Data interaction method and semiconductor process equipment

Abstract

The invention discloses a data interaction method and semiconductor process equipment. The method comprises the steps that a preset format of a data interaction message between an upper computer and a lower computer is acquired, and the format of the data interaction message comprises that a transmission control protocol data part comprises a target message header and a target data segment, and the data interaction message is a transmission control protocol / Internet protocol message; the target message header comprises a message type, a message type subclass, a serial number, a confirmation serial number and a data length; and based on the format of the data interaction message, carrying out at least one of the following processing on the data interaction message: sending, receiving and analyzing. By standardizing the format of the data interaction message, standardized communication between the upper computer and the lower computer is achieved, TCP / IP is adopted as a bottom-layer basic transmission scheme, data type distinguishing interaction is conducted only through the message type and the interaction format (namely, the message type subclass), complexity is low, and good stability is achieved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor, and particularly relates to a data interaction method and a semiconductor process equipment. BACKGROUND

[0002] The vertical furnace equipment is an important equipment on a semiconductor production line, and is mainly used for oxidation and deposition processes of the semiconductor production line. The current semiconductor process equipment is generally divided into an upper computer and a lower computer at a software control level. The upper computer is used to realize a user interface (UI) related to user interface operation, and the lower computer is used to realize operation related to device driving.

[0003] In the related art, data interaction between the upper computer and the lower computer is mainly realized through an Internet Communications Engine (ICE). However, the ICE software is a general open source software, and has a large number of integrated functions, including many unnecessary functions (such as ssl function, firewall penetration, etc.) for the semiconductor process equipment. In actual use of the semiconductor process equipment, the ICE software often has a large load and disconnection due to high complexity, which leads to poor stability of data interaction between the upper computer and the lower computer. SUMMARY

[0004] Embodiments of the present application provide a data interaction method and a semiconductor process equipment to solve the problem of poor stability of data interaction between an upper computer and a lower computer in the related art.

[0005] To achieve the above object, the embodiments of the present application adopt the following technical solutions:

[0006] In a first aspect, the embodiments of the present application provide a data interaction method applied to an upper computer or a lower computer of a semiconductor process equipment. The method comprises: obtaining a format of a data interaction message between the upper computer and the lower computer, which is set in advance, wherein the format of the data interaction message comprises: a transmission control protocol data part of the data interaction message comprises a target message header and a target data segment, the data interaction message is a transmission control protocol / Internet Protocol message, the target message header comprises: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, and the message type subclass is a subtype of the message type; and performing at least one of the following processing on the data interaction message based on the format of the data interaction message: sending, receiving and analyzing.

[0007] In a second aspect, the embodiments of the present application provide a semiconductor process equipment, which comprises: an upper computer and a lower computer in communication connection with the upper computer, wherein the upper computer and the lower computer are used to realize the steps of the data interaction method according to the first aspect of the present application.

[0008] The above at least one technical solution adopted by the embodiments of the present application can achieve the following beneficial effects:

[0009] The embodiments of the present application are applied to an upper computer or a lower computer of a semiconductor process equipment, and a format of a data interaction message between the upper computer and the lower computer is acquired, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet interconnection protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, and based on the format of the data interaction message, the data interaction message is processed in at least one of the following manners: sending, receiving and analyzing. The embodiments of the present application pre-set the format of the data interaction message, that is, the format of the data interaction message is standardized, the standardized communication between the upper and lower computers is realized, and the transmission control protocol / internet interconnection protocol (TCP / IP) is used as a bottom basic transmission scheme, only the message type and the interaction format (i.e. the message type subclass) are used to distinguish and interact the data types, the complexity is low, and the stability is good. BRIEF DESCRIPTION OF DRAWINGS

[0010] The accompanying drawings, which are included to provide a further understanding of the present application, form a part of the present application and illustrate the illustrative embodiments of the present application and the explanation of the present application, and do not constitute improper limitations on the present application. In the drawings:

[0011] Figure 1 A structure schematic diagram of data interaction between upper and lower computers is provided for an embodiment of the present application;

[0012] Figure 2 A flow schematic diagram of a data interaction method is provided for an embodiment of the present application;

[0013] Figure 3 A format of a data interaction message is provided for an embodiment of the present application;

[0014] Figure 4 A schematic diagram of a target message header and a target data segment is provided for an embodiment of the present application;

[0015] Figure 5 A flow schematic diagram of a data interaction method is provided for another embodiment of the present application;

[0016] Figure 6 An interaction schematic diagram of a period type message is provided for an embodiment of the present application;

[0017] Figure 7 A format diagram of a target data section of a periodical message according to an embodiment of the present application is provided;

[0018] Figure 8 A flow diagram of a data interaction method according to another embodiment of the present application is provided;

[0019] Figure 9 An interaction diagram of a command message according to an embodiment of the present application is provided;

[0020] Figure 10 A format diagram of a target data section of a command request message according to an embodiment of the present application is provided;

[0021] Figure 11 A format diagram of a target data section of a command request feedback message according to an embodiment of the present application is provided;

[0022] Figure 12 A flow diagram of a data interaction method according to another embodiment of the present application is provided;

[0023] Figure 13 An interaction diagram of a request message according to an embodiment of the present application is provided;

[0024] Figure 14 A format diagram of a target data section of a data request message according to an embodiment of the present application is provided;

[0025] Figure 15 A format diagram of a target data section of a request feedback message according to an embodiment of the present application is provided;

[0026] Figure 16 A flow diagram of a data interaction method according to another embodiment of the present application is provided;

[0027] Figure 17 An interaction diagram of an alarm message according to an embodiment of the present application is provided;

[0028] Figure 18 A format diagram of a target data section of an alarm message according to an embodiment of the present application is provided;

[0029] Figure 19 A format diagram of a target data section of an alarm feedback message according to an embodiment of the present application is provided;

[0030] Figure 20 A flow diagram of a data interaction method according to another embodiment of the present application is provided;

[0031] Figure 21 An interaction diagram of a heartbeat message according to an embodiment of the present application is provided;

[0032] Figure 22 A structural schematic diagram of a vertical furnace equipment provided for an embodiment of the present application is shown in FIG. 1.

[0033] Figure 23 A data interaction schematic diagram corresponding to an operation flow of the STM provided for an embodiment of the present application is shown in FIG. 2.

[0034] Figure 24 A structural schematic diagram of a semiconductor process equipment provided for an embodiment of the present application is shown in FIG. 3. DETAILED DESCRIPTION

[0035] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described below in connection with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without any creative work fall within the scope of protection of the present application.

[0036] The terms "first", "second", etc. in the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein. In addition, "and / or" in the present application means at least one of the connected objects, and the character " / " generally means that the front and rear associated objects are in an "or" relationship. It should be noted that the data involved in the present application are all obtained on the premise of obtaining user authorization.

[0037] The vertical furnace equipment is an important equipment on the semiconductor production line, and is mainly used for oxidation and deposition processes of the semiconductor production line. The current semiconductor process equipment is generally divided into upper and lower computers at the software control level. The upper computer is used to realize the user interface UI related to the user interface operation, and the lower computer is used to realize the operation related to the device drive.

[0038] In the related art, the data interaction between the upper and lower computers is mainly realized through an Internet communication engine ICE. The ICE is a communication protocol product and an object-oriented middleware platform, which provides object-oriented remote process calling, network computing and publishing and subscribing functions. The ICE is used to realize the basic object operation of a website application, encapsulates the basic object operation and the database operation in this layer, and performs more rich expression and operation in the business logic layer and the presentation layer. However, the ICE software belongs to general-purpose open source software, has more integrated functions, and includes many unnecessary functions (such as ssl functions, firewall penetration, etc.) for semiconductor process equipment. In actual use of the semiconductor process equipment, the ICE software often has the problems of too large load and disconnection due to the high complexity, thereby causing poor stability of the data interaction between the upper and lower computers. Therefore, the application provides a data interaction method and semiconductor process equipment to solve the problem of poor stability of the data interaction between the upper and lower computers in the related art.

