X-Cube and micro display screen alignment MTF detection method

Abstract

The invention discloses an X-Cube and micro display screen alignment MTF detection system and method. The detection system comprises a feeding carrying table, a camera laser detection module, a carrying device, an alignment device and an MTF detection device. The loading platform deck is used for placing an X-Cube to be detected; the camera laser detection module is used for obtaining the posture of X-Cube and comprises a supporting base, a first camera laser assembly obliquely arranged on the supporting base and a second camera laser assembly vertically arranged on the supporting base. The carrying device respectively moves the X-Cube to the first camera laser assembly and the second camera laser assembly for detection; the alignment device is used for installing the micro display screen and adjusting the distance between the micro display screen and the opposite binding surface; the MTF detection device carries out MTF image quality detection on X-Cube imaging of the micro display screen, through mutual cooperation of all the devices, lenses are screened before attachment, and the yield of subsequent products is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of micro display panels, and particularly relates to an X-Cube and micro display screen alignment MTF detection system and method. BACKGROUND

[0002] At present, micro display panels have been widely applied to various scenes in people's life and have become an indispensable part of people's life. They are widely applied to AR / VR devices, smart glasses, medical endoscopes and other micro optical systems, and the light combining prism + projection lens is an indispensable part. The three-color light combining MTF detection of the light combining prism and the projection lens combination is a key link to ensure the final image quality of the color imaging system. The white light and monochromatic light MTF must be measured at the same time to comprehensively evaluate the resolution limit, color difference level and performance of the light combining device. At present, with the rise of the micro optical industry such as AR / VR devices, smart glasses, medical endoscopes and other micro optical industries in the market, the types of micro displays (MicroLED) are more and more, and the use demand of matching micro displays (MicroLED) light combining prisms and projection lenses is also more and more, and the performance test demand of the light combining prism and the projection lens combination is increasingly urgent. SUMMARY

[0003] The purpose of the application is to overcome the shortcomings of the prior art and provide an X-Cube and micro display screen alignment MTF detection system and method.

[0004] The application adopts the following technical scheme: An X-Cube and micro display screen alignment MTF detection system, the X-Cube includes a three-dimensional light combining prism, a mounting seat arranged on the top surface of the three-dimensional light combining prism, a lens arranged in the mounting seat, three fitting surfaces arranged on the opposite two side surfaces and the bottom surface of the three-dimensional light combining prism for fitting the micro display screen, and an inclined downward positioning surface arranged on the upper end of the mounting seat, three adjacent inner corners of the positioning surface are respectively provided with first positioning points, and three second positioning points are circumferentially distributed on the outer peripheral surface of the lens; the system includes a feeding platform, a camera laser detection module, a carrying device, an alignment device and an MTF detection device. The feeding platform is used for placing the X-Cube to be detected. The camera laser detection module is used for acquiring the posture of the X-Cube and includes a support seat, a first camera laser assembly arranged obliquely on the support seat and a second camera laser assembly arranged vertically on the support seat, the first camera laser assembly is arranged vertically to the positioning surface, the first camera laser assembly detects the three first positioning points on the positioning surface to perform leveling in the Tx axis and Ty axis directions, and the second camera laser assembly detects the X-Cube to perform leveling in the R axis, Tx axis, Ty axis, X axis and Y axis directions and confirm the offset in the height direction. The carrying device comprises a six-axis moving platform and a clamping jaw arranged on the six-axis moving platform for clamping the X-Cube, the clamping jaw moves the X-Cube to the first camera laser assembly and the second camera laser assembly respectively for detection under the driving of the six-axis moving platform, and the six-axis moving platform adjusts the orientation of the X-Cube according to the signal fed back by the first camera laser assembly or the second camera laser assembly to reach a preset position. The alignment device is used for installing the micro display screen and adjusting the distance between the micro display screen and the opposite fitting surface, and comprises two first alignment mechanisms respectively opposite to two fitting surfaces on the side and a second alignment mechanism arranged between the two first alignment mechanisms and opposite to the fitting surface on the bottom. The MTF detection device is used for performing MTF image quality detection on the imaging of the micro display screen by the X-Cube, and comprises a detection seat and an imaging colorimeter arranged on the detection seat and above the second alignment mechanism.

