Grid transmission transition cabin door for positioning repeatability

Abstract

The present invention relates to a system and / or method for providing positioning repeatability to close an opening of a scientific instrument and / or to align a sample with respect to a coordinate system of the scientific instrument. The system may include a holder receiving a sample support cartridge, a kinematic coupling mechanism first portion receiving a kinematic coupling mechanism second portion, and a kinematic coupling mechanism second portion disposed at the holder, wherein at least the first part of the kinematic coupling mechanism or the second part of the kinematic coupling mechanism is arranged to move along with the sample supporting box in a linkage manner when being coupled with the holding piece. The system may include a vacuum chamber housing, a vacuum chamber door, and a kinematic coupling mechanism for adjustably aligning a sample support cartridge relative to the vacuum chamber housing at the vacuum chamber door.

Description

Technical Field

[0001] This invention relates to a system for providing positional repeatability for closing the opening of a scientific instrument and / or for aligning a sample relative to the coordinate system of the scientific instrument. Additionally, this invention relates to a method. Background Technology

[0002] Scientific imaging equipment can provide high magnification, which is used to obtain high-resolution images of specimens by using focused energy beams or charged particles, fine sample preparation, controlled conditions, and / or dedicated computer systems. Successfully providing each of the above aspects and thus successfully outputting informative and accurate sample images may depend on accurate, precise, and / or repeatable sample preparation, including sample positioning and / or sample alignment relative to one or more movable parts and / or imaging elements in the scientific imaging equipment. Summary of the Invention

[0003] The following summary is presented to provide a basic understanding of one or more embodiments described herein. This summary is not intended to identify important or key elements, and / or to explain the scope of specific embodiments or the scope of the claims. Its sole purpose is to present concepts in a simplified form as a preamble to the more detailed description that follows. In one or more embodiments, one or more systems, apparatuses, and / or methods described herein can provide accurate, precise, and / or repeatable sample positioning for scientific instruments such as scientific imaging systems.

[0004] According to one embodiment, the scientific instrument may include a retainer for receiving a sample support box, a first part of a kinematic coupling mechanism for receiving a second part of a kinematic coupling mechanism, and a second part of a kinematic coupling mechanism disposed at the retainer, wherein at least the first part or the second part of the kinematic coupling mechanism is configured to move in conjunction with the sample support box when coupled to the retainer.

[0005] According to another embodiment, the scientific instrument may include a vacuum chamber housing, a vacuum chamber door, and a kinematic coupling mechanism for adjustingly aligning a sample support box relative to the vacuum chamber housing at the vacuum chamber door.

[0006] According to another embodiment, the method may include kinematically coupling a sample support box to a retainer, and using a kinematic coupling mechanism with a shape that kinematically aligns the retainer against a base unit, the shape allowing adjustability of the retainer relative to the base unit when the kinematic coupling mechanism engages.

[0007] One or more embodiments described herein may be implemented within, connected to, and / or coupled to a scientific imaging device.

[0008] One or more embodiments described herein may provide a carrier support (e.g., in) for one or more embodiments, such as relative to the coordinate system of the chamber housing (e.g., chamber structure) and / or the robotic arm assembly of the scientific instrument. Figure 7 and / or Figure 8 At least four degrees of freedom of the carrier support 114 or other carrier receiver can be adjusted. These degrees of freedom can be handled individually, at least partially, by using different elements of the system and / or components described herein, such as allowing adjustment of paired, single, and / or discrete degrees of freedom without affecting one or more other degrees of freedom.

[0009] In one or more cases, such adjustment may be made after the carrier support is coupled to one or more embodiments described herein. In one or more cases, at least a portion of such adjustment may be made before the sample support box is coupled to one or more embodiments. In one or more cases, at least a portion of such adjustment may be made after the sample support box is coupled to one or more embodiments.

[0010] In one or more cases, this adjustment can achieve micrometer-level alignment (e.g., about 1 micrometer or about 2 micrometers) without the use of shims, and thus provide micrometer-level positioning repeatability. This, in turn, can allow experiments and / or imaging based on repeatable settings to meet scientific standards and / or reduce user-subjective positioning errors. Existing frameworks may not even provide positioning repeatability at the 1 or 2 micrometer level.

[0011] In practice, in one or more cases, using one or more embodiments described herein can reduce and / or completely eliminate the use of shims to adjust the position of the net support or net support receiver. This can allow for a significant reduction in setup time for scientific instruments, such as by approximately 50% or more compared to existing sample alignment frames, equipment, devices, systems, and / or methods.

[0012] One or more embodiments may provide repeatable adjustability for the systems and / or components described herein, and may allow sealing and / or alignment with a flexible sealing element between one or more embodiments and the chamber housing of a scientific instrument. This allows for handling of different seal profiles caused by compression seals, such as moving the chamber door assembly relative to the seal, without affecting the vacuum seal of the corresponding chamber sealed by the chamber door assembly of the sample positioning system described herein.

[0013] One or more embodiments described herein can be assembled in a compact form, thereby allowing for a minimal footprint of the scientific instrument chamber. Attached Figure Description

[0014] The embodiments will be readily understood through the following detailed description in conjunction with the accompanying drawings. For ease of description, the same reference numerals indicate the same structural components. The embodiments are illustrated by way of example rather than limitation in the various figures of the drawings.

[0015] Figure 1 A block diagram of an example scientific instrument for performing one or more operations, in combination with a non-limiting sample positioning system, according to one or more embodiments described herein.

[0016] Figure 2 A graphical user interface (GUI) for performing one or more methods described herein is shown according to one or more embodiments described herein.

[0017] Figure 3 A block diagram of an example computing device that can perform one or more methods disclosed herein according to one or more embodiments described herein is shown.

[0018] Figure 4 The following diagram illustrates a method based on one or more embodiments described herein. Figure 1 A partial, schematic top view of the chamber door assembly described herein used in conjunction with example scientific instruments.

[0019] Figure 5 The following are illustrated according to one or more embodiments described herein. Figure 4 Partial, schematic, side view of the chamber door assembly facing the chamber.

[0020] Figure 6 The following diagram illustrates a method based on one or more embodiments described herein. Figure 1 A partial top view of a sample positioning system used with example scientific instruments, the sample positioning system including... Figure 4 The chamber door assembly.

[0021] Figure 7 The following diagram illustrates a method based on one or more embodiments described herein. Figure 1 Example scientific instruments used together Figure 6 A partial top view of a sample positioning system facing the chamber side view, the sample positioning system comprising... Figure 4 The chamber door assembly and includes a sample support box.

[0022] Figure 8 An orthographic projection view of a grid holder according to one or more embodiments described herein, the grid holder being used to support... Figure 1 Thin sheet used for internal positioning of scientific instruments.

[0023] Figure 9The following are illustrated according to one or more embodiments described herein. Figure 7 An orthographic projection of the sample support assembly, viewed from the side of the chamber, the sample support assembly being used to hold and position relative to the chamber. Figure 1 Scientific instruments are a set of external and internal components. Figure 8 Net support frame.

[0024] Figure 10 The following are illustrated according to one or more embodiments described herein. Figure 9 An orthographic projection of the sample support assembly, a side view facing outwards, the sample support assembly being used to hold and position relative to... Figure 1 Scientific instruments are a group or more of external and internal components. Figure 8 Net support frame.

[0025] Figure 11 The components of one or more embodiments described herein are shown being spaced apart from each other. Figure 9 Orthogonal projection, top view, and front view of the sample support assembly.

[0026] Figure 12 The following are illustrated according to one or more embodiments described herein. Figure 9 The orthogonal projection, top view, and front view of the sample support box in the sample support assembly, as well as the orthogonal projection bottom view of the sample support box.

[0027] Figure 13 The following are illustrated according to one or more embodiments described herein. Figure 9 Orthogonal projection, top view, and front view of the positioning adjuster in the sample support assembly.

[0028] Figure 14 The following are illustrated according to one or more embodiments described herein. Figure 9 Orthogonal projection, top view, and front view of the flexible adjuster in the sample support assembly.

[0029] Figure 15 A flowchart is shown of a method for using the sample positioning system described herein according to one or more embodiments.

[0030] Figure 16 A flowchart is shown of another method for using the sample positioning system described herein according to one or more embodiments.

[0031] Figure 17 The method of using the sample positioning system described herein according to one or more embodiments is illustrated. Figure 16 The continuation of the flowchart.

[0032] Figure 18A block diagram of an example scientific instrument system that can be incorporated into the system described herein, according to one or more embodiments thereof.

[0033] Figure 19 A block diagram of an example operating environment that may be incorporated into the subject matter described herein is shown.

[0034] Figure 20 An example schematic block diagram of a computing environment that can at least partially interact with and / or implement the topics described herein is shown. Detailed Implementation

[0035] The following detailed description is illustrative only and is not intended to limit the implementation and / or application or use of the embodiments. Furthermore, it is not intended to be construed as being bound by any express or implied information provided in the foregoing “Summary of the Invention” or “Detailed Description” sections. One or more embodiments are now described with reference to the accompanying drawings, wherein the same reference numerals are used to refer to the same elements. In the following description, numerous specific details are set forth for purposes of explanation and are intended to provide a more thorough understanding of one or more embodiments. However, it will be apparent, in various cases, that one or more embodiments may be practiced without these specific details.

[0036] Various operations can be described sequentially as multiple discontinuous actions or operations in a manner most conducive to understanding the subject matter disclosed herein. However, the order of description should not be construed as implying that these operations must depend on a specific order. In particular, these operations may be performed in a different order than presented. The operations may be performed in a different order than described in the embodiments. In additional embodiments, various additional operations may be performed and / or the operations may be omitted.

[0037] Now we turn to the topic of sample positioning for scientific instruments, which is important for instrument setup, compliance, positioning repeatability, positioning accuracy and / or precision, automated sample handling, increased sample throughput and / or vacuum sealing of instrument openings, but is not limited to these.

[0038] In vacuum chamber applications, especially when there are moving parts to be sealed, resilient elements (such as O-rings or other compliant materials) can be used to provide a seal. However, with existing frames, using resilient seals (e.g., O-rings) in kinematic coupling applications requiring high repeatability can lead to positioning problems, such as positioning repeatability issues. This can be caused by friction generated by the resilient seal, dimensional variations between different resilient seals, and changes in the compression profile of the resilient seal over time, preventing a pair of mating surfaces from easily sliding against each other. This, in turn, can result in poor repeatability of the alignment of the mating surfaces relative to each other. This, in turn, can affect the alignment of the sample or sample holder relative to the coordinate system, movable points, and / or fixed points within the vacuum chamber being sealed.

[0039] Additionally and / or alternatively, sample alignment may be affected in existing systems by the use of shims to accurately align the sample relative to a coordinate system or other point inside the scientific instrument chamber. This may be because shim adjustment can be both subjective and cause components to move simultaneously in multiple degrees of freedom. Therefore, one shim may eliminate and / or modify the shim adjustment provided by another shim previously used, and so on.

[0040] Additionally and / or alternatively, in the existing framework, transferring samples between the ambient / air side (external to the instrument's chamber) and the vacuum side (internal to the instrument's chamber) significantly limits throughput. This may be at least partly attributed to stringent positioning accuracy specifications for aligning the sample at components on the air side (such as chamber door assemblies) before inserting it into the vacuum side. In one or more cases, such stringent positioning accuracy specifications may be at least partly attributed to the use of sample transfer robots or other automated sample transfer components within the instrument (e.g., on the vacuum side).

[0041] For example, a workflow performed by a scientific instrument may include transferring a grid from a loading station, such as a chamber door assembly, and / or a sample support assembly of a sample positioning system. This transfer can be achieved via a sample transfer robot or other automated sample transfer component in a vacuum environment (e.g., on the vacuum side), moving back and forth between the loading station and the wafer carrier, such as at a stage of the scientific instrument. The sample transfer robot or other automated sample transfer component has limited adjustability. Therefore, aligning the sample with the coordinate system of the sample transfer robot or other automated sample transfer component allows for successful sample transfer, while misalignment with the coordinate system can lead to sample transfer failure. Failure may include inability to obtain the sample, sample grid, or grid holder and / or misalignment thereof, resulting in the sample, sample grid, or grid holder falling off and / or misalignment at the wafer carrier.

[0042] Additionally and / or alternatively, sample throughput may be limited by the number of samples that can be loaded at the sample support assembly (e.g., in the case of loading samples into the sample positioning system). In this case, the time between sample analysis cycles can be lengthy due to the existing framework of removing samples from the sample positioning system and / or chamber, re-preparing one or more sample holders used in the previous cycle, and subsequently reloading one or more sample holders. This can be exacerbated by the time required for venting / purging the vacuum side to allow the instrument vacuum chamber to be opened using the sample positioning system, purging can typically be a fixed time period. For example, in one or more cases, each purging cycle may take approximately 200 minutes or longer, such as approximately 3.5 hours.

[0043] In view of one or more shortcomings of such existing frameworks, this document describes one or more embodiments that can provide increased accuracy and / or efficiency in sample grid alignment, and / or increased sample throughput for use with scientific experimental instruments. Additionally and / or alternatively, one or more embodiments described herein can increase the adjustability of the scientific instrument door relative to the seal and / or the independent adjustability of the sample cartridge (and the sample carrier grid contained therein) relative to any aspect of the scientific instrument and / or individual degrees of freedom that are independent of each other with respect to one or more embodiments described herein.

[0044] That is, generally speaking, one or more embodiments described herein can be used to kinematically couple a sample support box to a retainer, and to use a kinematic coupling mechanism with a shape that kinematically aligns the retainer against the base unit, the shape allowing adjustability of the retainer relative to the base unit when the kinematic coupling mechanism engages. It will be understood that, as described below, the positioning adjuster of the sample support assembly and the door of the chamber door assembly can both be described as retainers having these characteristics.

[0045] In one or more other embodiments, the sample positioning system may include a chamber door assembly and a sample support assembly, the sample support assembly being coupled to the chamber door assembly so as to move in conjunction with the chamber door assembly.

[0046] The chamber door assembly may include at least one pair of components, wherein at least one of these components may have an adjustable degree of freedom relative to the other component in the pair, such as three or four degrees of freedom. At least one or more of these degrees of freedom may be adjusted independently of the other degrees of freedom.

[0047] At least one component may include a feature of the kinematic coupling mechanism, while another mating feature of the kinematic coupling mechanism may be used at the chamber housing of a scientific instrument (such as an imaging device). In one or more cases, the kinematic coupling mechanism may provide one or more degrees of freedom. In one or more embodiments, a first kinematic coupling mechanism may be employed between a first and a second component, and a second kinematic coupling mechanism may be employed between a third and a fourth component.

[0048] When the chamber door assembly is aligned with respect to the chamber housing, the degree of freedom allows for adjustment of the chamber door assembly relative to the resilient seal. Additionally and / or alternatively, the degree of freedom allows for adjustment of the sample support assembly relative to the chamber housing when the sample support assembly is coupled to the chamber door assembly.

[0049] The sample support assembly can consist of a pair of adjusting components and a sample support box. These adjusting components and the sample support box can be assembled together into a compact body that can fill a limited space (e.g., a vacuum) on the vacuum side of a scientific instrument. The three components of the sample support assembly together provide at least five different degrees of freedom.

[0050] The sample support cassette can be interchangeable, allowing another sample support cassette to replace one removed from the vacuum-side environment. In this way, a new sample support cassette can be pre-loaded with a sample (e.g., a sheet) on a sheet stage of a grid holder coupled to the sample support cassette. This can allow for a significant increase in sample throughput at the scientific instrument when using the sample support assembly. That is, there is no waiting to remove used samples from individual grid holders and / or to re-prepare previously used sheet stages. Instead, these processes can be performed separately from the sample support assembly and from the reuse of the corresponding scientific instrument (e.g., another cycle of operation).

