Processing apparatus and processing method

Abstract

A processing device (100) is provided with a positioning device (10), a head (5), and a stage (6). A positioning device (10) is provided with a camera (1), a prism (3) having a first reflecting surface (31) and a second reflecting surface (32), and an arithmetic device (8). When the prism (3) is disposed between the head (5) and the stage (6), the first reflecting surface (31) reflects light incident from the head (5) side to the camera (1) side, and the second reflecting surface (32) reflects light incident from the stage (6) side to the camera (1) side. The camera (1) captures a camera image (A) including a first image (A1), which is an image on the head (5) side, and a second image (A2), which is an image on the stage (6) side, on the basis of light incident from the prism (3). The calculation device (8) determines the positions of the first member (P1) and the second member (P2) on the basis of the camera image (A).

Description

TECHNICAL FIELD

[0001] The present disclosure relates to, for example, a processing device used when positioning members to each other and a processing method. BACKGROUND

[0002] In the past, in the case of manufacturing electronic components and the like, a camera is used to grasp the positions of members such as substrates, chip components, and the like, and positioning of each member is performed. At this time, based on the positional offset recognized by the camera, movement for correcting the positional offset of each member is performed, and by minimizing the movement amount of the head and the stage after recognition correction, movement error can be reduced.

[0003] For example, in Patent Literature 1, a member is arranged in advance directly above the mounting position of a substrate, and an optical system that can recognize positioning marks of the member back surface and the member surface that become the alignment surfaces of each other is used. In particular, in Patent Literature 1, since the optical system for the upper field of view that photographs the positioning marks of the member back surface and the optical system for the lower field of view that photographs the positioning marks of the member surface are separately constituted, the optical axis of the upper field of view after reflection of the prism and the optical axis of the lower field of view become coaxial, and the upper field of view and the lower field of view can be photographed coaxially. With such a configuration, as long as the horizontal positions of the two members are aligned based on the information photographed by the optical system, the two members can be aligned by only the lowering action of the head, and thus the error based on the movement of the device can be minimized, and high-precision mounting can be performed.

[0004] PRIOR ART DOCUMENTS

[0005] PATENT LITERATURE

[0006] Patent Literature 1: Japanese Patent No. 4642565 SUMMARY

[0007] PROBLEMS TO BE SOLVED BY THE INVENTION

[0008] However, in the case of performing positioning of ultra-high precision of 10 μm or less, a slight thermal expansion of only a part of the members or a plurality of members of the prism, the mirror, the camera, and the like that constitute the optical system for the first member and the optical system for the second member occurs, and a shift occurs in the optical path, and thus the coaxiality of the optical path of the optical system for the first member and the optical path of the optical system for the second member is destroyed, and the positioning precision deteriorates.

[0009] Therefore, an object of the present disclosure is to provide a processing device and a processing method and the like that can suppress a decrease in the precision of positioning.

[0010] MEANS FOR SOLVING THE PROBLEMS

[0011] To achieve the above objectives, an embodiment of the processing apparatus disclosed herein includes: a head; a stage; a positioning device for positioning the first member and the second member when aligning a first member held on the head with a second member held on the stage; a prism having a first reflective surface and a second reflective surface; a camera; and a computing device in which, when the prism is disposed between the head and the stage, the first reflective surface reflects light incident from the head side to the camera side, the second reflective surface reflects light incident from the stage side to the camera side, the camera captures a camera image based on the light incident from the prism, the camera image including a first image as an image of the head side and a second image as an image of the stage side, and the computing device determines the positions of the first member and the second member based on the camera image.

[0012] Invention Effects

[0013] According to this disclosure, it is possible to suppress the reduction in positioning accuracy. Attached Figure Description

[0014] Figure 1 This is a diagram showing the structure of the processing apparatus according to the first embodiment.

[0015] Figure 2 This is a diagram showing a part of the operation flow when the processing apparatus according to the first embodiment is used in an imprinting apparatus.

[0016] Figure 3 This is a side view of the positioning device according to the first embodiment.

[0017] Figure 4 This is a flowchart illustrating the operation of the positioning device according to the first embodiment.

[0018] Figure 5 This is a flowchart illustrating the calculation process of the position correction amount involved in the first embodiment.

[0019] Figure 6 This is a diagram used to explain the calculation process of the position correction amount involved in the first embodiment.

[0020] Figure 7 This is a diagram used to explain the calculation process of the position correction amount involved in the first embodiment.

[0021] Figure 8 This is a flowchart illustrating the boundary position correction process involved in the second embodiment.

[0022] Figure 9 This is a diagram used to illustrate the correction process for the boundary position involved in the second embodiment.

[0023] Figure 10 This is a side view of the positioning device according to the third embodiment.

[0024] Figure 11 This is a diagram illustrating another example of the prism involved in the third embodiment.

[0025] Figure 12A This is a side view of another example of the positioning device according to the third embodiment.

[0026] Figure 12B This is a side view of another example of the positioning device according to the third embodiment.

[0027] Figure 13 This is a side view of another example of the positioning device according to the third embodiment.

[0028] Figure 14 This is a side view of another example of the positioning device according to the third embodiment.

[0029] Figure 15 It is used for explanation Figure 12A The diagram shows the boundary detection processing of the positioning device.

[0030] Figure 16 This is a side view of another example of the positioning device according to the third embodiment.

[0031] Figure 17 This is a diagram illustrating the structure of the positioning device involved in other embodiments. Detailed Implementation

[0032] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. Furthermore, the embodiments described below represent specific examples of the present invention. Therefore, the numerical values, shapes, materials, structural elements, arrangement positions of structural elements, and connection methods shown in the following embodiments are merely examples and are not intended to limit the present invention. Therefore, structural elements in the following embodiments that are not described in the independent technical solutions representing the highest-level concept of the present disclosure are described as arbitrary structural elements.

[0033] Furthermore, in this specification and the accompanying drawings, the X-axis, Y-axis, and Z-axis represent the three axes of a three-dimensional orthogonal coordinate system. The X-axis and Y-axis are orthogonal to each other and are both orthogonal to the Z-axis. In this embodiment, the Z-axis direction is the vertical direction. Additionally, the figures are schematic diagrams and not necessarily strictly illustrative. Furthermore, in the figures, substantially identical structures are given the same symbols, and repeated descriptions are omitted or simplified.

