Air purification and circulation apparatus for clean rooms

Abstract

This invention relates to the field of cleanroom technology, specifically disclosing an air purification and circulation device for cleanrooms. The purification and circulation device includes a primary filtration mechanism and a secondary filtration mechanism connected to each other. The primary filtration mechanism includes a first housing, with a vertically coiled air guide tube inside the first housing in a serpentine shape. The air guide tube includes multiple interconnected vertical and horizontal sections. Each vertical section is equipped with a coarse filter, and each horizontal section has a fine filter connected to its rear side. This application has two gas circulation paths: an "unmanned maintenance mode" and a "personnel operation mode." In the unmanned state, the system only activates the primary filtration mechanism, achieving basic circulation through the first air supply branch pipe, while shutting down the energy-intensive secondary filtration mechanism, significantly reducing the fan load and equipment operating power consumption. During personnel operation, the system automatically switches to a two-stage series mode, activating the secondary filtration mechanism for deep purification to ensure air quality.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of clean rooms, in particular to an air purification and circulation device for clean rooms. BACKGROUND

[0002] As a special space that strictly controls the concentration of pollutants such as suspended particles and microorganisms in the ambient air, clean rooms are widely used in high-tech fields such as semiconductors, biomedicine, precision manufacturing, and food processing. The core is to continuously deliver clean air to the room and discharge contaminated air through an air purification and circulation system to maintain the required high cleanliness level in the room. However, traditional clean room air purification systems often have the following shortcomings:

[0003] 1. Many systems run at the highest power and highest filtration level whether the clean room is in an unattended maintenance state or a personnel-intensive operating state. This "one-size-fits-all" operating mode results in significant energy waste, especially during non-production periods such as night or holidays, unnecessary equipment operation (such as high-efficiency filters, ultraviolet germicidal lamps, etc.) significantly increases operating costs;

[0004] 2. Traditional systems often use a single fixed filtration path, which cannot be dynamically adjusted according to the actual pollution load in the clean room (such as particulate matter and chemical volatile matter generated by personnel activity). When deep purification is required, the system may not have sufficient capacity; while in a low load state, it lacks flexibility and economy;

[0005] 3. The structure of the traditional filter is relatively simple, and the airflow organization is not reasonable, resulting in low filtration efficiency or dead angles. At the same time, the treatment capacity for complex pollutants (such as coexistence of particulate matter and chemical aerosols) is limited, making it difficult to meet the increasingly stringent requirements of modern industry for super-clean environments;

[0006] Therefore, there is an urgent need in the market for a new air purification and circulation device that can intelligently switch operating modes according to the actual working conditions of the clean room, balance high-efficiency purification and energy saving, and have perfect safety monitoring and emergency handling functions. SUMMARY

[0007] In view of the shortcomings of the prior art, the present application provides an air purification and circulation device for clean rooms, which solves the problems of single operation mode, lack of intelligent adjustment, and poor adaptability of existing clean rooms.

[0008] In order to achieve the above object, the present application is realized by the following technical scheme: An air purification circulating device for a clean room, comprising a clean room, a gas inlet is arranged on the side wall of the clean room, a gas return cavity plate is arranged on the top of the clean room, a gas return port is arranged below the gas return cavity plate, the purification circulating device comprises a primary filter mechanism and a secondary filter mechanism connected with each other, the gas return cavity plate is connected with the primary filter mechanism through a gas return pipeline, and a fresh air inlet pipe is arranged on the gas return pipeline; a gas main pipeline is connected with the gas inlet, and the gas main pipeline is connected with the primary filter mechanism and the secondary filter mechanism through a first gas branch pipe and a second gas branch pipe respectively.

[0009] The primary filter mechanism comprises a first shell, a side gas collecting box is arranged on one side of the inner cavity of the first shell, and the first gas branch pipe is connected with the side gas collecting box; a gas guide pipe is vertically coiled in the inner cavity of the first shell in a snakelike manner, the gas guide pipe comprises a plurality of vertical segments and horizontal segments connected with each other, and the lowermost horizontal segment is connected with the gas return pipeline; a coarse filter mechanism is arranged on each vertical segment, and a fine filter mechanism is connected to the rear side of each horizontal segment; the rear side of the fine filter mechanism is provided with a first gas outlet pipe and a second gas outlet pipe, the first gas outlet pipe is connected with the secondary filter mechanism, and the second gas outlet pipe is connected with the side gas collecting box.

