A method for purifying hydrogen fluoride production fumes

Abstract

The application discloses a kind of purification methods of hydrogen fluoride production flue gas, S1, flue gas is introduced into the spray tower tank of spray neutralization mechanism and is contained in spray;S2, flue gas filtering: after spraying, flue gas is filtered by annular sponge block in adsorption drying mechanism, and the application relates to the technical field of hydrogen fluoride production.The purification method of hydrogen fluoride production flue gas, by the combination of spray neutralization mechanism and adsorption drying mechanism, the setting of the two mechanisms, after flue gas enters the inside of spray tower tank, the driving of motor is used to drive several water pipes to spray flue gas, then through the setting of annular sponge block, when wet flue gas passes through annular sponge block, the moisture and particulate matter in flue gas are absorbed and filtered, so as to reduce the humidity of flue gas, ensure that subsequent secondary purification can reduce the damage to components, and annular sponge block can be reused by extrusion drying after completing adsorption.

Description

Technical Field

[0001] This invention relates to the field of hydrofluoric acid production technology, specifically to a method for purifying flue gas produced from hydrofluoric acid. Background Technology

[0002] Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas. It is a clear, colorless, corrosive liquid with a strong, pungent odor. It is widely used in semiconductor manufacturing and the production of other high-precision electronic components. However, the production workshops of hydrofluoric acid contain fumes that are released during the production process. These fumes not only contain hydrofluoric acid gas but also dust, posing a significant potential hazard to human health. Therefore, existing patent documents have addressed this issue.

[0003] For example, Chinese patent CN108211742A discloses a purification device for dryable flue gas in hydrofluoric acid production. The device includes a main body with a control panel mounted on its left outer wall. An air intake on the outer wall of the main body is connected to a fan. A liquid storage chamber is located at the bottom of the main body, containing a filter and a sensor. A water pump within the liquid storage chamber is connected to an atomizing nozzle. Above a fixed rod, a filter bag layer, a soda lime adsorption layer, and an activated carbon adsorption layer are arranged sequentially. Above the activated carbon adsorption layer, a second fan is located. The output of the second fan is connected to the air inlet at the bottom of the gas purification device via a duct. A noise reduction device is located on the inner wall of the main body. The main body is fixedly mounted on a support base, and a support column is fixedly mounted on the bottom of the support base. A shock-absorbing device, including shock-absorbing plates and a shock-absorbing steel plate, is mounted on the support column. Casters are located at the bottom of the support column. This invention has a reasonable structure and is easy to use, effectively absorbing and purifying flue gas generated in production workshops.

[0004] The equipment mentioned above, while capable of neutralizing and filtering flue gas to achieve flue gas purification, still has significant shortcomings in actual use, such as:

[0005] When flue gas is sprayed and neutralized, it carries a large amount of moisture as it rises. When the humid flue gas comes into contact with the filter bags, lime layer, and activated carbon layer, the moisture in the flue gas will adhere to the surface grooves of the filter components, causing the filter bags to stick and become clogged, thus losing their filtering function. At the same time, and most importantly, when the humid flue gas containing solution comes into contact with the lime layer and activated carbon layer and adheres to them, crystallization will eventually occur as the temperature changes, causing the entire purification mechanism of the equipment to lose its function, and also reducing the service life of the lime layer and activated carbon layer.

[0006] Therefore, a purification method for hydrofluoric acid production flue gas that can improve efficiency and stability was designed to address these shortcomings. Summary of the Invention

[0007] To address the shortcomings of existing technologies, this invention provides a method for purifying flue gas from hydrofluoric acid production, which solves the problems of moisture and easy adhesion during the purification of flue gas from hydrofluoric acid production.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a method for purifying flue gas from hydrofluoric acid production, specifically comprising the following steps:

[0009] S1. Flue gas spraying: Flue gas is introduced into the spraying tower tank contained in the spraying neutralization mechanism for spraying;

[0010] S2. Flue gas filtration: The flue gas after spraying is filtered through the annular sponge block in the adsorption and drying mechanism.

[0011] S3. Equipment maintenance: Disassemble and maintain the entire adsorption drying mechanism and spray neutralization mechanism.

