A batch lamination polishing device

Abstract

The application discloses a kind of lamination batch polishing device and method, belong to high-end equipment manufacturing and precision machining technical field.The device includes rack assembly, material and feeding assembly, lamination polishing assembly and processing sleeve assembly.The core of the present application is that the lamination polishing assembly is provided with redundancy drive system consisting of main drive source and standby drive source, and polishing disc axial feed can be driven selectively, which greatly improves the reliability of equipment operation.At the same time, through the image acquisition unit and control unit integrated in the bottom of the processing sleeve, the full-process automation and intelligent control of lamination feeding, conveying, positioning, polishing and discharging are realized.The method is based on machine vision, realizes automatic correction of lamination, accurate positioning and self-adaptive clamping, and monitors the driving state in real time during polishing process, realizes seamless switching under fault.The present application solves the problems of low automation, lack of redundancy protection and insufficient processing precision stability in the prior art, and is especially suitable for efficient and high-reliability polishing of key lamination components in new energy, electronic information and other fields.

Description

Technical Field

[0001] This invention belongs to the field of precision machining technology of high-end equipment manufacturing and new materials, and particularly relates to a batch polishing device for stacked wafers. Background Technology

[0002] With the rapid development of strategic emerging industries such as new energy vehicles, high-end electronic information equipment, and aerospace in my country, extremely high requirements have been placed on the performance, reliability, and consistency of their basic components. As indispensable key components in these equipment (such as electrode plates for power batteries and insulating heat dissipation substrates for electronic components), the surface quality (such as flatness, roughness, and cleanliness) of laminated workpieces directly determines the performance and lifespan of the final product. Traditional polishing methods, such as single-machine manual operation or single-function semi-automatic equipment, have inherent defects such as low efficiency, poor consistency, and labor-intensive processes, and can no longer meet the demands of modern large-scale, high-quality manufacturing.

[0003] Currently, there are fully automatic optical glass polishing machines, such as the one disclosed in patent application number CN202511066815.4. However, these devices generally suffer from the following bottlenecks that restrict their application in demanding industries:

[0004] Limited functionality and insufficient reliability: Existing equipment is mostly dedicated to specific products, lacking versatility. More importantly, its core actuators (such as the feed drive for polishing heads) typically employ a single drive mode, lacking redundant backup design. In continuous high-load production environments, failure of this critical drive component leads to a complete line shutdown, severely impacting production cycle time and overall equipment efficiency (OEE), failing to meet the stringent requirements of strategic emerging industries for production continuity and stability.

[0005] Low level of intelligence and flexibility: The lack of online real-time detection and closed-loop control of workpiece position, as well as flexible clamping technology to adapt to workpieces of different specifications, leads to unstable processing accuracy, difficulty in guaranteeing product qualification rate, long production changeover and debugging cycle, and inability to adapt to the trend of agile manufacturing with multiple varieties and small batches.

[0006] Low integration, making it difficult to integrate into intelligent production lines: Existing equipment often fails to highly integrate functions such as feeding, positioning, processing, testing, and unloading, and lacks standardized data interaction interfaces, making it difficult to exchange information with upper-level management systems such as Manufacturing Execution Systems (MES), and thus unable to build transparent intelligent production units. Summary of the Invention

[0007] The purpose of this invention is to provide a batch polishing device for stacked wafers to solve the above-mentioned technical problems.

[0008] To achieve the above objectives, the specific technical solution of the stacked batch polishing device of the present invention is as follows:

[0009] A batch polishing device for stacked wafers includes a frame assembly, a feeding and discharging assembly, a wafer polishing assembly, and a processing sleeve assembly. The feeding and discharging assembly is mounted on the frame assembly and is used to transport the stacked wafers one by one from the hopper to the polishing station and to discharge the polished stacked wafers from the polishing station. The wafer polishing assembly is mounted on the frame assembly and includes a rotatable and axially movable polishing disc. The polishing disc can be driven axially by a main drive source and a backup drive source, and the main drive source and the backup drive source constitute a redundant drive system. The processing sleeve assembly is mounted on the frame assembly and has the polishing station and a positioning and clamping mechanism inside for centering and clamping the stacked wafers located at the polishing station.

[0010] Furthermore, the stacked polishing assembly also includes: a drive hobbing gear, which is connected to a drive motor on the frame assembly via a transmission mechanism to drive the polishing disc to rotate; a telescopic rod is fixedly connected to the polishing disc, and the telescopic rod is slidably disposed within the drive hobbing gear; the main drive source is an active telescopic cylinder, which drives the telescopic rod and the polishing disc to move axially; a cylinder telescopic shaft is installed on the active telescopic cylinder, and a connecting plate is fixedly installed on the cylinder telescopic shaft, the connecting plate being fixedly connected to the telescopic rod; the backup drive source is an execution air pump, which generates air pressure by filling a sealed chamber composed of a sleeve and a middle-end mounting sleeve to directly drive the telescopic rod and the polishing disc to move axially; a return spring is installed between the telescopic rod and the drive hobbing gear to provide a return force for retracting the polishing disc.