[0010] Preferably, a gas detector is arranged at the connection position of the gas return pipeline and each gas return cavity plate; and a first electromagnetic valve and a second electromagnetic valve are arranged on the first gas branch pipe and the second gas branch pipe respectively.

[0011] Preferably, the fine filter mechanism comprises a box body, a coarse filter plate and a plurality of fine filter plates; a gas inlet connected with the first gas outlet pipe is formed in the front side of the box body, and a box cover is buckled on the box body; the coarse filter plate is inserted and arranged at the front end of the inner cavity of the box body and close to the gas inlet; and the plurality of fine filter plates are inserted and arranged at the rear end of the inner cavity of the box body and located at the rear side of the coarse filter plate.

[0012] Preferably, the coarse filter mechanism comprises a connecting pipeline, a coarse filter and a support; at least two coarse filters are arranged in a stack, and the upper and lower coarse filters are connected and fixed through a connecting support; and the support fixes the coarse filter in the inner cavity of the connecting pipeline.

[0013] Preferably, the coarse filter comprises an upper end disc and a lower end ring arranged in a stack, the diameter of the upper end disc is smaller than that of the lower end ring, and a filter screen is connected between the upper end disc and the lower end ring; a plurality of openings are formed in the upper end disc.

[0014] Preferably, the secondary filtering mechanism comprises a second shell, a partition plate is arranged inside the second shell, the partition plate divides the inner cavity of the second shell into a gas collecting cavity and a filtering cavity, a through hole is formed in the partition plate, an exhaust port communicating with the gas collecting cavity and an air inlet port communicating with the filtering cavity are respectively arranged on the second shell, the exhaust port is connected with the second gas supply branch pipe, and the air inlet port is connected with the first gas outlet pipe.

[0015] Preferably, the filtering cavity is sequentially provided with a first filtering assembly and a second filtering assembly in the direction from the air inlet port to the through hole, and a light treatment cavity is formed between the first filtering assembly and the second filtering assembly.

[0016] Preferably, the first filtering assembly comprises an alumina filter layer and an activated carbon filter layer arranged in an overlapping manner.

[0017] Preferably, the second filtering assembly comprises a micron sterilization filter, a photocatalyst layer is arranged on the side of the micron sterilization filter facing the light treatment cavity, and the photocatalyst layer is a titanium dioxide coating layer.

[0018] Preferably, the light treatment cavity is provided with an ultraviolet lamp and a nano light pipe.

[0019] The air purification and circulation equipment for a clean room has the following technical effects:

[0020] The air purification and circulation equipment for a clean room has the following technical effects:

[0021] The air purification and circulation equipment for a clean room has the following technical effects:

[0022] The serpentine gas guide pipe design in the primary filtering mechanism prolongs the airflow path, increases the filtering contact time, and improves the filtering efficiency of single cycle; the conical frustum overlapping structure is adopted for the coarse filter, the filtering area is increased, and the opening design is adopted to prevent blockage, so that the stable and smooth airflow is ensured; the filter core and filter plate of the fine filtering mechanism and the secondary filtering mechanism adopt the plug-in design, and are provided with the openable box cover / box body, so that the daily maintenance and filter core replacement work becomes extremely simple and fast, the equipment downtime is reduced, and the production efficiency is improved. The overall structure is compact and reasonable in layout, and the stability and reliability of long-term operation of the equipment are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a schematic diagram of the three-dimensional structure of the present application;

[0024] Figure 2 is a schematic diagram of the internal structure of the primary filtering mechanism of the present application;

[0025] Figure 3 is a schematic diagram of the connection structure of the fine filtering mechanism and the coarse filtering mechanism and the gas guide pipe of the present application;

[0026] Figure 4 is a schematic diagram of the three-dimensional structure of the fine filtering mechanism of the present application;

[0027] Figure 5 is a schematic diagram of the structure of the coarse filtering mechanism of the present application;

[0028] Figure 6 is a schematic diagram of the three-dimensional structure of the coarse filter of the present application;

[0029] Figure 7 is a schematic diagram of the front structure of the secondary filtering mechanism of the present application;

[0030] Figure 8 is a schematic diagram of the three-dimensional structure of the secondary filtering mechanism of the present application; Figure 7 is a sectional view of A-A of the present application.

