Method for detecting performance of epitaxial structure of gallium oxide-based diode

Abstract

The invention discloses an epitaxial structure performance detection method of a gallium oxide-based diode, relates to the field of transistors, solves the problem of poor detection effect of an existing epitaxial structure performance detection method, and comprises the following steps: S1, respectively obtaining a luminous efficiency value of a target diode to be detected under each preset power; s2, respectively obtaining a color rendering index value of the target diode to be detected under each characteristic power, drawing a color rendering index coordinate graph according to the color rendering index value, and obtaining a qualified lighting effect power interval corresponding to the target diode to be detected according to the power lighting effect coordinate graph; s3, performing performance detection on the gallium oxide-based diode sample according to the qualified color development power interval and the qualified lighting effect power interval, and issuing a performance early warning according to a detection result. The accuracy of the diode performance detection result can be improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of transistors, and particularly relates to a method for detecting the performance of an epitaxial structure of a gallium oxide-based diode. BACKGROUND

[0002] In the field of transistors, gallium oxide-based diodes have attracted widespread attention due to their excellent photoelectric performance. The performance detection of the epitaxial structure is crucial for ensuring the reliability and application effect of the device. However, the existing performance detection methods of the epitaxial structure have significant deficiencies in detecting the light-emitting performance of the gallium oxide-based diode. On the one hand, the existing methods cannot draw a power-light efficiency coordinate graph according to the light-emitting efficiency values of the target diode to be detected under different preset powers, nor can they obtain the qualified light efficiency power interval corresponding to the target diode to be detected based on this, resulting in a lack of accuracy in the light efficiency performance detection of the gallium oxide-based diode. On the other hand, the existing methods also cannot draw a color rendering index coordinate graph according to the color rendering index values of the target diode to be detected under different characteristic powers, nor can they obtain the qualified color rendering power interval corresponding to the target diode to be detected through the color rendering index coordinate, so that the accuracy of the color rendering performance detection is difficult to guarantee. The existence of the above problems not only affects the comprehensive evaluation of the overall performance of the gallium oxide-based diode, but also limits its promotion and use in high-demand application scenarios. Therefore, it is of great technical significance and practical application value to develop a method that can accurately detect the light efficiency performance and color rendering performance of the gallium oxide-based diode. The present application aims to improve the accuracy and reliability of the performance detection of the gallium oxide-based diode by constructing a light efficiency-power characteristic quantization model and a color rendering performance dynamic tracking system, and to provide support for the technical development in related fields. SUMMARY

[0003] The present application proposes a method for detecting the performance of the epitaxial structure of a gallium oxide-based diode to address the deficiencies of the existing performance detection methods of the epitaxial structure in light efficiency and color rendering performance detection. The method significantly improves the accuracy and reliability of the detection results by establishing a light efficiency-power characteristic quantization model and a color rendering index evaluation mechanism.

[0004] To achieve the above-mentioned purpose, the present application provides a method for detecting the performance of the epitaxial structure of a gallium oxide-based diode. The method comprises the following specific steps:

[0005] S1: Obtain a target diode to be detected, set multiple preset powers to obtain light-emitting efficiency values, and draw a power-light efficiency coordinate graph to further determine a qualified light efficiency power interval;

[0006] S2: Set multiple characteristic powers to obtain color rendering index values, and draw a color rendering index coordinate graph to further determine a qualified color rendering power interval;

[0007] S3: Perform performance testing on the sample gallium oxide-based diodes by combining the qualified luminous efficacy power range and the qualified color rendering power range, and issue performance warnings based on the test results.

[0008] Furthermore, step S1 includes the following specific steps:

[0009] S11: Acquire gallium oxide-based diodes that need to be tested for performance, obtain multiple gallium oxide-based diodes, and select one sample gallium oxide-based diode from the multiple acquired gallium oxide-based diodes;

[0010] S12: In the process of detecting the luminous efficiency of the sample gallium oxide-based diode, the value 0 is taken as the lower limit of the luminous efficiency driving power range, and the rated power corresponding to the sample gallium oxide-based diode is taken as the upper limit of the luminous efficiency driving power range, so as to obtain the preset range of luminous efficiency driving power.

[0011] S13: Divide the preset range of light effect driving power into several light effect driving powers, and the power value between each two consecutive light effect driving powers is equal. Then, mark the several light effect driving powers into Q1 driving power to Qa driving power according to their numerical values.

