Fully decoupled MEMS gyroscope

Abstract

The application provides a full decoupling MEMS gyroscope, and belongs to the technical field of MEMS gyroscopes.The full decoupling MEMS gyroscope comprises a substrate, a mass unit, a detection unit and a driving unit arranged on the substrate.The mass unit comprises two groups of mass components distributed along the X direction, and each mass component comprises two mass mechanisms distributed along the Y direction.The detection unit comprises two groups of detection components, and each detection component is arranged in one-to-one correspondence with a mass component.The detection component comprises a detection mechanism and a suppression mechanism, and the suppression mechanism comprises two groups of fixing structures distributed on both sides of the detection mechanism along the X direction.The driving unit is used for receiving an external input electrical signal, and the driving unit drives the two groups of mass components to move reversely along the X direction under the action of electrostatic force.The full decoupling MEMS gyroscope aims to suppress the orthogonal coupling detection error caused by the coupling of driving motion to the detection structure, and can suppress the common-mode interference signal generated by external vibration and impact, thereby improving the detection precision.

Description

Technical Field

[0001] This invention belongs to the field of MEMS gyroscope technology, and more specifically, relates to a fully decoupled MEMS gyroscope. Background Technology

[0002] MEMS (Micro Electro Mechanical System (MS) gyroscopes have been widely used in consumer electronics, industrial control, drones and other fields due to their advantages of small size, low power consumption, controllable cost and easy integration. Their core is based on the Coriolis effect to realize angular velocity detection.

[0003] A single-axis MEMS gyroscope typically includes a drive mass mechanism, a sensing mass mechanism, a flexible support elastic element, and anchor points. The drive mass mechanism is driven by electrostatics to resonate along the drive direction. When the carrier rotates around the sensitive axis, the sensing mass mechanism generates a displacement perpendicular to the drive direction under the action of the Coriolis force. This displacement is then converted into an electrical signal by capacitance detection, and the angular velocity measurement result is output after demodulation and filtering.

[0004] However, when there is coupling between the drive mechanism and the detection mechanism, the drive motion is directly coupled to the detection mechanism, causing the detection mechanism to generate an output signal even without external angular velocity input, resulting in detection errors. Furthermore, when encountering external vibrations or impacts, the detection mechanism will be directly driven to displace along the detection axis, and external acceleration interference will be misinterpreted as angular velocity signals, thus creating detection errors. Summary of the Invention

[0005] The purpose of this invention is to provide a fully decoupled MEMS gyroscope, which aims to suppress orthogonal coupling detection errors caused by the coupling of driving motion to the detection structure, and to suppress common-mode interference signals generated by external vibration and impact, thereby improving detection accuracy.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] In a first aspect, a fully decoupled MEMS gyroscope is provided, including a substrate, and further comprising:

[0008] A mass unit is disposed on the substrate. The mass unit includes two sets of mass components spaced apart along the X direction. Each mass component includes two mass mechanisms spaced apart along the Y direction. A detection space is formed between the two mass mechanisms.

[0009] A detection unit is disposed on the substrate. The detection unit includes two sets of detection components. The detection components are arranged one-to-one with the mass components and are disposed within the detection space. Each detection component includes a detection mechanism and a suppression mechanism. The suppression mechanism includes two sets of fixing structures. The two sets of fixing structures are distributed on both sides of the detection mechanism along the X direction to suppress the movement of the detection mechanism along the X direction.

[0010] A driving unit is disposed on the substrate. The driving unit is used to receive externally input electrical signals. Under the action of electrostatic force, the driving unit drives the two sets of mass components to move in opposite directions along the X direction.

[0011] In one possible implementation, the suppression mechanism further includes two sets of first decoupling structures, which are distributed along the Y direction on both sides of the detection mechanism and connected to the mass component and the detection component. The stiffness of the first decoupling structure in the X direction is greater than that in the Y direction.

