Sensor system

Abstract

A sensor system capable of appropriately processing measurement data at an appropriate measurement timing in a plurality of sensor units. A sensor system (1) is provided with: a plurality of sensor units (30) that store, in a memory, measurement values obtained by measurement on the basis of a synchronization signal having a second cycle unique to the sensor units; the synchronization signal having a second period unique to the sensor unit has been phase-adjusted on the basis of a synchronization signal having a first period common to the plurality of sensor units (30). At least one of the plurality of sensor units (30), the communication unit (20), the information processing device (10), and the control device reads the measurement values stored in the memory by at least two or more sensor units (30) among the plurality of sensor units (30) and calculates the measurement values to generate calculated values.

Description

TECHNICAL FIELD

[0001] The present application relates to a sensor system. BACKGROUND

[0002] Conventionally, a sensor system constituted by a plurality of sensor units is becoming widespread. In a sensor system constituted by a plurality of sensor units constituted by a plurality of amplifier units and sensor heads respectively corresponding to the amplifier units, the state of an object is monitored based on measurement data acquired by each sensor unit.

[0003] For example, in Patent Literature 1, a technology related to a sensor system in which, in order to improve communication speed, each sensor unit transmits detection information to a communication device after a standby time determined for each sensor unit elapses from a synchronization signal as a starting point.

[0004] Further, in Patent Literature 2, a technology related to a sensor system constituted so as to prevent mutual interference between the same category is disclosed, in which each sensor unit operates after a delay time determined in accordance with each identification number elapses from a synchronization signal as a starting point.

[0005] Patent Literature 1: Japanese Patent Application Publication No. 2014-96036

[0006] Patent Literature 2: Japanese Patent Application Publication No. 2014-96697

[0007] Further, in the sensor system as described above, it is required to achieve more accurate measurement by appropriately processing each measurement data measured by the plurality of sensor units. SUMMARY

[0008] Therefore, an object of the present application is to provide a sensor system capable of appropriately processing measurement data at appropriate measurement timing in a plurality of sensor units.

[0009] A sensor system of one embodiment of the present application includes a plurality of sensor units and a communication unit connected to the plurality of sensor units in a manner capable of transmitting signals, which transmits information received from each sensor unit to an information processing device or a control device, in which the plurality of sensor units stores a measurement value obtained by measurement based on a synchronization signal having a second period unique to the sensor unit, which is phase-adjusted based on a synchronization signal having a first period common to the plurality of sensor units, at least one of the plurality of sensor units, the communication unit, the information processing device, and the control device reads out the measurement value stored in the memory of at least two or more of the plurality of sensor units and performs calculation, thereby generating a calculation value.

[0010] According to this aspect, the plurality of sensor units perform measurement based on a synchronization signal having a second period inherent to the sensor units, which is phase-adjusted based on a synchronization signal having a first period common among the plurality of sensor units. Also, the plurality of sensor units save measurement values respectively obtained through the measurement in memories, and at least one of the plurality of sensor units, the communication unit, the information processing device, and the control device reads out and performs calculation on the measurement values saved in the memories of at least two or more of the plurality of sensor units, thereby generating a calculation value. Thus, in the plurality of sensor units, the calculation value is generated based on the measurement values at appropriate measurement timings, and thus the measurement values at appropriate measurement timings can be used to appropriately perform processing.

[0011] In the above aspect, it can also be that the plurality of sensor units perform phase adjustment based on a timing at which the measurement values are received and a reception timing set in advance, with respect to the synchronization signal having the second period.

[0012] According to this aspect, the plurality of sensor units perform phase adjustment based on a timing at which the measurement values are received and a reception timing set in advance, and thus measurement values at more appropriate measurement timings can be obtained.

[0013] In the above aspect, it can also be that the plurality of sensor units reflect the phase adjustment of the synchronization signal having the second period at a timing at which the next synchronization signal having the first period is transmitted and received.

[0014] According to this aspect, at the timing at which the next synchronization signal having the first period is transmitted and received, the measurement timings among the plurality of sensor units are appropriately reflected, and thus measurement values at more appropriate measurement timings can be obtained.

[0015] In the above aspect, it can also be that at least one of the plurality of sensor units obtains the measurement values saved in the memories of the other sensor units and performs calculation thereon, thereby generating a calculation value, and the measurement, the obtaining of the measurement values, and the generation of the calculation value are processed in a pipeline manner in cycles divided by the synchronization signal.

[0016] According to this aspect, at least one of the plurality of sensor units processes the measurement, the obtaining of the measurement values, and the generation of the calculation value in a pipeline manner in cycles divided by the synchronization signal, and thus a series of data processing can be appropriately performed.

[0017] In the above aspect, it can also be that at least one of the plurality of sensor units calculates the measurement values measured at the same timing in the plurality of sensor units, thereby generating a calculation value.

[0018] According to this manner, at least one of the plurality of sensor units generates an operation value by operating the measurement values measured at the same timing in the plurality of sensor units, and thus the operation value is generated based on the measurement values measured at the same timing, so that the measurement values at the same measurement timing can be appropriately processed.

[0019] According to the present application, a sensor system capable of appropriately processing measurement data at appropriate measurement timing in a plurality of sensor units can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a system diagram showing the configuration of the sensor system 1 of one embodiment of the present application.

[0021] Figure 2 is a function block diagram mainly for explaining the functions of the sensor unit 30 in each device configuring the sensor system 1 of one embodiment of the present application.

[0022] Figure 3 is a graph showing the delivery timing of data in the plurality of amplifier units 31A, 31B, 31C,....

[0023] Figure 4 is a graph showing the generation and delivery timing of data in the parent amplifier unit 31A.

[0024] Figure 5 is a graph showing the generation and delivery timing of data in the child amplifier units 31B, 31C,....

[0025] Figure 6 is a graph showing the reception timing of data delivered from each amplifier unit 31 in the communication unit 20.

[0026] Figure 7 is a function block diagram for explaining the function of identifying the unit position in the sensor unit 30 of one embodiment of the present application.

[0027] Figure 8 is a flowchart showing the processing flow of the channel number identification method M10 of assigning (identifying) a channel number in the sensor unit 30 connected at the start of the sensor system 1 of one embodiment of the present application.

[0028] Figure 9 is a graph schematically showing the case where the thickness of an object T is measured using two sensor units 30A and 30B in the plurality of sensor units 30 of one embodiment of the present application.

[0029] Figure 10 is a graph showing the projection-reception light timing of the sensor heads in the two sensor units.

[0030] Figure 11 is an example of indicating the timing at which the amplifier unit 31 in the sensor unit 30 receives the measurement data from the sensor head 32.

[0031] Figure 12 is a diagram indicating a case where the imaging timing is adjusted in accordance with the timing at which the amplifier unit 31 in the sensor unit 30 receives the measurement data from the sensor head 32.

[0032] Figure 13 is a flowchart indicating the processing flow of the timing adjustment method M20 that adjusts the measurement timing between the amplifier unit 31 and the sensor head 32.

[0033] Figure 14 is a timing chart indicating a series of processing flows of the inter-amplifier operation performed in the parent sensor unit 30A and the child sensor unit 30B.

[0034] Figure 15 is a functional block diagram mainly for explaining each function of the communication unit 20 in each device that configures the sensor system 1 of one embodiment of the present application.

[0035] Figure 16 is a diagram indicating an example of the data format in which time information is given to the data received from the amplifier units 31 (1CH to 16CH) during the 1st period.

[0036] Figure 17 is a diagram indicating the data processing situation in the user terminal 10 and the communication unit 20.

[0037] Figure 18 is a diagram indicating the mechanism by which the communication unit 20 acquires time information from the server.

