3D printing nozzles, systems, and low-temperature plasma jet 3D printing apparatus

Abstract

This application relates to the field of additive manufacturing technology, disclosing a 3D printing nozzle, system, and low-temperature plasma jet 3D printing device. The 3D printing nozzle includes: a nozzle body and a plasma generating module; the nozzle body has an aerosol inlet and a plasma gas source inlet; the nozzle body has an aerosol channel and a plasma gas source channel; the plasma generating module includes an inner electrode and an outer electrode, forming a plasma excitation region; gas introduced from the plasma gas source inlet is excited into a plasma jet by the plasma generating module in the plasma excitation region; the aerosol, after passing through the aerosol channel, couples with the plasma jet and is ejected. The advantages of this application are that the 3D printing nozzle can realize the 3D printing of materials such as organic conductive polymers, metal salt solutions, and nanoparticle slurries on flexible substrates, especially those not resistant to high temperatures, with high printing accuracy, high integration, and a compact structure.

Description

Technical Field

[0001] This application relates to the field of additive manufacturing technology, and in particular to a 3D printing nozzle, system, and low-temperature plasma jet 3D printing apparatus. Background Technology

[0002] Traditional inkjet printing and fused deposition modeling 3D printing are often limited by factors such as temperature conditions, solvent evaporation rate, material viscosity and conductivity when processing high-functionality materials such as metal salt solutions, organic conductive polymers and nanoparticle slurries. This makes it difficult to obtain high-precision and high-density structures, and it is also impossible to achieve in-situ chemical reactions (such as reduction, cross-linking or curing) during the printing process, resulting in unstable molding quality and functional performance.

[0003] Low-temperature plasma jet technology can provide controllable high-energy active particles and free radicals at room temperature to activate, solidify, reduce or modify the surface of materials or the area through which they flow, providing a new approach for the rapid solidification, chemical reaction and multiphase interface control of functional materials in 3D printing.

[0004] However, most existing 3D printing nozzles are single aerosol or thermal nozzle structures, leaving a gap in high-precision 3D printing of special materials such as conductive polymers and metal salt solutions. Summary of the Invention

[0005] To address the aforementioned shortcomings of existing technologies, the technical problem to be solved in this application is to propose a 3D printing nozzle, system, and low-temperature plasma jet 3D printing device that can realize 3D printing of materials such as organic conductive polymers, metal salt solutions, and nanoparticle slurries on flexible substrates, especially substrates that are not resistant to high temperatures, with high printing accuracy, high integration, and compact structure.

[0006] The technical solution adopted by this application to solve its technical problem is to propose a 3D printing nozzle, comprising:

[0007] The nozzle body and the plasma generating module disposed on the nozzle body;

[0008] The nozzle body is provided with an aerosol inlet and a plasma gas source inlet;

[0009] The nozzle body is provided with an aerosol channel and a plasma gas source channel, and the aerosol channel is connected to the aerosol inlet, and the plasma gas source channel is connected to the plasma gas source inlet.

[0010] The plasma generating module includes an inner electrode and an outer electrode. The inner electrode is disposed near the inner side of the plasma gas source channel, and the outer electrode is disposed near the outer side of the plasma gas source channel. The outer electrode and the inner electrode together form a plasma excitation region in the plasma gas source channel. Gas introduced from the plasma gas source inlet is excited into a plasma jet by the plasma generating module in the plasma excitation region.

[0011] The aerosol introduced through the aerosol inlet passes through the aerosol channel and is coupled with the plasma jet before being ejected.

[0012] Furthermore, the nozzle body is provided with a sheath gas inlet, and the nozzle body is provided with a sheath gas channel, which is connected to the sheath gas inlet;

[0013] The sheath gas channel is connected to the aerosol channel, and a constraint cavity is formed at the connection. The sheath gas introduced forms a sheath gas layer in the sheath gas channel, and the sheath gas layer can restrict the contact between the aerosol and the inner wall of the constraint cavity.

[0014] Furthermore, the constraint cavity is cone-shaped, and its cross-sectional area gradually decreases from the end near the sheath gas inlet to the end away from the sheath gas inlet;

[0015] The sheath gas introduced into the constraint cavity can refine the aerosol introduced into the constraint cavity;

[0016] The sheath gas layer extends to the end of the aerosol channel.

[0017] Furthermore, the thickness of the sheath gas layer is 0.2 to 1.5 mm, and it has an inclination angle of 10 to 60 degrees from the end near the sheath gas inlet to the end away from the sheath gas inlet.

[0018] Furthermore, the nozzle body includes a connected cylindrical section and a conical section, and the cylindrical section and the conical section are coaxially arranged;

[0019] The aerosol channel is formed along the axial direction of the nozzle body at the center of the nozzle body;

[0020] The sheath gas channel is conical and coaxially arranged with the aerosol channel;

[0021] The plasma gas source channel is conical and coaxially arranged with the aerosol channel.

[0022] Furthermore, the sheath gas channel is disposed close to the cylindrical segment, and the sheath gas channel surrounds the outer periphery of the aerosol channel;

[0023] The plasma gas source channel is located close to the conical section, and the plasma gas source channel surrounds the outer periphery of the aerosol channel, and the outlet of the plasma gas source channel is close to the outlet of the aerosol channel.

[0024] Furthermore, the nozzle body forms an aerosol outlet at the end of the aerosol channel, and the nozzle body forms a plasma jet outlet at the end of the plasma gas source channel;

[0025] The aerosol outlet is flush with the plasma jet outlet; or...