[0012] Preferably, the spray neutralization mechanism includes a load-bearing base plate, a U-shaped slide is fixedly connected to the top of the load-bearing base plate by a bracket, a spray tower tank is fixedly installed on the inner side of the U-shaped slide by a bracket, a triangular rotating frame is fixedly connected to the inner wall of the spray tower tank, an adapter is fixedly connected to the inner side of the triangular rotating frame, a water collection frame is rotatably connected to the top of the adapter, a water distribution pipe is rotatably connected to the surface of the water collection frame through an opening, and several water distribution pipes are provided, a linkage box is rotatably installed on the surface of the water distribution pipe, and the rear part of the linkage box is fixedly connected to the surface of the water collection frame through a fixing block, and a spray pipe is fixedly installed at the bottom of the water distribution pipe through an opening.

[0013] Preferably, the bottom of the adapter is fixedly connected to a liquid guide pipe through an opening, and one end of the liquid guide pipe passes through the spray tower tank and extends to the outside of the spray tower tank. A gear is fixedly connected to the surface of the water distribution pipe and inside the linkage box. A curved frame is slidably installed on the top of the linkage box through an opening. The end of the first spring located inside the linkage box is fixedly connected to a toothed plate that meshes with the gear.

[0014] Preferably, a first inner corner cylinder is fixedly connected to the top of the water collection frame. The surface of the first inner corner cylinder is provided with a guide groove, and a plurality of guide grooves are provided. A protective sleeve is slidably installed between the inner sides of the plurality of guide grooves. A pressure-bearing column is fixedly connected to the top of the protective sleeve and located inside the first inner corner cylinder. A first spring is fixedly connected to the bottom of the pressure-bearing column. The top ends of the plurality of bent frames are all fixedly connected to the surface of the protective sleeve.

[0015] Preferably, sliding side frames are fixedly installed on the upper part of both sides of the inner cavity of the spray tower tank, and a vertical partition is slidably installed between the inner sides of the two sliding side frames. A cylinder is fixedly installed at the rear of the spray tower tank by a fixed seat. A motor is fixedly installed at the top of the cylinder by a bracket. The output shaft of the motor is fixedly connected to a rotating rod by a coupling. The bottom end of the rotating rod passes through the spray tower tank and the vertical partition in sequence and extends to the bottom of the vertical partition. The rotating rod is rotatably connected to the vertical partition.

[0016] Preferably, a circular pressure plate is fixedly connected to the surface of the rotating rod and to the inner side of the vertical partition. An arc-shaped pressure plate is fixedly connected to the bottom of the circular pressure plate, and several arc-shaped pressure plates are provided. A semi-arc pressure plate is fixedly connected to the front and rear of the vertical partition through a fixing plate. A multi-angle connecting rod is fixedly connected to the bottom end of the rotating rod. Rolling rollers are rotatably installed on both sides of the bottom of the vertical partition and between the front and rear semi-arc pressure plates.

[0017] Preferably, exhaust pipes are fixedly installed on both sides of the top of the spray tower tank through openings, an air supply pipe is fixedly installed on the lower left side of the spray tower tank through an opening, a solenoid valve pipe is installed at the bottom of the spray tower tank, and a pull-out arc opening is provided on the surface of the spray tower tank.

[0018] Preferably, the adsorption drying mechanism includes a sealing recessed frame, which is located inside the pull-out arc opening. Both sides of the sealing recessed frame are fixedly connected with horizontal tie rods, and the rear end of the horizontal tie rods passes through the U-shaped slide and extends to the inside of the U-shaped slide. One end of the horizontal tie rod extending to the inside of the U-shaped slide is fixedly connected to a positioning slide seat that is slidably connected to the U-shaped slide. An electric heating tube is fixedly installed on the inside of the sealing recessed frame.

[0019] Preferably, a circular mesh frame is provided at the top of the sealing recess, the circular mesh frame is located between the semi-arc pressure plate and the water collection frame, an inner circular frame is fixedly connected to the bottom of the inner cavity of the circular mesh frame, a second inner corner cylinder is fixedly connected to the top of the inner circular frame through an opening, and the bottom end of the second inner corner cylinder passes through the circular mesh frame and extends to the bottom of the circular mesh frame. The circular mesh frame is rotatably connected to the rear of the sealing recess through a bearing bracket, and a rectangular opening is provided at the top of the inner circular frame to cooperate with the arc head pressure plate.