[0005] Preferably, the first camera laser assembly comprises a first detection camera obliquely arranged on a support seat and a first laser height gauge arranged on the support seat and parallel to the first detection camera, the first detection camera takes a photo of three first positioning points of the X-Cube, the six-axis moving platform guides the clamping jaw to move the X-Cube to the measurement position of the first laser height gauge according to the signal fed back by the first detection camera, the height of the three first positioning points of the positioning surface is measured by the first laser height gauge, and the six-axis moving platform adjusts the Tx-axis and Ty-axis directions of the three-dimensional light combining prism according to the signal fed back by the first laser height gauge.

[0006] Preferably, the second camera laser assembly comprises a second detection camera vertically arranged on a support seat and a second laser height gauge arranged on the support seat and parallel to one side of the second detection camera, the second detection camera detects the X-Cube to confirm whether the R-axis direction of the X-Cube is deviated, if the R-axis direction is deviated, the second detection camera repeatedly detects, the six-axis moving platform adjusts the R-axis and the Tx-axis and Ty-axis directions according to the signal fed back by the second detection camera, until the Tx-axis, Ty-axis and R-axis directions are adjusted, and then the X-axis and Y-axis directions are adjusted; if the R-axis direction is not deviated, the clamping jaw moves the X-Cube to the measurement position of the second laser height gauge, the height of three second positioning points is measured by the second laser height gauge, and the six-axis moving platform adjusts the height of the second positioning points according to the signal fed back by the second laser height gauge.

[0007] Preferably, the first detection camera comprises a first camera, a first lens and a first light source arranged in sequence from top to bottom.

[0008] Preferably, the first alignment mechanism comprises a first six-axis alignment platform, a first vacuum stage arranged on the first six-axis alignment platform for mounting the micro display screen, and a first alignment laser height gauge arranged on the first six-axis alignment platform, the first alignment laser height gauge measuring the distance of the micro display screen on the other first alignment mechanism.

[0009] Preferably, the second alignment mechanism comprises a second six-axis alignment platform located between the two first six-axis alignment platforms, and a second vacuum stage arranged on the second six-axis alignment platform for mounting the micro display screen, the micro display screen on the second vacuum stage being a G monochrome micro display screen, and the micro display screens on the two first vacuum stages being R monochrome micro display screens and B monochrome micro display screens respectively.

[0010] Preferably, the MTF detection device comprises a second alignment laser height gauge arranged vertically on the detection seat opposite the second vacuum stage, the second alignment laser height gauge measuring the distance of the micro display screen on the second vacuum stage.

[0011] An X-Cube and micro display screen alignment MTF detection method, based on any one of the above detection systems, specifically comprising the following steps: Step 1: The clamping jaw cooperates with the six-axis moving platform to move the X-Cube on the feeding stage to the measurement position of the second camera laser assembly for detection, and the six-axis moving platform adjusts the R-axis direction according to the feedback signal of the second camera laser assembly; the clamping jaw clamps the X-Cube to move to the measurement position of the first camera laser assembly for detection, and the first camera laser assembly detects the heights of the three first positioning points on the positioning surface to adjust the Tx-axis and Ty-axis directions; the clamping jaw clamps the X-Cube to continue moving to the second camera laser assembly for detection to adjust the R-axis, Tx-axis, Ty-axis, X-axis, and Y-axis directions and confirm the height direction offset, and complete the attitude adjustment of the X-Cube. Step 2: Three micro display screens of different colors are fixed on the two first alignment mechanisms and the second alignment mechanism respectively, and the three micro display screens of different colors are connected with the controller through the wire, wherein the R monochrome micro display screen and the B monochrome micro display screen are fixed on the two first alignment mechanisms respectively, and the G monochrome micro display screen is fixed on the second alignment mechanism. Step 3: The six-axis moving platform controls the clamping jaw to move the X-Cube with adjusted attitude to the detection position below the imaging colorimeter, and then adjusts the distance between the two micro display screens of the two first alignment mechanisms and the relative lamination surface for MTF value test; then adjusts the distance between the micro display screen on the second alignment mechanism and the relative lamination surface for MTF value test, and obtains the defocus curves of the R monochrome micro display screen, the B monochrome micro display screen, and the G monochrome micro display screen respectively by using the experimental data fitting method according to the obtained data.