[0011] Furthermore, the transmission mechanism includes a first transmission bevel gear fixed to the output shaft of the drive motor, a second transmission bevel gear meshing with the first transmission bevel gear, and a middle gear fixed coaxially with the second transmission bevel gear and meshing with the drive hobbing gear for transmission; the sliding contact surface between the telescopic rod and the drive hobbing gear is a non-circular structure.

[0012] Furthermore, the material discharge and feeding assembly includes: an upper discharge execution cylinder, the output end of which is connected to a drive rack; the drive rack meshes with a hobbing gear; the hobbing gear meshes with an N-type frame, and the N-type frame can be driven by the hobbing gear to reciprocate; the two ends of the N-type frame are respectively fixed with a feeding arc-shaped push rod and a discharging arc-shaped push rod; the feeding arc-shaped push rod is used to push the stacked sheets into the polishing station, and the discharging arc-shaped push rod is used to push the polished stacked sheets out of the polishing station.

[0013] Furthermore, the processing sleeve assembly includes: a material cylinder for storing the stacked sheets to be polished; the material cylinder is connected to the processing sleeve, and the polishing station is provided inside the processing sleeve; a material conveying mechanism is provided inside the processing sleeve assembly, the material conveying mechanism including a material conveying screw driven by a rotary motor for conveying the stacked sheets entering the processing sleeve to the polishing station; the positioning and clamping mechanism includes a pair of radially movable positioning pushers, a compression spring for providing clamping force to the positioning pushers, and a compression cylinder and a compression slider for adjusting the clamping force, the compression cylinder is mounted on a mounting frame, a compression slider is mounted on the output shaft of the compression cylinder, the positioning pushers are slidably mounted on the processing sleeve and are slidably limited by the pusher limiting ring, and a compression spring is provided between the positioning pushers and the compression slider.

[0014] Furthermore, the processing sleeve is provided with a receiving chamber one for accommodating the discharge arc-shaped push rod and a discharge opening; the material cylinder is provided with a receiving chamber two for accommodating the feed arc-shaped push rod.

[0015] Furthermore, it also includes a control unit and an image acquisition unit. The image acquisition unit is located at the bottom of the processing sleeve and is used to detect the position and coaxiality of the stacked pieces. The control unit controls the switching and operation of the upper discharge execution cylinder, the rotary motor, the active telescopic cylinder and the execution air pump, as well as the operation of the extrusion cylinder based on the feedback signal of the image acquisition unit.

[0016] Furthermore, a machine vision-based batch polishing method for stacked wafers includes the following steps:

[0017] (S0) Initialization and self-test steps: The system is powered on, and the control unit starts the self-test program to check whether the status of each actuator and image acquisition unit is normal; the operator sets the process parameters for this processing through the human-machine interface, such as polishing depth, polishing time, clamping force, etc.

[0018] (S1) Feeding and visual correction steps: The control unit controls the feeding and discharging components to feed a single stack of sheets into the processing sleeve assembly; then the image acquisition unit in the processing sleeve acquires the image of the stack of sheets and determines whether it is coaxial with the processing sleeve; if it is not coaxial, the feeding mechanism is controlled to correct the stack of sheets until it meets the coaxiality requirement.

[0019] (S2) Precise positioning and adaptive clamping steps: control the feeding mechanism to transport the stacked pieces to the polishing station; monitor the position of the stacked pieces in real time through the image acquisition unit in the processing sleeve; when it is determined that the stacked pieces have reached the target station, stop the feeding mechanism and start the positioning and clamping mechanism to reliably fix the stacked pieces with an adjustable force;

[0020] (S3) Polishing and Polishing Process Monitoring Steps: Start the main drive source of the polishing mechanism to drive the polishing disk to rotate and feed to perform the polishing operation; during this process, the real-time control unit monitors the working status of the main drive source. If the control unit detects its failure, the control unit automatically switches to the backup drive source to continue the polishing feed.

[0021] (S4) Collaborative material feeding and cycle start-up steps: After polishing is completed, the control unit releases the positioning clamping mechanism and controls the material feeding and feeding components to discharge the finished workpiece. At the same time, the control unit controls the material feeding and feeding components to send the next workpiece to be processed, thereby realizing continuous batch polishing cycle.

[0022] The advantages of this invention are:

[0023] 1. An innovative dual-drive scheme of "active telescopic cylinder + actuating air pump" is adopted as the polishing feed power, forming a redundant drive system. When the main drive source (cylinder) fails due to a malfunction, the control system can instantly and automatically switch to the backup drive source (air pump) to continue the polishing operation. This effectively avoids machine downtime caused by a single point of failure in a critical actuator, greatly improving the overall efficiency (OEE) and operational reliability of the equipment in a continuous production line.

[0024] 2. An image acquisition unit integrated into the bottom of the processing sleeve enables real-time online detection and feedback of the coaxiality and position of the stacked pieces. Combined with a control unit, precise online correction and positioning are achieved. The positioning and clamping mechanism employs a flexible design of "compression spring + extrusion cylinder," with adjustable clamping force. This design securely clamps the workpiece while preventing over-clamping that could deform the thin-walled stacked pieces, thus ensuring the stability of the polishing process and high consistency of the finished product.

