Semiconductor process logistics management system using power line communication

Abstract

The invention relates to a semiconductor process logistics management system, in particular to a semiconductor process logistics management system using power line communication. The semiconductor process logistics management system according to the present invention comprises: a slave station control device for controlling an article storage device for storing articles; a power line communication line for transmitting power and communication signals to the slave station control device; and a master station control device connected to the power line communication line and communicating with the slave station control device via the power line communication line, in which the slave station control device includes an identification module capable of communicating with the identification tag of the article stored in the article storage device.

Description

Technical Field

[0001] The present invention relates to a semiconductor process logistics management system, and more particularly, to a semiconductor process logistics management system utilizing power line communication. Background Art

[0002] An automated logistics management system is introduced into the semiconductor process line, and mobile objects are used to transport and load wafers.

[0003] Along the path of the automated logistics management system's moving bodies are buffers (item storage devices) that temporarily store wafer carriers while they are being transferred by wafer transport vehicles. Knowing which wafer carriers are in a specific buffer allows for efficient management of the movement of wafer transport vehicles, whether loading new wafer carriers into the buffer or transporting existing ones. Furthermore, information about the wafer carriers loaded in the buffer plays a crucial role in managing semiconductor processes.

[0004]

Prior art literature

[0005] A semiconductor process logistics management system according to an embodiment of the present invention is intended to provide a semiconductor process logistics management system as follows: by providing power supply and communication lines using only the existing power lines for supplying power, and by removing Ethernet control automation technology (EtherCAT: Ethernet for Control Automation Technology) communication cables used for communication with item storage devices in the existing semiconductor process logistics system, costs can be reduced and management costs can be minimized.

[0006] According to one aspect of an embodiment of the present invention, a semiconductor process logistics management system includes: a slave station control device that performs control on an item storage device that stores items; a power line communication line that transmits power and communication signals to the slave station control device; a master station control device that is connected to the power line communication line and communicates with the slave station control device through the power line communication line; and a filter unit that is arranged on the power line communication line and blocks the communication signal, wherein, based on the filter unit, a power application interval in which only the power is applied and a power-communication signal application interval in which the power and the communication signal are applied are formed on the power line communication line.

[0007] In addition, the slave station control device and the master station control device can be connected to the power-communication signal application section of the power line communication line, wherein the slave station control device may include: a slave station side power line communication module for separating the power and the communication signal supplied from the power line communication line, and sending and receiving the communication signal; the master station control device may include: a master station side power line communication module for separating the power and the communication signal supplied from the power line communication line, and sending and receiving the communication signal to the power line communication line side.

[0008] Furthermore, the slave station control device may include: the slave station control device may also include: an identification module capable of communicating with the identification tag of the item stored in the item storage device; a slave station side power supply module, receiving the power from the slave station side power line communication module; a gas supply control module, used to control the supply of inert gas to the item storage device; a slave station side central control module, used to control the identification module and the gas supply control module; and a slave station side sensor module, used to sense the status of the component, wherein the slave station side power line communication module may include: a coupler unit, supplying the power and the communication signal from the power line communication line and supplying the power to the slave station side power supply module side; and a slave station side power line communication transceiver unit, receiving the communication signal from the coupler unit or transmitting the communication signal to the coupler unit side, wherein the identification module may include: at least one identification module side antenna unit, used to perform wireless communication with the identification tag; and an identification module control unit, supplying the power to the identification tag through the identification module side antenna unit, and transmitting and receiving identification signals.

[0009] Furthermore, the identification module control unit may include: a carrier generation block that generates a carrier and control instructions; an antenna selection block that specifies one of the one or more connected identification module side antenna units and selects a port to which the antenna unit is connected; a power monitoring block that monitors the power output from the antenna unit; and a capacitor selection block that is used to match the impedance that changes due to external influences and coil value deviations of the antenna unit.

[0010] In addition, the slave station control device may also include: a slave station side switch unit, which is used to selectively block the power and communication signal transmitted from the power line communication line side to the slave station side power line communication module side, wherein the slave station side power supply module that can receive the power from the coupler unit generates power monitoring data for the status of the power and transmits the power monitoring data to the slave station side central control module, and the slave station side power line communication transceiver unit can transmit the power line communication monitoring data for the power line communication signal to the slave station side central control module side. The slave station side central control module can determine whether the power is normal or abnormal based on the power monitoring data, and can determine whether the communication signal is normal or abnormal based on the power line communication monitoring data. If the slave side central control module determines that at least one of the power and the communication signal is in an abnormal state, it can send a blocking control signal to the slave side switch unit to enable the slave side switch unit to block the power and the communication signal supplied from the power line communication line side to the slave side power line communication module side.

[0011] Furthermore, the slave side power line communication module can be equipped with multiple, and the multiple slave side power line communication modules can be independently connected to the slave side power supply module and the slave side central control module respectively. The slave control device can include: a switch module, which enables one of the multiple slave side power line communication modules to be selectively connected to the power line communication line side.

[0012] In addition, the master station control device may include: a master station side power supply module, which receives the power from the master station side power line communication module; a master station side central control module, which is used to control the master station control device; an external power supply module, which selectively receives power from an external power supply unit; and a master station side sensor module, which is used to sense the status of the component, wherein the master station side power line communication module may include: a coupler unit, which supplies the power and the communication signal from the power line communication line and supplies the power to the master station side power supply module side; and a master station side power line communication transceiver unit, which receives the communication signal from the coupler unit or transmits the communication signal to the coupler unit side.

[0013] Furthermore, the master station control device may further include: a master station side communication module connected to an external server and receiving a control signal from the external server.

[0014] In addition, the master station control device may further include: a control signal transceiver module, connected to an external server and receiving a control signal from the external server, wherein the control signal transceiver module includes: a control signal transceiver module side power supply unit, connected to the power application section of the power line communication line to receive the power; and a control signal transceiver module side communication unit, for transmitting and receiving the control signal. The master station control device may further include: a master station side communication unit, for transmitting and receiving the control signal transceiver module and the control signal.