[0051] A pair of adjustment components can be configured to provide independent and distinct degrees of freedom relative to each other. In this way, one or more degrees of freedom can be adjusted independently without affecting the positioning relative to one or more other degrees of freedom. This is not something that can be provided by existing frameworks.

[0052] As described above, one or more embodiments disclosed herein can achieve improved performance relative to existing methods. For example, one or more benefits of the aforementioned systems and / or components may include the ability to provide one or more adjustments to the sample support box, such as through one or more degrees of freedom of the sample support assembly or the chamber door assembly, when the sample positioning system is assembled but not fully fixedly coupled. Similarly, when coupled together, at least one component of the chamber door assembly can be adjusted relative to another component of the chamber door assembly in the same manner. Similarly, when coupled together, at least one of the three components of the sample support assembly can be adjusted relative to another component of the sample support assembly in the same manner.

[0053] The various embodiments disclosed herein can improve upon existing methods to achieve the technical advantages of high adjustability and / or accurate positioning repeatability. For example, using the adjustability of the above configuration, the sample support assembly, chamber door assembly, and sample positioning system can each provide micron-level adjustment using independent adjustment of discrete degrees of freedom, which is not available from existing frameworks. In practice, this can allow for the repeatable setting of the sample's coordinate system relative to the chamber housing (e.g., within the chamber housing / its robotic arm assembly). Furthermore, one or more of these aspects can be used to reduce and / or eliminate the use of shims for alignment, address subjective alignment by providing greater flexibility, and / or reduce instrument system preparation time (e.g., starting from emptying the corresponding vacuum chamber if the instrument system includes one). These aspects can be useful processes for various industries such as materials analysis, sample imaging, product manufacturing, and quality control.

[0054] The technical features of the embodiments disclosed herein (e.g., high adjustability and / or accurate positioning repeatability) are clearly unconventional in the manner described herein in the field of materials analysis, except in the fields of optics, signal processing, spectroscopy, and / or NMR, and are also unconventional in the various combinations of features of the embodiments disclosed herein.

[0055] One or more embodiments described herein can be used with a variety of different scientific instruments, wherein the scientific instruments can be operated for sample analysis, evaluation, imaging, sample preparation and / or sample modification, and are not limited thereto, wherein the samples can be loaded, moved and / or adjusted using the sample support assemblies, chamber door assemblies and / or sample positioning systems described herein. While the following discussion of uses is provided with respect to vacuum chamber housings and / or transition chamber housings, the chamber does not need to be able to be evacuated. Instead, other chamber types can be used with one or more embodiments described herein, such as non-vacuum chambers. That is, the positioning, adjustment and / or repeatability provided by one or more embodiments described herein can be applied to any one or more types of scientific instruments described herein, and are not limited thereto.

[0056] Therefore, the embodiments disclosed herein can provide improvements to scientific instrumentation techniques (e.g., improvements in such scientific instruments, together with other improvements) that can be used for sample analysis in a variety of fields, including, but not limited to, optics, signal processing, spectroscopy and / or nuclear magnetic resonance (NMR).

[0057] In fact, based on the above general description of one or more embodiments described herein, this disclosure therefore introduces functionality that cannot be performed by existing framework devices or by humans alone. Conversely, such existing frameworks are ineffective in making micrometer-level repeatable adjustments relative to the elastomeric seal and / or relative to the scientific instrument coordinate system, ineffective in adjusting individual degrees of freedom without affecting one or more other degrees of freedom, and cannot provide the sample throughput achievable using one or more embodiments described herein. Therefore, operation within the scope of existing methods is impractical given the significant setup time and / or lack of sample positioning accuracy, precision, and / or repeatability associated with existing methods.

[0058] Therefore, embodiments of this disclosure can be used with scientific instruments that have one or more of a variety of technical objectives, such as controlling a particular technical system or process; determining how to control a machine from measurement results; digital audio, image, or video enhancement or analysis; separation of material sources in mixed signals; generating data for reliable and / or efficient transmission or storage; providing estimates and confidence intervals for material samples; and / or providing faster sensor data processing.

[0059] Therefore, the embodiments disclosed herein provide improvements to materials analysis techniques (e.g., improvements in sample preparation, arrangement, provisioning and / or positioning relative to scientific instruments for materials analysis, along with other improvements).

[0060] As used in this article, the phrase “based on” should be understood to mean “at least partially based on”, unless otherwise stated.

[0061] As used in this article, the term "data" may include metadata.

[0062] As used herein, the terms “entity,” “requesting entity,” and “user entity” can refer to machines, equipment, components, hardware, software, intelligent devices, parties, organizations, individuals, and / or people.

[0063] As used in this article, the term "sample" can refer to a single material, multiple materials, a compound, a composition, a sheet, a solution, a product, etc.

[0064] One or more embodiments will now be described with reference to the accompanying drawings, wherein the same reference numerals are used throughout to refer to the same drawing elements. In the following description, numerous specific details are set forth for illustrative purposes, intended to provide a more thorough understanding of the one or more embodiments. However, it will be apparent, in various cases, that one or more embodiments may be implemented without these specific details.

[0065] Furthermore, it should be understood that the embodiments depicted in one or more figures described herein are for illustrative purposes only, and therefore the architecture of the embodiments is not limited to the systems, devices and / or components depicted therein, nor to any specific order, connection and / or coupling of the systems, devices and / or components depicted therein.

[0066] The scientific instrument methods disclosed herein can be used with and / or constituted by one or more scientific instruments capable of performing interactions with user entities (e.g., via references herein). Figure 18 The discussion is conducted on the user's local computing device 1820. These interactions may include providing information to user entities (e.g., about operations such as...). Figure 18 Information about scientific instruments such as the scientific instrument 1810, information about the sample being analyzed or other tests or measurements performed by the scientific instrument, information retrieved from a local or remote database, or other information) or providing input commands to user entities (e.g., for controlling access to, etc.) Figure 18 The options include operating scientific instruments such as the scientific instrument 1810, or controlling the analysis of data generated by the scientific instrument, querying (e.g., querying a local or remote database), or other information. In some implementations, these interactions can be performed via a graphical user interface (GUI), which includes a display device (e.g., as referenced herein). Figure 3 The visual display on the display device 310 discussed herein (e.g., via a device incorporated herein by reference) Figure 3 One or more of the other I / O devices 312 discussed herein (such as a keyboard, mouse, touchpad, or touchscreen) provide output to the user entity and / or prompt the user entity to provide input. The scientific instrument system 1800 disclosed herein may include any GUI suitable for interaction with the user entity.

[0067] Therefore, the following discussion turns to a general description of one or more scientific instrument systems, which may include one or more embodiments described herein and / or used therewith, and, where appropriate, to related methods, computing devices and / or computer-readable media.

[0068] For example, first go to Figure 2 The illustration depicts an example GUI 300, which can be used to perform one or more methods, such as one or more methods according to the various embodiments described herein, with the aid of such a scientific instrument. As mentioned above, GUI 200 can be set in a scientific instrument system (e.g., as referenced herein). Figure 18 The computing device of the scientific instrument system 1800 discussed herein (e.g., referenced herein) Figure 3 The display device of the computing device 300 discussed herein (e.g., referenced herein) Figure 3On the display device 310 discussed herein, and the user entity can use any suitable input device (e.g., included in the references herein). Figure 3 Any of the other I / O devices 312 discussed herein) and input technologies (e.g., cursor movement, motion capture, face recognition, gesture detection, voice recognition, button actuation, etc.) interact with the GUI 200.

[0069] The GUI 200 may include a data display area 202, a data analysis area 204, a scientific instrument control area 206, and a settings area 208. Figure 2 The specific number and arrangement of regions depicted are merely illustrative; GUI 200 may include any number and arrangement of regions, including any desired features.

[0070] Data display area 202 can display scientific instruments (e.g., as referenced in this article). Figure 18 The data generated by the scientific instrument 1810 under discussion. For example, the data display area 202 may display one or more outputs, which may include one or more spectra, one or more holograms, one or more digital images, etc., but are not limited thereto.

[0071] Data analysis area 204 may display the results of data analysis (e.g., the results of analyzing the data and / or other data shown in data display area 202). For example, data analysis area 204 may display one or more output results of sample analysis, wherein the sample is positioned for the analysis using one or more embodiments described herein. In one or more cases, data analysis area 204 may display a list, flowchart, or other schematic diagram relative to the acquisition actions taken and / or recommended in the experiment. In one or more embodiments, data display area 202 and data analysis area 204 may be combined in GUI 200 (e.g., to incorporate data output from scientific instruments and some analysis of the data in a public graphic or area).

[0072] Scientific instrument control area 206 may include allowing a user entity to control a scientific instrument (e.g., as referenced herein). Figure 18 Options for the scientific instrument 1810 discussed herein. For example, the scientific instrument control area 206 may include one or more controls for visualizing and / or moving a sample positioned using one or more embodiments described herein.

[0073] Setting up area 208 may include features and functions that allow users to control GUI 200 (and / or other GUIs) and / or perform common computational operations on data display area 202 and data analysis area 204 (e.g., storing data on storage devices as referenced herein). Figure 3The storage device 304 discussed includes options such as sending data to another user entity, tagging data, etc.

[0074] Next, we will discuss steering. Figure 3 This diagram illustrates a block diagram of a computing device 300 capable of performing some or all of the scientific instrument methods disclosed herein, according to various embodiments. In one or more embodiments, a scientific instrument employing one or more of the embodiments described herein may be controlled by and / or include a single computing device 300 or multiple computing devices 300. Further, as described below, the computing device 300 (or multiple computing devices 300) may be... Figure 18 A part of one or more of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, or the remote computing device 1840.

[0075] Will Figure 3 The computing device 300 is shown as having multiple components, but one or more of these components may be omitted or duplicated as appropriate for the application and setup. As shown, these components may include one or more of a processor 302, a storage device 304, an interface device 306, a battery / power circuit 308, a display device 310, and other input / output (I / O) devices 312, as described below.

[0076] In one or more embodiments, one or more components included in computing device 300 may be coupled to one or more motherboards and encapsulated in a housing (e.g., including plastic, metal, and / or other materials). In one or more embodiments, some of these components may be fabricated on a single system-on-a-chip (SoC) (e.g., the SoC may include one or more processors 302 and one or more storage devices 304). Additionally, in one or more embodiments, computing device 300 may be omitted. Figure 3 One or more components are shown. In one or more embodiments, computing device 300 may include interface circuitry (not shown) for coupling to one or more components using any suitable interface, such as a Universal Serial Bus (USB) interface, a High Definition Multimedia Interface (HDMI) interface, a Controller Area Network (CAN) interface, a Serial Peripheral Interface (SPI) interface, an Ethernet interface, a wireless interface, or any other suitable interface. For example, computing device 300 may omit display device 310, but may include display device interface circuitry (e.g., connector and driver circuitry) that can be coupled to display device 310.

[0077] Computing device 300 may include processor 302 (e.g., one or more processing devices). As used herein, the term "processing device" may refer to any device or part of a device that processes electronic data from registers and / or memory to convert such electronic data into other electronic data that can be stored in registers and / or memory. Processor 302 may include one or more digital signal processors (DSPs), application-specific integrated circuits (ASICs), central processing units (CPUs), graphics processing units (GPUs), cryptographic processors (dedicated processors that execute cryptographic algorithms within hardware), server processors, or any other suitable processing devices.

[0078] Computing device 300 may include storage device 304 (e.g., one or more storage devices). Storage device 304 may include one or more memory devices, such as random access memory (RAM) (e.g., static RAM (SRAM) devices, magnetic RAM (MRAM) devices, dynamic RAM (DRAM) devices, resistive RAM (RRAM) devices, or conductive bridged RAM (CBRAM) devices), hard disk drive-based memory devices, solid-state memory devices, network drives, cloud drives, or any combination of memory devices. In one or more embodiments, storage device 304 may include memory sharing a die with processor 302. In such embodiments, the memory may be used as cache memory and may, for example, include embedded dynamic random access memory (eDRAM) or spin-transfer torque magnetic random access memory (STT-MRAM). In one or more embodiments, storage device 304 may include a non-transitory computer-readable medium having instructions thereon, wherein, when executed by one or more processing devices (e.g., processor 302), the instructions cause computing device 300 to perform any suitable method or portion thereof disclosed herein.

[0079] Computing device 300 may include interface device 306 (e.g., one or more interface devices 306). Interface device 306 may include one or more communication chips, connectors, and / or other hardware and software that manage communication between computing device 300 and other computing devices. For example, interface device 306 may include wireless communication management circuitry for transmitting data to or from computing device 300. The term "wireless" and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communication channels, etc., that can communicate data via a non-solid medium using modulated electromagnetic radiation. This term does not imply that the associated device does not contain any wires, although in one or more embodiments the associated device may not contain any wires. The wireless communication management circuitry included in interface device 306 can implement any of a variety of wireless standards or protocols, including but not limited to Institute of Electrical and Electronics Engineers (IEEE) standards, including Wi-Fi (IEEE 802.11 series), IEEE 802.16 standards (e.g., IEEE 802.16-2005 amendments), Long Term Evolution (LTE) projects and any amendments, updates and / or revisions thereof (e.g., Advanced LTE project, Ultra Mobile Broadband (UMB) project (also known as “3GPP2”), etc.). In one or more embodiments, the wireless communication management circuitry included in interface device 306 can operate according to Global System for Mobile Communications (GSM), General Packet Radio Service (GPRS), Universal Mobile Telecommunications System (UMTS), High Speed ​​Packet Access (HSPA), Evolved HSPA (E-HSPA), or LTE networks. In one or more embodiments, the wireless communication management circuitry included in interface device 306 may operate according to Enhanced Data Rate GSM Evolution (EDGE), GSM EDGE Radio Access Network (GERAN), Universal Terrestrial Radio Access Network (UTRAN), or Evolved UTRAN (E-UTRAN). In one or more embodiments, the wireless communication management circuitry included in interface device 306 may operate according to Code Division Multiple Access (CDMA), Time Division Multiple Access (TDMA), Digital Enhanced Wireless Communication (DECT), Evolved Data Optimization (EV-DO) and its derivatives, and any other wireless protocol specified as 3G, 4G, 5G, or higher. In one or more embodiments, interface device 306 may include one or more antennas (e.g., one or more antenna arrays) for receiving and / or transmitting wireless communications.

[0080] One or more communications between one or more components of computing device 300 and one or more components outside computing device 300 may be provided via wired and / or wireless means, including but not limited to cellular networks, wide area networks (WANs) (e.g., the Internet), and / or local area networks (LANs). Suitable wired or wireless technologies used to support the communications may include, but are not limited to, Wi-Fi, Global System for Mobile Communications (GSM), Universal Mobile Telecommunications System (UMTS), WiMAX, Enhanced General Packet Radio Service (Enhanced GPRS), 3GPP Long Term Evolution (LTE), 3GPP2 Ultra Mobile Broadband (UMB), High Speed ​​Packet Access (HSPA), Zigbee and other 802.XX wireless technologies and / or traditional telecommunications technologies. Session Initiation Protocol (SIP) RF4CE protocol, wireless HART protocol, 6LoWPAN (IPv6 for low-power wireless personal area networks), Z-Wave, advanced and / or adaptive networking technology (ANT), ultra-wideband (UWB) standard protocol and / or other proprietary and / or non-proprietary communication protocols.

