Probe testing device and testing method

Abstract

The embodiment of the invention discloses a probe testing device and a probe testing method. The probe testing device comprises a bottom plate on which a first testing surface is formed; the base is mounted on the top surface of the bottom plate; the sliding block is arranged on the base in a sliding mode in the vertical direction, the bottom face of the sliding block is provided with a connecting part used for being connected with a probe card, the bottom face of the sliding block is provided with a second testing face opposite to the first testing face in the vertical direction, and the second testing face is used for abutting against the probe tail of the probe card; the adjusting part is mounted on the base; provided is a perspective imaging device. According to the embodiment of the invention, through the cooperation of the adjusting part and the locking structure, the position of the sliding block can be fixed after the sliding block is adjusted to the set height, and at the moment, image acquisition of perspective imaging equipment is matched, so that a real-time deformation image of the probe compressed to a set state can be obtained; the material and the structure of the probe are analyzed and optimized by recording the deformation image, so that the method is more reliable and effective.

Description

Technical Field

[0001] The present application relates to the field of probe testing technology, and in particular to a probe testing device and a testing method. Background Art

[0002] In the semiconductor testing field, probe cards serve as a critical interface for chip testing, and their performance directly impacts test accuracy and reliability. 2D MEMS probes have become the mainstream test probe type due to their high current resistance, low contact force, and high durability. They consist of two guide plates with micro-holes, one on top and one on the bottom. The probe body passes through the guide hole to form the probe tip, with its ends contacting the wafer and the gold-plated points on the PCB, respectively.

[0003] During the test, the probe will produce elastic deformation under the action of pressure. Since the needle body itself is designed with a curvature, the deformation state is different under different pressures. Currently, the deformation of the needle body cannot be directly observed after different pressures are applied to the needle body. Because the needle body returns to its original shape after the pressure is removed during normal testing, transient deformation cannot be captured, resulting in poor reliability of the test results and difficulty in effectively optimizing the structure and material of the needle body. Summary of the Invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a probe testing device and testing method to solve the problem that after testing the probe, the pressure must be removed to observe the deformation of the probe, and the transient deformation of the probe body cannot be directly captured.

[0005] In a first aspect, the present application provides a probe testing device, comprising: A bottom plate, wherein a first test surface is formed on the bottom plate, and the first test surface is used to abut against the needle tip of the probe card; a base, mounted on the top surface of the base plate; a slider slidably disposed on the base in a vertical direction, the bottom surface of the slider having a connection portion for connecting to a probe card, and the bottom surface of the slider having a second test surface disposed vertically opposite to the first test surface, the second test surface being configured to abut against a needle tail of the probe card; an adjusting member, mounted on the base, wherein a movable end of the adjusting member abuts against the slider and is used to provide vertical downward pressure to the slider; The locking structure includes a first locking structure and / or a second locking structure; the first locking structure is provided between the slider and the base and / or the second locking structure is provided on the adjusting member; The perspective imaging device is arranged toward the first test surface and the second test surface and is used to obtain the status of the probes on the probe card.

[0006] Based on the probe testing device, the first test surface on the base plate and the second test surface on the slider can respectively abut against the tip and tail of the probe on the probe card, thereby achieving fixation and squeezing of both ends of the probe. Through the cooperation of the adjusting part and the locking structure, the slider can be adjusted to the set height to achieve position fixation. At this time, in conjunction with the fluoroscopic imaging equipment, a real-time deformation image of the probe compressed to the set state can be obtained. It is more reliable and effective to analyze and optimize the material and structure of the probe by recording such deformation images.

[0007] Optionally, a gold-plated layer is provided on the second test surface for contacting with the needle tail of the probe card.

[0008] Furthermore, based on the above-mentioned gold plating layer, it can not only protect the needle tail, but also simulate the environment in which the needle tail and the PCB gold-plated point are against each other when the probe card is actually used, further improving the accuracy and reliability of the test.

[0009] Optionally, an annular connection block is provided on the circumference of the second test surface, and a receiving groove for receiving at least part of the needle tails of the probe card is formed at the center of the annular connection block, and the annular connection block is used to connect the probe card.

