Laser power meter

Abstract

The invention relates to a laser power meter which comprises a shell and a detection assembly, the shell is provided with a light inlet hole, a liquid inlet channel and a liquid outlet channel, and the detection assembly is arranged in the shell and is provided with a reflection area, an absorption detection area arranged around the reflection area and a heat dissipation area arranged around the absorption detection area. The reflection area is exposed from the light inlet hole, the heat dissipation area and the shell are enclosed to form a spirally extending heat dissipation channel, and the heat dissipation channel is used for allowing heat dissipation liquid to flow. One end of the heat dissipation channel communicates with the liquid inlet channel, and the other end communicates with the liquid outlet channel. When the laser power is measured, heat dissipation liquid enters the spiral extension of the laser power meter from the liquid inlet channel of the shell and flows around the heat dissipation channel of the absorption detection area, so that heat of the absorption detection area is absorbed and flows out from the liquid outlet channel, heat dissipation is carried out on the laser power meter in time, and the laser power meter is prevented from being overheated; and the working reliability of the laser power meter is ensured.

Description

Technical Field

[0001] This invention relates to the field of laser power measurement technology, and in particular to a laser power meter. Background Technology

[0002] A laser power meter is an instrument specifically designed to measure the power of a laser beam (the energy output per unit time), and it is widely used in industrial processing, scientific research experiments, medical equipment and other fields.

[0003] In existing technologies, laser power meters typically use an absorber to receive the laser emitted by the laser emitter under test, convert the light energy into heat energy, and then measure the laser power through the thermocouple effect. For the measurement of high-power lasers, the absorber usually needs to withstand extremely high temperatures. If the absorber cannot dissipate heat in time, it is easy to cause the laser power meter to overheat, which in turn leads to a decrease in the reliability of the laser power meter and a significant reduction in its service life. Summary of the Invention

[0004] This invention provides a laser power meter to improve the heat dissipation efficiency of the laser power meter.

[0005] A laser power meter, comprising: The housing has a light inlet, a liquid inlet channel, and a liquid outlet channel; and The detection component is disposed within the housing and has a reflective area, an absorption detection area surrounding the reflective area, and a heat dissipation area surrounding the absorption detection area; the reflective area is exposed from the light inlet hole, and the heat dissipation area and the housing enclose a spirally extending heat dissipation channel for the flow of heat dissipation fluid; one end of the heat dissipation channel is connected to the liquid inlet channel, and the other end is connected to the liquid outlet channel.

[0006] In one embodiment, the detection component includes a detection element and a reflector. The reflector has the reflective area and a reflective cone surface exposed from the light inlet. The detection element has the absorption detection area and an absorption surface surrounding the reflective cone surface. The detection element and the housing enclose the heat dissipation channel. Laser light incident from the light inlet is reflected by the reflective cone surface to the absorption surface.

[0007] In one embodiment, the detection element includes a plurality of detection modules stacked sequentially. Each detection module includes an absorption portion, a detection portion connected to and surrounding the absorption portion, and a heat dissipation portion connected to and surrounding the detection portion. All the absorption portions are connected together on one side facing the reflective cone surface to form the absorption surface. All the heat dissipation portions are connected together to form the heat dissipation groove, and the heat dissipation groove and the housing form the heat dissipation channel.

[0008] In one embodiment, the detection module includes a first detection module, a second detection module, and a third detection module. The first detection module, the second detection module, and the third detection module are sequentially distributed along the axial direction of the detection element. At least two second detection modules are stacked. Along the axial direction of the detection element, the absorption portion of each second detection module has an integrally formed first overlap portion and a second overlap portion. The second overlap portion is connected to the detection portion, and the thickness of the detection portion is less than that of the second overlap portion. The first overlap portion and the second overlap portion form a first overlap groove on the side facing the reflector and a second overlap groove on the side facing the detection portion. For two adjacent second detection modules, the second overlap portion of the second detection module closer to the light-inlet aperture is accommodated in the second overlap groove of the other second detection module, and the first overlap portion of the second detection module farther from the light-inlet aperture is accommodated in the first overlap groove of the other second detection module.

[0009] In one embodiment, the detection part of the first detection module has a thermocouple or a resistance temperature detector (RTD). In the radial direction of the detection element, the inner and outer sides of the detection part of the first detection module are provided with a first positioning groove and a second positioning groove respectively. In the axial direction of the detection element, the opposite sides of the detection part of the first detection module are respectively provided with the first positioning groove, and the opposite sides of the detection part of the first detection module are respectively provided with the second positioning groove.

