Graphene flexible pressure sensor and preparation method thereof, and GIS pressure monitoring method and device

Through the preparation and packaging technology of graphene flexible pressure sensors, the bonding problem of traditional sensors on power equipment is solved, and high-precision pressure monitoring of power equipment is realized. It is suitable for real-time monitoring and fault warning of power equipment such as GIS.

CN120364644APending Publication Date: 2025-07-25STATE GRID JIANGSU ELECTRIC POWER CO LTD RESEARCH INSTITUTE +1
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Patent Information

Application Number
CN202510535010.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-27
Publication Date
2025-07-25

AI Technical Summary

Technical Problem

Existing rigid sensors are difficult to achieve pressure measurement on power equipment with compact space and curved surface shapes, and cannot accurately monitor the stress and deformation of power equipment.

Method used

The graphene flexible pressure sensor is used to encapsulate the graphene pressure sensitive unit through a flexible substrate, and cut into a set shape according to actual needs. It combines copper electrodes and solder paste or glue to achieve flexible bonding to the surface of the power equipment.

Benefits of technology

It realizes high-precision pressure measurement of compact space and curved surface-shaped power equipment, can monitor air pressure changes in real time, adapt to harsh environments, reduce costs, and improve operation and maintenance efficiency and reliability.

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Abstract

The invention discloses a graphene flexible pressure sensor and a preparation method thereof, and a GIS pressure monitoring method and device, and the preparation method of the graphene flexible pressure sensor comprises the steps: manufacturing a graphene pressure sensitive unit; packaging the graphene pressure sensitive unit through the flexible substrate to obtain a graphene flexible pressure sensor semi-finished product; and cutting the graphene flexible pressure sensor semi-finished product to obtain the graphene flexible pressure sensor with the set appearance structure. According to the invention, the problem of pressure measurement of compact-space and curved-surface-appearance power equipment is solved.
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Description

Technical Field

[0001] The present invention belongs to the technical field of power equipment monitoring, and particularly relates to a graphene flexible pressure sensor and a preparation method thereof, a GIS pressure monitoring method and a device thereof. Background Art

[0002] During the long-term operation of power equipment, mechanical property monitoring is required. For example, due to reasons such as large span, material defects, and manufacturing and assembly errors, GIS is prone to stress concentration positions. At the stress concentration sites, due to repeated mechanical loads and temperature changes, the material is prone to fatigue damage, resulting in the generation and expansion of cracks, and ultimately may cause mechanical damage to the equipment. Due to reasons such as excessive short-circuit current, aging, improper manufacturing or installation of the transformer winding, the transformer winding is prone to mechanical stress and deformation caused by electrodynamic force. The mechanical stress and deformation of the winding may cause damage or cracking of the insulating layer, thereby leading to partial discharge; it may also cause loosening of the internal structure of the transformer, generating abnormal vibration and noise, and accelerating the fatigue and damage of the structure. Due to reasons such as strong wind, wind pulsation, and material aging, the iron tower is prone to structural deformation and resonance. The deformation of the iron tower is likely to cause damage or collapse of the iron tower structure; the resonance between the iron tower and the wind may accelerate the fatigue of the structural members, and even cause the fracture of the members or the loosening of the connectors, endangering the safety of the overall structure. Therefore, it is of great significance to monitor the stress condition or deformation degree of power equipment in real time. Currently, power equipment is mainly monitored by deploying wireless sensors, and such sensors are generally made of rigid materials. Because traditional rigid sensors have the disadvantages of large volume and difficulty in closely fitting with the curved surface of power equipment, it is difficult to accurately measure the pressure of power equipment with a compact space and a curved surface shape. Summary of the Invention

[0003] To solve the deficiencies in the prior art, the present invention provides a graphene flexible pressure sensor and a preparation method thereof, a GIS pressure monitoring method and a device thereof, which overcome the problem of pressure measurement for power equipment with a compact space and a curved surface shape.

