Integrally-formed circular target grabbing and transferring device

Abstract

The invention discloses an integrally-formed circular target grabbing and transferring device which comprises a sorting and correcting unit, the sorting and correcting unit comprises a main conveying line, and an unqualified product discharging line and a qualified product discharging line are arranged at the discharging end of the main conveying line in parallel. A machine vision detection system used for detecting the circular target material bodies is arranged above the main conveying line, a connecting rod mechanism driven by a telescopic air cylinder is arranged on one side of the main conveying line, and the connecting rod mechanism is connected with a stirring piece used for guiding the circular target material bodies to an unqualified product discharging line or a qualified product discharging line; a gantry type transfer unit is arranged at the discharging end of the qualified product outflow line, through the gantry type transfer unit, array type vacuum suction cup partition control, a sorting correction unit and a positioning locking structure, high-precision and self-adaptive transfer and automatic sorting of the circular target materials among multiple stations are achieved, and the loading and unloading efficiency and the operation reliability are improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of target material production, in particular to an integrally-formed circular target material grabbing and transferring device. BACKGROUND

[0002] A target material is a high-purity material for physical vapor deposition (PVD), chemical vapor deposition (CVD) or sputtering coating process, usually a sheet, block or disc-shaped workpiece made of metal, alloy, ceramic or compound, in the vacuum coating process, the target material is atomized or molecularized under ion bombardment or high temperature, and deposited on the surface of the substrate to form a functional film, which is widely used in the fields of semiconductors, display panels, photovoltaic cells and optical coatings. The purity (usually 99.9% to 99.999%), microstructure and geometric accuracy of the target material directly affect the performance of the film, so its preparation needs to go through multiple precise processes such as smelting, forging, machining and purification. The loading and unloading device is used to ensure the lossless and efficient transfer of the target material during processing, testing and transportation.

[0003] Publication No. CN117465977A discloses a target material loading and unloading device, which comprises a driving mechanism, a transmission mechanism and a loading and unloading mechanism. The loading and unloading mechanism comprises a suction accessory, a gas inlet pipeline and a gas extraction pipeline. During the loading and unloading of the target material, the driving mechanism moves the loading and unloading mechanism to the surface of the target material through the transmission mechanism, and the suction accessory is in close contact with the surface of the target material. The loading and unloading of the target material are realized by controlling the air pressure between the suction accessory and the target material. However, the patent still has the following problems in actual use: The driving mechanism and the transmission mechanism can only realize vertical movement adjustment, lack of lateral displacement function, and cannot meet the multi-station transfer requirements of the circular target material in the purification process; the suction accessory of the loading and unloading mechanism is adsorbed by gas extraction, but does not adopt an array type vacuum chuck design, and does not set a partition-controlled pneumatic pipeline, so it is difficult to stably adsorb the arc surface of the circular target material, and the target material is easy to deviate or be damaged due to uneven stress; at the same time, the existing device does not have a classification assembly, and cannot perform qualification pre-inspection and classification conveying on the target material before purification, so manual intervention is required for sorting, which reduces the continuity and automation degree of the purification operation; in addition, the structure design (such as screw rod and steel rope transmission) of the transmission mechanism is prone to positioning accuracy problems in high-frequency loading and unloading operation.

[0004] Therefore, an integrally-formed circular target material grabbing and transferring device is proposed to solve the problems in the above. SUMMARY

[0005] The present application aims to provide an integrally formed circular target material grabbing and transferring device to solve the problem that the current existing target material loading and unloading device cannot meet the requirements of multi-station accurate transfer, stable adsorption and automatic sorting in the circular target material purification process due to the vertical movement of the driving mechanism, the non-array partition control of the adsorption structure and the lack of classification function.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical scheme: an integrally formed circular target material grabbing and transferring device, comprising a sorting and correcting unit, the sorting and correcting unit comprising a main conveying line, the discharge end of the main conveying line being provided with an unqualified product discharge line and a qualified product flow line side by side, a machine vision detection system for detecting the circular target material body being provided above the main conveying line, a connecting rod mechanism driven by a telescopic cylinder being provided on one side of the main conveying line, the connecting rod mechanism being connected with a poking piece for guiding the circular target material body to the unqualified product discharge line or the qualified product flow line; A gantry type transfer unit is provided at the discharge end of the qualified product flow line, the gantry type transfer unit comprising a gantry and a transition conveying line provided below the gantry, a vacuum grabbing unit driven by an X-axis linear module and a Z-axis lifting cylinder being provided on the gantry, the vacuum grabbing unit comprising a bearing plate and a plurality of vacuum suction cups provided below the bearing plate, the vacuum suction cups being connected in parallel through a pneumatic pipeline to form a plurality of independently controlled air flow circuits, a vacuum monitoring assembly for monitoring the vacuum degree being provided on each air flow circuit.

[0007] Preferably, the connecting rod mechanism comprises a mounting plate fixed to one side of the main conveying line, the telescopic cylinder being fixed to the mounting plate, the output end of the telescopic cylinder being rotatably connected to the middle part of a connecting rod body, one end of the connecting rod body being rotatably connected to the mounting plate, the other end of the connecting rod body being slidably connected to the mounting plate, and the poking piece being provided at the bottom of the connecting rod body.

[0008] Preferably, mounting arms are symmetrically provided on both sides of the unqualified product discharge line and the qualified product flow line, a target material positioning and correcting frame being fixed to the mounting arms; the end parts of the poking piece and the target material positioning and correcting frame are provided with positioning and locking units which are in contact with the outer periphery of the circular target material body.

[0009] Preferably, the positioning and locking unit comprises a fixed support fixedly connected to the poking piece or the target material positioning and correcting frame, a sliding sleeve being sleeved inside the fixed support and being capable of sliding up and down relative to the fixed support, a guide roller being rotatably connected to the bottom end of the sliding sleeve and being in contact with the outer periphery of the circular target material body; a self-locking structure is provided between the sliding sleeve and the fixed support, the self-locking structure being actuated and locking the sliding sleeve when the sliding sleeve is pressed to slide up to a predetermined position.

[0010] Preferably, the self-locking structure comprises an L-shaped guide groove and a locking groove formed in the top end of the sliding sleeve, a limiting stopper is slidably connected in the L-shaped guide groove and fixed to the fixed support; a pin shaft sliding groove is formed on one side of the fixed support, a locking pin is slidably connected in the pin shaft sliding groove, one end of the locking pin is fixedly connected with a sliding sleeve, the inner wall of the sliding sleeve is slidably connected with the outer wall of the fixed support, a return spring is attached to the outer side of the end of the locking pin away from the sliding sleeve, and the top end of the return spring is fixedly connected with the fixed support; when the sliding sleeve slides and rotates, the locking pin is clamped into the locking groove under the action of the return spring to realize self-locking.