[0031] Figure labeling: 1. Cleanroom; 2. Return air chamber plate; 3. Return air inlet; 4. Gas detector; 5. Return air duct; 6. Fresh air inlet duct; 7. Primary filtration mechanism; 8. Secondary filtration mechanism; 81. Partition; 82. Through hole; 83. Air collection chamber; 84. Filtration chamber; 85. Micron-sized sterilization filter; 86. Photocatalyst layer; 87. Ultraviolet lamp; 88. Nanotube; 89. Light treatment chamber; 810. Alumina filter layer; 811. Activated carbon filter layer; 812. Air inlet; 813. Exhaust port; 9. First solenoid valve; 10. First air supply branch pipe; 11. 12. Second air supply branch pipe; 13. Second solenoid valve; 14. Main air supply pipe; 15. Air supply port; 16. Side air collection box; 17. First air outlet pipe; 18. Second air outlet pipe; 19. Fine filtration mechanism; 10. Box body; 11. Box cover; 12. Coarse filter plate; 13. Fine filter plate; 14. Coarse filter mechanism; 15. Connecting pipe; 16. Support; 17. Coarse filter element; 18. Upper plate; 19. Lower ring; 10. Filter screen; 11. Opening; 12. Connecting support; 19. Air guide pipe; 20. Vertical section; 20. Horizontal section. Detailed Implementation

[0032] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Various changes can be made to the implementation schemes as long as the effects of the present invention can be achieved.

[0034] Those skilled in the art can connect the components in this case sequentially. The specific connection and operation sequence should refer to the working principle described below. The detailed connection methods are well-known technologies in the field. The working principle and process are mainly described below.

[0035] like Figure 1 As shown in the embodiment of this application, an air purification and circulation device for a cleanroom is proposed, including a cleanroom 1. An air inlet 14 is provided on the side wall of the cleanroom 1, a return air chamber plate 2 is provided on the top, and a return air port 3 is provided below the return air chamber plate 2. A valve is provided at the return air port 3. The purification and circulation device includes a primary filtration mechanism 7 and a secondary filtration mechanism 8 connected in series. The return air chamber plate 2 is connected to the primary filtration mechanism 7 through a return air pipe 5. An air supply main pipe 13 is connected to the air inlet 14, and the air supply main pipe 13 is connected to the primary filtration mechanism 7 and the secondary filtration mechanism 8 through a first air supply branch pipe 10 and a second air supply branch pipe 11, respectively.

[0036] The embodiment provides two gas circulation flow paths, which correspond to the unmanned working state and the personnel operating state of the clean room 1 respectively.

[0037] For example, when the clean room 1 is in the unmanned state: the gas in the clean room 1 enters the return gas cavity plate 2 through the top return gas port 3, then enters the primary filtering mechanism 7 through the return gas pipeline 5 for filtering, and the filtered gas can directly flow back to the clean room 1 through the first gas supply branch pipe 10 and the gas supply main pipeline 13, thereby forming a basic circulation purification path.

[0038] When the clean room 1 is in the personnel operating state: the gas in the clean room 1 also enters the return gas cavity plate 2 through the return gas port 3, then enters the primary filtering mechanism 7 through the return gas pipeline 5 for filtering, and the filtered gas enters the secondary filtering mechanism 8, the high-purity gas after secondary treatment in the secondary filtering mechanism 8 flows back to the clean room 1 through the second gas supply branch pipe 11 and the gas supply main pipeline 13, so as to meet the higher requirement for air quality when personnel operate.

[0039] In addition, the gas detector 4 is arranged at the connection position of the return gas pipeline 5 and each return gas cavity plate 2, which is used for detecting whether volatile organic compounds (VOCs) or other harmful gases are contained in the return gas in real time; when it is detected that the harmful gas exceeds the standard, the return gas port 3 can be closed, and the existing emergency exhaust mechanism is started to directly exhaust the contaminated gas to the outside, so as to avoid the circulation of harmful substances in the system.

[0040] In an embodiment, the fresh air inlet pipe 6 is arranged on the return gas pipeline 5, when fresh air needs to be supplemented or the carbon dioxide concentration in the room needs to be reduced, the external fresh air can be introduced through the fresh air inlet pipe 6 and enter the primary filtering mechanism 7 and the secondary filtering mechanism 8 together with the airflow in the return gas pipeline 5 for sufficient filtering, then enter the gas supply main pipeline 13 through the second gas supply branch pipe 11, and then enter the clean room 1.