[0012] S14: Monitor the luminous efficiency of the sample gallium oxide-based diode under the Q1 driving power, and obtain the steady-state luminous efficiency of Q1 based on the monitoring results;

[0013] S15: Obtain the steady-state luminous efficiency of the sample gallium oxide-based diodes at driving powers from Q2 to Qa, and obtain the steady-state luminous efficiency from Q2 to Qa.

[0014] S16: Create a luminous efficiency line graph based on the driving power of Q1 to the driving power of Qa and the steady-state luminous efficiency of Q1 to the steady-state luminous efficiency of Qa. Obtain the qualified luminous efficiency power range corresponding to the sample gallium oxide-based diode based on the luminous efficiency line graph.

[0015] Furthermore, step S14 includes the following specific steps:

[0016] Connect the sample gallium oxide-based diode to the power-on circuit, and adjust the circuit power corresponding to the power-on circuit to the Q1 drive power;

[0017] During the operation of the sample gallium oxide-based diode, a luminous efficacy monitoring cycle is marked. Several luminous efficacy monitoring time points are selected within the luminous efficacy monitoring cycle. The luminous flux of the sample gallium oxide-based diode at each luminous efficacy monitoring time point is obtained through an integrating sphere spectroradiometer, resulting in multiple monitored luminous fluxes.

[0018] Obtaining a plurality of monitoring light efficiency values by obtaining the ratio of each monitoring light flux to the Q1 driving power, and performing average number calculation on the obtained plurality of monitoring light efficiency values to obtain the Q1 steady-state light emitting efficiency.

[0019] Further, the step S16 comprises the following steps:

[0020] In the existing plane rectangular coordinate system, the driving power is marked as the horizontal coordinate, and the steady-state light emitting efficiency is taken as the vertical coordinate to obtain a steady-state light emitting efficiency coordinate system;

[0021] In the steady-state light emitting efficiency coordinate system, the coordinate point with the Q1 driving power as the horizontal coordinate and the Q1 steady-state light emitting efficiency as the vertical coordinate is marked as a Q1 efficiency coordinate point, the coordinate point with the Q2 driving power as the horizontal coordinate and the Q2 steady-state light emitting efficiency as the vertical coordinate is marked as a Q2 efficiency coordinate point, and so on, and the coordinate point with the Qa driving power as the horizontal coordinate and the Qa steady-state light emitting efficiency as the vertical coordinate is marked as a Qa efficiency coordinate point;

[0022] The Q1 efficiency coordinate point to the Qa efficiency coordinate point are sequentially connected to obtain a light emitting efficiency coordinate broken line, and the steady-state light emitting efficiency coordinate system is re-marked as a light emitting efficiency broken line graph.

[0023] Further, the step S16 further comprises a coordinate y-axis in the light emitting efficiency broken line graph, setting a reference light emitting efficiency feature point, drawing a straight line perpendicular to the coordinate y-axis through the reference light emitting efficiency feature point to obtain a reference light emitting efficiency feature straight line, marking a qualified light efficiency broken line for the area of the light emitting efficiency coordinate broken line above the reference light emitting efficiency feature straight line, and obtaining the interval value of the horizontal coordinate corresponding to the qualified light efficiency broken line to obtain a qualified light efficiency power interval.

[0024] Further, the step S2 comprises the following steps:

[0025] S21: obtaining a sample gallium oxide-based diode, taking the value 0 as the lower limit of the color rendering driving power interval and the rated power corresponding to the sample gallium oxide-based diode as the upper limit of the color rendering driving power interval during the color rendering index detection of the sample gallium oxide-based diode to obtain a color rendering driving power preset interval;

[0026] S22: splitting the color rendering driving power preset interval into a plurality of color rendering driving powers, and the interval power values between every two continuous color rendering driving powers are equal, and the plurality of color rendering driving powers obtained by splitting are respectively marked as P1 driving power to Pb driving power according to the value size;

[0027] S23: performing color rendering index monitoring on the sample gallium oxide-based diode under the P1 driving power, and obtaining the P1 steady-state color rendering index according to the monitoring result.

[0028] S24: Obtain the steady-state color rendering indexes of the sample gallium oxide-based diode under the P2 driving power to the Pb driving power respectively, to obtain the P2 steady-state color rendering index to the Pb steady-state color rendering index;

[0029] S25: Create a color rendering index fold line graph according to the P1 driving power to the Pb driving power and the P1 steady-state color rendering index to the Pb steady-state color rendering index, and obtain the qualified color rendering power interval corresponding to the sample gallium oxide-based diode according to the color rendering index fold line graph.