[0020] Preferably, an annular sponge block is provided on the inner side of the circular mesh frame and outside the inner circular frame. The inner wall of the inner circular frame has a retraction opening, and there are several retraction openings. A tapered rod is provided on the inner side of the retraction opening. A strip groove is provided on both sides of the tapered rod. A guide ring is fixedly connected inside the inner circular frame, and the strip groove is slidably connected to the guide ring. A inclined pressure plate is fixedly connected to one end of the tapered rod inside the inner circular frame. A second spring is sleeved on the surface of the tapered rod between the inclined pressure plate and the guide ring.

[0021] This invention provides a method for purifying flue gas from hydrofluoric acid production. Compared with existing technologies, it has the following advantages:

[0022] (1) The method for purifying the flue gas produced by hydrofluoric acid combines a spray neutralization mechanism and an adsorption drying mechanism. The two mechanisms are designed so that after the flue gas enters the spray tower tank, the motor drives several water distribution pipes to spray the flue gas. Then, the annular sponge block allows the humid flue gas to pass through the annular sponge block, absorbing and filtering the moisture and particulate matter in the flue gas, thereby reducing the humidity of the flue gas and ensuring that the damage to the components can be reduced during subsequent secondary purification. After the annular sponge block completes the adsorption, it can be reused by squeezing and drying. At the same time, the motor can be used to lift the water collection frame and the sealing recess frame to unlock the entire adsorption drying mechanism, replace the annular sponge block, and inspect the water distribution pipes and spray pipes, which facilitates the overall maintenance of the equipment.

[0023] (2) The method for purifying the flue gas produced by hydrofluoric acid involves setting a sealing concave frame inside the spray tower tank and installing a circular mesh frame on the top of the sealing concave frame. At the same time, an annular sponge block is set inside the circular mesh frame, which is used in conjunction with a rolling roller and an electric heating tube. The structure can effectively adsorb the moisture in the flue gas by utilizing the water absorption and fibrous properties of the annular sponge block, thereby reducing the humidity of the flue gas and facilitating subsequent secondary purification. Meanwhile, the rotation of the circular mesh frame will cause the annular sponge block inside to rotate as well. The rotation of the annular sponge block will cause the rolling roller to squeeze the annular sponge block, squeezing out the water adsorbed in the annular sponge block. When the annular sponge block moves to the top of the sealing concave frame, it can be dried by the electric heating tube, thereby restoring the efficient adsorption function. In addition, the annular sponge block is inexpensive and lightweight, making it easy to replace and reducing the purification cost.

[0024] (3) The method for purifying the flue gas produced by hydrofluoric acid uses a cylinder connected to a motor, and is used in conjunction with a vertical partition and a multi-angle connecting rod. After the work is completed, the cylinder drives the vertical partition and the multi-angle connecting rod to rise, thereby separating the multi-angle connecting rod from the first inner corner cylinder and the second inner corner cylinder, making it convenient to pull out the entire adsorption drying mechanism for maintenance. After the arc head pressure plate rises, it no longer squeezes the inclined pressure plate, allowing the inclined pressure plate to be pulled out from the inside of the annular sponge block, making it convenient to replace the annular sponge block. After the replacement is completed, the arc head pressure plate is lowered by the vertical partition, which squeezes the inclined pressure plate again to insert the conical rod into the annular sponge block to fix the new annular sponge block. At the same time, the semi-arc pressure plate will also press the annular sponge block to limit its position, and the multi-angle connecting rod will connect the first inner corner cylinder and the second inner corner cylinder, which facilitates subsequent maintenance.

[0025] (4) The method for purifying the flue gas produced by hydrofluoric acid is to set a water distribution pipe and a linkage box on the surface of the water collection frame, and use it in conjunction with a pressure-bearing column and a toothed plate. The setting of these structures can press the pressure-bearing column when the multi-angle connecting rod is connected to the first inner corner cylinder, thereby pushing the protective sleeve and several multi-angle connecting rods to descend, causing the spray pipe to flip and face each other. When the multi-angle connecting rod rotates, the water distribution pipe can also rotate with it, improving the uniformity of spraying. After the multi-angle connecting rod rises, the first spring can be used to push the protective sleeve to rise, causing the water distribution pipe to rotate and the spray pipe to face upward. When water is injected again using the liquid guide pipe, it can be observed whether there is crystal blockage in the spray pipe, thus facilitating quick cleaning and unblocking, and improving the service life of the equipment. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the process of the present invention;