[0011] Preferably, the X-axis linear module is slidably connected with an X-axis sliding seat, and the X-axis sliding seat is fixedly connected with the Z-axis lifting cylinder; the gantry is further fixedly connected with a limiting frame, the Z-axis lifting cylinder is arranged in the limiting frame, and an optical sensor for detecting the position of the Z-axis lifting cylinder is arranged at the top corner of the limiting frame.

[0012] Preferably, the gantry is further fixedly connected with an integrated dust removal and static electricity removal device, and the air outlet of the integrated dust removal and static electricity removal device is arranged opposite to the transition conveying line.

[0013] Preferably, the vacuum monitoring assembly comprises vacuum gauges arranged on each air flow circuit, and a vacuum gauge arranged on the bearing plate and electrically connected with all the vacuum gauges; each air flow circuit is further provided with a throttle valve for adjusting flow.

[0014] Preferably, the bottom of the bearing plate is fixedly connected with at least six supporting seats through supports, and the two ends of each supporting seat are provided with vacuum suction cups; and the pneumatic pipeline connects all the vacuum suction cups in parallel into four independent air flow circuits.

[0015] Preferably, the top center of the bearing plate is provided with a piezoelectric ceramic micro displacement stage, the top of the piezoelectric ceramic micro displacement stage is fixedly connected with the output end of the Z-axis lifting cylinder; and the bottom center of the bearing plate is provided with a micro displacement sensor.

[0016] Compared with the prior art, the one-piece circular target material grabbing and transferring device has the advantages that: through the gantry type transferring unit, the array type vacuum suction cup partition control, the sorting and correcting unit and the positioning and locking structure, the circular target material can be high-precision and self-adaptive transferred and automatically sorted between multiple stations, the loading and unloading efficiency and the operation reliability are improved, and the specific contents are as follows: Firstly, compared with the target material loading and unloading device with only vertical direction movement adjustment function of publication No. CN117465977A, the gantry type transfer unit of the present application drives the vacuum grabbing unit to realize accurate displacement in horizontal and vertical directions through the cooperation of X-axis linear module and Z-axis lifting cylinder. Among them, the X-axis linear module drives the X-axis sliding seat to slide stably, and cooperates with the lifting action of the Z-axis lifting cylinder, so that the circular target material can be flexibly transferred between different stations in the purification process, effectively solving the problem that the existing device lacks horizontal displacement function and cannot meet the multi-station transfer demand.

[0017] Secondly, the vacuum grabbing unit of the present application adopts array type vacuum suction cup design, and connects all vacuum suction cups in parallel into four independent air flow circuits through pneumatic pipeline, each circuit is equipped with vacuum monitoring component and throttle valve, compared with the structure of the existing device without array type design and partition control pipeline, stable adsorption of the arc surface of the circular target material can be realized. And the adsorption process is divided into three stages, accurately solving the problem of "excessive deformation of force, insufficient falling" of conventional vacuum adsorption: in the contact stage, when the micro displacement sensor detects that the distance between the suction cup and the target material is <1mm, the vacuum system starts "low pressure pre-adsorption", avoiding impact caused target material displacement; in the adsorption stage, when the vacuum gauge detects that the vacuum degree is stable, the pressure adjusting module automatically matches the adsorption force according to the target material quality identified by the vision sensor, the vacuum degree corresponding to the copper target is 100-200Pa, at the same time, the piezoelectric ceramic micro displacement table compensates the flatness error of ±0.5mm on the surface of the target material according to the feedback of the displacement sensor, to ensure that each suction cup is uniformly stressed; in the transfer stage, if the vacuum gauge detects that the vacuum degree of a certain circuit decreases by >50Pa, the PLC controller immediately closes the electromagnetic proportional valve of the circuit, and at the same time increases the vacuum degree of the adjacent circuit, to ensure that the total adsorption force remains unchanged, so that the target material falling rate is reduced from about 2% of the conventional design to below 0.05%, reducing the risk of target material deviation or damage.

[0018] Thirdly, the sorting and correcting unit provided by the present application carries out qualifiedness pre-detection on the circular target material through the machine vision detection system above the main conveying line, after detection is completed, the connecting rod mechanism driven by the telescopic cylinder drives the poking piece to guide the unqualified target material to the unqualified product discharge line, and the qualified product is sent to the qualified product outflow line. At the same time, the target material positioning and correcting frame on both sides of the unqualified product discharge line and the qualified product outflow line cooperates with the positioning and locking unit, to accurately position, correct and transport the target material. Compared with the existing device without classification component and needing manual intervention for sorting, the present device realizes automatic detection, sorting and correction of the target material, without additional manual operation, effectively improving the continuity and automation degree of the purification operation, and reducing the labor cost.

[0019] In the positioning and locking unit, the sliding sleeve is in sliding connection with the fixed support, the guide roller is rotationally connected to the bottom end of the sliding sleeve, and the self-locking structure between the sliding sleeve and the fixed support can be locked when the sliding sleeve is pressed to slide to a predetermined position, ensuring reliable positioning during target material transfer. At the same time, the guide roller and the sliding sleeve are rotationally connected, and the disassembly process does not require complex tools, compared with the complicated disassembly of similar components in the existing device, the maintenance difficulty is greatly reduced, and the maintenance convenience of the device is improved.

[0020] The existing device adopts a transmission structure of a lead screw and a steel rope, and positioning accuracy is insufficient in high-frequency loading and unloading operations. The transmission structure composed of the X-axis linear module and the Z-axis lifting cylinder is used in the present application, and the position of the Z-axis lifting cylinder is detected in real time by the photoelectric sensor at the top corner of the limiting frame, so that high-precision displacement control of the vacuum grabbing unit can be realized. At the same time, the piezoelectric ceramic micro-displacement table can be adjusted in a small range according to the feedback of the micro-displacement sensor, so as to further compensate the positioning error and ensure high positioning accuracy in high-frequency operations, thereby ensuring the accuracy of target material grabbing and transferring.

