Multifunctional drying equipment for silicon material production

Abstract

The invention discloses multifunctional drying equipment for silicon material production. Comprising a drying oven, a storage device which is arranged in the drying oven and is used for storing silicon materials, heating and drying devices which are arranged at the top and the bottom in the drying oven, an air filtering and purifying device which is arranged at the top of the drying oven and is used for treating air in the drying oven, and an inert gas generator which is connected with the drying oven and is used for conveying inert gas into the drying oven, the oven door is arranged in front of the oven. The drying device has the functions of drying in the inert gas process to avoid oxidation, rapidly cooling the dried silicon material, purifying harmful gas in the drying process, automatically discharging the dried silicon material and sucking dust in the cleaning process, so that the overall production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of silicon material processing technology, and in particular to a multifunctional drying device for silicon material production. Background Technology

[0002] In the production of silicon (bulk silicon or granular silicon), drying is a key step to ensure material purity and process stability. Its main purposes include removing surface moisture to avoid abnormal high-temperature oxidation and preventing moisture residue from causing defects or contamination in the growth of monocrystalline silicon.

[0003] For example, Chinese patent CN220959283U, published on May 14, 2024, discloses a drying chamber for silicon blocks. Through a position adjustment mechanism, when drying silicon blocks is required, the silicon blocks are first placed in the silicon block placement mechanism. Then, pressing two locking blocks disengages them from their slots, allowing a slider to move within a groove, thereby adjusting the distance between the drying placement mechanism and the dryer. The distance between the silicon block placement mechanism and the dryer is adjusted according to the number of slots. By adjusting the drying position, it is possible to better ensure uniform heating of silicon blocks of different sizes. However, in the aforementioned comparative patent, after drying the silicon material, the removal of the silicon is inconvenient, thus affecting the overall drying efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a multifunctional drying device for silicon material production, which improves overall drying efficiency.

[0005] The above-mentioned technical objective of the present invention is achieved through the following technical solution: a multifunctional drying equipment for silicon material production, comprising an oven, a storage device disposed inside the oven for storing silicon material, heating and drying devices disposed at the top and bottom of the oven, an air filtration and purification device disposed at the top of the oven for treating the air inside the oven, an inert gas generator connected to the oven for conveying inert gas into the oven, and a door disposed at the front of the oven. The storage device includes a mesh tray hinged to one end of the door and disposed inside the oven, and a storage device disposed between the side of the mesh tray away from the door and the oven. The system includes a lifting mechanism that drives the mesh tray to rotate upwards, a baffle hinged to one end of the mesh tray near the oven door, a first linkage mechanism positioned between the baffle and the mesh tray that extends outside the oven after rotating the baffle to its limit, and a collection box positioned at the front of the oven. During the upward rotation of the baffle to its limit, silicon material slides along the mesh tray and baffle outside the oven and is collected by the collection box. The air filtration and purification device includes a filter purifier, a connecting pipe positioned between the filter purifier and the oven, and a unit positioned inside the oven below the mesh tray and connected to the connecting pipe. The square tube is connected to the filter purifier for negative pressure suction filtration and purification of the air in the oven. The inner side of the square tube is provided with multiple air inlets. The connecting pipe is connected to the square tube. The operation process of the drying equipment is as follows: (1) First, place the silicon material on the mesh tray and close the box door; (2) Turn on the inert gas generator to deliver inert gas into the oven, turn on the filter purifier to extract the air in the oven until the oven is full of inert gas; (3) Turn on the heating and drying devices located at the top and bottom of the oven to dry the silicon material; (4) After drying, turn off the heating and drying devices and turn on the inert gas generator. The inert gas generator and filter purifier are used to extract the high-heat gas in the oven, and multiple air inlets are located below the mesh tray to accelerate the cooling of silicon material; (4) After the silicon material is cooled, the inert gas generator is turned off, the box door is opened, and the mesh tray is rotated upward by the lifting mechanism. During the upward rotation of the mesh tray, the baffle is rotated and extended outside the oven by the first linkage mechanism, so that the silicon material slides into the collection box for collection; (5) The inclined mesh tray is cleaned by brush, and the dust falling along the mesh of the mesh tray is filtered by negative pressure through the filter purifier, connecting pipe and square pipe.

