Vacuum adsorption platform and detection device

Abstract

The invention relates to the technical field of semiconductor testing, and provides a vacuum adsorption platform and a detection device. The vacuum adsorption platform comprises an air channel structure and a first adjusting assembly. The air channel structure comprises a plurality of upper-layer air channels arranged at intervals in the first direction and a plurality of lower-layer air channels arranged at intervals in the second direction, and the upper-layer air channels and the lower-layer air channels are arranged in a crossed mode and communicate through air channel holes; the first adjusting assembly is used for adjusting connection and disconnection of the upper-layer air channel and / or the lower-layer air channel, the first adjusting assembly comprises a guide seat provided with an air cavity and a plugging block arranged in the air cavity, and the plugging block is in sealing fit with the cavity wall of the air cavity; wherein one end of the upper-layer air channel or the lower-layer air channel is communicated with the air cavity, and the plugging block can move in the air cavity in the length direction of the air cavity so as to plug or open the upper-layer air channel or the lower-layer air channel. According to the vacuum adsorption platform, operation is convenient, the structure is simplified, the air leakage problem and the noise problem caused by air leakage are obviously solved, and smooth adsorption of the flexible plate is guaranteed.

Description

Technical Field

[0001] The present application relates to the field of semiconductor testing technology, and in particular to a vacuum adsorption platform and a detection device. Background Art

[0002] PCB flexible boards are thin, light, and soft, so during production, manufacturing, and storage, they can easily cause problems such as arching or depression in the middle part of the flexible board and warping in the edge area. In addition, the middle area of the flexible board is also distributed with small holes with irregular spacing.

[0003] Currently, vacuum adsorption platforms are used as carriers for the adsorption and positioning of flexible boards, which facilitates testing of flexible boards. However, because most vacuum adsorption platforms have a fixed adsorption area, when adsorbing and positioning flexible boards of varying sizes, the adsorption area may be larger or smaller than the flexible board, resulting in low compatibility. In particular, when the adsorption area is smaller than the flexible board, the positioning effect is severely affected, and flatness requirements cannot be met.

[0004] To address this issue, related technologies typically utilize a vacuum adsorption platform with an adjustable adsorption area for flexible board positioning. These platforms typically utilize a motor to drive the rotation of multiple adjustment components to adjust the position of the vent holes on each component, thereby opening and closing each adsorption hole on the vacuum adsorption platform and thereby changing the adsorption area. However, because the adsorption holes are disconnected based on the mating and blocking of the adjustment components, repeated rotation and adjustment of the adjustment components can easily cause wear, resulting in a reduced seal with the adsorption holes and a tendency for air leakage. Summary of the Invention

[0005] Based on this, it is necessary to provide a vacuum adsorption platform that is not only easy to operate and has a simplified structure, but also significantly improves the air leakage problem and the noise problem caused by air leakage, and ensures the flat adsorption of the flexible board.

[0006] A vacuum adsorption platform includes an airway structure and a first adjustment component; the airway structure includes a plurality of upper airways arranged at intervals along a first direction and a plurality of lower airways arranged at intervals along a second direction, the upper airways and the lower airways are arranged crosswise and connected through airway holes; the first adjustment component is used to adjust the on and off of the upper airways and / or the lower airways, the first adjustment component includes a guide seat provided with an air cavity and a blocking block provided in the air cavity, the blocking block is sealed with the cavity wall of the air cavity; wherein one end of the upper airway or the lower airway is connected to the air cavity, and the blocking block can move in the air cavity along the length direction of the air cavity to block or open the upper airway or the lower airway.

[0007] It can be understood that the upper air duct and the lower air duct are connected through the air duct hole to achieve the adsorption and fixation of the material. Taking the connection between the lower air duct and the air cavity as an example, it is precisely because the blocking block can move in the air cavity along the length direction of the air cavity that the sealing position of the blocking block in the air cavity can be adjusted, thereby changing the number of lower air ducts located on both sides of the blocking block along the length direction of the air cavity. In this way, the adsorption area of the vacuum adsorption platform can be adjusted, which is conducive to adjusting the adsorption area according to the size of the actual adsorbed material and improving the adsorption and fixation effect. In this process, the adsorption area adjustment can be met only by moving the blocking block, which simplifies the structure and makes the operation more convenient. Moreover, compared with the individual adjustment parts set at each air duct hole, the present application utilizes the cooperation of the blocking block and the guide seat to reduce the number of adjustment parts that need to be adjusted and the sealing structure for sealing, thereby improving the sealing performance, significantly improving the leakage problem and the noise problem caused by leakage, and ensuring the flat adsorption of the flexible board.

[0008] In some embodiments, the guide seat is provided with a vent hole at one end along the length direction of the air cavity, the blocking block divides the air cavity into a vent section and a blocking section connected to the vent hole, the vent section can be connected to the pneumatic source through the vent hole, and the blocking block can move in the air cavity to adjust the length of the vent section.

[0009] In some embodiments, the guide seat is provided with a plurality of communicating holes spaced apart along its length direction, each communicating hole is connected to the air cavity and is respectively connected to one of the upper air ducts or the lower air duct, and one of the plurality of communicating holes can be selectively blocked by the blocking block.

[0010] In some embodiments, the first adjustment assembly further includes an actuating member, which is disposed on the guide seat and is used to drive the blocking block to reciprocate along the length direction.

[0011] In some embodiments, the actuating member and the blocking block are magnetically matched; or, the actuating member and the blocking block are directly connected.

[0012] In some embodiments, at least one of the actuating member and the blocking block is a magnetic body, and the actuating member is provided with a slot adapted to the guide seat.

[0013] In some embodiments, the first adjustment assembly further includes a guide rod, the guide rod is disposed in the air cavity, and the blocking block passes through the guide rod.