[0026] The aerosol outlet is higher than the plasma jet outlet to prolong the coupling time between the aerosol and the plasma jet; or,

[0027] The aerosol outlet is lower than the plasma jet outlet to shorten the coupling time between the aerosol and the plasma jet.

[0028] Furthermore, one end of the nozzle body is provided with a nozzle, the nozzle including an aerosol nozzle and a plasma jet nozzle, the aerosol outlet is disposed at the aerosol nozzle, and the plasma jet outlet is disposed at the plasma jet nozzle;

[0029] The plasma jet nozzle and the aerosol nozzle are coaxially arranged.

[0030] Furthermore, the plasma jet nozzle has a conical inner wall, the cross-section of which gradually narrows from the end near the plasma gas source inlet to the end away from the plasma gas source inlet at the plasma jet outlet.

[0031] The aerosol spray outlet is located near the plasma jet spray outlet.

[0032] Furthermore, both the inner electrode and the outer electrode are arranged in a conical ring, and the inner electrode and the outer electrode are coaxially arranged.

[0033] Furthermore, the inner electrode includes a first inner electrode and a second inner electrode, and the outer electrode includes a first outer electrode and a second outer electrode. The first outer electrode corresponds to the first inner electrode, and the second outer electrode corresponds to the second inner electrode. The second inner electrode and the second outer electrode are close to the plasma jet outlet.

[0034] The first inner electrode is configured to connect to a first high voltage, and the second inner electrode is configured to connect to a second high voltage, wherein the voltage of the first high voltage is higher than the voltage of the second high voltage.

[0035] This application also proposes a 3D printing nozzle system, comprising:

[0036] The aforementioned 3D printing nozzle;

[0037] A connector is provided at one end of the nozzle body. The connector has a mixing chamber and is connected to the aerosol inlet. The mixing chamber is configured to mix aerosols of various materials.

[0038] Furthermore, it also includes a baffle, which is movably disposed at the nozzle outlet of the nozzle body for controlling the opening and closing of the nozzle outlet.

[0039] Furthermore, it also includes a control module and an in-situ observation module. The in-situ observation module includes an optical observation window and a high-speed camera. The in-situ observation module is used to monitor the jet morphology and deposition state of the nozzle body's nozzle outlet and form a closed-loop feedback with the control module to adjust the printing parameters.

[0040] The printing parameters include one or more of the following: flow rate, voltage, frequency, power, and motion trajectory.

[0041] This application also proposes a low-temperature plasma jet 3D printing apparatus, comprising:

[0042] The aforementioned 3D printing nozzle;

[0043] An aerosol atomization system is used to atomize one or more functional materials into an aerosol and deliver it to the 3D printing nozzle;

[0044] The plasma power supply and plasma gas source are provided, wherein the plasma power supply is electrically connected to the plasma generating module, and the plasma gas source is connected to the plasma gas source inlet.

[0045] The printing platform is located below the 3D printing nozzle.

[0046] Furthermore, the aerosol atomization system includes a gas cylinder, a gas flow controller, and multiple atomizers, which are used to atomize various materials and deliver them to the 3D printing nozzle.

[0047] Furthermore, it also includes a motion controller;

[0048] The printing platform is configured as a movable platform, and the motion controller is used to control the printing platform and the 3D printing nozzle; or...

[0049] The 3D printing nozzle is mounted on the robotic arm, and the motion controller is used to control the robotic arm and the 3D printing nozzle.

[0050] Compared with the prior art, this application has at least the following beneficial effects:

[0051] In this application, an aerosol channel and a plasma gas source channel are set in the nozzle body of the 3D printing nozzle, and a plasma generation module is integrated on the nozzle body. The inner and outer electrodes of the plasma generation module form a plasma excitation region in the plasma gas source channel. When a low-temperature plasma source is introduced into the plasma gas source inlet, it will be excited by the plasma generation module in the plasma excitation region to form a low-temperature plasma jet. The aerosol introduced from the aerosol inlet will pass through the aerosol channel and couple with the low-temperature plasma jet to achieve in-situ reaction and deposition. That is, it generates a stable low-temperature plasma jet at low temperature (e.g., room temperature) and normal pressure. Through the synchronous supply of materials and energy (precise coupling of aerosol and low-temperature plasma), in-situ solidification, reduction, or surface modification and shaping of materials are achieved. The materials are activated, reduced, cross-linked, or solidified by plasma during deposition. It deeply integrates low-temperature plasma jet with aerosol printing, which greatly improves the 3D printing capability, printing efficiency and functionality. It is applicable to the printing of various functional materials such as organic conductive polymers, metal salt solutions, and nanoparticle slurries. It can be widely used in high-precision and functional 3D printing in many fields such as flexible electronic devices, brain-computer interfaces, bioelectrodes, functional coatings and microstructure devices. Moreover, the overall structure is compact and highly integrated.

[0052] In this application, the nozzle body is also equipped with a sheath gas inlet and a sheath gas channel connected thereto. The sheath gas channel forms a confinement cavity at the connection with the aerosol channel. After sheath gas is introduced, a sheath gas layer is formed inside the confinement cavity. This sheath gas layer can prevent the aerosol from contacting the inner wall of the confinement cavity and avoid aerosol adhesion. The sheath gas layer extends all the way to the end of the aerosol channel, which can effectively ensure the stability and controllability of the aerosol and ensure smooth delivery.

[0053] The constraint cavity is designed in a conical shape. The sheath gas introduced into the constraint cavity can also constrain the aerosol, further refining the aerosol and improving printing accuracy and quality.