[0006] By adopting the above technical solution, the operation process of the drying equipment is as follows: (1) First, place the silicon material on the mesh tray and close the door, mainly for drying block silicon material; (2) Turn on the inert gas generator to deliver inert gas into the drying oven, and turn on the filter purifier to remove the air in the drying oven until the drying oven is full of inert gas to avoid oxidation during the drying process; (3) Turn on the heating and drying devices located at the top and bottom of the drying oven to dry the silicon material; (4) After drying, turn off the heating and drying devices, and turn on the inert gas generator and filter purifier to achieve the drying of the high-temperature gas in the drying oven (hydrogen chloride will be generated during the drying process). (4) After the silicon material is cooled, the inert gas generator is turned off, the box door is opened, and the mesh tray is rotated upward by the lifting mechanism. During the upward rotation of the mesh tray, the baffle is rotated and extended outside the oven by the first linkage mechanism, so that the silicon material slides into the collection box for collection. (5) The inclined mesh tray is cleaned by the brush. The dust falling along the mesh of the mesh tray is filtered by the filter purifier, the connecting pipe and the square pipe for negative pressure suction and filtration. Finally, it has the functions of drying in the inert gas process to avoid oxidation, realizing rapid cooling of the dried silicon material, purifying the harmful gases in the drying process, realizing automatic feeding of the dried silicon material, and realizing suction of dust in the cleaning process, so as to improve the overall production efficiency.

[0007] A further configuration of the present invention is as follows: the lifting mechanism includes a high-temperature resistant cylinder hinged between the oven and the mesh tray on the side away from the oven door, arc-shaped arms disposed on both sides of the oven with their centers passing through the rotation axis of the mesh tray, and a guide shaft disposed on the side of the mesh tray away from the oven door with its two ends slidably disposed within the arc-shaped arms; when the guide shaft is at the lower end of the arc-shaped arm, the mesh tray is in a horizontal state, and when the guide shaft is at the upper end of the arc-shaped arm, the mesh tray rotates upward to its limit state.

[0008] By adopting the above technical solution, the high-temperature resistant cylinder can drive the mesh tray to rotate during operation; and by setting the arc-shaped arm and guide shaft, the rotation angle of the mesh tray can be limited, while improving the stability of the mesh tray during rotation.

[0009] A further configuration of the present invention is as follows: the first linkage mechanism includes two elastic connecting components respectively disposed on both sides of the mesh tray and near the end of the baffle; a first connecting ring disposed at one elastically movable end of the elastic connecting component; two second connecting rings respectively disposed on both sides of the baffle; two first guide rings respectively disposed inside the oven on the side of the mesh tray away from the lifting mechanism; two second guide rings disposed inside the oven on the side of the mesh tray near the lifting mechanism; two third connecting rings disposed on the side of the mesh tray near the lifting mechanism; and two cables; the two ends of the cables are fixed between the first connecting rings and the third connecting rings; the cables pass through the second connecting rings in sequence and are locked with bolts, and then pass through the first guide rings and the second guide rings; when the mesh tray is in a horizontal state, the portion of the cable located between the second connecting rings and the third connecting rings is in a relaxed state, and the baffle is pressed against the side of the mesh tray under the action of the elastic connecting components to achieve closure; during the process of the lifting mechanism driving the mesh tray to rotate upward, the portion of the cable located between the second connecting rings and the third connecting rings is driven first, and then the elastic force of the elastic connecting component is overcome so that the baffle extends outside the oven after opening.