[0027] Figure 2 This is a schematic diagram of the structure of the present invention;

[0028] Figure 3 This is a schematic diagram of the spray neutralization mechanism structure of the present invention;

[0029] Figure 4 This is a cross-sectional view of the spray tower tank structure of the present invention;

[0030] Figure 5 For the present invention Figure 4 A magnified view of a section at point A in the middle;

[0031] Figure 6 This is a side view of the internal structure of the spray tower tank of the present invention;

[0032] Figure 7 This is a schematic diagram of the water collection frame, linkage box, and water distribution pipe structure of the present invention;

[0033] Figure 8 This is a schematic diagram of the triangular rotating frame, adapter, and liquid guide tube structure of the present invention;

[0034] Figure 9 This is a cross-sectional view of the linkage box structure of the present invention;

[0035] Figure 10 This is a cross-sectional view of the protective sleeve structure of the present invention;

[0036] Figure 11 This is a schematic diagram of the vertical partition, motor, and rotating rod structure of the present invention;

[0037] Figure 12 This is a schematic diagram of the circular pressure plate, arc-shaped pressure plate, and semi-arc pressure plate structure of the present invention;

[0038] Figure 13 This is a schematic diagram of the adsorption drying mechanism structure of the present invention;

[0039] Figure 14 This is a schematic diagram of the positioning slide, circular mesh frame, and second inner corner cylinder structure of the present invention;

[0040] Figure 15 This is a top view of the electric heating tube, circular mesh frame, and second inner corner cylinder structure of the present invention;

[0041] Figure 16 For the present invention Figure 15 A magnified view of a section at point B in the middle;

[0042] Figure 17 This is a schematic diagram of the retraction port, tapered rod, and strip groove structure of the present invention.

[0043] In the diagram: 1. Spray neutralization mechanism; 2. Adsorption drying mechanism; 101. Load-bearing base plate; 102. U-shaped slide; 103. Spray tower tank; 104. Triangular rotating frame; 105. Adapter; 106. Water collection frame; 107. Linkage box; 108. Water distribution pipe; 109. Spray pipe; 110. Gear; 111. Bent frame; 112. Toothed plate; 113. First inner corner cylinder; 114. Guide groove; 115. Protective sleeve; 116. Pressure-bearing column; 117. First spring; 118. Sliding side frame; 119. Vertical partition plate; 120. Motor; 121. Rotating rod; 122. Multi-angle connecting rod; 123. 124. Circular pressure plate; 125. Arc-shaped pressure plate; 126. Semi-arc pressure plate; 127. Roller roller; 128. Cylinder; 129. Exhaust pipe; 120. Gas supply pipe; 130. Liquid guide pipe; 131. Solenoid valve pipe; 132. Pull-out arc opening; 201. Sealing concave frame; 202. Horizontal tie rod; 203. Positioning slide; 204. Electric heating tube; 205. Circular mesh frame; 206. Second inner corner cylinder; 207. Rectangular opening; 208. Annular sponge block; 209. Retraction opening; 210. Conical rod; 211. Strip groove; 212. Inclined pressure plate; 213. Guide ring; 214. Second spring; 215. Inner circular frame. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] Please see Figures 1-17 This invention provides a technical solution: a method for purifying flue gas from hydrofluoric acid production, specifically including the following steps:

[0046] S1. Flue gas spraying: Flue gas is introduced into the spray tower tank 103 included in the spraying neutralization mechanism 1 for spraying;

[0047] S2. Flue gas filtration: The flue gas after spraying is filtered through the annular sponge block 208 in the adsorption and drying mechanism 2.

[0048] S3. Equipment maintenance: Disassemble and maintain the entire adsorption drying mechanism 2 and the spray neutralization mechanism 1.

[0049] The more specific steps of the above-mentioned method for purifying flue gas from hydrofluoric acid production are as follows:

[0050] S1. Flue gas spraying: Before use, start the motor 120 to drive the rotating rod 121 to rotate. At this time, the multi-angle connecting rod 122 connects with the second inner angle cylinder 206 and the first inner angle cylinder 113 to make the water collection frame 106 and the circular mesh frame 205 rotate synchronously. Then, the alkaline solution is injected into the water collection frame 106 through the liquid guide pipe 130. Then, the hydrofluoric acid flue gas is introduced into the spray tower tank 103 through the gas transmission pipe 129. The water collection frame 106 drives several water distribution pipes 108 to rotate, so that the solution is sprayed out from the spray pipe 109 and comes into large-scale and uniform contact with the flue gas, so that the flue gas is neutralized and its toxicity is reduced.

