High-reliability piezoelectric nanometer deflection table

Abstract

The invention relates to the technical field of precise positioning tables, and discloses a high-reliability piezoelectric nano deflection table. And two first piezoelectric actuators parallel to the X axis and two second piezoelectric actuators parallel to the Y axis are arranged between the shell and the moving surface. The first piezoelectric actuator and the second piezoelectric actuator respectively comprise a first output end and a second output end. And the first output end and the second output end are connected with the moving surface. The two first piezoelectric actuators are used for driving the moving surface to deflect around the X axis, and the two second piezoelectric actuators are used for driving the moving surface to deflect around the Y axis. The parallel structure of the first piezoelectric actuator and the second piezoelectric actuator is adopted, and two-dimensional high-precision deflection of theta x and theta y is achieved. The flexible hinge of the vertical structure can limit the displacement of the moving surface in the non-moving direction. And the amplifying body is of a bilaterally symmetrical structure, so that the rigidity and the vibration resistance in the movement direction are improved. The whole structure is simple and compact, the motion coupling is small, the repeated positioning accuracy is high, the reliability is high, and the load is large.

Description

Technical Field

[0001] This invention belongs to the field of precision positioning stage technology, and more specifically, relates to a high-reliability piezoelectric nano-oscillating stage. Background Technology

[0002] Two-axis yaw precision positioning motion platforms are crucial equipment in many high-tech fields, such as optical engineering, semiconductor manufacturing, astronomical observation, and biological manipulation, serving as the core actuation carrier for achieving related objectives. In recent years, thanks to advancements in piezoelectric ceramic manufacturing processes and technologies, commercially available piezoelectric ceramic sheets offer significant advantages such as miniaturization, high reliability, and stability, making them ideal for various precision adjustments and precision instrument applications. However, to achieve two-dimensional deflection along the X and Y axes, existing piezoelectric nano-yaw stages often suffer from complex structures, poor operational reliability, low repeatability, and limited load capacity.

[0003] Based on the above, the current problem to be solved is to provide a highly reliable piezoelectric nano-oscillating stage with simple structure, high repeatability, and large load capacity. Summary of the Invention

[0004] The purpose of this invention is to provide a highly reliable piezoelectric nano-shaking stage, which aims to solve the problems of complex structure, low repeatability, small load and low reliability of existing piezoelectric nano-shaking stages.

[0005] This invention is implemented as follows: a high-reliability piezoelectric nano-deflection stage includes a housing and a moving surface. Two first piezoelectric actuators and two second piezoelectric actuators arranged parallel to the X-axis and parallel to the Y-axis are disposed between the housing and the moving surface. Each of the first and second piezoelectric actuators includes a first output end and a second output end, which move linearly along the Z-axis and are connected to the moving surface. The two first piezoelectric actuators drive the moving surface to deflect around the X-axis, and the two second piezoelectric actuators drive the moving surface to deflect around the Y-axis.

[0006] Furthermore, a flexible hinge is provided between the first piezoelectric actuator and the moving surface, and between the second piezoelectric actuator and the moving surface. The two ends of the flexible hinge are respectively connected to the outer shell and the moving surface, and the flexible hinge is used to limit the displacement of the moving surface in the non-movement direction.

[0007] Furthermore, the flexible hinge includes a first flexible arm arranged parallel to the X-axis and a second flexible arm arranged parallel to the Y-axis. The first flexible arm is located above the second piezoelectric actuator, and the second flexible arm is located above the first piezoelectric actuator.

[0008] Furthermore, the outer shell and the middle of the movable surface are respectively provided with light-transmitting through holes.

[0009] Furthermore, the through hole is rectangular, circular, or elliptical.

[0010] Furthermore, the first piezoelectric actuator also includes an amplifier and piezoelectric ceramics. The amplifier includes two symmetrically arranged cavity structures, and the two piezoelectric ceramics are respectively disposed in the two cavity structures. The first output terminal is disposed in the middle of the top surface of the amplifier.

[0011] Furthermore, the second piezoelectric actuator also includes an amplifier and piezoelectric ceramics. The amplifier includes two symmetrically arranged cavity structures, and the two piezoelectric ceramics are respectively disposed in the two cavity structures. The second output terminal is disposed in the middle of the top surface of the amplifier.

[0012] Furthermore, the movable surface is provided with threaded holes for connecting the load mechanism.

[0013] Furthermore, the bottom or side surface of the outer casing is provided with a fixing surface.

[0014] Furthermore, a fixing seat is provided on the side of the outer casing, and the side of the fixing seat away from the moving surface is designated as the fixing surface.

[0015] The beneficial effects of the high-reliability piezoelectric nano-oscillating stage provided by this invention are as follows:

[0016] This invention employs a parallel structure of two sets of first piezoelectric actuators parallel to the X-axis and two sets of second piezoelectric actuators parallel to the Y-axis to achieve high-precision two-dimensional deflection of θx and θy. The overall structure is simple and compact, with low motion coupling, high reliability, and stable operation.