[0038] Explanation of Reference Signs

[0039] 1: sensor system; 10: user terminal (information processing device); 20: communication unit; 30, 30A, 30B, 30C: sensor unit; 31, 31A, 31B, 31C: amplifier unit; 32, 32A, 32B, 32C: sensor head; 40: inter-unit communication control; 41: 1st communication unit; 42: 2nd communication unit; 50: user terminal communication control; 90: NTP server; 110, 210: control unit; 120, 220: storage unit; 220-1 to 220-M: buffer; 310: transmission timing decision unit; 320: measurement unit; 330: data holding unit; 340: data sending unit; 350: identification information recognition unit; 360: verification unit; M10: channel number recognition method; M20: timing adjustment method; S11 to S15: respective steps of the channel recognition method M10; S21 to S25: respective steps of the timing adjustment method M20; T: object; S1 to S4: synchronization signal; T1 to T4: period of the 1st cycle. DETAILED DESCRIPTION

[0040] Hereinafter, a preferred embodiment of the present application will be specifically described with reference to the accompanying drawings. Note that the following embodiment is merely one example for implementing the present application, and is not intended to limit the present application. Also, in order to facilitate the understanding of the description, the same reference numerals are used, wherever possible, to designate the same elements throughout the various drawings, and repetitive description can be omitted.

[0041] [Structure of sensor system]

[0042] Figure 1 is a system diagram showing the structure of the sensor system 1 of one embodiment of the present application. As shown in Figure 1 , the sensor system 1 has a user terminal (information processing device) 10, a communication unit 20, and a plurality of sensor units 30A, 30B, 30C,... (hereinafter, sometimes collectively referred to as "sensor units 30").

[0043] In addition, the plurality of sensor units 30A, 30B, 30C,... each include an amplifier unit 31A, 31B, 31C,... (hereinafter, sometimes collectively referred to as "amplifier units 31") and a sensor head 32A, 32B, 32C,... (hereinafter, sometimes collectively referred to as "sensor heads 32") corresponding thereto.

[0044] The sensor system 1 is, for example, a state monitoring system that monitors the state of manufacturing equipment such as a robot that manufactures semiconductors, electronic parts, secondary batteries, and the like, and a workpiece, and the like, and specifically, detects or measures the position / posture / size of a robot and a workpiece, and the like, as an object.

[0045] The user terminal 10 is, for example, a PC (Personal Computer), and acquires detection information detected by the sensor unit 30 and a measured value and the like measured thereby via the communication unit 20 according to a user operation and the like, and analyzes or displays these data. Thereby, the user can confirm the state of the manufacturing equipment and the workpiece and the like.

[0046] The communication unit 20 is connected to the user terminal 10 via a network such as a LAN (Local Area Network) and the like, and transmits data received from the sensor unit 30 to the user terminal 10.

[0047] The communication unit 20 can also accumulate data received from the sensor unit 30 in a memory and / or process and transmit to the user terminal 10.

[0048] The sensor unit 30 includes an amplifier unit 31 and a sensor head 32 corresponding thereto. The amplifier unit 31 is connected to the communication unit 20, respectively, and becomes a structure capable of transmitting data to the communication unit 20.

[0049] The sensor head 32 is, for example, an optical sensor or the like that projects light to an object and detects the object based on the light-receiving amount of the reflected light thereof, and measures the position / size thereof. The amplifier unit 31 controls the timing of projecting and receiving light with respect to the sensor head 32, and receives data including detection information and measurement information and the like from the sensor head 32. Also, the amplifier unit 31 becomes a structure capable of transmitting these data to the communication unit 20.

[0050] Also, the amplifier unit 31 becomes a structure that can also transmit and receive data between the amplifier units 31, and further, a structure that can receive data (for example, a command and the like described later) from the communication unit 20.

[0051] The sensor system 1 includes a plurality of sensor units 30, but the number of sensor units is not particularly limited. For example, the plurality of sensor units 30 can be 2 to 16, and further, one of them can be a parent sensor unit (hereinafter, the amplifier unit constituting the parent sensor unit will also be referred to as a "parent amplifier unit"), and the others can be child sensor units (hereinafter, the amplifier unit constituting the child sensor unit will also be referred to as a "child amplifier unit").

[0052] In the present embodiment, the sensor unit 30A adjacent to the communication unit 20 is assumed to be a parent sensor unit, and the other sensor units 30B, 30C,... are assumed to be child sensor units, and it is assumed that a total of 16 sensor units 30 are provided.

[0053] For example, the parent amplifier unit 31A transmits a synchronization signal to the child amplifier units 31B, 31C,... from the parent sensor unit 30A, and each of the child amplifier units 31B, 31C,... receives the synchronization signal.

[0054] Each of the sensor heads 32A, 32B, 32C,... can detect or measure an object based on the transmission and reception of the synchronization signal, and each of the amplifier units 31 can save the measurement data in a memory or send out the data based on the transmission and reception of the synchronization signal.

[0055] In addition, the communication unit 20 and each of the amplifier units 31 can be connected by a bus signal line and transmit and receive signals using serial communication. Here, the serial communication is, for example, interpreted as a serial communication protocol including CAN (Controller Area Network) communication implemented by two signal lines or the like.

[0056] Furthermore, in the present embodiment, the communication unit 20 is configured to transmit data from each of the amplifier units 31 to the user terminal 10, but is not limited thereto, and can transmit data to the user terminal 10 via a PLC (Programmable Logic Controller) (control device), for example, or can transmit data to a PLC independently of the user terminal 10.

[0057] Figure 2 is a functional block diagram mainly for explaining each function of the sensor unit 30 in each of the devices configuring the sensor system 1 of one embodiment of the present application. As Figure 2 shown, the sensor unit 30 has a transmission timing decision unit 310, a measurement unit 320, a data saving unit 330, and a data sending unit 340. The user terminal 10 has a control unit 110 and a storage unit 120, and the communication unit 20 has a control unit 210 and a storage unit 220.

[0058] In order to transmit and receive signals (data) between each of the sensor units 30 and the communication unit 20, each of the sensor units 30 and the communication unit 20 has an inter-unit communication control 40, and in order to transmit and receive signals (data) between the user terminal 10 and the communication unit 20, the user terminal 10 and the communication unit 20 have a user terminal communication control 50. Details of each of the communication controls will be described later.

[0059] The transmission timing decision unit 310 decides a transmission timing unique to the sensor unit based on a synchronization signal having a first period, in such a manner that the transmission timings of the plurality of sensor units 30A, 30B, 30C,... are different.

[0060] For example, the parent amplifier unit 31A transmits a synchronization signal having the 1st cycle to the communication unit 20 and the child amplifier units 31B, 31C,.... The child amplifier units 31B, 31C,.... receive the synchronization signal from the parent amplifier unit 31A. Thus, the communication unit 20 and each sensor unit 30 acquire synchronization based on the transmission and reception of the synchronization signal, and thereby appropriately determine the transmission timing inherent to the sensor unit in a manner in which the transmission timings of the plurality of sensor units 30A, 30B, 30C,.... differ.

[0061] During the 1st cycle, data including the measurement values measured by each sensor unit 30A, 30B, 30C,.... is transmitted from each amplifier unit 31A, 31B, 31C,.... to the communication unit 20, and the transmission timing from each amplifier unit 31A, 31B, 31C,.... to the communication unit 20 is determined in a manner in which the transmission timings in each amplifier unit 31A, 31B, 31C,.... do not repeat.

[0062] That is, the transmission timing of each amplifier unit 31 is allocated during the 1st cycle in a manner in which the transmission timings of data from each amplifier unit 31 to the communication unit 20 do not repeat.

[0063] The measurement unit 320 repeatedly performs measurement based on the 2nd cycle. For example, the 1st cycle can also be an integer multiple of the 2nd cycle, and during the 1st cycle, measurement can also be repeatedly performed in each sensor unit 30 by the projection and reception of light by each sensor head 32 to the object. The measurement values measured by each sensor head 32 are received by each amplifier unit 31.

[0064] The data holding unit 330 holds, in the memory, the measurement values based on the timing of the synchronization signal having the 1st cycle, among the measurement values obtained by the repeated measurement by the measurement unit 320.

[0065] For example, during the 1st cycle, when measurement is repeatedly performed in each sensor unit 30 as described above, the parent amplifier unit 31A holds, in the memory of the parent amplifier unit 31A, the measurement values at the transmission timing of the synchronization signal having the 1st cycle, based on the transmission of the synchronization signal having the 1st cycle. The child amplifier units 31B, 31C,.... hold, in the memories of each child amplifier unit 31B, 31C,...., the measurement values at the reception timing of the synchronization signal having the 1st cycle, based on the reception of the synchronization signal having the 1st cycle.