[0004] To achieve the above object, the technical solution adopted by the present invention is as follows: In the first aspect, a preparation method of a graphene flexible pressure sensor is provided, including: fabricating a graphene pressure sensitive unit; encapsulating the graphene pressure sensitive unit through a flexible substrate to obtain a semi-finished graphene flexible pressure sensor; and cutting the semi-finished graphene flexible pressure sensor to obtain a graphene flexible pressure sensor with a set external shape structure.

[0005] Further, a graphene pressure-sensitive unit is fabricated, which includes: immersing paper in a graphene oxide solution with a set concentration to make graphene oxide adhere to the paper; putting the paper with adhered graphene oxide into an oven for annealing treatment to dry the excess water and reduce the graphene oxide to obtain graphene, and finally obtaining the graphene pressure-sensitive unit.

[0006] Further, on the flexible substrate, there are provided a C-shaped pad for encapsulating the graphene pressure-sensitive unit and a copper electrode for providing a conductive path, and through holes for wires to pass through are provided on the copper electrode.

[0007] Further, encapsulating the graphene pressure-sensitive unit with a flexible substrate includes: fixing the flexible substrate as the bottom plate on a steel plate through positioning pins; uniformly applying solder paste in the area of the C-shaped pad of the flexible substrate as the bottom plate; covering the graphene pressure-sensitive unit on the copper electrode of the flexible substrate as the bottom plate; covering the flexible substrate as the top plate on the graphene pressure-sensitive unit and aligning the copper electrode on the flexible substrate as the top plate with the graphene pressure-sensitive unit; pressing another steel plate on the flexible substrate as the top plate and pressing them together; heating the area of the C-shaped pad with a hot air gun until the solder paste melts to achieve mechanical connection between the two substrates.

[0008] Further, encapsulating the graphene pressure-sensitive unit with a flexible substrate includes: fixing the flexible substrate as the bottom plate on a steel plate through positioning pins; covering the graphene pressure-sensitive unit on the copper electrode of the flexible substrate as the bottom plate; applying glue in a set area of the flexible substrate as the top plate and covering the flexible substrate as the top plate on the graphene pressure-sensitive unit, and at the same time, aligning the copper electrode on the flexible substrate as the top plate with the graphene pressure-sensitive unit; pressing another steel plate on the flexible substrate as the top plate and completing the encapsulation after the glue cures.

[0009] Further, a silk screen pattern for cutting is provided on the flexible substrate.

[0010] In a second aspect, a graphene flexible pressure sensor is provided, and the graphene flexible pressure sensor is fabricated by using the fabrication method of the graphene flexible pressure sensor described in the first aspect.

[0011] In a third aspect, a GIS pressure monitoring method is provided, which uses the graphene flexible pressure sensor described in the second aspect, and includes: collecting gas pressure data in the GIS gas chamber using the graphene flexible pressure sensor cut into a first set shape; collecting tensile data at a set position of the GIS housing using the graphene flexible pressure sensor cut into a second set shape; comparing the gas pressure data with a preset gas pressure threshold, and when the gas pressure data exceeds the preset gas pressure threshold, sending a warning signal of too low gas pressure; performing data processing on the tensile data to obtain the stress value at the set position of the GIS housing and comparing it with a preset stress threshold, and when the stress value at the set position of the GIS housing exceeds the preset stress threshold, sending a warning signal of stress overrun.

[0012] Further, it further includes: counting the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold, and comparing it with a preset number threshold, and when the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold exceeds the preset number threshold, sending a warning signal of GIS housing fatigue.

[0013] In a fourth aspect, a GIS pressure monitoring device is provided, which uses the graphene flexible pressure sensor described in the second aspect, and includes: a gas pressure acquisition module for collecting gas pressure data in the GIS gas chamber using the graphene flexible pressure sensor cut into a first set shape; a housing tensile acquisition module for collecting tensile data at a set position of the GIS housing using the graphene flexible pressure sensor cut into a second set shape; a gas pressure warning module for comparing the gas pressure data with a preset gas pressure threshold, and when the gas pressure data exceeds the preset gas pressure threshold, sending a warning signal of too low gas pressure; a housing stress warning module for performing data processing on the tensile data to obtain the stress value at the set position of the GIS housing and comparing it with a preset stress threshold, and when the stress value at the set position of the GIS housing exceeds the preset stress threshold, sending a warning signal of stress overrun.