[0017] The first and second piezoelectric actuators employ an amplifying element and piezoelectric ceramic structure. The amplifying element is designed with a symmetrical structure, increasing stiffness and vibration resistance in the direction of motion. Through rigorous mechanical testing, such as mechanical vibration resistance tests, impact vibration tests, and random vibration tests, this invention demonstrates excellent stiffness and vibration resistance, resulting in high load capacity, high repeatability, and high reliability.

[0018] This invention features a flexible hinge with a vertical structure. The flexible hinge increases the preload in the Z-axis direction of the moving surface and restricts displacement in non-moving directions. That is, the moving surface can deflect around the X-axis or Y-axis under the action of the first and second piezoelectric actuators, but will not produce linear displacement along the X-axis or Y-axis, ensuring high precision of the deflection angle.

[0019] The outer shell and the movable surface of the present invention are provided with light-transmitting through holes. The movable surface can carry a lens for two-dimensional movement, which can increase the application of optical scenarios while meeting the needs of conventional use environments, and has a wider range of applications. Attached Figure Description

[0020] Figure 1 A three-dimensional structural schematic diagram of the high-reliability piezoelectric nano-oscillating stage provided by the present invention;

[0021] Figure 2 Exploded view of the high-reliability piezoelectric nanoscale deflection stage provided by this invention;

[0022] Figure 3 A top view of the high-reliability piezoelectric nano-oscillating stage provided by this invention;

[0023] Figure 4 The present invention provides Figure 3 Sectional view along the AA direction;

[0024] Figure 5 A three-dimensional structural diagram of the outer shell provided by the present invention;

[0025] In the figure: 1-shell; 11-fixed base; 111-fixed surface; 2-moving surface; 3-first piezoelectric actuator; 31-first output end; 4-second piezoelectric actuator; 41-second output end; 5-flexible hinge; 51-first flexible arm; 52-second flexible arm; 6-through hole; a-magnification body; b-piezoelectric ceramic. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0027] The implementation of the present invention will be described in detail below with reference to specific embodiments.

[0028] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this invention, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this invention. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0029] Reference Figure 1-5The image shows a preferred embodiment of the present invention.

[0030] The high-reliability piezoelectric nanoscale deflection stage includes a housing 1 and a moving surface 2, as shown in the reference. Figure 1-2 A receiving cavity is provided between the outer casing 1 and the moving surface 2. Within the receiving cavity are two first piezoelectric actuators 3 arranged parallel to the X-axis and two second piezoelectric actuators 4 arranged parallel to the Y-axis. The two first piezoelectric actuators 3 and the two second piezoelectric actuators 4 approximately form a rectangle. Each first piezoelectric actuator 3 includes a first output end 31. Each second piezoelectric actuator 4 includes a second output end 41. The first output end 31 and the second output end 41 move linearly along the Z-axis. The first output end 31 and the second output end 41 are respectively connected to the moving surface 2. Controlling the two first piezoelectric actuators 3 can drive the moving surface 2 to deflect around the X-axis. Controlling the two second piezoelectric actuators 4 can drive the moving surface 2 to deflect around the Y-axis.

[0031] Flexible hinges 5 are provided between the first piezoelectric actuator 3 and the moving surface 2, and between the second piezoelectric actuator 4 and the moving surface 2. The two ends of the flexible hinge 5 are connected to the outer shell 1 and the moving surface 2, respectively. The flexible hinge 5 increases the restoring force of the moving surface 2 in the Z-axis direction and restricts the displacement of the moving surface 2 in non-moving directions. The first output end 31 and the second output end 41 move linearly along the Z-axis. Under the action of the first piezoelectric actuator 3 and the second piezoelectric actuator 4, the moving surface 2 can deflect around the X-axis or Y-axis, but will not move linearly along the X-axis or Y-axis, ensuring high-precision positioning of the deflection angle. Preferably, the flexible hinge 5 includes a first flexible arm 51 parallel to the X-axis and a second flexible arm 52 parallel to the Y-axis. The first flexible arm 51 is located above the second piezoelectric actuator 4, and the second flexible arm 52 is located above the first piezoelectric actuator 3. The first flexible arm 51 and the second flexible arm 52 are arranged vertically. The ends of the first flexible arm 51 and the second flexible arm 52 that are far from each other are connected to the outer shell 1, and the ends of the first flexible arm 51 and the second flexible arm 52 that are close to each other are connected to the moving surface 2. The vertical structure of the flexible hinge 5 effectively restricts the displacement of the moving surface 2 in the non-movement direction.

[0032] A light-transmitting through-hole 6 is correspondingly provided in the middle of the outer shell 1 and the moving surface 2. The through-hole 6 can be rectangular, circular, or elliptical. This invention expands its application to optical scenarios while meeting the needs of conventional use environments. The invention can support a lens for two-dimensional motion, and the structure has a large load capacity.