[0034] (First Embodiment)

[0035] First, useFigure 1 The processing apparatus 100 according to the first embodiment will be described. Figure 1 This is a diagram showing the structure of the processing apparatus 100 according to the first embodiment.

[0036] like Figure 1 As shown, the processing device 100 includes a head 5, a platform 6, and a positioning device 10.

[0037] The head 5 is a holding device for holding the first component P1. The head 5 can hold the first component P1, for example, by adsorbing or gripping it. Alternatively, the first component P1 can be held to the head 5 by fixing it with screws. The head 5 is movable in the Z-axis direction. Furthermore, the head 5 is rotatable about the Z-axis. Therefore, although not shown, the processing apparatus 100 has a mechanism that allows the head 5 to move in the Z-axis direction or rotate about the Z-axis. Additionally, it may also have a mechanism that allows the head 5 to move in the X-axis and Y-axis directions.

[0038] The stage 6 supports the second member P2. The second member P2 is held on the stage 6. For example, the second member P2 is placed on the upper surface of the stage 6, thereby being held on the stage 6. The stage 6 is movable in the X-axis direction and the Y-axis direction. Therefore, although not shown, the processing device 100 has a mechanism that enables the stage 6 to move in the X-axis direction and the Y-axis direction.

[0039] The head 5 only needs to be able to move relative to the platform 6 in the X-axis and Y-axis directions, and be positioned around the Z-axis, and move in coordination with the Z-axis direction. In addition, the moving mechanism can be set in either the head 5 or the platform 6, or it can be repeatedly set in the head 5 and the platform 6 respectively.

[0040] The positioning device 10 is a positioning mechanism for positioning the first member P1 held on the head 5 and the second member P2 held on the stage 6. Like the stage 6, the positioning device 10 is movable in both the X-axis and Y-axis directions. Therefore, although not shown, the processing device 100 has a mechanism that enables the positioning device 10 to move in both the X-axis and Y-axis directions.

[0041] The processing apparatus 100 in this embodiment is an imprint apparatus. For example, the processing apparatus 100 is a nanoimprint apparatus for forming structures such as electrodes with nanoscale dimensions. Here, using Figure 2 The operation flow when the processing device 100 is used in the printing device is explained. Figure 2 This is a diagram showing a part of the operation flow when the processing apparatus 100 according to the first embodiment is used in an imprinting apparatus.

[0042] When the processing device 100 is an imprinting device, such as Figure 2As shown, the first component P1 is an imprinting mold (die) with a concave-convex structure, and the second component P2 is the workpiece to be imprinted. The second component P2 is, for example, a substrate 101 such as a silicon substrate (wafer) and a resin layer 102 disposed on the substrate 101.

[0043] like Figure 2 As shown in (a), a first component P1 is placed on the head 5, and a second component P2 is placed on the stage 6. When the second component P2 is placed on the stage 6, for example, a substrate 101 is placed on the stage 6, and then a resin material is coated on the substrate 101 to form a resin layer 102.

[0044] Next, the horizontal positions of the first component P1 and the second component P2 are corrected using the positioning device 10, and then... Figure 2 As shown in (b), the head 5 holding the first member P1 is moved downward, and the impression mold serving as the first member P1 is pressed onto the resin layer 102 of the second member P2. Specifically, the protrusion of the impression mold is pressed against the resin layer 102 of the second member P2.

[0045] Then, the resin layer 102 is cured while the first component P1 is pressed onto the second component P2. In this case, if the resin material constituting the resin layer 102 is a thermosetting resin, the resin layer 102 is cured by heating. On the other hand, if the resin material constituting the resin layer 102 is a photocurable resin, the resin layer 102 is cured by irradiation with ultraviolet light or the like.

[0046] Next, as Figure 2 As shown in (c), the head 5, which holds the first member P1, is moved upward, causing the impression mold, which is the first member P1, to separate from the second member P2. As a result, an opening corresponding to the protrusion of the impression mold is formed in the resin layer 102.

[0047] Furthermore, the curing of the resin layer 102 is not limited to the case where the first component P1 is imprinted onto the second component P2. The resin layer 102 can also be cured after the head 5 holding the first component P1 is moved upward and the imprinting mold serving as the first component P1 is separated from the second component P2.

[0048] Although not illustrated, a plating film is subsequently formed by electroless plating to fill the openings of the resin layer 102. After removing the resin layer 102 as a protective layer, a substrate with protruding plating electrodes formed on the substrate 101 can be obtained. Furthermore, in this case, to form the plating film, a base electrode, such as a seed layer, is pre-formed in the substrate 101 at a location corresponding to the opening of the resin layer 102. The plating electrodes thus formed can be used as bumps (e.g., microbumps). For example, the substrate with bumps (plated electrodes) is bump-bonded to chip components such as semiconductor chips. This results in an electronic component where the substrate and chip components are bump-bonded.

[0049] Furthermore, when the substrate 101 of the second component P2 is a wafer or the like, which is larger than the first component P1, the process can be repeated under the same conditions at multiple locations on the wafer. Figure 2 The processes (a) to (c).

[0050] The following uses Figure 3 The detailed structure of the positioning device 10 in the processing apparatus 100 according to this embodiment will be described. Figure 3 A side view of the positioning device 10 according to the first embodiment is shown. Furthermore, in the following description, the shooting direction of the camera 1 (the optical axis direction of the lens 2) is the Y direction, the vertical direction is the Z direction (first direction), and the direction perpendicular to both the Y and Z directions is the X direction.

[0051] like Figure 3 As shown, the positioning device 10 according to the first embodiment includes a camera 1, a lens 2, a prism 3, a prism holding part 4, a head 5, a platform 6, a monitor 7, and a computing device 8.

[0052] Camera 1 captures images of the first component P1 held on head 5 and the second component P2 held on stage 6 via lens 2 and prism 3 (details to follow). Camera 1 outputs the captured camera image A to computing device 8, and computing device 8 outputs image A and computing results to monitor 7.

[0053] Lens 2 is mounted with its optical axis aligned with the shooting direction of camera 1. It is desirable that lens 2 be a telecentric optical system where even slight shifts in the focal position result in minimal changes in position, but this is not a limitation if high precision is required in transporting the workpiece towards the focal position.

