Data processing method, system and electronic device for virtual eap in semiconductor eap system

Abstract

The present disclosure provides a data processing method, system and electronic device for virtual EAP in a semiconductor EAP system, the method comprising: receiving an incoming instruction for a target device, and sending an incoming request carrying a current batch identifier to the MES to establish a job association between the current batch and the target device in the MES; in response to the received data acquisition instruction, scanning a preset output directory of the target device, and according to an analysis rule matched with the target device, analyzing a target result file under the output directory to extract metrology data; sending the metrology data to the MES, and receiving a quality judgment result fed back by the MES based on a preset specification limit; and configuring an executable state of an outbound operation control according to the quality judgment result; wherein if the quality judgment result indicates a failure, the outbound operation control is set to a locked state to prevent the current batch from flowing to a next station, thereby realizing closed-loop quality control of a non-standard machine.

Description

Technical Field

[0001] This disclosure relates to the semiconductor field, and in particular to a data processing method, system, and electronic device for virtual EAP in a semiconductor EAP system. Background Technology

[0002] In the semiconductor integrated circuit manufacturing field, production automation is key to improving yield and efficiency. To achieve fully automated production management, core production equipment in modern wafer fabs typically support the SECS / GEM (Semiconductor Equipment Communication Standard / General Equipment Model) standard protocol. Through Equipment Automation Programs (EAPs), these devices can be seamlessly integrated with Manufacturing Execution Systems (MESs) to achieve functions such as automatic track-in / track-out, recipe management, and automatic acquisition and uploading of measurement data.

[0003] However, in actual semiconductor fabs, besides core process equipment, there are still a large number of "non-standard equipment" or older models that do not support the standard SECS / GEM protocol. These devices mainly include measurement equipment such as 3D topography measuring machines, droplet angle measuring instruments, and wafer warpage measuring instruments, as well as auxiliary equipment such as labeling machines. These devices typically only have local operating interfaces and can only output job results in local file formats (such as Excel, CSV, or text files), and cannot directly establish a two-way communication connection with the MES system.

[0004] Currently, data interaction and production management for such non-standard equipment mainly rely on manual "bridging." The specific operation process is usually as follows: after completing the physical operation on the equipment, the operator manually exports the result file, opens the file to find and record the required key measurement values, then logs into the MES system client, manually enters these data via keyboard, and finally manually clicks the button to complete the batch posting operation.

[0005] This traditional operating model has significant technical drawbacks: First, data link breaks, leading to inefficiency. Operators need to frequently travel between the equipment and the MES terminal, and the process of manually filtering data from unstructured result files is cumbersome and time-consuming, severely impacting production tact time and overall equipment utilization (OEE). Second, the lack of data integrity verification makes it highly prone to errors. The process of manually reading and entering data highly depends on the operator's concentration, making it prone to transcription errors, leading to data distortion in the MES system and affecting subsequent product quality traceability. Third, the lack of a real-time process interlock mechanism is the most critical hidden danger. In manual mode, data entry and batch posting are often asynchronous or simply record-keeping. When the measurement data produced by the equipment exceeds the specification limit, due to the lack of system-level real-time judgment and access control, operators may continue to perform the "posting" operation due to negligence or misjudgment, causing defective products (NGLot) to illegally flow to downstream processes, resulting in the spread of serious quality accidents.

[0006] Therefore, how to achieve standardized data interaction between such devices and MES systems without modifying the underlying hardware or communication interfaces of non-standard equipment, and to provide mandatory process control when data is abnormal, is a technical problem that urgently needs to be solved in the field of semiconductor automation. Summary of the Invention

[0007] The technical problem to be solved by this disclosure is to overcome the difficulties in data interaction between non-standard equipment and EAP and MES systems in the prior art, which leads to low efficiency due to reliance on manual data entry, easy transcription errors, and lack of real-time process interlock control based on data quality judgment. The disclosure provides a data processing method, system and electronic device for virtual EAP in semiconductor EAP systems.

[0008] This disclosure solves the above-mentioned technical problems through the following technical solution:

[0009] Firstly, a data processing method for virtual EAP in a semiconductor EAP system is provided, the method comprising:

[0010] Receive an inbound instruction for the target device and send an inbound request carrying the current batch identifier to the MES to establish an operation association between the current batch and the target device in the MES;

[0011] In response to the received data acquisition command, the system scans the preset output directory of the target device and parses the target result files in the output directory to extract measurement data according to the parsing rules that match the target device.

[0012] The measurement data is sent to the MES, and the quality judgment result fed back by the MES based on the preset specification limit is received;

[0013] Based on the quality judgment result, configure the executable state of the outbound operation control; wherein, if the quality judgment result indicates failure, the outbound operation control is set to a locked state to prevent the current batch from flowing to the next station.

[0014] Optionally, parsing the target result file in the output directory according to the parsing rules matching the target device includes:

[0015] Invoke the parsing rule engine to load the parsing template associated with the target device identifier;

[0016] Using the row locators, column locators, or regular expressions defined in the parsing template, the target field is retrieved from the unstructured text of the target result file;

[0017] Read the value of the target field and convert it into structured data that conforms to the MES interface specification.

[0018] Optionally, scanning the preset output directory of the target device includes:

[0019] Monitor the network shared path corresponding to the target device;

[0020] Files generated after the timestamp of sending the inbound request will be identified as candidate result files;

[0021] If the candidate result file is not found in the network shared path, an error message is generated and displayed on the interface.

[0022] Optionally, configuring the executable state of the outbound operation control based on the quality judgment result specifically includes:

[0023] If the quality judgment result is "pass", a pass status identifier is generated, and the property of the outbound operation control is set to the active state, allowing the response to subsequent outbound commands;

[0024] If the quality judgment result is "fail", an alarm status indicator is generated, and the attribute of the outbound operation control is set to "disabled" or "hidden".

[0025] Optionally, before receiving the inbound instruction for the target device, the method further includes:

[0026] Receive job query commands containing wafer box number or batch number;

[0027] Send a query request to the MES and receive the work order information and equipment status verification results returned by the MES;

[0028] If the device status verification result indicates that the operation is allowed, then the lock on the triggering permission for the entry command is released.

[0029] Optionally, the method further includes an exception handling step:

[0030] Before performing the outbound operation, in response to the received cancel inbound instruction, a status rollback request is sent to the MES to cancel the inbound status of the current batch in the MES;

[0031] Alternatively, in response to a received retest command, the currently cached measurement data can be cleared, and the scan status for the target result file can be reset.