[0054] In this application, the aerosol channel is located at the center of the nozzle body, and the sheath gas channel and plasma gas source channel are both conical, surrounding the outer periphery of the aerosol channel and coaxially arranged with the aerosol channel, ensuring the compact structure of the 3D printing nozzle. At the same time, it also facilitates the formation of finer aerosols and coupling with the generated low-temperature plasma jet.

[0055] In this application, the relative heights of the aerosol nozzle and the plasma jet nozzle can be selected according to actual needs. When the coupling time required for the printing material is long, the aerosol nozzle height is controlled to be higher than the plasma jet nozzle height. This results in coupling between the aerosol and the low-temperature plasma jet within the nozzle, extending the coupling path and increasing the coupling time. Conversely, when the coupling time required for the printing material is short, the aerosol nozzle height is controlled to be lower than the plasma jet nozzle height. This ensures that coupling between the aerosol and the low-temperature plasma jet occurs below the nozzle, shortening the coupling path and reducing the coupling time.

[0056] In this application, the inner electrode and the outer electrode can be set as one group, or they can be set as two groups, one above the other. That is, the first inner electrode is set in correspondence with the first outer electrode, and the second inner electrode is set in correspondence with the second outer electrode. A higher voltage can be applied to the first inner electrode which is farther away from the nozzle, while a lower voltage can be applied to the second inner electrode which is closer to the nozzle. This ensures that a stable low-temperature plasma jet can be generated, while also ensuring that the substrate below the nozzle is not damaged, thus ensuring the printing quality.

[0057] In this application, the 3D printing nozzle system also includes a connector disposed in the 3D printing nozzle. The mixing chamber in the connector can be used to mix aerosols of various materials. After physical and / or chemical reactions occur in the mixing chamber, the mixture is then delivered to the 3D printing nozzle, thereby realizing the printing of multiple materials. Furthermore, through the cooperation of the control module and the in-situ observation module, the nozzle jet morphology and deposition state are monitored, and the printing parameters are fed back and adjusted to ensure the printing quality.

[0058] In this application, the low-temperature plasma jet 3D printing device can atomize multifunctional materials to form aerosols through an aerosol atomization system; a stable low-temperature plasma jet can be formed through a plasma power supply, a plasma gas source, and a plasma generation module in the 3D printing nozzle; the low-temperature plasma jet and the aerosol can be coupled through the 3D printing nozzle; and the printing process can be parametrically controlled by various controllers to ensure that high-precision 3D printing is carried out in an orderly manner. Attached Figure Description

[0059] Figure 1 This is a schematic diagram of the structure of the 3D printing nozzle in Embodiment 1 of this application.

[0060] Figure 2 for Figure 1 A structural diagram from another perspective.

[0061] Figure 3 This is a half-sectional view of the 3D printing nozzle in Embodiment 1 of this application.

[0062] Figure 4 for Figure 3A schematic diagram showing the aerosol jet outlet being higher than the plasma jet outlet.

[0063] Figure 5 for Figure 3 A schematic diagram showing the aerosol jet outlet being lower than the plasma jet outlet.

[0064] Figure 6 This is a schematic diagram of different configurations of the aerosol nozzle in Example 1.

[0065] Figure 7 This is a schematic diagram of different configurations of the plasma jet nozzle in Example 1.

[0066] Figure 8 This is a schematic diagram of two sets of inner and outer electrodes installed on the plasma jet nozzle in Example 1.

[0067] Figure 9 This is a partial structural schematic diagram of the 3D printing system in Embodiment 2 of this application.

[0068] Figure 10 This is a schematic diagram of the 3D printing device in Embodiment 3 of this application.

[0069] In the picture:

[0070] 1. Nozzle body; 1A. Cylindrical section; 1B. Conical section; 10. Nozzle; 10A. Aerosol nozzle; 10B. Plasma jet nozzle; 100. Sheath gas; 101. Conical inner wall; 11. Aerosol inlet; 110. Aerosol channel; 111. Aerosol outlet; 12. Plasma gas source inlet; 120. Plasma gas source channel; 120A. Plasma excitation zone; 121. Plasma jet outlet; 13. Sheath gas inlet; 130. Sheath gas channel; 130A. Sheath gas layer; 140. Confinement cavity; 150. Wiring channel;

[0071] 2. Plasma generating module; 21. Inner electrode; 21A. First inner electrode; 21B. Second inner electrode; 22. Outer electrode; 22A. First outer electrode; 22B. Second outer electrode;

[0072] 3. Connector; 30. Mixing chamber;

[0073] 4. Baffle;

[0074] 5. In-situ observation module;

[0075] 60. Gas cylinder; 61. Gas flow controller; 62. Nebulizer; 63. Aerosol;

[0076] 70. Plasma power source; 71. Plasma gas source;

[0077] 8. Printing platform;

[0078] 9. Control system. Detailed Implementation

[0079] The following are specific embodiments of this application, which are described in conjunction with the accompanying drawings to further illustrate the technical solutions of this application. However, this application is not limited to these embodiments.

[0080] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0081] Furthermore, the use of terms such as "first," "second," and "a" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0082] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0083] Furthermore, the technical solutions of the various embodiments of this application can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by this application.

[0084] Example 1:

[0085] like Figures 1-3 And refer to Figure 10 As shown, the 3D printing nozzle in this embodiment is a low-temperature plasma jet 3D printing nozzle, which mainly includes: a nozzle body 1 and a plasma generating module 2 disposed on the nozzle body 1. Specifically:

[0086] The printhead body 1 has a nozzle 10, which is located at one end of the printhead body 1. The printhead body 1 is provided with an aerosol inlet 11 and a plasma gas source inlet 12. The aerosol inlet 11 is used to allow the aerosol 63 of the printing material to be introduced, and the plasma gas source inlet 12 is used to allow the plasma gas source 71 to be introduced.