[0033] The first piezoelectric actuator 3 also includes an amplifier a and a piezoelectric ceramic b, as shown in the reference. Figure 3-4 The amplifier a comprises two symmetrically arranged cavity structures. Two piezoelectric ceramics b are respectively disposed within the two cavity structures. The first output terminal 31 is located in the middle of the top surface of the amplifier a. The two piezoelectric ceramics b are tilted at a certain angle. The minute displacement of the two piezoelectric ceramics b is amplified by the amplifier a and output along the Z-axis.

[0034] The second piezoelectric actuator 4 can also be selected with a similar structure to the first piezoelectric actuator 3. The second piezoelectric actuator 4 may further include an amplifier a and piezoelectric ceramics b. The amplifier a includes two symmetrically arranged cavity structures. The two piezoelectric ceramics b are respectively disposed within the two cavity structures. The second output terminal 41 is located in the middle of the top surface of the amplifier a. The two piezoelectric ceramics b are tilted at a certain angle. The minute displacement of the two piezoelectric ceramics b is amplified by the amplifier a and output along the Z-axis.

[0035] The movable surface 2 is provided with threaded holes for connecting the load mechanism. The threaded holes are preferably distributed in a circular or rectangular array to ensure a stable connection between the load mechanism and the movable surface 2 and to ensure uniform force distribution. The bottom or side surface of the outer casing 1 is provided with a fixed surface 111, as shown in the reference. Figure 5 Depending on the application scenario, the bottom surface or the side surface can be used as the support, allowing for personalized customization. In the preferred configuration where the side surface is used as the support, a fixing seat 11 is provided on the side of the outer shell 1, and the side of the fixing seat 11 furthest from the moving surface 2 is designated as the fixing surface 111.

[0036] This invention is not intended to limit the scope of the invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the invention should be included within the scope of protection of the invention.

Claims

1. A high-reliability piezoelectric nanoscale deflection stage, characterized in that, The device includes a housing (1) and a moving surface (2). Two first piezoelectric actuators (3) and two second piezoelectric actuators (4) are arranged parallel to the X-axis and parallel to the Y-axis between the housing (1) and the moving surface (2). The first piezoelectric actuators (3) and the second piezoelectric actuators (4) respectively include a first output end (31) and a second output end (41). The first output end (31) and the second output end (41) move linearly along the Z-axis. The first output end (31) and the second output end (41) are respectively connected to the moving surface (2). The two first piezoelectric actuators (3) are used to drive the moving surface (2) to deflect around the X-axis, and the two second piezoelectric actuators (4) are used to drive the moving surface (2) to deflect around the Y-axis.

2. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, A flexible hinge (5) is provided between the first piezoelectric actuator (3) and the moving surface (2), and between the second piezoelectric actuator (4) and the moving surface (2). The two ends of the flexible hinge (5) are connected to the outer shell (1) and the moving surface (2) respectively. The flexible hinge (5) is used to limit the displacement of the moving surface (2) in the non-movement direction.

3. The high-reliability piezoelectric nanoscale deflection stage according to claim 2, characterized in that, The flexible hinge (5) includes a first flexible arm (51) arranged parallel to the X-axis and a second flexible arm (52) arranged parallel to the Y-axis. The first flexible arm (51) is located above the second piezoelectric actuator (4), and the second flexible arm (52) is located above the first piezoelectric actuator (3).

4. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, The outer shell (1) and the moving surface (2) are respectively provided with light-transmitting through holes (6) in the middle.

5. The high-reliability piezoelectric nanoscale deflection stage according to claim 4, characterized in that, The through hole (6) is rectangular, circular, or elliptical.

6. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, The first piezoelectric actuator (3) further includes an amplifier (a) and a piezoelectric ceramic (b). The amplifier (a) includes two symmetrically arranged cavity structures, and the two piezoelectric ceramics (b) are respectively disposed in the two cavity structures. The first output terminal (31) is disposed in the middle of the top surface of the amplifier (a).

7. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, The second piezoelectric actuator (4) further includes an amplifier (a) and a piezoelectric ceramic (b). The amplifier (a) includes two symmetrically arranged cavity structures, and the two piezoelectric ceramics (b) are respectively disposed in the two cavity structures. The second output terminal (41) is disposed in the middle of the top surface of the amplifier (a).

8. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, The movable surface (2) is provided with a threaded hole for connecting the load mechanism.

9. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, The bottom or side surface of the outer shell (1) is provided with a fixing surface (111).

10. The high-reliability piezoelectric nanoscale deflection stage according to claim 1, characterized in that, The outer shell (1) is provided with a fixing seat (11) on its side, and the side of the fixing seat (11) away from the moving surface (2) is set as the fixing surface (111).

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