Device and method for measuring microliquid film thickness based on spectral confocal displacement sensor

Abstract

This invention relates to the field of precision measurement and discloses a device and method for measuring the thickness of a microliquid film based on a spectral confocal displacement sensor. The device includes a controller, a motion platform, a fiber-optic probe sensor, a sample tray, and a computer. The method includes: S1, placing the microliquid on the sample tray; S2, setting scanning parameters; S3, performing a single microliquid film thickness measurement; S4, determining the number of measurements; S5, measuring the microliquid on the sample tray according to the number of measurements; S6, obtaining and displaying the microliquid film thickness. This invention utilizes the principle of spectral confocal measurement and employs a multi-sensor data real-time synchronous acquisition and fusion algorithm to overcome the limitations of a single sensor, achieving nanometer-level accuracy in measuring microliquid film thickness, and is suitable for high-resolution detection in extreme scenarios.

Description

Technical Field

[0001] This invention relates to the field of precision measurement, and specifically to a micro-liquid film thickness measurement device and method based on a spectral confocal displacement sensor. Background Technology

[0002] Corrosion is a significant form of material failure. Under atmospheric conditions, the corrosion of equipment or materials is essentially an electrochemical process occurring within a surface water film. Its reaction kinetics and corrosion mechanisms are highly dependent on the surface liquid film providing the ion migration medium and electrochemical environment. Among these parameters, liquid film thickness has the greatest impact on equipment or material corrosion, determining not only whether a corrosion reaction can occur but also directly affecting the corrosion rate and the extent of damage. The surface liquid film of equipment or materials is a dynamic water film that varies with the external climate environment, with its thickness typically fluctuating between several micrometers and several millimeters; such a thickness is also known as a microfilm. In particular, when the surface of equipment or materials is covered by a micrometer-thick liquid film, the distance oxygen must travel from the gas phase to the metal surface is shortened, significantly exacerbating the metal corrosion process. Therefore, accurate measurement of the thickness of the microfilm in equipment or materials is of great significance for assessing the corrosion resistance of supporting materials and surface protection processes, optimizing field corrosion maintenance measures for equipment, and ensuring the safe and reliable operation of equipment.

[0003] Currently, commonly used methods for measuring the thickness of micro-liquid films include optical interferometry, capacitance methods, and laser triangulation. Optical interferometry (such as white light interferometers) primarily analyzes the phase or optical path difference changes of interference fringes to inversely deduce the micro-liquid film thickness. However, it suffers from phase ambiguity when measuring transparent water films, requires strict calibration of the reference plane, and is easily affected by environmental vibrations during dynamic measurements. The capacitance method obtains the initial voltage by adjusting the distance between the capacitance sensor and the metal plate, then calculates the film thickness using a standard curve. This method requires a flat and conductive surface, making it unsuitable for measuring the thickness of liquid films on non-conductive surfaces such as painted surfaces, and its measurement resolution is relatively low (approximately 0.01 mm). Laser triangulation obtains the position of a light spot by focusing the reflected light onto a position-sensitive detector after a laser beam illuminates the liquid film surface. Changes in liquid film thickness cause changes in surface height, resulting in a shift in the angle of the reflected light and a change in the position of the light spot, from which the film thickness is calculated. However, this method has high requirements for the surface morphology of the liquid film, suffers from nonlinear errors due to edge effects, and experiences increased measurement errors due to secondary reflections when measuring transparent water films. Therefore, there is a need for a convenient and highly accurate microfilm thickness measurement device and method. Summary of the Invention

[0004] This invention addresses the problems existing in the aforementioned technologies by proposing a micro-liquid film thickness measurement device and method based on a spectral confocal displacement sensor. This measurement method, based on the principle of spectral dispersive confocal film, possesses advantages such as high precision, wide applicability, and ease of operation. It can achieve wide-range thickness measurement of micro-liquid films corroded on equipment or material surfaces in atmospheric environments, ranging from micrometers to millimeters, with a measurement resolution up to 10⁻⁶. -6 mm.

