a fixing member and an adjustment screw. The fixing member is fixedly arranged on the horizontal guide rail, a threaded hole penetrating along the first horizontal direction is formed in the fixing member, and the adjustment screw passes through the threaded hole of the fixing member and abuts against the horizontal slider.

[0027] Optionally, the angle adjustment mechanisms are arranged in pairs on both sides of the horizontal slider along the first horizontal direction.

[0028] Optionally, the sliding table includes a connecting seat, a slide rail, a propulsion slider and a propulsion driving structure. The connecting seat is connected to the angle adjustment device. The slide rail is fixedly arranged on the connecting seat and extends along the orientation of the sliding table. The propulsion slider is movably arranged on the slide rail, and the propulsion driving structure can drive the propulsion slider to move along the slide rail.

[0029] Optionally, the slide rails are arranged in pairs at intervals along the second horizontal direction.

[0030] Optionally, the propulsion driving structure includes a lead screw, a threaded fitting and a rotation driving part. The lead screw is arranged on the connecting seat and extends along the orientation of the sliding table. The threaded fitting is fixedly connected to the propulsion slider. The threaded fitting has a threaded hole, and the threaded hole is in threaded connection with the lead screw. The rotation driving part can drive the lead screw to rotate around its own axis to drive the threaded fitting to drive the propulsion slider to move along the slide rail.

[0031] Optionally, the rotation driving part includes a hand crank wheel, a hand rocker, a first helical gear and a second helical gear. The hand crank wheel is connected to the first end of the hand rocker and can drive the hand rocker to rotate around its own axis. The extending direction of the hand rocker intersects with the extending direction of the lead screw. The first helical gear is arranged at the second end of the hand rocker, and the second helical gear is arranged at one end of the lead screw. The first helical gear meshes with the second helical gear.

[0032] Optionally, the rotation driving part further includes a gearbox housing, and both the first helical gear and the second helical gear are arranged in the gearbox housing.

[0033] Optionally, the hand rocker extends along the second horizontal direction.

[0034] Optionally, the bracket includes an inclined plate, a supporting plate, and a plurality of reinforcing ribs. The inclined plate extends along the direction of the sliding table and is fixedly connected to the propulsion slider. The supporting plate is connected to the bottom end of the inclined plate, and the supporting surface is formed on the supporting plate. The reinforcing ribs are arranged at intervals in pairs along the second horizontal direction, and both ends of the reinforcing ribs are fixedly connected to the supporting plate and the inclined plate respectively.

[0035] As a second aspect of the present invention, a method for loading and unloading an evaporation source is provided. The method for loading and unloading the evaporation source is implemented by the loading and unloading tool provided in the embodiments of the present invention, and the method includes: Placing the evaporation source on the supporting surface of the bracket; Controlling the angle adjustment device to adjust the angle of the sliding table so as to adjust the direction of the sliding table to be the same as the direction of the installation opening of the process chamber; Controlling the traveling seat to move to a horizontal position corresponding to the installation opening; Controlling the lifting device to drive the angle adjustment device to lift and lower until the evaporation source is aligned with the installation opening; Controlling the sliding table to drive the bracket to drive the evaporation source to approach the installation opening along the direction of the sliding table until the evaporation source contacts the process chamber; Fixing the evaporation source to the process chamber.