[0010] In one embodiment, the inner diameters of the first detection module, the second detection module, and the third detection module are equal, and the inner diameter of the third detection module is larger than the diameter of the reflector; the detection assembly includes a mounting base, the reflector and the third detection module are disposed on the same side of the mounting base, the absorbing portion of the third detection module and the reflector are radially spaced apart from each other on the detection component, and the absorbing portion of the third detection module and the portion of the mounting base near the reflector are radially spaced apart from each other on the detection component.

[0011] In one embodiment, each of the detection modules is provided with a first sealing groove on opposite sides of the axial direction. The first sealing groove is disposed around the detection part and located between the detection part and the heat dissipation part.

[0012] In one embodiment, the housing includes a top cover and an outer cover, the top cover having the light-entry hole, the detection component and the reflector being housed within the outer cover; all of the heat dissipation portions and the outer cover enclose the heat dissipation channel; the top cover abuts against and covers one end of the outer cover, and the end of the outer cover facing the top cover has a second sealing groove.

[0013] In one embodiment, the detection component includes a mounting base, the reflector and the detection component are disposed on the same side of the mounting base, the mounting base has a through hole, the through hole is disposed corresponding to the reflector and spaced apart from the reflector, one end of the through hole is connected to the heat dissipation channel, and the other end is connected to the liquid inlet channel.

[0014] In one embodiment, the mounting base has an oblong hole and a fastening hole on the side opposite to the heat dissipation channel. The fastening hole is provided corresponding to the reflector to realize the fixed connection between the reflector and the mounting base. The outer cover has a wiring groove corresponding to and communicating with the oblong hole. The oblong hole and the wiring groove are used to pass through the connecting wire of the detection element.

[0015] The laser power meter described above includes a housing and a detection component. The housing has a light inlet, a liquid inlet channel, and a liquid outlet channel. The detection component is housed within the housing and includes a reflection zone, an absorption detection zone surrounding the reflection zone, and a heat dissipation zone surrounding the absorption detection zone. The reflection zone is exposed through the light inlet, and the heat dissipation zone, together with the housing, forms a spirally extending heat dissipation channel for the flow of coolant. One end of the heat dissipation channel connects to the liquid inlet channel, and the other end connects to the liquid outlet channel. When measuring laser power, the laser emitted by the laser emitter under test shines into the reflection zone through the light inlet of the laser power meter. The absorption detection zone receives the reflected laser light and its temperature rises. This temperature change is converted into an electrical signal for detection, thereby obtaining the laser power of the laser emitter under test. The coolant enters the spirally extending heat dissipation channel of the laser power meter through the liquid inlet channel of the housing and flows around the absorption detection zone to absorb heat from the detection zone and exit through the liquid outlet channel. This timely heat dissipation prevents the laser power meter from overheating, thus ensuring the reliable operation of the laser power meter. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of a laser power meter according to one embodiment; Figure 2 for Figure 1 A schematic diagram of the detection components of the laser power meter shown. Figure 3 for Figure 1 A cross-sectional view of the laser power meter shown. Figure 4 for Figure 1An exploded view of the laser power meter shown. Figure 5 for Figure 4 An exploded view of the detection module of the laser power meter shown. Figure 6 for Figure 3 A magnified schematic diagram of point A on the laser power meter shown; Figure 7 for Figure 4 A schematic diagram of the upper cover of the laser power meter shown; Figure 8 for Figure 4 The exploded view of the outer casing of the laser power meter is shown.

[0018] Reference numerals: 10, Laser power meter; 11, Housing; 11a, Light inlet; 11b, Liquid inlet channel; 11c, Liquid outlet channel; 111, Top cover; 1111, Supporting part; 1112, First flow groove; 1113, Third sealing groove; 1114, First mounting hole; 112, Outer cover; 1121, Receiving cavity; 1122, Second sealing groove; 1123, First threaded hole; 1124, Second threaded hole; 1125, Fifth sealing groove; 1126, Wiring groove; 1127, Connecting hole; 1128, Groove cover; 11281, Third connecting hole; 1129, Third threaded hole; 12, Detection component; 12a, Reflection area; 12b, Absorption detection area; 12c, Heat dissipation area; 12d, Heat dissipation channel; 121, Detection element; 12 1a. Detection module; 121a1. Absorption section; 121a2. Detection section; 121a3. Heat dissipation section; 121a4. Heat dissipation groove; 121a5. First sealing groove; 121a6. Isolation section; 121a7. Wiring hole; 1211. Absorption surface; 1212. Absorption cavity; 1213. First detection module; 12131. Second docking section; 12132. First positioning groove; 12133. Second positioning groove; 1214. Second detection module; 1214a. First overlapping section; 1214b. Second overlapping section; 1214c. First overlapping groove; 1214d. Second overlapping groove; 1215. Third detection module; 12151. First docking section; 12152. Third positioning groove; 12153. Fourth positioning groove; 122. Reflector; 1221, Reflective cone surface; 123, Mounting base; 1231, Through hole; 1232, Support part; 1233, Second flow groove; 1234, Fourth sealing groove; 1235, Second connecting hole; 1236, Waist-shaped hole; 1237, Fastening hole. Detailed Implementation

[0019] The following detailed description of preferred embodiments is a preferred mode for carrying out the invention. This description is not intended to be limiting; it is provided to illustrate the general principles of the invention.