[0030] Further, the step S23 comprises the following steps:

[0031] The sample gallium oxide-based diode is connected to the power-on circuit, and the circuit power corresponding to the power-on circuit is adjusted to the P1 driving power;

[0032] During the running state of the sample gallium oxide-based diode, a color rendering monitoring period is marked, and a plurality of color rendering monitoring time points are selected in the color rendering monitoring period. The color rendering index of the sample gallium oxide-based diode at each color rendering monitoring time point is obtained by a colorimeter, and the average of the obtained plurality of color rendering indexes is calculated to obtain the P1 steady-state color rendering index.

[0033] Further, the step S25 comprises the following steps:

[0034] In the existing plane rectangular coordinate system, the driving power is marked as the horizontal coordinate, and the steady-state color rendering index is taken as the vertical coordinate to obtain a steady-state color rendering index coordinate system;

[0035] In the steady-state color rendering index coordinate system, the P1 driving power is taken as the horizontal coordinate, and the P1 steady-state color rendering index is taken as the vertical coordinate to mark a coordinate point as a P1 efficiency coordinate point. The P2 driving power is taken as the horizontal coordinate, and the P2 steady-state color rendering index is taken as the vertical coordinate to mark a coordinate point as a P2 efficiency coordinate point. Similarly, the Pb driving power is taken as the horizontal coordinate, and the Pb steady-state color rendering index is taken as the vertical coordinate to mark a coordinate point as a Pb efficiency coordinate point.

[0036] Further, the step S25 further comprises the following steps:

[0037] The P1 efficiency coordinate point to the Pb efficiency coordinate point are sequentially connected to obtain a color rendering index coordinate fold line, and the steady-state color rendering index coordinate system is re-marked as a color rendering index fold line graph;

[0038] A reference color rendering index feature point is set on the coordinate y-axis in the color rendering index broken line graph, a straight line perpendicular to the coordinate y-axis is drawn through the reference color rendering index feature point, a reference color rendering index feature straight line is obtained, a region above the reference color rendering index feature straight line is marked as a qualified color rendering broken line, and a numerical interval of the horizontal coordinate corresponding to the qualified color rendering broken line is obtained to obtain a qualified color rendering power interval.

[0039] Further, the step S3 comprises the following steps:

[0040] S31: respectively acquiring the qualified color rendering power interval and the qualified light efficiency power interval, acquiring a power range value covered by the qualified color rendering power interval to obtain a first performance index range value, and acquiring a power range value covered by the qualified light efficiency power interval to obtain a second performance index range value;

[0041] S32: respectively acquiring a first performance index range reference value and a second performance index range reference value, calculating a difference value between the first performance index range value and the first performance index range reference value to obtain a first performance index deviation, and calculating a difference value between the second performance index range value and the second performance index range reference value to obtain a second performance index deviation;

[0042] S33: if the first performance index deviation and the second performance index deviation are both greater than or equal to 0, judging that the sample gallium oxide-based diode performance detection is qualified;

[0043] S34: if any one of the first performance index deviation and the second performance index deviation is less than 0, judging that the sample gallium oxide-based diode performance detection is unqualified.

[0044] The beneficial effects of the present application are:

[0045] Firstly, by establishing a light efficiency-power characteristic quantitative model, the light flux data of multiple monitoring points are collected by using an integrating sphere spectroradiometer to eliminate transient fluctuation interference and ensure the stability of the light efficiency evaluation. At the same time, the efficiency decay trend is presented through a visual coordinate system, the nonlinear characteristics of the power-efficiency relationship are intuitively identified, and the multi-interval qualified range judgment is supported, thereby improving the accuracy of the light efficiency performance detection.

[0046] Secondly, by using a time period steady state monitoring mechanism, the color rendering index is dynamically tracked by using a colorimeter, a power-color performance mapping relationship is established, transient color deviation interference is excluded, and the accuracy of the color rendering index evaluation is ensured. The power window meeting the color restoration requirements is automatically identified through the reference color threshold and the coordinate broken line intersection analysis, thereby improving the accuracy of the color rendering performance detection.