[0005] This invention discloses a micro-liquid film thickness measurement device based on a spectral confocal displacement sensor, comprising: a controller, a motion platform, a fiber optic probe sensor, a loading disk, and a computer, wherein:

[0006] The controller includes a fast white light source, a light source driver, a spectrometer, a photoelectric signal processor, an optical fiber, and a controller driver interface. The light source driver drives the fast white light source, which is connected to the optical fiber to transmit light signals to a fiber-optic probe sensor. The spectrometer is also connected to the optical fiber, receiving the light signal from the fiber-optic probe sensor. The spectrometer generates a spectrum based on the received light signal and sends it to the photoelectric signal processor. The photoelectric signal processor then calculates the microfilm thickness at the current location measured by the fiber-optic probe sensor based on the spectrum. The controller driver interface connects to a computer for computer control of the light source driver and for receiving the microfilm thickness from the photoelectric signal processor.

[0007] The motion platform consists of a two-dimensional moving device and a motion platform drive interface. The two-dimensional moving device includes a movable x-axis and a movable y-axis. The motion platform drive interface is connected to a computer to realize the movement control of the two-dimensional moving device.

[0008] The fiber optic optical probe sensor consists of two fiber optic optical probe sensors of different precision, both of which are set on the y-axis of the two-dimensional moving device and are connected to the spectrometer and the fast white light source via optical fiber.

[0009] The loading tray is located below the motion platform and is used to hold the micro-liquid;

[0010] The computer controls the operation of the two-dimensional moving device of the motion platform through the motion platform drive interface, and obtains the micro-liquid film thickness measurement result based on the micro-liquid thickness collected by the fiber optic probe sensor at different positions.

[0011] Preferably, the controller is connected to the computer via a USB cable, and the motion platform is connected to the computer via a network cable.

[0012] Preferably, the computer displays the microfilm thickness measurement results graphically.

[0013] Preferably, when the fast white light source emits light, it is coupled into the optical fiber and transmitted to the probe of the fiber optic optical probe sensor through the pigtail of the fiber optic probe sensor. The probe focuses light of different wavelengths at different positions on the optical axis and then illuminates the sample disk. The reflected light is then received and sent to the spectrometer through the optical fiber.

[0014] Preferably, the measurement range of the first fiber optic probe sensor is [0, 0.2] mm, and the measurement range of the second fiber optic probe sensor is [0, 3.5] mm.

[0015] This invention also discloses a method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor, which includes the following steps:

[0016] S1, Place the micro-liquid onto the carrier plate;

[0017] S2, set scan parameters;

[0018] The scanning parameters should include at least the following: the step range and number of steps for the x-axis and y-axis should be set according to the size of the micro-liquid surface to be tested, as well as the sampling frequency during scanning;

[0019] S3, Perform a microfilm thickness measurement;

[0020] The two-dimensional moving device moves according to the set step range and number of steps, driving the first and second fiber optic optical probe sensors to scan and sample the micro-liquid, thereby obtaining the thickness of the micro-liquid film at different sampling points on the carrier disk.

[0021] S4, determine the number of measurements;

[0022] S5, measure the micro-liquid on the sample tray according to the number of measurements;

[0023] Each measurement of the micro-liquid on the disk according to S3 yields a micro-liquid film thickness matrix composed of sampling points from the first fiber-optic optical probe sensor. And the micro-liquid film thickness matrix composed of sampling points from the second fiber-optic optical probe sensor. , The sequence number indicating the number of measurements. .

[0024] S6, obtain and display the microfilm thickness;

[0025] The average value of the microfilm thickness matrix after N measurements is taken, and the microfilm thickness is obtained according to the weights of the two fiber optic probe sensors.

[0026] Preferably, the specific steps for determining the number of measurements in S4 are as follows:

[0027] S41, Obtain the sample standard deviation:

[0028] ;

[0029] ;

[0030] ;

[0031] Where n is the number of sampling points obtained in one scan according to step S3. The thickness of the microfilm measured at each sampling point; This represents the average thickness of the microfilm at each sampling point. The sample variance of the microfilm thickness at the sampling points. This represents the sample standard deviation of the microfilm thickness at the sampling point.

[0032] S42. Determine the sample coefficient of variation.

[0033] ;

[0034] in, The coefficient of variation is the sample variation. The sample standard deviation of the microfilm thickness at the sampling points. This represents the average thickness of the microfilm at each sampling point.

[0035] S43, obtain the number of measurements

[0036] The number of measurements can be calculated based on the sample coefficient of variation, expected confidence level, and relative error limit, or it can be directly looked up in a table.