[0021] Finally, the integrated dust removal and static electricity removal device fixed on the gantry is arranged opposite the transition conveying line at the air outlet, so that dust removal and static electricity removal treatment can be performed on the target material surface during target material transfer, thereby avoiding the adverse effects of dust and static electricity on the quality of the target material, providing a clean and stable environment for target material transfer, and further improving the quality guarantee during target material transfer. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present application; Figure 2 It is a schematic diagram of the three-dimensional structure of the sorting and correcting unit in the present application; Figure 3 It is a schematic diagram of the structure at the connecting rod body in the present application; Figure 4 It is a schematic diagram of the three-dimensional structure of the gantry type transfer unit in the present application; Figure 5 It is a schematic diagram of the structure of the gantry type transfer unit from another perspective in the present application; Figure 6 It is a schematic diagram of the structure of the present application Figure 1 It is a schematic diagram of the structure of the present application Figure 7 It is a schematic diagram of the structure of the positioning and locking unit in the present application; Figure 8 It is a schematic diagram of the structure of the fixed support and the sliding sleeve in the present application; Figure 9 It is a schematic diagram of the three-dimensional structure of the vacuum grabbing unit in the present application; Figure 10Another perspective structure schematic diagram of the vacuum grabbing unit in the application.

[0023] In the figure: 1, sorting and correction unit; 101, main conveying line; 102, unqualified product discharge line; 103, qualified product outflow line; 104, machine vision detection system; 105, mounting plate; 106, telescopic cylinder; 107, connecting rod body; 108, mounting arm; 109, target material positioning correction frame; 2, positioning and locking unit; 201, fixed support; 202, sliding sleeve; 203, guide roller; 204, L-shaped guide groove; 205, limit stop; 206, pin shaft sliding groove; 207, locking pin; 208, sliding sleeve; 209, return spring; 210, locking groove; 3, circular target material body; 4, gantry transfer unit; 401, gantry; 402, transition conveying line; 403, integrated dust removal and static electricity removal device; 404, X-axis linear module; 405, X-axis sliding seat; 406, Z-axis lifting cylinder; 407, limit frame; 408, photoelectric sensor; 5, vacuum grabbing unit; 501, bearing plate; 502, support; 503, support seat; 504, vacuum chuck; 505, pneumatic pipeline; 506, throttle valve; 507, vacuum gauge; 508, vacuum gauge; 509, piezoelectric ceramic micro displacement stage; 510, micro displacement sensor. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the application.

[0025] Please refer to Figures 1-10 The application provides a technical solution: an integrally formed circular target material grabbing and transferring device, mainly composed of a sorting and correction unit 1, a positioning and locking unit 2, a circular target material body 3, a gantry transfer unit 4 and a vacuum grabbing unit 5, and each unit cooperates to realize the whole process operation of "detection-sorting-correction-grabbing-transferring" of the target material: The sorting and correction unit 1 serves as a front-end processing module, is responsible for conveying, quality detection and qualified product / unqualified product diversion of the target material, and ensures the position accuracy of the target material in the conveying process through the positioning and locking unit 2; The gantry transfer unit 4 and the vacuum grabbing unit 5 constitute a rear-end transfer module, realize non-damage grabbing and accurate transfer of the qualified target material through the cooperative driving of the X-axis and the Z-axis and the self-adaptive vacuum adsorption control; The positioning and locking unit 2 is a core auxiliary component, which is used for position correction of the target material in the sorting and correction unit 1, and can realize convenient replacement of the guide roller through a quick release structure, thereby reducing the maintenance cost.

[0026] The sorting and correction unit 1 is a key module for realizing the “preliminary screening + positioning” of the target material. The core function thereof is to distinguish the quality of the target material through machine vision detection, and to realize the shunting and position correction of the target material through the connecting rod mechanism and the positioning frame. The specific structure and working process are as follows: The main body of the sorting and correction unit 1 is the main conveying line 101, which adopts a synchronous belt conveying structure (the width is designed according to the diameter of the target material, and is usually 50-80 mm larger than the diameter of the target material). The conveying speed can be adjusted through a servo motor (the adjustment range is 0.5-1.2 m / s, which is suitable for different batch production requirements). At the discharge end of the main conveying line 101, the unqualified product discharge line 102 and the qualified product flow line 103 are arranged side by side through a branch structure, so as to ensure that there is no jamming when the target material is shunted.

[0027] The machine vision detection system 104 is fixedly installed at 1.2-1.5 m above the main conveying line 101. The machine vision detection system 104: the industrial camera selects Basler acA2040-90um (20 million pixels, frame rate 30 fps), the lens selects Schneider Kreuznach C port 16 mm fixed focus lens, and the ring light source selects Keyence CA-DRW2 (light intensity 5000 lux, color temperature 5000 K), which can realize real-time acquisition of the surface image of the target material and transmission to the background processor. The processor identifies the diameter deviation (allowable error ±0.1 mm), surface scratch (depth >0.05 mm is judged as unqualified) and deformation amount (flatness error >0.1 mm is judged as unqualified) of the target material through image algorithm (such as edge detection, gray scale contrast), and sends a shunting instruction to the connecting rod mechanism according to the detection result.

[0028] On the side of the main conveying line 101 away from the branch end, the mounting plate 105 is fixedly installed through bolts. The telescopic cylinder 106 (cylinder diameter 50 mm, stroke 150 mm, working air pressure 0.6-0.8 MPa) is fixed horizontally on the mounting plate 105. The output end of the telescopic cylinder 106 is rotatably connected to the middle part of the connecting rod body 107 through a fish-eye bearing. One end of the connecting rod body 107 is rotatably connected to the mounting plate 105 through a hinge, and the other end is slidably connected to the horizontal sliding groove on the mounting plate 105 through a sliding block, forming a “crank slider” transmission structure. A pusher (made of nylon material to avoid scratching the surface of the target material) is fixedly installed at the bottom of the connecting rod body 107 (corresponding to the conveying surface height of the main conveying line 101) through screws.

[0029] When the machine vision detection system 104 determines that the target material is unqualified, the piston rod of the telescopic cylinder 106 extends, the connecting rod body 107 rotates around the hinge, the actuator swings to the branch side of the main conveying line 101, and the target material is guided to the unqualified product discharge line 102; when it is determined to be qualified, the piston rod of the telescopic cylinder 106 is retracted, the actuator is reset, and the target material flows into the qualified product discharge line 103 along the main conveying line 101. In order to ensure the accuracy of the diversion, a photoelectric sensor (response time <0.1s) is arranged at the branch of the main conveying line 101, and the telescopic cylinder 106 is triggered only when the target material is detected to reach the branch position, so as to avoid misoperation.