[0036] In the loading and unloading tool and the method for loading and unloading an evaporation source provided by the present invention, the loading and unloading tool includes a traveling seat, a lifting device, an angle adjustment device, a sliding table, and a bracket. The traveling seat can travel on the ground to move the evaporation source to the installation opening at the bottom of the process chamber. The lifting device can drive the angle adjustment device to perform lifting and lowering movements to flexibly adjust the height of the evaporation source. The angle adjustment device can change the angle between the sliding table and the horizontal plane to change the action direction of the sliding table to lift or lower the bracket obliquely. The sliding table can lift or lower the bracket and the evaporation source loaded on its supporting surface along its direction, so as to load the evaporation source into the installation opening of the process chamber or extract it from the installation opening along the installation direction of the evaporation source. The loading and unloading tool provided by the present invention can not only flexibly adapt to evaporation sources at various positions, various heights, and various installation directions in the process chamber, but also lift or lower the evaporation source along its current orientation through the sliding table. Thus, regardless of the angle of the installation opening of the process chamber, the orientation of the sliding table can be adjusted to be consistent with this orientation through the angle adjustment device, and further, the direction of the evaporation source entering and exiting the installation opening is kept consistent with the angle of the installation opening. At this time, there is no need to change the position of the angle adjustment device by adjusting the traveling seat or the lifting device. Only by using the sliding table to obliquely lift the evaporation source, the evaporation source can gradually enter or exit the installation opening while maintaining the alignment angle, reducing the friction and collision between the evaporation source and the inner wall of the installation opening, saving the steps of moving the traveling seat and adjusting the lifting device, simplifying the installation operation of the evaporation source, saving manpower, and improving the installation efficiency and installation accuracy of the evaporation source. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The present invention will be further described below with reference to the accompanying drawings: Figure 1 is a schematic structural diagram of the loading and unloading tool provided by an embodiment of the present invention; Figure 2 is an exploded structural diagram of the loading and unloading tool provided by an embodiment of the present invention; Figures 3 to 5 is a schematic flow diagram of the method for loading and unloading the evaporation source provided by an embodiment of the present invention.

[0038] DESCRIPTION OF REFERENCE NUMERALS: Traveling seat 100; bottom support seat 110; connecting frame 111; support frame 112; bogie 113; traveling wheels 120; brake assembly 130; lifting device 200; lifting seat 210; lifting housing 211; strengthening connecting member 212; lifting support frame 220; mounting plate 221; lifting connecting block 222; support rod 223; hand crank 231; angle adjustment device 300; base 310; hinge seat 320; mounting seat 330; horizontal slider 340; angle adjustment mechanism 350; fixing member 351; adjusting screw 352; sliding table 400; connecting seat 410; slide rail 420; propulsion slider 430; propulsion drive structure 440; hand wheel 441; gearbox housing 442; bracket 500; inclined plate 510; support plate 520; reinforcing rib 530; first horizontal direction x; orientation a; evaporation source 10; process chamber 20. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0039] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements with the same or similar functions from beginning to end. Based on the embodiments in the embodiments, it is intended to explain the present invention and should not be construed as a limitation to the present invention.

[0040] As used herein, the phrases "one embodiment", "example", or "instance" mean that a particular feature, structure, or characteristic described in connection with the embodiment itself may be included in at least one embodiment of the present disclosure. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment.

[0041] Existing evaporation sources are generally heavy in mass, making it difficult to handle and move them. Moreover, there are various installation angles between multiple evaporation sources and the process chamber. Existing disassembly and assembly auxiliary tools need to be manually lifted under the process chamber, and the disassembly and assembly auxiliary tools can generally only be lifted in a fixed direction, and the angle of the disassembly and assembly auxiliary tools needs to be adjusted manually multiple times, resulting in poor assembly efficiency and assembly accuracy of the evaporation source.

[0042] To solve the above technical problems, as one aspect of the present invention, a loading and unloading tool is provided for loading and unloading an evaporation source, as Figure 1 、 Figure 2 shown. The loading and unloading tool includes a traveling seat 100, a lifting device 200, an angle adjustment device 300, a slide table 400, and a bracket 500. Among them, The lifting device 200 is connected between the traveling seat 100 and the angle adjustment device 300, and is capable of driving the angle adjustment device 300 to move up and down relative to the traveling seat 100; The angle adjustment device 300 can adjust the relative angle between the slide table 400 and the lifting device 200 to change the orientation a of the slide table 400; The slide table 400 is connected between the angle adjustment device 300 and the bracket 500, and is capable of driving the bracket 500 to move along the orientation a of the slide table 400; The bracket 500 has a support surface for carrying the evaporation source 10.

