A dilution refrigerator vibration isolation device suitable for multi-vibration source environment
By constructing a complete vibration isolation path and adopting flexible connections and multi-layer vibration isolation structures, the vibration isolation problem of the dilution refrigerator in a multi-vibration source environment was solved, improving the stability and measurement accuracy of the low-temperature constant temperature platform and ensuring the efficiency of cold energy transfer and thermal stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-03
- Publication Date
- 2026-04-10
AI Technical Summary
Existing technologies struggle to effectively isolate and dilute the vibrations of refrigerators in multi-source environments, affecting ultra-low temperature stability and measurement accuracy in quantum computing and ultra-low temperature physics experiments. Furthermore, the vibration coupling path between auxiliary equipment and the main refrigeration system cannot be completely severed.
A complete vibration isolation path is constructed by using flexible connections, a combination of corrugated pipes with different stiffnesses for vibration isolation, a cross-braced reinforced frame, an independent foundation for external auxiliary equipment, and flexible corrugated pipe suspension support. This includes a flexible vibration isolation structure, a mechanical refrigeration unit vibration isolation structure, an overall vibration isolation frame for the low-temperature thermostat, and a vibration isolation structure for external auxiliary equipment.
It achieves efficient isolation of multiple vibration sources, improves the stability of the low-temperature constant temperature platform and the measurement accuracy of the system, avoids ground resonance and vibration coupling, and ensures cold energy transfer efficiency and thermal stability.
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Figure CN120926626B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of refrigeration and cryogenics, and more particularly, to a dilution refrigerator vibration isolation device suitable for a multi-vibration source environment. BACKGROUND
[0002] As a low-disturbance refrigeration technology capable of stable and continuous refrigeration in the millikelvin (mK) temperature range, the dilution refrigerator is widely used in high-tech fields such as superconducting quantum computing and extremely low-temperature physical experiments.
[0003] A dry dilution refrigeration system usually relies on a mechanical refrigerator to provide primary precooling, while cooperating with external auxiliary equipment such as a helium compressor and a pump set to operate together. However, these devices all have significant mechanical vibrations, especially during the startup of the compressor, the operation of the pump set, and the refrigeration process of the mechanical refrigerator, which will produce multi-source vibrations mixed with low and high frequencies. These vibrations are transmitted to the interior of the cryostat and the lowest temperature platform of the system through rigid connection structures, pipes, cables, and other paths, which not only affects the ultra-low temperature stability, but also may cause measurement errors or device failures in quantum computing and extremely low-temperature physical experiments.
[0004] The prior art solution usually adopts a single bellows, rubber pad, or air spring as the basic vibration isolation means, but for high-sensitivity experimental environments, the vibration isolation effect is limited, especially when facing multi-directional and multi-frequency band composite vibrations, the traditional structure is difficult to achieve system-level isolation. At the same time, the auxiliary equipment often shares the support or wiring support with the main refrigeration system, which makes it impossible to completely cut off the vibration coupling path, thereby affecting the low-temperature experimental performance. SUMMARY
[0005] In order to overcome the above-mentioned defects of the prior art, the embodiments of the present application provide a dilution refrigerator vibration isolation device suitable for a multi-vibration source environment, which realizes effective isolation of multi-source vibrations from a mechanical refrigerator, a helium compressor, a pump set, and the like, and improves the stability of the cryostat platform and the system measurement accuracy through flexible connection, combination vibration isolation of bellows with different stiffness, cross support reinforced frame, independent support foundation of external auxiliary equipment, flexible bellows, and pipeline suspension support.
[0006] To achieve the above-mentioned purpose, the present application provides the following technical solution: a dilution refrigerator vibration isolation device suitable for a multi-vibration source environment, comprising a flexible vibration isolation structure, a mechanical refrigerator vibration isolation structure, a cryostat overall vibration isolation frame, and a vibration isolation structure of external auxiliary equipment, wherein:
[0007] The cryostat overall vibration isolation frame comprises a cross support reinforced frame, a cryostat support plate is arranged on the top of the cross support reinforced frame, and an air damping pad is arranged between the four corners of the cryostat support plate and the top surface of the cross support reinforced frame;
[0008] The flexible vibration isolation structure is arranged between the mechanical refrigerator cold head and the dilution refrigerator cold plate;
[0009] The mechanical refrigerator vibration isolation structure comprises a vertical vibration isolation component, a horizontal vibration attenuation member, and a vertical rigid support frame, a horizontal connecting plate is connected between the vertical vibration isolation component and the horizontal vibration attenuation member, the horizontal vibration attenuation member is fixed to the top of the vertical rigid support frame, a low-temperature thermostat top plate is arranged at the bottom of the vertical rigid support frame, a dilution refrigerator is arranged at the bottom of the low-temperature thermostat support plate, and the low-temperature thermostat top plate is installed on the low-temperature thermostat support plate;
[0010] The external auxiliary equipment comprises a pump set and a helium compressor, the helium compressor and the pump set are arranged in a room area away from the low-temperature thermostat overall vibration isolation frame, and the external auxiliary equipment and the dilution refrigerator are arranged in suspension through flexible bellows and pipelines.