[0020] It should be understood that, for ease of understanding of the present invention, the terms "installation," "connection," "coupling," and "installation" in the following description refer to the connection relationships shown in the drawings. For example, "connection" can refer to a permanent connection or a detachable connection. Furthermore, "connection" can also refer to a direct connection or an indirect connection, or a connection via other auxiliary components. Therefore, the above terms should not be construed as limiting the actual connections of the various elements of the present invention.

[0021] It should be understood that the terms "length," "width," "top," "bottom," "front," "rear," "left," "right," "vertical," "horizontal," "upper," "lower," "external," and "internal" refer to the orientation or positioning relationship in the accompanying drawings to facilitate understanding of the invention, but do not limit the actual location or orientation of the invention. Therefore, the above terms should not be construed as limiting the actual location of the various elements of the invention.

[0022] It should be understood that the terms "first," "second," "an," "a," and "one" in the following description refer to "at least one" or "one or more" in the embodiments. In particular, the term "a" may refer to "one" in one embodiment and "more than one" in another embodiment. Therefore, the above terms should not be construed as limiting the actual number of elements of the present invention.

[0023] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of the invention are shown in the drawings. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of the invention.

[0024] refer to Figure 1 This application discloses a laser power meter 10, which is an instrument specifically used to measure the power of a laser beam and is widely used in industrial processing, scientific research experiments, medical equipment and other fields.

[0025] refer to Figure 1 , Figure 2 and Figure 3The laser power meter 10 includes a housing 11 and a detection component 12. The housing 11 has a light inlet 11a, a liquid outlet channel 11b, and a liquid inlet channel 11c. The detection component 12 is disposed inside the housing 11 and has a reflection area 12a, an absorption detection area 12b surrounding the reflection area 12a, and a heat dissipation area 12c surrounding the absorption detection area 12b. The reflection area 12a is exposed through the light inlet 11a, and the heat dissipation area 12c and the housing 11 enclose a spirally extending heat dissipation channel 12d for the flow of heat dissipation fluid. One end of the heat dissipation channel 12d is connected to the liquid outlet channel 11b, and the other end is connected to the liquid inlet channel 11c. When measuring laser power, the laser emitted by the laser emitter under test shines into the reflection area 12a through the light inlet 11a of the laser power meter 10. After receiving the laser light reflected by the reflection area 12a, the temperature of the absorption detection area 12b increases. This temperature change can be converted into an electrical signal for detection, thereby obtaining the laser power of the laser emitter under test. The coolant enters the laser power meter 10 from the inlet channel 11c of the housing 11 and flows around the heat dissipation channel 12d of the absorption detection area 12b to absorb the heat of the detection area 12b and flows out from the outlet channel 11b, so as to dissipate heat from the laser power meter 10 in time, prevent the laser power meter 10 from overheating, and thus ensure the working reliability of the laser power meter 10.

[0026] refer to Figure 1 , Figure 2 , Figure 3 and Figure 4In some embodiments, the detection component 12 includes a detection element 121 and a reflector 122. The reflector 122 has a reflective area 12a and a reflective cone surface 1221 exposed from the light inlet hole 11a. The detection element 121 has an absorption detection area 12b and an absorption surface 1211 surrounding the reflective cone surface 1221. The detection element 121 and the housing 11 enclose each other to form a heat dissipation channel 12d. Laser light incident from the light inlet hole 11a is reflected by the reflective cone surface 1221 to the absorption surface 1211. Specifically, the laser power meter 10 can be approximately cylindrical in shape. The light inlet hole 11a is located in the central region of one end of the cylinder. The detection element 121 is arranged around the reflective cone surface 1221 to form an absorption cavity 1212. The absorption cavity 1212 communicates with the light inlet hole 11a, and the cavity wall of the absorption cavity 1212 is the absorption surface 1211. The reflective cone surface 1221 of the reflector 122 is the reflective area 12a. The reflector 122 is disposed in the absorption cavity 1212 on the side away from the light inlet hole 11a, with the reflective cone surface 1221 facing the light inlet hole 11a. When the laser light enters from the light inlet hole 11a, it irradiates the reflective cone surface 1221 of the reflector 122. The reflective cone surface 1221 reflects the laser light (including specular reflection and diffuse reflection) to the absorption surface 1211 of the absorption cavity 1212. The absorption surface 1211 absorbs the energy of the laser light and its temperature rises. The temperature rise can be converted into an electrical signal by the sensing element of the absorption detection area 12b, thereby measuring the power of the laser. In the heat dissipation area 12c surrounding the absorption detection area 12b, the detection element 121 and the housing 11 enclose a heat dissipation channel 12d for the flow of heat dissipation liquid (e.g., water), thereby dissipating heat from the detection element 121 in a timely manner and preventing the laser power meter 10 from being damaged by excessive temperature rise.