[0012] When the driving unit drives the mass component to move along the X direction, the first decoupling structure and the fixed structure inhibit the movement of the detection component along the X direction; when an angular velocity is input in the Z direction, the mass component moves along the Y direction, driving the detection mechanism to move along the Y direction, thereby realizing the detection of angular velocity.

[0013] In one possible implementation, the fixing structure includes two sets of suppression frames spaced apart along the X direction, and a fixing anchor point disposed between the two sets of suppression frames. The fixing anchor point is connected to the substrate and is used to fix the suppression frames.

[0014] In one possible implementation, the detection unit further includes an orthogonal coupling compensation component, which includes two sets of orthogonal coupling compensation mechanisms distributed along the Y direction on both sides of the detection component, and the orthogonal coupling compensation mechanisms are connected to the mass mechanism. The orthogonal coupling compensation mechanisms are used to reduce orthogonal coupling errors.

[0015] In one possible implementation, the orthogonal coupling compensation mechanism includes a plurality of orthogonal coupling compensation structures spaced apart along the X direction, the orthogonal coupling compensation structures being connected to the mass mechanism.

[0016] In one possible implementation, the drive unit includes two sets of drive components located on both sides of the mass unit along the X direction, and also includes a drive coupling component disposed between the two sets of mass components, wherein the mass components are elastically connected to the drive coupling component.

[0017] In one possible implementation, the drive coupling assembly includes two sets of drive coupling mechanisms and coupling anchor points that fix the two sets of drive coupling mechanisms. The coupling anchor points are connected to the substrate. The two sets of drive coupling mechanisms are symmetrically distributed along the Y direction and elastically connected to the mass component.

[0018] In one possible implementation, the drive assembly includes two sets of drive mechanisms spaced apart along the Y direction, and a drive detection mechanism disposed between the two sets of drive mechanisms. The drive detection mechanism is located on one side of the detection assembly along the X direction, and the drive mechanisms are configured in a one-to-one correspondence with the mass mechanism.

[0019] In one possible implementation, the drive detection mechanism includes two sets of support structures spaced apart along the X direction, and a drive detection structure disposed between the two sets of support structures.

[0020] In one possible implementation, the quality mechanism includes:

[0021] Mass block;

[0022] Two sets of support beams are distributed along the X direction on both sides of the mass block and are elastically connected to the mass block;

[0023] Two sets of second decoupling structures are distributed along the Y direction on both sides of the mass block and connected to the substrate.

[0024] The beneficial effects of the fully decoupled MEMS gyroscope provided by this invention are as follows: Compared with the prior art, in the driving mode, after the driving unit applies the driving force, it drives the two sets of mass components to move in opposite directions along the X direction. At the same time, the suppression mechanism on the periphery of the detection component can effectively limit the movement of the detection mechanism along the X direction, so that the driving movement of the mass component along the X direction will not drive the synchronous movement of the detection component, blocking the coupling path of the driving movement to the detection component, and solving the problem of driving displacement interfering with the detection signal in the traditional structure. In the detection mode, when the carrier rotates around the Z-axis sensing axis to generate angular velocity input, the two sets of mass components move along the Y-axis under the action of Coriolis force. Since the driving directions of the two sets of mass components are opposite, their movement directions along the Y-axis are also oppositely distributed. The suppression mechanism does not limit the Y-axis movement of the detection mechanism; the Y-axis movement of the mass components can be accurately transmitted to the detection mechanism, causing the detection mechanism to move synchronously along the Y-axis, thereby inducing a change in the detection capacitor gap. This achieves accurate detection of the Z-axis angular velocity. Simultaneously, the opposite movement of the two sets of mass components can cancel out non-sensitive axis linear acceleration interference caused by external vibration and impact, preventing acceleration signals from being misinterpreted as angular velocity signals. This application achieves complete decoupling of driving and detection, ensuring both the sensitivity and accuracy of angular velocity detection while significantly improving anti-interference performance, maintaining stable measurement accuracy even in complex vibration environments. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a fully decoupled MEMS gyroscope provided in an embodiment of the present invention;

[0027] Figure 2 This is a partial enlarged view of the mass mechanism used in an embodiment of the present invention;

[0028] Figure 3 This is a view of a fully decoupled MEMS gyroscope in driving mode provided by an embodiment of the present invention;

[0029] Figure 4 This is a view of a fully decoupled MEMS gyroscope in detection mode, provided in an embodiment of the present invention.