[0066] If the transmission timing inherent to the sensor unit comes, the data sending unit 340 reads out the measurement values held in the memory, and sends to the communication unit 20.

[0067] For example, in each sensor unit 30, if the transmission timing decided by the transmission timing deciding unit 310 in a different manner in each sensor unit 30A, 30B, 30C,... comes, the measured value saved in the memory by the data saving unit 330 is read out, data containing the measured value is generated, and transmitted to the communication unit 20.

[0068] [Data transmission timing in each amplifier unit]

[0069] Figure 3 is a diagram showing the transmission timing of data in the plurality of amplifier units 31A, 31B, 31C,.... As shown in Figure 3 , the transmission timing of each amplifier unit 31A, 31B, 31C,... is allocated in a different manner (in a manner that the transmission timing does not repeat) in the period of the 1st cycle.

[0070] The amplifier units 31 in each sensor unit 30 are connected in a row, and identification information unique to each sensor unit is recognized. Here, the amplifier unit 31A is set as the 1st channel (1CH), the amplifier unit 31B is set as the 2nd channel (2CH), the amplifier unit 31C is set as the 3rd channel (3CH),..., and for the 16 sensor units 30 constituting the sensor system 1, the transmission timing of data is allocated as the 1st channel (1CH) to the 16th channel (16CH).

[0071] The entire transmission period of the 16 amplifier units 31 (16 channels) is constituted by the start timing period, the transmission time of data allocated to one amplifier unit 31, and the interval of the transmission start timing in each amplifier unit 31, that is, the transmission interval, and is set to converge at least within the period of the 1st cycle.

[0072] The communication unit 20 and each amplifier unit 31 use serial communication to transmit and receive signals (data), so data is transmitted in the transmission timing allocated to each channel, respectively, thereby avoiding collision of data, and thus reducing the occurrence of communication errors.

[0073] In addition, here, the data transmitted from each amplifier unit 31 to the communication unit 20 can also contain measured values measured by each sensor head 32, but is not limited thereto. The data can also contain a channel number, a state of the amplifier unit (containing an error, a warning), an external input state, a measured value, a calculated value, a control output (a determination result, an error output), a command code, and a parameter for a command, and the like.

[0074] In addition, during the period of the 1st cycle, a communication period (2nd communication period) for transmitting a command from the communication unit 20 to each amplifier unit 31 can be allocated separately from the 1st communication period allocated to each amplifier unit 31 for transmitting data to the communication unit 20. In addition, as shown in FIG. 27, the communication period (2nd communication period) can be allocated after the transmission and reception of the synchronization signal and before the 1st communication period, whereby, for example, even in a case where communication between each amplifier unit 31 and the communication unit 20 is not properly performed due to the influence of noise or the like, the command can be properly transmitted and received. Figure 3

[0075] The communication period (2nd communication period) is common to the plurality of amplifier units 31, and, for example, a command indicating a change in a set value (on / off threshold value or the like) of the sensor unit 30 (sensor head 32), reading of the set value, and execution of an operation instruction (teaching, light-off, zero reset, or the like) is transmitted from the communication unit 20 to a specific amplifier unit 31 among the plurality of amplifier units 31.

[0076] Since the communication period is common to the plurality of amplifier units 31, the command transmitted and received in the communication period can include, for example, the amplifier unit 31 (channel number) as the transmission destination, a command code indicating the kind (content) of the command, and an argument (parameter) for the command. Thus, the sensor unit that is the object of the command among the plurality of sensor units 30 can recognize that the command is for itself.

[0077] In addition, these commands are transmitted from the communication unit 20 to the amplifier unit 31, but, for example, can be transmitted to each amplifier unit 31 via the communication unit 20 based on an external input request of the user terminal 10 and the PLC or the like.

[0078] Further, the amplifier unit 31 that receives the command from the communication unit 20 can also transmit a response to the command to the communication unit 20 in the data transmission timing allocated to each amplifier unit 31, by including the response to the command in the data.

[0079] Figure 4 is a diagram indicating the generation and transmission timing of data in the parent sensor unit 30A. As shown in FIG. 28, the parent amplifier unit 31A transmits a synchronization signal having a 1st cycle (1 ms in this case) to the communication unit 20 and the child amplifier units 31B, 31C, and the like, and after a prescribed time (815 μs in this case), generates data including a measured value measured by the sensor head 32A. Then, in the next 1st cycle, at the transmission timing (15 μs after the transmission of the synchronization signal in this case) of the 1st channel (1CH) allocated to the parent amplifier unit 31A, the data is transmitted to the communication unit 20. Figure 4

[0080] ​​Figure 5 is a chart showing the generation and sending timing of data in the sub-amplifier units 31B, 31C,.... As shown in Figure 5 , the sub-amplifier units 31B, 31C,.... receive the synchronization signal having the 1st period (1 ms in this case) from the parent-amplifier unit 31A, and after a prescribed time (815 μs in this case), generate data containing the measurement values measured by the sensor heads 32B, 32C,.... Then, at the sending timing of the 2nd channel (2CH), 3rd channel (3CH),.... assigned to each of the sensor heads 32B, 32C,.... in the next 1st period, the data is sent to the communication unit 20.

[0081] [Data reception timing in the communication unit]

[0082] Figure 6 is a chart showing the reception timing of data sent from each of the amplifier units 31 in the communication unit 20. As shown in Figure 6 , the communication unit 20 receives the synchronization signal having the 1st period from the parent-amplifier unit 31A, and then, during the 1st period, receives the data from all of the amplifier units 31 connected in order.

[0083] In addition, the communication unit 20 can receive the data from the 16 amplifier units 31 (1CH to 16CH) at equal intervals, or at different intervals after receiving the synchronization signal having the 1st period from the parent-amplifier unit 31A during the 1st period. For example, the communication unit 20 can receive the data from the parent-amplifier unit 31A (1CH) after a prescribed time after receiving the synchronization signal having the 1st period from the parent-amplifier unit 31A, and further receive the data from the next sub-amplifier unit 31B (2CH) at an interval longer than the other intervals.

[0084] In addition, the communication unit 20 can set the period for receiving the data from the 16 amplifier units 31 (1CH to 16CH) also considering the communication period for transmitting a command after receiving the data from the 16 amplifier units 31 (1CH to 16CH).

[0085] In addition, here, the communication unit 20 receives the data from the 16 amplifier units 31 (1CH to 16CH) in order, but is not limited thereto. For example, as shown in Figure 6 , it is assumed that the 16 amplifier units 31 are connected in advance, and the communication unit 20 is set to receive the data of 16 channels (1CH to 16CH), but there are cases where the sensor units 30 constituting the sensor system 1 are not 16, or the sensor units 30 in operation are not 16.

[0086] For example, in a case where the sensor units 30 constituting the sensor system 1 or the operating sensor units 30 are four, the communication unit 20 receives data of four channels (1CH to 4CH) among the reception timings of data of the predetermined 16 channels (1CH to 16CH) during the first period, and receives no data after 5CH as shown in FIG. 6. Figure 6

[0087] As described above, in the plurality of sensor units 30, the transmission timing decision unit 310 decides the sensor-unit-unique transmission timing in a manner that the transmission timing from the plurality of amplifier units 31 to the communication unit 20 is different, based on the synchronization signal having the first period. The measurement unit 320 repeatedly performs measurement based on the second period, and the data saving unit 330 saves the measurement value at the timing based on the synchronization signal having the first period among the measurement values obtained by the measurement unit 320 repeatedly performing measurement, in the memory. Further, the data sending unit 340 reads out the measurement value saved in the memory at the sensor-unit-unique transmission timing, and sends data including the measurement value to the communication unit 20. Thus, during the first period, each of the amplifier units 31 sends data at the transmission timing allocated to each of the amplifier units 31, and thus in serial communication, it is possible to avoid collision of data, thereby reducing generation of communication errors. Further, in the memory, it is possible to save not only the measurement value but also the channel number, the state of the amplifier unit (including error, warning), the external input state, the calculation value, the control output (determination result, error output), the command code, and the parameter for the command, and these data can also be sent to the communication unit 20 together with the measurement value as needed.