[0043] The loading and unloading tool provided by the present invention includes a traveling seat 100, a lifting device 200, an angle adjustment device 300, a slide table 400, and a bracket 500. Among them, the traveling seat 100 can travel on the ground to move the evaporation source 10 to the installation opening at the bottom of the process chamber 20. The lifting device 200 can drive the angle adjustment device 300 to move up and down to flexibly adjust the height of the evaporation source 10. The angle adjustment device 300 can change the angle between the slide table 400 and the horizontal plane to change the orientation a of the action of obliquely lifting or lowering the bracket 500 by the slide table 400. The slide table 400 can lift or lower the bracket 500 and the evaporation source 10 loaded on its support surface along its orientation a, so as to install the evaporation source 10 into the installation opening of the process chamber 20 or extract it from the installation opening along the installation direction of the evaporation source 10.

[0044] In the related art, the tooling equipment used to assist in the installation of the evaporation source generally includes an installation base assembly, an angle adjustment assembly, a lifting assembly and a transport assembly. The transport assembly can move freely along the bottom surface. The lifting assembly adopts a scissor fork arm design and can drive the angle adjustment assembly to move up and down relative to the transport assembly. The angle adjustment assembly can drive the installation base assembly and the evaporation source installed thereon to rotate and change direction. The tooling equipment can move the evaporation source to a height and horizontal position corresponding to the installation port of the process chamber through the lifting assembly and the transport assembly, and rotate the evaporation source to a consistent angle with the installation port through the angle adjustment assembly, so that the evaporation source is aligned with the installation port. However, in the process of installing the evaporation source into the installation port, the evaporation source also needs to be gradually pushed into the installation port in an oblique direction. During this process, the lifting assembly needs to be continuously controlled to raise the height of the evaporation source and move the horizontal position of the transport assembly. Therefore, the assembly efficiency and assembly accuracy of the evaporation source still need to be improved.

[0045] The loading and unloading tool provided by the present invention can not only flexibly adapt to the evaporation source 10 at various positions, various heights, and various installation directions of the process chamber 20, but also can lift the evaporation source 10 along its current direction a through the slide 400 (i.e., by Figure 4 The status shown is raised to Figure 5 The evaporation source 10 can be moved into or out of the installation port by adjusting the travel seat 10 or the lifting device 200, thereby reducing the friction and collision between the evaporation source 10 and the inner wall of the installation port, thereby eliminating the need to move the travel seat 100 and the lifting device 200, thereby simplifying the installation operation of the evaporation source 10, saving manpower, and improving the installation efficiency and accuracy of the evaporation source 10.

[0046] As an optional embodiment of the present invention, Figure 1 , Figure 2 As shown, the traveling seat 100 includes a bottom supporting seat 110 and a plurality of traveling wheels 120 . The plurality of traveling wheels 120 are supported on the bottom of the bottom supporting seat 110 , and the lifting device 200 is fixedly disposed on the bottom supporting seat 110 .

[0047] In other embodiments of the present invention, the traveling seat 100 may also adopt a crawler structure or other forms of horizontally movable structures to contact the ground.

[0048] Optionally, at least part of the traveling wheels 120 are connected to a rotating motor, so that a control signal can be sent to the rotating motor to drive the traveling wheels 120 to rotate, thereby controlling the traveling seat 100 to automatically move along the ground.

[0049] Preferably, if Figure 1 , Figure 2 As shown, the traveling wheel 120 is a universal wheel, so that the traveling wheel 120 can freely change its direction along the manual pushing direction, thereby ensuring the smooth movement of the loading and unloading tool along the horizontal plane.

[0050] As an optional embodiment of the present invention, Figure 2 As shown, the angle adjustment device 300 is located on one side of the lifting device 200 along the first horizontal direction x, the bottom support seat 110 includes a connecting frame 111, a plurality of support frames 112 and a plurality of bogies 113, the connecting frame 111 is connected to the bottom of the lifting device 200, the support frame 112 and the bogie 113 are both extended along the first horizontal direction x, and the support frame 112 and the bogie 113 are both fixedly connected to the connecting frame 111 at one end, the support frame 112 is located below the angle adjustment device 300, the bogie 113 is located on the side of the connecting frame 111 away from the support frame 112, and the end of the support frame 112 and the bogie 113 away from the connecting frame 111 is provided with a traveling wheel 120; the plurality of support frames 112 and the plurality of bogies 113 are both spaced apart along the second horizontal direction, and the second horizontal direction intersects with the first horizontal direction x.