[0014] In some embodiments, the first adjustment component corresponds to the lower airway, and the vacuum adsorption platform also includes a second adjustment component, and the second adjustment component corresponds to the upper airway; the second adjustment component includes a driving block that moves back and forth along the first direction and a plurality of adjustment plates arranged at intervals along the first direction, and the driving block can drive the adjustment plate to move along the second direction to block or open the airway hole.

[0015] In some embodiments, the adjustment plate is provided with a plurality of air holes spaced apart along its length, and the adjustment plate is inserted into the upper air duct;

[0016] The adjustment plate can move under the action of the driving block to connect or stagger the air hole with the airway hole.

[0017] In some embodiments, one of the driving block and the adjusting plate is provided with a track groove, and the other is provided with a mating protrusion. Both the track groove and the mating protrusion are provided with mating inclined surfaces, and the mating inclined surfaces are arranged at an acute angle to the first direction. The mating protrusion can be moved into the track groove to drive the adjusting plate to move through the mating inclined surfaces.

[0018] In some embodiments, the vacuum adsorption platform further includes a power source, wherein the power source is connected to the actuating member or the driving block and is used to drive the actuating member or the driving block to move.

[0019] In some embodiments, the air duct structure includes a platform body and a bottom sealing plate and a top sealing plate stacked and pressed on both sides of the platform body in the thickness direction, the upper air duct is arranged between the top sealing plate and the platform body, the lower air duct is arranged between the bottom sealing plate and the platform, the air duct hole is arranged in the platform body, and the top sealing plate is provided with a plurality of spaced adsorption holes connected to the upper air duct.

[0020] The present application also provides a detection device, comprising the above-mentioned vacuum adsorption platform and a detection mechanism, wherein the vacuum adsorption platform has a thickness direction, and the detection mechanism and the vacuum adsorption platform are spaced apart along the thickness direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0022] Figure 1A schematic diagram of a vacuum adsorption platform provided in one embodiment of the present application;

[0023] Figure 2 A cross-sectional view of a vacuum adsorption platform and a blocking block provided in one embodiment of the present application;

[0024] Figure 3 for Figure 2 A partial enlarged view of point A in the middle;

[0025] Figure 4 A partial cross-sectional view of the ventilation section of the vacuum adsorption platform provided in one embodiment of the present application;

[0026] Figure 5 A partial cross-sectional view of a first adjustment component in a vacuum adsorption platform provided in one embodiment of the present application;

[0027] Figure 6 A partially enlarged cross-sectional view of a first adjustment assembly provided in one embodiment of the present application;

[0028] Figure 7 A first partial schematic diagram of a vacuum adsorption platform provided in one embodiment of the present application;

[0029] Figure 8 A schematic diagram of a first adjustment component in a vacuum adsorption platform provided in an embodiment of the present application;

[0030] Figure 9 A cross-sectional view of a vacuum adsorption platform provided in an embodiment of the present application along a second direction;

[0031] Figure 10 for Figure 9 A partial enlarged view of point B in the middle;

[0032] Figure 11 A schematic diagram of a second adjustment component in a vacuum adsorption platform provided in an embodiment of the present application;

[0033] Figure 12 A second partial schematic diagram of the vacuum adsorption platform provided in one embodiment of the present application;

[0034] Figure 13 for Figure 12 A partial enlarged view of point C in the middle;

[0035] Figure 14 A partial exploded view of a vacuum adsorption platform provided in one embodiment of the present application;

[0036] Figure 15 for Figure 14 A partial enlarged view of point D in the middle;

[0037] Figure 16 for Figure 14 A partial enlarged view of point E in the middle.

[0038] Reference numerals: 10, airway structure; 11, platform body; 12, top sealing plate; 13, bottom sealing plate; 20, adjustment assembly; 101, upper airway; 102, lower airway; 103, airway hole; 104, adsorption hole; 210, first adjustment assembly; 211, guide seat; 211a, first end portion; 211b, second end portion; 212, blocking block; 213, actuator; 214, guide rod; 220, second adjustment assembly; 221. Driving block; 222. Adjusting plate; 223. Track groove; 224. Matching protrusion; 225. Matching inclined surface; 230. Power source; 231. Motor; 232. Transmission rod; 233. Transmission belt assembly; 234. Connecting block; 240. Assembly base; 2111. Air cavity; 2111a. Ventilation section; 2111b. Blocking section; 2112. Ventilation hole; 2113. Connecting hole; 2131. Slot; 2221. Air hole. DETAILED DESCRIPTION

[0039] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0040] It should be noted that when a component is referred to as being "fixed to" or "provided on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0041] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0042] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0043] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0044] See also Figures 1 to 5 An embodiment of the present application provides a vacuum adsorption platform, comprising an airway structure 10 and a first adjustment component 210. The airway structure 10 comprises a plurality of upper airways 101 spaced apart along a first direction and a plurality of lower airways 102 spaced apart along a second direction, wherein the upper airways 101 and the lower airways 102 are arranged crosswise and connected through airway holes 103. The first adjustment component 210 is used to adjust the on / off of the upper airways 101 and / or the lower airways 102. The first adjustment component 210 comprises a guide seat 211 provided with an air cavity 2111 and a blocking block 212 provided in the air cavity 2111, wherein the blocking block 212 is sealed with the cavity wall of the air cavity 2111. One end of the upper airway 101 or the lower airway 102 is connected to the air cavity 2111 , and the blocking block 212 can move in the air cavity 2111 along the length direction of the air cavity 2111 to block or open the upper airway 101 or the lower airway 102 .