[0012] From the above description of the present application, compared with the prior art, the beneficial effects of the present application are: the camera laser detection module adjusts the attitude of the X-Cube, cooperates with the subsequent alignment device and MTF detection device to obtain the MTF value of the three-color micro display screen, and then obtains the defocus curve. The three-color defocus curve obtained is used to judge whether the lens is qualified. The lens is screened before fitting, and the yield of subsequent products is improved. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 FIG. 1 is a structural schematic diagram of a detection system; Figure 2 FIG. 2 is a structural schematic diagram of an alignment device; Figure 3 FIG. 3 is a structural schematic diagram of a laser detection module; Figure 4 FIG. 4 is a structural schematic diagram of a conveying device; Figure 5 FIG. 5 is a structural schematic diagram of a first alignment platform; Figure 6 FIG. 6 is a structural schematic diagram of a second alignment platform; Figure 7 FIG. 7 is a structural schematic diagram of an MTF detection device; Figure 8 FIG. 8 is a structural schematic diagram of an X-Cube; Figure 9 FIG. 9 is a structural schematic diagram of a first calibration block; Figure 10 FIG. 10 is a structural schematic diagram of a second calibration block; In the figure, 1, loading platform; 2, camera laser detection module; 3, conveying device; 4, alignment device; 5, MTF detection device; 6, X-Cube; 7, first calibration block; 8, second calibration block; 11, product slot; 12, opposite radiation sensor; 21, support seat; 22, first camera laser assembly; 221, first detection camera; 222, first laser height gauge; 223, first camera; 224, first lens; 225, first light source; 23, second camera laser assembly; 231, second detection camera; 232, second laser height gauge; 233, second camera; 234, second lens; 235, second light source; 31, six-axis moving platform; 32, clamping jaw; 41, first alignment mechanism; 411, first six-axis alignment platform; 412, first vacuum platform; 413, first alignment laser height gauge; 42, second alignment mechanism; 421, second six-axis alignment platform; 422, second vacuum platform; 51, detection seat; 52, imaging colorimeter; 53, second alignment laser height gauge; 61, stereoscopic light combining prism; 62, mounting seat; 63, lens; 64, fitting surface; 65, positioning surface; 66, first positioning point; 67, second positioning point; 71, inclined surface; 72, first calibration hole; 81, second calibration hole. DETAILED DESCRIPTION

[0014] The application will be further described by the specific embodiments.

[0015] As Figures 1-10 shown, the application discloses an X-Cube and micro display screen alignment MTF detection system, which comprises a loading platform 1, a camera laser detection module 2, a conveying device 3, an alignment device 4 and an MTF detection device 5.

[0016] The X-Cube 6 comprises a stereoscopic light combining prism 61, a mounting seat 62 arranged on the top surface of the stereoscopic light combining prism 61, a lens 63 arranged in the mounting seat 62, and three fitting surfaces 64 arranged on the opposite two side surfaces and the bottom surface of the stereoscopic light combining prism 61 for fitting the micro display screen, wherein the upper end of the mounting seat 62 is provided with an inclined downward positioning surface 65, the three adjacent inner corners of the positioning surface 65 are respectively provided with first positioning points 66, and the outer circumferential surface of the lens 63 is circumferentially provided with three second positioning points 67; wherein the included angle between the positioning surface 65 and the horizontal plane is 13.5±0.5°.

[0017] The loading platform 1 is used for placing the X-Cube 6 to be detected, and the top of the loading platform 1 is provided with a plurality of product slots 11 for placing the X-Cube 6 and a plurality of opposite radiation sensors 12 for detecting whether the product slots 11 have the X-Cube 6.

[0018] The camera laser detection module 2 is used to obtain the posture of the X-Cube 6, and includes a support seat 21, a first camera laser assembly 22 obliquely arranged on the support seat 21, and a second camera laser assembly 23 vertically arranged on the support seat 21. The first camera laser assembly 22 can be arranged vertically with the positioning surface 65, that is, the included angle between the first camera laser assembly 22 and the vertical direction is the same as the included angle between the positioning surface 65 and the horizontal direction. The first camera laser assembly 22 detects the heights of the three first positioning points 66 on the positioning surface 65 to perform leveling in the Tx-axis and Ty-axis directions. The second camera laser assembly 23 detects the X-Cube 6 to perform leveling in the R-axis, Tx-axis, Ty-axis, X-axis and Y-axis directions and confirm the offset in the height direction.

[0019] The carrying device 3 includes a six-axis moving platform 31 and a clamping jaw 32 arranged on the six-axis moving platform 31 to clamp the X-Cube 6. The clamping jaw 32 moves the X-Cube 6 to the first camera laser assembly 22 and the second camera laser assembly 23 for detection under the driving of the six-axis moving platform 31. The six-axis moving platform 31 adjusts the position of the X-Cube 6 according to the signals fed back by the first camera laser assembly 22 or the second camera laser assembly 23 to reach a preset position. Specifically, the clamping jaw 32 can select a corresponding clamping jaw 32 according to the clamping requirements of the X-Cube 6.