[0051] Optionally, the second horizontal direction is perpendicular to the first horizontal direction x.

[0052] Preferably, if Figure 2 As shown, the bottom support seat 110 further includes at least one brake assembly 130, which is disposed on the traveling wheel 120 and can selectively lock the traveling wheel 120, thereby ensuring the stability of the position of the loading and unloading tool when loading and unloading the evaporation source.

[0053] As a preferred embodiment of the present invention, Figure 1 , Figure 2 As shown, the lifting device 200 includes a lifting seat 210, a vertical guide rail (not shown in the figure), a lifting support frame 220 and a lifting drive structure. The lifting seat 210 is fixedly set on the traveling seat 100, and the vertical guide rail and the lifting drive structure are both set on the lifting seat 210. The vertical guide rail extends in the vertical direction. The lifting support frame 220 is movably set on the vertical guide rail. The lifting drive structure can drive the lifting support frame 220 to move along the vertical guide rail. The angle adjustment device 300 is fixedly connected to the lifting support frame 220.

[0054] In the embodiment of the present invention, the lifting device 200 includes a vertical guide rail, which limits the lifting and moving direction of the lifting support frame 220 through the vertical guide rail to ensure the stability of the horizontal position of the angle adjustment device 300 and the evaporation source, and further ensure the installation accuracy of the evaporation source.

[0055] As an alternative embodiment of the present invention, as Figure 2 shown, the lifting support frame 220 includes a mounting plate 221, a lifting connection block 222, and a plurality of support rods 223. The lifting connection block 222 is movably arranged on the vertical guide rail. One ends of the plurality of support rods 223 are fixedly connected to the lifting connection block 222, and the other ends of the plurality of support rods 223 all extend along the first horizontal direction x. The mounting plate 221 is fixedly arranged at the top of the plurality of support rods 223, and the angle adjustment device 300 is fixedly connected to the mounting plate 221.

[0056] As an alternative embodiment of the present invention, as Figure 2 shown, the lifting drive structure includes a drum and a flexible belt (located inside the lifting housing 211 and not shown in the figure). The drum is movably arranged on the lifting seat 210 and can rotate around its own axis. One end of the flexible belt is wound around the drum, and the other end of the flexible belt is connected to the lifting support frame 220.

[0057] In the embodiment of the present invention, the lifting drive structure includes a winch mechanism composed of a drum and a flexible belt. This mechanism can convert the rotational force of the drum into the vertical pulling force of the flexible belt to realize pulling the lifting support frame 220 in the vertical direction.

[0058] As an alternative embodiment of the present invention, the flexible belt is a flexible member such as a steel wire rope or a chain.

[0059] Optionally, the steel wire rope is a high-temperature resistant stainless steel wire rope.

[0060] Optionally, the drum can be driven by an automated power component such as a motor to realize automated control of the lifting drive structure.

[0061] Or, as an alternative embodiment of the present invention, as Figure 1 、 Figure 2 shown, the lifting drive structure further includes a hand crank 231. The hand crank 231 is fixedly connected to one end of the drum and can drive the drum to rotate, so as to facilitate the operator to manually drive the drum to rotate.

[0062] As an alternative embodiment of the present invention, as Figure 2 shown, the lifting drive structure further includes a fixed pulley. The fixed pulley is arranged on the lifting seat 210 and is located higher than the drum. The flexible belt bypasses the fixed pulley and is connected to the lifting support frame 220, so that while the hand crank 231 is arranged at a lower position for easy manual operation, the stroke of the flexible belt driving the lifting support frame 220 to lift and lower can be extended.

[0063] As an alternative embodiment of the present invention, as Figure 2 shown, the lifting seat 210 includes a lifting housing 211 and a plurality of strengthening connecting members 212. The winding drum and the fixed pulley are both arranged in the lifting housing 211. The hand crank 231 passes through the lifting housing 211 and is connected to the winding drum. The tops of the plurality of strengthening connecting members 212 are fixedly connected to the top of the lifting housing 211, and the bottoms of the plurality of strengthening connecting members 212 are respectively fixedly connected to one ends of the plurality of bogies 113 away from the connecting frame 111, so as to improve the relative position stability between the lifting housing 211 and the traveling seat.