[0054] Prism 3 is positioned on the optical axis of lens 2 (in the shooting direction of camera 1). A first reflecting surface 31 and a second reflecting surface 32 are formed in prism 3, separated by boundary line 33. The angle between the first reflecting surface 31 and the second reflecting surface 32 is, for example, 90°. Furthermore, the first reflecting surface 31 is formed at a 45° angle relative to the Z-axis, causing light incident from stage 5 to be reflected towards the optical axis of lens 2. The second reflecting surface 32 is also formed at a 45° angle relative to the Z-axis, causing light incident from stage 6 to be reflected towards the optical axis of lens 2. However, the angle between the first reflecting surface 31 and the second reflecting surface 32 may not be the angle exemplified above; any angle is permissible as long as the following structure can be achieved.

[0055] For example, the lens 2 and camera 1 can be rotated by an angle φ in the direction of rotation about the X-axis with the boundary line 33 of the prism 3 as the center, so that the side of the camera 1 faces the +Z direction. In this case, the prism 3 only needs to be rotated by an angle φ / 2 about the same X-axis with the boundary line 33 as the center. In this way, the distance between the first member P1 and the second member P2 can be shortened. Based on the ability to suppress the "blurring" when shooting the boundary line 33 as described later and obtain a clearer image, the amount of movement of the head 5 after positioning is reduced. Therefore, even if the movement axis of the head 5 tilts due to thermal expansion, for example, this effect in positioning can be suppressed.

[0056] The prism holding part 4 holds the prism 3. In this embodiment, the prism 3 is bonded to the prism holding part 4 by an adhesive, thereby holding the prism 3 by the prism holding part 4. However, the prism 3 can also be held by other holding methods (e.g., the prism holding part 4 holding the prism 3).

[0057] like Figure 3 As shown, the lens 2 and the prism holding part 4 are held in the optical unit base 9. Furthermore, a position adjustment mechanism such as a focus adjustment mechanism can be placed between the lens 2 and the optical unit base 9. Additionally, a fine-tuning mechanism for the position can be placed between the prism holding part 4 and the optical unit base 9. In this embodiment, the lens 2 and the prism holding part 4 are fixed by the same optical unit base 9, but it is also possible to provide separate optical unit bases 9 for the lens 2 and the prism holding part 4.

[0058] As described above, the first component P1 is held in the head 5, and the second component P2 is held in the stage 6. For example, in the case where the processing apparatus 100 is an imprinting apparatus, the first component P1 is an imprinting mold, and the second component P2 is a workpiece including a substrate. The first component P1 and the second component P2 are held in the head 5 and the stage 6, respectively, after being picked up by the supply head (not shown).

[0059] Here, the first optical path from the camera 1 through the first reflecting surface 31 of the lens 2 and the prism 3 to the first component P1 on the head 5 has the same optical path length as the second optical path from the camera 1 through the second reflecting surface 32 of the lens 2 and the prism 3 to the second component P2 on the stage 6.

[0060] Monitor 7 displays camera image A captured by camera 1. Camera image A includes a first image A1, which is the image from the side of the head 5, and a second image A2, which is the image from the side of the platform 6. (As...) Figure 3 As shown, the first image A1 and the second image A2 are arranged vertically, with boundary A3 sandwiched between them. Boundary A3 is the image corresponding to the boundary line 33 of prism 3. Since prism 3 is configured such that the boundary line 33 is aligned with the optical axis of lens 2, boundary A3 is located at the center of camera image A.

[0061] The computing device 8 calculates the relative positions of the first component P1 and the second component P2 based on the camera image A output from the camera 1, and performs the following positioning process.

[0062] Furthermore, the optical system (hereinafter sometimes simply referred to as the "optical system"), including camera 1, lens 2, prism 3, prism holding part 4, etc., is movable in the X and Y directions. In addition, the head 5 and the stage 6 are movable in the X, Y, and rotational directions centered on the Z axis.

[0063] A first component P1 and a second component P2 (hereinafter, sometimes referred to as "workpieces") are positioned at the focal point of lens 2. A prism 3 is positioned between lens 2 and the workpieces on the optical axis, thus blurring the boundary A3 of the obtained image. When the position of prism 3 is close to lens 2, the "blurring" of the boundary A3 of the camera image A increases, thereby reducing the accuracy of boundary A3 position recognition. In this system, which calculates the relative positions of the first component P1 and the second component P2 based on boundary A3 (described later), the reduced position accuracy of boundary A3 leads to a decrease in the positioning accuracy of the first component P1 and the second component P2. Therefore, in this disclosure, prism 3 is positioned very close to the first component P1 and the second component P2 in the first and second optical paths. Specifically, prism 3 is configured such that the distance between prism 3 and the first component P1 and the second component P2 is shorter than the distance between prism 3 and lens 2. In this way, the "blurring" of boundary A3 can be reduced. Furthermore, the relative positions of the first component P1 and the second component P2 can be reduced. Moreover, by bringing the prism 3 closer to the workpiece, even if the prism 3 experiences a slight angular shift due to thermal strain, the influence of the workpiece's positional shift caused by optical axis jitter can be minimized. Therefore, the amount of movement of each corrected component can ultimately be reduced, thus reducing the positioning correction error.

[0064] (Regarding the operation of the positioning device)

[0065] Figure 4 This is a flowchart illustrating the operation of the positioning device 10 according to the first embodiment.

[0066] First, the workpiece is placed in this positioning device (step S1). Specifically, the first component P1 is held on the head 5 by means of the supply head (not shown in the figure), and the second component P2 is placed on the stage 6. At this time, position alignment points are respectively attached to the surfaces of the first component P1 and the second component P2. The first component P1 and the second component P2 are held and placed on the head 5 and the stage 6 such that these position alignment points are opposite to each other.

[0067] Camera 1 captures images of the first component P1 and the second component P2 (step S2). Specifically, camera 1, lens 2, prism 3, and prism holding unit 4 are moved, and prism 3 is positioned between the first component P1 (head 5) and the second component P2 (stage 6). Camera 1 then outputs the camera image A captured by camera 1 of the first component P1 and the second component P2 to the processing unit 8. Furthermore, camera 1 can capture the first image A1 and the second image A2 separately, or simultaneously. For example, when capturing the first image A1 and the second image A2 at once, one of the images may sometimes appear white or black. When the shooting conditions, such as lighting brightness, shutter speed, camera gain, and the ratio of coaxial light to oblique light, differ between the first image A1 and the second image A2, camera 1 can also capture the first image A1 and the second image A2 in two separate shots.