[0010] By adopting the above technical solution, when the mesh tray is in a horizontal state, the cable portion between the second and third connecting rings is in a relaxed state, and the baffle is pressed against the side of the mesh tray under the action of the elastic connecting component to achieve closure; during the process of the lifting mechanism driving the mesh tray to rotate upward, the cable portion between the second and third connecting rings is driven first, and then the elastic force of the elastic connecting component is overcome so that the baffle opens and extends outside the oven, and finally realizes the function of the baffle as the mesh tray rotates to achieve the position of the cover plate.

[0011] A further configuration of the present invention is as follows: the elastic connection assembly includes a telescopic sleeve disposed on the side of the mesh tray, a telescopic shaft disposed on the telescopic sleeve and connected to a first connecting ring at one end near the baffle, a compression spring sleeved on the other end of the telescopic shaft, and an anti-detachment end cap threaded to the end of the telescopic shaft to prevent the compression spring from falling off. When the mesh tray is in a horizontal state, the compression spring is in a compressed state so that the baffle is pressed against the side of the mesh tray to achieve closure.

[0012] By adopting the above technical solution, when the mesh tray is in a horizontal state, the compression spring is in a compressed state so that the baffle is pressed against the side of the mesh tray to achieve closure. After the cable is tightened, as the mesh tray continues to rotate, the cable can overcome the elastic force of the compression spring, so that the part of the cable between the first connecting ring and the second connecting ring undergoes an unknown change relative to the mesh tray, thereby causing the baffle to open after rotation and extend outside the box.

[0013] A further configuration of the present invention includes: a conveying pipe for conveying inert gas is provided between the gas output end of the inert gas generator and the top of the oven; a T-joint is provided at one end of the connecting pipe near the oven; an auxiliary pipe connecting to the lower side of the oven is provided on the remaining port of the T-joint; a lifting plate is provided inside the oven to open or cover the interface between the auxiliary pipe and the oven during the lifting process; a second linkage mechanism is provided between the mesh tray near the lifting mechanism and the lifting plate; when the mesh tray is in a horizontal state, the lifting plate opens the interface between the auxiliary pipe and the oven; when the mesh tray rotates upward to its limit under the action of the lifting mechanism, the lifting plate closes the interface between the auxiliary pipe and the oven under the action of the second linkage mechanism.

[0014] By adopting the above technical solution, when the mesh tray is in a horizontal state, the lifting plate opens the interface between the auxiliary pipe and the oven. At this time, when the oven is filled with inert gas, the efficiency of air extraction from the oven can be improved. Moreover, when the silicon material is cooling, the efficiency of airflow through the silicon material can be improved, thus improving the cooling efficiency. At the same time, when the mesh tray rotates upward to its limit under the action of the lifting mechanism, the lifting plate closes the interface between the auxiliary pipe and the oven, which can increase the negative pressure of the square pipe to suck up the dust falling along the mesh of the mesh tray.

[0015] A further configuration of the present invention is that the second linkage mechanism includes two first connecting rods hinged to both sides of the lifting plate and two second connecting rods hinged between the first connecting rods and the mesh tray.

[0016] By adopting the above technical solution, the rotation of the mesh tray and the lifting of the lifting plate are linked through the setting of the first and second links.

[0017] A further feature of the present invention is that a square sealing ring is provided on the inner side of the oven, surrounding the interface between the auxiliary tube and the oven. The thickness of the square sealing ring gradually decreases along the vertically downward direction. The lifting plate has a protrusion whose thickness gradually increases along the vertically downward direction to achieve pressing against the square sealing ring during the upward movement.

[0018] By adopting the above technical solution, during the process of the mesh tray rotating upward to drive the lifting plate to move upward, the protrusion gradually presses against the square sealing ring to achieve a seal, so as to ensure the sealing performance when closing the interface between the auxiliary tube and the oven.

[0019] A further feature of the present invention is that the mesh tray has a plurality of mesh recesses that extend to the baffle and are used for stacking silicon material.

[0020] By adopting the above technical solution, multiple recesses can be set to achieve partitioned stacking of silicon material, avoiding mutual interference during the silicon material unloading process.