[0064] As an alternative embodiment of the present invention, as Figure 1 、 Figure 2 shown, the angle adjusting device 300 includes a base 310, a hinge seat 320 and a mounting seat 330. The base 310 is connected to the lifting device 200. The mounting seat 330 has a movable connection end and a hinge end. The hinge end of the mounting seat 330 is hingedly connected to the first end of the hinge seat 320. The second end of the hinge seat 320 is hingedly connected to the base 310. The movable connection end of the mounting seat 330 is movably arranged on the base 310, and the distance between the movable connection end of the mounting seat 330 and the second end of the hinge seat 320 is adjustable. The sliding table 400 is fixedly connected to the mounting seat 330.

[0065] In the embodiment of the present invention, the base 310, the hinge seat 320 and the mounting seat 330 are interconnected to form a triangular structure, and the distance between the movable connection end of the mounting seat 330 and the second end of the hinge seat 320 is adjustable, that is, the length of the base side of the triangle is adjustable, so that the angle between the mounting seat 330 and the horizontal plane can be changed, and further the orientation a of the sliding table 400 mounted on the mounting seat 330 can be adjusted.

[0066] Optionally, the angle between the mounting seat 330 of the angle adjusting device 300 and the horizontal plane can be adjusted between 45° and 55°, that is, the angle between the orientation a of the sliding table 400 and the horizontal plane can be adjusted between 45° and 55°.

[0067] Optionally, as Figure 2 shown, the base 310 includes a plurality of first cross bars and a plurality of second cross bars. The first cross bars extend along the first horizontal direction x and are arranged in pairs at intervals along the second horizontal direction. The second cross bars extend along the second horizontal direction and are arranged in pairs at intervals along the first horizontal direction x. The plurality of first cross bars and the plurality of second cross bars are connected end to end.

[0068] Optionally, the base 310 is fixedly connected to the mounting plate 221 through fasteners.

[0069] As an alternative embodiment of the present invention, as Figure 1 、 Figure 2As shown, the angle adjustment device 300 further includes at least one horizontal slider 340, at least one horizontal guide rail, and at least one angle adjustment mechanism 350. The horizontal guide rail is disposed on the base 310 and extends along the first horizontal direction x. The horizontal slider 340 is movably disposed on the horizontal guide rail. The hinged end of the mounting seat 330 is hingedly connected to the horizontal slider 340. The angle adjustment mechanism 350 is disposed on the horizontal guide rail and is capable of driving the horizontal slider 340 to move along the horizontal guide rail.

[0070] Optionally, the first cross bar is formed as the horizontal guide rail.

[0071] Optionally, the horizontal slider 340 can be driven by an automated power component such as a motor to automatically adjust the angle of the slide table 400.

[0072] As an alternative embodiment of the present invention, as Figure 2 shown, the hinge seat 320 includes vertical bars that are spaced apart in pairs along the second horizontal direction. The hinge seat 320 includes diagonal bars that are spaced apart in pairs along the second horizontal direction. The bottom ends of the plurality of vertical bars are respectively hingedly connected to one end of the plurality of first cross bars away from the lifting device 200. The top ends of the plurality of vertical bars are respectively hingedly connected to the plurality of diagonal bars. The bottom ends of the plurality of diagonal bars are respectively hingedly connected to the plurality of horizontal sliders 340.

[0073] As an alternative embodiment of the present invention, as Figure 2 shown, the angle adjustment mechanism 350 includes a fixing member 351 and an adjustment screw 352. The fixing member 351 is fixedly disposed on the horizontal guide rail. A threaded hole that penetrates along the first horizontal direction x is formed in the fixing member 351. The adjustment screw 352 passes through the threaded hole of the fixing member 351 and abuts against the horizontal slider 340. Thus, the horizontal slider 340 can be pushed to move along the horizontal guide rail by rotating the adjustment screw 352.

[0074] Optionally, as Figure 2 shown, the angle adjustment mechanisms 350 are disposed in pairs on both sides of the horizontal slider 340 along the first horizontal direction x.