[0039] Figure 1 The application provides a structure diagram of data interaction between upper and lower computers. As shown in Figure 1 The core module includes an upper computer received data processing module, an upper computer sent data processing module, a lower computer received data processing module and a lower computer sent data processing module, wherein:

[0040] The upper computer received data processing module is run in the upper computer, mainly processes the data received by the Tcp listening port, and the data includes process data periodically reported by the lower computer, feedback data responded by the lower computer to the upper computer and alarm data sent by the lower computer. The feedback data includes data request command data of the upper computer, command issuing result feedback data of the upper computer and heartbeat feedback data sent by the lower computer. The module feeds back the received data to the application program of the upper computer after analyzing the received data.

[0041] The upper computer sent data processing module is run in the upper computer, receives the instructions issued by the application program, processes the instructions in the corresponding format and sends the instructions to the Tcp listening port. The sent data includes command data, request data and heartbeat data.

[0042] The lower computer received data processing module is run in the lower computer, mainly processes the data received by the Tcp port, and the data includes command data and request data issued by the upper computer. The module sends the received data to the application program of the lower computer after analyzing the received data.

[0043] The lower computer sent data processing module is run in the lower computer, is mainly used for periodically sending process data, sending alarm messages, combining the feedback data of the command data or the request data received by the application program of the upper computer and sending the feedback data to the Tcp listening port.

[0044] The technical solutions provided by the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0045] Figure 2 A flow chart of a data interaction method provided in one embodiment of the present application. Figure 2 As shown, the data interaction method of the embodiment of the present application may specifically include the following steps:

[0046] S201, obtain the format of the data interaction message between the preset upper computer and the lower computer, the format of the data interaction message includes: the transmission control protocol data part of the data interaction message includes a target message header and a target data segment, the data interaction message is a transmission control protocol / Internet interconnection protocol message, the target message header includes: message type, message type subclass, sequence number, confirmation sequence number and data length, and the message type subclass is a subtype of the message type.

[0047] In the embodiment of the present application, the execution subject of the data interaction method of the embodiment of the present application is the host computer or the slave computer of the semiconductor process equipment.

[0048] The format of the data exchange message between the host computer and the slave computer is pre-set, such as Figure 3 As shown, compared to existing TCP / IP-based messages, the overall format of the data exchange message in the embodiment of the present application remains unchanged and is still a TCP / IP protocol message, belonging to an expansion scheme based on the TCP / IP protocol data segment. The TCP data portion of the TCP / IP message includes the target message header and target data segment set in the embodiment of the present application.

[0049] Among them, the target message header and target data segment are as follows: Figure 4 As shown, the target message header includes: message type (2 bytes), message type subclass (2 bytes), 32-bit sequence number (4 bytes), 32-bit confirmation sequence number (4 bytes), and data length (4 bytes), totaling 16 bytes. Each field has a fixed number of bytes and is a fixed field. The target data segment includes target data (variable bytes), which has a variable number of bytes.

[0050] The message type is used to indicate the data type of the current data exchange message. It is 2 bytes long and can include, but is not limited to, any of the following: periodic messages, command messages, request messages, heartbeat messages, and alarm messages. Different types of messages are distinguished by using specified characters or integer type (int) data. For example, the int type 1, 2, 3, 4, ... can be used to distinguish them. For example, the following examples are: periodic messages (1), command messages (2), request messages (3), heartbeat messages (4), and alarm messages (5).

[0051] Wherein:

[0052] Periodic message: periodically sent by the lower machine to the host computer for the changed data; according to the commonly used semiconductor process equipment, the process cycle data can be divided into two categories: 100ms data and 500ms data.

[0053] Command message: sent by the host computer to the lower machine for performing certain operations, which includes the request message (i.e. command request message) of the host computer and the feedback message (i.e. command request feedback message) of the lower machine.

[0054] Request message: sent by the host computer to the lower machine for requesting some data, for example, some periodic data is not updated for a long time or for some periodic data with low requirements, and at the same time, considering reducing the number of periodic data, the data is obtained through this type of message. This type of message also includes the request message (i.e. data request message) of the host computer and the feedback message (i.e. request feedback message) of the lower machine.

[0055] Heartbeat message: sent by the host computer to the lower machine for detecting the connection state of the TCP data channel, and if there is a long time without feedback, the reconnection (i.e. reconnection) operation is performed; this type of message also includes the request message (i.e. heartbeat sending message) of the host computer and the feedback message (i.e. heartbeat feedback message) of the lower machine.

[0056] Alarm message: sent by the lower machine to the host computer for informing the host computer of the current abnormal alarm or interlock alarm lamp information of the lower machine; this type of message also includes the request message (i.e. alarm message) of the lower machine and the feedback message (i.e. alarm feedback message) of the host computer.

[0057] Message type subclass, i.e. the sub-type of the message type, is used to indicate the sub-class of the data type of the current data interaction message, and the length is 2 bytes. The message type subclass can include but is not limited to any one of the following: sending period, request message and feedback message. Similar to the message type field, the data of different sub-class types is distinguished by specified characters or int type data, for example, int types 1, 2, 3, 4, … can be used for distinction, as follows:

[0058] Periodic message indicating data period 100ms (1), 500ms (2), etc.

[0059] Command message indicating whether the current message is a command request (1) or a feedback to the command (2).

[0060] Request message indicating whether the current message is a data request (1) or a feedback to the request (2).

[0061] The heartbeat type message indicates whether the current message is a heartbeat request (1) or a heartbeat response (2).

[0062] The alarm type message indicates whether the current message is an alarm request (1) or a feedback to the alarm (2).

[0063] For example, if the message type of a message is 1 and the message type subclass is 2, it indicates that the message is a periodic message, and the sending period is 500 ms; similarly, if the message type of a message is 3 and the message type subclass is 1, it indicates that the message is a request type message sent by the upper computer to the lower computer for data request.

[0064] The sequence number is 4 bytes (32 bits) long, and is sequentially increased by the message sender according to each type of message, ranging from 1 to (2 32 -1), which is used to indicate the sequence number of the current message to avoid mispositioning when multi-thread processing.

[0065] The confirmation sequence number is 4 bytes (32 bits) long, and is used for the feedback message of the command type, request type, heartbeat type and alarm type message, which is determined by the message feedback party according to the message sequence number of the message sender (1 to (2 32 -1), which is mainly used to distinguish different messages that need feedback. If it is a non-feedback type message, the confirmation sequence number is filled as 0.

[0066] The target data segment is used to describe the specific interaction data of the data interaction message, which is denoted as target data.

[0067] The upper computer or the lower computer obtains the format of the data interaction message before sending, receiving and analyzing the data interaction message.

[0068] In S202, at least one of the following is performed on the data interaction message based on the format of the data interaction message: sending, receiving and analyzing.

[0069] In the embodiments of the present application, the upper computer or the lower computer sends, receives and analyzes the data interaction message based on the obtained format of the data interaction message when sending, receiving and analyzing the data interaction message.

