Device and method for testing performance parameters of multi-scale and multi-angle electroluminescent device

Abstract

The invention discloses a device and a method for testing performance parameters of a multi-scale and multi-angle electroluminescent device. The device comprises a probe station, a photoelectric detection assembly and a rotating assembly, the probe station is used for placing a sample to be tested; the photoelectric detection assembly is used for testing optical parameters of a to-be-tested sample; the photoelectric detection assembly is connected with the rotating assembly, and the rotating assembly is used for driving the photoelectric detection assembly to rotate around the probe station so as to change the relative position and the relative direction of the photoelectric detection assembly and a to-be-tested sample on the probe station. And the photoelectric detection assembly is used for collecting optical signals emitted by the to-be-tested sample in different positions and directions. The photoelectric detection assembly is driven by the rotating assembly to rotate around the to-be-tested sample, so that the photoelectric detection assembly can collect full-space-angle optical signals of the to-be-tested sample, the operation method is simple, the efficiency is high, and the testing precision is high.

Description

Technical Field

[0001] The present invention belongs to the technical field of parameter testing of micro-nano electroluminescent devices, and particularly relates to a device and method for testing performance parameters of multi-scale and multi-angle electroluminescent devices, and more particularly to a device and method for testing performance parameters of multi-scale and multi-angle (angle-resolved) light-emitting transistors. Background Art

[0002] Micro-nano electroluminescent devices refer to electroluminescent devices at the micro-nano scale that need to be tested in cooperation with a focusing and magnifying optical path, such as laser diodes (i.e., semiconductor lasers), light-emitting diodes, light-emitting triodes, etc., which have very important application prospects in the fields of display, lighting, communication, etc. It is crucial to accurately and comprehensively measure the parameters of micro-nano electroluminescent devices. Traditional measurement devices generally first fix the electroluminescent device to be tested, measure the brightness in the normal direction through a luminance meter, and then calculate the overall luminous efficiency of the electroluminescent device based on the Lambertian assumption.

[0003] However, research shows that not all micro-nano electroluminescent devices conform to the Lambertian assumption. For example, for micro-nano electroluminescent devices based on single crystals, due to the optical waveguide effect, there is a relatively strong light output in the transverse direction, which conflicts with the assumption that the transverse light intensity of the Lambertian body is 0. At the same time, since the Lambertian distribution of the device in practice is not a standard cosine distribution and there is a phenomenon of partial non-uniform distribution, the accuracy of the calculated result is relatively low.

[0004] The integrating sphere method uses an integrating sphere detector to collect the overall luminous flux of the electroluminescent device and calculates the EQE (overall external quantum efficiency) of the device, which can effectively improve the defects based on the Lambertian assumption. However, before the light emitted by the light source of the integrating sphere method reaches the light flux collection plate of the integrating sphere detector, it has to go through multiple light emissions and absorptions, resulting in low test sensitivity and inability to measure micro-nano electroluminescent devices with weak signals. In addition, the position of the light source in the integrating sphere has a significant impact on the result, and improper placement is likely to cause a large deviation in the measurement result.

[0005] At the same time, the existing measurement methods also have the following defects: (1) They can only test the optical parameters in a single direction or a small number of directions and the test speed is slow; (2) Usually, they can only test the spectrum and brightness, and the test parameters are single, making it difficult to accurately reflect the performance of the electroluminescent device. Summary of the Invention

[0006] To improve the deficiencies of the existing technology, the present invention provides a device and method for testing performance parameters of multi-scale and multi-angle electroluminescent devices, which can test multiple parameters of the light-emitting transistor device in all directions and at multiple angles, and improve the detection accuracy.

[0007] In a first aspect, the present invention provides a device for testing performance parameters of a multi-scale and multi-angle electroluminescent device, comprising a probe station, a photoelectric detection component, and a rotating component;

[0008] The probe station is used to place the sample to be tested;

[0009] The photoelectric detection component is used to test the optical parameters of the sample to be tested;

[0010] The photoelectric detection component is connected to the rotating component, and the rotating component is used to drive the photoelectric detection component to rotate around the probe station, so as to change the relative position and relative direction between the photoelectric detection component and the sample to be tested on the probe station. The photoelectric detection component is used to collect the optical signals emitted by the sample to be tested at different positions and directions.