[0027] In some embodiments, the reflector 122 can be a metal material such as copper alloy, and the reflective cone surface 1221 of the reflector 122 can be formed on the surface of the reflector 122 by a coating process or the like to obtain a relatively high reflectivity.

[0028] refer to Figure 3 , Figure 4 , Figure 5 and Figure 6 In some embodiments, the detection element 121 may include a plurality of sequentially stacked detection modules 121a. Each detection module 121a includes an absorption portion 121a1, a detection portion 121a2 connected to and surrounding the absorption portion 121a1, and a heat dissipation portion 121a3 connected to and surrounding the detection portion 121a2. All absorption portions 121a1 are connected together on the side facing the reflective cone surface 1221 to form an absorption surface 1211. All heat dissipation portions 121a3 are connected together to form a heat dissipation groove 121a4, and the heat dissipation groove 121a4 and the housing 11 form a heat dissipation channel 12d. Figure 4As shown, the inner ring of the detection module 121a is an absorption section 121a1, and the outer ring is a heat dissipation section 121a3. The detection section 121a2 is disposed between the absorption section 121a1 and the heat dissipation section 121a3. The heat absorbed by the absorption section 121a1 is conducted to the heat dissipation section 121a3 through the detection section 121a2 and discharged by the heat dissipation liquid in the heat dissipation section 121a3. The heat dissipation sections 121a3 of all the detection modules 121a cooperate with each other to form a heat dissipation groove 121a4 that extends spirally along the axial direction of the laser power meter 10.

[0029] In some embodiments, the absorption section 121a1, the detection section 121a2, and the heat dissipation section 121a3 can be integrally formed. The absorption section 121a1 can be made of a high-absorption-rate material, such as high-density graphite, black-film coated copper, molybdenum alloy, or other materials close to a physical blackbody, to absorb laser light and convert as much of it as possible into heat energy, which is then conducted to the entire detection section 121a2. In some embodiments, the absorption surface 1211 of the absorption section 121a1 can be obtained by preparing a high-absorption-rate coating on the surface of a metal substrate. The high-absorption-rate coating absorbs the laser light and converts it into heat energy, which is then conducted to the detection section 121a2. The detection section 121a2 can integrate sensing elements such as thermocouples or thermistors to convert temperature changes into electrical signals, thereby obtaining the power of the incident laser light.

[0030] Specifically, the detection module 121a includes a first detection module 1213, a second detection module 1214, and a third detection module 1215. The first detection module 1213, the second detection module 1214, and the third detection module 1215 are sequentially distributed along the axial direction of the detection element 121. At least two second detection modules 1214 can be stacked. Along the axial direction of the detection element 121, the absorption portion 121a1 of each second detection module 1214 has an integrally formed first overlapping portion 1214a and a second overlapping portion 1214b. The second overlapping portion 1214b is connected to the detection portion 121a2, and the thickness of the detection portion 121a2 is less than the thickness of the second overlapping portion 1214b. The first overlapping portion 1214a and the second overlapping portion 1214b form a first overlapping groove 1214c on the side facing the reflector 122, and a second overlapping groove 1214d on the side facing the detection portion 121a2. For two adjacent second detection modules 1214, the second overlapping portion 1214b of the second detection module 1214 closer to the light inlet hole 11a is accommodated in the second overlapping groove 1214d of the other second detection module 1214, and the first overlapping portion 1214a of the second detection module 1214 farther from the light inlet hole 11a is accommodated in the first overlapping groove 1214c of the other second detection module 1214. This structural arrangement can increase the contact area of ​​adjacent second detection modules 1214, which is beneficial for heat conduction and also for the assembly and positioning of the second detection modules 1214. The efficient heat conduction can ensure the accuracy of detection.