[0068] The computing device 8, based on the first image A1 and the second image A2 included in the camera image A, calculates the relative positions of the first component P1 and the second component P2, and calculates the position correction amount of the first component P1 and the second component P2 (step S3). Specifically, it performs... Figure 5 The handling (details will be described later).

[0069] The arithmetic unit 8 determines whether position correction is needed based on the calculated position correction amount (step S4). If the position correction amount is greater than or equal to a given value, the arithmetic unit 8 determines that position correction is needed (yes in step S4), and corrects (moves) the positions of the first member P1 and the second member P2 based on the position correction amount calculated in step S3 (step S5). After that, it returns to step S2.

[0070] On the other hand, if the position correction amount is below a given value, the arithmetic device 8 determines that no position correction is needed (in step S4), and performs an alignment operation to align the first member P1 and the second member P2 (in step S6). Specifically, the head 5 is moved toward the stage 6 in the Z direction to align the first member P1 and the second member P2.

[0071] (Regarding the calculation of position correction)

[0072] Figure 5 This is a flowchart illustrating the calculation process of the position correction amount involved in the first embodiment. Figure 5 This is a flowchart of the process performed by the arithmetic device 8 in step S3 to calculate the position correction amount.

[0073] First, when the processing unit 8 acquires the camera image A (step S11), it detects the first feature point M1 of the first component P1 from the first image A1 (step S12). Then, the processing unit 8 detects the second feature point M2 of the second component P2 from the second image A2 (step S13). These feature points are, for example, characteristic parts (corners, etc.) of the corresponding component, markings attached to the surface of the component, etc.

[0074] exist Figure 6 In the example, since the feature point of the first component P1 is set as a corner, the arithmetic device 8 detects the intersection of the two straight lines constituting the corner as the first feature point M1. Furthermore, since the feature point of the second component P2 is set as a circular mark, the arithmetic device 8 detects the center of the circle as the second feature point M2.

[0075] In this embodiment, the arithmetic device 8 detects the center point of the two first feature points M1 as the reference position N1 of the first component P1, and detects the center point of the two second feature points M2 as the reference position N2 of the second component P2. Further, the arithmetic device 8 calculates the relative angle between a first angular reference line (connecting the two first feature points M1) and a second angular reference line (connecting the two second feature points M2). Based on the reference positions N1 and N2 and the relative angle between the first and second angular reference lines, the arithmetic device 8 calculates the position correction amount (step S14).

[0076] Figure 7 This is a diagram used to explain the calculation process of the position correction amount involved in the first embodiment. Figure 7 The camera images A in (a) to (c) show the first component P1 and the second component P2, respectively.

[0077] like Figure 3 As shown, in camera image A, image A1 and image A2 are displayed vertically, separated by a boundary A3 extending along the X direction. Considering the relationship between each image and the actual coordinate system, in image A1 and image A2, the X direction is the same, and the Y direction is reversed. That is, by folding image A2 back along the Y direction with boundary A3 as a reference, the coordinates of image A2 and image A2 can be made consistent with the actual coordinate system. Furthermore, in...Figure 7 In (a) to (c), P2' shows the position of the second component P2 when the second image A2 is folded back along the Y direction with reference to boundary A3.

[0078] For example, in Figure 7 In (a), since the first component P1 and the second component P2 are aligned when the second image A2 is folded back along the Y direction with the boundary A3 as the reference, the position correction amount is 0 (no correction).

[0079] In addition, Figure 7 In (b), since the first component P1 is located closer to the +Y direction than the second component P2 when the second image A2 is folded back along the Y direction with the boundary A3 as the reference, the position correction amount is calculated so that the first component P1 moves in the -Y direction.

[0080] In addition, Figure 7 In (c), since the first component P1 is located further in the -Y direction than the second component P2 when the second image A2 is folded back along the Y direction with the boundary A3 as the reference, the position correction amount is calculated so that the first component P1 moves in the +Y direction.

[0081] After calculating the position correction amount as described above, proceed with the steps following step S4.

[0082] As explained above, when the prism 3 is positioned between the head 5 and the stage 6, the first reflecting surface 31 reflects light incident from the head 5 side to the camera 1 side, and the second reflecting surface 32 reflects light incident from the stage 6 side to the camera 1 side. The camera 1 captures a camera image A based on the light incident from the prism 3, including a first image A1 (image from the head 5 side) and a second image A2 (image from the stage 6 side). The processing unit 8 determines the positions of the first component P1 and the second component P2 based on the camera image A. Therefore, since the positions of the first component P1 and the second component P2 can be identified using only one prism and one camera, the number of components constituting the optical system can be reduced. Consequently, the reduction in positioning accuracy can be suppressed because the thermal expansion of the components constituting the optical system can be prevented.

[0083] Furthermore, in the first embodiment, there exists a situation where the size of the first component P1 (or the second component P2) is too large, and the first component P1 (or the second component P2) cannot fully enter the first image A1 (or the second image A2). In this case, the optical system such as the camera 1 can be appropriately moved in the X and Y directions to generate multiple first images A1 (or multiple second images A2), and the computing device 8 can detect the first feature point M1 (or the second feature point M2) based on these images.

[0084] (Second Implementation)

[0085] Figure 8 This is a flowchart illustrating the boundary position correction process involved in the second embodiment. Figure 8 The action shown is in progress Figure 4 The operation is performed by the computing device 8 beforehand. In the first embodiment, the upward direction of the camera 1 is set to be aligned with the Z direction, and the boundary line 33 of the two reflecting surfaces (the first reflecting surface 31 and the second reflecting surface 32) of the prism 3 is configured to be at the center of the optical axis of the lens 2 and parallel to the X-axis. Therefore, the boundary A3 (the boundary line 33 of the prism 3) in the camera image A is displayed as being centered in the vertical direction of the camera image A and aligned with the X direction. (Refer to...) Figure 6 (See the diagrams). However, boundary A3 sometimes deflects due to thermal expansion of components constituting the optical system (camera 1, lens 2, etc.). Figure 6 The position (hereinafter also referred to as the "reference position of boundary A3") is displayed with an offset. When using the offset boundary A3 as a reference... Figure 4 as well as Figure 5 During processing, the positioning (calculation of correction amount) of the first component P1 and the second component P2 cannot be performed correctly. Therefore, in the second embodiment, by executing... Figure 8 The boundary position correction process is used to correct the offset of boundary A3. Furthermore, in Figure 9 In (a) to (c), the boundary before position correction is denoted as A3, and the boundary after position correction is denoted as A3'.

