Large stroke two-dimensional piezoelectric nanopositioning stage
By connecting the X-axis and Z-axis piezoelectric drive mechanisms and amplification structure in series, combined with flexible hinge arms and strain sensors, the problems of complex structure, large size and small stroke of existing piezoelectric positioning stages are solved, achieving a nanometer-level positioning effect with large stroke, accurate repeatability and lightweight design.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HARBIN CORE TOMORROW SCI & TECH
- Filing Date
- 2025-06-20
- Publication Date
- 2026-06-23
AI Technical Summary
Existing multi-degree-of-freedom piezoelectric positioning stages are complex in structure, large in size, have small stroke and load, and low repeatability.
It adopts a series structure of X-axis and Z-axis piezoelectric drive mechanisms, combined with an amplified body and a flexible hinge arm, to achieve two-dimensional ultra-precision motion, and uses strain sensors for real-time feedback control to eliminate hysteresis and creep characteristics.
It achieves nanoscale positioning effects with large stroke, high repeatability, compact structure, low motion coupling, and easy integration, and features a lightweight design.
Smart Images
Figure CN224401411U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of precision positioning stage technology, specifically, it relates to a large-stroke two-dimensional piezoelectric nanopositioning stage. Background Technology
[0002] A piezoelectric positioning stage is a mechanical structure that uses piezoelectric actuation technology to achieve precise positioning. Utilizing the inverse piezoelectric effect of piezoelectric ceramics, it generates minute displacements when energized, thus achieving precise positioning. As scientific exploration delves deeper into the microscopic world, piezoelectric nanopositioning stages are increasingly being applied in scientific and precision manufacturing fields. Examples include ensuring nanoscale stable focusing of laser beams in laser processing, achieving precise wafer alignment in semiconductor inspection, and performing super-resolution microscopic imaging in biomedicine.
[0003] Currently, piezoelectric positioning stages can be classified into single-degree-of-freedom and multi-degree-of-freedom types according to their degrees of freedom, and into direct-drive and amplified types according to the presence or absence of a displacement amplification mechanism. Since the electrostrictive deformation of piezoelectric ceramics is typically one-thousandth of the ceramic thickness, direct-drive piezoelectric positioning stages are often limited by the micron-level output displacement of the piezoelectric actuator, preventing them from achieving large stroke output. However, direct-drive piezoelectric positioning stages usually have very high resonant frequencies and are widely used in high-frequency scanning positioning. Amplified piezoelectric positioning stages amplify the displacement of the piezoelectric actuator, thereby achieving larger stroke displacement output. However, existing multi-degree-of-freedom positioning stages still suffer from problems such as insufficient stroke and load capacity, large size and weight, high motion coupling, and low positioning accuracy.
[0004] Based on the above, the current problem to be solved is to provide a large-stroke two-dimensional piezoelectric nanopositioning stage with high repeatability, large load capacity, and compact structure. Utility Model Content
[0005] The purpose of this invention is to provide a large-stroke two-dimensional piezoelectric nanopositioning stage, which aims to solve the problems of complex structure, large size, small stroke and load, and low repeatability of existing two-dimensional piezoelectric positioning stages.
[0006] This invention is implemented as follows: a large-stroke two-dimensional piezoelectric nanopositioning stage includes an upper cover, a bottom cover, and a shell. A piezoelectric driving unit is provided between the upper cover and the bottom cover and inside the shell. The piezoelectric driving unit includes an X-axis piezoelectric driving mechanism, a Z-axis piezoelectric driving mechanism, and a transition plate.
[0007] The fixed end of the Z-axis piezoelectric drive mechanism is connected to the bottom cover, and the moving end of the Z-axis piezoelectric drive mechanism is connected to one end of the adapter plate; the other end of the adapter plate is connected to the fixed end of the X-axis piezoelectric drive mechanism, and the moving end of the X-axis piezoelectric drive mechanism is connected to the top cover.
[0008] Furthermore, the piezoelectric drive unit is configured as two units, and the two piezoelectric drive units synchronously drive the upper cover to move linearly along the X-axis or Z-axis.
[0009] Furthermore, the upper cover is configured as a rectangle, and the moving ends of the two X-axis piezoelectric drive mechanisms are arranged in the diagonal direction of the rectangle.
[0010] Furthermore, the X-axis piezoelectric drive mechanism includes an amplifying body and a piezoelectric ceramic disposed within the amplifying body; the amplifying body is provided with four flexible hinge arms, which are symmetrically arranged in pairs, and the piezoelectric ceramic is arranged at a certain angle to the axis of symmetry of the four flexible hinge arms.