[0020] The first camera laser assembly 22 includes a first detection camera 221 obliquely arranged on the support seat 21 and a first laser height gauge 222 arranged on the support seat 21 and parallel to the first detection camera 221. The first detection camera 221 takes pictures of the three first positioning points 66 of the X-Cube 6. The six-axis moving platform 31 guides the clamping jaw 32 to move the X-Cube 6 to the measurement position of the first laser height gauge 222 according to the signals fed back by the first detection camera 221. The first laser height gauge 222 measures the heights of the three first positioning points 66 on the positioning surface 65. The six-axis moving platform 31 levels the Tx-axis and Ty-axis directions of the solid light combiner 61 according to the signals fed back by the first laser height gauge 222. During this process, the controller fits the first positioning point information fed back by the first laser height gauge 222 into a plane, compares the obtained plane with a preset standard plane, obtains the offset in the Tx-axis and Ty-axis directions, and adjusts the posture of the X-Cube 6 according to the offset. Specifically, the first detection camera 221 includes a first camera 223, a first lens 224 and a first light source 225 connected and arranged in sequence from top to bottom. Further, the first lens 224 adopts a CCTV Lens, and the cooperation mode of the camera, the light source and the lens is a prior art, which will not be described further.

[0021] The second camera laser assembly 23 comprises a second detection camera 231 vertically arranged on the support base 21 and a second laser height gauge 232 arranged on the support base 21 in parallel on the side of the second detection camera 231, wherein the second detection camera 231 detects the X-Cube 6 to confirm whether the R-axis direction of the X-Cube 6 is deviated, if the R-axis direction is deviated, the second detection camera 231 repeatedly detects, the six-axis moving platform 31 adjusts the directions of the R-axis, the Tx-axis and the Ty-axis according to the feedback signal of the second detection camera 231, and then adjusts the directions of the X-axis and the Y-axis after the directions of the Tx-axis, the Ty-axis and the R-axis are adjusted; if the R-axis direction is not deviated, the clamping jaw 32 drives the X-Cube 6 to move to the measurement position of the second laser height gauge 232, the second laser height gauge 232 measures the heights of the three second positioning points 67, the six-axis moving platform 31 adjusts the heights of the second positioning points 67 according to the feedback signal of the second laser height gauge 232, in this process, the controller fits the information of the three second positioning points 67 fed back by the second laser height gauge 232 into a plane, compares the obtained plane with a preset standard plane, obtains the deviation of the Z-axis direction, and the six-axis moving platform 31 can adjust the posture of the X-Cube 6 according to the deviation; specifically, the second detection camera 231 comprises a second camera 233, a second lens 234 and a second light source 235 connected and arranged in sequence from top to bottom; further, the second lens 234 adopts a CCTV Lens, and the cooperation mode of the camera, the light source and the lens is a prior art, which will not be described further here The alignment device 4 is used for installing the micro display screen and adjusting the distance between the micro display screen and the relative adhering surface 64, and comprises two first alignment mechanisms 41 respectively opposite to two side adhering surfaces and a second alignment mechanism 42 arranged between the two first alignment mechanisms 41 and opposite to the bottom adhering surface.

[0022] The first alignment mechanism 41 comprises a first six-axis alignment platform 411, a first vacuum stage 412 arranged on the first six-axis alignment platform 411 and used for installing the micro display screen, and a first alignment laser height gauge 413 arranged on the first six-axis alignment platform 411, wherein the first alignment laser height gauge 413 measures the distance of the micro display screen on the other first alignment mechanism; specifically, the first alignment laser height gauge 413 is installed on the first six-axis alignment platform 411 through a corresponding processing piece, and the processing piece can be selected according to the installation requirement of the first alignment laser height gauge 413, which will not be described further here; since the micro display screen on the first alignment mechanism 41 needs to be placed on the corresponding first vacuum stage 412 obliquely, the vacuum adsorption of the first vacuum stage 412 needs to be opened first, and then the micro display screen is placed, the first vacuum stage 412 will clamp the edge according to the shape of the micro display screen to facilitate positioning, and since the micro display screen is only used for testing, it is not necessary to move after the material is well placed.