[0015] In addition, the master station side power line communication module can be equipped with multiple, and the multiple master station side power line communication modules can be independently connected to the master station side power supply module and the master station side central control module respectively. The master station control device can also include: a switch module, which enables one of the multiple master station side power line communication modules to be selectively connected to the power line communication line side.

[0016] Furthermore, the master station side power line communication transceiver unit of the master station side power line communication module may include: a communication unit side switch unit, used to selectively block the communication signal transmitted from the coupler unit, wherein the master station side power line communication transceiver unit may transmit power line communication monitoring data for the power line communication signal to the master station side central control module side, and the master station side central control module may determine whether the communication signal is normal or abnormal based on the power line communication monitoring data. If it is determined that the communication signal is in an abnormal state, the master station side central control module may send a communication signal blocking control signal to the master station side power line communication transceiver unit to enable the communication unit side switch unit to block the communication signal.

[0017] In addition, the master station side power supply module may include: a power module side switch unit, used to selectively block the power transmitted from the coupler unit; and a power monitoring unit, which generates power monitoring data for the status of the power and transmits the power monitoring data to the master station side central control module. The master station side central control module can determine whether the power is normal or abnormal based on the power monitoring data. If it is determined that the power is in an abnormal state, the master station side central control module can send a power blocking control signal to the master station side power line power supply module to enable the power module side switch unit to block the power. The power module side switch unit and the communication unit side switch unit can block the power and the communication signal independently of each other.

[0018] In addition, the master station control device may also include: a master station side switch unit, which is used to selectively block the power and the communication signal transmitted from the power line communication line side to the master station side power line communication module side. The master station side power supply module that receives the power from the coupler unit can generate power monitoring data for the status of the power and transmit the power monitoring data to the master station side central control module. The master station side power line communication transceiver unit can transmit power line communication monitoring data for the power line communication signal to the master station side central control module side. The master station side central control module can determine whether the power is normal or abnormal based on the power monitoring data, and can determine whether the communication signal is normal or abnormal based on the power line communication monitoring data. If it is determined that at least one of the power and the communication signal is in an abnormal state, the master station side central control module can send a blocking control signal to the master station side switch unit to enable the master station side switch unit to block the power and the communication signal supplied from the power line communication line side to the master station side power line communication module side.

[0019] The power-communication signal application interval of the power line communication line can be equipped between the first power application interval and the second power application interval of the power application interval, and the filter unit may include: a first filter unit, arranged at a node connecting the power-communication signal application interval and the first power application interval; and a second filter unit, arranged at a node connecting the power-communication signal application interval and the second power application interval.

[0020] In addition, the semiconductor process logistics management system may also include: an external device, which is connected to the power line communication line in the power-communication signal application interval and only receives the power, wherein a third filter unit may be included between the node where the external device is connected to the power line communication line in the power-communication signal application interval.

[0021] The master station control device may include: a first master station control device, connected to a node of the power line communication line; and a second master station control device, connected to a node different from the node connected to the first master station control device, wherein only one of the first master station control device and the second master station control device can communicate with the slave station control device, and the other of the first master station control device and the second master station control device can monitor whether the master station control device communicating with the slave station control device is operating normally. If the master station control device communicating with the slave station control device cannot operate normally, the connection between the master station control device communicating with the slave station control device and the power line communication line can be released, and the other master station control device can start communicating with the slave station control device.

[0022] According to another aspect of an embodiment of the present invention, a slave station control device performs control of an item storage device for storing items, and the slave station control device may include: a slave station side power line communication module, for separating the power and communication signal supplied from the power line communication line, and transmitting and receiving the communication signal; a slave station side power supply module, for receiving the power from the slave station side power line communication module; and a slave station side sensor module, for sensing the status of a component, wherein the slave station side power line communication module may include: a coupler unit, for supplying the power and the communication signal from the power line communication line, and supplying the power to the slave station side power supply module side; and a slave station side power line communication transceiver unit, for receiving the communication signal from the coupler unit or transmitting the communication signal to the coupler unit side.

[0023] In addition, the slave station control device may also include: a gas supply control module for controlling the supply of inert gas to the item storage device; an identification module capable of communicating with the identification tag of the item stored in the item storage device; and a slave station side central control module for controlling the identification module and the gas supply control module, wherein the identification module may include: at least one identification module side antenna unit for performing wireless communication with the identification tag; and an identification module control unit for supplying power to the identification tag through the identification module side antenna unit, and sending and receiving identification signals.

[0024] In addition, the identification module control unit may include: a carrier generation block that generates a carrier and control instructions; an antenna selection block that specifies one of the one or more connected identification module side antenna units and selects the port to which the antenna unit is connected; a power monitoring block that monitors the power output from the antenna unit; and a capacitor selection block for matching the impedance that changes due to external influences and coil value deviations of the antenna unit.

[0025] According to another aspect of an embodiment of the present invention, a master station control device communicates with a slave station control device that controls an item storage device for storing items through a power line communication line. The master station control device may include: a master station side power line communication module for separating the power and communication signal supplied from the power line communication line, and transmitting and receiving the communication signal to the power line communication line side; a master station side power supply module for receiving the power from the master station side power line communication module; a master station side central control module for controlling the master station control device; an external power supply module for selectively receiving power from an external power supply unit; and a master station side sensor module for sensing the status of a component, wherein the master station side power line communication module may include: a coupler unit for supplying the power and the communication signal from the power line communication line, and supplying the power to the master station side power supply module side; and a master station side power line communication transceiver unit for receiving the communication signal from the coupler unit or transmitting the communication signal to the coupler unit side.

[0026] Furthermore, the master station control device may further include: a master station side communication module connected to an external server and receiving a control signal from the external server.

[0027] In addition, the master station control device may also include: a control signal transceiver module, connected to an external server and the external server receives the control signal; and a master station side communication unit, used to transmit and receive the control signal with the control signal transceiver module, wherein the control signal transceiver module may include: a control signal transceiver module side power supply unit, connected to the power application section of the power line communication line to receive the power; and a control signal transceiver module side communication unit, used to transmit and receive the control signal.

