A rotary combined scanning probe microscope and method of measurement

Abstract

The application discloses a rotary combined scanning probe microscope and a measuring method, which comprises a mirror body frame, a first scanning unit, a rotary probe switching unit and a second scanning unit; the upper end of the first scanning unit is fixed to the upper end of the mirror body frame, and the lower end of the first scanning unit is a free end, so that three-dimensional scanning can be realized; the rotary probe switching unit is arranged at the lower end of the mirror body frame and comprises a rotary round table, an inverted mounting sleeve and a first probe vibration frame; the inverted mounting sleeve is fixed to the rotary round table and coaxial with the rotary round table, and the first probe vibration frame is located at the upper end of the inverted mounting sleeve; and the second scanning unit is fixed to the rotary round table. The application can realize flexible switching of probes during testing, complete multi-mode measurement in one sample loading, is particularly suitable for extreme environments with long test preparation period and high cost, such as low temperature and strong magnetic field, and is helpful to improve measuring efficiency and significantly reduce test cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of scanning probe microscopy, and particularly relates to a rotary combined scanning probe microscope and a measurement method suitable for extreme environments such as low temperature, vacuum and strong magnetic field. BACKGROUND

[0002] Under extreme experimental conditions such as low temperature, strong magnetic field and ultra-high vacuum, in-situ measurement of nanostructures or microscopic objects is an important research method in the fields of physics, materials science and superconductivity. To achieve these conditions, the experimental system usually includes a low-temperature refrigeration device, a magnet system and a vacuum cavity, and is equipped with multiple layers of thermal insulation, magnetic shielding and precise sample positioning structure. The space is very limited when the system is running, the available volume inside the cavity is small, and the installation and replacement of probes, sensors and driving components face great limitations.

[0003] In addition, due to the long time-consuming of refrigeration and vacuum pumping, the experimental preparation period is usually measured in days, and the operation cost of using liquid helium, superconducting magnets and other equipment is relatively high. Under such conditions, if the probe needs to be frequently replaced or the measurement instrument needs to be switched, not only the experimental time is prolonged, but also the system error is easily introduced or the sample state is damaged, increasing the risk of experimental interruption. Therefore, when carrying out multi-modal and high-resolution measurement in extreme environments, how to integrate multiple functions in a limited space and achieve efficient switching of probes or functional units is a key problem in current system design.

[0004] Scanning probe microscopes are important tools for frontier scientific research and ultra-precision industrial manufacturing, and their multi-modal imaging capabilities, such as atomic force microscopy, scanning tunneling microscopy and magnetic force microscopy, have been widely used in normal temperature environments. However, under low temperature and vacuum conditions, the integration of multi-modal functions is significantly more difficult. This is because the conventional multi-modal combined microscope has a large size, and the space is very limited in extreme environments. In addition, the compatibility of strong magnetic field and vacuum low temperature also puts forward strict requirements on the design of the structure of the combined scanning probe microscope, the selection of materials, and the overall rigidity. Therefore, although multi-modal imaging combined scanning probe microscopes are common in room temperature environments, scanning probe microscope systems for extreme environments are mostly single mode, and there is currently a lack of practical multi-modal scanning probe imaging mode integrated combined microscope systems in low temperature and vacuum or strong magnetic environments, especially in terms of imaging resolution and low temperature and strong magnetic compatibility.

[0005] Therefore, there is an urgent need for a compact scanning probe combined microscope imaging tool that can complete multi-modal measurement in one sample loading and adapt to low temperature and vacuum or strong magnetic conditions to meet the urgent needs of advanced material characterization and basic scientific research. SUMMARY

[0006] The present application aims to overcome the above technical deficiencies, and provides a rotating combined scanning probe microscope and a measurement method suitable for extreme environments such as low temperature, vacuum or strong magnetism. The present application is compact in structure, integrates a double scanning unit and a rotating probe switching mechanism, and can complete multi-modal measurement in one sample loading. The present application fully considers the volume limitation and functional integration requirement in extreme environments, overcomes the problems of traditional systems such as difficulty in considering multi-modal and imaging performance susceptible to interference, and is suitable for high-resolution measurement of material surface structure and electronic characteristics under extremely low temperature, strong magnetic field and ultra-high vacuum conditions.