[0075] As an alternative embodiment of the present invention, as Figure 2 shown, the slide table 400 includes a connection seat 410, a slide rail 420, a propulsion slider 430, and a propulsion drive structure 440. The connection seat 410 is connected to the angle adjustment device 300. The slide rail 420 is fixedly disposed on the connection seat 410 and extends along the orientation a of the slide table 400. The propulsion slider 430 is movably disposed on the slide rail 420, and the propulsion drive structure 440 is capable of driving the propulsion slider 430 to move along the slide rail 420.

[0076] Optionally, the maximum travel of the slider 430 along the slide rail 420 is 0.7 m to 0.9 m.

[0077] Optionally, as shown in Figure 2 FIG. Figure 2 , the slide rails 420 are arranged at intervals in pairs along the second horizontal direction.

[0078] As an alternative embodiment of the present invention, as shown in Figure 2 FIG. Figure 2 , the propulsion drive structure 440 includes a lead screw, a threaded fitting (not shown in the figure), and a rotary drive unit (only the handwheel 441 and the gearbox housing 442 are shown in the figure). The lead screw is arranged on the connecting seat 410 and extends along the direction a of the slide table 400. The threaded fitting is fixedly connected to the propulsion slider 430. The threaded fitting has a threaded hole, and the threaded hole is in threaded connection with the lead screw. The rotary drive unit can drive the lead screw to rotate around its own axis to drive the threaded fitting to drive the propulsion slider 430 to move along the slide rail 420, thereby driving the evaporation source 10 to lift or lower obliquely.

[0079] Optionally, the lead screw can be driven by an automated power component such as a motor to achieve automated adjustment of the oblique feed amount of the slide table 400.

[0080] Alternatively, for the convenience of manual operation, as an alternative embodiment of the present invention, as shown in Figure 2 FIG. Figure 2 , the rotary drive unit includes a handwheel 441, a hand lever (not shown in the figure), a first bevel gear, and a second bevel gear (located inside the gearbox housing 442). The handwheel 441 is connected to the first end of the hand lever and can drive the hand lever to rotate around its own axis. The extending direction of the hand lever intersects with the extending direction of the lead screw. The first bevel gear is arranged at the second end of the hand lever, and the second bevel gear is arranged at one end of the lead screw. The first bevel gear and the second bevel gear are meshed with each other.

[0081] When the operator rotates the handwheel 441, the hand lever and the first bevel gear connected to its other end rotate together, thereby driving the second bevel gear and the lead screw connected thereto to rotate together, and further realizing the adjustment of the oblique feed amount of the slide table 400.

[0082] As an alternative embodiment of the present invention, as shown in Figure 2 FIG. Figure 2 , the rotary drive unit further includes a gearbox housing 442, and the first bevel gear and the second bevel gear are both arranged in the gearbox housing 442.

[0083] Preferably, the number of teeth of the first bevel gear is less than the number of teeth of the second bevel gear, so as to save manpower through a labor-saving lever.

[0084] Optionally, the hand lever extends along the second horizontal direction.

[0085] As an alternative embodiment of the present invention, as shown in Figure 2As shown, the bracket 500 includes an inclined plate 510, a support plate 520, and a plurality of reinforcing ribs 530. The inclined plate 510 extends along the orientation a of the sliding table 400 and is fixedly connected to the pushing slider 430. The support plate 520 is connected to the bottom end of the inclined plate 510, and a support surface is formed on the support plate 520. The reinforcing ribs 530 are arranged at intervals in pairs along the second horizontal direction, and both ends of the reinforcing ribs 530 are fixedly connected to the support plate 520 and the inclined plate 510 respectively.

[0086] Preferably, the bracket 500 is made of a high-temperature resistant stainless steel material.