[0028] In addition, the master station side power line communication module can be equipped with multiple, and the multiple master station side power line communication modules are independently connected to the master station side power supply module and the master station side central control module respectively. The master station control device can also include: a switch module, which selectively connects one of the multiple master station side power line communication modules to the power line communication line side.

[0029] According to the proposed embodiment, power supply and communication are implemented using the power line as the power supply line. Therefore, expensive communication cables used for communication are eliminated, which has the effect of reducing installation costs and eliminating the high-altitude work required to install communication cables. In addition, since a general-purpose PC or general-purpose controller (microcontroller unit (MCU) etc.) can be used instead of a dedicated Ethernet power control system (BeckHoff PC etc.), the total cost can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 FIG. 1 is a diagram schematically showing a semiconductor process logistics management system according to an embodiment of the present invention.

[0031] Figure 2 is shown in more detail Figure 1 Diagram of a semiconductor process logistics management system.

[0032] Figure 3 It shows Figure 1 Diagram of the master station control device of the semiconductor process logistics management system.

[0033] Figure 4 It shows Figure 1 Diagram of a slave control device of a semiconductor process logistics management system.

[0034] Figure 5 It is shown in detail Figure 4 Diagram of the identification module control section of a semiconductor process logistics management system.

[0035] Figure 6 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to another embodiment of the present invention.

[0036] Figure 7 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0037] Figure 8 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0038] Figure 9 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0039] Figure 10 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0040] Figure 11 FIG. 1 is a diagram showing a master station control device of a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0041] Figure 12 FIG. 1 is a diagram showing a master station control device of a semiconductor process logistics management system according to yet another embodiment of the present invention. DETAILED DESCRIPTION

[0042] The advantages, features, and methods for achieving the advantages and features of the present invention will be more clearly understood by referring to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and can be implemented in a variety of different forms. These embodiments are provided solely to complete the disclosure of the present invention and to fully inform those skilled in the art of the present invention of its scope. The present invention is defined solely by the scope of the claims.

[0043] Although terms such as "first" and "second" are used to describe various components, these components are not limited by these terms. These terms are used only to distinguish one component from another. Therefore, the first component mentioned below can also be the second component within the technical concept of the present invention.

[0044] Throughout the specification, the same reference numerals refer to the same constituent elements.

[0045] The various features of the multiple embodiments of the present invention can be partially or completely combined or combined with each other. As those skilled in the art fully understand, various linkages and drives can be technically performed, and the various embodiments can be implemented independently of each other or implemented together in an associated relationship.

[0046] In addition, the expected potential effects of the technical features of the present invention that are not specifically mentioned in the description of the present invention are deemed to be as described in this description. This embodiment is provided to more completely explain the present invention to ordinary technicians in the technical field to which the present invention belongs. The contents shown in the drawings may be exaggerated compared with the actual implementation form of the invention. The detailed description of the structure that is judged to be likely to unnecessarily confuse the gist of the present invention will be omitted or briefly recorded.

[0047] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0048] In existing semiconductor process logistics management systems, slave controllers, which monitor and control the storage units of an article storage system, and a master controller, which controls the slave controllers, are connected via Ethernet Control Automation Technology (EtherCAT). Separate power lines are required to supply power to the slave and master controllers. This requires limited space for routing the communication lines and power lines, resulting in significant installation space constraints and excessive installation and maintenance costs and time.

[0049] Therefore, in order to solve the problems of the conventional system, the inventors of the present invention proposed the following configuration.

[0050] Figure 1FIG. 1 is a diagram schematically showing a semiconductor process logistics management system according to an embodiment of the present invention.

[0051] Reference Figure 1 According to an embodiment of the present invention, a semiconductor process logistics management system 1 addresses the issues of existing systems requiring separate communication and power lines. The master control device 200 and the slave control device 300 utilize a power line communication line 100 to transmit communication signals. Specifically, the master control device 200 and the slave control device 300 can receive power from the power line communication line 100 and transmit and receive communication signals. In this embodiment, more than one power line communication line 100 may be provided, and if multiple power line communication lines 100 are provided, the power line communication lines 100 may be connected in parallel.

[0052] The slave station control device 300 receives the power from the power line communication line 100 and transmits and receives the communication signal, thereby performing identification control of items (for example, a front-opening unified pod (FOUP) loaded with wafers) and inert gas supply control on the item storage unit 910 of the item storage device 900.

[0053] Hereinafter, the configuration of the semiconductor process logistics management system 1 according to the embodiment of the present invention will be described in more detail.

[0054] Figure 2 is shown in more detail Figure 1 Diagram of the semiconductor process logistics management system, Figure 3 It shows Figure 1 FIG. 1 is a diagram of a master station control device of a semiconductor process logistics management system. Figure 4 It shows Figure 1 Diagram of the slave control device of the semiconductor process logistics management system, Figure 5 It is shown in detail Figure 4 Diagram of the identification module control section of a semiconductor process logistics management system.

[0055] Reference Figures 2 to 5 According to this embodiment, the semiconductor process logistics management system 1 includes: a slave station control device 300, which controls the item storage device 900 for storing items; a power line communication line 100, which transmits power and communication signals to the slave station control device 300; a master station control device 200, which is connected to the power line communication line 100, and communicates with the slave station control device 300 through the power line communication line 100 and controls and monitors the slave station control device 300; and a filter unit 410, which is arranged on the power line communication line 100 and blocks the communication signal from crossing the power-communication signal application interval 120 and entering the power application interval 110.

[0056] For example, the filter unit 410 may be a low pass filter (LPF) that passes only a signal having a frequency corresponding to the power, or a band stop filter (BSF) that blocks a signal having a frequency corresponding to the communication signal.

[0057] At this time, based on the filter unit 410, the power line communication line 100 is formed with a power application section 110, which applies only the power, and a power-communication signal application section 120, which applies both the power and the communication signal. Furthermore, the slave control device 300 and the master control device 200 are connected to the power-communication signal application section 120 of the power line communication line 100. In the semiconductor process logistics management system 1 according to this embodiment, the power application section 110, which supplies only the power, and the power-communication signal application section 120 are distinguished by the filter unit 410. This prevents the communication signal, in addition to the power, from flowing into noise-sensitive external devices (e.g., semiconductor process equipment) and causing malfunctions.