[0007] The present application adopts the following technical solutions:

[0008] A rotating combined scanning probe microscope comprises a mirror body outer frame, a first scanning unit, a rotating probe switching unit and a second scanning unit. The upper end of the first scanning unit is fixed to the upper end of the mirror body outer frame, and the lower end of the first scanning unit is a free end, which can realize three-dimensional scanning. The rotating probe switching unit is arranged at the lower end of the mirror body outer frame and comprises a rotating circular table, an inverted mounting sleeve and a first probe vibration frame. The inverted mounting sleeve is fixed to the rotating circular table and coaxial with the rotating circular table. The first probe vibration frame is located at the upper end of the inverted mounting sleeve. The second scanning unit is fixed to the rotating circular table and surrounded by the inverted mounting sleeve. A second probe frame is arranged at the upper end of the second scanning unit. The first probe vibration frame and the second probe frame can synchronously rotate around the axis of the rotating circular table.

[0009] Preferably, the mirror body outer frame is a hollow frame structure arranged vertically, and through holes are arranged at the upper end and the lower end of the mirror body outer frame.

[0010] Preferably, the first scanning unit comprises a first piezoelectric tube, a motor ring, a slide bar, a sample stage, a sleeve and a first spring piece. The motor ring is arranged at the through hole at the upper end of the mirror body outer frame. The upper end of the first piezoelectric tube is fixed to the motor ring, and the lower end of the first piezoelectric tube points to the rotating probe switching unit. The sleeve is nested at the inner wall of the lower end of the first piezoelectric tube. The slide bar is located in the interior of the sleeve and is pressed against the inner wall of the sleeve through the first spring piece arranged between the slide bar and the sleeve. The slide bar is provided with the sample stage at the bottom end, which is used for mounting a sample to be measured.

[0011] Preferably, the rotating probe switching unit further comprises a rotating sleeve, a terminal rotating shaft, a shear piezoelectric stack, a friction block and a second spring piece. The rotating sleeve is arranged in the through hole at the lower end of the mirror body outer frame and forms a rotating cooperation structure with the terminal rotating shaft. The second spring piece is arranged between the rotating sleeve and the terminal rotating shaft. The rotating circular table is located at the upper end of the terminal rotating shaft. The shear piezoelectric stack is fixed to the bottom of the mirror body outer frame. The friction block is fixed to the top of the shear piezoelectric stack and is in close contact with the side surface of the rotating circular table.

[0012] As preferred, the shear piezoelectric stack, the friction block, the rotating circular platform, the end rotating shaft, the rotating sleeve and the second spring sheet constitute a stick-slip inertial rotary displacement table.

[0013] As preferred, the second scanning unit comprises a second piezoelectric tube and a needle rack table, the lower end of the second piezoelectric tube is placed on the rotating circular platform, the needle rack table is placed on the upper end of the second piezoelectric tube and a second probe rack is arranged in the middle of the needle rack table, the second probe rack passes through the through hole of the inverted mounting sleeve and does not contact the inverted mounting sleeve.

[0014] The application also provides an operation method applied to the rotary combined scanning probe microscope, which comprises the following steps:

[0015] 1) after the first probe, the second probe and the sample to be measured are respectively installed on the first probe vibration rack, the second probe rack and the sample table, the rotary probe switching unit is driven to rotate until the first probe or the second probe directly faces the sample to be measured in the vertical direction, and the second probe or the first probe is staggered with the sample to be measured in the vertical direction;

[0016] 2) the first scanning unit is driven to approach the sample to be measured downward, and the approaching is stopped when the sample to be measured and the first probe or the second probe reach a set distance;

[0017] 3) the first mode or the second mode test is started until the first mode or the second mode test is completed;