[0051] S2. Flue Gas Filtration: After the flue gas is sprayed from the bottom, it will flow upward. At this time, due to the obstruction of the sealing concave frame 201, the flue gas can only enter the inner side of the circular mesh frame 205 from the rear side of the bottom of the circular mesh frame 205. Then the flue gas passes through the annular sponge block 208. At this time, the annular sponge block 208 filters the flue gas and absorbs the moisture in the flue gas. After the flue gas passes through the annular sponge block 208, the moisture content is reduced. Then the flue gas is discharged through the exhaust pipe 128 and undergoes secondary adsorption through purification. At the same time, when the circular mesh frame 205 drives the annular sponge block 208 to rotate, the rolling roller 126 at the bottom of the vertical partition 119 will continuously squeeze the annular sponge block 208. After being squeezed, the annular sponge block 208 will squeeze out the water during adsorption. Then, when the annular sponge block 208 rotates to the upper part of the sealing concave frame 201, several electric heating tubes 204 heat and bake the annular sponge block 208 to dry it. After the annular sponge block 208 is dried, it rotates back to the rear to adsorb and filter the flue gas.

[0052] S3. Equipment Maintenance: When equipment maintenance is required after flue gas treatment is completed, first start cylinder 127 to simultaneously raise motor 120, rotating rod 121, and vertical partition 119 under the limiting action of sliding side frame 118. When vertical partition 119 rises to the top, the two semi-circular pressure plates 125 separate from the circular mesh frame 205 and no longer press on the annular sponge block 208. At the same time, polygonal connecting rod 122 is pulled out from the inside of the first inner angle cylinder 113 and the second inner angle cylinder 206. At this time, the first inner angle cylinder 113 and the second inner angle cylinder 206 are no longer connected. Since polygonal connecting rod 122 is pulled out from the inside of the first inner angle cylinder 113 and no longer presses on the pressure column 116, the pressure column 116 extends and retracts upward using the first spring 117, and the pressure column 116... The pressure column 116 uses the protective sleeve 115 to drive several curved frames 111 to rise synchronously. The rise of the curved frames 111 will drive the water distribution pipe 108 to rotate 180 degrees through the meshing of the toothed plate 112 and the gear 110. At this time, the spray pipe 109 is facing upward, and the arc head pressure plate 124 is pulled out from the inside of the rectangular opening 207 and no longer presses on the inclined pressure plate 212. At this time, several conical rods 210 are pulled out from the inside of the annular sponge block 208 by the elastic force of the second spring 214 and retracted to the inside of the inner circular frame 215. Then the sealing concave frame 201 is unlocked. Using the sliding connection between the positioning slide 203 and the U-shaped slide 102, the entire adsorption drying mechanism 2 is pulled out from the inside of the pull-out arc opening 132, so that the circular mesh frame 205 The entire assembly is located outside the spray tower tank 103. The annular sponge block 208 is then replaced, and water is again injected into the water collection frame 106 via the liquid guide pipe 130, causing water to spray out from the spray pipes 109. At this time, several spray pipes 109 are observed from the pull-out arc 132 for blockages and cleaned. After cleaning and replacement, the sealing recess 201 is pushed back into the inside of the spray tower tank 103, and then the sealing recess 201 is locked to the spray tower tank 103. At this point, the first inner angle cylinder 113 and the second inner angle cylinder 206 are vertically aligned. Then, the cylinder 127 is activated to push the vertical partition 119 downwards. During the descent, the multi-angle connecting rod 122 will penetrate the second inner angle cylinder 206 and insert into the inside of the first inner angle cylinder 113. Then, the multi-angle connecting rod 122 presses down on the pressure-bearing column 116, pushing the protective sleeve 115 and several curved frames 111 to descend synchronously. At this time, the toothed plate 112 drives the gear 110 and the water distribution pipe 108 to rotate in opposite directions, thereby causing the nozzle 109 to rotate to the bottom. Then, several arc-head pressure plates 124 pass through the rectangular opening 207 and enter the inner circular frame 215. Then, the arc-head pressure plates 124 squeeze the inclined pressure plate 212 and push several conical rods 210 to extend and insert into the inner side of the annular sponge block 208 to fix the annular sponge block 208. At the same time, the front and rear semi-arc pressure plates 125 press out the annular sponge block 208. At the same time, the rolling roller 126 also presses the two sides of the top of the annular sponge block 208, and then the flue gas is treated again.