[0081] In one or more embodiments, interface device 306 may include circuitry for managing wired communications such as electrical communication protocols, optical communication protocols, or any other suitable communication protocols. For example, interface device 306 may include circuitry supporting communication according to Ethernet technology. In one or more embodiments, interface device 306 may support both wireless and wired communications, and / or may support multiple wired communication protocols and / or multiple wireless communication protocols. For example, a first set of circuitry for interface device 306 may be dedicated to short-range wireless communications such as Wi-Fi or Bluetooth, and a second set of circuitry for interface device 306 may be dedicated to long-range wireless communications such as Global Positioning System (GPS), EDGE, GPRS, CDMA, WiMAX, LTE, EV-DO, or others. In one or more embodiments, a first set of circuitry for interface device 306 may be dedicated to wireless communications, while a second set of circuitry for interface device 306 may be dedicated to wired communications.

[0082] The computing device 300 may include a battery / power circuit 308. The battery / power circuit 308 may include one or more energy storage devices (e.g., batteries or capacitors) and / or circuitry for coupling components of the computing device 300 to an energy source (e.g., AC line power) that is separate from the computing device 300.

[0083] The computing device 300 may include a display device 310 (e.g., multiple display devices). The display device 310 may include any visual indicator, such as a head-up display, a computer monitor, a projector, a touch screen display, a liquid crystal display (LCD), a light-emitting diode display, or a flat panel display.

[0084] The computing device 300 may include other input / output (I / O) devices 312. Other I / O devices 312 may include, for example, one or more audio output devices (e.g., speakers, headphones, earphones, alarm clocks, etc.), one or more audio input devices (e.g., microphones or microphone arrays), positioning devices (e.g., GPS devices that communicate with satellite-based systems to receive the location of the computing device 300, as known in the art), audio codecs, video codecs, printers, sensors (e.g., thermocouples or other temperature sensors, humidity sensors, pressure sensors, vibration sensors, accelerometers, gyroscopes, etc.), image capture devices such as cameras, keyboards, cursor control devices such as mice, styluses, trackballs or touchpads, barcode readers, quick-response (QR) code readers, or radio frequency identification (RFID) readers.

[0085] The computing device 300 may have any form factor suitable for its application and setup, such as a handheld or mobile computing device (e.g., a cellular phone, smartphone, mobile internet device, tablet computer, laptop computer, netbook computer, ultrabook computer, personal digital assistant (PDA), ultra-mobile personal computer, etc.), a desktop computing device, or a server computing device or other networked computing component.

[0086] Now refer to Figure 1 The diagram illustrates a non-limiting system 100 including a scientific instrument 102, which may include or be used with one or more systems and / or components described herein, such as a sample positioning system 104, a chamber door assembly 106, and / or a sample support assembly 108 (e.g., where the sample positioning system 104 includes a chamber door assembly 106 and / or a sample support assembly 108), hereinafter relative to Figures 4 to 14 A detailed description is provided below. Specifically, the sample positioning system 104 can be considered as being composed of and / or separate from the scientific instrument 102. In either case, the sample positioning system 104 may have the same function and / or main structure relative to the scientific instrument 102.

[0087] In one or more embodiments, scientific instruments, including and / or employing one or more embodiments described herein, may be part of and / or employ a computing environment, such as... Figure 20 The computing environment 2000 is shown here. In one or more of the described embodiments, a computer and / or computing-based components can be combined to achieve... Figure 1 and / or Figures 5 to 14 Used in connection with and / or in relation to other figures shown and / or described herein, including one or more of the systems, devices, components, parts and / or methods.

[0088] like Figure 1 As shown, the sample positioning system 104 may include a chamber door assembly 106 and a sample support assembly 108 that can be coupled to the chamber door assembly 106. It should be noted that, hereinafter, will be referred to in relation to... Figures 4 to 7 The chamber door assembly 106 will be discussed in detail below, in relation to... Figure 8 A detailed discussion of the carrier support structure, and the following text will be related to it. Figures 9 to 14 The sample support assembly 108 will be discussed in detail.

[0089] Still refer to Figure 1 The non-limiting system 100 and scientific instrument 100 can provide analysis, such as imaging, of one or more samples 110. Samples 110 (e.g., thin slices) can be placed on a support mesh, also referred to herein as a slice carrier 112. At least one pair of slice carriers 112 can be fixedly or detachably coupled to a support mesh holder 114, which... Figure 8 As specifically shown and discussed in detail below, at least one mesh support 114, but up to four or more, such as ten mesh supports 114, may be retained at the sample positioning system 104, particularly at each receiver fixed to the sample positioning system 104. For example, one receiver may receive one mesh support 114.

[0090] As shown, the mesh support 114 can be received into a transition chamber holding position, such as where the loading station of the sample positioning system 104 (e.g., the mesh support 114 attached to the sample support box) is received into the vacuum chamber 122 of the scientific instrument 102. It should be noted that in one or more embodiments, the scientific instrument may include an optional pre-transition chamber 120 (also referred to herein as a transition chamber or transition cavity), into which the mesh support 114 can be initially received before movement, and / or the vacuum chamber 122 may be an unsealed chamber. In either case, the sample positioning system 104 may be sealed and / or closed against the chamber housing 124 of the scientific instrument 102. The chamber housing 124 may include the housing of the vacuum chamber 122 and / or the pre-transition chamber 120.

[0091] Air can be evacuated from the vacuum chamber 122 (and / or the pre-transition chamber 120). The vacuum chamber 122 may include a carrier transfer robot 128 or other automated moving assembly that can remove the carrier support 114 and / or the wafer carrier 112 from the sample positioning system 104 and move them to the wafer carrier 130 within the vacuum chamber 122.

[0092] It should be noted that, in one or more cases, one or more wafers may be loaded into the vacuum chamber 122, particularly into the wafer carrier 130, via a wafer transfer chamber system 140 comprising an equipment front-end module (EFEM) 142, a wafer transfer chamber 144, and / or an inter-vacuum robot (IVR).

[0093] After analysis, evaluation, imaging, preparation, and / or other processes performed relative to sample 110 within vacuum chamber 122, the mesh transfer robot 128 can transfer mesh support 114 and / or wafer carrier 112 back from wafer carrier 130 to sample positioning system 104. Vacuum chamber 122 and / or transition chamber can be re-environmentally treated, such as with air, and sample positioning system 104 can be opened by decoupling (e.g., decoupling) from chamber housing 124. Mesh support 114 can be removed from sample positioning system 104 separately from sample support cassette, and / or by removing and replacing (e.g., exchanging) sample support cassette of sample positioning system 104, as described below (see example). Figure 12 In this way, the implementation of the sample positioning system 104 described herein can be used to enable rapid sample exchange and high throughput for scientific instrument 102.

[0094] Next, turn to Figures 4 to 7 Scientific instrument 102 may include a transition chamber 120 that is accessible to, coupled to, and / or integrally formed with a vacuum chamber 122. Scientific instrument 102 may also include a vacuum component 424 for evacuating ambient gases from the transition chamber 120 and / or from the vacuum chamber 122. Alternatively, in an alternative embodiment, a separate vacuum component 424 may be used for both the transition chamber 120 and the vacuum chamber 122.

[0095] The sample positioning system 104, and in particular the chamber door assembly 106, will be further described below, including a description of the benefits of the sample positioning system 104 in the following aspects: rapid sample throughput, degrees of freedom separate from the positioning repeatability of the chamber housing 124, and independent degrees of freedom for the positioning repeatability of the net support 114 relative to the coordinate system 126 of the scientific instrument 102 (e.g., the coordinate system 126 inside the vacuum chamber, such as the coordinate system of the net transport manipulator 128).

[0096] As shown, the sample positioning system 104 may include at least a chamber door assembly 106 for engaging (e.g., coupling with) a base unit (e.g., a chamber housing 124 and / or a transition chamber housing 424 of a transition chamber 120). In one or more cases, the chamber housing 124 may be composed of the transition chamber housing 424.

[0097] The chamber door assembly 106 may include at least a retainer, such as a door panel 432, and a retainer support, such as a door transport frame 434. The door panel 432 may be coupled to the door transport frame 434 so as to move in conjunction with the door transport frame 434 and engage and disengage with the scientific instrument 102 or the chamber housing 124.

[0098] The door transport frame 434 may include and / or couple at least one (e.g., a pair) of tracks 440 to the track system 438. In one or more embodiments, the track system 438 may be considered as part of the scientific instrument 102. The track system 438 may couple the chamber door assembly 106 and thus the instrument door system 104 to the scientific instrument 102. In one or more embodiments, the track system 438 may be coupled to the base unit (e.g., the chamber housing 124) and / or the retainer positioning portion (e.g., the door transport frame 434) via fasteners, keyway systems, track-slot systems, and / or any other suitable coupling interface that allows the door transport frame 434 to at least move to engage and disengage from the chamber housing 124. This movement may be along an axis, for example, extending along a longitudinal extension of the track 440. This axis may be parallel to and / or collinear with the depicted Z-direction of movement (442) of the chamber door assembly 106 relative to the scientific instrument.

[0099] Figure 4 A symbol 436 for an elastic element is shown. This symbol 436 is used only to indicate the flexible compliance of the interface between the door transport frame 434 and the door panel 432. As used herein, the term "flexible compliance" may include the elastic properties of the interface member, the flexible properties of the interface member, and / or the adjustability of at least one member relative to another. For example, as... Figure 5 As shown, due to the dimensional allowance of the fastener through-hole 502 in the door panel 432, the door panel 432 can be coupled (e.g., via...). Figure 6 The bolts and / or fasteners 602 shown are attached to the door transport frame 434. For example, the fasteners 602 can be screwed into the threaded holes (not shown) at the door transport frame 434.

[0100] In one or more embodiments, the door panel 432 may additionally and / or alternatively be made of a flexible material, wherein, when coupled to the door transport frame 434, the flexible material allows the door panel 432 to move elastically relative to the door transport frame 434. This elastic movement may be possible in at least the three degrees of freedom described above.

[0101] Therefore, even when the door panel 432 is coupled to the door transport frame 434, one or more degrees of freedom at the interface between the door panel 432 and the door transport frame 434 can be maintained. These one or more degrees of freedom may include at least three degrees of freedom. For example... Figure 5As shown, this can include movement in the X direction shown, movement in the Y direction shown (i.e., orthogonal to the X direction shown), and / or rotation about the X direction (referred to as RX), or rotation about the Y direction (referred to as RY). In one or more cases, this may additionally and / or alternatively include movement about the Z direction 442, referred to as RZ (not shown). Figure 5 (See specific details), wherein the Z direction 442 is orthogonal to both the X and Y directions. As described above, the Z direction 442 may be parallel to the door transport frame 434 along the track 440 and / or the direction of movement provided by the track 440 and / or the same as it.

[0102] Further regarding the chamber door assembly 106, one example, but not limited to, is that the translation in the respective X and Y directions can be approximately 3 micrometers (μm) in the positive and negative directions of each of the X and Y directions. Additionally and / or alternatively, the rotation in the RX and / or RY can be, for example, approximately + / - 2 degrees, or approximately + / - 1 degree, and is not limited thereto.

[0103] like Figure 6 As shown, one or more degrees of freedom provided by the interface between the door panel 432 and the door transport frame 434 may further include: around Figure 5 Rotation in the X direction, referred to as RX and / or around Figure 5 The rotation in the Y direction is called RY. The rotations in RX and RY can be, for example, about + / - 2 degrees or about + / - 1 degree, but are not limited to these.

[0104] It should be noted that each of these five different degrees of freedom can be maintained after movement along the Z direction to allow the chamber door assembly 106 to enter a state coupled to the chamber housing 124 via a kinematic coupling mechanism. For example, the chamber housing 124 (e.g., the housing 424 of the transition chamber 120) and the door panel 432 may each form part of the kinematic coupling mechanism. For example, the door panel 432 may include one or more first kinematic coupling members 430, and the housing 424 of the transition chamber 120 may include one or more corresponding second kinematic coupling members 428.

[0105] As used herein, a kinematic coupling mechanism is a coupling mechanism that provides limited adjustability between the components of a kinematic coupling mechanism. For example, kinematic coupling components can be assembled together (e.g., coupled) without needing to be fixed to each other. For example, in Figure 4 and Figure 5 In one embodiment, the first kinematic coupling member 430 and the second kinematic coupling member 432 may be arranged to provide at least a degree of freedom of rotation about the Z direction 442.

[0106] In one or more embodiments, the first kinematic coupling member 430 or the second kinematic coupling member 428 may include a concave block, V-shaped block, or other suitably shaped member for receiving the other of the first kinematic coupling member 430 and the second kinematic coupling member 428. Thus, the other of the first kinematic coupling member 430 and the second kinematic coupling member 428 may include a convex block, dome-shaped block, spherical block, raised V-shape, and / or other suitable element for providing corresponding kinematic coupling. As shown, the first kinematic coupling member 430 (e.g., at door panel 432) includes a concave V-shaped block, and the second kinematic coupling member 428 (e.g., at vacuum chamber housing 124) includes a corresponding convex V-shape for receiving the concave V-shaped block.

[0107] As shown in the example diagram, the first kinematic coupling member 430 is disposed on the side of the door panel 432 facing the vacuum chamber (e.g., chamber side 702). Figure 5 As shown, the first kinematic coupling member 430 can be arranged in a circular and / or triangular pattern to allow for rotation around the Z-axis / Z-direction 442 ( Figure 4 Rotation adjustment.

[0108] The second kinematic coupling member 428 is arranged at 680 on the air-facing side of the housing 424. Figure 6 As described above, it should be understood that in one or more embodiments, the vacuum transition chamber 120 (and therefore the housing 424) may be omitted, and thus the second kinematic coupling member may instead be arranged on the air-facing side of the housing 122. In one or more additional and / or alternative embodiments, the housing 424 may be considered as part of the housing 122, such as an extension of the housing 122.

[0109] Once the door panel 432 is aligned with the door transport frame 434, the alignment of the kinematic coupling members 428 and 430 can be appropriately achieved in the aforementioned degrees of freedom. This allows the door panel 432 to move easily against the elastic element 426, while simultaneously aligning the sample carried by the chamber door assembly 106 with respect to the base unit (e.g., the chamber housing 124). That is, based on the use of the kinematic coupling members 428 and 430, and based on the flexible compliance of the interface between the door panel 432 and the door transport frame 434, the chamber door assembly 106 can resolve the friction generated by the engagement of the door panel 432 and the elastic element 426.

[0110] The resilient element 426 may be any suitable resilient element and / or comprise any suitable resilient material for facilitating a seal, such as a vacuum seal, between the vacuum transition chamber housing 424 and the chamber door assembly 106 (e.g., door panel 432). In one or more embodiments, the resilient element 426 may be an O-ring, such as an elastomer or fluoroelastomer O-ring. Although the resilient element 426 is illustrated as being disposed in a recess of the vacuum transition chamber housing 424, in one or more other embodiments, the resilient element 426 may alternatively and / or additionally be disposed on the chamber-facing side 702 of the door panel 432.

[0111] The previously mentioned fastener-based coupling mechanism can fasten (e.g., Figure 6 The fastener 602 shown here can be tightened, thereby providing a more rigid (as fixed) coupling between the door panel 432 and the door transport frame 434.