[0037] Preferably, the number of measurements can be calculated based on the sample coefficient of variation, the expected confidence level, and the relative error limit.

[0038] ;

[0039] in, To measure the number of times, The coefficient of variation is the sample variation. The relative error limit is given by z, which is the quantile of the standard normal distribution and is determined by the confidence level.

[0040] Preferably, S6 obtains and displays the microfilm thickness as follows: the average matrix of the microfilm thickness of the two fiber-optic probe sensors:

[0041] ;

[0042] ;

[0043] in, For the first The microfilm thickness matrix formed by the sampling points of the first fiber-optic optical probe sensor during the second measurement. For the first The microfilm thickness matrix formed by the sampling points of the second fiber optic probe sensor during each measurement, where N is the total number of measurements, A is the average microfilm thickness matrix formed by the sampling points of the first fiber optic probe sensor, and B is the average microfilm thickness matrix formed by the sampling points of the second fiber optic probe sensor.

[0044] Determine the weights:

[0045] , ;

[0046] in, and The weights of the first and second fiber-optic optical probe sensors are respectively. and These are the linear errors of the first and second fiber-optic optical probe sensors, respectively.

[0047] Microfilm thickness matrix:

[0048] ;

[0049] Where t is the thickness of the microfilm, and the unit of the microfilm thickness is mm.

[0050] Preferably, the microliquid on the sample tray in S1 is one or more drops as a sample.

[0051] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0052] 1. Utilizing the principle of spectral confocalization, nanometer-level accuracy in measuring the thickness of micro-liquid films is achieved, making it suitable for high-resolution detection in extreme scenarios.

[0053] 2. A multi-sensor data real-time synchronous acquisition and fusion algorithm is adopted to overcome the limitations of single sensors and enhance the reliability of measurement of liquid film non-uniformity or surface features.

[0054] 3. Non-contact optical measurement avoids sensor corrosion, and the dispersive confocal technology has adaptive resolution capability for the optical properties of transparent / semi-transparent liquid films, making it suitable for corrosive media such as acids and alkalis. Attached Figure Description

[0055] Figure 1 This is a schematic diagram of the overall structure of the micro-liquid film thickness measurement device based on a spectral confocal displacement sensor of the present invention.

[0056] Figure 2This is a schematic diagram of the micro-liquid film thickness measurement device based on a spectral confocal displacement sensor of the present invention;

[0057] Figure 3 This is a flowchart of the micro-liquid film thickness measurement method based on a spectral confocal displacement sensor according to the present invention;

[0058] Figure 4 This is a schematic diagram of the microfilm thickness measurement results according to an embodiment of the present invention. Detailed Implementation

[0059] This invention provides a method and apparatus for measuring the thickness of microliquid films based on a spectral confocal displacement sensor. The spectral confocal displacement sensor utilizes the principle of optical dispersion refocusing to achieve nanometer-level high-precision measurement of microliquid film thickness. This invention extends traditional spectral confocal technology to the field of microliquid films, solving the problem of measuring the thickness of minute liquid films through optical-algorithm-mechanical collaborative optimization. The embodiments of this invention will be described in detail below with reference to the accompanying drawings.

[0060] This invention provides a micro-liquid film thickness measurement device based on a spectral confocal displacement sensor, such as... Figure 1 As shown, it includes a controller 1, a motion platform 2, a fiber optic probe sensor 3, a loading tray 4, and a computer 5, wherein:

[0061] Controller 1 includes a fast white light source, a light source driver, a spectrometer, a photoelectric signal processor, an optical fiber, and a controller driver interface. The light source driver drives the fast white light source, which is connected to the optical fiber to transmit light signals to a fiber-optic probe sensor. The spectrometer is also connected to the optical fiber, receiving the light signal from the fiber-optic probe sensor. The spectrometer generates a spectrum based on the received light signal and sends it to the photoelectric signal processor. The photoelectric signal processor then determines the microfilm thickness at the current location measured by the fiber-optic probe sensor based on the spectrum. The controller driver interface is connected to a computer for computer control of the light source driver and receiving the microfilm thickness data from the photoelectric signal processor. Preferably, the controller and computer are connected via a USB cable.

