Semiconductor equipment safety operation and data management system based on remote control

Abstract

The invention provides a semiconductor equipment safety operation and data management system based on remote control, which realizes communication connection with a programmable logic controller through a network interface module of an expansion equipment port, constructs a special network channel between a laboratory and an office area, deploys control software with a multi-level authority verification function at a PC (Personal Computer) end, and realizes the safety operation and data management of the semiconductor equipment. A bidirectional data interaction link between an equipment end and a server end is established through a standardized IT protocol, a parameter configuration module, a real-time monitoring interface and a self-adaptive firewall strategy module are integrated, and a complete technical architecture including equipment state detection, remote parameter debugging, operation log recording and data encryption storage is formed; the remote accurate control and state monitoring of the semiconductor equipment can be realized by adopting a remote communication channel constructed based on an IT protocol, setting control software of a multi-level authority verification module and an adaptive firewall strategy module integrated abnormal alarm triggering and data storage analysis system.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing, and in particular to the field of remote control technology for semiconductor equipment, specifically a safe operation and data management system for semiconductor equipment based on remote control. Background Technology

[0002] Currently, semiconductor equipment is a hot topic of competition at the forefront of the market. Data retrieval from the equipment is often necessary, but misoperation can affect its current state. High-temperature equipment also poses safety hazards. Therefore, remote monitoring and operation can effectively improve efficiency and reduce safety risks. Current issues include: 1. If it is impossible to monitor and control the equipment parameters in real time via remote control, it is necessary to establish a remote control system; 2. The PC terminal allows for free control of the equipment, enabling non-technical personnel to directly operate it. Misoperation by cleaning and maintenance personnel during cleaning can cause equipment malfunctions. Summary of the Invention

[0003] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a remote control-based semiconductor device safe operation and data management system to solve the difficulties of the prior art.

[0004] To achieve the above and other related objectives, the present invention provides a remote control-based semiconductor device safe operation and data management system, comprising: The device includes a network interface module, a programmable logic controller, control software, a server, and a data storage unit. Its characteristic is that it establishes a communication connection with the programmable logic controller within the server through a network interface module that extends the device port, thereby constructing a dedicated network channel between the laboratory and the office area. The remote control program is deployed on a PC, has multi-level access control, and establishes a two-way data interaction link with the server through standardized IT protocols. It integrates a parameter configuration module, a real-time monitoring interface, and an adaptive firewall policy module to achieve device status detection, remote parameter debugging, operation log recording, and encrypted data storage.

[0005] According to the preferred embodiment, the remote control program embeds a dynamic permission verification module, which achieves two-way authentication by superimposing a TLS 1.3 tunnel on the TCP / IP three-way handshake with the device-side PLC, and generates a session token using a timestamp, with the token validity period dynamically adjusted within the range of 30 seconds to 300 seconds.

[0006] According to the preferred embodiment, the remote control program includes a multimodal interaction engine, characterized by integrating a virtual reality rendering module through an HMI interface to form a spatial mapping relationship with a 3D laser scanner deployed on-site in the laboratory. Specifically, it performs pixel-level fusion of the device's 3D model and real-time sensor data, generating an augmented reality operation interface on the control terminal. The Kinect skeleton tracking data sent by the operator through the gesture recognition module is converted into a PLC executable instruction set. This conversion process uses a mapping model trained by a neural network. The model input layer contains 21 joint coordinate data, and the output layer corresponds to the PWM control parameters of the device's motion axis. The error compensation module corrects the motion trajectory in real time through feedback data from the laser interferometer.

[0007] According to the preferred embodiment, the adaptive firewall policy module subscribes to device health parameters through OPC UA, alarms the real-time monitoring interface when the device temperature is detected to be too high, dynamically adjusts the port opening rules when the device enters maintenance mode, closes the 485 bus communication port and enables the CANopen tunnel, and the switching process includes heartbeat packet detection, redundant controller takeover and MAC address drift, with a switching delay of no more than 150ms.

[0008] According to the preferred embodiment, the control cabinet at the device end is embedded with an FPGA coprocessor that shares memory with the PLC main control unit via a PCIe 4.0 interface, which is used to realize hardware acceleration of the control algorithm and dynamic logic gate array reconstruction to load the filtering algorithm.

[0009] According to the preferred scheme, the FPGA coprocessor shares memory with the PLC's main control unit through the PCIe 4.0 interface to achieve hardware acceleration of the control algorithm. When a remote debugging request is detected, the FPGA dynamically reconstructs its logic gate array to load the corresponding filtering algorithm. The processed sensor data completes feature extraction locally and is then uploaded to the cloud via a 5G slice network. This architecture reduces data processing latency by 67% and prevents malicious code from the cloud from penetrating the device control layer through a hardware-level isolation mechanism.