[0070] In summary, the data interaction method of the embodiment of the application is applied to the host computer or the lower computer of the semiconductor process equipment, the format of the data interaction message between the host computer and the lower computer is acquired, the format of the data interaction message includes: the transmission control protocol data part of the data interaction message includes a target message header and a target data segment, the data interaction message is a transmission control protocol / internet protocol message, the target message header includes: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, and at least one of the following processes is performed on the data interaction message based on the format of the data interaction message: sending, receiving and analyzing. The format of the data interaction message is set in advance, that is, the format of the data interaction message is standardized, standardized communication between the host computer and the lower computer is realized, TCP / IP is used as the underlying transmission scheme, and only the message type and the interaction format (i.e., the message type subclass) are used to distinguish and interact the data types, so that the complexity is low and the stability is good.

[0071] Figure 5 A flowchart of a data interaction method is provided for another embodiment of the application. As shown in Figure 5 the embodiment shown in Figure 2 On the basis of the embodiment shown in

[0072] S501, the format of the data interaction message between the host computer and the lower computer is acquired, the format of the data interaction message includes: the transmission control protocol data part of the data interaction message includes a target message header and a target data segment, the data interaction message is a transmission control protocol / internet protocol message, the target message header includes: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, and the message type subclass is a subtype of the message type.

[0073] In the embodiment of the application, step S501 is the same as step S201 in the above embodiment, and will not be described here.

[0074] Step S202 "based on the format of the data interaction message, at least one of the following processes is performed on the data interaction message: sending, receiving and analyzing" in the above embodiment can specifically include the following step S502:

[0075] S502, the lower computer periodically sends a periodic message to the host computer, the message type in the target message header of the periodic message is a periodic message, the message type subclass is a sending period, the target data segment uses a first separator to distinguish different sub-data and uses a second separator to distinguish different data in the same sub-data, and the data includes: a data name, a data type and a data value.

[0076] In the embodiments of the present application, for the periodic message, the lower machine periodically sends the periodic message to the upper machine, and the message type in the target message header of the periodic message is the periodic message (1), and the message type subclass is the sending period, for example, 100 ms (1), 500 ms (2).

[0077] The interaction diagram of the periodic message is shown in Figure 6 The lower machine sends the periodic message to the upper machine according to the period, and the messages of different types and subclasses (100 ms, 500 ms) can use the same sequence number or different sequence numbers. Figure 6 The same sequence number is used for messages of different types and subclasses as an example. Since the format of the target data segment of the periodic message is the same, the upper machine only needs to listen and parse according to the same data format, and the difference is only in the period sent by the lower machine and the data payload of the periodic message by the lower machine, that is, the 100 ms periodic data generally belongs to the data with high real-time requirement but small data volume, otherwise the processing load of the upper machine will be increased.

[0078] The format of the target data segment of the periodic message is shown in Figure 7 Considering the inconsistency of the length of the sub-data, the fixed byte length is not used to set the format of the target data segment, but the form of the separator is used to complete it, and two levels of separators are used, the first level separator (corresponding to the separator 1 in Figure 7 ) is used to distinguish different sub-data, and the second level separator (corresponding to the separator 2 in Figure 7 ) is used to distinguish different data in the same sub-data, which can include but is not limited to data name, data type and data value.

[0079] Among them, the data name can be represented by a string, the data type can be represented by a string, the commonly used data types are double, int, string, etc., and the data value can also be represented by a string. The separator can be represented by some special characters not commonly used in semiconductor process equipment, such as #, & symbols, etc.

[0080] The following uses “##” as the first level separator and “&&” as the second level separator as an example:

[0081] MFC2Feedback&&double&&35.1##MainRecipeName&&string&&process1

[0082] The above example shows two data, wherein: the first data has a name of MFC2Feedback, a data type of double, and a data value of 35.1; and the second data has a name of MainRecipeName, a data type of string, and a data value of process1.

[0083] In summary, the data interaction method of the embodiment of the application is applied to the lower computer, and the format of the data interaction message between the upper computer and the lower computer is acquired, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number, and a data length, for a periodic message, based on the format of the data interaction message, the lower computer periodically sends a periodic message to the upper computer, the message type in the target message header of the periodic message being a periodic message, the message type subclass being a sending period, the target data segment using a first-level separator to distinguish different sub-data and using a second-level separator to distinguish different data in the same sub-data, the data comprising: a data name, a data type, and a data value. The embodiment of the application realizes standardized communication between the upper and lower computers by pre-setting the format of the periodic message, i.e., by standardizing the format of the periodic message, and uses TCP / IP as a bottom basic transmission scheme, and only uses the message type and the interaction format (i.e., the message type subclass) to distinguish and interact the periodic message, so that the complexity is low and the stability is good.

[0084] Figure 8 A flowchart of a data interaction method is provided for another embodiment of the application. As shown in Figure 8 the embodiment shown in Figure 2 On the basis of the embodiment shown in

[0085] S801, the format of the data interaction message between the upper computer and the lower computer is acquired, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number, and a data length, the message type subclass being a subtype of the message type.

[0086] In the embodiment of the application, step S801 is the same as step S201 in the above embodiment, and will not be described again here.

[0087] The step S202 in the above embodiment "performing at least one of the following processing on the data interaction message based on the format of the data interaction message: sending, receiving and parsing" can specifically include the following steps S802 or S803:

[0088] S802, the host sends a command request message to the lower computer, the message type in the target message header of the command request message is a command message, the message type subclass is a request message, the target data segment uses a first level separator to distinguish different sub-commands, uses a second level separator to distinguish different command data in the same sub-command, the command data includes: command name, parameter number and different parameters, uses a third level separator to distinguish different parameter data in the same parameter, the parameter data includes: parameter name, parameter type and parameter value.

[0089] In the embodiment of the application, for the command message, the host sends a command request message to the lower computer, the message type in the target message header of the command request message is a command message (2), and the message type subclass is a request message (1).

[0090] The interaction schematic diagram of the command message is as shown in Figure 9 The host sends two commands, that is, sends two command request messages, the first serial number is 115, and the open port A command is executed; the second serial number is 116, and the open port B command is executed.

[0091] The format of the target data segment of the command request message is as shown in Figure 10 Considering the inconsistency of the sub-commands, the format of the target data segment is not set by using a fixed byte length, but is completed by using separators, that is, a third level separator, a first level separator (corresponding to the separator 1 in Figure 10 ) is used to distinguish different sub-commands, a second level separator (corresponding to the separator 2 in Figure 10 ) is used to distinguish different command data in the same sub-command, and the command data can specifically include but is not limited to command name, parameter number and different parameters (parameter 1, parameter 2, …), and a third level separator (corresponding to the separator 3 in Figure 10 ) is used to distinguish different parameter data in the same parameter, and the parameter data can specifically include but is not limited to parameter name, parameter type and parameter value.

[0092] Wherein, the command name can be expressed by string, such as open, close and other commands, the number of parameters can be expressed by integer to string, indicating that the command has several parameters, the parameter name is used to indicate the name of the current parameter, the parameter type is used to indicate the data type of the parameter, which can be expressed by string, such as double, int, string and the like, the parameter value is used to indicate the specific value of the parameter (such as integer value or string type value), and the separator can be expressed by some special characters not commonly used in semiconductor process equipment, such as #, &, $ and the like.

[0093] The following uses "##" as a first-level separator, "&&" as a second-level separator, and "$$" as a third-level separator for illustration:

[0094] move&&2&&source$$string$$shelf1&&destination$$string$$LoadPortA##

[0095] The above example indicates that the command move has two parameters, the first parameter is the source address (source), the parameter type is string, and the parameter value is shelf 1, and the second parameter is the destination address (destination), the parameter type is string, and the parameter value is the load port A (LoadPortA). For the lower computer, it is parsed to execute the move service to move the foup from the shelf 1 to the load port A.