[0087] The printhead body 1 is provided with an aerosol channel 110 and a plasma gas source channel 120, and the aerosol channel 110 is connected to the aerosol inlet 11, and the plasma gas source channel 120 is connected to the plasma gas source inlet 12. The aerosol 63 of the printing material is introduced from the aerosol inlet 11 and flows through the aerosol channel 110 through the printhead body 1. The plasma gas source 71 is introduced from the plasma gas source inlet 12 and flows through the plasma gas source channel 120 through the printhead body 1. The plasma gas source 71 is excited into a plasma jet during its passage through the printhead body 1. It can be understood that in this embodiment, the plasma jet is generated under low temperature (e.g., room temperature) and normal pressure conditions, so it is a low temperature plasma jet.

[0088] The plasma generating module 2 includes an inner electrode 21 and an outer electrode 22. The inner electrode 21 is disposed near the inner side of the plasma gas source channel 120, and the outer electrode 22 is disposed near the outer side of the plasma gas source channel 120. It can be understood that, from the perspective of their placement positions, the inner electrode 21 is located inside the outer electrode 22, hence it is called the inner electrode 21, and the outer electrode 22 is located outside the inner electrode 21, hence it is called the outer electrode 22. Preferably, in this embodiment, the inner electrode 21 is disposed inside the nozzle body 1, and the outer electrode 22 is disposed on the outer surface of the nozzle body 1. The outer electrode 22 and the inner electrode 21 together form a plasma excitation region 120A in the plasma gas source channel 120. Figure 3 In the diagram, the approximate location of the plasma excitation zone 120A is marked by a dashed line. Of course, this dashed line does not exist in the actual product. In actual use, the gas introduced from the plasma gas source inlet 12 is excited into a plasma jet by the plasma generation module 2 in the plasma excitation zone 120A. The aerosol 63 introduced from the aerosol inlet 11, after passing through the aerosol channel 110, couples with the plasma jet and interacts with it, and is ejected from the nozzle 10. It can be understood that whether the aerosol 63 couples with the plasma jet in the nozzle body 1 or outside the nozzle, it is ultimately ejected from the nozzle 10.

[0089] It should be explained that the plasma gas source 71 can be selected from helium, argon, oxygen, a mixture of helium and argon, and other gases capable of generating low-temperature plasma, and its flow rate can be set to 600~3000 SCCM. When the plasma gas source 71 passes through the plasma excitation region 120A (i.e., between the inner electrode 21 and the outer electrode 22), the inner electrode 21 and the outer electrode 22 discharge, and the high-frequency voltage ionizes the gas, exciting it into a plasma jet.

[0090] In this embodiment, an aerosol channel 110 and a plasma gas source channel 120 are provided in the nozzle body 1 of the 3D printing nozzle, and a plasma generation module 2 is integrated on the nozzle body 1. The inner electrode 21 and outer electrode 22 of the plasma generation module 2 form a plasma excitation region 120A in the plasma gas source channel 120. When a low-temperature plasma gas source 71 is introduced into the plasma gas source inlet 12, it will be excited by the plasma generation module 2 in the plasma excitation region 120A to form a low-temperature plasma jet. The aerosol 63 introduced from the aerosol inlet 11 will pass through the aerosol channel 110 and couple with the low-temperature plasma jet to achieve in-situ reaction and deposition. That is, it generates a stable low-temperature plasma jet at low temperature (such as room temperature, without damaging the printing material and printing substrate) and normal pressure. Through the synchronous supply of material and energy (precise coupling of aerosol 63 and low-temperature plasma), in-situ solidification, reduction or surface modification and shaping of the material is achieved. The material is activated, reduced, cross-linked or solidified by plasma during deposition. It integrates low-temperature plasma jet with aerosol 63 printing, greatly improving 3D printing capabilities, efficiency, and functionality. It is applicable to printing various functional materials such as organic conductive polymers, metal salt solutions, and nanoparticle slurries. It can be widely used in high-precision, functional 3D printing of flexible electronic devices, brain-computer interfaces, bioelectrodes, functional coatings, and microstructure devices. The overall structure is compact and highly integrated.

[0091] The nozzle body 1 of this embodiment is also provided with a sheath gas inlet 13, which allows sheath gas 100 to pass through. The nozzle body 1 is also provided with a sheath gas channel 130, which is connected to the sheath gas inlet 13. The sheath gas 100 enters the sheath gas channel 130 through the sheath gas inlet 13. The sheath gas channel 130 is connected to the aerosol channel 110, and a constraint cavity 140 is formed at the connection. The sheath gas 100 forms a sheath gas layer 130A in the sheath gas channel 130. The sheath gas layer 130A can restrict the contact between the aerosol 63 and the inner wall of the constraint cavity 140, that is, the sheath gas layer 130A constrains the aerosol 63 at the constraint cavity 140.

[0092] Furthermore, referring to Figure 3The setting direction is the direction of the 3D printing nozzle when it is working. The constraint cavity 140 is cone-shaped and its cross-sectional area gradually decreases from top to bottom. The sheath gas 100 introduced into the constraint cavity 140 can refine the aerosol 63 introduced into the constraint cavity 140. Furthermore, the sheath gas layer 130A extends all the way to the end of the aerosol channel 110 to ensure the constraint effect of the sheath gas layer 130A on the aerosol 63, thereby ensuring the printing quality.