[0023] The second alignment mechanism 42 comprises a second six-axis alignment platform 421 between the two first six-axis alignment platforms 411 and a second vacuum stage 422 arranged on the second six-axis alignment platform 421 for mounting the micro display screen, wherein the micro display screen on the second vacuum stage 422 is a G monochrome micro display screen, and the micro display screens on the two first vacuum stages 412 are R monochrome micro display screens and B monochrome micro display screens respectively.

[0024] The MTF detection device 5 detects the MTF image quality of the imaging of the micro display screen through the X-Cube 6, and comprises a detection seat 51, an imaging colorimeter 52 arranged on the detection seat 51 and located above the second alignment mechanism 42, and a second alignment laser height gauge 53 vertically arranged on the detection seat 51 and opposite to the second vacuum stage 422, wherein the second alignment laser height gauge 53 measures the distance of the micro display screen on the second vacuum stage 422.

[0025] The six-axis moving platform 31, the first six-axis alignment platform 411 and the second six-axis alignment platform 421 defined in the present application can realize adjustment of the X axis, the Y axis, the Z axis, the R axis, the Tx axis and the Ty axis, and the six-axis platform is a conventional technology in the prior art, and the specific structure and working principle will not be described further.

[0026] An X-Cube and micro display screen alignment MTF detection method based on any one of the detection systems described above, specifically comprising the following steps: Step 1, adjustment of the posture of the X-Cube: A. The clamping jaw cooperates with the six-axis moving platform to move the X-Cube on the loading stage to the measurement position of the second camera laser assembly for detection, and the six-axis moving platform adjusts the R axis direction according to the feedback signal of the second detection camera, and then takes a picture again to confirm the adjustment of the R axis direction until the R axis direction is adjusted; B. The clamping jaw clamps the X-Cube to move to the detection position of the first detection camera for taking a picture, and the six-axis moving platform is guided by the image information fed back by the first detection camera to move the X-Cube to the first laser height gauge, and the first laser height gauge detects the heights of the three first positioning points on the positioning surface to adjust the Tx axis and the Ty axis, and then the six-axis moving platform moves the X-Cube to the first detection camera to take a picture, and the six-axis moving platform is guided again by the image information fed back to move the X-Cube to the measurement position of the first laser height gauge for measurement and leveling again until leveling is completed. C. The six-axis mobile platform drives the clamping jaw to move the X-Cube to the measurement position of the second detection camera. The second detection camera detects the X-Cube to confirm whether the R-axis direction of the X-Cube is offset. If the R-axis direction is offset, the second detection camera repeatedly detects, and the six-axis mobile platform adjusts the R-axis and the Tx-axis and Ty-axis directions according to the feedback signal of the second detection camera, until the Tx-axis, Ty-axis and R-axis directions are leveled, and then the X-axis and Y-axis directions are leveled. If the R-axis direction is not offset, the clamping jaw drives the X-Cube to move to the measurement position of the second laser height gauge. The second laser height gauge measures the height of the three second positioning points, and the six-axis mobile platform adjusts the height of the second positioning points according to the feedback signal of the second laser height gauge. The posture adjustment of the X-Cube is completed. Step 2, fix three different color micro-displays on two first vacuum stages and a second vacuum stage respectively, and connect the three different color micro-displays with the controller through the wire, wherein the R monochrome micro-display and the B monochrome micro-display are fixed on two first alignment mechanisms respectively, and the G monochrome micro-display is fixed on a second alignment mechanism. Step 3, the six-axis mobile platform controls the clamping jaw to move the X-Cube with adjusted posture to the detection position below the imaging colorimeter. Then, the two first six-axis alignment platforms respectively adjust the movement of the R monochrome micro-display and the B monochrome micro-display in the Y-axis direction relative to the first vacuum stage, to adjust the distance between the R monochrome micro-display, the B monochrome micro-display and the relative bonding surface for MTF value test. Then, the second six-axis alignment platform adjusts the movement of the G monochrome micro-display in the Z-axis direction relative to the second vacuum stage, to adjust the distance between the G monochrome micro-display and the relative bonding surface for MTF value test. According to the obtained data, the defocus curves of the R monochrome micro-display, the B monochrome micro-display and the G monochrome micro-display are respectively obtained by using experimental data fitting method. Whether the lens is qualified is judged by obtaining three defocus curves.