[0112] The fixed engagement of the door panel 432 with the elastic element 426 provides a seal for the vacuum transition chamber 120 and / or the vacuum chamber 122. In one or more embodiments, the scientific apparatus may include a vacuum sealing sensor 431 coupled to the processor 406, such as for determining whether the transition chamber 122 and / or the vacuum chamber 122 are adequately sealed.

[0113] Furthermore, in one or more embodiments, the vacuum chamber housing 124 and / or the transition chamber housing 424 may include a retaining element 604 for engagement by a suitable retaining element 606 of the chamber door assembly 106. The provided interface may be pin-based, for example, to provide a fixed coupling between the chamber door assembly 106 and the vacuum chamber housing 124.

[0114] In brief, for the chamber door assembly 106, coupling may be provided between the door panel 432 and the door transport frame 434 before securing and / or more rigidly coupling them together. This coupling can be adjustable to allow for a degree of adjustability between the door panel 432 and the transition chamber housing 424, in addition to maintaining a degree of adjustability between the door panel 432 and the door transport frame 434. Therefore, compared to the preparation time provided by existing frames, shim adjustments of components relative to each other (such as those used in existing frames) (e.g., door relative to door bracket) can be reduced and / or completely eliminated, thereby rapidly increasing the preparation time for using the scientific instrument 102.

[0115] Next, turn to Figure 8An orthographic projection view of an example stencil holder 114, which may be held by a sample positioning system 104 and / or a wafer carrier 130, is shown. As depicted, the stencil holder 144 may include at least one pair of wafer carriers (112) or stencils, each capable of supporting (e.g., holding) at least one sample 110. In one or more cases, the wafer stage 112 may be removed for processing, preparation, decontamination, replacement, etc., and is not limited thereto.

[0116] The carrier support 114 may include a receiver 1202 that can be used with the sample positioning system 104. Figure 11 and Figure 12 The mating element 802 is used in conjunction with the sample support assembly 108. More specifically, the receiver 1202 may be the sample support box 1104 of the sample support assembly 108. Figure 11 The inseparable and / or removable aspects of the sample support cassette 114. The mating element 802 shown may be a key, such as a post (e.g., a cylindrical post), while the aligner 804 may be spaced apart from the mating element 802 to provide two-point alignment of the carrier support 114 with respect to the receiver 1202 of the sample support cassette 1104. In one or more embodiments, the aligner 804 may be and / or comprise nylon or other similar materials. The mating element 802 (e.g., a post) may be received in a receiving slot 1217 of the receiver 1202, while the aligner 804 may be received at a corresponding notch 1218 in the sample support cassette 1104.

[0117] In one or more other embodiments, the shapes of the receiving groove 1217 and mating element 802 and / or the shapes of the notch 1218 and aligner 804 may be reversed, and / or mating elements 1217, 1218, 802 and / or 804 may be differently shaped.

[0118] Now briefly back Figure 7 And also observed Figure 9 The chamber side 702 (e.g., vacuum side) of the sample positioning system 104 is shown. As depicted, the sample support assembly 108 may be coupled to the chamber door assembly 106 so as to move in tandem with the chamber door assembly 106.

[0119] The sample support assembly 108 may include a compact assembly comprising a sample support box 1104, a positioning adjuster 1106, and a flexibility adjuster 1108. Therefore, it should be understood that the use of the chamber door assembly 106 and thus the kinematic coupling members 428 and 430, and the utilization of the flexibility of the interface (and / or the flexibility of the door panel 432 and / or the door transport frame 434) between the door panel 432 and the door transport frame 434, can also provide positioning repeatability, and / or positioning of the carrier support 114 and / or the sample support box 104 relative to the vacuum chamber 122 / transition chamber 120. That is, adjusting and / or aligning one or more elements of the chamber door assembly 106 can therefore allow adjusting and / or aligning the sample support box 1104 independently of any other adjustment and / or alignment of one or more elements of the sample support assembly 108.

[0120] In one or more embodiments, the positioning repeatability of the carrier support 114 and / or sample support box 104 can be provided at the micrometer level (e.g., about 1 micrometer, or about 2 micrometers, or about 3σ = 0.7 μm) by means of the chamber door assembly 106, the sample support assembly 108 and / or combinations thereof.

[0121] Next, turn to Figures 9 to 12 And still refer to Figure 7 The sample positioning system 104, and in particular the sample support assembly 108, will now be described further. This will include a description of the benefits of the sample positioning system 104 in the following aspects: rapid sample throughput, repeatable and accurate sample alignment, degrees of freedom separate from the positioning repeatability of the chamber housing 124, and degrees of freedom separate from the positioning repeatability of the net carrier 114 relative to the coordinate system 126 of the scientific instrument 102 (e.g., the coordinate system 126 inside the vacuum chamber, or the coordinate system of the net carrier transport manipulator 128).

[0122] Firstly, please refer to the special reference. Figure 11 An exploded view of the sample support assembly 108 is shown. As shown, the sample support cassette 1104 is configured to be received by a retainer (such as a positioning adjuster 1106). In fact, as mentioned above, the sample support cassette 1104 can be easily removed from the positioning adjuster 1106, due to the magnetic and / or kinematic coupling between them, to allow for the replacement / insertion of other sample support cassettes 1104. This allows for a rapid increase in sample throughput to the vacuum side of the associated scientific instrument 102 compared to existing frames.

[0123] like Figure 11 As shown, the sample support box 1104 can generally be removed along the Z direction shown to engage and disengage with the positioning adjuster 1105. When the sample support assembly 108 is coupled to the chamber door assembly 106, Figure 11 The Z-direction 1102 can be with Figure 4The Z-direction is parallel and / or collinear. For example... Figure 12 and Figure 13 As shown, the sample support box 1104 and the positioning adjuster 1106 are kinematically coupled, thereby allowing the sample support box 1104 to be easily aligned with the positioning adjuster 1106 (which may also be referred to as the retainer).

[0124] Next, turn to Figure 12 And first turn to sample support box 1104, this component may have a one-piece structure and / or may consist of a set of elements coupled to each other. In one or more embodiments, such as Figure 12 As shown, the sample support box 1104 may include a base component 1210, which is coupled to a top component 1212 via a set of one or more fasteners 1214 (e.g., bolts). A retaining post 1204 may extend from the top component 1212 to allow the sample support box 1104 to be clamped by an air-side robotic gripping system and / or an automated gripping system (not shown). A set of one or more receivers 1202 may be coupled between the top component 1212 and the base component 1210, for example, via a set of one or more fasteners 1216 (e.g., bolts). For example, at least one fastener 1216 may be used for each receiver 1202.

[0125] The use of individual receivers 1202 and the corresponding fastener tolerance holes 1215 allows each receiver 1202 to be adjusted independently of each other and relative to the base component 1210 by about 1 micrometer or about 2 micrometers.

[0126] In one or more other embodiments, a group of two or more receivers 1202 may be integrally formed with each other.

[0127] As shown, receiver 1202 may include a recess 1217, such as a key or groove, for receiving mating elements 802 of the web carrier 114. Similarly, receiver may include a notch 1218 for receiving an aligner 804 of the same web carrier 114.

[0128] The kinematic coupling at the sample support assembly 108 is discussed next. Similar to the kinematic coupling of the chamber door assembly 106, when the sample support assembly 108 is kinematically coupled, the sample support box 1104 and the positioning adjuster 1106 may each include a portion of the kinematic coupling mechanism. For example, the sample box 1104 may include one or more first kinematic coupling members 1206, and the positioning adjuster 1106 may include one or more corresponding second kinematic coupling members 1306. In one or more embodiments, the first kinematic coupling member 1206 or the second kinematic coupling member 1306 may include a concave block, V-shaped block, or other suitably shaped member receiving the other of the first kinematic coupling member 1206 and the second kinematic coupling member 1306. Thus, the other of the first kinematic coupling member 1206 and the second kinematic coupling member 1306 may include a convex block, dome-shaped block, spherical block, raised V-shape, and / or other suitable element for providing the corresponding kinematic coupling.

[0129] For example, in Figures 9 to 13 In the embodiment shown, the first kinematic coupling member 1206 and the second kinematic coupling member 1306 can be arranged to provide at least two degrees of freedom along the corresponding X and Y directions, such as... Figure 11 and Figure 12 As shown here. When the sample support assembly 108 is connected to the chamber door assembly 106, these X and Y directions may be parallel and / or collinear with the X and Y directions of the chamber door assembly 106 (e.g., as shown here). Figure 5 (as shown in the image).

[0130] Observing the sample support box 1104, the first kinematic coupling members 1206 can be arranged laterally to each other (e.g., within corresponding recesses 1207) on surfaces that are also laterally to each other (e.g., orthogonal to each other). Observing the positioning adjuster 1106, the second kinematic coupling members 1306 can be arranged laterally to each other (e.g., within corresponding recesses 1307) on surfaces that are also laterally to each other (e.g., orthogonal to each other). In this way, when the kinematic coupling members 1206 and 1306 are coupled (e.g., engaged) to each other, the kinematic arrangement between the sample support box 1104 and the positioning adjuster 1106 allows for adjustment / alignment of the sample support box 1104 relative to the positioning adjuster 1106.

[0131] In one or more embodiments, this adjustment / alignment may be in the X and Y directions as shown. For example, this alignment may be approximately 1.2 mm in each of the X and Y directions, in the positive and negative directions respectively, but is not limited thereto.

[0132] While such adjustment / alignment may be subtle, when the sample positioning system 104 engages / closes at the vacuum chamber housing 124 of the scientific instrument 102, it allows for slight adjustment of the sample support 1104 relative to the carrier transport manipulator 128, resulting in the sample support 1104 being positioned inside the vacuum side of the scientific instrument 1104 (e.g., inside chambers 122 and / or 120).

[0133] Notably, the lateral positioning of kinematic coupling members 1206 and 1306 can also be used to restrict the movement of the sample support box 1104. This restriction of movement can be in at least four degrees of freedom, or in at least all six degrees of freedom, to provide support for the sample support box 1104 relative to the positioning adjuster 1106, as in response to engagement of the net carrier transfer manipulator 128 with one or more net carrier supports 114 coupled to the receiver 1202 of the sample support box 1104. Figure 12 ) place.

[0134] observe Figure 11 In one or more embodiments, the second kinematic coupling member 1306 may be positioned at a second distance from the second mating surface 1380, wherein the second distance is the same as the first distance between the first coupling element 1206 and the corresponding first mating surface 1280. In this way, when the support box 1104 is inserted into the positioning adjuster 1106, the engagement of the second kinematic coupling member 1306 with the corresponding first kinematic coupling member 1206 can limit and / or prevent the support box 1104 from tilting relative to the positioning adjuster 1106. That is, the engagement of the first kinematic coupling member 1206 and the second kinematic coupling member 1306 can provide resistance to rotation of the support box 1104 relative to the positioning adjuster 1106.

[0135] As mentioned above, the sample support box 1104 and the positioning adjuster 1106 can be magnetically coupled to each other. For example, the positioning adjuster 1106 may include a first magnetic element 1304, and the sample support box 1104 may include a second magnetic element 1220 on the back side 1222 of the sample support box 1104 (e.g., the side facing the positioning adjuster 1106). In one or more embodiments, the first magnetic element 1304 or the second magnetic element 1220 may be disposed in a raised key 1305, while the other of the first magnetic element 1304 and the second magnetic element 1220 may be disposed in a corresponding slot 1221. In one or more embodiments, one of the slot 1221 or the key 1305 may be larger than the other of the slot 1221 or the key 1305 to allow for spacing between them during coupling. This spacing allows the corresponding key / slot interfaces to easily engage and adjust the key / slot mating surfaces, while also allowing slight adjustability provided by the kinematic coupling members 1206 and 1306 to each other.

[0136] Now go to Figure 13 Turning to a further description of the positioning adjuster 1106, this component may have a monolithic structure and / or may consist of a set of elements coupled to each other. In one or more embodiments, such as Figure 13 As shown, the positioning adjuster 1106 may include a base component 1320 and a body component 1322, which may be coupled to each other, such as by fasteners 1324 such as bolts.

[0137] To allow the positioning adjuster 1106 to couple to the flexible adjuster 1108, the positioning adjuster 1106 may include one or more through holes 1308, such as at least a pair of through holes 1308. Correspondingly, the flexible adjuster 1108 may include at least a pair of corresponding fastener holes 1412. Figure 14 For example, a threaded hole. Through hole 1308 can be out-of-tolerance relative to a corresponding fastener 1310 (e.g., a bolt) to allow adjustment / alignment of positioning adjuster 1106 relative to flexible adjuster 1108 when coupled to flexible adjuster 1108. This adjustment / alignment can be along... Figure 11 and Figure 13 The X and / or Y directions shown are orthogonal to each other, and / or include those formed by... Figure 11 and Figure 13 It is carried out in the plane of the axis represented by the X and Y directions.

[0138] Now go to Figure 14 Turning to a further description of the flexible regulator 1108, this component may also have a monolithic structure and / or may consist of a set of elements coupled to each other. In one or more embodiments, such as Figure 14 As shown, the flexible adjuster 1108 may include a first surface element 1402A, such as a face plate, and a second surface element 1402B, such as another face plate.

[0139] like Figure 11 As shown, the second panel 1402B can be arranged to face the positioning adjuster 1106 and may include fastener holes 1412. Figure 10 As shown, the first panel 1402A can be arranged to face the door panel 432 of the chamber door assembly 106.

[0140] Observe again Figure 14Panels 1402A and 1402B may be arranged generally parallel to each other, but allow for a distance (e.g., a gap between them) between the control panels 1402A and 1402B. That is, the first panel 1402A may be arranged spaced apart from and / or close to the second panel 1402B. This can be facilitated by a connecting portion 1404 extending between the respective bottom portions of the first panel 1402A and the second panel 1402B. A cavity 1405 may extend within the connecting portion 1404, such as between the opposing distal sides 1411 of the flexible adjuster 1108. The connecting portion 1404 thus connects the first panel 1402A and the second panel 1402B, such that the first panel 1402A, the second panel 1402B, and the connecting portion 1404 are integrally formed with each other. That is, via a flexible connecting portion 1404 that is thinner than the first panel 1402A and the second panel 1402B, the first panel 1402A and the second panel 1402B can be adjusted / aligned relative to each other. In other words, the cavity 1405 and / or the thinner connecting portion 1414 relative to the panels 1402A / 1402B allow limited adjustability of the panels 1402A / 1402B relative to each other in degrees of freedom of RX, such as... Figure 14 The location is shown (around) Figure 14 (Rotation in the X direction). In one example, both positive and negative RX adjustment can be approximately 2 degrees, but are not limited to this.

[0141] It should be understood that in one or more other embodiments, the first surface element 1402A and / or the second surface element 1402B may have alternative structures and / or shapes, such as non-planar plates.

[0142] The above adjustment / alignment can be facilitated by the first adjustment element 1406 and / or the second adjustment element 1408.

[0143] The first adjusting element 1406 may include a fastener, such as a bolt, which can be secured to a fastener hole, for example a threaded hole 506, at the door panel 432 through a set of through holes 1407 of the first and second face elements 1402A and 1402B. Figure 5 In one or more cases, the first adjusting element 1406 may further include a spring element. This spring element (e.g., a Bass spring) allows for strong engagement while allowing rotation about a Z-direction 442 (e.g., RZ).

[0144] In one or more cases, the set of through holes 1407 can be within tolerance to limit the degrees of freedom provided by the flexible adjuster 1108 relative to the adjustment / alignment of the entire sample support assembly 108. In one or more cases, gaskets or other elements may be used between the first and second surface elements 1402A and 1402B.