[0045] It should be noted that the first direction is the X-axis direction, the second direction is the Y-axis direction, and the thickness direction of the vacuum adsorption platform is the Z-axis direction, which is the axial direction of the airway hole 103. Figure 1As shown, multiple upper-layer air ducts 101 are spaced apart along the X-axis, and multiple lower-layer air ducts 102 are spaced apart along the Y-axis. A guide seat 211 is provided on one side of the air duct structure 10 along the X-axis. An air cavity 2111 within the guide seat 211 extends along the Y-axis and communicates with the lower-layer air duct 102, controlling the opening and closing of the lower-layer air duct 102. Of course, the upper-layer air duct 101 can also communicate with the air cavity 2111. In this case, the guide seat 211 is provided on one side of the air duct structure 10 along the Y-axis, and the air cavity 2111 within the guide seat 211 extends along the X-axis. The following example uses the communication between the lower-layer air duct 102 and the air cavity 2111 as an example.

[0046] As can be understood, the upper airway 101 and the lower airway 102 are connected through the airway hole 103 to achieve adsorption and fixation of the material. During this process, because the blocking block 212 can move within the air cavity 2111 along the length of the air cavity 2111 (i.e., the Y-axis), the sealing position of the blocking block 212 within the air cavity 2111 can be adjusted, thereby changing the number of lower airways 102 located on either side of the blocking block 212 along the Y-axis. This allows the vacuum adsorption platform to adjust the adsorption area, facilitating adjustment of the adsorption area based on the actual size of the adsorbed material, thereby improving the adsorption and fixation effect. Moreover, since the adsorption area can be adjusted only by moving the blocking block 212, the structure is simplified and the operation is more convenient. Moreover, compared with setting an adjustment part separately at each airway hole, the blocking block 212 and the guide seat 211 are used in this embodiment to reduce the number of adjustment parts that need to be adjusted and the sealing structure for sealing, thereby improving the sealing performance, significantly improving the leakage problem and the noise problem caused by leakage, and ensuring the smooth adsorption of the flexible board.

[0047] In an alternative embodiment, both the upper airway 101 and the lower airway 102 are provided with a first adjustment assembly 210. The lower airway 102 corresponds to the first blocking block and the first guide seat, while the upper airway 101 corresponds to the second blocking block and the second guide seat. The first blocking block moves along the Y-axis within the first air cavity to change the number of lower airways 102 located on either side of the first blocking block along the Y-axis. Furthermore, the second blocking block moves along the X-axis within the second air cavity to change the number of upper airways 101 located on either side of the second blocking block along the X-axis, thereby adjusting the adsorption area of the vacuum adsorption platform.

[0048] Of course, only the upper air duct 101 may be provided with the first adjustment component 210 .

[0049] It should be noted that if Figures 1 to 3As shown, when only the upper air channel 101 is provided with the first adjustment assembly 210, the size of the adsorption area along the X-axis can be changed. When only the lower air channel 102 is provided with the first adjustment assembly 210, the size of the adsorption area along the Y-axis can be changed. When both the upper air channel 101 and the lower air channel 102 are provided with the first adjustment assembly 210, the sizes of the adsorption area along the X-axis and the Y-axis can be changed.

[0050] Please continue reading Figures 1 to 5 In some embodiments, a vent hole 2112 is provided at one end of the guide seat 211 along the length direction of the air cavity 2111, and the blocking block 212 divides the air cavity 2111 into a vent segment 2111a connected to the vent hole 2112 and a blocking segment 2111b. The vent segment 2111a can be connected to the pneumatic source through the vent hole 2112, and the blocking block 212 can move in the air cavity 2111 to adjust the length of the vent segment 2111a.

[0051] It is understandable that, precisely because multiple lower-layer air channels 102 are connected to the air cavity 2111, when the blocking block 212 divides the air cavity 2111 into the ventilation section 2111a and the blocking section 2111b, some of the lower-layer air channels 102 are connected to the ventilation section 2111a, while others are connected to the blocking section 2111b. Therefore, when the blocking block 212 moves within the air cavity 2111 to adjust the length of the ventilation section 2111a, the length of the blocking section 2111b is also changed, thereby adjusting the number of lower-layer air channels 102 connected to the ventilation section 2111a and the number of lower-layer air channels 102 connected to the blocking section 2111b, thereby satisfying the adjustment of the adsorption area. During adsorption, the vacuum adsorption platform also includes a pneumatic source, which can be connected to the vent hole 2112 on the guide seat 211 through an air pipe to perform suction, thereby causing the multiple lower airways 102 connected to the ventilation section 2111a to be in a vacuum or negative pressure state.

[0052] It should be added that, Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 7As shown, the guide seat 211 has a first end 211a and a second end 211b that are arranged opposite to each other and spaced apart along the length direction of the air cavity 2111, and the first end 211a is provided with a vent 2112. Among the multiple lower-layer air channels 102, there are a first lower-layer air channel and a last lower-layer air channel arranged along the Y-axis direction. The length of the guide seat 211 is greater than the total length of the multiple lower-layer air channels 102 along the Y-axis direction, and the first end 211a and the second end 211b of the guide seat 211 protrude from the first lower-layer air channel and the last lower-layer air channel respectively. In other words, the length of the air cavity 2111 is greater than the total length of the multiple lower-layer air channels 102 along the Y-axis direction, and is provided on both sides of the multiple lower-layer air channels 102 protruding along the Y-axis direction. Therefore, when the blocking block 212 moves to the second end 211b of the guide seat 211 and the end surface of the blocking block 212 abuts against the wall of the air cavity 2111 at that end, only the ventilation section 2111a, and no blocking section 2111b, exists within the air cavity 2111. Conversely, when the blocking block 212 moves to the first end 211a and is pressed against the vent hole 2112, only the blocking section 2111b, and no ventilation section 2111a, exists within the air cavity 2111. This arrangement allows each lower-layer air channel 102 to be used for vacuum adsorption when only the ventilation section 2111a exists within the air cavity 2111, effectively utilizing each lower-layer air channel 102.