[0010] Furthermore, based on the annular connecting block, not only a connection structure with the probe card can be formed, but also a receiving groove for accommodating the needle tail of the probe card can be formed, so that the part of the needle tail protruding from the probe card can smoothly abut against the second test surface at the bottom of the receiving groove.

[0011] Optionally, a ceramic plate for abutting against a needle tip of a probe card is provided on the first test surface.

[0012] Furthermore, based on the above ceramic plate, the needle tip of the probe card can be protected and the environment in which the needle tip and the wafer are in contact when the probe card is actually used can be simulated, thereby further improving the accuracy and reliability of the test.

[0013] Optionally, the slider is connected to the base via an elastic member, and the elastic member provides a vertical upward elastic force for the slider.

[0014] Furthermore, based on the above elastic member, after the adjusting member releases the downward pressure of the slider, the slider can return to the upper limit position, and when the adjusting member applies pressure to the slider, the elastic force in the opposite direction provided by the elastic member can make the sliding of the slider more stable.

[0015] Optionally, the slider also includes a vertically arranged slide plate and a horizontally arranged connecting plate, the slide plate and the connecting plate are connected to form an L-shaped folding plate structure, the slide plate and the base slide together in the vertical direction, and the bottom surface of the connecting plate forms the second test surface.

[0016] Optionally, a first guide plate and a second guide plate are provided between the slide and the base, the first guide plate is connected to the slide, and the second guide plate is connected to the base; The first guide plate is arranged between the second guide plate and the base, and the two side surfaces of the first guide plate along the vertical direction are respectively slidably matched with the second guide plate and the base; the second guide plate is arranged between the first guide plate and the slide plate, and the two side surfaces of the second guide plate along the vertical direction are respectively slidably matched with the first guide plate and the slide plate.

[0017] Furthermore, based on the arrangement of the first guide plate and the second guide plate, a multi-layer guide structure can be formed between the slider and the base, thereby improving the stability of the slider during sliding.

[0018] Optionally, the bottom of the second guide plate and the base are connected via a limiting member, and the limiting member cooperates with the bottom of the first guide plate to limit positioning in the vertical direction.

[0019] Furthermore, based on the arrangement of the above-mentioned limiting member, it is possible to prevent the second test surface from applying excessive pressure to the probe tail of the probe card to damage the probe.

[0020] In a second aspect, the present application provides a probe testing method using the probe testing device as described above, comprising the following steps: S1. Use the adjusting piece to raise the slider to the upper limit position; S2. Install the probe card onto the second test surface of the slider, ensuring that all probe tails are against the second test surface; S3. Use the adjusting member to lower the slider to a position where all needle tips abut against the first test surface; S4. Use the adjusting member to lower the slider to a set height, and fix the height of the slider by the locking structure; S5. Use a fluoroscopic imaging device to obtain deformation images of all probes.

[0021] Based on the above-mentioned test method, the first test surface on the base plate and the second test surface on the slider can be respectively abutted against the tip and tail of the probe on the probe card, thereby achieving fixation and squeezing of both ends of the probe. Through the cooperation of the adjusting part and the locking structure, the slider can be adjusted to the set height to achieve position fixation. At this time, in conjunction with the image acquisition of the fluoroscopic imaging device, a real-time deformation image of the probe compressed to the set state can be obtained. It is more reliable and effective to analyze and optimize the material and structure of the probe by recording such deformation images.

[0022] Optionally, after step S5, the following steps are further included: S6, repeating steps S4-S5 until a specific number of probe deformation state image acquisitions are completed; S7. Overlay or arrange the images of the probe at specific times in the same picture, and analyze the deformation data of the probe to obtain multiple sets of deformation data of the probe after multiple probe tests.

[0023] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects: The first test surface on the base plate and the second test surface on the slider can be respectively abutted against the tip and tail of the probe on the probe card, thereby achieving fixation and squeezing of both ends of the probe. Through the cooperation of the adjusting part and the locking structure, the slider can be adjusted to a set height to achieve position fixation. At this time, in conjunction with the image acquisition of the fluoroscopic imaging device, a real-time deformation image of the probe compressed to the set state can be obtained. It is more reliable and effective to analyze and optimize the material and structure of the probe by recording such deformation images.