[0032] Optionally, locating and parsing the target result file according to preset parsing rules further includes:

[0033] The full text of the target result file is scanned to retrieve the coordinate positions of preset semantic keywords corresponding to the measurement items to be extracted;

[0034] Based on the relative offset vector defined in the preset parsing rules, the cell position of the target data is calculated using the coordinate position of the semantic keyword as the anchor point;

[0035] Read the value at the cell location and perform data type validation on it. Only after the validation passes will the value be confirmed as the measurement data.

[0036] Optionally, the method is executed through a virtual agent program deployed on a separate server, which connects to the target device via a file-sharing protocol and communicates bidirectionally with the MES via a network interface.

[0037] Secondly, a virtual EAP system for the semiconductor industry is provided, the system comprising:

[0038] The human-computer interaction module is used to provide a visual operation interface and receive entry instructions, data acquisition instructions, and exit instructions for the target device.

[0039] The MES interaction and control module is used to respond to the inbound instruction by sending an inbound request carrying the current batch identifier to the MES, so as to establish an operation association between the current batch and the target device in the MES.

[0040] The parsing rules engine module is used to store parsing templates that match the target device, the parsing templates defining rules for extracting data from unstructured result files;

[0041] The data acquisition service module is used to respond to the data acquisition command, scan the preset output directory of the target device, and call the parsing rule engine module to parse the target result file in the output directory to extract measurement data.

[0042] The MES interaction and control module is further configured to: send the measurement data to the MES, receive the quality judgment result fed back by the MES based on a preset specification limit, and configure the executable state of the control corresponding to the outbound instruction in the human-machine interaction module according to the quality judgment result; wherein, if the quality judgment result indicates failure, the control corresponding to the outbound instruction is set to a locked state.

[0043] Thirdly, some embodiments of this application also provide an electronic device, the electronic device comprising: one or more processors; and a memory storing computer program instructions, which, when executed, cause the processor to perform the steps of the method described above.

[0044] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of this disclosure.

[0045] This disclosure achieves closed-loop quality control and mandatory error prevention based on decision feedback by executing the key steps of "receiving the quality judgment result from the MES based on preset specification limits" and "setting the outbound operation control to a locked state if the judgment result indicates failure". This technical means of dynamically configuring the control state (activated or locked) according to the judgment result constructs a system-level physical interlocking mechanism, which directly blocks the flow path of defective batches on the interface. It effectively solves the problem in the traditional manual mode where there is data but no mandatory constraints, leading to defective products flowing to the next process due to negligence, and significantly reduces production quality risks.

[0046] Furthermore, this disclosure utilizes the steps of "scanning the target device's preset output directory" and "parseting the target result file according to parsing rules to extract measurement data," combined with an independent proxy architecture that "connects to the target device via a file sharing protocol," to effectively solve the "communication island" problem of devices in a non-intrusive manner. This technical approach does not require modification of the hardware and control software of outdated equipment; it only uses file parsing to replace tedious manual data entry, eliminating the time wasted by operators frequently traveling between the device and the MES terminal. This allows for low-cost compatibility with non-standard devices that do not support standard protocols, significantly improving overall equipment utilization.

[0047] Furthermore, this embodiment employs an adaptive parsing step of "retrieving the coordinate positions of preset semantic keywords" and "calculating the cell position of the target data based on relative offset vectors," which greatly improves the robustness and data accuracy of the system. This technical feature allows data extraction to no longer rely on absolute row and column coordinates. Even if a minor row and column shift occurs in the output file format due to a device software upgrade, the system can still accurately locate the data through semantic anchors. Combined with the step of "validating the data type of the numerical values," this solution fundamentally eliminates data pollution caused by manual transcription errors and format drift, ensuring the authenticity and stability of the production data.

[0048] Finally, this disclosure ensures absolute compliance of production operations through rigorous timing logic and status verification steps. Before executing the entry request, the method determines whether to "unlock the triggering permission for the entry command" by "sending a query request to the MES and receiving the equipment status verification result," and further establishes the operation association between the current batch and the target equipment in the MES through the entry request. These steps enforce the standard operating sequence of "verification before operation," eliminating the risk of unauthorized entry. In addition, through the screening step of "identifying files generated after the timestamp of the entry request as candidate files," the system effectively eliminates interference from historical residual data, ensuring accurate correspondence between the data source and the current batch. Attached Figure Description

[0049] Figure 1 A flowchart illustrating a data processing method for virtual EAP in a semiconductor EAP system, provided as an exemplary embodiment of this disclosure.

[0050] Figure 2 A flowchart illustrating another data processing method for virtual EAP in a semiconductor EAP system, provided as an exemplary embodiment of this disclosure.

[0051] Figure 3 A flowchart illustrating another data processing method for virtual EAP in a semiconductor EAP system, provided as an exemplary embodiment of this disclosure.

[0052] Figure 4 This is a framework diagram of a virtual EAP system for the semiconductor industry provided in an exemplary embodiment of this disclosure.

[0053] Figure 5 This is a schematic diagram of the structure of an electronic device shown in an example embodiment of the present disclosure. Detailed Implementation

[0054] The present disclosure is further illustrated below by way of embodiments, but the present disclosure is not limited to the scope of the embodiments described herein.

[0055] The prefixes such as "first" and "second" used in this disclosure are merely for distinguishing different descriptive objects and do not limit the position, order, priority, quantity, or content of the described objects. The use of ordinal numbers and other prefixes used to distinguish descriptive objects in this disclosure does not constitute a limitation on the described objects. The description of the described objects is given in the context of the embodiments, and the use of such prefixes should not constitute unnecessary restrictions. Furthermore, in the description of this embodiment, unless otherwise stated, "multiple" means two or more.

[0056] Figure 1 A flowchart illustrating a data processing method for a virtual EAP in a semiconductor EAP system, according to an exemplary embodiment of this disclosure, is shown. This method is typically executed by a virtual EAP (Equipment Automation Program) system deployed on a server or workstation, designed to provide automated data interaction and process control for non-standard equipment that does not support standard communication protocols. Here, the virtual EAP refers to a logical agent specifically designed for non-standard equipment; it does not establish an underlying physical communication connection with the equipment and is unaware of the equipment's presence. Furthermore, its inbound, data acquisition, and outbound processes rely on manual triggering by the operator via buttons on an interface. The method includes:

[0057] S101. Receive an entry instruction for the target device and send an entry request carrying the current batch identifier to the MES to establish an operation association between the current batch and the target device in the MES.