[0053] Alternatively, the length of the guide seat 211 may be smaller than the total length of the multiple lower-layer air ducts 102 along the Y-axis direction. In this case, the protruding portions of the multiple lower-layer air ducts 102 relative to the guide seat 211 along the Y-axis direction can be adjusted on and off in other ways, such as valve plate adjustment, etc. This is only used as an example.

[0054] See also Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 8 In some embodiments, the guide seat 211 is provided with a plurality of communication holes 2113 spaced apart along its length. Each communication hole 2113 communicates with the air cavity 2111 and, in turn, with the underlying air duct 102. Each of the plurality of communication holes 2113 can be selectively blocked by the blocking block 212. In other words, the spaced-apart arrangement of the plurality of communication holes 2113 creates a sealing surface between any two adjacent communication holes 2113 in the air cavity 2111, facilitating a seal with the blocking block 212. This improves the sealing effect, minimizes leakage from the venting section 2111a, and prevents the sealing of the blocking section 2111b. This improves the precision of the adsorption area adjustment. Furthermore, since each communication hole 2113 corresponds to a corresponding underlying air duct 102, only the sealing between each communication hole 2113 and the corresponding underlying air duct 102 needs to be considered, reducing the risk of air leakage. Furthermore, the provision of the communication holes 2113 can also provide a drainage effect for the underlying air duct 102.

[0055] The sealing surface on the guide seat 211 for sealing with the blocking block 212 can be in the shape of a "T", an "I", or a "⊥". When the sealing surface is in the "I" shape, the connecting hole 2113 is located in the middle of the guide seat 211 along the Z axis; when the sealing surface is in the "T" shape, the connecting hole 2113 is located in the lower part of the guide seat 211 along the Z axis; when the sealing surface is in the "⊥" shape, the connecting hole 2113 is located in the upper part of the guide seat 211 along the Z axis.

[0056] See also Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 Furthermore, the diameter of each connecting hole 2113 along the Y-axis direction is D, the distance between any two adjacent connecting holes 2113 along the Y-axis direction is L, and the length M of the blocking block 212 along the Y-axis direction satisfies: 0<M≤2D+L.

[0057] Preferably, L≤M≤2D+L is satisfied. Among them, when M=L, that is, the length M of the blocking block 212 along the Y-axis direction is the same as the spacing L between any two adjacent connecting holes 2113. At this time, the sealing surface on the guide block used to seal with the blocking block 212 is in the shape of a "|". In this way, it is only necessary to adjust the blocking block 212 to be located at the interval between any two adjacent connecting holes 2113 to achieve the adjustment of the adsorption area, alleviate the problem that a part of a lower air duct 102 is blocked by the blocking block 212 and the other part is connected to the ventilation section 2111a, thereby ensuring that the flow cross-sections between each lower air duct 102 and the air cavity 2111 are basically consistent, thereby improving the adsorption stability.

[0058] Alternatively, when M = 2D + L, that is, the sum of the length of the blocking block 212 along the Y-axis, the spacing L between any two adjacent connecting holes 2113, and the diameter D of the corresponding two connecting holes 2113. On the one hand, increasing the length of the blocking block 212 helps increase the sealing area between the blocking block 212 and the guide seat 211, improving the sealing performance; on the other hand, it ensures that the flow cross-sections between each lower-level air channel 102 and the air cavity 2111 are consistent, improving adsorption stability. In this case, the sealing surface on the guide seat 211 can be any of the aforementioned "T"-shaped, "I"-shaped, and "⊥"-shaped shapes.

[0059] Of course, when the length M of the blocking block 212 along the Y-axis direction satisfies: L<M<2D+L, the sealing surface on the guide seat 211 is also any one of the aforementioned “T” shape, “I” shape, and “⊥” shape.

[0060] It is understandable that the length of the blocking block 212 should not be too large or too small. If it is too small, the sealing area between the blocking block 212 and the guide seat 211 will be small, weakening the sealing effect, easily causing air leakage, and making it difficult to manufacture. Conversely, if it is too large, the blocking block 212 will occupy too much space in the air cavity 2111, which will be detrimental to adjusting the open and closed state of the lower air duct 102, especially at the first end 211a and the second end 211b, which can easily cause obstruction at the edges. Therefore, by limiting the length of the blocking block 212, the adjustment accuracy can be improved while ensuring the sealing area.

[0061] In other embodiments, a cutout is provided on one side of the guide seat 211 facing the airway structure 10 along the X-axis. The cutout extends along the X-axis to the air cavity 2111, and the length of the cutout along the Y-axis is substantially the same as the length of the multiple lower-layer airways 102 along the Y-axis, so that each lower-layer airway 102 can communicate with the air cavity 2111 through the cutout. The dimension of the cutout along the Z-axis is smaller than the dimension of the air cavity 2111 along the Z-axis to ensure sufficient sealing area between the guide seat 211 and the blocking block 212.

[0062] In some specific embodiments, a sealing ring is sleeved on the outer periphery of the blocking block 212 , or a sealing gasket is adhered to the cavity wall of the air cavity 2111 to improve the sealing effect between the blocking block 212 and the guide seat 211 .

[0063] Furthermore, the airway structure 10 and the guide seat 211 are in surface contact and sealed to reduce the risk of air leakage. For example, a sealing structure such as a sealing ring can be pressed between the two. Alternatively, a portion of the airway structure 10 can extend into the communication hole 2113 of the guide seat 211, or into a cutout of the guide seat 211, and a sealing ring can be pressed in. Any method will suffice as long as it meets the sealing requirements and reduces interference with the movement of the blocking block 212. This is merely an example.