[0024] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The disclosure of this application will be more easily understood with reference to the accompanying drawings. Those skilled in the art will readily appreciate that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the figures represent similar components, where: Figure 1 This is a schematic structural diagram of the probe testing device according to an embodiment of the present application, omitting the perspective imaging device; Figure 2 This is a front view of the probe testing device according to an embodiment of the present application, omitting the perspective imaging device; Figure 3 A side view of the probe testing device according to an embodiment of the present application; Figure 4 This is a structural diagram of the bottom of the slider according to an embodiment of the present application; Figure 5 This is a flow chart of the probe testing method described in an embodiment of the present application.

[0026] Description of Reference Numerals 1. Bottom plate; 11. Ceramic plate; 2. Base; 3. Slider; 31. Gold-plated layer; 32. Ring connecting block; 33. Slide plate; 34. Connecting plate; 4. Adjusting member; 5. Fluoroscopic imaging device; 6. Probe card; 71. First guide plate; 72. Second guide plate; 8. Limiting member. DETAILED DESCRIPTION

[0027] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application.

[0028] Currently, the deformation of the needle body cannot be directly observed each time different pressures are applied to the needle body. This is because during normal testing, the needle body returns to its original shape after the pressure is removed, and transient deformation cannot be captured. This leads to poor reliability of the test results and makes it difficult to effectively optimize the structure and material of the needle body.

[0029] Based on this, the present application provides a probe testing device and a testing method, in which the first test surface on the base plate and the second test surface on the slider can respectively abut against the tip and tail of the probe on the probe card, thereby achieving fixation and squeezing of both ends of the probe. Through the cooperation of the adjusting part and the locking structure, the slider can be adjusted to a set height to achieve position fixation. At this time, in conjunction with the shooting of the fluoroscopic imaging device, a real-time deformation image of the probe compressed to a set state can be obtained. It is more reliable and effective to analyze and optimize the material and structure of the probe by recording such deformation images.

[0030] The present application will be described in detail below through specific embodiments.

[0031] Reference Figures 1 to 4 As shown, this embodiment provides a probe test device, including: a base plate 1, a first test surface formed on the base plate 1, the first test surface is used to abut against the needle tip of the probe card 6, wherein the probe card 6 can be a 2D MEMS probe card; a base 2, mounted on the top surface of the base plate 1; a slider 3, slidably arranged on the base 2 in the vertical direction, the bottom surface of the slider 3 having a connecting portion for connecting to the probe card 6, and the bottom surface of the slider 3 having a second test surface arranged opposite to the first test surface in the vertical direction, the second test surface being used to abut against the needle tail of the probe card 6; an adjusting member 4, mounted on the base 2, the movable end of the adjusting member 4 abutting against the slider 3, and being used to provide vertical downward pressure to the slider 3; a first locking structure is provided between the slider 3 and the base 2 and / or a second locking structure is provided on the adjusting member 4; a perspective imaging device 5, arranged facing the first test surface and the second test surface, and being used to obtain the status of the probe on the probe card 6. It should be understood that the image receiving device of the perspective imaging device 5 is arranged facing the first test surface and the second test surface, specifically, the first test surface and the second test surface are arranged opposite to each other in the vertical direction, and the image receiving device is arranged in the horizontal direction, so as to shoot the side of the needle body on the probe card 6.

[0032] The probe testing device provided in this embodiment utilizes the first test surface on the base plate 1 and the second test surface on the slider 3 to respectively abut against the tip and tail of the probe on the probe card 6, thereby achieving fixation and squeezing of both ends of the probe. Through the cooperation of the adjusting member 4 and the locking structure, the slider 3 can be adjusted to a set height to achieve position fixation. At this time, in conjunction with the shooting of the fluoroscopic imaging device 5, a real-time deformation image of the probe compressed to a set state can be obtained. It is more reliable and effective to analyze and optimize the material and structure of the probe by recording such deformation images.