[0030] In the diagram: 1. Mass component; 101. Mass mechanism; 1011. Mass block; 1012. Support beam; 1013. Second decoupling structure; 2. Detection component; 201. Detection mechanism; 202. Suppression mechanism; 2021. First decoupling structure; 2022. Fixing structure; 2022-1. Suppression frame; 2022-2. Fixed anchor point; 203. Orthogonal coupling compensation structure; 3. Drive unit; 301. Drive component; 3011. Drive mechanism; 3012. Drive detection mechanism; 3012-1. Supporting structure; 3012-2. Drive detection structure; 302. Drive coupling component. Detailed Implementation

[0031] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0032] In the claims, description, and accompanying drawings of this invention, unless otherwise expressly defined, the terms "first," "second," or "third," etc., are used to distinguish different objects and not to describe a specific order. Unless otherwise stated, other directional terms, such as "vertical," "clockwise," and "counterclockwise," indicate orientation or positional relationships based on the orientation and positional relationships shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, not to indicate or imply that the referred device or element must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the specific scope of protection of this invention. In the claims, description, and accompanying drawings of this invention, unless otherwise expressly defined, the terms "fixed connection" or "fixed link" should be interpreted broadly, that is, any connection method in which there is no displacement relationship or relative rotation relationship between the two, that is, including non-removable fixed connections, detachable fixed connections, integral connections, and fixed connections through other devices or elements. In the claims, description, and accompanying drawings of this invention, the terms "comprising," "having," and their variations are intended to mean "including but not limited to."

[0033] Please refer to the following: Figures 1 to 4 The fully decoupled MEMS gyroscope provided by this invention will now be described. The fully decoupled MEMS gyroscope includes a substrate, and a mass unit, a detection unit, and a driving unit 3 disposed on the substrate. The mass unit includes two sets of mass components 1 spaced apart along the X-direction. Each mass component 1 includes two mass mechanisms 101 spaced apart along the Y-direction, forming a detection space between the two mass mechanisms 101. The detection unit includes two sets of detection components 2, each corresponding to a mass component 1, and the detection components 2 are disposed within the detection space. Each detection component 2 includes a detection mechanism 201 and a suppression mechanism 202. The suppression mechanism 202 includes two sets of fixing structures 2022, distributed along the X-direction on both sides of the detection mechanism 201, used to suppress the movement of the detection mechanism 201 along the X-direction. The driving unit 3 receives externally input electrical signals, and under the action of electrostatic force, the driving unit 3 drives the two sets of mass components 1 to move in opposite directions along the X-direction.

[0034] The fully decoupled MEMS gyroscope provided by this invention, compared with the prior art, in the driving mode, after the driving unit 3 applies driving force, it drives the two sets of mass components 1 to move in opposite directions along the X direction. At the same time, the fixed structure 2022 located on both sides of the detection component 2 along the X direction can form a rigid limit on the detection mechanism 201, directly suppressing the movement of the detection mechanism 201 along the X direction. This ensures that the driving movement of the mass component 1 along the X direction will not drive the detection component 2 to move synchronously. It blocks the coupling path of the driving movement to the detection component 2 at the structural level, and solves the problem of driving displacement interfering with the detection signal in the traditional structure. In the detection mode, when the carrier rotates around the Z-axis sensing axis to generate angular velocity input, the two sets of mass components 1 will move along the Y-axis under the action of Coriolis force. Since the driving motion directions of the two sets of mass components 1 are opposite, their motion directions along the Y-axis are also oppositely distributed. The fixed structure 2022 only constrains the X-axis motion and does not restrict the displacement degree of freedom of the detection mechanism 201 in the Y-axis. The Y-axis motion of the mass components 1 can be accurately transmitted to the detection mechanism 201, driving the detection mechanism 201 to move synchronously along the Y-axis, thereby causing a change in the detection capacitor gap, thus achieving accurate detection of the Z-axis angular velocity. At the same time, the characteristic of the two sets of mass components 1 moving in opposite directions can cancel the non-sensitive axis linear acceleration interference caused by external vibration and impact, and avoid the acceleration signal being misinterpreted as an angular velocity signal. This application achieves full decoupling of driving and detection through the directional limiting effect of the fixed structure 2022 and the reverse motion design of the mass components 1. This ensures both the sensitivity and accuracy of angular velocity detection and significantly improves anti-interference performance, maintaining stable measurement accuracy even in complex vibration environments.