[0041] Further, in order to realize automatic switching of the two circulation modes, the first electromagnetic valve 9 and the second electromagnetic valve 12 are arranged on the first gas supply branch pipe 10 and the second gas supply branch pipe 11 respectively, and the first gas supply branch pipe 10 and the second gas supply branch pipe 11 are opened and closed respectively.

[0042] For example, when the primary filtering mechanism 7 and the secondary filtering mechanism 8 work simultaneously: the filtered gas flows into the gas supply main pipeline 13 through the second gas supply branch pipe 11, at this time, the first electromagnetic valve 9 closes the first gas supply branch pipe 10.

[0043] When only the primary filtering mechanism 7 works: the filtered gas flows into the gas supply main pipeline 13 through the first gas supply branch pipe 10, at this time, the second electromagnetic valve 12 closes the second gas supply branch pipe 11, and the secondary filtering mechanism 8 stops running, so as to achieve the purpose of energy saving and consumption reduction.

[0044] As Figure 2 and Figure 3 shown, the primary filtering mechanism 7 in the embodiment includes a first housing, the inner cavity of the first housing is provided with a side gas collecting box 15, and the first gas supply branch pipe 10 is in communication with the side gas collecting box 15; the inner cavity of the first housing is vertically coiled with a gas guide pipe 20, the gas guide pipe 20 includes a plurality of vertical segments 201 and horizontal segments 202 connected with each other, the lowermost horizontal segment 202 is in communication with the gas return pipeline 5; the coarse filtering mechanism 19 is arranged on each vertical segment 201, and the fine filtering mechanism 18 is connected to the rear side of each horizontal segment 202.

[0045] In operation, the gas flowing back from the clean room 1 enters the gas guide pipe 20 coiled in a serpentine shape, and when flowing upwards through the vertical segment 201, the gas is subjected to the influence of gravity and the contact filtering of the coarse filtering mechanism 19, so that the gas is preliminarily filtered and the heavy particulate impurities are settled during the flowing process, thereby realizing the primary filtering; the gas after the coarse filtering flows into the fine filtering mechanism 18 in the horizontal segment 202, and the gas is subjected to the secondary filtering; the gas is multi-sectionally branched and filtered by the primary filtering mechanism 7 and the secondary filtering mechanism 8.

[0046] It should be noted that the rear side of the fine filtering mechanism 18 is respectively provided with a first gas outlet pipe 16 and a second gas outlet pipe 17, the first gas outlet pipe 16 is in communication with the secondary filtering mechanism 8, and the second gas outlet pipe 17 is in communication with the side gas collecting box 15.

[0047] As Figure 5 shown, the coarse filtering mechanism 19 in the embodiment includes a connecting pipeline 191, at least two coarse filtering pieces 193 arranged in a stack, and a support 192; wherein the upper and lower coarse filtering pieces 193 are fixedly connected through a connecting support 194; the support 192 fixes the coarse filtering piece 193 in the inner cavity of the connecting pipeline 191.

[0048] As Figure 6 shown, the coarse filtering piece 193 in the embodiment includes an upper end disc 1931 and a lower end ring 1932 arranged in a stack, the upper end disc 1931 is a circular panel, the lower end ring 1932 is a ring-shaped piece, the diameter of the upper end disc 1931 is smaller than that of the lower end ring 1932, and the coarse filtering piece 193 is a pyramidal shape in the front view projection; a filter screen 1933 is connected between the upper end disc 1931 and the lower end ring 1932, the gas enters the lower end ring 1932 and flows upwards along the inner wall of the filter screen 1933, and the particulate impurities in the gas are filtered and retained on the filter screen 1933 during the flowing process; in order to ensure the flowing speed of the gas, a plurality of openings 1934 are formed in the upper end disc 1931, part of the gas not subjected to the coarse filtering passes through the openings 1934 and continues to flow, and is subjected to the filtering by the next coarse filtering piece 193 or the coarse filtering plate 183 in the fine filtering mechanism 18.