[0088] As a result, the sensor system 1 according to one embodiment of the present application can appropriately transfer the measurement data in the plurality of sensor units 30.

[0089] [Channel Number Recognition]

[0090] As described above, the parent amplifier unit 31A is connected adjacent to the communication unit 20, and then the child amplifier units 31B, 31C,... are connected in a row, and each of the amplifier units 31A, 31B, 31C,... recognizes the first channel (1CH), the second channel (2CH), the third channel (3CH),... in order. Specifically, the communication unit 20 and all the amplifier units 31 recognize the connection structure including the number of connected amplifier units 31 (the number of connections) and the connection position of each of the amplifier units 31 connected, and further recognize the model information of the connected amplifier units 31.

[0091] ​The connection structure (number of connections / connection positions) and the model information of all the amplifier units connected thereto can be pre-set in each amplifier unit 31 and the communication unit 20, or can be assigned (identified) to each amplifier unit 31 connected at the start of the sensor system 1.

[0092] Figure 7 is a functional block diagram for explaining the function of identifying the unit position in the sensor unit 30 of one embodiment of the present application. As shown in Figure 7 the communication unit 20 and each sensor unit 30 in the unit-to-unit communication control 40 explained in Figure 2 contains the 1st communication unit 41 and the 2nd communication unit 42, and further, contains the identification information identifying unit 350 in addition to each unit. In addition, the parent sensor unit 30A can contain the verification unit 360.

[0093] The 1st communication unit 41 communicates between each amplifier unit 31 and the communication unit 20 in order to identify the unit position in the amplifier unit 31.

[0094] In each sensor unit 30, the identification information identifying unit 350 identifies the connection state of the plurality of sensor units 30A, 30B, 30C,... and the unit position of itself in the plurality of sensor units 30A, 30B, 30C,... using the 1st communication unit 41, and saves the identified information in the memory of each amplifier unit 31.

[0095] In the parent sensor unit 30A, the verification unit 360 verifies the connection state and the unit position saved in the memory of itself and the connection state and the unit position saved in the memories of the child sensor units 30B, 30C,..., and determines the connection state and the unit position in the case where the verification results do not contradict each other.

[0096] In addition, in each sensor unit 30, the transmission timing deciding unit 310 decides the sensor-unit-unique transmission timing based on the unit position determined by the verification unit 360.

[0097] The 2nd communication unit 42 communicates data containing the measurement values measured by each sensor unit 30 between each amplifier unit 31 and the communication unit 20.

[0098] In each sensor unit 30, the data sending unit 340 sends data containing the measurement values saved in the memory of each amplifier unit 31 to the communication unit 20 using the 2nd communication unit 42 based on the sensor-unit-unique transmission timing decided by the transmission timing deciding unit 310.

[0099] [Channel Number Identification Method]

[0100] Figure 8 is a flowchart showing a processing flow of a channel number identification method M10 for assigning (identifying) a channel number in the sensor unit 30 connected at the start of the sensor system 1 according to an embodiment of the present application. As shown in Figure 8 , the channel number identification method M10 includes steps Sll to S15, which are executed by the amplifier units 31 and the communication unit 20 constituting the sensor system 1.

[0101] In step Sll, each sensor unit 30 and the communication unit 20 confirm at which position they are connected (connected position confirmation step). For example, the parent amplifier unit 31A confirms the connection position based on the states of the input terminals of the child amplifier units 31B, 31C,... by sequentially switching the output of the handshake GPIO terminal.

[0102] Here, the connection position includes, for example, the uppermost position, the middle position, the lowermost position, standalone, and the like, and each sensor unit 30 and the communication unit 20 can also confirm at which position they are connected (connected).

[0103] In step S12, each sensor unit 30 identifies the communication unit 20 (communication unit identification step). For example, the parent amplifier unit 31A first performs handshake with the communication unit 20 using the handshake GPIO terminal, and then notifies the child amplifier units 31B, 31C,... of the connection with the communication unit 20.

[0104] Here, for the child amplifier units 31B, 31C,..., the connection information (including the model information of the communication unit 20) can be notified using a command, and in the case where the communication unit 20 is not connected, the message can be notified or can not be notified.

[0105] Thus, each amplifier unit 31 can identify the communication unit 20. Also, each amplifier unit 31 and the communication unit 20 can store this information in their own memories, respectively.

[0106] In step S13, each sensor unit 30 and the communication unit 20 identify the parent sensor unit 30A (parent sensor unit identification step). For example, the parent amplifier unit 31A notifies the communication unit 20 and each child amplifier unit 31B, 31C,... of the model information of the parent sensor unit 30A.

[0107] Here, the communication unit 20 and the child amplifier units 31B, 31C, etc. can also be notified of the sensor type (such as optical displacement sensor, length measurement sensor, contact sensor, or proximity sensor) of the parent sensor unit 30A using commands. Furthermore, each amplifier unit 31 and communication unit 20 can store this information in its own memory.

[0108] In step S14, each sensor unit 30 and communication unit 20 identifies the sub-sensor units 30B, 30C, ... (sub-sensor unit identification step). For example, parent amplifier unit 31A first performs handshakes with sub-amplifier unit 31B using the handshake GPIO terminal, and then receives a channel number acquisition request command from sub-amplifier unit 31B. Parent amplifier unit 31A then assigns a channel number (here, 2CH) to sub-amplifier unit 31B and notifies the other sub-amplifier units 31 and communication unit 20 of the channel number information (2CH) of sub-amplifier unit 31B.

[0109] Next, after the sub-amplifier unit 31B performs handshake with the sub-amplifier unit 31C using the handshake GPIO terminal, the parent amplifier unit 31A receives the channel number acquisition request command from the sub-amplifier unit 31C. The parent amplifier unit 31A then assigns a channel number (here, 3CH) to the sub-amplifier unit 31C and notifies the other sub-amplifier units 31 and the communication unit 20 of the channel number information (3CH) of the sub-amplifier unit 31C.

[0110] In this way, the parent amplifier unit 31A repeats the same process in order until the lowest child amplifier unit 31, assigns a channel number to each child amplifier unit 31B, 31C, ..., and notifies each child amplifier unit 31B, 31C, ..., and the communication unit 20 of this information. Furthermore, each amplifier unit 31 and the communication unit 20 may store this information in its own memory.

[0111] In step S15, the channel number assigned to the amplifier unit 31 is confirmed (verification step). For example, the parent amplifier unit 31A obtains the information (connection information and unit position) stored in the memories of the child amplifier units 31B, 31C, etc., and compares it with the information (connection information and unit position) stored in its own memory (verification). If the verification results are consistent, the connection status and unit position are confirmed.

[0112] In addition, the parent amplifier unit 31A can also transmit the information (link information and unit position) stored in its own memory to the child amplifier units 31B, 31C,.... Each of the child amplifier units 31B, 31C,... compares (verifies) the information (link information and unit position) from the parent amplifier unit 31A with the information (link information and unit position) stored in its own memory. Then, in the case where the verification results do not contradict each other, the link state and the unit position can be determined.

[0113] As described above, at the start of the sensor system 1, in each of the sensor units 30, the identification information recognition unit 350 recognizes the link information indicating the number of sensor units 30 to which the sensor unit 30 is linked, and the unit position (channel number) indicating the number of the sensor unit 30 itself, using the first communication unit 41. Also, the verification unit 360 determines the link information and the unit position after verifying the link information and the unit position recognized in each of the sensor units 30. Then, the transmission timing decision unit 310 decides the transmission timing unique to the sensor unit, based on the unit position recognized by the identification information recognition unit 350, and the data sending unit 340 reads out the measurement value stored in the memory, based on the transmission timing unique to the sensor unit, and sends out the data including the measurement value to the communication unit 20. Thus, each of the sensor units 30 can more appropriately recognize the identification information (unit position) unique to each of the sensor units, and can more appropriately decide the transmission timing unique to the sensor unit, based on the unit position, in a manner in which the transmission timings of the plurality of sensor units are different.