[0021] The beneficial effects of this invention are as follows: The inert gas generator is turned on to deliver inert gas into the oven; the filter purifier is turned on to extract air from the oven until it is filled with inert gas, preventing oxidation during the drying process; after drying, the heating and drying device is turned off, and the inert gas generator and filter purifier are turned on to extract the high-temperature gases (acidic gases such as hydrogen chloride and hydrofluoric acid, as well as carbon monoxide and nitrogen oxides, are generated during the drying process) from the oven; multiple air inlets are located below the mesh tray to accelerate the cooling of the silicon material; after the silicon material has cooled, the inert gas generator is turned off, the oven door is opened, and the mesh tray is lifted by the lifting mechanism. The perforated tray rotates upwards, and during this rotation, the first linkage mechanism causes the baffle to rotate and extend outside the oven, allowing the silicon material to slide into the collection box for collection. A brush cleans the tilted perforated tray, and dust falling along the mesh is filtered and vacuumed through a filter, connecting pipe, and square pipe. Ultimately, the system achieves the following functions: drying in an inert gas process to prevent oxidation; rapid cooling of the dried silicon material; purification of harmful gases during the drying process; automatic unloading of the dried silicon material; and dust extraction during the cleaning process, thereby improving overall production efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of the present invention;

[0024] Figure 2 This is a partial structural schematic diagram of the present invention;

[0025] Figure 3 This is a cross-sectional view of the mesh tray in this invention;

[0026] Figure 4 yes Figure 2 A magnified view of the area located at point A;

[0027] Figure 5 yes Figure 2 A magnified view of the area located at point B;

[0028] Figure 6 yes Figure 2 A magnified view of the area located at point C;

[0029] Figure 7This is a schematic diagram of the silicon material in the unloading state in this invention.

[0030] In the diagram: 1. Oven; 11. Square sealing ring; 2. Storage device; 21. Mesh tray; 211. Mesh recess; 22. Lifting mechanism; 221. High-temperature resistant cylinder; 222. Arc-shaped arm; 223. Guide shaft; 23. Baffle; 24. First linkage mechanism; 241. Elastic connecting assembly; 2411. Telescopic sleeve; 2412. Telescopic shaft; 2413. Compression spring; 2414. Anti-detachment end cap; 242. First connecting ring; 243. Second connecting ring; 244. 245. First guide ring; 246. Second guide ring; 247. Third connecting ring; 248. Cable; 25. Collection box; 3. Heating and drying device; 4. Air filtration and purification device; 41. Filter purifier; 42. Connecting pipe; 43. Square pipe; 431. Air inlet; 44. T-joint; 45. Auxiliary pipe; 5. Inert gas generator; 51. Conveying pipe; 6. Box door; 7. Lifting plate; 71. Protrusion; 8. Second linkage mechanism; 81. First connecting rod; 82. Second connecting rod. Detailed Implementation

[0031] The technical solution of the present invention will now be clearly and completely described with reference to specific embodiments. Obviously, the described embodiments are merely some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0032] Example: A multi-functional drying equipment for silicon material production, such as... Figure 1 As shown, it includes an oven 1, a storage device 2 disposed inside the oven 1 for storing silicon material, a heating and drying device disposed at the top and bottom of the oven 1, an air filtration and purification device disposed at the top of the oven 1 for processing the air inside the oven 1, an inert gas generator connected to the oven 1 for delivering inert gas to the oven 1, and a door disposed at the front of the oven 1.