[0035] It should be noted that the substrate refers to the substrate beneath the entire gyroscope structure, i.e., located... Figure 1 Below the graphic shown.

[0036] In some embodiments, please refer to Figure 1 , Figure 3 and Figure 4 The suppression mechanism 202 also includes two sets of first decoupling structures 2021. The two sets of first decoupling structures 2021 are distributed along the Y direction on both sides of the detection mechanism 201 and connected to the mass component 1 and the detection component 2. The stiffness of the first decoupling structure 2021 in the X direction is greater than that in the Y direction. When the driving unit 3 drives the mass component 1 to move along the X direction, the first decoupling structure 2021 and the fixed structure 2022 suppress the movement of the detection component 2 along the X direction. When the angular velocity in the Z direction is input, the mass component 1 moves along the Y direction, which drives the detection mechanism 201 to move along the Y direction, thereby realizing the detection of angular velocity.

[0037] In the driving mode, the driving unit 3 drives the two sets of mass components 1 to move in opposite directions along the X direction. The fixed structure 2022 distributed on both sides of the detection mechanism 201 along the X direction can directly limit the first decoupling structure 2021 in the X direction, thereby limiting the detection mechanism 201 in the X direction. At the same time, the first decoupling structure 2021 distributed on both sides of the detection mechanism 201 along the Y direction has high stiffness in the X direction. Under the combined action of the first decoupling structure 2021 and the fixed structure 2022, the driving motion of the mass component 1 along the X direction will not be transmitted to the detection mechanism 201 at all, completely blocking the coupling path of the driving motion to the detection mechanism 201, and realizing the decoupling from driving to detection. In the detection mode, when the carrier rotates around the Z-axis sensing axis to generate angular velocity input, the two sets of mass components 1 will move along the Y-axis under the action of Coriolis force. The first decoupling structure 2021 has extremely low stiffness in the Y-axis direction, which can ensure that the Y-axis movement of the mass component 1 is smoothly transmitted to the detection mechanism 201, driving the detection mechanism 201 to move synchronously and causing the detection capacitor gap to change, thereby accurately realizing angular velocity detection.

[0038] Optionally, the first decoupling structure 2021 has a larger dimension in the X direction than in the Y direction, thereby achieving a greater stiffness in the X direction than in the Y direction.

[0039] In some embodiments, please refer to Figure 1 The fixing structure 2022 includes two sets of suppression frames 2022-1 distributed at intervals along the X direction, and a fixing anchor point 2022-2 disposed between the two sets of suppression frames 2022-1. The fixing anchor point 2022-2 is connected to the substrate and is used to fix the suppression frame 2022-1.

[0040] The fixed anchor point 2022-2 is directly connected to the substrate, providing stable support for the suppression frame 2022-1. The two sets of suppression frames 2022-1 can form a precise rigid limit in the X direction for the detection mechanism 201. When the drive unit 3 drives the mass component 1 to move in the opposite direction in the X direction, the suppression frame 2022-1 can effectively block the X-direction movement of the mass component 1 from being transmitted to the detection mechanism 201, thus blocking the coupling path of the drive movement to the detection mechanism 201. At the same time, this structure only constrains the X-direction movement and does not affect the degree of freedom of the detection mechanism 201 in the Y direction. This ensures that when the Z-direction angular velocity is input and the mass component 1 moves in the Y direction, the detection mechanism 201 can be smoothly driven and complete the capacitance detection. While improving the anti-interference performance, it also ensures the sensitivity and accuracy of the angular velocity detection.