[0011] According to an embodiment of the present invention, the sample to be tested is an electroluminescent device, and the electroluminescent device is selected from single-crystalline, thin-film, or powder-type electroluminescent materials.

[0012] According to an embodiment of the present invention, the electroluminescent device is a light-emitting diode or a semiconductor laser. For example, the light-emitting diode is a light-emitting transistor, an organic light-emitting diode, or an organic light-emitting transistor.

[0013] According to an embodiment of the present invention, the photoelectric detection component includes a light incident component, a plurality of beam splitters, and a plurality of testers. The light incident component can collect the light rays incident on the sample to be tested and transmit them to the beam splitters. The beam splitters can convert the light rays from the light collection lens into parallel light and then transmit them to the corresponding testers.

[0014] According to an embodiment of the present invention, the light incident component is selected from components that can collect and transmit light rays from the sample to be tested. For example, it is a transparent lens, preferably an objective lens. The magnification of the objective lens can be switched according to the size of the sample, such as different magnifications of 5×, 10×, 20×, 50×, 100×, etc.

[0015] According to an embodiment of the present invention, the tester is selected from one or more of a spectrometer, a photomultiplier tube, an imaging CCD, a semiconductor tester, and a polarimeter.

[0016] According to an embodiment of the present invention, the tester is connected to an information reading component, and the information reading component is selected from devices that can be connected to the tester and read the test data of the tester. The information reading component is selected from devices such as a computer, a mobile phone, and an engineering machine.

[0017] As an example, the imaging CCD and the spectrometer are connected to a computer.

[0018] According to an embodiment of the present invention, the connection between the tester and the information reading component includes a wired connection and / or a wireless connection, and the wireless connection includes WiFi and Bluetooth.

[0019] According to an embodiment of the present invention, a coupling lens is provided between the photomultiplier tube and the corresponding spectroscope, and the coupling lens is used to focus the parallel light from the spectroscope onto the photomultiplier tube, and the main focus of the coupling of the coupling lens is located at the light entrance of the photomultiplier tube.

[0020] According to an embodiment of the present invention, a coupling lens and an optical fiber are provided between the spectrometer and the corresponding spectroscope, one end of the optical fiber is located at the main focus of the coupling lens, and the other end is connected to the spectrometer.

[0021] According to an embodiment of the present invention, the optical fiber is a bifurcated optical fiber, one bifurcated end of the bifurcated optical fiber is connected to the spectrometer, and the other bifurcated end is connected to the alignment light source.

[0022] According to an embodiment of the present invention, the spectrometer is used to test the spectral information of the sample, and the spectral information includes electro-luminescence spectrum and photo-luminescence spectrum.

[0023] According to an embodiment of the present invention, the alignment light source is used to assist in adjusting the position of the optical fiber to achieve lens coupling of the optical fiber.

[0024] According to an embodiment of the present invention, a coupling lens is provided between the imaging CCD and the corresponding spectroscope, and the main focus of the coupling of the coupling lens is located at the entrance of the imaging CCD, and the coupling lens is, for example, an eyepiece.

[0025] According to an embodiment of the present invention, the photoelectric detection component further includes a housing, and the light incident component and several spectroscopes are arranged inside the housing. Preferably, the photomultiplier tube is located inside the housing.

[0026] According to an embodiment of the present invention, an inclined surface is provided at the bottom of the housing, and the inclined surface is used to prevent the housing from colliding with the probe stage during rotation and expand the sampling range.

[0027] According to an embodiment of the present invention, the imaging CCD and the spectrometer are located inside or outside the housing.

[0028] According to an embodiment of the present invention, the photomultiplier tube is used to test the light intensity of the sample to be tested. Preferably, the photomultiplier tube is connected to a power supply.

[0029] According to an embodiment of the present invention, the probe stage includes an adjustment stage for placing the sample to be tested, and the adjustment stage includes several fixing members, and the fixing members are used to fix the sample to be tested on the adjustment stage.

[0030] According to an embodiment of the present invention, the adjustment stage is a transparent structure or a hollow structure, which is used to realize the measurement of the bottom luminescence of the sample to be tested.

[0031] According to an embodiment of the present invention, the test device further includes an excitation power supply, which is used to excite the sample to be tested to emit light.