[0058] The master control device 200 receives a control signal from the external server 500 to control the slave control device 300, monitors the operating status of the slave control device 300, and transmits the monitoring data to the external server 500. In this case, the master control device 200 can be connected to the external server 500 via a communication line 600, and the communication line 600 can be a wired communication line such as a LAN or a wireless communication line such as Wi-Fi or WLAN, and is not limited to these examples.

[0059] More specifically, the master station control device 200 includes: a master station-side power line communication module 210 for separating the power and communication signal supplied from the power-communication signal application section 120 of the power line communication line 100 and transmitting and receiving the communication signal to and from the power line communication line 100; a master station-side power supply module 220 for receiving power from the master station-side power line communication module 210; a master station-side central control module 260 for controlling the master station control device 200; and a master station-side communication module 240 for connecting to an external server 500 and receiving control signals from the outside. The master station control device 200 may also include an external power supply module 230 and a master station-side sensor module 250.

[0060] If the external power supply module 230 fails due to an abnormality in the master-side power supply module 220 of the master control device 200 or an abnormality in the power line communication line 100 connected to the master-side power line communication module 210 during operation, causing the master control device 200 to be unable to be supplied with power via the power line communication line 100, an external power supply unit (not shown) attached to the outside can be used to supply operating power to the master control device 200. The external power supply unit attached to the outside can be an uninterruptible power supply (UPS), a battery (BAT), or the like.

[0061] The master station side sensor module 250 provides an interface for processing abnormalities of the power supply and power line communication module 210 of the master station control device 200, abnormalities of the communication module 240, and various sensors for diagnosing the status and faults of components constituting the track or logistics system, and the interface can be constructed using an insulating structure or a non-insulating structure.

[0062] At this time, the power line communication module 210 on the master station side includes: a coupler unit 211, which supplies the power and the communication signal from the power line communication line 100, and supplies the power to the power supply module 220 side on the master station side; and a power line communication transceiver unit 212 on the master station side, which receives the communication signal from the coupler unit 211 or transmits the communication signal to the coupler unit 211 side.

[0063] The coupler unit 211 can protect the device from electrical (current, voltage) transient phenomena (Surge), separate the communication signal from the noise (switching noise, other communication signals) flowing in from the power supply unit, and suppress the communication signal from flowing directly into the master station side power supply module 220.

[0064] In this case, the coupler unit 211 may include a low-pass filter (LPF) for allowing the power to pass, and a band-pass filter (BPF) or a high-pass filter (HPF) for allowing the communication signal to pass. In this case, the power and communication signal are independently transmitted to the master-side power supply module 220 and the master-side power line communication transceiver unit 212.

[0065] The slave control device 300 receives a control signal from the master control device 200 to perform control, and transmits data on an operating status and the like to the master control device 200 .

[0066] In more detail, the slave station control device 300 includes: an identification module 330, which is capable of communicating with the identification tag of the item stored in the item storage device 900; a slave station side power line communication module 310, which is used to separate the power and the communication signal supplied from the power-communication signal application interval 120 of the power line communication line 100, and to send and receive the communication signal; a slave station side power supply module 320, which receives the power from the slave station side power line communication module 310; a gas supply control module 340, which is used to control the supply of inert gas to the item storage device 900; a slave station side central control module 360, which is used to control the identification module 330 and the gas supply control module 340; and a slave station side sensor module 350.

[0067] The slave side sensor module 350 provides an interface for processing abnormalities of the power supply and power line communication module 310 of the slave control device 300, abnormalities of the gas supply control module 340, and various sensors for diagnosing the status and faults of components constituting the track or logistics system, and the interface can be constructed using an insulating structure or a non-insulating structure.

[0068] The slave-side power line communication module 310 includes a coupler unit 311 that supplies the power and communication signals from the power line communication line 100 and supplies the power to the slave-side power supply module 320; and a slave-side power line communication transceiver unit 312 that receives the communication signals from the coupler unit 311 or transmits the communication signals to the coupler unit 311. The coupler unit 311 of the slave-side power line communication module 310 is substantially the same as the coupler unit 211 of the master-side power line communication module 210, and therefore a detailed description thereof is omitted.

[0069] Furthermore, the identification module 330 includes: at least one identification module-side antenna 332 for wirelessly communicating with the identification tag of the item; and an identification module control unit 331 for supplying power to the identification tag via the identification module-side antenna 332 and transmitting and receiving identification signals. For example, the identification tag may be a radio frequency identification (RFID) tag, and the identification module control unit 331 may control the identification module-side antenna 332 to communicate with the identification tag.

[0070] Exemplarily, the identification module control unit 331 can perform data communication and power transmission using a first frequency, and can perform power transmission using a second frequency, and the identification module control unit 331 may include: a carrier generation block 333, which generates a carrier and a control instruction; an antenna selection block 336, which specifies one of the one or more connected identification module side antenna units and selects the port to which the antenna unit is connected; a power monitoring block 334, which monitors the power output from the antenna unit; and a capacitor selection block 335, which is used to match the impedance that changes due to external influences and coil value deviations of the antenna unit.

[0071] In this embodiment, the capacitor selection module 335 for impedance matching includes multiple capacitors, and the following selections can be made: capacitors are selected to maximize the current or resonant voltage applied to the identification module side antenna part 332, so that maximum power is transmitted through the identification module side antenna part 332; or, capacitors are selected to reduce the difference between the voltage phase and the current phase of the sending part switching circuit.

[0072] The identification module control unit 331 also includes a storage unit that stores information about the capacitor selected by impedance matching and information about the antenna selected by the identification module-side antenna unit 332. The storage unit may store information about the antenna and capacitor combination that transmits the maximum power during impedance matching, as well as information about the voltage or phase measured by the combination.

[0073] In addition, the identification module control unit 331 may also include: a detection unit, which selects a capacitor of a combination that is configured to transmit maximum power to each of the antennas, thereby detecting the difference between a predetermined voltage or phase when power is transmitted through the carrier generation block 333 and a voltage or phase detected during operation; and an abnormality judgment unit, which judges that the antenna is abnormal or the operation is abnormal if the phase deviation detected by the detection unit exceeds a predetermined reference deviation range.