[0030] In order to further correct the position deviation (deviation usually ≤2mm) of the target material during the conveying process, the supporting arms 108 are symmetrically fixed and installed on both sides of the unqualified product discharge line 102 and the qualified product discharge line 103, and the target material positioning and correcting frame 109 (made of aluminum alloy, light weight design) is fixed on the supporting arm 108 through bolts; at the same time, the positioning and locking unit 2 is installed at the end of the actuator and the end of the target material positioning and correcting frame 109, the position correction is realized through the fit of the guide roller and the outer periphery of the target material, and the stability of the corrected position is ensured through the self-locking structure.

[0031] The positioning and locking unit 2 includes a fixed support 201, a sliding sleeve 202, a guide roller 203 and a self-locking structure. The fixed support 201 is a hollow cylindrical structure (inner diameter 30mm, height 50mm), which is fixed with the actuator or the target material positioning and correcting frame 109 through screws; The sliding sleeve 202 is sleeved inside the fixed support 201 and can slide up and down along the inner wall of the fixed support 201 (sliding stroke 15mm), and the bottom end is rotatably connected with the guide roller 203 through a deep groove ball bearing (roller diameter 25mm, width 10mm, material polyurethane, hardness 60ShoreA, to avoid damaging the target material); The self-locking structure includes an L-shaped guide groove 204 (groove width 5mm, vertical segment length 8mm, horizontal segment length 15mm) opened in the inner wall of the top end of the sliding sleeve 202, a limiting block 205 (diameter 5mm, slidingly matched with the L-shaped guide groove 204) fixed on the outer wall of the fixed support 201, and a locking pin 207 assembly arranged on one side of the fixed support 201.

[0032] On the side wall of the fixed support 201, an axle sliding groove 206 (diameter 8 mm, length 12 mm) is axially opened, and a locking pin 207 (diameter 8 mm, length 20 mm) is slidingly connected in the axle sliding groove 206; the outer end of the locking pin 207 is fixedly connected with a sliding sleeve 208 (inner diameter 10 mm, height 15 mm) through threads, the inner wall of the sliding sleeve 208 slidingly matches the outer wall of the fixed support 201; the outer side of the inner end of the locking pin 207 is sleeved with a return spring 209 (spring wire diameter 1.2 mm, free length 15 mm), and the top end of the return spring 209 is fixed with the inner wall step of the fixed support 201; a locking groove 210 (depth 3 mm, width 8.2 mm) is opened on the outer wall of the sliding sleeve 202 corresponding to the position of the locking pin 207.

[0033] When the target material moves on the conveying line and contacts the guide roller 203, the target material generates a horizontal thrust on the guide roller 203, pushing the sliding sleeve 202 to slide upward along the fixed support 201 (the sliding distance is determined by the diameter deviation of the target material, usually ≤5 mm); at this time, the limiting block 205 moves along the vertical segment of the L-shaped guide groove 204 to avoid rotation of the sliding sleeve 202.

[0034] When the sliding sleeve 202 slides to the predetermined position (i.e., the guide roller 203 completely matches the outer periphery of the target material, and the position correction of the target material is completed), the operator manually rotates the sliding sleeve 202 (rotation angle 90°) to make the limiting block 205 enter the horizontal segment of the L-shaped guide groove 204; at the same time, the locking groove 210 of the sliding sleeve 202 is aligned with the locking pin 207, the locking pin 207 is clamped into the locking groove 210 under the elastic force of the return spring 209 (spring elastic force 50-80 N), the self-locking of the sliding sleeve 202 is realized, and it is ensured that the guide roller 203 always matches the outer periphery of the target material to avoid deviation of the target material in subsequent conveying.

[0035] When the guide roller 203 needs to be replaced due to wear (wear amount >0.5 mm), the operator manually pushes the sliding sleeve 208 upward to drive the locking pin 207 to slide outward along the axle sliding groove 206, compresses the return spring 209, and makes the locking pin 207 out of the locking groove 210; then, the sliding sleeve 202 is reversely rotated by 90° to make the limiting block 205 return to the vertical segment of the L-shaped guide groove 204, and the sliding sleeve 202 is pulled downward, so that the sliding sleeve 202 and the guide roller 203 can be taken out from the fixed support 201; after the new guide roller 203 is replaced, the reverse steps are reset. The whole replacement process does not need to disassemble the fixed support 201, and the operation time is ≤2 min, which greatly improves the maintenance efficiency.

[0036] The gantry transfer unit 4 is arranged at the discharge end of the qualified product outflow line 103, and is responsible for transferring the corrected qualified target material to the subsequent processing station (such as target material binding, packaging, etc.). The core structure of the gantry transfer unit 4 includes a gantry 401, a transition conveying line 402, an integrated dust and static electricity removal device 403, and an X-axis driving assembly. The specific implementation is as follows: The gantry 401 adopts a carbon steel welded structure (column section size 150mmx150mm, beam length 3000mm, height 2000mm), which is fixed to the ground (ground flatness error ≤0.1mm / m) through expansion bolts to ensure the overall rigidity (beam deflection ≤0.5mm). Below the gantry 401 (corresponding to the discharge end of the qualified product outflow line 103), a transition conveying line 402 is arranged, which has the same structure as the main conveying line 101 and the conveying speed is synchronized with the qualified product outflow line 103 (error ≤0.05m / s), which is used to receive the target material conveyed from the qualified product outflow line 103 and provide a grabbing station for the vacuum grabbing unit 5.

[0037] Below the beam of the gantry 401 (directly above the transition conveying line 402), the integrated dust and static electricity removal device 403 is fixed through a support. The device includes a high-voltage ion fan (ion balance ±5V, air volume 10-20m³ / h) and a negative pressure dust removal nozzle (negative pressure value -0.05MPa, suction port diameter 50mm). The air outlets / suction ports of the two are directly opposite the conveying surface of the transition conveying line 402 (100-150mm away from the conveying surface). When the target material enters the transition conveying line 402, the integrated dust and static electricity removal device 403 is started synchronously: the negative pressure dust removal nozzle first removes the dust particles on the surface of the target material (particle size >1μm, removal rate ≥95%), and then the high-voltage ion fan neutralizes the static charge on the surface of the target material (static voltage drops to ≤±100V), avoiding the influence of dust adsorption and static electricity on subsequent vacuum adsorption.

[0038] On the beam of the gantry 401, an X-axis linear module 404 is fixed along the length direction. The module selects a THK SSR25XW type servo motor driven precision linear guide rail, with a guide rail length of 4.8m, a positioning accuracy of ±0.01mm, a repeat positioning accuracy of ±0.005mm, and a maximum running speed of 1m / s, which can meet the high-frequency target material transfer requirements. The X-axis linear module 404 is slidingly connected with an X-axis sliding seat 405 (made of aluminum alloy, weight ≤5kg). The bottom of the X-axis sliding seat 405 is fixedly connected with the cylinder body of a Z-axis lifting cylinder 406 (an electric cylinder, which selects a TOYO electric cylinder TC73 (stroke 200mm, positioning accuracy ±0.01mm), stroke 200mm, positioning accuracy ±0.01mm, maximum load 50kg) through bolts, realizing the movement of the vacuum grabbing unit 5 in the X-axis (horizontal direction) and the Z-axis (vertical direction).