[0058] Specifically, first, step S101 is executed, receiving the track-in instruction for the target equipment and sending a track-in request carrying the current batch identifier to the MES to establish a job association between the current batch and the target equipment in the MES. In practical applications, the operator selects the machine to be operated (i.e., the target equipment) on the client interface provided by the virtual EAP and scans or enters the wafer box ID or lot ID to trigger the track-in instruction. The virtual EAP system, acting as an "intermediary agent," then initiates a standard track-in transaction request to the Manufacturing Execution System (MES). Once the MES confirms the request is valid, it updates the status of the batch to "Processing" at the target equipment site. The key to this step is that it formally establishes an exclusive job relationship between the batch and the non-standard equipment at the system level, locking in a unique data source for subsequent data acquisition.

[0059] S102. In response to the received data acquisition command, scan the preset output directory of the target device, and parse the target result file in the output directory to extract measurement data according to the parsing rules that match the target device.

[0060] Specifically, once the physical operation is complete, the equipment automatically outputs the results as a CSV, Excel, or text file to a designated network shared folder. At this point, the operator triggers a data acquisition command on the interface, immediately accessing the shared directory. To ensure accuracy, the file is parsed according to a pre-configured parsing template (which defines the row and column positions or key keywords for critical data). Typically, the system combines the file's generation timestamp with the entry time in step S101 to intelligently filter out the latest result file belonging to the current batch, accurately extracting target measurement values ​​such as thickness, line width, or warpage, and converting them into structured data that the MES can recognize.

[0061] S103. Send the measurement data to the MES and receive the quality judgment result from the MES based on the preset specification limit.

[0062] Specifically, at this stage, the virtual EAP packages the parsed structured data and sends it to the MES system. The MES system, acting as the "brain" of quality management, will compare the uploaded data in real time with the preset specification limits (such as USL / LSL) in the corresponding product's recipe. After the comparison is complete, the MES system will immediately return a feedback signal to the virtual EAP system containing a decision (such as "Pass / OK" or "Fail / NG").

[0063] S104. Configure the executable state of the outbound operation control according to the quality judgment result; wherein, if the quality judgment result indicates failure, the outbound operation control is set to a locked state to prevent the current batch from flowing to the next station.

[0064] Specifically, the virtual EAP system dynamically refreshes the user interface (UI) based on the decision signal returned by the MES. If the decision result is "pass," the "TrackOut" button on the interface will become clickable and active, allowing the process to continue; conversely, if the decision result is "fail," the "TrackOut" button will be immediately grayed out, disabled, or hidden, thus physically cutting off the path for that batch to the next process. This mechanism constitutes a system-level interlock, forcing engineers to intervene in handling anomalies, thereby effectively preventing the unauthorized outflow of defective products.

[0065] Based on the above embodiments, this disclosure can significantly improve the real-time performance and enforceability of production quality control. By introducing real-time decision logic from the MES in steps S103 and S104, this method is no longer merely a data transfer tool, but becomes an integral part of quality management. Once the measurement data produced by the equipment exceeds the preset specification limits, the system will immediately lock the outbound operation control based on the feedback from the MES, directly blocking the path of defective batches to downstream processes at the physical interaction level. This system-level interlocking mechanism effectively solves the problem of defective products being illegally released due to operator negligence, forgetfulness, or subjective misjudgment in the traditional manual mode, greatly reducing the quality risk of the production line.

[0066] Furthermore, for older or non-standard equipment that does not support the standard SECS / GEM protocol, this method, through the file parsing and virtual proxy mechanism in step S102, eliminates the need for expensive modifications to the underlying hardware or control software of the equipment. Standardized data interaction can be achieved solely using the output file. This process replaces the tedious manual review and data entry steps, eliminating the time wasted by operators frequently traveling between the equipment and the computer, thereby significantly improving equipment utilization (OEE) and production cycle time.

[0067] Finally, this embodiment establishes operational compliance and data accuracy through standardized work processes. The method strictly follows a closed-loop sequence (S101-S104) of "entry locking - data parsing - decision feedback - exit release," constructing a standard operating procedure (SOP). Specifically, the automatic data extraction based on the parsing rule engine completely eliminates reading or input errors that are highly likely to occur during manual data transcription, ensuring the authenticity and traceability of production data. Simultaneously, this mandatory process control reduces reliance on the experience of senior operators, enabling even new employees to complete complex measurement tasks with zero errors under the system's guidance.

[0068] In one embodiment, parsing the target result file in the output directory according to the parsing rules matching the target device includes:

[0069] Invoke the parsing rule engine to load the parsing template associated with the target device identifier;

[0070] Using the row locators, column locators, or regular expressions defined in the parsing template, the target field is retrieved from the unstructured text of the target result file;

[0071] Read the value of the target field and convert it into structured data that conforms to the MES interface specification.

[0072] Specifically, when the monitoring service scans a target device and generates a new result file, it first activates the core Parsing Rule Engine. This engine does not directly process the file; instead, it first reads the "target device identifier" from the current task context and retrieves and loads the associated "parsing template" from the backend database. The parsing template defines in detail the structural characteristics of the output file from that specific device, such as the file's encoding format, delimiter type (comma, tab, or space), and the logical location of key data. Subsequently, the parsing rule engine opens the target result file, treating it as an unstructured text stream, and uses the positioning strategy defined in the template to retrieve data. For tabular files with fixed formats (such as Excel or standard CSV), the engine uses a "coordinate positioning" mode, directly locating the cell storing the measurement value based on the preset "row locator" and "column locator" in the template (e.g., row 5, column 3). For text files with flexible formats or floating content, the engine uses a "regular expression matching" mode, scanning the entire text with predefined regular expressions to find specific semantic tags (such as "Thickness_Avg=") and accurately capturing the numerical string following the tag. Finally, the target field values ​​located in the above steps are read and standardized, cleaned, and transformed. Since the original output from the device may contain unit symbols, special characters, or abnormal spaces, the parsing engine trims the original data and converts it into standard data types (such as floating-point numbers or integers) according to the requirements of the MES system. The processed data is finally encapsulated into a structured data packet conforming to the MES interface specification (such as SECS format or a specific JSON structure), thus bridging the gap from "non-standard files" to "standard data" and ensuring that the subsequent MES system can receive and process this data without obstacles.