[0014] Further, it further includes: a housing fatigue warning module for counting the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold, and comparing it with a preset number threshold, and when the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold exceeds the preset number threshold, sending a warning signal of GIS housing fatigue Compared with the prior art, the beneficial effects achieved by the present invention are: (1)The present invention fabricates a graphene pressure-sensitive unit; encapsulates the graphene pressure-sensitive unit through a flexible substrate to obtain a semi-finished graphene flexible pressure sensor; and cuts the semi-finished graphene flexible pressure sensor to obtain a graphene flexible pressure sensor with a set external shape structure, thus overcoming the problem of pressure measurement for power equipment in compact spaces and with curved external shapes. (2)The present invention can accurately measure pressures from 96 Pa to 500 kPa, meeting the monitoring requirements of GIS equipment from extremely low air pressures to high-pressure environments. Its dynamic response is fast and stable, capable of capturing the rapid changes in the internal air pressure of GIS in real time, such as transient processes caused by gas leakage or temperature fluctuations. In the range of 200 kPa - 500 kPa, the sensor exhibits excellent sensitivity and linearity, enabling precise monitoring of air pressure changes during the normal operation and fault warning of GIS equipment. Through optimized structural encapsulation, the sensor's resistance to environmental interference is significantly enhanced, adapting to the harsh operating environment of GIS equipment. Its mature preparation process is conducive to large-scale production, reducing costs, and is applicable to scenarios where a large number of pressure sensors need to be deployed in power equipment such as GIS equipment, effectively improving the operation and maintenance efficiency and reliability of power equipment. Description of the Drawings

[0015] Figure 1 is a schematic diagram of the fabrication process of the graphene pressure-sensitive unit of a graphene flexible pressure sensor provided by an embodiment of the present invention; Figure 2 is a schematic diagram of the flexible substrate in an embodiment of the present invention, where (a) is a schematic diagram of the flexible substrate of the graphene flexible pressure sensor, (b) is a physical diagram of the contact surface between the flexible substrate and the sensitive unit, and (c) is a physical diagram of the contact surface between the flexible substrate and the external environment; Figure 3 is a schematic diagram of the encapsulation process of the graphene flexible pressure sensor in an embodiment of the present invention, where (a) is a schematic diagram of the flat-laid flexible substrate, (b) is a schematic diagram of applying solder paste to the C-shaped pad, (c) is a schematic diagram of aligning and pressing the flexible substrate, and (d) is a schematic diagram after cutting is completed; Figure 4 is a pressure response diagram of the graphene flexible pressure sensor in an embodiment of the present invention; Figure 5 is a dynamic response curve diagram of the graphene flexible pressure sensor in an embodiment of the present invention; Figure 6 is a response time curve diagram of the graphene flexible pressure sensor in an embodiment of the present invention, where (a) is the force application response time curve of the sensor and (b) is the force removal response time curve of the sensor; Figure 7 is a 200 - 500 kPa air pressure test curve diagram of the graphene flexible pressure sensor in an embodiment of the present invention; Figure 2Among them, 1. Flexible substrate; 2. Screen printing layer; 3. C-shaped pad; 4. Copper electrode; 5. Via hole; 6. Pad; 7. Positioning hole. Detailed implementation manners

[0016] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0017] Embodiment 1 A preparation method of a graphene flexible pressure sensor includes: fabricating a graphene pressure sensitive unit; encapsulating the graphene pressure sensitive unit through a flexible substrate to obtain a semi-finished graphene flexible pressure sensor; and cutting the semi-finished graphene flexible pressure sensor to obtain a graphene flexible pressure sensor with a set external shape structure.