[0145] The non-fixed coupling of the first adjusting element 1406 to the door panel 432 allows the flexible adjuster 1108 (e.g., RZ) and the sample support assembly 108 to rotate relative to the chamber door assembly 106 about the corresponding Z-direction 1102. In one or more examples, the positive and / or negative RZ adjustment can be about 2 degrees or about 1 degree, and is not limited thereto. Such rotation can be limited by fastening the first adjusting element 1406 relative to the door panel 432, taking into account the spring element of the first adjusting element.

[0146] Additionally and / or alternatively, in one or more embodiments, one of the through holes 1407 in the set of through holes 1407 may be a threaded hole, while the other through hole 1407 in the set of through holes 1407 may be unthreaded. For example, the hole 1407 of the first face element 1402A may be threaded. This allows a gap to be created between the first face element 1402A and the second face element 1402B by rotating a fastener 1406 (e.g., a first adjusting element 1406).

[0147] The second adjusting element 1408 may include a support element 1409, such as a plate, which may be shaped to mate with an opposing distal side 1411 of the first and second face elements 1402A and 1402B. As shown, a pair of support elements 1409 may be used, extending from the distal side 1411 of the first face element 1402A. In one or more cases, the thickness of the support element (e.g., in the Z direction 1102) may be the same as or less than the thickness of the first face element 1402A, which is also in the Z direction 1102. This unaffected locking mechanism does not affect the adjusted position when the fastener 1410 and / or the first adjusting element 1406 are tightened, but may have minimal flexibility relative to rotation in the X direction (e.g., RX) due to its thickness in the Z direction 1102.

[0148] A set of fasteners 1410, such as bolts, may extend through the support element 1409 and be inserted into fastening holes (e.g., threaded holes) at the distal ends 1411 of the first and second face elements 1402A and 1402B. In one or more cases, the holes in the support element 1409 may be out of tolerance relative to the fasteners 1410 and / or may be shaped as grooves, ovals, etc. This allows adjustment of the alignment of the first and second face elements 1402A and 1402B relative to each other, while still allowing the fasteners 1410 to be fitted into the corresponding holes in the distal ends 1411. Fastening the fasteners 1410 against the support element 1409 relative to the distal ends 1411 restricts and / or secures the alignment between the face elements 1402A and 1402B.

[0149] In summary, the non-fixed coupling of the second adjusting element 1408 with respect to the door panel 432 allows the flexible adjuster 1108, and thus also the sample support assembly 108, to surround the chamber door assembly 106. Figure 14 The corresponding X-direction (RX) rotation is limited by the fastening of the second adjusting element 1408 relative to the first element and the second surface element 1402A and 1402B, as well as relative to the door panel 432.

[0150] For example Figure 10 and Figure 14 As shown, the first surface element 1402A may include one or more support extensions 1414 for supporting the flexible adjuster 1108 against the door panel 432, and / or for limiting the RX movement of the flexible adjuster 1108 relative to the door panel 432.

[0151] For example Figure 7 and Figure 14 As shown, the second surface element 1402B may include an upper support 1416 extending outward from the main body portion of the second surface element 1402B (e.g., in the z-direction 1102). The upper body 1322 of the positioning adjuster 1106, such as the upper surface 1302 of the positioning adjuster 1106 ( Figure 13 The position adjuster 1106 is received (e.g., adjacent to) the upper support 1416. Additionally and / or alternatively, the upper support 1416 may limit the position adjuster 1106 along... Figure 13 place and Figure 14 Adjust upwards in the Y direction.

[0152] As a summary of the above components and / or their functions, the following references Figure 15 A flowchart of an exemplary non-limiting method 1500 is shown, which may be implemented according to one or more embodiments described herein, such as Figure 1 The non-limiting system 100 facilitates the positioning and repeatability of the sample support box relative to the scientific instrument 102. While the non-limiting method 1500 is relative to... Figure 1 While system 100 is described as non-limiting, method 1500 is also applicable to other systems and / or components described herein, such as instrument door assembly 106 and / or sample support assembly 108. For the sake of brevity, repeated descriptions of similar elements and / or processes used in various embodiments have been omitted.

[0153] In 1502, the non-limiting method 1500 may include kinematically coupling the sample support box to the retainer.

[0154] For example, the sample support box 1104 can be kinematically coupled to a retainer (e.g., coupled to a door panel 432 via the sample support assembly 108). See, for example... Figure 9 .

[0155] For example, the sample support box 1104 can be kinematically coupled to a retainer (e.g., a positioning adjuster 1106). See, for example... Figure 9 .

[0156] In 1504, the non-limiting method 1500 may include using a kinematic coupling mechanism with a shape that kinematically aligns the retainer against the base unit, the shape allowing adjustability of the retainer relative to the base unit when the kinematic coupling mechanism is engaged.

[0157] For example, a retainer (e.g., door panel 432) may be kinematically aligned against a base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) for the adjustability of the retainer (e.g., door panel 432) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) when engaged by a kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428). See, for example... Figure 4 .

[0158] For example, a retainer (e.g., a positioning adjuster 1106) can be kinematically aligned against a base unit (e.g., relative to the vacuum chamber housing 124 and / or the transition chamber housing 1108 via a flexible adjuster 1108) for the adjustability of the retainer (e.g., the positioning adjuster 1106) relative to the base unit (e.g., relative to the vacuum chamber housing 124 and / or the transition chamber housing 1108 via the flexible adjuster 1108) when engaged by a kinematic coupling mechanism (e.g., a first kinematic coupling member 1206 and a second kinematic coupling member 1306). See, for example... Figure 11 .

[0159] At 1506, the non-limiting method 1500 may include determining, for example, whether coupling has been successfully achieved by a sensor associated with the processor of the scientific instrument (e.g., scientific instrument 102). If yes, the non-limiting method 1500 may continue until the end. If no, step 1504 may be repeated.

[0160] For example, a vacuum seal can be determined by a vacuum seal sensor (e.g., vacuum seal sensor 431) coupled to a processor (e.g., processor 406) of a scientific instrument (e.g., scientific instrument 102). See, for example Figure 4 .

[0161] As another summary of the above components and / or their functions, see below for reference. Figure 16 and Figure 17 A flowchart of an exemplary non-limiting method 1600 is shown, which may be implemented according to one or more embodiments described herein, such as Figure 1The non-limiting system 100 facilitates the positioning and repeatability of the sample support box relative to the scientific instrument 102. While the non-limiting method 1600 is relative to... Figure 1 While system 100 is described as non-limiting, method 1600 is also applicable to other systems and / or components described herein, such as instrument door assembly 106 and / or sample support assembly 108. For the sake of brevity, repeated descriptions of similar elements and / or processes used in various embodiments have been omitted.

[0162] In 1602, the non-limiting method 1600 may include kinematically coupling the sample support box to the retainer.

[0163] For example, the sample support box 1104 can be kinematically coupled to a retainer (e.g., coupled to a door panel 432 via the sample support assembly 108). See, for example... Figure 9 .

[0164] For example, the sample support box 1104 can be kinematically coupled to a retainer (e.g., a positioning adjuster 1106). See, for example... Figure 9 .

[0165] In 1604, the non-limiting method 1600 may include using a kinematic coupling mechanism having a shape that kinematically aligns the retainer against the base unit, the shape allowing adjustability of the retainer relative to the base unit when the kinematic coupling mechanism is engaged.

[0166] For example, a retainer (e.g., door panel 432) may be kinematically aligned against a base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) for the adjustability of the retainer (e.g., door panel 432) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) when engaged by a kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428). See, for example... Figure 4 .

[0167] For example, a retainer (e.g., a positioning adjuster 1106) can be kinematically aligned against a base unit (e.g., relative to the vacuum chamber housing 124 and / or the transition chamber housing 1108 via a flexible adjuster 1108) for the adjustability of the retainer (e.g., the positioning adjuster 1106) relative to the base unit (e.g., relative to the vacuum chamber housing 124 and / or the transition chamber housing 1108 via the flexible adjuster 1108) when engaged by a kinematic coupling mechanism (e.g., a first kinematic coupling member 1206 and a second kinematic coupling member 1306). See, for example... Figure 11 .

[0168] At 1606, the non-limiting method 1600 may include determining, for example, whether coupling has been successfully achieved by a sensor associated with the processor of the scientific instrument (e.g., scientific instrument 102). If yes, the non-limiting method 1600 may proceed to step 1608. If no, step 1604 may be repeated.

[0169] For example, a vacuum seal can be determined by a vacuum seal sensor (e.g., vacuum seal sensor 431) coupled to a processor (e.g., processor 406) of a scientific instrument (e.g., scientific instrument 102). See, for example Figure 4 .

[0170] In 1608, the non-limiting method 1600 may include adjusting the retainer relative to the base unit based on the flexible compliance of the retainer support or retainer.

[0171] For example, the interface between the retainer bracket (e.g., door transport frame 434) and the retainer (e.g., door panel 432) (such as the dimensional margin via the fastener through-hole 502 of door panel 432) allows for the conformability of the retainer (e.g., door transport frame 434) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424).

[0172] In 1610, the non-limiting method 1600 may include maintaining the adjustability of the retainer relative to the base unit based on the flexible compliance of the retainer after the retainer has kinematically coupled relative to the base unit.

[0173] For example, after the retainer (e.g., door panel 432) is kinematically coupled to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424), the adjustability of the retainer (e.g., door panel 432) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) can be maintained based on the use of a kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428). As described above, the flexible compliance can be attributed to the kinematic coupling mechanism and / or to the use of a flexible material (e.g., an elastic material) for the door panel 432. It should be noted that this adjustability can be maintained prior to any fixed coupling of the chamber door assembly 106 to the chamber housing 124 and / or transition chamber housing 424 (e.g., using retainer element 606). See, for example... Figure 6 and Figure 7 .

[0174] In 1612, the non-limiting method 1600 may include maintaining the adjustability of the retainer relative to the base unit based on the flexible compliance of the retainer support coupled between the retainer and the base unit before and after the sample support box is kinematically coupled to the retainer.

[0175] For example, before and / or after the sample support box (e.g., sample support box 1104) is kinematically coupled to the retainer (e.g., positioning adjuster 1106) via a kinematic coupling mechanism (e.g., first kinematic coupling member 1206 and second kinematic coupling member 1306), the adjustability of the retainer (e.g., positioning adjuster 1106) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) can be maintained based on the use of the tolerance hole 1308 relative to the fastener 1310. That is, at least by using the track system 438, the positioning adjuster 1106 can be adjustably coupled (until later fixed coupling) to the flexible adjuster 1108, which in turn can be coupled to the chamber door assembly 106, which in turn can be coupled to the base unit. See, for example... Figure 11 .

[0176] In 1614, the non-limiting method 1600 may include adjusting the sample support box in at least two different degrees of freedom relative to a robotic arm assembly disposed within the base unit, wherein the two different degrees of freedom are achieved by a kinematic coupling mechanism or by using a second kinematic coupling mechanism.

[0177] For example, based on a kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428) relative to a robotic arm assembly (e.g., a carrier-transfer manipulator 128 or other automated motion assembly), it is possible to achieve at least two different degrees of freedom (e.g., along such as...). Figure 5 The location is depicted in the X and Y directions or around such a direction. Figure 5 This causes adjustment of the sample support (e.g., sample support 1104) in at least two of the generally depicted X, Y, or Z directions. See, for example... Figure 5 and Figure 7 .

[0178] For example, based on a kinematic coupling mechanism (e.g., a first kinematic coupling member 1206 and a second kinematic coupling member 1306) relative to a robotic arm assembly (e.g., a carrier-transfer manipulator 128 or other automated motion assembly), it is possible to achieve at least two different degrees of freedom (e.g., at least along such...). Figure 13 This causes adjustment of the sample support box (e.g., sample support box 1104) in the X and Y directions (as depicted). See, for example... Figure 13 .

[0179] In 1616, the non-limiting method 1600 may include adjusting the retainer against an elastic member disposed between the retainer and the base unit based on kinematic coupling.

[0180] For example, based on a kinematic coupling mechanism (e.g., a first kinematic coupling member 428 and a second kinematic coupling member 430), the retainer (e.g., the door panel 432) can be adjusted relative to an elastic member (e.g., an elastic member 426) disposed between the retainer (e.g., the door panel 432) and the base unit (e.g., the vacuum chamber housing 124 and / or the transition chamber housing 424). See, for example... Figure 6 . Other summaries

[0181] For the sake of simplicity, the computer-executed methods and non-computer-executed methods provided herein are depicted and / or described as a series of actions. It should be understood that the subject matter innovation is not limited to the actions and / or the order of actions shown; for example, actions may occur in one or more sequences and / or simultaneously, or may occur with other actions not presented and described herein. Furthermore, not all actions shown are applicable to implementing the computer-executed methods and non-computer-executed methods according to the subject matter. Additionally, computer-executed methods and non-computer-executed methods may alternatively be represented by a state diagram or events as a series of interrelated states. Furthermore, the computer-executed methods described below and throughout this specification can be stored on an article of art for transfer and assignment to a computer. As used herein, the term "article of art" is intended to encompass a computer program accessible from any computer-readable device or storage medium.

[0182] Systems and / or devices have been described herein (and / or will be further described) regarding interactions between one or more components. Such systems and / or components may include those components or sub-components specified herein, one or more of the specified components and / or sub-components, and / or additional components. Sub-components may be implemented as components communicatively coupled to other components, rather than being included in a parent component. One or more components and / or sub-components may be combined into a single component providing aggregated functionality. These components may interact with one or more other components specifically described herein for simplicity, but which are known to those skilled in the art.

[0183] In summary, the embodiments described herein relate to systems and / or methods for providing positional repeatability of closing the opening of a scientific instrument (e.g., scientific instrument 102) and / or positioning repeatability of aligning a sample (e.g., sample 110) relative to the coordinate system (e.g., coordinate system 126) of the scientific instrument (e.g., scientific instrument 102). A system (e.g., system 104) may include a retainer (e.g., door panel 432; positioning adjuster 1106) receiving a sample support box (e.g., sample support box 1104); a first portion of a kinematic coupling mechanism (e.g., a first kinematic coupling member 430 or a second kinematic coupling member 428; a first kinematic coupling member 1208 or a second kinematic coupling member 1306) receiving a second portion of the kinematic coupling mechanism (e.g., the other of the first kinematic coupling member 430 and the second kinematic coupling member 428; the other of the first kinematic coupling member 1206 and the second kinematic coupling member 1306); and a second portion of the kinematic coupling mechanism (e.g., the other of the first kinematic coupling member 430 and the second kinematic coupling member 428; the first kinematic coupling member 1206 and the second kinematic coupling member 1306). The first part of the kinematic coupling mechanism (e.g., the first kinematic coupling member 430 or the second kinematic coupling member 428; the first kinematic coupling member 4208 or the second kinematic coupling member 1306) or the second part of the kinematic coupling mechanism (e.g., the first kinematic coupling member 430 or the second kinematic coupling member 428; the first kinematic coupling member 1206 or the second kinematic coupling member 1306) is configured to move in conjunction with the sample support box (e.g., the sample support box 1104) when coupled with the retainer (e.g., the door panel 432, the positioning adjuster 1106). A system (e.g., system 104) may include a vacuum chamber housing (e.g., vacuum chamber housing 124), a vacuum chamber door (e.g., chamber door assembly 106), and a kinematic coupling mechanism (e.g., a first kinematic coupling member 430 and a second kinematic coupling member 428; a first kinematic coupling member 1206 and a second kinematic coupling member 1306) for adjustably aligning a sample support box (e.g., sample support box 1104) relative to the vacuum chamber housing (e.g., vacuum chamber housing 124) at the vacuum chamber door (e.g., chamber door assembly 106).