[0039] To ensure the lifting accuracy and safety of the Z-axis lifting cylinder 406, a limiting frame 407 (welded with rectangular steel pipes, with a size of 300 mm x 300 mm x 250 mm) is fixed below the cross beam of the gantry 401 through a support, and the Z-axis lifting cylinder 406 is arranged inside the limiting frame 407. At the four top corners of the limiting frame 407, photoelectric sensors 408 (the photoelectric sensor is selected as Omron E3Z-LS63 (detection distance 50 mm, response time 0.05 ms)) are respectively installed, among which two sensors are used to detect the "upper limit position" of the Z-axis lifting cylinder 406 (corresponding to the standby height of the vacuum grabbing unit 5), and the other two are used to detect the "lower limit position" (corresponding to the grabbing height of the vacuum grabbing unit 5). When the Z-axis lifting cylinder 406 moves to the limiting position, the photoelectric sensor 408 sends a signal to the controller to control the Z-axis lifting cylinder 406 to stop moving to avoid damage caused by overtravel.

[0040] The vacuum grabbing unit 5 is the core module for realizing non-damage grabbing of the target material. Through the multi-circuit independent control of the vacuum chuck, the self-adaptive vacuum degree adjustment and the air leakage compensation mechanism, the problems of "excessive deformation and insufficient force" in conventional vacuum adsorption are solved. The specific implementation is as follows: The main body of the vacuum grabbing unit 5 is a bearing plate 501 (made of aviation aluminum alloy, with a size of 500 mm x 500 mm x 10 mm and a weight of ≤3 kg). The bottom of the bearing plate 501 is fixed and supported by six evenly distributed supports 502 (height 50 mm) and six support seats 503 (in regular hexagonal distribution to ensure uniform stress).

[0041] All the vacuum chucks 504 are connected in parallel through pneumatic pipelines 505 (made of PU pipes with an inner diameter of 8 mm) to form four independent air flow circuits (each circuit includes three chucks arranged in a triangular shape). Each air flow circuit is connected in series with a throttle valve 506 (adjustment range 0-10 L / min) and a vacuum gauge 507 (measurement range 0-1000 Pa, accuracy ±1 Pa). On the top of the bearing plate 501, a vacuum gauge 508 (digital display, sampling frequency 10 Hz) is fixedly installed. The vacuum gauge 508 is electrically connected to all the vacuum gauges 507 through signal lines, and real-time vacuum degree data of each circuit are collected and transmitted to the PLC controller.

[0042] In the top center of the bearing plate 501, the piezoelectric ceramic micro displacement table 509 (piezoelectric ceramic micro displacement table selected Thorlabs MDT693A (stroke ± 5mm, resolution 0.1μm)) is fixed by bolts, the top of the piezoelectric ceramic micro displacement table 509 is fixedly connected with the output end of the Z-axis lifting cylinder 406, and is used for compensating the flatness error of the target surface; in the bottom center of the bearing plate 501, a micro displacement sensor 510 (laser ranging type, measurement range 0-100mm, accuracy ± 0.01mm, sampling frequency 50Hz) is fixed, which is used for detecting the distance between the vacuum chuck 504 and the target surface.

[0043] The present application realizes the non-damage grabbing of the target material through the vacuum degree and displacement cooperative control of the three stages of "contact-adsorption-transportation", and the specific process is as follows: 1. Contact stage: low pressure pre-adsorption, avoid impact displacement When the transition conveying line 402 conveys the target material to the grabbing station (positioned by the photoelectric sensor), the PLC controller sends instructions, and the Z-axis lifting cylinder 406 drives the vacuum grabbing unit 5 to descend at a speed of 50mm / s; at the same time, the micro displacement sensor 510 detects the distance between the vacuum chuck 504 and the target surface in real time.