[0018] 4) the first scanning unit is driven to move the sample to be measured upward until the first probe and the second probe are away from the sample to be measured by a safe distance;

[0019] 5) the rotary probe switching unit is driven to rotate until the second probe or the first probe directly faces the sample to be measured, and the first probe or the second probe is staggered with the sample to be measured in the vertical direction;

[0020] 6) the first scanning unit is driven to approach the sample to be measured downward, and the approaching is stopped when the sample to be measured and the second probe or the first probe reach a set distance;

[0021] 7) the second mode or the first mode test is started until the second mode or the first mode test is completed;

[0022] 8) the first scanning unit is driven to move the sample to be measured upward until the first probe and the second probe are away from the sample to be measured by a safe distance, and the test is completed.

[0023] Compared with the prior art, the present application provides a rotary combined scanning probe microscope, which adopts the overall architecture of combining a double scanning unit with a rotary probe switching module, has the advantages of compact structure, adaptation to extreme environment, etc., and can realize multi-modal in-situ measurement under various harsh experimental conditions, and has the following beneficial effects:

[0024] Firstly, the microscope of the present application has small volume and high overall rigidity, and the structural design fully considers the adaptability to space-limited environments such as low temperature, strong magnetism and ultra-high vacuum, and is suitable for experimental scenes under extreme physical conditions. In the complex experimental process of liquid helium cooling, high magnetic field scanning or ultra-high vacuum imaging, the traditional equipment is often difficult to meet the requirements of continuity and environmental adaptability due to its large size and inconvenient switching. The present application realizes the integration of multifunctional units in a limited cavity space by integrating a double scanning unit and a rotary switching module, and provides a solution for multi-modal in-situ research under extreme conditions.

[0025] Secondly, compared with the traditional method of repeated sample injection, vacuum pumping and low temperature cooling, the present system can complete multiple modal tests in one refrigeration or vacuum pumping process, effectively shortening the experimental preparation period, reducing the consumption of liquid helium and other experimental resources, and significantly saving experimental cost.

[0026] Thirdly, the double scanning units are spatially isolated in structure, avoiding mechanical coupling between them during imaging, and improving the image quality of the system, especially for imaging modes with atomic resolution such as scanning tunneling microscope.

[0027] Fourthly, the system design of the present application fully considers the integration requirements of high-field experimental platforms, and has good platform compatibility and operation stability. The overall structure is compact and has small radial size, and can be directly installed in a high magnetic field and low temperature integrated test platform for operation, without the need for frequent disassembly and replacement of probes, avoiding problems such as sample contamination and positioning error caused by repeated operation, and greatly improving the experimental efficiency and consistency of sample data.

[0028] In summary, the present application effectively solves the core bottleneck problems of existing multi-modal scanning probe microscopy technology in extreme experimental environments, such as difficulty in functional integration, difficulty in probe switching and poor spatial adaptability, and has good practical value and promotion prospect. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 Figure 1 is a schematic diagram of the overall structure of a rotary combined scanning probe microscope of the present application.

[0030] Figure 2 Figure 2 is a schematic diagram of the structure of the first scanning unit of a rotary combined scanning probe microscope of the present application.

[0031] Figure 3A structure sectional view of a first scanning unit of a rotary combined scanning probe microscope according to the present application.

[0032] Figure 4 A structure schematic view of a rotary probe switching unit of a rotary combined scanning probe microscope according to the present application.

[0033] Figure 5 A structure schematic view of a second scanning unit of a rotary combined scanning probe microscope according to the present application.

[0034] Figure 6 A top view of a rotary probe switching unit of a rotary combined scanning probe microscope according to the present application.

[0035] Figure 7 A driving waveform diagram of a rotary probe switching unit of a rotary combined scanning probe microscope according to the present application.