[0053] The above-mentioned method for purifying flue gas from hydrofluoric acid production is implemented through the following structure:

[0054] Please refer to Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 and Figure 12 The overall structure of the spray neutralization mechanism 1 is shown. The spray neutralization mechanism 1 includes a load-bearing base plate 101. A U-shaped slide 102 is fixedly connected to the top of the load-bearing base plate 101 by a bracket. A spray tower tank 103 is fixedly installed on the inner side of the U-shaped slide 102 by a bracket. A triangular rotating frame 104 is fixedly connected to the inner wall of the spray tower tank 103. An adapter 105 is fixedly connected to the inner side of the triangular rotating frame 104. A water collection frame 106 is rotatably connected to the top of the adapter 105. A water distribution pipe 108 is rotatably connected to the surface of the water collection frame 106 through an opening. Several water distribution pipes 108 are provided. A linkage box 107 is rotatably installed on the surface of the water distribution pipe 108. The rear part of the linkage box 107 is fixedly connected to the surface of the water collection frame 106 through a fixing block. A spray pipe 109 is fixedly installed at the bottom of the water distribution pipe 108 through an opening.

[0055] The bottom of the adapter 105 is fixedly connected to a liquid guide pipe 130 through an opening, and one end of the liquid guide pipe 130 passes through the spray tower tank 103 and extends to the outside of the spray tower tank 103. A gear 110 is fixedly connected to the surface of the water distribution pipe 108 and inside the linkage box 107. A bent frame 111 is slidably installed on the top of the linkage box 107 through an opening. One end of the first spring 117 located inside the linkage box 107 is fixedly connected to a toothed plate 112 that meshes with the gear 110. The water collection frame 10... The top of 6 is fixedly connected to a first inner corner tube 113. The surface of the first inner corner tube 113 is provided with a guide groove 114, and there are several guide grooves 114. A protective sleeve 115 is slidably installed between the inner sides of several guide grooves 114. A pressure-bearing column 116 is fixedly connected to the top of the protective sleeve 115 and located inside the first inner corner tube 113. A first spring 117 is fixedly connected to the bottom of the pressure-bearing column 116. The top ends of several bent frames 111 are all fixedly connected to the surface of the protective sleeve 115.

[0056] Sliding side frames 118 are fixedly installed on the upper part of both sides of the inner cavity of the spray tower tank 103. A vertical partition 119 is slidably installed between the inner sides of the two sliding side frames 118. A cylinder 127 is fixedly installed at the rear of the spray tower tank 103 through a fixed seat. A motor 120 is fixedly installed at the top of the cylinder 127 through a bracket. The motor 120 is a servo motor. The output shaft of the motor 120 is fixedly connected to a rotating rod 121 through a coupling. The bottom end of the rotating rod 121 passes through the spray tower tank 103 and the vertical partition 119 in sequence and extends to the bottom of the vertical partition 119. The rotating rod 121 is rotatably connected to the vertical partition 119.

[0057] A circular pressure plate 123 is fixedly connected to the surface of the rotating rod 121 and to the inner side of the vertical partition 119. An arc-shaped pressure plate 124 is fixedly connected to the bottom of the circular pressure plate 123, and several arc-shaped pressure plates 124 are provided. A semi-arc pressure plate 125 is fixedly connected to the front and rear of the vertical partition 119 through a fixing plate. A multi-angle connecting rod 122 is fixedly connected to the bottom of the rotating rod 121. Rolling rollers 126 are rotatably installed on both sides of the bottom of the vertical partition 119 and between the front and rear semi-arc pressure plates 125. An exhaust pipe 128 is fixedly installed on both sides of the top of the spray tower tank 103 through openings. An air supply pipe 129 is fixedly installed on the lower left side of the spray tower tank 103 through an opening. A solenoid valve pipe 131 is installed at the bottom of the spray tower tank 103. A pull-out arc opening 132 is opened on the surface of the spray tower tank 103.