[0011] In a preferred embodiment, the cross support reinforcement frame is provided with a dilution refrigerator support platform at the bottom, the pump set is provided with a pump set support platform at the bottom, and the helium compressor is provided with a helium compressor support platform at the bottom, and the helium compressor support platform, the dilution refrigerator support platform, and the pump set support platform are independent of each other, so that coupling vibration caused by ground resonance or rigid connection can be effectively avoided.
[0012] In a preferred embodiment, the flexible vibration isolation structure is arranged as an oxygen-free copper fine wire woven structure, comprising a primary flexible structure and a secondary flexible structure.
[0013] The dilution refrigerator comprises a mechanical refrigerator primary cold head, a dilution refrigerator 40K cold plate, a mechanical refrigerator secondary cold head, and a dilution refrigerator 4K cold plate; the primary flexible structure is vibrationally connected between the mechanical refrigerator primary cold head and the dilution refrigerator 40K cold plate, and the secondary flexible structure is vibrationally connected between the mechanical refrigerator secondary cold head and the dilution refrigerator 4K cold plate, so as to realize mechanical flexible decoupling between the mechanical refrigerator cold head and the dilution refrigerator cold plate and avoid direct transmission of vibration to the internal frame of the dilution refrigerator.
[0014] In a preferred embodiment, the vertical vibration isolation component is composed of a primary flange bellows, a secondary flange bellows, a tertiary flange bellows, a primary limiting rod, a secondary limiting rod, and a wrapped Dewar, the number of the primary limiting rod and the secondary limiting rod is three, and the primary limiting rod and the secondary limiting rod are distributed in an equilateral triangle along the circumferential direction of the lower flange of the secondary flange bellows, so as to ensure axial positioning accuracy and structural stability of each flange connection.
[0015] The primary flange bellows is fixed on the low-temperature thermostat top plate through a corresponding lower flange, and a mechanical refrigerator is fixed on the upper flange of the primary flange bellows.
[0016] The upper flange of the secondary flange bellows is connected to the lower flange of the tertiary flange bellows by mechanical fastening, the upper flange of the primary flange bellows is limited in distance from the lower flange of the secondary flange bellows by a primary limiting rod, and the lower flange of the secondary flange bellows is limited in distance from the upper flange of the tertiary flange bellows by a secondary limiting rod.
[0017] The upper flange of the secondary flange bellows is mechanically fastened below a horizontal connecting plate, and the horizontal connecting plate is used to connect the upper flange of the secondary flange bellows and a horizontal vibration attenuation member.
[0018] In a preferred embodiment, the low-temperature thermostat support plate is a square aluminum plate with a through hole in the center for accommodating the passage of the Dewar and connecting with the top plate of the low-temperature thermostat.
[0019] The upper surface of the cross support reinforcement frame is provided with a mechanical refrigerator rotary valve support frame, and the cross support reinforcement frame and the mechanical refrigerator rotary valve support frame are both made of high-strength aluminum alloy, which improves the overall vibration isolation stability of the system, and the mechanical refrigerator rotary valve support frame is used for vibration isolation and support of the rotary valve of the mechanical refrigerator.
[0020] In a preferred embodiment, the inherent frequency of the air damping pad is 3-6 Hz, which is used to effectively isolate low-frequency interference from the mechanical refrigerator.
[0021] In a preferred embodiment, the external auxiliary equipment further comprises a mechanical refrigerator gas pipeline connecting the dilution refrigerator and the helium compressor, an inlet pipeline and an outlet pipeline connecting the dilution refrigerator and the pump set, and the inlet pipeline, the outlet pipeline and the mechanical refrigerator gas pipeline are all made of flexible bellows and are suspended from the wall or ceiling of the room through pipeline suspension frames to buffer the stress and vibration transmission caused by thermal expansion and contraction.