[0062] The motion platform 2 consists of a two-dimensional moving device and a motion platform drive interface. The two-dimensional moving device includes a movable x-axis and y-axis. The motion platform drive interface is connected to a computer to realize the movement control of the two-dimensional moving device. Preferably, the motion platform is connected to the computer via a network cable.

[0063] The fiber optic optical probe sensor 3 consists of two fiber optic optical probe sensors of different precision, both positioned on the y-axis of the two-dimensional moving device, and both connected to the spectrometer and the fast white light source via optical fibers. For example... Figure 2As shown, when a fast white light source emits light, it is coupled into an optical fiber and transmitted through the pigtail of a fiber-optic optical probe sensor to the probe of the fiber-optic optical probe sensor. The probe focuses light of different wavelengths at different positions on the optical axis and then illuminates the sample disk. The reflected light is then received and transmitted to the spectrometer through the optical fiber. In this embodiment, the measurement range of the first fiber-optic optical probe sensor is 0~0.2mm, and the measurement range of the second fiber-optic optical probe sensor is 0~1.5mm.

[0064] The loading tray 4 is located below the motion platform and is used to hold micro-liquid.

[0065] The computer controls the operation of the two-dimensional moving device of the motion platform through the motion platform drive interface, and obtains the graphical measurement results of the micro-liquid film thickness based on the micro-liquid thickness collected by the fiber optic probe sensor at different positions.

[0066] This invention also discloses a method for measuring the thickness of a microliquid film based on a spectral confocal displacement sensor using the aforementioned device, such as... Figure 3 As shown, it includes the following steps:

[0067] S1, Place the microliquid on the sample tray; the microliquid on the sample tray can be one drop or more drops as a sample.

[0068] S2, Set scanning parameters; Set scanning parameters in the computer, including at least: setting the step range and number of steps for the x-axis and y-axis according to the size of the micro-liquid surface to be measured, as well as the sampling frequency during scanning.

[0069] S3, Perform a microfilm thickness measurement;

[0070] The two-dimensional moving device operates under the control of a computer according to the set step range and number of steps, driving the first and second fiber optic probe sensors to scan and sample the micro-liquid along the motion trajectory, thereby obtaining the micro-liquid film thickness at different positions on the carrier disk.

[0071] S4, determine the number of measurements;

[0072] A single measurement can have a large error. Multiple measurements can eliminate errors introduced by the data sample, but too many measurements can lead to low efficiency. Therefore, it is necessary to determine an appropriate number of measurements. This application uses the sample coefficient of variation to correlate with a preset number of measurements to obtain the final number of tests required. Specifically:

[0073] S41, Obtain the sample standard deviation:

[0074] ;

[0075] ;

[0076] ;

[0077] Where n is the number of sampling points obtained in one scan according to step S3. In this embodiment, since two fiber optic probe sensors are used, the number of sampling points obtained in one scan is the sum of the sampling points of the two fiber optic probe sensors. The thickness of the microfilm measured at each sampling point; This represents the average thickness of the microfilm at each sampling point. The sample variance of the microfilm thickness at the sampling points. This represents the sample standard deviation of the microfilm thickness at the sampling point.

[0078] S42. Determine the sample coefficient of variation.

[0079] ;

[0080] in, The coefficient of variation is the sample variation. The sample standard deviation of the microfilm thickness at the sampling points. This represents the average thickness of the microfilm at each sampling point.

[0081] S43, obtain the number of measurements

[0082] The number of measurements can be obtained from the sample coefficient of variation, the expected confidence level, and the relative error limit.

[0083] ;

[0084] in, To measure the number of times, The coefficient of variation is the sample variation. This represents the relative error limit, where z is the quantile of the standard normal distribution, determined by the confidence level. A commonly used value is: at a 90% confidence level. 95% of the time 99% of the time .

[0085] Alternatively, a table can be used to directly correspond the values. In this embodiment, Table 1 is used to specify the correspondence between the sample coefficient of variation and the number of measurements:

[0086] Table 1

[0087]

[0088] The number of measurements in the table refers to the minimum number of measurements. After performing multiple measurements according to the number of measurements determined in the table, the final microfilm thickness value can be guaranteed to meet the confidence level. =95%, error limit Of course, the number of measurements can be increased beyond the minimum number of measurements, depending on actual needs.