[0033] like Figures 1 to 3 As shown, the storage device 2 includes a mesh tray 21 hinged to the oven 1 at one end near the door 6; a lifting mechanism 22 positioned between the mesh tray 21 away from the door 6 and the oven 1, which drives the mesh tray 21 to rotate upwards; a baffle 23 hinged to the end of the mesh tray 21 near the door 6; a first linkage mechanism 24 positioned between the baffle 23 and the mesh tray 21, which extends outside the oven 1 after rotating the baffle 23 during the upward rotation of the mesh tray 21 to its limit; and a collection box 25 positioned at the front of the oven 1 (see main details). Figure 1As the baffle 23 rotates upward to its limit, the silicon material slides out of the oven 1 along the mesh tray 21 and the baffle 23 and is collected by the collection box 25. The mesh tray 21 has a plurality of mesh recesses 211 that extend to the baffle 23 and are used to stack the silicon material.

[0034] like Figure 1 and Figure 2 As shown, the lifting mechanism 22 includes a high-temperature resistant cylinder 221 hinged between the oven 1 and the mesh tray 21 on the side away from the door 6, an arc-shaped arm 222 disposed on both sides of the oven 1 with its center passing through the rotation axis of the mesh tray 21, and a guide shaft 223 disposed on the side of the mesh tray 21 away from the door 6 with both ends slidably disposed within the arc-shaped arm 222. When the guide shaft 223 is at the lower end of the arc-shaped arm 222, the mesh tray 21 is in a horizontal state; when the guide shaft 223 is at the upper end of the arc-shaped arm 222, the mesh tray 21 rotates upward to its limit state.

[0035] like Figure 2 , Figure 4 and Figure 5As shown, the first linkage mechanism 24 includes two elastic connecting components 241 respectively disposed on both sides of the mesh tray 21 and near the end of the baffle 23, a first connecting ring 242 disposed at one elastically movable end of the elastic connecting component 241, two second connecting rings 243 respectively disposed on both sides of the baffle 23, two first guide rings 244 respectively disposed inside the oven 1 on the side of the mesh tray 21 away from the lifting mechanism 22, two second guide rings 245 disposed inside the oven 1 on the side of the mesh tray 21 near the lifting mechanism 22, two third connecting rings 246 disposed on the side of the mesh tray 21 near the lifting mechanism 22, and two cables 247; the two ends of the cables 247 are fixed between the first connecting rings 242 and the third connecting rings 246, and the cables 247 pass through the second connecting rings 243 in sequence and are locked with bolts, and pass through the first guide rings 244 and the second guide rings 245. When the mesh tray 21 is in a horizontal state, the cable 247 between the second connecting ring 243 and the third connecting ring 246 is in a relaxed state, and the baffle 23 is pressed against the side of the mesh tray 21 by the elastic connecting component 241 to achieve closure; during the process of the lifting mechanism 22 driving the mesh tray 21 to rotate upward, the cable 247 between the second connecting ring 243 and the third connecting ring 246 is first driven, and then the elastic force of the elastic connecting component 241 is overcome so that the baffle 23 opens and extends outside the oven 1. The elastic connection assembly 241 includes a telescopic sleeve 2411 disposed on the side of the mesh tray 21, a telescopic shaft 2412 disposed on the telescopic sleeve 2411 and connected to the first connecting ring 242 at one end near the baffle 23, a compression spring 2413 sleeved on the other end of the telescopic shaft 2412, and an anti-detachment end cap 2414 threaded to the end of the telescopic shaft 2412 to prevent the compression spring 2413 from falling off. When the mesh tray 21 is in a horizontal state, the compression spring 2413 is in a compressed state so that the baffle 23 is pressed against the side of the mesh tray 21 to achieve closure.

[0036] like Figure 1 As shown, a delivery pipe 51 for conveying inert gas is provided between the gas output end of the inert gas generator 5 and the top of the oven 1. In this embodiment, the inert gas generator 5 is a nitrogen generator.