[0018] Fabricate the graphene pressure sensitive unit. As Figure 1 shown, first, immerse the paper in a graphene oxide solution with a concentration of 2 mg / mL so that the graphene oxide adheres to the paper. Then, anneal the paper with the adhered graphene oxide in an oven at 250 °C for 5 hours to dry the excess moisture and reduce the graphene oxide to obtain graphene. Finally, a flexible paper substrate with a graphene thin film adhered thereto is obtained.

[0019] Encapsulate the graphene pressure sensitive unit through a flexible substrate to obtain a semi-finished graphene flexible pressure sensor. As Figure 2 shown, the flexible substrate 1 (FPCB flexible board) is made of polyimide, which has good insulation and flexibility and is very suitable as the encapsulation substrate of the flexible pressure sensor. The screen printing layer 2 on the flexible substrate 1 facilitates determining the cutting position, and the preset sensor size is a 1×1 cm square; the positioning holes 7 on the flexible substrate 1 are used for encapsulation positioning to improve the encapsulation accuracy. Design two C-shaped pads 3 with a width of 1 mm for encapsulating the graphene paper-based material; at the same time, design a 4×4 mm square copper electrode 4 in the middle, with a spacing of 1.4 mm from the C-shaped pad 3 to provide a conductive path; design via holes 5 on the copper electrode 4, with an inner diameter of 0.3 mm and an outer diameter of 0.6 mm for the wire to run from the back to ensure the stability and reliability of the circuit connection; the two pads 6 have a diameter of 1.2 mm and are located at the edge of the device, 0.3 mm from the upper border of the sensor and 0.3 mm from the left and right borders. The function of the pad 6 is to facilitate the device to access the external circuit.

[0020] As Figure 3 shown, during the process of encapsulating the pressure sensor, the mechanical connection and encapsulation between the flexible substrate and the graphene pressure sensitive unit are key steps. The sensor encapsulation flow chart and experimental diagram are as Figure 6As shown. The flexible substrates serving as the top plate and the bottom plate are used to protect the graphene pressure-sensitive unit and provide connection points to the external circuit. The positioning pins fix the bottom plate on the steel plate to prevent displacement during subsequent operations. Solder paste is evenly coated in the C-pad area with the help of a steel mesh. The graphene pressure-sensitive unit is placed in the copper electrode area so that it completely covers the copper electrode. Take another flexible substrate as the top plate, align the copper electrode with the graphene pressure-sensitive unit, and use the steel plate to press the top plate and the bottom plate together to make them in close contact. Use a hot air gun to heat the C-pad area until the solder paste melts, enabling mechanical connection between the top plate and the bottom plate. After cutting off the auxiliary alignment area, a semi-finished packaged graphene flexible pressure sensor is obtained.

[0021] According to the actual position where the graphene flexible pressure sensor is to be installed, the semi-finished graphene flexible pressure sensor is cut to obtain a graphene flexible pressure sensor with a set external shape structure (such as arc, square, etc.).

[0022] As Figure 4 shown is the curve of the relative resistance of the sensor changing with the applied pressure, showing the change in the relative resistance measured by the sensor with respect to the linearly increasing pressure. The experimental results show that the resistance of the sensor gradually decreases with the increase of the externally applied pressure.

[0023] When the pressure starts to be applied, the relative resistance change of the sensor rises sharply. When the pressure is 12 kPa, the relative resistance change value is as high as 40%. When the pressure continues to increase, the growth rate of the relative resistance change of the sensor slows down. Because when no pressure is applied, there are a large number of pores inside the mechanical sensitive unit, and a large number of pores are also distributed between the contact surfaces of the copper electrode and the mechanical sensitive unit. Therefore, when a small pressure is applied to the sensor, the pores will be compressed, and the contact area between the electrode and the conductive fibers and between the conductive fibers increases significantly, resulting in a rapid decrease in the contact resistance. As the pressure continues to increase, some of the gaps between the electrode and the conductive fibers and between the conductive fibers close, resulting in a decrease in the change of the contact area, leading to a decrease in the change of the contact resistance and a smaller change in the relative resistance of the sensor.