[0074] In this embodiment, the impedance matching of the identification module control unit 331 converts the resonant frequency AC voltage detected in the capacitors selected in sequence in the capacitor selection block into a DC voltage level for the antenna selected from the antenna of the identification module side antenna unit 332, thereby finding the capacitor with the highest value, and the combination of the selected antenna and the selected capacitor and the detection voltage can be stored.

[0075] If the antenna's resonance characteristics change due to metal or other external factors, the transmit power will decrease, affecting reading performance. By performing a tuning process on the transmit signal during initial setup, the optimal transmit output state for the corresponding environment can be found, and the corresponding value can be used to ensure maximum performance.

[0076] Based on this, open-loop power control is used to adjust the transmission power, so that it can respond to situations where low power is required. Therefore, when there are frequency-sensitive external devices in the vicinity, it has the advantage of being able to adjust the carrier transmission power to a low level within the range allowed by communication.

[0077] According to the proposed embodiment, in a semiconductor process logistics management system, power supply and communication are implemented via power lines serving as power supply lines, thereby eliminating the conventional high-altitude work for installing expensive communication cables for communication. Furthermore, since a general-purpose PC or general-purpose controller (microcontroller unit (MCU) etc.) can be used instead of a dedicated control system for Power over Ethernet (BeckHoff PC etc.), the total cost can be reduced.

[0078] Figure 6 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to another embodiment of the present invention.

[0079] In this embodiment, only the filter part is different, and the other structures are the same as Figures 1 to 4 The structure of the semiconductor process logistics management system is essentially the same. The following description focuses on the characteristic parts of this embodiment.

[0080] Reference Figure 6 According to this embodiment, a plurality of filter units 410 and 420 are provided, and include a first filter unit 410 and a second filter unit 420 .

[0081] More specifically, the power-communication signal application section 120 of the power line communication link 100 is provided between the first power application section 110A and the second power application section 110 .

[0082] Furthermore, the first filter unit 410 is arranged at a node connecting the power-communication signal application section 120 and the first power application section 110A, and the second filter unit 420 is arranged at a node connecting the power-communication signal application section 120 and the second power application section 110B.

[0083] Furthermore, the second power application section 110B is connected to the external device 700 that receives the power only from the power line communication line 100 .

[0084] That is, a second filter unit 420 can be arranged between the node where the external device 700 is connected to the power line communication line and the node where the master station control device 200 or the slave station control device 300 is connected to the power line communication line 100, so as to suppress the communication signal from flowing into the external device 700.

[0085] The second filter unit 420 is characterized by having the same structure as the first filter unit 410 .

[0086] Figure 7 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0087] In this embodiment, only the filter part is different, and the other structures are the same as Figures 1 to 6 The structure of the semiconductor process logistics management system is essentially the same. The following description focuses on the characteristic parts of this embodiment.

[0088] Reference Figure 7 The semiconductor process logistics management system 1 according to this embodiment includes a first filter unit 410 , a second filter unit 420 and a third filter unit 430 .

[0089] The first filter unit 410 and the third filter unit 430 can be symmetrically arranged at one end and the other end of the applied power-communication signal application section 120 of the power line communication line 100, respectively, and can form the communication signal more stably in the power-communication signal application section 120.

[0090] The third filter unit 430 is characterized by having the same structure as the first filter unit 410 .

[0091] Furthermore, the second filter unit 420 is arranged on the connection node side between the second power application section 110B and the power-communication signal application section 120, so as to branch within the power-communication signal application section 120 and form the second power application section 110B to which the second external device 700B is connected. Furthermore, the first external device 700A can be connected to the third power application section 110C.

[0092] Figure 8 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0093] In this embodiment, only the structure of the master station control device is different, and the other structures are the same as Figures 1 to 7 The structure of the semiconductor process logistics management system is essentially the same. The following description focuses on the characteristic parts of this embodiment.

[0094] Reference Figure 8The master station control device 200 of the semiconductor process logistics management system 1 according to this embodiment further includes a control signal transceiver module 270, which is connected to the external server 500, receives control signals from the server, and transmits monitoring signals to the external server 500. The control signal transceiver module 270 can be a commercial PC or a general-purpose controller (MCU, etc.) connected to an external communication line (for example, a wired communication line such as a LAN or a wireless communication line such as Wi-Fi). The control signal transceiver module 270 includes a control signal transceiver module-side power supply unit 271, which is connected to the power application section of the power line communication line to receive power; and a control signal transceiver module-side communication unit 272, which is used to transmit and receive control signals. Furthermore, the master station control device 200 further includes a master station-side communication unit 280, which is used to transmit and receive control signals to and from the control signal transceiver module 270.

[0095] The control signal transceiver module 270 may be provided inside the master control device 200 or outside the master control device 200 .

[0096] The control signal transceiver module 270 according to this embodiment may be a commercial PC or a general controller (MCU, etc.) using an external power supply, and thus has the effect of being able to be installed more easily and reducing the installation cost.

[0097] Figure 9 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0098] In this embodiment, the only difference is the layout structure of the master station control device. The other components are the same as Figures 1 to 8 The configuration of the semiconductor process logistics management system shown is substantially the same, and the following description will focus on the characteristic parts of this embodiment.

[0099] Reference Figure 9 (A) and (B), according to the master station control device 200 of the semiconductor process logistics management system 1 of this embodiment, it includes: a first master station control device 200A, connected to a first node of the power line communication line 100; and a second master station control device 200B, connected to a second node formed at a different position from the first node connected to the first master station control device 200A.

[0100] Only one of the first master control device 200A and the second master control device 200B performs communication with the slave control device 300 , and the other monitors whether the master control device 200 performing communication with the slave control device 300 operates normally.