[0096] S803, the lower computer sends a command request feedback message to the upper computer, the message type in the target message header of the command request feedback message is a command message, the message type subclass is a feedback message, the target data segment is used to distinguish different sub-command feedbacks by using a first-level separator, and different command feedback data in the same sub-command feedback is distinguished by using a second-level separator. The command feedback data includes: command name and command execution status.

[0097] In the embodiment of the application, for the command message, the lower computer sends a command request feedback message to the upper computer, the message type in the target message header of the command request feedback message is a command message (2), and the message type subclass is a feedback message (2).

[0098] As Figure 9As shown, the lower computer performs command processing and executes operations after receiving the command request message, and sends the command request feedback message after the open port A command execution is completed. The sequence number is determined according to the current sequence, but the confirmation sequence number needs to be fixed as 115. Similarly, the command request feedback message is sent after the open port B command execution is completed. The sequence number is determined according to the current sequence, but the confirmation sequence number needs to be fixed as 116. After the upper computer receives the two command request feedback messages, the results of different command executions can be distinguished according to the message confirmation sequence number.

[0099] The format of the target data segment of the command request feedback message is as shown in Figure 11 As shown, considering the inconsistency of sub-command feedback, a fixed byte length is not used to set the format of the target data segment, but a separator is used to complete it. A two-level separator is used, a primary separator (corresponding to the separator 1 in Figure 11 ) is used to distinguish different sub-command feedback, and a secondary separator (corresponding to the separator 2 in Figure 11 ) is used to distinguish different command feedback data in the same sub-command feedback. The command feedback data can include but is not limited to command name and command execution state.

[0100] The command name indicates the name of the command that needs to be fed back, and can use a string to represent, such as open, close and other commands. The command execution state indicates the specific state of the feedback command execution, such as start, doing, end, fail, success and other basic states. One command statement can have multiple feedback statements, but the end state is the end statement. After the upper computer receives the feedback command statement of the end state, it can close the corresponding command execution statement thread and no longer listen to this command feedback information. Similarly, the lower computer does not necessarily need to track each state of the command statement feedback. The upper computer can also track the corresponding command execution state through the data of the periodic message. The separator can use some special characters that are not commonly used in semiconductor process equipment to represent, such as #, &, $ and other symbols.

[0101] The following uses “##” as the primary separator and “&&” as the secondary separator for example:

[0102] ##Move&&doing##

[0103] The above example indicates that the current execution state of the move command is executing.

[0104] In summary, the data interaction method of the embodiment of the present application is applied to the upper computer or the lower computer to obtain the format of the data interaction message between the upper computer and the lower computer that is preset. The format of the data interaction message includes: the transmission control protocol data part of the data interaction message includes a target message header and a target data segment. The data interaction message is a transmission control protocol / Internet protocol message. The target message header includes: message type, message type subclass, sequence number, confirmation sequence number and data length. For command-type messages, based on the format of the data interaction message, the upper computer sends a command request message to the lower computer. The message type in the target message header of the command request message is a command-type message, the message type subclass is a request message, and the target data segment uses a three-level separator; the lower computer sends a command request feedback message to the upper computer. The message type in the target message header of the command request feedback message is a command-type message, the message type subclass is a feedback message, and the target data segment uses a two-level separator. The embodiment of the present application realizes standardized communication between upper and lower computers by pre-setting the format of command-type messages, that is, by standardizing the format of command-type messages, and adopts TCP / IP as the underlying basic transmission solution. Command-type messages are distinguished and interacted only by message type and interaction format (that is, message type subclass), which has low complexity and good stability.

[0105] Figure 12 A flow chart of a data interaction method provided in another embodiment of the present application is shown below. Figure 12 As shown, in Figure 2 On the basis of the illustrated embodiment, for a request message, the data interaction method of the embodiment of the present application may specifically include the following steps:

[0106] S1201, obtain the pre-set format of the data interaction message between the upper computer and the lower computer, the format of the data interaction message includes: the transmission control protocol data part of the data interaction message includes a target message header and a target data segment, the data interaction message is a transmission control protocol / Internet interconnection protocol message, the target message header includes: message type, message type subclass, sequence number, confirmation sequence number and data length, and the message type subclass is a subtype of the message type.

[0107] In the embodiment of the present application, step S1201 is the same as step S201 in the above embodiment and will not be repeated here.

[0108] In the above embodiment, step S202 of “performing at least one of the following processing on the data interaction message based on the format of the data interaction message: sending, receiving, and parsing” may specifically include the following steps S1202 or S1203:

[0109] S1202, the host sends a data request message to the lower computer, the message type in the target message header of the data request message is a request message, the message type subclass is a request message, the target data section uses a one-level separator to distinguish different sub-requests, and uses a two-level separator to distinguish different request data in the same sub-request, and the request data includes a request name and a requested data type.

[0110] In the embodiment of the application, for the request message, the host sends a data request message to the lower computer, the message type in the target message header of the data request message is a request message (3), and the message type subclass is a request message (1).

[0111] The interaction schematic diagram of the request message is as shown in Figure 13 Similar to the command message, the host sends two data requests, that is, sends two data request messages, the first sequence number is 115, and the A data is requested; the second sequence number is 116, and the B data is requested.

[0112] The format of the target data section of the data request message is as shown in Figure 14 Considering the inconsistency of the sub-requests, the format of the target data section is not set by using a fixed byte length, but is completed by using a separator, two-level separators are used, a one-level separator (corresponding to the separator 1 in Figure 14 ) is used to distinguish different sub-requests, and a two-level separator (corresponding to the separator 2 in Figure 14 ) is used to distinguish different request data in the same sub-request. The request data can specifically include but is not limited to a request name and a requested data type.

[0113] The request name indicates the name of the data that is wanted to be acquired, and the requested data type indicates the type of the data that is wanted to be acquired, can be indicated by using a string, such as double, int, string, etc., and the separator can be indicated by using some special characters that are not commonly used in semiconductor process equipment, for example, #, &, $, etc.

[0114] The following takes the “##” sign as a one-level separator and the “&&” sign as a two-level separator as an example for illustration:

[0115] ##MapSlot1_Status&&int##MapSlot2_Status&&int

[0116] The above example indicates that the current state values (Status) of the slot 1 (slot1) and the slot 2 (slot2) after scanning (Map) are acquired.

[0117] S1203, the lower computer sends a request feedback message to the upper computer, the message type in the target message header of the request feedback message is a request message, the message type subclass is a feedback message, the target data segment uses a first level separator to distinguish different sub-request feedbacks, uses a second level separator to distinguish different request feedback data in the same sub-request feedback, and the request feedback data includes: a feedback request name, a feedback data type, and a feedback data value.

[0118] In the embodiment of the application, for the request message, the lower computer sends a request feedback message to the upper computer, the message type in the target message header of the request feedback message is a request message (3), and the message type subclass is a feedback message (2).

[0119] As shown in Figure 13 , after receiving the data request message, the lower computer performs a data acquisition operation, and after the A data acquisition is completed, a request feedback message is sent, the sequence number is determined according to the current sequence of the lower computer, but the confirmation sequence number needs to be fixed as 115. Similarly, after the B data acquisition is completed, a request feedback message is sent, the sequence number is determined according to the current sequence of the lower computer, but the confirmation sequence number needs to be fixed as 116. After the upper computer receives the two request feedback messages, the acquisition results of different data can be distinguished according to the message confirmation sequence numbers.