[0033] In some embodiments, the fluoroscopic imaging device 5 needs to have the function of penetrating the probe card 6, part of the slider 3 and part of the base 2. Specifically, it can be an X-ray imaging device or a gamma-ray imaging device, etc. The specific selection can be based on the material of the slider 3, the base 2 and the probe card 6. As long as the imaging is clear and the obtained probe deformation information is accurate, it can be fine.

[0034] In some embodiments, a gold-plated layer 31 is provided on the second test surface for contact with the probe tail of the probe card 6 .

[0035] Furthermore, based on the above-mentioned gold-plated layer 31, it can not only protect the needle tail, but also simulate the environment in which the needle tail and the PCB gold-plated point are against each other when the probe card 6 is actually used, thereby further improving the accuracy and reliability of the test.

[0036] Optionally, an annular connecting block 32 is provided on the peripheral side of the second test surface, and a receiving groove for accommodating at least part of the needle tail of the probe card 6 is formed at the center of the annular connecting block 32. The depth of the receiving groove matches the height of the protruding needle tail of the probe card 6. The annular connecting block 32 is used to connect the probe card 6, wherein the annular connecting block 32 refers to the protruding structure on the peripheral side of the receiving groove for connecting the probe card 6. The annular connecting block 32 can be integrally formed with the connecting plate 33 or can be connected by bolt connection, bonding, etc.

[0037] Furthermore, based on the annular connecting block 32, not only a connection structure with the probe card 6 can be formed, but also a receiving groove for accommodating the needle tail of the probe card 6 can be formed, so that the part of the needle tail protruding from the probe card 6 can be stably abutted against the second test surface at the bottom of the receiving groove.

[0038] Continue to refer to Figure 2 and Figure 3 As shown, a ceramic plate 11 for abutting against the needle tip of the probe card 6 is provided on the first test surface.

[0039] Furthermore, based on the above-mentioned ceramic plate 11, the needle tip of the probe card 6 can be protected and the environment where the needle tip and the wafer are in contact when the probe card 6 is actually used can be simulated, thereby further improving the accuracy and reliability of the test.

[0040] In some embodiments, the material of the base plate 1 can be metal or marble, etc., and the ceramic plate 11 arranged on the first test surface at least partially protrudes from the top surface of the base plate 1. Such a setting can prevent the base plate 1 made of other materials such as marble or metal from affecting the image formation when the perspective imaging device 5 is working.

[0041] Optionally, the slider 3 is connected to the base 2 via an elastic member, and the elastic member provides a vertical upward elastic force for the slider 3 .

[0042] Furthermore, based on the above-mentioned elastic member, after the adjusting member 4 releases the downward pressure on the slider 3, the slider 3 can be restored to the upper limit position, and when the adjusting member 4 applies pressure to the slider 3, the elastic force in the opposite direction provided by the elastic member can be used to make the sliding of the slider 3 more stable.

[0043] Optionally, the slider 3 also includes a vertically arranged slide plate 33 and a horizontally arranged connecting plate 34. The slide plate 33 and the connecting plate 34 are connected to form an L-shaped folding plate structure. The slide plate 33 and the base 2 slide together in the vertical direction, and the bottom surface of the connecting plate 34 forms a second test surface.

[0044] Continue to refer to Figure 1 、 Figure 2 and Figure 4 As shown, a first guide plate 71 and a second guide plate 72 are provided between the skateboard 33 and the base 2, the first guide plate 71 is connected to the skateboard 33, and the second guide plate 72 is connected to the base 2; the first guide plate 71 is arranged between the second guide plate 72 and the base 2, and the two side surfaces of the first guide plate 71 are respectively slidably matched with the second guide plate 72 and the base 2, and the second guide plate 72 is arranged between the first guide plate 71 and the skateboard 33, and the two side surfaces of the second guide plate 72 are respectively slidably matched with the first guide plate 71 and the skateboard 33.

[0045] Furthermore, based on the arrangement of the first guide plate 71 and the second guide plate 72 , a multi-layer guide structure can be formed between the slider 3 and the base 2 , thereby improving the stability of the slider 3 during sliding.