[0041] In some embodiments, please refer to Figure 1 , Figures 3 to 4The detection unit also includes an orthogonal coupling compensation component, which includes two sets of orthogonal coupling compensation mechanisms. The two sets of orthogonal coupling compensation mechanisms are distributed along the Y direction on both sides of the detection component 2, and the orthogonal coupling compensation mechanisms are connected to the mass mechanism 101. The orthogonal coupling compensation mechanisms are used to reduce orthogonal coupling errors.

[0042] By applying a correction voltage to the orthogonal coupling compensation mechanism, the orthogonal coupling stiffness between the driving mode and the detection mode can be accurately offset by the electrostatic negative stiffness effect. This weakens the interference of non-sensitive axis signals caused by factors such as microstructure process asymmetry and coupling between the driving mode and the detection mode, and avoids false displacement caused by orthogonal coupling being misjudged as effective angular velocity signals.

[0043] Specifically, the orthogonal coupling compensation mechanism includes fixed comb teeth and movable comb teeth, with the movable comb teeth connected to the mass mechanism 101.

[0044] In some embodiments, please refer to Figure 1 The orthogonal coupling compensation mechanism includes multiple orthogonal coupling compensation structures 203 spaced apart along the X direction, and the orthogonal coupling compensation structures 203 are connected to the mass mechanism 101.

[0045] Multiple orthogonally coupled compensation structures 203, spaced apart along the X-axis, are stably connected to the mass mechanism 101. This multi-point layout can cover the entire motion range of the mass mechanism 101, offsetting the orthogonal coupling stiffness at different positions caused by asymmetry in microfabrication processes and shifts in driving modes. When applying a correction voltage to utilize the electrostatic negative stiffness effect, the multi-point distributed compensation structures can act synchronously on different parts of the mass mechanism 101, uniformly reducing the parasitic displacement of the mass mechanism 101 towards the detection axis during driving motion, and avoiding the accumulation of local coupling errors that affect the overall detection accuracy. At the same time, the orthogonal coupling compensation structures 203 are only connected to the mass mechanism 101 and do not additionally restrict the motion degrees of freedom of the detection component 2. This ensures the sensitivity of angular velocity detection and works synergistically with the decoupling functions of the fixed structure 2022 and the first decoupling structure 2021, further optimizing the anti-interference performance and measurement accuracy of the gyroscope.

[0046] In some embodiments, please refer to Figure 1 The drive unit 3 includes two sets of drive components 301, which are located on both sides of the mass unit along the X direction. It also includes a drive coupling component 302 disposed between the two sets of mass components 1, and the mass components 1 are elastically connected to the drive coupling component 302 respectively.

[0047] The two sets of drive components 301 distributed on both sides of the mass unit along the X direction can provide balanced and opposite driving forces to the two sets of mass components 1, ensuring that the reverse movement of the mass components 1 along the X direction is more synchronized and more stable, and effectively reducing parasitic vibration interference caused by the imbalance of driving force.

[0048] In some embodiments, please refer to Figure 1 The drive coupling component 302 includes two sets of drive coupling mechanisms and coupling anchor points that fix the two sets of drive coupling mechanisms. The coupling anchor points are connected to the substrate. The two sets of drive coupling mechanisms are symmetrically distributed along the Y direction and elastically connected to the mass component 1.

[0049] The coupling anchor points are connected to the substrate, providing a stable support foundation for the two sets of drive coupling mechanisms. The drive coupling mechanisms, symmetrically distributed along the Y-axis, are elastically connected to the mass components 1, ensuring that the reverse drive movements of the two sets of mass components 1 along the X-axis are more balanced and synchronized, effectively reducing parasitic torsion and vibration interference caused by uneven distribution of driving force. At the same time, the structural characteristics of the elastic connection can provide a flexible buffer for the X-axis drive movement of the mass components 1.