[0114] [Measurement timing]

[0115] Next, a mechanism for measuring at an appropriate measurement timing in each of the sensor units 30 using the plurality of sensor units 30 and appropriately processing the measured measurement value will be described.

[0116] Figure 9 is a diagram schematically showing a case where the thickness of the object T is measured using two of the plurality of sensor units 30, 30A and 30B, according to an embodiment of the present application. As shown in Figure 9 the object T is measured using the parent sensor unit 30A (1CH) and the child sensor unit 30B (2CH), by projecting and receiving light from the sensor heads 32A and 32B on the front and back of the object T, respectively.

[0117] Here, it is important that the sensor heads 32A and 32B measure at the same position on the front and back of the object T, for example, in the case where the object T is a part of a manufacturing apparatus including a robot or the like, particularly in the case where the object T moves, and the like. In this case, the sensor heads 32A and 32B preferably measure at an appropriate timing (the same timing).

[0118] Figure 10 is a chart showing the projection acceptance light timing of the sensor heads in the two sensor units. As shown in Figure 10 , in the sensor head 32A of the parent sensor unit 30A as the 1st channel (1CH) and the sensor head 32B of the child sensor unit 30B as the 2nd channel (2CH), the on / off timing of the laser control signal and the CMOS control signal is set to be the same.

[0119] That is, the sensor head 32A (1CH) and the sensor head 32B (2CH) respectively project light to the object T at the same timing, and respectively accept the reflected light. Then, the amplifier unit 31A (1CH) receives measurement data based on the light receiving amount of the reflected light from the sensor head 32A, and the amplifier unit 31B (2CH) receives measurement data based on the light receiving amount of the reflected light from the sensor head 32B.

[0120] Here, 1 / 2 of the measurement period of the object T measured by the sensor head 32A (1CH) and the sensor head 32B (2CH) is set as the laser control signal on period (light projection period), and the CMOS control signal on period (exposure period) is set in correspondence thereto.

[0121] In addition, in the present embodiment, a case where the sensor head 32A and the sensor head 32B measure the object T at the same timing is described as shown in Figure 9 and Figure 10 , but for example, in a case where the sensor head 32A and the sensor head 32B do not measure at the same timing (for example, a case where a stationary object is measured from the same direction, a case where the inclination of a moving object is measured from the same direction, etc.), the sensor head 32A (1CH) and the sensor head 32B (2CH) can also be set so as to intentionally shift the projection and acceptance light timing, rather than at the same timing. By shifting the projection and acceptance light timing, interference between the measurement light and the reflected light of the sensor head 32A and the sensor head 32B can be avoided.

[0122] Figure 11 is an example showing the timing at which the amplifier unit 31 in the sensor unit 30 receives measurement data from the sensor head 32. As shown in Figure 11 , the amplifier unit 31 receives measurement data every measurement period (2nd period) during the 1st period.

[0123] As a specific example, in a case where the first period is set to 1 ms and the measurement period is set to 250 μs, the amplifier unit 31 receives the measurement data (first time) after the start of the reception of the synchronization signal transmitted from the parent amplifier unit 31A during the first period (1 ms), and then receives the measurement data every 250 μs, and receives the measurement data a total of 4 times. Further, during the first period in the reception of the next synchronization signal, the reception of the measurement data is repeated similarly.

[0124] Here, as a specific example, the first period is set to 1 ms and the measurement period is set to 250 μs, but typically, the first period is set to an integral multiple of the measurement period, for example, the first period can be set to 1 ms and the measurement period can be set to 125 μs, in which case the amplifier unit 31 receives the measurement data a total of 8 times during the first period. Further, the first period and the measurement period (second period) are not limited to this, and can be set appropriately according to the object of measurement and the required measurement accuracy.

[0125] [Adjustment of reception timing]

[0126] The plurality of sensor units 30 each have a measurement timing adjustment unit, and in each sensor unit 30, the measurement timing adjustment unit adjusts the timing at which the amplifier unit 31 receives the measurement data from the sensor head 32. For example, the amplifier unit 31 and the sensor head 32 can be connected by an interface of RS-485. Four signal lines (two communication signal lines, power supply, and GND) are prepared, and two of the communication signal lines (RX, TX) are used to exchange data between the amplifier unit 31 and the sensor head 32 by serial communication based on UART (Universal Asynchronous Receiver / Transmitter) communication, whereby the reception timing is adjusted. That is, instead of providing a signal line for communicating a synchronization signal for matching the timing between the amplifier unit 31 and the sensor head 32, the above communication signal lines are used to adjust the timing by a timing adjustment value (numerical information) transmitted from the amplifier unit 31 to the sensor head 32. Details of the timing adjustment value will be described later.

[0127] Specifically, with respect to data exchanged between the amplifier unit 31 and the sensor head 32 by UART communication, measurement data measured in the sensor head 32 in synchronization with a measurement cycle, the state of the sensor head 32 (including errors, warnings), and a response to a command from the amplifier unit 31, and the like are transmitted from the sensor head 32 to the amplifier unit 31. The state of the amplifier unit 31 (including errors, warnings) and a command to the sensor head 32 are transmitted from the amplifier unit 31 to the sensor head 32. Further, in the amplifier unit 31, a timing adjustment value is calculated based on the timing (time) at which the measurement data is received from the sensor head 32, and the timing adjustment value is transmitted to the sensor head 32.

[0128] Figure 12 is a diagram showing a case where the imaging timing is adjusted in accordance with the timing at which the measurement data is received from the sensor head 32 by the amplifier unit 31 in the sensor unit 30. As shown in Figure 12 , the reception timing of the measurement data received by the amplifier unit 31 from the sensor head 32 is phase-adjusted so as to coincide (approach) with the reception timing set in advance.

[0129] For example, in the sensor unit 30, the timing at which the first measurement data in the first cycle is received by the amplifier unit 31 from the sensor head 32 is set after a predetermined time (here, 15 μs) from the start of the transmission / reception of the synchronization signal having the first cycle (here, 1 ms) transmitted from the parent amplifier unit 31A. More specifically, for example, the timing at which the measurement data is received by the amplifier unit 31 from the sensor head 32 can also be set after a predetermined time (here, 15 μs) from the completion of the transmission / reception of the synchronization signal, starting from the fall of the synchronization signal, after which the transmission / reception of the synchronization signal is completed. In addition, the predetermined time can also be different in the parent amplifier unit 31A and the child amplifier units 31B, 31C,..., and for example, can be 3.5 μs in the parent amplifier unit 31A and 2.4 μs in the child amplifier units 31B, 31C,....

[0130] On the other hand, it is assumed that the actual reception timing at which the measurement data is received by the amplifier unit 31 from the sensor head 32 is 10 μs after the start of the transmission / reception of the synchronization signal having the first cycle transmitted from the parent amplifier unit 31A, and deviates from the reception timing set as described above. Here also similarly, the actual reception timing (10 μs) at which the measurement data is received by the amplifier unit 31 from the sensor head 32 can also refer to the time from the completion of the transmission / reception of the synchronization signal, starting from the fall of the synchronization signal, after which the transmission / reception of the synchronization signal is completed.

[0131] The measurement timing adjustment unit calculates a timing adjustment value from the preset reception timing (15 μs from the transmission of the synchronization signal) and the actual reception timing (10 μs from the transmission of the synchronization signal). Specifically, the measurement timing adjustment unit can also calculate the difference (5 μs) between the preset reception timing and the actual reception timing as the timing adjustment value. That is, the timing adjustment value can be calculated by the following equation.

[0132] [Timing adjustment value] = [preset reception timing (time) in the amplifier unit 31] - [timing (time) from the transmission of the synchronization signal to the actual reception of the measurement data]

[0133] Moreover, the timing adjustment value calculated by the measurement timing adjustment unit is reflected in the timing of the transmission of the next synchronization signal having the first period. Specifically, the timing adjustment value is transmitted from the amplifier unit 31 to the sensor head 32, and the projection / reception light timing in the sensor head 32 is adjusted in the next first period.