[0036] In the figure, 100: mirror body outer frame; 200: first scanning unit; 300: rotary probe switching unit; 400: second scanning unit; 201: motor ring; 202: sleeve; 203: first piezoelectric tube; 204: slide bar; 205: first spring piece; 206: sample table; 301: first probe; 302: first probe vibration frame; 303: inverted mounting sleeve; 304: rotary round table; 305: end rotating shaft; 306: friction block; 307: shear piezoelectric stack; 308: second spring piece; 309: rotary sleeve; 401: second probe; 402: second probe frame; 403: needle frame table; 404: second piezoelectric tube. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative effort fall within the protection scope of the present application.

[0038] The two test modes in the specific embodiments of the rotary combined scanning probe microscope according to the present application are scanning tunneling microscope and atomic force microscope test modes respectively, and the probe used by the atomic force microscope is a piezoresistive probe.

[0039] A rotary combined scanning probe microscope comprises a mirror body frame 100, a first scanning unit 200, a rotary probe switching unit 300, and a second scanning unit 400. The mirror body frame 100 is a vertically arranged hollow frame structure, and its upper end and lower end are provided with through holes. The first scanning unit 200 is fixed at the upper end of the mirror body frame 100, and the rotary probe switching unit 300 is arranged at the lower end of the mirror body frame 100, as shown in Figure 1 .

[0040] The first scanning unit comprises a motor ring 201, a sleeve 202, a first piezoelectric tube 203, a sliding rod 204, a first spring sheet 205, and a sample stage 206. The motor ring 201 is fixedly installed at the upper end through hole of the mirror body frame 100. The upper end of the first piezoelectric tube 203 is fixed on the motor ring 201. The lower end of the first piezoelectric tube 203 is a free end and points to the rotary probe switching unit 300. The sleeve 202 is fixed at the lower end of the first piezoelectric tube 203 and is embedded in the first piezoelectric tube 203. The sliding rod 204 is arranged in the sleeve 202 and is pressed against the inner wall of the sleeve 202 through the first spring sheet 205 arranged between the sliding rod 204 and the sleeve 202. The lower end of the sliding rod 204 is provided with the sample stage 206, and a sample to be measured is installed thereon, as shown in Figure 2 , Figure 3 .

[0041] In addition, the electrode structure of the first piezoelectric tube 203 is that the inner electrode is integrated, and the outer electrode is equally divided. The inner electrode is set as a Z-direction electrode. The two electrodes at opposite positions of the outer electrode are set as a +X-direction electrode and a -X-direction electrode, respectively. The other two electrodes at opposite positions are set as a +Y-direction electrode and a -Y-direction electrode, respectively.

[0042] The first piezoelectric tube 203, the sliding rod 204, the sleeve 202, and the first spring sheet 205 constitute a stick-slip type inertial driving mechanism. By applying a sawtooth wave driving signal of a specific frequency to the inner electrode of the first piezoelectric tube 203, as shown in Figure 7 , at the voltage mutation stage of the sawtooth wave driving signal, the first piezoelectric tube 203 instantaneously expands and contracts rapidly, drives the sleeve 202 to produce rapid movement, and the sliding rod 204 remains relatively stationary due to inertia, resulting in relative sliding. At the voltage slow change stage of the sawtooth wave driving signal, the first piezoelectric tube 203 slowly deforms, and the sliding rod 204 and the sleeve 202 realize synchronous movement under the action of friction. Through the "stick-slip" cycle process, the sliding rod 204 can realize step-by-step displacement in the vertical direction, thereby realizing controllable coarse adjustment of the approach between the sample and the probe in the combined microscope.

[0043] By applying different control signals to the five electrodes of the first piezoelectric tube 203, scanning motion in XYZ three-axis direction can be realized. Specifically: the inner electrode is used to drive Z direction displacement; a pair of electrodes in the outer electrode located in +X and -X direction control X axis displacement; a pair of electrodes in the outer electrode located in +Y and -Y direction control Y axis displacement. Through the above control mode, the first scanning unit can perform precise scanning motion in X, Y, Z three directions, realizing the high resolution imaging function of the atomic force microscope in the combination microscope.