[0022] Technical effects and advantages of the present application:
[0023] 1. The present application builds a complete vibration isolation path from the cold head of the mechanical refrigerator to the overall support frame of the low-temperature thermostat, and then to the external auxiliary equipment, which can realize complete vibration isolation from the vibration source to the dilution refrigerator and efficient isolation of multiple vibration sources such as the mechanical refrigerator, external compressor and external pump set at the system level.
[0024] 2. The flexible structure adopted in the present application is made of oxygen-free copper braided material and is connected between the cold head of the mechanical refrigerator and the corresponding cold plate, which has good flexible buffering performance, can effectively realize mechanical decoupling, and at the same time maintains high thermal conductivity to ensure that the cold quantity transmission efficiency is not affected.
[0025] 3、The mechanical refrigerator vibration isolation structure in the application includes vertical vibration isolation components composed of three-stage bellows, and horizontal vibration attenuation components arranged on the top of the rigid support frame, thereby forming a three-dimensional vibration isolation structure, which can effectively suppress the vertical and horizontal composite vibration generated by the mechanical refrigerator during operation.
[0026] 4、The mechanical refrigerator vibration isolation structure and the top plate of the cryostat in the application are connected to the cross support reinforced frame through air damping pads, thereby forming a multi-layer vibration isolation platform with high stiffness and good low-frequency vibration isolation capacity, which can effectively isolate the low-frequency vibration generated by the mechanical refrigerator.
[0027] 5、The helium compressor and pump group and other external auxiliary equipment in the application are respectively installed on independent supports, so as to avoid the coupling of ground vibration; the connecting pipeline between the external auxiliary equipment and the dilution refrigerator adopts a flexible bellows and is arranged in a suspended manner on the wall or ceiling, thereby reserving a flexible space, further weakening the vibration conduction path, and buffering the mechanical stress caused by thermal expansion and contraction. BRIEF DESCRIPTION OF DRAWINGS
[0028] Figure 1 It is a schematic diagram of the overall structure of the application.
[0029] Figure 2 It is a schematic diagram of the flexible connection of the internal frame of the mechanical refrigerator and the dilution refrigerator of the application.
[0030] Figure 3 It is a schematic diagram of the overall vibration reduction frame of the dilution refrigerator cryostat of the application.
[0031] Figure 4 It is a schematic diagram of the vertical vibration reduction component structure of the mechanical refrigerator vibration isolation structure of the application.
[0032] Figure 5 It is a schematic diagram of the coupling structure profile of the vertical vibration reduction component, the horizontal vibration attenuation component and the vertical rigid support of the mechanical refrigerator vibration isolation structure of the application.
[0033] The attached diagram is labeled as follows: 1. Overall vibration isolation frame for the low-temperature thermostat; 2. Cross-braced reinforced frame; 3. Air damping pad; 4. Support plate for the low-temperature thermostat; 5. Top plate for the low-temperature thermostat; 6. Vibration isolation structure for the mechanical refrigeration unit; 7. Vertical rigid support frame; 8. Horizontal vibration damping component; 9. Horizontal connecting plate; 10. Vertical vibration damping assembly; 11. Primary flange bellows; 12. Secondary flange bellows; 13. Tertiary flange bellows; 14. Primary limit rod; 15. Secondary limit rod; 16. Mechanical refrigeration unit; 17. Rotary valve support frame for the mechanical refrigeration unit. 18 Mechanical Refrigeration Unit First-Stage Cold Head, 19 Flexible Vibration Isolation Structure, 20 Dilution Refrigeration Unit 40K Cold Plate, 21 First-Stage Flexible Structure, 22 Mechanical Refrigeration Unit Second-Stage Cold Head, 23 Dilution Refrigeration Unit 4K Cold Plate, 25 Second-Stage Flexible Structure, 26 Pump Unit, 27 Inlet Pipeline, 28 Outlet Pipeline, 29 Helium Compressor, 30 Mechanical Refrigeration Unit Gas Pipeline, 31 Pipeline Suspension Bracket, 32 Helium Compressor Support Platform, 33 Dilution Refrigeration Unit Support Platform, 34 Pump Unit Support Platform, 35 Dewar, 36 Dilution Refrigeration Unit. Detailed Implementation
[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0035] This invention provides, for example Figures 1-5 The dilution refrigeration unit vibration isolation device shown is suitable for multi-vibration source environments, including a flexible vibration isolation structure 19, a mechanical refrigeration unit vibration isolation structure 6, a low-temperature thermostat integral vibration isolation frame 1, and vibration isolation structures for external auxiliary equipment, wherein:
[0036] The overall vibration isolation frame 1 of the low temperature thermostat includes a cross-bracing reinforced frame 2, a low temperature thermostat support plate 4 is provided on the top of the cross-bracing reinforced frame 2, and air vibration damping pads 3 are provided between the four corners of the low temperature thermostat support plate 4 and the top surface of the cross-bracing reinforced frame 2.