[0064] See also Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 8In some embodiments, the first adjustment assembly 210 further includes an actuator 213, which is disposed on the guide seat 211 and is used to drive the blocking block 212 to reciprocate along its length. It is understood that the actuator 213 is used to drive the blocking block 212 to move, thereby adjusting the lengths of the ventilation section 2111a and the blocking section 2111b, thereby satisfying the adjustment of the adsorption area. In actual use, the actuator 213 is connected to a power source 230 to achieve movement of the actuator 213 along the length of the guide seat 211 (i.e., the length of the air cavity 2111). The movement of the actuator 213 drives the blocking block 212 to move within the air cavity 2111. The power source 230 can be a linear motion module that satisfies linear motion, such as a screw drive, an electric push rod, or a cylinder.

[0065] like Figure 8 As shown, in some specific embodiments, the power source 230 includes a motor 231 and a transmission rod 232 that is transmission-connected to the motor 231. The transmission rod 232 is threadedly connected to the aforementioned actuator 213. The motor 231 drives the transmission rod 232 to rotate, causing the actuator 213 to perform linear reciprocating motion along the axial direction of the transmission rod 232. Specifically, the transmission rod 232 may be threadedly connected to a connecting block 234. The connecting block 234 is slidably connected to a corresponding assembly base 240, and the actuator 213 is fixed to the connecting block 234. When the transmission rod 232 rotates about its own axis under the action of the motor 231, the connecting block 234 is driven to move along the axial direction of the transmission rod 232, causing the actuator 213 to perform linear reciprocating motion along with the connecting block 234.

[0066] The power source 230 further includes a transmission belt assembly 233, which is connected between the motor shaft of the motor 231 and the transmission rod 232 for power transmission. The arrangement of the transmission belt assembly 233 allows the motor 231 and the transmission rod 232 to be arranged parallel to each other, thereby reducing the axial dimension of the power source 230 along the transmission rod 232.

[0067] See Continue Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 8In some embodiments, the actuator 213 and the blocking block 212 are magnetically coupled, that is, the actuator 213 and the blocking block 212 are magnetically attracted to each other, thereby achieving the movement of the blocking block 212. In other words, the actuator 213 and the blocking block 212 adopt a non-contact coupling method, and the two do not need to be directly connected or in direct contact to drive the blocking block 212 to move along the length direction of the air cavity 2111. In addition, the guide seat 211 does not need to be provided with a through hole or other structure for the actuator 213 and the blocking block 212 to adapt, effectively ensuring the sealing of the air cavity 2111. In actual use, at least one of the actuator 213 and the blocking block 212 is a magnetic body, and the actuator 213 is provided with a slot 2131 that adapts to the guide seat 211. The provision of the slot 2131 is used to increase the range of magnetic coupling between the actuator 213 and the blocking block 212, thereby improving the driving stability. For example, the actuating member 213 is provided with a slot 2131 so that the cross section of the actuating member 213 is U-shaped. This configuration enables three magnetic adsorption surfaces to be formed between the actuating member 213 and the blocking block 212, thereby improving driving stability.

[0068] The blocking block 212 can be made of a magnetic metal, and the actuating member 213 can be made of a magnetic body, such as a magnet, etc. Alternatively, both the blocking block 212 and the actuating member 213 can be made of a magnetic body.

[0069] In some alternative embodiments, the actuator 213 is directly connected to the blocking block 212. For example, a connecting arm protrudes from at least one of the actuator 213 and the blocking block 212, directly connecting the actuator 213 and the blocking block 212 via the connecting arm. Retractable baffles are connected between the connecting arm and the first end 211a and the second end 211b of the guide seat 211. The baffles are mounted on the installation channel and serve to block the installation channel. For example, when the actuator 213 drives the blocking block 212 toward the first end 211a via the connecting arm, the baffle between the connecting arm and the first end 211a is retracted, while the baffle between the connecting arm and the second end 211b is extended. Conversely, when the actuator 213 drives the blocking block 212 toward the second end 211b via the connecting arm, the baffle between the connecting arm and the second end 211b is retracted, while the baffle between the connecting arm and the first end 211a is extended. The baffle can be made of a flexible material to facilitate expansion and contraction.

[0070] like Figure 1 、 Figure 3 、 Figure 4 ,and Figure 5As shown, in some embodiments, the first adjustment assembly 210 further includes a guide rod 214, which is disposed in the air cavity 2111, and the blocking block 212 is passed through the guide rod 214. In other words, the provision of the guide rod 214 can guide the movement of the blocking block 212 in the air cavity 2111, so as to ensure that the outer circumference of the blocking block 212 is fully and evenly pressed and sealed with the air cavity 2111, thereby improving the sealing effect and reducing the risk of air leakage. The guide rod 214 is fixed to the guide seat 211, for example, by adhesive fixation or screw fixation. In actual use, the guide seat 211 is provided with an assembly port connected to the air cavity 2111 at one end along the length direction of the air cavity 2111, for disassembly and assembly of the blocking block 212. At the same time, the guide seat 211 is provided with a detachable blocking cover at the assembly port to ensure the sealing of the air cavity 2111. The blocking cover is fixed to the guide rod 214 with screws to improve the assembly reliability of the guide rod 214 and facilitate better guiding of the blocking block 212 .

[0071] like Figures 3 to 6 As shown, the blocking block 212 is provided with a through-hole for the guide rod 214 to pass through, and a stopper assembly is also provided between the guide rod 214 and the blocking block 212 to improve the assembly reliability of the blocking block 212 and the guide rod 214 and to limit the rotation of the blocking block 212 about the axis of the guide rod 214. The stopper assembly includes a stopper groove and a stopper rib, one of which is provided on the outer circumference of the guide rod 214 and the other is provided on the wall of the through-hole. The stopper rib is inserted into the stopper groove. Multiple sets of stopper assemblies are provided and spaced apart along the circumference of the guide rod 214. For example, the outer circumference of the guide rod 214 is provided with a stopper groove extending radially inward, while the wall of the through-hole of the blocking block 212 is provided with a stopper rib extending radially inward. The cooperation between the stopper rib and the stopper groove improves the assembly reliability of the blocking block 212 and the guide rod 214.