[0073] In the above embodiments, the system's compatibility and scalability are greatly improved by constructing a generalized parsing rule engine and a configurable template mechanism. Faced with the diverse brands of non-standard equipment and the wide variety of output file formats (such as Excel, CSV, TXT, and Log) in semiconductor factories, this embodiment eliminates the need to develop dedicated hard-coded interfaces for each new device. Access can be completed simply by configuring the corresponding parsing template. This decoupled design allows the system to quickly adapt to new machines, significantly reducing software development costs and deployment cycles. Secondly, this embodiment combines coordinate positioning and regular expression matching to effectively solve the problem of unstructured data extraction, ensuring high-precision data acquisition. For strictly formatted table files, coordinate positioning can quickly locate the data; while for loosely formatted log files or log files containing a large amount of redundant information, regular expressions can accurately capture target values ​​based on semantic features. This flexible parsing strategy not only improves the success rate of data capture but also has a certain degree of anti-interference capability, avoiding data mis-collection caused by minor changes in file format. Finally, this embodiment eliminates the format gap between the raw data on the device and the MES system interface through data cleaning and standardization transformation steps. Automatically removing unit symbols, spaces, or illegal characters from the raw data and converting it into the standard data type required by MES not only reduces the processing burden of the MES system but also ensures the standardization and usability of the incoming data from the source, providing a high-quality data foundation for subsequent statistical process control (SPC) and yield analysis.

[0074] In one embodiment, scanning the preset output directory of the target device includes:

[0075] Monitor the network shared path corresponding to the target device;

[0076] Files generated after the timestamp of sending the inbound request will be identified as candidate result files;

[0077] If the candidate result file is not found in the network shared path, an error message is generated and displayed on the interface.

[0078] Specifically, when an operator triggers the "data acquisition" command on the client interface, the background data acquisition service module does not directly read the file. Instead, it first starts a monitoring program for the target device's preset output directory. This directory is usually mounted on the server as a network shared path and accessed via SMB or FTP protocols, thereby establishing a logical connection with the device's storage space.

[0079] Subsequently, files generated after the timestamp of the TrackIn request are identified as candidate result files. The exact time of the TrackIn operation for the current batch is retrieved from the local database or MES records as a time baseline. Next, all files in the shared path are traversed, their creation or last modification time is read, and compared with the baseline. Only files with timestamps later than the TrackIn time are considered valid files newly generated within the current job cycle and marked as "candidate result files." This logic effectively filters out residual historical job data in the directory, preventing misattribution due to mistakenly retrieving old files.

[0080] Finally, if no candidate result file is found under the network shared path (i.e., the directory is empty, or the timestamps of all files in the directory are earlier than the entry time), it will be determined that the data has not been generated or the path configuration is incorrect. In this case, the system will immediately generate an error message and display a prominent error window on the front-end human-machine interface (e.g., "No new data found, please check if the device has saved the file"). This immediate feedback mechanism guides operators to promptly check the status of the device, avoiding production stoppages caused by silent failures.

[0081] In this embodiment, by introducing an "entry timestamp" as the anchor point for determining file validity, the accuracy and anti-interference capability of data acquisition from non-standard equipment are significantly improved. In actual production, the output directory of non-standard equipment often accumulates a large number of historical files, and the filenames may be duplicated or disordered. This solution utilizes the logic that "the operation must occur after entering the station" and, through a time window filtering mechanism, accurately removes interference from historical residual data without relying on complex filename parsing, ensuring that the system captures the latest operation results. Simultaneously, the anomaly alert mechanism provided in this embodiment enhances the system's usability and maintainability. It fills the communication gap of non-standard equipment lacking "operation completion signals." When a break occurs in the data stream (such as the equipment not saving data or network interruption), the system can replace manual inspection and proactively issue alarms, helping on-site personnel quickly locate the root cause of the problem and reducing the invalid waiting time caused by missing data.

[0082] In one embodiment, configuring the executable state of the outbound operation control based on the quality judgment result specifically includes:

[0083] If the quality judgment result is "pass", a pass status identifier is generated, and the property of the outbound operation control is set to the active state, allowing the response to subsequent outbound commands;

[0084] If the quality judgment result is "fail", an alarm status indicator is generated, and the attribute of the outbound operation control is set to "disabled" or "hidden".

[0085] Specifically, when the MES returns a "PASS" quality judgment result, a prominent pass status indicator (such as a green "OK" icon or "GO" text) is first generated in the judgment result display area of ​​the interface, providing the operator with intuitive visual feedback. Simultaneously, the "TrackOut" operation control is set to the enabled state in the background, releasing the previous logical lock. At this time, the trackout button on the interface changes from grayed-out to highlighted and clickable, allowing the system to respond to subsequent trackout commands triggered by the operator, thereby driving the batch to flow normally to the next process.

[0086] Conversely, if the MES returns a "FAIL / NG" quality judgment, the anomaly blocking mechanism will be triggered immediately. A pop-up alarm will appear on the interface immediately, or a prominent red alarm status indicator will be generated, clearly indicating to the operator that the current measurement data exceeds the limits. More importantly, the properties of the "Outbound" control will be forcibly modified, setting it to "Disable" or directly hiding the button on the interface. This action physically cuts off the only entry point for batch posting at the software level. Regardless of whether the operator is aware of the data anomaly, they cannot perform outbound operations, thus forcing the process to pause, waiting for engineers to investigate the anomaly or execute the batch hold lot procedure.

[0087] In this embodiment, by directly mapping the backend decision logic of the MES to the operation permissions of the frontend interface, the "physicalization" and "enforcement" of production quality control are achieved. Unlike the traditional model, which relies solely on operators visually inspecting data and verbally confirming yield rates, this solution constructs a robust system-level interlock. When a quality risk arises, the system can directly deprive the operator of subsequent operation rights without relying on subjective human judgment, fundamentally preventing defective products from flowing out due to operator fatigue or violations, and ensuring that only qualified products can pass through the system. Furthermore, this embodiment significantly improves the intuitiveness of human-machine interaction and production safety. Through dynamic visual feedback of "green passage, red lock," the cognitive load on operators is greatly reduced. Operators do not need to laboriously interpret complex measurement values ​​or memorize cumbersome specifications; they only need to follow the status indicators on the interface (signal light-style management) to complete compliant operations. This WYSIWYG permission management mechanism minimizes the possibility of human error and ensures the operational standardization of the production line under high-paced operation.

[0088] In one embodiment, prior to receiving the inbound instruction for the target device, the method further includes:

[0089] Receive job query commands containing wafer box number or batch number;

[0090] Send a query request to the MES and receive the work order information and equipment status verification results returned by the MES;

[0091] If the device status verification result indicates that the operation is allowed, then the lock on the triggering permission for the entry command is released.