[0093] It should be explained that in the constraint cavity 140, the sheath gas 100 is introduced to form a sheath gas layer 130A, which constrains the aerosol 63. This prevents the aerosol 63 from contacting the inner wall of the constraint cavity 140, thus preventing the aerosol 63 from contacting the inner wall of the printhead body 1 during printing. This avoids adhesion, blockage, or wall-hanging, ensuring the stability and controllability of the aerosol 63 and smooth delivery. Furthermore, the constraint cavity 140 is cone-shaped, which further focuses the aerosol 63 to prevent it from diffusing, thus refining the aerosol 63 and effectively improving printing accuracy and quality.

[0094] The sheath gas layer 130A has a thickness of 0.2~1.5 mm (the width of the sheath gas channel 130 can also be set to 0.2 to 1.5 mm), and it has an inclination angle of 10~60 degrees from top to bottom. That is, the sheath gas layer 130A formed in the constraint cavity 140 is also roughly conical. For example, the thickness of the sheath gas layer 130A can be set to 0.8 mm, and the inclination angle can be set to 20 degrees. This ensures the stability and controllability of the aerosol 63 while constraining the aerosol 63. The flow rate of the sheath gas 100 is 200~1000 SCCM. Generally, the specific type of sheath gas 100 is selected according to the type of printing material. Generally, the sheath gas 100 is required to have a certain degree of chemical inertness, not react with the printing material, and have good flow properties. Common sheath gases 100 include nitrogen, argon, and helium.

[0095] like Figures 2-5As shown, the nozzle body 1 includes a connected cylindrical section 1A and a conical section 1B, which are coaxially arranged. The nozzle 10 is located in the conical section 1B. The cylindrical section 1A and the conical section 1B can be integrated or separate. The aerosol channel 110 is opened along the axial direction of the nozzle body 1 at the center of the nozzle body 1. The sheath gas channel 130 is conical and coaxially arranged with the aerosol channel 110. The sheath gas channel 130 surrounds the outer periphery of the aerosol channel 110, that is, the aerosol channel 110 passes through the cone apex of the sheath gas channel 130, which facilitates the sheath gas 100 to focus the aerosol 63. The plasma gas source channel 120 is conical and coaxially arranged with the aerosol channel 110. The plasma gas source channel 120 is located below the sheath gas channel 130 and surrounds the outer periphery of the aerosol channel 110. The outlet of the plasma gas source channel 120 is close to the outlet of the aerosol channel 110. Similarly, the aerosol channel 110 passes through the conical apex of the plasma gas source channel 120, facilitating the focusing of the low-temperature plasma jet onto the aerosol 63. Essentially, after the sheath gas layer 130A focuses the aerosol 63 once in the confinement cavity 140, the low-temperature plasma jet focuses the aerosol 63 a second time at the aerosol outlet 111, ensuring printing quality and improving printing accuracy. In this embodiment, the thickness of the low-temperature plasma gas layer formed at the end of the plasma gas source channel 120 is 0.5~3 mm.

[0096] In this embodiment, both the sheath gas channel 130 and the plasma gas source channel 120 are conical, surrounding the outer periphery of the aerosol channel 110 and coaxially arranged with the aerosol channel 110, ensuring the compact structure of the 3D printing nozzle. At the same time, it also facilitates the formation of a finer aerosol 63 and coupling with the generated low-temperature plasma jet.

[0097] The nozzle body 1 forms an aerosol outlet 111 at the end of the aerosol channel 110 and a plasma jet outlet 121 at the end of the plasma gas source channel 120. Specifically, the nozzle 10 includes an aerosol nozzle 10A and a plasma jet nozzle 10B. The plasma jet nozzle 10B and the aerosol nozzle 10A are coaxially arranged, which means that the two are coaxially positioned and centered inside the 3D printing nozzle. The aerosol outlet 111 is located at the aerosol nozzle 10A, and the plasma jet outlet 121 is located at the plasma jet nozzle 10B. The aerosol 63 flows through the nozzle body 1 and is finally ejected from the aerosol outlet 111 of the aerosol 63 nozzle. The low-temperature plasma jet is finally ejected from the plasma jet outlet 121 of the plasma jet nozzle 10B.

[0098] like Figure 3As shown, as an optional method in this embodiment, the aerosol outlet 111 is flush with the plasma jet outlet 121, and the aerosol 63 ejected from the aerosol outlet 111 is coupled with the low-temperature plasma ejected from the plasma jet outlet 121 at the nozzle 10.

[0099] like Figure 4 As shown, as another optional method in this embodiment, the aerosol outlet 111 is higher than the plasma jet outlet 121, that is, the height of the aerosol outlet 111 is higher than the height of the plasma jet outlet. In this way, the aerosol 63 ejected from the aerosol outlet 111 will couple with the low-temperature plasma jet in the plasma jet nozzle, which is equivalent to lengthening the coupling path and prolonging the coupling time between the aerosol 63 and the plasma jet.

[0100] like Figure 5 As shown, as another optional method in this embodiment, the aerosol nozzle 111 is lower than the plasma jet nozzle 121, that is, the height of the aerosol nozzle 111 is lower than the height of the plasma jet nozzle. In this way, the aerosol 63 ejected from the aerosol nozzle 111 will couple with the low-temperature plasma jet below the plasma jet nozzle, which is equivalent to shortening the coupling path and shortening the coupling time between the aerosol 63 and the plasma jet.

[0101] In practical use, the relative height of the aerosol nozzle 111 and the plasma jet nozzle 121 can be selected according to actual needs in this embodiment. When the coupling time required for the printing material is long, the height of the aerosol nozzle 111 is controlled to be higher than that of the plasma jet nozzle 121. In this case, coupling of aerosol 63 and low-temperature plasma jet will occur in the nozzle 10, extending the coupling path and increasing the coupling time. When the coupling time required for the printing material is short, the height of the aerosol nozzle 111 is controlled to be lower than that of the plasma jet nozzle 121. In this case, coupling of aerosol 63 and low-temperature plasma jet will occur below the nozzle 10, shortening the coupling path and reducing the coupling time.