[0027] Before step 1, the first camera laser assembly 21, the second camera laser assembly 22, the first alignment mechanism 41, the second alignment mechanism 42 and the MTF detection device 5 need to be calibrated by a standard sample, and the standard sample is an X-Cube with standard parameters. The first calibration block 7 is block-shaped, and the top surface thereof is formed with an inclined surface 71 with the same inclination angle as the inclination angle of the positioning surface 65. The center of the inclined surface 71 is provided with a first calibration hole 72. The second calibration block 8 is block-shaped, and the top surface thereof is a plane, and the center thereof is provided with a second calibration hole 81.

[0028] When the relative position of the first detection camera and the first laser height gauge is calibrated, the first calibration block is fixed on the clamping jaw, moved to the first detection camera, and the inclined surface thereof is photographed to find the center position of the first calibration hole; then the first calibration block is moved to the measurement position of the first laser height gauge, the first laser height gauge is located at the edge position of the first calibration hole through the six-axis moving platform, and the three edge positions of the first calibration hole are recorded respectively, and the center coordinates of the first calibration hole are calculated after coordinate fitting; then the center position of the first calibration hole photographed by the first detection camera and the center coordinates fitted by the first laser height gauge are position calibrated to determine the positional relationship between the first detection camera and the first laser height gauge.

[0029] When the relative position of the second detection camera and the second laser height gauge is calibrated, the second calibration block is fixed on the clamping jaw, moved to the second detection camera, and the second calibration block is photographed to find the center position of the second calibration hole; then the standard sample is moved to the measurement position of the second laser height gauge, the second laser height gauge is located at the edge position of the second calibration hole through the six-axis moving platform, and the three edge positions of the second calibration hole are recorded respectively, and the center coordinates of the second calibration hole are calculated after coordinate fitting; then the center position of the second calibration hole photographed by the second detection camera and the center coordinates fitted by the second laser height gauge are position calibrated to determine the positional relationship between the second detection camera and the second laser height gauge.

[0030] When the position of the imaging colorimeter and the R axis and the X axis and the Y axis of the second detection camera are calibrated, the standard sample is fixed on the clamping jaw, the six-axis moving platform moves the standard sample to the imaging colorimeter, a relay lens is installed below the imaging colorimeter, two bright point features on the standard sample are photographed by the imaging colorimeter, the R axis offset angle information of the axis system at this time and the pixel coordinates of one of the bright points are calculated, the six-axis W axis of the standard sample is adjusted so that the R axis offset angle is 0°; the six-axis moving platform moves the standard sample to the second detection camera through the X and Y axis adjustment, the second detection camera photographs the bright point on the standard sample, the R axis offset angle of the standard sample at this time and the pixel coordinates of one of the bright points are calculated and recorded, and thus the R axis and the X axis and the Y axis between the imaging colorimeter and the second detection camera can be calibrated.

[0031] When calibrating the Tx axis and the Ty axis of the imaging colorimeter and the standard sample, a mirror is installed at the lens end of the imaging colorimeter, and first, the image coordinates of the crosshair received by the collimator are (0, 0) by adjusting the pitch and yaw knobs of the collimator with the imaging colorimeter as the reference. After the collimator is adjusted, the standard sample is moved to the opposite side of the imaging colorimeter with the collimator as the reference, so that the light beam of the collimator hits the mirror surface of the standard sample. The Tx axis and the Ty axis are adjusted by the six-axis moving platform, so that the image coordinates of the crosshair reflected by the profiled block mirror surface received by the collimator are (0, 0). Thus, the calibration of the Tx axis and the Ty axis between the imaging colorimeter and the standard sample is completed.

[0032] When calibrating the Tx axis and the Ty axis of the first laser height gauge and the standard sample, the standard sample is fixed on the clamping jaw, and the X axis and the Y axis of the six-axis moving platform are adjusted so that the standard sample is located at the center of the first detection camera. The first detection camera takes a photo of the standard sample. Then, according to the position relationship between the first detection camera and the first laser height gauge, the six-axis moving platform adjusts to move the standard sample to the center of the first laser height gauge. Then, according to the shooting of the first detection camera, the first detection camera and the first laser height gauge are guided to move, so that the first laser height gauge radiates to three first positioning points on the inclined surface of the standard sample and records the radiation height. Thus, the Tx axis and the Ty axis reference of the first laser height gauge and the standard sample are calibrated.

[0033] When calibrating the Z axis and the radiation Z axis reference of the imaging colorimeter and the standard sample, the standard sample is fixed on the clamping jaw, and the Z axis of the six-axis moving platform is adjusted so that the standard sample is close to the imaging colorimeter. Then, the Z axis is adjusted to move 2mm away from the imaging colorimeter. The X axis and the Y axis of the six-axis moving platform are adjusted to move the product to the second laser height gauge, so that the second laser height gauge radiates to three second positioning points on the standard sample, and the radiation value at this time is recorded. Thus, the calibration is completed.