[0044] When the distance is detected to be less than 1mm, the Z-axis lifting cylinder 406 immediately slows down to a low-speed descending mode of 5mm / s, and the PLC controller triggers the vacuum system to start the "low pressure pre-adsorption" mode - by adjusting the air inlet pressure of the vacuum generator, the initial vacuum degree of each airflow circuit is stabilized at 500-800Pa. The low pressure pre-adsorption design in this stage can not only ensure that a slight adsorption force (about 5-8N) is generated when the vacuum chuck 504 is initially attached to the target surface, so as to avoid displacement of the target material on the conveying surface due to the inertia of the Z-axis lifting cylinder 406, but also can fill the slight concave (depth ≤0.1mm) on the target surface through the slight deformation of the chuck, and lay a foundation for subsequent stable adsorption. Among them, the vacuum generator selects SMCZL112 (maximum vacuum degree -98kPa, air extraction amount 12L / min), and the electromagnetic proportional valve selects Festo MPYE-5-1 / 8-LF-010-B (adjustment accuracy ±0.5kPa); When the vacuum chuck 504 is completely attached to the target surface (the micro displacement sensor 510 detects that the distance is 0 and lasts for 100ms), the contact stage ends and automatically enters the adsorption stage. 2. Adsorption stage: material self-adaptive pressure regulation + flatness error compensation Firstly, the machine vision detection system 104 transmits the pre-identified target material information (aluminum target or copper target) to the PLC controller, and the controller calls the preset vacuum degree parameters according to the density difference of the material: for the aluminum target (density 2.7 g / cm³, taking a target material with a diameter of 500 mm and a thickness of 10 mm as an example, the weight is about 5.3 kg), the pressure regulating module increases the vacuum generator's pumping capacity to increase the vacuum degree of each air flow circuit to 200-300 Pa, at this time the adsorption force generated by a single vacuum chuck 504 is about 15-20 N, and the total adsorption force of twelve chucks reaches 180-240 N, which is 34-45 times the weight of the target material, ensuring stable adsorption and preventing the target material from deforming due to excessive force (the yield strength of the aluminum target is about 275 MPa, and the stress generated under this adsorption force is ≤5 MPa, which is much lower than the yield strength); For the copper target (density 8.9 g / cm³, weight about 17.5 kg under the same size), the vacuum degree is further increased to 100-200 Pa, the adsorption force of a single chuck is increased to 25-35 N, and the total adsorption force reaches 300-420 N, which is 17-24 times the weight of the target material, taking into account the adsorption stability and the anti-deformation requirement of the copper target (the yield strength of the copper target is about 220 MPa, corresponding to a stress ≤8 MPa). During the vacuum degree adjustment process, the piezoelectric ceramic micro displacement table 509 simultaneously starts the flatness error compensation function: the micro displacement sensor 510 collects the distance data of each point on the target material surface at a frequency of 50 Hz (the micro displacement sensor is Keyence IL-600 (measurement range 0-100 mm, accuracy ±0.01 mm)), and calculates the flatness error of the target material surface through data fitting (for example, a certain point is micro convex 0.3 mm, and a certain point is micro concave 0.2 mm). The PLC controller sends adjustment instructions to the piezoelectric ceramic micro displacement table 509 according to the error data, and drives the bearing plate 501 to produce a micro displacement within ±0.5 mm range through the inverse piezoelectric effect of the piezoelectric ceramic (adjustment accuracy ±0.1 μm) - for the micro convex place, the piezoelectric ceramic units in the corresponding area contract, causing the vacuum chuck 504 in that area to be adjusted and raised by 0.3 mm; for the micro concave place, the piezoelectric ceramic units in the corresponding area elongate, causing the chuck to be adjusted and lowered by 0.2 mm, finally ensuring that the twelve vacuum chucks 504 can be uniformly attached to the target material surface, avoiding excessive or insufficient local stress. When the vacuum gauge 507 (vacuum gauge selected Edwards APG100 (measurement range 0-1000 Pa, accuracy ±1 Pa)) detects that the vacuum degree of each circuit is stable in the target range (fluctuation ≤5 Pa) and lasts for 200 ms, and the micro displacement sensor 510 feedbacks that the flatness error is ≤0.05 mm, the adsorption stage is completed, and the transfer stage is entered. 3. Transfer stage: real-time compensation for air leakage + safety locking When the transfer stage starts, the Z-axis lifting cylinder 406 first drives the vacuum grabbing unit 5 to lift the target material to a safe height (100 mm away from the conveying surface 100 of the transition conveying line 402), and then the X-axis linear module 404 drives the X-axis sliding seat 405 to move horizontally at a speed of 100 mm / s, moving the target material to the target work station (such as a subsequent processing table or a storage rack). During the transfer process, the vacuum gauge 507 continuously monitors the vacuum degree of each air flow circuit (sampling frequency 10 Hz). If a certain circuit leaks due to chuck wear, surface impurities, or other reasons, causing the vacuum degree to drop by >50 Pa (such as from 250 Pa to 190 Pa), the PLC controller immediately triggers the air leakage compensation mechanism: Close the electromagnetic proportional valve of the leakage circuit (cut off the connection between the circuit and the vacuum generator to avoid the influence of air leakage on other circuits); Calculate the missing adsorption force of the circuit (such as the original adsorption force of 20 N, which drops to 12 N after air leakage, missing 8 N), and send a vacuum degree improvement instruction to the two adjacent circuits of the circuit according to the "adjacent circuit sharing" principle, increase the air flow of the adjacent circuits, and increase the vacuum degree of each adjacent circuit by ≤30% (such as from 250 Pa to 325 Pa, corresponding to an increase in adsorption force from 20 N to 26 N) on the basis of the original. Each adjacent circuit provides an additional 6 N of adsorption force, and two circuits provide an additional 12 N, which not only makes up for the missing 8 N, but also leaves 4 N of safety redundancy, ensuring that the total adsorption force remains unchanged (the original total adsorption force is 240 N, and after compensation, it remains 240 N).

[0045] The entire compensation process has a response time of <100 ms, which is much faster than the possible drop time of the target material due to insufficient adsorption force (about 500 ms), effectively preventing the target material from falling off. The target material falling rate of a conventional vacuum adsorption design is about 2%, while the falling rate of the present design can be reduced to below 0.05% through the air leakage compensation mechanism. When the target material is transferred to above the target work station, the X-axis linear module 404 stops moving, the Z-axis lifting cylinder 406 drives the target material to drop to 10 mm away from the surface of the target work station, and then the vacuum system stops working, the vacuum degree of each circuit drops to atmospheric pressure, and the vacuum chuck 504 separates from the target material. The Z-axis lifting cylinder 406 rises to reset to standby height, and the X-axis sliding seat 405 returns to the initial grabbing position, completing a complete grabbing and transfer cycle.

[0046] In addition, in order to ensure the safety during the transfer process, the device is also provided with double safety locking function: one is when the X-axis sliding seat 405 moves to the limit position at both ends of the gantry 401, the photoelectric sensor 408 on the limiting frame 407 triggers the emergency stop signal, and the X-axis linear module 404 is immediately powered off and stopped; the second is if the vacuum gauge 508 detects that the vacuum degree of any loop decreases below the safety threshold (such as 150 Pa for aluminum target and 80 Pa for copper target), even if the air leakage compensation is not triggered, an emergency stop command will be sent immediately, the Z-axis lifting cylinder 406 stops moving and keeps the current height, and the alarm device starts (audible and visual alarm), and restarts after the operator checks the fault.

[0047] Working principle: Before using the one-piece circular target material grabbing and transferring device, the overall situation of the device needs to be checked to determine whether it can work normally. According to the detection result, the target material is transferred to the corresponding line. Figure 1 Figure 10 As shown in the figure, the target material conveying and detection: the circular target material body 3 first enters the main conveying line 101 of the sorting and correction unit 1, and is transmitted forward along the conveying line; in the transmission process, the machine vision detection system 104 located above the main conveying line 101 detects the appearance, size accuracy and other parameters of the circular target material body 3 comprehensively, and transmits the detection result to the PLC controller in real time to judge whether the target material is qualified.

[0048] If the detection result is unqualified, the PLC controller drives the telescopic cylinder 106 on one side of the main conveying line 101 to act, the telescopic cylinder 106 drives the connecting rod body 107 rotatingly connected with the output end of the telescopic cylinder 106 to move (one end of the connecting rod body 107 is rotatingly connected with the mounting plate 105 fixed on the side of the main conveying line 101, and the other end is slidingly connected with the mounting plate 105), and then drives the shifting element at the bottom of the connecting rod body 107 to move, guiding the unqualified circular target material body 3 to the unqualified product discharge line 102 arranged at the discharge end of the main conveying line 101, and completing the diversion of unqualified target material.

[0049] If the detection result is qualified, the telescopic cylinder 106 does not act, and the circular target material body 3 directly enters the qualified product flow-out line 103 along the main conveying line 101.