[0134] That is, the timing of the reception of the first measurement data in the period of the next first period transmitted from the parent amplifier unit 31A by the amplifier unit 31 from the sensor head 32 is adjusted, and before that, the timing of the reception of the second and subsequent measurement data in the period of the first period by the amplifier unit 31 from the sensor head 32 is not adjusted (the timing adjustment value is not reflected).

[0135] With respect to the timing of the reception by the amplifier unit 31 from the sensor head 32, the first to fourth measurement data in the period of the first period is received every measurement period, and thus by adjusting the reception timing of the first measurement data in the period of the first period, the reception timing of the second and subsequent measurement data is also automatically adjusted (shifted).

[0136] Moreover, the above-described adjustment of the reception timing can also be continued every first period, and the difference between the preset reception timing and the actual reception timing is made smaller, and thus the actual reception timing can converge to the preset reception timing. Specifically, for example, in the case where the measurement period is 125 μs and the difference (timing adjustment value) between the preset reception timing and the actual reception timing is -40 μs, the difference is adjusted by 15 μs in the next period, by 15 μs in the period after that, and by 10 μs in the period after that, and thus the difference is corrected little by little over a plurality of periods (in this case, three periods).

[0137] If the above-described adjustment of the reception timing is performed in each of the sensor units 30, the reception timing of the measurement data between the sensor units 30 approaches in a uniform manner, and the results of the measurement of the object T at the same timing can be obtained.

[0138] [Measurement timing adjustment method]

[0139] Figure 13 3 is a flowchart showing the processing flow of the timing adjustment method M20 for adjusting the measurement timing between the amplifier unit 31 and the sensor head 32. Figure 13 As shown, the timing adjustment method M20 includes steps S21 to S25 , which are executed by the amplifier unit 31 and the sensor head 32 of each sensor unit 30 .

[0140] In step S21 , based on the transmission and reception of the synchronization signal having the first cycle from the parent amplifier unit 31 , the sensor head 32 repeatedly measures the object T based on the measurement cycle (second cycle) (measuring step).

[0141] In step S22 , the amplifier unit 31 receives the measurement data measured in step S21 from the sensor head 32 (measurement data receiving step).

[0142] In step S23, amplifier unit 31 calculates a timing adjustment value based on the reception timing of the measurement data received in step S22 and a preset reception timing (timing adjustment value calculation step). For example, amplifier unit 31 calculates the difference between the reception timing of the first measurement data received during the period from the initiation and transmission of the synchronization signal having the first cycle from parent amplifier unit 31 to the reception of the first cycle and the preset reception timing as the timing adjustment value.

[0143] In step S24 , the sensor head 32 receives the timing adjustment value calculated in step S23 from the amplifier unit 31 (timing adjustment value receiving step).

[0144] In step S25, the sensor head 32 reflects the timing adjustment value received in step S24 in the next cycle (timing adjustment step). For example, the sensor head 32 adjusts the timing by Figure 10 The laser control signal and CMOS control signal shown are used to adjust the timing of projecting and receiving light onto the object T, thereby adjusting the measurement timing.

[0145] Then, the process returns to step S21 , and based on the transmission and reception of the synchronization signal having the first cycle from the parent amplifier unit 31 , the sensor head 32 repeatedly measures the object T based on the measurement cycle (second cycle) at the measurement timing adjusted in step S25 .

[0146] As described above, each measurement timing adjustment unit in the parent sensor unit 30A and the child sensor unit 30B adjusts the measurement timing in the amplifier unit 31A and the sensor head 32A, and the measurement timing in the amplifier unit 31B and the sensor head 32B, respectively. Thereby, it is possible to make the measurement timings of the parent sensor unit 30A and the child sensor unit 30B close to each other. In each sensor unit 30, it is possible to make the measurement timings in each sensor unit 30 consistent without providing a signal line for communicating a synchronization signal between the amplifier unit 31 and the sensor head 32, and it is possible to suppress the complication of wiring and the increase in manufacturing cost.

[0147] At least one of the plurality of sensor units 30 has an operation unit that generates an operation value by inter-amplifier operation based on measurement data measured by each sensor unit 30. Here, the parent sensor unit 30A includes an operation unit that generates an operation value based on measurement data measured by the parent sensor unit 30A and measurement data measured by the child sensor unit 30B.

[0148] The operation unit operates measurement data measured at the same measurement timing or close to the same appropriate measurement timing in the parent sensor unit 30A and the child sensor unit 30B, and thereby, for example, in the case of the thickness of the measurement target object T as shown in FIG. 8, it is possible to measure at the same position of the front and back of the object T, and thereby, it is possible to measure with higher accuracy. Figure 9

[0149] In addition, in the present embodiment, as an example, the case where the measurement timing is adjusted by adjusting the timing of projecting and receiving light in the plurality of sensor heads 32 is described, but it is not limited thereto. For example, it is also applicable to a contact sensor, a length measuring sensor, a proximity sensor, an analog input (voltage, current), a color sensor, a flow sensor, an ultrasonic sensor, a fiber sensor, and a TOF sensor, and the like. Based on the timing at which the amplifier unit receives measurement data from the sensor head, it is possible to adjust the measurement timing according to various sensor heads.

[0150] Figure 14 is a timing chart showing a series of processes of inter-amplifier operation in the parent sensor unit 30A and the child sensor unit 30B. As shown in FIG. 9, based on the transmission and reception of the synchronization signal (S1 to S4) having the 1st period, in the period (T1 to T4) of the 1st period, the parent sensor unit 30A and the child sensor unit 30B each perform measurement four times. Figure 14

[0151] ​​For example, when the first period is set to 1 ms and the measurement period (second period) is set to 250 μs, in the parent sensor unit 30A, the parent amplifier unit 31A receives four measurement data ("Al" to "A4") from the sensor head 32A during the first period Tl from the start of the transmission / reception of the synchronization signal Sl having the first period. In the parent amplifier unit 31A, the data is transmitted at the transmission timing allocated to the parent amplifier unit 31A during the first period Tl, but here, the measurement data (RV) and the operation value (MV) can also be "undefined".

[0152] In the parent amplifier unit 31A, at the transmission / reception timing of the next synchronization signal S2 having the first period, the measurement data generated during the first period Tl (here, "A4") is stored in the memory, and at the transmission timing allocated to the parent amplifier unit 31A during the first period T2, data including the measurement data "A4" and the operation value "undefined" is transmitted.

[0153] In the parent amplifier unit 31A, at the transmission / reception timing of the next synchronization signal S2 having the first period, the measurement data generated during the first period Tl (here, "A4") is stored in the memory, and at the transmission timing allocated to the parent amplifier unit 31A during the first period T2, data including the measurement data "A4" and the operation value "undefined" is transmitted.

[0154] Similarly, in the child sensor unit 30B, the child amplifier unit 31B receives four measurement data ("Bl" to "B4") from the sensor head 32B during the first period Tl from the start of the transmission / reception of the synchronization signal Sl having the first period. In the child amplifier unit 31B, the data is transmitted at the transmission timing allocated to the child amplifier unit 31B during the first period Tl, but here, the measurement data (RV) can also be "undefined".

[0155] In the child amplifier unit 31B, at the transmission / reception timing of the next synchronization signal S2 having the first period, the measurement data generated during the first period Tl (here, "B4") is stored in the memory, and at the transmission timing allocated to the child amplifier unit 31B during the first period T2, data including the measurement data "B4" is transmitted.

[0156] Then, the parent amplifier unit 31A receives data including the measurement data "B4" transmitted from the child amplifier unit 31B.

[0157] In addition, the parent amplifier unit 31A receives data including the measurement data "B4" from the transmission timing of the amplifier unit 31B during the first period T2, but can be acquired at the latest during the first period T2 (the start time point of the first period T3).

[0158] The parent amplifier unit 31A performs an operation on the measurement data "A4" stored in the memory of the parent amplifier unit 31A and the measurement data "B4" measured by the child sensor unit 30B, thereby generating an operation value "AB4". Here, the operation value "AB4" generated in the parent amplifier unit 31A is calculated on the basis of the measurement data "A4" and "B4" measured in the parent sensor unit 30A and the child sensor unit 30B at the same time.