[0031] Continue to refer to Figure 3 , Figure 4 , Figure 5 and Figure 6 In some embodiments, the inner diameters of the first detection module 1213, the second detection module 1214, and the third detection module 1215 are equal, and the inner diameter of the third detection module 1215 is larger than the diameter of the reflector 122, so that the inner wall of the third detection module 1215 is radially spaced from the reflector 122. For example, as... Figure 6 As shown, the entire detection module 121a can be configured as five layers, and the inner diameters of the first detection module 1213, the second detection module 1214, and the third detection module 1215 are equal. The entire detection module 121a may include one first detection module 1213, three second detection modules 1214, and one third detection module 1215. The absorption portion 121a1 of the third detection module 1215 includes a first mating portion 12151 that mates with the first overlapping groove 1214c. After the third detection module 1215 and the second detection module 1214 are stacked, the first mating portion 12151 is accommodated within the first overlapping groove 1214c. The absorption portion 121a1 of the first detection module 1213 includes a second docking portion 12131 that cooperates with the second overlapping groove 1214d of the second detection module 1214. After the first detection module 1213 and the second detection module 1214 are stacked, the second docking portion 12131 is accommodated in the second overlapping groove 1214d.

[0032] Furthermore, each detection module 121a is provided with a first sealing groove 121a5 on opposite sides of the axial direction. The first sealing groove 121a5 surrounds the detection part 121a2 and is located between the detection part 121a2 and the heat dissipation part 121a3. Specifically, the heat dissipation part 121a3 of each detection module 121a has an isolation part 121a6 with a thickness greater than that of the detection part 121a2 on the side near the detection part 121a2, and the end face of the isolation part 121a6 is provided with the first sealing groove 121a5. Taking the third detection module 1215 and the adjacent second detection module 1214 as an example, before the second detection module 1214 is stacked and assembled on the third detection module 1215, a sealing element (not shown in the figure) can be set in the first sealing groove 121a5 of the third detection module 1215. The sealing element can be a fluororubber sealing ring, high-temperature resistant epoxy, etc., to fill and seal the gap between the isolation part 121a6 of the second detection module 1214 and the isolation part 121a6 of the third detection module 1215, so as to prevent the heat sink from entering the detection part 121a2 through the gap between the isolation part 121a6 of the second detection module 1214 and the isolation part 121a6 of the third detection module 1215 when it flows, and causing damage to the detection part 121a2, such as corrosion or short circuit of the detection circuit. The first sealing groove 121a5 can be provided in the isolation part 121a6 of the third detection module 1215, or it can be provided in the isolation part 121a6 of the second detection module 1214. Alternatively, a portion of the sealing groove can be provided in both the third detection module 1215 and the second detection module 1214, so that the gap between the third detection module 1215 and the second detection module 1214 can be sealed by the sealing element.

[0033] refer to Figure 3 and Figure 6In some embodiments, in the radial direction of the detection element 121, the inner and outer sides of the detection portion 121a2 of the first detection module 1213 are respectively provided with a first positioning groove 12132 and a second positioning groove 12133. In the axial direction of the detection element 121, the opposite sides of the detection portion 121a2 of the first detection module 1213 are respectively provided with a first positioning groove 12132, and the opposite sides of the detection portion 121a2 of the first detection module 1213 are respectively provided with a second positioning groove 12133. In some embodiments, the inner and outer sides of the detection section 121a2 of the third detection module 1215 are provided with a third positioning groove 12152 and a fourth positioning groove 12153 corresponding to each other. The third positioning groove 12152 and the fourth positioning groove 12153 are located at the same positions as the first positioning groove 12132 and the second positioning groove 12133 of the first detection module 1213. The first positioning groove 12132 and the second positioning groove 12133 of the first detection module 1213 and the third positioning groove 12152 and the fourth positioning groove 12153 of the third detection module 1215 can be used to realize the installation positioning of the two layers to ensure the assembly accuracy.

[0034] Thermocouples typically utilize the Seebeck effect for measurement. This involves forming a closed circuit using two conductors (or semiconductors) of different materials. When the two measurement points in the closed circuit are at different temperatures (i.e., a temperature difference exists), a thermoelectric potential proportional to the temperature difference is generated in the circuit, thus enabling detection. For example, taking the detection unit 121a2 of the first detection module 1213 as an example, the detection unit 121a2 can integrate multiple sets of thermocouples. These multiple sets of thermocouples are arranged around the absorption unit 121a1 of the first detection module 1213. The end of the thermocouple closer to the absorption unit 121a1 is the hot junction, and the other end closer to the heat dissipation unit 121a3 is the cold junction. When the laser irradiates to the laser power level, a temperature difference is formed between the hot and cold junctions, thus obtaining the thermoelectric potential. After multiple sets of thermocouples are connected in series, the power of the incident laser can be calculated through subsequent processing.