[0037] like Figure 1 , Figure 2 , Figure 5 and Figure 6As shown, the air filtration and purification device 4 includes a filter 41, a connecting pipe 42 disposed between the filter 41 and the oven 1, and a square pipe 43 disposed inside the oven 1 located below the mesh tray 21 and connected to the connecting pipe 42. The filter 41 is used to perform negative pressure suction filtration and purification of the air inside the oven 1. The inner side of the square pipe 43 is provided with multiple air inlets 431 with openings tilted upwards. The connecting pipe 42 and the square pipe 43 are connected. A three-way connector 44 is provided at one end of the connecting pipe 42 near the oven 1. An auxiliary pipe 45 is provided on the remaining interface of the three-way connector 44 to connect to the lower side of the oven 1. A lifting plate 7 is provided inside the oven 1 to open or cover the interface between the auxiliary pipe 45 and the oven 1 during the lifting process. A second linkage mechanism 8 is provided between the mesh tray 21 near the lifting mechanism 22 and the lifting plate 7. When the mesh tray 21 is in a horizontal state, the lifting plate 7 opens the interface between the auxiliary pipe 45 and the oven 1. When the mesh tray 21 is rotated upward to the limit state under the action of the lifting mechanism 22, the lifting plate 7 closes the interface between the auxiliary pipe 45 and the oven 1 under the action of the second linkage mechanism 8.

[0038] like Figure 2 , Figure 5 and Figure 6 As shown, the second linkage mechanism 8 includes two first connecting rods 81 hinged to both sides of the lifting plate 7, and two second connecting rods 82 hinged between the first connecting rods 81 and the mesh tray 21. A square sealing ring 11 is provided inside the oven 1, surrounding the interface between the auxiliary tube 45 and the oven 1. The thickness of the square sealing ring 11 gradually decreases along the vertically downward direction. The lifting plate 7 has a protrusion 71 whose thickness gradually increases along the vertically downward direction, thus pressing against the square sealing ring 11 during upward movement.

[0039] Implementation effect: The operation process of the drying equipment is as follows: (1) First, place the silicon material on the mesh tray 21 and close the box door 6; (2) Turn on the inert gas generator 5 to transport the inert gas into the oven 1, and turn on the filter purifier 41 to extract the air in the oven 1 until the oven 1 is full of inert gas; (3) Turn on the heating and drying devices 3 located at the top and bottom of the oven 1 to dry the silicon material; (4) After drying, turn off the heating and drying devices 3, and turn on the inert gas generator 5 and the filter purifier 41 to extract the high-temperature gas in the oven 1, and multiple air inlets 431 Located below the mesh tray 21, it accelerates the cooling of silicon material; (4) After the silicon material is cooled, the inert gas generator 5 is turned off, the box door 6 is opened, and the mesh tray 21 is rotated upward by the lifting mechanism 22. During the upward rotation of the mesh tray 21, the baffle 23 is rotated and extended outside the oven 1 by the first linkage mechanism 24, so that the silicon material slides into the collection box 25 for collection; (5) The inclined mesh tray 21 is cleaned by brush, and the dust falling along the mesh of the mesh tray 21 is filtered by negative pressure suction through the filter purifier 41, the connecting pipe 42, and the square pipe 43.

[0040] The operating principle of the baffle 23 is as follows: When the mesh tray 21 is in a horizontal state, the cable 247 between the second connecting ring 243 and the third connecting ring 246 is in a relaxed state. The baffle 23 is pressed against the side of the mesh tray 21 by the elastic connecting component 241 to achieve closure. During the process of the lifting mechanism 22 driving the mesh tray 21 to rotate upward, the cable 247 between the second connecting ring 243 and the third connecting ring 246 is driven first, and then the elastic force of the elastic connecting component 241 is overcome so that the baffle 23 opens and extends outside the oven 1, and finally realizes the function of the baffle 23 as the mesh tray 21 rotates to achieve the position of the cover.

[0041] The operating principle of the lifting plate 7 is as follows: When the mesh tray 21 is in a horizontal state, the lifting plate 7 opens the interface between the auxiliary pipe 45 and the oven 1. At this time, when the oven 1 is filled with inert gas, the efficiency of air extraction from the oven 1 can be improved; and when the silicon material is cooled, the efficiency of airflow through the silicon material can be improved, thus improving the cooling efficiency; at the same time, when the mesh tray 21 is rotated upward to the limit state under the action of the lifting mechanism 22, the lifting plate 7 closes the interface between the auxiliary pipe 45 and the oven 1, which can increase the negative pressure of the square pipe 43 to suck up the dust falling along the mesh of the mesh tray 21.