[0159] Then, in the parent amplifier unit 31A, at the transceiving timing of the next synchronous signal S4 having the 1st period, the measurement data at this timing (here, "A12") is stored in the memory, and at the transmission timing allocated to the parent amplifier unit 31A in the 1st period T4, data containing the measurement data "A12" and the operation value "AB4" is transmitted. That is, in the communication unit 20, data containing the measurement data "A12" and the operation value "AB4" is received from the parent amplifier unit 31A.

[0160] Thus, in each of the sensor units 30, in the cycle divided by the 1st period (T1 to T4), measurement of the object T, acquisition of the measurement data, transmission of data containing the measurement value, generation of an operation value obtained by performing an operation on the basis of the measurement data measured at the same time, and transmission of data containing the operation value are processed in a pipeline manner.

[0161] As described above, on the basis of the transceiving of the synchronous signal having the 1st period transmitted from the parent amplifier unit 31A, in the cycle divided by the 1st period (T1 to T4), data generation (storage in the memory) is performed on the measurement data measured in the plurality of sensor units 30, and data is transmitted at the transmission timing allocated to each of the amplifier units 31. Also, in the inter-amplifier operation, by performing an operation on the measurement data measured at the same time, an operation value can be appropriately calculated, and further, by transmitting the operation value in the data transmission at the transmission timing allocated to each of the amplifier units 31, a series of data processing can be appropriately performed. For example, in the case of an application such as monitoring using the plurality of sensor units 30 (thickness measurement and step difference measurement, etc.), the deviation of the measurement timing and the deviation of the operation data can be reduced, and measurement can be performed with higher accuracy.

[0162] In addition, in the present embodiment, the operation value is generated by performing the inter-amplifier operation on the basis of the measurement data of the parent sensor unit 30A and the child sensor unit 30B, but the measurement data on which the inter-amplifier operation is performed is not limited to two, and for example, the operation value can be generated by performing the inter-amplifier operation on the basis of three or more measurement data. The inter-amplifier operation can be exemplified by, for example, an operation based on the measurement data of the parent sensor unit 30A, the child sensor unit 30B, and the grandchild sensor unit 30C. Figure 9The two pieces of measurement data shown are used to calculate the thickness of the object T, or the average of a plurality of measurement data is calculated to generate an operation value.

[0163] Furthermore, in the present embodiment, the operation unit that operates the measurement data in the parent sensor unit 30A and the measurement data in the child sensor unit 30B is provided in the parent sensor unit 30A, but is not limited thereto, and for example, the operation unit can be provided in the child sensor unit 30B, the communication unit 20, or the user terminal 10.

[0164] Furthermore, the measurement data in the parent sensor unit 30A and the measurement data in the child sensor unit 30B are not limited, and for example, the measurement data of the child sensor units 30 can be operated as an object of inter-amplifier operation to generate an operation value.

[0165] [Data Transfer]

[0166] Next, the mechanism of the user terminal 10 (information processing apparatus) for appropriately acquiring and processing data containing measurement values measured by the plurality of sensor units 30 via the communication unit 20 will be described.

[0167] Figure 15 is a functional block diagram mainly for explaining each function of the communication unit 20 in each device constituting the sensor system 1 of one embodiment of the present application. As Figure 15 indicated, the communication unit 20 is connected to the plurality of sensor units 30 in a signal-transmittable manner through the inter-unit communication control 40, connected to the user terminal (information processing apparatus) 10 in a signal-transmittable manner through the user terminal communication control 50, and has a control unit 210 and a storage unit 220. In addition, the storage unit 220 has a plurality of buffers, such as a first buffer 220-1, a second buffer 220-2,..., and an Mth buffer 220-M.

[0168] The control unit 210 receives data from the plurality of sensor units 30 through the inter-unit communication control 40. Specifically, as Figure 6 indicated, the communication unit 20 receives a synchronization signal having a first period from the parent amplifier unit 31A, and then receives data from all the amplifier units 31 (1CH to 16CH) connected in order during the first period.

[0169] The storage unit 220 stores the data received from the amplifier units 31 (1CH to 16CH) in order. For example, the storage unit 220 is an SDRAM (Synchronous Dynamic Random Access Memory) or the like.

[0170] The communication unit 20 can also have a timer, and associate the data received from the amplifier units 31 (1CH to 16CH) with time information measured by the timer, and store the data and the time information as a set in the storage unit 220.

[0171] Figure 16 is a diagram showing an example of a data format in which time information is given to the data received from the amplifier units 31 (1CH to 16CH) during the first cycle. As shown in Figure 16 time information is given to the data from the first channel (1CH) to the sixteenth channel (16CH).

[0172] For example, the communication unit 20 receives data from the amplifier units 31 (1CH to 16CH) during the first cycle, and at this time, the time is measured by the timer to obtain time information. Also, the communication unit 20 can give the time information to the data received from the amplifier units 31 (1CH to 16CH) and store it in the storage unit 220.

[0173] The communication unit 20 continues to receive data from the amplifier units 31 (1CH to 16CH) and store it in the storage unit 220 every first cycle, but the storage unit 220 includes the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M, and is configured to sequentially buffer data in the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M every prescribed amount (prescribed cycle amount of the first cycle).

[0174] In addition, the data buffered in the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M can be permanently saved in a ring buffer configuration. Here, the storage unit 220 has M buffers, but as long as it has at least two buffers, for example, in the case where the storage unit 220 has the first buffer 220-1 and the second buffer 220-2, data is alternately buffered and output in the first buffer 220-1 and the second buffer 220-2 every prescribed amount (prescribed cycle of the first cycle).

[0175] The control unit 210 transmits the data stored in the storage unit 220 to the user terminal 10 through the user terminal communication control 50. Here, the data transmitted from the communication unit 20 to the user terminal 10 is the data buffered in the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M, and for example, can be data for a plurality of first cycles (a plurality of cycles).

[0176] Further, even in the case where data is transmitted from the communication unit 20 to the user terminal 10, for example, in the case where data is read out from and transmitted from any of the 1st buffer 220-1, 2nd buffer 220-2,..., Mth buffer 220-M, in any of the remaining buffers, data received from the amplifier unit 31 (1CH ~ 16CH) is continuously stored.

[0177] [Multiple buffers and data transmission]

[0178] Figure 17 is a schematic diagram showing the situation of data processing in the user terminal 10 and the communication unit 20. As shown in Figure 17 , data is transmitted from the communication unit 20 to the user terminal 10 based on a data request from the user terminal 10 to the communication unit 20. Further, the sampling can also be set to automatically start from just after the start and continue until the power is turned off.

[0179] In the communication unit 20, data is received from the amplifier unit 31 (1CH ~ 16CH) in order during the 1st period, for example, in the 1st buffer 220-1, data of the 1st period (multiple periods) is buffered multiple times, and then, in the 2nd buffer 220-2, data of the 1st period (multiple periods) is buffered multiple times, and thereafter, it is repeated up to the Mth buffer 220-M.

[0180] Here, the 1st period is set to 1 ms, and the communication unit 20 receives data from the amplifier unit 31 (1CH ~ 16CH) during 1 ms and buffers it in order to the 1st buffer 220-1, and in this 1st buffer 220-1, data of 100 ms (N = 100; data of 100 times the 1st period) is buffered.

[0181] Then, the communication unit 20 continues to receive data from the amplifier unit 31 (1CH ~ 16CH) every 1st period and stores data of the next 100 ms (N = 100; data of 100 times the 1st period) to the 2nd buffer 220-2.

[0182] Thus, in the communication unit 20, with respect to data from the amplifier unit 31 (1CH ~ 16CH), for every 100 ms of data (N = 100; data of 100 times the 1st period), the buffer is switched in order and stored to the 1st buffer 220-1, 2nd buffer 220-2,..., Mth buffer 220-M. In addition, the next of the Mth buffer 220-M returns to the 1st buffer 220-1.