[0092] Specifically, the operator first performs a "job query" operation on the human-machine interface, typically triggered by scanning the barcode on the wafer cassette with a barcode scanner or manually entering the batch number (Lot ID). Upon receiving this instruction, the virtual EAP system immediately sends a real-time query request to the MES system (such as the Request Job Info interface). The MES system then performs rigorous logical checks in the background: on the one hand, it verifies whether the current logistics status of the batch is indeed at the site and not in a frozen (Hold) state; on the other hand, it checks the operating status of the target equipment (such as whether it is in an Up / Run state). Only when all conditions—personnel, machinery, materials, and methods—meet the production requirements will the MES return an instruction to allow the job and detailed work order information (such as product model, quantity, process formula name, etc.).

[0093] Before receiving the verification result from the MES, the "Track In" button on the interface is locked (unclickable) by default. Once the system receives the "Allow Job" feedback from the MES, it immediately unlocks the permission, activates the "Track In" button, and displays the work order details obtained from the MES on the interface for the operator to verify. This design ensures that the operator can only initiate subsequent track in actions after the system confirms that everything is ready, thus establishing a robust operational firewall.

[0094] In this embodiment, the introduction of a pre-locking mechanism of "query and verify first, then unlock operation" significantly improves the compliance and security of production operations. In traditional operations, operators may inadvertently process incorrect batches or force entry into the system while equipment is malfunctioning, leading to discrepancies between records and actual inventory. This solution utilizes the logical verification capabilities of the MES to double-confirm the "correct materials" and "correct equipment status" before physical operations begin, eliminating the risk of incorrect material processing and unauthorized entry at the source. Simultaneously, this embodiment enhances the operator's awareness of production information, helping to reduce errors in formula settings. By automatically retrieving and displaying work order information (especially process formula names) before entry, the system provides operators with a standard verification basis. Operators can intuitively compare the formula displayed on the interface with the actual formula set on the equipment, ensuring that the process parameters are correct before unlocking entry permissions, thereby further guaranteeing the consistency and yield of product processing.

[0095] In one embodiment, the method further includes an exception handling step:

[0096] Before performing the outbound operation, in response to the received cancel inbound instruction, a status rollback request is sent to the MES to cancel the inbound status of the current batch in the MES;

[0097] Alternatively, in response to a received retest command, the currently cached measurement data can be cleared, and the scan status for the target result file can be reset.

[0098] Specifically, for scenarios where "anomalies are detected after entry," a "Cancel TrackIn" function is provided. For example, if an operator completes the entry operation but suddenly finds that the equipment alarms and cannot continue working, or realizes that the wrong batch number has been scanned, the operator can click the "Cancel TrackIn" command on the interface. The virtual EAP system responds to this command by immediately sending a status rollback request (such as TrackIn Cancel Transaction) to the MES. After receiving the request, the MES will roll back the status of the batch in the system from "Processing" to "Queued / Waiting," thereby revoking the previous locked state. This allows the batch to be scheduled for processing on other normal machines, or allows the operator to rescan the correct batch.

[0099] For scenarios involving "data acquisition errors," a "Rework / Remeasure" function is provided. This typically occurs when operators discover significant anomalies in the parsed data (e.g., the file reads residual data from a previous batch), or when physical operations fail to meet standards and require remeasurement. When an operator triggers the "Rework" command, local data cleaning is performed: first, parsed and cached measurement data is cleared from memory to prevent erroneous uploads; simultaneously, the scan pointer for the target result file is reset, changing its status to "Pending Acquisition." This allows operators to re-perform physical measurements or re-trigger file scans, overwriting previous error records and ensuring that the data ultimately uploaded to the MES is valid data that has undergone secondary verification.

[0100] In this embodiment, a robust exception handling mechanism significantly enhances the system's flexibility and fault tolerance. In traditional systems lacking a "cancel entry" function, if an operator mistakenly makes an entry, it often requires contacting the IT department or production manager to modify the database in the MES backend to revert the error—a cumbersome and time-consuming process. This solution delegates this authority to the virtual EAP system, enabling on-site operators to immediately correct process delays caused by accidental errors or equipment malfunctions, reducing non-productive waiting time. Simultaneously, the retesting mechanism in this embodiment effectively ensures data integrity. This means that corrupted data resulting from incorrect file selection or equipment malfunctions can be intercepted and cleaned at the virtual EAP layer, preventing erroneous data from contaminating the MES system's historical records and ensuring that all data ultimately entering the quality traceability chain is authentic and valid.

[0101] In one embodiment, locating and parsing the target result file according to preset parsing rules further includes:

[0102] The full text of the target result file is scanned to retrieve the coordinate positions of preset semantic keywords corresponding to the measurement items to be extracted;

[0103] Based on the relative offset vector defined in the preset parsing rules, the cell position of the target data is calculated using the coordinate position of the semantic keyword as the anchor point;

[0104] Read the value at the cell location and perform data type validation on it. Only after the validation passes will the value be confirmed as the measurement data.

[0105] Specifically, when initiating the parsing process, the parsing rule engine first scans the entire content of the target result file, rather than directly jumping to a fixed cell. Based on the "semantic keywords" (e.g., "Average_Thickness", "Site_1_Data", or "#Result#") defined in the pre-configured parsing template, it retrieves the specific coordinates (i.e., anchor coordinates) of these feature strings from the messy file text. These keywords are usually relatively fixed headers or labels in the file structure; even if the data position changes, the names of these labels usually remain unchanged. After establishing the anchor point, based on the "relative offset vector" (e.g., "offset 1 column to the right" or "offset 2 rows down") defined in the preset parsing rules, the engine dynamically calculates the actual cell position of the target measurement data, using the coordinates of the semantic keywords as the origin. For example, regardless of which line the label "Average_Thickness" appears in, it always retrieves the value from the cell immediately to its right. Subsequently, the value at that calculated position is read, and strict data type validation is immediately performed. The system checks whether the extracted content conforms to the expected numerical format (e.g., whether it is a valid floating-point number). Only when the content passes the validation, proving that it is indeed a valid measurement reading and not a text header or a null value, will the system recognize it as the final measurement data.