[0120] The format of the target data segment of the request feedback message is as shown in Figure 15 . Considering the inconsistency of the sub-request feedback, a fixed byte length is not used to set the format of the target data segment, but a separator is used to complete it. A second level separator and a first level separator (corresponding to the separator 1 in Figure 15 ) are used to distinguish different sub-request feedbacks, and the second level separator (corresponding to the separator 2 in Figure 15 ) is used to distinguish different request feedback data in the same sub-request feedback. The request feedback data can specifically include but is not limited to a feedback request name, a feedback data type, and a feedback data value.

[0121] The feedback request name represents the name of the data fed back by the lower computer, which can be represented by a string. The feedback data type represents the type of the data fed back by the lower computer, which can be represented by a string, such as double, int, string, etc. The feedback data value represents the value of the data fed back by the lower computer, which can be represented by a string. The separator can be represented by some special characters that are not commonly used in semiconductor process equipment, such as #, &, $, etc.

[0122] The following uses “##” as a first level separator and “&&” as a second level separator for example:

[0123] ##MapSlot1_Status&&int&&1##MapSlot2_Status&&int$$2

[0124] The above example shows that the current status value (Status) of the scanned (Map) slot 1 is 1, and the type is int, and the current status value (Status) of the scanned (Map) slot 2 is 2, and the type is int.

[0125] In summary, the data interaction method of the embodiment of the application is applied to the upper computer or the lower computer, and the format of the data interaction message between the upper computer and the lower computer is acquired, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number, and a data length, for a request type message, based on the format of the data interaction message, the upper computer sends a data request message to the lower computer, the message type in the target message header of the data request message being a request type message, the message type subclass being a request message, and the target data segment using a two-level separator; the lower computer sends a request feedback message to the upper computer, the message type in the target message header of the request feedback message being a request type message, the message type subclass being a feedback message, and the target data segment using a two-level separator. The embodiment of the application realizes standardized communication between the upper and lower computers by pre-setting the format of the request type message, that is, by standardizing the format of the request type message, and uses TCP / IP as a bottom basic transmission scheme, and only uses the message type and the interaction format (that is, the message type subclass) to distinguish and interact the request type message, so that the complexity is low and the stability is good.

[0126] Figure 16 A flowchart of a data interaction method is provided for another embodiment of the application. As shown in Figure 16 the embodiment, for an alarm type message, the data interaction method of the embodiment of the application can specifically include the following steps: Figure 2

[0127] S1601, acquiring a pre-set format of a data interaction message between an upper computer and a lower computer, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number, and a data length, the message type subclass being a subtype of the message type.

[0128] In the embodiment of the application, step S1601 is the same as step S201 in the above embodiment, and will not be described here again.

[0129] ​The step S202 in the above embodiment "performing at least one of the following processing on the data interaction message based on the format of the data interaction message: sending, receiving and parsing" can specifically include the following steps S1602 or S1603:

[0130] S1602, the lower computer sends an alarm message to the upper computer, the message type in the target message header of the alarm message is an alarm type message, the message type subclass is a request message, the target data segment is divided into different alarm data by using a first level separator, and the alarm data includes an alarm identity, an alarm name, an alarm level, an alarm time, an alarm description and an alarm type.

[0131] In the embodiment of the application, for the alarm type message, the lower computer sends an alarm message to the upper computer, the message type in the target message header of the alarm message is an alarm type message (5), and the message type subclass is a request message (1).

[0132] The interaction schematic diagram of the alarm type message is as shown in Figure 17 The lower computer triggers the alarm process randomly according to the actual state, for example, the lower computer sends two alarm messages, the first sequence number is 1, and the second sequence number is 2.

[0133] The format of the target data segment of the alarm message is as shown in Figure 18 Considering the inconsistency of the alarm data, a fixed byte length is not used to set the format of the target data segment, but a separator is used to complete it, and a first level separator (corresponding to the separator 1 in Figure 18 ) is used to distinguish different alarm data, and the alarm data can specifically include but is not limited to an alarm identity, an alarm name, an alarm level, an alarm time, an alarm description and an alarm type.

[0134] The alarm identity (Identity Document, ID for short) is used to indicate the ID number of the alarm, and is used to distinguish different alarms. The alarm name represents the name of the current alarm, which can be represented by a string. The alarm level represents the level of the current alarm, which can be represented by a string. The alarm time represents the time when the current alarm is thrown. The alarm description represents some basic description of the current alarm. The alarm type represents that the current alarm is a block type or a non-block type, wherein the block type means that the current program is paused at the position where the alarm is thrown, and the upper computer user can set a retry command to make the lower computer catch the retry to perform the corresponding operation of the retry command; the non-block type means that the upper computer user sets to perform the retry command to make the lower computer catch the retry without performing the corresponding operation of the retry command. The separator can be represented by some special characters that are not commonly used in semiconductor process equipment, such as #, &, $ and the like.

[0135] The following is an example using the "## " as a first-level separator:

[0136] 9095000##ALRM_PROCESS_START_FAILED##1#20230823165522##start process failed, because of not Idle status or Standby status.##block

[0137] The above example indicates that the current alarm ID is 9095000, the alarm name is ALRM_PROCESS_START_FAILED, the alarm level is 1, the alarm time is August 23, 2023, 16:55:22 (20230823165522), the alarm description is "start process failed, because of not Idle status or Standby status.", and the alarm type is block.

[0138] In S1603, the host sends an alarm feedback message to the lower computer. The message type in the target message header of the alarm feedback message is an alarm message, the message type subclass is a feedback message, the target data segment is divided into different alarm feedback data using a first-level separator, and the alarm feedback data includes an alarm identifier, an alarm type, and a processing command.

[0139] In the embodiments of the present application, for an alarm message, the host sends an alarm feedback message to the lower computer. The message type in the target message header of the alarm feedback message is an alarm message (5), and the message type subclass is a feedback message (2).

[0140] As shown in Figure 17 , the host sets a processing command after receiving an alarm message. After the setting is completed, the host sends an alarm feedback message. The sequence number is determined according to the current sequence of the host, but the confirmation sequence number needs to be fixed as 1 or 2. After receiving two alarm feedback messages, the lower computer can distinguish the processing commands corresponding to different alarms according to the message confirmation sequence number.

[0141] The format of the target data segment of the alarm feedback message is shown in Figure 19 . Considering the inconsistency of the alarm feedback data, a fixed byte length is not used to set the format of the target data segment, but a separator is used to complete it. A first-level separator (corresponding to the separator 1 in Figure 19 ) is used to distinguish different alarm feedback data. The alarm feedback data can include, but is not limited to, an alarm identifier, an alarm name, and a processing command.

[0142] Wherein, the alarm identifier ID is used to indicate the ID number of the feedback alarm, and is used to distinguish different alarms. The alarm name represents the name of the current feedback alarm, and can be represented by a string. The processing command is generally a clear operation and a retry operation, which can be customized by the lower machine and executed according to the corresponding command flow. The interval symbol can be represented by some special characters that are not commonly used in semiconductor process equipment, such as #, &, $ and the like.

[0143] In summary, the data interaction method of the embodiment of the application is applied to the upper machine or the lower machine, and the format of the data interaction message between the upper machine and the lower machine is obtained, the format of the data interaction message comprising: the transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, for an alarm message, based on the format of the data interaction message, the lower machine sends an alarm message to the upper machine, the message type in the target message header of the alarm message being an alarm message, the message type subclass being a request message, and the target data segment using a first-level interval symbol; the upper machine sends an alarm feedback message to the lower machine, the message type in the target message header of the alarm feedback message being an alarm message, the message type subclass being a feedback message, and the target data segment using a first-level interval symbol. The embodiment of the application realizes standardized communication between the upper and lower machines by pre-setting the format of the alarm message, that is, by standardizing the format of the alarm message, and uses TCP / IP as the underlying basic transmission scheme, and only the message type and the interaction format (i.e. the message type subclass) are used to distinguish and interact the alarm message, so that the complexity is low and the stability is good.