[0025] 3. Through the ingenious N-shaped frame and double-arc push rod linkage design, the feeding and unloading actions are synchronized, resulting in high cycle efficiency. The entire workflow, from feeding, correction, conveying, positioning, clamping, polishing to unloading, is automatically coordinated by the control unit based on vision and sensor signals, achieving true full-process automation and intelligent control, reducing manual intervention and labor intensity;

[0026] 4. This device is specifically designed for polishing requirements of stacked workpieces. It highly integrates the drive, control, vision, and execution mechanisms into one compact structure, which not only improves processing efficiency and reliability, but also makes it easy to integrate into modern intelligent manufacturing production lines due to its modular and intelligent features. It has broad application prospects in the processing of key components in strategic emerging industries such as new energy vehicle battery electrodes and electronic component substrates. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 for Figure 1 A schematic diagram showing the location of the cutting line;

[0029] Figure 3 for Figure 2 A sectional view along section AA;

[0030] Figure 4 for Figure 2 A sectional view along section BB;

[0031] Figure 5 This is a schematic diagram of the rack assembly structure of the present invention. Figure 1 ;

[0032] Figure 6 This is a schematic diagram of the rack assembly structure of the present invention. Figure 2 ;

[0033] Figure 7 This is a schematic diagram of the material feeding and discharging assembly structure of the present invention;

[0034] Figure 8 This is a schematic diagram of the stacked polishing assembly structure of the present invention;

[0035] Figure 9 for Figure 8 A schematic diagram showing the location of the cutting line;

[0036] Figure 10 for Figure 9 A sectional view along section EE;

[0037] Figure 11 This is a schematic diagram of the processing sleeve assembly structure of the present invention;

[0038] Figure 12 for Figure 11 A schematic diagram showing the location of the cutting line;

[0039] Figure 13 for Figure 12 A sectional view along section CC;

[0040] Figure 14 for Figure 12 A sectional view along section DD;

[0041] Figure 15 for Figure 14 A magnified view of a portion of the image;

[0042] Explanation of markings in the diagram: Frame assembly 1; Base plate 1-1; Mounting bracket 1-2; Cylinder mounting bracket 1-3; Actuating motor 1-4; Transmission bevel gear 1-5; Transmission bevel gear 2-6; Mid-end gear 1-7; Rotation limit ring 1-8; Discharge and loading assembly 2; Upper discharge actuator cylinder 2-1; Output connecting plate 2-2; Drive rack 2-3; Gear hobbing 2-4; Gear hobbing shaft 2-5; N-type frame 2-6; Discharge arc-shaped push rod 2-7; Feed arc-shaped push rod 2-8; Stacked polishing assembly 3; Actuating air pump 3-1; Sleeve 3-2; Mid-end mounting sleeve 3-3; Drive gear hobbing 3-4; Gear hobbing rotation limit ring 3-5; Polishing disc 3-6; Telescopic rod 3-7; Reset spring 3 -8; Installation end cap 3-9; Active telescopic cylinder 3-10; Cylinder telescopic shaft 3-11; Connecting plate 3-12; Machining sleeve assembly 4; Sleeve mounting bracket 4-1; Material cylinder 4-2; Feeding end cap 4-3; Mounting frame 4-4; Discharge plate 4-5; Extrusion cylinder 4-6; Containing chamber one 4-9; Discharge opening 4-10; Containing chamber two 4-11; Pushing chamber 4-12; Motor mounting bracket 4-13; Rotating motor 4-14; Gear one 4-15; Gear two 4-16; Conveying shaft 4-17; Conveying screw 4-18; Machining sleeve 4-19; Compression slider 4-20; Compression spring 4-21; Positioning pusher 4-22; Pusher limit ring 4-23. Detailed Implementation

[0043] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] Example 1:

[0046] like Figures 1 to 4As shown, the present invention provides a batch polishing device for stacked wafers, including a frame assembly 1, a feeding and unloading assembly 2, a stacked wafer polishing assembly 3, and a processing sleeve assembly 4. The feeding and unloading assembly 2 is mounted on the frame assembly 1 and is used to transport stacked wafers one by one from the hopper to the polishing station and to discharge the polished stacked wafers from the polishing station. The stacked wafer polishing assembly 3 is mounted on the frame assembly 1 and includes a rotatable and axially movable polishing disc 3-6. The polishing disc 3-6 can be driven axially by a main drive source and a backup drive source, and the main drive source and the backup drive source constitute a redundant drive system. The processing sleeve assembly 4 is mounted on the frame assembly 1 and has the polishing station and a positioning and clamping mechanism for centering and clamping the stacked wafers located at the polishing station inside.