[0072] Alternatively, the outer circumferential surface of the guide rod 214 may be provided with a limiting convex strip protruding radially outward, and the hole wall of the through hole may be provided with a limiting groove concave radially outward.

[0073] Furthermore, the limiting groove is an arc-shaped groove, and the limiting convex strip is adapted thereto, which facilitates the movement of the blocking block 212 relative to the guide rod 214 .

[0074] like Figure 3 and Figure 4 As shown, in some embodiments, the cross-section of the air cavity 2111 along the Z-axis direction is quadrilateral, and the cross-section of the blocking block 212 is adapted thereto, thereby limiting the rotation of the blocking block 212 around the guide rod 214 .

[0075] like Figure 1As shown, in actual use, the first adjustment component 210 is provided with an assembly base 240, and the aforementioned guide seat 211, power source 230, etc. are integrated and supported on the assembly base 240, and the assembly base 240 facilitates the assembly of the vacuum adsorption platform with other structures.

[0076] See also Figure 1 、 Figure 3 、 Figure 4 、 Figure 9 、 Figure 10 、 Figure 11 and Figure 12 In some embodiments, the first adjustment component 210 is used to adjust the opening and closing of the lower airway 102, and the vacuum adsorption platform further includes a second adjustment component 220, which is used to adjust the opening and closing of the upper airway 101. The second adjustment component 220 includes a driving block 221 that moves back and forth along a first direction and a plurality of adjustment plates 222 that are spaced apart along the first direction. The driving block 221 can drive the adjustment plates 222 to move along a second direction to block or open the airway hole 103. Figure 1 For example, the driving block 221 can drive the adjustment plate 222 to move along the Y-axis direction to achieve the blocking or opening of the airway hole 103.

[0077] Specifically, each lower-layer air channel 102 corresponds to a plurality of air channel holes 103 spaced apart along the X-axis, and each upper-layer air channel 101 corresponds to a plurality of air channel holes 103 spaced apart along the Y-axis. Therefore, for this vacuum adsorption platform, the plurality of air channel holes 103 are spaced apart along both the X-axis and the Y-axis, i.e., the plurality of air channel holes 103 are spaced apart in a rectangular array.

[0078] by Figure 1The Y-axis direction is the front-to-back direction, the X-axis direction is the left-to-right direction, and the Z-axis direction is the up-down direction. At this time, the blocking block 212 is located at the front part of the air cavity 2111, and the vent hole 2112 is located at the rear part of the air cavity 2111. When the pneumatic source is sucked through the aforementioned vent hole 2112, the lower air duct 102 connected to the vent section 2111a is connected to the rear part of the upper air duct 101 along the Y-axis direction through their respective corresponding air duct holes 103. At this time, the driving adjustment plate 222 is moved along the Y-axis direction so that the air duct holes 103 corresponding to the upper air duct 101 on the right side of the X-axis direction are blocked, while the air duct holes 103 corresponding to the upper air duct 101 on the left side are in an open state. At this time, the adsorption area formed is located in the left rear area of the air duct structure 10. Of course, the drive block 221 can also be used to drive the adjustment plate 222 to move, so that the airway holes 103 corresponding to the portion of the upper airway 101 on the left along the X-axis are blocked, and the airway holes 103 corresponding to the portion of the upper airway 101 on the left are open. In this case, the adsorption area formed is located in the right rear area of the airway structure 10. This is only an example.

[0079] like Figure 3 、 Figure 4 and Figure 10 As shown, in some embodiments, the adjustment plate 222 is provided with a plurality of air holes 2221 spaced apart along its length. The adjustment plate 222 is inserted into the upper airway 101. Under the action of the drive block 221, the adjustment plate 222 can move to connect or dislocate the air holes 2221 with the airway holes 103. It is understood that when the air holes 2221 are connected to the airway holes 103, the upper airway 101 is connected to the lower airway 102 through the airway holes 103, and vacuum suction can be used. Conversely, when the air holes 2221 are dislocated from the airway holes 103, the two are disconnected, the upper airway 101 is disconnected from the lower airway 102, and vacuum suction cannot be used.

[0080] Still Figure 1 Taking the central position as an example, when the adjustment plate 222 moves backward along the Y-axis, the air holes 2221 on the adjustment plate 222 can be disconnected from the corresponding airway holes 103 in the upper airway 101. Conversely, when the adjustment plate 222 moves forward along the Y-axis, the air holes 2221 on the adjustment plate 222 connect with the corresponding airway holes 103 in the upper airway 101. Of course, it is also possible that when the adjustment plate 222 moves forward along the Y-axis, the air holes 2221 are disconnected from the airway holes 103; conversely, when the adjustment plate 222 moves backward, the air holes 2221 connect with the airway holes 103. This is merely an example.

[0081] like Figures 1 to 3As shown, the upper air channel 101 uses the second adjustment assembly 220 to change the size of the adsorption area along the X-axis, while the lower air channel 102 uses the first adjustment assembly 210 to change the size of the adsorption area along the Y-axis. The first adjustment assembly 210 and the second adjustment assembly 220 are collectively referred to as the adjustment assembly 20.

[0082] See also Figure 1 、 Figure 3 、 Figure 4 、 Figure 9 、 Figure 10 and Figure 14 In actual use, the airway structure 10 includes a platform body 11 and a bottom sealing plate 13 and a top sealing plate 12 stacked and pressed on both sides of the platform body 11 in the thickness direction. The upper airway 101 is arranged between the top sealing plate 12 and the platform body 11, the lower airway 102 is arranged between the bottom sealing plate 13 and the platform, the airway hole 103 is arranged on the platform body 11, and the top sealing plate 12 is provided with a plurality of adsorption holes 104 arranged at intervals and connected to the upper airway 101.