[0087] As the second aspect of the present invention, a method for loading and unloading an evaporation source is provided. The method for loading and unloading an evaporation source is realized by the loading and unloading tool provided by the embodiment of the present invention, and the method includes: Step S1: Place the evaporation source 10 on the support surface of the bracket 500 (as Figure 3 shown); Step S2: Control the angle adjustment device 300 to adjust the angle of the sliding table 400 so that the orientation a of the sliding table 400 is adjusted to be the same as the orientation of the installation opening of the process chamber 20 (as Figures 3 to 4 shown); Step S3: Control the traveling seat 100 to move to the horizontal position corresponding to the installation opening (as Figures 3 to 4 shown); Step S4: Control the lifting device 200 to drive the angle adjustment device 300 to lift until the evaporation source 10 is aligned with the installation opening (as Figures 3 to 4 shown); Step S5: Control the sliding table 400 to drive the bracket 500 to drive the evaporation source 10 to approach the installation opening along the orientation a of the sliding table 400 until the evaporation source 10 contacts the process chamber 20 (as Figures 4 to 5 shown); Step S6: Fix the evaporation source 10 to the process chamber 20 (as Figure 5 shown).

[0088] It can be understood that the method for loading and unloading an evaporation source provided by the present invention can be realized by manual operation or automatically completed by controlling each structure on the loading and unloading tool through control signals. The execution order of steps S2 to S4 can be flexibly adjusted or executed simultaneously.

[0089] For the convenience of understanding, the following provides a specific implementation manner of using the loading and unloading tool provided by the embodiment of the present invention to realize the loading and unloading method provided by the present invention: Step 101: Place the evaporation source 10 on the bracket 500; Step 102: Adjust the angle adjustment device 300 so that the angle between the orientation a of the sliding table 400 and the horizontal plane is 50°, and make the orientation a of the sliding table 400 the same as the orientation of the installation opening of the process chamber 20; Step 103: Push the driving seat 100 to move the evaporation source 10 below the installation opening of the process chamber 20; Step 104: Manually rotate the hand crank 231 to wind up or release the wire rope. By the traction of the wire rope, drive the lifting support frame 220 to lift or lower vertically to a height of 0.5 m from the ground, so that the evaporation source 10 is aligned with the installation opening of the process chamber 20; Step 105: Rotate the hand wheel 441 to drive the screw-nut mechanism to drive the propulsion slider 430, the bracket 500 and the evaporation source 10 to move along the direction a of the sliding table 400 until the evaporation source 10 contacts the process chamber 20; Step S106: Fix the evaporation source 10 and the process chamber 20 in a connected manner.

[0090] The steps for disassembling the evaporation source are opposite to those for installing the evaporation source, and will not be elaborated herein.

[0091] The method for loading and unloading the evaporation source provided by the present invention is realized by using the loading and unloading tool provided by the embodiment of the present invention. The loading and unloading tool can travel along the ground and can flexibly adjust the height of the evaporation source 10 and the direction a of the sliding table 400, so as to flexibly adapt to the evaporation sources 10 at various positions, various heights and various installation directions of the process chamber 20, saving manpower and improving the installation efficiency and installation accuracy of the evaporation source 10.

[0092] The above is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes but is not limited to the content described in the drawings and the above specific implementation manner. Any modification that does not deviate from the functional and structural principles of the present invention will be included in the scope of the claims.

Claims

1. A loading and unloading tool for loading and unloading an evaporation source (10), characterized in that The loading and unloading tool includes a traveling seat (100), a lifting device (200), an angle adjusting device (300), a slide table (400), and a bracket (500). Among them, the lifting device (200) is connected between the traveling seat (100) and the angle adjusting device (300), and can drive the angle adjusting device (300) to move up and down relative to the traveling seat (100); the angle adjusting device (300) can adjust the relative angle between the slide table (400) and the lifting device (200) to change the orientation (a) of the slide table (400); the slide table (400) is connected between the angle adjusting device (300) and the bracket (500), and can drive the bracket (500) to move along the orientation (a) of the slide table (400); the bracket (500) has a support surface for carrying the evaporation source (10).

2. The handling tool according to claim 1, characterized in that, The slide table (400) includes a connecting seat (410), a slide rail (420), a propulsion slider (430), and a propulsion driving structure (440). The connecting seat (410) is connected to the angle adjusting device (300). The slide rail (420) is fixedly arranged on the connecting seat (410) and extends along the orientation (a) of the slide table (400). The propulsion slider (430) is movably arranged on the slide rail (420). The propulsion driving structure (440) can drive the propulsion slider (430) to move along the slide rail (420).