[0049] As Figure 4 shown, the fine filter mechanism 18 in the embodiment includes a box body 181, a coarse filter plate 183 and a plurality of fine filter plates 184; specifically, the front side of the box body 181 is provided with a gas port connected with the first gas outlet pipe 16, and a box cover 182 is buckled on the box body 181, so as to facilitate the replacement and maintenance of the internal filter element; the coarse filter plate 183 is inserted and arranged at the front end inside the box body 181, close to the gas port, for re-filtering the gas before the fine filter plate 184, so as to protect the more precise fine filter plate 184 at the rear end; the plurality of fine filter plates 184 are HEPA or ULPA filter screens, which are inserted and arranged at the rear end inside the box body 181, located at the rear side of the coarse filter plate 183, for fine filtering the gas, so as to ensure that the gas treated by the first filtering mechanism 7 can meet the high-standard cleanliness requirement.

[0050] As Figure 7 and Figure 8 shown, the secondary filtering mechanism 8 in the embodiment includes a second shell, a partition plate 81 is arranged inside the second shell, the partition plate 81 divides the inner cavity of the second shell into a gas collecting cavity 83 and a filtering cavity 84, a through hole 82 is formed in the partition plate 81 to communicate the two cavities; the second shell is respectively provided with an exhaust port 813 communicated with the gas collecting cavity 83, and an air inlet 812 communicated with the filtering cavity 84; wherein the exhaust port 813 is communicated with the second gas supply branch pipe 11, and the air inlet 812 is communicated with the first gas outlet pipe 16.

[0051] In the filtering cavity 84, along the direction from the air inlet 812 to the through hole 82, a first filtering assembly and a second filtering assembly are sequentially arranged, and a light treatment cavity 89 is formed between the first filtering assembly and the second filtering assembly.

[0052] The first filtering assembly includes an aluminum oxide filter layer 810 and an activated carbon filter layer 811 arranged in overlap, which are mainly used for adsorbing and removing chemical pollutants, odors and organic molecules in the gas.

[0053] The second filtering assembly includes a micron sterilization filter 85 for intercepting small particulate matters and pathogenic microorganisms; a photocatalyst layer 86 is arranged on the side of the micron sterilization filter 85 facing the light treatment cavity 89, and the photocatalyst layer 86 is a titanium dioxide coating layer.

[0054] An ultraviolet lamp 87 and a nano light pipe 88 are arranged in the light treatment cavity 89, for generating ultraviolet light of a specific wavelength, exciting the photocatalyst layer 86 to generate strong oxidizing substances, so as to completely decompose the residual organic matters and kill bacteria, viruses and other microorganisms, thereby realizing deep purification and sterilization.

[0055] The clean room air is efficiently purified and circulated through the "intelligent mode switching and multi-stage composite filtering", and through the "unmanned maintenance mode" and "personnel operation mode" two working conditions, relying on the closed loop connection of the first filtering mechanism 7, the second filtering mechanism 8 and the clean room 1, the air collection, filtration, purification and reflux are completed, and the specific working principle is as follows:

[0056] Overall circulation basis:

[0057] The air in the clean room 1 first enters the air return cavity plate 2 through the air return port 3 below the top air return cavity plate 2, and then is transported to the first filtering mechanism 7 through the air return pipeline 5; the purified air is returned to the clean room 1 through the air supply main pipeline 13 and the side wall air supply port 14, forming a basic circulation;

[0058] If fresh air needs to be supplemented, external fresh air can be introduced through the fresh air inlet pipe 6 on the air return pipeline 5, mixed with the clean room 1 return air, and then enters the filtering system together;

[0059] The connection position of the air return pipeline 5 and the air return cavity plate 2 is provided with a gas detector 4, which can monitor the volatile organic compounds (VOCs) and other harmful gases in the return air in real time. If the detection exceeds the standard, the air return port 3 can be closed and the emergency exhaust can be started to avoid the circulation of contaminated gas.

[0060] The first filtering mechanism 7 is a composite unit of "coarse filtration and fine filtration", which prolongs the airflow path through the serpentine air guide pipe 20 to improve the single filtration efficiency, and the specific process is as follows:

[0061] Airflow enters and preliminary coarse filtration: the air in the air return pipeline 5 enters the lowermost horizontal section 202 of the air guide pipe 20, and then flows upward along the vertical section 201; the coarse filtration mechanism 19 on the vertical section 201 performs preliminary filtration on the air; in the connecting pipeline 191 of the coarse filtration mechanism 19, at least two stacked coarse filter elements 193 are fixed by the bracket 192, the air enters from the lower end ring 1932 of the coarse filter element 193, the large particle impurities are intercepted by the filter screen 1933, and part of the airflow flows upward through the opening 1934 of the upper end disc 1931 (the upper and lower coarse filter elements are fixed by the connecting bracket 194 to avoid blockage);