[0035] In some embodiments, the detection unit 121a2 can detect the power of the laser using a thermistor. The core principle of a thermistor is to utilize the characteristic that the resistance of a conductor or semiconductor changes with temperature, converting laser energy into a change in resistance, and then calculating the laser power by measuring the resistance value. For example, taking the detection unit 121a2 as an example, multiple thermistor structures of the detection unit 121a2 are arranged around the absorption unit 121a1 and disposed within the detection unit 121a2. When the laser irradiates the laser power meter 10, the resistance value of the thermistor can be measured. After multiple thermistors are connected in series, the power of the incident laser can be calculated through subsequent processing.

[0036] refer to Figure 3 , Figure 4 , Figure 6 and Figure 7 In some embodiments, the housing 11 includes a top cover 111 and an outer cover 112. The top cover 111 has a light inlet hole 11a, and the outer cover 112 has a receiving cavity 1121, in which the detection component 12 and the reflector 122 are housed. All the heat dissipation parts 121a3 and the outer cover 112 enclose a heat dissipation channel 12d. The liquid outlet channel 11b and the liquid inlet channel 11c can be disposed on the outer cover 112, and the opening of the liquid outlet channel 11b can be closer to the light inlet hole 11a than the opening of the liquid inlet channel 11c. The top cover 111 abuts against and covers one end of the outer cover 112, and the end of the outer cover 112 facing the top cover 111 has a second sealing groove 1122. The function and structure of the second sealing groove 1122 are similar to those of the first sealing groove 121a5, and it is used to seal the gap between the outer cover 112 and the top cover 111.

[0037] Specifically, such as Figure 7 As shown, the diameter of the upper cover 111 can be equal to the diameter of the outer cover 112, and the light inlet 11a can be located in the central region of the upper cover 111. The upper cover 111 includes a supporting portion 1111. When the upper cover 111 abuts against and covers the outer cover 112, the supporting portion 1111 of the upper cover 111 will abut against the first detection module 1213, so that, apart from the supporting portion 1111, the absorption portion 121a1 and the detection portion 121a2 of the first detection module 1213 are spaced apart from the upper cover 111, so that heat is conducted within the first detection module 1213 as much as possible, reducing the heat conducted to the upper cover 111 to ensure the accuracy of detection. Of course, thermal insulation can also be applied between the supporting portion 1111 of the upper cover 111 and the contact portion of the first detection module 1213, for example, by processing a ceramic heat insulation layer to further conduct heat within the first detection module 1213, reducing the heat conducted to the upper cover 111 to ensure detection accuracy. The upper cover 111 has a first flow groove 1112 and a third sealing groove 1113 disposed on the supporting portion 1111. The function and structure of the third sealing groove 1113 are similar to those of the first sealing groove 121a5, used to seal the gap between the upper cover 111 and the first detection module 1213. The first flow groove 1112 of the upper cover 111, together with the heat dissipation groove 121a4 of the first detection module 1213 and the outer cover 112, form a heat dissipation channel 12d, which can communicate with the liquid outlet channel 11b disposed on the outer cover 112. In some embodiments, the upper cover 111 has a first mounting hole 1114, and the outer cover 112 has a first threaded hole 1123 that matches the first mounting hole 1114 of the upper cover 111. When the upper cover 111 and the outer cover 112 are assembled, the connection can be achieved by threaded fasteners such as screws after the first mounting hole 1114 of the upper cover 111 matches the first threaded hole 1123 of the outer cover 112.

[0038] refer to Figure 3 , Figure 4 and Figure 6 In some embodiments, the detection component 12 includes a mounting base 123, a reflector 122 and a detection component 121 disposed on the same side of the mounting base 123. The mounting base 123 has a through hole 1231, which is disposed corresponding to and spaced from the reflector 122. One end of the through hole 1231 communicates with the heat dissipation channel 12d, and the other end communicates with the liquid inlet channel 11c. In some embodiments, the reflector 122 and the third detection module 1215 are disposed on the same side of the mounting base 123. The absorption portion 121a1 of the third detection module 1215 and the reflector 122 are radially spaced from the detection component 121, and the absorption portion 121a1 of the third detection module 1215 and the portion of the mounting base 123 near the reflector 122 are radially spaced from the detection component 121.