[0011] Furthermore, the Z-axis piezoelectric drive mechanism includes an amplifying body and a piezoelectric ceramic disposed within the amplifying body; the amplifying body is provided with four flexible hinge arms, which are symmetrically arranged in pairs, and the piezoelectric ceramic is arranged at a certain angle to the axis of symmetry of the four flexible hinge arms.
[0012] Furthermore, the adapter plate includes connecting portions at both ends and a spacer protrusion in the middle, the spacer protrusion abutting between the X-axis piezoelectric drive mechanism and the Z-axis piezoelectric drive mechanism.
[0013] Furthermore, the upper cover has a first protrusion on the side near the piezoelectric drive unit for connecting with the X-axis piezoelectric drive mechanism, and the bottom cover has a second protrusion on the side near the piezoelectric drive unit for connecting with the Z-axis piezoelectric drive mechanism.
[0014] Furthermore, the upper cover has a third protrusion on the side near the piezoelectric drive unit for connection with an external mechanism.
[0015] Furthermore, a strain sensor is provided on the side of the flexible hinge arm.
[0016] The beneficial effects of the large-stroke two-dimensional piezoelectric nanopositioning stage provided by this utility model are as follows:
[0017] This invention uses piezoelectric ceramics as the driving source and achieves two-dimensional ultra-precision motion along the X and Z axes by connecting the X-axis piezoelectric drive mechanism, the adapter plate, and the Z-axis piezoelectric drive mechanism in series. The series structure of this invention results in low motion coupling, stable operation, high positioning accuracy, and resolution and stability at the nanometer level. Furthermore, the overall structure is compact, small in size, and easy to integrate.
[0018] The Z-axis and X-axis piezoelectric drive mechanisms employ an amplification structure to amplify the displacement output, giving this invention a large stroke capability. This invention achieves a large load capacity by connecting several piezoelectric drive units in parallel.
[0019] The top cover has a first protrusion connected to the X-axis piezoelectric drive mechanism and a third protrusion connected to an external mechanism, while the bottom cover has a second protrusion connected to the Z-axis piezoelectric drive mechanism. The first, second, and third protrusions make the assembly of the entire structure simple and precise, and significantly reduce the product weight, thus achieving product lightweighting.
[0020] The X-axis and Z-axis piezoelectric drive mechanisms are equipped with strain sensors. The closed-loop version avoids temperature drift, eliminates the hysteresis and creep characteristics of piezoelectric ceramics, and provides real-time position detection and feedback, achieving millisecond-level response speed and nanometer-level precise positioning control. Attached Figure Description
[0021] Figure 1 A three-dimensional structural schematic diagram of the large-stroke two-dimensional piezoelectric nanopositioning stage provided by this utility model;
[0022] Figure 2 Exploded view of the large-stroke two-dimensional piezoelectric nanopositioning stage provided by this utility model;
[0023] Figure 3 A three-dimensional structural diagram of the combination of the X-axis piezoelectric actuator, Z-axis piezoelectric drive mechanism, adapter plate and bottom cover provided by this utility model;
[0024] Figure 4 A partial exploded view of the three-dimensional structure of the Z-axis piezoelectric drive mechanism provided by this utility model;
[0025] Figure 5 A three-dimensional structural diagram of the adapter plate provided by this utility model;
[0026] Figure 6 A three-dimensional structural diagram of the top cover provided by this utility model;
[0027] Figure 7 A three-dimensional structural diagram of the bottom cover provided by this utility model;
[0028] In the diagram: 1-Top cover; 11-First protrusion; 12-Third protrusion; 2-Bottom cover; 21-Second protrusion; 3-Outer shell; 4-Piezoelectric drive unit; 41-X-axis piezoelectric drive mechanism; 42-Z-axis piezoelectric drive mechanism; 401-Magnifier; 4011-Flexible hinge arm; 4012-Sealing cover; 402-Piezoelectric ceramic; 43-Adapter plate; 431-Connecting part; 432-Interval protrusion; 5-Strain sensor. Detailed Implementation
[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for explaining the present utility model and are not intended to limit the present utility model.
[0030] The implementation of this utility model will be described in detail below with reference to specific embodiments.
[0031] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this utility model. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.
[0032] Reference Figure 1-7 The image shown is a preferred embodiment of the present invention.
[0033] The large-stroke two-dimensional piezoelectric nanopositioning stage includes an upper cover 1, a bottom cover 2, and an outer shell 3, as shown in the reference. Figure 1 The upper cover 1, bottom cover 2, and outer shell 3 together form a cavity structure. A piezoelectric drive unit 4 is located between the upper cover 1 and bottom cover 2, inside the outer shell 3 (within the cavity structure), as shown in the reference. Figure 2 One or more piezoelectric drive units 4 can be provided as needed. Preferably, two piezoelectric drive units 4 are provided. The two piezoelectric drive units 4 synchronously drive the upper cover 1 to move linearly along the X-axis or Z-axis.