[0184] One or more embodiments described herein may employ a novel system in which, compared to existing frameworks, the system provides repeatability of positioning of instrument closure components (such as doors or door systems attached to instrument housings), repeatability of positioning of carriers (e.g., sheet carriers or sample carriers) relative to the scientific instrument, and more specifically, separation of degrees of freedom for these positioning repeatability and / or increased sample throughput relative to the coordinate system of the scientific instrument.

[0185] In practice, given one or more embodiments described herein, the practical application of one or more systems, computer-executed methods, and / or computer program products described herein can be to provide consistency in the engagement of instrument gate components with scientific instruments, consistency in the positioning of one or more carriers relative to the carrier transport manipulators of scientific instruments, and / or reduced preparation time before the scientific instruments analyze a set of samples.

[0186] These are useful and practical applications, thus providing enhanced (e.g., improved and / or optimized) sample analysis compared to existing systems. In general, such tools can constitute concrete and tangible technological improvements in the field of materials analysis, and more specifically in materials analysis using carriers (e.g., sheet carriers) to transfer samples between the air and vacuum sides of scientific instruments.

[0187] Systems and / or devices have been described herein (and / or will be further described) regarding interactions between one or more components. Such systems and / or components may include those components or sub-components specified herein, one or more of the specified components and / or sub-components, and / or additional components. Sub-components may be implemented as components communicatively coupled to other components, rather than being included in a parent component. One or more components and / or sub-components may be combined into a single component providing aggregated functionality. These components may interact with one or more other components specifically described herein for simplicity, but which are known to those skilled in the art.

[0188] In one or more embodiments, one or more processes described herein may be performed by one or more dedicated computers (e.g., dedicated processing units, dedicated classical computers, and / or another type of dedicated computer) to perform prescribed tasks related to one or more of the foregoing technologies. One or more embodiments described herein and / or components thereof may be used to address new problems arising from advancements in the foregoing technologies, the use of cloud computing systems, computer architectures, and / or other technologies.

[0189] One or more embodiments described herein are fully operable to perform one or more other functions (e.g., full startup, full execution, and / or another function), while also performing one or more of the operations described herein.

[0190] To provide an additional summary, a list of implementation schemes and their features is provided below.

[0191] A system includes: a retainer (e.g., door panel 432; positioning adjuster 1106) receiving a sample support box (e.g., sample support box 1104); a first portion of a kinematic coupling mechanism (e.g., a first kinematic coupling member 430 or a second kinematic coupling member 428; a first kinematic coupling member 1206 or a second kinematic coupling member 1306) receiving a second portion of the kinematic coupling mechanism (e.g., the other of the first kinematic coupling member 430 and the second kinematic coupling member 428; the other of the first kinematic coupling member 1206 and the second kinematic coupling member 1306); and a second portion of the kinematic coupling mechanism disposed at the retainer, wherein at least the first portion or the second portion of the kinematic coupling mechanism is configured to move in conjunction with the sample support box when coupled to the retainer.

[0192] In the system described above, after the first part of the kinematic coupling mechanism engages with the second part of the kinematic coupling mechanism, the adjustability of the first part of the kinematic coupling mechanism relative to the second part of the kinematic coupling mechanism (e.g., the first kinematic coupling member 430 and the second kinematic coupling member 428) is maintained based on the flexibility of the retaining member (e.g., the door panel 432, via the material of the door panel 432 and / or via the tolerance hole 1308).

[0193] In any of the systems described in the preceding paragraphs, where the interface between the retainer (e.g., door panel 432; positioning adjuster 1106) and the retainer support (e.g., door transport frame 434; flexible adjuster 1108) is configured such that a first part of the kinematic coupling mechanism engages with a second part of the kinematic coupling mechanism (e.g., a first kinematic coupling element 430 and a second kinematic coupling member 428; a first kinematic coupling member 1206 and a second kinematic coupling member 1306), adjustability of the retainer relative to the retainer support is provided.

[0194] In any of the preceding paragraphs, the system in which the retainer support (e.g., door transport frame 434; flexible adjuster 1108) can be coupled to each of the retainer (e.g., door panel 432; positioning adjuster 1106) and the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) that receives the retainer.

[0195] In any of the systems described above, where the retainer (e.g., door panel 432) is configured as a first part of a kinematic coupling mechanism and engaged with a second part of the kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428), it is possible to tilt or rotate at least one of the retainer relative to the resilient seal (e.g., resilient element 426) at the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) receiving the retainer.

[0196] The system of any of the foregoing paragraphs further includes: an elastic element (e.g., elastic element 426) held at the retainer (e.g., door panel 432) or at the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) receiving the retainer, wherein the elastic element maintains a vacuum seal between the retainer and the base unit after the retainer support (e.g., door transport frame 434) is fixedly coupled to the base unit.

[0197] The system of any of the foregoing paragraphs further includes: wherein, after the first part of the kinematic coupling mechanism is coupled to the second part of the kinematic coupling mechanism (e.g., the first kinematic coupling member 430 and the second kinematic coupling member 428; the first kinematic coupling member 1206 and the second kinematic coupling member 1306), the adjustability of the alignment between the sample support box (e.g., the sample support box 1104) and the base unit (e.g., the vacuum chamber housing 124 and / or the transition chamber housing 424) of the receiving retainer (e.g., the door panel 432; the positioning adjuster 1106) is maintained.

[0198] The system described in any of the preceding paragraphs further includes: a group of magnetic elements (e.g., a first magnetic element 1304 and a second magnetic element 1220) disposed at a sample support (e.g., sample support 1104) and a retainer (e.g., a positioning adjuster 1106), wherein the group of magnetic elements allows the sample support relative to the retainer to move with a pair of degrees of freedom (e.g., along) Figure 11 (The movement is depicted in the X and Y directions).

[0199] In any of the preceding paragraphs, the system wherein the retainer (e.g., door panel 432, positioning adjuster 1106) and the retainer support (e.g., door transport frame 434; flexible adjuster 1108) together provide a sample support box (e.g., sample support box 1104) with at least four degrees of freedom (e.g., the coordinate system of the robotic arm assembly (e.g., robotic arm assembly 128) disposed within the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) of the receiving retainer (e.g., door panel 432, positioning adjuster 1106) relative to the coordinate system of the robotic arm assembly (e.g., robotic arm assembly 128) disposed within the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) of the receiving retainer (e.g., door panel 432, positioning adjuster 1106). Figure 5 and Figure 6 The X and Y directions at that location are the same as the RX and RY directions; Figure 11The X, Y, and Z directions at that location are related to RX rotation and RZ rotation.

[0200] In any of the systems described in the preceding paragraphs, the first interface between the retainer bracket (e.g., door transport frame 434; flexible adjuster 1108) and the retainer (e.g., door panel 432, positioning adjuster 1106) allows at least three of the four degrees of freedom (e.g., Figure 5 The X and Y directions at that location are rotated relative to RX and RY rotations; Figure 11 The second interface between the retainer (e.g., door panel 432, positioning adjuster 1106) and the sample support box (e.g., sample support box 1104) allows at least two of the four degrees of freedom.

[0201] A system includes: a vacuum chamber housing (e.g., vacuum chamber housing 124 and / or transition chamber housing 424); a vacuum chamber door (e.g., chamber door assembly 106); and a kinematic coupling mechanism (e.g., a first kinematic coupling member 430 and a second kinematic coupling member 428; a first kinematic coupling member 1206 and a second kinematic coupling member 1306) for adjustably aligning a sample support box (e.g., sample support box 1104) relative to the vacuum chamber housing at the vacuum chamber door.

[0202] The system in the previous paragraph, wherein the kinematic coupling mechanism (e.g., the first kinematic coupling member 430 and the second kinematic coupling member 428) is used to align the vacuum chamber door (e.g., the door plate 432 of the alignment chamber door assembly 106) relative to the vacuum chamber housing (e.g., the vacuum chamber housing 124 and / or the transition chamber housing 424) and relative to the elastic element (e.g., the elastic element 426) that seals between the vacuum chamber door and the vacuum chamber housing.

[0203] The system in any of the preceding paragraphs, wherein the kinematic coupling mechanism is used to align the sample support box (e.g., sample support box 1104) relative to the vacuum chamber door (e.g., door panel 432).

[0204] In any of the systems described in the preceding paragraphs, the kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428; first kinematic coupling member 1206 and second kinematic coupling element 1306) provides at least one pair of degrees of freedom (e.g., sample support box 1104) of the sample support box (e.g., sample support box 1104) relative to the vacuum chamber housing (e.g., vacuum chamber housing 124 and / or transition chamber housing 424). Figure 5 The X and Y directions at that location are rotated relative to RZ; Figure 11(in the X and Y directions), and wherein, in addition to at least one pair of degrees of freedom, a retainer (e.g., a positioning adjuster 1106; positioning adjuster 1106 and flexible adjuster 1108) coupled between the sample support box (e.g., sample support box 1104) and the vacuum chamber door (e.g., door panel 432) provides three additional degrees of freedom for the sample support box relative to the vacuum chamber door (e.g., in the X and Y directions), and wherein, in addition to at least one pair of degrees of freedom, the retainer (e.g., positioning adjuster 1106 and flexible adjuster 1108) coupled between the sample support box (e.g., sample support box 1104) and the vacuum chamber door (e.g., door panel 432) provides three additional degrees of freedom for the sample support box relative to the vacuum chamber door. Figure 11 (Z direction at that location is related to RX rotation and RZ rotation).

[0205] A method includes: kinematically coupling a sample support box (e.g., sample support box 1104) to a retainer (e.g., door panel 432, positioning adjuster 1106); and using a kinematic coupling mechanism having the following shapes (e.g., first kinematic coupling member 430 and second kinematic coupling member 428; first kinematic coupling member 1206 and second kinematic coupling member 1306) to kinematically align the retainer relative to a base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424), wherein the shape allows adjustability of the retainer relative to the base unit when the kinematic coupling mechanism is engaged.

[0206] The method in any of the preceding paragraphs further includes: causing adjustability of the retainer (e.g., door transport frame 434; flexible adjuster 1108) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) based on the flexible compliance of the retainer support (e.g., door transport frame 434; flexible adjuster 1108) or the retainer (e.g., door panel 432; positioning adjuster 1106).

[0207] The method in any of the foregoing paragraphs further includes: maintaining the adjustability of the retainer (e.g., door panel 432; flexible adjuster 1106) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) after the retainer (e.g., door panel 432; positioning adjuster 1106) is kinematically coupled relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) based on the flexible compliance of the retainer (e.g., door panel 432; positioning adjuster 1106).

[0208] The method in any of the foregoing paragraphs further includes: based on the flexible compliance of the retainer support (e.g., door transport frame 432; flexible adjuster 1108) coupled between the retainer (e.g., door panel 432; position bracket 1106) and the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424), maintaining the adjustability of the retainer (e.g., door panel 432; flexible adjuster 1106) relative to the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) before and after the sample support box (e.g., sample support box 1104) is kinematically coupled to the retainer (e.g., door panel 432; flexible adjuster 1106).

[0209] The method in any of the preceding paragraphs further includes: causing the sample support box (e.g., sample support box 1104) to move in at least two different degrees of freedom (e.g., Figure 5 Rotation of the X and Y directions relative to the RX direction at that location; and Figure 11 The adjustability of the X and Y directions relative to the robotic arm assembly (e.g., robotic arm assembly 128) disposed inside the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424), wherein two different degrees of freedom are achieved by means of a kinematic coupling mechanism (e.g., a first kinematic coupling member 430 and a second kinematic coupling member 428, or a first kinematic coupling member 1206 and a second kinematic coupling member 1306) or by means of a second kinematic coupling mechanism (e.g., another of the first kinematic coupling member 430 and the second kinematic coupling member 428 and another of the first kinematic coupling member 1206 and the second kinematic coupling member 1306).

[0210] The method in any of the preceding paragraphs further includes: adjusting the retainer (e.g., door panel 432) against an elastic element (e.g., elastic element 426) disposed between the retainer (e.g., door panel 432) and the base unit (e.g., vacuum chamber housing 124 and / or transition chamber housing 424) based on the kinematic coupling mechanism (e.g., first kinematic coupling member 430 and second kinematic coupling member 428, or first kinematic coupling member 1206 and second kinematic coupling member 1306). Scientific Instrument System Description

[0211] Next, turn to Figure 18 This provides the article in Figures 1 to 17 A detailed description of the additional background for one or more embodiments described herein. Figure 18A block diagram of an example scientific instrument system 1800 according to various embodiments described herein is shown. The scientific instrument system may include a scientific instrument 102, similar instruments, instruments used thereto, and / or instruments employed thereto. For example, the scientific instrument system 102 may be implemented by one or more of a scientific instrument 1810, a user local computing device 1820, a service local computing device 1830, and / or a remote computing device 1840 of the scientific instrument system 1800.

[0212] Any of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 may be included in the references herein. Figure 3 Any implementation of the computing device 300 discussed herein, as well as any of the scientific instrument 1810, user local computing device 1820, service local computing device 1830, or remote computing device 1840, may be adopted using the references herein. Figure 3 The computing device 300 under discussion takes the form of any one or more suitable implementations.

[0213] One or more of the scientific instrument 1810, the user local computing device 1820, the service local computing device 1830, and / or the remote computing device 1840 may include a processing device 1802, a storage device 1804, and / or an interface device 1806. The processing device 1802 may take any suitable form, including those described herein. Figure 3 The processor 302 discussed may take any form. Processing devices 1802, including those in scientific instruments 1810, user local computing devices 1820, service local computing devices 1830, and / or remote computing devices 1840, may take the same or different forms. Storage devices 1804 may take any suitable form, including those referenced herein. Figure 3 The storage device 304 discussed may take any form. Storage devices 1804 included in different devices such as scientific instrument 1810, user local computing device 1820, service local computing device 1830, and / or remote computing device 1840 may take the same or different forms. Interface device 1806 may take any suitable form, including those referenced herein. Figure 3 The form of any interface device 306 discussed. The interface device 306 included in different devices such as scientific instrument 1810, user local computing device 1820, service local computing device 1830 and / or remote computing device 1840 may take the same or different forms.

[0214] Scientific instrument 1810, user local computing device 1820, service local computing device 1830, and / or remote computing device 1840 can communicate with other components of scientific instrument system 1800 via communication path 1808. As shown, communication path 1808 can communicatively couple interface devices 1806 of the different components shown in scientific instrument system 1800, and can be a wired or wireless communication path (e.g., according to references herein). Figure 3 (Any of the communication technologies discussed in the interface device 306 of the computing device 300). Figure 18 The specific scientific instrument system 1800 depicted includes communication paths between each pair of scientific instrument 1810, user local computing device 1820, service local computing device 1830, and remote computing device 1840. However, this "fully connected" implementation is merely exemplary, and in various embodiments, various communication paths in communication path 1808 may be omitted. For example, in one or more embodiments, service local computing device 1830 may omit the direct communication path 1808 between its interface device 1806 and the interface device 1806 of scientific instrument 1810, but may communicate with scientific instrument 1810 via the communication path 1808 between service local computing device 1830 and user local computing device 1820 and / or the communication path 1808 between user local computing device 1820 and scientific instrument 1810.

[0215] Scientific Instruments 1810 may include any suitable scientific instrument, such as a separation instrument or MS instrument, or other instruments that facilitate the analysis of materials.