[0047] Finally, by combining the double evaluation indexes (luminous efficiency and color rendering performance), a complete luminescent performance evaluation matrix is constructed, which not only guarantees the energy efficiency standard, but also ensures the color quality, and provides comprehensive and accurate data support for the performance detection of gallium oxide-based diodes.

[0048] In summary, the present application solves the problem of lack of accuracy in light efficiency and color rendering performance detection in the prior art by using a scientific quantitative model and visual analysis means, significantly improves the reliability and practicality of the detection results, and provides important technical support for the performance evaluation of gallium oxide-based diodes. BRIEF DESCRIPTION OF DRAWINGS

[0049] Figure 1 The overall system block diagram of the present application is shown in the figure;

[0050] Figure 2 The light efficiency fold line chart in the present application is shown in the figure;

[0051] Figure 3 The color rendering index fold line chart in the present application is shown in the figure. DETAILED DESCRIPTION

[0052] The present application will be further described below in combination with the drawings and specific embodiments, and the illustrative embodiments and descriptions of the present application are used to explain the present application, but not as a limitation of the present application.

[0053] Example 1

[0054] Please refer to Figure 1 The present application provides a technical solution: a method for detecting the epitaxial structure performance of a gallium oxide-based diode, comprising the following specific steps:

[0055] S1: obtaining a target diode to be detected, setting a plurality of preset powers for the target diode to be detected, obtaining the light efficiency value of the target diode to be detected under each preset power, and drawing a power-light efficiency coordinate graph according to the light efficiency value, and obtaining the qualified light efficiency power interval corresponding to the target diode to be detected according to the power-light efficiency coordinate;

[0056] The step S1 further comprises the following specific steps:

[0057] The gallium oxide-based diode to be detected is obtained, and a plurality of gallium oxide-based diodes are obtained, and a sample gallium oxide-based diode is selected from the plurality of gallium oxide-based diodes;

[0058] It should be noted that:

[0059] In this application, the gallium oxide-based diode referred to herein is specifically a gallium oxide-based light emitting diode;

[0060] In the process of detecting the luminous efficiency of the sample gallium oxide-based diode, the value of 0 is taken as the lower limit of the luminous efficiency driving power range, and the rated power corresponding to the sample gallium oxide-based diode is taken as the upper limit of the luminous efficiency driving power range, thus obtaining the preset range of luminous efficiency driving power.

[0061] The preset range of light effect driving power is divided into several light effect driving powers, and the power value between each two consecutive light effect driving powers is equal. The several light effect driving powers are then labeled as Q1 driving power to Qa driving power according to their numerical values.

[0062] It should be noted here that:

[0063] In this application, Q is a symbol corresponding to the light effect driving power, and a is a quantity value corresponding to the light effect driving power, and a is an integer greater than 0.

[0064] Please see Figure 2 The luminous efficiency of the sample gallium oxide-based diodes under the Q1 driving power was monitored, and the steady-state luminous efficiency of Q1 was obtained based on the monitoring results.

[0065] Specifically as follows:

[0066] Connect the sample gallium oxide-based diode to the power-on circuit, and adjust the circuit power corresponding to the power-on circuit to the Q1 drive power;

[0067] During the operation of the sample gallium oxide-based diode, a luminous efficacy monitoring cycle is marked. Several luminous efficacy monitoring time points are selected within the luminous efficacy monitoring cycle. The luminous flux of the sample gallium oxide-based diode at each luminous efficacy monitoring time point is obtained through an integrating sphere spectroradiometer, resulting in multiple monitored luminous fluxes.

[0068] The ratio of each monitored luminous flux to the Q1 driving power is obtained to obtain multiple monitored luminous efficacy values. The average of the multiple monitored luminous efficacy values ​​is then calculated to obtain the steady-state luminous efficacy of Q1.

[0069] Repeat the process of obtaining the steady-state luminous efficiency of Q1, and obtain the steady-state luminous efficiency of the sample gallium oxide-based diodes at driving powers from Q2 to Qa, respectively, to obtain the steady-state luminous efficiency from Q2 to Qa.

[0070] A luminous efficiency line graph is created based on the driving power of Q1 to the driving power of Qa and the steady-state luminous efficiency of Q1 to the steady-state luminous efficiency of Qa. The qualified luminous efficiency power range corresponding to the sample gallium oxide-based diode is obtained based on the luminous efficiency line graph.