[0032] According to an embodiment of the present invention, the excitation power supply is selected from a DC power supply or an AC power supply.

[0033] According to an embodiment of the present invention, the rotation assembly includes a connection part and a rotation part, and the rotation part is connected to the photoelectric detection assembly through the connection part.

[0034] According to an embodiment of the present invention, the connection part is fixedly connected or detachably connected to the photoelectric detection assembly.

[0035] According to an embodiment of the present invention, the rotation part can perform lateral movement, longitudinal movement and rotation relative to the probe stage.

[0036] According to an embodiment of the present invention, the rotation assembly further includes a base, and the base is connected to the connection part through the rotation part.

[0037] According to an embodiment of the present invention, the degree of freedom of the rotation part ≥ 6, preferably the rotation part can rotate arbitrarily, such as a six-axis robotic arm.

[0038] According to an embodiment of the present invention, the six-axis robotic arm includes a base, a rotating platform, a large arm, a connecting arm and a small arm connected in sequence. The bottom of the rotating platform is rotatably connected to the base, the top of the rotating platform is rotatably connected to the lower end of the large arm, the lower end of the connecting arm is rotatably connected to the lower end of the large arm, the upper end of the connecting arm is rotatably connected to the lower end of the small arm, and the upper end of the small arm is connected to the photoelectric detection assembly.

[0039] According to an embodiment of the present invention, the small arm is connected to the housing.

[0040] According to an embodiment of the present invention, the device further includes a controller, and the computer, the rotation assembly, and the excitation light source are connected to the controller.

[0041] According to an embodiment of the present invention, the device further includes a magnetic field adjustment assembly, which is used to change the magnetic field strength of the sample to be detected on the detection stage. Preferably, the magnetic field adjustment assembly includes controllable magnetic fields distributed on the upper and lower parts of the detection stage.

[0042] According to an embodiment of the present invention, the device further includes a temperature condition assembly, and the temperature adjustment assembly is used to change the temperature of the sample to be detected on the detection stage.

[0043] Second aspect, the present invention also provides a method for testing the performance of an electroluminescent device using the above-mentioned testing device, including the following steps:

[0044] Place the device to be tested on the sample probe table to be tested and fix it, excite the device to be tested to emit electroluminescence, and collect the luminescence of the device to be tested at different angles.

[0045] According to an embodiment of the present invention, collecting the luminescence of the device to be tested at different angles includes the following steps: rotating the rotating component to change the relative position between the photoelectric detection component and the device to be tested on the probe table, and staying at each position for 10 μs to 15 s to collect the optical signal at the current position.

[0046] According to an embodiment of the present invention, the residence time at each position is 20 μs to 10 s, preferably the residence time at each position is 100 μs to 5 s, for example, any value among 10 μs, 30 μs, 50 μs, 80 μs, 100 μs, 1 ms, 10 ms, 50 ms, 100 ms, 200 ms, 1 s, 3 s, 5 s, 8 s, 10 s, 12 s, 15 s or any point value within the range value formed by any two point values.

[0047] Beneficial effects

[0048] The present invention drives the photoelectric detection component to rotate around the device to be tested through the rotating component, so that the photoelectric detection component can collect the optical signals of the device to be tested at all spatial angles, and detect parameters such as spectrum, light intensity, spectrum, and polarization degree through a spectrometer, a photomultiplier tube, an imaging CCD, etc. Moreover, the operation method is simple, the efficiency is high, and the test accuracy is high. Description of the drawings

[0049] Figure 1 is a schematic structural diagram of a multi-scale and multi-angle electroluminescent device performance parameter testing device in the present invention;

[0050] Figure 2 is a schematic structural diagram of the photoelectric detection component in the present invention.

[0051] Among them, 1 - rotating component, 2 - photoelectric detection component, 3 - probe table, 4 - light collection lens, 5 - beam splitter, 6 - eyepiece, 7 - imaging CCD, 8 - coupling lens, 9 - optical fiber, 10 - spectrometer, 11 - alignment light source, 12 - photomultiplier tube, 13 - housing. Detailed implementation manners

[0052] The following will further elaborate on the structure of the present invention in conjunction with specific embodiments. It should be understood that the following embodiments are only for illustrative and explanatory purposes of the present invention, and should not be construed as limiting the protection scope of the present invention. All technologies implemented based on the above content of the present invention are covered within the scope of protection intended by the present invention.