[0102] The plasma jet nozzle 10B has a conical inner wall 101. The cross-section of the conical inner wall 101 gradually shrinks from top to bottom to the plasma jet outlet 121. The aerosol outlet 111 is located close to the plasma jet outlet 121 to ensure that the ejected aerosol 63 and the ejected low-temperature plasma jet can be coupled in time.

[0103] like Figure 6 As shown, in this embodiment, the aerosol nozzle 10A can be configured as a dropper nozzle, a segmented nozzle, or other forms that can achieve aerosol 63 focusing. The type of nozzle can be selected according to the characteristics of the actual printing material, and will not be described in detail here.

[0104] Similarly, the plasma jet nozzle 10B can be configured as a dropper type, a segmented type, or other types that can achieve low-temperature plasma focusing. The appropriate type can be selected based on the actual printing scenario, and will not be elaborated further here.

[0105] like Figure 7 and combined Figure 1 As shown, in a preferred embodiment, both the inner electrode 21 and the outer electrode 22 are arranged in a conical ring shape and are coaxially aligned. This facilitates fixing the inner electrode 21 and the outer electrode 22 within the nozzle body 1 and also helps generate a uniform low-temperature plasma jet at the end of the conical plasma gas source channel 120. In this embodiment, the inner electrode 21 and the outer electrode 22 are set as conical copper rings with a width of 5-20 mm. The distance between the inner electrode 21 and the nozzle is 2-20 mm, and the distance between the outer electrode 22 and the nozzle is 2-20 mm.

[0106] Furthermore, both the inner electrode 21 and the outer electrode 22 can be fixed to the nozzle body 1 by insulating supports. Their positions can be selected as needed, and their number and spacing can be adjusted accordingly. The inner electrode 21 and the outer electrode 22 can adopt coaxial cylindrical, needle-plate, surface discharge, or other dielectric barrier discharge methods suitable for generating low-temperature plasma at normal temperature and pressure. The electrode material can be conductive materials such as copper, nickel, and iron. A wiring channel 150 is provided in the nozzle body 1 to facilitate the connection of the inner electrode 21 to power.

[0107] like Figure 8 As shown, in this embodiment, the inner electrode 21 and outer electrode 22 can be configured as one set, or even two or more sets. In a preferred embodiment, the inner electrode 21 includes a first inner electrode 21A and a second inner electrode 21B, and the outer electrode 22 includes a first outer electrode 22A and a second outer electrode 22B. The first outer electrode 22A corresponds to the first inner electrode 21A, and the second outer electrode 22B corresponds to the second inner electrode 21B. That is, the inner electrode 21 and outer electrode 22 are configured as two sets. The second inner electrode 21B and the second outer electrode 22B are close to the nozzle 10, while the first inner electrode 21A and the first outer electrode 22A are farther from the nozzle 10. In actual use, the first inner electrode 21A is configured to connect to a first high-voltage current, and the second inner electrode 21B is configured to connect to a second high-voltage current, with the voltage of the first high-voltage current being higher than the voltage of the second high-voltage current.

[0108] In actual use, a higher voltage is applied to the first inner electrode 21A, which is farther away from the nozzle 10, while a lower voltage is applied to the second inner electrode 21B, which is closer to the nozzle 10. This ensures that a stable low-temperature plasma jet can be generated, while also ensuring that the substrate below the nozzle 10 is not damaged (the nozzle 10 is very close to the substrate during the printing process), thus ensuring the quality of the printed product.

[0109] In this embodiment, the components in the 3D printing nozzle can be manufactured in an integrated manner from powder to assembly through photopolymerization, selective laser melting, or other additive manufacturing processes.

[0110] This 3D printing nozzle can realize the two-dimensional and three-dimensional printing of materials such as organic conductive polymers, metal salt solutions, and nanoparticle slurries on flexible substrates, especially those that are not resistant to high temperatures, to achieve the fabrication of components such as two-dimensional flexible circuits and three-dimensional flexible electrodes.

[0111] Example 2:

[0112] like Figure 9 And refer to Figure 10 As shown, the 3D printing nozzle system of this embodiment mainly includes:

[0113] The 3D printing nozzle in Example 1;

[0114] The connector 3 is located on the nozzle body 1 at one end away from the nozzle 10. The connector 3 has a mixing chamber 30 and is connected to the aerosol inlet 11. The mixing chamber 30 is configured to mix aerosols 63 of various materials.

[0115] Specifically, in this embodiment, the mixing chamber 30 is configured as a coaxial confluence mixing chamber 30, and the connector 3 is provided with multiple aerosol 63 inlet pipes. All multiple pipes lead to the mixing chamber 30. Multiple aerosols 63 of different materials realize the physical and / or chemical reactions of various materials in the mixing chamber 30, and are finally delivered to the 3D printing nozzle, so that the printing system can be used to print different materials.

[0116] Furthermore, the 3D printing nozzle system in this embodiment also includes a baffle 4, which is movably disposed at the nozzle 10 to control the opening and closing of the nozzle 10, i.e., to control the opening and closing of the nozzle outlet of the 3D printing nozzle. Specifically, the rapid start and stop of material ejection during the printing process can be achieved by an electrically controlled switch (millisecond-level response) to prevent material retention or dripping. The baffle 4 is made of polymer material and is linked with a pneumatic or electric micro-actuator to achieve a millisecond-level response, thereby significantly improving the stability and accuracy during the printing process.