[0010] According to the preferred embodiment, the data storage unit adopts a distributed time-series database cluster, establishes a bidirectional data channel with the programmable logic controller through the OPC UA protocol, and triggers data mirroring and incremental backup for 30 seconds before and after the abnormal period when the fluctuation of the device operating parameters is detected to exceed the preset threshold.

[0011] According to the preferred scheme, the distributed time-series database cluster includes a multi-node redundant storage architecture.

[0012] This application provides a remote-controlled semiconductor equipment safety operation and data management system. It achieves communication with a programmable logic controller (PLC) by extending the network interface module of the device port, constructing a dedicated network channel between the laboratory and office areas. Control software with multi-level access control is deployed on the PC. A bidirectional data interaction link between the device and the server is established through standardized IT protocols. Parameter configuration, real-time monitoring, and adaptive firewall policy modules are integrated, forming a complete technical architecture encompassing device status detection, remote parameter adjustment, operation log recording, and encrypted data storage. By employing a remote communication channel based on IT protocols, control software with multi-level access control, and an adaptive firewall policy module, it enables precise remote control and status monitoring of semiconductor equipment, achieving the following beneficial effects: 1. Real-time retrieval and optimization of equipment parameters are achieved through remote control programs, allowing operators to complete commissioning operations without touching high-temperature equipment; 2. The multi-level permission verification mechanism effectively prevents unauthorized operations, and the system's built-in operation instruction review module can automatically intercept abnormal parameter inputs; 3. Construct a distributed data storage architecture to synchronously record device operating status parameters and operation logs, and record abnormal events to facilitate subsequent analysis and improvement; The preferred embodiments of the invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the invention. Attached Figure Description

[0013] Figure 1 shows a flowchart of the system composition and infrastructure, security authentication mechanism and human-computer interaction system in this invention. Figure 2 The diagram shown is a flowchart of the security protection system, hardware acceleration system, and data management system in this invention. Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0015] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this invention may have fewer components, other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0016] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar terms do not necessarily indicate a quantity limitation. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0017] This invention proposes a remote control-based semiconductor equipment safety operation and data management system for use in the design process of remote control of semiconductor equipment. This invention does not limit the type of semiconductor equipment to be controlled.

[0018] This application provides a remote control-based semiconductor equipment safety operation and data management system, characterized by: establishing a communication connection with a programmable logic controller (PLC) through a network interface module that expands the device port, thereby constructing a dedicated network channel between the laboratory and office areas; deploying control software with multi-level access control functionality on the PC, and establishing a bidirectional data interaction link between the device and the server through standardized IT protocols; and integrating a parameter configuration module, a real-time monitoring interface, and an adaptive firewall policy module to form a complete technical architecture that includes device status detection, remote parameter debugging, operation log recording, and encrypted data storage.

[0019] By employing a remote communication channel built on an IT protocol, control software with multi-level access control modules, and an adaptive firewall policy module integrating anomaly alarm triggering and data storage, this application can achieve remote and precise control and status monitoring of semiconductor devices, solving the following technical problems existing in the prior art: 1. Equipment status disturbances and safety hazards caused by on-site operations; 2. Risk of equipment failure caused by misoperation; 3. The scattered storage of equipment operation data leads to difficulties in analysis.

[0020] The aforementioned remote control program is a distributed control architecture based on industrial IoT protocols, including one or more hybrid networking forms of OPC UA, MQTT, and PROFINET protocols. Its key feature is that the control program embeds a dynamic access control module, establishing a two-way authentication mechanism through an encrypted handshake protocol with the device-side PLC. Specifically, a TLS 1.3 tunnel is overlaid on the TCP / IP three-way handshake to achieve certificate chain verification between the device and the PC. The verification module includes a timestamp-based session token generation algorithm, with the token validity period dynamically adjusted from 30 to 300 seconds. Encryption strength is automatically optimized based on network latency fluctuations. When a control command transmission is detected, an AES-256-GCM encryption channel is triggered, and a hardware-level command backtracking log recording function is simultaneously activated.

[0021] The aforementioned remote control program includes a multimodal interaction engine, characterized by integrating a virtual reality rendering module through an HMI interface to form a spatial mapping relationship with a 3D laser scanner deployed on-site in the laboratory. Specifically, it performs pixel-level fusion of the device's 3D model with real-time sensor data, generating an augmented reality operating interface on the control terminal. The Kinect skeletal tracking data sent by the operator through the gesture recognition module is converted into a PLC executable instruction set. This conversion process uses a mapping model trained by a neural network. The model input layer contains coordinate data of 21 joint points, and the output layer corresponds to the PWM control parameters of the device's motion axis. The error compensation module corrects the motion trajectory in real time through feedback data from the laser interferometer.