[0071] Specifically as follows:

[0072] In the existing Cartesian coordinate system, the driving power is marked as the horizontal coordinate, and the steady-state luminous efficiency is taken as the vertical coordinate to obtain a steady-state luminous efficiency coordinate system;

[0073] In the steady-state luminous efficiency coordinate system, the coordinate point with the Q1 driving power as the horizontal coordinate and the Q1 steady-state luminous efficiency as the vertical coordinate is marked as a Q1 efficiency coordinate point, the coordinate point with the Q2 driving power as the horizontal coordinate and the Q2 steady-state luminous efficiency as the vertical coordinate is marked as a Q2 efficiency coordinate point, and so on, and the coordinate point with the Qa driving power as the horizontal coordinate and the Qa steady-state luminous efficiency as the vertical coordinate is marked as a Qa efficiency coordinate point;

[0074] The Q1 efficiency coordinate point to the Qa efficiency coordinate point are sequentially connected to obtain a luminous efficiency coordinate broken line, and the steady-state luminous efficiency coordinate system is re-marked as a luminous efficiency broken line graph;

[0075] In the coordinate y-axis in the luminous efficiency broken line graph, a reference luminous efficiency feature point is set, a straight line perpendicular to the coordinate y-axis is drawn through the reference luminous efficiency feature point to obtain a reference luminous efficiency feature straight line, and a qualified light efficiency broken line is marked for the area of the luminous efficiency coordinate broken line above the reference luminous efficiency feature straight line, and an interval value of the horizontal coordinate corresponding to the qualified light efficiency broken line is obtained to obtain a qualified light efficiency power interval;

[0076] It should be noted here that:

[0077] There can be multiple qualified light efficiency power intervals involved here.

[0078] The above step S1 has the following advantages:

[0079] Step S1 constructs a light efficiency-power characteristic quantitative model in the light emitting performance detection, draws a continuous curve of the luminous efficiency changing with the power through the equidistant power sampling and the steady-state efficiency monitoring, and dynamically determines the qualified working interval based on the reference efficiency threshold. This step realizes three core functions: first, the light flux data of multiple monitoring points are obtained through the integrating sphere spectroradiometer to eliminate transient fluctuation interference and ensure the stability of the efficiency evaluation; second, the coordinate system is used to visually present the efficiency decay trend and intuitively identify the nonlinear characteristics of the power-efficiency relationship; and third, the multiple interval qualified range determination is supported to adapt to the energy efficiency needs of the device in different application scenarios, thereby providing data support for the diode performance detection;

[0080] S2: Obtain a target diode to be detected, set a plurality of characteristic powers for the target diode to be detected, respectively obtain the color rendering index value of the target diode to be detected under each characteristic power, and draw a color rendering index coordinate graph according to the color rendering index coordinates, and obtain a qualified color rendering power interval corresponding to the target diode to be detected according to the color rendering index coordinate;

[0081] Step S2 further includes the following specific steps:

[0082] A sample gallium oxide-based diode is obtained. During the color rendering index detection of the sample gallium oxide-based diode, the value of 0 is used as the lower limit of the color rendering driving power range, and the rated power corresponding to the sample gallium oxide-based diode is used as the upper limit of the color rendering driving power range, thus obtaining the preset range of color rendering driving power.

[0083] The preset range of color driving power is divided into several color driving powers, and the power value between any two consecutive color driving powers is equal. The several color driving powers are then labeled as P1 driving power to Pb driving power according to their numerical values.

[0084] It should be noted here that:

[0085] In this application, P is a symbol corresponding to color driving power, b is a quantity value corresponding to color driving power, and b is an integer greater than 0.

[0086] The color rendering index of the sample gallium oxide-based diode under P1 driving power was monitored, and the steady-state color rendering index of P1 was obtained based on the monitoring results.

[0087] Specifically as follows:

[0088] Connect the sample gallium oxide-based diode to the power-on circuit, and adjust the circuit power corresponding to the power-on circuit to the P1 drive power;

[0089] During the operation of the sample gallium oxide-based diode, a color development monitoring cycle is marked. Several color development monitoring time points are selected in the color development monitoring cycle. The color development index of the sample gallium oxide-based diode at each color development monitoring time point is obtained by a colorimeter. The average of the obtained multiple color development indices is calculated to obtain the P1 steady-state color development index.

[0090] Repeat the process of obtaining the steady-state color rendering index of P1, and obtain the steady-state color rendering index of the sample gallium oxide-based diodes at driving power from P2 to Pb, respectively, to obtain the steady-state color rendering index from P2 to Pb.