[0050] Target positioning correction and locking: on both sides of the unqualified product discharge line 102 and the qualified product flow-out line 103, the mounting arms 108 are symmetrically fixed, and the target positioning correction frame 109 on the mounting arm 108 and the end of the shifting element are both provided with a positioning and locking unit 2 to position and correct the circular target material body 3 in transmission: The guide rollers 203 of the positioning and locking unit 2 are in contact with the outer periphery of the circular target material body 3, and their positions are adjusted during the transmission of the target material to ensure that the center of the target material is aligned with the center line of the conveying line.

[0051] ​Guide roller replacement operation: when the guide roller 203 needs to be replaced, the operator slides the sleeve 208 fixed with one end of the locking pin 207 upwards (the inner wall is slidingly connected with the outer wall of the fixed support 201), drives the locking pin 207 to move upwards along the pin shaft sliding groove 206 and compresses the return spring 209, so that the locking pin 207 moves out of the locking groove 210, and the self-locking of the sliding sleeve 202 is released; then the sliding sleeve 202 is rotated downwards, the limiting block 205 is slid along the L-shaped guide groove 204 to the slot position, and the sliding sleeve 202 can be taken out from the fixed support 201, and the replacement of the guide roller 203 is completed.

[0052] Qualified target material transition conveying and pretreatment: the qualified circular target material body 3 discharged from the qualified product outflow line 103 enters the transition conveying line 402 (located below the gantry 401) of the gantry transfer unit 4; at the same time, the integrated dust removal and static electricity removal device 403 fixed on the gantry 401 is started, the air outlet of which is opposite to the transition conveying line 402, and the surface of the circular target material body 3 is subjected to dust removal and static electricity removal treatment, so as to avoid the influence of dust adsorption or static electricity on subsequent grabbing and transferring.

[0053] Vacuum grabbing unit positioning adjustment: the PLC controller drives the X-axis linear module 404 on the gantry 401 to move, drives the X-axis sliding seat 405 slidingly connected thereto to move in the X-axis direction, and drives the Z-axis lifting cylinder 406 fixed with the X-axis sliding seat 405 to move synchronously with the X-axis sliding seat 405, until the vacuum grabbing unit 5 connected below the Z-axis lifting cylinder 406 moves to the position directly above the circular target material body 3 on the transition conveying line 402; in this process, the photoelectric sensor 408 at the top corner of the limiting frame 407 (the Z-axis lifting cylinder 406 is arranged in the frame) fixed on the gantry 401 detects the position of the Z-axis lifting cylinder 406 in real time, so as to ensure the movement precision of the X-axis sliding seat 405 and avoid collision between the Z-axis lifting cylinder 406 and other components.

[0054] Vacuum adsorption grabbing (three-stage control): at least six support seats 503 are fixed on the bottom of the bearing plate 501 of the vacuum grabbing unit 5 through the support 502, and vacuum suction cups 504 are arranged at both ends of each support seat 503. All the vacuum suction cups 504 are connected in parallel into four independent air flow circuits through the pneumatic pipeline 505, each circuit is provided with a throttle valve 506 (adjusting air flow) and a vacuum gauge 507 (monitoring the vacuum degree of the circuit), the vacuum gauge 508 on the bearing plate 501 is electrically connected with all the vacuum gauges 507, and the vacuum degrees of the circuits are displayed in real time; the adsorption process is precisely controlled in three stages, and the problems of "excessive deformation due to excessive force and falling off due to insufficient force" in conventional vacuum adsorption are solved. Contact stage: the PLC controller drives the Z-axis lifting cylinder 406 to descend, driving the vacuum grabbing unit 5 to descend as a whole; at the same time, the micro displacement sensor 510 at the bottom center of the bearing plate 501 detects the distance between the vacuum suction cup 504 and the circular target material body 3 in real time, and when the distance is detected to be less than 1 mm, the micro displacement sensor 510 transmits a signal to the PLC controller, and the controller immediately controls the vacuum system to start the "low pressure pre-adsorption" mode, so that the vacuum degree of each gas flow circuit is maintained at 500-800 Pa, and the vacuum suction cup 504 is in stable contact with the target material surface through the low pressure adsorption force, avoiding the displacement of the circular target material body 3 caused by the impact of the vacuum suction cup 504 descending.

[0055] Adsorption stage: the vacuum gauge 507 monitors the vacuum degree of each gas flow circuit in real time, and after detecting that the vacuum degree is stable (the fluctuation range is less than or equal to 10 Pa), a signal is fed back to the PLC controller; the controller drives the pressure adjusting module to automatically match the adsorption force according to the material (such as aluminum target, copper target) of the circular target material body 3 pre-identified by the machine vision detection system 104: for the aluminum target with a density of 2.7 g / cm³, the vacuum degree of each circuit is adjusted to 200-300 Pa; for the copper target with a density of 8.9 g / cm³, the vacuum degree of each circuit is adjusted to 100-200 Pa, so as to ensure that the adsorption force matches the weight of the target material; at the same time, the piezoelectric ceramic micro displacement table 509 (the top is fixed with the output end of the Z-axis lifting cylinder 406) at the top center of the bearing plate 501 adjusts the height of the bearing plate 501 in real time (the compensation range is ±0.5 mm) according to the surface flatness data of the target material fed back by the micro displacement sensor 510, for example, when a certain area of the target material is detected to be slightly convex, the piezoelectric ceramic micro displacement table 509 drives the corresponding support seat 503 to adjust the height (such as 0.3 mm) of the area, so as to ensure that all vacuum suction cups 504 are uniformly stressed, avoiding the deformation of the target material caused by excessive local adsorption force.

[0056] Transfer stage: after the Z-axis lifting cylinder 406 drives the vacuum grabbing unit 5 with the circular target material body 3 adsorbed to rise to a safe height, the X-axis linear module 404 drives the X-axis sliding seat 405 to move, so as to transfer the target material to the target position; during the transfer process, the vacuum gauge 507 continuously monitors the vacuum degree of each gas flow circuit, and if the vacuum degree of a certain circuit decreases by more than 50 Pa (such as air leakage of the vacuum suction cup 504), the vacuum gauge 508 immediately transmits an abnormal signal to the PLC controller, the controller quickly closes the electromagnetic proportional valve of the leakage circuit, and at the same time increases the vacuum degree of the adjacent circuit, so as to ensure that the total adsorption force does not change, effectively avoiding the target material from falling off; during the transfer process, the photoelectric sensor 408 continuously monitors the height position of the Z-axis lifting cylinder 406, preventing the Z-axis lifting cylinder 406 from abnormally descending and causing the target material to collide.