[0144] Figure 20 A flowchart of a data interaction method is provided for another embodiment of the application. As shown in Figure 20 the embodiment shown in Figure 2 On the basis of the embodiment shown, for a heartbeat message, the data interaction method of the embodiment of the application can specifically include the following steps:

[0145] S2001, obtaining a pre-set format of a data interaction message between an upper machine and a lower machine, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, the message type subclass being a sub-type of the message type.

[0146] In the embodiment of the application, step S2001 is the same as step S201 in the above embodiment, and will not be described again here.

[0147] The step S202 in the above embodiment "performing at least one of the following processing on the data interaction message based on the format of the data interaction message: sending, receiving and parsing" can specifically include the following steps S2002 or S2003:

[0148] S2002, the host sends a heartbeat sending message to the lower machine, the message type in the target message header of the heartbeat sending message is a heartbeat message, the message type subclass is a request message, and the target data segment is empty.

[0149] In the embodiment of the application, for the heartbeat message, the host sends a heartbeat sending message to the lower machine, the message type in the target message header of the heartbeat sending message is a heartbeat message (4), and the message type subclass is a request message (1).

[0150] The interaction schematic diagram of the heartbeat message is shown in Figure 21 The host sends a heartbeat sending message according to the heartbeat period, the first serial number is 115, and the second serial number is 116. The target data segment of the heartbeat sending message is empty.

[0151] S2003, the lower machine sends a heartbeat feedback message to the host, the message type in the target message header of the heartbeat feedback message is a heartbeat message, the message type subclass is a feedback message, the target data segment is empty, and the confirmation serial number in the target message header of the heartbeat feedback message and the serial number in the target message header of the heartbeat sending message correspond to each other.

[0152] In the embodiment of the application, for the heartbeat message, after the lower machine receives the heartbeat sending message, the lower machine sends a heartbeat feedback message to the host, the message type in the target message header of the heartbeat feedback message is a heartbeat message (4), and the message type subclass is a feedback message (2).

[0153] As shown in Figure 21 After receiving the heartbeat sending message, the lower machine sends a heartbeat feedback message, the serial number is determined according to the current sequence of the lower machine, but the confirmation serial number needs to be fixed as 115 or 116, which corresponds to the serial number 115 or 116 in the heartbeat sending message. After receiving the heartbeat feedback message, the lower machine can distinguish the feedback messages corresponding to different heartbeats according to the message confirmation serial number. The target data segment of the heartbeat feedback message is also empty.

[0154] The heartbeat message is used to solve the communication interruption problem caused by unstable network when communicating between the upper computer and the lower computer on the semiconductor device. Once the communication interruption occurs, the upper computer and the lower computer will be disconnected, the process flow will be abnormal, and the real-time requirement of the current semiconductor device is increasingly accurate. The upper computer sends a command (for example, abort interruption command, the user clicks abort to immediately execute interruption of some operations, such as stopping the movement of a mechanical hand) to the lower computer as soon as possible, and the command is executed. If the TCP network is reconnected at this time, the network delay is increased, which in turn causes the command delay. Once the delay occurs, it may trigger a safety risk such as a collision. In the traditional business, the running state of the upper computer and the lower computer is perceived by periodically changing some channel values or detecting the TCP network connection. However, the above-mentioned solutions can only discover the disconnection after the disconnection, but not continuously maintain the connection. Reestablishing the connection increases the link overhead. The heartbeat message can realize automatic and continuous connection, and the user does not need to set a specific channel value for detection. Instead, the protocol is used to complete the continuous and stable connection of the link. The stable heartbeat message can maintain the stability of the link, avoid TCP link disconnection, enhance the real-time performance of command transmission, and at the same time, once the disconnection occurs, an alarm information is thrown to notify the upper computer of the network link exception.

[0155] The heartbeat period is the period of sending the heartbeat sending message by the upper computer. The period is not fixed, and an aging mechanism can be set. For example, under normal circumstances, the upper computer sends a heartbeat sending message every 10 seconds. If the upper computer does not receive the heartbeat feedback message of the previous heartbeat sending message before sending the current heartbeat sending message, the heartbeat period is increased by a set period, for example, 10 seconds is increased by 5 seconds to 15 seconds, and the increment is continued. Further, if the heartbeat period exceeds a preset heartbeat period threshold (for example, 30 seconds), the upper computer determines that the communication between the upper computer and the lower computer is disconnected, and starts a reconnection mechanism to record the measurement information. If the number of reconnection failures exceeds a preset first number threshold or the number of communication disconnections within a set time exceeds a preset second number threshold, the upper computer outputs an alarm information.

[0156] If the current heartbeat period is greater than a preset minimum heartbeat period (for example, 10 seconds), and the upper computer receives the heartbeat feedback message of the previous heartbeat sending message before sending the current heartbeat sending message, the heartbeat period is reduced by a set period, for example, the heartbeat period is reduced by 5 seconds.

[0157] In summary, the data interaction method of the embodiment of the present application is applied to an upper computer or a lower computer, and the format of a data interaction message between the upper computer and the lower computer is acquired, the format of the data interaction message comprising: a transmission control protocol data part of the data interaction message comprising a target message header and a target data segment, the data interaction message being a transmission control protocol / internet protocol message, the target message header comprising: a message type, a message type subclass, a sequence number, an acknowledgement sequence number, and a data length, for a heartbeat message, based on the format of the data interaction message, the upper computer sends a heartbeat sending message to the lower computer, the message type in the target message header of the heartbeat sending message being a heartbeat message, the message type subclass being a request message, and the target data segment being empty; the lower computer sends a heartbeat feedback message to the upper computer, the message type in the target message header of the heartbeat feedback message being a heartbeat message, the message type subclass being a feedback message, and the target data segment being empty. The embodiment of the present application realizes standardized communication between the upper and lower computers by pre-setting the format of the heartbeat message, that is, by standardizing the format of the heartbeat message, and adopts TCP / IP as a bottom basic transmission scheme, and only distinguishes and interacts the heartbeat message through the message type and the interaction format (that is, the message type subclass), so that the complexity is low and the stability is good. In addition, the heartbeat message is used to enhance the link stability between the upper and lower computers, and the reconnection is performed multiple times based on the aging mechanism after occasional disconnection, so that the complete disconnection caused by short-term network fluctuation is reduced.

[0158] The data interaction method of the embodiment of the present application will be described below. Figure 22 、 Figure 23 The data interaction method of the embodiment of the present application will be described below.

[0159] Figure 22 A schematic structural diagram of a vertical furnace device is shown in FIG. 1, which comprises two loading ports LoadPortA and LoadPortB, a shelf transfer motion (STM), a stocker, two load locks LoadLockC and LoadLockD, a wafer transfer motion (WTM), and a process module (PM). Figure 22

[0160] A schematic data interaction diagram corresponding to the operation process of the STM taking a wafer front opening unified pod (Foup) from the LoadPortA and placing it into the LoadLockC is shown in FIG. 2, which comprises: Figure 23 Figure 23

[0161] ​​S2301, the host sends a command request message Req: LoadPortA_Clamp, so that the lower computer LoadPortA executes the clamp operation.