Claims

1. A multifunctional drying device for silicon material production, comprising an oven (1), a storage device (2) disposed within the oven (1) for storing silicon material, a heating and drying device (3) disposed at the top and bottom of the oven (1), an air filtration and purification device (4) disposed at the top of the oven (1) for processing the air inside the oven (1), an inert gas generator (5) connected to the oven (1) for conveying inert gas to the oven (1), and a door (6) disposed at the front of the oven (1), characterized in that: The storage device (2) includes a mesh tray (21) hinged to the end near the door (6) inside the oven (1), a lifting mechanism (22) between the side of the mesh tray (21) away from the door (6) and the oven (1) and driving the mesh tray (21) to rotate upward, a baffle (23) hinged to the end of the mesh tray (21) near the door (6), a first linkage mechanism (24) between the baffle (23) and the mesh tray (21) and extending to the outside of the oven (1) after driving the baffle (23) to rotate during the upward rotation of the mesh tray (21) to the limit state, and a collection box (25) on the front side of the oven (1). During the upward rotation of the baffle (23) to the limit state, the silicon material slides out along the mesh tray (21) and the baffle (23) to the outside of the oven (1) and is collected by the collection box (25). The air filtration and purification device (4) includes a filter purifier (41), a connecting pipe (42) between the filter purifier (41) and the oven (1), and a square pipe (43) located in the oven (1) below the mesh tray (21) and connected to the connecting pipe (42). The filter purifier (41) is used to perform negative pressure suction filtration and purification of the air in the oven (1). The square pipe (43) has multiple air inlets (431) on its inner side. The connecting pipe (42) and the square pipe (43) are connected. The operation process of the drying equipment is as follows: (1) First, place the silicon material on the mesh tray (21) and close the box door (6); (2) Turn on the inert gas generator (5) to deliver the inert gas into the oven (1), and turn on the filter purifier (41) to extract the air in the oven (1) until the oven (1) is filled with inert gas; (3) Turn on the heating and drying devices (3) located at the top and bottom of the oven (1) to dry the silicon material; (4) After drying, turn off the heating and drying devices (3), and turn on the inert gas generator (5) and the filter purifier (41) to extract the high-temperature gas in the oven (1), and multiple air inlets (431) are located on the mesh tray (21). (4) After the silicon material is cooled, the inert gas generator (5) is turned off and the box door (6) is opened. The mesh tray (21) is rotated upward by the lifting mechanism (22). During the upward rotation of the mesh tray (21), the baffle (23) is rotated and extended outside the oven (1) by the first linkage mechanism (24), so that the silicon material slides into the collection box (25) for collection. (5) The inclined mesh tray (21) is cleaned by the brush. The dust falling along the mesh of the mesh tray (21) is filtered by negative pressure suction through the filter purifier (41), the connecting pipe (42), and the square pipe (43).

2. The multifunctional drying equipment for silicon material production according to claim 1, characterized in that: The lifting mechanism (22) includes a high-temperature resistant cylinder (221) hinged between the oven (1) and the mesh tray (21) on the side away from the door (6), an arc arm (222) on both sides of the oven (1) with its center passing through the rotation axis of the mesh tray (21), and a guide shaft (223) on the side of the mesh tray (21) away from the door (6) with both ends slidably disposed in the arc arm (222). When the guide shaft (223) is at the lower end of the arc arm (222), the mesh tray (21) is in a horizontal state. When the guide shaft (223) is at the upper end of the arc arm (222), the mesh tray (21) rotates upward to its limit state.