[0086] First, the processing unit 8 detects boundary A3' from the camera image A (step S21). For example, the processing unit 8 detects the lower edge of the first image A1 and the upper edge of the second image A2, and sets the middle position of these edges as boundary A3'. In this case, the processing unit 8 can also capture the first image A1 and the second image A2 separately, and detect the lower edge of the first image A1 and the upper edge of the second image A2. Alternatively, in the camera image A, the processing unit 8 can also detect the upper and lower edges of the region (the blurred region) of the boundary line 33 of the prism 3 from the background image of the workpiece, and set the middle position of this region as boundary A3'.

[0087] The processing unit 8 determines whether boundary A3 needs to be corrected (step S22). Specifically, if the reference position of boundary A3' is inconsistent with that of boundary A3 in the camera image A, the processing unit 8 determines that boundary A3 needs to be corrected.

[0088] If the processing device 8 determines that no correction is needed for boundary A3 (No in step S22), the processing ends. If the processing device 8 determines that correction is needed for boundary A3 (Yes in step S22), the boundary position is corrected (step S23).

[0089] exist Figure 9 In example (a), since the reference position of boundary A3' is consistent with that of boundary A3 in camera image A, it is determined that no position correction of boundary A3 is needed (No in step S22). In this case, the arithmetic unit 8 does not perform position correction processing for boundary A3 and executes... Figure 2 The processing.

[0090] exist Figure 9 In example (b), boundary A3' is offset in the +Y direction compared to the reference position of boundary A3. For example, because the optical axis of lens 2 is offset in the Z direction, it becomes Figure 9 (b) Such a camera image A1.

[0091] exist Figure 9 In example (c), boundary A3' is offset in the rotational direction relative to the reference position of boundary A3, with the center of camera image A1 as the reference. For example, since the optical axis of lens 2 rotates around the Y-axis, it becomes Figure 9 (c) Such a camera image A1.

[0092] exist Figure 9 In steps (b) and (c), since the reference position of boundary A3' is inconsistent with that of boundary A3 in camera image A, the arithmetic unit 8 determines that the position of boundary A3 needs to be corrected (step S22). Furthermore, the arithmetic unit 8 performs a position correction process that sets the position of boundary A3' to the position of boundary A3 displayed in camera image A. Therefore, since the position correction amount is calculated in step S14 based on the position of boundary A3' (e.g., by folding the second image A2 back along the Y direction based on boundary A3 to make the coordinates of the first image A2 and the second image A2 consistent with the actual coordinate system), even if the boundary A3 shifts due to thermal expansion of the components constituting the optical system (camera 1 and lens 2), high-precision position correction of the workpiece can be performed.

[0093] Furthermore, the position of boundary A3 significantly affects the calculation of the position correction amount in step S14. Additionally, when aligning multiple first components P1 with second components P2, there is concern that the position of boundary A3 might change due to thermal expansion of the components constituting the optical system during multiple alignment operations. Therefore, Figure 8 The processing is preferably performed according to each given number of alignment actions and each given period. In this case, the following steps are performed:Figure 8 The frequency of processing depends on factors such as the temperature change of the positioning device, the ease with which the position of boundary A3 may shift, and the manufacturing speed of the finished product. Figure 8 The desired processing method is one that can detect the boundary A3' with high precision, but in situations requiring frequent corrections, combining it with a simpler method is more practical. Additionally, it is desirable to perform this process before alignment, such as when restarting an action after a long pause. Figure 8 The action.

[0094] (Third implementation)

[0095] Figure 10 A side view of the positioning device according to the third embodiment is shown. Figure 10 positioning device and Figure 1 It is constructed almost identically, but also has coaxial illumination 11 and oblique illumination 12 (first illumination).

[0096] Coaxial illumination 11 illuminates light along the Y direction towards prism 3, thereby illuminating light from the Z direction towards the first member P1 and the second member P2. Oblique illumination 12 illuminates light obliquely towards the first member P1 and the second member P2. Through coaxial illumination 11 and oblique illumination 12, a clearer camera image A can be captured.

[0097] Here, prism 3 has a third reflecting surface 34 between the first reflecting surface 31 and the second reflecting surface 32. The third reflecting surface 34 is a plane with a given width in the Z direction and extending in the X direction, replacing the boundary line 33 formed in prism 3. By forming this third reflecting surface 34 in prism 3, the boundary A3 is more clearly displayed in the camera image A. For example, when no object is displayed in the first image A1 and the second image A2, the coaxial illumination 11 is turned on, and the camera 1 takes a picture. Thus, as Figure 10 As shown, the first image A1 and the second image A2 are displayed as black images, with the boundary A3 between them shown as a white line. By setting this white line as boundary A3, more reliable processing can be achieved. Figure 8 The processing.

[0098] Furthermore, the width of the third reflecting surface 34 in the Z direction is preferably such that the light reflected by the third reflecting surface 34 is more than 1 pixel in the camera image A1, but less than 10% in the overall image. Alternatively, the width of the third reflecting surface 34 in the Z direction can be less than 1 pixel as long as the boundary A3 can be detected.

[0099] (One of the variations)

[0100] Figure 11 This is a diagram illustrating another example of the prism involved in the third embodiment. Specifically, Figure 11(a) shows a side view of prism 3. Figure 11 (b) shows a diagram of prism 3 viewed from the side of lens 2.

[0101] In this modified example, a mark 35 (first mark) is added to the prism 3. Specifically, two marks 35 are added to the first reflecting surface 31 and the second reflecting surface 32 respectively. Each mark 35 is arranged at equal intervals in the Z direction with the boundary line 33 as the reference.

[0102] Figure 11 (c) is camera image A taken when the prism 3 is not displayed in the first image A1 and the second image A2. Figure 11 As shown in (c), since the mark 35 is displayed in the camera image A, even if it is difficult to detect the boundary A3, it is possible to infer that the boundary A3 exists in the center of the two marks 35 arranged in the vertical direction of the figure, and thus the boundary A3 can be detected.