[0024] As Figure 5 shown, when pressures of 3 kPa, 6 kPa, 30 kPa, and 60 kPa are applied to the sensor separately multiple times, it can be seen from the figure that when the sensor is subjected to the same magnitude of pressure from the outside multiple times, the change rate of the response resistance of the sensor shows good consistency. When the sensor is subjected to different magnitudes of pressure from the outside multiple times, the response amplitude of the sensor has good discrimination.

[0025] As Figure 6 shown, when a force of 1 N is applied to the sensor, it takes 176 ms for the sensor resistance to change from the initial value to a stable state; when the applied force is removed, it takes 184 ms for the sensor resistance to return to the initial value.

[0026] As Figure 7 shown, the graphene flexible pressure sensor was tested in the gas pressure environment of 300 - 500 MPa filled with SF6 gas inside the GIS. The results show that the sensor exhibits excellent sensitivity and linearity within this pressure range, can quickly and accurately respond to pressure changes, which fully demonstrates its excellent performance in real - time pressure monitoring of GIS equipment in practical applications.

[0027] The present invention overcomes the problem of pressure measurement for power equipment with a compact space and a curved surface shape, and designs a new type of flexible graphene pressure sensor. The sensor uses a flexible graphene pressure - sensitive unit, flexible copper electrodes, and polyimide packaging. It is overall flexible and can closely fit the complex curved surface inside the GIS equipment to achieve high - precision pressure measurement. Using paper as the carrier of graphene makes the processing and recycling of the sensor more environmentally friendly and reduces the maintenance cost of GIS equipment. It has high sensitivity at low pressure, suitable for monitoring early minor pressure changes of GIS equipment; as the pressure increases, the sensitivity gradually decreases, but it still exhibits excellent sensitivity and linearity in the environment of 200 kPa to 500 kPa, meeting the pressure monitoring requirements for the normal operation and fault warning of GIS equipment. The sensor has good repeatability, ensuring stable and reliable monitoring data during the long - term operation of GIS equipment. Its preparation process is mature, can be mass - produced, and has a low cost, suitable for scenarios where a large number of pressure sensors are deployed in the field of power equipment, effectively meeting the special requirements of power equipment such as GIS for pressure monitoring.

[0028] Example Two The difference between this example and Example One is only that this example selects to use glue for the hermetic packaging of the sensor. Specifically, it includes: First, place the flexible substrate serving as the bottom plate on a flat steel plate and fix it with positioning pins. The function of the positioning pins is to ensure that the flexible substrate does not displace or deform during subsequent operations, thereby guaranteeing the accuracy and reliability of the encapsulation. Next, carefully cover the copper electrode area of the flexible substrate with the graphene pressure-sensitive unit. During the installation process, it is necessary to ensure good contact between the graphene and the copper electrode to ensure the accurate transmission of subsequent pressure signals. To improve the contact quality, the copper electrode surface can be pre-cleaned to remove possible oxide layers or impurities. After completing the preparation of the bottom plate, evenly coat a special glue on the set area of the flexible substrate serving as the top plate. The selection of the glue needs to consider its adhesiveness, durability, and compatibility with the flexible substrate and graphene materials. When applying the glue, ensure that the thickness of the glue layer is uniform to avoid uneven encapsulation stress caused by uneven glue thickness. Subsequently, carefully cover the graphene pressure-sensitive unit with the glue-coated top plate flexible substrate and ensure that the copper electrode on the top plate flexible substrate is aligned with the graphene pressure-sensitive unit. Gently press the top plate flexible substrate to make the glue initially adhere. Then place another flat steel plate on the top plate flexible substrate to provide uniform pressure and ensure that the glue can be evenly distributed and firmly adhere during the curing process. After the glue is completely cured, remove the steel plate to complete the encapsulation process.