[0047] Example 2:

[0048] like Figure 5 , Figure 6 As shown, the frame assembly 1 is the supporting foundation of the entire device; a mounting bracket 1-2 is fixedly installed on the base plate 1-1, and a cylinder mounting bracket 1-3 is fixedly installed at a specific position on the mounting bracket 1-2, specifically for installing the upper discharge execution cylinder 2-1 of the discharge and feeding assembly 2. An execution motor 1-4 is also installed on the mounting bracket 1-2, and a transmission bevel gear 1-5 is fixed on its output shaft. The transmission bevel gear 1-5 meshes with the transmission bevel gear 1-6. The transmission bevel gear 1-6 is fixedly installed at one end of the intermediate gear 1-7. The other end of the intermediate gear 1-7 is rotatably connected to the mounting bracket 1-2 and axially limited through a rotation limit ring 1-8, ensuring the stability and accuracy of the end of the transmission chain.

[0049] Example 3:

[0050] like Figure 7As shown, the feeding and discharging assembly 2 realizes the linkage between feeding and discharging; the feeding and discharging assembly 2 includes: a feeding and discharging execution cylinder 2-1, the output end of which is connected to a drive rack 2-3; the drive rack 2-3 meshes with a hobbing gear 2-4; the hobbing gear 2-4 meshes with an N-type frame 2-6, and the N-type frame 2-6 can be driven by the hobbing gear 2-4 to reciprocate; both ends of the N-type frame 2-6 are respectively fixed with The system includes a feeding arc-shaped push rod 2-8 and a discharging arc-shaped push rod 2-7. The feeding arc-shaped push rod 2-8 is used to push the stacked sheets into the polishing station, and the discharging arc-shaped push rod 2-7 is used to push the polished stacked sheets out of the polishing station. An upper discharging actuator cylinder 2-1 is mounted on a cylinder mounting bracket 1-3. The piston rod end of the upper discharging actuator cylinder 2-1 is fixedly connected to a drive rack 2-3 via an output connecting plate 2-2. The drive rack 2-3 meshes with a hobbing gear 2-4, and the hobbing gear 2-4 is rotatably mounted on the mounting bracket 1-2 via a hobbing gear rotating shaft 2-5. The hobbing gear 2-4 meshes with an N-type frame 2-6, converting the rotational motion into the linear reciprocating motion of the N-type frame 2-6. The feeding arc-shaped push rod 2-8 and the discharging arc-shaped push rod 2-7 are fixed at both ends of the N-type frame 2-6, respectively.

[0051] Example 4:

[0052] like Figure 8 , Figure 9 , Figure 10As shown, the stacked polishing assembly 3 is the core innovation of this invention; the stacked polishing assembly 3 further includes: a driving gear hobbing 3-4, which is connected to a drive motor on the frame assembly 1 via a transmission mechanism, for driving the polishing disc 3-6 to rotate; a telescopic rod 3-7 is fixedly connected to the polishing disc 3-6, and the telescopic rod 3-7 is slidably disposed within the driving gear hobbing 3-4; the main drive source is an active telescopic cylinder 3-10, for driving the telescopic rod 3-7 and the polishing disc 3-6 to move axially; the active telescopic cylinder 3-10... A cylinder telescopic shaft 3-11 is installed, and a connecting plate 3-12 is fixedly installed on the cylinder telescopic shaft 3-11. The connecting plate 3-12 is fixedly connected to the telescopic rod 3-7. The backup drive source is an actuator air pump 3-1. The actuator air pump 3-1 generates air pressure by filling the sealed chamber formed by the sleeve 3-2 and the middle-end mounting sleeve 3-3 to directly drive the telescopic rod 3-7 and the polishing disc 3-6 to move axially. A return spring 3-8 is installed between the telescopic rod 3-7 and the drive hobbing gear 3-4 to provide a return force for the polishing disc 3-6 to retract. The sleeve 3-2... The cylinder is fixedly installed on the mounting bracket 1-2 and is fixedly connected to the middle mounting sleeve 3-3. The end of the middle mounting sleeve 3-3 is closed by the mounting end cap 3-9, and the active telescopic cylinder 3-10 is fixedly installed inside the middle mounting sleeve 3-3 through the mounting end cap 3-9. A connecting plate 3-12 is rotatably installed on the cylinder telescopic shaft 3-11 of the active telescopic cylinder 3-10, and the connecting plate 3-12 is fixedly connected to the telescopic rod 3-7. The telescopic rod 3-7 is slidably set in the drive hobbing gear 3-4. The drive hobbing gear 3-4 itself is rotatably limited by the hobbing gear rotation limit ring 3-5 and is mounted on the mounting bracket 1-2, and meshes with the middle gear 1-7, thereby transmitting power to the polishing disc 3-6.

[0053] The transmission mechanism includes a transmission bevel gear 1-5 fixed on the output shaft of the drive motor, a transmission bevel gear 1-6 meshing with the transmission bevel gear 1-5, and an intermediate gear 1-7 coaxially fixed with the transmission bevel gear 1-6 and meshing with the drive hobbing gear 3-4; the sliding contact surface between the telescopic rod 3-7 and the drive hobbing gear 3-4 is a non-circular structure.