[0057] Target material releasing and resetting: after the vacuum grabbing unit 5 carrying the circular target material body 3 moves above the target position, the Z-axis lifting cylinder 406 drives the vacuum grabbing unit 5 to descend to a predetermined releasing height, the PLC controller controls the vacuum system to stop working, the vacuum degree of each airflow circuit is reduced to normal pressure, and the vacuum suction cup 504 releases the target material; then, the Z-axis lifting cylinder 406 is lifted and reset, the X-axis linear module 404 drives the X-axis sliding seat 405 to drive the vacuum grabbing unit 5 to return above the transition conveying line 402, and the next grabbing operation is prepared.

[0058] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can make modifications to the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to part of the technical features, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An integrated round target material gripping and transferring device comprising a sorting and correcting unit (1), characterized in that: The sorting and correcting unit (1) comprises a main conveying line (101), the discharge end of the main conveying line (101) is provided with a substandard product discharge line (102) and a qualified product flow line (103) side by side, a machine vision detection system (104) for detecting a circular target material body (3) is arranged above the main conveying line (101), one side of the main conveying line (101) is provided with a connecting rod mechanism driven by a telescopic air cylinder (106), and a poking piece for guiding the circular target material body (3) to the substandard product discharge line (102) or the qualified product flow line (103) is connected to the connecting rod mechanism; A gantry type transfer unit (4) is arranged at the discharge end of the qualified product flow line (103), the gantry type transfer unit (4) comprises a gantry (401) and a transition conveying line (402) arranged below the gantry (401), a vacuum grabbing unit (5) driven by an X-axis linear module (404) and a Z-axis lifting cylinder (406) is arranged on the gantry (401), the vacuum grabbing unit (5) comprises a bearing plate (501) and a plurality of vacuum suction cups (504) arranged below the bearing plate (501), the vacuum suction cups (504) are connected in parallel through pneumatic pipelines (505) to form a plurality of independently controlled air flow circuits, and a vacuum monitoring assembly for monitoring vacuum degree is arranged on each air flow circuit.

2. The one-piece, circular target pickup and transfer device of claim 1, wherein: The connecting rod mechanism comprises a mounting plate (105) fixed to one side of the main conveying line (101), the telescopic air cylinder (106) is fixed to the mounting plate (105), the output end of the telescopic air cylinder (106) is rotationally connected to the middle part of a connecting rod body (107), one end of the connecting rod body (107) is rotationally connected to the mounting plate (105), the other end of the connecting rod body (107) is slidingly connected to the mounting plate (105), and the poking piece is arranged at the bottom of the connecting rod body (107).

3. The one-piece, circular target pickup and transfer device of claim 2, wherein: Symmetrical mounting arms (108) are arranged on both sides of the substandard product discharge line (102) and the qualified product flow line (103), a target material positioning and correcting frame (109) is fixed to the mounting arms (108), and the end portions of the poking piece and the target material positioning and correcting frame (109) are provided with positioning and locking units (2) matched with the outer periphery of the circular target material body (3).

4. The one-piece, circular target pickup and transfer device of claim 3, wherein: The positioning and locking unit (2) comprises a fixed support (201) fixedly connected to the poking piece or the target material positioning and correcting frame (109), a sliding sleeve (202) that can slide up and down relative to the fixed support (201) is arranged in the fixed support (201), a guide roller (203) matched with the outer periphery of the circular target material body (3) is rotationally connected to the bottom end of the sliding sleeve (202), and a self-locking structure is arranged between the sliding sleeve (202) and the fixed support (201), when the sliding sleeve (202) is pressed to slide up to a predetermined position, the self-locking structure acts and locks the sliding sleeve (202).

5. The one-piece, circular target pickup and transfer device of claim 4, wherein: The self-locking structure comprises an L-shaped guide groove (204) and a locking groove (210) formed at the top end of the sliding sleeve (202), the L-shaped guide groove (204) is slidably connected with a limiting stop block (205) fixed with the fixed support (201); one side of the fixed support (201) is provided with a pin shaft sliding groove (206), and the locking pin (207) is slidably connected in the pin shaft sliding groove (206), one end of the locking pin (207) is fixedly connected with a sliding sleeve (208), the inner wall of the sliding sleeve (208) is slidably connected with the outer wall of the fixed support (201), the outer side of the end of the locking pin (207) away from the sliding sleeve (208) is connected with a return spring (209), and the top end of the return spring (209) is fixedly connected with the fixed support (201); when the sliding sleeve (202) slides and rotates, the locking pin (207) is clamped into the locking groove (210) under the action of the return spring (209), and self-locking is realized.

6. The one-piece, circular target pickup and transfer device of claim 1, wherein: The X-axis linear module (404) is slidably connected with an X-axis sliding seat (405), and the X-axis sliding seat (405) is fixedly connected with a Z-axis lifting cylinder (406); the gantry (401) is further fixedly connected with a limiting frame (407), the Z-axis lifting cylinder (406) is arranged in the limiting frame (407), and the limiting frame (407) is provided with an optical sensor (408) for detecting the position of the Z-axis lifting cylinder (406) at the top corner.

7. The one-piece, circular target pickup and transfer device of claim 1, wherein: The gantry (401) is further fixedly connected with an integrated dust removal and static electricity removal device (403), and the air outlet of the integrated dust removal and static electricity removal device (403) is arranged opposite to the transition conveying line (402).

8. The one-piece, circular target pickup and transfer device of claim 1, wherein: The vacuum monitoring assembly comprises a vacuum gauge (507) arranged on each air flow circuit and a vacuum gauge (508) arranged on the bearing plate (501) and electrically connected with all the vacuum gauges (507); each air flow circuit is further provided with a throttle valve (506) for adjusting the flow.

9. The one-piece, circular target pickup and transfer device of claim 8, wherein: The bottom of the bearing plate (501) is fixedly connected with at least six supporting seats (503) through a support (502), both ends of each supporting seat (503) are provided with the vacuum suction cups (504), and the pneumatic pipeline (505) connects all the vacuum suction cups (504) in parallel into four independent air flow circuits.

10. The one-piece, circular target pickup and transfer device of claim 1, wherein: The top center of the bearing plate (501) is provided with a piezoelectric ceramic micro displacement table (509), and the top of the piezoelectric ceramic micro displacement table (509) is fixedly connected with the output end of the Z-axis lifting cylinder (406); and the bottom center of the bearing plate (501) is provided with a micro displacement sensor (510).

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