[0046] Optionally, the bottom of the second guide plate 72 and the base 2 are connected by a limit member 8, and the limit member 8 cooperates with the bottom of the first guide plate 71 to limit the vertical direction. It should be understood that the second guide plate 72, the limit member 8 and the base 2 together form a U-shaped structure, and the bottom bend of the U-shaped structure can limit the bottom of the first guide plate 71. The limit member 8 can also be set between the slider 3 and the second guide plate 72, and the limit member 8 can also be set between the slider 3 and the base 2, as long as the slider 3 can be limited in the vertical direction. Specifically, the maximum displacement of the slider 3 in the vertical direction can be 120μm.

[0047] Furthermore, based on the arrangement of the limiting member 8 , it is possible to prevent the second test surface from applying excessive pressure to the probe tail of the probe card 6 and damaging the probe.

[0048] In some embodiments, the adjusting member 4 can be a precision knob, and the telescopic end can be extended and retracted in the vertical direction by rotating the knob. Specifically, the threaded structure inside the precision knob is a self-locking thread, thereby forming a second locking structure; in other implementations, a screw nut that can adjust the tightness of the connection between the slider 3 and the base 2 can be provided at the connection between the slider 3 and the base 2 as a first locking structure, and the cooperation of multiple locking points and locking pins arranged in the vertical direction can also be used as the first locking structure.

[0049] Continue to refer to Figures 1 to 5 In a second aspect, the present application provides a probe testing method using the above probe testing device, comprising the following steps: S1. Use the adjusting member 4 to raise the slider 3 to the upper limit position; S2. Install the probe card 6 onto the second test surface of the slider 3, ensuring that all probe tails abut against the second test surface; S3. Use the adjusting member 4 to lower the slider 3 until all the needle tips abut against the first test surface. "Abutting against" in steps S2 and S3 refers to a state where the needle tip and needle tail just touch the first test surface and the second test surface, respectively, but neither is deformed. S4. Use the adjusting member 4 to lower the slider 3 to a set height, and fix the height of the slider 3 by the first locking structure or the second locking structure; S5. Use the fluoroscopic imaging device 5 to obtain deformation images of all probes.

[0050] Based on the above-mentioned test method, the first test surface on the base plate 1 and the second test surface on the slider 3 can be respectively abutted against the tip and tail of the probe on the probe card 6, thereby achieving fixation and squeezing of both ends of the probe. Through the cooperation of the adjusting member 4 and the locking structure, the slider 3 can be adjusted to a set height to achieve position fixation. At this time, in conjunction with the image acquisition of the fluoroscopic imaging device 5, a real-time deformation image of the probe compressed to the set state can be obtained. It is more reliable and effective to analyze and optimize the material and structure of the probe by recording such deformation images.

[0051] Furthermore, after step S5, the following steps are also included: S6, repeating steps S4-S5 until a specific number of probe deformation state image acquisitions are completed; S7. Superimpose or arrange the images of the probe at a specific number of times in the same picture, and analyze the deformation data of the probe to obtain multiple sets of deformation data of the probe after multiple probe tests; in some embodiments, the image acquisition module of the perspective imaging device 5 can be used to first acquire the real-time deformation image of the probe, and then store the image in its internal or external data storage module, and finally use the data processing module to adjust the transparency of all acquired images, and superimpose them layer by layer in sequence, so that the probes in all images can form continuous deformation images in one picture or use the data processing module to arrange all acquired images in sequence in one picture to form continuous deformation images. Finally, the staff conducts a comprehensive analysis of multiple continuous deformation images to optimize the material and structural morphology of the probe.

[0052] Furthermore, before step S5, the base plate 1 needs to be placed on the observation station of the fluoroscopic imaging device 5, and the fluoroscopic imaging device 5 is set facing the side of the probe, which refers to the side where the obvious deformation state of the probe can be obtained when the probe is deformed.

[0053] Optionally, step S4 and step S6 are specifically as follows: the slider 3 is lowered by 5 μm using the adjusting part 4 for the first time, and the height of the slider 3 is lowered by 5 μm each time the adjusting part 4 is used thereafter. It should be understood that after the needle tip and needle tail of the probe card 6 are respectively against the first test surface and the second test surface, the adjusting part 4 presses the needle tail down by 5 μm each time, completing a locking fixation to obtain the deformation image of the probe, thereby forming a continuous observation image.