[0089] S5, Measure the micro-liquid on the sample tray according to the number of measurements N;

[0090] Each measurement of the micro-liquid on the disk by S3 yields a micro-liquid film thickness matrix composed of sampling points from the first fiber-optic optical probe sensor. And the micro-liquid film thickness matrix composed of sampling points from the second fiber-optic optical probe sensor. , The sequence number indicating the number of measurements. .

[0091] S6, obtain and display the microfilm thickness;

[0092] The average value of the microfilm thickness matrix after multiple measurements is taken, and the microfilm thickness is obtained according to the weights of the two fiber optic probe sensors.

[0093] Average matrix of microfilm thickness for two fiber-optic probe sensors:

[0094] ;

[0095] ;

[0096] in, For the first The microfilm thickness matrix formed by the sampling points of the first fiber-optic optical probe sensor during the second measurement. For the first The microfilm thickness matrix formed by the sampling points of the second fiber optic probe sensor during each measurement, where N is the total number of measurements, A is the average microfilm thickness matrix formed by the sampling points of the first fiber optic probe sensor, and B is the average microfilm thickness matrix formed by the sampling points of the second fiber optic probe sensor.

[0097] Determine the weights:

[0098] , ;

[0099] in, and The weights of the first and second fiber-optic optical probe sensors are respectively. and These are the linear errors of the first and second fiber-optic optical probe sensors, respectively, and are design parameters.

[0100] Microfilm thickness matrix:

[0101] ;

[0102] Where t is the thickness of the microfilm, and the unit of the microfilm thickness is mm.

[0103] In this embodiment, taking one set of microfluidic film data as an example, the data record is shown in Table 2. The microfluidic film thickness measured by the first fiber optic probe sensor is recorded as CH1-thickness, and the microfluidic film thickness measured by the second fiber optic probe sensor is recorded as CH2-thickness. The value -2147.48 indicates that the point is outside the measurement range.

[0104] Table 2

[0105]

[0106] As shown in the table above, the first fiber optic probe sensor did not sample the disk at this point, while only the second fiber optic probe sensor sampled the microfilm thickness. As the two-dimensional moving device moves along the x and y axes, the first fiber optic probe sensor will subsequently sample the microfilm thickness at the same location, which is not shown here. After multiple scans, the microfilm thicknesses of the first and second fiber optic probe sensors at the same sampling point can be obtained. The average microfilm thickness at the same sampling point is then calculated based on the microfilm thicknesses of the first and second fiber optic probe sensors.

[0107] Based on the linear error σ1 of the first fiber-optic optical probe sensor being 0.12 μm and the linear error σ2 of the second fiber-optic optical probe sensor being 0.40 μm, the weights are obtained. and

[0108] Based on the weights w1 and w2, the thickness t of the microfilm can then be calculated.

[0109] ;

[0110] Based on the calculated microfilm thickness t matrix, and according to the coordinate position of each element in the matrix, software tools can be used to graphically display the microfilm thickness measurement results, such as... Figure 4 As shown.

[0111] The above embodiments are merely descriptions of preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor, characterized in that: The measurement device used in the measurement method includes: a controller, a motion platform, a fiber optic probe sensor, a loading tray, and a computer, wherein: The controller includes a fast white light source, a light source driver, a spectrometer, a photoelectric signal processor, an optical fiber, and a controller driver interface. The light source driver drives the fast white light source, which is connected to the optical fiber to transmit light signals to a fiber-optic probe sensor. The spectrometer is also connected to the optical fiber, receiving the light signal from the fiber-optic probe sensor. The spectrometer generates a spectrum based on the received light signal and sends it to the photoelectric signal processor. The photoelectric signal processor then determines the microfilm thickness at the current location measured by the fiber-optic probe sensor based on the spectrum. The controller driver interface is connected to a computer for computer control of the light source driver and for receiving the microfilm thickness from the photoelectric signal processor. The motion platform consists of a two-dimensional moving device and a motion platform drive interface. The two-dimensional moving device includes a movable x-axis and a movable y-axis. The motion platform drive interface is connected to a computer to realize the movement control of the two-dimensional moving device. The fiber optic optical probe sensor consists of two fiber optic optical probe sensors of different precision, both of which are set on the y-axis of the two-dimensional moving device and are connected to the spectrometer and the fast white light source via optical fiber. The loading tray is located below the motion platform and is used to hold the micro-liquid; The computer controls the operation of the two-dimensional moving device of the motion platform through the motion platform drive interface, and obtains the micro-liquid film thickness measurement result based on the micro-liquid thickness collected by the fiber optic probe sensor at different positions. The measurement method includes the following steps: S1, Place the micro-liquid onto the carrier plate; S2, set scan parameters; The scanning parameters should include at least the following: the step range and number of steps for the x-axis and y-axis should be set according to the size of the micro-liquid surface to be tested, as well as the sampling frequency during scanning; S3, Perform a microfilm thickness measurement; The two-dimensional moving device moves according to the set step range and number of steps, driving the first and second fiber optic optical probe sensors to scan and sample the micro-liquid, and obtain the thickness of the micro-liquid film at different sampling points on the carrier disk. S4, determine the number of measurements; S5, measure the micro-liquid on the sample tray according to the number of measurements; Each measurement of the micro-liquid on the disk according to S3 yields a micro-liquid film thickness matrix composed of sampling points from the first fiber-optic optical probe sensor. And the micro-liquid film thickness matrix composed of sampling points from the second fiber-optic optical probe sensor. , The sequence number indicating the number of measurements. ; S6, obtain and display the microfilm thickness; The average value of the microfilm thickness matrix after N measurements is taken, and the microfilm thickness is obtained according to the weights of the two fiber optic probe sensors.

2. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 1, characterized in that: The controller is connected to the computer via a USB cable, and the motion platform is connected to the computer via a network cable.

3. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 1, characterized in that: The computer displays the microfilm thickness measurement results graphically.

4. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 1, characterized in that: When a fast white light source emits light, it is coupled into an optical fiber and transmitted through the pigtail of the fiber optic sensor to the probe of the fiber optic sensor. The probe focuses light of different wavelengths at different positions on the optical axis and then illuminates the sample disk. The reflected light is then received and sent to the spectrometer through the optical fiber.

5. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 1, characterized in that: The measurement range of the first fiber optic optical probe sensor is [0, 0.2] mm, and the measurement range of the second fiber optic optical probe sensor is [0, 3.5] mm.

6. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 5, characterized in that: The specific steps for determining the number of measurements in S4 are as follows: S41, Obtain the sample standard deviation: ; ; ; Where n is the number of sampling points obtained in one scan according to step S3. The thickness of the microfilm measured at each sampling point; This represents the average thickness of the microfilm at each sampling point. The sample variance of the microfilm thickness at the sampling points. This represents the sample standard deviation of the microfilm thickness at the sampling points. S42. Determine the sample coefficient of variation. ; in, The coefficient of variation is the sample variation. This represents the sample standard deviation of the microfilm thickness at the sampling points. This represents the average thickness of the microfilm at each sampling point. S43, obtain the number of measurements The number of measurements can be calculated based on the sample coefficient of variation, expected confidence level, and relative error limit, or it can be directly looked up in a table.

7. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 6, characterized in that: The number of measurements can be calculated based on the sample coefficient of variation, expected confidence level, and relative error limit. ; in, To measure the number of times, The coefficient of variation is the sample variation. The relative error limit is given by z, which is the quantile of the standard normal distribution and is determined by the confidence level.

8. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 6, characterized in that: The specific steps of S6, including obtaining and displaying the microfilm thickness, are as follows: Average matrix of microfilm thickness for two fiber-optic probe sensors: ; ; in, For the first The microfilm thickness matrix formed by the sampling points of the first fiber-optic optical probe sensor during the second measurement. For the first The microfilm thickness matrix formed by the sampling points of the second fiber optic probe sensor during the measurement, N is the total number of measurements, A is the average microfilm thickness matrix formed by the sampling points of the first fiber optic probe sensor, and B is the average microfilm thickness matrix formed by the sampling points of the second fiber optic probe sensor. Determine the weights: ; in, and The weights of the first and second fiber-optic optical probe sensors are respectively. and These are the linear errors of the first and second fiber-optic optical probe sensors, respectively. Microfilm thickness matrix: ; Where t is the thickness of the microfilm, and the unit of the microfilm thickness is mm.

9. The method for measuring the thickness of a micro-liquid film based on a spectral confocal displacement sensor according to claim 6, characterized in that: The micro-liquid on the sample tray in S1 is one or more drops as a sample.

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