[0044] The rotating probe switching unit 300 includes a rotating circular table 304, a terminal rotating shaft 305, an inverted mounting sleeve 303, a rotating circular table 304 bottom, a terminal rotating shaft 305, a rotating sleeve 309, a shear piezoelectric stack 307, a friction block 306, and a second spring plate 308. The rotating circular table 304 is provided below the terminal rotating shaft 305, the rotating sleeve 309 is fixed in the lower end through hole of the mirror body outer frame 100, and forms a rotating cooperation structure with the terminal rotating shaft 305. The second spring plate 308 is located between the rotating sleeve 309 and the terminal rotating shaft 305, used to pre-tighten the rotating sleeve 309 and the terminal rotating shaft 305. The terminal rotating shaft 305 is limited to only rotate. The inverted mounting sleeve 303 is fixed on the rotating circular table 304 and coaxial with the rotating circular table 304. The shear piezoelectric stack 307 is fixed at the bottom of the mirror body outer frame 100, and the friction block 306 is fixed at the top of the shear piezoelectric stack 307 and is in close contact with the outer surface of the rotating circular table 304. The inverted mounting sleeve 303 has a hole at the top, as shown in Figure 4

[0045] The second scanning unit 400 includes a second probe 401, a second probe holder 402, a needle holder table 403, and a second piezoelectric tube 404. The second piezoelectric tube 404 is fixed at the bottom of the rotating circular table 304, the second piezoelectric tube 404 is provided with a needle holder table 403 at the top, the second probe holder 402 is fixed on the needle holder table 403, and the second probe holder 402 passes through the through hole at the top of the inverted mounting sleeve 303 and does not contact the inverted mounting sleeve 303. The second probe is a Pt / Ir wire needle tip, as shown in Figure 5 The second scanning unit 400 is surrounded by the inverted mounting sleeve 303 and does not contact the inverted mounting sleeve 303.

[0046] ​The electrode structure of the second piezoelectric tube 404 is integrated with the inner electrode and divided into four equal parts by the outer electrode. The inner electrode is set as the Z-direction electrode, and the two electrodes opposite in position in the outer electrode are set as the +X-direction electrode and the -X-direction electrode, respectively. The other two electrodes opposite in position in the outer electrode are set as the +Y-direction electrode and the -Y-direction electrode, respectively. By applying different control signals to the five electrodes of the second piezoelectric tube 404, scanning movement in the XYZ three-axis direction can be realized. Specifically, the inner electrode is used to drive the Z-direction displacement; one pair of electrodes in the outer electrode located in the +X and -X directions controls the X-axis displacement; and one pair of electrodes in the outer electrode located in the +Y and -Y directions controls the Y-axis displacement. Through the above control mode, the first scanning unit can perform precise scanning movement in the X, Y and Z three directions, realizing the high-resolution imaging function of the scanning tunneling microscope in the combined microscope.

[0047] This dual scanning unit ensures that the imaging signals of each mode do not interfere with each other during actual measurement.

[0048] The shear piezoelectric stack 307, the friction block 306, the rotating circular platform 304, the second spring plate 308, the end rotating shaft 305 and the rotating sleeve 309 constitute a stick-slip inertial rotary displacement table. By applying a sawtooth wave driving signal of a specific frequency to the shear piezoelectric stack 307, the shear piezoelectric stack 307 instantaneously deforms rapidly at the voltage mutation stage of the sawtooth wave driving signal, driving the friction block 306 to move rapidly, while the whole composed of the rotating circular platform 304, the inverted mounting sleeve 303 and the second scanning unit 400 remains relatively stationary due to inertia, and the friction block 306 and the rotating circular platform 304 produce relative sliding. At the voltage slowly changing stage of the sawtooth wave driving signal, the shear piezoelectric stack 307 slowly deforms, and the whole composed of the rotating circular platform 304, the inverted mounting sleeve 303 and the second scanning unit 400 rotates relative to the rotating shaft under the action of friction, thereby driving the inverted mounting sleeve 303 and the second scanning unit 400 to rotate synchronously. Through this "stick-slip" cycle process, the rotary probe switching unit 300 can be rotated relative to the shaft, as shown in Figure 6 The waveform of the sawtooth wave driving signal is shown in Figure 7 .