[0034] When calibrating the X axis and the Y axis of the second detection camera and the standard product, the standard sample is fixed on the clamping jaw, and the X axis and the Y axis of the six-axis moving platform are adjusted to move the standard sample to the second detection camera. The standard sample is photographed by the second detection camera, and the contour center point is found by visual processing. The X axis and the Y axis of the six-axis moving platform are adjusted so that the contour center recognized by the second detection camera is the center of the field of view of the second detection camera. The position is recorded as the test working position of the calibrated standard sample.

[0035] When the alignment mechanism is calibrated, first, the two first six-axis alignment platforms and the second six-axis alignment platform are leveled by using a standard sample. The R, B and G single-color micro-displays are connected to the controller through the wire, and the R, B and G single-color micro-displays are lit by the controller. The R, B and G single-color micro-displays are refracted by the stereoscopic light combiner on the X-Cube and then projected by the micro-projector, and the image is captured by the imaging colorimeter. At this time, the offset of the R, B and G single-color micro-displays relative to the X-Cube is calculated by the preset program and fed back to the two first six-axis alignment platforms and the second six-axis alignment platform, and the two first six-axis alignment platforms and the second six-axis alignment platform adjust the X, Y, Z, R, Tx and Ty axes respectively. After leveling, the two first six-axis alignment platforms and the second six-axis alignment platform record the corresponding positions, and during actual detection, only the Z-axis sliding table of the second six-axis alignment platform and the Y-axis sliding table of the two first six-axis alignment platforms are moved to change the distance between the G, R and B single-color micro-displays and the relative fitting surface.

[0036] The application adjusts the posture of the X-Cube 6 by the camera laser detection module 2, cooperates with the subsequent alignment device 4 and MTF detection device 5 to obtain the MTF value of the three-color micro-display, and then obtains the defocus curve. The obtained three-color defocus curve is used to judge whether the lens 63 is qualified. The lens 63 is screened before fitting, and the yield of the subsequent products is improved.

[0037] The above is only a preferred embodiment of the application, and therefore cannot limit the scope of the application. Equivalent changes and modifications made according to the scope of the application and the content of the specification should still be within the scope of the application.

Claims

1. An X-Cube and micro-display screen alignment MTF detection system, the X-Cube comprising a stereoscopic light combing prism, a mounting seat arranged on the top surface of the stereoscopic light combing prism, a lens arranged in the mounting seat, three fitting surfaces arranged on the opposite two side surfaces and the bottom surface of the stereoscopic light combing prism for fitting the micro-display screen, and an obliquely downward positioning surface arranged at the upper end of the mounting seat, wherein three first positioning points are arranged at three adjacent inner corners of the positioning surface respectively, and three second positioning points are circumferentially distributed on the outer circumferential surface of the lens. The utility model relates to a kind of X-Cube MTF detection device, including loading platform, camera laser detection module, carrying device, alignment device and MTF detection device; Loading platform is used to place X-Cube to be detected; Camera laser detection module is used to obtain the posture of X-Cube, including support seat, first camera laser assembly obliquely arranged on support seat and second camera laser assembly vertically arranged on support seat, the first camera laser assembly is vertically arranged with positioning surface, the first camera laser assembly detects the height of three first positioning points on positioning surface to carry out Tx axis, Ty axis direction leveling;Second camera laser assembly detects X-Cube to carry out R axis, Tx axis, Ty axis, X axis, Y axis direction leveling and confirms the deviation of height direction; Carrying device includes six-axis moving platform and clamping jaw for clamping X-Cube arranged on six-axis moving platform, the clamping jaw moves X-Cube to first camera laser assembly, second camera laser assembly for detection under the driving of six-axis moving platform, six-axis moving platform adjusts the position of X-Cube according to the signal fed back by first camera laser assembly or second camera laser assembly to reach preset position; Alignment device is used to install micro display screen and adjust the distance between micro display screen and relative adhering surface, including two first alignment mechanisms respectively opposite to two adhering surfaces on side and second alignment mechanism arranged between two first alignment mechanisms and opposite to bottom adhering surface; MTF detection device detects the imaging of micro display screen through X-Cube to carry out MTF image quality detection, including detection seat and imaging colorimeter arranged on detection seat above second alignment mechanism.