[0029] Embodiment III Based on the preparation method of a graphene flexible pressure sensor described in Embodiment I and Embodiment II, this embodiment provides a graphene flexible pressure sensor, which is fabricated by using the preparation method of the graphene flexible pressure sensor described in Embodiment I or Embodiment II.

[0030] Embodiment IV Based on the graphene flexible pressure sensor described in Embodiment III, this embodiment provides a GIS pressure monitoring method, which uses the graphene flexible pressure sensor described in Embodiment III and includes: Collect gas pressure data in the GIS gas chamber using the graphene flexible pressure sensor cut into the first set shape; Collect tensile force data at the set position of the GIS housing using the graphene flexible pressure sensor cut into the second set shape; Compare the gas pressure data with a preset gas pressure threshold. When the gas pressure data exceeds the preset gas pressure threshold, send a warning signal of too low gas pressure; Process the tensile force data to obtain the stress value at the set position of the GIS housing and compare it with a preset stress threshold. When the stress value at the set position of the GIS housing exceeds the preset stress threshold, send a warning signal of stress overrun.

[0031] Furthermore, it further includes: counting the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold, and comparing it with the preset number threshold. When the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold exceeds the preset number threshold, a fatigue warning signal for the GIS housing is issued.

[0032] Embodiment 5 Based on the graphene flexible pressure sensor described in Embodiment 3, this embodiment provides a GIS pressure monitoring device. Using the graphene flexible pressure sensor described in Embodiment 3, it includes: A gas pressure acquisition module for using the graphene flexible pressure sensor cut into the first set shape to acquire the gas pressure data in the GIS gas chamber; A housing tensile force acquisition module for using the graphene flexible pressure sensor cut into the second set shape to acquire the tensile force data at the set position of the GIS housing; A gas pressure warning module for comparing the gas pressure data with the preset gas pressure threshold, and when the gas pressure data exceeds the preset gas pressure threshold, issuing a warning signal of too low gas pressure; A housing stress warning module for processing the tensile force data to obtain the stress value at the set position of the GIS housing and comparing it with the preset stress threshold. When the stress value at the set position of the GIS housing exceeds the preset stress threshold, issuing a warning signal of stress overrun.

[0033] Furthermore, it further includes: a housing fatigue warning module for counting the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold, and comparing it with the preset number threshold. When the number of times that the stress value at the set position of the GIS housing exceeds the preset stress threshold exceeds the preset number threshold, a fatigue warning signal for the GIS housing is issued.

[0034] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and deformations can be made, and these improvements and deformations should also be regarded as the protection scope of the present invention.

Claims

1. A preparation method of a graphene flexible pressure sensor, characterized in that, Including: Fabricating a graphene pressure-sensitive unit; Encapsulating the graphene pressure-sensitive unit through a flexible substrate to obtain a semi-finished graphene flexible pressure sensor; Cutting the semi-finished graphene flexible pressure sensor to obtain a graphene flexible pressure sensor with a set external shape structure.

2. The preparation method of the graphene flexible pressure sensor according to claim 1, characterized in that, Fabricating a graphene pressure-sensitive unit, including: Immersing paper in a graphene oxide solution with a set concentration to make graphene oxide adhere to the paper; Putting the paper adhered with graphene oxide into an oven for annealing treatment, drying the excess moisture and reducing the graphene oxide to obtain graphene, and finally obtaining a graphene pressure-sensitive unit.

3. The preparation method of the graphene flexible pressure sensor according to claim 1, wherein, On the flexible substrate, there are C-shaped pads for encapsulating the graphene pressure-sensitive unit and copper electrodes for providing a conductive path. Through holes for wires to pass through are provided on the copper electrodes.