[0034] The piezoelectric drive unit 4 includes an X-axis piezoelectric drive mechanism 41, a Z-axis piezoelectric drive mechanism 42, and an adapter plate 43. The X-axis piezoelectric drive mechanism 41 and the Z-axis piezoelectric drive mechanism 42 each have a fixed end and a movable end. The fixed end is used for fixing, and the movable end is used to drive the connected components or mechanisms. Specifically, the fixed end of the Z-axis piezoelectric drive mechanism 42 is located at the bottom and is fixedly connected to the bottom cover 2. The movable end of the Z-axis piezoelectric drive mechanism 42 is located at the top and is connected to one end of the adapter plate 43. The fixed end and movable end of the X-axis piezoelectric drive mechanism 41 are located at their respective top ends. The end of the adapter plate 43 away from the Z-axis piezoelectric drive mechanism 42 is connected to the fixed end of the X-axis piezoelectric drive mechanism 41. The movable end of the X-axis piezoelectric drive mechanism 41 is connected to the top cover 1. This invention uses a mechanism that connects the X-axis piezoelectric drive mechanism 41 and the Z-axis piezoelectric drive mechanism 42 in series to achieve ultra-high precision positioning of the X and Z axes. Specifically, the X-axis piezoelectric drive mechanism 41 pushes the upper cover 1 to move linearly along the X-axis. The Z-axis piezoelectric drive mechanism 42 pushes the adapter plate 43, thereby driving the X-axis piezoelectric drive mechanism 41 and the upper cover 1 to move linearly along the Z-axis.
[0035] The top cover 1 can be configured into various shapes such as circular or rectangular as needed. To ensure that the top cover 1 remains in a plane and does not deflect when moving linearly along the X and Z axes, the moving ends of the X-axis piezoelectric drive mechanism 41 connected to the top cover 1 should be evenly distributed. For example, if the top cover 1 is rectangular and there are two X-axis piezoelectric drive mechanisms 41, the moving ends of the two X-axis piezoelectric drive mechanisms 41 are preferably positioned corresponding to the diagonal direction of the rectangle of the top cover 1.
[0036] A preferred embodiment of the X-axis piezoelectric drive mechanism 41 includes an amplification body 401 and a piezoelectric ceramic 402 disposed within the amplification body 401, as shown in the reference. Figure 3 The magnifying body 401 includes two ceramic fixed ends and four flexible hinge arms 4011. The two ceramic fixed ends and the four flexible hinge arms 4011 together form a cavity. A piezoelectric ceramic 402 is disposed within the cavity, with its two ends connected to the two ceramic fixed ends respectively. The four flexible hinge arms 4011 are symmetrically arranged in pairs on the upper and lower sides of the piezoelectric ceramic 402. The piezoelectric ceramic 402 and the four flexible hinge arms 4011 are arranged at a certain angle to each other along their axes of symmetry. To protect the piezoelectric ceramic 402, the magnifying body 401 also includes a cover 4012. The cover 4012 is disposed on the outer side of the piezoelectric ceramic 402 and on the cavity. Preferably, a strain sensor 5 is provided on the side of the flexible hinge arm 4011. The strain sensor 5 can eliminate the hysteresis and creep characteristics of the piezoelectric ceramic 402, provide real-time position detection and feedback, and achieve nanometer-level precision positioning control.
[0037] A preferred embodiment of the Z-axis piezoelectric drive mechanism 42 includes an amplified body 401 and a piezoelectric ceramic 402 disposed within the amplified body 401. The amplified body 401 includes two ceramic fixed ends and four flexible hinge arms 4011. The two ceramic fixed ends and the four flexible hinge arms 4011 together form a cavity. The piezoelectric ceramic 402 is disposed within the cavity, and its two ends are respectively connected to the two ceramic fixed ends. The four flexible hinge arms 4011 are symmetrically arranged in pairs on the upper and lower sides of the piezoelectric ceramic 402. The piezoelectric ceramic 402 and the four flexible hinge arms 4011 are arranged at a certain angle α with respect to the axis of symmetry. Figure 4 To protect the piezoelectric ceramic 402, the magnifying body 401 also includes a cover 4012. The cover 4012 is disposed on the outer side and cavity of the piezoelectric ceramic 402. Preferably, a strain sensor 5 is provided on the side of the flexible hinge arm 4011.