[0054] Example 5:

[0055] like Figures 11 to 15As shown, the processing sleeve assembly 4 is responsible for the storage, conveying, and clamping of materials; the processing sleeve assembly 4 includes: a material cylinder 4-2 for storing the stacked pieces to be polished; the material cylinder 4-2 is connected to the processing sleeve 4-19, and the polishing station is provided inside the processing sleeve 4-19; a material conveying mechanism is provided inside the processing sleeve assembly 4, the material conveying mechanism including a material conveying screw 4-18 driven by a rotary motor 4-14, for conveying the stacked pieces entering the processing sleeve 4-19 to the polishing station; the positioning and clamping mechanism includes a pair of radially movable... The system includes a positioning pusher 4-22, a compression spring 4-21 that provides clamping force to the positioning pusher 4-22, and a pressing cylinder 4-6 and a compression slider 4-20 for adjusting the clamping force. The pressing cylinder 4-6 is mounted on the mounting bracket 4-4. The compression slider 4-20 is mounted on the output shaft of the pressing cylinder 4-6. The positioning pusher 4-22 is slidably mounted on the machining sleeve 4-19 and is slidably limited by the pusher limiting ring 4-23. The compression spring 4-21 is provided between the positioning pusher 4-22 and the compression slider 4-20.

[0056] The processing sleeve 4-19 is provided with a receiving chamber 4-9 for accommodating the discharge arc-shaped push rod 2-7 and a discharge opening 4-10; the material cylinder 4-2 is provided with a receiving chamber 4-11 for accommodating the feeding arc-shaped push rod 2-8.

[0057] A material cylinder 4-2 is fixedly installed inside the sleeve mounting bracket 4-1. A replenishment end cap 4-3 is threadedly connected to the top of the material cylinder 4-2 for easy addition of stacked pieces. A processing sleeve 4-19 is also fixedly installed on the sleeve mounting bracket 4-1. A discharge plate 4-5 is fixedly installed at the outlet end of the processing sleeve 4-19 to guide the polished workpiece out. The specific transmission path of the feeding mechanism is as follows: a rotating motor 4-14 is fixed to the processing sleeve 4-19 via a motor mounting bracket 4-13. Gear 4-15 on its output shaft meshes with gear 4-16. Gear 4-16 is fixedly installed at one end of a feeding shaft 4-17, and a feeding screw 4-18 is fixedly installed at the other end of the feeding shaft 4-17. The feeding shaft 4-17 and the processing sleeve 4-19 rotate in cooperation.

[0058] The detailed installation method of the positioning and clamping mechanism is as follows: a pair of positioning pushers 4-22 are slidably installed in the wall hole of the processing sleeve 4-19, and are axially limited by the pusher limiting ring 4-23 to prevent them from falling out; a compression spring 4-21 is provided between the positioning pusher 4-22 and the compression slider 4-20 driven by the extrusion cylinder 4-6; when the extrusion cylinder 4-6 is activated, it pushes the compression slider 4-20 to compress the spring 4-21, thereby transmitting the force to the positioning pusher 4-22 to achieve flexible clamping of the workpiece;

[0059] It also includes a control unit and an image acquisition unit. The image acquisition unit is located at the bottom of the processing sleeve 4-19 and is used to detect the position and coaxiality of the stacked pieces. The control unit controls the switching and operation of the upper discharge execution cylinder 2-1, the rotary motor 4-14, the active telescopic cylinder 3-10 and the execution air pump 3-1, as well as the operation of the extrusion cylinder 4-6 based on the feedback signal of the image acquisition unit.

[0060] The image acquisition unit is responsible for visual detection and positioning feedback, which is a prerequisite for achieving precise control. The image acquisition unit includes:

[0061] An industrial camera, preferably a high-resolution, high-frame-rate CMOS or CCD industrial camera, is fixedly installed at the center of the bottom of the processing sleeve 4-19, with its optical axis coinciding with the central axis of the processing sleeve 4-19, for acquiring real-time images of the stacked sheets.

[0062] Ring light source: The matching ring LED light source is installed around the industrial camera lens to provide uniform, shadowless illumination for the shooting area, ensuring stable image quality and preventing interference from ambient light;

[0063] Image processing module: can be integrated into the control unit or inside the camera, responsible for preprocessing the acquired images such as noise reduction, enhancement and algorithm analysis;

[0064] The core function of the image acquisition unit is:

[0065] Coaxiality detection: Analyze the image to determine whether the stacked pieces entering the processing sleeve 4-19 are coaxial with the central axis of the sleeve; ensure polishing uniformity.

[0066] Position and Spacing Detection: Real-time detection of the longitudinal position of the stacked pieces within the processing sleeve 4-19, especially the spacing between the bottom of the stacked pieces and the bottom reference surface of the processing sleeve 4-19, to determine whether the stacked pieces have accurately reached the polishing station;

[0067] The control unit adopts a modular design and is responsible for receiving signals, making logical judgments, and outputting commands. The control unit includes:

[0068] Main controller: It adopts a programmable logic controller (PLC) or a high-performance embedded industrial computer (IPC) with multiple digital input / output (DI / DO) points and analog input / output (AI / AO) points;

[0069] Motor driver: A dedicated driver, such as a stepper driver or servo driver, used to drive the actuator motors 1-4 and the rotary motors 4-14, and to receive pulses and direction signals from the control unit;

[0070] Pneumatic control module: including a solenoid valve group for controlling the upper discharge actuator cylinder 2-1, the active telescopic cylinder 3-10 and the extrusion cylinder 4-6, and a relay or frequency converter for controlling the start, stop and speed adjustment of the actuator air pump 3-1;

[0071] Human-Machine Interface (HMI): Touchscreen used for parameter settings such as polishing depth, speed, manual operation, status display, and fault alarms.