[0053] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0054] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0055] Embodiment 1

[0056] See Figure 1 As shown, a performance parameter testing device for a multi-scale and multi-angle electroluminescent device includes a probe station 3, a photoelectric detection component 2, and a rotating component 1.

[0057] The probe station 3 is used to place the sample to be tested. The probe station 3 includes an adjustment table for placing the sample to be tested. The adjustment table includes a number of fixing members for fixing the sample to be tested on the adjustment table. Among them, the adjustment table is a transparent structure or a hollow structure for realizing the measurement of the bottom emission of the sample to be tested.

[0058] In this embodiment, the probe station 3 includes a base. The base is connected to the adjustment table through a support rod. The adjustment table floats on the side away from the base. The position of the adjustment table can be set according to actual needs, and it can be higher than the top of the base or lower than the top of the base. Preferably, it is higher than the top of the base to facilitate the rotation of the photoelectric detection component 2 around the adjustment table without colliding with the base or the support rod.

[0059] The photoelectric detection component 2 is used to test the optical parameters of the sample to be tested. The photoelectric detection group 2 is connected to the rotating component 1. The rotating component 1 is used to drive the photoelectric detection component 2 to rotate around the probe station 3 to change the relative position and relative direction of the photoelectric detection component 2 and the sample to be tested on the probe station 1. The photoelectric detection component 2 can collect light signals emitted from different positions and directions of the sample to be tested.

[0060] See also Figure 2 As shown, the photoelectric detection assembly 2 includes a housing 13, a light collecting lens 4, a plurality of spectroscopes 5 and a plurality of testers. The light collecting lens 4 is arranged outside the housing, such as at the bottom, the spectroscope 5 is arranged inside the housing 13, and the tester is arranged inside or outside the housing 13 according to actual needs.

[0061] The light collecting lens 4 can collect the light incident from the sample to be tested and transmit it to the spectroscope 5, which can convert the light from the light collecting lens 1 into parallel light and then transmit it to the corresponding tester; the light collecting lens 4 is selected from a component that can collect and transmit the light from the sample to be tested, and can be a transparent lens, preferably an objective lens.

[0062] The tester is selected from one or more of a spectrometer 10, a photomultiplier tube 12, and an imaging CCD7. In this embodiment, the photomultiplier tube 12 is located inside the housing 13, and the spectrometer 10 and the imaging CCD7 are located outside the housing 13. An inclined surface is provided at the bottom of the housing 13, and the inclined surface is used to prevent the housing 13 from colliding with the probe station 1 during rotation, thereby expanding the sampling range.

[0063] The photomultiplier tube 12 is used to measure the light intensity. The photomultiplier tube 12 is connected to a power supply. A coupling lens 8 is provided between the photomultiplier tube 12 and the corresponding spectroscope 5. The coupling lens 8 is used to focus the parallel light from the spectroscope 5 onto the photomultiplier tube 12. The main focus of the lens coupling 5 is located at the light entrance of the photomultiplier tube 12.

[0064] The spectrometer 10 is used to test the spectral information of the sample, and the spectral information includes the electrospectral spectrum and the photospectral spectrum; a coupling lens 8 and an optical fiber 9 are arranged between the spectrometer 10 and the corresponding spectroscope 5, one end of the optical fiber 9 is located at the main focus of the coupling lens 8, and the other end is connected to the spectrometer 10; the optical fiber 9 in this embodiment is a forked optical fiber, one forked end of the forked optical fiber is connected to the spectrometer 10, and the other forked end is connected to the alignment light source 11, and the alignment light 11 is used to assist in adjusting the position of the optical fiber 9 to achieve the coupling of the optical fiber 9 to the coupling lens 8.

[0065] An eyepiece 6 is arranged between the imaging CCD 7 and the corresponding beam splitter, and the main focus coupled by the eyepiece 6 is located at the entrance of the imaging CCD 7 .