[0106] In this embodiment, the introduction of a dynamic parsing technique combining "semantic anchors + relative offsets" significantly enhances the robustness of the virtual EAP system to changes in device file formats. When faced with minor "drifts" in file rows and columns caused by device software upgrades, this solution eliminates the need for frequent modifications to parsing templates or redevelopment of interfaces, unlike traditional hard-coding methods. As long as the key tags identifying data in the file (such as table header names) remain unchanged, the system can automatically adapt to positional changes and accurately retrieve data. This significantly reduces system maintenance costs and ensures the continuous operation of automated production lines during equipment changeovers. Simultaneously, the integrated "data type verification" step in this embodiment forms the final line of defense for data integrity. In unstructured text parsing, misreading text characters due to positioning errors (such as misreading "Unit" as a numerical value) is highly likely. This solution, through mandatory type checking, ensures that only valid numerical values ​​can enter the system, effectively preventing system errors or quality traceability chaos caused by "dirty data" entering the MES, thereby guaranteeing the purity and reliability of production data.

[0107] In one embodiment, the method is executed through a virtual agent program deployed on a standalone server, which connects to the target device via a file-sharing protocol and communicates bidirectionally with the MES via a network interface.

[0108] Specifically, the virtual data processing method does not run directly on the target device's local controller, but is executed by a virtual agent program deployed on a standalone server (or a standard industrial PC). This standalone server is located in the factory's office network or dedicated automation network layer, connected via a standard Ethernet physical link. Regarding the connection to the target device, the virtual agent program utilizes common file-sharing protocols such as SMB (Server Message Block), CIFS, or FTP to map the target device's local hard drive used to store result files as a network drive on the server. This connection method is "non-intrusive"; for the target device, the virtual EAP is merely an external access user with read-only permissions, without consuming the device's CPU resources or interfering with its underlying PLC control logic. Regarding the connection to the Manufacturing Execution System (MES), the virtual agent program establishes a bidirectional communication channel through a TCP / IP network interface. It typically integrates TIBCO RV, IBM MQ message middleware, or Web Service / Restful API interfaces, enabling it to proactively send inbound (Track In), outbound (Track Out), and data upload transaction requests to the MES, just like a standard SECS / GEM device, and receive verification instructions and judgment results from the MES in real time. Through this architecture, the virtual agent program achieves automated data flow while maintaining physical isolation between the device and the MES.

[0109] In this embodiment, the architecture of independent server deployment and file-sharing connection significantly improves the system's security and stability. Since the virtual EAP program runs entirely on an external server, it is decoupled from the production equipment at the hardware level. This means that even if the virtual EAP program crashes or undergoes a version update, it will absolutely not affect the normal physical operation of the target equipment, completely eliminating the risk of equipment downtime due to automation software failures. This is especially important for semiconductor measurement equipment running outdated operating systems and being extremely sensitive to resources. At the same time, this embodiment greatly reduces implementation costs and maintenance complexity. This solution does not require installing additional network cards, adapter boxes, or purchasing expensive SECS / GEM conversion cards on each device; deployment can be completed using only the existing factory LAN. Furthermore, a single high-performance independent server can simultaneously host multiple virtual EAP instances and monitor multiple non-standard devices. This "one-to-many" centralized deployment model significantly reduces hardware investment costs and IT maintenance workload.

[0110] The following explanation uses measuring equipment as an example. Figure 2 and Figure 3 As shown:

[0111] 1. Work order initiation and payment:

[0112] (1) The operator scans the Lot ID on the virtual EAP interface.

[0113] (2) The virtual EAP sends the Lot ID to the MES to request and obtain the current job information.

[0114] (3) After MES verifies that the Lot status is valid, it returns an instruction to allow the job.

[0115] (4) When the operator clicks the “Receive Payment” button, the virtual EAP sends a receipt transaction to the MES, and the MES updates the status of the Lot to “Processing” at the device site.

[0116] 2. Physics homework:

[0117] (1) The operator places the wafer box on the equipment, starts the equipment, and completes the measurement operation.

[0118] (2) The equipment software automatically generates a result file containing measurement data.

[0119] 3. Data collection and uploading:

[0120] (1) The operator clicks the “Data Collection” button on the virtual EAP interface.

[0121] (2) The file monitoring and parsing service of the virtual EAP is triggered, automatically locates and parses the newly generated result file, and extracts the preset measurement values ​​(such as Thickness, Angle, etc.).

[0122] (3) The virtual EAP uploads the extracted measurement data to the MES.

[0123] 4. Quality Judgment and Feedback:

[0124] After receiving the measurement data, MES calls the internally preset specification limit for automatic comparison and judgment.

[0125] The decision was approved: MES returned a "data OK" signal. The virtual EAP interface prompted the operator that the billing process could proceed.

[0126] If the decision is not approved: MES returns a "data NG" signal and automatically or prompts the operator to perform a Hold Lot operation to lock the batch, preventing it from flowing to the next station and preventing the defect from spreading.

[0127] 5. Billing:

[0128] Once the MES decision is approved, the operator clicks the "Payout" button.

[0129] The virtual EAP sends an outbound transaction to the MES, which updates the status of the Lot to "complete" and allows it to flow to the next site.

[0130] Figure 4 This embodiment illustrates a schematic diagram of the structural framework of a virtual EAP system for the semiconductor industry. The system employs a modular design, aiming to build a "virtual agent" with data awareness and process control capabilities for non-standard semiconductor devices that do not support standard communication protocols. Figure 4 As shown, the system mainly consists of four core components: human-computer interaction module 1, MES interaction and control module 2, parsing rule engine module 3, and data acquisition service module 4.

[0131] Human-computer interaction module 1 is used to provide a visual operation interface and receive entry instructions, data acquisition instructions, and exit instructions for the target device.

[0132] MES Interaction and Control Module 2 is used to respond to the entry command by sending an entry request carrying the current batch identifier to the MES, so as to establish an operation association between the current batch and the target device in the MES;

[0133] Parsing rule engine module 3 is used to store parsing templates that match the target device, wherein the parsing templates define rules for extracting data from unstructured result files;

[0134] Data acquisition service module 4 is used to respond to the data acquisition command, scan the preset output directory of the target device, and call the parsing rule engine module to parse the target result file in the output directory to extract measurement data;

[0135] The MES interaction and control module is further configured to: send the measurement data to the MES, receive the quality judgment result fed back by the MES based on a preset specification limit, and configure the executable state of the control corresponding to the outbound instruction in the human-machine interaction module according to the quality judgment result; wherein, if the quality judgment result indicates failure, the control corresponding to the outbound instruction is set to a locked state.

[0136] First, the Human-Computer Interaction Module 1 is the user-facing front-end window of the entire system. It is configured to provide a simple and visual user interface (GUI) on client devices (such as PCs or tablets). This interface not only displays the current work order information and machine status in real time, but more importantly, it serves as the entry point for command input, responsible for receiving various business commands triggered by the operator for the target equipment. These commands include the "TrackIn" command before the physical operation begins, the "Data Collection" command that triggers file reading after the operation is completed, and the "TrackOut" command that releases the batch after confirmation.