[0050] In some embodiments, please refer to Figure 1 The drive assembly 301 includes two sets of drive mechanisms 3011 spaced apart along the Y direction, and a drive detection mechanism 3012 disposed between the two sets of drive mechanisms 3011. The drive detection mechanism 3012 is located on one side of the detection assembly 2 along the X direction. The drive mechanism 3011 and the mass mechanism 101 are arranged in a one-to-one correspondence.

[0051] Two sets of drive mechanisms 3011, spaced apart along the Y-axis, are corresponding one-to-one with the mass mechanisms 101. This provides each mass mechanism 101 with an independent and matched driving force, ensuring more balanced and synchronized reverse driving motion of the two mass components 1 along the X-axis. This effectively reduces parasitic vibrations and torsional interference caused by uneven driving force distribution, lowering the risk of coupling errors. The drive detection mechanism 3012, located between the two sets of drive mechanisms 3011 and on one side of the detection component 2 along the X-axis, can monitor the motion amplitude and frequency parameters of the drive mode in real time, promptly reporting any deviations during the drive process. This facilitates dynamic calibration of the drive signal, preventing drive mode instability from affecting detection accuracy.

[0052] It should be noted that the drive mechanism 3011 includes drive comb teeth and fixed comb teeth, with the fixed comb teeth (stator) fixed to the base of the gyroscope. The drive comb teeth (mover) are connected to the mass block and are movable, with the two in an interlocking meshing state (without physical contact). After an alternating voltage is applied, an electrostatic force (Coulomb force) is generated between the comb teeth, and the drive comb teeth drive the mass block to perform simple harmonic motion along the drive direction.

[0053] In some embodiments, please refer to Figure 1 The drive detection mechanism 3012 includes two sets of support structures 3012-1 distributed at intervals along the X direction, and a drive detection structure 3012-2 disposed between the two sets of support structures 3012-1.

[0054] The two sets of support structures 3012-1, which are spaced apart along the X direction, provide a stable installation foundation for the drive detection structure 3012-2. At the same time, the drive detection structure 3012-2 in this layout can more accurately capture the motion state of the drive mechanism 3011 and provide real-time feedback on the deviation of key parameters such as drive amplitude and frequency. This facilitates timely dynamic calibration of the drive signal and prevents coupling interference caused by drive mode instability.

[0055] It should be noted that the drive detection structure 3012-2 includes movable comb teeth and detection comb teeth. The support structure 3012-1 is an elastic member, and when the drive mechanism 3011 moves along the X direction (e.g. Figure 3 As shown in the figure, the support structure 3012-1 undergoes elastic deformation.

[0056] In some embodiments, please refer to Figures 1 to 2 The mass mechanism 101 includes a mass block 1011, two sets of support beams 1012 and two sets of second decoupling structures 1013. The two sets of support beams 1012 are distributed along the X direction on both sides of the mass block 1011 and are elastically connected to the mass block 1011. The two sets of second decoupling structures 1013 are distributed along the Y direction on both sides of the mass block 1011 and are connected to the substrate.

[0057] Two sets of support beams 1012, distributed along the X-direction on both sides of the mass block 1011 and elastically connected to the mass block 1011, can generate elastic deformation along the X-direction under the driving mode, providing flexible support and guidance for the X-direction driving motion of the mass block 1011, ensuring that the reverse driving motion of the mass block 1011 is more synchronous and smooth, and effectively reducing parasitic vibration interference caused by sudden changes in driving force.

[0058] Two sets of second decoupling structures 1013 are distributed on both sides of the mass block 1011 along the Y direction. The second decoupling structure 1013 has low stiffness in the Y direction. When there is an external angular velocity input, and the mass block 1011 drives the detection mechanism 201 to move along the Y direction, the second decoupling structure 1013 can play a buffering role, so as not to cause the drive structure 3011 to move along the Y direction. This achieves decoupling of detection and drive, thereby ensuring the stability of drive.

[0059] Optionally, the support beam 1012 is fixed to the base plate by support anchor points.

[0060] Specifically, the support beam 1012 is an elastic member.