[0103] Furthermore, the position, type, and number of markers 35 are not limited to Figure 11 Examples can be selected appropriately. Additionally, marker 35 can be a low-reflectivity component displayed in camera image A with low brightness, or a high-reflectivity component displayed in camera image A with high brightness.

[0104] (Example 2)

[0105] Figure 12A A side view showing another example of the positioning device according to the third embodiment.

[0106] In this modified example, a reflector 36 is disposed on the stage 6 side to detect the boundary A3 (boundary line 33) of the camera image A. For example, when the camera 1 captures the camera image A without any object displayed in the first image A1 and the second image A2, a black image is displayed in the first image A1 because there is no object on the head 5 side. In contrast, since the reflector 36 is disposed on the stage 6 side, a white image is displayed in the second image. Since it can be deduced that the boundary between the black image (first image A1) and the white image (second image A2) is the boundary A3 corresponding to the boundary line 33, the boundary A3 can be detected.

[0107] At this time, as Figure 12A As shown, it is desirable to make the distance L1 from the position of the edge line (boundary line 33) of the prism 3 to the reflecting surface of the reflector 36, and the distance from the reflecting surface of the reflector 36 to the imaging surface of the workpiece as the object of identification (in... Figure 12AThe distance L2 from the surface of the second component P2 is approximately the same. That is, the reflector 36 can be positioned at the midpoint between the boundary line 33 and the location of the object to be identified, where the boundary line 33 is the boundary between the first and second reflecting surfaces of the prism 3. Thus, the focus of the obtained image is aligned with the edge line (boundary line 33) of the prism 3, enabling clearer detection of the boundary A3. Furthermore, regarding the consistency between distances L1 and L2, it is desirable to achieve this within the depth of field of the lens 2.

[0108] Alternatively, a second light source can be provided to illuminate the prism 3 instead of the reflector 36. Alternatively, the reflector 36 can be positioned on the side of the head 5.

[0109] Alternatively, illumination (second light source) can be provided in the vertical direction of the prism 3. In this case, as described above, the processing unit 8 detects the lower edge of the first image A1 and the upper edge of the second image A2, and sets the middle position of these edges as the boundary A3. Furthermore, the processing unit 8 can also capture the first image A1 and the second image A2 separately, detect the lower edge of the first image A1 and the upper edge of the second image A2, and set the middle position of these edges as the boundary A3.

[0110] Alternatively, the reflector 36 may not be positioned on the stage side of the prism 3. Figure 12A (the lower side) and positioned on the head side of prism 3 ( Figure 12A (the upper side), such as Figure 12B As shown, it can also be configured on both the stage 6 side and the head 5 side of the prism 3. That is to say, the reflector 36 only needs to be configured on at least one of the head side or the stage side of the prism 3.

[0111] exist Figure 12BIn this configuration, reflectors 36 are positioned vertically above and below the prism 3. In this case, the reflectors 36 can be tilted at a very small tilt angle θ. This allows for clear detection of the boundary line A3. Furthermore, by adjusting the tilt angle θ, the width of the detected boundary line A3 can also be adjusted. In this case, it is desirable for distances L1 and L2 to be equal. Moreover, the tilt direction of the reflectors 36 (the angular direction of the tilt angle θ) can be such that the portion of the reflector 36 on the prism 3 side (opposite to the camera) is closer to the prism 3 side. That is, the reflector 36 can be tilted away from the prism 3 towards the portion of the reflector 36 on the camera 1 side. Additionally, the tilt angle θ of the reflector 36 can be approximately 0.05 to 0.1 degrees. By slightly tilting the reflector 36 in this way, the boundary line A3 can be detected more clearly. However, the tilt direction and tilt angle of the reflector 36 depend on factors such as the field of view size and are not limited to these parameters. Furthermore, when the reflector 36 is positioned only on either the upper or lower side, for example, when the light intensity of the coaxial illumination increases, the boundary line A3 is detected in a form that expands on the side of the coaxial illumination. However, as... Figure 12B In this way, by arranging reflectors 36 on both the upper and lower sides, even if the amount of light from the coaxial illumination changes, only the detected linewidth changes, and therefore the position of the final calculated boundary line A3 (the center line of the detected line) remains unchanged. Therefore, it is less susceptible to interference caused by illumination, enabling high-precision detection.

[0112] (Example 3)

[0113] Figure 13 A side view showing another example of the positioning device according to the third embodiment.

[0114] In this modified example, a coaxial confirmation fixture 37 (first coaxial confirmation fixture) is provided for detecting the boundary A3 (boundary line 33) of the camera image A. The coaxial confirmation fixture 37 is configured to clamp the prism 3 in the Z direction. In addition, the coaxial confirmation fixture 37 has a mark 371 (second mark) located at the same position in both the X and Y directions.

[0115] like Figure 13 Thus, when camera 1 takes a picture while the coaxial confirmation fixture 37 is configured, two marks 371 are displayed in camera image A. Since the two marks 371 are configured at the same position in the X and Y directions in the coaxial confirmation fixture 37, it can be deduced that there is a boundary A3 at the center of each other in camera image A, and the boundary A3 can be detected.

[0116] (Example 4)

[0117] Figure 14A side view showing another example of the positioning device according to the third embodiment.

[0118] In this modified example, a coaxial confirmation fixture 38 (second coaxial confirmation fixture) is provided for detecting the boundary A3 (boundary line 33) of the camera image A. The coaxial confirmation fixture 38 is disposed on the head 5 side. In addition, the coaxial confirmation fixture 38 is provided with two marks 381 (third marks) arranged along the X direction.

[0119] To detect the boundary A3 (boundary line 33) of camera image A, firstly, a camera image A displaying boundary A3 and two markers 381 is pre-captured, thus obtaining the initial positions of boundary A3 and the two markers 381. By comparing the initial positions of the two markers 381 with the positions of the markers 381 captured in subsequent images, the position of boundary A3 can be corrected. Specifically, the relative distance between boundary A3 and the initial positions of the two markers 381 is pre-calculated (in... Figure 15 The distance is Lm. It is presumed that a boundary A3 exists at a position offset by a distance Lm from the line connecting the two markers 381 that will be photographed later, along the vertical direction of that line. Furthermore, in Figure 15 In (a) to (c), the boundary before position correction is denoted as A3, and the boundary after position correction is denoted as A3'.