[0022] The aforementioned remote control program is configured with an adaptive firewall policy module, characterized by dynamically adjusting port opening rules based on the device's operating status. Specifically, it subscribes to device health parameters via OPC UA. When the device is detected to be entering maintenance mode, it automatically closes the 485 bus communication port and simultaneously enables the backup CANopen tunnel. This switching process is accompanied by a control transfer protocol, including a three-stage confirmation mechanism: the first stage sends a heartbeat packet to detect the quality of the main control link; the second stage triggers the redundant controller of the device's PLC to take over; and the third stage performs MAC address drifting to complete the transfer of IP ownership. The entire switching latency is controlled within 150ms to ensure the continuity of device control.

[0023] The aforementioned remote control program integrates edge computing nodes, characterized by deploying a fog computing layer close to the device. Specifically, this involves embedding an FPGA coprocessor within the device control cabinet. This processor shares memory with the PLC's main control unit via a PCIe 4.0 interface, enabling hardware acceleration of the control algorithm. When a remote debugging request is detected, the FPGA dynamically reconstructs its logic gate array to load the corresponding filtering algorithm. The processed sensor data undergoes feature extraction locally before being uploaded to the cloud via a 5G slice network. This architecture reduces data processing latency by 67% and, simultaneously, prevents malicious code from the cloud from penetrating the device control layer through a hardware-level isolation mechanism.

[0024] The aforementioned data storage and analysis is a distributed time-series database cluster, which includes a multi-node redundant storage architecture. Its feature is that it establishes a bidirectional data channel with the equipment control PLC through the OPC UA protocol. When the fluctuation of the equipment operating parameters is detected to exceed the preset threshold, the data block mirroring writing mechanism is automatically triggered to perform incremental backups of the operation logs, sensor data and environmental parameters for 30 seconds before and after the abnormal period.

[0025] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A remote control based semiconductor equipment safe operation and data management system, characterized in that, The device end, network interface module, programmable logic controller, control software, server end and data storage unit are characterized in that the network interface module of the extended device port is connected with the programmable logic controller in the server end to establish a communication connection and build a special network channel between the laboratory and the office area. The remote control program is deployed on the PC end and has a multi-level permission verification function, and establishes a bidirectional data interaction link with the server end through a standardized IT protocol. The integrated parameter configuration module, real-time monitoring interface and adaptive firewall policy module realize device state detection, remote parameter debugging, operation log recording and data encryption storage. The remote control program has a dynamic permission verification module, which realizes bidirectional identity authentication by adding a TLS1.3 tunnel on the TCP / IP three-way handshake with the device end PLC, and generates a session token using a timestamp, with the token validity period dynamically adjusted within the range of 30 seconds to 300 seconds.

2. The remote control based safe operation and data management system for semiconductor equipment as claimed in claim 1, wherein, The remote control program contains a multi-modal interaction engine, which is characterized by integrating a virtual reality rendering module through an HMI interface to form a spatial mapping relationship with a 3D laser scanner deployed on site in the laboratory. Specifically, a three-dimensional model of the device is fused with real-time sensor data at the pixel level to generate an augmented reality operation interface on the control terminal. The Kinect bone tracking data sent by the gesture recognition module is converted into a PLC executable instruction set. The conversion process uses a mapping model trained by a neural network. The model input layer contains 21 joint coordinate data, and the output layer corresponds to the PWM control parameters of the device motion axis. The error compensation module corrects the motion trajectory in real time through laser interferometer feedback data.

3. The remote control based safe operation and data management system for semiconductor equipment as claimed in claim 2, wherein, The adaptive firewall policy module subscribes to the device health parameter through OPC UA, alarms the real-time monitoring interface when detecting that the device temperature is too high, dynamically adjusts the port opening rules when detecting that the device enters the maintenance mode, closes the 485 bus communication port and enables the CANopen tunnel, and the switching process includes heartbeat packet detection, redundant controller takeover and MAC address drift, and the switching delay is not more than 150ms.

4. The remote control based safe operation and data management system for semiconductor equipment as claimed in claim 3, wherein, The FPGA coprocessor in the control cabinet of the device end shares memory with the PLC master control unit through the PCIe 4.0 interface, which is used for hardware acceleration of control algorithms and dynamic logic gate array reconstruction to load filtering algorithms.

5. The remote control based safe operation and data management system for semiconductor equipment as claimed in claim 4, wherein, The data storage unit uses a distributed time series database cluster to establish a bidirectional data channel with the programmable logic controller through the OPC UA protocol, and triggers the writing and incremental backup of data mirror within 30 seconds before and after the abnormal period when detecting that the device operating parameter fluctuation exceeds the preset threshold.

6. The remote control based safe operation and data management system for semiconductor equipment as claimed in claim 5, wherein, ​

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