[0183] As described above, the communication unit 20 causes the plurality of sensor units 30 to start measurement in a manner that sampling is automatically started from immediately after startup, and continues to acquire data containing measurement values measured by the plurality of sensor units 30 until power is turned off.

[0184] The user terminal 10 transmits a data request A to the communication unit 20 in order to acquire data containing measurement values measured by the plurality of sensor units 30. Here, in the data request A, 100 ms of data (N = 100; 100th 1st period data) is requested, for example, for data from the amplifier units 31 (1CH to 16CH).

[0185] The communication unit 20, based on the data request A, buffers 100 ms (N = 100; 100th 1st period) of data from the amplifier units 31 (1CH to 16CH) in the 1st buffer 220-1, and thereby transmits data buffered in the 1st buffer 220-1 to the user terminal 10.

[0186] In addition, even in a case where data buffered in the 1st buffer 220-1 is transmitted from the communication unit 20 to the user terminal 10 as data, data received from the amplifier units 31 (1CH to 16CH) is continuously stored in the 2nd buffer 220-2.

[0187] Then, the user terminal 10 receives 100 ms of data from the communication unit 20 based on the data request A, and further transmits the next 100 ms of data as a data request B to the communication unit 20.

[0188] The communication unit 20, based on the data request B, buffers 100 ms (N = 100; 100th 1st period) of data from the amplifier units 31 (1CH to 16CH) in the 2nd buffer 220-2, and thereby transmits data buffered in the 2nd buffer 220-2 to the user terminal 10.

[0189] The user terminal 10 receives 100 ms of data from the communication unit 20 based on the data request B.

[0190] In this way, the user terminal 10 is able to acquire 200 ms (200th 1st period) of data from the amplifier units 31 (1CH to 16CH) by transmitting the data requests A, B to the communication unit 20.

[0191] In addition, data requests A, B,... are made from the user terminal 10 to the communication unit 20 according to the data request (amount) from the user terminal 10, and thereby data buffered in the 1st buffer 220-1, the 2nd buffer 220-2,..., the Mth buffer 220-M of the storage unit 220 of the communication unit 20 is sequentially transmitted to the user terminal 10.

[0192] As described above, the communication unit 20 associates the data received from the amplifier units 31 (1CH to 16CH) with the time information measured by the timer, and stores the data and the time information as a set in the storage unit 220. At this time, every predetermined amount (predetermined period amount of the first period), the data is sequentially buffered in the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M. Thus, even if the data from the amplifier units 31 (1CH to 16CH) is being written into an arbitrary buffer, the data buffered in the remaining arbitrary buffers is transmitted, and thus the writing is not affected, and the data can continue to be written. As a result, the communication unit 20 does not cause the data from the amplifier units 31 (1CH to 16CH) to be defective, and can appropriately transmit the data to the user terminal 10.

[0193] Further, in the present embodiment, the plurality of buffers including the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M, but the area (buffer) in which the data is stored can be at least two or more.

[0194] In addition, in the present embodiment, the communication unit 20 receives the data request from the user terminal 10, but for example, the command can be obtained by the user via an external device or directly. As the communication unit 20, the data can be transmitted to the user terminal 10 according to the data request.

[0195] Further, in the present embodiment, the communication unit 20 mainly functions as a device that relays the data from the amplifier units 31 (1CH to 16CH), but is not limited thereto, and for example, the data from the amplifier units 31 (1CH to 16CH) can be operated or determined, and the operation result and the determination result can be transmitted to the user terminal 10 together with the data buffered in the first buffer 220-1, the second buffer 220-2,..., and the Mth buffer 220-M.

[0196] [Update of time information]

[0197] Figure 18 is a diagram showing a mechanism in which the communication unit 20 obtains time information from a server. As shown in Figure 18 , the communication unit 20 is connected to an NTP (Network Time Protocol) server 90 via an EtherNet / IP network. The NTP server 90 can be an SNTP (Simple Network Time Protocol) server.

[0198] The communication unit 20 also has a communication unit that communicates with the NTP server 90, and by acquiring time information from the NTP server 90, the time information of the timer inside the communication unit 20 is updated.

[0199] For example, the communication unit 20 can also acquire time information from the NTP server 90 by issuing a command when the power of the communication unit 20 is turned on, and can also acquire time information from the NTP server 90 by issuing a command at regular intervals (for example, every 120 seconds, etc.).

[0200] Further, by updating the time information inside the communication unit 20 with the time information acquired from the NTP server 90, the deviation of the time information in the communication unit 20 can be mitigated, and thus appropriate time information can be used. That is, the time information inside the communication unit 20 is synchronized with the time information of the NTP server 90.

[0201] As described above, in the communication unit 20, the time is measured by the timer and the time information is acquired, and the data received from the amplifier unit 31 (1CH to 16CH) is given the time information and stored in the storage unit 220. Then, as shown in Figure 16 the data given the time information is transmitted from the communication unit 20 to the user terminal 10.

[0202] That is, with respect to the data received by the user terminal 10, the time information that has been appropriately updated by mitigating the deviation in the communication unit 20 is associated with the data from the amplifier unit 31, and the user terminal 10 can perform data analysis, etc., based on these appropriate time information.

[0203] In addition, the time information of the event log in the communication unit 20 is also synchronized with the time information of the NTP server 90, and thus, for example, in the case of analyzing the cause of an abnormality, etc., and in the case of performing analysis using the data transmitted to the user terminal 10, appropriate and easy comparison can be performed, and appropriate and efficient analysis can be performed.

[0204] The embodiments described above are merely for easy understanding of the present application, and are not intended to limit the explanation of the present application. The elements and their configurations, materials, conditions, shapes, and sizes, etc., of the embodiments are not limited to the illustrated contents, and can be appropriately changed. In addition, the structures shown in different embodiments can be partially replaced or combined with each other.

[0205] [Postscript]

[0206] A sensor system (1) has a plurality of sensor units (30) and a communication unit (20) connected to the plurality of sensor units (30) in a signal-transmittable manner, which transmits information received from each sensor unit (30) to an information processing device (10) or a control device, wherein

[0207] The plurality of sensor units (30) hold, in a memory, a measurement value obtained by measuring based on a synchronization signal having a second period inherent to the sensor unit, which is phase-adjusted based on a synchronization signal having a first period common to the plurality of sensor units (30),

[0208] At least one of the plurality of sensor units (30), the communication unit (20), and the information processing device (10) reads out the measurement value held in the memory by at least two or more of the plurality of sensor units (30) and performs an operation, thereby generating an operation value.

Claims

1. A sensor system having a plurality of sensor units and a communication unit connected to the plurality of sensor units in a manner capable of transmitting signals, which transmits information received from each of the sensor units to an information processing device or a control device, wherein the plurality of sensor units hold a measurement value obtained by measurement based on a synchronization signal having a second period inherent to the sensor unit in a memory, the synchronization signal having the second period inherent to the sensor unit being phase-adjusted based on a synchronization signal having a first period common among the plurality of sensor units, and at least one of the plurality of sensor units, the communication unit, the information processing device, and the control device reads out the measurement value held in the memory by at least two or more of the plurality of sensor units and performs an operation, thereby generating an operation value.

2. The sensor system according to claim 1, wherein the plurality of sensor units perform phase adjustment based on a timing at which the measurement value is received and a reception timing set in advance with respect to the synchronization signal having the second period.

3. The sensor system according to claim 2, wherein the plurality of sensor units reflect the phase adjustment of the synchronization signal having the second period at a timing at which a next synchronization signal having the first period is transmitted and received.

4. The sensor system according to claim 1, wherein at least one of the plurality of sensor units acquires a measurement value held in the memory by another sensor unit and performs an operation with its own measurement value, thereby generating an operation value, and the measurement, the acquisition of the measurement value, and the generation of the operation value are processed in a pipeline manner in a cycle divided by the synchronization signal.

5. The sensor system according to claim 4, wherein at least one of the plurality of sensor units performs an operation on measurement values measured at the same timing in the plurality of sensor units, thereby generating an operation value. ​ ​ ​ ​ ​ ​ ​

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