[0117] Furthermore, the 3D printing nozzle system in this embodiment also includes a control module and an in-situ observation module 5. The control module is part of the control system 9. The in-situ observation module 5 includes an optical observation window and a high-speed camera. The in-situ observation module 5 is used to monitor the jet morphology and deposition state of the nozzle 10 and forms a closed-loop feedback with the control module to adjust the printing parameters. The printing parameters include flow rate, voltage, frequency, power, and motion trajectory, etc., to ensure printing quality and consistency. When the power supply connected to the plasma generation module 2 is an RF power supply, its power needs to be controlled. When the power supply connected to the plasma generation module 2 is a DC power supply or a high-frequency AC power supply, its voltage and power need to be controlled.

[0118] Example 3:

[0119] like Figure 10 As shown, the low-temperature plasma jet 3D printing apparatus of this embodiment mainly includes:

[0120] The 3D printing nozzle in Example 1 mainly functions to couple the aerosol 63 of the printing material and the low-temperature plasma jet. The number of nozzles can be one, two, or more.

[0121] An aerosol atomization system is used to atomize one or more functional materials into aerosol 63 and deliver it to the 3D printing nozzle; both sheath gas 100 and aerosol 63 are supplied via carrier gas input and carrier gas output.

[0122] The plasma power supply 70 and plasma gas source 71 are electrically connected to the plasma generating module 2 and supply power to it. The plasma gas source 71 is connected to the plasma gas source inlet 12 and supplies it with gas. The plasma power supply 70, plasma gas source 71 and plasma generating module 2 form a low-temperature plasma generation system, which can provide a low-temperature plasma jet to the spray area of ​​the 3D printing nozzle at room temperature. The plasma power supply 70 can be selected from radio frequency power supply, high-frequency AC power supply or DC power supply, etc.

[0123] The printing platform 8 is located below the 3D printing nozzle, and the substrate is placed on the printing platform 8.

[0124] The aerosol atomization system includes a gas cylinder 60, a gas flow controller 61, and multiple atomizers 62. The multiple atomizers 62 are used to atomize various materials and deliver them to the 3D printing nozzle. The atomization methods of the atomizers 62 include ultrasonic atomization and pneumatic atomization, and the particle size of the aerosol 63 particles is 1 to 5 micrometers.

[0125] Furthermore, the 3D printing device in this embodiment also includes a motion controller (not shown in the figure), wherein the printing platform 8 is configured as a movable platform, such as a high-precision three-axis motion platform, and the motion controller is used to control the printing platform 8 and the 3D printing nozzle, and can control the movement of the 3D printing nozzle in three-dimensional space.

[0126] Of course, the printing platform 8 in this embodiment can also be set as a fixed platform, and the 3D printing nozzle can be set on the robot arm. The movement of the robot arm can be controlled by the motion controller, thereby controlling the movement of the 3D printing nozzle in three-dimensional space.

[0127] The 3D printing device also includes a gas flow controller 61, which is mainly used to precisely regulate the flow rates of carrier gas, sheath gas 100 and plasma gas.

[0128] The control module, motion controller, and gas flow controller 61 are part of the control system 9, which can coordinate the subsystems and realize parameterized control of the printing process.

[0129] The low-temperature plasma jet 3D printing device of this embodiment can atomize multifunctional materials to form aerosol 63 through the atomization system of aerosol 63; a stable low-temperature plasma jet can be formed through the plasma power supply 70, plasma gas source 71 and plasma generation module 2 in the 3D printing nozzle; the coupling of low-temperature plasma jet and aerosol 63 can be achieved through the 3D printing nozzle; and the parameterized control of the printing process can be achieved by coordinating the subsystems through the controllers, so as to ensure that high-precision 3D printing is carried out in an orderly manner.

[0130] This 3D printing device organically integrates an aerosol atomization system, a low-temperature plasma generation system, and a 3D printing nozzle, enabling in-situ reaction, deposition, and curing of multi-material aerosols at room temperature. This significantly improves the accuracy and functionalization capabilities of 3D printing. It addresses the problem in existing technologies where aerosol printing and low-temperature plasma processing are typically performed separately, making it impossible to simultaneously achieve material atomization, shaping, and functionalization during the printing process. This results in low forming accuracy, poor structural controllability, and insufficient functional integration.