[0037] Flexible vibration isolation structure 19 is installed between the cold head of the mechanical refrigeration unit and the cold plate of the dilution refrigeration unit;
[0038] The mechanical refrigeration unit vibration isolation structure 6 includes a vertical vibration isolation component 10, a horizontal vibration damping component 8, and a vertical rigid support frame 7. A horizontal connecting plate 9 connects the vertical vibration isolation component 10 and the horizontal vibration damping component 8. The horizontal vibration damping component 8 is fixed to the top of the vertical rigid support frame 7. A low-temperature thermostat top plate 5 is provided at the bottom of the vertical rigid support frame 7. A dilution refrigeration unit 36 is provided at the bottom of the low-temperature thermostat support plate 4. The low-temperature thermostat top plate 5 is installed on the low-temperature thermostat support plate 4.
[0039] The external auxiliary equipment includes a pump set 26 and a helium compressor 29, and the helium compressor 29 and the pump set 26 are arranged in a room area away from the overall vibration isolation frame 1 of the cryostat, and the external auxiliary equipment and the dilution refrigerator 36 are arranged in a suspended manner through flexible bellows and pipelines.
[0040] The bottom of the cross support reinforcement frame 2 is provided with a dilution refrigerator support platform 33, the bottom of the pump set 26 is provided with a pump set support platform 34, and the bottom of the helium compressor 29 is provided with a helium compressor support platform 32, and the helium compressor support platform 32, the dilution refrigerator support platform 33 and the pump set support platform 34 are independent of each other, which can effectively avoid coupling vibration caused by ground resonance or rigid connection.
[0041] The flexible vibration isolation structure 19 is arranged in a non-oxygen copper fine wire woven structure and includes a first flexible structure 21 and a second flexible structure 25; the dilution refrigerator 36 includes a mechanical refrigerator first cold head 18, a dilution refrigerator 40K cold disc 20, a mechanical refrigerator second cold head 22 and a dilution refrigerator 4K cold disc 23; the first flexible structure 21 is vibrationally connected between the mechanical refrigerator first cold head 18 and the dilution refrigerator 40K cold disc 20, and the second flexible structure 25 is vibrationally connected between the mechanical refrigerator second cold head 22 and the dilution refrigerator 4K cold disc 23, which is used to realize mechanical flexible decoupling between the mechanical refrigerator cold head and the dilution refrigerator cold disc and avoid direct transmission of vibration to the internal frame of the dilution refrigerator 36.
[0042] The vertical vibration isolation assembly 10 is composed of a first flange bellows 11, a second flange bellows 12, a third flange bellows 13, a first limiting rod 14 and a second limiting rod 15, and a wrapped Dewar 35, the number of the first limiting rod 14 and the second limiting rod 15 is three, which are distributed in an equilateral triangle along the circumferential direction of the lower flange of the second flange bellows 12 to ensure the axial positioning accuracy and structural stability of the flange connection; the first flange bellows 11 is fixed on the cryostat top plate 5 through the corresponding lower flange, and the mechanical refrigerator 16 is fixed on the upper flange of the first flange bellows 11; the upper flange of the second flange bellows 12 and the lower flange of the third flange bellows 13 are connected by mechanical fastening, the distance between the upper flange of the first flange bellows 11 and the lower flange of the second flange bellows 12 is limited by the first limiting rod 14, and the distance between the lower flange of the second flange bellows 12 and the upper flange of the third flange bellows 13 is limited by the second limiting rod 15; the upper flange of the second flange bellows 12 is mechanically fastened below the horizontal connecting plate 9, and the horizontal connecting plate 9 is used to connect the upper flange of the second flange bellows 12 and the horizontal vibration attenuation member 8.