[0049] When the atomic force microscope probe, i.e. the first probe 301, and the scanning tunneling microscope probe, i.e. the second probe 401, are mounted on the first probe vibration frame 302 and the second probe frame 402, respectively, the first probe 301 and the second probe 401 are adjusted to be arranged on the same center with the end rotating shaft 305, as shown in Figure 6 , so that the two probes can be aligned in turn to the position of the sample to be measured during the rotary motion of the rotary probe switching unit 300, facilitating the realization of multi-modal imaging, as shown in Figure 6 .

[0050] The measurement method is suitable for a multi-mode scanning probe microscopy system integrated with an atomic force microscope and a scanning tunneling microscope, and steps are as follows:

[0051] 1) After the installation of the first probe 301, the second probe 401 and the sample to be measured, the rotary probe switching unit 300 is driven to rotate the first probe 301 to the upper side of the sample to be measured, and the second probe 401 is vertically offset from the sample to be measured to avoid the first probe 301 and the second probe 401 contacting the sample to be measured at the same time after approaching again.

[0052] 2) The first scanning unit 200 is started to control the sample to approach downward along the vertical direction, and gradually approach the first probe 301; the approaching is stopped when the distance between the sample and the first probe 301 reaches a set threshold.

[0053] 3) In the state that the first probe 301 and the sample are in stable contact or near-field coupling, the atomic force microscope imaging mode is executed until the measurement task is completed.

[0054] 4) The first scanning unit 200 is driven to move the sample upward until the first probe 301 and the second probe 401 are both at a safe distance from the sample to ensure a non-contact state.

[0055] 5) The rotary probe switching unit 300 is driven again to rotate the second probe 401 to the upper side of the sample, and the first probe 301 is vertically avoided to ensure spatial offset.

[0056] 6) The first scanning unit 200 is started to slowly approach the second probe 401 along the vertical direction; through tunneling current feedback control, the sample movement is stopped when the tunneling current reaches a set value.

[0057] 7) The scanning tunneling microscope imaging mode is executed until the measurement process is completed.

[0058] 8) The first scanning unit 200 is driven to control the sample to move upward in the vertical direction until the sample is at a position where the first probe 301 and the second probe 401 are both at a safe distance, and the entire multi-mode measurement process is completed.

[0059] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any changes or replacements that can be easily thought of by those skilled in the art within the scope disclosed by the present application should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A rotary combined scanning probe microscope, characterized by, The utility model relates to a multi-mode probe scanning device, which comprises a mirror body frame (100), a first scanning unit (200), a rotary probe switching unit (300) and a second scanning unit (400); the upper end of the first scanning unit (200) is fixed to the upper end of the mirror body frame (100), and the lower end of the first scanning unit (200) is a free end; the rotary probe switching unit (300) is arranged at the lower end of the mirror body frame (100), and comprises a rotary circular table (304), an inverted mounting sleeve (303) and a first probe vibration frame (302); the inverted mounting sleeve (303) is fixed to the rotary circular table (304) and coaxial with the rotary circular table (304); the first probe vibration frame (302) is arranged at the upper end of the inverted mounting sleeve (303); the second scanning unit (400) is fixed to the rotary circular table (304) and surrounded by the inverted mounting sleeve (303); a second probe frame (402) is arranged at the upper end of the second scanning unit (400); the first probe vibration frame (302) and the second probe frame (402) can synchronously rotate around the axis of the rotary circular table (304). When the first probe (301) and the second probe (401) are arranged on the first probe vibration frame (302) and the second probe frame (402) respectively, the first probe (301) and the second probe (401) are adjusted to be arranged at the same center with respect to the end rotating shaft (305) in space; during the rotary motion of the rotary probe switching unit (300), the two probes can be aligned with the position of the sample to be measured in turn, so that multi-mode imaging is realized.