3. The handling tool according to claim 2, characterized in that, The propulsion driving structure (440) includes a lead screw, a threaded fitting, and a rotation driving part. The lead screw is arranged on the connecting seat (410) and extends along the orientation (a) of the slide table (400). The threaded fitting is fixedly connected to the propulsion slider (430). The threaded fitting has a threaded hole, and the threaded hole is in threaded connection with the lead screw. The rotation driving part can drive the lead screw to rotate around its own axis to drive the threaded fitting to drive the propulsion slider (430) to move along the slide rail (420).

4. The handling tool according to claim 3, characterized in that, The rotation driving part includes a handwheel (441), a hand lever, a first bevel gear, and a second bevel gear. The handwheel (441) is connected to the first end of the hand lever and can drive the hand lever to rotate around its own axis. The extending direction of the hand lever intersects with the extending direction of the lead screw. The first bevel gear is arranged at the second end of the hand lever. The second bevel gear is arranged at one end of the lead screw. The first bevel gear meshes with the second bevel gear.

5. The handling tool according to any one of claims 1 to 4, characterized in that, The lifting device (200) includes a lifting seat (210), a vertical guide rail, a lifting support frame (220) and a lifting drive structure. The lifting seat (210) is fixedly arranged on the traveling seat (100). The vertical guide rail and the lifting drive structure are both arranged on the lifting seat (210). The vertical guide rail extends in the vertical direction. The lifting support frame (220) is movably arranged on the vertical guide rail. The lifting drive structure can drive the lifting support frame (220) to move along the vertical guide rail. The angle adjustment device (300) is fixedly connected to the lifting support frame (220).

6. The handling tool according to claim 5, characterized in that The lifting drive structure includes a winding drum and a flexible belt. The winding drum is movably arranged on the lifting seat (210) and can rotate around its own axis. One end of the flexible belt is wound around the winding drum, and the other end of the flexible belt is connected to the lifting support frame (220).

7. The handling tool according to claim 6, characterized in that, The lifting drive structure further includes a hand crank (231). The hand crank (231) is fixedly connected to one end of the winding drum and can drive the winding drum to rotate.

8. The handling tool according to any one of claims 1 to 4, characterized in that, The angle adjustment device (300) includes a base (310), a hinge seat (320) and a mounting seat (330). The base (310) is connected to the lifting device (200). The mounting seat (330) has a movable connection end and a hinge end. The hinge end of the mounting seat (330) is hingedly connected to the first end of the hinge seat (320). The second end of the hinge seat (320) is hingedly connected to the base (310). The movable connection end of the mounting seat (330) is movably arranged on the base (310), and the distance between the movable connection end of the mounting seat (330) and the second end of the hinge seat (320) is adjustable. The slide table (400) is fixedly connected to the mounting seat (330).

9. The handling tool according to claim 8, characterized in that The angle adjustment device (300) further includes at least one horizontal slider (340), at least one horizontal guide rail and at least one angle adjustment mechanism (350). The horizontal guide rail is arranged on the base (310) and extends in the first horizontal direction (x). The horizontal slider (340) is movably arranged on the horizontal guide rail. The hinge end of the mounting seat (330) is hingedly connected to the horizontal slider (340). The angle adjustment mechanism (350) is arranged on the horizontal guide rail and can drive the horizontal slider (340) to move along the horizontal guide rail.

10. A method for loading and unloading an evaporation source, characterized in that, The method for loading and unloading the evaporation source is realized by the loading and unloading tool according to any one of claims 1 to 9. The method includes: Placing the evaporation source (10) on the supporting surface of the bracket (500); Controlling the angle adjustment device (300) to adjust the angle of the slide table (400) so as to adjust the orientation (a) of the slide table (400) to be the same as the orientation of the installation opening of the process chamber (20); Controlling the traveling seat (100) to move to the horizontal position corresponding to the installation opening; Control the lifting device (200) to drive the angle adjustment device (300) to lift until the evaporation source (10) is aligned with the installation opening; Control the slide table (400) to drive the bracket (500) to drive the evaporation source (10) to approach the installation opening along the orientation (a) of the slide table (400) until the evaporation source (10) contacts the process chamber (20); Fix the evaporation source (10) and the process chamber (20) in a connected manner.

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