[0091] A color rendering index line graph is created based on the P1 driving power to the Pb driving power and the P1 steady-state color rendering index to the Pb steady-state color rendering index. The qualified color rendering power range corresponding to the sample gallium oxide-based diode is obtained based on the color rendering index line graph.

[0092] Specifically as follows:

[0093] In the existing Cartesian coordinate system, the driving power is marked as the horizontal axis and the steady-state color rendering index is used as the vertical axis to obtain the steady-state color rendering index coordinate system.

[0094] Referring to Figure 3 In the steady-state color rendering index coordinate system, a coordinate point with P1 driving power as the abscissa and P1 steady-state color rendering index as the ordinate is marked as a P1 efficiency coordinate point, a coordinate point with P2 driving power as the abscissa and P2 steady-state color rendering index as the ordinate is marked as a P2 efficiency coordinate point, and so on, and a coordinate point with Pb driving power as the abscissa and Pb steady-state color rendering index as the ordinate is marked as a Pb efficiency coordinate point;

[0095] The P1 efficiency coordinate point and the Pb efficiency coordinate point are sequentially connected to obtain a color rendering index coordinate broken line, and the steady-state color rendering index coordinate system is re-marked as a color rendering index broken line diagram;

[0096] A reference color rendering index feature point is set on the coordinate y-axis in the color rendering index broken line diagram, a straight line perpendicular to the coordinate y-axis is drawn through the reference color rendering index feature point to obtain a reference color rendering index feature straight line, and a region above the reference color rendering index feature straight line is marked as a qualified color rendering broken line, and a numerical interval of the abscissa corresponding to the qualified color rendering broken line is obtained to obtain a qualified color rendering power interval;

[0097] It should be noted that:

[0098] There can be multiple qualified color rendering power intervals.

[0099] The above step S2 has the following advantages:

[0100] Step S2 improves the color rendering dimension evaluation system of the light emitting performance detection, realizes dynamic tracking of the color rendering index through the colorimeter, and establishes a power-color rendering performance mapping relationship. The key role of this step is reflected in the following aspects: first, the time period steady-state monitoring mechanism is adopted to exclude transient color deviation interference and ensure the accuracy of the color rendering index evaluation; second, the intersection of the reference color rendering threshold and the coordinate broken line is analyzed to automatically identify the power window that meets the color restoration requirements; and finally, the light efficiency interval of step S1 is complemented to form a complete light emitting performance evaluation matrix, which not only guarantees energy efficiency, but also ensures color quality, and provides double evaluation indexes for the performance detection of the gallium oxide-based diode.

[0101] S3: Perform performance detection on the sample gallium oxide-based diode according to the qualified color rendering power interval and the qualified light efficiency power interval, and issue a performance warning according to the detection result;

[0102] The step S3 further includes the following steps:

[0103] The qualified chromatic power interval and the qualified light efficiency power interval are obtained respectively, the power range value covered by the qualified chromatic power interval is obtained to obtain a first performance index range value, and the power range value covered by the qualified light efficiency power interval is obtained to obtain a second performance index range value;

[0104] The first performance index range reference value and the second performance index range reference value are obtained respectively, the difference between the first performance index range value and the first performance index range reference value is calculated to obtain a first performance index deviation, and the difference between the second performance index range value and the second performance index range reference value is calculated to obtain a second performance index deviation;

[0105] It should be noted here that:

[0106] In the present application, a plurality of performance detection qualified historical gallium oxide-based diodes are obtained, the first performance index range value corresponding to each historical gallium oxide-based diode is obtained respectively, the minimum value of the obtained plurality of first performance index range values is marked as a first performance index range reference value, the second performance index range value corresponding to each historical gallium oxide-based diode is obtained respectively, and the minimum value of the obtained plurality of second performance index range values is marked as a second performance index range reference value.

[0107] The historical gallium oxide-based diode and the sample gallium oxide-based diode referred to here are the same type of gallium oxide-based diode.

[0108] If the first performance index deviation and the second performance index deviation are both greater than or equal to 0, it is judged that the sample gallium oxide-based diode is performance detection qualified.

[0109] If any one of the first performance index deviation and the second performance index deviation is less than 0, it is judged that the sample gallium oxide-based diode is performance detection unqualified.