[0058] Please refer to Figure 13 , Figure 14 , Figure 15 , Figure 16 and Figure 17 The overall structure of the adsorption drying mechanism 2 is shown. The adsorption drying mechanism 2 includes a sealing concave frame 201, which is located inside the pull-out arc 132. Both sides of the sealing concave frame 201 are fixedly connected with horizontal tie rods 202. The rear end of the horizontal tie rods 202 passes through the U-shaped slide 102 and extends to the inside of the U-shaped slide 102. One end of the horizontal tie rods 202 extending to the inside of the U-shaped slide 102 is fixedly connected with a positioning slide seat 203 that is slidably connected to the U-shaped slide 102. An electric heating tube 204 is fixedly installed on the inside of the sealing concave frame 201.

[0059] A circular mesh frame 205 is provided on the top of the sealing recess 201. The circular mesh frame 205 is located between the semi-arc pressure plate 125 and the water collection frame 106. An inner circular frame 215 is fixedly connected to the bottom of the inner cavity of the circular mesh frame 205. A second inner corner cylinder 206 is fixedly connected to the top of the inner circular frame 215 through an opening. The bottom end of the second inner corner cylinder 206 passes through the circular mesh frame 205 and extends to the bottom of the circular mesh frame 205. The circular mesh frame 205 is rotatably connected to the rear of the sealing recess 201 through a bearing bracket. A rectangular opening 207 is provided on the top of the inner circular frame 215 to cooperate with the arc head pressure plate 124.

[0060] An annular sponge block 208 is provided on the inner side of the circular frame 205 and outside the inner circular frame 215. The annular sponge block 208 is pre-cut into a ring shape. A retraction opening 209 is provided on the inner wall of the inner circular frame 215, and several retraction openings 209 are provided. A tapered rod 210 is provided on the inner side of the retraction opening 209. A strip groove 211 is provided on both sides of the tapered rod 210. A guide ring 213 is fixedly connected inside the inner circular frame 215, and the strip groove 211 is slidably connected to the guide ring 213. A sloped pressure plate 212 is fixedly connected to one end of the tapered rod 210 inside the inner circular frame 215. A second spring 214 is sleeved on the surface of the tapered rod 210 between the sloped pressure plate 212 and the guide ring 213.