[0120] For example, when the optical axis of lens 2 is shifted in the +X direction, the two marks 381 are shown in the first image A1 at the position shifted in the +X direction (see reference). Figure 15 (a) In this case, it is presumed that there exists a boundary A3' at a distance Lm offset along the -Y direction of the straight line connecting the two markers 381.

[0121] Furthermore, when the optical axis of lens 2 is shifted in the +Z direction, the two marks 381 are shown in the first image A1 at the position shifted in the +Z direction (see reference). Figure 15 (b)). In this case, it is presumed that there exists a boundary A3' at a distance Lm offset along the -Z direction of the line connecting the two markers 381.

[0122] Furthermore, when the optical axis of lens 2 is shifted in the rotational direction with the Y-axis as the center, the two marks 381 are shown in the first image A1 at a position shifted in the rotational direction with the center of the attached figure as the center (see reference). Figure 15 (c)). In this case, it is presumed that there exists a boundary A3' at a position offset by a distance Lm in the vertical direction from the straight line connecting the two markers 381.

[0123] Through the above processing, boundary A3 can be detected.

[0124] Furthermore, even when the prism 3 itself is rotated and deformed, the detection accuracy of the boundary A3 can be improved by combining this modified example with the boundary A3 detection methods in other embodiments (and other modified examples).

[0125] (Example 5)

[0126] Figure 16 A side view showing another example of the positioning device according to the third embodiment.

[0127] In this variant, in order to detect the boundary A3 (boundary line 33) of the camera image A, a glass clamp 39 is held in the head 5 (see reference). Figure 16 (a)).

[0128] To detect the boundary A3 (boundary line 33) of camera image A, firstly, the first image A1 is captured while the head 5 is holding the glass clamp 39. Then, the head 5 is moved along the Z direction, with the glass clamp 39 placed on the stage 6 (see reference). Figure 16 Under (b)), a second image A2 is captured. Since it can be inferred that a boundary A3 exists at the center of the glass clamp 39 shown in the first image A1 and the second image A2 at this time, the boundary A3 can be detected.

[0129] (Other implementation methods)

[0130] As described above, the embodiments have been illustrated as examples of the technology disclosed in this application. However, the technology in this disclosure is not limited thereto, and can be appropriately used in embodiments with modifications, substitutions, additions, omissions, etc.

[0131] Furthermore, in the above embodiments, during the alignment operation and detection of boundary A3, the head 5 sometimes moves toward the stage 6 in the Z direction. In this case, to prevent the head 5 from colliding with the prism 3, the optical system (camera 1, lens 2, prism 3, prism holding part 4, etc.) moves (forward and backward) in the Y or X direction. At this time, the entire optical system can be moved, or only the prism 3 and the prism holding part 4 can be moved backward.

[0132] In addition, multiple optical systems may be provided in each of the above embodiments. Figure 17 (a) is a top view of the positioning device. Figure 17 (b) is a side view of the positioning device. For example... Figure 17As shown, the device includes two cameras, two lenses, two prisms, two prism holders, and two prism holding units. The upper camera 1 captures images of the first component P1 and the second component P2 via the reflecting prism 13, the semi-reflecting mirror 14, the reflecting prism 15, and the prism 3. The lower camera 1 captures images of the first component P1 and the second component P2 via the semi-reflecting mirror 14, the reflecting prism 15, and the prism 3. In this structure, each camera 1 captures camera images A at different positions in the X direction. Therefore, multiple parts of the workpiece can be captured in a single shot, thus improving manufacturing efficiency.

[0133] Furthermore, in the above embodiments, the processing apparatus 100 equipped with the positioning device 10 is an embossing apparatus, but it is not limited to this. For example, the processing apparatus 100 can also be applied to various devices and equipment that require the alignment of components with each other, such as processing apparatuses and manufacturing apparatuses, other than embossing apparatuses.

[0134] Furthermore, in the above embodiments, the processing apparatus 100, which serves as an imprinting device, is used to fabricate bumps on a substrate, but it is not limited to this. The processing apparatus 100, which serves as an imprinting device, can also be used to fabricate redistribution layers, and can also be used to fabricate optical components such as light guide plates and anti-reflective films, optical disks, microlens arrays, and optical waveguides, as well as solar cells, fuel cell components, biological devices, or semiconductor devices in liquid crystal display devices, etc.

[0135] Furthermore, this disclosure also includes other modifications conceived by those skilled in the art to the above embodiments, and methods of arbitrarily combining structural elements and functions of each embodiment without departing from the spirit of this disclosure. Additionally, this disclosure also includes methods of arbitrarily combining two or more technical solutions from among the multiple technical solutions described in the scope of the claims made at the time of filing this application, provided that there is no technical contradiction. For example, when a technical solution described in the scope of the claims made at the time of filing this application is designated as a multiple reference or multiple references to multiple terms, so that all superior technical solutions are referenced within a technically consistent scope, the combination of all technical solutions included in such multiple references or multiple references is also included in this disclosure.

[0136] Industrial availability

[0137] The processing apparatus and processing method disclosed herein can be used when positioning components relative to each other.

[0138] Symbol Explanation

[0139] 1. Camera

[0140] 2 lenses

[0141] 3 prisms

[0142] 4. Prism Holding Section

[0143] 5 heads

[0144] 6-Platform

[0145] 8. Computing device

[0146] 10 Positioning Device

[0147] 11. Coaxial lighting (first lighting)

[0148] 12 Oblique lighting (first lighting)

[0149] 31 First reflecting surface

[0150] 32 Second reflecting surface

[0151] 33 Boundary Line

[0152] 34 Third reflecting surface

[0153] 35 marks (mark 1)

[0154] 36 Reflectors

[0155] 37 Coaxial Confirmation Fixture (First Coaxial Confirmation Fixture)

[0156] 371 Marker (2nd Marker)

[0157] 38. Coaxial verification fixture (2nd coaxial verification fixture)

[0158] 381 (3rd marker)

[0159] 100 processing device

[0160] A camera image

[0161] Image A1, Page 1

[0162] Image A2, 2nd image

[0163] A Boundary Line

[0164] P1 Component 1

[0165] P2, the second component.