[0054] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0056] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A probe testing device, characterized in that: include: A base plate (1), wherein a first test surface is formed on the base plate (1), and the first test surface is used to abut against the needle tip of the probe card (6); A base (2) is mounted on the top surface of the bottom plate (1); A slider (3) is arranged on the base (2) for sliding in a vertical direction, the bottom surface of the slider (3) having a connection portion for connecting to a probe card (6), and the bottom surface of the slider (3) is provided with a second test surface arranged opposite to the first test surface in a vertical direction, the second test surface being used to abut against the needle tail of the probe card (6); An adjusting member (4) is mounted on the base (2), wherein a movable end of the adjusting member (4) abuts against the slider (3) and is used to provide vertical downward pressure to the slider (3); A locking structure, comprising a first locking structure and / or a second locking structure, wherein the first locking structure is provided between the slider (3) and the base (2) and / or the second locking structure is provided on the adjusting member (4); A perspective imaging device (5) is arranged toward the first test surface and the second test surface and is used to obtain the status of the probes on the probe card (6).

2. The probe testing device according to claim 1, wherein: The second test surface is provided with a gold-plated layer (31) for abutting against the needle tail of the probe card (6).

3. The probe testing device according to claim 2, wherein: An annular connecting block (32) is provided on the peripheral side of the second test surface, and a receiving groove for receiving at least part of the needle tail of the probe card (6) is formed at the center of the annular connecting block (32). The annular connecting block (32) is used to connect the probe card (6).

4. The probe testing device according to claim 1, wherein: A ceramic plate (11) for abutting against the needle tip of the probe card (6) is provided on the first test surface.

5. The probe testing device according to claim 1, wherein: The slider (3) is connected to the base (2) via an elastic member, and the elastic member provides a vertical upward elastic force for the slider (3).

6. The probe testing device according to any one of claims 1 to 5, characterized in that: The slider (3) further comprises a vertically arranged slide plate (33) and a horizontally arranged connecting plate (34), wherein the slide plate (33) and the connecting plate (34) are connected to form an L-shaped folding plate structure, the slide plate (33) and the base (2) are slidably engaged in the vertical direction, and the bottom surface of the connecting plate (34) forms the second test surface.

7. The probe testing device according to claim 6, characterized in that: A first guide plate (71) and a second guide plate (72) are provided between the slide plate (33) and the base (2), wherein the first guide plate (71) is connected to the slide plate (33), and the second guide plate (72) is connected to the base (2); The first guide plate (71) is arranged between the second guide plate (72) and the base (2), and the two side surfaces of the first guide plate (71) along the vertical direction are respectively slidably matched with the second guide plate (72) and the base (2); the second guide plate (72) is arranged between the first guide plate (71) and the slide plate (33), and the two side surfaces of the second guide plate (72) along the vertical direction are respectively slidably matched with the first guide plate (71) and the slide plate (33).

8. The probe testing device according to claim 7, wherein: The bottom of the second guide plate (72) and the base (2) are connected via a limiting member (8), and the limiting member (8) cooperates with the bottom of the first guide plate (71) to limit position in the vertical direction.

9. A probe testing method using the probe testing device according to any one of claims 1 to 8, characterized in that: The steps include: S1. Use the adjusting member (4) to raise the slider (3) to the upper limit position; S2, installing the probe card (6) onto the second test surface of the slider (3), ensuring that all needle tails are against the second test surface; S3, using the adjusting member (4), adjusting the slider (3) to descend to a position where all needle tips abut against the first test surface; S4, using the adjusting member (4) to lower the slider (3) to a set height, and fixing the height of the slider (3) by means of a locking structure; S5. Use the fluoroscopic imaging device (5) to obtain deformation images of all probes.

10. The testing method according to claim 9, characterized in that: After step S5, the method further includes the following steps: S6, repeating steps S4-S5 until a specific number of probe deformation state image acquisitions are completed; S7. Overlay or arrange the images of the probe at specific times in the same picture, and analyze the deformation data of the probe to obtain multiple sets of deformation data of the probe after multiple probe tests.

Images