[0062] Deep fine filtration: the air flow after coarse filtration flows into the horizontal section 202 of the air guide pipe 20, and then enters the fine filtration mechanism 18 at the rear side of the horizontal section 202; in the box body 181 of the fine filtration mechanism 18, the front-end coarse filtration filter plate 183 (close to the air port) further intercepts residual particles, and the rear-end multiple fine filtration filter plates 184 (HEPA / ULPA filter screen) realize deep filtration of fine particles;

[0063] Air flow diversion: the air after fine filtration is diverted through the pipeline at the back side of the fine filtration mechanism 18; if only basic purification is needed, the air enters the side gas collecting box 15 through the second air outlet pipe 17, and is then delivered to the air supply main pipeline 13 through the first air supply branch pipe 10; if deep purification is needed, the air is delivered to the secondary filtration mechanism 8 through the first air outlet pipe 16.

[0064] Deep purification and sterilization by the secondary filtration mechanism 8: the secondary filtration mechanism 8 is a composite unit of “physical adsorption, photocatalysis and high-efficiency sterilization”, and is started only when personnel are operating, and the specific process is as follows:

[0065] Air flow entering and chemical adsorption: the air after primary filtration enters the filtration cavity 84 of the secondary filtration mechanism 8 through the air inlet 812, and first passes through the first filtration assembly; the overlapped alumina filter layer 810 adsorbs harmful chemical substances, and the activated carbon filter layer 811 adsorbs odors and organic molecules;

[0066] Photocatalytic decomposition: the air after adsorption enters the light processing cavity 89, the ultraviolet lamp 87 and the nano light tube 88 in the cavity generate specific wavelength ultraviolet light, excite the photocatalyst layer 86 (titanium dioxide coating) on the surface of the second filtration assembly, generate strong oxidizing substances, and completely decompose residual organic matter;

[0067] High-efficiency sterilization and backflow: the air after photocatalysis passes through the micron sterilization filter 85 of the second filtration assembly, intercepts small particles and pathogenic microorganisms, and finally enters the gas collecting cavity 83 through the through hole 82 on the partition plate 81, and is delivered to the air supply main pipeline 13 through the air outlet 813 and the second air supply branch pipe 11, and backflows to the clean room 1.

[0068] Intelligent mode switching principle: the equipment realizes automatic switching of the two modes through the opening and closing of the first electromagnetic valve 9 (controlling the first air supply branch pipe 10) and the second electromagnetic valve 12 (controlling the second air supply branch pipe 11):

[0069] Unmanned maintenance mode: when the clean room 1 is unmanned, the second electromagnetic valve 12 is closed, and the secondary filtration mechanism 8 stops running; the first electromagnetic valve 9 is opened, and the air only backflows after being treated by the primary filtration mechanism 7, greatly reducing the load and power consumption of the fan;

[0070] Personnel operation mode: when the clean room 1 is manned, the first electromagnetic valve 9 is closed, and the second electromagnetic valve 12 is opened; the air is pretreated by the primary filtration mechanism 7, and then enters the secondary filtration mechanism 8 for deep purification, to ensure that the return air reaches the high cleanliness standard.

[0071] The above describes the basic principles, main features and advantages of the present application. However, the above description is only a specific embodiment of the present application, and the technical features of the present application are not limited thereto. Any other implementation derived by those skilled in the art without departing from the technical solution of the present application should be covered in the patent scope of the present application.

[0072] In the description of the application, each embodiment is focused on the differences from other embodiments, and the same or similar parts between various embodiments can be referred to each other. For the device disclosed by the embodiments, since it corresponds to the method disclosed by the embodiments, the description is relatively simple, and the relevant parts can be referred to the method part.