[0137] Secondly, at the beginning of the operation, the MES interaction and control module 2 responds to the entry command by sending an entry request carrying the current batch identifier (Lot ID) to the Manufacturing Execution System (MES). This action formally establishes a logical operation association between the "current batch" and the "target device" in the MES database, locking the batch to that device node and ensuring that the subsequently collected data has clear ownership.

[0138] Furthermore, the parsing rule engine module 3, acting as a knowledge base, stores and manages parsing templates that match different target devices. These templates define in detail the logical rules (such as coordinate positioning or regular expression matching) for extracting key data from various unstructured result files (such as Excel, CSV, and Log). When the data acquisition service module 4 responds to an instruction and scans the preset output directory of the target device and finds a new file generated, it immediately calls the rules in engine module 3 to intelligently parse the file and extract the target measurement data.

[0139] Finally, the MES interaction and control module 2 is also used to extract and clean the measurement data, upload it to the MES, and wait to receive the quality judgment result returned by the MES based on the preset process specification limits. According to this feedback result, the system dynamically configures the executable state of the control corresponding to the "outbound" command in the human-machine interaction module 1: once the judgment result indicates that the data exceeds the specification (fails), the module will immediately set the outbound control to a locked state (such as disabling or hiding the button), thereby forcibly cutting off the flow path of defective products at the system level.

[0140] In this embodiment, the virtual EAP system achieves high flexibility and scalability in non-standard equipment management through a modular and decoupled design. The independent configuration of the parsing rule engine module 3 allows the system to quickly adapt to newly introduced equipment or changed file formats by configuring templates rather than modifying code, solving the problem of high maintenance costs associated with traditional hard-coding methods. Simultaneously, the "judgment-lock" feedback mechanism built by the MES interaction and control module 2 elevates the granularity of quality management from post-event traceability to in-process interception, effectively preventing defective products from leaving the production line due to human error and significantly improving the yield and compliance levels of the production line. Furthermore, the non-intrusive scanning mechanism of the data acquisition service module 4 ensures automated data acquisition without interfering with the physical operation of the equipment, maximizing the operational stability of older machines.

[0141] For the system embodiments, since they basically correspond to the method embodiments, the relevant parts can be referred to in the description of the method embodiments. The system embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this disclosure according to actual needs.

[0142] Furthermore, some embodiments of this application also provide an electronic device. The electronic device can be various forms of digital computer, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, etc. The electronic device can also be various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices, and other similar computing devices.

[0143] The electronic device includes: one or more processors; and a memory storing computer program instructions that, when executed, cause the processor to perform the steps of the methods provided in any one or more of the above embodiments. Figure 5An exemplary structural diagram of the electronic device is disclosed. The electronic device includes one or more processors 1101, a memory 1102, and interfaces for connecting the components, including high-speed interfaces and low-speed interfaces. The components are interconnected via different buses and can be mounted on a common motherboard or otherwise installed as needed. The processors can process instructions executed within the electronic device, including instructions stored in or on memory to display graphical information of a GUI on an external input / output device (such as a display device coupled to the interface). In some other embodiments, multiple processors and / or multiple buses can be used with multiple memories and multiple memory modules, if desired. Similarly, multiple electronic devices can be connected, each providing some of the necessary operations. The components, their connections and relationships, and their functions shown herein are merely examples and are not intended to limit the implementation of the present application described and / or claimed herein.

[0144] The electronic device may further include an input device 1103 and an output device 1104. The processor 1101, memory 1102, input device 1103 and output device 1104 may be connected by a bus or other means, as shown in the figure, which is connected by a bus.

[0145] Input device 1103 can receive input numerical or character information, and generate key signal inputs related to user settings and function control of the electronic device, such as a touch screen, keypad, mouse, trackpad, touchpad, joystick, one or more mouse buttons, trackball, joystick, etc. Output device 1104 may include a display device, auxiliary lighting device (e.g., LED), and haptic feedback device (e.g., vibration motor). The display device may include, but is not limited to, a liquid crystal display, a light-emitting diode display, and a plasma display. In some embodiments, the display device may be a touch screen.

[0146] To provide interaction with the user, the electronic device can be a computer. The computer has: a display device (e.g., a cathode ray tube or LCD monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse) through which the user provides input to the computer. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback); and input from the user can be received in any form (e.g., voice input or tactile input).

[0147] In this embodiment, a computer-readable medium stores a computer program / instructions that, when executed by a processor, implement the steps of the methods provided in any one or more of the above embodiments. This computer-readable medium may be included in the electronic device described in the above embodiments; or it may exist independently and not assembled into that device. The aforementioned computer-readable medium carries one or more computer-readable instructions.

[0148] The memory 1102 can serve as a non-transitory computer-readable storage medium, used to store non-transitory software programs, non-transitory computer-executable programs, and modules. The processor 1101 executes various functional applications and data processing of the server by running the non-transitory software programs, instructions, and modules stored in the memory 1102, thereby implementing the program instructions / modules corresponding to the methods provided in any one or more of the embodiments described above in this application.

[0149] The memory 1102 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created based on the use of the electronic device. Furthermore, the memory 1102 may include high-speed random access memory and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory 1102 may optionally include memory remotely located relative to the processor 1101, and these remote memories can be connected to the electronic device via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

[0150] It should be noted that the computer-readable medium described in this application can be a computer-readable signal medium or a computer-readable storage medium, or any combination thereof. Computer-readable media can be, for example, but not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatuses, or devices, or any combination thereof. More specific examples of computer-readable storage media may include, but are not limited to, electrical connections having one or more wires, portable computer disks, hard disks, random access memory, read-only memory, erasable programmable read-only memory, optical fibers, portable compact disk read-only memory, optical storage devices, magnetic storage devices, or any suitable combination thereof. In this application, a computer-readable medium can be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, apparatus, or device.

[0151] Computer-readable media include permanent and non-permanent, removable and non-removable media, which can store information by any method or technology. Information can be computer-readable instructions, data structures, program modules, or other data. Examples of computer storage media include, but are not limited to, phase-change memory, static random access memory, dynamic random access memory, other types of random access memory, read-only memory, electrically erasable programmable read-only memory, flash memory or other memory technologies, read-only optical discs, digital versatile optical discs or other optical storage, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other non-transfer medium that can be used to store information accessible by a computing device.