[0101] In the case where the master station control device 200 that performs communication with the slave station control device 300 is unable to perform normal operation, the master station control device 200 that performs communication with the slave station control device 300 blocks communication transmission and reception by disconnecting the power line communication signal switch connected to the power line communication line 100, and another master station control device 200 connects the power line communication signal switch connected to the power line communication line 100 to enable communication transmission and reception, thereby starting communication with the slave station control device 300.

[0102] For example, in this embodiment, when the first master station control device 200A and the second master station control device 200B are both connected to the power line communication line 100, when the first master station control device 200A sends and receives signals with the slave station control device 300, the second master station control device 200B monitors the operating status of the first master station control device 200A.

[0103] Furthermore, if the first master control device 200A is unable to perform normal operations and the first master control device 200A disconnects the first main power line communication signal switch connected to the power line communication line 100 to block communication transmission and reception, the second master control device 200B, which is monitoring the communication of the first master control device 200A, begins connecting to the second main power line communication signal switch connected to the power line communication line 100 and begins transmitting and receiving signals with the slave control device 300. At this time, the second master control device 200B can transmit the abnormal operating status of the first master control device 200A and the disconnection status of the power line communication line to an external server.

[0104] In this embodiment, multiple master station control devices 200 are equipped, and when an abnormality occurs in the main master station control device 200A, another master station control device 200B immediately performs a corresponding action, thereby having the advantage of minimizing the occurrence of system errors and minimizing the repair time when an error occurs.

[0105] Figure 10 FIG. 1 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0106] In this embodiment, only the structure of the master station communication control device is different, and the other structures are the same as Figures 1 to 7 The configuration of the semiconductor process logistics management system shown is substantially the same, and the following description will focus on the characteristic parts of this embodiment.

[0107] Reference Figure 10 According to this embodiment, the master station control device 200 may include a plurality of master station side power line communication modules 210A and 210B.

[0108] At this time, the master station control device 200 includes a switch module 283 for selectively connecting one of the plurality of master station-side power line communication modules to the power line communication line side.

[0109] In this embodiment, the master station side power line communication module is equipped with multiple master station control devices 200. When a problem occurs in the master station side power line communication module connected to the power line communication line 100, it detects the situation and performs connection with another master station side power line communication module and the power line communication line 100, thereby having the advantage of being able to quickly restore functions when an error occurs.

[0110] In this embodiment, the description is centered on the structure of the master station control device 200, but the master station control device 200 includes multiple power line communication modules for sensing the abnormal state of a certain power line communication module and selectively blocking the power supply and the communication signal. The structure can also be applied to the slave station control device 300.

[0111] Figure 11 FIG. 1 is a diagram showing a master station control device of a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0112] In this embodiment, only the structure of the master station control device 800 is different, and the other structures are the same as Figures 1 to 7 The configuration of the semiconductor process logistics management system shown is substantially the same, and therefore the following description will focus on the characteristic parts of this embodiment.

[0113] Reference Figure 11 The master-side power line communication transceiver unit 813 of the master-side power line communication module 810 includes: a communication unit-side switch unit 814 for selectively blocking the communication signal transmitted from the coupler unit 811 .

[0114] Furthermore, the master station-side power line communication transceiver unit 813 transmits power line communication monitoring data regarding the power line communication signal to the master station-side central control module 860. Based on the power line communication monitoring data, the master station-side central control module 860 determines whether the communication signal is normal or abnormal. If the communication signal is determined to be abnormal, the master station-side central control module 860 sends a communication signal blocking control signal to the master station-side power line communication transceiver unit 813, causing the communication unit-side switch unit 814 to block the communication signal.

[0115] In addition, the power line power supply module 820 on the master station side may include: a power module side switch unit 821, used to selectively block the power transmitted from the coupler unit 811; and a power monitoring unit 822, generating power monitoring data for the status of the power and transmitting the power monitoring data to the central control module on the master station side.

[0116] The master station-side central control module 860 determines whether the power is normal or abnormal based on the power monitoring data. If the power is determined to be abnormal, the master station-side central control module 860 sends a power blocking control signal to the master station-side power line power supply module 820, causing the power supply module-side switch unit 821 to block the power.

[0117] At this time, the power module side switch unit 821 and the communication unit side switch unit 814 can block the power supply and the communication signal independently of each other.

[0118] In this embodiment, in the event of an unexpected surge or the like occurring through the power line communication line, the master station side central control module 860 of the master station control device 800 senses this situation and performs blocking of the power or communication signal, thereby having the advantages of being able to protect the internal circuit structure and being able to robustly cope with errors.

[0119] Although the present embodiment mainly describes the configuration of the master control device, the configuration for selectively blocking the power and the communication signal by sensing an abnormal state can also be applied to the slave control device 300 .

[0120] In the master station control device 800 of the present invention, when the power supply of the master station side power line power supply module 820 is blocked by the power module side switch unit 821, an external power supply module can be provided for supplying operating power to the master station control device 800 through an external power supply unit (not shown).

[0121] Figure 12 FIG. 1 is a diagram showing a master station control device of a semiconductor process logistics management system according to yet another embodiment of the present invention.

[0122] In this embodiment, only the structure of the master station control device 200 is different, and the other structures are the same as Figures 1 to 7 The configuration of the semiconductor process logistics management system shown is substantially the same, and therefore the following description will focus on the characteristic parts of this embodiment.

[0123] Reference Figure 12According to the semiconductor process logistics management system 1 of this embodiment, the master station control device 200 also includes: a master station side switch unit 290, which is used to selectively block the power and communication signals transmitted from the power line communication line 100 side to the master station side power line communication module 210 side.

[0124] The master-side power supply module 220 receiving the power from the coupler unit 211 generates power monitoring data on the state of the power and transmits the power monitoring data to the master-side central control module 260 .

[0125] The master station-side power line communication transceiver unit 212 transmits the power line communication monitoring data for the power line communication signal to the master station-side central control module 260 .

[0126] Furthermore, the master-side central control module 260 determines whether the power is normal or abnormal based on the power monitoring data, and determines whether the communication signal is normal or abnormal based on the power line communication monitoring data.

[0127] Although the configuration of the master control device 200 is mainly described in this embodiment, the configuration for selectively blocking the power and the communication signal by sensing an abnormal state can also be applied to the slave control device 300 .