[0061] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

Claims

1. A method for purifying hydrogen fluoride production off-gas, characterized in that: Specifically, the following steps are included: S1, Flue gas spraying: Flue gas is introduced into the spray tower tank (103) included in the spray neutralization mechanism (1) for spraying; S2, flue gas filtration: The flue gas after spraying is filtered through the annular sponge block (208) in the adsorption drying mechanism (2); S3. Equipment maintenance: Disassemble and maintain the entire adsorption drying mechanism (2) and the spray neutralization mechanism (1); The spray neutralization mechanism (1) includes a load-bearing base plate (101). A U-shaped slide (102) is fixedly connected to the top of the load-bearing base plate (101) via a bracket. A spray tower tank (103) is fixedly installed on the inner side of the U-shaped slide (102) via a bracket. A triangular rotating frame (104) is fixedly connected to the inner wall of the spray tower tank (103). An adapter (105) is fixedly connected to the inner side of the triangular rotating frame (104). The adapter (105)... A water collection frame (106) is rotatably connected to the top. A water distribution pipe (108) is rotatably connected to the surface of the water collection frame (106) through an opening. Several water distribution pipes (108) are provided. A linkage box (107) is rotatably installed on the surface of the water distribution pipe (108). The rear part of the linkage box (107) is fixedly connected to the surface of the water collection frame (106) through a fixing block. A spray pipe (109) is fixedly installed at the bottom of the water distribution pipe (108) through an opening. Sliding side frames (118) are fixedly installed on the upper part of both sides of the inner cavity of the spray tower tank (103). A vertical partition (119) is slidably installed between the inner sides of the two sliding side frames (118). A cylinder (127) is fixedly installed at the rear of the spray tower tank (103) through a fixed seat. A motor (120) is fixedly installed at the top of the cylinder (127) through a bracket. A rotating rod (121) is fixedly connected to the output shaft of the motor (120) through a coupling. The bottom end of the rotating rod (121) passes through the spray tower tank (103) and the vertical partition (119) in sequence and extends to the bottom of the vertical partition (119). The rotating rod (121) is rotatably connected to the vertical partition (119). A circular pressure plate (123) is fixedly connected to the surface of the rotating rod (121) and to the inner side of the vertical partition (119). An arc-head pressure plate (124) is fixedly connected to the bottom of the circular pressure plate (123), and several arc-head pressure plates (124) are provided. A semi-arc pressure plate (125) is fixedly connected to the front and rear of the vertical partition (119) through a fixing plate. A multi-angle connecting rod (122) is fixedly connected to the bottom end of the rotating rod (121). Rolling rollers (126) are rotatably installed on both sides of the bottom of the vertical partition (119) between the front and rear semi-arc pressure plates (125). The top of the spray tower tank (103) is fixedly installed with exhaust pipes (128) through openings on both sides. The lower left side of the spray tower tank (103) is fixedly installed with gas supply pipes (129) through openings. The bottom of the spray tower tank (103) is equipped with a solenoid valve pipe (131). The surface of the spray tower tank (103) is provided with a pull-out arc opening (132). The adsorption drying mechanism (2) includes a sealing recess (201), and the sealing recess (201) is located inside the pull-out arc (132). Both sides of the sealing recess (201) are fixedly connected with horizontal tie rods (202), and the rear end of the horizontal tie rods (202) passes through the U-shaped slide (102) and extends to the inside of the U-shaped slide (102). One end of the horizontal tie rods (202) extending to the inside of the U-shaped slide (102) is fixedly connected with a positioning slide (203) that is slidably connected to the U-shaped slide (102). An electric heating tube (204) is fixedly installed on the inside of the sealing recess (201). A circular mesh frame (205) is provided on the top of the sealing recess (201). The circular mesh frame (205) is located between the semi-arc pressure plate (125) and the water collection frame (106). An inner circular frame (215) is fixedly connected to the bottom of the inner cavity of the circular mesh frame (205). A second inner corner cylinder (206) is fixedly connected to the top of the inner circular frame (215) through an opening. The bottom end of the second inner corner cylinder (206) passes through the circular mesh frame (205) and extends to the bottom of the circular mesh frame (205). The circular mesh frame (205) is rotatably connected to the rear of the sealing recess (201) through a bearing bracket. A rectangular opening (207) is provided on the top of the inner circular frame (215) to cooperate with the arc head pressure plate (124). An annular sponge block (208) is provided on the inner side of the circular frame (205) and outside the inner circular frame (215). A retraction opening (209) is provided on the inner wall of the inner circular frame (215), and several retraction openings (209) are provided. A tapered rod (210) is provided on the inner side of the retraction opening (209). A strip groove (211) is provided on both sides of the tapered rod (210). A guide ring (213) is fixedly connected inside the inner circular frame (215), and the strip groove (211) is slidably connected to the guide ring (213). A sloped pressure plate (212) is fixedly connected to one end of the tapered rod (210) inside the inner circular frame (215). A second spring (214) is sleeved on the surface of the tapered rod (210) between the sloped pressure plate (212) and the guide ring (213).

2. The method for purifying flue gas from hydrofluoric acid production according to claim 1, characterized in that: The bottom of the adapter (105) is fixedly connected to a liquid guide pipe (130) through an opening, and one end of the liquid guide pipe (130) passes through the spray tower tank (103) and extends to the outside of the spray tower tank (103). A gear (110) is fixedly connected to the surface of the water distribution pipe (108) and inside the linkage box (107). A bent frame (111) is slidably installed on the top of the linkage box (107) through an opening. One end of the bent frame (111) inside the linkage box (107) is fixedly connected to a toothed plate (112) that meshes with the gear (110).

3. The method for purifying flue gas from hydrofluoric acid production according to claim 2, characterized in that: The top of the water collection frame (106) is fixedly connected to a first inner corner cylinder (113). The surface of the first inner corner cylinder (113) is provided with a guide groove (114), and there are several guide grooves (114). A protective sleeve (115) is slidably installed between the inner sides of several guide grooves (114). A pressure-bearing column (116) is fixedly connected to the top of the protective sleeve (115) and to the inner side of the first inner corner cylinder (113). A first spring (117) is fixedly connected to the bottom of the pressure-bearing column (116). The top ends of several bent frames (111) are all fixedly connected to the surface of the protective sleeve (115).

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