[0039] Specifically, such as Figure 3 As shown, the diameter of the mounting base 123 can be equal to the diameter of the detection module 121a. The mounting base 123 includes a support portion 1232. The third detection module 1215 of the detection module 121a abuts against the support portion 1232 of the mounting base 123, and the mounting base 123 supports the detection module 121a through the support portion 1232, such that the absorption portion 121a1 and the detection portion 121a2 of the detection module 121a are spaced apart from the portion of the mounting base 123 near the reflector 122. The reflector 122 disposed on the mounting base 123 is also spaced apart from the detection element 121. When the absorption portion 121a1 of the detection module 121a of the detection component 121 receives laser light, it absorbs the light and converts the light energy into heat energy, causing the surface temperature of the absorption portion 121a1 to rise sharply. The absorption portion 121a1, the detection portion 121a2 of the third detection module 1215, and the portion of the mounting base 123 near the reflector 122 are spaced apart, allowing heat to be conducted within the third detection module 1215 as much as possible, reducing the heat conducted to the mounting base 123 to ensure detection accuracy. Alternatively, thermal insulation can be applied between the support portion 1232 of the mounting base 123 and the contact portion of the third detection module 1215, for example, by processing a ceramic heat insulation layer to further conduct heat within the third detection module 1215, reducing the heat conducted to the mounting base 123 to ensure detection accuracy.

[0040] In some embodiments, the mounting base 123 may further have a second flow groove 1233 and a fourth sealing groove 1234 disposed on the support portion 1232. The function and structure of the fourth sealing groove 1234 are similar to those of the first sealing groove 121a5, and it is used to seal the gap between the mounting base 123 and the third detection module 1215. The second flow groove 1233 of the mounting base 123 cooperates with the heat dissipation groove 121a4 of the third detection module 1215 and the housing 11 to form a heat dissipation channel 12d. One end of the through hole 1231 of the mounting base 123 communicates with this heat dissipation channel 12d, and the other end communicates with the liquid inlet channel 11c.

[0041] In some embodiments, the mounting base 123 has a second connecting hole 1235, and the outer cover 112 has a second threaded hole 1124 that matches the second connecting hole 1235 of the mounting base 123, as well as a fifth sealing groove 1125 on the side near the mounting base 123. The function and structure of the fifth sealing groove 1125 are similar to those of the first sealing groove 121a5. When the mounting base 123 is assembled with the outer cover 112, after the second connecting hole 1235 of the mounting base 123 matches the second threaded hole 1124 of the mounting base 123, the mounting base 123 can be fixed in the receiving cavity 1121 of the outer cover 112 by threaded fasteners such as screws.

[0042] refer to Figure 3 , Figure 4 and Figure 8 In some embodiments, the mounting base 123 is provided with an oblong hole 1236 and a fastening hole 1237 on the side away from the heat dissipation channel 12d. The fastening hole 1237 is provided corresponding to the reflector 122 to realize the fixed connection between the reflector 122 and the mounting base 123. The outer cover 112 is provided with a wiring groove 1126 corresponding to and communicating with the oblong hole 1236. The oblong hole 1236 and the wiring groove 1126 are used to pass through the connecting wire of the detection component 121. Each detection module 121a of the detection component 121 has a detection part 121a2 with a wiring hole 121a7 for wiring. The width of the wiring hole 121a7 is smaller than the width of the oblong hole 1236. The outer cover 112 has an external connection hole 1127 disposed on the outer cover 112 and communicating with the wiring groove 1126, and a groove cover 1128 for covering the wiring groove 1126. The circuit board of the laser power meter 10 can be disposed in the wiring groove 1126. The connecting wire of the detection element 121 is connected to the circuit board. The circuit board can be connected to an external data interface through the external connection hole 1127. The groove cover 1128 is detachably disposed on the outer cover 112. The groove cover 1128 may have a third connection hole 11281. The outer cover 112 has a third threaded hole 1129 at the bottom of the wiring groove 1126 that matches the third connection hole 11281 of the groove cover 1128. After the third connection hole 11281 of the groove cover 1128 matches the third threaded hole 1129 of the outer cover 112, a detachable connection can be achieved by threaded fasteners such as screws.

[0043] In some embodiments, the detection section 121a2 of each detection module 121a has multiple wiring holes 121a7. The detection section 121a2 of each detection module 121a surrounds the absorption section 121a1 and is provided with multiple sets of thermocouples or resistance thermometers, such as four, six, eight, or 2N sets, where N is a positive integer. Each set of thermocouples or resistance thermometers is connected to a circuit board via connecting wires, and each set of thermocouples or resistance thermometers can be arranged in parallel. This laser power meter 10 can detect incident laser light through multiple layers of detection modules 121a and multiple sets of thermocouples or resistance thermometers. By analyzing the data obtained from each set of thermocouples or resistance thermometers, it can detect not only the power of the laser but also the quality and position of the laser beam. For example, the detection data of each layer of detection module 121a is directly related to the reflection position of the incident laser on the reflecting cone surface 1221, or in other words, reflects the radial energy distribution of the incident laser spot. For example, the closer the incident laser is to the top of the reflecting cone 1221, the closer the reflected light is to the light inlet 11a after being reflected by the mirror, and thus it is absorbed by the uppermost detection module 121a. For the same layer of detection module 121a, different thermocouples or thermistors can detect the circumferential distribution of the laser spot. Theoretically, the more layers of detection module 121a and the more thermocouples (or thermistors), the more accurately the energy distribution of the incident laser spot can be detected, thereby detecting the quality and position of the laser beam. The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification.