Claims

1. A processing apparatus comprising: head; Platform; The positioning device positions the first component and the second component when aligning the first component held in the head with the second component held in the platform. A prism having a first reflecting surface and a second reflecting surface; Camera; and Computing device, With the prism positioned between the head and the stage, the first reflecting surface reflects light incident from the head side to the camera side, and the second reflecting surface reflects light incident from the stage side to the camera side. The camera captures images based on light incident from the prism, and these images include a first image as an image from the head side and a second image as an image from the platform side. The computing device determines the positions of the first component and the second component based on the camera image.

2. The processing apparatus according to claim 1, wherein, The processing apparatus further comprises: a first light source that illuminates at least one of the first member held in the head and the second member held in the stage.

3. The processing apparatus according to claim 1, wherein, The processing device further includes a lens disposed between the camera and the prism. The prism is configured such that the distance between the prism and the first and second components is shorter than the distance between the prism and the lens.

4. The processing apparatus according to any one of claims 1 to 3, wherein, The processing device includes multiple cameras. The multiple cameras are configured to capture images of each other from different positions within the head and the platform.

5. The processing apparatus according to any one of claims 1 to 3, wherein, In the prism, a third reflecting surface with a given width is formed between the first reflecting surface and the second reflecting surface. In the camera image, a boundary corresponding to the third reflective surface is displayed between the first image and the second image. The computing device uses the boundary of the camera image as a reference to determine the positions of the first component and the second component.

6. The processing apparatus according to any one of claims 1 to 3, wherein, A reflector plate for reflecting light toward the prism side is disposed on at least one of the head side or the stage side of the prism. The reflector is positioned at approximately the same distance from the boundary line and the location of the object to be identified, wherein the boundary line is the boundary between the first reflecting surface and the second reflecting surface of the prism.

7. The processing apparatus according to any one of claims 1 to 3, wherein, Reflective plates that reflect light toward the prism are disposed on both the head side and the stage side of the prism. The reflector is positioned at approximately the same distance from the boundary line and the location of the object to be identified, wherein the boundary line is the boundary between the first reflecting surface and the second reflecting surface of the prism. The portion of the reflector toward the camera is tilted away from the prism.

8. The processing apparatus according to any one of claims 1 to 3, wherein, The processing device is an embossing device.

9. A processing method, comprising: The positioning process involves positioning the first component and the second component while aligning the first component with the second component. and The process of aligning the first component with the second component. The positioning process includes: The step of holding the first component with the head; The step of holding the second component on the platform; The step of positioning the prism between the head and the stage; The steps are as follows: the first reflecting surface of the prism reflects light incident from the head side to the camera side, and the second reflecting surface of the prism reflects light incident from the stage side to the camera side. The step of the camera capturing a camera image based on light incident from the prism, the camera image including a first image as an image of the head side and a second image as an image of the platform side; and The step of the computing device determining the positions of the first component and the second component based on the camera image.

10. The processing method according to claim 9, wherein, The computing device determines the positions of the first component and the second component based on the camera images obtained by capturing the first image and the second image at the same or different time intervals.

11. The processing method according to claim 9, wherein, The camera captures images from multiple cameras located at different positions. The computing device determines the positions of the first component and the second component based on multiple camera images.

12. The processing method according to any one of claims 9 to 11, wherein, The processing method also includes: The step of the computing device calculating the position correction amount of the first component and the second component based on the obtained positions of the first component and the second component; The step of moving the head and the platform based on the calculated position correction amount; The step of the camera taking another image from the camera; The step of the computing device determining the positions of the first component and the second component again based on the camera image, and calculating the position correction amount of the first component and the second component again; and The step of aligning the first component with the second component is performed when the position correction amount is again within a given value.

13. The processing method according to any one of claims 9 to 11, wherein, In the prism, a boundary line is formed between the first reflecting surface and the second reflecting surface. In the camera image, a boundary corresponding to the boundary line is displayed between the first image and the second image. The computing device uses the boundary of the camera image as a reference to determine the positions of the first component and the second component.

14. The processing method according to claim 13, wherein, The boundary line is formed as a third reflecting surface with a given width between the first reflecting surface and the second reflecting surface.

15. The processing method according to claim 13, wherein, The prism has a first mark attached to the corresponding positions of the first reflecting surface and the second reflecting surface, respectively. The computing device determines the boundary based on the first marker displayed in the camera image.

16. The processing method according to claim 13, wherein, The processing method also includes: The step of illuminating the prism with light by means of at least one of the head side and the stage side of the prism.

17. The processing method according to claim 13, wherein, The processing method also includes: The step of configuring a reflector on at least one of the head side or the stage side of the prism, and reflecting incident light back to the prism through the reflector.

18. The processing method according to claim 17, wherein, The reflector is disposed on both the head side and the stage side of the prism. The portion of the reflector toward the camera is tilted away from the prism.

19. The processing method according to claim 13, wherein, The processing method also includes: The step of configuring a first coaxial confirmation fixture with two second marks to clamp the prism with the two first marks, wherein the two second marks are attached and arranged along a first direction, which is the direction in which the head moves toward the stage when the first member is aligned with the second member; and The step of the computing device determining the position of the boundary based on the camera images captured of the two second markers.

20. The processing method according to claim 13, wherein, The processing method also includes: The step of placing a second coaxial confirmation fixture with a third mark attached on either the head side or the stage side of the prism, and taking a camera image, i.e., a first camera image, representing the initial position of the third mark; After capturing the first camera image, the second coaxial confirmation fixture is positioned at the same location where the first camera image was captured, and the camera image is captured again. and The step of the computing device determining the position of the boundary by comparing the position of the third mark shown in the first camera image with the position of the third mark shown in the re-captured camera image.

21. The processing method according to claim 13, wherein, The processing method also includes: The steps of describing the head-holding clamp component; The step of the camera capturing a second camera image representing the clamp component held in the state of the head; The step of placing the clamp component on the platform; The step of the camera capturing a third camera image of the clamp component in a state held on the stage; and The step of the computing device determining the position of the boundary by comparing the positions of the clamping components shown in the second camera image and the third camera image.

22. The processing method according to any one of claims 9 to 11, wherein, The processing method is a manufacturing method for electronic components.

Images