Claims

1. A 3D printing nozzle, characterized in that, include: The nozzle body (1) and the plasma generating module (2) disposed on the nozzle body (1); The nozzle body (1) is provided with an aerosol inlet (11) and a plasma gas source inlet (12); The nozzle body (1) is provided with an aerosol channel (110) and a plasma gas source channel (120), and the aerosol channel (110) is connected to the aerosol inlet (11), and the plasma gas source channel (120) is connected to the plasma gas source inlet (12). The nozzle body (1) is provided with a sheath gas inlet (13), and the nozzle body (1) is provided with a sheath gas channel (130), which is connected to the sheath gas inlet (13); The plasma generating module (2) includes an inner electrode (21) and an outer electrode (22). The inner electrode (21) and the outer electrode (22) are coaxially arranged. The inner electrode (21) is located near the inner side of the plasma gas source channel (120), and the outer electrode (22) is located near the outer side of the plasma gas source channel (120). The outer electrode (22) and the inner electrode (21) together form a plasma excitation region (120A) in the plasma gas source channel (120). The gas introduced from the plasma gas source inlet (12) is excited into a plasma jet by the plasma generating module (2) in the plasma excitation region (120A). The aerosol introduced through the aerosol inlet (11) is coupled with the plasma jet and ejected after passing through the aerosol channel (110); The nozzle body (1) includes a connected cylindrical section (1A) and a conical section (1B), and the cylindrical section (1A) and the conical section (1B) are coaxially arranged; the aerosol channel (110) is opened at the center of the nozzle body (1) along the axial direction of the nozzle body (1); the sheath gas channel (130) is conical and coaxially arranged with the aerosol channel (110); the plasma gas source channel (120) is conical and coaxially arranged with the aerosol channel (110); The sheath gas channel (130) is located near the cylindrical section (1A) and surrounds the outer periphery of the aerosol channel (110); the plasma gas source channel (120) is located near the conical section (1B) and surrounds the outer periphery of the aerosol channel (110). The inner electrode (21) includes a first inner electrode (21A) and a second inner electrode (21B), and the outer electrode (22) includes a first outer electrode (22A) and a second outer electrode (22B). The first outer electrode (22A) corresponds to the first inner electrode (21A), and the second outer electrode (22B) corresponds to the second inner electrode (21B). The second inner electrode (21B) and the second outer electrode (22B) are close to the plasma jet outlet. The first inner electrode (21A) is configured to connect to a first high voltage, and the second inner electrode (21B) is configured to connect to a second high voltage, wherein the voltage of the first high voltage is higher than the voltage of the second high voltage.

2. The 3D printing nozzle according to claim 1, characterized in that, The sheath gas channel (130) is connected to the aerosol channel (110), and a constraint cavity (140) is formed at the connection. The sheath gas introduced forms a sheath gas layer (130A) in the sheath gas channel (130), and the sheath gas layer (130A) can restrict the contact between the aerosol and the inner wall of the constraint cavity (140).

3. The 3D printing nozzle according to claim 2, characterized in that, The constraint cavity (140) is cone-shaped, and its cross-sectional area gradually decreases from the end near the sheath gas inlet (13) to the end away from the sheath gas inlet (13); The sheath gas introduced into the constraint cavity (140) can refine the aerosol introduced into the constraint cavity (140); The sheath gas layer (130A) extends to the end of the aerosol channel (110).

4. The 3D printing nozzle according to claim 2 or 3, characterized in that, The thickness of the sheath gas layer (130A) is 0.2 to 1.5 mm, and it has an inclination angle of 10 to 60 degrees from the end near the sheath gas inlet (13) to the end away from the sheath gas inlet (13).

5. The 3D printing nozzle according to claim 1, characterized in that, The outlet of the plasma gas source channel (120) is close to the outlet of the aerosol channel (110).

6. The 3D printing nozzle according to claim 1, characterized in that, The nozzle body (1) forms an aerosol outlet (111) at the end of the aerosol channel (110), and the nozzle body (1) forms a plasma jet outlet (121) at the end of the plasma gas source channel (120). The aerosol outlet (111) is flush with the plasma jet outlet (121); or, The aerosol outlet (111) is higher than the plasma jet outlet (121) to prolong the coupling time between the aerosol and the plasma jet; or, The aerosol outlet (111) is lower than the plasma jet outlet (121) to shorten the coupling time between the aerosol and the plasma jet.

7. The 3D printing nozzle according to claim 6, characterized in that, The nozzle body (1) is provided with a nozzle (10) at one end. The nozzle (10) includes an aerosol nozzle (10A) and a plasma jet nozzle (10B). The aerosol outlet (111) is provided at the aerosol nozzle (10A), and the plasma jet outlet (121) is provided at the plasma jet nozzle (10B). The plasma jet nozzle (10B) and the aerosol nozzle (10A) are arranged coaxially.

8. The 3D printing nozzle according to claim 7, characterized in that, The plasma jet nozzle (10B) has a conical inner wall (101), the cross-section of which gradually narrows from one end near the plasma gas source inlet (12) to the end away from the plasma gas source inlet (12) at the plasma jet outlet (121). The aerosol outlet (111) is located near the plasma jet outlet (121).

9. The 3D printing nozzle according to claim 1, characterized in that, Both the inner electrode (21) and the outer electrode (22) are arranged in a conical ring.

10. A 3D printing nozzle system, characterized in that, include: The 3D printing nozzle as described in any one of claims 1-9; A connector (3) is provided at one end of the nozzle body (1). The connector (3) has a mixing chamber (30) and the mixing chamber (30) is connected to the aerosol inlet (11). The mixing chamber (30) is configured to mix aerosols of various materials.

11. The 3D printing nozzle system according to claim 10, characterized in that, It also includes a baffle (4), which is movably disposed at the nozzle body (1) nozzle outlet for controlling the opening and closing of the nozzle outlet.

12. The 3D printing nozzle system according to claim 10, characterized in that, It also includes a control module and an in-situ observation module (5). The in-situ observation module (5) includes an optical observation window and a high-speed camera. The in-situ observation module (5) is used to monitor the jet morphology and deposition state of the nozzle body (1) and form a closed-loop feedback with the control module to adjust the printing parameters. The printing parameters include one or more of the following: flow rate, voltage, frequency, power, and motion trajectory.

13. A low-temperature plasma jet 3D printing device, characterized in that, include: The 3D printing nozzle as described in any one of claims 1-9; An aerosol atomization system is used to atomize one or more functional materials into an aerosol and deliver it to the 3D printing nozzle; Plasma power supply (70) and plasma gas source (71), wherein the plasma power supply (70) is electrically connected to the plasma generating module (2), and the plasma gas source (71) is connected to the plasma gas source inlet (12); The printing platform (8) is located below the 3D printing nozzle.

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