[0043] The low-temperature thermostat support plate 4 is a square aluminum plate, and a through hole for accommodating the dewar 35 to pass through and connecting with the low-temperature thermostat top plate 5 is arranged in the center of the low-temperature thermostat support plate 4; a mechanical refrigerator rotary valve support frame 17 is arranged on the upper surface of the cross support reinforcing frame 2, and the cross support reinforcing frame 2 and the mechanical refrigerator rotary valve support frame 17 are both made of high-strength aluminum alloy, so that the overall vibration isolation stability of the system is improved, and the mechanical refrigerator rotary valve support frame 17 is used for vibration isolation and support of a rotary valve of the mechanical refrigerator 16.
[0044] The inherent frequency of the air damping pad 3 is 3-6 Hz, and the air damping pad 3 is used for effectively isolating low-frequency interference from the mechanical refrigerator 16.
[0045] The external auxiliary equipment further includes a mechanical refrigerator gas pipeline 30 connecting the dilution refrigerator 36 and the helium compressor 29, an inlet gas pipeline 27 and an outlet gas pipeline 28 connecting the dilution refrigerator 36 and the pump set 26, and the inlet gas pipeline 27, the outlet gas pipeline 28 and the mechanical refrigerator gas pipeline 30 are all flexible bellows, and are hung on the wall or the ceiling of the room through a pipeline suspension frame 31, so as to buffer the stress and vibration conduction caused by thermal expansion and cold contraction.
[0046] The embodiment is specifically: through the mechanical refrigerator vibration isolation structure, the flexible connection structure, the low-temperature thermostat overall vibration isolation frame and the suspension and fixing structure of the external auxiliary equipment and the independent support platform design, multi-source, multi-frequency band and three-dimensional vibration isolation are realized; the above-mentioned damping system is suitable for a dry dilution refrigerator based on mechanical refrigeration and precooling, and is especially suitable for important application scenes such as a quantum measurement system, an ultra-low-temperature physical experiment system and an mK temperature zone measurement platform which have extremely high requirements for minimum temperature holding capacity and thermal stability.
[0047] Finally, it should be pointed out that: first, in the description of the present application, it should be pointed out that, unless otherwise specified and limited, the terms "mounting", "connection" and "connection" should be understood in a broad sense, which can be mechanical connection or electrical connection, or the communication between the two elements, or direct connection, and "up", "down", "left", "right" and the like are only used to represent the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may change;
[0048] Secondly: in the drawings of the disclosed embodiment, only the structures related to the disclosed embodiment are involved, and other structures can be referred to the general design, and the same embodiment and different embodiments of the present application can be combined with each other under the condition of no conflict;
[0049] Finally: the above-mentioned only for the preferred embodiment of the present application, and does not limit the present application, any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A dilution refrigerator vibration isolation apparatus suitable for use in a multi-vibration source environment, characterized by: The application relates to a flexible vibration isolation structure (19), a mechanical refrigerator vibration isolation structure (6), a low-temperature thermostat overall vibration isolation frame (1) and a vibration isolation structure of external auxiliary equipment, wherein: The low-temperature thermostat overall vibration isolation frame (1) comprises a cross support reinforced frame (2), the top of the cross support reinforced frame (2) is provided with a low-temperature thermostat support plate (4), and air damping pads (3) are arranged between the four corners of the low-temperature thermostat support plate (4) and the top surface of the cross support reinforced frame (2); The flexible vibration isolation structure (19) is arranged between a mechanical refrigerator cold head and a dilution refrigerator cold plate; The mechanical refrigerator vibration isolation structure (6) comprises a vertical vibration isolation assembly (10), a horizontal vibration attenuation piece (8) and a vertical rigid support frame (7), a horizontal connecting plate (9) is connected between the vertical vibration isolation assembly (10) and the horizontal vibration attenuation piece (8), the horizontal vibration attenuation piece (8) is fixed to the top of the vertical rigid support frame (7), the bottom of the vertical rigid support frame (7) is provided with a low-temperature thermostat top plate (5), the bottom of the low-temperature thermostat support plate (4) is provided with a dilution refrigerator (36), and the low-temperature thermostat top plate (5) is arranged on the low-temperature thermostat support plate (4); The external auxiliary equipment comprises a pump group (26) and a helium compressor (29), the helium