[0162] The format of the target message header of the command request message Req: LoadPortA_Clamp is described in hexadecimal as follows: 0002 0001 00000010 00000000 0000001B. Among them, 0002 indicates that the message type is a command message, 2 bytes 16 bits; 0001 indicates that the message type subclass is a request message, 2 bytes 16 bits; 00000010 indicates the sequence number, 4 bytes 32 bits; 00000000 indicates the confirmation sequence number, 4 bytes 32 bits; 0000001B indicates that the data length is 27, 4 bytes 32 bits.

[0163] The target data segment of the command request message Req: LoadPortA_Clamp is described in the form of a string as follows: Clamp&&1&&string&&LoadPortA.

[0164] S2302, the lower computer feeds back a command request feedback message Ack: LoadPortA_Clamp, informing the host that the clamp operation is completed.

[0165] The format of the target message header of the command request feedback message Ack: LoadPortA_Clamp is described in hexadecimal as follows: 0002 0002 00000000 00000010 0000001A, and the target data segment is described in the form of a string as follows: Clamp&&1&&string&&complete.

[0166] S2303, the lower computer sends a periodic message Period message(1) to feed back the channel value of the state change of the lower computer.

[0167] The format of the target message header of the periodic message Period message(1) is described in hexadecimal as follows: 00010000 00000001 00000000 0000001E, and the target data segment is described in the form of a string as follows: LoadPortA / Clamp_Status&&int&&3, where 3 indicates complete, an enumeration type is used to represent a specific state, which is self-agreed by the host and lower computer developers and has no special meaning.

[0168] S2304, the host sends a command request message Req: STM_Pick, so that the lower computer STM executes the pick operation.

[0169] The target message header of the command request message Req: STM_Pick is described in hexadecimal as follows: 00020001 00000011 00000000 00000029, and the target data section is described in the form of a string as follows: Pick&&2&&string$$STM&&string$$LoadPortA##.

[0170] S2305, the upper computer sends a command request message Req: LoadLockC_Clamp, so that the lower computer LoadLockC executes the Clamp operation.

[0171] The target message header of the command request message Req: LoadLockC_Clamp is described in hexadecimal as follows: 0002 0001 00000012 00000000 0000001B, and the target data section is described in the form of a string as follows: Clamp&&1&&string&&LoadLockC.

[0172] S2306, the lower computer sends a period message Period message (2) to feed back the channel value of the state change of the lower computer. At this time, there is no channel value that has changed.

[0173] S2307, the lower computer feeds back a command request feedback message Ack: STM_Pick to inform the upper computer that the Pick command of the STM is completed.

[0174] The target message header of the command request feedback message Ack: STM_Pick is described in hexadecimal as follows: 0002 0002 00000000 00000011 00000029, and the target data section is described in the form of a string as follows: Pick&&1&&string$$complete.

[0175] S2308, the lower computer feeds back a command request feedback message Ack: LoadLockC_Clamp to inform the upper computer that the Clamp command of the LoadLockC is completed.

[0176] The target message header of the command request feedback message Ack: LoadLockC_Clamp is described in hexadecimal as follows: 0002 0002 00000000 00000012 0000001B, and the target data section is described in the form of a string as follows: Clamp&&1&&string$$complete.

[0177] S2309, the host sends a command request message Req: LoadLockC_Dock to make the lower-level machine LoadLockC perform a docking operation.

[0178] S2310, the lower-level machine feeds back a command request feedback message Ack: LoadLockC_Dock to the host to notify the host that the LoadLockC has completed the Dock command.

[0179] S2311, the lower-level machine sends a period message Period message(3) to feed back the changed channel values of the lower-level machine. At this time, the changed channel values include: the completion of Clamp and Dock of LoadLockC, and the completion of Pick of STM.

[0180] The format of the target message header of the period message Period message(3) is described in hexadecimal as follows: 00010000 00000003 00000000 00000056, and the target data segment is described in the form of a string as follows: LoadLockC / Clamp_Status&&int&&3##LoadLockC / Dock_Status&&int&&3##Stm / Pick_Status&&int&&3.

[0181] S2312, the host sends a command request message Req: LoadLockC_OpenDoor to make the lower-level machine LoadLockC perform an open door operation.

[0182] S2313, the lower-level machine feeds back a command request feedback message Ack: LoadLockC_OpenDoor to the host to notify the host that the LoadLockC has completed the OpenDoor command.

[0183] S2314, the host sends a command request message Req: STM_Place to make the lower-level machine STM perform a placing operation.

[0184] S2315, the lower-level machine feeds back a command request feedback message Ack: STM_Place to the host to notify the host that the STM has completed the Place command.

[0185] S2316, the host sends a command request message Req: LoadLockC_CloseDoor to make the lower-level machine LoadLockC perform a close door operation.

[0186] S2317, the lower computer feeds back the command request feedback message Ack: LoadLockC_CloseDoor, to inform the upper computer LoadLockC to execute the CloseDoor command to complete.

[0187] It should be noted that, taking the command type message in step S2304 as an example, the original ICE protocol needs 115 bytes of data amount to issue the Pick command TCP data segment, while the Pick command TCP data segment in the embodiment of the present application only needs 45 bytes of data amount, the data interaction amount is reduced by more than 50%, which can effectively reduce the communication pressure of the whole upper and lower computers.

[0188] Similarly, taking the periodic message as an example, the ICE protocol uses the batch reading method to obtain, the interval is 500 ms (configurable) each time, and 135 TCP messages are needed to receive the feedback message, a total of 195769 bytes, which is converted into a data flow of about 4-5 Mbytes / s, the data amount is extremely large, and when network fluctuation occurs, it is easy to cause network congestion and disconnection. In the embodiment of the present application, the periodic message will only be sent when the corresponding channel of the lower computer changes, that is, when the semiconductor process equipment is in an idle state, the channel value changes very little, and only in a job state, the peak value of the data flow will appear, even if the peak value of the job state, all the data will not change at the same time, and for the semiconductor process equipment, after each job ends, there will be a period of idle, which also relieves the network transmission congestion, and the minimum data flow is only 500 bytes / s, the data amount is small, which avoids the network congestion and disconnection when the network fluctuation occurs.

[0189] The embodiment of the present application also provides a semiconductor process equipment. As shown in Figure 24 The semiconductor process equipment 2400 includes an upper computer 2401 and a lower computer 2402 connected with the upper computer 2401, and the upper computer 2401 and the lower computer 2402 are used to realize the related steps of any data interaction method embodiment.

[0190] The semiconductor process equipment of the embodiment of the present application, the host computer or the lower computer obtains a format of a data interaction message between the host computer and the lower computer, the format of the data interaction message comprises: a transmission control protocol data part of the data interaction message comprises a target message header and a target data segment, the data interaction message is a transmission control protocol / internet protocol message, the target message header comprises: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, based on the format of the data interaction message, the data interaction message is processed in at least one of the following manners: sending, receiving and analyzing. The embodiment of the present application realizes the standardized communication between the host computer and the lower computer by pre-setting the format of the data interaction message, that is, by standardizing the format of the data interaction message, and adopts TCP / IP as a bottom basic transmission scheme, and only through the message type and the interaction format (that is, the message type subclass) to distinguish and interact the data type, the complexity is low, and good stability is achieved.

[0191] The system, apparatus, module or unit described in the above embodiments can be specifically implemented by a computer chip or entity, or by a product with certain functions. A typical implementation device is a computer. Specifically, the computer may, for example, be a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0192] For the convenience of description, the above apparatus is described as various units respectively in terms of functions. Of course, the functions of the units can be implemented in the same or multiple software and / or hardware in the implementation of the present application.

[0193] Those skilled in the art should understand that the embodiments of the present application can be provided as a method, a system or a computer program product. Therefore, the present application can adopt a completely hardware embodiment, a completely software embodiment or an embodiment combining software and hardware aspects. Moreover, the present application can adopt a computer program product in the form of being implemented on one or more computer usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer usable program codes.