[0072] Example 6: A machine vision-based batch polishing method for stacked wafers, using the batch polishing apparatus for stacked wafers as described in Examples 1-5, the method includes the following steps:

[0073] S0: Initialization and Self-Test: When the system is powered on, the control unit starts the self-test program to check whether the status of each actuator cylinder, motor, air pump and image acquisition unit is normal; the operator sets the process parameters for this processing through the human-machine interface (HMI), such as polishing depth, polishing time, clamping force, etc.

[0074] S1: Feeding and visual correction: The control unit controls the feeding and discharging assembly 2 to feed a single stack of sheets into the processing sleeve assembly 4; then the image acquisition unit in the processing sleeve 4-19 acquires the image of the stack of sheets and determines whether it is coaxial with the processing sleeve 4-19; if they are not coaxial, the feeding mechanism is controlled to correct the stack of sheets until they meet the coaxiality requirements.

[0075] The control unit sends an extension command to the upward discharge execution cylinder 2-1. The cylinder pushes the drive rack 2-3 and the hobbing gear 2-4, driving the N-type frame 2-6 to move, so that the feeding arc-shaped push rod 2-8 at one end pushes the single stacked piece of the lowest layer in the material cylinder 4-2 into the processing sleeve 4-19.

[0076] Visual feedback and decision-making:

[0077] The industrial camera in the image acquisition unit immediately takes a picture of the stacked pieces that have fallen into the bottom of the processing sleeve 4-19;

[0078] The image processing algorithm in the control unit analyzes the image to determine whether the stacked pieces are coaxial with the central axis of the processing sleeve 4-19;

[0079] Decision execution:

[0080] If coaxial: The control unit proceeds directly to the next step;

[0081] If they are not coaxial: The control unit starts the rotating motor 4-14, which performs micro-rotation through the feeding screw 4-18, and uses the guiding effect of the screw blades to correct the stack of sheets online until the image analysis confirms that the coaxiality meets the standard;

[0082] S2: Precise positioning and adaptive clamping: Control the feeding mechanism to transport the stacked pieces to the polishing station; monitor the position of the stacked pieces in real time through the image acquisition unit in the processing sleeve 4-19; when it is determined that the stacked pieces have reached the target station, stop the feeding mechanism and start the positioning and clamping mechanism to reliably fix the stacked pieces with an adjustable force.

[0083] The control unit controls the rotating motor 4-14 to run forward at a set speed, and the feeding screw 4-18 rotates to convey the stacked pieces upward along the processing sleeve 4-19. During this process, the outer side of the stacked pieces contacts a pair of positioning pushers 4-22 and pushes them outward, initially compressing the compression spring 4-21.

[0084] Visual feedback and decision-making:

[0085] The image acquisition unit continuously monitors the real-time distance between the bottom of the stacked wafers and the reference surface at the bottom of the processing sleeve 4-19;

[0086] When the control unit detects that the spacing value is stable and unchanged, it determines that the stacked pieces have accurately reached the preset polishing position. The control unit immediately sends a stop command to the rotating motor 4-14. At the same time, the control unit sends an action command to the extrusion cylinder 4-6. The piston rod of the extrusion cylinder 4-6 extends and pushes the compression slider 4-20 to further compress the compression spring 4-21, thereby linearly increasing the clamping force of the positioning pusher 4-22 on the side wall of the stacked pieces, achieving reliable and flexible fixation.

[0087] S3: Drive polishing and polishing process monitoring: Start the main drive source of the polishing mechanism to drive the polishing disks 3-6 to rotate and feed to perform the polishing operation; during this process, the real-time control unit monitors the working status of the main drive source. If the control unit detects its failure, the control unit automatically switches to the backup drive source to continue the polishing feed.

[0088] The control unit starts the execution motor 1-4; the motor drives the drive hobbing gear 3-4 and the polishing disc 3-6 to rotate at high speed through the transmission bevel gear 1-5, the transmission bevel gear 2-6 and the middle gear 1-7;

[0089] Feed control - Normal mode: The control unit sends a feed command to the main drive source of the active telescopic cylinder 3-10; the cylinder telescopic shaft 3-11 extends, pushing the telescopic rod 3-7 and the polishing disc 3-6 to feed axially and contact the surface of the stacked pieces for polishing;

[0090] Feed control - anomaly detection and seamless switching:

[0091] Real-time monitoring: The control unit continuously monitors the working status of the main drive source active telescopic cylinder 3-10 through sensors such as air pressure sensors and position sensors;