[0073] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made thereto without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An air purification circulating device for a clean room, comprising a clean room (1), a gas supply port (14) is arranged on the side wall of the clean room (1), a gas return cavity plate (2) is arranged on the top of the clean room (1), and a gas return port (3) is arranged below the gas return cavity plate (2), characterized in that: The purification circulating device comprises a first filtering mechanism (7) and a second filtering mechanism (8) connected with each other, the return air cavity plate (2) is connected with the first filtering mechanism (7) through a return air pipeline (5), and a fresh air inlet pipe (6) is arranged on the return air pipeline (5); a gas supply port (14) is connected with a gas supply main pipeline (13), and the gas supply main pipeline (13) is connected with the first filtering mechanism (7) and the second filtering mechanism (8) through a first gas supply branch pipeline (10) and a second gas supply branch pipeline (11) respectively; The first filtering mechanism (7) comprises a first shell, a side gas collecting box (15) is arranged on one side of an inner cavity of the first shell, and the first gas supply branch pipeline (10) is connected with the side gas collecting box (15); a gas guide pipe (20) is coiled in a serpentine shape vertically in the inner cavity of the first shell, the gas guide pipe (20) comprises a plurality of vertical segments (201) and horizontal segments (202) connected with each other, the lowermost horizontal segment (202) is connected with the return air pipeline (5); a coarse filtering mechanism (19) is arranged on each vertical segment (201), and a fine filtering mechanism (18) is connected to the rear side of each horizontal segment (202); the rear side of the fine filtering mechanism (18) is respectively provided with a first air outlet pipe (16) and a second air outlet pipe (17), the first air outlet pipe (16) is connected with the second filtering mechanism (8), and the second air outlet pipe (17) is connected with the side gas collecting box (15); A gas detector (4) is arranged at the connecting position of the return air pipeline (5) and each return air cavity plate (2); a first electromagnetic valve (9) and a second electromagnetic valve (12) are respectively arranged on the first gas supply branch pipeline (10) and the second gas supply branch pipeline (11); The second filtering mechanism (8) comprises a second shell, a partition plate (81) is arranged in the second shell, the partition plate (81) divides the inner cavity of the second shell into a gas collecting cavity (83) and a filtering cavity (84), a through hole (82) is formed in the partition plate (81), an air outlet (813) communicating with the gas collecting cavity (83) and an air inlet (812) communicating with the filtering cavity (84) are respectively arranged on the second shell, the air outlet (813) is connected with the second gas supply branch pipeline (11), and the air inlet (812) is connected with the first air outlet pipe (16).

2. The air cleaning and circulating apparatus for clean rooms according to claim 1, wherein: The fine filtering mechanism (18) comprises: a box body (181), an air port connected with the first air outlet pipe (16) is formed in the front side of the box body (181), and a box cover (182) is buckled on the box body (181); a coarse filtering filter plate (183) is inserted and arranged at the front end in the inner cavity of the box body (181) and is arranged close to the air port; a plurality of fine filtering filter plates (184) are inserted and arranged at the rear end in the inner cavity of the box body (181) and are arranged at the rear side of the coarse filtering filter plate (183).

3. The air cleaning and circulating apparatus for clean rooms according to claim 1, wherein: The coarse filtering mechanism (19) comprises: a connecting pipeline (191); at least two coarse filtering members (193) are arranged in a stack, and the upper and lower coarse filtering members (193) are connected and fixed through a connecting support (194). A bracket (192) is arranged to fix the coarse filter (193) in the inner cavity of the connecting pipe (191).

4. The air cleaning and circulating apparatus for clean rooms according to claim 3, wherein: The coarse filter (193) comprises an upper end disc (1931) and a lower end ring (1932) arranged in sequence, the diameter of the upper end disc (1931) is smaller than that of the lower end ring (1932), and a filter screen (1933) is connected between the upper end disc (1931) and the lower end ring (1932); a plurality of openings (1934) are formed in the upper end disc (1931).

5. The air cleaning and circulating apparatus for clean rooms according to claim 1, wherein: A first filter assembly and a second filter assembly are arranged in sequence in the filter cavity (84) along the direction from the air inlet (812) to the through hole (82), and a light processing cavity (89) is formed between the first filter assembly and the second filter assembly.

6. The air cleaning and circulating apparatus for clean rooms according to claim 5, wherein: The first filter assembly comprises an alumina filter layer (810) and an activated carbon filter layer (811) arranged in overlap.

7. An air cleaning and circulating apparatus for clean rooms according to claim 6, wherein: The second filter assembly comprises a micron sterilization filter (85), and a photocatalyst layer (86) is arranged on the side of the micron sterilization filter (85) facing the light processing cavity (89), the photocatalyst layer (86) is a titanium dioxide coating layer.

8. The air cleaning and circulating apparatus for clean rooms according to claim 7, wherein: An ultraviolet lamp (87) and a nano light tube (88) are arranged in the light processing cavity (89).

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