2. A rotary combined scanning probe microscope according to claim 1, wherein The mirror body frame (100) is a hollow frame structure arranged vertically, and the upper end and the lower end of the mirror body frame (100) are provided with through holes.

3. A rotary combined scanning probe microscope according to claim 2, wherein, The first scanning unit (200) comprises a first piezoelectric tube (203), a motor ring (201), a slide bar (204), a sample stage (206), a sleeve (202) and a first spring sheet (205); the motor ring (201) is arranged at the upper end through hole of the mirror body frame (100); the upper end of the first piezoelectric tube (203) is fixed to the motor ring (201), and the lower end of the first piezoelectric tube (203) points to the rotary probe switching unit (300); the sleeve (202) is embedded in the inner wall of the lower end of the first piezoelectric tube (203); the slide bar (204) is arranged in the sleeve (202) and is pressed against the inner wall of the sleeve (202) through the first spring sheet (205) arranged between the slide bar (204) and the sleeve (202); and the bottom end of the slide bar (204) is provided with the sample stage (206).

4. A rotary combined scanning probe microscope according to claim 3, wherein, The rotating probe switching unit (300) further comprises a rotating sleeve (309), a terminal rotating shaft (305), a shear piezoelectric stack (307), a friction block (306) and a second spring sheet (308); the rotating sleeve (309) is arranged in a through hole at the lower end of the mirror body frame (100) and forms a rotating cooperation structure with the terminal rotating shaft (305); the second spring sheet (308) is arranged between the rotating sleeve (309) and the terminal rotating shaft (305); the rotating circular platform (304) is located at the upper end of the terminal rotating shaft (305); the shear piezoelectric stack (307) is fixed to the bottom of the mirror body frame (100); and the friction block (306) is fixed to the top of the shear piezoelectric stack (307) and is in contact with the side surface of the rotating circular platform (304).

5. A rotary combined scanning probe microscope according to claim 4, wherein, The second scanning unit (400) comprises a second piezoelectric tube (404) and a needle rack table (403); the lower end of the second piezoelectric tube (404) is arranged on the rotating circular platform (304); the needle rack table (403) is arranged at the upper end of the second piezoelectric tube (404) and is provided with a second probe rack (402) in the middle part; the second probe rack (402) passes through the through hole of the inverted mounting sleeve (303) and does not contact the inverted mounting sleeve (303).

6. An operating method applied in a rotating combined scanning probe microscope according to any one of claims 1-5, characterized in that The method comprises the following steps: 1) After the first probe (301), the second probe (401) and the sample to be tested are respectively arranged on the first probe vibration rack (302), the second probe rack (402) and the sample table (206), the rotating probe switching unit (300) is driven to rotate until the first probe (301) or the second probe (401) is vertically opposite to the sample to be tested; 2) The first scanning unit (200) is driven to approach the sample to be tested downward, and the approaching is stopped when the sample to be tested reaches a set distance from the first probe (301) or the second probe (401); 3) The first scanning unit (200) is driven to start the first mode test or the second scanning unit (400) is driven to start the second mode test until the first mode test or the second mode test is completed; 4) The first scanning unit (200) is driven to move the sample to be tested upward until the first probe (301) and the second probe (401) are both away from the sample to be tested by a safe distance, and then the driving is stopped; 5) The rotating probe switching unit (300) is driven to rotate until the second probe (401) or the first probe (301) is vertically opposite to the sample to be tested; 6) The first scanning unit (200) is driven to approach the sample to be tested downward, and the approaching is stopped when the sample to be tested reaches a set distance from the second probe (401) or the first probe (301); 7) The second scanning unit (400) is driven to start the second mode test or the first scanning unit (200) is driven to start the first mode test until the second mode test or the first mode test is completed; 8) The first scanning unit (200) is driven to move the sample to be tested upward until the first probe (301) and the second probe (401) are both away from the sample to be tested by a safe distance, and then the driving is stopped.

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