[0092] Decision-making and switching: Once a cylinder failure such as abnormal pressure or stroke jamming is detected, the control unit immediately executes the fail-safe strategy:

[0093] a. Stop supplying air to the active telescopic cylinder 3-10;

[0094] b. Simultaneously activate the standby drive source for air pump 3-1;

[0095] c. An air pump fills the sealed chamber sleeve 3-2 and the middle installation sleeve 3-3 with air, and uses the air pressure to continue to drive the polishing disc 3-6 to complete the polishing feed, so as to achieve uninterrupted processing;

[0096] Polishing complete: After the preset polishing time or depth is reached, the control unit stops the exhaust of the currently active drive source cylinder or stops the air pump from filling. The polishing disc 3-6 returns to its initial position under the action of the reset spring 3-8, and the control unit then stops executing motor 1-4.

[0097] S4: Collaborative material discharge and cycle start-up: After polishing is completed, the control unit releases the positioning clamping mechanism and controls the material discharge and feeding assembly 2 to discharge the finished workpiece. At the same time, the control unit controls the material discharge and feeding assembly 2 to feed the next workpiece to be processed, thereby realizing continuous batch polishing cycle.

[0098] The control unit controls the extrusion cylinder 4-6 to retract, the positioning pusher 4-22 resets under the action of spring force, releasing the workpiece, and the control unit restarts the upper discharge execution cylinder 2-1, which drives the N-type frame 2-6 to move in the discharge direction;

[0099] During this process:

[0100] The discharge arc-shaped push rod 2-7 pushes the polished stacked pieces out of the receiving chamber 4-9 through the discharge opening 4-10. At the same time, the feeding arc-shaped push rod 2-8 performs the next feeding action, pushing a new stacked piece into the processing sleeve 4-19, realizing the coordinated operation of feeding and discharging.

[0101] Cycle: The system automatically returns to step S1 and begins the next work cycle to achieve continuous batch production.

[0102] Job Summary:

[0103] After system initialization, the control unit coordinates the actions of each component according to a preset program. The upper discharge actuator cylinder 2-1 drives the N-type frame 2-6 through a rack and pinion mechanism, causing the feeding arc-shaped push rod 2-8 to push the stacked pieces into the processing sleeve 4-19. The image acquisition unit detects the position of the stacked pieces and controls the feeding screw 4-18 to lift them to the polishing station, where they are fixed by the positioning and clamping mechanism. Subsequently, the actuator motor 1-4 drives the polishing disc 3-6 to rotate, and the main drive source active telescopic cylinder 3-10 or the backup drive source actuator air pump 3-1 drives it to feed for polishing. After polishing is completed, all mechanisms reset, the discharge arc-shaped push rod 2-7 pushes out the finished product, and the next feeding is carried out simultaneously, forming a continuous operation cycle.

[0104] It is understood that the present invention has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the invention. Furthermore, under the teachings of the present invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of the present invention.

Claims

1. A batch polishing apparatus for stacked wafers, characterized in that, The assembly includes a frame assembly (1), a feeding and unloading assembly (2), a stacked polishing assembly (3), and a processing sleeve assembly (4). The feeding and unloading assembly (2) is mounted on the frame assembly (1) and is used to transport stacked pieces from the hopper one by one to the polishing station and to discharge the polished stacked pieces from the polishing station. The stacked polishing assembly (3) is mounted on the frame assembly (1) and includes a rotatable and axially movable polishing disc (3-6). The polishing disc (3-6) can be driven axially by either a main drive source or a backup drive source. The main drive source and the backup drive source constitute a redundant drive system. The processing sleeve assembly (4) is mounted on the frame assembly (1) and has the polishing station and a positioning and clamping mechanism for centering and clamping the stacked pieces located at the polishing station inside. The stacked polishing assembly (3) further includes: a drive hobbing gear (3-4), which is connected to a drive motor on the frame assembly (1) via a transmission mechanism to drive the polishing disc (3-6) to rotate; a telescopic rod (3-7) is fixedly connected to the polishing disc (3-6), and the telescopic rod (3-7) is slidably disposed within the drive hobbing gear (3-4); the main drive source is an active telescopic cylinder (3-10), which is used to drive the telescopic rod (3-7) and the polishing disc (3-6) to move axially; a cylinder telescopic shaft (3-10) is installed on the active telescopic cylinder (3-10). 11) A connecting plate (3-12) is fixedly installed on the cylinder telescopic shaft (3-11). The connecting plate (3-12) is fixedly connected to the telescopic rod (3-7). The backup drive source is an execution air pump (3-1). The execution air pump (3-1) generates air pressure by filling the sealed chamber formed by the sleeve (3-2) and the middle mounting sleeve (3-3) to directly drive the telescopic rod (3-7) and the polishing disc (3-6) to move axially. A return spring (3-8) is installed between the telescopic rod (3-7) and the drive hobbing gear (3-4) to provide a return force to retract the polishing disc (3-6). The material discharge and feeding assembly (2) includes: an upper discharge execution cylinder (2-1), the output end of which is connected to a drive rack (2-3); the drive rack (2-3) meshes with a hobbing gear (2-4); the hobbing gear (2-4) meshes with an N-type frame (2-6), and the N-type frame (2-6) can be driven by the hobbing gear (2-4) to reciprocate; the two ends of the N-type frame (2-6) are respectively fixed with a feeding arc-shaped push rod (2-8) and a discharge arc-shaped push rod (2-7); the feeding arc-shaped push rod (2-8) is used to push the stacked pieces into the polishing station, and the discharge arc-shaped push rod (2-7) is used to push the polished stacked pieces out of the polishing station.