[0066] The tester is connected to the information reading component. The information reading component is selected from devices that can be connected to the tester and read the test data of the tester. The connection between the tester and the information reading component includes wired connection and / or wireless connection. The wireless connection includes WiFi and Bluetooth. The information reading component is selected from devices such as computers, mobile phones, and engineering machines. For example, it is a computer. The imaging CCD and spectrometer are connected to the computer.

[0067] The rotating component 1 includes a connecting part and a rotating part. The rotating part is connected to the photoelectric detection component 2 through the connecting part. The connecting part is fixedly connected or detachably connected to the photoelectric detection group 2. The rotating part can move laterally, longitudinally, and rotate relative to the probe 3.

[0068] In this embodiment, the rotating component 1 further includes a base. The base is connected to the connecting part through the rotating part. The rotating component 1 is selected from robotic arms. The degree of freedom of movement of the robotic arm is ≥3, preferably a four-axis robotic arm, a five-axis robotic arm, or a six-axis robotic arm. For example, it is a six-axis robotic arm.

[0069] The six-axis robotic arm includes a base, a rotating platform, a large arm, a connecting arm, and a small arm connected in sequence. The bottom of the rotating platform is rotatably connected to the base. The top of the rotating platform is rotatably connected to the lower end of the large arm. The lower end of the connecting arm is rotatably connected to the lower end of the large arm. The upper end of the connecting arm is rotatably connected to the lower end of the small arm. The upper end of the small arm is connected to the photoelectric detection component. The small arm is connected to the housing.

[0070] The sample to be tested in this embodiment is an electroluminescent device. The electroluminescent device includes single-crystal type, thin-film type, and powder type electroluminescent materials. Preferably, the electroluminescent device includes light-emitting diodes, semiconductor lasers, and electroluminescent screens. For example, it is a light-emitting transistor.

[0071] The test device further includes an excitation power source and a controller. The excitation power source is used to excite the sample to be tested to emit light. The excitation power source is selected from a DC power source or an AC power source. The computer, the rotating component, and the excitation light source are all connected to the controller.

[0072] Embodiment 2

[0073] A method for testing the performance of an electroluminescent device using the above test device includes the following steps:

[0074] Place the sample to be tested on the probe table 3 and fix it. Use the excitation light source to excite the sample to be tested to emit electroluminescence, and collect the light emitted by the sample to be tested at different angles.

[0075] Collecting the light emitted by the sample to be tested at different angles includes the following steps: Rotate the photoelectric detection component 2 through the rotating component to change the relative position between the photoelectric detection component 2 and the sample to be tested on the probe table 3, and stay at each position for 10 μs to 15 s and collect the optical signal at the current position.

[0076] In the present invention, a rotating component drives the photoelectric detection component 2 to rotate around the sample to be tested, enabling the photoelectric detection component 2 to collect optical signals at all spatial angles of the sample to be tested, and detecting parameters such as spectrum and light intensity through a spectrometer 10, a photomultiplier tube 12, an imaging CCD 7, etc. The operation method is simple, the efficiency is high, and the test accuracy is high.

[0077] The specific implementation manners of the present invention have been exemplarily described above through embodiments. However, the protection scope of the present invention is not limited to the above exemplary implementation manners. Any modifications, equivalent replacements, improvements, etc. made by those skilled in the art within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A test device for performance parameters of a multi-scale and multi-angle electroluminescent device, characterized in that It includes a probe station, a photoelectric detection component and a rotating component; The probe station is used to place the sample to be tested; The photoelectric detection component is used to test the optical parameters of the sample to be tested; The photoelectric detection component is connected to the rotating component. The rotating component is used to drive the photoelectric detection component to rotate around the probe station to change the relative position and relative direction between the photoelectric detection component and the sample to be tested on the probe station. The photoelectric detection component is used to collect the optical signals emitted from different positions and directions of the sample to be tested.

2. The multi-scale and multi-angle electroluminescent device performance parameter testing apparatus according to claim 1, wherein, The sample to be tested is an electroluminescent device, and the electroluminescent device is selected from single crystal type, thin film type or powder type electroluminescent materials. Preferably, the electroluminescent device is a light-emitting diode or a semiconductor laser.

3. The performance parameter testing device for multi-scale and multi-angle electroluminescent devices according to claim 1, characterized in that The photoelectric detection component includes a light incident component, a plurality of beam splitters and a plurality of testers. The light incident component can collect the light rays incident on the sample to be tested and transmit them to the beam splitters. The beam splitters can convert the light rays from the light collection lens into parallel light and then transmit them to the corresponding testers.