[0038] The adapter plate 43 includes connecting portions 431 at both ends and a spacer protrusion 432 in the middle, as shown in the figure. Figure 5 The connecting portions 431 at both ends are connected to the X-axis piezoelectric drive mechanism 41 and the Z-axis piezoelectric drive mechanism 42, respectively. The spacer protrusion 432 abuts between the X-axis piezoelectric drive mechanism 41 and the Z-axis piezoelectric drive mechanism 42, which can ensure that the adapter plate 43 is firmly connected to the X-axis piezoelectric drive mechanism 41 and the Z-axis piezoelectric drive mechanism 42.
[0039] The upper cover 1 has a first protrusion 11 on the side near the piezoelectric drive unit 4 for connection with the X-axis piezoelectric drive mechanism 41, as shown in the figure. Figure 6 The first protrusion 11 is used for mounting and positioning. Furthermore, the thickness of the first protrusion 11 is sufficient to meet the thread depth required for the screw connection between the upper cover 1 and the X-axis piezoelectric drive mechanism 41, without increasing the overall thickness of the upper cover 1, thus reducing its overall weight. A third protrusion 12 is also provided on the side of the upper cover 1 near the piezoelectric drive unit 4. The thickness of the third protrusion 12 is sufficient to meet the thread depth required for the screw connection between the upper cover 1 and the external mechanism, without increasing the overall thickness of the upper cover 1. A second protrusion 21 for connection with the Z-axis piezoelectric drive mechanism 42 is provided on the side of the bottom cover 2 near the piezoelectric drive unit 4, as shown in the figure. Figure 7 The second protrusion 21 is used for mounting and positioning, and to provide the thread thickness for screw connections.
[0040] This invention is not intended to limit the scope of this invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention shall be included within the scope of protection of this invention.
Claims
1. A long-stroke two-dimensional piezoelectric nanopositioning stage, comprising an upper cover (1), a bottom cover (2), and a shell (3), characterized in that, A piezoelectric drive unit (4) is provided between the upper cover (1) and the bottom cover (2) and inside the outer shell (3); the piezoelectric drive unit (4) includes an X-axis piezoelectric drive mechanism (41), a Z-axis piezoelectric drive mechanism (42) and an adapter plate (43). The fixed end of the Z-axis piezoelectric drive mechanism (42) is connected to the bottom cover (2), and the moving end of the Z-axis piezoelectric drive mechanism (42) is connected to one end of the adapter plate (43); the other end of the adapter plate (43) is connected to the fixed end of the X-axis piezoelectric drive mechanism (41), and the moving end of the X-axis piezoelectric drive mechanism (41) is connected to the top cover (1).
2. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that, The piezoelectric drive unit (4) is configured as two units, and the two piezoelectric drive units (4) synchronously drive the upper cover (1) to move linearly along the X-axis or Z-axis.
3. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 2, characterized in that, The upper cover (1) is set as a rectangle, and the moving ends of the two X-axis piezoelectric drive mechanisms (41) are set in the diagonal direction of the rectangle.
4. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that, The X-axis piezoelectric drive mechanism (41) includes an amplification body (401) and a piezoelectric ceramic (402) disposed in the amplification body (401); the amplification body (401) is provided with four flexible hinge arms (4011), the four flexible hinge arms (4011) are arranged symmetrically in pairs, and the piezoelectric ceramic (402) is arranged at a certain angle to the axis of symmetry of the four flexible hinge arms (4011).
5. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that, The Z-axis piezoelectric drive mechanism (42) includes an amplification body (401) and a piezoelectric ceramic (402) disposed in the amplification body (401); the amplification body (401) is provided with four flexible hinge arms (4011), the four flexible hinge arms (4011) are arranged symmetrically in pairs, and the piezoelectric ceramic (402) is arranged at a certain angle to the axis of symmetry of the four flexible hinge arms (4011).
6. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that, The adapter plate (43) includes connecting portions (431) at both ends and a spacer protrusion (432) in the middle, the spacer protrusion (432) abutting between the X-axis piezoelectric drive mechanism (41) and the Z-axis piezoelectric drive mechanism (42).
7. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that, The upper cover (1) has a first protrusion (11) on the side near the piezoelectric drive unit (4) for connecting with the X-axis piezoelectric drive mechanism (41); the bottom cover (2) has a second protrusion (21) on the side near the piezoelectric drive unit (4) for connecting with the Z-axis piezoelectric drive mechanism (42).
8. The large-stroke two-dimensional piezoelectric nanopositioning stage according to claim 1, characterized in that, The top cover (1) has a third protrusion (12) on the side near the piezoelectric drive unit (4) for connecting with an external mechanism.
9. The large-stroke two-dimensional piezoelectric nanopositioning stage according to any one of claims 2 or 3, characterized in that, The flexible hinge arm (4011) is provided with a strain sensor (5) on its side.