[0083] Among them, the top sealing plate 12 is sealed and pressed against the upper surface of the platform body 11, and the bottom sealing plate 13 is sealed and pressed against the lower surface of the platform body 11. Each adsorption hole 104 on the top sealing plate 12 corresponds one to one with each airway hole 103 on the platform body 11, and is coaxially arranged. The adjustment plate 222 is arranged between the adsorption hole 104 and the airway hole 103, so the position of the air hole 2221 relative to the airway hole 103 can be adjusted by moving the adjustment plate 222. When the air hole 2221 is connected to the airway hole 103, the air hole 2221 is also connected to the adsorption hole 104, and is used for vacuum adsorption. When the air hole 2221 is staggered with the airway hole 103, the air hole 2221 is also staggered with the adsorption hole 104 and cannot be used for vacuum adsorption.

[0084] like Figure 1 、 Figure 3 、 Figure 4 、 Figure 14 、 Figure 15 and Figure 16As shown, in some embodiments, the lower surface of the platform body 11 may be provided with a first groove upwardly along the Z-axis direction, and the bottom sealing plate 13 may be pressed onto the lower surface of the platform body 11, and then the first groove and the bottom sealing plate 13 may be used together to enclose the lower air duct 102. At the same time, the lower surface of the top sealing plate 12 may be provided with a second groove upwardly along the Z-axis direction, and the top sealing plate 12 may be pressed onto the upper surface of the platform body 11, and then the second groove and the platform body 11 may be used together to enclose the upper air duct 101. Of course, it is also possible that the upper surface of the platform body 11 may be provided with a second groove downwardly, and the lower surface of the platform body 11 may be provided with a first groove upwardly; or, the upper surface of the platform body 11 and the top sealing plate 12 may both be provided with a second groove, and the lower surface of the platform body 11 and the bottom sealing plate 13 may both be provided with a first groove. As long as it can satisfy the formation of the upper air duct 101 and the lower air duct 102, it is only used as an example here.

[0085] See also Figure 1 、 Figure 3 、 Figure 11 、 Figure 12 and Figure 13 In some embodiments, one of the driving block 221 and the adjustment plate 222 is provided with a track groove 223, and the other is provided with a mating protrusion 224. Both the track groove 223 and the mating protrusion 224 are provided with a mating inclined surface 225. The mating inclined surface 225 is arranged at an acute angle with respect to the first direction. The mating protrusion 224 can be moved into the track groove 223 to drive the adjustment plate 222 to move via the mating inclined surface 225. It can be understood that the provision of the mating inclined surface 225 can convert the linear motion of the driving block 221 along the X-axis into the linear motion of the adjustment plate 222 along the Y-axis, resulting in a simple structure and easy manufacturing.

[0086] Specifically, one end of the adjustment plate 222 along the Y-axis direction protrudes from the corresponding upper airway 101, and the protruding portion cooperates with the driving block 221. The adjustment plate 222 is provided with a mating protrusion 224 on the lower surface of the protruding portion, and the mating protrusion 224 is provided along the Z-axis direction. The upper surface of the driving block 221 is provided with a track groove 223, and the mating inclined surface 225 between the track groove 223 and the mating protrusion 224 is utilized to realize the driving of the adjustment plate 222, thereby changing the adsorption area. Of course, it is also possible that the upper surface of the driving block 221 is provided with a mating protrusion 224, and the lower surface of the adjustment plate 222 is provided with a track groove 223, thereby realizing the movement drive of the adjustment plate 222 along the Y-axis direction.

[0087] like Figure 11As shown, in actual use, the second adjustment assembly 220 is also provided with a corresponding power source 230. The transmission rod 232 in the power source 230 is threadedly connected to the driving block 221 to achieve linear reciprocating drive of the driving block 221. In addition, the second adjustment assembly 220 is also provided with a corresponding assembly base 240, and the power source 230 is mounted on the assembly base 240.

[0088] In summary, in this embodiment, for the lower-layer air channel 102, the linear movement of the blocking block 212 within the air cavity 2111 of the guide seat 211 can be utilized to change the length of the vent segment 2111a, thereby adjusting the number of lower-layer air channels 102 connected to the vent holes 2112, thereby achieving size adjustment of the adsorption area along the Y-axis. For the upper-layer air channel 101, the linear movement of the driving block 221 along the X-axis can be utilized to drive each adjustment plate 222 to move along the Y-axis, thereby causing the air holes 2221 on the adjustment plate 222 to be staggered or connected with the corresponding air channel holes 103, thereby achieving size adjustment of the adsorption area along the X-axis. In this way, the size adjustment of the adsorption area in the Y-axis and X-axis directions can be satisfied, adapting to the adsorption operation of flexible boards of different sizes. Moreover, during the entire adjustment process, one adjustment plate 222 can correspond to multiple airway holes 103, and one blocking block 212 can correspond to multiple lower-layer airways 102, so there is no need to set up separate adjustment parts for each airway hole 103. This not only facilitates operation and simplifies the structure, but also significantly improves the air leakage problem and the noise problem caused by air leakage, ensuring smooth adsorption of the flexible plate.

[0089] Alternatively, the upper air duct 101 may be adjusted on and off by cooperating with the blocking block 212 and the guide seat 211 , and the lower air duct 102 may be adjusted on and off by cooperating with the driving block 221 and the regulating plate 222 .