[0128] If it is determined that at least one of the power and the communication signal is in an abnormal state, the master station side central control module 260 sends a blocking control signal to the master station side switch unit 290 to enable the master station side switch unit 290 to block the power and communication signal supplied from the power line communication line side to the master station side power line communication module side.

[0129] In addition, although the present embodiment describes a configuration in which the master control device 200 includes the master-side switch unit 290 , a configuration in which the slave control device 300 includes a slave-side switch unit may also be included in the embodiments of the present invention.

[0130] According to the proposed embodiment, in the event of an unexpected surge occurring in the power line communication line 100 , there is an advantage in being able to quickly sense the surge to protect the circuit.

[0131] While preferred embodiments of the present invention have been described above, the present invention is not limited thereto and can be implemented in various modified forms within the scope of the claims, detailed description of the invention, and drawings, which naturally also fall within the scope of the present invention.

Claims

1. A semiconductor process logistics management system, characterized in that: include: A slave station control device controls an article storage device for storing articles; a power line communication circuit for transmitting power and communication signals to the slave station control device; a master station control device connected to the power line communication line and communicating with the slave station control device via the power line communication line; as well as a filter unit, arranged on the power line communication line and blocking the communication signal; Here, based on the filter unit, a power application section in which only the power is applied and a power-communication signal application section in which the power and the communication signal are applied are formed in the power line communication line.

2. The semiconductor process logistics management system according to claim 1, characterized in that: The slave control device and the master control device are connected to the power-communication signal application section of the power line communication line. Wherein, the slave station control device includes: A slave-side power line communication module, configured to separate the power supplied from the power line communication line and the communication signal, and to transmit and receive the communication signal. The master station control device includes: The master station side power line communication module is used to separate the power and the communication signal supplied from the power line communication line, and to send and receive the communication signal to the power line communication line side.

3. The semiconductor process logistics management system according to claim 2, characterized in that: The slave station control device further includes: an identification module capable of communicating with an identification tag of the item stored in the item storage device; A slave-side power supply module receives the power from the slave-side power line communication module; a gas supply control module, configured to control the supply of inert gas to the article storage device; A central control module on the slave side, configured to control the identification module and the gas supply control module; and The slave side sensor module is used to sense the status of the component. Wherein, the slave station side power line communication module includes: a coupler unit that supplies the power and the communication signal from the power line communication line and supplies the power to the slave-side power supply module; and The power line communication transceiver unit on the slave side receives the communication signal from the coupler unit or transmits the communication signal to the coupler unit side, Wherein, the identification module includes: at least one identification module-side antenna unit for performing wireless communication with the identification tag; and The identification module control unit supplies the power to the identification tag via the identification module-side antenna unit and transmits and receives identification signals.

4. The semiconductor process logistics management system according to claim 3, characterized in that: The identification module control unit includes: Carrier generation block, generates carrier and control instructions; an antenna selection block that specifies one of the one or more connected identification module-side antenna units and selects a port to which the antenna unit is connected; a power monitoring block that monitors the power output from the antenna section; and The capacitor selection block is used to match the impedance that changes due to external influences and the coil value deviation of the antenna unit.

5. The semiconductor process logistics management system according to claim 3, characterized in that: The slave station control device further includes: A slave-side switch unit is configured to selectively block the power and communication signals transmitted from the power line communication line to the slave-side power line communication module. wherein the slave-side power supply module receiving the power from the coupler unit generates power monitoring data for the state of the power and transmits the power monitoring data to the slave-side central control module; The power line communication transceiver unit on the slave side transmits power line communication monitoring data for the power line communication signal to the central control module on the slave side. The central control module on the slave side determines whether the power is normal or abnormal based on the power monitoring data, and determines whether the communication signal is normal or abnormal based on the power line communication monitoring data. If the central control module on the slave side determines that at least one of the power and the communication signal is in an abnormal state, it sends a blocking control signal to the slave side switch unit to cause the slave side switch unit to block the power and the communication signal supplied from the power line communication line side to the slave side power line communication module side.

6. The semiconductor process logistics management system according to claim 3, characterized in that: The slave side power line communication modules are equipped with a plurality of them, and the plurality of slave side power line communication modules are independently connected to the slave side power supply module and the slave side central control module respectively. The slave station control device includes: The switch module selectively connects one of the plurality of slave-side power line communication modules to the power line communication line side.

7. The semiconductor process logistics management system according to claim 2, characterized in that: The master station control device also includes: A master station side power supply module receives the power from the master station side power line communication module; A central control module on the master station side, used to control the master station control device; an external power supply module that selectively receives power from an external power supply unit; and The master station side sensor module is used to sense the status of the components. Wherein, the master station side power line communication module includes: a coupler unit that supplies the power and the communication signal from the power line communication line and supplies the power to the master-side power supply module; and The power line communication transceiver unit at the master station receives the communication signal from the coupler unit or transmits the communication signal to the coupler unit.

8. The semiconductor process logistics management system according to claim 7, characterized in that: The master station control device also includes: The master station side communication module is connected to the external server and receives a control signal from the external server.

9. The semiconductor process logistics management system according to claim 7, characterized in that: The master station control device also includes: A control signal transceiver module is connected to an external server and receives a control signal from the external server. Wherein, the control signal transceiver module includes: a control signal transceiver module-side power supply unit connected to the power application section of the power line communication line to receive the power; and The communication unit on the control signal transceiver module side is used to send and receive the control signal, The master station control device also includes: The master station side communication unit is used to send and receive the control signal transceiver module and the control signal.

10. The semiconductor process logistics management system according to claim 8 or 9, characterized in that: The master station side power line communication module is equipped with multiple, and the multiple master station side power line communication modules are independently connected to the master station side power supply module and the master station side central control module respectively. The master station control device also includes: The switch module selectively connects one of the plurality of master-side power line communication modules to the power line communication line side.