4. The performance parameter testing device for multi-scale and multi-angle electroluminescent devices according to claim 3, wherein, The tester is selected from one or more of a spectrometer, a photomultiplier tube, an imaging CCD, a semiconductor tester, and a polarimeter. Preferably, the tester is connected to an information reading component. The information reading component is selected from devices that can be connected to the tester and read the test data of the tester. The information reading component is selected from devices such as a computer, a mobile phone, and an engineering machine. Preferably, the connection between the tester and the information reading component includes a wired connection and / or a wireless connection.

5. The performance parameter testing device for multi-scale and multi-angle electroluminescent devices according to claim 4, characterized in that, A coupling lens is provided between the photomultiplier tube and the corresponding beam splitter. The coupling lens is used to focus the parallel light from the beam splitter onto the photomultiplier tube. The main focus of the coupling of the coupling lens is located at the light entrance of the photomultiplier tube. Preferably, the spectrometer is used to test the spectral information of the sample, and the spectral information includes electroluminescence spectrum and photoluminescence spectrum. Preferably, a coupling lens and an optical fiber are provided between the spectrometer and the corresponding beam splitter. One end of the optical fiber is located at the main focus of the coupling lens, and the other end is connected to the spectrometer. Preferably, the optical fiber is a bifurcated optical fiber. One bifurcated end of the bifurcated optical fiber is connected to the spectrometer, and the other bifurcated end is connected to an alignment light source.

6. The multi-scale and multi-angle electroluminescence device performance parameter testing apparatus according to claim 4, characterized in that, A coupling lens is provided between the imaging CCD and the corresponding beam splitter. The main focus of the coupling of the coupling lens is located at the entrance of the imaging CCD. Preferably, the photoelectric detection component further includes a housing. The light incident component and a plurality of beam splitters are arranged inside the housing, and the photomultiplier tube is located inside the housing. Preferably, an inclined surface is provided at the bottom of the housing. The inclined surface is used to avoid collision between the housing and the probe station during rotation and expand the sampling range. Preferably, the photomultiplier tube is used to test the light intensity of the sample to be tested. Preferably, the photomultiplier tube is connected to a power supply.

7. The performance parameter testing device for the multi-scale and multi-angle electroluminescent device according to any one of claims 1-6, characterized in that The probe station includes an adjustment table for placing the sample to be tested. The adjustment table includes a plurality of fixing members, and the fixing members are used to fix the sample to be tested on the adjustment table. Preferably, the adjustment table is a transparent structure or a hollow structure for realizing the measurement of the light emission at the bottom of the sample to be tested. Preferably, the test device further includes an excitation power source for exciting the sample to be tested to emit light.

8. The performance parameter testing device for the multi-scale and multi-angle electroluminescent device according to any one of claims 1-6, characterized in that, The rotating assembly includes a connecting portion and a rotating portion, and the rotating portion is connected to the photoelectric detection assembly through the connecting portion. Preferably, the rotating assembly further includes a base, and the base is connected to the connecting portion through the rotating portion. Preferably, the degree of freedom of the rotating portion is ≥6.

9. The performance parameter testing device for multi-scale and multi-angle electroluminescent devices according to claim 8, characterized in that The device further includes a controller, and the computer, the rotating assembly, and the excitation light source are connected to the controller. Preferably, the device further includes a magnetic field adjustment assembly for changing the magnetic field strength of the sample to be detected on the detection table. Preferably, the device further includes a temperature condition assembly for changing the temperature of the sample to be detected on the detection table.

10. A method for testing the performance of an electroluminescent device using the test device according to any one of claims 1-9, comprising the following steps: Place the device to be tested on the sample probe table to be tested and fix it, excite the sample to be tested to perform electroluminescence, and collect the light emitted by the sample to be tested at different angles. Preferably, collecting the light emitted by the sample to be tested at different angles includes the following steps: rotating through the rotating assembly to change the relative position between the photoelectric detection assembly and the sample to be tested on the probe table, and staying at each position for 10 μs to 15 s to collect the optical signal at the current position.

Images