[0152] Computer program code for performing the operations of this application can be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, and C++, and conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer via any type of network—including local area networks (LANs) or wide area networks (WANs), or it can be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0153] In the above embodiments, all or part of the implementation can be achieved through software, hardware, firmware, or any combination thereof. For example, it can be implemented using an application-specific integrated circuit (ASIC), a general-purpose computer, or any other similar hardware device. In some embodiments, the software program of this application can be executed by a processor to implement the above steps or functions. Similarly, the software program of this application (including related data structures) can be stored in a computer-readable recording medium, such as RAM memory, magnetic or optical drives, floppy disks, and similar devices. In addition, some steps or functions of this application can be implemented in hardware, for example, as circuitry that cooperates with a processor to perform the various steps or functions.

[0154] The computer program product provided in this application includes one or more computer programs / instructions. When executed by a processor, these computer programs / instructions generate, in whole or in part, the processes or functions described in this application. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or data center that integrates one or more available media. The available medium may be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., solid-state drive), etc.

[0155] The flowcharts or block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of devices, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, may be implemented using a dedicated hardware-specific system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0156] The scope of this application is defined by the appended claims rather than the foregoing description, and is therefore intended to encompass all variations falling within the meaning and scope of equivalents of the claims. No reference numerals in the claims should be construed as limiting the scope of the claims. Furthermore, it is clear that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices recited in a device claim may also be implemented by a single unit or device in software or hardware. Terms such as "first," "second," etc., are used only for distinguishing descriptions and do not indicate any particular order, nor should they be construed as indicating or implying relative importance.

[0157] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily made by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims, and the above embodiments should be regarded as exemplary and non-limiting.

Claims

1. A data processing method for virtual EAP in a semiconductor EAP system, characterized in that, The method includes: Receive an inbound instruction for the target device and send an inbound request carrying the current batch identifier to the MES to establish an operation association between the current batch and the target device in the MES; In response to the received data acquisition command, the preset output directory of the target device is scanned, where the output directory is the network shared path corresponding to the target device; The latest target result file belonging to the current batch is selected by filtering the timestamps generated by the files in the output directory and the time point of the target device's entry instruction. According to the parsing rules matching the target device, the target result file in the output directory is parsed to extract measurement data; the measurement data is sent to the MES, and the quality judgment result fed back by the MES based on the preset specification limit is received; Based on the quality judgment result, configure the executable state of the outbound operation control; wherein, if the quality judgment result indicates failure, the outbound operation control is set to a locked state to prevent the current batch from flowing to the next station; The step of parsing the target result file in the output directory according to the parsing rules matching the target device includes: Invoke the parsing rule engine to obtain the target device identifier, and load the parsing template associated with the target device identifier; Using the row locators, column locators, or regular expressions defined in the parsing template, the target field is retrieved from the unstructured text of the target result file; Read the value of the target field and convert it into structured data that conforms to the MES interface specification.

2. The method according to claim 1, characterized in that, The preset output directory of the target device being scanned includes: Monitor the network shared path corresponding to the target device; Files generated after the timestamp of sending the inbound request will be identified as candidate result files; If the candidate result file is not found in the network shared path, an error message is generated and displayed on the interface.

3. The method according to claim 1, characterized in that, The step of configuring the executable state of the outbound operation control based on the quality judgment result specifically includes: If the quality judgment result is "pass", a pass status identifier is generated, and the property of the outbound operation control is set to the active state, allowing the response to subsequent outbound commands; If the quality judgment result is "fail", an alarm status indicator is generated, and the attribute of the outbound operation control is set to "disabled" or "hidden".

4. The method according to claim 1, characterized in that, Before receiving the inbound instruction for the target device, the method further includes: Receive job query commands containing wafer box number or batch number; Send a query request to the MES and receive the work order information and equipment status verification results returned by the MES; If the device status verification result indicates that the operation is allowed, then the lock on the triggering permission for the entry command is released.

5. The method according to claim 1, characterized in that, The method also includes an exception handling step: Before performing the outbound operation, in response to the received cancel inbound instruction, a status rollback request is sent to the MES to cancel the inbound status of the current batch in the MES; Alternatively, in response to a received retest command, the currently cached measurement data can be cleared, and the scan status for the target result file can be reset.

6. The method according to claim 1, characterized in that, The step of locating and parsing the target result file according to the preset parsing rules also includes: The full text of the target result file is scanned to retrieve the coordinate positions of preset semantic keywords corresponding to the measurement items to be extracted; Based on the relative offset vector defined in the preset parsing rules, the cell position of the target data is calculated using the coordinate position of the semantic keyword as the anchor point; Read the value at the cell location and perform data type validation on it. Only after the validation passes will the value be confirmed as the measurement data.

7. The method according to claim 1, characterized in that, The method is executed through a virtual agent program deployed on a standalone server. The virtual agent program is connected to the target device via a file sharing protocol and communicates bidirectionally with the MES via a network interface.

8. A virtual EAP system for the semiconductor industry, characterized in that, The system includes: The human-computer interaction module is used to provide a visual operation interface and receive entry instructions, data acquisition instructions, and exit instructions for the target device. The MES interaction and control module is used to respond to the inbound instruction by sending an inbound request carrying the current batch identifier to the MES, so as to establish an operation association between the current batch and the target device in the MES. The parsing rules engine module is used to store parsing templates that match the target device, the parsing templates defining rules for extracting data from unstructured result files; The data acquisition service module is used to respond to the data acquisition command, scan the preset output directory of the target device, call the parsing rule engine module to parse the target result files in the output directory to extract measurement data; it is also used to filter out the latest target result files belonging to the current batch by comparing the timestamps generated by the files in the output directory with the time point of the target device's entry command; The step of parsing the target result file in the output directory according to the parsing rules matching the target device includes: Invoke the parsing rule engine to obtain the target device identifier, and load the parsing template associated with the target device identifier; Using the row locators, column locators, or regular expressions defined in the parsing template, the target field is retrieved from the unstructured text of the target result file; Read the value of the target field and convert it into structured data that conforms to the MES interface specification; The output directory is the network shared path corresponding to the target device; The MES interaction and control module is further configured to: send the measurement data to the MES, receive the quality judgment result fed back by the MES based on a preset specification limit, and configure the executable state of the control corresponding to the outbound instruction in the human-machine interaction module according to the quality judgment result; wherein, if the quality judgment result indicates failure, the control corresponding to the outbound instruction is set to a locked state.

9. An electronic device, characterized in that, The electronic device includes: One or more processors; and A memory storing computer program instructions, which, when executed, cause the processor to perform the steps of the method as described in any one of claims 1 to 7.

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