4. The preparation method of the graphene flexible pressure sensor according to claim 3, wherein, Encapsulating the graphene pressure-sensitive unit through a flexible substrate, including: Fixing the flexible substrate as the bottom plate on a steel plate through positioning pins; Uniformly applying solder paste in the C-shaped pad area of the flexible substrate as the bottom plate; Covering the graphene pressure-sensitive unit on the copper electrodes of the flexible substrate as the bottom plate; Covering the flexible substrate as the top plate on the graphene pressure-sensitive unit, and aligning the copper electrodes on the flexible substrate as the top plate with the graphene pressure-sensitive unit; Pressing another steel plate on the flexible substrate as the top plate and pressing them together; Using a hot air gun to heat the C-shaped pad area until the solder paste melts, so that the two substrates are mechanically connected.

5. The preparation method of the graphene flexible pressure sensor according to claim 3, characterized in that, Encapsulating the graphene pressure-sensitive unit through a flexible substrate, including: Fixing the flexible substrate as the bottom plate on a steel plate through positioning pins; Covering the graphene pressure-sensitive unit on the copper electrodes of the flexible substrate as the bottom plate; Coating glue in a set area of the flexible substrate as the top plate, covering the flexible substrate as the top plate on the graphene pressure-sensitive unit, and at the same time, aligning the copper electrodes on the flexible substrate as the top plate with the graphene pressure-sensitive unit; Pressing another steel plate on the flexible substrate as the top plate, and completing the encapsulation after the glue cures.

6. The preparation method of the graphene flexible pressure sensor according to claim 1, characterized in that, On the flexible substrate, there is a silk screen pattern for cutting.

7. A graphene flexible pressure sensor, characterized in that, The graphene flexible pressure sensor is fabricated by using the preparation method of the graphene flexible pressure sensor according to any one of claims 1 to 6.

8. A GIS pressure monitoring method, characterized in that, Using the graphene flexible pressure sensor according to claim 7, including: Using the graphene flexible pressure sensor cut into a first set shape to collect the gas pressure data in the GIS gas chamber; Using the graphene flexible pressure sensor cut into a second set shape to collect the tensile force data at a set position of the GIS housing; Comparing the gas pressure data with a preset gas pressure threshold value. When the gas pressure data exceeds the preset gas pressure threshold value, sending out a warning signal of too low gas pressure; Processing the tensile force data to obtain the stress value at a set position of the GIS housing and comparing it with a preset stress threshold value. When the stress value at the set position of the GIS housing exceeds the preset stress threshold value, sending out a warning signal of stress overrun.

9. The GIS pressure monitoring method according to claim 8, wherein Also including: Count the number of times the stress value at the set position of the GIS housing exceeds the preset stress threshold, and compare it with the preset number threshold. When the number of times the stress value at the set position of the GIS housing exceeds the preset stress threshold exceeds the preset number threshold, send a fatigue warning signal for the GIS housing.

10. A GIS pressure monitoring device, characterized in that, The graphene flexible pressure sensor according to claim 7 is adopted, including: A gas pressure acquisition module for acquiring gas pressure data in the GIS gas chamber using the graphene flexible pressure sensor cut into the first set shape; A housing tensile force acquisition module for acquiring tensile force data at the set position of the GIS housing using the graphene flexible pressure sensor cut into the second set shape; A gas pressure warning module for comparing the gas pressure data with a preset gas pressure threshold, and when the gas pressure data exceeds the preset gas pressure threshold, sending a warning signal of too low gas pressure; A housing stress warning module for processing the tensile force data to obtain the stress value at the set position of the GIS housing and comparing it with a preset stress threshold, and when the stress value at the set position of the GIS housing exceeds the preset stress threshold, sending a warning signal of stress overrun; 11. The GIS pressure monitoring device according to claim 10, wherein, It further includes: A housing fatigue warning module for counting the number of times the stress value at the set position of the GIS housing exceeds the preset stress threshold, and comparing it with the preset number threshold. When the number of times the stress value at the set position of the GIS housing exceeds the preset stress threshold exceeds the preset number threshold, sending a fatigue warning signal for the GIS housing.