2. The batch polishing apparatus for stacked wafers according to claim 1, characterized in that, The transmission mechanism includes a first transmission bevel gear (1-5) fixed on the output shaft of the drive motor, a second transmission bevel gear (1-6) meshing with the first transmission bevel gear (1-5), and a middle gear (1-7) coaxially fixed with the second transmission bevel gear (1-6) and meshing with the drive hob (3-4); the sliding contact surface between the telescopic rod (3-7) and the drive hob (3-4) is a non-circular structure.

3. The batch polishing apparatus for stacked wafers according to claim 1, characterized in that, The processing sleeve assembly (4) includes: a material cylinder (4-2) for storing the stacked pieces to be polished; the material cylinder (4-2) is connected to the processing sleeve (4-19), and the polishing station is provided inside the processing sleeve (4-19); a material conveying mechanism is provided inside the processing sleeve assembly (4), the material conveying mechanism including a material conveying screw (4-18) driven by a rotating motor (4-14) for conveying the stacked pieces entering the processing sleeve (4-19) to the polishing station; the positioning and clamping mechanism includes a pair of radially movable positioning pushers (4-22) and a positioning pusher (4-18) for... -22) A compression spring (4-21) provides clamping force, and a squeezing cylinder (4-6) and a compression slider (4-20) for adjusting the clamping force. The squeezing cylinder (4-6) is mounted on a mounting bracket (4-4). The compression slider (4-20) is mounted on the output shaft of the squeezing cylinder (4-6). A positioning pusher (4-22) is slidably mounted on the machining sleeve (4-19) and is slidably limited by a pusher limiting ring (4-23). ​​A compression spring (4-21) is provided between the positioning pusher (4-22) and the compression slider (4-20).

4. The batch polishing apparatus for stacked wafers according to claim 3, characterized in that, The processing sleeve (4-19) has a first accommodating chamber (4-9) for accommodating the discharge arc-shaped push rod (2-7) and a discharge opening (4-10); the material cylinder (4-2) has a second accommodating chamber (4-11) for accommodating the feed arc-shaped push rod (2-8).

5. The batch polishing apparatus for stacked wafers according to claim 1, characterized in that, It also includes a control unit and an image acquisition unit. The image acquisition unit is located at the bottom of the processing sleeve (4-19) and is used to detect the position and coaxiality of the stacked pieces. The control unit controls the switching and operation of the upper discharge execution cylinder (2-1), the rotary motor (4-14), the active telescopic cylinder (3-10) and the execution air pump (3-1) and the operation of the extrusion cylinder (4-6) based on the feedback signal of the image acquisition unit.

6. A machine vision-based batch polishing method for stacked wafers, employing the batch polishing apparatus for stacked wafers as described in any one of claims 1-5, characterized in that, The method includes the following steps: (S0) Initialization and self-test steps: The system is powered on, and the control unit starts the self-test program to check whether the status of each actuator, such as the cylinder, motor, air pump and image acquisition unit, is normal; the operator sets the process parameters for this processing through the human-machine interface: polishing depth, polishing time, clamping force; (S1) Feeding and visual correction steps: The control unit controls the feeding and discharging assembly (2) to feed a single stack of pieces into the processing sleeve assembly (4); then the image acquisition unit in the processing sleeve (4-19) acquires the image of the stack of pieces and determines whether it is coaxial with the processing sleeve (4-19); if it is not coaxial, the feeding mechanism is controlled to correct the stack of pieces until it meets the coaxiality requirement; (S2) Precise positioning and adaptive clamping steps: control the feeding mechanism to transport the stacked pieces to the polishing station; monitor the position of the stacked pieces in real time through the image acquisition unit in the processing sleeve (4-19); when it is determined that the stacked pieces have reached the target station, stop the feeding mechanism and start the positioning and clamping mechanism to reliably fix the stacked pieces with an adjustable force. (S3) Polishing and Polishing Process Monitoring Steps: Start the main drive source of the polishing mechanism to drive the polishing disk (3-6) to rotate and feed to perform the polishing operation; during this process, the real-time control unit monitors the working status of the main drive source. If the control unit detects its failure, the control unit automatically switches to the backup drive source to continue the polishing feed. (S4) Collaborative material feeding and cycle start-up steps: After polishing is completed, the control unit releases the positioning clamping mechanism and controls the material feeding and loading assembly (2) to discharge the finished workpiece. At the same time, the control unit controls the material feeding and loading assembly (2) to send the next workpiece to be processed, thereby realizing continuous batch polishing cycle.

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