3. The multifunctional drying equipment for silicon material production according to claim 2, characterized in that: The first linkage mechanism (24) includes two elastic connecting components (241) respectively disposed on both sides of the mesh tray (21) and near the end of the baffle (23), a first connecting ring (242) disposed on one elastically movable end of the elastic connecting component (241), two second connecting rings (243) respectively disposed on both sides of the baffle (23), two first guide rings (244) respectively disposed in the oven (1) and on the side of the mesh tray (21) away from the lifting mechanism (22), and two second guide rings disposed in the oven (1) and located in the middle of the mesh tray (21). The mesh tray (21) has a second guide ring (245) on the side near the lifting mechanism (22), two third connecting rings (246) on the side near the lifting mechanism (22), and two cables (247); the two ends of the cables (247) are fixed between the first connecting ring (242) and the third connecting ring (246), and the cables (247) pass through the second connecting ring (243) in sequence and are locked with bolts, and pass through the first guide ring (244) and the second guide ring (245); When the mesh tray (21) is in a horizontal state, the cable (247) between the second connecting ring (243) and the third connecting ring (246) is in a relaxed state, and the baffle (23) is pressed against the side of the mesh tray (21) under the action of the elastic connecting component (241) to achieve closure; during the process of the lifting mechanism (22) driving the mesh tray (21) to rotate upward, the cable (247) between the second connecting ring (243) and the third connecting ring (246) is first driven, and then the elastic force of the elastic connecting component (241) is overcome so that the baffle (23) opens and extends outside the oven (1).

4. The multifunctional drying equipment for silicon material production according to claim 3, characterized in that: The elastic connection assembly (241) includes a telescopic sleeve (2411) disposed on the side of the mesh tray (21), a telescopic shaft (2412) disposed on the telescopic sleeve (2411) and connected to the first connecting ring (242) at one end near the baffle (23), a compression spring (2413) sleeved on the other end of the telescopic shaft (2412), and an anti-detachment end cap (2414) threaded to the end of the telescopic shaft (2412) and preventing the compression spring (2413) from falling off. When the mesh tray (21) is in a horizontal state, the compression spring (2413) is in a compressed state so that the baffle (23) is pressed against the side of the mesh tray (21) to achieve closure.

5. A multi-functional drying device for silicon material production according to claim 1, characterized in that: A conveying pipe (51) for conveying inert gas is provided between the gas output end of the inert gas generator (5) and the top of the oven (1). A three-way connector (44) is provided at one end of the connecting pipe (42) near the oven (1). An auxiliary pipe (45) connecting to the lower side of the oven (1) is provided on the remaining interface of the three-way connector (44). A lifting plate (7) is provided inside the oven (1) to open or cover the interface of the auxiliary pipe (45) and the oven (1) during the lifting process. A second linkage mechanism (8) is provided between the side of the mesh tray (21) near the lifting mechanism (22) and the lifting plate (7). When the mesh tray (21) is in a horizontal state, the lifting plate (7) opens the interface between the auxiliary tube (45) and the oven (1). When the mesh tray (21) rotates upward to the limit state under the action of the lifting mechanism (22), the lifting plate (7) closes the interface between the auxiliary tube (45) and the oven (1) under the action of the second linkage mechanism (8).

6. The multifunctional drying equipment for silicon material production according to claim 5, characterized in that: The second linkage mechanism (8) includes two first links (81) hinged on both sides of the lifting plate (7) and two second links (82) hinged between the first links (81) and the mesh tray (21).

7. A multi-functional drying device for silicon material production according to claim 5, characterized in that: The oven (1) is provided with a square sealing ring (11) around the interface between the auxiliary tube (45) and the oven (1). The thickness of the square sealing ring (11) gradually decreases in the vertical downward direction. The lifting plate (7) has a protrusion (71) with a thickness that gradually increases in the vertical downward direction to press against the square sealing ring (11) during the upward movement.

8. A multi-functional drying device for silicon material production according to claim 1, characterized in that: The mesh tray (21) has a plurality of mesh recesses (211) that extend to the baffle (23) and are used for stacking silicon material.

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