[0110] In the present application, if the corresponding calculation formula appears, the above calculation formula is all de-dimensioned to calculate the numerical value, and the weight coefficient, the proportion coefficient and other coefficients existing in the formula are set to a size in order to quantify the parameters to obtain a result value. The size of the weight coefficient and the proportion coefficient only needs to not affect the proportional relationship between the parameters and the result value.

[0111] The technical scheme of the present application is not limited to the above specific embodiments, and any technical modification made according to the technical scheme of the present application falls within the protection scope of the present application.

Claims

1. A method for detecting the performance of an epitaxial structure of a gallium oxide-based diode, characterized in that, The method comprises the following steps: S1: obtaining a target gallium oxide-based diode to be detected, setting a plurality of preset powers to obtain luminous efficiency values, and drawing a power-luminous efficiency coordinate graph to further determine a qualified luminous efficiency power interval; S2: setting a plurality of characteristic powers to obtain color rendering index values, and drawing a color rendering index coordinate graph to further determine a qualified color rendering power interval; S3: combining the qualified luminous efficiency power interval and the qualified color rendering power interval to perform performance detection on a sample gallium oxide-based diode, and issuing a performance warning according to a detection result.

2. The method of claim 1, wherein the method further comprises: The step S1 comprises the following specific steps: S11: selecting a sample gallium oxide-based diode from a plurality of gallium oxide-based diodes to be detected; S12: during luminous efficiency detection of the sample gallium oxide-based diode, taking 0 as a lower limit of a light efficiency driving power interval, taking a rated power corresponding to the sample gallium oxide-based diode as an upper limit of the light efficiency driving power interval, and obtaining a light efficiency driving power preset interval; S13: dividing the light efficiency driving power preset interval into Q1 driving power to Qa driving power; S14: monitoring luminous efficiency of the sample gallium oxide-based diode under the Q1 driving power, and obtaining Q1 steady-state luminous efficiency according to a monitoring result; S15: obtaining steady-state luminous efficiency of the sample gallium oxide-based diode under Q2 driving power to Qa driving power, and obtaining Q2 steady-state luminous efficiency to Qa steady-state luminous efficiency; S16: creating a luminous efficiency broken line graph according to the Q1 driving power to the Qa driving power and the Q1 steady-state luminous efficiency to the Qa steady-state luminous efficiency, and obtaining a qualified light efficiency power interval corresponding to the sample gallium oxide-based diode according to the luminous efficiency broken line graph.

3. The method of claim 2, wherein the method further comprises: The step S14 comprises the following specific steps: S141: connecting the sample gallium oxide-based diode to a power-on circuit, and adjusting circuit power corresponding to the power-on circuit to the Q1 driving power; S142: during running of the sample gallium oxide-based diode, marking a light efficiency monitoring period, selecting a plurality of light efficiency monitoring time points in the light efficiency monitoring period, and obtaining luminous flux of the sample gallium oxide-based diode at each light efficiency monitoring time point through an integrating sphere spectroradiometer to obtain a plurality of monitoring luminous fluxes; S143: obtaining a ratio of each monitoring luminous flux to the Q1 driving power to obtain a plurality of monitoring light efficiency values, and performing average number calculation on the plurality of monitoring light efficiency values to obtain the Q1 steady-state luminous efficiency.

4. The method of claim 2, wherein the method further comprises: The step S16 comprises the following specific steps: S161: in an existing plane rectangular coordinate system, marking driving power as an abscissa and steady-state luminous efficiency as an ordinate to obtain a steady-state luminous efficiency coordinate system; S162: in the steady-state luminous efficiency coordinate system, marking a coordinate point with the Q1 driving power as an abscissa and the Q1 steady-state luminous efficiency as an ordinate as a Q1 efficiency coordinate point, and marking a coordinate point with the Qa driving power as an abscissa and the Qa steady-state luminous efficiency as an ordinate as a Qa efficiency coordinate point. S163: sequentially connecting the Q1 efficiency coordinate point to the Qa efficiency coordinate point to obtain a light-emitting efficiency coordinate broken line, and re-labeling the steady-state light-emitting efficiency coordinate system as a light-emitting efficiency broken line diagram.