[0194] The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flowcharts and / or blocks in the flowcharts and / or combination thereof. Figure 1 one or more flowcharts and / or blocks in the flowcharts and / or combination thereof.

[0195] The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flowcharts and / or blocks in the flowcharts and / or combination thereof. Figure 1 one or more flowcharts and / or blocks in the flowcharts and / or combination thereof.

[0196] The computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart block or blocks. Figure 1 one or more flowcharts and / or blocks in the flowcharts and / or combination thereof. Figure 1 one or more flowcharts and / or blocks in the flowcharts and / or combination thereof.

[0197] In one typical configuration, the computing device includes one or more processors (CPUs), input / output interfaces, network interfaces, and memory.

[0198] The memory can include non-persistent memory and / or volatile memory, such as random access memory (RAM) and / or cache memory, non-volatile memory, such as read-only memory (ROM), EPROM, and / or flash memory. The memory is an example of computer-readable media.

[0199] Computer-readable media includes permanent and non-permanent, movable and non-movable media that can be implemented by any method or technology to store information. The information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, compact disc read-only memory (CD-ROM), digital versatile disc (DVD) or other optical storage, magnetic cassette, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other non-transmission medium that can be used to store information accessible to a computing device. According to the definition herein, computer-readable media does not include transitory media such as modulated data signals and carriers.

[0200] It should also be noted that the terms "comprising", "containing", or any other variant thereof are intended to encompass non-exclusive inclusion, such that processes, methods, articles or devices that comprise a list of elements not only include those elements, but also include other elements not expressly listed or inherent to such processes, methods, articles or devices. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0201] The present application can be described in the general context of computer-executable instructions, such as program modules, being executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform particular tasks or implement particular abstract data types. The present application can also be practiced in distributed computing environments where tasks are performed by remote processing devices that are connected through a communication network. In a distributed computing environment, program modules can be located in both local and remote computer storage media including storage devices.

[0202] Each embodiment in the specification is described in a progressive manner, and the same or similar parts between each embodiment can be referred to each other, and each embodiment focuses on the difference from other embodiments. In particular, for system embodiments, since they are basically similar to method embodiments, the description is relatively simple, and the relevant parts can be referred to the part of the method embodiment.

[0203] The above merely provides an example of the present application, and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall fall into the scope of claims of the present application.

Claims

1. A data interaction method, characterized in that, The method is applied to an upper computer or a lower computer of a semiconductor process equipment, and comprises the following steps: Obtaining a format of a data interaction message between the upper computer and the lower computer, wherein the format of the data interaction message comprises: a transmission control protocol data part of the data interaction message comprises a target message header and a target data segment, the data interaction message is a transmission control protocol / internet protocol message, the target message header comprises: a message type, a message type subclass, a sequence number, an acknowledgement sequence number and a data length, and the message type subclass is a subtype of the message type; Based on the format of the data interaction message, at least one of the following processes is performed on the data interaction message: sending, receiving and parsing.

2. The method of claim 1, wherein, The message type comprises any one of the following: a periodic message, a command message, a request message, a heartbeat message and an alarm message; The message type subclass comprises any one of the following: a sending period, a request message and a feedback message.

3. The method of claim 2, wherein, The method is applied to the lower computer, and the method comprises the following steps: The lower computer periodically sends a periodic message to the upper computer, the message type in the target message header of the periodic message is a periodic message, the message type subclass is a sending period, the target data segment uses a first-level separator to distinguish different sub-data, uses a second-level separator to distinguish different data in the same sub-data, and the data comprises: a data name, a data type and a data value.

4. The method of claim 2, wherein, The method is applied to the lower computer, and the method comprises the following steps: The upper computer sends a command request message to the lower computer, the message type in the target message header of the command request message is a command message, the message type subclass is a request message, the target data segment uses a first-level separator to distinguish different sub-commands, uses a second-level separator to distinguish different command data in the same sub-command, the command data comprises: a command name, a parameter number and different parameters, uses a third-level separator to distinguish different parameter data in the same parameter, and the parameter data comprises: a parameter name, a parameter type and a parameter value; The lower computer sends a command request feedback message to the upper computer, the message type in the target message header of the command request feedback message is a command message, the message type subclass is a feedback message, the target data segment uses a first-level separator to distinguish different sub-command feedbacks, uses a second-level separator to distinguish different command feedback data in the same sub-command feedback, and the command feedback data comprises: a command name and a command execution state.

5. The method of claim 2, wherein, The method is applied to the lower computer, and the method comprises the following steps: The upper computer sends a data request message to the lower computer, the message type in the target message header of the data request message is a request message, the message type subclass is a request message, the target data segment uses a first separator to distinguish different sub-requests, and uses a second separator to distinguish different request data in the same sub-request, and the request data includes a request name and a requested data type; The lower computer sends a request feedback message to the upper computer, the message type in the target message header of the request feedback message is a request message, the message type subclass is a feedback message, the target data segment uses a first separator to distinguish different sub-request feedbacks, and uses a second separator to distinguish different request feedback data in the same sub-request feedback, and the request feedback data includes a feedback request name, a feedback data type, and a feedback data value.

6. The method of claim 2, wherein, The data interaction message is processed in at least one of the following manners based on the format of the data interaction message: sending, receiving, and parsing, including: The lower computer sends an alarm message to the upper computer, the message type in the target message header of the alarm message is an alarm message, the message type subclass is a request message, the target data segment uses a first separator to distinguish different alarm data, and the alarm data includes an alarm identifier, an alarm name, an alarm level, an alarm time, an alarm description, and an alarm type; The upper computer sends an alarm feedback message to the lower computer, the message type in the target message header of the alarm feedback message is an alarm message, the message type subclass is a feedback message, the target data segment uses a first separator to distinguish different alarm feedback data, and the alarm feedback data includes an alarm identifier, an alarm name, and a processing command.

7. The method of claim 2, wherein, The data interaction message is processed in at least one of the following manners based on the format of the data interaction message: sending, receiving, and parsing, including: The upper computer sends a heartbeat sending message to the lower computer, the message type in the target message header of the heartbeat sending message is a heartbeat message, the message type subclass is a request message, and the target data segment is empty; The lower computer sends a heartbeat feedback message to the upper computer, the message type in the target message header of the heartbeat feedback message is a heartbeat message, the message type subclass is a feedback message, the target data segment is empty, and the confirmation sequence number in the target message header of the heartbeat feedback message corresponds to the sequence number in the target message header of the heartbeat sending message.

8. The method of claim 7, wherein, Further comprising: If the upper computer has not received a heartbeat feedback message of a previous heartbeat sending message before sending the current heartbeat sending message, the heartbeat period is increased by a set period; If the current heartbeat period is greater than a preset minimum heartbeat period, and the upper computer has received a heartbeat feedback message of a previous heartbeat sending message before sending the current heartbeat sending message, the heartbeat period is decreased by the set period.

9. The method of claim 8, wherein, Further comprising: If the heartbeat cycle exceeds a preset heartbeat cycle threshold, the host computer determines that the communication between the host computer and the slave computer is disconnected and starts a reconnection mechanism; If the number of reconnection failures exceeds a preset first threshold or the number of communication disconnections within a set time exceeds a preset second threshold, the host computer outputs an alarm message.

10. A semiconductor process apparatus, characterized by, The method comprises: an upper computer and a lower computer in communication with the upper computer, wherein the upper computer and the lower computer are used to implement the steps of the method according to any one of claims 1 to 9.

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