compressor (29) and the pump group (26) are arranged in a room area far away from the low-temperature thermostat overall vibration isolation frame (1), and the external auxiliary equipment and the dilution refrigerator (36) are arranged in a suspension mode through flexible bellows and pipelines. The flexible vibration isolation structure (19) is arranged in a oxygen-free copper fine wire woven structure and comprises a first-level flexible structure (21) and a second-level flexible structure (25). The vertical vibration isolation assembly (10) is composed of a first-level flange bellows (11), a second-level flange bellows (12), a third-level flange bellows (13), a first-level limiting rod (14), a second-level limiting rod (15) and a wrapped dewar (35), the number of the first-level limiting rod (14) and the second-level limiting rod (15) is three, and the first-level limiting rod (14) and the second-level limiting rod (15) are arranged in an equilateral triangle along the circumferential direction of the lower flange of the second-level flange bellows (12). The first-level flange bellows (11) is fixed to the low-temperature thermostat top plate (5) through a corresponding lower flange, and a mechanical refrigerator (16) is fixed to the upper flange of the first-level flange bellows (11). The upper flange of the second-level flange bellows (12) and the lower flange of the third-level flange bellows (13) are connected through a mechanical fastening mode, the upper flange of the first-level flange bellows (11) and the lower flange of the second-level flange bellows (12) are limited in distance through the first-level limiting rod (14), and the lower flange of the second-level flange bellows (12) and the upper flange of the third-level flange bellows (13) are limited in distance through the second-level limiting rod (15). The upper flange of the second-level flange bellows (12) is mechanically fastened below the horizontal connecting plate (9), and the horizontal connecting plate (9) is used for connecting the upper flange of the second-level flange bellows (12) and the horizontal vibration attenuation piece (8).
2. A dilution refrigerator vibration isolation apparatus suitable for use in a multi-vibration source environment according to claim 1, wherein: The cross support reinforced frame (2) is provided with a dilution refrigerator support platform (33) at the bottom, the pump group (26) is provided with a pump group support platform (34) at the bottom, and the helium compressor (29) is provided with a helium compressor support platform (32) at the bottom, and the helium compressor support platform (32), the dilution refrigerator support platform (33) and the pump group support platform (34) are independent of each other.
3. A dilution refrigerator vibration isolation apparatus suitable for use in a multi-vibration source environment according to claim 1, wherein: The dilution refrigerator (36) comprises a mechanical refrigerator primary cold head (18), a dilution refrigerator 40K cold plate (20), a mechanical refrigerator secondary cold head (22) and a dilution refrigerator 4K cold plate (23); wherein the first flexible structure (21) is connected between the mechanical refrigerator primary cold head (18) and the dilution refrigerator 40K cold plate (20), and the second flexible structure (25) is connected between the mechanical refrigerator secondary cold head (22) and the dilution refrigerator 4K cold plate (23).
4. The dilution refrigerator vibration isolation system suitable for multi-vibration source environment of claim 1, wherein: The low-temperature thermostat support plate (4) is a square aluminum plate, and a through hole is arranged in the center of the low-temperature thermostat support plate (4) to accommodate the dewar (35) and connect the low-temperature thermostat top plate (5). The cross support reinforced frame (2) is provided with a mechanical refrigerator rotary valve support frame (17) on the upper surface, and the cross support reinforced frame (2) and the mechanical refrigerator rotary valve support frame (17) are both made of high-strength aluminum alloy.
5. The dilution refrigerator vibration isolation system suitable for multi-vibration source environment of claim 1, wherein: The inherent frequency of the air damping pad (3) is 3-6 Hz, which is used to effectively isolate low-frequency interference from the mechanical refrigerator (16).
6. A dilution refrigerator vibration isolation apparatus suitable for use in a multi-vibration source environment according to claim 1, wherein: The external auxiliary equipment further comprises a mechanical refrigerator gas pipeline (30) connecting the dilution refrigerator (36) and the helium compressor (29), an air inlet pipeline (27) and an air outlet pipeline (28) connecting the dilution refrigerator (36) and the pump group (26), and the air inlet pipeline (27), the air outlet pipeline (28) and the mechanical refrigerator gas pipeline (30) are all flexible corrugated pipes and are hung on the wall or the ceiling of the room through a pipeline suspension frame (31).
Citation Information
Patent Citations
Mechanical isolation type vibration shielding system of closed circulation liquid helium refrigerator
CN109488720A
Low-vibration cooling device adopting closed-loop refrigeration machine
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