[0216] User-local computing device 1820 may be a computing device local to the user of scientific instrument 1810 (e.g., any embodiment of computing device 300 discussed herein). In one or more embodiments, user-local computing device 1820 may also be local relative to scientific instrument 1810, but this is not required; for example, user-local computing device 1820 associated with a user entity's home, office, or other building may be remote from scientific instrument 1810 but communicate with it, so that the user entity can use user-local computing device 1820 to control scientific instrument 1810 and / or access data from there. In one or more embodiments, user-local computing device 1820 may be a laptop, smartphone, or tablet device. In one or more embodiments, user-local computing device 1820 may be a portable computing device. In one or more embodiments, user-local computing device 1820 may be deployed in the field.

[0217] The servicing local computing device 1830 may be a computing device local to the entity servicing scientific instrument 1810 (e.g., any embodiment of computing device 300 discussed herein). For example, the servicing local computing device 1830 may be local to the manufacturer of scientific instrument 1810 or a third-party service company. In one or more embodiments, the servicing local computing device 1830 may communicate with scientific instrument 1810, user local computing device 1820, and / or remote computing device 1840 (e.g., via direct communication path 1808 or via multiple “indirect” communication paths 1808, as discussed above) to receive operational data about scientific instrument 1810, user local computing device 1820, and / or remote computing device 1840 (e.g., self-test results of scientific instrument 1810, calibration coefficients used by scientific instrument 1810, sensor measurements associated with scientific instrument 1810, etc.). In one or more embodiments, the service local computing device 1830 may communicate with scientific instrument 1810, user local computing device 1820, and / or remote computing device 1840 (e.g., via direct communication path 1808 or via multiple “indirect” communication paths 1808, as discussed above) to transmit data to scientific instrument 1810, user local computing device 1820, and / or remote computing device 1840 (e.g., to update programming instructions such as firmware in scientific instrument 1810, to initiate the execution of test sequences or calibration sequences in scientific instrument 1810, to update programming instructions such as software in user local computing device 1820 or remote computing device 1840). User entities of scientific instrument 1810 may use scientific instrument 1810 or user local computing device 1820 to communicate with service local computing device 1830 to report problems with scientific instrument 1810 or user local computing device 1820, to request access from technicians to improve the operation of scientific instrument 1810, to order consumable parts or replacement parts associated with scientific instrument 1810, or for other purposes.

[0218] Remote computing device 1840 may be a computing device located remotely from scientific instrument 1810 and / or user local computing device 1820 (e.g., any embodiment of computing device 300 discussed herein). In one or more embodiments, remote computing device 1840 may be incorporated into a data center or other large-scale server environment. In one or more embodiments, remote computing device 1840 may include network-connected storage (e.g., as part of storage device 1804). Remote computing device 1840 may store data generated by scientific instrument 1810, perform analysis on data generated by scientific instrument 1810 (e.g., according to programming instructions), facilitate communication between user local computing device 1820 and scientific instrument 1810, and / or facilitate communication between service local computing device 1830 and scientific instrument 1810.

[0219] In one or more implementations, this can be omitted. Figure 18 One or more components of the scientific instrument system 1800 shown. Further, in one or more embodiments, there may be... Figure 18 The scientific instrument system 1800 comprises multiple components among various elements. For example, the scientific instrument system 1800 may include multiple user local computing devices 1820 (e.g., different user local computing devices 1820 associated with different user entities or located in different locations). In another example, the scientific instrument system 1800 may include multiple scientific instruments 1810, all of which communicate with a serving local computing device 1830 and / or a remote computing device 1840; in this embodiment, the serving local computing device 1830 may monitor these multiple scientific instruments 1810, and the serving local computing device 1830 may cause updates or other information to be simultaneously “broadcast” to multiple scientific instruments 1810. The different scientific instruments 1810 in the scientific instrument system 1800 may be located close to each other (e.g., in the same room) or far from each other (e.g., on different floors of a building, in different buildings, in different cities, etc.). In one or more embodiments, scientific instrument 1810 may be connected to an Internet of Things (IoT) stack that allows command and control of scientific instrument 1810 via web-based applications, virtual or augmented reality applications, mobile applications, and / or desktop applications. Any of these applications may be accessible by a user entity operating a user-local computing device 1820 that communicates with scientific instrument 1810 via an intervening remote computing device 1840. In one or more embodiments, scientific instrument 1810 may be sold by a manufacturer along with one or more associated user-local computing devices 1820 as part of a local scientific instrument computing unit 1812.

[0220] In one or more embodiments, the different scientific instruments 1810 included in the scientific instrument system 1800 may be of different types; for example, one scientific instrument 1810 may be an EDS device, while another scientific instrument 1810 may be an analytical device for analyzing the results of the EDS device. In some such embodiments, a remote computing device 1840 and / or a user-local computing device 1820 may combine data from the different types of scientific instruments 1810 included in the scientific instrument system 1800. Example runtime environment

[0221] Figure 19This is a schematic block diagram of a runtime environment 1900 with which the described subject can interact. The runtime environment 1900 includes one or more remote components 1910. Remote components 1910 can be hardware and / or software (e.g., threads, processes, computing devices). In one or more embodiments, remote component 1910 can be a distributed computer system connected via a communication framework 1940 to a local autoscaling component and / or a program using distributed computer system resources. The communication framework 1940 may include wired network devices, wireless network devices, mobile devices, wearable devices, radio access network devices, gateway devices, femtocellular devices, servers, etc.

[0222] The runtime environment 1900 also includes one or more local components 1920. Local components 1920 can be hardware and / or software (e.g., threads, processes, computing devices). In one or more embodiments, local component 1920 may include autoscaling components and / or programs that communicate with / use remote resources 1910 and 1920, etc., connected to a remote distributed computing system via a communication framework 1940.

[0223] One possible form of communication between the remote component 1910 and the local component 1920 could be a data packet format adapted for transmission between two or more computer processes. Another possible form of communication between the remote component 1910 and the local component 1920 could be a circuit-switched data format adapted for transmission between two or more computer processes over a wireless time slot. The operating environment 1900 includes a communication framework 1940, which can be used to facilitate communication between the remote component 1910 and the local component 1920, and may include an air interface, such as a UMTS network interface via an LTE network, etc. The remote component 1910 can be operatively connected to one or more remote data repositories 1950, such as hard disk drives, solid-state drives, Subscriber Identity Module (SIM) cards, electronic SIM cards (eSIM), device memory, etc., which can be used to store information on the remote component 1910 side of the communication framework 1940. Similarly, the local component 1920 can be operatively connected to one or more local data repositories 1930, which can be used to store information on the local component 1920 side of the communication framework 1940. Example computing environment

[0224] To provide additional background information on the various implementation schemes described herein Figure 20The following discussion is intended to provide a brief overview of a suitable computing environment 2000 in which the various embodiments described herein can be implemented. Although the embodiments have been described above in the general context of computer-executable instructions that can run on one or more computers, those skilled in the art will recognize that these embodiments can also be implemented in combination with other program modules and / or as a combination of hardware and software.

[0225] Generally, program modules include routines, programs, components, data structures, etc., that perform tasks or implement abstract data types. Furthermore, these methods can be used in other computer system configurations, including single-processor or multi-processor computer systems, microcomputers, mainframe computers, Internet of Things (IoT) devices, distributed computing systems, and personal computers, handheld computing devices, microprocessor-based or programmable consumer electronics, etc., where each configuration is operatively coupled to one or more associated devices.

[0226] The implementation scheme shown in this paper can also be implemented in a distributed computing environment, where some tasks are performed by remote processing devices linked via a communication network. In a distributed computing environment, program modules can reside in both local and remote memory storage devices.

[0227] Computing devices typically include various media, which may include computer-readable storage media, machine-readable storage media, and / or communication media, these terms being used differently from each other herein as described below. A computer-readable storage media or a machine-readable storage media can be any available storage medium accessible by a computer, including volatile and non-volatile media, removable and non-removable media. By way of example and not limitation, a computer-readable storage media or a machine-readable storage media can be implemented in conjunction with any information storage method or technology, such as computer-readable or machine-readable instructions, program modules, structured data, or unstructured data.

[0228] Computer-readable storage media may include, but is not limited to, random access memory (RAM), read-only memory (ROM), electrically erasable read-only memory (EEPROM), flash memory or other memory technologies, read-only optical disc storage (CD-ROM), digital versatile optical disc (DVD), Blu-ray disc (BD) or other optical disc storage, cassette tape, magnetic tape, disk storage or other magnetic storage devices, solid-state drives or other solid-state storage devices, or other tangible and / or non-transitory media that can be used to store desired information. In this regard, the terms “tangible” or “non-transitory” as used herein for storage, memory, or computer-readable media exclude only the propagation of transient signals themselves as a modifier, and do not waive the rights to all conventional storage devices, memory, or computer-readable media that do not merely propagate transient signals themselves.

[0229] Computer-readable storage media can be accessed by one or more local or remote computing devices, for example, through access requests, queries or other data retrieval protocols, to perform various operations on the information stored on the media.

[0230] Communication media typically manifest as computer-readable instructions, data structures, program modules, or other structured or unstructured data signals, such as modulated data signals, carrier waves, or other transmission mechanisms, and include any information delivery or transmission medium. The term "modulated data signal" or multiple signals refers to a signal that causes one or more of its own characteristics to be set or altered in such a way that information is encoded in one or more signals. By way of example and not limitation, communication media include wired media, such as wired networks or direct wired connections, and wireless media, such as acoustic, RF, infrared, and other wireless media.

[0231] Still referencing Figure 20 An example computing environment 2000, which can implement one or more embodiments described herein, includes a computer 2002, the computer 2002 including a processing unit 2004, a system memory 2006, and a system bus 2008. The system bus 2008 couples system components (including but not limited to the system memory 2006) to the processing unit 2004. The processing unit 2004 can be any of a variety of commercially available processors. A dual-microprocessor or other multiprocessor architecture may also be used as the processing unit 2004.

[0232] The system bus 2008 can be any of several types of bus architectures, which can further interconnect with memory buses (with or without a memory controller), peripheral buses, and local buses using any of the various commercially available bus architectures. System memory 2006 includes ROM 2010 and RAM 2012. The Basic Input / Output System (BIOS) can be stored in non-volatile memory such as ROM, erasable programmable read-only memory (EPROM), or EEPROM, where the BIOS contains basic routines that facilitate the transfer of information between various components within the computer 2002 (such as during startup). RAM 2012 may also include high-speed RAM, such as static RAM for caching data.

[0233] Computer 2002 also includes an internal hard disk drive (HDD) 2014 (e.g., EIDE, SATA) and may include one or more external storage devices 2016 (e.g., floppy disk drive (FDD) 2016, memory stick or flash drive reader, memory card reader, etc.). Although the internal HDD 2014 is shown as being located inside computer 2002, it may also be configured to be externally used in a suitable enclosure (not shown). Additionally, although not shown in computing environment 2000, solid-state drives (SSDs) may be used in addition to or as an alternative to the HDD 2014.

[0234] Other internal or external storage may include at least one other storage device 2020 with storage medium 2022 (e.g., solid-state storage device, non-volatile storage device, and / or optical disc drive that can be read from or written to removable media such as CD-ROM, DVD, BD, etc.). External storage 2016 may be facilitated by a network virtual machine. HDD 2014, external storage device 2016, and storage device (e.g., drive) 2020 may be connected to system bus 2008 via HDD interface 2024, external storage interface 2026, and drive interface 2028, respectively.

[0235] Drives and their associated computer-readable storage media provide non-volatile storage of data, data structures, computer-executable instructions, etc. For Computer 2002, drives and storage media are capable of storing any data in a suitable digital format. Although the above description of computer-readable storage media refers to that type of storage device, other types of computer-readable storage media, whether existing or developed in the future, may also be used in the example operating environment, and further, any such storage media may contain computer-executable instructions for performing the methods described herein.

[0236] Numerous program modules can be stored in the drive and RAM 2012, including the operating system 2030, one or more application programs 2032, other program modules 2034, and program data 2036. All or part of the operating system, application programs, modules, and / or data may also be cached in RAM 2012. The systems and methods described herein can be implemented using various commercially available operating systems or combinations of operating systems.

[0237] Computer 2002 may optionally include emulation technology. For example, a virtual machine monitor (not shown) or other intermediate layer may emulate the hardware environment of operating system 2030, and the emulated hardware may optionally be different from that of the operating system 2030. Figure 20The hardware is shown in the diagram. In this embodiment, the operating system 2030 may include one of a plurality of virtual machines (VMs) hosted on the computer 2002. Furthermore, the operating system 2030 may provide a runtime environment for the application 2032, such as the Java Runtime Environment or the .NET Framework. A runtime environment is a consistent execution environment that allows the application 2032 to run on any operating system that includes a runtime environment. Similarly, the operating system 2030 may support containers, and the application 2032 may be in the form of a container, wherein the container is a lightweight, stand-alone executable software package that includes, for example, code, runtime, system tools, system libraries, and application settings.

[0238] Furthermore, the Computer 2002 can be enabled with security modules such as Trusted Processing Modules (TPMs). For example, with the help of a TPM, the boot component performs a hash calculation on the next boot component in the timeline and waits for the result to match a security value before loading the next boot component. This process can occur at any layer of the Computer 2002's code execution stack, for example, at the application execution level or the operating system (OS) kernel level, thereby achieving security at any level of code execution.

[0239] User entities can input commands and information to computer 2002 through one or more wired / wireless input devices, such as keyboard 2038, touchscreen 2040, and pointing devices (such as mouse 2042). Other input devices (not shown) may include microphones, infrared (IR) remote controls, radio frequency (RF) remote controls or other remote controls, joysticks, virtual reality controllers and / or virtual reality headsets, game controllers, styluses, image input devices (e.g., cameras), gesture sensor input devices, visual motion sensor input devices, emotion or face detection devices, biometric input devices (e.g., fingerprint or iris scanners), etc. These and other input devices are typically connected to processing unit 2004 via input device interface 2044, which may be coupled to system bus 2008, but may also be connected to other interfaces, such as parallel ports, IEEE 1394 serial ports, game ports, USB ports, IR interfaces, etc. Interfaces, etc.

[0240] The monitor 2046 or other types of display devices can also be connected to the system bus 2008 via an interface (such as the video adapter 2048). In addition to the monitor 2046, the computer typically includes other peripheral output devices (not shown), such as speakers, printers, etc.

[0241] Computer 2002 can operate in a networked environment using logical connections via wired and / or wireless communications with one or more remote computers (such as remote computer 2050). Remote computer 2050 can be a workstation, server computer, router, personal computer, portable computer, microprocessor-based entertainment device, peer-to-peer device, or other common network node, and typically includes many or all of the elements described relative to computer 2002, but for simplicity, only memory / storage device 2052 is shown. The described logical connections include wired / wireless connections to a local area network (LAN) 2054 and / or a larger network (e.g., a wide area network (WAN) 2056). Such LAN and WAN network environments are common in offices and companies and are advantageous for enterprise-level computer networks, such as intranets, which can connect to global communication networks, such as the Internet.

[0242] When used in a LAN network environment, computer 2002 can connect to local network 2054 via a wired and / or wireless communication network interface or adapter 2058. Adapter 2058 facilitates wired or wireless communication with LAN 2054, which may also include a wireless access point (AP) configured thereon for communicating with adapter 2058 in wireless mode.