[0061] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A fully decoupled MEMS gyroscope, characterized in that, Including the substrate, it also includes: A mass unit is disposed on the substrate. The mass unit includes two sets of mass components spaced apart along the X direction. Each mass component includes two mass mechanisms spaced apart along the Y direction. A detection space is formed between the two mass mechanisms. A detection unit is disposed on the substrate. The detection unit includes two sets of detection components. The detection components are arranged one-to-one with the mass components and are disposed within the detection space. Each detection component includes a detection mechanism and a suppression mechanism. The suppression mechanism includes two sets of fixing structures. The two sets of fixing structures are distributed on both sides of the detection mechanism along the X direction to suppress the movement of the detection mechanism along the X direction. A driving unit is disposed on the substrate. The driving unit is used to receive externally input electrical signals. Under the action of electrostatic force, the driving unit drives the two sets of mass components to move in opposite directions along the X direction. The suppression mechanism further includes two sets of first decoupling structures, which are distributed along the Y direction on both sides of the detection mechanism and connected to the mass component and the detection component. The stiffness of the first decoupling structure in the X direction is greater than that in the Y direction. When the driving unit drives the mass component to move along the X direction, the first decoupling structure and the fixed structure inhibit the movement of the detection component along the X direction; when an angular velocity is input in the Z direction, the mass component moves along the Y direction, driving the detection mechanism to move along the Y direction, thereby realizing the detection of angular velocity.

2. The fully decoupled MEMS gyroscope as described in claim 1, characterized in that, The fixing structure includes two sets of suppression frames spaced apart along the X direction, and a fixing anchor point disposed between the two sets of suppression frames. The fixing anchor point is connected to the substrate and is used to fix the suppression frame.

3. The fully decoupled MEMS gyroscope as described in claim 1, characterized in that, The detection unit further includes an orthogonal coupling compensation component, which includes two sets of orthogonal coupling compensation mechanisms. The two sets of orthogonal coupling compensation mechanisms are distributed along the Y direction on both sides of the detection component, and the orthogonal coupling compensation mechanisms are connected to the mass mechanism. The orthogonal coupling compensation mechanisms are used to reduce orthogonal coupling errors.

4. The fully decoupled MEMS gyroscope as described in claim 3, characterized in that, The orthogonal coupling compensation mechanism includes multiple orthogonal coupling compensation structures spaced apart along the X direction, and the orthogonal coupling compensation structures are connected to the mass mechanism.

5. The fully decoupled MEMS gyroscope as described in claim 1, characterized in that, The drive unit includes two sets of drive components, which are located on both sides of the mass unit along the X direction. It also includes a drive coupling component disposed between the two sets of mass components, and the mass components are elastically connected to the drive coupling component.

6. The fully decoupled MEMS gyroscope as described in claim 5, characterized in that, The drive coupling assembly includes two sets of drive coupling mechanisms and coupling anchor points that fix the two sets of drive coupling mechanisms. The coupling anchor points are connected to the substrate. The two sets of drive coupling mechanisms are symmetrically distributed along the Y direction and elastically connected to the mass component.

7. The fully decoupled MEMS gyroscope as described in claim 5, characterized in that, The drive assembly includes two sets of drive mechanisms spaced apart along the Y direction, and a drive detection mechanism disposed between the two sets of drive mechanisms. The drive detection mechanism is located on one side of the detection assembly along the X direction, and the drive mechanism and the mass mechanism are arranged in a one-to-one correspondence.

8. The fully decoupled MEMS gyroscope as described in claim 7, characterized in that, The drive detection mechanism includes two sets of support structures spaced apart along the X direction, and a drive detection structure disposed between the two sets of support structures.

9. The fully decoupled MEMS gyroscope as described in claim 1, characterized in that, The quality mechanism includes: Mass block; Two sets of support beams are distributed along the X direction on both sides of the mass block and are elastically connected to the mass block; Two sets of second decoupling structures are distributed along the Y direction on both sides of the mass block and connected to the substrate.

Images