2. The X-Cube and microdisplay screen alignment MTF detection system of claim 1, wherein: The first camera laser assembly includes first detection camera obliquely arranged on support seat and first laser height gauge arranged on support seat and arranged in parallel with first detection camera, the first detection camera takes photograph of three first positioning points of X-Cube, six-axis moving platform guides clamping jaw to move X-Cube to first laser height gauge measurement place according to the signal fed back by first detection camera, height of three first positioning points on positioning surface is measured by first laser height gauge, six-axis moving platform adjusts Tx axis, Ty axis direction leveling of stereoscopic light combiner according to the signal fed back by first laser height gauge.

3. The X-Cube and microdisplay screen alignment MTF detection system of claim 2, wherein: The second camera laser assembly includes second detection camera vertically arranged on support seat and second laser height gauge arranged on support seat and arranged in parallel on one side of second detection camera, the second detection camera detects X-Cube to confirm whether the deviation of R axis direction of X-Cube occurs, if deviation occurs, second detection camera repeatedly detects, six-axis moving platform adjusts R axis and Tx axis, Ty axis direction leveling according to the signal fed back by second detection camera, until Tx axis, Ty axis direction and R axis direction are all leveled, then X axis, Y axis direction is leveled;If no deviation, clamping jaw moves X-Cube to second laser height gauge measurement place, height of three second positioning points is measured by second laser height gauge, six-axis moving platform adjusts the height of second positioning point according to the signal fed back by second laser height gauge.

4. The X-Cube and microdisplay screen alignment MTF detection system of claim 2, wherein: The first detection camera comprises a first camera, a first lens and a first light source arranged in sequence from top to bottom.

5. The X-Cube and microdisplay screen alignment MTF detection system of claim 1, wherein: The first alignment mechanism comprises a first six-axis alignment platform, a first vacuum stage arranged on the first six-axis alignment platform for mounting the micro display screen, and a first alignment laser height gauge arranged on the first six-axis alignment platform, which measures the distance of the micro display screen on another first alignment mechanism.

6. The X-Cube and microdisplay screen alignment MTF detection system of claim 5, wherein: The second alignment mechanism comprises a second six-axis alignment platform located between the two first six-axis alignment platforms and a second vacuum stage arranged on the second six-axis alignment platform for mounting the micro display screen, the micro display screen on the second vacuum stage being a G monochrome micro display screen, and the micro display screens on the two first vacuum stages being R monochrome micro display screens and B monochrome micro display screens respectively.

7. The X-Cube and microdisplay screen alignment MTF detection system of claim 6, wherein: The MTF detection device comprises a second alignment laser height gauge arranged vertically on the detection seat opposite the second vacuum stage, which measures the distance of the micro display screen on the second vacuum stage.

8. A method for X-Cube and microdisplay screen alignment MTF detection, characterized in that: The detection system based on claims 1 to 7, specifically comprising the following steps: Step 1: The clamping jaw cooperates with the six-axis moving platform to move the X-Cube on the loading stage to the measurement position of the second camera laser assembly for detection, and the six-axis moving platform adjusts the R-axis direction according to the feedback signal of the second camera laser assembly; the clamping jaw clamps the X-Cube to move to the measurement position of the first camera laser assembly for detection, and the first camera laser assembly detects the height of the three first positioning points on the positioning surface to adjust the Tx-axis and Ty-axis directions; the clamping jaw clamps the X-Cube to continue moving to the second camera laser assembly for detection to adjust the R-axis, Tx-axis, Ty-axis, X-axis and Y-axis directions and confirm the height direction offset, and complete the attitude adjustment of the X-Cube; Step 2: Three micro display screens of different colors are fixed on two first alignment mechanisms and a second alignment mechanism respectively, and the three micro display screens of different colors are connected with the controller through the wire, wherein the R monochrome micro display screen and the B monochrome micro display screen are fixed on the two first alignment mechanisms respectively, and the G monochrome micro display screen is fixed on the second alignment mechanism; Step 3: The six-axis moving platform controls the clamping jaw to move the X-Cube with adjusted attitude to the detection position below the imaging colorimeter, and then adjusts the distance between the two micro display screens of the two first alignment mechanisms and the relative abutting surface for MTF value test; then adjusts the distance between the micro display screen on the second alignment mechanism and the relative abutting surface for MTF value test, and obtains the defocus curves of the R monochrome micro display screen, the B monochrome micro display screen and the G monochrome micro display screen respectively by using the experimental data fitting method according to the obtained data.

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