5. The method of claim 4, wherein the method further comprises: The step S16 further comprises setting a reference light-emitting efficiency feature point on a coordinate y-axis in the light-emitting efficiency broken line diagram, drawing a straight line perpendicular to the coordinate y-axis through the reference light-emitting efficiency feature point to obtain a reference light-emitting efficiency feature straight line, and labeling a region above the reference light-emitting efficiency feature straight line of the light-emitting efficiency coordinate broken line as a qualified light efficiency broken line, and obtaining an interval value of the horizontal coordinate corresponding to the qualified light efficiency broken line to obtain a qualified light efficiency power interval.

6. The method of claim 1, wherein the method further comprises: The step S2 comprises the following specific steps: S21: obtaining a sample gallium oxide-based diode, and taking the value 0 as a lower limit of a color rendering driving power interval and taking a rated power corresponding to the sample gallium oxide-based diode as an upper limit of the color rendering driving power interval to obtain a color rendering driving power preset interval during color rendering index detection of the sample gallium oxide-based diode; S22: splitting the color rendering driving power preset interval into P1 driving power to Pb driving power; S23: monitoring the color rendering index of the sample gallium oxide-based diode under the P1 driving power, and obtaining a P1 steady-state color rendering index according to a monitoring result; S24: obtaining a P2 steady-state color rendering index to a Pb steady-state color rendering index of the sample gallium oxide-based diode under the P2 driving power to the Pb driving power, respectively; S25: creating a color rendering index broken line diagram according to the P1 driving power to the Pb driving power and the P1 steady-state color rendering index to the Pb steady-state color rendering index, and obtaining a qualified color rendering power interval corresponding to the sample gallium oxide-based diode according to the color rendering index broken line diagram.

7. The method of claim 6, wherein the method further comprises: The step S23 comprises the following steps: S231: connecting the sample gallium oxide-based diode to an energizing circuit, and adjusting a circuit power corresponding to the energizing circuit to the P1 driving power; S232: marking a color rendering monitoring period during a running state of the sample gallium oxide-based diode, selecting a plurality of color rendering monitoring time points in the color rendering monitoring period, obtaining a color rendering index of the sample gallium oxide-based diode at each color rendering monitoring time point through a colorimeter, and performing average number calculation on the obtained plurality of color rendering indices to obtain the P1 steady-state color rendering index.

8. The method of claim 6, wherein the method further comprises: The step S25 comprises the following steps: S251: in an existing plane rectangular coordinate system, marking driving power as a horizontal coordinate and steady-state color rendering index as a vertical coordinate to obtain a steady-state color rendering index coordinate system; S252: in the steady-state color rendering index coordinate system, marking a coordinate point with the P1 driving power as a horizontal coordinate and the P1 steady-state color rendering index as a vertical coordinate as a P1 efficiency coordinate point, and marking a coordinate point with the Pb driving power as a horizontal coordinate and the Pb steady-state color rendering index as a vertical coordinate as a Pb efficiency coordinate point.

9. The method of claim 7, wherein the method further comprises: The step S25 comprises the following steps: S251: sequentially connecting the P1 efficiency coordinate point to the Pb efficiency coordinate point to obtain a color rendering index coordinate broken line, and re-labeling the steady-state color rendering index coordinate system as a color rendering index broken line diagram; S252: On the y-axis of the color rendering index (CRI) graph, set a reference CRI feature point. Draw a straight line perpendicular to the y-axis through the reference CRI feature point to obtain the reference CRI feature line. Mark the area of ​​the CRI coordinate line above the reference CRI feature line as a qualified CRI line. Obtain the numerical range of the abscissa corresponding to the qualified CRI line to obtain the qualified CRI power range.

10. The method of claim 1, wherein the method is performed on a gallium oxide-based diode epitaxial structure. Step S3 includes the following steps: S31: Obtain the qualified color rendering power range and the qualified luminous efficacy power range respectively. Obtain the power range value covered by the qualified color rendering power range to obtain the first performance index range value. Obtain the power range value covered by the qualified luminous efficacy power range to obtain the second performance index range value. S32: Obtain the first performance index range benchmark value and the second performance index range benchmark value respectively, calculate the difference between the first performance index range value and the first performance index range benchmark value to obtain the first performance index deviation, and calculate the difference between the second performance index range value and the second performance index range benchmark value to obtain the second performance index deviation. S33: If both the deviation of the first performance index and the deviation of the second performance index are greater than or equal to 0, then the performance test of the sample gallium oxide-based diode is deemed qualified. S34: If either the first performance index deviation or the second performance index deviation is less than 0, then the performance test of the sample gallium oxide-based diode is deemed unqualified.

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