[0090] Another embodiment of the present application further provides a detection device, comprising the above-mentioned vacuum adsorption platform and detection mechanism, wherein the vacuum adsorption platform has a thickness direction, and the detection mechanism and the vacuum adsorption platform are spaced apart along the thickness direction. Figure 1 As shown, the thickness direction of the vacuum adsorption platform is along the vertical direction, that is, the Z-axis direction, and the detection mechanism is arranged above the vacuum adsorption platform. After the flexible board is adsorbed and fixed by the vacuum adsorption platform, the detection mechanism is used to detect the flexible board. For example, the detection mechanism can be a camera to take pictures of the flexible board and then detect burrs, scratches and other problems on the flexible board. This is just an example. In actual use, the detection device also includes a transport mechanism for transporting the flexible board to the vacuum adsorption platform, and can transport the flexible board on the vacuum adsorption platform to the next process.

[0091] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0092] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A vacuum adsorption platform, characterized in that: include: An airway structure (10) comprising a plurality of upper airways (101) spaced apart along a first direction and a plurality of lower airways (102) spaced apart along a second direction, wherein the upper airways (101) and the lower airways (102) are arranged crosswise and communicate with each other through airway holes (103); a first adjustment assembly (210) for adjusting the opening and closing of the upper airway (101) and / or the lower airway (102); the first adjustment assembly (210) comprises a guide seat (211) provided with an air cavity (2111) and a blocking block (212) provided in the air cavity (2111); the blocking block (212) is in sealing engagement with a cavity wall of the air cavity (2111); One end of the upper airway (101) or the lower airway (102) is connected to the air cavity (2111), and the blocking block (212) can move in the air cavity (2111) along the length direction of the air cavity (2111) to block or open the upper airway (101) or the lower airway (102).

2. The vacuum adsorption platform according to claim 1, characterized in that: The guide seat (211) is provided with a vent hole (2112) at one end along the length direction of the air cavity (2111); the blocking block (212) divides the air cavity (2111) into a vent section (2111a) connected to the vent hole (2112) and a blocking section (2111b); the vent section (2111a) can be connected to a pneumatic source through the vent hole (2112); and the blocking block (212) can move within the air cavity (2111) to adjust the length of the vent section (2111a).

3. The vacuum adsorption platform according to claim 1, characterized in that: The guide seat (211) is provided with a plurality of communication holes (2113) spaced apart along its length direction, each of the communication holes (2113) being connected to the air cavity (2111) and respectively connected to one of the upper air ducts (101) or the lower air duct (102), and one of the plurality of communication holes (2113) can be selectively blocked by the blocking block (212).

4. The vacuum adsorption platform according to claim 1, characterized in that: The first adjustment assembly (210) further includes an actuating member (213), wherein the actuating member (213) is disposed on the guide seat (211) and is used to drive the blocking block (212) to move back and forth along the length direction.

5. The vacuum adsorption platform according to claim 4, characterized in that: The actuating member (213) and the blocking block (212) are magnetically matched; or, the actuating member (213) and the blocking block (212) are directly connected.

6. The vacuum adsorption platform according to claim 4, characterized in that: At least one of the actuating member (213) and the blocking block (212) is a magnetic body, and the actuating member (213) is provided with a slot (2131) adapted to the guide seat (211).

7. The vacuum adsorption platform according to claim 1, characterized in that: The first adjustment assembly (210) further comprises a guide rod (214), wherein the guide rod (214) is disposed in the air cavity (2111), and the blocking block (212) is passed through the guide rod (214).

8. The vacuum adsorption platform according to claim 1, characterized in that: The first adjustment component (210) corresponds to the lower airway (102), and the vacuum adsorption platform further includes a second adjustment component (220), and the second adjustment component (220) corresponds to the upper airway (101); The second adjustment assembly (220) comprises a driving block (221) that reciprocates along the first direction and a plurality of adjustment plates (222) that are spaced apart along the first direction, wherein the driving block (221) is capable of driving the adjustment plates (222) to move along the second direction to block or open the airway hole (103).

9. The vacuum adsorption platform according to claim 8, characterized in that: The regulating plate (222) is provided with a plurality of air holes (2221) spaced apart along its length direction, and the regulating plate (222) is inserted into the upper air duct (101); The regulating plate (222) can move under the action of the driving block (221) so that the air hole (2221) and the airway hole (103) are connected or staggered.

10. The vacuum adsorption platform according to claim 8, characterized in that: One of the driving block (221) and the adjusting plate (222) is provided with a track groove (223), and the other is provided with a matching protrusion (224). Both the track groove (223) and the matching protrusion (224) are provided with a matching inclined surface (225). The matching inclined surface (225) is arranged at an acute angle with the first direction. The matching protrusion (224) can move into the track groove (223) to drive the adjusting plate (222) to move via the matching inclined surface (225).

11. The vacuum adsorption platform according to claim 4 or 8, characterized in that: The vacuum adsorption platform further comprises a power source (230), wherein the power source (230) is connected to the actuating member (213) or the driving block (221) and is used to drive the actuating member (213) or the driving block (221) to move.

12. The vacuum adsorption platform according to claim 1, characterized in that: The airway structure (10) includes a platform body (11) and a bottom sealing plate (13) and a top sealing plate (12) stacked and pressed on both sides of the platform body (11) in the thickness direction, the upper airway (101) is arranged between the top sealing plate (12) and the platform body (11), the lower airway (102) is arranged between the bottom sealing plate (13) and the platform, the airway hole (103) is arranged in the platform body (11), and the top sealing plate (12) is provided with a plurality of adsorption holes (104) arranged at intervals and connected to the upper airway (101).

13. A detection device, characterized in that: The detection device comprises the vacuum adsorption platform and the detection mechanism according to any one of claims 1 to 12, the vacuum adsorption platform has a thickness direction, and the detection mechanism and the vacuum adsorption platform are spaced apart along the thickness direction.

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