[0243] When used in a WAN network environment, computer 2002 may include modem 2060, or may be connected to a communication server on WAN 2056 via other means (such as via the Internet) for establishing communication via WAN 2056. Modem 2060, which may be built-in or external and may be a wired or wireless device, may be connected to system bus 2008 via input device interface 2044. In a networked environment, program modules described relative to computer 2002 or parts thereof may be stored in remote memory / storage device 2052. The network connection shown is an example, and other means of establishing communication links between computers may be used.

[0244] When used in a LAN or WAN network environment, computer 2002 can access cloud storage systems or other network-based storage systems, in addition to or as an alternative to external storage device 2016 as described above. Generally, the connection between computer 2002 and the cloud storage system can be established via LAN 2054 or WAN 2056, for example, adapter 2058 or modem 2060. When computer 2002 is connected to an associated cloud storage system, external storage interface 2026 can manage the storage provided by the cloud storage system with the aid of adapter 2058 and / or modem 2060, just as it would manage other types of external storage. For example, external storage interface 2026 can be configured to provide access to cloud storage sources as if these sources were physically connected to computer 2002.

[0245] Computer 2002 is operable to communicate with any wireless device or entity operatively configured to conduct wireless communication, such as printers, scanners, desktop and / or portable computers, portable data assistants, communication satellites, any device or location associated with a wirelessly detectable tag (e.g., a kiosk, newsstand, store shelf, etc.), and telephones. This may include Wi-Fi and... Wireless technology. Therefore, communication can be within a defined structure like existing networks, or simply ad hoc communication between at least two devices. Other information

[0246] The embodiments described herein may be integrated at any possible level of technical detail, relating to one or more of systems, methods, apparatuses, and / or computer program products. A computer program product may include a computer-readable storage medium (or media) having computer-readable program instructions thereon to cause a processor to execute aspects of one or more embodiments described herein. A computer-readable storage medium may be a tangible device capable of retaining and storing instructions for use by an instruction execution device. A computer-readable storage medium may be, for example, but not limited to, electronic storage devices, magnetic storage devices, optical storage devices, electromagnetic storage devices, superconducting storage devices, and / or any suitable combination of the foregoing. A non-exhaustive list of more specific examples of computer-readable storage media may also include: portable computer floppy disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), static random access memory (SRAM), portable optical disc read-only storage media (CD-ROM), digital versatile optical disc (DVD), memory sticks, floppy disks, mechanical encoding devices such as punched cards or recessed protrusions on which instructions are recorded, and / or any suitable combination of the foregoing. As used herein, a computer-readable storage medium should not be interpreted as a transient signal itself, such as radio waves and / or other freely propagating electromagnetic waves, electromagnetic waves propagating through waveguides and / or other transmission media (e.g., light pulses passing through optical cables), and / or electrical signals transmitted through metallic wires.

[0247] The computer-readable program instructions described herein can be downloaded from a computer-readable storage medium to a corresponding computing / processing device and / or via a network (e.g., the Internet, a local area network, a wide area network, and / or a wireless network) to an external computer or external storage device. The network may include copper transmission cables, optical transmission fibers, wireless transmissions, routers, firewalls, switches, gateway computers, and / or edge servers. A network adapter card or network interface in each computing / processing device receives the computer-readable program instructions from the network and forwards them to a computer-readable storage medium within the corresponding computing / processing device. The computer-readable program instructions used to perform the operations of one or more embodiments described herein may be assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, status setting data, integrated circuit configuration data, and / or source code and / or object code written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Smalltalk, C++, etc., and / or procedural programming languages ​​such as the "C" programming language and / or similar programming languages. Computer-readable program instructions may execute entirely on a computer, partially on a computer as a standalone software package, partially on a computer and / or partially on a remote computer, or entirely on a remote computer and / or server. In the latter case, the remote computer may be connected to the computer via any type of network, including a local area network (LAN) and / or a wide area network (WAN), and / or may be connected to an external computer (e.g., via the Internet through an Internet service provider). In one or more embodiments, electronic circuitry including, for example, programmable logic circuitry, field-programmable gate arrays (FPGAs), and / or programmable logic arrays (PLAs) may be personalized by utilizing state information from the computer-readable program instructions to execute aspects of one or more embodiments described herein.

[0248] Aspects of one or more embodiments described herein are described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to one or more embodiments described herein. It should be understood that each block in the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer-readable program instructions. These computer-readable program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, and / or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, can create a manner for implementing the functions / actions specified in the flowchart illustrations and / or block diagrams or blocks. These computer-readable program instructions can also be stored in a computer-readable storage medium that can instruct a computer, programmable data processing apparatus, and / or other apparatus to operate in a particular manner, such that the computer-readable storage medium storing the instructions can include an article of manufacture containing instructions that can implement aspects of the functions / actions specified in the flowchart illustrations and / or block diagrams or blocks. Computer-readable program instructions may also be loaded onto a computer, other programmable data processing apparatus and / or other apparatus to cause a series of operations to be performed on the computer, other programmable data processing apparatus and / or other apparatus to produce a process executed by the computer, thereby implementing the functions / actions specified in the flowchart and / or block diagram or box.

[0249] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and / or operation of possible implementations of a system, computer execution method, and / or computer program product according to one or more embodiments described herein. In this respect, each block in a flowchart or block diagram may represent a module, segment, and / or portion of instructions, including one or more executable instructions for implementing a specified logical function. In one or more alternative embodiments, the functions indicated in the blocks may occur in a non-consecutive order. For example, two blocks shown consecutively may be executed substantially simultaneously, and / or these blocks may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block and / or combination of blocks in the block diagrams and / or flowcharts may be implemented by a system based on dedicated hardware capable of performing the specified functions and / or actions and / or executing one or more combinations of dedicated hardware and / or computer instructions.

[0250] While the subject matter has been described above within the general context of computer-executable instructions for computer program products running on computers and / or multiple computers, those skilled in the art will recognize that one or more embodiments described herein can also be implemented, at least in part, in parallel with one or more other program modules. Generally, program modules include routines, programs, components, and / or data structures that perform specific tasks and / or implement specific abstract data types. Furthermore, the computer execution methods described above can be used in other computer system configurations, including single-processor and / or multi-processor computer systems, microcomputing devices, mainframe computers, and computers, handheld computing devices (e.g., PDAs, telephones), and / or microprocessor-based or programmable consumer and / or industrial electronic devices. The aspects described herein can also be implemented in a distributed computing environment, where certain tasks are performed by remote processing devices linked via a communication network. However, one or more aspects (if not all) of one or more embodiments described herein can be implemented on a standalone computer. In a distributed computing environment, program modules can reside in both local and remote memory storage devices.

[0251] As used herein, the terms “component,” “system,” “platform,” and / or “interface” may refer to and / or include computer-related entities or entities associated with an operational state machine having one or more specific functions. Entities described herein may be hardware, a combination of hardware and software, software, or software in execution. For example, a component may be, but is not limited to, a process running on a processor, a processor, an object, an executable file, an execution thread, a program, and / or a computer. For example, an application running on a server and the server itself can both be components. One or more components may reside in a process and / or an execution thread, and components may be localized on a single computer and / or distributed across two or more computers. In another example, a corresponding component may be executable from various computer-readable media on which various data structures are stored. These components may communicate via local and / or remote processes, such as by signals having one or more data packets (e.g., data from a component that interacts with another component in a local system, a distributed system, and / or across a network such as the Internet via signals). As another example, a component may be a device having specific functions provided by mechanical parts operated by electrical or electronic circuitry, operated by software and / or firmware applications executed by a processor. In this context, the processor can be internal and / or external relative to the device and can execute at least a portion of the software and / or firmware applications. As yet another example, the component can be a device that provides specific functionality through electronic components without mechanical parts, wherein the electronic components may include a processor and / or other means for executing software and / or firmware that at least partially endow the electronic components with functionality. In one aspect, the component can be emulated via a virtual machine (e.g., within a cloud computing system).

[0252] Furthermore, the term "or" is intended to mean inclusive "or," not exclusive "or." That is, unless otherwise stated or clearly indicated from the context, "X adopts A or B" is intended to mean any natural inclusive arrangement. That is, "X adopts A or B" holds true if X adopts A; X adopts B; or X adopts both A and B. Additionally, the article "a" used in this specification and figures should generally be understood as "one or more," unless otherwise specified or obvious from the context that the singular form is involved. As used herein, the terms "example" and / or "exemplary" are used to indicate that something serves as an example, instance, or illustration. For the avoidance of doubt, the subject matter described herein is not limited to such examples. Furthermore, any aspect or design described herein as "example" and / or "exemplary" is not necessarily construed as preferred or superior to other aspects or designs, nor does it imply the exclusion of equivalent exemplary structures and techniques known to those skilled in the art.

[0253] As used in this specification, the term "processor" can refer essentially to any computing processing unit and / or device, including but not limited to a single-core processor; a single processor with software multithreading capabilities; a multi-core processor; a multi-core processor with software multithreading capabilities; a multi-core processor with hardware multithreading technology; a parallel platform; and / or a parallel platform with distributed shared memory. Furthermore, a processor can refer to an integrated circuit, application-specific integrated circuit (ASIC), digital signal processor (DSP), field-programmable gate array (FPGA), programmable logic controller (PLC), complex programmable logic device (CPLD), discrete gate or transistor logic, discrete hardware components, and / or any combination thereof, designed to perform the functions described herein. Further, processors can utilize nanoscale architectures, such as, but not limited to, molecular-based transistors, switches, and / or gates, to optimize space utilization and / or enhance the performance of the associated device. Processors can be implemented as a combination of computing processing units.

[0254] In this document, the terms “storage,” “storage device,” “data repository,” “data storage,” “database,” and virtually any other information storage component related to the operation and function of the component are used to refer to the entity embodied in “storage component” or “memory” or the part constituting the memory. The memory and / or memory components described herein may be volatile or non-volatile memory, or may include both. By way of illustration and not limitation, non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable ROM (EEPR0M), flash memory, and / or non-volatile random access memory (RAM) (e.g., ferroelectric RAM (FeRAM)). Volatile memory may include RAM, for example, which may act as an external cache memory. By way of illustration and not limitation, RAM may take many forms, such as synchronous RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), Synchlink DRAM (SLDRAM), and direct Rambus. RAM (DRRAM), Direct Rambus Dynamic RAM (DRDRAM), and / or Rambus Dynamic RAM (RDRAM). Furthermore, the memory components described herein for systems and / or computer-executed methods are intended to include, but are not limited to, these and / or any other suitable types of memory.

[0255] The above description includes only examples of systems and computer-executed methods. It is certainly impossible to describe every conceivable combination of components and / or computer-executed methods for the purpose of describing one or more embodiments, but those skilled in the art will recognize that many other combinations and / or arrangements of one or more embodiments are possible. Furthermore, the terms “comprising,” “having,” and “possessing” are used to such an extent in the detailed description, claims, appendices, and / or drawings that such terms are intended to be inclusive in a manner similar to the term “comprising,” as interpreted when “comprising” is used as a transitional word in the claims.

[0256] Descriptions of various implementation schemes may use the phrases “one implementation scheme,” “multiple implementation schemes,” “one or more implementation schemes,” and / or “some implementation schemes,” where each may refer to one or more identical or different implementation schemes.

[0257] Descriptions of various embodiments have been presented for illustrative purposes and are not intended to be exhaustive or limited to the embodiments described herein. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical applications, and / or technical improvements to existing technologies in the market, and / or to enable others skilled in the art to understand the embodiments described herein.

Claims

1. A system comprising: A retainer for receiving the sample support box; The first part of the kinematic coupling mechanism receives the second part of the kinematic coupling mechanism; and The second part of the kinematic coupling mechanism is located at the retainer. At least the first part or the second part of the kinematic coupling mechanism is configured to move in conjunction with the sample support box when coupled with the retainer.

2. The system according to claim 1, After the first part of the kinematic coupling mechanism engages with the second part of the kinematic coupling mechanism, the adjustability of the first part of the kinematic coupling mechanism relative to the second part of the kinematic coupling mechanism is maintained based on the flexibility and compliance of the retaining member.

3. The system according to claim 1, The interface between the retainer and the retainer support is configured as a first part of a kinematic coupling mechanism, which, when engaged with a second part of the kinematic coupling mechanism, provides adjustability of the retainer relative to the retainer support.

4. The system according to claim 3, The retainer bracket and the base unit for receiving the retainer can each be coupled.

5. The system according to claim 1, When the first part of the retainer is configured as a kinematic coupling mechanism and the second part of the kinematic coupling mechanism are engaged, it is possible to make the retainer tilt or rotate at least one of the elastic seal against the base unit.

6. The system according to claim 1, further comprising: An elastic element held at the retainer or at the base unit receiving the retainer. After the retainer bracket is fixedly coupled to the base unit, the elastic element maintains a vacuum seal between the retainer and the base unit.

7. The system according to claim 1, further comprising: The first part of the kinematic coupling mechanism is coupled to the second part of the kinematic coupling mechanism to maintain the adjustability of the alignment between the sample support box and the base unit of the receiving and holding member.

8. The system according to claim 1, further comprising: The magnetic component assembly provided at the sample support box and holder. The magnetic element group allows the sample support box to move relative to the holder with a pair of degrees of freedom.

9. The system according to claim 1, The retainer and retainer bracket, when combined, provide at least four degrees of freedom for the sample support box relative to the coordinate system of the robotic arm assembly, which is disposed inside the base unit that receives the retainer.

10. The system according to claim 9, The first interface between the retainer bracket and the retainer allows at least three of the four degrees of freedom, and The second interface between the retainer and the sample support box allows at least two of the four degrees of freedom.

11. A system comprising: Vacuum chamber shell; Vacuum chamber door; and A kinematic coupling mechanism for adjusting the alignment of the sample support box relative to the vacuum chamber housing at the vacuum chamber door.

12. The system according to claim 11, The kinematic coupling mechanism is used to align the vacuum chamber door with respect to the vacuum chamber housing and the elastic seal that acts as a seal between the vacuum chamber door and the vacuum chamber housing.

13. The system according to claim 11, The kinematic coupling mechanism is used to align the sample support box relative to the vacuum chamber door.

14. The system according to claim 11, The kinematic coupling mechanism provides at least one pair of degrees of freedom for the sample support box relative to the vacuum chamber shell, and in, In addition to at least one pair of degrees of freedom, the retainer coupled between the sample support box and the vacuum chamber door provides the sample support box with three additional degrees of freedom relative to the vacuum chamber door.

15. A method comprising: This allows the sample support box to be kinematically coupled to the retainer; and A kinematic coupling mechanism with a shape is used to kinematically align the retainer against the base unit, the shape of which allows for adjustability of the retainer relative to the base unit when the kinematic coupling mechanism is engaged.

16. The method of claim 15, further comprising: The flexibility and compliance of the retainer bracket or retainer cause adjustability of the retainer relative to the base unit.

17. The method of claim 15, further comprising: After the retainer is kinematically coupled to the base unit, the adjustability of the retainer relative to the base unit is maintained based on the flexible compliance of the retainer.

18. The method of claim 15, further comprising: Before and after the sample support box is kinematically coupled to the retainer, the adjustability of the retainer relative to the base unit is maintained based on the flexible compliance of the retainer bracket coupled between the retainer and the base unit.

19. The method of claim 15, further comprising: This causes the sample support box to be adjusted with at least two different degrees of freedom relative to the robotic arm assembly disposed within the base unit, wherein the two different degrees of freedom are achieved by means of a kinematic coupling mechanism or by means of a second kinematic coupling mechanism.

20. The method of claim 15, further comprising: Based on the kinematic coupling mechanism, the elastic element that abuts against the retainer and the base unit is adjusted.

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