11. The semiconductor process logistics management system according to claim 7, characterized in that: The master station side power line communication transceiver unit of the master station side power line communication module includes: a communication unit-side switch unit, configured to selectively block the communication signal transmitted from the coupler unit, The power line communication transceiver unit at the master station transmits power line communication monitoring data for the power line communication signal to the central control module at the master station. The central control module at the master station side determines whether the communication signal is normal or abnormal based on the power line communication monitoring data, If it is determined that the communication signal is in an abnormal state, the central control module on the master station side sends a communication signal blocking control signal to the power line communication transceiver unit on the master station side, so that the switch unit on the communication unit side blocks the communication signal.

12. The semiconductor process logistics management system according to claim 11, characterized in that: The master station side power supply module includes: a power module-side switch unit for selectively blocking the power transmitted from the coupler unit; and A power monitoring unit generates power monitoring data for the power status and transmits the power monitoring data to the central control module on the master station side, The central control module at the master station side determines whether the power is normal or abnormal based on the power monitoring data. If it is determined that the power is in an abnormal state, the central control module on the master station side sends a power blocking control signal to the power line power module on the master station side, so that the switch unit on the power module side blocks the power. The power module side switch unit and the communication unit side switch unit can block the power and the communication signal independently of each other.

13. The semiconductor process logistics management system according to claim 8 or 9, characterized in that: The master station control device also includes: a master station side switch unit, configured to selectively block the power and the communication signal transmitted from the power line communication line side to the master station side power line communication module side, The master-side power supply module that receives the power from the coupler unit generates power monitoring data for the state of the power and transmits the power monitoring data to the master-side central control module. The power line communication transceiver unit on the master station side transmits power line communication monitoring data for the power line communication signal to the central control module on the master station side, The central control module on the master station side determines whether the power is normal or abnormal based on the power monitoring data, and determines whether the communication signal is normal or abnormal based on the power line communication monitoring data. If it is determined that at least one of the power and the communication signal is in an abnormal state, the central control module on the master station side sends a blocking control signal to the switch unit on the master station side, so that the switch unit on the master station side blocks the power and the communication signal supplied from the power line communication line side to the power line communication module side on the master station side.

14. The semiconductor process logistics management system according to claim 1, wherein: The power-communication signal application section of the power line communication line is provided between a first power application section and a second power application section of the power application section. The filter unit includes: a first filter section disposed at a node connecting the power-communication signal application section and the first power application section; and The second filter unit is arranged at a node connecting the power-communication signal application section and the second power application section.

15. The semiconductor process logistics management system according to claim 14, characterized in that: Also includes: an external device connected to the power line communication line in the power-communication signal application section and receiving only the power, Here, a third filter unit is included between the external device and a node connected to the power line communication line in the power-communication signal application section.

16. The semiconductor process logistics management system according to claim 1, wherein: The master station control device includes: a first master station control device connected to a node of the power line communication line; and a second master station control device connected to a node different from the node to which the first master station control device is connected, wherein only one of the first master control device and the second master control device communicates with the slave control device; The other of the first master control device and the second master control device monitors whether the master control device communicating with the slave control device is operating normally. When the master control device communicating with the slave control device cannot perform normal operation, the master control device communicating with the slave control device is disconnected from the power line communication line, and another master control device starts communicating with the slave control device.

17. A slave station control device, which controls an article storage device for storing articles, characterized in that: include: A power line communication module on the slave side, used to separate the power and communication signals supplied from the power line communication line, and to transmit and receive the communication signals; A slave-side power supply module receives the power from the slave-side power line communication module; as well as The slave side sensor module is used to sense the status of the component. Wherein, the slave station side power line communication module includes: a coupler unit that supplies the power and the communication signal from the power line communication line and supplies the power to the slave-side power supply module; and The power line communication transceiver unit on the slave side receives the communication signal from the coupler unit or transmits the communication signal to the coupler unit.

18. The slave station control device according to claim 17, characterized in that: Also includes: a gas supply control module, configured to control the supply of inert gas to the article storage device; an identification module capable of communicating with an identification tag of the item stored in the item storage device; as well as A central control module on the slave side is used to control the identification module and the gas supply control module, Wherein, the identification module includes: at least one identification module-side antenna unit for performing wireless communication with the identification tag; and The identification module control unit supplies power to the identification tag via the identification module-side antenna unit and transmits and receives identification signals.

19. The slave station control device according to claim 18, characterized in that: The identification module control unit includes: Carrier generation block, generates carrier and control instructions; an antenna selection block that specifies one of the one or more connected identification module-side antenna units and selects a port to which the antenna unit is connected; a power monitoring block that monitors power output from the antenna section; and The capacitor selection block is used to match the impedance that changes due to external influences and the coil value deviation of the antenna unit.

20. A master control device communicating with a slave control device for controlling an article storage device storing articles via a power line communication line, comprising: A power line communication module on the master station side, configured to separate the power and communication signals supplied from the power line communication line, and to transmit and receive the communication signals to the power line communication line side; A master station side power supply module receives the power from the master station side power line communication module; A central control module on the master station side, used to control the master station control device; an external power module selectively receiving power from an external power supply unit; as well as The master station side sensor module is used to sense the status of the components. Wherein, the master station side power line communication module includes: a coupler unit that supplies the power and the communication signal from the power line communication line and supplies the power to the master-side power supply module; and The power line communication transceiver unit at the master station receives the communication signal from the coupler unit or transmits the communication signal to the coupler unit.

21. The master station control device according to claim 20, characterized in that: Also includes: The master station side communication module is connected to the external server and receives a control signal from the external server.

22. The master station control device according to claim 20, characterized in that: Also includes: A control signal transceiver module is connected to an external server and the external server receives the control signal; as well as The master station side communication unit is used to send and receive the control signal with the control signal transceiver module, Wherein, the control signal transceiver module includes: a control signal transceiver module-side power supply unit connected to the power application section of the power line communication line to receive the power; and The communication unit on the control signal transceiver module side is used to send and receive the control signal.

23. The master station control device according to claim 20, characterized in that: The master station side power line communication module is equipped with multiple, and the multiple master station side power line communication modules are independently connected to the master station side power supply module and the master station side central control module respectively. The master station control device also includes: The switch module selectively connects one of the plurality of master-side power line communication modules to the power line communication line side.

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