[0044] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A laser power meter, characterized by, The application relates to a laser detection device. The device comprises a shell, a detection assembly, and a light source. The shell has a light inlet hole, a liquid inlet channel and a liquid outlet channel. The detection assembly is arranged in the shell and comprises a reflecting area, an absorbing detection area surrounding the reflecting area, and a heat dissipation area surrounding the absorbing detection area.

2. The laser power meter of claim 1, wherein, The reflecting area is exposed to the light inlet hole.

3. The laser power meter of claim 2, wherein, The heat dissipation area and the shell form a spiral heat dissipation channel for the flow of heat dissipation liquid.

4. The laser power meter of claim 3, wherein, One end of the heat dissipation channel is connected to the liquid inlet channel, and the other end is connected to the liquid outlet channel.

5. The laser power meter of claim 4, wherein, The detection assembly comprises a detection piece and a reflecting piece. The reflecting piece has the reflecting area and a reflecting cone surface exposed to the light inlet hole. The detection piece has the absorbing detection area and an absorbing surface surrounding the reflecting cone surface. The detection piece and the shell form the heat dissipation channel. The detection piece comprises a plurality of detection modules stacked in sequence. Each detection module comprises an absorbing part, a detection part connected to and surrounding the absorbing part, and a heat dissipation part connected to and surrounding the detection part. All the absorbing parts are connected on one side of the reflecting cone surface and form the absorbing surface. All the heat dissipation parts are connected and form the heat dissipation groove, which forms the heat dissipation channel with the shell. The detection module comprises a first detection module, a second detection module and a third detection module. The first detection module, the second detection module and the third detection module are sequentially distributed along the axial direction of the detection piece. The second detection module is stacked by at least two. In the axial direction of the detection piece, the absorbing part of each second detection module has a first lap part and a second lap part integrally formed. The second lap part is connected to the detection part, and the thickness of the detection part is smaller than that of the second lap part. The first lap part and the second lap part form a first lap groove on one side facing the reflecting piece and a second lap groove on one side facing the detection part. For two adjacent second detection modules, the second lap part of the second detection module close to the light inlet hole is accommodated in the second lap groove of the other second detection module, and the first lap part of the second detection module away from the light inlet hole is accommodated in the first lap groove of the other second detection module. The detection part of the first detection module has a thermocouple or a thermal resistor. In the radial direction of the detection piece, the inner side and the outer side of the detection part of the first detection module are provided with a first positioning groove and a second positioning groove. In the axial direction of the detection piece, the opposite sides of the detection part of the first detection module are respectively provided with the first positioning groove and the second positioning groove.

6. The laser power meter of claim 4, wherein, The first detection module, the second detection module and the third detection module have equal inner diameters, and the inner diameter of the third detection module is greater than the diameter of the reflecting member; the detection assembly comprises a mounting seat, the reflecting member and the detection member are arranged on the same side of the mounting seat, the absorbing portion of the third detection module is arranged radially apart from the reflecting member and the mounting seat close to the reflecting seat.

7. The laser power meter of claim 3, wherein, Each of the detection modules is provided with a first sealing groove on each of the opposite sides in the axial direction, the first sealing groove is arranged around the detection portion and between the detection portion and the heat dissipation portion.

8. The laser power meter of claim 7, wherein, The shell comprises an upper cover and an outer cover, the upper cover has the light inlet hole, the detection assembly and the reflecting member are accommodated in the outer cover; all the heat dissipation portions and the outer cover form the heat dissipation channel; the upper cover abuts and covers one end of the outer cover, and the end of the outer cover facing the upper cover has a second sealing groove.

9. The laser power meter of claim 8, wherein, The detection assembly comprises a mounting seat, the reflecting member and the detection member are arranged on the same side of the mounting seat, the mounting seat has a through hole, the through hole is arranged corresponding to the reflecting member and is spaced apart from the reflecting member, one end of the through hole is communicated with the heat dissipation channel, and the other end is communicated with the liquid inlet channel.

10. The laser power meter of claim 9, wherein, The mounting seat is provided with a waist-shaped hole and a fastening hole on the side away from the heat dissipation channel, the fastening hole is arranged corresponding to the reflecting member to realize the fixed connection of the reflecting member and the mounting seat, the outer cover is provided with a wiring groove corresponding to and communicated with the waist-shaped hole, and the waist-shaped hole and the wiring groove are used for penetrating the connecting line of the detection member.

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